Cover opening mechanism for process chamber, and semiconductor process device

Abstract

The present application relates to the technical field of semiconductor process devices, and in particular to a cover opening mechanism for a process chamber, and a semiconductor process device. The cover opening mechanism comprises a supporting seat, a rotating shaft, and a positioning member; the positioning member is capable of moving relative to the rotating shaft; the rotating shaft is adapted to be connected to an upper cover of the process chamber; the supporting seat is adapted to be connected to a chamber body of the process chamber; the rotating shaft is rotatably connected to the supporting seat; the rotating shaft is adapted to rotate between a first rotating position and a second rotating position; when the rotating shaft is at the first rotating position or the second rotating position, the positioning member is capable of moving relative to the rotating shaft to be in positioning engagement with the rotating shaft or release the positioning engagement. The present application can solve the problems of high maintenance difficulty and long maintenance time of existing semiconductor process devices.

Description

Cover opening mechanism for process chamber and semiconductor process equipment TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor process equipment, and particularly relates to a cover opening mechanism for a process chamber and a semiconductor process equipment. BACKGROUND

[0002] A capacitively coupled plasma etching machine can ionize process gas through upper and lower electrodes to generate plasma to bombard the surface of a wafer to complete etching. The upper electrode of the capacitively coupled plasma etching machine and parts in the process chamber need to be opened for maintenance after a period of process.

[0003] In related art, when the chamber is opened for maintenance, the upper cover is lifted by the upper electrode lifting device so that the upper cover is located above the chamber body, so that the maintenance personnel stand on the maintenance side to maintain the parts on the upper cover. Generally, the diameter of the upper cover is greater than the arm length of the maintenance personnel, so it is difficult for the maintenance personnel standing on the maintenance side to maintain the parts on the upper cover away from the maintenance side. Therefore, the maintenance personnel need to move to the side opposite to the maintenance side to maintain the upper cover, which increases the maintenance difficulty and maintenance time of the semiconductor process equipment. SUMMARY

[0004] The purpose of the embodiments of the present application is to provide a cover opening mechanism for a process chamber and a semiconductor process equipment, which can solve the problems of high maintenance difficulty and long maintenance time of the current semiconductor process equipment.

[0005] To solve the above technical problems, the present application is implemented as follows:

[0006] In a first aspect, the embodiments of the present application provide a cover opening mechanism for a process chamber, comprising a support seat, a rotating shaft and a positioning member, the positioning member is movable relative to the rotating shaft,

[0007] The rotating shaft is used to be connected with an upper cover of the process chamber, the support seat is used to be connected with a chamber body of the process chamber, the rotating shaft is movably connected with the support seat, and the rotating shaft is used to rotate between a first rotating position and a second rotating position,

[0008] When the rotating shaft is in the first rotating position or the second rotating position, the positioning member is movable relative to the rotating shaft to be positioned with the rotating shaft or to be disengaged from the positioning with the rotating shaft.

[0009] In a second aspect, the embodiments of the present application provide a semiconductor process equipment, comprising a process chamber and the above-mentioned cover opening mechanism, the process chamber comprises a chamber body and an upper cover, the rotating shaft is connected with the upper cover, and the support seat is connected with the chamber body.

[0010] In the embodiment of the present application, the rotating shaft is rotatably connected with the support seat and can rotate from the first rotating position to the second rotating position. When the cover opening mechanism is applied to the process chamber, the second rotating position is configured such that the upper cover is misaligned with the top opening of the chamber body when the rotating shaft is in the second rotating position. At this time, the upper cover is located on the maintenance side of the chamber body of the process chamber. Therefore, the maintenance personnel do not need to move to the side opposite to the maintenance side to maintain the upper cover, thereby reducing the maintenance difficulty and maintenance time of the semiconductor process equipment.

[0011] In addition, the cover opening mechanism further comprises a positioning member movable relative to the rotating shaft. When the rotating shaft is in the first rotating position, the positioning member is movable relative to the rotating shaft to be positioned with the rotating shaft. In this way, not only can the rotating shaft be ensured to be in the preset first rotating position, but also the upper cover connected with the rotating shaft can be prevented from rotating during the process to interfere with the process. When the upper cover needs to be maintained, the positioning member is movable relative to the rotating shaft to be disengaged from the positioning with the rotating shaft. At this time, the rotating shaft can rotate to the second rotating position. When the rotating shaft is in the second rotating position, the positioning member is movable relative to the rotating shaft to be positioned with the rotating shaft. In this way, not only can the rotating shaft be ensured to be in the preset second rotating position, but also the upper cover connected with the rotating shaft can be prevented from rotating during the maintenance to prevent safety accidents and increase the maintenance difficulty. After the maintenance is completed, the positioning member is movable relative to the rotating shaft to be disengaged from the positioning with the rotating shaft. At this time, the rotating shaft can rotate to the first rotating position. BRIEF DESCRIPTION OF DRAWINGS

[0012] FIG. 1 is a structural schematic view of a semiconductor process equipment disclosed in the embodiment of the present application;

[0013] FIG. 2 is a sectional view of part of the structure of the semiconductor process equipment disclosed in the embodiment of the present application;

[0014] FIG. 3 is a bottom view of part of the structure of the semiconductor process equipment disclosed in the embodiment of the present application;

[0015] FIG. 4 is a front view of part of the structure of the semiconductor process equipment disclosed in the embodiment of the present application;

[0016] FIG. 5 is a schematic view of the fluid pipeline of the semiconductor process equipment disclosed in the embodiment of the present application;

[0017] FIG. 6 is a schematic view of the fluid flow direction of the semiconductor process equipment disclosed in the embodiment of the present application when the reversing part is pressed;

[0018] FIG. 7 is a schematic view of the fluid flow direction of the semiconductor process equipment disclosed in the embodiment of the present application when the reversing part is released;

[0019] FIG. 8 is a schematic view of part of the fluid pipeline of the semiconductor process equipment disclosed in the embodiment of the present application;

[0020] Fig. 9 is a schematic view of a fluid circuit of a lift pipe system according to an embodiment of the present application;

[0021] Fig. 10 is a schematic view of fluid flow of a lift pipe system according to an embodiment of the present application when a first manual switching valve is in a fifth valve position;

[0022] Fig. 11 is a schematic view of fluid flow of a lift pipe system according to an embodiment of the present application when a first manual switching valve is in a sixth valve position.

[0023] Legend: 100 - first manual switching valve, 110 - first manual valve, 111 - first medium port, 112 - second medium port, 113 - third medium port, 120 - second manual valve, 121 - fourth medium port, 122 - fifth medium port, 200 - first fluid circuit, 210 - first control valve, 211 - first pilot port, 212 - first communication port, 213 - second communication port, 300 - second fluid circuit, 400 - first driving device, 410 - first flow-through port, 420 - second flow-through port, 500 - second manual switching valve, 600 - guide, 700 - flange, 810 - chamber body, 811 - first limiting protrusion, 812 - second limiting protrusion, 813 - support seat, 814 - rotating hole, 815 - first hole section, 816 - second hole section, 821 - upper cover, 822 - rotating shaft, 823 - cantilever beam, 824 - lift pipe system, 825 - first medium inlet, 826 - stopper, 827 - fixing block, 828 - first buffer block, 829 - second buffer block, 830 - positioning member, 840 - positioning matching member, 841 - first matching portion, 842 - second matching portion, 842a - first sub-matching portion, 842b - second sub-matching portion, 850 - interlocking device, 851 - first fluid port, 852 - second fluid port, 853 - reversing portion, 854 - third fluid port, 860 - third control valve, 861 - second pilot port, 862 - fifth communication port, 863 - sixth communication port, 870 - second driving device, 871 - third flow-through port, 872 - fourth flow-through port, 880 - locking reversing valve, 881 - fourth fluid port, 882 - fifth fluid port, 883 - sixth fluid port, 890 - one-way throttling valve, 910 - radial rolling bearing, 920 - axial rolling bearing, 940 - second shuttle valve, 950 - first shuttle valve. DETAILED DESCRIPTION

[0024] With reference to the drawings and the embodiments of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only some of the embodiments of the present application, but not all of the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of the present application.

[0025] The terms "first", "second", and the like in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be exchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally a category and do not limit the number of objects, for example, the first object can be one or more. In addition, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / ", generally indicates that the front and rear associated objects are in an "or" relationship.

[0026] The opening mechanism for the process chamber and the semiconductor process equipment provided by the embodiments of the present application will be described in detail below in combination with the drawings, through specific embodiments and application scenarios.

[0027] As shown in FIGS. 1-11, the present application discloses an opening mechanism for a process chamber, comprising a support seat 813, a rotating shaft 822 and a positioning member 830, the positioning member 830 is movable relative to the rotating shaft 822. In some embodiments, the positioning member 830 can move relative to the rotating shaft 822 in various ways, for example, the positioning member 830 can move or rotate relative to the rotating shaft 822.

[0028] The rotating shaft 822 is connected with the upper cover 821 of the process chamber, the support base 813 is connected with the chamber body 810 of the process chamber, the rotating shaft 822 is rotatably connected with the support base 813, and the rotating shaft 822 is used for rotating between a first rotating position and a second rotating position. When the rotating shaft 822 is in the first rotating position or the second rotating position, the positioning piece 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the rotating shaft 822. Specifically, the positioning piece 830 can be in positioning cooperation or out of positioning cooperation with the rotating shaft 822 only when the rotating shaft 822 is in the first rotating position, or the positioning piece 830 can be in positioning cooperation or out of positioning cooperation with the rotating shaft 822 only when the rotating shaft 822 is in the second rotating position, or the positioning piece 830 can be in positioning cooperation or out of positioning cooperation with the rotating shaft 822 when the rotating shaft 822 is in the first rotating position and the second rotating position. It should be noted that when the positioning piece 830 is in positioning cooperation with the rotating shaft 822, the rotating shaft 822 cannot rotate relative to the support base 813; when the positioning piece 830 is out of positioning cooperation with the rotating shaft 822, the rotating shaft 822 can rotate relative to the support base 813, that is, the positioning cooperation and the out of positioning cooperation in the embodiment are achieved in the rotating direction of the rotating shaft 822.

[0029] In the embodiment, the rotating shaft 822 is rotatably connected with the support base 813 and can rotate from the first rotating position to the second rotating position. When the cover opening mechanism is applied to the process chamber, the second rotating position is configured as follows: when the rotating shaft 822 is in the second rotating position, the upper cover 821 is misaligned with the top opening of the chamber body 810, and at this time, the upper cover 821 is located on the maintenance side of the chamber body 810 of the process chamber. Therefore, the maintenance personnel do not need to move to the side opposite to the maintenance side to maintain the upper cover 821, so that the maintenance difficulty and the maintenance time of the semiconductor process equipment can be reduced.

[0030] In addition, the cover opening mechanism further comprises a positioning member 830 which is movable relative to the rotating shaft 822. When the rotating shaft 822 is located at the first rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation with the rotating shaft 822. In this way, not only can the rotating shaft 822 be ensured to be located at the preset first rotating position, but also the upper cover 821 connected with the rotating shaft 822 can be prevented from rotating during the process of the technology to interfere with the process of the technology. When the upper cover 821 needs to be maintained, the positioning member 830 is movable relative to the rotating shaft 822 to be out of the positioning cooperation with the rotating shaft 822. At this time, the rotating shaft 822 can be rotated to the second rotating position. When the rotating shaft 822 is located at the second rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation with the rotating shaft 822. In this way, not only can the rotating shaft 822 be ensured to be located at the preset second rotating position, but also the upper cover 821 connected with the rotating shaft 822 can be prevented from rotating during the process of the maintenance to prevent safety accidents and increase the difficulty of the maintenance. After the maintenance is completed, the positioning member 830 is movable relative to the rotating shaft 822 to be out of the positioning cooperation with the rotating shaft 822. At this time, the rotating shaft 822 can be rotated to the first rotating position.

[0031] In some embodiments, the support seat 813 is provided with a rotating hole 814, and the rotating shaft 822 is rotatably arranged in the rotating hole 814. When the rotating shaft 822 is located at the first rotating position, the upper cover 821 is opposite to the top opening of the chamber body 810. When the rotating shaft 822 is located at the second rotating position, the upper cover 821 is misaligned with the top opening. In the present embodiment, the upper cover 821 can be opposite to the top opening of the chamber body 810, that is, in the axial direction of the top opening, the orthographic projection of the upper cover 821 covers the orthographic projection of the top opening. At this time, the orthographic projection of the top opening is completely located within the orthographic projection of the upper cover 821. At this time, the upper cover 821 can be covered on the chamber body 810 to seal the top opening. Alternatively, the upper cover 821 is located directly above the top opening and has a spacing therebetween, that is, the upper cover 821 does not seal the top opening. Further, in some embodiments, the rotating axis of the rotating shaft 822 can be located at one side of the chamber body 810. At this time, the rotating axis can not intersect with the chamber body 810. Of course, the rotating axis can also intersect with the chamber body 810. The upper cover 821 can be misaligned with the top opening, that is, in the axial direction of the top opening, the orthographic projection of the top opening is located outside the orthographic projection of the upper cover 821. At this time, the upper cover 821 can be located at the maintenance side of the chamber body 810.

[0032] In some embodiments, the outer circumferential surface of the rotating shaft 822 is provided with a first matching part 841 and / or a second matching part 842. When the rotating shaft 822 is in the first rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the first matching part 841. When the rotating shaft 822 is in the second rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the second matching part 842. However, the first matching part 841 and / or the second matching part 842 is arranged on the outer circumferential surface of the rotating shaft 822, which makes the first matching part 841 and / or the second matching part 842 close to the axis of the rotating shaft 822. Therefore, when the rotating shaft 822 rotates by the same angle, the displacement of the first matching part 841 and / or the second matching part 842 is smaller, that is, the first matching part 841 and the second matching part 842 need to be arranged closer to each other, which may cause the cooperation between the positioning member 830 and the first matching part 841 and the second matching part 842 to be confused, for example, when the positioning member 830 needs to be in positioning cooperation with the first matching part 841, it is in positioning cooperation with the second matching part 842 by mistake; or, when the positioning member 830 needs to be in positioning cooperation with the second matching part 842, it is in positioning cooperation with the first matching part 841 by mistake.

[0033] In some embodiments, the cover opening mechanism further comprises a positioning cooperation member 840 arranged outside the rotating shaft 822. The positioning cooperation member 840 is provided with a first matching part 841. When the rotating shaft 822 is in the first rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the first matching part 841. The positioning cooperation member 840 is further provided with a second matching part 842. When the rotating shaft 822 is in the second rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the second matching part 842. In this embodiment, the first matching part 841 and / or the second matching part 842 is arranged on the positioning cooperation member 840, and the positioning cooperation member 840 is arranged outside the rotating shaft 822. Therefore, the distance between the first matching part 841 and / or the second matching part 842 and the axis of the rotating shaft 822 is appropriate, so that when the rotating shaft 822 rotates by the same angle, the displacement of the first matching part 841 and / or the second matching part 842 is appropriate, thereby improving the cooperation precision between the positioning member 830 and the first matching part 841 and / or the second matching part 842. In addition, arranging the first matching part 841 and the second matching part 842 on the positioning cooperation member 840 can also make the distance between the first matching part 841 and the second matching part 842 appropriate, thereby solving the problem of cooperation confusion between the positioning member 830 and the first matching part 841 and the second matching part 842.

[0034] In some embodiments, the positioning member 830 can have a positioning protrusion (or a positioning recess), the first and second engaging portions 841 and 842 can both be positioning recesses (or positioning protrusions), the positioning recess has a passage for the positioning protrusion to enter or exit, so that the positioning protrusion can enter or exit the positioning recess via the passage in the case that the positioning member 830 can rotate relative to the rotating shaft 822. The positioning engaging member 840 can be a ring-shaped component which can be sleeved on the outside of the rotating shaft 822; of course, the positioning engaging member 840 can also be a sector-shaped component, and the present application does not limit the shape of the positioning engaging member 840. The positioning engaging member 840 and the rotating shaft 822 can be separate components, or the positioning engaging member 840 can also be integrally formed with the rotating shaft 822.

[0035] In some embodiments, the second rotating position includes a first sub-position and a second sub-position, the second engaging portion 842 includes a first sub-engaging portion 842a corresponding to the first sub-position and a second sub-engaging portion 842b corresponding to the second sub-position, the rotating shaft 822 can rotate from the first rotating position to the first sub-position in a first rotating direction, and the rotating shaft 822 can also rotate from the first rotating position to the second sub-position in a second rotating direction, the first rotating direction being opposite to the second rotating direction. The first sub-engaging portion 842a and the second sub-engaging portion 842b here can be arranged along the circumference of the positioning engaging member 840.

[0036] In the case that the rotating shaft 822 is in the first sub-position, the positioning member 830 can move relative to the rotating shaft 822 to positionally engage or disengage with the first sub-engaging portion 842a; in the case that the rotating shaft 822 is in the second sub-position, the positioning member 830 can move relative to the rotating shaft 822 to positionally engage or disengage with the second sub-engaging portion 842b. In the present embodiment, the second engaging portion 842 includes the first sub-engaging portion 842a and the second sub-engaging portion 842b, in the cases that the rotating shaft 822 is in the first sub-position and the second sub-position respectively, the positioning member 830 positionally engages or disengages with the first sub-engaging portion 842a and the second sub-engaging portion 842b respectively, that is, the positioning engaging member 840 of the present embodiment can be compatible with two rotating angles in cooperation with the positioning member 830, and the two rotating angles above can correspond to two maintenance positions of the upper cover, thus, different maintenance requirements can make the rotating shaft 822 rotate to different maintenance positions for positioning, so as to adapt the semiconductor process equipment to multiple maintenance requirements.

[0037] In some embodiments, the cover opening mechanism further comprises a lifting device and a cantilever beam 823, the first end of the lifting device is connected with the upper cover 821, the second end of the lifting device is connected with the first end of the cantilever beam 823, the second end of the cantilever beam 823 is fixedly connected with the rotating shaft 822, and the lifting device can drive the upper cover 821 to ascend or descend so as to make the upper cover 821 approach or move away from the top opening of the chamber body 810. In some embodiments, the axis of the rotating shaft 822 and the axis of the cantilever beam 823 form an angle, which can be an acute angle, a right angle or an obtuse angle. In this embodiment, the cover opening mechanism comprises a lifting device, the lifting device can drive the upper cover 821 to ascend or descend so as to make the upper cover 821 move in the direction away from or close to the top opening, and the lifting device is connected with the rotating shaft 822 through the cantilever beam 823, so that the rotating shaft 822 is arranged away from the center of the upper cover 821, so as to increase the area of the upper cover 821 on the maintenance side when the upper cover 821 is in the second rotating position, and thus more components on the upper cover 821 are located on the maintenance side.

[0038] Specific operation process is as follows, when the upper cover 821 needs to be maintained, the lifting device is controlled to lift the upper cover 821, in this process, the upper cover 821 can open the top opening, and then the positioning member 830 and the positioning and cooperating member 840 are disengaged, and the upper cover 821 is pushed to rotate from the first rotating position to the second rotating position.

[0039] In some embodiments, the lifting device comprises a first driving device 400 and an interlocking device 850, the interlocking device 850 is provided with a reversing part 853 for switching the interlocking device 850 between the first state and the second state, in the case that the rotating shaft 822 is in the first rotating position, the cantilever beam 823 presses the reversing part 853, the interlocking device 850 is in the first state, so as to make the first driving device 400 drive the upper cover 821 to ascend or descend, in the case that the rotating shaft 822 is in the second rotating position, the cantilever beam 823 releases the reversing part 853, the interlocking device 850 is in the second state, so as to limit the first driving device 400 to drive the upper cover 821 to ascend or descend.

[0040] When the rotating shaft 822 is located at the first rotating position, i.e., the upper cover 821 is opposite to the top opening of the chamber body 810 and is not at the maintenance side, the cantilever beam 823 presses the reversing part 853 to make the interlocking device 850 at the first state, and then the first driving device 400 drives the upper cover 821 to lift; when the rotating shaft 822 is located at the second rotating position, i.e., the upper cover 821 is staggered with the top opening and is at the maintenance side, the cantilever beam 823 releases the reversing part 853 to make the interlocking device 850 at the second state, and then the first driving device 400 is limited to drive the upper cover 821 to lift. It can be seen that the first driving device 400 of the embodiment can only drive the upper cover 821 to lift when the upper cover 821 is not at the maintenance side, which can avoid safety accidents caused by misoperation of lifting the upper cover 821 when the maintenance personnel maintains the upper cover 821. Of course, the lifting device can only include the first driving device 400, and does not include the interlocking device 850.

[0041] In some embodiments, the first driving device 400 is a telescopic cylinder, the interlocking device 850 is an interlocking reversing valve, and the lifting device further includes a lifting pipeline system 824. In other embodiments, the first driving device 400 can be a driving source such as a motor or a hydraulic motor, and a lifting mechanism connected with the driving source, at this time the interlocking device 850 is a steering switching part of the motor or the hydraulic motor, and the lifting mechanism can be a screw nut mechanism, a connecting rod mechanism, etc.

[0042] The lifting pipeline system 824 is connected with the first driving device 400, and the lifting pipeline system 824 has a first medium inlet 825 for introducing fluid medium to drive the first driving device 400 to extend or retract. Specifically, after the fluid medium is introduced into the first medium inlet 825, the lifting pipeline system 824 can switch the internal pipeline to make the fluid medium enter the rod cavity or the rodless cavity of the first driving device 400, so that the extension or retraction of the first driving device 400 is realized, and then the upper cover 821 is driven to approach or move away from the top opening. The fluid medium can be compressed air or hydraulic oil, and the first driving device 400 can be a hydraulic cylinder or an air cylinder.

[0043] The interlocking device 850 has a first fluid port 851 and a second fluid port 852, the first fluid port 851 can be connected with a fluid source, and the second fluid port 852 is connected with the first medium inlet 825. In some embodiments, the interlocking device 850 can be a manual reversing valve, an electromagnetic reversing valve, a machine-controlled reversing valve, etc., such as a roller plunger type machine-controlled valve, at this time the reversing part 853 is a roller plunger; of course, in addition to the roller plunger, the reversing part 853 can also be a button, etc.

[0044] When the interlocking device 850 is in the first state, the interlocking device 850 is in the first valve position to connect the first fluid port 851 and the second fluid port 852; when the interlocking device 850 is in the second state, the interlocking device 850 is in the second valve position to disconnect the first fluid port 851 and the second fluid port 852. In the embodiment, when the interlocking device 850 is in the first state, the interlocking device 850 is in the first valve position, the first fluid port 851, the second fluid port 852 and the first medium inlet 825 are sequentially connected, at this time, the external fluid source can sequentially pass the first fluid port 851 and the second fluid port 852 to flow into the fluid medium to the first medium inlet 825, so as to drive the first drive device 400 to stretch and retract, and further drive the upper cover 821 to ascend and descend; when the interlocking device 850 is in the second state, the interlocking device 850 is in the second valve position, the first fluid port 851 is disconnected with the second fluid port 852, that is, the fluid source cannot pass the first fluid port 851 to flow into the fluid medium to the first medium inlet 825, so as to drive the first drive device 400 to stretch and retract, and further drive the upper cover 821 to ascend and descend.

[0045] In some embodiments, the first drive device 400 has a first flow port 410 and a second flow port 420; the first flow port 410 is connected with the first control valve 210, the first control valve 210 has a first pilot port 211, and a first communication port 212 and a second communication port 213 which are connected in an on-off manner, when the first pilot port 211 flows into the first pilot fluid with the first preset pressure, the first communication port 212 and the second communication port 213 are connected.

[0046] The first communication port 212 and the second flow port 420 are respectively connected in an on-off manner with the first medium inlet 825, the first flow port 410 is connected with the second communication port 213; when the first medium inlet 825 is connected with the first flow port 410 and disconnected with the second flow port 420, the first drive device 400 can drive the upper cover 821 to descend; when the first medium inlet 825 is connected with the second flow port 420 and disconnected with the first flow port 410, the first drive device 400 can drive the upper cover 821 to ascend.

[0047] Specifically, the first control valve 210 is a pilot valve, and only when the first pilot fluid with the first preset pressure is introduced into the first pilot port 211, the first communication port 212 is in communication with the second communication port 213, and at this time, the fluid medium in the first medium inlet 825 can pass through the first control valve 210 to enter the first driving device 400, or the fluid medium in the first driving device 400 can pass through the first control valve 210 to flow out. Therefore, when the upper cover 821 does not need to be driven to descend, the first pilot fluid can not be introduced into the first control valve 210, so that even if the fluid medium is introduced into the first medium inlet 825, the fluid medium cannot pass through the first control valve 210 to enter the first driving device 400, so that it can be ensured that the upper cover 821 cannot descend, so that safety accidents can be prevented.

[0048] Specifically, the first pilot fluid introduced into the first pilot port 211 is the fluid medium from the first medium inlet 825, and when the interlocking device 850 is in the first valve position, the first fluid port 851 and the second fluid port 852 are in communication, and at this time, the external fluid source can introduce the fluid medium into the first medium inlet 825 through the first fluid port 851 and the second fluid port 852 in turn, and then the fluid medium flows to the first pilot port 211 through the first shuttle valve 950, and at this time, the fluid medium can pass through the first control valve 210 to enter the first driving device 400. The first shuttle valve 950 has two inlet ports on the left and right sides in FIGS. 6 and 7, respectively, and has an outlet port on the upper side, and any one of the two inlet ports can introduce fluid, which flows out through the outlet port.

[0049] The interlocking device 850 also has a third fluid port 854, which is in communication with the second flow port 420 through a second shuttle valve 940; the second shuttle valve 940 has two inlet ports on the left and right sides in FIGS. 6 and 7, respectively, and has an outlet port on the lower side, and any one of the two inlet ports can introduce fluid, which flows out through the outlet port. When the interlocking device 850 is in the first valve position, the first fluid port 851 is disconnected from the third fluid port 854 and is in communication with the second fluid port 852; when the interlocking device 850 is in the second valve position, the first fluid port 851 is in communication with the third fluid port 854 and is disconnected from the second fluid port 852, and the first communication port 212 is disconnected from the second communication port 213. It is easy to understand that the first pilot fluid introduced into the first pilot port 211 is the fluid medium from the first medium inlet 825, and when the interlocking device 850 is in the second valve position, because the first fluid port 851 is disconnected from the second fluid port 852, the fluid source cannot introduce the fluid medium into the first medium inlet 825 through the first fluid port 851, therefore, the first pilot port 211 has no first pilot fluid (i.e., fluid medium) introduced, at this time, the first communication port 212 is disconnected from the second communication port 213.

[0050] In the embodiment, when the rotating shaft 822 is in the second rotating position, i.e. the cantilever beam 823 releases the reversing part 853, and the upper cover 821 is in the maintenance side, the first fluid port 851 is in communication with the third fluid port 854, and the third fluid port 854 is in communication with the second flow port 420 of the first driving device 400 through the second shuttle valve 940, that is, the external fluid source can enter the second flow port 420 through the first fluid port 851, the third fluid port 854 and the second shuttle valve 940 in turn. At this time, since the first fluid port 851 is disconnected from the second fluid port 852, the first pilot port 211 is still not connected to the first pilot fluid (i.e. the fluid medium), so the first communication port 212 is disconnected from the second communication port 213, and the fluid medium in the first driving device 400 cannot be discharged through the first flow port 410, so that the piston rod of the first driving device 400 cannot move upward and remains stationary. At the same time, since the external fluid source continuously supplies the fluid medium to the second flow port 420 of the first driving device 400, this can balance the pulling force exerted by the upper cover 821 on the piston rod of the first driving device 400, so that the first driving device 400 remains in the lifting position unchanged, avoiding the upper cover 821 from descending due to the gravity of the piston rod of the first driving device 400, thereby reducing the risk of safety accidents. Of course, the interlocking device 850 can also have other fluid ports to discharge the fluid medium flowing out of the lifting pipeline system 824 through the interlocking device 850.

[0051] In some embodiments, the second fluid port 852 is connected with a third control valve 860, the third control valve 860 has a second pilot port 861, and a fifth communication port 862 and a sixth communication port 863 in communication. The fifth communication port 862 is in communication with the second fluid port 852, and the sixth communication port 863 is in communication with the first medium inlet 825. When the second pilot port 861 is connected to the second pilot fluid of the second preset pressure, the fifth communication port 862 is in communication with the sixth communication port 863. In the embodiment, the third control valve 860 is a pilot valve, and only when the second pilot port 861 is connected to the second pilot fluid of the second preset pressure, the fifth communication port 862 is in communication with the sixth communication port 863. At this time, the fluid medium of the external fluid source can enter the first medium inlet 825 through the third control valve 860, so as to realize the lifting of the first driving device 400. It can be seen that, by arranging the third control valve 860, the first driving device 400 can be further ensured to be stretched and retracted only when necessary.

[0052] In some embodiments, the cover opening mechanism further comprises a second driving device 870, which is a telescopic cylinder. One end of the second driving device 870 is connected with the chamber body 810, and the other end of the second driving device 870 is connected with the positioning member 830. The second driving device 870 can drive the positioning member 830 to move. The second driving device 870 has a third flow passage 871 and a fourth flow passage 872. In some embodiments, the second driving device 870 can be a hydraulic cylinder or a pneumatic cylinder. Of course, the second driving device 870 of the present embodiment can be omitted, and the positioning member 830 can be driven to move manually or electrically. Further, the chamber body 810 is provided with a guide member 600, and the guide member 600 is provided with a guide hole. At least a part of the piston rod of the second driving device 870 is guided by the guide hole, so as to improve the stability of the telescopic movement of the second driving device 870.

[0053] The cover opening mechanism further comprises a locking reversing valve 880, which has a fourth fluid port 881, a fifth fluid port 882 and a sixth fluid port 883. The fifth fluid port 882 and the sixth fluid port 883 are connected with the fourth fluid port 881 in an on-off manner. The fifth fluid port 882 is connected with the third flow passage 871, and the sixth fluid port 883 is connected with the fourth flow passage 872.

[0054] The locking directional valve 880 has a third valve position and a fourth valve position. When the locking directional valve 880 is located at the third valve position, the fourth fluid port 881 is in communication with the fifth fluid port 882 and is disconnected from the sixth fluid port 883, and the second driving device 870 drives the positioning member 830 to be positioned with the rotating shaft 822. When the locking directional valve 880 is located at the fourth valve position, the fourth fluid port 881 is in communication with the sixth fluid port 883 and is disconnected from the fifth fluid port 882, and the second driving device 870 drives the positioning member 830 to be disconnected from the rotating shaft 822. The second pilot port 861 is in communication with the communication pipeline between the fifth fluid port 882 and the third fluid port 871. In the embodiment, when the fourth fluid port 881 is in communication with one of the fifth fluid port 882 and the sixth fluid port 883, the fourth fluid port 881 is disconnected from the other one of the fifth fluid port 882 and the sixth fluid port 883. When the fourth fluid port 881 is in communication with the fifth fluid port 882, the second driving device 870 can drive the positioning member 830 to be positioned with the rotating shaft 822. When the fourth fluid port 881 is in communication with the sixth fluid port 883, the second driving device 870 can drive the positioning member 830 to be disconnected from the rotating shaft 822. The fluid pressure in the communication pipeline of the embodiment can be configured as follows: when the fourth fluid port 881 is in communication with the fifth fluid port 882, the fluid pressure in the communication pipeline is the second preset pressure, and when the fourth fluid port 881 is in communication with the fifth fluid port 882, the fluid pressure in the communication pipeline is less than the second preset pressure. That is, when the second driving device 870 drives the positioning member 830 to be positioned with the rotating shaft 822, the third control valve 860 can be opened, and the fluid medium of the fluid source can enter the first medium inlet 825 of the lifting pipeline system 824 to lift the upper cover 821. When the second driving device 870 drives the positioning member 830 to be disconnected from the rotating shaft 822, the third control valve 860 cannot be opened, and thus the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, so that the upper cover 821 cannot be lifted. Therefore, when the rotating shaft 822 starts to rotate, even if the cantilever beam 823 is still pressing the reversing part 853 of the interlocking device 850, because the second driving device 870 drives the positioning member 830 to be disconnected from the rotating shaft 822 at this time, the third control valve 860 cannot be opened, and the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, so that a safety accident caused by mistakenly lifting the upper cover 821 when the rotating shaft 822 starts to rotate is avoided. Of course, the locking directional valve 880 can also have other fluid ports to discharge the fluid medium flowing out of the second driving device 870 through the locking directional valve 880.

[0055] More specifically, when the rotating shaft 822 is located at the first rotating position, the interlocking device 850 is in the first state, when the locking diverter valve 880 is located at the third valve position, the fluid flows as shown by the dotted line in FIG. 6, the fluid flows into the third flow port 871 of the second driving device 870 via the locking diverter valve 880, the driving positioning member 830 is positioned with the rotating shaft 822, and meanwhile the fluid also flows into the second pilot port 861 of the third control valve 860, so that the fluid can flow into the lifting pipeline system 824 via the interlocking device 850, the third control valve 860 and the first medium inlet 825 to realize the lifting of the upper cover 821; when the locking diverter valve 880 is located at the fourth valve position, the fluid flows as shown by the solid line in FIG. 6, the fluid flows into the fourth flow port 872 of the second driving device 870 via the locking diverter valve 880, the driving positioning member 830 is disengaged from the rotating shaft 822, and meanwhile the second pilot port 861 of the third control valve 860 has no fluid flowing in, the fluid discharged from the third flow port 871 of the second driving device 870 is insufficient to open the second pilot port 861 of the third control valve 860, so that the fluid cannot flow into the lifting pipeline system 824 to ensure that the upper cover 821 cannot be lifted during the rotation. When the rotating shaft 822 is located at the second rotating position, the interlocking device 850 is in the second state, when the locking diverter valve 880 is located at the third valve position, the fluid flows as shown by the dotted line in FIG. 7, the second driving device 870 drives the positioning member 830 to be positioned with the rotating shaft 822, and meanwhile the fluid also flows into the second flow port 420 of the first driving device 400 via the interlocking device 850 and the second shuttle valve 940 to keep the first driving device 400 at the lifting position.

[0056] In some embodiments, the fourth flow port 872 is connected with a one-way throttle valve 890, which throttles in the direction in which the fourth flow port 872 extends to the sixth fluid port 883. In this embodiment, the one-way throttle valve 890 throttles in the direction in which the fourth flow port 872 extends to the sixth fluid port 883, that is, when the second driving device 870 drives the positioning member 830 to be positioned with the rotating shaft 822, the one-way throttle valve 890 is conducted and throttled, so that the speed at which the positioning member 830 is positioned with the rotating shaft 822 can be adjusted.

[0057] As shown in FIGS. 9-11, in some embodiments, the lifting pipe system 824 includes a first manual switching valve 100, a first fluid pipe 200 and a second fluid pipe 300, and a first driving device 400 for connecting the upper cover 821; the first driving device 400 has a first flow port 410 and a second flow port 420, two ends of the first fluid pipe 200 are respectively connected with the first manual switching valve 100 and the first flow port 410, and two ends of the second fluid pipe 300 are respectively connected with the first manual switching valve 100 and the second flow port 420; the first manual switching valve 100 has a fifth valve position and a sixth valve position, when the first manual switching valve 100 is located at the fifth valve position, the first flow port 410 is a fluid inlet and the second flow port 420 is a fluid outlet, and the first driving device 400 can drive the upper cover 821 to descend; when the first manual switching valve 100 is located at the sixth valve position, the first flow port 410 is a fluid outlet and the second flow port 420 is a fluid inlet, and the first driving device 400 can drive the upper cover 821 to ascend. The cover opening mechanism of the embodiment of the application uses the first manual switching valve 100 to switch the working state of the telescopic cylinder, so that even if the machine table is not powered during the assembly of the machine table, the cover opening mechanism can still be used to lift or lower the upper cover 821.

[0058] Further, the cover opening mechanism further includes a second manual switching valve 500, the second manual switching valve 500 is located upstream of the first manual switching valve 100, and the first manual switching valve 100 and the second manual switching valve 500 are in communication and can be disconnected. The embodiment needs to operate the first manual switching valve 100 and the second manual switching valve 500 with both hands at the same time to drive the upper cover 821 to ascend or descend, so as to reduce the safety risk caused by the mistaken touch of the operator. In addition, when the operator operates the first manual switching valve 100 and the second manual switching valve 500 with both hands, the operator's attention can be improved, and the operator's hands can be prevented from being clamped during the lifting and lowering of the upper cover 821, thereby ensuring the safety of the operation.

[0059] Further, the first manual switch valve 100 comprises a first manual valve 110 and a second manual valve 120, the first manual valve 110 has a first medium port 111, a second medium port 112 and a third medium port 113, the second manual valve 120 has a fourth medium port 121 and a fifth medium port 122 which are connected in an on-off manner, the third medium port 113 is connected with the fourth medium port 121, the first end of the first fluid pipeline 200 can be connected with the fifth medium port 122, the first end of the second fluid pipeline 300 can be connected with the second medium port 112; the first medium port 111 is connected with the second manual switch valve 500 in an on-off manner, the first medium port 111 can be connected with the second medium port 112 and the third medium port 113 in an on-off manner respectively, and in the case that the first medium port 111 is connected with one of the second medium port 112 and the third medium port 113, the first medium port 111 is disconnected with the other; in the case that the first manual switch valve 100 is located at the fifth valve position, the first medium port 111 is connected with the third medium port 113, and the fourth medium port 121 is connected with the fifth medium port 122; in the case that the first manual switch valve 100 is located at the sixth valve position, the first medium port 111 is connected with the second medium port 112. In the embodiment of the application, the operation part of the first manual valve 110 and the second manual valve 120 is only one, so that the operation direction of the operation part of the first manual valve 110 and the second manual valve 120 can be unified, so that the operation direction of the first manual valve 110 and the second manual valve 120 is consistent, so as to facilitate the operator to operate.

[0060] In some embodiments, the rotating shaft 822 is provided with a stop piece 826, the support seat 813 is provided with a first limiting protrusion 811, and in the case that the rotating shaft 822 is located at the first rotating position, the stop piece 826 is limited and matched with the first limiting protrusion 811 in the direction of rotating from the second rotating position to the first rotating position. If the stop piece 826 is not provided, the rotating shaft 822 can be stopped by relying on human force, but the force applied by the maintenance personnel each time is different, so that the position stopped by the rotating shaft 822 each time is also different, which may cause that the positioning piece 830 cannot be positioned and matched with the rotating shaft 822, and may also cause that the upper cover 821 collides with other machines, thereby causing damage to parts. In the embodiment, the stop piece 826 and the first limiting protrusion 811 are provided, and in the process of rotating the rotating shaft 822 from the second rotating position to the first rotating position, the first limiting protrusion 811 can limit the stop piece 826, so that the rotating shaft 822 is accurately stopped at the first rotating position, thereby solving the problems that the positioning piece 830 cannot be positioned and matched with the rotating shaft 822 and the upper cover 821 collides with other machines.

[0061] And / or, in some embodiments, the support base 813 is provided with a second limiting protrusion 812, and the stopper 826 is in limiting cooperation with the second limiting protrusion 812 in the direction of rotation from the first rotation position to the second rotation position when the rotating shaft 822 is located at the second rotation position. The present embodiment is provided with the stopper 826 and the second limiting protrusion 812, and the second limiting protrusion 812 can limit the stopper 826 during the rotation of the rotating shaft 822 from the first rotation position to the second rotation position, so as to accurately stop the rotating shaft 822 at the second rotation position, thereby solving the problems that the limiting member 830 cannot be in positioning cooperation with the rotating shaft 822 and the upper cover 821 collides with other machines.

[0062] In some embodiments, the stopper 826 can be made of rigid material, so that the stopper 826 is in rigid contact with the first limiting protrusion 811 and the second limiting protrusion 812 when the stopper 826 is in contact with the first limiting protrusion 811 and the second limiting protrusion 812 for limiting, which can generate greater vibration and can cause damage to the stopper 826, the first limiting protrusion 811 and the second limiting protrusion 812. In some embodiments, the stopper 826 comprises a fixed block 827 connected with the rotating shaft 822, and further comprises a first buffer block 828 provided on the fixed block 827, and the first buffer block 828 is in limiting cooperation with the first limiting protrusion 811 when the rotating shaft 822 is located at the first rotation position. In the present embodiment, the fixed block 827 is provided with the first buffer block 828, and the first buffer block 828 can be in limiting contact with the first limiting protrusion 811, and the first buffer block 828 has the effect of buffering and shock absorption, so that when the first buffer block 828 is in contact with the first limiting protrusion 811, greater vibration will not be generated between them, and the risk of damage to the stopper 826 and the first limiting protrusion 811 can be reduced. In some embodiments, the first buffer block 828 can be made of elastic material such as rubber. Further, the first buffer block 828 is detachably connected with the fixed block 827 through clamping, threaded connection or the like, so as to facilitate replacement of the first buffer block 828.

[0063] And / or, in some embodiments, the stopper 826 further comprises a second buffer block 829 arranged on the fixed block 827, which is in limiting cooperation with the second limiting protrusion 812 when the rotating shaft 822 is in the second rotating position. In this embodiment, the second buffer block 829 is arranged on the fixed block 827, and the second buffer block 829 can be in limiting contact with the second limiting protrusion 812. The second buffer block 829 has a buffering and damping effect, so that when the second buffer block 829 is in contact with the second limiting protrusion 812, there will be no large vibration between them, and the risk of damage to the stopper 826 and the second limiting protrusion 812 can be reduced. In some embodiments, the second buffer block 829 can be made of elastic materials such as rubber. Further, the second buffer block 829 is detachably connected with the fixed block 827 by clamping, threaded connection or the like, so as to facilitate replacement of the second buffer block 829.

[0064] In some embodiments, the support seat 813 is provided with a rotating hole 814, at least a part of the rotating shaft 822 is in rotating cooperation with the rotating hole 814, and the rotating shaft 822 is externally provided with at least two radial rolling bearings 910, and the outer rings of the at least two radial rolling bearings 910 are in cooperation with the inner circumferential surface of the rotating hole 814. In some embodiments, the radial rolling bearing 910 is a rolling bearing capable of bearing radial force, which can be a pure radial rolling bearing capable of bearing only radial force, such as a needle bearing, etc.; or a rolling bearing capable of bearing both radial force and axial force, such as a deep groove ball bearing, etc.

[0065] In this embodiment, the outer ring of the radial rolling bearing 910 is in interference fit with the inner circumferential surface of the rotating hole 814, and the inner ring of the radial rolling bearing 910 can rotate with the rotating shaft 822. When the upper cover 821 is located at the maintenance side, or when the upper cover 821 is located directly above the top opening, the upper cover 821 is suspended at one end of the rotating shaft 822 and will exert a radial force on the rotating shaft 822, and the radial rolling bearing 910 can bear the radial force to avoid the falling of the upper cover 821. In addition, the radial rolling bearing 910 of this embodiment is a rolling bearing, which has smaller tolerance fit, smaller deformation under force, and smaller friction generated during rotation compared with a sliding bearing. Therefore, the radial rolling bearing 910 of this embodiment can also improve the stability of the rotating shaft 822 during rotation.

[0066] In some embodiments, the cover opening mechanism further comprises a cantilever beam 823, a first end of the cantilever beam 823 is connected with the upper cover 821, a second end of the cantilever beam 823 is fixedly connected with the rotating shaft 822, an end of the cantilever beam 823 extending towards the rotating shaft 822 is provided with a flange 700, a part of the rotating shaft 822 is located in the flange 700, an outer part of the flange 700 is sleeved with an axial rolling bearing 920, the axial rolling bearing 920 is arranged on the support base 813, and two ends of the axial rolling bearing 920 along an axial direction thereof are in contact with the support base 813 and the cantilever beam 823 respectively. In the embodiment, the axial rolling bearing 920 is sleeved with the outer part of the flange 700 of the cantilever beam 823, and since the cantilever beam 823 is connected with the rotating shaft 822, the axial force applied on the axial rolling bearing 920 by the upper cover 821 can be borne by the rotating shaft 822 and the cantilever beam 823 together, so that the force borne by the rotating shaft 822 can be reduced, and the rotating shaft 822 can be prevented from being damaged.

[0067] In some embodiments, the rotating hole 814 is a stepped hole, the stepped hole comprises a first hole section 815 and a second hole section 816, a diameter of the first hole section 815 is larger than a diameter of the second hole section 816, and the first hole section 815 is closer to the cantilever beam 823 than the second hole section 816. In some embodiments, an axis of the first hole section 815 is collinear with an axis of the second hole section 816; the cantilever beam 823 and the rotating shaft 822 can be connected by welding or a threaded connection.

[0068] The axial rolling bearing 920 is arranged on a stepped surface where the first hole section 815 and the second hole section 816 are connected, and an outer ring of the axial rolling bearing 920 is matched with an inner peripheral surface of the first hole section 815. In some embodiments, the axial rolling bearing 920 is a rolling bearing capable of bearing axial force, which can be a pure axial rolling bearing capable of bearing only axial force, such as a thrust ball bearing, or a rolling bearing capable of bearing both radial force and axial force, such as a deep groove ball bearing.

[0069] In the embodiment, the axial rolling bearing 920 is arranged on the stepped surface, that is, the axial rolling bearing 920 is limited and matched with the stepped surface in the vertically downward direction, and the stepped surface is located in the rotating hole 814, so that at least part of the axial rolling bearing 920 is located in the rotating hole 814, and the space outside the rotating hole 814 occupied by the axial rolling bearing 920 can be reduced.

[0070] The embodiment of the present application further discloses a semiconductor process equipment, which comprises a process chamber and the cover opening mechanism of any one of the above embodiments, the process chamber comprises a chamber body 810 and the upper cover 821, the rotating shaft 822 is connected with the upper cover 821, and the support base 813 is connected with the chamber body 810. In some embodiments, the upper cover 821 comprises an upper electrode assembly.

[0071] The above embodiments of the present application mainly describe the differences between various embodiments, and the different optimization features between various embodiments can be combined to form a better embodiment as long as they are not contradictory. In view of concise writing, details are not described herein. The embodiments of the present application are described above in combination with the drawings, but the present application is not limited to the above specific embodiments. The above specific embodiments are only illustrative, but not restrictive. Those skilled in the art can make many forms under the inspiration of the present application without departing from the scope of the present application and the protection scope of the claims.

Claims

1. A cover opening mechanism for a process chamber, characterized in that: It includes a support seat, a rotating shaft and a positioning member, wherein the positioning member can move relative to the rotating shaft. The rotating shaft is used to be connected to the upper cover of the process chamber, the supporting seat is used to be connected to the chamber body of the process chamber, the rotating shaft is rotatably connected to the supporting seat, and the rotating shaft is used to rotate between a first rotating position and a second rotating position. When the rotation shaft is in the first rotation position or the second rotation position, the positioning member can move relative to the rotation shaft to engage with or release the engagement with the rotation shaft.

2. The cover opening mechanism according to claim 1, characterized in that: A rotation hole is provided in the support seat, and the rotation shaft is rotatably provided in the rotation hole. When the rotating shaft is in the first rotating position, the upper cover is directly opposite to the top opening of the chamber body; When the rotation shaft is in the second rotation position, the upper cover is misaligned with the top opening.

3. The cover opening mechanism according to claim 1, characterized in that: The cover opening mechanism further includes a positioning fitting, which is arranged outside the rotating shaft; The positioning fitting is provided with a first fitting portion, and when the rotating shaft is in the first rotation position, the positioning fitting can be movable relative to the rotating shaft to positionally fit with or release the positioning fitting with the first fitting portion; and / or, The positioning fitting is provided with a second fitting portion. When the rotating shaft is in the second rotation position, the positioning fitting can be moved relative to the rotating shaft to positionally fit with or release the positioning fitting with the second fitting portion.

4. The cover opening mechanism according to claim 3, characterized in that: The second rotation position includes a first sub-position and a second sub-position, the second matching portion includes a first sub-matching portion corresponding to the first sub-position and a second sub-matching portion corresponding to the second sub-position, the rotation shaft can rotate from the first rotation position to the first sub-position along a first rotation direction, and the rotation shaft can also rotate from the first rotation position to the second sub-position along a second rotation direction, and the first rotation direction is opposite to the second rotation direction; When the rotating shaft is in the first sub-position, the positioning member can move relative to the rotating shaft to position or release the positioning fit with the first sub-matching portion; when the rotating shaft is in the second sub-position, the positioning member can move relative to the rotating shaft to position or release the positioning fit with the second sub-matching portion.

5. The cover opening mechanism according to claim 1, characterized in that: The cover opening mechanism also includes a lifting device and a cantilever beam, the first end of the lifting device is connected to the upper cover, the second end of the lifting device is connected to the first end of the cantilever beam, the second end of the cantilever beam is fixedly connected to the rotating shaft, and the lifting device can drive the upper cover to rise and fall.

6. The cover opening mechanism according to claim 5, characterized in that: The lifting device includes a first driving device and an interlocking device; The interlocking device is provided with a reversing portion for switching the interlocking device between a first state and a second state; When the rotating shaft is in the first rotating position, the cantilever beam presses the reversing portion, and the interlocking device is in the first state, so that the first driving device drives the upper cover to move up and down; When the rotating shaft is located at the second rotating position, the cantilever beam releases the reversing portion, and the interlocking device is in the second state to restrict the first driving device from driving the upper cover to move up and down.

7. The cover opening mechanism according to claim 6, characterized in that: The first driving device is a telescopic cylinder, and the interlocking device is an interlocking reversing valve. The lifting device further includes a lifting pipeline system, the lifting pipeline system is connected to the first driving device, the lifting pipeline system has a first medium inlet, the first medium inlet is used to introduce a fluid medium to drive the first driving device to extend and retract; The interlocking device has a first fluid port and a second fluid port, wherein the first fluid port is connectable to a fluid source, and the second fluid port is connectable to the first medium inlet. When the interlock device is in the first state, the interlock device is located in a first valve position so that the first fluid port is connected to the second fluid port; When the interlock device is in the second state, the interlock device is located in a second valve position to disconnect the first fluid port from the second fluid port.

8. The cover opening mechanism according to claim 7, characterized in that: The first driving device has a first flow opening and a second flow opening; The first flow port is connected to a first control valve, which has a first pilot port, and a first communication port and a second communication port that are connected and disconnectable. When a first pilot fluid of a first preset pressure is introduced into the first pilot port, the first communication port is connected to the second communication port. The first communication port and the second circulation port are respectively connected to the first medium inlet in a disconnectable manner, and the first circulation port is connected to the second communication port; when the first medium inlet is connected to the first circulation port and disconnected from the second circulation port, the first driving device can drive the upper cover to descend; when the first medium inlet is connected to the second circulation port and disconnected from the first circulation port, the first driving device can drive the upper cover to ascend; The interlocking device also has a third fluid port, which is connected to the second flow port; when the interlocking device is in the first valve position, the first fluid port is disconnected from the third fluid port; when the interlocking device is in the second valve position, the first fluid port is connected to the third fluid port, and the first communication port is disconnected from the second communication port.

9. The cover opening mechanism according to claim 7, characterized in that: The second fluid port is connected to a third control valve, the third control valve having a second pilot port, and a fifth communication port and a sixth communication port that are connected in a switchable manner, the fifth communication port being connected to the second fluid port, and the sixth communication port being connected to the first medium inlet; When the second pilot fluid at a second preset pressure flows into the second pilot port, the fifth communication port is communicated with the sixth communication port.

10. The cover opening mechanism according to claim 9, characterized in that: The cover opening mechanism further includes a second driving device, which is a telescopic cylinder, one end of which is connected to the chamber body, and the other end of which is connected to the positioning member, and the second driving device can drive the positioning member to move, and the second driving device has a third flow port and a fourth flow port; The cover opening mechanism further includes a locking reversing valve having a fourth fluid port, a fifth fluid port, and a sixth fluid port, wherein the fifth fluid port and the sixth fluid port are respectively connected to the fourth fluid port in a switchable manner, the fifth fluid port is connected to the third flow port, and the sixth fluid port is connected to the fourth flow port; The locking reversing valve has a third valve position and a fourth valve position. When the locking reversing valve is in the third valve position, the fourth fluid port is connected to the fifth fluid port and disconnected from the sixth fluid port, and the second driving device drives the positioning member to move so as to be positioned and matched with the rotating shaft. When the locking reversing valve is in the fourth valve position, the fourth fluid port is connected to the sixth fluid port and disconnected from the fifth fluid port, and the second driving device drives the positioning member to move so as to release the positioning and matching with the rotating shaft. The second pilot port is communicated with a communication channel located between the fifth fluid port and the third flow port.

11. The cover opening mechanism according to claim 10, characterized in that: The fourth flow port is connected to a one-way throttle valve, and the one-way throttle valve throttles in a direction in which the fourth flow port extends toward the sixth fluid port.

12. The cover opening mechanism according to claim 1, characterized in that: A rotating hole is provided in the support seat, and at least two radial rolling bearings are sleeved on the outside of the rotating shaft. The outer rings of at least two radial rolling bearings match the inner circumference of the rotating hole.

13. The cover opening mechanism according to claim 12, characterized in that: The cover opening mechanism further includes a cantilever beam, wherein a first end of the cantilever beam is used to connect with the upper cover, and a second end of the cantilever beam is fixedly connected with the rotating shaft. The cantilever beam extends toward one end of the rotating shaft with a flange, a portion of the rotating shaft is located inside the flange, an axial rolling bearing is sleeved on the outside of the flange, the axial rolling bearing is arranged on the support seat, and the two ends of the axial rolling bearing along its own axis are in contact with the support seat and the cantilever beam respectively.

14. The cover opening mechanism according to claim 13, characterized in that: The rotating hole is a stepped hole, comprising a first hole segment and a second hole segment, wherein the diameter of the first hole segment is larger than the diameter of the second hole segment, and the first hole segment is closer to the cantilever beam than the second hole segment; The axial rolling bearing is arranged on a step surface connecting the first hole segment and the second hole segment, and the outer ring of the axial rolling bearing is matched with the inner circumferential surface of the first hole segment.

15. The cover opening mechanism according to claim 1, characterized in that: A stopper is provided on the rotating shaft. The support seat is provided with a first limiting protrusion, and when the rotating shaft is in the first rotation position, the stopper cooperates with the first limiting protrusion in the direction of rotation from the second rotation position to the first rotation position; and / or, A second limiting protrusion is provided on the support seat. When the rotating shaft is located at the second rotating position, the stopper cooperates with the second limiting protrusion to limit the rotation in the direction from the first rotating position to the second rotating position.

16. The cover opening mechanism according to claim 15, characterized in that: The stopper includes a fixed block connected to the rotating shaft. The stopper further includes a first buffer block provided on the fixed block, and when the rotating shaft is located at the first rotating position, the first buffer block is in limiting engagement with the first limiting protrusion; and / or, The stopper further includes a second buffer block provided on the fixed block. When the rotating shaft is located at the second rotating position, the second buffer block is engaged with the second limiting protrusion.

17. A semiconductor process equipment, comprising a process chamber and the cover opening mechanism according to any one of claims 1 to 16, wherein the process chamber comprises a chamber body and an upper cover, the rotating shaft is connected to the upper cover, and the support seat is connected to the chamber body.

Images