Probe card handling device

Abstract

Disclosed is a probe card handling device which, for logistics automation, can move a probe card into a prober while placing a probe card changer tray separately outside the prober. The probe card handling device according to an aspect of the present invention includes: a main tray which is driven to enter and exit through a probe chamber entrance, and after a probe card is loaded, transfers the probe card to dock with a tester head inside a probe chamber; an OHT which is adjacent to the main tray, and lifts and transfers the probe card from above; and a moving tray on which the probe card from the OHT is loaded at a first position, wherein the loading center of the probe card on the moving tray may be positioned on the transfer line of the OHT.

Description

Probe card handling device

[0001] The present invention relates to a probe card handling device, and more particularly, to a probe card handling device capable of separately placing a probe card changer tray outside a prober and moving a probe card inside a prober for logistics automation.

[0002] A prober is a device used to inspect wafers. In a prober, the wafer is placed against a corresponding probe card and inspected. The probe card is equipped with numerous pins or similar devices for wafer inspection. Current is applied to each semiconductor chip on the wafer, the object of inspection, to verify proper functioning.

[0003] Therefore, in addition to the wafer, which is the object to be inspected, a corresponding probe card must be provided inside the prober.

[0004] A probe card holder is usually required to secure the probe card to the prober.

[0005] These probe cards are usually supplied by the prober manufacturer.

[0006] Probe cards are manufactured to the customer's specifications, which means that the shape of the card holder will vary.

[0007] In the case of direct docking, which is a method of directly providing and fixing a probe card, a probe card holder is not required, but a carrier or tray that can fix the probe card is required.

[0008] Referring to FIG. 1, in a probe card handling device according to the prior art, in order to move a probe card (1) by an AGV (Auto Guided Vehicle) (40), both the part where the probe card (1) is seated and the probe card semi-automatic card replacement tray (Probe card SACC (Semi-Auto Control Changer) tray) must be open, and when the tester head (11) is docked to the prober, both the part where the probe card (1) is seated and the probe card semi-automatic card replacement tray (Probe card SACC (Semi-Auto Control Changer) tray) must be open.

[0009] At this time, the size of the tester head cannot be controlled by the prober manufacturer.

[0010] Referring to Fig. 1, a probe card (1) is placed on the main tray (20) installed in the prober (10) by an AGV (40) or manually by a worker. When the probe card (1) is supplied to the main tray (20), it enters the probe chamber (12), and the main tray (20) rises to couple and fix the probe card (1) to the tester head (11). Thereafter, a wafer is supplied from a wafer cartridge into the probe chamber (12) by a loader (30), and a test is performed. On the side of the probe chamber (12), there is a hinge manipulator (relief device) (50) that can dock the tester head to the prober (10).

[0011] Ultimately, according to the prior art, whether the supply of the probe card is manual or semi-automatic, it is difficult to automatically supply the probe card and achieve rapid supply due to the various restrictions mentioned above.

[0012] The present invention is intended to solve the above problems, and the purpose of the present invention is to provide a probe card handling device that supplies a probe card using an existing OHT (Over Head Hoist Transport), which is one of semiconductor production facilities, and automatically provides it to a tester head in a probe chamber, thereby enabling full automation of probe card supply and thereby ensuring speed of testing.

[0013] The tasks of the present invention are not limited to the tasks mentioned above, and other tasks not mentioned will be clearly understood by those skilled in the art to which the present invention pertains from the description below.

[0014] According to one aspect of the present invention, there is provided a probe card handling device comprising: a main tray that is driven to be able to enter and exit through a probe chamber entrance and exit, loads a probe card, and then transports the probe card so that it is docked to a tester head inside the probe chamber; an OHT adjacent to the main tray that elevates and transports the probe card from an upper side; and a moving tray that receives the probe card from the OHT at a first position; wherein the moving tray is provided with a probe card handling device in which a loading center of the probe card is disposed on a transport line of the OHT, and a loading center of a wafer cassette by the OHT is disposed on a moving line of the OHT together with the loading center of the wafer cassette.

[0015] At this time, a pivoting driving unit may be included to load the moving tray loaded with the probe card from the first position to the main tray at the second position or to move the moving tray from the main tray to the first position.

[0016] At this time, the loading center of the moving tray can be placed on the moving line of the OHT together with the loading center of the wafer cassette by the OHT.

[0017] At this time, the above-mentioned pivoting drive unit can pivot the moving tray.

[0018] At this time, the pivot drive unit can pivot the moving tray around the pivot center point and load it onto the main tray.

[0019] At this time, when the moving tray is rotated and positioned above the main tray, the main tray can rise and support the moving tray and the probe card by settling them.

[0020] At this time, the main tray can move the moving tray and the probe card in a straight line to the center of the tester head inside the probe chamber and then rise to dock the probe card to the tester.

[0021] At this time, the moving tray may include an outside tray that is installed to support the lower portion and moves back and forth only between the first position and the second position.

[0022] According to the above configuration, the probe card handling device according to one aspect of the present invention automatically supplies the probe card to the main tray using an OHT without an AGV or a worker manually supplying the probe card to the main tray, thereby enabling full automatic supply and retrieval of the probe card, thereby enabling rapid provision and inspection of the probe card.

[0023] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the composition of the invention described in the claims.

[0024] Fig. 1 is a plan schematic diagram of a probe card handling device according to the prior art.

[0025] Figure 2 is a plan view of a probe card handling device before supplying a probe card according to one embodiment of the present invention.

[0026] Figure 3 is a plan view of a probe card handling device according to one embodiment of the present invention after supplying a probe card.

[0027] FIG. 4 is a plan view of a probe card handling device according to one embodiment of the present invention after rotation of the probe card.

[0028] FIG. 5 is a front view of a probe card handling device according to one embodiment of the present invention, with the probe card moved inside the probe chamber.

[0029] FIG. 6 is a plan view of a probe card handling device according to one embodiment of the present invention, with a probe card docked to a tester inside a probe chamber.

[0030] FIG. 7 is a front view of a probe card handling device according to one embodiment of the present invention, with the probe card docked to the tester.

[0031] Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily practice the present invention. The present invention may be implemented in various different forms and is not limited to the embodiments described herein. To clearly explain the present invention, parts irrelevant to the description are omitted in the drawings, and the same reference numerals designate identical or similar components throughout the specification.

[0032] The words and terms used in this specification and claims should not be construed as limited to their ordinary or dictionary meanings, but should be interpreted in a way that is consistent with the technical idea of ​​the present invention, in accordance with the principles by which the inventor can define terms and concepts in order to best explain his or her invention.

[0033] Therefore, the embodiments described in this specification and the configurations illustrated in the drawings correspond to a preferred embodiment of the present invention, and do not represent all of the technical ideas of the present invention, so there may be various equivalents and modified examples that can replace the configuration at the time of filing of the present invention.

[0034] In this specification, terms such as “include” or “have” are intended to describe the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0035] When a component is said to be "in front of," "behind," "above," or "below" another component, this includes not only being placed "in front of," "behind," "above," or "below" the other component in direct contact with it, but also if there is another component intervening therebetween. Furthermore, when a component is said to be "connected" to another component, this includes not only being directly connected to one another, but also being indirectly connected to one another, unless there are special circumstances.

[0036] Hereinafter, a probe card handling device according to an embodiment of the present invention will be described with reference to the drawings.

[0037] A probe card handling device according to one embodiment of the present invention may include a stage or probe chamber (112), a tester head, a main tray (120), an OHT, an outside tray (150), a moving tray (160), and a rotation driving unit, as shown in FIGS. 2 to 7.

[0038] Referring to FIGS. 2 to 7, the above probe chamber (112) is a chamber in which, when a wafer is supplied while the probe card (1) is docked, it is sealed to the outside, and then, after temperature conditions, etc. are executed, an actual inspection of the probe card (1) is performed. It is also called a stage.

[0039] The probe chamber (112), in the illustrated embodiment, constitutes a part of the prober (110) and is formed in the shape of a roughly rectangular parallelepiped. Inside, a probe card (1) is docked and fixed to a tester head on the upper side, and a wafer is provided on a stage on the lower side to perform inspection.

[0040] The above tester head is installed on the upper side of the probe chamber (112), and when the probe card (1) is docked and fixed on the lower side, testing is performed in a physically and electrically connected state.

[0041] The above main tray (120), as shown in FIGS. 2 to 7, can be driven to enter and exit through the entrance of the probe chamber (112), load the probe card (1), and then transport the probe card (1) so that it is docked to the tester head inside the probe chamber (112).

[0042] At this time, the main tray (120) can move forward and backward a certain distance. Therefore, it can be driven to enter and exit the probe chamber (112).

[0043] At this time, the main tray (120) can be driven up and down to elevate the probe card (1). Accordingly, it can move inside the probe chamber (112) and then rise to dock the probe card (1) to the tester head.

[0044] The above OHT (Over Head Hoist Transport) can transport the probe card (1) by lifting it from the upper side adjacent to the main tray (120).

[0045] The OHT, traditionally used in semiconductor equipment, is, simply put, a device that automatically lifts and transports wafers from the ceiling in a semiconductor factory. OHTs were developed because wafers must be delivered to the appropriate equipment for each of the eight major semiconductor processes.

[0046] These OHTs move along overhead rails, placing and lifting Front Opening Unified Pods (FOUPs) from each facility and transporting them to other facilities. Typically, FOUP placement involves lowering a long line to place the FOUP on the facility and then retrieving it.

[0047] OHT can transport wafer cassettes, but it can also transport probe cards.

[0048] The above outside tray (150), with reference to FIGS. 2 to 7, is installed to support the lower portion of the moving tray (160), and can only be reciprocated between the first position (P1) and the second position (P2).

[0049] At this time, the outside tray (150) can play a role in supporting the probe card (1) and the main tray (120) outside the probe chamber (112).

[0050] At this time, the outside tray (150) can be placed at the first position (P1), which is the probe card (1) provision position provided by the OHT, and can be provided to the main tray (120), which is the second position (P2), by being rotated by the rotation drive unit.

[0051] In fact, the outside tray (150) plays a role in supporting the moving tray (160).

[0052] Referring to FIGS. 2 to 7, the moving tray (160) loads the probe card (1) from the OHT at the first position (P1), rotates by the rotation drive unit, and is provided to the upper portion of the main tray (120). Then, it can be transported into the probe chamber (112) together with the probe card (1).

[0053] At this time, the moving tray (160) can perform the role of supporting the probe card (1) by directly contacting it.

[0054] Accordingly, the moving tray (160) can be transported while supporting the probe card (1) in direct contact with the probe card (1) until the probe card (1) is lowered from the OHT and then docked and fixed to the tester head.

[0055] Referring to FIGS. 2 to 7, the above-described pivot drive unit can load the moving tray (160) loaded with the probe card (1) from the first position (P1) to the main tray (120) at the second position (P2) by transferring it thereto, or can transfer the moving tray (160) from the main tray (120) to the first position (P1). Of course, at this time, the outside tray (150) can also be transferred by the pivot drive unit.

[0056] At this time, the turning drive unit may apply a driving motor that drives the outside tray (150) around the turning center point (170) on a plane.

[0057] Here, the loading center of the moving tray (160) may be positioned on the movement line of the OHT. That is, when the OHT moves along a rail, it may be positioned on the rail line. By doing so, the probe card (1) can be lowered from the OHT to an accurate position and provided to the upper portion of the moving tray (160) and the outside tray (150) for loading.

[0058] Here, the loading center of the moving tray (160) can be positioned on the movement line of the OHT together with the loading center of the wafer cassette (131) by the OHT. The loading center of the probe card (1) provided to the moving tray (160) and the loading center of the wafer cassette (131) loaded can be designed to be positioned on the OHT movement line.

[0059] Here, the pivoting drive unit pivots the moving tray (160), and the pivoting drive unit pivots the moving tray (160) around the pivot center point (170) to load it onto the main tray (160).

[0060] At this time, when the moving tray (160) rotates and is positioned above the main tray (120), the main tray (120) rises and can support the moving tray (160) and the probe card (1) by settling them.

[0061] At this time, the moving tray (160) may be provided above the main tray (120) at a position about 10 mm higher than the main tray (120).

[0062] Here, the main tray (120) can move the moving tray (160) and the probe card (1) in a straight line to the center of the tester head inside the probe chamber (112) and then rise, thereby docking the probe card (1) to the tester.

[0063] At this time, the second position (P2) of the main tray (120) may not be placed on the movement line of the OHT. Therefore, the design angles of the main tray (120) and the outside tray (150) can be changed so that the probe card (1) can be provided to the main tray (120) at a desired angle.

[0064] Ultimately, by rotating and transporting the probe card (1), it becomes possible to automatically supply the probe card (1) using OHT while avoiding interference with the probe equipment.

[0065] Hereinafter, with reference to the drawings, the operation of a probe card handling device according to one embodiment of the present invention will be described.

[0066] Referring to FIG. 2, a planar configuration diagram of a probe card handling device according to one embodiment of the present invention before supplying a probe card is illustrated.

[0067] In the illustrated embodiment, a movement line of the OHT is set along a horizontal direction, and the probe card loading center point of the outside tray (150) can be placed on this transfer line. In addition, the loading center of the wafer cassette (131) can be placed.

[0068] At this time, the loading center of the probe card (1) and the loading center of the wafer cassette (131) are both located on the movement line of the OHT. Therefore, the OHT can provide the probe card (1) or the wafer cassette (131) to the exact position of the outside tray (150) and the wafer cassette (131) along the movement line. The point where the probe card (1) is loaded onto the outside tray (150) can be the first position (P1).

[0069] Here, the second position (P2), which is the center of the probe card (1) of the main tray (120) that transports the probe card (1) into the probe chamber (112), may not be placed on the transport line of the OHT. This is because the probe card (1) is not directly provided from the OHT to the main tray (120).

[0070] At this time, a hinge manipulator (150) capable of docking the tester head to the prober (110) is installed on the side of the chamber (112) and at the rear of the position where the outside tray (150) is placed.

[0071] Referring to FIG. 3, a planar configuration diagram of a probe card handling device according to one embodiment of the present invention after supplying a probe card is shown.

[0072] In the illustrated embodiment, a probe card (1) is supplied from the OHT at a first position (P1) and is seated on a moving tray (160).

[0073] At this time, the moving tray (160) is also seated on the outside tray (150). That is, in the first position (P1), the OHT can load and seat the probe card (1) onto the moving tray (160) while the moving tray (160) is seated on the outside tray (150).

[0074] Referring to FIG. 4, a planar configuration diagram of a probe card handling device according to one embodiment of the present invention after rotation of the probe card is illustrated.

[0075] In the illustrated embodiment, the outside tray (150) is rotated around the pivot center point (170) by the pivot drive unit to be positioned at the second position (P2) above the main tray (120).

[0076] At this time, the moving tray (160) and the probe card (1) are also rotated together to the second position (P2).

[0077] Referring to FIG. 5, a front view of a probe card handling device according to one embodiment of the present invention is shown with the probe card moved inside the probe chamber.

[0078] In the illustrated embodiment, after turning, the moving tray (160) is positioned about 10 mm higher than the main tray (120), so that the main tray (120) can rise by that amount to settle the moving tray (160) and the probe card (1) together.

[0079] Referring to FIG. 6, a planar configuration diagram of a probe card handling device according to one embodiment of the present invention is shown with a probe card docked to a tester inside a probe chamber.

[0080] After the moving tray (160) and the probe card (1) are placed on the main tray (120), the main tray (120) moves to the center of the head plate inside the stage, i.e., the probe chamber (112). That is, the probe card (1) is positioned below the center of the tester head to be docked.

[0081] Referring to FIG. 7, a front view of a probe card handling device according to one embodiment of the present invention is shown with the probe card docked to the tester.

[0082] In the illustrated embodiment, the main tray is raised about 50 to 100 mm to dock and engage the probe card (1) to the tester head.

[0083] Thereafter, the wafer is fed to the stage via the loader (130) and inspection can be performed. Of course, during this process, the outside tray (150) will remain at the second position (P2) outside the probe chamber (112).

[0084] At this time, depending on the design, the main tray and moving tray may be moved outward during inspection or may remain positioned inside.

[0085] Although the embodiments of the present invention have been described, the spirit of the present invention is not limited to the embodiments presented in this specification, and those skilled in the art who understand the spirit of the present invention will be able to easily propose other embodiments by adding, changing, deleting, or adding components within the scope of the same spirit, but this will also be considered to fall within the spirit of the present invention.

[0086] The present invention can be applied to a prober for inspecting semiconductor devices.

Claims

1. A main tray that is driven to be able to enter and exit through the probe chamber entrance, loads a probe card, and then transports the probe card so that it is docked to the tester head inside the probe chamber; An OHT that transports the probe card by lifting it from the upper side adjacent to the main tray; and A moving tray for loading the probe card from the OHT at the first location; The above moving tray is arranged so that the loading center of the probe card is placed on the transport line of the OHT, and the loading center of the wafer cassette by the OHT is placed on the moving line of the OHT. Probe card handling device.

2. In paragraph 1, A rotary drive unit that loads the moving tray loaded with the probe card at the first position by transferring it to the main tray at the second position or transfers the moving tray from the main tray to the first position. Probe card handling device.

3. In paragraph 2, The above-mentioned pivoting drive unit pivots the moving tray, Probe card handling device.

4. In paragraph 3, The above-mentioned pivot drive unit pivots the moving tray around the pivot center point and loads it onto the main tray. Probe card handling device.

5. In paragraph 4, When the moving tray is rotated and positioned above the main tray, the main tray rises and supports the moving tray and the probe card by settling them. Probe card handling device.

6. In paragraph 5, The main tray moves the moving tray and the probe card in a straight line to the center of the tester head inside the probe chamber, and then rises to dock the probe card to the tester. Probe card handling device.

7. In paragraph 2, The moving tray is installed to support the lower portion, and includes an outside tray that reciprocates only between the first position and the second position. Probe card handling device.

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