Apparatus for removing and detecting particles from mobile device components

Abstract

The present invention provides an apparatus for removing and detecting particles attached to an object which is a component having a hole or a groove to be mounted on a mobile device, the apparatus for removing and detecting particles from mobile device components comprising: a chamber that has an internal space and has a support unit formed in an upper hole onto which an object having a hole or a groove formed therein is mounted or fixed; a first nozzle that is installed on the upper side of the chamber, is arranged on the inner side of a second nozzle so as to extend downwardly further than the second nozzle, and sprays gas sideways via a side spray port while vertically moving along the inside of the hole formed in the inner side of the object mounted or fixed onto the support unit so as to remove particles attached to the inner side of the object; a second nozzle that has a diameter larger than the first nozzle, has the first nozzle penetrated and coupled therein, has a first driving unit installed and connected thereto, and sprays gas downward via a lower spray port while moving in a vertical direction together with the first nozzle so as to prevent the particles separated from the object from escaping outside the chamber; and a recovery unit that is installed in the chamber so as to recover the particles separated from the object.

Description

Particle removal and detection device for mobile device components

[0001] The present invention relates to a particle removal and detection device, and more particularly, to a particle removal and detection device for mobile device parts for removing and detecting particles attached to parts of mobile devices such as mobile phones, smart phones, tablet PCs, PDAs, laptops, and earbuds.

[0002] In cutting-edge industries that involve highly precise manufacturing processes, such as semiconductors, displays, and mobile devices, even minute environmental conditions at the manufacturing site can significantly impact product quality. Therefore, the cleanliness requirements for cleanrooms are becoming increasingly stringent. Similarly, if particles exist at the manufacturing site in cutting-edge industries, they can be transferred to the product during the manufacturing process, causing fatal product defects. These particles accumulate on the ceiling, walls, floors, production and measuring equipment, and various materials at the manufacturing site, and they can also adhere to workers' clothing. In addition, the movement of robots, workers, and products, as well as spatial temperature imbalances, cause airflow, which causes particles accumulated on the surfaces of workers, objects, or adjacent parts to be transferred, contaminating the product.

[0003] For example, referring to Fig. 1a, a VCM (Voice Coil Motor) used for auto-focusing of a camera module mounted on a mobile device (D) drives a lens module (R) mounted on a lens barrel (B) in an up-and-down or left-right direction by an electromagnetic force generated by the interaction of a magnetic field of a permanent magnet and an electric field generated by a current flowing in a coil, thereby performing an auto-focusing function or an anti-shake function. Generally, a hole for mounting a component is formed in the center of the VCM (10) and the lens barrel (B).

[0004] Referring to the photographs of FIGS. 1b and 1c, the VCM (10) can have lower grooves (G) formed on the lower surface for connection with other parts, and the VCM (10) has a first spring (3) and a second spring (7) in the shape of a thin plate for supporting the lens barrel, and when the lens barrel is mounted on the VCM (10), the springs move according to the operation of the lens barrel to support the lens barrel and control the degree of operation of the lens barrel. In the manufacturing process of these parts, many particles are attached to the inner surface of the parts, holes and grooves, springs, coils, etc.

[0005] Referring to FIGS. 1D and 1E, as an example, a VCM (10) may include a cover (1), a retainer (2), a first spring (3), a magnet (4), a coil (5), a carrier (6), a second spring (7), and a holder (8). The first spring (3) and the second spring (7) are respectively coupled to the upper and lower portions of the carrier (6), and the coil (5) is coupled to surround the periphery of the carrier (6). The magnet (4) is arranged to face the coil (5) and is fixed to the retainer (2), and the retainer (2) is coupled to the holder (8), and the carrier (6) is enabled to move elastically in the space between the holder (8) and the retainer (2) by the first spring (3) and the second spring (7).

[0006] After the manufacturing or assembly of mobile device components such as VCMs, lens barrels, microphones, and earbuds is completed, it is structurally very difficult to remove and detect particles attached to the inner surfaces of the components, holes or grooves, springs, coils, etc., and if particles remain on the components, they contaminate the product and cause product defects.

[0007] In the past, particles were removed by laying adhesive tape on the floor and tapping parts on it to detect and count falling particles, immersing the parts in water to remove particles and then drying them, or applying current to the VCM to drive the lens barrel. However, there were problems such as the removal process being cumbersome, product failure, low particle removal efficiency, or difficulty in counting particles.

[0008] Meanwhile, as a prior art for removing particles related to this, U.S. Patent Publication No. 5,253,538 (registered on October 19, 1993) discloses a surface particle counting device using a vacuum suction method in which particles are filtered through a laser diode light source counter and a filter when the sample surface is sucked by an air pump through a scanner.

[0009] The present invention provides a particle removal and detection device for mobile device components that can remove, detect, and count particles attached to the inner surface, holes, grooves, etc. of an object that is a component of a mobile device, and prevent particles separated from the object from spreading outside a chamber and causing contamination, and has excellent particle removal efficiency by removing particles by moving a nozzle vertically or horizontally, and enables intermittent spraying by setting the spray time and spray interval as well as continuous spraying, and detects particles separated under actual use conditions in advance by reproducing the motion of an object to be mounted on a mobile device by spraying in the up, down, and side directions, and determines the level of particles in advance by detecting particles, and has a wide detection range of particles and excellent detection accuracy and efficiency by installing various types of detection means.

[0010] The present invention provides a device for removing and detecting particles attached to an object, which is a component having a hole or groove formed therein and is mounted on a mobile device, the device comprising: a chamber having an internal space, and a support formed in an upper hole on which an object having a hole or groove formed therein is seated or fixed; a first nozzle installed on an upper side of the chamber, arranged on the inside of a second nozzle and extending downwardly from the second nozzle, and moving vertically along the inside of a hole formed on the inside of the object seated or fixed to the support, while injecting gas laterally through a side injection port to remove particles attached to the inside of the object; a second nozzle having a diameter larger than the first nozzle, the first nozzle penetratingly coupled therein, and a first driving unit connected thereto, moving vertically together with the first nozzle, while injecting gas downwardly through a lower injection port to prevent particles separated from the object from escaping to the outside of the chamber; and a recovery unit installed in the chamber to recover particles separated from the object.

[0011] According to the present invention, particles attached to the inner surface, holes or grooves of an object which is a component of a mobile device can be removed, detected and counted, particles separated from the object are prevented from diffusing outside the chamber and causing contamination, particles are removed by moving the nozzle vertically or horizontally, so particle removal efficiency is excellent, continuous spraying is possible as well as intermittent spraying by setting the spraying time and spraying interval, and particles separated under actual use conditions are detected in advance by reproducing the motion of the object to be mounted on the mobile device by spraying in the up and down and side directions, and the level of particles is determined by detecting them in advance, and various types of detection means are installed so that the detection range of particles is wide and the detection accuracy and efficiency are excellent.

[0012] FIG. 1a is a schematic drawing of a mobile device equipped with a conventional VCM and a lens module, FIG. 1b is a photograph of the VCM taken from above, FIG. 1c is a photograph of the VCM taken from below, FIG. 1d is a perspective view of the VCM, and FIG. 1e is an exploded perspective view of the VCM.

[0013] Figures 2a to 2c are schematic diagrams of a particle removal and detection device according to an embodiment of the present invention. Figure 3 is a drawing illustrating an example in which a recovery pipe connected to a third nozzle is introduced into the interior of a chamber together with the third nozzle through a through hole. Figures 4a and 4b are flowcharts describing a particle removal and detection process for a target object according to an embodiment of the present invention.

[0014] FIG. 5a illustrates an example of a self-cleaning step according to the present invention, FIG. 5b illustrates an example of a background value setting step, and FIG. 5c illustrates an example of a particle detection step.

[0015] Fig. 6a is a table showing the background value, which is the number of particles detected in the background value setting step, Fig. 6b is a table showing the detected particle value, which is the number of particles detected in the particle detection step, and Fig. 6c is a table showing the actual particle value calculated in the particle value calculation step.

[0016] During the manufacturing process of small mobile device parts such as VCM (Voice Coil Motor), lens barrel, microphone, and earbud, many particles are attached to the inner surface of the parts, holes or grooves, springs, coils, etc., and after manufacturing or assembly is complete, it is structurally very difficult to remove and detect particles attached to the inner surface of the parts, holes or grooves, springs, coils, etc., and if particles remain on the parts, they may contaminate the product and cause product defects, so it is necessary to remove particles attached to the parts in advance. Among these, the VCM (Voice Coil Motor) used for auto-focusing of camera modules mounted on mobile devices drives the lens barrel up and down or left and right by the electromagnetic force generated by the interaction of the magnetic field of the permanent magnet and the electric field generated by the current flowing in the coil, and has a thin plate-shaped spring to support the lens barrel. When the lens barrel is mounted on the VCM, the spring moves up and down or left and right according to the operation of the lens barrel, and the particles attached to the VCM or the spring can be better separated by the action of the spring. Therefore, it is necessary to reproduce the operation of the part in advance to increase the removal efficiency of particles attached to the part and to verify in advance the level of particles that can be separated when the part operates under actual use conditions.

[0017] Referring to FIGS. 2A to 2C, a particle removal and detection device (900) of a mobile device component according to the present invention relates to a device for removing and detecting particles (P) attached to a target (M), which is a component having a hole or groove formed therein and mounted on a mobile device, and may be configured to include all or part of a chamber (100), a first nozzle (200), a second nozzle (300), a third nozzle (400), a recovery unit (500), an inlet unit (600), an outlet unit (700), and a control unit (800).

[0018] The chamber (100) above provides an internal space in which particles (P) separated from the object (M) are guided to a recovery unit (500), an upper hole (110) is formed through the upper portion, a support portion (120) is formed in the upper hole (110) on which an object (M) having a hole or groove formed therein is settled or fixed, and a through hole (130) is formed through the upper portion or side portion so that a third nozzle (400) can be introduced into and moved within the chamber (100). At this time, the object (M) can be fixed to the support (120) by a fixing member (not shown) such as a magnet, a cylinder, a clamp, etc., and as shown in FIG. 3, the support (120) can be fixedly or detachably coupled to the support (121), and the support (121) can be provided with a plurality of support spaces (121a) capable of settling or fixing a plurality of objects (M), and one or a plurality of through holes (130) can be formed next to the support spaces (121a), and the first nozzle (200) and the second nozzle (300) can be moved in the vertical and horizontal directions by the first driving unit (350) to be described later, and the third nozzle (400) can be moved in the horizontal direction in the through hole (130) by the second driving unit (450) while spraying gas to remove particles (P) from the plurality of objects (M). The removal efficiency of particles (P) can be increased. For example, the support (121) can be formed by forming a plurality of support spaces (121a) in a plurality of rows and columns, and a through hole (130) in the shape of a long hole is formed between the rows or between the rows, so that the third nozzle (400) can be horizontally moved in the front-back and left-right directions within the through hole (130), thereby enabling lower gas injection to an object (M) settled or fixed in the support spaces (121a) forming a plurality of rows and columns.

[0019] The first nozzle (200) is arranged on the upper side of the chamber (100), is formed in a tubular shape, and is provided to have a smaller diameter than the second nozzle (300) and is installed on the inside of the second nozzle (300). At this time, the first nozzle (200) may be installed by being introduced into the inside of the second nozzle (300) from the upper or side of the second nozzle (300). The first nozzle (200) is connected to a first gas supply hose (220) made of a flexible material and sprays gas supplied from the first gas supply hose (220), and the first gas supply hose (220) is connected to an air compressor (C) to receive compressed gas and a first opening / closing valve (230) whose opening / closing is controlled by a control unit (800) and a first air filter (240) may be installed. The first nozzle (200) has a plurality of side spray ports (210) formed on the side so as to be able to spray gas laterally in various directions, and is formed to extend further downward than the second nozzle (300) while being positioned inside the second nozzle (300), and the side spray ports (210) are formed in the extended portion of the lower portion of the first nozzle (200), and moves vertically along the inside of a hole formed inside an object (M) mounted or fixed to a support member (120) so as to spray gas laterally through the side spray ports (210), thereby removing particles (P) attached to the inner surface of the object (M). For example, when the target (M) is a VCM, the first nozzle (200) moves vertically along a hole penetrated through the center of the VCM and sprays gas laterally through a side injection port (210) to separate particles (P) attached to the inner surface of the VCM, and the separated particles (P) fall into the interior of the chamber (100) and are recovered by the recovery unit (500).At this time, when the control unit (800) opens and closes the first opening / closing valve (230) to control the first nozzle (200) to intermittently spray gas, the spring mounted on the VCM is repeatedly operated left and right, and the force of the gas colliding with the particle (P) and the operation of the spring are added to increase the efficiency of removing the particle (P), and by reproducing the operation of the VCM to be mounted on the mobile device in advance, the particle (P) separated under actual use conditions can be detected in advance, and the level of the particle (P) can be determined.

[0020] The second nozzle (300) is arranged on the upper side of the chamber (100), is formed in a tubular shape, has a larger diameter than the first nozzle (200), and the first nozzle (200) is penetrated and connected therein. The second nozzle (300) is connected to a second gas supply hose (320) made of a flexible material and sprays gas supplied from the second gas supply hose (320). The second gas supply hose (320) is connected to an air compressor (C) and receives compressed gas. A second opening / closing valve (330) and a second air filter (340) that are opened and closed by a control unit (800) may be installed. The second nozzle (300) has a lower portion opening (310) formed at the bottom to be able to inject gas downward, and a first driving unit (350) is connected and installed so that the second nozzle (300) and the first nozzle (200) are moved in a vertical direction together, and the gas is injected downward through the lower portion opening (310) around the diameter of the first nozzle (200), thereby preventing particles (P) separated from the object (M) by the first nozzle (200) or the third nozzle (400) from flowing back and escaping to the outside of the chamber (100), and a descending air current is generated inside the chamber (100) to guide particles (P) separated from the object (M) downward within the chamber (100) so that they can be well recovered in the recovery unit (500).

[0021] Since the first gas supply hose (220) connected to the first nozzle (200) and the second gas supply hose (320) connected to the second nozzle (300) are made of flexible materials, the first nozzle (200) and the second nozzle (300) can be moved by the first driving unit (350). At this time, the first driving unit (350) is driven not only in the vertical direction, but can also be driven individually in the left-right direction and front-back direction when removing particles (P) of a plurality of objects (M) placed on the support (121), and various driving devices can be used. For example, the first driving unit (350) can be a robot capable of driving in three axes of the x-axis, y-axis, and z-axis, a lead screw, a ball screw, a linear guide, a belt, etc. At this time, the x-axis, y-axis, and z-axis described above may be axes in the left-right direction, front-back direction, and up-down direction based on the mounting surface space where the object (M) is mounted on the support member (120) on the upper part of the chamber (100).

[0022] In addition, when the target object (M) is a VCM, the second nozzle (300) moves vertically from above the VCM and injects gas downward toward the target object (M) through the lower nozzle (310) over a wider range than the diameter of the first nozzle (200), thereby inducing particles (P) separated from the target object (M) by the gas injection of the first nozzle (200) or the third nozzle (400) to flow back and not escape to the outside of the chamber (100) but to head toward the inside of the chamber (100), and the induced particles (P) are recovered by the recovery unit (500). In addition, when the second nozzle (300) continuously or intermittently sprays gas downward through the lower nozzle (310), the spring mounted on the VCM repeatedly moves up and down, and the force of the gas colliding with the particles (P) and the action of the spring are combined to increase the particle (P) removal efficiency, and by reproducing the action of the VCM to be mounted on the mobile device in advance, particles (P) separated under actual use conditions can be detected in advance to determine the level of particles (P).

[0023] The third nozzle (400) can be positioned so as to be introduced into the chamber (100) through a through hole (130) formed at the top or side of the chamber (100), and is formed in a tubular shape, and has an upper portion opening (410) formed at the end to inject gas upward. At this time, the third nozzle (400) has an end formed in the shape of an "L" or "┗┛" so as to be introduced into the interior through the through hole (130) and inject gas from the lower side toward the upper side of the object (M). The third nozzle (400) is connected to a third gas supply hose (420) made of a flexible material and sprays gas supplied from the third gas supply hose (420). The third gas supply hose (420) is connected to an air compressor (C) and receives compressed gas. A third opening / closing valve (430) whose opening / closing is controlled by a control unit (800) and a third air filter (440) may be installed. The third nozzle (400) is connected to the second driving unit (450) and moves horizontally to inject gas upward through the upper portion opening (410) to remove particles (P) attached to the lower portion of the object (M) or a groove formed at the lower portion of the object (M), and the third nozzle (430) can be driven vertically by the second driving unit (450) so that it can be introduced into or withdrawn from the through hole (130). At this time, the second driving unit (450) can be individually driven in the vertical direction, left-right direction, and front-back direction, and various driving devices can be used. For example, the second driving unit (450) can be a robot capable of driving three axes of the x-axis, y-axis, and z-axis, a lead screw, a ball screw, a linear guide, a belt, etc.

[0024] In addition, when the target (M) is a VCM, when the third nozzle (400) continuously or intermittently sprays gas upward toward the target (M) through the upper portion (410), the spring mounted on the VCM repeatedly moves up and down, and the force of the gas colliding with the particle (P) and the action of the spring are added, so that the particle (P) removal efficiency increases, and by reproducing the action of the VCM to be mounted on the mobile device in advance, the particles (P) separated under actual use conditions can be detected in advance, and the level of the particles (P) can be determined. In this way, when the target object (M) is a VCM, the spring mounted on the VCM is repeatedly operated left and right through the side gas injection of the first nozzle (200), and the spring is repeatedly operated up and down through the lower gas injection of the second nozzle (300) and the upper gas injection of the third nozzle (400), thereby reproducing the operation of the VCM to be mounted on the mobile device in advance, so that particles (P) that may be separated from the VCM when the spring of the VCM is operated due to the use of the camera of the mobile device can be identified in advance.

[0025] The above recovery unit (500) is installed inside the chamber (100) or connected to the inside of the chamber (100) to recover particles (P) separated from the object (M). The recovery unit (500) may include one or more selected from a surface particle counter (510), an air particle sensor (520), and a particle filtration detector (530), and may be operated in whole or in part depending on the type, shape, or size of the object (M). Since particles (P) flying in the internal space of the chamber (100) must be recovered, and particles (P) do not easily gather in one place, the recovery rate of particles (P) may be low with only one recovery means.

[0026] The surface particle counter (510) is installed inside the chamber (100) and detects and counts particles (P) that have fallen inside the chamber (100), and can detect relatively large particles (P), such as fibrous materials such as fluff, which are not easily detected by the air particle sensor (520) or the particle filter detector (530). For example, the detection range of the particle (P) size that can be detected by the surface particle counter (510) may be 5 to 6,000 μm. The air particle sensor (520) is connected to the chamber (100), sucks in particles (P) inside the chamber (100), and detects and counts the particles (P) by irradiating them with a laser beam, and can detect fine particles (P) that are not detected by the surface particle counter (510) and the particle filter detector (530). At this time, the air particle sensor (520) may be installed by introducing a suction pipe (521) into the chamber (100) to suck up particles (P) inside the chamber (100). For example, the detection range of the particle (P) size detectable by the air particle sensor (520) may be 0.1 to 1,000 μm. The particle filtration detector (530) is connected to the chamber (100) and sucks up particles (P) inside the chamber (100) to detect and count the particles (P) collected by the membrane filter (532) installed in the detection pipe (531). At this time, the detection pipe (531) may be introduced and installed into the chamber (100). For example, the detection range of the particle (P) size detectable by the particle filtration detector (530) may be 5 to 3,000 μm.

[0027] Referring to FIG. 3, the recovery unit (500) may further include a recovery pipe (540) connected directly to the third nozzle (400) or through a connecting member, and the recovery pipe (540) is installed to be introduced into the interior of the chamber (100) together with the third nozzle (400) through the through hole (130) of the chamber (100) and moves horizontally together with the third nozzle (400) by the second driving unit (450) so as to recover particles (P) separated from the object (M) at a close range, thereby increasing the recovery efficiency. At this time, the recovery pipe (540) is connected to a recovery hose (not shown) made of a flexible material, and the recovery hose is connected to a recovery pump (not shown) to suck particles (P) inside the chamber (100), and a particle detector (not shown) is connected to the recovery hose to detect and count particles (P). Since the third gas supply hose (420) connected to the third nozzle (400) and the recovery hose connected to the recovery pipe (540) are made of a flexible material, the third nozzle (400) and the recovery pipe (540) can be moved by the second drive unit (350).

[0028] The above inlet section (600) has an inlet valve (620) installed in the inlet pipe (610) connected to the chamber (100), so that when the inlet valve (620) is opened, outside air is introduced into the chamber (100). The above discharge section (700) has a discharge valve (720) and a discharge pump (730) installed in the discharge pipe (710), so that outside air and gas introduced into the chamber (100) are sucked in and discharged to the outside. The control section (800) controls the opening / closing valve installed in the supply hose of each nozzle to adjust the injection time and injection interval of the gas, thereby enabling continuous injection and intermittent injection, operates the first driving unit (350) and the second driving unit (450), and controls the recovery section (500), the inlet section (600), and the discharge section (700). To this end, referring to FIGS. 4a and 4b, the control unit (800) can control to sequentially perform a self-cleaning step (S10), a background value setting step (S20), a particle detection step (S30), a particle value calculation step (S40), and a cleaning end step (S50) in a clean room.

[0029] The above self-cleaning step (S10) is a process in which the control unit (800) opens the inlet valve (620) and the discharge valve (720) and operates the discharge pump (730) and the recovery unit (500) to discharge the outside air that has flowed into the chamber (100) to the discharge unit (700), while cleaning the level of particles (P) detected in the recovery unit (500) so that it becomes lower than a preset standard or so that no particles exist. For example, when the number or concentration (unit: CFM (Cubic Feet per Minute)) of particles (P) detected in the recovery unit (500) becomes lower than the standard, self-cleaning is terminated or self-cleaning is performed for a time period determined in advance in the experiment. The above self-cleaning step (S10) is to clean the inside of the chamber (100) in advance so that foreign substances other than particles (P) attached to the object (M) are not detected in the recovery unit (500) when removing and detecting particles (P) from the object (M), and an example is illustrated in FIG. 5a.

[0030] The above background value setting step (S20) is a process in which, while the object (M) is placed or fixed on the support (120) of the chamber (100), the control unit (800) opens the inlet valve (620) and the discharge valve (720), opens the first opening / closing valve (230) or the second opening / closing valve (330) to inject gas into the chamber (100) from the first nozzle (200) or the second nozzle (300), and operates the discharge pump (730) and the recovery unit (500) to discharge the outside air and gas that have entered the chamber (100) through the discharge unit (700), while setting the number of particles (P) detected in the recovery unit (500) as the background value. At this time, when the gas is injected from the first nozzle (200), the first nozzle (200) is injected in a state where the side injection port (210) formed at the bottom is introduced into the chamber (100). At this time, referring to FIG. 5b as another embodiment, in a state where the object (M) is seated or fixed on the support (120) of the chamber (100), the control unit (800) opens the inlet valve (620), the discharge valve (720), and the third opening / closing valve (430), injects gas from the third nozzle (400) installed inside the chamber (100), and operates the discharge pump (730) and the recovery unit (500) to discharge the outside air and gas introduced into the chamber (100) through the discharge unit (700), while setting the number of particles (P) detected in the recovery unit (500) as a background value. The above background value setting step (S20) is to detect particles (P) contained in the gas supplied from the air compressor (C) in advance and set them as a background value (Background value, N1), and then exclude the background value (N1) from the detection particle value (Detection particle value, N2) when detecting particles (P) for the target object (M), thereby increasing the detection accuracy of particles (P) separated from the target object (M).If the above background value setting step (S20) is performed in a state where there is no target object (M), foreign substances may be generated during the process of mounting the target object (M) in the particle detection step (S30), so it is preferable to perform the background value setting step (S20) in a state where the target object (M) is mounted on the support member (120).

[0031] In addition, the gas pressure sprayed from the third nozzle (400) is weakly adjusted so that the particles (P) attached to the object (M) are not separated, and the third nozzle (400) can be placed directly below the object (M), but it is preferable to perform the operation in a state where the third nozzle (400) is horizontally moved to a position other than directly below the object (M) by the second driving unit (450) so that the particles (P) are not separated from the object (M). Fig. 6a shows an example in which the background value setting step (S20) is performed after the VCM is mounted on the support.

[0032] The above particle detection step (S30) is a process in which the control unit (800) controls the detection of particles (P) separated from the object (M) through the recovery unit (500) by injecting gas from the first nozzle (200) and the second nozzle (300) while the object (M) is mounted on the support unit (120), and derives the detection particle value (N2), which is the number of detected particles (P). Referring to FIG. 5c as another embodiment, the particle detection step (S30) is a process in which the control unit (800) injects gas from the first nozzle (200), the second nozzle (200), and the third nozzle (300) while the object (M) is mounted on the support unit (120), and controls the gas to be discharged by opening the discharge valve (720), thereby detecting particles (P) separated from the object (M) through the recovery unit (500), thereby deriving a detection particle value (N2), which is the number of detected particles (P). The detection particle value (N2) includes the number of particles (P) separated from the object (M) and the number of particles (P) included in the injected gas. At this time, the control unit (800) can operate the first driving unit (350) to vertically move the first nozzle (200) and the second nozzle (200), and can operate the second driving unit (450) to horizontally move the third nozzle (300). In addition, when the support (121) is provided with a plurality of support spaces and a plurality of objects (M) are mounted, the first driving unit (350) can be operated to horizontally move the first nozzle (200) and the second nozzle (200). FIG. 6b is a table showing an example of a detected particle value (N2) detected by performing a particle detection step (S30) in a state where the VCM is mounted on the support.

[0033] The above particle value calculation step (S40) is a process of deriving an actual particle value (N3) separated from the target object (M) by excluding the background value (N1) from the detected particle value (N2). Fig. 6c is a table showing an example of an actual particle value (N3) obtained by excluding the background value (N1) shown in Fig. 6a from the detected particle value (N2) shown in Fig. 6b.

[0034] The above cleaning termination step (S50) is a process in which, if the actual particle value (N3) calculated in the particle value calculation step (S40) is greater than or equal to a preset reference value, the control unit (800) terminates the gas injection of the nozzles and the particle (P) recovery of the recovery unit (500) and terminates the cleaning. The control unit (800) detects particles (P) separated from the object (M) in the recovery unit (500) and checks the number of particles (P), and if the actual particle value (N3) is greater than or equal to a preset reference value, it determines that the particles (P) have been removed from the object (M) to a certain level that does not cause product defects or product contamination, and terminates the cleaning. To this end, the particle (P) cleaning operation is repeatedly performed on a sample of the object (M), and the standard values ​​for the actual particle values ​​(N3) derived by size are preset, and when the actual particle values ​​(N3) for one size or multiple sizes are greater than or equal to each standard value when cleaning the object (M), the cleaning can be terminated. For example, in general, in small parts of mobile devices, particles (P) are detected more as they are smaller in size, and particles (P) with larger sizes may be detected less or not detected at all, so when the actual particle value (N3) for the smallest size, for example, the actual particle value (N3) of 0.1㎛ in size, is greater than or equal to the standard value, the cleaning can be terminated.

[0035] The particle removal and detection device of the mobile device component of the present invention can remove, detect, and count particles attached to the inner surface, holes, grooves, etc. of an object that is a component of a mobile device, and prevent particles separated from the object from diffusing outside the chamber and causing contamination. In addition, the device can detect particles separated under actual use conditions in advance by reproducing the operation of the object to be mounted on the mobile device by spraying in the up-down and side directions, and thus can determine the level of particles in advance, and thus has industrial applicability.

Claims

1. In a device for removing and detecting particles attached to an object, which is a component having a hole or groove formed to be mounted on a mobile device, A chamber having an inner space and a support formed in an upper hole on which an object having a hole or groove formed is placed or fixed; A first nozzle installed on the upper side of the chamber, positioned on the inside of the second nozzle, extending downward from the second nozzle, and moving vertically along the inside of a hole formed on the inside of an object mounted or fixed to the support member to inject gas laterally through a side injection port to remove particles attached to the inside of the object; A second nozzle having a larger diameter than the first nozzle, having the first nozzle penetratingly coupled therein, and having a first drive unit connected thereto, which moves vertically together with the first nozzle and sprays gas downward through the lower nozzle to prevent particles separated from the object from escaping to the outside of the chamber; and A particle removal and detection device for a mobile device component, comprising a recovery unit installed in the chamber to recover particles separated from the target object.

2. In paragraph 1, A particle removal and detection device for mobile device components, further comprising a third nozzle that is introduced into the interior of the chamber through a through hole formed in the upper or side of the chamber and is connected to a second driving unit so as to move horizontally while spraying gas upward through an upper portion opening to remove particles attached to the lower part or groove of the object.

3. In paragraph 2, The above recovery unit is a particle removal and detection device for mobile device components, in which a recovery pipe is connected directly or through a connecting member to the third nozzle, and the recovery pipe is introduced into the interior of the chamber together with the third nozzle through the through hole to recover particles separated from the target object.

4. In paragraph 1, A particle removal and detection device for a mobile device component, wherein the support member comprises a detachably coupled support member, and the support member comprises a plurality of support spaces capable of settling or fixing a plurality of objects.

5. In paragraph 2, The above object is one selected from a VCM (Voice Coil Motor), a lens barrel, a microphone, and an earbud, and when the object is a VCM, the spring mounted on the VCM is repeatedly operated left and right through the side gas injection of the first nozzle, and the spring is repeatedly operated up and down through the lower gas injection of the second nozzle and the upper gas injection of the third nozzle, thereby reproducing the operation of the VCM to be mounted on the mobile device in advance, thereby detecting in advance particles that may be separated from the VCM when the spring of the VCM is operated according to the use of the camera of the mobile device. A particle removal and detection device for mobile device components.

6. In paragraph 1, A particle removal and detection device for mobile device components, wherein the recovery unit comprises one or more selected from a surface particle counter installed inside the chamber and detecting and counting particles that have fallen inside the chamber, an air particle sensor connected to the chamber and sucking in particles inside the chamber to detect and count them, and a particle filtration detector connected to the chamber and sucking in particles inside the chamber to detect and count particles collected from a membrane filter installed in a detection tube.

7. In paragraph 1, A particle removal and detection device for mobile device components, further comprising: an inlet section in which an inlet valve is installed in an inlet pipe connected to the chamber so that outside air flows into the chamber when the inlet valve is opened; an outlet section in which a discharge valve and a discharge pump are installed in an outlet pipe so that outside air and gas flowing into the chamber are sucked in and discharged to the outside; and a control section in which an on-off valve installed in a supply hose of each nozzle is controlled to adjust the gas injection time and injection interval, thereby enabling continuous and intermittent injection.

8. In paragraph 7, The above control unit opens the inlet valve and the outlet valve, operates the outlet pump to discharge the outside air that has entered the chamber into the outlet, and performs a self-cleaning step of cleaning so that the level of particles detected in the recovery unit becomes below a reference value or no particles exist. A background value setting step of opening the inlet valve and the discharge valve while the object is settled or fixed on the support, injecting gas into the chamber from the first nozzle or the second nozzle, operating the discharge pump to discharge outside air and gas through the discharge unit, and setting the number of particles detected in the recovery unit as a background value; A particle detection step for detecting particles separated from the object through the recovery unit by spraying gas from the first nozzle and the second nozzle while the object is mounted on the support, and deriving a detection particle value, which is the number of detected particles; A particle value calculation step for calculating an actual particle value separated from the target object by excluding the background value from the detected particle value, and A particle removal and detection device for a mobile device component that sequentially controls a cleaning termination step of terminating gas injection of the first nozzle and the second nozzle and terminating cleaning when the calculated actual particle value is higher than a preset reference value.

9. In paragraph 7 A third nozzle is further included, which is introduced into the interior of the chamber through a through hole formed on the upper or side of the chamber and is connected to a second driving unit, and moves horizontally to inject gas upward through the upper portion of the nozzle to remove particles attached to the lower part or groove of the object. The above control unit opens the inlet valve and the outlet valve, operates the outlet pump to discharge the outside air that has entered the chamber into the outlet, and performs a self-cleaning step of cleaning so that the level of particles detected in the recovery unit becomes below a reference value or no particles exist. A background value setting step of setting the number of particles detected in the recovery section as a background value while opening the inlet valve and the discharge valve, injecting gas from the third nozzle, and operating the discharge pump to discharge outside air and gas through the discharge section while the object is settled or fixed on the support section; A particle detection step for detecting particles separated from the object through the recovery unit by spraying gas from the first nozzle, the second nozzle, and the third nozzle while the object is mounted on the support, and deriving a detection particle value, which is the number of detected particles; A particle value calculation step for calculating an actual particle value separated from the target object by excluding the background value from the detected particle value, and A particle removal and detection device for a mobile device component that sequentially controls a cleaning termination step of terminating gas injection of the first nozzle, the second nozzle, and the third nozzle and terminating cleaning when the calculated actual particle value is greater than a preset reference value.

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