EFEM air conditioning system using VOC filter and desiccant

Abstract

An EFEM air conditioning system using a VOC filter and a desiccant comprises: an EFEM including a transfer chamber which is a space in which an object to be processed is transferred to a process module; a VOC filter system for filtering volatile organic compounds in air that is supplied to the transfer chamber; and a desiccant system for adjusting the humidity of the transfer chamber, wherein the VOC filter system comprises a filter body including a VOC filter for filtering the volatile organic compounds contained in the air that is supplied to the transfer chamber, and the desiccant system comprises a desiccant rotor including an adsorbent for adsorbing moisture in the air that is supplied to the transfer chamber, and a dehumidified air supply line for supplying dehumidified air, discharged from the desiccant rotor, to the transfer chamber.

Description

EFEM air conditioning system with VOC filter and desiccant

[0001] The present invention relates to an EFEM air conditioning system using a VOC filter and a desiccant, and more specifically, to an EFEM air conditioning system using a VOC filter and a desiccant that can facilitate air conditioning in a return room of an EFEM by using a VOC filter system and a desiccant system with a simplified structure.

[0002] Typically, cluster equipment in semiconductor processes uses various chemical gases during the process, and after the process is completed inside the chamber, the gases remain on the wafer.

[0003] In this regard, hazardous gases may be generated during these semiconductor processes, and volatile organic compounds (VOCs) may be generated as a type of hazardous gas, and these volatile organic compounds may harm the health of workers or act as a factor in lowering the quality of products.

[0004] Additionally, when unloading or when gases or fumes remaining inside the FOUP (Front Opening Unified Pod: storage container for semiconductor processes) react with moisture, particles or defects may occur on the wafer.

[0005] The environmental conditions inside the existing EFEM (Equipment Front End Module) are such that the air inside the FAB is supplied through the FFU (Fan Filter Unit) without humidity control, and the humidity in the air and the residual gas on the wafer can easily react, easily creating particles or defects.

[0006] Additionally, the problem of the working environment deteriorating occurs due to the ineffective removal of volatile organic compounds generated during the semiconductor process.

[0007] Meanwhile, some systems are built and used to supply nitrogen (N2) to the wafers to minimize humidity after the process is completed within the wafer chamber while the wafers are waiting. However, this system requires large quantities of nitrogen to be injected into a completely sealed space, resulting in high costs (see Korean Patent No. 10-2106625).

[0008] To solve these problems, there is a growing need for an EFEM air conditioning system that utilizes a VOC filter and desiccant to lower the internal humidity of the transfer room space of an EFEM coupled to a semiconductor manufacturing device and effectively remove volatile organic compounds without using nitrogen.

[0009] The problem to be solved by the present invention is to provide an EFEM air conditioning system using a VOC filter and a desiccant that can facilitate air conditioning in a return room of an EFEM by using a VOC filter system and a desiccant system with a simplified structure.

[0010] The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

[0011] According to one embodiment of the present invention for solving the above problem, an EFEM air conditioning system using a VOC filter and a desiccant includes an EFEM including a return room, which is a space in which a processing object is returned to a process module, a VOC filter system for filtering volatile organic compounds in air supplied to the return room, and a desiccant system for controlling humidity in the return room, wherein the VOC filter system includes a filter body including a VOC filter for filtering volatile organic compounds contained in air supplied to the return room, the desiccant system includes a desiccant rotor including an adsorbent for adsorbing moisture in air supplied to the return room, and a process air supply line for supplying dehumidified air exiting the filter body and the desiccant rotor to the return room.

[0012] According to the present invention, an EFEM air conditioning system using a VOC filter and a desiccant can be provided, which can facilitate air conditioning in a return room of an EFEM by using a VOC filter system and a desiccant system with a simplified structure.

[0013] FIG. 1 is a drawing showing an EFEM air conditioning system using a VOC filter and desiccant according to one embodiment of the present invention.

[0014] FIG. 2 is a drawing showing a filter area and a regeneration area formed on the front of a filter body according to one embodiment of the present invention.

[0015] Figure 3(a) is a drawing showing the air being dehumidified in a desiccant after fume is removed in a VOC filter.

[0016] Figure 3(b) is a drawing showing how fume is removed from a VOC filter after air is dehumidified in a desiccant.

[0017] FIG. 4 is a drawing showing an EFEM air conditioning system using a VOC filter and desiccant according to another embodiment of the present invention.

[0018] FIG. 5 is a drawing showing a filter area, a regeneration area, and a purge area formed on the front of a filter body according to another embodiment of the present invention.

[0019] FIG. 6 is a drawing showing an EFEM air conditioning system using a VOC filter and desiccant according to another embodiment of the present invention.

[0020] According to one embodiment of the present invention for solving the above problem, an EFEM air conditioning system using a VOC filter and a desiccant includes an EFEM including a return room, which is a space in which a processing object is returned to a process module, a VOC filter system for filtering volatile organic compounds in air supplied to the return room, and a desiccant system for controlling humidity in the return room, wherein the VOC filter system includes a filter body including a VOC filter for filtering volatile organic compounds contained in air supplied to the return room, the desiccant system includes a desiccant rotor including an adsorbent for adsorbing moisture in air supplied to the return room, and a process air supply line for supplying dehumidified air exiting the filter body and the desiccant rotor to the return room.

[0021] The present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform a person having ordinary skill in the art to which the present invention pertains of the scope of the invention.

[0022] In this specification, the singular includes the plural unless the context specifically dictates otherwise. As used herein, the terms "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, or operations.

[0023] Referring to FIGS. 1 to 3, an EFEM air conditioning system using a VOC filter and a desiccant according to an embodiment of the present invention will be described. FIG. 1 is a drawing showing an EFEM air conditioning system using a VOC filter and a desiccant according to an embodiment of the present invention. FIG. 2 is a drawing showing a filter area and a regeneration area formed on the front of a filter body according to an embodiment of the present invention.

[0024] Fig. 3(a) is a drawing showing how air is dehumidified in a desiccant after fume has been removed in a VOC filter. Fig. 3(b) is a drawing showing how fume is removed in a VOC filter after air is dehumidified in a desiccant.

[0025] Referring to FIGS. 1 to 3, an EFEM air conditioning system (10) using a VOC filter and a desiccant according to one embodiment of the present invention may include an EFEM (Equipment Front End Module) (20) including a return room (T) in which a processing object is returned to a process module, a VOC filter system (100) that filters fumes containing volatile organic compounds (VOCs) in the return room (T), and a desiccant system that controls humidity in the return room (T).

[0026] EFEM (20) is a standard interface module of process equipment that supplies a workpiece, such as a wafer or mask, in a cassette to a process module in a semiconductor line.

[0027] This EFEM (20) may include a transfer room (T), which is a space where a processing object such as a wafer or mask is transferred to a process module, a transfer unit (ATM Robot) equipped with a robot gripper to transfer a processing object such as a wafer or mask in a cassette to the process module, an aligner (Aligner) that aligns the wafer in a certain direction when transferring the processing object to the process module, a Fan (FFU; Fan Filter Unit) with a built-in air cleaning filter that purifies the air in the transfer room (T) to prevent contamination of the processing object, a Front-Opening Unified Pod (FOUP) (30) that accommodates the processing object to be transferred to the process module, and a Load Port (40) that is arranged on the lower side of the FOUP (30) and supports the FOUP (30).

[0028] The VOC filter system (100) is a system that improves the air quality within the return room (T) by filtering fume containing volatile organic compounds in the return room (T).

[0029] The air inside the return room (T) is first filtered by the VOC filter system (100) and then moves to the desiccant system to remove moisture, thereby preventing the adsorbent of the desiccant system from being contaminated by fumes containing volatile organic compounds.

[0030] In addition, as another form, as shown in Fig. 3(b), by changing the rotor order as needed, air filtered of volatile organic compounds in the VOC filter after removing moisture in the desiccant system can be supplied to the return room (T).

[0031] This VOC filter system (100) may include a filter body (80), a filtering air supply line (180), a first heating device (160), and a first regeneration air supply line (230).

[0032] The filter body (80) includes a VOC filter that filters volatile organic compounds contained in air coming from the return room (T) and air supplied from the clean room, and can be rotated by a driving motor (90).

[0033] Specifically, air within the return room (T) can be supplied to the filter body (80) through a return room air supply line (170) fluidly connected to the return room (T), and the supplied air can be filtered by a VOC filter accommodated in the filter body (80) to remove fumes containing volatile organic compounds from the air.

[0034] Meanwhile, a moisture damper (172) may be installed on the return room air supply line (170), and this moisture damper (172) may control the amount of internal air flowing to the VOC filter in consideration of the amount of harmful gas in the return room (T).

[0035] Meanwhile, as illustrated in FIG. 2, a filter area (S1) in which volatile organic compounds are filtered and a first regeneration area (S2) in which fume containing volatile organic compounds adsorbed to the VOC filter by heat are removed can be formed on the front side of the filter body (80).

[0036] Additionally, a dehumidification zone in which moisture is dehumidified and a second regeneration zone in which moisture is removed from the adsorbent can be formed at the front of the desiccant rotor.

[0037] Specifically, air containing volatile organic compounds can flow into the filter area (S1) and pass through the filter body (80) while the volatile organic compounds are removed, and the VOC filter that has adsorbed the volatile organic compounds through the filtering process can be regenerated while the fume containing the volatile organic compounds is removed by the hot air of the air.

[0038] The filtered air supply line (180) is a line that guides air filtered by the VOC filter to the desiccant rotor (110).

[0039] The first heating device (160) is a device that heats the regeneration air supplied to the first regeneration area (S2) and used to remove volatile organic compounds adsorbed on the VOC filter.

[0040] To this end, the regeneration air that has passed through the second regeneration area of ​​the desiccant rotor (110) can be directed to the first heating device (160) through the second regeneration air supply line (235), and then the first heating device (160) can heat the supplied regeneration air and use it as regeneration air for the VOC filter.

[0041] The first regeneration air supply line (230) can supply regeneration air heated by the first heating device (160) to the first regeneration area (S2) so that fume containing volatile organic compounds adsorbed on the VOC filter can be removed.

[0042] In this regard, the regeneration air that has regenerated the second regeneration area of ​​the desiccant rotor (110) may not reach the temperature required to regenerate the VOC filter. Considering this, the first heating device (160) can heat the regeneration air that has regenerated the desiccant rotor (110).

[0043] At this time, the first heating device (160) does not heat air at a normal room temperature, but heats regenerated air having a relatively high temperature, so only a relatively small amount of heat needs to be applied, thereby enabling energy saving.

[0044] The desiccant system is a system that controls the humidity of the return room (T) that constitutes the EFEM (20).

[0045] In this regard, various chemical gases are used during the semiconductor process, and at this time, gases, etc. remain on the wafer after the process is completed inside the return room. Therefore, when unloading or if the gases or fumes remaining inside the hopper (30) react with moisture, particles or defects may occur on the wafer.

[0046] That is, problems such as reduced yield may occur, such as the generation of particles by the reaction between residual gas on the wafer and the non-humidified air inside the EFEM.

[0047] To solve these problems, it is necessary to control the humidity within the return room (T), and in the case of the present invention, a desiccant can be used to control the humidity.

[0048] Such a desiccant system may include a desiccant rotor (110), a temperature control device (120), a dehumidifying air supply line (190), a second regeneration air supply line (235), and a second heating device (150).

[0049] The desiccant rotor (110) can accommodate an adsorbent that absorbs moisture within the frame.

[0050] That is, the desiccant rotor (110) includes an adsorbent that adsorbs moisture in the filtered air that has passed through the filter body (80) of the VOC filter system (100), and can remove moisture in the air supplied to the return room (T) through this adsorbent.

[0051] Specifically, filtered moist air supplied to the desiccant rotor (110) comes into contact with an adsorbent within the frame, and moisture contained in the moist air is adsorbed on the adsorbent, thereby allowing the moist air to become dehumidified air or dry air.

[0052] This adsorption phenomenon occurs when a force greater than the attractive force between molecules acts on the surface of the adsorbent during condensation, generating heat greater than the heat of condensation. This is called the heat of adsorption and is approximately 1.5 to 2 times the heat of condensation.

[0053] Therefore, the dehumidified air that comes out of the desiccant rotor (110) is heated by the heat of adsorption and can have a high temperature of 40°C or higher.

[0054] Meanwhile, adsorbents include, but are not limited to, silica gel or zeolite.

[0055] In addition, the desiccant rotor (110) can be rotated by a driving motor, and by this rotation, the adsorption portion of the adsorbent that has adsorbed moisture in the air can move to the second regeneration area, where moisture can be removed from the adsorption portion, and by rotation again, the adsorbent can move to the dehumidification area.

[0056] Meanwhile, the filter body (80) and the desiccant rotor (110) can be rotated by separate driving motors, but in some cases, they can be rotated in conjunction by one driving motor (90).

[0057] Specifically, a first pulley (91) may be installed on the rotation axis of the drive motor (90), the filter body (80) may be connected to a second pulley (92) via a belt, and the desiccant rotor (110) may be connected to a third pulley (94) via a belt.

[0058] Additionally, the first pulley (91) and the second pulley (92) can be connected by a belt, and the second pulley (92) and the third pulley ((4)) can be connected by a shaft (93).

[0059] Under this coupling relationship, when the first pulley (91) is rotated by the driving motor (90), the second pulley (92) and the third pulley (94) are rotated, so that the filter body (80) and the desiccant rotor (110) can rotate in conjunction.

[0060] In this case, the number of driving motors is reduced, which allows the device to be miniaturized, making it easier to manufacture, maintain and repair, and reducing manufacturing costs.

[0061] The mechanical form for rotating the filter body (80) and the desiccant rotor (110) by linking them with a single driving motor is not limited to the above-described form, and various mechanical forms can be applied.

[0062] For example, after the filter body (80) and the desiccant rotor (110) are combined to form an integral unit, the filter body (80) and the desiccant rotor (110) can be rotated together by a driving motor.

[0063] The temperature control device (120) is a device that controls the temperature of the dehumidified air dehumidified in the desiccant rotor (110).

[0064] The dehumidified air coming out of the desiccant rotor (110) can be directed to the return room (T), but due to the heat of adsorption, the dehumidified air may have a high temperature that is not suitable for the return room (T).

[0065] Taking these points into consideration, a temperature control device (120) may be installed on the dehumidified air supply line (190) described later, and the temperature control device (120) may lower the temperature of the dehumidified air heading to the return room (T) to a set temperature.

[0066] Meanwhile, temperature control devices (120) may include, but are not limited to, air coolers and cooling coils, heat exchangers, and evaporators.

[0067] The dehumidified air supply line (190) is a line through which dehumidified air coming out of the desiccant rotor (110) flows, and can supply dehumidified air at a set temperature by a temperature control device (120) to the return room (T).

[0068] The second heating device (150) is a device that heats outside air or mixed air so that the heated air becomes regeneration air for the desiccant rotor (110).

[0069] Meanwhile, mixed air can mean air that is a mixture of some outside air and dehumidified air.

[0070] Specifically, the dehumidified air dehumidified in the desiccant rotor (110) can be branched by a branching means (195) installed on the dehumidified air supply line (190), and a portion of the dehumidified air can be directed to the second heating device (150), and the remainder of the dehumidified air can be directed to the return room (T).

[0071] Additionally, a portion of the branched dehumidified air can be directed to a mixing valve (225) installed in front of the second heating device (150).

[0072] At this time, by controlling the mixing valve (225), only the outside air (OA) can pass through the mixing valve (225) to the second heating device (150), or mixed air in which the outside air (OA) and a portion of the dehumidified air are mixed can pass through the mixing valve (225) to the second heating device (150).

[0073] In this way, the use of mixed air is to supply a portion of the dehumidified air mixed with outside air to the second heating device (150) by considering that a portion of the dehumidified air is in a dried state, which can be advantageous for the regeneration of the adsorbent, and the energy consumption for generating regenerated air can be reduced because the temperature is relatively high due to the heat of adsorption, but the amount may be insufficient for regeneration.

[0074] The second regeneration air supply line (235) is a line that guides the regeneration air used for regeneration of the desiccant rotor (110) to the first heating device (160).

[0075] As described above, since heated regeneration air is used for regeneration of the VOC filter, the first heating device (160) only needs to provide relatively little heat, which can lead to energy savings and a simpler system structure.

[0076] Additionally, the EFEM air conditioning system (10) using a VOC filter and desiccant according to one embodiment of the present invention may further include an air quality measurement sensor (60), a temperature and humidity sensor (65), and a control device (50).

[0077] The temperature and humidity sensor (65) is a sensor installed in the return room (T) of the EFEM (20) and measures the temperature and humidity of the return room (T).

[0078] If the humidity measured by the temperature and humidity sensor (65) exceeds the set value, the desiccant system operates to control the humidity in the return room (T).

[0079] The control device (50) is a device that is installed in the EFEM (20) or exists separately from the EFEM (20) and controls the air conditioning process of the EFEM (20).

[0080] In one form, the control device (50) can operate the desiccant system when the humidity measured by the temperature and humidity sensor (65) exceeds the set value, and can also stop the operation of the desiccant system when the humidity reaches the set value.

[0081] Here, the set point may refer to the temperature and humidity at which problems such as reduced yield occur, such as the generation of particles by the reaction of residual gas on the wafer and non-humidified air inside the EFEM.

[0082] Additionally, the control device (50) can control the operating speed of the blower fan (70) according to the concentration of volatile organic compounds measured by the air quality measurement sensor (60).

[0083] Specifically, the control device (50) can increase the operating speed of the blower fan (70) as the concentration of volatile organic compounds measured by the air quality measurement sensor (60) increases, thereby quickly lowering the concentration of volatile organic compounds in the return room.

[0084] In addition, the control device (50) can control the heating degree of the first heating device (160) and the heating degree of the second heating device (150) according to the concentration of volatile organic compounds measured by the air quality measurement sensor (60), and at the same time control the degree to which the driving motor rotates the filter body and the desiccant rotor (110).

[0085] In this regard, the concentration of volatile organic compounds contained in the air coming from the return room (T) may vary depending on the situation, and accordingly, the regeneration speed at which volatile organic compounds are removed from the VOC filter and the time it takes for the regenerated VOC filter to return to the filter area need to be adjusted.

[0086] That is, the higher the concentration of volatile organic compounds in the return room (T), the higher the temperature of the regeneration air needs to be, and the regenerated VOC filter needs to return to the filter area early and be re-introduced into the filtering process.

[0087] Taking these points into consideration, the control device (50) can control the first heating device (160), the second heating device (150), and the drive motor (90) according to the concentration of volatile organic compounds in the return room (T).

[0088] In addition, an EFEM air conditioning system (10) using a VOC filter and a desiccant according to one embodiment of the present invention may further include an air conditioning housing (1), a particle removal filter (5), and an organic matter removal filter (7).

[0089] The air conditioning housing (1) may be a housing that accommodates a VOC filter system and a desiccant system.

[0090] The particle removal filter (5) is installed inside or outside the air conditioning housing (1) and is a filter that removes particles generated during the process in which the adsorbent of the desiccant rotor (110) adsorbs moisture and the process in which the moisture adsorbed on the adsorbent is removed.

[0091] The organic matter removal filter (7) is installed inside or outside the air conditioning housing (1) and is a filter that removes organic matter flowing inside the air conditioning housing (1).

[0092] During the semiconductor process, various organic substances may be generated, and these organic substances may flow inside the semiconductor equipment and may also enter the air conditioning housing.

[0093] Since these organic substances can lower the yield of the semiconductor process and deteriorate the quality of the process environment, a particle removal filter (5) and an organic substance removal filter (7) can be installed to remove the organic substances.

[0094] Meanwhile, the air conditioning housing (1) can be installed and separated from the EFEM (20) through an installation frame or the like, and can also be composed of a plurality of blocks that can be combined and separated from each other.

[0095] When the air conditioning housing (1) is composed of a plurality of blocks, each block can accommodate the respective equipment of the VOC filter system and the desiccant system.

[0096] That is, the particle removal filter (5) and the organic matter removal filter (7) can also be installed and accommodated in a specific block body, and accordingly, when replacing these filters, only the specific block body that accommodates the filter that needs to be replaced can be separated to perform the filter replacement work.

[0097] Therefore, the replacement work of the particle removal filter (5) and the organic matter removal filter (7) can be made easier.

[0098] Referring to FIGS. 4 and 5, an EFEM air conditioning system using a VOC filter and a desiccant according to another embodiment of the present invention will be described. FIG. 4 is a drawing showing an EFEM air conditioning system using a VOC filter and a desiccant according to another embodiment of the present invention. FIG. 5 is a drawing showing a filter area, a regeneration area, and a purge area formed on the front of a filter body according to another embodiment of the present invention.

[0099] Referring to FIGS. 4 and 5, an EFEM air conditioning system (15) using a VOC filter and desiccant according to another embodiment of the present invention may include an EFEM (20), a VOC filter system (117) for filtering fumes in a return room (T), and a desiccant system for controlling humidity in the return room (T).

[0100] EFEM (20) is a standard interface module of process equipment that supplies a workpiece, such as a wafer or mask, in a cassette to a process module in a semiconductor line.

[0101] The VOC filter system (117) is a system that improves the air quality within the return room (T) by filtering fumes containing volatile organic compounds in the return room (T).

[0102] As described above, the air in the return room (T) may first be filtered by the VOC filter system (117) and then moved to the desiccant system to remove moisture, or conversely, the moisture may be removed by the desiccant system and then the fumes may be removed by the VOC filter system (117).

[0103] However, for the convenience of understanding the invention, based on the drawing, it is assumed that the air inside the return room (T) is first filtered by the VOC filter system (117) and then moves to the desiccant system to remove moisture.

[0104] The VOC filter system (117) may include a filter body (115), a filtering air supply line (180), a purge air flow line (240), a branch means (132), a first heating device (160), and a first regeneration air supply line (230).

[0105] The filter body (115) includes a VOC filter that filters volatile organic compounds contained in air coming from the return room (T) and air supplied from the clean room, and can be rotated by a driving motor (90).

[0106] Specifically, air within the return room (T) can be supplied to the filter body (115) through a return room air supply line (170) fluidly connected to the return room (T), and the supplied air can be filtered by a VOC filter accommodated in the filter body (115) to remove fumes containing volatile organic compounds from the air.

[0107] Meanwhile, a moisture damper (172) may be installed on the return room air supply line (170), and this moisture damper (172) may control the amount of internal air flowing to the VOC filter in consideration of the amount of harmful gas in the return room (T).

[0108] Meanwhile, as illustrated in FIG. 4, a filter area (S1) in which volatile organic compounds are filtered, a first regeneration area (S2) in which fumes containing volatile organic compounds adsorbed to the VOC filter by heat are removed, and a first purge area (S3) in which the VOC filter heated during the regeneration process is purged can be formed on the front side of the filter body (115).

[0109] Additionally, a dehumidification zone in which moisture is dehumidified, a second regeneration zone in which moisture is removed from the adsorbent, and a second purge zone in which the adsorbent heated during the regeneration process is purged can be formed at the front of the desiccant rotor.

[0110] Specifically, air containing volatile organic compounds can flow into the filter area (S1) and pass through the filter body (115) while the volatile organic compounds are removed, and the VOC filter containing volatile organic compounds can be regenerated by the hot air of the air through the filtering process while the fume containing the volatile organic compounds is removed, and the VOC filter heated by the hot air during the regeneration process can be purged by relatively low-temperature air and then provided to the first regeneration area (S2) again.

[0111] The filtered air supply line (180) is a line that guides air filtered by the VOC filter to the desiccant rotor (110).

[0112] The purge air flow line (240) is a line through which the purge air used for purging the VOC filter flows, provided to the first purge area (S3) described above.

[0113] The purge air can flow into the first purge area (S3) of the VOC filter, purge the VOC filter, pass through the filter body (115), and then flow into the purge air flow line (240).

[0114] The branching means (132) is a means installed on the purge air flow line (240) to branch the purge air.

[0115] Specifically, the branching means (132) can direct a portion of the purge air toward the first heating device (160) and the remainder of the purge air to the second purge area of ​​the desiccant rotor (110).

[0116] These branching means (132) include three-way valves, branch pipes, dampers, etc., and there is no limitation on their types.

[0117] The first heating device (160) is a device that heats the regeneration air supplied to the first regeneration area (S2) and used to remove volatile organic compounds adsorbed on the VOC filter.

[0118] Specifically, a portion of the purge air branched from the branch means (132) may be directed to the first heating device (160).

[0119] Additionally, the remainder of the purge air coming out of the branch means (132) flows toward the desiccant rotor (110), passes through the second purge area of ​​the desiccant rotor (110), is heated in the second heating device (150), performs a regeneration process in the second regeneration area, and then can be directed to the first heating device (160) along the second regeneration air supply line (235).

[0120] That is, the first heating device (160) can heat the mixed air composed of a portion of the purge air branched from the branching means (132) and the remainder of the purge air that has undergone a regeneration process in the desiccant rotor (110).

[0121] The first regeneration air supply line (230) can supply mixed air heated by the first heating device (160) to the first regeneration area (S2) so that fumes containing volatile organic compounds adsorbed on the VOC filter can be removed.

[0122] In this regard, since a portion of the purge air that has purged the heated VOC filter generally has a temperature of 40°C or higher, the purge air can have a relatively high temperature, and accordingly, the first heating device (160) only needs to apply relatively little heat, which can enable energy savings.

[0123] In addition, since the remainder of the purge air is heated by the second heating device (150), it can have a relatively high temperature, and accordingly, the first heating device (160) only needs to apply relatively little heat, which can save energy.

[0124] That is, the first heating device (160) may use relatively little energy to heat the mixed air.

[0125] The desiccant system is a system that controls the humidity of the return room (T) that constitutes the EFEM (20).

[0126] Such a desiccant system may include a desiccant rotor (110), a temperature control device (120), a dehumidifying air supply line (190), a second regeneration air supply line (235), and a second heating device (150).

[0127] The desiccant rotor (110) can accommodate an adsorbent that absorbs moisture within the frame.

[0128] That is, the desiccant rotor (110) includes an adsorbent that adsorbs moisture in the filtered air that has passed through the filter body (80) of the VOC filter system (100), and can remove moisture in the air supplied to the return room (T) through this adsorbent.

[0129] In addition, the desiccant rotor (110) can be rotated by a driving motor, and by this rotation, the adsorption portion of the adsorbent that has adsorbed moisture in the air can move to a regeneration zone, so that moisture can be removed from the adsorption portion, and by rotation again, the adsorbent can move to the adsorption zone.

[0130] As described above, the filter body (80) and the desiccant rotor (110) can be rotated by separate drive motors, but in some cases, they can be rotated in conjunction by a single drive motor (90) through a belt, pulleys (91, 92, 94) and a shaft (93).

[0131] The temperature control device (120) is a device that controls the temperature of the dehumidified air dehumidified in the desiccant rotor (110) to a set temperature.

[0132] The dehumidified air exiting the desiccant rotor (110) may be directed to the return room (T), but due to the heat of adsorption, the dehumidified air may have a high temperature that is not suitable for the return room (T). Considering this, the temperature control device (120) may lower the temperature of the dehumidified air directed to the return room (T) to reach a set temperature.

[0133] Meanwhile, temperature control devices (120) may include, but are not limited to, air coolers and cooling coils, heat exchangers, and evaporators.

[0134] The dehumidified air supply line (190) is a line through which dehumidified air coming out of the desiccant rotor (110) flows, and can supply dehumidified air at a set temperature by a temperature control device (120) to the return room (T).

[0135] The second heating device (150) is a device that heats the remainder of the purge air that has passed through the second purge area after being branched from the branching means (132).

[0136] The second regeneration air supply line (235) is a line that guides the remainder of the purge air that has passed through the second regeneration area after being heated in the second heating device (150) to the first heating device (160).

[0137] Since the purge air heated within the system is used as regenerative air in this way, the second heating device (150) only needs to provide relatively little heat, which can lead to energy savings and a simpler system structure.

[0138] Additionally, an EFEM air conditioning system (10) using a VOC filter and a desiccant according to another embodiment of the present invention may further include an air quality measurement sensor (60), a temperature and humidity sensor (65), and a control device (50).

[0139] The temperature and humidity sensor (65) is a sensor installed in the return room (T) of the EFEM (20) and measures the temperature and humidity of the return room (T).

[0140] If the humidity measured by the temperature and humidity sensor (65) exceeds the set value, the desiccant system operates to control the humidity in the return room (T).

[0141] The control device (50) is a device that is installed in the EFEM (20) or exists separately from the EFEM (20) and controls the air conditioning process of the EFEM (20).

[0142] In one form, the control device (50) can operate the desiccant system when the humidity measured by the temperature and humidity sensor (65) exceeds the set value, and can also stop the operation of the desiccant system when the humidity reaches the set value.

[0143] Here, the set point may refer to the temperature and humidity at which problems such as reduced yield occur, such as the generation of particles by the reaction of residual gas on the wafer and non-humidified air inside the EFEM.

[0144] Additionally, the control device (50) can control the operating speed of the blower fan (70) according to the concentration of volatile organic compounds measured by the air quality measurement sensor (60).

[0145] Specifically, the control device (50) can increase the operating speed of the blower fan (70) as the concentration of volatile organic compounds measured by the air quality measurement sensor (60) increases, thereby quickly lowering the concentration of volatile organic compounds in the return room.

[0146] In addition, the control device (50) controls the heating degree of the first heating device (160) for the mixed air (mixed air of a part of the purge air branched by the branching means (132) and the remainder of the purge air that has passed through the second regeneration area) and the heating degree of the second heating device (150) for the remainder of the purge air according to the concentration of the volatile organic compound measured by the air quality measuring sensor (60), and at the same time, can control the degree to which the driving motor rotates the filter body and the desiccant rotor (110).

[0147] In this regard, the concentration of volatile organic compounds contained in the air coming from the return room (T) may vary depending on the situation, and accordingly, the regeneration speed at which volatile organic compounds are removed from the VOC filter and the time it takes for the regenerated VOC filter to return to the filter area need to be adjusted.

[0148] That is, the higher the concentration of volatile organic compounds in the return room (T), the higher the temperature of the regeneration air needs to be, and the regenerated VOC filter needs to return to the filter area early and be re-introduced into the filtering process.

[0149] Taking these points into consideration, the control device (50) can control the first heating device (160), the second heating device (150), and the drive motor (90) according to the concentration of volatile organic compounds in the return room (T).

[0150] In addition, an EFEM air conditioning system (10) using a VOC filter and a desiccant according to another embodiment of the present invention may further include an air conditioning housing (1), a particle removal filter (5), and an organic matter removal filter (7).

[0151] The air conditioning housing (1) may be a housing that accommodates a VOC filter system and a desiccant system.

[0152] The particle removal filter (5) is installed inside or outside the air conditioning housing (1) and is a filter that removes particles generated during the process in which the adsorbent of the desiccant rotor (110) adsorbs moisture and the process in which the moisture adsorbed on the adsorbent is removed.

[0153] The organic matter removal filter (7) is installed inside or outside the air conditioning housing (1) and is a filter that removes organic matter flowing inside the air conditioning housing (1).

[0154] During the semiconductor process, various organic substances may be generated, and these organic substances may flow inside the semiconductor equipment and may also enter the air conditioning housing.

[0155] Since these organic substances can lower the yield of the semiconductor process and deteriorate the quality of the process environment, a particle removal filter (5) and an organic substance removal filter (7) can be installed to remove the organic substances.

[0156] Meanwhile, the air conditioning housing (1) can be installed and separated from the EFEM (20) through an installation frame or the like, and can also be composed of a plurality of blocks that can be combined and separated from each other.

[0157] When the air conditioning housing (1) is composed of a plurality of blocks, each block can accommodate the respective equipment of the VOC filter system and the desiccant system.

[0158] That is, the particle removal filter (5) and the organic matter removal filter (7) can also be installed and accommodated in a specific block body, and accordingly, when replacing these filters, only the specific block body that accommodates the filter that needs to be replaced can be separated to perform the filter replacement work.

[0159] Therefore, the replacement work of the particle removal filter (5) and the organic matter removal filter (7) can be made easier.

[0160] Above, an EFEM air conditioning system using a VOC filter and a desiccant according to another embodiment of the present invention has been described. Hereinafter, with reference to FIG. 6, an EFEM air conditioning system using a VOC filter and a desiccant according to another embodiment of the present invention will be described. FIG. 6 is a drawing showing an EFEM air conditioning system using a VOC filter and a desiccant according to another embodiment of the present invention.

[0161] Referring to FIG. 6, an EFEM air conditioning system (250) using a VOC filter and a desiccant according to another embodiment of the present invention may further include an outside fan (280) and an air pressure sensor (270) in addition to the EFEM air conditioning system (15) using the VOC filter and desiccant described above.

[0162] The outside air fan (280) is a fan that introduces outside air (E) into the return room (T), thereby forming a positive pressure inside the return room (T) of the EFEM (260), thereby preventing external impurities, etc. from flowing into the return room (T).

[0163] The air pressure sensor (270) is a sensor that measures the air pressure in the return room (T), and through this, it is possible to check whether the return room (T) maintains positive pressure.

[0164] In this regard, when the air pressure measured by the air pressure sensor is below the standard value due to a problem such as the device stopping operation during the operation of the desiccant system and VOC filter system, causing only a portion of the dehumidified air to return to the return room, or the dehumidified air to leak outside, the outside fan (280) can be operated to cause the air pressure to reach the standard value.

[0165] Meanwhile, although not shown in the drawing, in the case of the above-described embodiment and other embodiments of the present invention, an air pressure sensor and an external fan may be applied to perform the process of controlling the air pressure within the return room.

[0166] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

[0167] The present invention is an EFEM air conditioning system using a VOC filter and a desiccant, and more specifically, it has industrial applicability because it can facilitate air conditioning in a return room of an EFEM using a VOC filter system and a desiccant system with a simplified structure.

Claims

1. EFEM (Equipment Front End Module) including a return room where the object to be processed is returned to the process module; A VOC filter system that filters volatile organic compounds (VOCs) of the air supplied to the above return room; and Includes a desiccant system for controlling the humidity of the above return room, The above VOC filter system, It includes a filter body including a VOC filter that filters volatile organic compounds contained in the air supplied to the return room, The above desiccant system, A desiccant rotor comprising an adsorbent that adsorbs moisture in the air supplied to the above return room, An EFEM air conditioning system using a VOC filter and a desiccant, comprising a treated air supply line that supplies air passing through the filter body and desiccant rotor to the return chamber.

2. In paragraph 1, An EFEM air conditioning system using a VOC filter and desiccant, wherein air is filtered of volatile organic compounds in the filter body and then moisture is removed in the desiccant rotor.

3. In paragraph 1, An EFEM air conditioning system using a VOC filter and a desiccant, wherein the air is filtered of volatile organic compounds in the filter body after moisture is removed in the desiccant rotor.

4. In paragraph 1, An EFEM air conditioning system using a VOC filter and a desiccant, wherein the filter body and the desiccant rotor are rotated in conjunction with a driving motor.

5. In paragraph 1, An air conditioning housing accommodating the VOC filter system and the desiccant system; A particle removal filter installed inside or outside the air conditioning housing to remove particles generated during the process of the adsorbent absorbing the moisture and the process of removing the moisture adsorbed on the adsorbent; and An EFEM air conditioning system using a VOC filter and a desiccant, the system further comprising an organic matter removal filter installed inside or outside the air conditioning housing to remove organic matter within the air conditioning housing.

6. In paragraph 5, The above air conditioning housing is composed of a plurality of blocks that can be combined and separated from each other, An EFEM air conditioning system using a VOC filter and a desiccant, wherein the particle removal filter and the organic matter removal filter are each accommodated in one of the plurality of blocks.

7. In paragraph 1, Further comprising an air conditioning housing accommodating the VOC filter system and the desiccant system; The above EFEM is, A temperature and humidity sensor installed in the above return room to measure the temperature and humidity of the above return room; An air quality measuring sensor that measures the air quality within the return room; and Includes a blower fan that supplies air within the return room to the air conditioning housing, An EFEM air conditioning system using a VOC filter and a desiccant, further comprising a control device that controls the operating speed of the blower fan according to at least one of the concentration of the volatile organic compound measured by the air quality measuring sensor and the humidity measured by the temperature and humidity sensor.

8. In paragraph 2, On the front side of the filter body, a filter area where the volatile organic compounds are filtered and a first regeneration area where the volatile organic compounds adsorbed to the VOC filter are removed by heat are formed. On the front side of the desiccant rotor, a dehumidification area where the moisture is dehumidified and a second regeneration area where the moisture is removed from the adsorbent are formed. The above VOC filter system, A filtered air supply line that guides air filtered by the VOC filter to the desiccant rotor; A first heating device for heating regeneration air supplied to the first regeneration area and used to remove the volatile organic compounds adsorbed on the VOC filter; and Further comprising a first regeneration air supply line for supplying the regeneration air heated by the first heating device to the first regeneration area, The above desiccant system, A branching means installed on the above-mentioned processing air supply line to branch the dehumidified air; A mixing valve that opens a passage for a mixture of a portion of the dehumidified air branched by the branching means and the outside air, or blocks a portion of the dehumidified air and opens a passage for the outside air; A second heating device for heating the mixed air or outside air coming out of the mixing valve; and Further comprising a second regeneration air supply line for guiding the mixed air or external air that has passed through the second regeneration area after being heated in the second heating device to the first heating device, An EFEM air conditioning system using a VOC filter and a desiccant, wherein the regenerated air is the mixed air or outside air.

9. In paragraph 2, On the front of the filter body, a filter area where the volatile organic compounds are filtered, a first regeneration area where the volatile organic compounds adsorbed to the VOC filter by heat are removed, and a first purge area where the VOC filter heated during the regeneration process is purged are formed. In the front of the desiccant rotor, a dehumidification zone in which the moisture is dehumidified, a second regeneration zone in which the moisture is removed from the adsorbent, and a second purge zone in which the adsorbent heated during the regeneration process is purged are formed. The above VOC filter system, A purge air flow line provided to the first purge area and through which purge air used for purging the VOC filter flows; A branching means installed on the above purge air flow line to branch the purge air; A first heating device for heating regeneration air supplied to the first regeneration area and used to remove the volatile organic compounds adsorbed on the VOC filter; and Further comprising a first regeneration air supply line for supplying the regeneration air heated by the first heating device to the first regeneration area, The above desiccant system, A second heating device for heating the remainder of the purge air that has passed through the second purge area after being branched from the branch means; and Further comprising a second regeneration air supply line for guiding the remainder of the purge air that has passed through the second regeneration area after being heated in the second heating device to the first heating device; An EFEM air conditioning system using a VOC filter and a desiccant, wherein the regeneration air is a mixed air of a portion of the purge air that has flowed to the first heating device by being branched by the branching means and the remainder of the purge air that has passed through the second regeneration area.

10. In paragraph 9, The above EFEM is, A temperature and humidity sensor installed in the above return room to measure the temperature and humidity of the return room; and Further comprising an air quality measuring sensor that measures the air quality within the return room, An EFEM humidity control system using a desiccant, further comprising a control device that controls the heating degree of the first heating device for the regeneration air and the heating degree of the second heating device for the remainder of the purge air based on at least one of the concentration of the volatile organic compound measured by the air quality measuring sensor and the humidity measured by the temperature and humidity sensor, and at the same time controls the degree to which the driving motor rotates the filter body and the desiccant rotor.

11. In paragraph 1, An outside air fan that introduces outside air into the above return room; An air pressure sensor that measures the air pressure in the above return room; and An EFEM air conditioning system using a VOC filter and a desiccant, further comprising a control device that operates the outside air fan to cause the air pressure to reach the reference value when the air pressure measured by the air pressure sensor is below the reference value due to the operation of the desiccant system and the VOC filter system.

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