Compliance unit

Abstract

A compliance unit (10) comprises: a base member (12); a table support part (14); a compliance mechanism (16); and a table unit (18). The base member is provided with a second fluid pressure cylinder (112) that, by pressing a second pressing part (114) toward the table unit in a state in which the table support part is returned to an origin position with respect to the base member by a first fluid pressure cylinder (94), causes the table unit to return from an inclined posture in which a table plate (82) of the table unit is inclined with respect to the XY plane to an origin posture in which the table plate is along the XY plane.

Description

Compliance Unit

[0001] The present disclosure relates to a compliance unit.

[0002] For example, Japanese Patent Application Laid-Open No. 2002-172582 discloses a compliance unit including a base member, a table support, a compliance mechanism, and a table unit. The table support is movable in the X and Y directions relative to the base member. The compliance mechanism is interposed between the base member and the table support so as to be movable in the X and Y directions relative to the base member and the table support. The table unit is tiltable relative to the table support.

[0003] It would be desirable to provide a better compliant unit.

[0004] The present invention aims to solve the above-mentioned problems.

[0005] an XY plane in which the Y direction is perpendicular to the X direction; a compliance mechanism interposed between the base member and the table support portion so as to be movable in the X and Y directions relative to the base member and the table support portion; and a table unit provided on the table support portion so as to be tiltable around an imaginary line extending along the X direction or the Y direction, wherein the base member is provided with a first fluid pressure cylinder that presses a first pressing portion toward the table support portion to return the table support portion to an origin position relative to the base member, and a second fluid pressure cylinder that presses a second pressing portion toward the table unit with the table support portion returned to the origin position relative to the base member by the first fluid pressure cylinder, thereby returning the table unit from an inclined position in which a table plate of the table unit is inclined with respect to the XY plane to an origin position in which the table plate is along the XY plane.

[0006] According to the present invention, a better compliance unit can be provided.

[0007] The above objects, features and advantages will be easily understood from the following description of the embodiments, which will be described with reference to the accompanying drawings.

[0008] FIG. 1 is a perspective view of a compliance unit. FIG. 2 is an exploded perspective view of the compliance unit. FIG. 3 is an exploded perspective view of the compliance unit. FIG. 4 is a longitudinal cross-sectional view of the compliance unit. FIG. 5 is a transverse cross-sectional view taken along line V-V in FIG. 4. FIG. 6 is an explanatory diagram of the operation of the compliance unit. FIG. 7 is an explanatory diagram of the operation of the compliance unit. FIG. 8 is an explanatory diagram of the operation of the compliance unit.

[0009] In the compliance unit, a first fluid pressure cylinder and a second fluid pressure cylinder may be provided on the base member. The first fluid pressure cylinder presses a first pressing portion toward the table support portion, thereby returning the table support portion to an origin position relative to the base member. The second fluid pressure cylinder presses a second pressing portion toward the table unit, thereby returning the table unit from an inclined position to the origin position.

[0010] In such a compliance unit, the table unit is provided on the table support portion. Therefore, if the second pressing portion is pressed against the table unit by the second fluid pressure cylinder while the table support portion is displaced from the origin position relative to the base member, it may be impossible to return the table support portion to the origin position relative to the base member. An object of the present disclosure is to reliably return the table support portion to the origin position relative to the base member.

[0011] A compliance unit 10 according to one embodiment of the present invention will be described with reference to the drawings. The compliance unit 10 is a device for correcting misalignment (misalignment) during the assembly of a workpiece, for example. Specifically, as shown in FIG. 1 , in the compliance unit 10, for example, a robot hand (not shown) is connected to a base member 12, and a chuck member (not shown) for gripping the workpiece is attached to a table unit 18.

[0012] The table unit 18 can move along the XY plane relative to the base member 12. The table unit 18 can also tilt about a first axis Ax1 along the X direction relative to the table support 14. The table unit 18 can also tilt about a second axis Ax2 along the Y direction relative to the table support 14.

[0013] Such a compliance unit 10 can easily correct misalignment, for example, when misalignment occurs during the assembly of a workpiece by inserting the workpiece into a predetermined hole. Note that the use of the compliance unit 10 is not limited to inserting a workpiece into a hole. The configuration of the compliance unit 10 will be described in detail below.

[0014] As shown in FIGS. 1 to 4, the compliance unit 10 includes a base member 12, a table support portion 14, a pair of compliance mechanisms 16, a table unit 18, a first origin return mechanism 20, and a second origin return mechanism 22.

[0015] The base member 12 includes a first base portion 24, a second base portion 26, and a support plate 28. The first base portion 24 is a plate-like member extending in the X and Y directions. When viewed from the Z direction, the first base portion 24 is formed in a circular shape. The first base portion 24 has mounting holes 30 formed therein for mounting the first base portion 24 to a robot hand (not shown) (see FIGS. 1 and 2). The shape, size, etc. of the first base portion 24 can be set as appropriate.

[0016] As shown in FIGS. 3 and 4 , the second base portion 26 protrudes in the Z1 direction from a surface of the first base portion 24 facing the Z1 direction. The second base portion 26 includes a base central portion 32, three lateral protrusions 34, and a central protrusion 36. The base central portion 32 is connected to the center of the first base portion 24. The three lateral protrusions 34 protrude radially outward from the base central portion 32. The three lateral protrusions 34 are arranged at equal angular intervals around the circumferential direction of the base central portion 32. The second base portion 26 may have one, two, or four or more lateral protrusions 34. The central protrusion 36 protrudes in the Z1 direction from the base central portion 32. The central protrusion 36 has a circular outer circumferential surface.

[0017] The support plate 28 is formed in an annular shape. The support plate 28, together with the second cover member 120 that forms the second origin return mechanism 22, is attached to the protruding end surface of the central protrusion 36 by a plurality of fastening members 38. In other words, the support plate 28 is sandwiched in the Z direction between the central protrusion 36 and the second cover member 120. The fastening members 38 are, for example, screw members.

[0018] 2 to 4, the table support portion 14 is formed in an annular shape. That is, a through-hole 40 is formed in the center of the table support portion 14. The central protrusion 36 of the base member 12 is inserted into the through-hole 40 (see FIG. 4). The inner diameter (hole diameter) of the through-hole 40 is larger than the outer diameter of the central protrusion 36.

[0019] The table support 14 includes a first plate 42, a presser member 44, an intermediate member 46, a second plate 48, and a support body 50. The first plate 42, the intermediate member 46, the second plate 48, and the support body 50 are stacked in this order in the Z1 direction. The first plate 42 is a flat plate extending along the XY plane. A plurality of receiving members 98 that constitute the first origin return mechanism 20 are provided on the surface of the first plate 42 facing the Z2 direction (see FIGS. 2 and 4 ). The presser member 44 is disposed on the surface of the first plate 42 facing the Z2 direction. The presser member 44 fixes the plurality of receiving members 98 to the first plate 42.

[0020] The intermediate member 46 is disposed on a surface of the first plate 42 facing the Z1 direction. The thickness dimension of the intermediate member 46 in the Z direction is greater than the thickness dimension of the first plate 42 in the Z direction. The inner diameter of the intermediate member 46 is greater than the inner diameter of the first plate 42.

[0021] The second plate 48 is a flat plate extending along the XY plane. The second plate 48 is disposed on a surface of the intermediate member 46 facing the Z1 direction. The inner diameter of the second plate 48 is the same as the inner diameter of the first plate 42. In other words, a space 52 in which the support plate 28 is disposed is formed between the first plate 42 and the second plate 48.

[0022] 3 and 4, the support body 50 has a connecting plate portion 54 and a pair of connecting protrusions 56. The connecting plate portion 54 is disposed on the surface of the second plate 48 facing the Z1 direction. The pair of connecting protrusions 56 protrude in the Z1 direction from the outer periphery of the surface of the connecting plate portion 54 facing the Z1 direction. The pair of connecting protrusions 56 are arranged side by side with a gap in the X direction. The pair of connecting protrusions 56 support the table unit 18.

[0023] 4, a pair of compliance mechanisms 16 are interposed between the base member 12 and the table support portion 14 so as to be movable in the X and Y directions relative to the base member 12 and the table support portion 14. One compliance mechanism 16 is interposed between the first plate 42 and the support plate 28. The other compliance mechanism 16 is interposed between the second plate 48 and the support plate 28. Hereinafter, one compliance mechanism 16 may be referred to as the "first compliance mechanism 16a," and the other compliance mechanism 16 may be referred to as the "second compliance mechanism 16b."

[0024] The first compliance mechanism 16a has a plurality of balls 58 and a plate-shaped retainer 60. The balls 58 are, for example, steel balls. The balls 58 come into contact with a flat surface of the first plate 42 facing in the Z1 direction and a flat surface of the support plate 28 facing in the Z2 direction.

[0025] The retainer 60 supports the plurality of balls 58 in a rollable manner. The retainer 60 is formed in an annular shape. The outer diameter of the retainer 60 is smaller than the inner diameter of the intermediate member 46. The inner diameter of the retainer 60 is larger than the inner diameter of the first plate 42.

[0026] Movement of the first compliance mechanism 16a along the XY plane is limited by a first stopper 62. The first stopper 62 is attached to a flat surface of the support plate 28 facing the Z2 direction by a fastening member (not shown). The first stopper 62 is formed in an annular shape. The first stopper 62 is located inside the retainer 60 of the first compliance mechanism 16a.

[0027] The second compliance mechanism 16b has the same configuration as the first compliance mechanism 16a. Therefore, a detailed description of the configuration of the second compliance mechanism 16b will be omitted. Note that the multiple balls 58 of the second compliance mechanism 16b come into contact with a flat surface of the second plate 48 facing in the Z2 direction and a flat surface of the support plate 28 facing in the Z1 direction.

[0028] Movement of the second compliance mechanism 16b along the XY plane is limited by a second stopper 64. The second stopper 64 is attached to a plane of the support plate 28 facing the Z1 direction by a fastening member (not shown). The second stopper 64 is formed in an annular shape. The second stopper 64 is located inside the retainer 60 of the second compliance mechanism 16b.

[0029] As shown in Figures 2 to 5, the table unit 18 has a first table portion 66 and a second table portion 68. The first table portion 66 is formed in an annular shape. The first table portion 66 extends in the Y direction. The first table portion 66 is disposed between a pair of connecting protrusions 56 of the table support portion 14. In other words, the pair of connecting protrusions 56 are located on both sides of the first table portion 66 in the X direction.

[0030] 5, the first table portion 66 is supported by a pair of first pins 70 so as to be tiltable relative to the pair of connecting protrusions 56. The first pins 70 are inserted so as to straddle the first connecting holes 72 of the connecting protrusions 56 and the first insertion holes 74 of the first table portion 66.

[0031] The first connection hole 72 penetrates the connection protrusion 56 in the X direction. The first insertion hole 74 is formed in a portion of the first table portion 66 adjacent to the first connection hole 72. The first pin 70 is fixed to the connection protrusion 56 by a first fixing member 78 (see FIG. 4). The first pin 70 is not fixed to the first table portion 66. The first table portion 66 tilts around a first axis (first virtual line) Ax1 of the first pin 70. The first axis Ax1 extends along the X direction.

[0032] The second table portion 68 has a connecting portion 80, a table plate 82, and a support plate 85. The connecting portion 80 is inserted inside the first table portion 66. The connecting portion 80 is supported by a pair of second pins 84 so as to be tiltable relative to the first table portion 66. The second pins 84 are inserted so as to straddle a second insertion hole 86 of the first table portion 66 and a second connection hole 88 of the connecting portion 80.

[0033] The pair of second insertion holes 86 are provided in portions of the first table portion 66 facing each other in the Y direction (see FIG. 2). That is, the second insertion holes 86 penetrate the first table portion 66 in the Y direction. The second connection hole 88 is formed in a portion of the connecting portion 80 adjacent to the second insertion hole 86. The second pin 84 is fixed to the connecting portion 80 by a second fixing member 89 (see FIG. 3). The second pin 84 is not fixed to the first table portion 66. The second table portion 68 tilts around a second axis line (second virtual line) Ax2 of the second pin 84. The second axis line Ax2 extends along the Y direction. The second axis line Ax2 extends in a direction perpendicular to the first axis line Ax1.

[0034] As shown in Figures 3 and 4, the table plate 82 is provided at the end of the connecting portion 80 in the Z1 direction. The table plate 82 protrudes outward beyond the connecting portion 80. The table plate 82 has a plurality of mounting holes 90 (see Figure 3) formed therein for mounting a chuck member (not shown). As shown in Figures 2 and 4, the receiving plate 85 is disposed on the surface of the connecting portion 80 facing the Z2 direction. The receiving plate 85 is located in the center of the second table portion 68.

[0035] 3 and 4, the first origin return mechanism 20 can return the table support unit 14 to the origin position and lock the table support unit 14 to the base member 12. The first origin return mechanism 20 has three origin return units 92 (see FIG. 3). The three origin return units 92 are arranged at equal intervals (e.g., 120° intervals) around the circumference of the base member 12.

[0036] The origin return unit 92 includes a first fluid pressure cylinder 94, a first pressing unit 96, and a receiving member 98. The first fluid pressure cylinder 94 is, for example, a pneumatic cylinder that operates by air pressure. The same applies to a second fluid pressure cylinder 112, which will be described later. The configurations of the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 can be set as appropriate.

[0037] A first fluid pressure cylinder 94 is provided for each of the three lateral protrusions 34. As shown in Fig. 4, the first fluid pressure cylinder 94 has a first cylinder bore 100, a first piston portion 102, a first cover member 104, and a first biasing member 106. The first cylinder bore 100 is formed in the lateral protrusion 34 so as to extend in the Z direction. The first cylinder bore 100 opens on a surface of the lateral protrusion 34 facing the Z1 direction.

[0038] The first piston portion 102 slides in the Z direction on the inner surface of the first cylinder bore 100. The first piston portion 102 divides the first cylinder bore 100 into a first chamber 108 and a second chamber 110. The first chamber 108 is located in the Z2 direction of the first piston portion 102. The second chamber 110 is located in the Z1 direction of the first piston portion 102. The first cover member 104 is attached to the lateral protrusion 34 so as to close the opening of the first cylinder bore 100 in the Z1 direction.

[0039] The first biasing member 106 is interposed between the first piston portion 102 and the first cover member 104. The first biasing member 106 biases the first piston portion 102 (first pressing portion 96) in the Z2 direction. The first biasing member 106 is, for example, a compression coil spring. The first biasing member 106 may also be a rubber member or the like.

[0040] The first pressing portion 96 protrudes in the Z1 direction from the first piston portion 102. The first pressing portion 96 penetrates the first cover member 104. A first pressing surface 96a is provided at the end of the first pressing portion 96 in the protruding direction (Z1 direction). The first pressing surface 96a is a conical convex surface.

[0041] The receiving member 98 is attached to the first plate 42 so as to face the first pressing portion 96. The receiving member 98 forms part of the table support portion 14. The receiving member 98 has a concave first receiving surface 98a that can come into contact with the end of the first pressing portion 96 in the Z1 direction. The first receiving surface 98a is a conical concave surface.

[0042] 3 and 4 , the second origin return mechanism 22 can lock the table unit 18 in a state where it has been returned from the inclined posture to the origin posture. The second origin return mechanism 22 is provided in the center portion (base center portion 32 and center protrusion portion 36) of the second base portion 26. The second origin return mechanism 22 includes a second fluid pressure cylinder 112 and a second pressing portion 114.

[0043] 4, the second fluid pressure cylinder 112 has a second cylinder bore 116, a second piston portion 118, a second cover member 120, and a second biasing member 122. The second cylinder bore 116 is formed in the center of the second base portion 26 so as to extend in the Z direction. The second cylinder bore 116 opens to an end face of the central protrusion 36 in the protruding direction (Z1 direction).

[0044] The second piston portion 118 slides in the Z direction on the inner surface of the second cylinder bore 116. The second piston portion 118 divides the second cylinder bore 116 into a first chamber 124 and a second chamber 126. The first chamber 124 is located in the Z2 direction of the second piston portion 118. The second chamber 126 is located in the Z1 direction of the second piston portion 118. The second cover member 120 is attached to the central protrusion 36 so as to close the opening of the second cylinder bore 116 in the Z1 direction.

[0045] The second biasing member 122 is interposed between the second piston portion 118 and the second cover member 120. The second biasing member 122 biases the second piston portion 118 (second pressing portion 114) in the Z2 direction. The second biasing member 122 is, for example, a compression coil spring. The second biasing member 122 may also be a rubber member or the like. In an initial state in which compressed fluid (fluid for driving the cylinders) is not supplied to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the load applied by the second biasing member 122 to the second piston portion 118 (second pressing portion 114) is greater than the load applied by the first biasing member 106 to the first piston portion 102 (first pressing portion 96).

[0046] The second pressing portion 114 includes a rod portion 128 and a pressing body 130. The rod portion 128 protrudes in the Z1 direction from the second piston portion 118. The rod portion 128 penetrates the second cover member 120. The pressing body 130 is attached to the protruding end of the rod portion 128 by a fastening member 131. The fastening member 131 is, for example, a screw member. The pressing body 130 is formed in a flat plate shape. The pressing body 130 has a flat second pressing surface 114a facing in the Z1 direction. The second pressing surface 114a can press a second receiving surface 85a of the receiving plate 85 facing in the Z2 direction in the Z1 direction. The second receiving surface 85a is flat.

[0047] The base member 12 is provided with a first flow path 132, a second flow path 134, and an orifice 136. The first flow path 132 is in communication with the first chambers 108 of each of the first fluid pressure cylinders 94. The first flow path 132 can introduce fluid into each of the first chambers 108 of the multiple first fluid pressure cylinders 94. The first flow path 132 is formed in the first base portion 24.

[0048] The first flow path 132 communicates with a first port 138 that opens on the outer surface of the first base portion 24. In this embodiment, one first port 138 is formed in the base member 12. A tube (not shown) is connected to the first port 138. Compressed fluid (compressed air) can be supplied to the first port 138 from an air supply device (not shown). The second chamber 110 of the first fluid pressure cylinder 94 communicates with the external space of the base member 12 via a second port 140 formed in the lateral protrusion 34.

[0049] The second flow path 134 branches off from the middle of the first flow path 132. The second flow path 134 communicates with the first chamber 124 of the second fluid pressure cylinder 112. The second chamber 126 of the second fluid pressure cylinder 112 communicates with the outside space via a third port 142 formed in the central protrusion 36.

[0050] The orifice 136 is provided in the second flow path 134. The orifice 136 restricts the flow rate of the fluid flowing through the second flow path 134. The flow path diameter of the orifice 136 is smaller than the flow path diameter of the first flow path 132. In other words, the flow path cross-sectional area of ​​the orifice 136 is smaller than the flow path cross-sectional area of ​​the first flow path 132.

[0051] Next, a description will be given of the operation of the compliance unit 10. As shown in Fig. 4, the compliance unit 10 can be used with the Z1 direction facing the direction of gravity, for example. The orientation of the compliance unit 10 can be set as appropriate.

[0052] 4, in the compliance unit 10, when compressed fluid is not supplied to the first port 138, the first piston portion 102 of the first fluid pressure cylinder 94 is pressed in the Z2 direction by the first biasing member 106 and is therefore positioned at the Z2-direction end of the first cylinder bore 100. In this state, the first pressing surface 96a of the first pressing portion 96 is positioned at the Z2-direction end of the concave surface formed by the first receiving surface 98a of the receiving member 98. This allows the table support portion 14 to move in the X and Y directions (along the XY plane) relative to the base member 12, as shown in FIG.

[0053] The table unit 18 is provided on the table support portion 14. Therefore, the table unit 18 moves along the XY plane together with the table support portion 14 relative to the base member 12.

[0054] 4, when no compressed fluid is supplied to the first port 138, the second piston portion 118 of the second fluid pressure cylinder 112 is pressed in the Z2 direction by the second biasing member 122 and is therefore positioned at the Z2-direction end of the second cylinder bore 116. In this state, the second pressing surface 114a of the second pressing portion 114 is positioned away from the second receiving surface 85a in the Z2 direction.

[0055] 6, the first table portion 66 of the table unit 18 can be tilted about the first axis Ax1 relative to the table support portion 14. Also, the second table portion 68 of the table unit 18 can be tilted about the second axis Ax2 relative to the first table portion 66. In other words, the table unit 18 can be moved from the original position to an inclined position. The original position of the table unit 18 refers to a position of the table unit 18 in which the table plate 82 is aligned with the XY plane. The inclined position of the table unit 18 refers to a position of the table unit 18 in which the table plate 82 is inclined with respect to the XY plane.

[0056] In the compliance unit 10, when compressed fluid is supplied to the first port 138, the compressed fluid flows into the first chamber 108 of the first fluid pressure cylinder 94 via the first flow path 132 and into the first chamber 124 of the second fluid pressure cylinder 112 via the second flow path 134 and the orifice 136. In this embodiment, a relatively large pressure difference can be obtained between the upstream and downstream sides of the orifice 136. In other words, the pressure of the fluid downstream of the orifice 136 is smaller than the pressure of the fluid upstream of the orifice 136. Note that this pressure difference increases as the flow rate (volumetric flow rate) of the compressed fluid passing through the orifice 136 increases. This allows the operation start timing of the second fluid pressure cylinder 112 to be delayed relative to the operation start timing of the first fluid pressure cylinder 94.

[0057] Furthermore, in this embodiment, in an initial state in which compressed fluid is not supplied to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the load that the second biasing member 122 applies to the second pressing portion 114 is greater than the load that the first biasing member 106 applies to the first pressing portion 96. Therefore, even when the flow rate of compressed fluid passing through the orifice 136 is relatively small and the pressure difference between the upstream and downstream sides of the orifice 136 is relatively small, the timing at which the second piston portion 118 of the second fluid pressure cylinder 112 starts to operate can be appropriately delayed from the start of operation of the first piston portion 102 of the first fluid pressure cylinder 94.

[0058] Specifically, first, compressed fluid supplied to the first chamber 108 of the first fluid pressure cylinder 94 causes the first piston portion 102 to move in the Z1 direction in the first cylinder bore 100 while pressing the first biasing member 106. As a result, the first pressing surface 96a of the first pressing portion 96 presses the first receiving surface 98a of the receiving member 98 in the Z1 direction, and as shown in FIG. 7, the table support portion 14 returns to the origin position relative to the base member 12. As a result, the center of the second receiving surface 85a is positioned in the Z1 direction at the center of the second pressing surface 114a. In other words, the center of the second receiving surface 85a and the center of the second pressing surface 114a face each other.

[0059] Thereafter, the compressed fluid supplied to the first chamber 124 of the second fluid pressure cylinder 112 causes the second piston portion 118 to move in the Z1 direction in the second cylinder bore 116 while pressing the second biasing member 122. As a result, the second pressing surface 114a of the second pressing portion 114 presses the second receiving surface 85a of the table unit 18 in the Z1 direction, and as shown in FIG. 8 , the table unit 18 returns from the inclined posture to the original posture.

[0060] According to this embodiment, with the table support portion 14 returned to the origin position relative to the base member 12 by the first fluid pressure cylinder 94, the second pressing portion 114 is pressed against the table unit 18 by the second fluid pressure cylinder 112, thereby returning the table unit 18 from the inclined position to the origin position. This prevents the second pressing portion 114 from being pressed against the table unit 18 in a state in which the table support portion 14 is displaced from the origin position relative to the base member 12, preventing the table support portion 14 from becoming unable to move relative to the base member 12. Therefore, the table support portion 14 can be reliably returned to the origin position relative to the base member 12. Furthermore, because the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 are provided on the base member 12, the flow paths for driving the fluid pressure cylinders can be concentrated in the base member 12. In other words, the compliance unit 10 can have a simple configuration. Furthermore, since there is no need to attach tubes to the table support portion 14 for supplying compressed fluid to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the tubes do not hinder the movement of the table support portion 14 relative to the base member 12. As a result, the table support portion 14 can be moved smoothly relative to the base member 12. Therefore, a better compliance unit 10 can be provided.

[0061] This embodiment is not limited to the above-described configuration. The compliance unit 10 does not necessarily have to include the orifice 136. In this case, by making the load that the second biasing member 122 applies to the second pressing portion 114 greater than the load that the first biasing member 106 applies to the first pressing portion 96, it is possible to delay the operation start timing of the second fluid pressure cylinder 112 relative to the operation start timing of the first fluid pressure cylinder 94. Furthermore, in the compliance unit 10, the load that the second biasing member 122 applies to the second pressing portion 114 does not necessarily have to be greater than the load that the first biasing member 106 applies to the first pressing portion 96. In this case, the orifice 136 allows the operation start timing of the second fluid pressure cylinder 112 to be delayed relative to the operation start timing of the first fluid pressure cylinder 94.

[0062] The following additional notes are further disclosed regarding the above embodiment.

[0063] (Supplementary Note 1) A compliance unit (10) of the present disclosure includes a base member (12), a table support section (14) arranged to be movable relative to the base member along an XY plane in which a direction perpendicular to the X direction is the Y direction, a compliance mechanism (16) interposed between the base member and the table support section so as to be movable in the X direction and the Y direction relative to the base member and the table support section, and a table unit (18) provided on the table support section so as to be tiltable about a virtual line (Ax1, Ax2) extending along the X direction or the Y direction. A first fluid pressure cylinder (94) is provided which presses a first pressing portion (96) toward the support portion, thereby returning the table support portion to an origin position relative to the base member, and a second fluid pressure cylinder (112) which presses a second pressing portion (114) toward the table unit while the table support portion has been returned to the origin position relative to the base member by the first fluid pressure cylinder, thereby returning the table unit from an inclined position in which a table plate (82) of the table unit is inclined with respect to the XY plane to an origin position in which the table plate is aligned with the XY plane.

[0064] According to this configuration, while the table support unit is returned to its original position relative to the base member by the first fluid pressure cylinder, the second fluid pressure cylinder presses the second pressing portion against the table unit, returning the table unit from the inclined position to the original position. This prevents the table support unit from being displaced from its original position relative to the base member and being unable to move relative to the base member due to the second pressing portion being pressed against the table unit. Therefore, the table support unit can be reliably returned to its original position relative to the base member. Furthermore, since the first and second fluid pressure cylinders are provided on the base member, the flow paths for driving the fluid pressure cylinders can be integrated in the base member. In other words, the compliance unit can be simplified in configuration. Furthermore, since tubes for supplying compressed fluid to the first and second fluid pressure cylinders do not need to be attached to the table support unit, the tubes do not impede movement of the table support unit relative to the base member. Therefore, the table support unit can be moved smoothly relative to the base member. Therefore, a better compliance unit can be provided.

[0065] (Supplementary Note 2) In the compliance unit described in Supplementary Note 1, the base member may be provided with a first flow path (132) capable of introducing a cylinder drive fluid into the first fluid pressure cylinder, a second flow path (134) communicating with the first flow path and capable of introducing the fluid into the second fluid pressure cylinder, and an orifice (136) located in the second flow path.

[0066] With this configuration, a pressure difference can be obtained between the upstream and downstream sides of the orifice. As a result, with a simple configuration, the operation start timing of the second fluid pressure cylinder can be delayed relative to the operation start timing of the first fluid pressure cylinder. Therefore, with a simple configuration, the table unit can be returned from the inclined position to the original position by pressing the second pressing portion against the table unit with the second fluid pressure cylinder, while the table support portion is returned to the original position with respect to the base member by the first fluid pressure cylinder.

[0067] (Supplementary Note 3) In the compliance unit described in Supplementary Note 2, the first flow path may be connected to a port (138) that opens on an outer surface of the base member, and the second flow path may branch off from a midpoint of the first flow path.

[0068] With this configuration, compressed fluid can be supplied to both the first flow path and the second flow path from a single port, which reduces the number of tubes required to connect to the ports, thereby preventing the tubes from interfering with other components or becoming tangled.

[0069] (Supplementary Note 4) In the compliance unit described in any one of Supplementary Notes 1 to 3, the first fluid pressure cylinder may have a first biasing member (106) that biases the first pressing portion in a direction in which the first pressing portion moves away from the table support portion, and the second fluid pressure cylinder may have a second biasing member (122) that biases the second pressing portion in a direction in which the second pressing portion moves away from the table unit.

[0070] With this configuration, the configuration of the compliance unit can be further simplified.

[0071] (Supplementary Note 5) In the compliance unit described in Supplementary Note 4, in an initial state in which no cylinder-driving fluid is supplied to the first fluid pressure cylinder and the second fluid pressure cylinder, the load applied by the second biasing member to the second pressing portion may be greater than the load applied by the first biasing member to the first pressing portion.

[0072] According to this configuration, the operation start timing of the second fluid pressure cylinder can be delayed compared to the operation start timing of the first fluid pressure cylinder with a simple configuration.

[0073] Although the present disclosure has been described in detail, the present disclosure is not limited to the individual embodiments described above. Various additions, substitutions, modifications, partial deletions, etc. are possible in these embodiments without departing from the gist of the present disclosure or the spirit of the present disclosure derived from the content of the claims and their equivalents. These embodiments can also be implemented in combination. For example, in the above-described embodiments, the order of each operation and the order of each process are shown as examples and are not limited to these. The same applies when numerical values ​​or mathematical expressions are used in the description of the above-described embodiments.

Claims

1. A device comprising: a base member (12); a table support section (14) arranged to be movable relative to the base member along an XY plane, with the Y direction being a direction perpendicular to the X direction; a compliance mechanism (16) interposed between the base member and the table support section so as to be movable in the X direction and the Y direction relative to the base member and the table support section; and a table unit (18) provided on the table support section so as to be tiltable about a virtual line (Ax1, Ax2) extending along the X direction or the Y direction, wherein the base member is provided with a first fluid pressure cylinder (94) that returns the table support section to an origin position relative to the base member by pressing a first pressing section (96) against the table support section; a second fluid pressure cylinder (112) that returns the table unit from an inclined position in which a table plate (82) of the table unit is inclined with respect to the XY plane to an original position in which the table plate is aligned with the XY plane by pressing a second pressing portion (114) toward the table unit while the table support portion is returned to the original position relative to the base member by the first fluid pressure cylinder.

2. A compliance unit as described in claim 1, wherein the base member is provided with a first flow path (132) capable of introducing a cylinder drive fluid into the first fluid pressure cylinder, a second flow path (134) communicating with the first flow path and capable of introducing the fluid into the second fluid pressure cylinder, and an orifice (136) located in the second flow path.

3. A compliance unit as described in claim 2, wherein the first flow path communicates with a port (138) that opens on the outer surface of the base member, and the second flow path branches off from a midway point of the first flow path.

4. A compliance unit as set forth in any one of claims 1 to 3, wherein the first fluid pressure cylinder has a first biasing member (106) that biases the first pressing portion in a direction in which the first pressing portion moves away from the table support portion, and the second fluid pressure cylinder has a second biasing member (122) that biases the second pressing portion in a direction in which the second pressing portion moves away from the table unit.

5. A compliance unit as described in claim 4, wherein in an initial state in which no cylinder-driving fluid is supplied to the first fluid pressure cylinder and the second fluid pressure cylinder, the load applied by the second biasing member to the second pressing portion is greater than the load applied by the first biasing member to the first pressing portion.

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