Power supply stabilization system for industrial automation equipment

Abstract

The present invention relates to a power supply stabilization system for industrial automation equipment in which power is simultaneously supplied by using two non-contact power supply devices connected in parallel to a transfer vehicle used in a semiconductor manufacturing process, so that rated power capacity is reduced to half or less and the service life of a converter can be improved, even if one non-contact power supply device is not in operation due to a failure, the other non-contact power supply device takes full charge of power supply, so that a process can be continuously performed, and in particular, the two non-contact power supply devices can equally supply power by means of a droop method or a communication method.

Description

Power supply stabilization system for industrial automation equipment

[0001] The present invention relates to a power supply stabilization system for industrial automation equipment, and more particularly, to a power supply stabilization system for industrial automation equipment, which simultaneously supplies power using two non-contact power supply devices connected in parallel to a conveying cart used in a semiconductor manufacturing process, thereby reducing the rated power capacity by half or more and improving the life of the converter, and which enables the process to continue even when one non-contact power supply device fails to operate due to a malfunction by having the other non-contact power supply device take charge of the power supply, and in particular, enables the two non-contact power supply devices to equally supply power to each other through a droop method or a communication method.

[0002] Wireless power transmission devices that transmit power contactlessly to a transport cart moving along a track are widely used in clean room environments such as semiconductor, LCD, and manufacturing lines because they have the advantage of not generating particles due to the absence of mechanical contact and can be operated at high speeds.

[0003] A non-contact wireless power transmission device is composed of a power supply track, an AC power supply device that supplies high-frequency current to the power supply track, a pickup device that obtains induced electromotive force from a high-frequency magnetic field generated in the power supply track, and a high-frequency rectifier circuit.

[0004] In semiconductor, LCD, and manufacturing lines, numerous types of transfer devices that receive power from non-contact power transmission devices are in operation, and even a momentary interruption in the power supply can lead to enormous losses, so infinite reliability of non-contact power transmission devices is required.

[0005] To solve this problem, a technology has been developed to connect two different wireless power transmission devices to each other through a switch.

[0006] Korean Patent No. 10-1017407 is a prior art document regarding a "wireless power transmission device with failover functionality." This document proposes a configuration in which two different wireless power transmission devices, each including an AC power supply, are combined via a switch. If one wireless power transmission device fails, a failover controller connects the switch to connect the two wireless power transmission devices in series, allowing the other wireless power transmission device to exclusively handle the entire power of two separate tracks.

[0007] This configuration clearly allows the wireless power transmission device to continue to operate using the power of the other wireless power transmission device even if one of the two separate tracks fails by connecting the two different separate tracks in series with a switching operation. However, it has the problem that the overall power supply will be insufficient if power is supplied to two separate tracks simultaneously with one AC power supply.

[0008] Accordingly, the present applicant has invented a new technology that enables the wireless power transmission device to continue to operate using the power of the other wireless power transmission device even if one of the wireless power transmission devices fails, while also allowing two separate tracks to be covered sufficiently and stably with a single AC power supply.

[0009] The present invention is intended to solve the aforementioned problem, and to provide a power supply stabilization system for industrial automation equipment that can simultaneously supply power using two non-contact power supply devices connected in parallel to a conveying cart used in a semiconductor manufacturing process, thereby reducing the rated power capacity by half or less and improving the life of the converter.

[0010] In addition, the present invention provides a power supply stabilization system for industrial automation equipment that can continue to proceed with a process even if one non-contact power supply device fails to operate due to a malfunction by having another non-contact power supply device take charge of supplying power, and in particular, can enable two non-contact power supply devices to supply power equally to each other through a droop method or a communication method.

[0011] A power supply stabilization system (100) for industrial automation equipment according to one embodiment of the present invention comprises: a first non-contact power supply unit (120) including first and second power supply tracks arranged in parallel with each other, an AC power supply unit for applying AC power to the first and second power supply tracks, respectively; a first voltage control module (121) connected to the first power supply track (1) and controlling the voltage of the AC power applied to the first power supply track (1); a second non-contact power supply unit (130) connected to the second power supply track (2) and including a second voltage control module (131) for controlling the voltage of the AC power applied to the second power supply track (2); and an output terminal of each of the first and second voltage control modules (121, 131), and controlling the output current and droop gain (R) of each output terminal. droop ) and includes a droop-type voltage control unit that controls the output voltage value of each output terminal based on the first and second non-contact power supply units (120, 130), and when the first and second non-contact power supply units (120, 130) are in normal operation, the same power is simultaneously supplied to the current collecting coils connected to the wheels on both sides of the transport cart moving along the first and second power supply tracks (1, 2), and when a failure occurs in one of the non-contact power supply units, the power of the transport cart can be exclusively supplied from the other non-contact power supply unit.

[0012] In one embodiment, the first and second voltage control modules (121, 131) may include a converter that converts AC power supplied to the first and second power supply tracks (1, 2) through the AC power supply unit (110) into DC power.

[0013] In one embodiment, the power supplied through each converter during normal operation of the first and second non-contact power supplies (120, 130) may be characterized in that it does not exceed 50 percent (%) of the allowable rated power capacity of the converter.

[0014] In one embodiment, the droop-type voltage control unit is connected in parallel with the output terminals of each of the first and second voltage control modules (121, 131), and the droop gain (R) is applied to the output current measurement value of each output terminal. droop ) is multiplied to generate a voltage change command signal for changing the output voltage value of each output terminal and transmits it to the first and second voltage control modules (121, 131), and the output voltage values ​​of each of the first and second voltage control modules (121, 131) can be changed based on the voltage change command signal.

[0015] In one embodiment, the present invention may further include a communication method voltage control unit that receives a load current value conducted from each output terminal of the first and second voltage control modules (121, 131) using a communication method, and controls an output voltage value of each output terminal based on a result of comparing the average load current value with the load current value of each output terminal.

[0016] In one embodiment, the communication method voltage control unit may include a current sharing control unit that generates a voltage change command signal for changing the output voltage value of each output terminal based on a comparison value obtained by comparing the average load current value and the load current value of each output terminal, and transmits the voltage change command signal to the first and second voltage control modules (121, 131), and changes the output voltage value of each of the first and second voltage control modules (121, 131) based on the voltage change command signal.

[0017] According to the present invention, by simultaneously supplying power using two non-contact power supply devices connected in parallel to a transfer cart, the rated power capacity can be reduced by half or less, thereby improving the life of the converter.

[0018] In addition, according to the present invention, even if one non-contact power supply device fails to operate, the process can continue by having the other non-contact power supply device take charge of supplying power, and in particular, there is an advantage in that two non-contact power supply devices can supply power equally to each other through a droop method or a communication method.

[0019] In addition, according to the present invention, since converters of the same capacity divide and supply power during normal operation, supplying only up to 50% of the power, the rated power capacity converted by each converter is reduced, so that efficiency can be dramatically improved.

[0020] In addition, according to the present invention, if it is acceptable for the amount of power supplied through one non-contact power supply device to be slightly less than the total required supply, the capacity of each non-contact power supply device can be designed to be reduced to 60% to 70% of the total required supply, thereby having the advantage of reducing design and installation costs.

[0021] Figure 1 is a drawing showing a configuration in which two conventional wireless power transmission devices are connected to each other using a switch.

[0022] FIG. 2 is a drawing schematically showing the configuration of a power supply stabilization system (100) for industrial automation equipment according to one embodiment of the present invention.

[0023] Figure 3 is a schematic diagram showing a circuit configuration in which power to the transport cart is exclusively supplied from the second non-contact power supply unit (130) when the first non-contact power supply unit (120) fails.

[0024] Figure 4 is a diagram briefly showing a circuit state in which the first non-contact power supply unit (120) exclusively supplies power to the transport cart when the second non-contact power supply unit (130) fails.

[0025] Fig. 5 is a graph showing the current distribution characteristic curves for each of the first and second voltage control modules (121, 131) during the droop control of the droop-type voltage control unit.

[0026] Fig. 6 is a schematic diagram showing the circuit configuration of a droop-type voltage control unit according to Fig. 5.

[0027] Figure 7 is a schematic diagram showing the circuit configuration of a communication method voltage control unit.

[0028] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. The present invention may be implemented in various different forms and is not limited to the embodiments described herein.

[0029] In order to clearly explain the present invention, parts that are not related to the description are omitted, and the same reference numerals are used for identical or similar components throughout the specification.

[0030] In addition, in various embodiments, components having the same configuration are described only in representative embodiments using the same symbols, and in other embodiments, only configurations different from the representative embodiments are described.

[0031] Throughout the specification, when a part is said to be "connected" to another part, this includes not only "directly connected" but also "indirectly connected" with other elements intervening. Furthermore, when a part is said to "include" a component, this may mean that the other component is included, rather than excluded, unless otherwise specifically stated.

[0032]

[0033] Figure 1 is a drawing showing a configuration in which two conventional wireless power transmission devices are connected to each other using a switch.

[0034] Referring to Fig. 1, the conventional configuration of two wireless power transmission devices connected to each other with a switch has two different wireless power transmission devices each individually equipped with an AC power supply unit (100, 200), and the two wireless power transmission devices are connected to each other through a switch unit (300) in the center. If one of the wireless power transmission devices malfunctions and is short-circuited, they are connected in series through the conduction of the switch unit (300) in the center. At this time, since the AC power supply unit on the side of the normally operating wireless power transmission device must cover the entire two wireless power transmission devices, if the overall power supply is insufficient, a problem may occur in which normal operation of the transport cart becomes impossible.

[0035] Below, we will look more specifically at a power supply stabilization system (100) for industrial automation equipment that can solve these problems.

[0036]

[0037] FIG. 2 is a drawing schematically showing the configuration of a power supply stabilization system (100) for industrial automation equipment according to one embodiment of the present invention.

[0038] Referring to FIG. 2, a power supply stabilization system (100) for industrial automation equipment according to one embodiment of the present invention is largely configured to include an AC power supply unit (110), a first power supply track (1) and a second power supply track (2) that are arranged in parallel with each other, a first non-contact power supply unit (120), a second non-contact power supply unit (130), and a droop-type voltage control unit.

[0039] Additionally, in one embodiment, a communication-type voltage control unit may be configured instead of a droop-type voltage control unit.

[0040] First, the AC power supply unit (110) applies AC power to each of the first and second non-contact power supply units (120, 130) that apply power to the first power supply track (1) and the second power supply track (2) that are arranged in parallel with each other, and the AC power applied through the AC power supply unit (110) can be applied equally to the first and second non-contact power supply units (120, 130).

[0041] At this time, although one AC power supply unit (110) covers the entire first and second non-contact power supply units (120, 130), since the first and second non-contact power supply units (120, 130) are connected in parallel with each other, each non-contact power supply unit (120, 130) is very stable because it does not exceed 50% of the actual allowable rated power capacity, and thus the efficiency and lifespan of the converter included therein can be improved.

[0042]

[0043] The first and second non-contact power supply units (120, 130) are connected to the track wheels on both sides of a semiconductor transport cart used in a semiconductor manufacturing process and the current collector coils, respectively, so that the first non-contact power supply unit (120) supplies power to one of the track wheels and the second non-contact power supply unit (130) supplies power to the other track wheel.

[0044] At this time, the present invention controls the output voltage of each output terminal of the first and second voltage control modules through a droop-type voltage control unit by a droop gain (R droop ) to distribute the load evenly.

[0045] That is, whereas power was supplied to only one track wheel in the past, the present invention supplies power to both track wheels in parallel at all times, so that a separate failover circuit for monitoring the operation of AC power in real time or controlling switching connections based on this, as in the prior art, is unnecessary, which can also have the advantage of further simplifying the equipment.

[0046] Since the detailed configuration and operation process of each of the first and second non-contact voltage supply units (120, 130) can be applied to conventionally known technologies, a detailed description thereof will be omitted.

[0047] However, the first and second non-contact voltage supply units (120, 130) of the present invention are configured to include first and second voltage control modules (121, 131), which are differentiated from the conventional technology.

[0048] More specifically, the first and second non-contact voltage supply units (120, 130) may each include first and second voltage control modules (121, 131) capable of controlling the output voltage.

[0049] The first voltage control module (121) can be connected to the first power supply track (1) connected to the AC power supply unit (110), and serves to control the voltage of the AC power supplied to the first power supply track (1).

[0050] The second voltage control module (131) can be connected to the second power supply track (2) connected to the AC power supply unit (110), and serves to control the voltage of the AC power supplied to the second power supply track (2).

[0051] In addition, the first and second voltage control modules (121, 131) may each include a converter (CPS Converter) for converting AC power supplied to the first and second power supply tracks (1, 2) through the AC power supply unit (110) into DC power. Each converter may be connected to the + and - poles on the power supply track, respectively, and each output terminal may be connected to a droop-type voltage control unit or a communication-type voltage control unit described below.

[0052] FIG. 3 is a schematic diagram showing a circuit configuration in which the second non-contact power supply unit (130) exclusively supplies power to the transport cart when the first non-contact power supply unit (120) fails, and FIG. 4 is a schematic diagram showing a circuit state in which the first non-contact power supply unit (120) exclusively supplies power to the transport cart when the second non-contact power supply unit (130) fails.

[0053] Referring to FIG. 2, the first and second non-contact power supply units (120, 130) according to the present invention basically serve to simultaneously supply the same power to the current collector coils connected to the wheels on both sides of the transport cart moving along the first and second power supply tracks (1, 2) while being connected in parallel with the AC power supply unit (110) during normal operation.

[0054] If a failure occurs in one of the non-contact power supplies and power supply is not performed normally, the other non-contact power supply takes over the power supply of the corresponding transport vehicle, as shown in FIG. 3 or FIG. 4.

[0055] That is, FIG. 2 shows the first and second non-contact power supply units (120, 130) according to the present invention in a normal operating state (parallel operation mode), FIG. 3 shows a failure of the first non-contact power supply unit (120), and FIG. 4 shows a failure of the second non-contact power supply unit (130).

[0056] In the drawing, the AC power supply unit (110) and the converter are expressed as being short-circuited with each other through a switching operation, but in reality, this may mean that AC power supply is no longer possible due to a failure of the non-contact power supply unit rather than a switching operation.

[0057] In the normal state of Fig. 2, since the current first and second non-contact power supply units (120, 130) are supplying power to the current collector coil within a range not exceeding 50% of the rated power capacity, the converter can also be maintained at 50% or less of the rated power capacity allowed, so that the converter is not overloaded and its lifespan can be extended.

[0058] Additionally, even if one non-contact power supply fails to operate, the remaining non-contact power supply can take over and provide stable power supply.

[0059] On the other hand, if it is assumed that the total power capacity does not need to be supplied in the event of a failure of any one non-contact power supply unit, the designer can design the unit with the specifications of each non-contact power supply unit slightly lower.

[0060] For example, if the power capacity required by the system is 80 kW, and if there is no problem in the transport process of the transport vehicle even if only 50 kW or 60 kW of power is supplied due to an accident or problem, the transport vehicle can be operated sufficiently with two non-contact power supply units with a power capacity of 50 kW or 60 kW.

[0061] Meanwhile, in the present invention, the first and second non-contact power supply units (120, 130) can control their respective outputs in a droop manner or a communication manner so as to supply power equally, and this will be described as follows.

[0062]

[0063] Fig. 5 is a graph showing the current distribution characteristic curves of the first and second voltage control modules (121, 131) during the droop-type control of the droop-type voltage control unit, Fig. 6 is a diagram briefly showing the circuit configuration of the droop-type voltage control unit according to Fig. 5, and Fig. 7 is a diagram briefly showing the circuit configuration of the communication-type voltage control unit.

[0064] Looking at Figures 5 and 6, in Figure 5, the y-axis represents the output-side DC operating voltage, and the x-axis represents the load current. Here, the output terminals of the first and second voltage control modules (121, 131) are connected in parallel with each other, and when the load current increases, the droop-type voltage control unit adjusts the output current of each output terminal and the droop gain (R droop ) is used to perform voltage control by lowering the output voltage value of the output terminal.

[0065] For this purpose, the droop type voltage control unit of the present invention is configured to control the voltage at no load and at rated load (I dc_rated ) The output voltage difference is △V dc_droop This sets the droop slope.

[0066] The voltage measurement error between the first and second voltage control modules (121, 131) is △V dc_setpoint errorAssuming that there is as much as that, the second voltage control module (131) is △V higher than the first voltage control module (121). dc_setpoint error When the output voltage is recognized as high, the output voltage characteristic curve of the actual second voltage control module (131) is △V higher than the output voltage characteristic curve of the first voltage control module (121) as shown in Fig. 5. dc_setpoint error You can see that it appears that low.

[0067] Therefore, the droop-type voltage control unit sets the output voltage of each voltage control module according to the load current flow, and then forms an operating point at which the load current of each voltage control module is balanced.

[0068] At this time, the load current distribution deviation between the first and second voltage control modules (121, 131) is △I dc_max That much happens.

[0069] Based on this, the droop-type voltage control unit of the present invention has a distribution current deviation △I between the allowable first and second voltage control modules (121, 131). dc_max △V, which is the maximum value of the voltage measurement error that can occur dc_setpoint error Considering this, a droop characteristic curve such as that in Fig. 5 can be designed.

[0070] Looking at Fig. 6, the cable in Fig. 6 means a wiring connected between the output terminals of the first and second voltage control modules (121, 131).

[0071] In the drop-type voltage control unit, voltage control is performed by measuring the output voltage of each of the first and second voltage control modules (121, 131).

[0072] In addition, in the droop-type voltage control section, an outer loop is formed, so that the output current (I dc_sec After measuring #0, #1), the droop gain (R) is added to the output current measurement value. droop) is multiplied to generate a voltage change command signal to change the output voltage value of each output terminal.

[0073] The generated voltage change command signal can be transmitted to the first and second voltage control modules (121, 131), respectively, and the first and second voltage control modules (121, 131) change the output voltage value in accordance with the voltage change command signal.

[0074] Accordingly, in this type of droop-type voltage control unit, by adjusting the droop gain value, it is possible to control the output voltage fluctuation range according to the output current, the current distribution deviation between modules, etc.

[0075]

[0076] Next, we will look at a communication-type voltage control unit that is different from the droop-type voltage control unit.

[0077] Figure 7 is a schematic diagram showing the circuit configuration of a communication method voltage control unit.

[0078] Looking at Figure 7, in the previous droop-type voltage control unit, only the output current information of each voltage control module is used to modify the voltage change command signal of each voltage control module, whereas in the communication-type voltage control unit, the load current of another voltage control module is received based on the communication method, and then the average load current (I) is calculated based on this. dc_sec_avg ) is calculated. For this purpose, the communication method voltage control unit is configured to include a current sharing control unit.

[0079] The communication method voltage control unit receives the load current of another voltage control module, calculates an average load current value based on the received load current value, and compares the calculated average load current value with the load current value of each output terminal. The comparison value thus derived is transmitted to the current sharing control unit.

[0080] The current sharing controller generates a voltage change command signal for changing the output voltage value of each output terminal based on a comparison value obtained by comparing the average load current value and the load current value of each output terminal, and transmits the voltage change command signal to the first and second voltage control modules (121, 131), and changes the output voltage value of each of the first and second voltage control modules (121, 131) based on the voltage change command signal.

[0081] That is, when the self-load current size of the voltage control module is smaller than the average load current, the current sharing control unit generates a voltage change command signal to increase the load voltage and transmits it to the corresponding voltage control module. Conversely, when the self-load current size of the voltage control module is larger than the average load current, the current sharing control unit generates a voltage change command signal to decrease the load voltage and transmits it to the corresponding voltage control module, thereby controlling the load current sizes applied to each voltage control module to be the same.

[0082] Meanwhile, both droop and communication-based voltage control methods have their own advantages and disadvantages. For example, droop voltage control has the advantage of eliminating the need for separate communication connections between voltage control modules. However, it has the disadvantage that measurement errors can cause differences in the load currents borne by each voltage control module.

[0083] Voltage control using the communication method has the disadvantage of being more complex than the droop method in terms of connection control with each voltage control module for communication, but on the other hand, it also has the advantage of being able to reduce the load current deviation borne by each voltage control module.

[0084]

[0085] Although the present invention has been described above with reference to preferred embodiments thereof, it will be understood by those skilled in the art that various modifications and changes may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below.

Claims

1. First and second power supply tracks installed in parallel with each other; An AC power supply unit that supplies AC power to the first and second power supply tracks, respectively; A first non-contact power supply unit connected to the first power supply track and including a first voltage control module that controls the voltage of an AC power source applied to the first power supply track; A second non-contact power supply unit connected to the second power supply track and including a second voltage control module that controls the voltage of the AC power applied to the second power supply track; and It is connected to the output terminals of each of the first and second voltage control modules, and the output current and droop gain (R) of each output terminal droop ) as a circuit unit that controls the output voltage value of each output terminal based on the output current measurement value of each output terminal, and is connected in parallel with the output terminals of each of the first and second voltage control modules, and the droop gain (R droop ) is multiplied by a voltage change command signal to change the output voltage value of each output terminal, and then transmits the voltage change command signal to the first and second voltage control modules, and the output voltage value of each of the first and second voltage control modules is changed based on the voltage change command signal. The first and second non-contact power supply units, when operating normally, simultaneously supply the same power to the current collector coils connected to the wheels on both sides of the transport cart moving along the first and second power supply tracks, and in the event of a failure in one of the non-contact power supply units, the other non-contact power supply unit exclusively supplies power to the transport cart. Power supply stabilization system for industrial automation equipment.

2. In paragraph 1, The first and second voltage control modules, A converter that converts AC power supplied to the first and second power supply tracks through the AC power supply unit into DC power; characterized in that it includes; Power supply stabilization system for industrial automation equipment.

3. In paragraph 2, The power supplied through each converter during normal operation of the first and second non-contact power supplies is: Characterized in that it does not exceed 50 percent (%) of the allowable rated power capacity of the converter. Power supply stabilization system for industrial automation equipment.

4. In paragraph 1, A voltage control unit characterized in that it further includes a communication method for receiving a load current value conducted from each output terminal of the first and second voltage control modules using a communication method and controlling the output voltage value of each output terminal based on the result of comparing the average load current value with the load current value of each output terminal. Power supply stabilization system for industrial automation equipment.

5. In paragraph 4, The above communication method voltage control unit is, A current sharing control unit comprising: a voltage change command signal for changing the output voltage value of each output terminal based on a comparison value obtained by comparing the average load current value and the load current value of each output terminal; and a current sharing control unit for generating and transmitting a voltage change command signal to the first and second voltage control modules; and changing the output voltage value of each of the first and second voltage control modules based on the voltage change command signal; Power supply stabilization system for industrial automation equipment.

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