Deposition mask

Abstract

A deposition mask is disclosed. A deposition mask according to one aspect of the present invention comprises: a mask main body including a first surface and a second surface which is the opposite surface to the first surface; a pattern region formed in a predetermined area of the mask main body so that an organic material can pass through the pattern region; and an edge region disposed to surround the outer periphery of the pattern region, wherein the pattern region may include a first pattern region, a second pattern region disposed inside the first pattern region, and a partition rib region formed between the first pattern region and the second pattern region to surround the second pattern region.

Description

Deposition mask

[0001] The present invention relates to a deposition mask for depositing an organic material on a substrate.

[0002] A deposition mask is a metal sheet with a plurality of through holes formed in a predetermined pattern, and is an important means used to form display pixels, especially in the manufacturing process of display panels such as organic light-emitting diodes (OLEDs).

[0003] In order to implement full color on a display, three deposition processes are performed to form R, G, and B color organic materials on the display substrate.

[0004] In this deposition process, one or more deposition masks are welded and mounted on a frame corresponding to the panel size of the display, and organic vapor evaporated from an organic source passes through a through hole to be deposited on the substrate surface.

[0005] Meanwhile, the deposition mask may include a pattern area in which a plurality of through holes for depositing an organic material are formed on a rectangular metal sheet and a non-pattern area in which the plurality of through holes are not formed, and the pattern area may be composed of a plurality of areas spaced at a certain interval along the length direction of the metal sheet.

[0006] At this time, a grid-shaped rib is formed between a plurality of passage holes arranged adjacent to each other in the pattern area.

[0007] Such ribs can be formed along a first direction and a second direction perpendicular to the first direction, and a lip can be formed at a portion where the ribs formed along the first direction and the ribs formed along the second direction intersect each other.

[0008] Meanwhile, in the case of a deposition mask for implementing high resolution, the lip seal is required to be formed to have a thickness thinner than the thickness of the metal plate constituting the deposition mask and to have a pointed shape at one end.

[0009] Accordingly, a conventional deposition mask for implementing high resolution has a difference in rigidity due to the difference in thickness between the portion corresponding to the border of the pattern area and the non-pattern area adjacent to the pattern area.

[0010] Due to this, conventional deposition masks have a problem in that they crack and tear when a tensile force exceeding a certain amount is applied to ensure flatness during the process of welding and mounting the deposition mask to the mask frame.

[0011] That is, conventional deposition masks have a problem in that the edge of the pattern area does not have sufficient intrinsic tensile strength due to the difference in thickness between the part corresponding to the edge of the pattern area and the thickness of the non-pattern area adjacent to the pattern area.

[0012] The inventors of the present invention have completed the present invention by repeatedly conducting research and experiments and discovering that the area of ​​the lip seal forming the pattern area has a great influence on the intrinsic tensile strength of the deposition mask.

[0013] That is, through repeated research and experiments, it was found that when the area of ​​the lip seal formed at the outermost edge of the pattern area is larger than a certain size, the intrinsic tensile strength of the deposition mask can be easily implemented at the desired level.

[0014] The present invention has been devised in consideration of the above points, and its purpose is to provide a deposition mask that has an intrinsic tensile strength greater than a desired size while allowing organic matter to pass through smoothly.

[0015] The tasks of the present invention are not limited to the tasks mentioned above, and other tasks not mentioned will be clearly understood by those skilled in the art to which the present invention pertains from the description below.

[0016] According to one aspect of the present invention, there is provided a mask body having a first surface through which an organic material to be deposited on a substrate is introduced and a second surface opposite to the first surface, the mask body being formed in a plate shape having a predetermined area; a pattern region formed with a predetermined area on the mask body so as to allow the organic material to pass from the first surface toward the second surface; and a border region arranged to surround an outer circumference of the pattern region; wherein the pattern region may include a first pattern region arranged adjacent to the border region along the border region, a second pattern region arranged inside the first pattern region, and a partition rib region formed between the first pattern region and the second pattern region to surround the second pattern region so as to distinguish the first pattern region and the second pattern region.

[0017] At this time, the first pattern area may include a plurality of first facing holes formed on the first surface, a plurality of first small facing holes formed at positions corresponding one-to-one with the plurality of first facing holes on the second surface, a plurality of first through holes formed such that the plurality of first facing holes and the plurality of first small facing holes overlap and penetrate the mask body, a first rib formed along a first direction to be positioned between the plurality of first through holes on the first surface, a second rib formed along a second direction intersecting the first direction to be positioned between the plurality of first through holes on the first surface, and a plurality of first ribs formed at positions where the first ribs and the second ribs intersect each other on the first surface.

[0018] In addition, the second pattern area may include a plurality of second facing holes formed on the first surface, a plurality of second small facing holes formed at positions corresponding one-to-one with the plurality of second facing holes on the second surface, a plurality of second through holes formed such that the plurality of second facing holes and the plurality of second small facing holes overlap and penetrate the mask body, a third rib formed along a first direction to be positioned between the plurality of second through holes on the first surface, a fourth rib formed along a second direction intersecting the first direction to be positioned between the plurality of second through holes on the first surface, and a plurality of second ribs formed at positions where the third rib and the fourth rib intersect each other on the first surface.

[0019] At this time, each of the plurality of first lip bars may include a flat portion formed to have a predetermined area at one end, and each of the plurality of second lip bars may be formed to have a pointed shape without forming one end as a flat portion.

[0020] According to a preferred embodiment of the present invention, the flat portion has an area of ​​9㎛ 2 It can be formed into an ideal plane.

[0021] In addition, the thickness of the portion where the flat portion is formed in the mask body can be formed to have the same thickness as the thickness of the portion where the border area is formed in the mask body.

[0022] In addition, the thickness of the portion of the mask body where one end of the second lip seal is formed can be formed to have a thickness smaller than the thickness of the portion of the mask body where the border area is formed.

[0023] In addition, the partition rib area may include a first partition rib formed along the first direction so as to be positioned between first and second passage holes arranged adjacently along the second direction on the first surface, a second partition rib formed along the second direction so as to be positioned between the first and second passage holes arranged adjacently along the first direction on the first surface, and a plurality of third ribs formed at intervals along the first and second partition ribs on the first surface.

[0024] In this case, each of the plurality of third ribs may be formed at a position where the second rib or the fourth rib intersects the first compartment rib, or at a position where the first rib or the third rib intersects the second compartment rib, and each of the plurality of third ribs may be formed to have a pointed shape without forming one end in a flat shape.

[0025] At this time, the thickness of the portion of the mask body where one end of the third lip seal is formed can be formed to have a thickness smaller than the thickness of the portion of the mask body where the border area is formed.

[0026] In addition, the plurality of first ribs may include a plurality of first-first ribs arranged at intervals along the edge of a virtual first square ring shape while being positioned between two adjacent first pass-through holes, and a plurality of first-second ribs arranged at intervals along the edge of a virtual second square ring shape while being positioned between two adjacent first pass-through holes and arranged on the inner side of the edge of the virtual first square ring shape.

[0027] In addition, the area of ​​the first flat portion formed to have a predetermined area at one end of the 1-1 lip-bond may be formed to have a larger area than the area of ​​the second flat portion formed to have a predetermined area at one end of the 1-2 lip-bond.

[0028] In addition, the plurality of first ribs may further include a plurality of first-third ribs arranged at intervals along the edge of a virtual third square ring shape that is positioned between two adjacent first pass-through holes and is arranged on the inner side of the edge of the virtual second square ring shape.

[0029] In this case, the area of ​​the first flat portion formed to have a predetermined area at one end of the 1-1 lip-bond may be formed to have a wider area than the area of ​​the second flat portion formed to have a predetermined area at one end of the 1-2 lip-bond, and the area of ​​the second flat portion formed to have a predetermined area at one end of the 1-2 lip-bond may be formed to have a wider area than the area of ​​the third flat portion formed to have a predetermined area at one end of the 1-3 lip-bond.

[0030] Additionally, the border area may be a portion of the mask body that is not etched by the etchant.

[0031] The deposition mask according to the present invention can prevent a decrease in deposition precision by implementing it to have a desired level of intrinsic tensile strength while allowing organic matter to pass through smoothly.

[0032] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the composition of the invention described in the claims.

[0033] FIG. 1 is a drawing showing a state in which a deposition mask according to one embodiment of the present invention is placed on a mask frame.

[0034] Figure 2 is a plan view showing a deposition mask according to one embodiment of the present invention.

[0035] Figure 3 is a drawing of an excerpt of part “A” in Figure 2.

[0036] Figure 4 is a plan view of Figure 3.

[0037] Figure 5 is a drawing showing a state in which Figure 3 is turned over.

[0038] Figure 6 is a plan view of Figure 5.

[0039] Figure 7 is a drawing of an excerpt of part “B” in Figure 5.

[0040] Figure 8 is a cross-sectional view in the “CC” direction and the “DD” direction in Figure 6.

[0041] Figure 9 is a cross-sectional view of the “EE” direction, the “FF” direction, the “KK” direction, and the “LL” direction in Figure 6.

[0042] Fig. 10 is a cross-sectional view in the “GG” direction and the “HH” direction in Fig. 6.

[0043] Fig. 11 is a cross-sectional view in the “II” direction and the “JJ” direction in Fig. 6.

[0044] Fig. 12 is a modified example of Fig. 6.

[0045] Fig. 13 is a cross-sectional view taken in the “KK” direction and the “LL” direction in Fig. 12.

[0046] Fig. 14 is a modified example of Fig. 13.

[0047] Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily practice the present invention. The present invention may be implemented in various different forms and is not limited to the embodiments described herein. To clearly explain the present invention, parts irrelevant to the description are omitted in the drawings, and the same reference numerals designate identical or similar components throughout the specification.

[0048] The words and terms used in this specification and claims should not be construed as limited to their ordinary or dictionary meanings, but should be interpreted in a way that is consistent with the technical idea of ​​the present invention, in accordance with the principles by which the inventor can define terms and concepts in order to best explain his or her invention.

[0049] In addition, the upper surface used in the present specification and claims may mean a surface viewed from above with reference to FIG. 5, and the lower surface may mean a surface viewed from below with reference to FIG. 5. In addition, the thickness direction and the height direction used in the present specification and claims may mean a direction parallel to the Z-axis direction with reference to FIG. 5 from the upper surface to the lower surface or from the lower surface to the upper surface direction, and the width direction and the first direction may mean a direction parallel to the X-axis with reference to FIG. 5, and the length direction and the second direction may mean a direction parallel to the Y-axis with reference to FIG. 5.

[0050] A deposition mask (100) according to one embodiment of the present invention can form pixels on a display panel such as an organic light-emitting diode (OLED) by allowing an organic material to be deposited on a substrate to pass through a penetration hole (121c, 123c) formed in a predetermined pattern.

[0051] For example, a deposition mask (100) according to one embodiment of the present invention can be fixed by welding in a state where a pattern area (120) formed in a predetermined pattern on one surface of a mask frame (10) including an opening (10a) having a predetermined area is positioned corresponding to the opening (10a), as shown in FIG. 1, and can be fixed to the mask frame (10) by welding while being tensioned with a predetermined tensile force.

[0052] Here, the mask frame (10) may have a square band shape with an opening (10a) formed in the center, and may support the deposition mask (100). Such a mask frame (10) may be formed of a metal material with high rigidity, for example, stainless steel.

[0053] At this time, the deposition mask (100) according to one embodiment of the present invention may include a first surface (110a) and a second surface (110b), and the second surface (110b) may be a surface on which a substrate (not shown) is placed to form a desired thin film pattern by depositing a deposition material such as an organic material on the substrate (not shown), and the first surface (110a) may be a surface on which a deposition material such as an organic material supplied from a deposition material supply source (not shown) flows in.

[0054] Accordingly, the deposition mask (100) according to one embodiment of the present invention is fixed to the mask frame (10) through welding in a state where the pattern area (120) is positioned at a position corresponding to the opening (10a) of the mask frame (10), and an organic material can be deposited on a substrate by passing a deposition material such as an organic material through the pattern area (120).

[0055] A deposition mask (100) according to one embodiment of the present invention may include a mask body (110), a pattern area (120), and a border area (130) as shown in FIGS. 1 to 6.

[0056] The above mask body (110) can be formed of a metal thin film such as nickel (Ni), nickel alloy, nickel-cobalt alloy, etc.

[0057] The mask body (110) of this type can be fixed at both ends to the mask frame (10).

[0058] For example, the mask body (110) may be provided in a plate-shaped bar shape having a predetermined area and length, and may include a first side (110a) and a second side (110b) that are opposite sides.

[0059] Here, as described above, the first surface (110a) may be a surface into which a deposition material, such as an organic material supplied from a deposition material supply source (not shown), flows in, and the second surface (110b) may be a surface on which a substrate (not shown) is placed.

[0060] Accordingly, the mask body (110) can be fixed to the mask frame (10) through welding at both ends while the pattern area (120) is positioned at a position corresponding to the opening (10a) of the mask frame (10), and a substrate (not shown) for organic material deposition can be placed on the second surface (110b).

[0061] At this time, the mask body (110) may further include a clamping portion (101) formed on both end sides.

[0062] Such a clamping portion (101) may be a portion to which a clamp (not shown) is coupled that tensions the mask body (110) in both end directions before fixing the mask body (110) to the mask frame (10) by welding. Such a clamping portion (101) may also be removed from the mask body (110) by cutting after the mask body (110) is fixed to the mask frame (10) by welding.

[0063] Although the drawing shows that the mask body (110) has a relatively narrower area than the opening (10a) of the mask frame (10), the present invention is not limited thereto, and the mask body (110) may be provided to have an area that can cover the entire opening (10a) of the mask frame (10).

[0064] The above pattern area (120) can allow the organic material, which is a deposition material, to pass through the mask body (110) so that the organic material can be deposited on the substrate in a predetermined pattern.

[0065] To this end, the pattern area (120) may include a plurality of passage holes (121c, 123c) formed so that the organic material can pass from the first surface (110a) of the mask body (110) toward the second surface (110b), and the plurality of passage holes (121c, 123c) may be arranged to have a predetermined pattern.

[0066] For example, the plurality of passage holes (121c, 123c) may be arranged to form an m×n matrix structure (m, n are natural numbers) while being spaced apart from each other by a certain distance along the first direction and the second direction. In addition, in a state where the passage holes (121c, 123c) are arranged to form an m×n matrix structure (m, n are natural numbers) while being spaced apart from each other by a certain distance along the first direction and the second direction, the intervals between two passage holes (121c, 123c) that are arranged adjacent to each other along the first direction or the second direction may all have a certain interval.

[0067] Accordingly, the organic material can be deposited in a predetermined pattern on one surface of the substrate by passing through a plurality of passage holes (121c, 123c) formed in the pattern area (120).

[0068] A pattern area (120) like this can be formed in a predetermined area on the mask body (110).

[0069] For example, a deposition mask (100) according to one embodiment of the present invention may be formed such that a plurality of pattern areas (120) having a predetermined area are spaced apart from each other along the length direction of the mask body (110) as shown in FIGS. 1 and 2, and each pattern area (120) may be surrounded by a border area (130).

[0070] Here, the pattern area (120) may be a portion of the entire area of ​​the mask body (110) that is etched through an etchant to form the plurality of through holes (121c, 123c), and the border area (130) may be a portion of the entire area of ​​the mask body (110) that is not etched through an etchant, and the border area (130) may be formed on the mask body (110) to surround the outer perimeter of the pattern area (120).

[0071] Although the drawing and description illustrate and describe that the pattern areas (120) are provided in multiple numbers and spaced apart along the length direction of the mask body (110), the present invention is not limited thereto, and the total number of the pattern areas (120) formed on the mask body (110) may be appropriately changed according to design conditions.

[0072] At this time, the pattern area (120) may include a first pattern area (121), a second pattern area (123), and a partition rib area (125).

[0073] For example, the first pattern area (121) may be a portion of the pattern area (120) that is arranged adjacent to the border area (130) along the border area (130), the second pattern area (123) may be a portion that is arranged on the inside of the first pattern area (121), and the partition rib area (125) may be a portion formed between the first pattern area (121) and the second pattern area (123).

[0074] That is, the pattern area (120) can be divided into the first pattern area (121) and the second pattern area (123) through the partition rib area (125), and the first pattern area (121) surrounds the second pattern area (123) and is connected to the border area (130), thereby serving as the outer border of the pattern area (120).

[0075] At this time, each of the first pattern area (121) and the second pattern area (123) may be formed with a plurality of passage holes (121c, 123c) for passing organic matter, and each of the plurality of passage holes (121c, 123c) may be formed through a facing hole (121a, 123a) formed on the first surface (110a) of the mask body (110) and a small hole (121b, 123b) formed on the second surface (110b) of the mask body (110), and a lip seal (122, 124) may be formed between the plurality of passage holes (121c, 123c) adjacent to each other.

[0076] As a specific example, the first pattern area (121) may include a plurality of first through holes (121c) formed to penetrate the mask body (110) as shown in FIGS. 4, 6, and 8, a first rib (121d) formed along a first direction so as to be positioned between the plurality of first through holes (121c) on the first surface (110a), a second rib (121e) formed along a second direction intersecting the first direction so as to be positioned between the plurality of first through holes (121c) on the first surface (110a), and a plurality of first ribs (122) formed at positions where the first ribs (121d) and the second ribs (121e) intersect each other on the first surface (110a).

[0077] In this case, the first pattern area (121) may further include a plurality of first facing holes (121a) formed on the first surface (110a), and a plurality of first small-surface holes (121b) formed at positions corresponding one-to-one with the plurality of first facing holes (121a) on the second surface (110b), and each of the plurality of first through holes (121c) may be formed by overlapping the first facing holes (121a) and the first small-surface holes (121b) corresponding one-to-one with each other.

[0078] Here, the first surface hole (121a) can be formed by recessing a certain depth from the first surface (110a) of the mask body (110) through an etching solution, and the first small surface hole (121b) can be formed by recessing a certain depth from the second surface (110b) of the mask body (110) through an etching solution, and the first surface hole (121a) can be formed to have a relatively larger area than the first small surface hole (121b).

[0079] In addition, the first surface hole (121a) may be formed to have a shape in which the cross-sectional area gradually decreases from the first surface (110a) to the first through hole (121c), and the first small surface hole (121b) may be formed to have a shape in which the cross-sectional area gradually decreases from the second surface (110b) to the first through hole (121c).

[0080] For example, the first surface hole (121a) may be formed to have a curved shape in which the cross-sectional area increases from the first through hole (121c) to the first surface (110a), and the first small surface hole (121b) may be formed to have a curved shape in which the cross-sectional area increases from the first through hole (121c) to the second surface (110b).

[0081] In addition, the first rib (121d) may be provided in multiple pieces and may be formed along the first direction to cross between two first passage holes (121c) that are spaced apart from each other and adjacent to each other along the second direction, and the second rib (121e) may be provided in multiple pieces and may be formed along the second direction to cross between two first passage holes (121c) that are spaced apart from each other and adjacent to each other along the first direction, and each of the first rib (121d) and the second rib (121e) may be formed through the first facing holes (121a) that are adjacent to each other.

[0082] For example, the first rib (121d) may be formed through two first facing holes (121a) formed adjacent to each other along the second direction on the first surface (110a), and the second rib (121e) may be formed through two first facing holes (121a) formed adjacent to each other along the first direction on the first surface (110a).

[0083] In addition, each of the first rib (121d) and the second rib (121e) may be formed by two first facing holes (121a) formed adjacent to each other along one direction as shown in FIG. 7, and may be formed to have a shape of a curve in which the central portion is convex toward the second surface (110b).

[0084] Accordingly, the plurality of first ribs (122) can be formed in a form that protrudes a certain height outward from the first passage hole (121c) at a position where the plurality of first ribs (121d) and the plurality of second ribs (121e) intersect each other in the first pattern area (121).

[0085] Similarly, the second pattern area (123) may include a plurality of second passage holes (123c) formed to penetrate the mask body (110) as illustrated in FIGS. 4, 6, and 10, a third rib (123d) formed along a first direction so as to be positioned between the plurality of second passage holes (123c) on the first surface (110a), a fourth rib (123e) formed along a second direction intersecting the first direction so as to be positioned between the plurality of second passage holes (123c) on the first surface (110a), and a plurality of second ribs (124) formed at positions where the third ribs (123d) and the fourth ribs (123e) intersect each other on the first surface (110a).

[0086] In this case, the second pattern area (123) may further include a plurality of second facing holes (123a) formed on the first surface (110a), and a plurality of second small-surface holes (123b) formed at positions corresponding one-to-one with the plurality of second facing holes (123a) on the second surface (110b), and each of the plurality of second passing holes (123c) may be formed by overlapping the second facing holes (123a) and the second small-surface holes (123b) corresponding one-to-one with each other.

[0087] Here, the second surface hole (123a) can be formed by recessing a certain depth from the first surface (110a) of the mask body (110) through an etching solution, and the second small surface hole (123b) can be formed by recessing a certain depth from the second surface (110b) of the mask body (110) through an etching solution, and the second large surface hole (123a) can be formed to have a relatively larger area than the second small surface hole (123b).

[0088] In addition, the second surface hole (123a) may be formed to have a shape in which the cross-sectional area gradually decreases from the first surface (110a) to the second through hole (123c), and the second small surface hole (123b) may be formed to have a shape in which the cross-sectional area gradually decreases from the second surface (110b) to the second through hole (123c).

[0089] For example, the second surface hole (123a) may be formed to have a curved shape in which the cross-sectional area increases from the second through hole (123c) to the first surface (110a), and the second small surface hole (123b) may be formed to have a curved shape in which the cross-sectional area increases from the second through hole (123c) to the second surface (110b).

[0090] In addition, the third rib (123d) may be formed in the first direction so as to cross between two second passage holes (123c) that are spaced apart from each other and adjacent to each other along the second direction, and the fourth rib (123e) may be formed in the second direction so as to cross between two second passage holes (123c) that are spaced apart from each other and adjacent to each other along the first direction, and each of the third rib (123d) and the fourth rib (123e) may be formed through the second facing holes (123a) that are adjacent to each other.

[0091] For example, the third rib (123d) may be formed through two second facing holes (123a) formed adjacent to each other along the second direction on the first surface (110a), and the fourth rib (123e) may be formed through two second facing holes (123a) formed adjacent to each other along the first direction on the first surface (110a).

[0092] In addition, each of the third rib (123d) and the fourth rib (123e) may be formed by two second facing holes (123a) formed adjacent to each other along one direction as shown in FIG. 7, and may be formed to have a shape of a curve in which the central portion is convex toward the second surface (110b).

[0093] Accordingly, the plurality of second ribs (124) can be formed in a form that protrudes a certain height outward from the second passage hole (123c) at a position where the plurality of third ribs (123d) and the plurality of fourth ribs (123e) intersect each other in the second pattern area (123).

[0094] The above-mentioned partition rib area (125) may be a portion formed between the first pattern area (121) and the second pattern area (123) as described above, and may be a portion that partitions the first pattern area (121) and the second pattern area (123).

[0095] Such a partition rib area (125) may include a first partition rib (125a) formed along the first direction so as to be positioned between the first through-hole (121c) and the second through-hole (123c) which are arranged adjacently along the second direction on the first surface (110a), a second partition rib (125b) formed along the second direction so as to be positioned between the first through-hole (121c) and the second through-hole (123c) which are arranged adjacently along the first direction on the first surface (110a), and a plurality of third ribs (126) formed at intervals along the first partition rib (125a) and the second partition rib (125b) on the first surface (110a).

[0096] For example, the first partition rib (125a) may be formed along the first direction to cross between the first passage hole (121c) and the second passage hole (123c) that are spaced apart from each other and adjacent to each other along the second direction, and the second partition rib (125b) may be formed along the second direction to cross between the first passage hole (121c) and the second passage hole (123c) that are spaced apart from each other and adjacent to each other along the first direction.

[0097] Additionally, the first compartment rib (125a) and the second compartment rib (125b) can be connected to each other so as to completely surround the second pattern area (123).

[0098] That is, the first compartment rib (125a) and the second compartment rib (125b) can be connected to each other to form a compartment rib area (125) having a roughly square ring shape.

[0099] Through this, the first pattern area (121) and the second pattern area (123) can be distinguished from each other through the partition rib area (125).

[0100] At this time, each of the first compartment rib (125a) and the second compartment rib (125b) can be formed through the first facing hole (121a) and the second facing hole (123a) which are formed adjacent to each other.

[0101] For example, the first partition rib (125a) may be formed through a first facing hole (121a) and a second facing hole (123a) that are formed adjacent to each other along the second direction on the first surface (110a), and the second partition rib (125b) may be formed through a first facing hole (121a) and a second facing hole (123a) that are formed adjacent to each other along the first direction on the first surface (110a).

[0102] In addition, each of the first compartment rib (125a) and the second compartment rib (125b) may be formed through a first facing hole (121a) and a second facing hole (123a) formed adjacent to each other along one direction as shown in FIGS. 7 and 9, and may be formed to have a shape of a curve in which the central portion is convex toward the second surface (110b).

[0103] Accordingly, each of the plurality of third ribs (126) may be spaced apart from each other along the first compartment rib (125a) and the second compartment rib (125b), and may be formed at a position where the second rib (121e) or the fourth rib (123e) intersects the first compartment rib (125a), or may be formed at a position where the first rib (121d) or the third rib (123d) intersects the second compartment rib (125b).

[0104] In addition, each of the plurality of third ribs (126) may be formed in a shape that protrudes a certain height outward from the first passage hole (121c) and the second passage hole (123c).

[0105] At this time, the deposition mask (100) according to one embodiment of the present invention may be configured to have an internal tensile force greater than the tensile force applied when combined with the mask frame (10), while allowing the organic material for deposition to smoothly pass through the pattern area (120).

[0106] For example, a deposition mask (100) according to one embodiment of the present invention can prevent cracks or tearing due to the tensile force applied to both ends of the mask body (110) even when the mask frame (10) is fixed while a tensile force of 0.4 kgf to 2 kgf is applied to both ends of the mask body (110).

[0107] That is, the deposition mask (100) according to one embodiment of the present invention can be implemented so that organic matter can pass through smoothly while having an intrinsic tensile strength of, for example, 2 kgf or more.

[0108] To this end, in the deposition mask (100) according to one embodiment of the present invention, each of the plurality of first lip bars (122) may include a flat portion (122a) formed to have a predetermined area at one end thereof, and each of the plurality of second lip bars (124) and the plurality of third lip bars (126) may be formed to have a pointed shape without forming one end thereof as a flat surface.

[0109] In addition, the thickness (t1) of the portion where the flat portion (122a) is formed in the mask body (110) may be formed to have the same thickness as the thickness (t) of the portion where the border area (130) is formed in the mask body (110), and the thickness (t2) of the portion where one end of the second lip bar (124) is formed and the thickness (t3) of the portion where one end of the third lip bar (126) is formed in the mask body (110) may be formed to have a smaller thickness than the thickness (t) of the portion where the border area (130) is formed in the mask body (110).

[0110] For example, each of the plurality of first ribs (122) may be formed with a flat surface (122a) having a predetermined area at one end thereof based on FIGS. 6 and 7, and each of the plurality of second ribs (124) and the plurality of third ribs (126) may be formed with one end thereof having a pointed shape.

[0111] In addition, as shown in FIGS. 9 and 11, the thickness (t1) of the portion where the flat portion (122a) of the first lip bar (122) is formed may have the same thickness as the thickness (t) of the portion where the border area (130) is formed in the mask body (110), and as shown in FIG. 9, the thickness (t2) of the portion where one end of the second lip bar (124) is formed and the thickness (t3) of the portion where one end of the third lip bar (126) is formed may be formed to have a thickness smaller than the thickness (t) of the portion where the border area (130) is formed in the mask body (110).

[0112] At this time, the flat surface (122a) of the first lip (122) can be formed into a flat surface with a total area of ​​a certain size or larger, as shown in FIG. 6.

[0113] That is, since the deposition mask (100) according to one embodiment of the present invention includes a first rib (122) having a flat portion (122a) of a predetermined area and a first pattern region (121) that surrounds the second pattern region (123) and serves as an outer border of the pattern region (120), and the thickness (t1) of the portion where the flat portion (122a) of the first rib (122) is formed is formed to have the same thickness as the thickness (t) of the portion where the border region (130) is formed in the mask body (110), the first pattern region (121) can alleviate the occurrence of a sharp difference in stiffness between the portion of the mask body (110) that forms the border region (130) in an unprocessed state through an etchant and the second pattern region (123) that is etched through an etchant to form a second through hole (123c).

[0114] In addition, unlike the first pattern area (121), the deposition mask (100) according to one embodiment of the present invention is formed so that one end of the second lip bar (124) has a sharp shape in the second pattern area (123), and the thickness (t2) of the portion where the one end of the second lip bar (124) is formed is formed to be smaller than the thickness (t) of the portion where the edge area (130) is formed in the mask body (110), so that the second pattern area (123) can smoothly pass the organic material through the second passage hole (123c).

[0115] That is, the deposition mask (100) according to one embodiment of the present invention forms a first rib (122) having a flat portion (122a) of a predetermined area in the first pattern area (121), while minimizing the formation area and total number of the first ribs (122) that may impede the movement of the organic material during organic material deposition, thereby preventing the deposition precision from being lowered while having an intrinsic tensile strength greater than the desired size.

[0116] For example, in the deposition mask (100) according to one embodiment of the present invention, the flat portion (122a) of the first lip seal (122) has a total area of ​​9 μm. 2 It can be formed into an ideal plane.

[0117] Through this, the deposition mask (100) according to one embodiment of the present invention can be implemented to maintain deposition precision while having an internal tensile strength of 2 kgf or more.

[0118] This can be confirmed from Tables 1 and 2 below.

[0119] Table 1 shows the experimental results showing the presence or absence of defects according to the distance between two adjacent through holes (121c, 123c) and the thickness (t) of the unetched portion of the mask body (110) and the area of ​​the flat portion (122a) when a tensile force of 2 kgf is applied to both ends of the mask body (110), and Table 2 shows the results of measuring the maximum tensile force of the mask body (110) according to the area of ​​the flat portion (122a) under the conditions that the distance between two adjacent through holes is 46 μm and the thickness of the unetched portion of the mask body is 20 μm.

[0120] Here, defective means that a crack occurs in the mask body (110) or the mask body (110) is torn when a tensile force of 2 kgf is applied to both ends of the mask body (110), and good means that the mask body (110) is not damaged even when a tensile force of 2 kgf is applied to both ends of the mask body (110).

[0121] The gap between two adjacent pass-through structures (㎛) The thickness of the unetched part of the mask body (㎛) The area of ​​the flat surface (㎛) 2 )69124620BadGoodGood6520BadGoodGood9225BadGoodGood13025BadGoodGood

[0122] Area of ​​the flat surface (㎛) 2 )0.2514912Maximum tensile strength (kgf)0.40.91.22.02.8

[0123] As can be seen in Table 1 above, when a tensile force of 2 kgf is applied to both ends of the mask body (110), it can be seen that the area of ​​the flat portion (122a) formed at one end of the first lip seal (122) affects the maximum tensile force of the mask body (110), regardless of the gap between two adjacent passage holes or the thickness of the unetched portion of the mask body (110). In addition, as can be seen in Table 2, the total area of ​​the flat portion (122a) is 9 ㎛. 2It can be confirmed that when formed into an ideal plane, a maximum tensile strength of 2 kgf or more can be secured.

[0124] In this way, the deposition mask (100) according to one embodiment of the present invention has a total area of ​​the flat portion (122a) of 9 ㎛. 2 By configuring the above-mentioned flat portion (122a) to be formed into an ideal flat surface, a maximum internal tensile strength of 2 kgf or more can be secured.

[0125] In the above description, the total area of ​​the flat portion (122a) is 9㎛ 2 Although it has been described that the deposition mask (100) according to one embodiment of the present invention can secure a maximum tensile strength of 2 kgf or more by configuring the above-mentioned flat portion (122a) to be formed as an ideal flat surface, the present invention is not limited thereto, and the total area of ​​the above-mentioned flat portion (122a) can be appropriately changed depending on the desired maximum tensile strength.

[0126] Meanwhile, a deposition mask (100) according to one embodiment of the present invention may be configured as a plurality of sets in which a plurality of first ribs (122) constituting the first pattern area (121) are spaced apart along a border (RE1, RE2, RE3) of a virtual square ring shape, as illustrated in FIG. 12.

[0127] For example, the plurality of first ribs (122) may include a plurality of first-first ribs (122-1) arranged at intervals along a border (RE1) of a virtual first square ring shape while being positioned between two adjacent first through holes (121c), and a plurality of first-second ribs (122-2) arranged at intervals along a border (RE2) of a virtual second square ring shape while being positioned between two adjacent first through holes (121c) and being arranged on the inner side of the border (RE1) of the virtual first square ring shape.

[0128] In addition, the first lip (122) may further include a plurality of first-third lip (122-3) bars arranged at intervals along a virtual third square ring-shaped edge (RE3) positioned on the inside of the virtual second square ring-shaped edge (RE2) located between two adjacent first passage holes (121c).

[0129] In this case, a plurality of first-first ribs (122-1) arranged at intervals along the border (RE1) of the virtual first square ring shape may form one set, a plurality of first-second ribs (122-2) arranged at intervals along the border (RE2) of the virtual second square ring shape may form another set, and a plurality of first-third ribs (122-3) arranged at intervals along the border (RE3) of the virtual third square ring shape may form another set.

[0130] At this time, each of the first-first lip (122-1), the first-second lip (122-2), and the first-third lip (122-3) may be formed as a flat surface (122a) having a predetermined area on the upper surface as shown in FIGS. 12 to 14, similar to the above-described embodiment.

[0131] In addition, each of the first-first lip seal (122-1), the first-second lip seal (122-2), and the first-third lip seal (122-3) may have a thickness (t1) of a portion where a flat portion (122a) is formed that is the same thickness as the thickness (t) of a portion where the border area (130) is formed in the mask body (110), and the first flat portion (122-1a) formed at one end of the first-first lip seal (122-1), the second flat portion (122-2a) formed at one end of the first-second lip seal (122-2), and the third flat portion (122-3a) formed at one end of the first-third lip seal (122-3) have a total area of ​​9 ㎛, as illustrated in FIG. 12. 2 It can be formed into an ideal plane.

[0132] In this case, the first flat portion (122-1a) formed at one end of the first-first lip (122-1), the second flat portion (122-2a) formed at one end of the first-second lip (122-2), and the third flat portion (122-3a) formed at one end of the first-third lip (122-3) may be provided to have the same size and the same area as shown in FIGS. 12 and 13.

[0133] Alternatively, as illustrated in FIG. 14, the first flat portion (122-1a) formed at one end of the first-first lip bar (122-1), the second flat portion (122-2a) formed at one end of the first-second lip bar (122-2), and the third flat portion (122-3a) formed at one end of the first-third lip bar (122-3) may be provided to have different sizes and different areas.

[0134] In this case, the first flat portion (122-1a) formed at a position relatively close to the border area (130) can be formed to have a relatively largest size and widest area, and the third flat portion (122-3a) formed at a position closest to the second pattern area (123) can be formed to have a relatively smallest size and narrowest area.

[0135] In addition, when the first pattern area (121) includes the first-first lip bar (122-1) formed to be positioned on the edge (RE1) of the virtual first square ring shape, the first-second lip bar (122-2) formed to be positioned on the edge (RE2) of the virtual second square ring shape, and the first-third lip bar (122-3) formed on the edge (RE3) of the virtual third square ring shape, and the first flat portion (122-1a) formed on one end of the first-first lip bar (122-1), the second flat portion (122-2a) formed on one end of the first-second lip bar (122-2), and the third flat portion (122-3a) formed on one end of the first-third lip bar (122-3) are formed to have different sizes and different areas, they are formed to be positioned relatively close to the edge area (130). The total area of ​​the first flat surface (122-1a) is 9㎛ 2 It can be formed as an ideal plane. That is, the second plane portion (122-2a) and the third plane portion (122-3a), which are formed to be located relatively far from the border area (130) compared to the first plane portion (122-1a), have a total area of ​​9 ㎛. 2 It can also be formed into a plane below.

[0136] Although the embodiments of the present invention have been described, the spirit of the present invention is not limited to the embodiments presented in this specification, and those skilled in the art who understand the spirit of the present invention will be able to easily propose other embodiments by adding, changing, deleting, or adding components within the scope of the same spirit, but this will also be considered to fall within the spirit of the present invention.

Claims

1. A mask body formed in a plate shape having a predetermined area, including a first surface into which an organic material to be deposited on a substrate is introduced and a second surface opposite to the first surface; A pattern area formed with a predetermined area on the mask body so that the organic material can pass from the first surface to the second surface; and Including a border area arranged to surround the perimeter of the above pattern area; The above pattern area is, It includes a first pattern area arranged adjacent to the border area along the border area, a second pattern area arranged inside the first pattern area, and a partition rib area formed between the first pattern area and the second pattern area to surround the second pattern area so as to distinguish the first pattern area and the second pattern area. The above first pattern area is, It comprises a plurality of first facing holes formed on the first surface, a plurality of first small facing holes formed at positions corresponding one-to-one with the plurality of first facing holes on the second surface, a plurality of first through holes formed so that the plurality of first facing holes and the plurality of first small facing holes overlap and penetrate the mask body, a first rib formed along a first direction to be positioned between the plurality of first through holes on the first surface, a second rib formed along a second direction intersecting the first direction to be positioned between the plurality of first through holes on the first surface, and a plurality of first ribs formed at positions where the first ribs and the second ribs intersect each other on the first surface, The above second pattern area is, It includes a plurality of second facing holes formed on the first surface, a plurality of second small facing holes formed at positions corresponding one-to-one with the plurality of second facing holes on the second surface, a plurality of second through holes formed so that the plurality of second facing holes and the plurality of second small facing holes overlap and penetrate the mask body, a third rib formed along a first direction to be positioned between the plurality of second through holes on the first surface, a fourth rib formed along a second direction intersecting the first direction to be positioned between the plurality of second through holes on the first surface, and a plurality of second ribs formed at positions where the third rib and the fourth rib intersect each other on the first surface. Each of the plurality of first ribs above includes a flat portion formed to have a predetermined area at one end, A deposition mask in which each of the plurality of second lip seals is formed so that one end is not formed in a flat shape but has a pointed shape.

2. In paragraph 1, A deposition mask formed so that the thickness of the portion where the flat portion is formed in the mask body has the same thickness as the thickness of the portion where the border area is formed in the mask body.

3. In paragraph 1, The above flat surface has an area of ​​9㎛ 2 A deposition mask formed into an ideal plane.

4. In paragraph 1, A deposition mask formed so that the thickness of a portion of the mask body where one end of the second lip seal is formed is smaller than the thickness of a portion of the mask body where the border area is formed.

5. In paragraph 1, The above partition rib area is, A first partition rib formed along the first direction so as to be positioned between the first through-hole and the second through-hole which are arranged adjacently along the second direction on the first surface, a second partition rib formed along the second direction so as to be positioned between the first through-hole and the second through-hole which are arranged adjacently along the first direction on the first surface, and a plurality of third ribs formed at intervals along the first and second partition ribs on the first surface, Each of the plurality of third ribs is formed at a position where the second rib or the fourth rib intersects the first compartment rib, or at a position where the first rib or the third rib intersects the second compartment rib. A deposition mask in which each of the plurality of third ribs is formed so that one end is not formed in a flat shape but has a pointed shape.

6. In paragraph 5, A deposition mask formed so that the thickness of a portion of the mask body where one end of the third lip seal is formed is smaller than the thickness of a portion of the mask body where the border area is formed.

7. In paragraph 1, The above plurality of first lip seals are, A deposition mask comprising a plurality of first-first ribs arranged at intervals along a border of a virtual first rectangular ring shape while being positioned between two adjacent first pass-through holes, and a plurality of first-second ribs arranged at intervals along a border of a virtual second rectangular ring shape while being positioned between two adjacent first pass-through holes and arranged on the inner side of the border of the virtual first rectangular ring shape.

8. In paragraph 7, A deposition mask in which the area of ​​the first flat portion formed to have a predetermined area at one end of the first-first lip-bond is larger than the area of ​​the second flat portion formed to have a predetermined area at one end of the first-second lip-bond.

9. In paragraph 7, The above plurality of first lip seals are, It further includes a plurality of first-third ribs arranged at intervals along the edge of a virtual third rectangular ring shape located between two adjacent first pass-through holes and arranged on the inner side of the edge of the virtual second rectangular ring shape. The area of ​​the first flat portion formed to have a predetermined area at one end of the first-first lip-bond is formed to have a larger area than the area of ​​the second flat portion formed to have a predetermined area at one end of the first-second lip-bond. A deposition mask in which the area of ​​the second flat portion formed to have a predetermined area at one end of the first-second lip-bond is larger than the area of ​​the third flat portion formed to have a predetermined area at one end of the first-third lip-bond.

10. In paragraph 1, The above-mentioned border area is a deposition mask, which is a portion of the mask body that has not been etched by the etchant.

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