Mixing system

Abstract

The present invention comprises: a first mixing means that is simultaneously supplied with ultrapure water and a highly concentrated chemical substance to generate a first mixed substance as the ultrapure water and the highly concentrated chemical substance are mixed; a first transfer line connected to the first mixing means to transfer the first mixed substance; a second mixing means, formed on the first transfer line, that remixes the first mixed substance to produce a second mixed substance; a mixing tank, connected to the first transfer line, that is supplied with the second mixed substance, and stores a third mixed substance produced by remixing the supplied second mixed substance by means of a third mixing means; a second transfer line, connected to the mixing tank, that transfers the third mixed substance; a storage tank, connected to the second transfer line, that is supplied with the third mixed substance, and stores a fourth mixed substance produced by remixing the supplied third mixed substance by means of a fourth mixing means; and a third transfer line, connected to the storage tank, that transfers the fourth mixed substance. According to the present invention, as highly concentrated chemicals and ultrapure water are mixed and used at the place of application through a mixing system, the transportation of highly hazardous chemicals is minimized, thereby reducing logistics costs and mitigating environmental pollution and human casualties caused by accidents occurring during transportation.

Description

mixed system

[0001] The present invention relates to a mixing system, and more particularly, to a mixing system that can minimize the transport volume of highly hazardous chemicals by mixing highly concentrated chemicals and ultrapure water at a place of use through a mixing system, thereby reducing logistics costs and minimizing environmental pollution and human casualties caused by accidents occurring during transport.

[0002] The manufacturing process for advanced industrial products like semiconductors and displays uses a variety of liquid chemicals. These chemicals are transported from the manufacturing site to the point of use via various transportation methods.

[0003] Recently, the manufacturing processes of semiconductors, displays, etc. have become more detailed in their manufacturing patterns and their production volumes have skyrocketed, leading to a significant increase in the use of the above-mentioned chemicals.

[0004] As the amount of the chemical substance used increases as described above, the amount of chemical substance transported also increases. However, as the amount of transport increases, there are frequent cases of the chemical substance leaking to the outside due to accidents occurring during transport, and there are problems such as frequent occurrence of environmental pollution and casualties.

[0005] The present invention is intended to solve the above problems, and the purpose of the present invention is to provide a mixing system that can minimize the amount of high-risk chemicals transported by mixing highly concentrated chemicals and ultrapure water at the place of use through a mixing system, thereby reducing logistics costs and minimizing environmental pollution and casualties caused by accidents occurring during transport.

[0006] The above object is achieved, according to the present invention, by a first mixing means for simultaneously supplying ultrapure water and a highly concentrated chemical substance to produce a first mixed substance by mixing the ultrapure water and the highly concentrated chemical substance; a first transfer line connected to the first mixing means and through which the first mixed substance is transferred; a second mixing means formed on the first transfer line for remixing the first mixed substance to produce a second mixed substance; a mixing tank connected to the first transfer line and through which the second mixed substance is supplied, and which stores a third mixed substance produced by remixing the supplied second mixed substance by a third mixing means; a second transfer line connected to the mixing tank and through which the third mixed substance is transferred; a storage tank connected to the second transfer line and through which the third mixed substance is supplied, and which stores a fourth mixed substance produced by remixing the supplied third mixed substance by a fourth mixing means; and a third transfer line connected to the storage tank and for transferring the fourth mixed substance.

[0007] In addition, the present invention may further include a supply control unit for controlling the supply ratio of ultrapure water and highly concentrated chemical substance supplied to the first mixing means; a flow rate measuring unit for measuring the flow rate of the ultrapure water and highly concentrated chemical substance supplied; and a concentration measuring unit for measuring the concentration of the third mixed substance.

[0008] At this time, the supply control unit can control the supply pressure of the highly concentrated chemical substance according to the supply pressure of the ultrapure water, thereby controlling the supply ratio of the ultrapure water and the highly concentrated chemical substance.

[0009] In addition, the supply control unit can repeatedly change the concentration of the third mixed material by controlling the supply ratio of the ultrapure water and the highly concentrated chemical substance.

[0010] Additionally, the second transport line may have one side connected to the lower portion of the mixing tank and the other side connected to the side of the storage tank.

[0011] Meanwhile, the present invention may further include a concentration measuring unit for measuring the concentration of the fourth mixed substance stored in the storage tank; an ultrapure water supply unit for supplying ultrapure water to the storage tank; a highly concentrated chemical supply unit for supplying highly concentrated chemical to the storage tank; and a flow measuring unit for measuring the flow rates of ultrapure water and highly concentrated chemical supplied to the storage tank.

[0012] At this time, if the concentration of the fourth mixed substance measured by the concentration measuring unit does not match the reference concentration, ultrapure water and / or highly concentrated chemical substance may be supplied to the storage tank through the ultrapure water supply unit and / or the highly concentrated chemical substance supply unit to make the concentration of the fourth mixed substance match the reference concentration.

[0013] Additionally, the internal space of the mixing tank and the internal space of the storage tank can be formed to have different volumes.

[0014] Additionally, the internal space of the mixing tank may be formed smaller than the internal space of the storage tank.

[0015] In addition, the present invention may further include a first circulation line, one side of which is connected to the lower part of the mixing tank and the other side of which is connected to the upper part of the mixing tank, for circulating a third mixed material inside the mixing tank.

[0016] In addition, the present invention may further include a second circulation line formed to branch from the third transfer line and connect to the upper portion of the storage tank; and an opening / closing valve formed on the second circulation line to open / close the second circulation line.

[0017] Accordingly, the present invention has the effect of minimizing the amount of high-risk chemicals transported by mixing highly concentrated chemicals and ultra-pure water at the place of use through a mixing system, thereby reducing logistics costs and minimizing environmental pollution and casualties caused by accidents occurring during transport.

[0018] In addition, the present invention has the effect of producing a large-volume mixed solution while maintaining an ultra-precise concentration by re-mixing a highly concentrated chemical substance and ultra-pure water by a plurality of mixing means.

[0019] Figure 1 is an overall conceptual diagram of a mixing system according to the present invention.

[0020] Figure 2 is a drawing illustrating a first mixing means of a mixing system according to the present invention.

[0021] Figure 3 is a drawing illustrating a mixing tank of a mixing system according to the present invention.

[0022] Figure 4 is a drawing illustrating a storage tank of a mixing system according to the present invention.

[0023] Figure 5 is a graph showing the concentration of a mixed material in a mixing tank and a storage tank of a mixing system according to the present invention.

[0024] Specific structural or functional descriptions of embodiments according to the concept of the present invention disclosed in this specification are merely illustrative for the purpose of explaining embodiments according to the concept of the present invention, and embodiments according to the concept of the present invention may be implemented in various forms and are not limited to the embodiments described in this specification.

[0025] Embodiments according to the concept of the present invention may have various modifications and take various forms, and thus, embodiments are illustrated in the drawings and described in detail in this specification. However, this is not intended to limit embodiments according to the concept of the present invention to specific disclosed forms, but rather includes modifications, equivalents, or alternatives that fall within the spirit and technical scope of the present invention.

[0026] While terms such as "first" or "second" may be used to describe various components, these components should not be limited by these terms. These terms are intended solely to distinguish one component from another. For example, a first component may be referred to as a "second component," and similarly, a second component may also be referred to as a "first component," without departing from the scope of the invention.

[0027] When a component is referred to as being "connected" or "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but that there may be other components in between. Conversely, when a component is referred to as being "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between. Expressions that describe relationships between components, such as "between" and "directly between," or "adjacent to" and "directly adjacent to," should be interpreted similarly.

[0028] The terminology used herein is for the purpose of describing specific embodiments only and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. It should be understood that the terms “comprise” or “have” used herein specify the presence of a described feature, number, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0029] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and will not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

[0030]

[0031] Hereinafter, a mixing system according to a preferred embodiment of the present invention will be described with reference to the attached drawings.

[0032]

[0033] The mixing system according to the present invention, as illustrated in FIG. 1, comprises: a first mixing means (100) for simultaneously supplying ultrapure water and a highly concentrated chemical substance to produce a first mixed substance by mixing the ultrapure water and the highly concentrated chemical substance; a first transfer line (300) connected to the first mixing means (100) and through which the first mixed substance is transferred; a second mixing means (200) formed on the first transfer line (300) for remixing the first mixed substance to produce a second mixed substance; a mixing tank (400) connected to the first transfer line (300) for supplying the second mixed substance and storing the third mixed substance produced by remixing the supplied second mixed substance by a third mixing means (420); a second transfer line (500) connected to the mixing tank (400) and through which the third mixed substance is transferred; a fourth mixing means (610) connected to the second transfer line (500) for supplying the third mixed substance and storing the supplied third mixed substance. It includes a storage tank (600) for storing a fourth mixed material produced by re-mixing, and a third transport line (700) connected to the storage tank (600) for transporting the fourth mixed material.

[0034]

[0035] First, the first mixing means (100) is configured to produce a first mixed substance by mixing ultrapure water and a highly concentrated chemical substance, as illustrated in FIG. 2, and is provided with an ultrapure water supply unit (120) for supplying ultrapure water into the interior of the first mixing means (100) and a highly concentrated chemical substance supply unit (130) for supplying the highly concentrated chemical substance. The highly concentrated chemical substance supplied into the interior of the first mixing means (100) by the highly concentrated chemical substance supply unit (130) may be, for example, a developer (TMAH, Tetra Methyl Ammonium Hydroxide, tetramethylammonium iodide), ammonia water (NH₄OH), and hydrofluoric acid (HF).

[0036] In addition, flow rate measuring units (121, 131) are formed in the ultrapure water supply unit (120) and the highly concentrated chemical supply unit (130) so as to measure their respective supply flow rates. In addition, a supply control unit (110) is formed inside the first mixing means (100) to control the high-quality ratio of the ultrapure water supply unit (120) and the highly concentrated chemical supply unit (130).

[0037] The first mixing means (100) described above mixes ultrapure water and highly concentrated chemicals supplied through the ultrapure water supply unit (120) and the highly concentrated chemical supply unit (130) to produce a first mixed substance. At this time, the supply control unit (110) controls the supply pressure of the highly concentrated chemical according to the supply pressure of the ultrapure water, thereby controlling the supply ratio of the ultrapure water and the highly concentrated chemical. The concentration of the first mixed substance produced by the first mixing means (100) may have an error range of approximately 0.01%.

[0038]

[0039] Meanwhile, the first transport line (300) can be provided as a pipe having a predetermined diameter with a transport space formed inside, and is installed so that one side is connected to the first mixing means (100) and the other side is connected to the mixing tank (400).

[0040] At this time, a second mixing means (200) for re-mixing the first mixed material transported through the first transport line (300) is formed on the first transport line (300). The second mixing means (200) described above has a stirring member such as a screw formed therein, so that as the first mixed material passes through the stirring member, the first mixed material transported through the first transport line (300) is re-mixed to generate a second mixed material. The second mixed material produced by re-mixing by the second mixing means (200) as described above is transported to the mixing tank (400) through the first transport line (300). At this time, the concentration of the second mixed material produced by the second mixing means (200) may have an error range of approximately 0.01%.

[0041]

[0042] The mixing tank (400) may be provided as a container having a storage space formed inside, as shown in FIG. 3, and the internal storage space is formed to be completely sealed from the outside.

[0043] Inside the mixing tank (400), a third mixing means (420) is formed for re-mixing the second mixed material supplied through the first transfer line (300). The third mixing means (420) is provided with a stirring member such as a screw, and as the second mixed material passes through the stirring member, the second mixed material is re-mixed to produce a third mixed material. In addition, a concentration measuring unit (430) is formed inside the mixing tank (400) for measuring the concentration of the third mixed material. The concentration of the third mixed material produced by the third mixing means (420) may have an error range of approximately 0.001%.

[0044] At this time, the supply control unit (110) can repeatedly change the concentration of the third mixed substance by controlling the supply ratio of the ultra-pure water and the highly concentrated chemical substance. FIG. 5 is a graph showing the concentration of the mixed substance in the mixing tank (400) and the storage tank (600), and the concentration of the third mixed substance inside the mixing tank (400) is repeatedly changed so as to follow a sine curve. To describe in detail how the concentration of the third mixed substance changes, the concentration measurement unit (430) inside the mixing tank (400) measures the concentration of the third mixed substance, and according to the concentration, the supply control unit (110) controls the supply amount of the ultra-pure water or the highly concentrated chemical substance so that the concentration of the third mixed substance changes along a sine curve. If the concentration of the third mixed substance is not changed according to a sine curve, the concentration is maintained at the upper or lower limit of the error range, making it difficult to maintain the concentration error of the third mixed substance at 0.01%, and thus it becomes difficult to maintain the concentration of the fourth mixed substance within the error range. However, when the concentration of the third mixed substance is varied according to a sine curve, the concentration of the third mixed substance repeatedly changes from an upper limit of 0.01% to a lower limit of 0.01%, so the error range of the concentration of the third mixed substance actually transferred into the storage tank (600) converges to 0.01%.

[0045]

[0046] In addition, a first circulation line (410) is formed in the mixing tank (400) to circulate the third mixed material inside the mixing tank (400). The first circulation line (410) may be provided as a pipe having a predetermined diameter and having a transfer space formed therein, and may be formed such that one side is connected to the lower part of the mixing tank (400) and the other side is connected to the upper part of the mixing tank (400). At this time, a pump is installed on the first circulation line (410) so that the third mixed material inside the mixing tank (400) can be circulated through the first circulation line (410) by the operation of the pump. The pump of the first circulation line (410) described above can be operated according to the measurement value of the concentration measurement unit (430) inside the mixing tank (400) to circulate the third mixed material. That is, if the measurement result of the concentration measurement unit (430) shows that the mixing of the third mixed material is not uniform or the measured concentration is different from the existing concentration, the pump of the first circulation line (410) is operated to circulate the third mixed material to the upper part of the mixing tank (400) so that the third mixed material is mixed again by the third mixing means (420).

[0047]

[0048] The second transport line (500) is provided with a pipe or the like having a predetermined diameter that forms a transport space inside, and one side is connected to the lower part of the mixing tank (400) and the other side is connected to the side of the storage tank (600). Since the second transport line (500) is connected to the lower part of the mixing tank (400), the third mixed material is transported into the interior of the storage tank (600) by free falling due to its own weight. At this time, a purge valve (510) is formed in the second transport line (500) to prevent the third mixed material transported through the second transport line (500) from coming into contact with air.

[0049]

[0050] Meanwhile, the storage tank (600) may be provided as a container having a storage space formed inside, as shown in FIG. 4, and the internal storage space is formed to be completely sealed off from the outside.

[0051] Inside the storage tank (600), a fourth mixing means (610) is formed for re-mixing the third mixed material supplied through the second transfer line (500). The fourth mixing means (610) is provided with a stirring member such as a screw, and as the third mixed material passes through the stirring member, the third mixed material is re-mixed to produce a fourth mixed material. At this time, since the third mixed material must be re-mixed by the fourth mixing means (610), the other side of the second transfer line (500) is connected to the storage tank (600) so as to be positioned above the fourth mixing means (610).

[0052] In addition, a concentration measuring unit (620) for measuring the concentration of the fourth mixed substance is formed inside the storage tank (600), and an ultrapure water supply unit (630) for supplying ultrapure water into the storage tank (600) and a highly concentrated chemical supply unit (640) for supplying highly concentrated chemical substances are formed. At this time, flow rate measuring units (631, 641) are formed in each of the ultrapure water supply unit (630) and the highly concentrated chemical supply unit (640) so as to measure their respective supply flow rates.

[0053] The concentration measuring unit (620) inside the storage tank (600) measures the concentration of the fourth mixed substance. If the measured concentration of the fourth mixed substance does not match the reference concentration, ultrapure water and / or a highly concentrated chemical substance may be supplied into the storage tank (600) through the ultrapure water supply unit (630) and / or the highly concentrated chemical substance supply unit (640) to make the concentration of the fourth mixed substance match the reference concentration. FIG. 5 is a graph showing the concentration of the mixed substance in the mixing tank (400) and the storage tank (600), and the fourth mixed substance in the storage tank (600) can maintain a uniform concentration through the above-described process. Therefore, the concentration of the fourth mixed substance generated by the fourth mixing means (610) may have an error range of approximately 0.001%.

[0054]

[0055] The internal storage spaces of the above-described mixing tank (400) and storage tank (600) are formed to have different volumes, and the internal storage space of the mixing tank (400) is formed to have a smaller storage space than the internal storage space of the storage tank (600). That is, the internal storage space of the storage tank (600) is formed to have a larger volume than the internal storage space of the mixing tank (400). At this time, the internal storage space of the storage tank (600) is formed to have a volume that is at least 50% larger than the internal storage space of the mixing tank (400). When the third mixed material is transferred from the mixing tank (400) to the storage tank (600), it is transferred through the second transfer line (500), and the third mixed material is transferred from the mixing tank (400) to the storage tank (600) by natural fall due to the position where the second transfer line (500) is installed. That is, the third mixed material is continuously transferred in small amounts from the mixing tank (400) to the storage tank (600) through the second transfer line (500). Since the third mixed material transferred as described above is only a small amount compared to the total volume of the storage tank (600), even if the third mixed material with an error of 0.01% is supplied to the storage tank (600), the effect on the concentration of the fourth mixed material stored in the storage tank (600) is minimal. The larger the size of the storage tank (600), the more uniformly the concentration of the fourth mixed material can be maintained regardless of the third mixed material. Ideally, the storage tank (600) should be about 300% larger than the mixing tank (400), but considering environmental constraints of the installation location and costs, the above-mentioned purpose can be achieved if the size of the storage tank (600) is at least 50% larger than the size of the mixing tank (400).

[0056]

[0057] In addition, the third transport line (700) may be provided as a pipe having a predetermined diameter that forms a transport space inside, and one side thereof is connected to a storage tank (600), and the other side thereof is connected to a place of use, so that the fourth mixed material inside the storage tank (600) is transported to the place of use through the third transport line (700). At this time, a pump is provided in the third transport line (700) to enable smooth transport of the fourth mixed material.

[0058] At this time, a second circulation line (710) is further formed in the third transfer line (700) so as to branch off from the third transfer line (700) and connect to the upper part of the storage tank (600), and an opening / closing valve (720) is further formed on the second circulation line (710) to open and close the second circulation line (710). The second circulation line (710) may be provided as a pipe having a predetermined diameter and having a transfer space formed therein, and is formed so that one side is connected to the third transfer line (700) and the other side is connected to the upper part of the storage tank (600). When the concentration of the fourth mixed substance measured by the concentration measuring unit (620) inside the storage tank (600) is different from the reference concentration, the opening / closing valve (720) is opened so that the fourth mixed substance can be circulated into the interior of the storage tank (600) through the third transfer line (700) and the second circulation line (710). At this time, although not shown, a separate opening / closing valve (not shown) is additionally installed in the third transport line (700) to prevent the fourth mixed material from being transported to the place of use when the fourth mixed material is circulated through the second circulation line (710). The separate opening / closing valve (not shown) is formed to be located further toward the place of use than the point where the second circulation line (710) branches off. As described above, the fourth mixed material circulated into the storage tank (600) through the second circulation line (710) can be mixed again by the fourth mixing means (610).

[0059]

[0060] The mixing system according to the present invention, which is configured as described above, can minimize the amount of high-risk chemicals transported by mixing highly concentrated chemicals and ultra-pure water at the place of use, thereby reducing logistics costs and minimizing environmental pollution and casualties caused by accidents occurring during transport. In addition, it has the excellent effect of being able to produce a large-volume mixed solution while maintaining an ultra-precise concentration by re-mixing highly concentrated chemicals and ultra-pure water by a plurality of mixing means.

[0061]

[0062] Above, a preferred embodiment of the mixed system according to the present invention has been described.

[0063]

[0064] It should be understood that the above-described embodiments are illustrative in all respects and not restrictive, and the scope of the present invention will be determined by the claims that follow rather than by the detailed description set forth above. Furthermore, the meaning and scope of these claims, as well as all modifications and variations derived from their equivalent concepts, should be construed as encompassing the scope of the present invention.

Claims

1. A first mixing means for simultaneously supplying ultrapure water and a highly concentrated chemical substance and generating a first mixed substance by mixing the ultrapure water and the highly concentrated chemical substance; A first transport line connected to the first mixing means and through which the first mixed material is transported; A second mixing means formed on the first conveying line and mixing the first mixed material again to produce a second mixed material; A mixing tank connected to the first transport line, into which the second mixed material is supplied, and which stores the third mixed material produced by remixing the supplied second mixed material by a third mixing means; A second transfer line connected to the above mixing tank and through which the third mixed material is transferred; A storage tank connected to the second transport line, into which the third mixed material is supplied, and which stores the fourth mixed material produced by remixing the supplied third mixed material by a fourth mixing means; and a third transfer line connected to the storage tank and transferring the fourth mixed material; A concentration measuring unit for measuring the concentration of the fourth mixed material stored in the above storage tank; An ultrapure water supply unit for supplying ultrapure water to the above storage tank; A highly concentrated chemical supply unit for supplying highly concentrated chemicals to the above storage tank; and A mixing system further comprising a flow measuring unit for measuring the flow rate of ultrapure water and highly concentrated chemicals supplied to the storage tank.

2. In paragraph 1, A mixing system, wherein the second transfer line is connected at one end to the lower portion of the mixing tank and at the other end to the side of the storage tank.

3. In paragraph 1, A mixing system characterized in that when the concentration of the fourth mixed substance measured by the concentration measuring unit does not match the reference concentration, ultrapure water and the highly concentrated chemical substance are supplied to the storage tank through the ultrapure water supply unit and the highly concentrated chemical substance supply unit to match the concentration of the fourth mixed substance with the reference concentration.

4. In paragraph 1, A mixing system, characterized in that the internal space of the mixing tank and the internal space of the storage tank are formed to have different volumes.

5. In paragraph 4, A mixing system, characterized in that the internal space of the mixing tank is formed smaller than the internal space of the storage tank.

6. In paragraph 1, A mixing system further comprising a first circulation line, one end of which is connected to the lower portion of the mixing tank and the other end of which is connected to the upper portion of the mixing tank, for circulating a third mixed material inside the mixing tank.

7. In paragraph 1, A second circulation line branched from the third transfer line and formed to be connected to the upper portion of the storage tank; and A mixing system further comprising an opening / closing valve formed on the second circulation line and opening / closing the second circulation line.

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