Cover opening mechanism for process chamber, and semiconductor process device

Abstract

The present application relates to the technical field of semiconductor process devices, and in particular to a cover opening mechanism for a process chamber, and a semiconductor process device. The cover opening mechanism comprises a supporting seat, a rotating shaft, and a positioning member; the positioning member is capable of moving relative to the rotating shaft; the rotating shaft is adapted to be connected to an upper cover of the process chamber; the supporting seat is adapted to be connected to a chamber body of the process chamber; the rotating shaft is rotatably connected to the supporting seat; the rotating shaft is adapted to rotate between a first rotating position and a second rotating position; when the rotating shaft is at the first rotating position or the second rotating position, the positioning member is capable of moving relative to the rotating shaft to be in positioning engagement with the rotating shaft or release the positioning engagement. The present application can solve the problems of high maintenance difficulty and long maintenance time of existing semiconductor process devices.

Description

Cover opening mechanism for process chamber and semiconductor process equipment Technical Field

[0001] The present application belongs to the technical field of semiconductor process equipment, and specifically relates to a cover opening mechanism for a process chamber and semiconductor process equipment. Background Art

[0002] A capacitively coupled plasma etcher ionizes process gases through upper and lower electrodes, generating plasma that bombards the wafer surface and completes etching. The upper electrode and components within the process chamber of a capacitively coupled plasma etcher require maintenance after a period of processing.

[0003] In related technologies, when performing chamber maintenance, an upper electrode lifter is used to raise the upper cover, positioning it above the chamber body. This allows maintenance personnel to stand on the maintenance side to perform maintenance on components on the upper cover. Generally speaking, the diameter of the upper cover is greater than the arm length of the maintenance personnel, making it difficult for maintenance personnel standing on the maintenance side to access components on the upper cover that are far from the maintenance side. This requires maintenance personnel to move to the side opposite the maintenance side to perform maintenance on the upper cover, which increases the difficulty and time required for maintenance of semiconductor process equipment. Summary of the Invention

[0004] The purpose of the embodiments of the present application is to provide a cover opening mechanism for a process chamber and semiconductor process equipment, which can solve the problems of difficult and long maintenance time of current semiconductor process equipment.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] In a first aspect, an embodiment of the present application provides a cover opening mechanism for a process chamber, comprising a support seat, a rotating shaft, and a positioning member, wherein the positioning member is movable relative to the rotating shaft.

[0007] The rotating shaft is used to be connected to the upper cover of the process chamber, the support base is used to be connected to the chamber body of the process chamber, the rotating shaft is rotatably connected to the support base, and the rotating shaft is used to rotate between a first rotation position and a second rotation position.

[0008] When the rotating shaft is in the first rotating position or the second rotating position, the positioning member can move relative to the rotating shaft to achieve positioning cooperation with the rotating shaft or release the positioning cooperation with the rotating shaft.

[0009] In a second aspect, an embodiment of the present application provides a semiconductor process equipment, including a process chamber and the above-mentioned opening mechanism, the process chamber includes a chamber body and an upper cover, the rotating shaft is connected to the upper cover, and the support seat is connected to the chamber body.

[0010] In an embodiment of the present application, the rotating shaft is rotatably connected to the support seat and can be rotated from a first rotation position to a second rotation position. When the cover opening mechanism of the embodiment of the present application is applied to the process chamber, the second rotation position can be configured as follows: when the rotating shaft is in the second rotation position, the upper cover is misaligned with the top opening of the chamber body. At this time, the upper cover is located on the maintenance side of the chamber body of the process chamber. In this way, the maintenance personnel no longer need to move to the side opposite to the maintenance side to maintain the upper cover, thereby reducing the maintenance difficulty and maintenance time of the semiconductor process equipment.

[0011] In addition, the cover opening mechanism also includes a positioning member that can move relative to the rotating shaft. When the rotating shaft is in the first rotation position, the positioning member can move relative to the rotating shaft to be positioned and matched with the rotating shaft. This not only ensures that the rotating shaft is in the preset first rotation position, but also prevents the upper cover connected to the rotating shaft from rotating during the process and interfering with the progress of the process; when the upper cover needs to be maintained, the positioning member can move relative to the rotating shaft to release the positioning match with the rotating shaft, and the rotating shaft can be rotated to the second rotation position; when the rotating shaft is in the second rotation position, the positioning member can move relative to the rotating shaft to be positioned and matched with the rotating shaft, so that not only ensures that the rotating shaft is in the preset second rotation position, but also prevents the upper cover connected to the rotating shaft from rotating during maintenance, so as to prevent safety accidents and increase maintenance difficulty; after the maintenance is completed, the positioning member can move relative to the rotating shaft to release the positioning match with the rotating shaft, and the rotating shaft can be rotated to the first rotation position. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] FIG1 is a schematic structural diagram of a semiconductor process equipment disclosed in an embodiment of the present application;

[0013] FIG2 is a cross-sectional view of a portion of the structure of a semiconductor process equipment disclosed in an embodiment of the present application;

[0014] FIG3 is a bottom view of a portion of the structure of the semiconductor process equipment disclosed in an embodiment of the present application;

[0015] FIG4 is a front view of a partial structure of a semiconductor process equipment disclosed in an embodiment of the present application;

[0016] FIG5 is a schematic diagram of a fluid pipeline of a semiconductor process equipment disclosed in an embodiment of the present application;

[0017] FIG6 is a schematic diagram of the fluid flow direction of the semiconductor process equipment disclosed in an embodiment of the present application when the reversing portion is pressed;

[0018] FIG7 is a schematic diagram of fluid flow direction of the semiconductor process equipment disclosed in an embodiment of the present application when the reversing portion is released;

[0019] FIG8 is a schematic diagram of a portion of fluid piping of a semiconductor process equipment disclosed in an embodiment of the present application;

[0020] FIG9 is a schematic diagram of the fluid pipeline of the lifting pipeline system disclosed in an embodiment of the present application;

[0021] FIG10 is a schematic diagram of the fluid flow direction of the lifting pipeline system disclosed in an embodiment of the present application when the first manual switching valve is in the fifth valve position;

[0022] FIG11 is a schematic diagram of the fluid flow direction of the lifting pipeline system disclosed in an embodiment of the present application when the first manual switching valve is in the sixth valve position.

[0023] Explanation of reference numerals: 100 - first manual switching valve, 110 - first manual valve, 111 - first medium port, 112 - second medium port, 113 - third medium port, 120 - second manual valve, 121 - fourth medium port, 122 - fifth medium port, 200 - first fluid pipeline, 210 - first control valve, 211 - first pilot port, 212 - first communication port, 213 - second communication port, 300 - second fluid pipeline, 400 - first drive device , 410-first flow port, 420-second flow port, 500-second manual switching valve, 600-guide, 700-flange, 810-chamber body, 811-first limiting protrusion, 812-second limiting protrusion, 813-support seat, 814-rotation hole, 815-first hole section, 816-second hole section, 821-upper cover, 822-rotation shaft, 823-cantilever beam, 824-lifting pipeline system, 825-first medium Entrance, 826-stopper, 827-fixing block, 828-first buffer block, 829-second buffer block, 830-positioning member, 840-positioning fitting, 841-first fitting portion, 842-second fitting portion, 842a-first sub-fitting portion, 842b-second sub-fitting portion, 850-interlocking device, 851-first fluid port, 852-second fluid port, 853-reversing portion, 854-third fluid port, 860-third Control valve, 861-second pilot port, 862-fifth connecting port, 863-sixth connecting port, 870-second drive device, 871-third flow port, 872-fourth flow port, 880-locking reversing valve, 881-fourth fluid port, 882-fifth fluid port, 883-sixth fluid port, 890-one-way throttle valve, 910-radial rolling bearing, 920-axial rolling bearing, 940-second shuttle valve; 950-first shuttle valve. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0025] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0026] The following describes in detail the cover opening mechanism for the process chamber and the semiconductor process equipment provided by the embodiments of the present application through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0027] As shown in Figures 1 to 11, embodiments of the present application disclose a cover opening mechanism for a process chamber, comprising a support base 813, a rotating shaft 822, and a positioning member 830. The positioning member 830 is movable relative to the rotating shaft 822. In some embodiments, the positioning member 830 can move relative to the rotating shaft 822 in various ways, such as allowing the positioning member 830 to move or rotate relative to the rotating shaft 822.

[0028] The rotating shaft 822 is used to be connected to the upper cover 821 of the process chamber, and the support seat 813 is used to be connected to the chamber body 810 of the process chamber. The rotating shaft 822 is rotatably connected to the support seat 813. The rotating shaft 822 is used to rotate between a first rotation position and a second rotation position. When the rotating shaft 822 is in the first rotation position or the second rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position or release the positioning with the rotating shaft 822. Specifically, the positioning member 830 can only position or release the positioning with the rotating shaft 822 when the rotating shaft 822 is in the first rotation position, or can only position or release the positioning with the rotating shaft 822 when the rotating shaft 822 is in the second rotation position, or, when the rotating shaft 822 is in the first rotation position and the second rotation position, the positioning member 830 can position or release the positioning with the rotating shaft 822. It should be noted that, when the positioning member 830 is positioned and matched with the rotating shaft 822, the rotating shaft 822 cannot rotate relative to the support seat 813; when the positioning member 830 is released from the rotating shaft 822, the rotating shaft 822 can rotate relative to the support seat 813. That is to say, the positioning and release of positioning described in this embodiment refer to: positioning and release of positioning in the rotation direction of the rotating shaft 822.

[0029] In an embodiment of the present application, the rotating shaft 822 is rotatably connected to the support seat 813 and can be rotated from a first rotation position to a second rotation position. When the cover opening mechanism of the embodiment of the present application is applied to the process chamber, the second rotation position can be configured as follows: when the rotating shaft 822 is in the second rotation position, the upper cover 821 is misaligned with the top opening of the chamber body 810. At this time, the upper cover 821 is located on the maintenance side of the chamber body 810 of the process chamber. In this way, maintenance personnel no longer need to move to the side opposite to the maintenance side to maintain the upper cover 821, thereby reducing the maintenance difficulty and maintenance time of semiconductor process equipment.

[0030] In addition, the cover opening mechanism further includes a positioning member 830 that can move relative to the rotating shaft 822. When the rotating shaft 822 is in the first rotation position, the positioning member 830 can move relative to the rotating shaft 822 to be positioned and matched with the rotating shaft 822. This not only ensures that the rotating shaft 822 is in the preset first rotation position, but also prevents the upper cover 821 connected to the rotating shaft 822 from rotating during the process to interfere with the process. When the upper cover 821 needs to be maintained, the positioning member 830 can move relative to the rotating shaft 822 to release the positioning match with the rotating shaft 822. At this time, the rotating shaft 822 22 can be rotated to the second rotation position; when the rotating shaft 822 is in the second rotation position, the positioning member 830 can be moved relative to the rotating shaft 822 to be positioned and matched with the rotating shaft 822, so as to not only ensure that the rotating shaft 822 is in the preset second rotation position, but also prevent the upper cover connected to the rotating shaft 822 from rotating during maintenance, so as to prevent safety accidents and increase the difficulty of maintenance; after the maintenance is completed, the positioning member 830 can be moved relative to the rotating shaft 822 to release the positioning match with the rotating shaft 822, and at this time the rotating shaft 822 can be rotated to the first rotation position.

[0031] In some embodiments, a rotation hole 814 is defined within the support base 813, and a rotation shaft 822 is rotatably disposed within the rotation hole 814. When the rotation shaft 822 is in a first rotational position, the upper cover 821 is directly opposite the top opening of the chamber body 810; when the rotation shaft 822 is in a second rotational position, the upper cover 821 is offset from the top opening. In this embodiment, the upper cover 821 can be directly opposite the top opening of the chamber body 810, that is, along the axis of the top opening, the orthographic projection of the upper cover 821 overlaps the orthographic projection of the top opening, and in this case, the orthographic projection of the top opening is completely within the orthographic projection of the upper cover 821. In this case, the upper cover 821 can be placed on the chamber body 810 to cover the top opening; alternatively, the upper cover 821 can be located directly above the top opening with a gap between the upper cover 821 and the chamber body 810, that is, the upper cover 821 does not cover the top opening. Furthermore, in some embodiments, the rotation axis of the rotating shaft 822 may be located on one side of the chamber body 810, in which case the rotation axis may not intersect the chamber body 810; however, the rotation axis may also intersect the chamber body 810. The upper cover 821 may be offset from the top opening, that is, the orthographic projection of the top opening may be outside the orthographic projection of the upper cover 821 along the axis of the top opening. In this case, the upper cover 821 may be located on the maintenance side of the chamber body 810.

[0032] In some embodiments, the outer circumference of the rotating shaft 822 is provided with a first matching portion 841 and / or a second matching portion 842. When the rotating shaft 822 is in the first rotation position, the positioning member 830 can be moved relative to the rotating shaft 822 to position and cooperate with the first matching portion 841 or release the positioning cooperation; when the rotating shaft 822 is in the second rotation position, the positioning member 830 can be moved relative to the rotating shaft 822 to position and cooperate with the second matching portion 842 or release the positioning cooperation, but the first matching portion 841 and / or the second matching portion 842 are provided on the outer circumference of the rotating shaft 822 so that the first matching portion 841 and / or the second matching portion 842 are away from each other. It is closer to the axis of the rotating shaft 822, so that when the rotating shaft 822 rotates at the same angle, the displacement of the first matching part 841 and / or the second matching part 842 is smaller. In other words, this requires that the first matching part 841 and the second matching part 842 are closer together, which may cause confusion in the matching between the positioning member 830 and the first matching part 841 and the second matching part 842; for example, when the positioning member 830 is required to be positioned and matched with the first matching part 841, it is mistakenly positioned and matched with the second matching part 842; or, when the positioning member 830 is required to be positioned and matched with the second matching part 842, it is mistakenly positioned and matched with the first matching part 841.

[0033] In some embodiments, the cover opening mechanism also includes a positioning fitting 840, which is arranged on the outside of the rotating shaft 822; a first fitting portion 841 is provided on the positioning fitting 840, and when the rotating shaft 822 is in the first rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position or release the positioning fitting with the first fitting portion 841; and / or, a second fitting portion 842 is provided on the positioning fitting 840, and when the rotating shaft 822 is in the second rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position or release the positioning fitting with the second fitting portion 842. In this embodiment, the first mating portion 841 and / or the second mating portion 842 are disposed on the positioning mating member 840, which is disposed outside the rotation shaft 822. This allows for a more appropriate distance between the first mating portion 841 and / or the second mating portion 842 and the axis of the rotation shaft 822. Consequently, when the rotation shaft 822 rotates at the same angle, the first mating portion 841 and / or the second mating portion 842 move at a more appropriate displacement, thereby improving the mating accuracy between the positioning member 830 and the first mating portion 841 and / or the second mating portion 842. Furthermore, disposing the first mating portion 841 and the second mating portion 842 on the positioning mating member 840 also allows for a more appropriate distance between the first mating portion 841 and the second mating portion 842, thereby resolving the issue of inconsistent mating between the positioning member 830 and the first mating portion 841 and the second mating portion 842.

[0034] In some embodiments, the positioning member 830 may have a positioning protrusion (or positioning recess), and the first mating portion 841 and the second mating portion 842 may both be positioning recesses (or positioning protrusions), and the positioning recess may have a channel for the positioning protrusion to enter or exit, so that when the positioning member 830 can rotate relative to the rotating shaft 822, the positioning protrusion can enter or exit the positioning recess through the channel. The positioning mating member 840 may be an annular component that can be sleeved on the outside of the rotating shaft 822; of course, the positioning mating member 840 may also be a fan-shaped component, and this application does not limit the shape of the positioning mating member 840. The positioning mating member 840 and the rotating shaft 822 may be separate components, or the positioning mating member 840 may also be integrally formed with the rotating shaft 822.

[0035] In some embodiments, the second rotational position includes a first sub-position and a second sub-position. The second mating portion 842 includes a first sub-mating portion 842a corresponding to the first sub-position and a second sub-mating portion 842b corresponding to the second sub-position. The rotation shaft 822 can rotate from the first rotational position to the first sub-position along a first rotational direction, and can also rotate from the first rotational position to the second sub-position along a second rotational direction. The first rotational direction is opposite to the second rotational direction. The first sub-mating portion 842a and the second sub-mating portion 842b can be spaced apart along the circumference of the positioning mating member 840.

[0036] When the rotating shaft 822 is in the first sub-position, the positioning member 830 can move relative to the rotating shaft 822 to engage with or release the first sub-engaging portion 842a. When the rotating shaft 822 is in the second sub-position, the positioning member 830 can move relative to the rotating shaft 822 to engage with or release the second sub-engaging portion 842b. In this embodiment, the second engaging portion 842 includes a first sub-engaging portion 842a and a second sub-engaging portion 842b. When the rotating shaft 822 is in the first sub-position and the second sub-position, the positioning member 830 engages with or releases the first sub-engaging portion 842a and the second sub-engaging portion 842b, respectively. In other words, the positioning member 840 and the positioning member 830 of this embodiment can cooperate to accommodate two rotation angles, and the above-mentioned two rotation angles can correspond to two maintenance positions of the upper cover. In this way, the rotating shaft 822 can be rotated to different maintenance positions and then positioned according to different maintenance requirements, thereby making the semiconductor processing equipment adaptable to various maintenance requirements.

[0037] In some embodiments, the lid opening mechanism further includes a lifting mechanism and a cantilever beam 823. The first end of the lifting mechanism is connected to the upper lid 821, the second end of the lifting mechanism is connected to the first end of the cantilever beam 823, and the second end of the cantilever beam 823 is fixedly connected to the rotation shaft 822. The lifting mechanism can drive the upper lid 821 up or down to move it closer to or further away from the top opening of the chamber body 810. In some embodiments, the axis of the rotation shaft 822 and the axis of the cantilever beam 823 form an angle, which can be acute, right, or obtuse. In this embodiment, the lid opening mechanism includes a lifting mechanism that can drive the upper lid 821 up or down to move it away from or closer to the top opening. The lifting mechanism is connected to the rotation shaft 822 via the cantilever beam 823. This allows the rotation shaft 822 to be positioned away from the center of the upper lid 821, thereby increasing the area of ​​the upper lid 821 located on the maintenance side when in the second rotational position, thereby allowing more components of the upper lid 821 to be located on the maintenance side.

[0038] The specific operation process is as follows: when the upper cover 821 needs to be maintained, the lifting device is controlled to lift the upper cover 821. During this process, the upper cover 821 can open the top opening, and then the positioning member 830 and the positioning matching member 840 are released from the positioning matching, and the upper cover 821 is pushed to rotate the upper cover 821 from the first rotation position to the second rotation position.

[0039] In some embodiments, the lifting device includes a first drive device 400 and an interlocking device 850. The interlocking device 850 is provided with a reversing portion 853 for switching the interlocking device 850 between a first state and a second state. When the rotating shaft 822 is in the first rotation position, the cantilever beam 823 presses the reversing portion 853, and the interlocking device 850 is in the first state, so that the first drive device 400 drives the upper cover 821 to rise and fall. When the rotating shaft 822 is in the second rotation position, the cantilever beam 823 releases the reversing portion 853, and the interlocking device 850 is in the second state to limit the first drive device 400 from driving the upper cover 821 to rise and fall.

[0040] In this embodiment, when the rotating shaft 822 is in the first rotational position (i.e., when the upper cover 821 is aligned with the top opening of the chamber body 810 and is not on the maintenance side), the cantilever beam 823 presses the reversing portion 853, placing the interlocking device 850 in the first state, thereby enabling the first drive device 400 to move the upper cover 821 upward or downward. When the rotating shaft 822 is in the second rotational position (i.e., when the upper cover 821 is offset from the top opening and is on the maintenance side), the cantilever beam 823 releases the reversing portion 853, placing the interlocking device 850 in the second state, thereby restricting the first drive device 400 from moving the upper cover 821 upward or downward. Thus, the first drive device 400 in this embodiment can only move the upper cover 821 upward or downward when it is not on the maintenance side. This prevents safety accidents caused by maintenance personnel accidentally lifting the upper cover 821 while performing maintenance on the upper cover 821. Of course, the lifting device may also include only the first drive device 400 without the interlocking device 850.

[0041] In some embodiments, the first drive device 400 is a telescopic cylinder, the interlocking device 850 is an interlocking reversing valve, and the lifting device further includes a lifting pipeline system 824. In other embodiments, the first drive device 400 may be a drive source such as an electric motor or a hydraulic motor, and a lifting mechanism connected to the drive source. In this case, the interlocking device 850 is a direction switching component of the electric motor or hydraulic motor, and the lifting mechanism may be a screw-nut mechanism, a connecting rod mechanism, etc.

[0042] The lifting piping system 824 is connected to the first drive device 400 and has a first medium inlet 825 for introducing a fluid medium to drive the first drive device 400 to extend or retract. Specifically, after the fluid medium is introduced into the first medium inlet 825, the lifting piping system 824 switches its internal piping to allow the fluid medium to enter the rod chamber or the rodless chamber of the first drive device 400. This allows the first drive device 400 to extend or retract, thereby driving the upper cover 821 toward or away from the top opening. The fluid medium can be compressed air or hydraulic oil, and the first drive device 400 can be a hydraulic cylinder or a pneumatic cylinder.

[0043] The interlocking device 850 has a first fluid port 851 and a second fluid port 852. The first fluid port 851 can be connected to a fluid source, and the second fluid port 852 can be connected to the first medium inlet 825. In some embodiments, the interlocking device 850 can be a manual reversing valve, a solenoid reversing valve, a mechanically controlled reversing valve, etc. For example, the interlocking device 850 can be a roller plunger-type mechanically controlled valve, in which case the reversing portion 853 is a roller plunger. Of course, in addition to the roller plunger, the reversing portion 853 can also be a button, etc.

[0044] When the interlocking device 850 is in the first state, the interlocking device 850 is located in the first valve position to connect the first fluid port 851 with the second fluid port 852; when the interlocking device 850 is in the second state, the interlocking device 850 is located in the second valve position to disconnect the first fluid port 851 from the second fluid port 852. In this embodiment, when the interlocking device 850 is in the first state, the interlocking device 850 is located in the first valve position, and the first fluid port 851, the second fluid port 852 and the first medium inlet 825 are connected in sequence. At this time, the external fluid source can pass the fluid medium into the first medium inlet 825 through the first fluid port 851 and the second fluid port 852 in sequence to drive the first driving device 400 to extend and retract, and then drive the upper cover 821 to rise and fall; and when the interlocking device 850 is in the second state, the interlocking device 850 is located in the second valve position, and the first fluid port 851 is disconnected from the second fluid port 852, that is, the fluid source cannot pass the fluid medium into the first medium inlet 825 through the first fluid port 851, thereby unable to drive the first driving device 400 to extend and retract, and further unable to drive the upper cover 821 to rise and fall.

[0045] In some embodiments, the first drive device 400 has a first flow port 410 and a second flow port 420; the first flow port 410 is connected to the first control valve 210, and the first control valve 210 has a first pilot port 211, and a first connecting port 212 and a second connecting port 213 that can be connected and disconnected. When the first pilot fluid of a first preset pressure is introduced into the first pilot port 211, the first connecting port 212 is connected to the second connecting port 213.

[0046] The first connecting port 212 and the second circulation port 420 can be connected to the first medium inlet 825 in a disconnectable manner, and the first circulation port 410 is connected to the second connecting port 213; when the first medium inlet 825 is connected to the first circulation port 410 and disconnected from the second circulation port 420, the first driving device 400 can drive the upper cover 821 to descend; when the first medium inlet 825 is connected to the second circulation port 420 and disconnected from the first circulation port 410, the first driving device 400 can drive the upper cover 821 to rise.

[0047] Specifically, the first control valve 210 is a pilot valve. Only when a first pilot fluid at a first preset pressure is introduced into the first pilot port 211 will the first communication port 212 be connected to the second communication port 213. At this time, the fluid medium in the first medium inlet 825 can enter the first drive device 400 through the first control valve 210, or the fluid medium in the first drive device 400 can flow out through the first control valve 210. Therefore, when it is not necessary to drive the upper cover 821 to descend, the first pilot fluid can be prevented from being introduced into the first control valve 210. In this way, even if the fluid medium is introduced into the first medium inlet 825, the fluid medium cannot enter the first drive device 400 through the first control valve 210, thereby ensuring that the upper cover 821 cannot descend, thereby preventing safety accidents.

[0048] Specifically, the first pilot fluid introduced into the first pilot port 211 is the fluid medium flowing in from the first medium inlet 825. When the interlock device 850 is in the first valve position, the first fluid port 851 and the second fluid port 852 are connected. At this time, an external fluid source can sequentially introduce the fluid medium into the first medium inlet 825 through the first fluid port 851 and the second fluid port 852. The fluid medium then flows to the first pilot port 211 through the first shuttle valve 950. At this time, the fluid medium can enter the first drive device 400 through the first control valve 210. The first shuttle valve 950 has two inlets on the left and right sides in Figures 6 and 7, respectively, and an outlet on the upper side. Fluid can be introduced into either of the two inlets, and the fluid flows out through the outlet.

[0049] The interlocking device 850 also has a third fluid port 854, which is connected to the second flow port 420 via a second shuttle valve 940. The second shuttle valve 940 has two inlets on the left and right sides in Figures 6 and 7, respectively, and an outlet on the bottom side. Fluid can enter either inlet and flow out through the outlet. When the interlocking device 850 is in the first valve position, the first fluid port 851 is disconnected from the third fluid port 854 and connected to the second fluid port 852. When the interlocking device 850 is in the second valve position, the first fluid port 851 is connected to the third fluid port 854 and disconnected from the second fluid port 852, and the first communication port 212 is disconnected from the second communication port 213. It is easy to understand that the first pilot fluid introduced into the first pilot port 211 is the fluid medium flowing in from the first medium inlet 825. When the interlocking device 850 is in the second valve position, since the first fluid port 851 is disconnected from the second fluid port 852, the fluid source cannot introduce the fluid medium into the first medium inlet 825 through the first fluid port 851. Therefore, no first pilot fluid (i.e., fluid medium) is introduced into the first pilot port 211. At this time, the first connecting port 212 is disconnected from the second connecting port 213.

[0050] In this embodiment, when the rotating shaft 822 is in the second rotation position, that is, the cantilever beam 823 releases the reversing portion 853, and the upper cover 821 is on the maintenance side, the first fluid port 851 is connected to the third fluid port 854, and the third fluid port 854 is connected to the second flow port 420 of the first drive device 400 through the second shuttle valve 940. In other words, the external fluid source can enter the second flow port 420 through the first fluid port 851, the third fluid port 854 and the second shuttle valve 940 in sequence. At this time, since the first fluid port 851 is disconnected from the second fluid port 852, the first pilot port 211 still does not have the first pilot fluid (that is, the fluid medium) flowing into it. Therefore, the first communication port 212 is disconnected from the second communication port 213, and the fluid medium in the first drive device 400 cannot be discharged through the first flow port 410, thereby preventing the piston rod of the first drive device 400 from moving upward and remaining stationary. At the same time, because the external fluid source continuously supplies the fluid medium to the second flow port 420 of the first drive device 400, this can balance the tension applied by the upper cover 821 to the piston rod of the first drive device 400, thereby maintaining the first drive device 400 in its raised position, preventing the piston rod of the first drive device 400 from being lowered due to the gravity of the upper cover 821, thereby reducing the risk of safety accidents. Of course, the interlock device 850 can also have other fluid ports to allow the fluid medium flowing out of the lifting pipeline system 824 to be discharged through the interlock device 850.

[0051] In some embodiments, the second fluid port 852 is connected to a third control valve 860. The third control valve 860 has a second pilot port 861, as well as a fifth communication port 862 and a sixth communication port 863 that are openably connected. The fifth communication port 862 is connected to the second fluid port 852, and the sixth communication port 863 is connected to the first medium inlet 825. When a second pilot fluid at a second preset pressure is introduced into the second pilot port 861, the fifth communication port 862 and the sixth communication port 863 are connected. In this embodiment, the third control valve 860 is a pilot valve. Only when a second pilot fluid at a second preset pressure is introduced into the second pilot port 861 does the fifth communication port 862 connect to the sixth communication port 863. Only then can the fluid medium from the external fluid source pass through the third control valve 860 and enter the first medium inlet 825, thereby achieving the lifting and lowering of the first drive device 400. Thus, the provision of the third control valve 860 in this embodiment further ensures that the first drive device 400 can be extended or retracted only when required.

[0052] In some embodiments, the lid opening mechanism further includes a second drive device 870, which is a telescopic cylinder. One end of the second drive device 870 is used to connect to the chamber body 810, and the other end of the second drive device 870 is connected to the positioning member 830. The second drive device 870 can drive the positioning member 830 to move, and the second drive device 870 has a third flow port 871 and a fourth flow port 872. In some embodiments, the second drive device 870 can be a hydraulic cylinder or a pneumatic cylinder. Of course, the second drive device 870 of this embodiment can also be omitted, and the positioning member 830 can be driven to move manually or electrically. Furthermore, a guide member 600 is provided on the chamber body 810, and a guide hole is provided on the guide member 600. At least a portion of the piston rod of the second drive device 870 is guided and matched with the guide hole to enhance the stability of the telescopic movement of the second drive device 870.

[0053] The opening mechanism also includes a locking reversing valve 880, which has a fourth fluid port 881, a fifth fluid port 882 and a sixth fluid port 883. The fifth fluid port 882 and the sixth fluid port 883 are respectively connected to the fourth fluid port 881 in a switchable manner. The fifth fluid port 882 is connected to the third flow port 871, and the sixth fluid port 883 is connected to the fourth flow port 872.

[0054] The locking reversing valve 880 has a third valve position and a fourth valve position. When the locking reversing valve 880 is in the third valve position, the fourth fluid port 881 is connected to the fifth fluid port 882 and is disconnected from the sixth fluid port 883. The second drive device 870 drives the positioning member 830 to move to cooperate with the rotating shaft 822; when the locking reversing valve 880 is in the fourth valve position, the fourth fluid port 881 is connected to the sixth fluid port 883 and is disconnected from the fifth fluid port 882. The second drive device 870 drives the positioning member 830 to move to release the positioning cooperation with the rotating shaft 822; the second pilot port 861 is connected to the connecting pipe between the fifth fluid port 882 and the third flow port 871. In this embodiment, when the fourth fluid port 881 is connected to one of the fifth fluid port 882 and the sixth fluid port 883, the fourth fluid port 881 is disconnected from the other of the fifth fluid port 882 and the sixth fluid port 883; and, when the fourth fluid port 881 is connected to the fifth fluid port 882, the second driving device 870 can drive the positioning member 830 to move relative to the rotating shaft 822 to position and cooperate with the rotating shaft 822; when the fourth fluid port 881 is connected to the sixth fluid port 883, the second driving device 870 can drive the positioning member 830 to move relative to the rotating shaft 822 to release the positioning cooperation with the rotating shaft 822. The fluid pressure in the communicating pipe of this embodiment can be configured as follows: when the fourth fluid port 881 is connected to the fifth fluid port 882, the fluid pressure in the communicating pipe is the second preset pressure; when the fourth fluid port 881 is connected to the fifth fluid port 882, the fluid pressure in the communicating pipe is less than the second preset pressure; that is, only when the second driving device 870 drives the positioning member 830 to position and cooperate with the rotating shaft 822, the third control valve 860 can be opened, and the fluid medium of the fluid source can enter the first medium inlet 825 of the lifting pipeline system 824 to lift the upper cover 821, and when the second driving device 870 drives the positioning member 830 to release the positioning cooperation with the rotating shaft 822, the third control valve 860 cannot be opened, so the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, and thus cannot drive the upper cover 821 to rise and fall. Therefore, when the rotating shaft 822 begins to rotate, even if the cantilever beam 823 is still pressing the reversing portion 853 of the interlocking device 850, the second driving device 870 drives the positioning member 830 to release the positioning engagement with the rotating shaft 822. Therefore, the third control valve 860 cannot be opened, and the fluid medium from the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824. This prevents safety accidents caused by improper operation of the lifting cover 821 when the rotating shaft 822 begins to rotate. Of course, the locking reversing valve 880 can also have other fluid ports to allow the fluid medium flowing out of the second driving device 870 to be discharged through the locking reversing valve 880.

[0055] More specifically, when the rotating shaft 822 is in the first rotating position, the interlocking device 850 is in the first state. When the locking reversing valve 880 is in the third valve position, the fluid flows as shown by the dotted line in FIG6 . The fluid flows into the third flow port 871 of the second driving device 870 through the locking reversing valve 880, and the driving positioning member 830 is positioned and matched with the rotating shaft 822. At the same time, the fluid also flows into the second pilot port 861 of the third control valve 860, so that the fluid can flow into the first medium inlet 825 through the interlocking device 850 and the third control valve 860 and enter the lifting pipeline system 824 to realize the upper cover. 6, and the fluid flows into the fourth flow port 872 of the second drive device 870 through the locking reversing valve 880, driving the positioning member 830 to release the positioning match with the rotating shaft 822. At this time, no fluid flows into the second pilot port 861 of the third control valve 860, and the fluid discharged from the third flow port 871 of the second drive device 870 is not sufficient to open the second pilot port 861 of the third control valve 860, so that the fluid cannot enter the lifting pipeline system 824, so as to ensure that the upper cover 821 cannot be lifted or lowered during the rotation process. When the rotating shaft 822 is in the second rotating position, the interlocking device 850 is in the second state. When the locking reversing valve 880 is in the third valve position, the fluid flows as shown by the dotted line in Figure 7. The second driving device 870 drives the positioning member 830 to cooperate with the rotating shaft 822. At the same time, the fluid also enters the second flow port 420 of the first driving device 400 through the interlocking device 850 and the second shuttle valve 940, so that the first driving device 400 maintains its lifting position unchanged.

[0056] In some embodiments, the fourth flow port 872 is connected to a one-way throttle valve 890, which throttles flow in the direction from the fourth flow port 872 to the sixth fluid port 883. In this embodiment, the one-way throttle valve 890 throttles flow in the direction from the fourth flow port 872 to the sixth fluid port 883. That is, when the second drive device 870 drives the positioning member 830 to engage with the rotating shaft 822, the one-way throttle valve 890 is open and throttles flow, thereby adjusting the speed of engagement between the positioning member 830 and the rotating shaft 822.

[0057] As shown in Figures 9 to 11, in some embodiments, the lifting pipeline system 824 includes a first manual switching valve 100, a first fluid pipeline 200, and a second fluid pipeline 300. A first driving device 400 is used to connect to the upper cover 821. The first driving device 400 has a first flow port 410 and a second flow port 420. The two ends of the first fluid pipeline 200 are respectively connected to the first manual switching valve 100 and the first flow port 410, and the two ends of the second fluid pipeline 300 are respectively connected to the first manual switching valve 100 and the second flow port 420. The first manual switching valve 100 has a fifth valve position and a sixth valve position. When the first manual switching valve 100 is in the fifth valve position, the first flow port 410 serves as a fluid inlet and the second flow port 420 serves as a fluid outlet, and the first driving device 400 can drive the upper cover 821 to descend. When the first manual switching valve 100 is in the sixth valve position, the first flow port 410 serves as a fluid outlet and the second flow port 420 serves as a fluid inlet, and the first driving device 400 can drive the upper cover 821 to ascend. The cover opening mechanism of the embodiment of the present application uses a first manual switching valve 100 to switch the working state of the telescopic cylinder. In this way, during the assembly process of the machine, even if the machine is not powered, the cover opening mechanism can be used to lift or lower the upper cover 821.

[0058] Furthermore, the lid opening mechanism also includes a second manual switching valve 500, which is located upstream of the first manual switching valve 100. The first manual switching valve 100 and the second manual switching valve 500 are connected in an on-off manner. In this embodiment, the upper cover 821 can be raised or lowered only by operating the first manual switching valve 100 and the second manual switching valve 500 with both hands. This reduces the safety risks caused by operator accidental touch. In addition, when the operator operates the first manual switching valve 100 and the second manual switching valve 500 with both hands, the operator's attention can be improved, and the hand can be prevented from being pinched during the raising and lowering of the upper cover 821, ensuring safe operation.

[0059] Furthermore, the first manual switching valve 100 includes a first manual valve 110 and a second manual valve 120. The first manual valve 110 has a first medium port 111, a second medium port 112 and a third medium port 113. The second manual valve 120 has a fourth medium port 121 and a fifth medium port 122 that are connected in an on-off manner. The third medium port 113 is connected to the fourth medium port 121. The first end of the first fluid pipeline 200 can be connected to the fifth medium port 122, and the first end of the second fluid pipeline 300 can be connected to the second medium port 112. The first medium port 111 and the second manual switching valve 500 can be connected in an on-off manner. The first medium port 111 can be connected to the second medium port 112 and the third medium port 113 in an on-off manner, and when the first medium port 111 is connected to one of the second medium port 112 and the third medium port 113, the first medium port 111 is disconnected from the other; when the first manual switching valve 100 is in the fifth valve position, the first medium port 111 is connected to the third medium port 113, and the fourth medium port 121 is connected to the fifth medium port 122; when the first manual switching valve 100 is in the sixth valve position, the first medium port 111 is connected to the second medium port 112. In the embodiment of the present application, the first manual valve 110 and the second manual valve 120 each have only one operating part, so that the operating directions of the operating parts of the first manual valve 110 and the second manual valve 120 can be unified, so that the operating directions of the first manual valve 110 and the second manual valve 120 are consistent, which is convenient for operators.

[0060] In some embodiments, a stopper 826 is provided on the rotating shaft 822, and a first position-limiting protrusion 811 is provided on the support base 813. When the rotating shaft 822 is in the first rotational position, the stopper 826 and the first position-limiting protrusion 811 engage to limit the rotation from the second rotational position to the first rotational position. If the stopper 826 is not provided, the rotating shaft 822 can be stopped manually. However, the force applied by maintenance personnel will vary, resulting in the rotating shaft 822 stopping at a different position each time. This may prevent the positioning member 830 from being positioned and engaging with the rotating shaft 822, and may also cause the upper cover 821 to collide with other machines, thereby damaging components. This embodiment is provided with a stopper 826 and a first limiting protrusion 811. When the rotating shaft 822 rotates from the second rotating position to the first rotating position, the first limiting protrusion 811 can limit the stopper 826 so that the rotating shaft 822 can accurately stop at the first rotating position, thereby solving the problem that the positioning member 830 cannot be positioned and matched with the rotating shaft 822, and the upper cover 821 collides with other machines.

[0061] And / or, in some embodiments, the support base 813 is provided with a second limiting protrusion 812. When the rotating shaft 822 is in the second rotational position, the stopper 826 cooperates with the second limiting protrusion 812 to limit the rotation from the first rotational position to the second rotational position. In this embodiment, the stopper 826 and the second limiting protrusion 812 are provided. When the rotating shaft 822 rotates from the first rotational position to the second rotational position, the second limiting protrusion 812 can limit the stopper 826 so that the rotating shaft 822 accurately stops at the second rotational position, thereby resolving the problem of the positioning member 830 being unable to position and cooperate with the rotating shaft 822 and the upper cover 821 colliding with other machines.

[0062] In some embodiments, the stopper 826 can be made of a rigid material. In this way, when the stopper 826 contacts and limits the first and second limiting protrusions 811, 812, there is a rigid contact between the stopper 826 and the first and second limiting protrusions 811, 812, which may generate a large vibration and may cause damage to the stopper 826, the first and second limiting protrusions 811, 812. In some embodiments, the stopper 826 includes a fixed block 827 connected to the rotating shaft 822. The stopper 826 also includes a first buffer block 828 provided on the fixed block 827. When the rotating shaft 822 is in the first rotation position, the first buffer block 828 is engaged with the first limiting protrusion 811 to limit the position. In this embodiment, a first buffer block 828 is provided on the fixed block 827. The first buffer block 828 can be brought into contact with the first limiting protrusion 811. The first buffer block 828 has a buffering and shock-absorbing function. Therefore, when the first buffer block 828 and the first limiting protrusion 811 come into contact, no significant vibration is generated between them, and the risk of damage to the stopper 826 and the first limiting protrusion 811 is reduced. In some embodiments, the first buffer block 828 can be made of an elastic material such as rubber. Furthermore, the first buffer block 828 is detachably connected to the fixed block 827 by means of a snap connection, a threaded connection, etc., which facilitates replacement of the first buffer block 828.

[0063] And / or, in some embodiments, the stopper 826 further includes a second buffer block 829 disposed on the fixed block 827. When the rotating shaft 822 is in the second rotational position, the second buffer block 829 engages with the second position-limiting protrusion 812. In this embodiment, the fixed block 827 is provided with a second buffer block 829, which can engage with the second position-limiting protrusion 812. The second buffer block 829 provides a buffering and shock-absorbing function. Therefore, when the second buffer block 829 and the second position-limiting protrusion 812 come into contact, significant vibration is not generated therebetween, and the risk of damage to the stopper 826 and the second position-limiting protrusion 812 is reduced. In some embodiments, the second buffer block 829 can be made of an elastic material such as rubber. Furthermore, the second buffer block 829 is detachably connected to the fixed block 827 by means of a snap connection, a threaded connection, or the like, thereby facilitating replacement of the second buffer block 829.

[0064] In some embodiments, a rotation hole 814 is defined within the support seat 813, and at least a portion of the rotation shaft 822 is rotatably engaged with the rotation hole 814. At least two radial rolling bearings 910 are sleeved on the exterior of the rotation shaft 822, and the outer rings of the at least two radial rolling bearings 910 engage with the inner circumference of the rotation hole 814. In some embodiments, the radial rolling bearings 910 are rolling bearings capable of withstanding radial forces. They may be pure radial rolling bearings capable of withstanding only radial forces, such as needle roller bearings, or rolling bearings capable of withstanding both radial and axial forces, such as deep groove ball bearings.

[0065] In this embodiment, the outer ring of the radial rolling bearing 910 can be interference-fitted with the inner circumference of the rotating hole 814, and the inner ring of the radial rolling bearing 910 can rotate along with the rotating shaft 822. When the upper cover 821 is located on the maintenance side, or when the upper cover 821 is located directly above the top opening, the upper cover 821 is suspended from one end of the rotating shaft 822 and applies a radial force to the rotating shaft 822. The radial rolling bearing 910 can withstand the above-mentioned radial force to prevent the upper cover 821 from falling. In addition, the radial rolling bearing 910 of this embodiment is a rolling bearing. Compared with a sliding bearing, a rolling bearing has a smaller tolerance, smaller deformation after being subjected to force, and less friction during rotation. Therefore, the use of the radial rolling bearing 910 of this embodiment can also improve the stability of the rotating shaft 822 during rotation.

[0066] In some embodiments, the lid opening mechanism further comprises a cantilever beam 823, the first end of which is connected to the upper cover 821, and the second end of which is fixedly connected to the rotating shaft 822. A flange 700 extends from the cantilever beam 823 toward the rotating shaft 822, and a portion of the rotating shaft 822 is located within the flange 700. An axial rolling bearing 920 is sleeved on the exterior of the flange 700. The axial rolling bearing 920 is located on the support seat 813, and its two axial ends contact the support seat 813 and the cantilever beam 823, respectively. In this embodiment, the axial rolling bearing 920 is sleeved on the exterior of the flange 700 of the cantilever beam 823. Because the cantilever beam 823 is connected to the rotating shaft 822, the axial force applied by the upper cover 821 to the axial rolling bearing 920 can be shared by the rotating shaft 822 and the cantilever beam 823. This reduces the force on the rotating shaft 822 and prevents damage to the rotating shaft 822.

[0067] In some embodiments, the rotation hole 814 is a stepped hole comprising a first hole section 815 and a second hole section 816. The diameter of the first hole section 815 is larger than that of the second hole section 816, and the first hole section 815 is closer to the cantilever beam 823 than the second hole section 816. In some embodiments, the axis of the first hole section 815 and the axis of the second hole section 816 are collinear. The cantilever beam 823 and the rotation shaft 822 can be connected by welding or by threaded fasteners.

[0068] Axial rolling bearing 920 is disposed on the stepped surface connecting first hole section 815 and second hole section 816, with the outer ring of axial rolling bearing 920 mating with the inner circumferential surface of first hole section 815. In some embodiments, axial rolling bearing 920 is a rolling bearing capable of withstanding axial forces. It can be a pure axial rolling bearing capable of withstanding axial forces, such as a thrust ball bearing, or a rolling bearing capable of withstanding both radial and axial forces, such as a deep groove ball bearing.

[0069] In this embodiment, the axial rolling bearing 920 is arranged on the step surface, that is, the axial rolling bearing 920 is engaged with the step surface in the upper limit direction in the vertical downward direction, and the step surface is located within the rotating hole 814. Therefore, at least part of the axial rolling bearing 920 is located within the rotating hole 814, which can reduce the space outside the rotating hole 814 occupied by the axial rolling bearing 920.

[0070] The present application also discloses a semiconductor processing apparatus including a process chamber and the cover opening mechanism described in any of the above embodiments. The process chamber includes a chamber body 810 and an upper cover 821. A rotating shaft 822 is connected to the upper cover 821, and a support base 813 is connected to the chamber body 810. In some embodiments, the upper cover 821 includes an upper electrode assembly.

[0071] The above embodiments of the present application focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here. The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of this application and the claims, all of which are within the protection of this application.

Claims

1. A cover opening mechanism for a process chamber, characterized in that: It includes a support seat, a rotating shaft and a positioning member, wherein the positioning member can move relative to the rotating shaft. The rotating shaft is used to be connected to the upper cover of the process chamber, the supporting seat is used to be connected to the chamber body of the process chamber, the rotating shaft is rotatably connected to the supporting seat, and the rotating shaft is used to rotate between a first rotating position and a second rotating position. When the rotating shaft is in the first rotating position or the second rotating position, the positioning member can move relative to the rotating shaft to engage in positioning cooperation with the rotating shaft or release the positioning cooperation with the rotating shaft.

2. The cover opening mechanism according to claim 1, characterized in that: The support seat is provided with a rotation hole, and the rotation shaft is rotatably arranged in the rotation hole. When the rotating shaft is at the first rotating position, the upper cover is directly opposite to the top opening of the chamber body; When the rotating shaft is in the second rotating position, the upper cover is misaligned with the top opening.

3. The cover opening mechanism according to claim 1, characterized in that: The cover opening mechanism further comprises a positioning fitting, and the positioning fitting is arranged outside the rotating shaft; The positioning fitting is provided with a first matching portion, and when the rotating shaft is in the first rotating position, the positioning fitting can move relative to the rotating shaft to positionally match or release the positioning fitting with the first matching portion; and / or, The positioning fitting is provided with a second fitting portion. When the rotating shaft is in the second rotating position, the positioning fitting can move relative to the rotating shaft to positionally fit with or release the positioning fitting with the second fitting portion.

4. The cover opening mechanism according to claim 3, characterized in that: The second rotation position includes a first sub-position and a second sub-position, the second matching portion includes a first sub-matching portion corresponding to the first sub-position and a second sub-matching portion corresponding to the second sub-position, the rotation shaft can rotate from the first rotation position to the first sub-position along a first rotation direction, and the rotation shaft can also rotate from the first rotation position to the second sub-position along a second rotation direction, and the first rotation direction is opposite to the second rotation direction; When the rotating shaft is in the first sub-position, the positioning member can move relative to the rotating shaft to position or release the positioning fit with the first sub-matching part; when the rotating shaft is in the second sub-position, the positioning member can move relative to the rotating shaft to position or release the positioning fit with the second sub-matching part.

5. The cover opening mechanism according to claim 1, characterized in that: The cover opening mechanism also includes a lifting device and a cantilever beam, the first end of the lifting device is connected to the upper cover, the second end of the lifting device is connected to the first end of the cantilever beam, the second end of the cantilever beam is fixedly connected to the rotating shaft, and the lifting device can drive the upper cover to rise and fall.

6. The cover opening mechanism according to claim 5, characterized in that: The lifting device comprises a first driving device and an interlocking device; The interlocking device is provided with a switching portion for switching the interlocking device between a first state and a second state; When the rotating shaft is located at the first rotating position, the cantilever beam presses the reversing portion, and the interlocking device is in the first state, so that the first driving device drives the upper cover to move up and down; When the rotating shaft is located at the second rotating position, the cantilever beam releases the reversing portion, and the interlocking device is in the second state to restrict the first driving device from driving the upper cover to move up and down.

7. The cover opening mechanism according to claim 6, characterized in that: The first driving device is a telescopic cylinder, and the interlocking device is an interlocking reversing valve. The lifting device further comprises a lifting pipeline system, the lifting pipeline system is connected to the first driving device, the lifting pipeline system has a first medium inlet, and the first medium inlet is used to introduce a fluid medium to drive the first driving device to extend and retract; The interlocking device has a first fluid port and a second fluid port, wherein the first fluid port can be connected to a fluid source, and the second fluid port is connected to the first medium inlet. When the interlock device is in the first state, the interlock device is located in a first valve position so that the first fluid port is connected to the second fluid port; When the interlock device is in the second state, the interlock device is located in a second valve position to disconnect the first fluid port from the second fluid port.

8. The cover opening mechanism according to claim 7, characterized in that: The first drive device has a first flow opening and a second flow opening; The first flow port is connected to a first control valve, the first control valve having a first pilot port, and a first communication port and a second communication port that are connected and disconnectable, and when a first pilot fluid with a first preset pressure is introduced into the first pilot port, the first communication port is connected to the second communication port; The first communication port and the second circulation port are respectively connected to the first medium inlet in an on-off manner, and the first circulation port is connected to the second communication port; when the first medium inlet is connected to the first circulation port and disconnected from the second circulation port, the first driving device can drive the upper cover to descend; when the first medium inlet is connected to the second circulation port and disconnected from the first circulation port, the first driving device can drive the upper cover to ascend; The interlocking device also has a third fluid port, which is connected to the second flow port; when the interlocking device is located in the first valve position, the first fluid port is disconnected from the third fluid port; when the interlocking device is located in the second valve position, the first fluid port is connected to the third fluid port, and the first communication port is disconnected from the second communication port.

9. The cover opening mechanism according to claim 7, characterized in that: The second fluid port is connected to a third control valve, the third control valve having a second pilot port, and a fifth communication port and a sixth communication port that are connected and disconnectable, the fifth communication port being connected to the second fluid port, and the sixth communication port being connected to the first medium inlet; When the second pilot port is supplied with the second pilot fluid of the second preset pressure, the fifth communication port is communicated with the sixth communication port.

10. The cover opening mechanism according to claim 9, characterized in that: The cover opening mechanism further includes a second driving device, which is a telescopic cylinder, one end of which is used to connect with the chamber body, and the other end of which is connected with the positioning member, and the second driving device can drive the positioning member to move, and the second driving device has a third flow port and a fourth flow port; The cover opening mechanism further comprises a locking reversing valve, the locking reversing valve having a fourth fluid port, a fifth fluid port and a sixth fluid port, the fifth fluid port and the sixth fluid port are respectively connected to the fourth fluid port in an on-off manner, the fifth fluid port is connected to the third flow port, and the sixth fluid port is connected to the fourth flow port; The locking reversing valve has a third valve position and a fourth valve position. When the locking reversing valve is in the third valve position, the fourth fluid port is connected to the fifth fluid port and disconnected from the sixth fluid port, and the second driving device drives the positioning member to move so as to be positioned and matched with the rotating shaft; when the locking reversing valve is in the fourth valve position, the fourth fluid port is connected to the sixth fluid port and disconnected from the fifth fluid port, and the second driving device drives the positioning member to move so as to release the positioning and matching with the rotating shaft; The second pilot port is communicated with a communication channel between the fifth fluid port and the third flow port.

11. The cover opening mechanism according to claim 10, characterized in that: The fourth flow port is connected to a one-way throttle valve, and the one-way throttle valve throttles in a direction in which the fourth flow port extends toward the sixth fluid port.

12. The cover opening mechanism according to claim 1, characterized in that: A rotating hole is arranged in the supporting seat, and at least two radial rolling bearings are sleeved on the outside of the rotating shaft. The outer rings of at least two radial rolling bearings match with the inner circumference of the rotating hole.

13. The cover opening mechanism according to claim 12, characterized in that: The cover opening mechanism further comprises a cantilever beam, wherein a first end of the cantilever beam is used to be connected to the upper cover, and a second end of the cantilever beam is fixedly connected to the rotating shaft. The cantilever beam has a flange extending toward one end of the rotating shaft, a portion of the rotating shaft is located inside the flange, an axial rolling bearing is sleeved on the outside of the flange, the axial rolling bearing is arranged on the support seat, and the two ends of the axial direction of the axial rolling bearing are in contact with the support seat and the cantilever beam respectively.

14. The cover opening mechanism according to claim 13, characterized in that: The rotating hole is a stepped hole, and the stepped hole includes a first hole segment and a second hole segment, the diameter of the first hole segment is larger than the diameter of the second hole segment, and the first hole segment is closer to the cantilever beam than the second hole segment; The axial rolling bearing is arranged on a step surface connecting the first hole segment and the second hole segment, and an outer ring of the axial rolling bearing matches with an inner circumferential surface of the first hole segment.

15. The cover opening mechanism according to claim 1, characterized in that: A stopper is provided on the rotating shaft. The support seat is provided with a first limiting protrusion, and when the rotating shaft is located at the first rotating position, the stopper cooperates with the first limiting protrusion in the direction of rotation from the second rotating position to the first rotating position; and / or, The support seat is provided with a second limiting protrusion, and when the rotating shaft is located at the second rotating position, the stopper cooperates with the second limiting protrusion in the direction of rotation from the first rotating position to the second rotating position.

16. The cover opening mechanism according to claim 15, characterized in that: The stopper comprises a fixed block, and the fixed block is connected to the rotating shaft. The stopper also includes a first buffer block provided on the fixed block, and when the rotating shaft is located at the first rotating position, the first buffer block is in limiting cooperation with the first limiting protrusion; and / or, The stopper also includes a second buffer block disposed on the fixed block. When the rotating shaft is located at the second rotating position, the second buffer block is in limiting cooperation with the second limiting protrusion.

17. A semiconductor process equipment, comprising a process chamber and a cover opening mechanism as claimed in any one of claims 1 to 16, wherein the process chamber comprises a chamber body and an upper cover, the rotating shaft is connected to the upper cover, and the support seat is connected to the chamber body.

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