Solid-source vaporization device and system

Abstract

A solid-source vaporization device and system. The solid-source vaporization device comprises a container (11), a cover plate (12) mounted on the container in a sealed manner, and a plurality of trays (20) located in the container, wherein each tray comprises a bottom wall (211) and a side wall (212) surrounding an outer periphery of the bottom wall, at least part of the side wall matching the shape of an inner wall of the container; and a position adjusting structure (30), which abuts between the side walls of the trays and the inner wall of the container, is provided in the container, the position adjusting structure being configured to apply to the side walls of the trays pressure towards the centers of the trays, so as to cause the parts of the side walls of the trays away from the position adjusting structure to abut against the inner wall of the container. The solid-source vaporization device enables parts of the side walls of the trays to abut against the inner wall of the container, thereby improving the heat conduction efficiency between the trays and the container, and improving the output efficiency of solid-source vapor.

Description

Solid source gasification device and system

[0001] This invention claims priority to the Chinese patent application filed with the Patent Office of China on December 12, 2023, with application number: 202311704880.6 and invention name: “Solid Source Gasification Device and System”. The entire contents of this application are incorporated herein by reference. Technical Field

[0002] The present invention belongs to the technical field of gasification equipment, and in particular relates to a solid source gasification device and system. Background Art

[0003] A solid-state source vaporization device is used to heat and vaporize a solid source (i.e., a solid precursor material used in thin-film deposition processes for semiconductor manufacturing) to form solid-state source vapor, which is then transported to a reaction vessel. In the semiconductor industry, this reaction vessel is the reaction chamber of a thin-film deposition device, such as a chemical vapor deposition (CVD) device or an atomic layer deposition (ALD) device. Solid-state source vaporization devices are available in two configurations: those that use a carrier gas and those that do not. Devices that do not use a carrier gas have only one outlet, while those that do require a corresponding carrier gas inlet and gas pipe in addition to the outlet.

[0004] As shown in Figure 1, taking the solid source gasification device in the prior art that does not use a carrier gas as an example, it includes a bottle body and a cover plate 12' encapsulated on the bottle body 11'. A flange 13' is provided on the outside of the bottle body 11', and the cover plate 12 is fixedly installed on the flange 13' by bolts. An air outlet 121' is provided on the cover plate 12' and is connected to the interior of the bottle body. The bottle body 11' has one or more trays 20' inside, which are used to hold the solid source. Taking multiple stacked trays 20' as an example, a number of air guide tubes 201' are evenly distributed on the trays to connect the cavities corresponding to each tray.

[0005] During operation, the solid source vaporization device is heated to the solid source vaporization temperature by an external heating device (such as a metal insulation barrel or heating jacket). The solid source vapor is then transported through the gas pipe 201' on the tray and ultimately through the gas outlet 121' to the reaction vessel. To ensure efficient solid source vaporization, the heat transfer efficiency of the entire device must be maintained.

[0006] As shown in Figure 2 , the bottle body 11' and tray 20' in conventional technology are typically cylindrical. To facilitate placement of the tray, the outer diameter of the tray 20' is smaller than the inner diameter of the bottle body 11'. Once the tray 20' is placed within the bottle body 11', a gap (as indicated by the shaded space) separates the outer wall of the tray 20' from the inner wall of the bottle body 11', preventing them from fully contacting each other. Because the bottle body is typically in a vacuum state, where heat conduction efficiency is extremely low, heat from the external heating device cannot be effectively transferred to the tray, significantly impacting the output efficiency of the solid-state source vapor.

[0007] Therefore, in order to solve the above technical problems, it is necessary to provide a solid source gasification device and system.

[0008] Summary of the Invention

[0009] In view of this, an object of the present invention is to provide a solid source gasification device and system to improve the heat conduction efficiency of the solid source gasification device.

[0010] In order to achieve the above-mentioned purpose, the technical solution provided by one embodiment of the present invention is as follows:

[0011] A solid source gasification device comprises a bottle body, a cover plate encapsulated on the bottle body, and a plurality of trays located in the bottle body, wherein the tray comprises a bottom wall and side walls arranged around the outer periphery of the bottom wall, at least a portion of the side walls matches the shape of the inner wall of the bottle body, and a position adjustment structure is provided in the bottle body, which abuts between the side walls of the tray and the inner wall of the bottle body, and the position adjustment structure is used to apply pressure toward the center of the tray to the side walls of the tray so that the portion of the side walls of the tray away from the position adjustment structure abuts against the inner wall of the bottle body.

[0012] In one embodiment, the tray is provided with a receiving groove recessed toward the center of the tray, and the position adjustment structure is entirely or partially located in the receiving groove.

[0013] In one embodiment, a portion of the side wall of the tray is opposite to a portion of the inner wall of the bottle body and is spaced apart from each other, and the position adjustment structure abuts between the portion of the side wall of the tray and the portion of the inner wall of the bottle body.

[0014] In one embodiment, the position adjustment structure includes a first baffle abutting against the side wall of the tray, a second baffle abutting against the inner wall of the bottle body, and several adjustment members installed between the first baffle and the second baffle, and the adjustment members are used to adjust the distance between the first baffle and the second baffle.

[0015] In one embodiment, the first baffle and the second baffle are metal baffles, and the adjusting member is a metal adjusting member.

[0016] In one embodiment, the adjusting member is a spring and / or a screw adjusting member.

[0017] In one embodiment, the side wall of the tray is a plurality of planes, a plurality of curved surfaces, or a combination of a plurality of planes and a plurality of curved surfaces, and the inner wall of the bottle body is a plurality of planes, a plurality of curved surfaces, or a combination of a plurality of planes and a plurality of curved surfaces that match the shape of the side wall of the tray.

[0018] In one embodiment, the inner wall of the bottle body includes a first inner wall and a second inner wall arranged opposite to each other, and a third inner wall and a fourth inner wall connected between the first inner wall and the second inner wall and arranged opposite to each other; the tray includes a first side wall and a second side wall arranged opposite to each other, and a third side wall and a fourth side wall connected between the first side wall and the second side wall and arranged opposite to each other.

[0019] In one embodiment, a plurality of first receiving grooves are provided on the first side wall, and a first position adjustment structure is provided in the first receiving groove, which abuts against the first side wall and the first inner wall of the bottle body. The first position adjustment structure is used to apply pressure to the first receiving groove toward the second side wall of the tray so that the second side wall of the tray abuts against the second inner wall of the bottle body.

[0020] In one embodiment, a plurality of second receiving grooves are provided on the third side wall, and a second position adjustment structure is provided in the second receiving groove, which abuts against the third side wall and the third inner wall of the bottle body. The second position adjustment structure is used to apply pressure to the second receiving groove toward the third side wall of the tray so that the third side wall of the tray abuts against the third inner wall of the bottle body.

[0021] In one embodiment, the cover plate is provided with an air outlet, the bottle body includes a first tray located at the bottom of the bottle body and at least one second tray stacked on the first tray, and the second tray is provided with an air guide pipe passing through the bottom wall of the tray.

[0022] In one embodiment, the cover plate is provided with an air outlet and a carrier gas inlet, the bottle body is provided with a support member located at the bottom of the bottle body and at least one tray stacked on the support member, the tray is provided with an air guide tube passing through the bottom wall of the tray, the receiving groove on the tray and the inner wall of the bottle body form a carrier gas channel connected to the bottom of the bottle body, and the carrier gas channel is connected to the carrier gas inlet on the cover plate.

[0023] In one embodiment, the position adjustment structure is installed on the support member and / or the bottom wall of the bottle body.

[0024] Another embodiment of the present invention provides a technical solution as follows:

[0025] A solid source gasification device, which includes a bottle body, a cover plate encapsulated on the bottle body, and several tray assemblies located in the bottle body, the tray assembly including multiple sub-trays arranged separately, the sub-tray including a bottom wall and side walls arranged around the outer periphery of the bottom wall, part of the side walls matching the shape of the inner wall of the bottle body, a position adjustment structure abutting between the side walls of the multiple sub-trays is provided in the bottle body, the position adjustment structure is used to apply pressure to the sub-tray toward the inner wall of the bottle body so that the part of the side wall of the sub-tray away from the position adjustment structure abuts against the inner wall of the bottle body.

[0026] In one embodiment, the sub-tray is provided with a sub-receiving groove recessed toward the inner wall of the bottle body, and the position adjustment mechanism is entirely or partially located in the sub-receiving groove.

[0027] In one embodiment, the tray assembly includes a first sub-tray and a second sub-tray which are separately arranged, and the first sub-tray and the second sub-tray are respectively provided with a first sub-receiving groove and a second receiving groove which are recessed into the inner wall of the bottle body, and a position adjustment structure is provided between the first sub-receiving groove and the second receiving groove.

[0028] In one embodiment, the tray assembly includes a first sub-tray and a second sub-tray that are separately provided. The first sub-tray and the second sub-tray each include two side walls that are opposite and spaced apart. The position adjustment structure abuts between the two side walls.

[0029] In one embodiment, the position adjustment structure includes a first baffle located in contact with the side wall of the first sub-tray, a second baffle located in contact with the side wall of the second sub-tray, and a plurality of adjustment members installed between the first baffle and the second baffle, wherein the adjustment members are used to adjust the distance between the first baffle and the second baffle.

[0030] In one embodiment, the first baffle and the second baffle are metal baffles, and the adjusting member is a metal adjusting member.

[0031] In one embodiment, the adjusting member is a spring and / or a screw adjusting member.

[0032] In one embodiment, the tray assembly includes at least four separately arranged sub-trays, each sub-tray is provided with a sub-receiving groove recessed toward the inner wall of the bottle body, all sub-receiving grooves are adjacent and constitute a receiving groove, and the receiving groove has multiple groups of receiving groove surfaces that are opposite to each other, and a position adjustment structure is provided between each group of receiving groove surfaces.

[0033] In one embodiment, the side wall of the tray assembly is a plurality of planes, a plurality of curved surfaces, or a combination of a plurality of planes and a plurality of curved surfaces, and the inner wall of the bottle body is a plurality of planes, a plurality of curved surfaces, or a combination of a plurality of planes and a plurality of curved surfaces that match the shape of the side wall of the tray.

[0034] In one embodiment, an air outlet is provided on the cover plate, and the bottle body includes a first tray assembly located at the bottom of the bottle body and at least one second tray assembly stacked on the first tray assembly, and an air duct is provided on the sub-tray in the second tray assembly that passes through the bottom wall of the sub-tray.

[0035] In one embodiment, the cover is provided with an air outlet and a carrier gas inlet, the bottle body is provided with a support member located at the bottom of the bottle body and at least one tray assembly stacked on the support member, the sub-tray in the tray assembly is provided with an air guide tube passing through the bottom wall of the sub-tray, and the sub-receiving grooves on the multiple sub-trays form a carrier gas channel connected to the bottom of the bottle body, and the carrier gas channel is connected to the carrier gas inlet on the cover.

[0036] In one embodiment, the position adjustment structure is installed on the support member and / or the bottom wall of the bottle body.

[0037] Another embodiment of the present invention provides the following technical solutions:

[0038] A solid source gasification system comprises the above-mentioned solid source gasification device and a heating device, wherein the heating device is heat-conductingly mounted on the side and / or bottom of a bottle body in the solid source gasification device.

[0039] The present invention has the following beneficial effects:

[0040] The solid-source vaporization device of the present invention utilizes a position adjustment structure and a corresponding structural design on the tray to allow portions of the tray's sidewall to abut against the inner wall of the bottle, thereby improving the heat transfer efficiency between the tray and the bottle. Furthermore, when the solid-source vaporization device is heated by a heating device, heat can be efficiently transferred to the solid source on the tray, improving the output efficiency of the solid-source vapor. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] FIG1 is a schematic cross-sectional view of a solid source gasification device in the prior art;

[0043] FIG2 is a schematic diagram of a top view of a tray and a bottle body in the prior art;

[0044] FIG3 is a schematic diagram of the explosion structure of the solid source gasification device in Example 1 of the present invention;

[0045] FIG4 is a schematic cross-sectional view of the solid source gasification device in Example 1 of the present invention;

[0046] FIG5 is a schematic diagram of a top view of the bottle body in Example 1 of the present invention;

[0047] FIG6 is a schematic diagram of the three-dimensional structure of the first tray in Example 1 of the present invention;

[0048] FIG7 is a schematic diagram of the three-dimensional structure of the second tray in Example 1 of the present invention;

[0049] FIG8 is a schematic top view of the second tray in Example 1 of the present invention;

[0050] FIG9 is a schematic top view of the structure of the solid source gasification device in Example 1 of the present invention;

[0051] FIG10 is a partial enlarged view of point A in FIG9 ;

[0052] FIG11 is a partial enlarged view of point B in FIG9 ;

[0053] FIG12 is a schematic diagram of the three-dimensional structure of the position adjustment structure in Example 1 of the present invention;

[0054] FIG13 is a schematic top view of the second tray in Example 2 of the present invention;

[0055] FIG14 is a schematic top view of the structure of a solid source gasification device in Example 2 of the present invention;

[0056] FIG15 is a schematic diagram of the explosion structure of the solid source gasification device in Example 3 of the present invention;

[0057] FIG16 is a schematic cross-sectional view of a solid source gasification device in Example 3 of the present invention;

[0058] FIG17 is a schematic diagram of the three-dimensional structure of the support member in Example 3 of the present invention;

[0059] FIG18 is a schematic diagram of the explosion structure of the solid source gasification device in Example 4 of the present invention;

[0060] FIG19 is a schematic cross-sectional view of a solid source gasification device in Example 4 of the present invention;

[0061] FIG20 is a schematic diagram of the three-dimensional structure of the support member in Example 4 of the present invention;

[0062] FIG21 is a schematic diagram of the three-dimensional structure of the position adjustment structure in Example 4 of the present invention;

[0063] FIG22 is a schematic diagram of the explosion structure of the solid source gasification device in Example 5 of the present invention;

[0064] FIG23 is a schematic cross-sectional view of a solid source gasification device in Example 5 of the present invention;

[0065] FIG24 is a schematic diagram of the three-dimensional structure of the support member and the tray in Example 5 of the present invention;

[0066] FIG25 is a schematic diagram of the installation structure of the support member and the position adjustment structure in Example 5 of the present invention;

[0067] FIG26 is a schematic top view of the structure of a solid source gasification device in Example 5 of the present invention;

[0068] FIG27 is a schematic diagram of the three-dimensional structure of a solid source gasification device in Example 6 of the present invention;

[0069] FIG28 is a schematic diagram of the explosion structure of the solid source gasification device in Example 6 of the present invention;

[0070] FIG29 is a schematic cross-sectional view of a solid source gasification device in Example 6 of the present invention;

[0071] FIG30 is a schematic top view of the second tray assembly in Example 6 of the present invention;

[0072] FIG31 is a schematic top view of the structure of a solid source gasification device in Example 6 of the present invention;

[0073] FIG32 is a schematic diagram of the three-dimensional structure of the position adjustment structure in Example 6 of the present invention;

[0074] FIG33 is a schematic diagram of the explosion structure of the solid source gasification device in Example 7 of the present invention;

[0075] FIG34 is a schematic cross-sectional view of a solid source gasification device in Example 7 of the present invention;

[0076] FIG35 is a schematic top view of the solid source gasification device in Example 7 of the present invention;

[0077] FIG36 is a schematic diagram of the installation structure of the support assembly and the position adjustment structure in Example 7 of the present invention;

[0078] FIG37 is a schematic diagram of the explosion structure of the solid source gasification device in Example 8 of the present invention;

[0079] FIG38 is a schematic cross-sectional view of a solid source gasification device in Example 8 of the present invention;

[0080] FIG39 is a schematic top view of the solid source gasification device in Example 8 of the present invention;

[0081] FIG40 is a schematic diagram of the exploded structure of the position adjustment structure in Example 8 of the present invention;

[0082] FIG41 is a schematic top view of the solid source gasification device in Example 9 of the present invention;

[0083] FIG42 is a schematic top view of the solid source gasification device in Example 10 of the present invention;

[0084] FIG43 is a schematic top view of the structure of the solid source gasification device in Example 11 of the present invention;

[0085] FIG44 is a schematic diagram of the cross-sectional structure at AA' in FIG43;

[0086] FIG45 is a schematic diagram of the cross-sectional structure at BB' in FIG43;

[0087] FIG46 is a schematic top view of the solid source gasification device in Example 12 of the present invention;

[0088] Figure 47 is a schematic diagram of the top view of the solid source gasification device in Example 13 of the present invention. DETAILED DESCRIPTION

[0089] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0090] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0091] The present invention discloses a solid source gasification device, comprising a bottle body, a cover plate encapsulated on the bottle body, and a plurality of trays located in the bottle body, wherein the tray comprises a bottom wall and side walls arranged around the outer periphery of the bottom wall, at least part of the side walls match the shape of the inner wall of the bottle body, the tray is provided with a receiving groove recessed toward the center of the tray, a position adjustment structure is provided in the receiving groove, and the position adjustment structure is used to apply pressure toward the center of the tray to the receiving groove so that part of the side wall of the tray away from the receiving groove abuts against the inner wall of the bottle body.

[0092] The present invention also discloses a solid source gasification device, which includes a bottle body, a cover plate encapsulated on the bottle body, and several tray assemblies located in the bottle body. The tray assembly includes a plurality of separately arranged sub-trays, the sub-tray including a bottom wall and side walls arranged around the outer periphery of the bottom wall, part of the side walls matching the shape of the inner wall of the bottle body, the sub-tray is provided with a sub-receiving groove recessed toward the inner wall of the bottle body, and a position adjustment structure is provided between the plurality of sub-receiving grooves, the position adjustment structure being used to apply pressure to the sub-receiving groove toward the inner wall of the bottle body so that part of the side wall on the sub-tray away from the sub-receiving groove abuts against the inner wall of the bottle body.

[0093] In addition, the present invention also discloses a solid source gasification system, which includes a solid source gasification device and a heating device, wherein the heating device is heat-conductingly mounted on the side and / or bottom of a bottle body in the solid source gasification device.

[0094] The present invention utilizes a position adjustment structure and a corresponding structural design on the tray to allow portions of the tray's sidewall to abut against the inner wall of the bottle, thereby improving the heat transfer efficiency between the tray and the bottle. Furthermore, when the solid-source vaporization device is heated by a heating device, heat can be efficiently transferred to the solid source on the tray, improving the output efficiency of the solid-source vapor.

[0095] The present invention will be further described below with reference to specific embodiments.

[0096] Example 1:

[0097] 3 and 4 are schematic structural diagrams of the solid source gasification device in this embodiment, which includes a bottle body 11 , a cover plate 12 encapsulated on the bottle body 11 , and a plurality of trays 20 located in the bottle body 11 .

[0098] Specifically, in this embodiment, a flange 13 is provided on the outer side of the top of the bottle body, and the cover plate 12 is fixedly and sealedly mounted on the flange 13 by bolts, thereby forming a sealed cavity. The flange-mounted mounting of the bottle body 11 and the cover plate 12 is merely an example of the present invention. In other embodiments, other mounting methods may be used, which will not be described in detail here.

[0099] The tray 20 is located in the above-mentioned closed cavity, and an air outlet 121 is provided on the cover 12, which is connected to the above-mentioned closed cavity. When the solid source vaporization device is in working state, the closed cavity is in a vacuum state, and the solid source vapor after the solid source is vaporized in the closed cavity can be transported to the outside through the air outlet 121 on the cover.

[0100] The tray in the present invention is used to hold solid-state sources. The tray can be a single layer or multiple layers stacked together. This embodiment is described using a multi-layer tray as an example.

[0101] Specifically, referring to Figures 3 and 4 in combination with Figures 6 and 7, the bottle body includes a first tray 21 located at the bottom of the bottle body and multiple second trays 22 stacked on the first tray. The first tray 21 includes a bottom wall 211 and a side wall 212 arranged around the outer periphery of the bottom wall. In addition to the bottom wall 221 and the side wall 222, the second tray 22 is also provided with an air duct 223 that passes through the bottom wall of the tray. The air duct 223 is provided above the bottom wall 221, and the height of the air duct 223 is lower than the height of the side wall 222, thereby ensuring that the solid source vapor is transported upward from the air duct.

[0102] As shown in Figures 5 and 8 , the inner wall of the bottle body 11 in this embodiment includes a first inner wall 111 and a second inner wall 112 disposed oppositely, and a third inner wall 113 and a fourth inner wall 114 connected between the first and second inner walls and disposed oppositely. Taking the second tray as an example, the second tray 22 includes a first side wall 2221 and a second side wall 2222 disposed oppositely, and a third side wall 2223 and a fourth side wall 2224 connected between the first and second side walls and disposed oppositely. The side walls of the first tray are identical to those of the second tray and will not be further described here.

[0103] In this embodiment, the cross-section of the side wall of the tray is roughly rectangular, and the cross-section of the inner wall of the bottle body (i.e., the sealed cavity) is rectangular. In order to facilitate the installation of the tray, the size of the tray will be slightly smaller than the size of the sealed cavity in the bottle body. In this way, when the tray is installed, there will be a problem that the side wall of the tray does not abut against the inner wall of the bottle body, resulting in extremely low heat conduction efficiency between the bottle body and the tray in a vacuum environment.

[0104] In order to solve the problem of heat conduction efficiency, in this embodiment, a first receiving groove 224 is provided on the first side wall 2221, which is recessed toward the center of the tray. The first receiving groove 224 is formed by the receiving groove bottom wall 2241 and the receiving groove side wall 2242, and the receiving groove bottom wall 2241 and the receiving groove side wall 2242 are both part of the first side wall 2221, and their cross-sectional shape is roughly rectangular. In other embodiments, the cross-sectional shape of the first receiving groove 224 can be other shapes, such as square, trapezoidal, arc-shaped, etc.

[0105] As shown in Figure 9, a position adjustment structure 30 is provided between the bottom wall 2241 of the receiving groove and the first inner wall 111 of the bottle body in this embodiment. The position adjustment structure 30 is used to apply pressure toward the center of the second tray 22 on the first receiving groove 224 so that the second side wall 2222 on the second tray 22 abuts against the second inner wall 112 of the bottle body.

[0106] As shown in Figure 12, the position adjustment structure 30 in this embodiment includes a first baffle 31 abutting the bottom wall of the first receiving groove 224, a second baffle 32 abutting the inner wall of the bottle body, and a plurality of adjustment members 33 installed between the first baffle 31 and the second baffle 32. The adjustment members 33 are used to adjust the distance between the first baffle 31 and the second baffle 32.

[0107] Specifically, the lower ends of the first baffle 31 and the second baffle 32 abut against the bottom wall of the bottle body, and the upper ends abut against the lower surface of the cover plate 12. The width of the first baffle 31 and the second baffle 32 is equal to the width of the first receiving groove 224. When there is only one adjusting member 33, the adjusting member 33 is located between the first baffle 31 and the second baffle 32. When there are multiple adjusting members 33, the multiple adjusting members 33 are evenly distributed along the height direction between the first baffle 31 and the second baffle 32.

[0108] Exemplarily, the adjusting member 33 in this embodiment is explained by taking a spring as an example, as shown in Figures 9 to 11. Under normal conditions, the length of the spring is greater than the depth of the first receiving groove 224. When the spring is assembled between the first baffle 31 and the second baffle 32 and installed between the bottom wall 2241 of the receiving groove and the first inner wall 111 of the bottle body, the spring is in a compressed state, thereby applying pressure to the first receiving groove 224 toward the center of the second tray 22 (that is, the second inner wall of the bottle body), so that the second side wall 2222 of the second tray abuts against the second inner wall 112 of the bottle body.

[0109] At this time, there are gaps between the first side wall 2221 of the second tray and the first inner wall 111 of the bottle body, between the third side wall 2223 and the third inner wall 113 of the bottle body, and between the fourth side wall 2224 and the fourth inner wall 114 of the bottle body. Refer to the shaded area in Figure 9. Heat conduction between the bottle body and the second tray is mainly carried out through the second side wall 2222 and the second inner wall 112.

[0110] Similarly, the structure of the first tray 21 is basically the same as that of the second tray 22, and its side wall is also provided with a first receiving groove 224 recessed toward the center of the tray. The only difference is that there is no air duct passing through the bottom wall of the tray on the bottom wall of the first tray. The structure of the first tray will not be described in detail here.

[0111] Since the solid source gasification device is in a vacuum state in its internal closed cavity when in operation, in order to improve the heat conduction efficiency between the tray and the bottle body, the materials of the tray and the bottle body are selected from metals or metal alloys with high thermal conductivity. For example, in this embodiment, the materials of the tray and the bottle body are both steel (iron-carbon alloy).

[0112] Furthermore, in this embodiment, the position adjustment structure 30 (i.e., the first baffle, the second baffle, and the adjustment member) is also made of a metal or metal alloy with a high thermal conductivity. This material can be the same as or different from that of the bottle and the tray. The position adjustment structure can transfer heat from the first inner wall 111 of the bottle to the first side wall 2221 of the tray, further improving the heat transfer efficiency between the bottle and the tray.

[0113] Example 2:

[0114] The solid source vaporization device in this embodiment is substantially the same as that in Example 1, except that, while Example 1 illustrates a single first receiving groove provided on the first side wall of the tray, this embodiment provides two first receiving grooves 224 along the first side wall of the tray, as shown in Figures 13 and 14 . Each first receiving groove 224 abuts against the first inner wall 111 of the bottle body via a position adjustment structure 30. This ensures uniform force on the tray and further improves the heat transfer efficiency between the bottle body and the tray.

[0115] Example 3:

[0116] 15 and 16 are schematic structural diagrams of the solid source gasification device in this embodiment, which include a bottle body 11, a cover plate 12 encapsulated on the outer flange 13 of the bottle body 11, and a plurality of trays 20 located in the bottle body 11. In addition, a position adjustment structure 30 is provided, wherein the bottle body 11 and the position adjustment structure 30 are exactly the same as those in Example 1, and the tray 20 is exactly the same as the second tray 22 in Example 1, and will not be repeated here.

[0117] In this embodiment, a support member 40 is provided at the bottom of the bottle body 11, and the trays 20 are sequentially stacked on 40. Specifically, as shown in FIG17 , the structure of the support member 40 is similar to the sidewall structure of the tray 20, and it also has an inwardly recessed receiving groove 41. The sidewall of the receiving groove 41 is provided with a first opening 411, and the carrier gas channel communicates with the bottom of the bottle body (i.e., the interior space of the support member) through the first opening 411.

[0118] In addition, different from Example 1, the cover plate 12 in this embodiment is further provided with a carrier gas inlet 121 connected to the carrier gas channel. The carrier gas inlet 121 can be connected to an external carrier gas pipe, and the carrier gas pipe can be extended into the carrier gas channel to realize the transportation of the carrier gas.

[0119] In this arrangement, the support member 40, the bottom wall of the bottle body 11 and the bottom wall of the lowest tray 20 are arranged to form a cavity, which is connected to the carrier gas channel. The carrier gas enters from the carrier gas inlet 122, enters the carrier gas channel and then flows into the cavity at the bottom, and is then transported upward from the cavity through the air duct on the tray, and finally discharged from the gas outlet 121.

[0120] It should be understood that this embodiment is described by taking a specific support member structure as an example, and in other embodiments, the support member may adopt other structures.

[0121] For example, in other embodiments, the support member can be set as a rectangular support member that fits the inner wall of the bottle body 11. In this way, there is no need to set a corresponding opening on the support member, and the position adjustment structure 30 extends into the interior of the support member and is directly connected to the cavity at the bottom.

[0122] In this case, the bottom of the first baffle 31 abuts against the bottom wall of the bottle body, and the bottom of the second baffle 32 abuts against the support member. At this time, the height of the first baffle 31 is the sum of the height of the second baffle 32 and the height of the support member 40.

[0123] Example 4:

[0124] 18 and 19 are schematic diagrams of the structure of the solid source gasification device in this embodiment, which includes a bottle body 11, a cover plate 12, a tray 20, a position adjustment structure 30 and a support member 40. Its structure is roughly the same as that of Example 3, except that the structure of the position adjustment structure 30 and the support member 40.

[0125] Specifically, as shown in Figure 20, the structure of the support member 40 is similar to the side wall structure of the tray 20, and it is also provided with an inwardly recessed receiving groove 41, and a second opening 421 is provided on the bottom wall of the receiving groove 41. As shown in Figure 21, a third opening 311 is provided below the first baffle 31 in the corresponding position adjustment structure 30, and the second opening 421 is arranged opposite to the third opening 311. The carrier gas channel is connected to the bottom of the bottle body (that is, the internal space of the support member) through the second opening 421 and the third opening 311.

[0126] Example 5:

[0127] 22 and 23 are schematic diagrams of the structure of the solid source gasification device in this embodiment, which includes a bottle body 11, a cover plate 12, a tray 20, a position adjustment structure 30 and a support member 40. Its structure is roughly the same as that of Example 3, except that the structure of the tray 20, the position adjustment structure 30 and the support member 40.

[0128] Specifically, as shown in Figure 24, in this embodiment, a first receiving groove 224 is provided on the first side wall 2221, which is recessed toward the center of the tray. In addition, a second receiving groove 225 is also provided on the third side wall 2223, which is recessed toward the center of the tray. The cross-sectional shape of the first receiving groove 224 and the second receiving groove 225 is a rectangle. In other embodiments, the cross-sectional shape of the first receiving groove 224 can be other shapes, such as a square, a trapezoid, an arc, etc.

[0129] As shown in Figure 25 , the structure of the support member 40 in this embodiment is substantially the same as the sidewall structure of the tray 20, and is also provided with two inwardly recessed receiving grooves 41 and 42. Furthermore, a first opening 411 is also provided on the sidewall of the receiving groove 41, through which the carrier gas channel communicates with the bottom of the bottle body (i.e., the interior space of the support member).

[0130] As shown in Figure 26, in this embodiment, a position adjustment structure 30 is correspondingly installed in the first receiving groove 224 and the receiving groove 41, and a position adjustment structure 30' is correspondingly installed in the second receiving groove 225 and the receiving groove 42. The second side wall 2222 of the tray can be abutted against the second inner wall 112 of the bottle body through the position adjustment structure 30, and the fourth side wall 2224 of the tray can be abutted against the fourth inner wall 114 of the bottle body through the position adjustment structure 30'. Referring to the shaded part in Figure 26, there is a gap between the first side wall 2221 of the tray and the first inner wall 111 of the bottle body, and between the third side wall 2223 of the tray and the third inner wall 113 of the bottle body.

[0131] Based on the above structural design, heat can be conducted to the inner wall of the bottle body through the second side wall 2222 and the fourth side wall 2224 of the tray. Compared with the heat conduction through one side wall of the tray in Example 3, heat can be conducted to the bottle body through both side walls of the tray in this embodiment, which can greatly improve the heat conduction efficiency between the bottle body and the tray.

[0132] Example 6:

[0133] 27 to 29 show schematic structural diagrams of the solid source vaporization device of this embodiment, which includes a bottle body 11, a cover plate 12 encapsulated on an outer flange 13 of the bottle body 11, and a plurality of tray assemblies 20 located within the bottle body 11. The structure of the bottle body 11 and cover plate 12 in this embodiment is identical to that of Example 1 and will not be further described here.

[0134] As shown in Figure 30, the tray assembly 20 in this embodiment includes a first tray assembly located at the bottom of the bottle body and multiple second tray assemblies stacked on the first tray assembly. The first tray assembly includes symmetrically distributed first sub-trays 21-1 and 21-2, and the second tray assembly includes symmetrically distributed second sub-trays 22-1 and 22-2.

[0135] Taking the second tray assembly as an example, the second sub-tray 22-1 is provided with a first receiving groove 224-1 that is recessed toward the second inner wall 112 of the bottle body, and the second sub-tray 22-1 is provided with a first receiving groove 224-2 that is recessed toward the first inner wall 111 of the bottle body. The first receiving grooves 224-1 and 224-2 have the same shape and are symmetrically distributed. When the second sub-trays 22-1 and 22-2 are placed in the bottle body, the first receiving grooves 224-1 and 224-2 are arranged to form an area with a roughly rectangular cross-section.

[0136] 31 and 32 , the position adjustment structure 30 in this embodiment also includes a first baffle 31 , a second baffle 32 and a plurality of adjustment members 33 . The first baffle 31 and the second baffle 32 abut against the bottom walls of the first receiving grooves 224 - 1 and 224 - 2 , respectively.

[0137] Exemplarily, the adjusting member 33 in this embodiment is explained by taking a spring as an example. Under normal conditions, the length of the spring is greater than the sum of the depths of the first receiving grooves 224-1 and 224-2. When the spring is assembled between the first baffle 31 and the second baffle 32 and installed between the two first receiving grooves 224-1 and 224-2, the spring is in a compressed state, thereby applying pressure toward the second inner wall 112 of the bottle body to the first receiving groove 224-1, so that the second side wall of the second sub-tray 22-1 abuts against the second inner wall 112 of the bottle body, and at the same time, applying pressure toward the first inner wall 111 of the bottle body to the first receiving groove 224-2, so that the first side wall of the second sub-tray 22-2 abuts against the first inner wall 111 of the bottle body.

[0138] At this time, there is a gap between the third side wall of the second sub-tray 22-1 and 22-2 and the third inner wall of the bottle body, and between the fourth side wall and the fourth inner wall of the bottle body. Refer to the shaded part in Figure 31. The bottle body and the second tray assembly are mainly heat-conducted through the second side wall and second inner wall 112 of the first sub-tray 22-1 and the second side wall and second inner wall 112 of the second sub-tray 22-2.

[0139] Similarly, the structure of the first tray assembly 21 is basically the same as that of the second tray assembly 22, and its side wall is also provided with a first receiving groove recessed into the inner wall of the bottle body. The only difference is that there is no air guide tube passing through the bottom wall of each sub-tray in the first tray assembly. The structure of the first tray assembly will not be further described here.

[0140] Example 7:

[0141] 33 and 34 are schematic structural diagrams of the solid source gasification device in this embodiment, which includes a bottle body 11, a cover plate 12 encapsulated on the outer flange 13 of the bottle body 11, and several tray assemblies located inside the bottle body 11.

[0142] As shown in Figures 35 and 36, what is different from Example 6 is that in this embodiment, a support assembly is provided in the bottle body, and the support assembly includes a symmetrically distributed first support member 40-1 and a second support member 40-2. The structure of the tray assembly is exactly the same as the second tray assembly in Example 6, including a symmetrically distributed second sub-tray 22-1 and a second sub-tray 22-2. The second sub-tray 22-1 is stacked on the first support member 40-1 in sequence, and the second sub-tray 22-2 is stacked on the second support member 40-2 in sequence.

[0143] The structures of the first support member 40 - 1 and the second support member 40 - 2 in this embodiment are similar to the structure of the support member 40 in embodiment 3, and are respectively provided with an inwardly recessed receiving groove, and first openings 411 - 1 and 411 - 2 are provided on the side walls of the receiving groove.

[0144] In addition, the cover plate 12 in this embodiment is further provided with a carrier gas inlet 121 connected to the carrier gas channel. The carrier gas inlet 121 can be externally connected to a carrier gas pipe, and the carrier gas pipe can be extended into the carrier gas channel to realize the transportation of the carrier gas.

[0145] In this arrangement, the support assembly, the bottom wall of the bottle body and the bottom wall of the lowest tray form a cavity, which is connected to the carrier gas channel. The carrier gas enters from the carrier gas inlet 122, enters the carrier gas channel and then flows into the cavity at the bottom, and is then transported upward from the cavity through the air duct on the tray, and finally discharged from the gas outlet 121.

[0146] It should be understood that in this embodiment, the connection between the carrier gas channel and the bottom of the bottle body (i.e., the internal space of the support member) is not limited to the first opening on the side wall of the receiving groove. The solution in Example 4 can also be adopted, and openings can be respectively provided on the bottom wall of the receiving groove and the corresponding baffle, which can also achieve the purpose of connecting the carrier gas channel with the bottom of the bottle body. It will not be elaborated here.

[0147] Example 8:

[0148] 37 to 39 are schematic structural diagrams of the solid source gasification device in this embodiment. The solid source gasification device in this embodiment is substantially the same as that in Example 7, except for the specific structure of the adjustment member 33 in the position adjustment structure 30.

[0149] As shown in Figure 40, the position adjustment structure 30 in this embodiment also includes a first baffle 31, a second baffle 32 and an adjustment member 33. The difference from the above embodiment is that the adjustment member 33 in the above embodiment is a spring, while the adjustment member 33 in this embodiment is a screw adjustment member.

[0150] Specifically, the screw adjustment member includes two screws with opposite thread directions, which are fixed in the middle by a nut. By rotating the nut, the two screws can be moved in opposite directions, thereby adjusting the distance between the first baffle 31 and the second baffle 32.

[0151] Example 9:

[0152] As shown in Figure 41, the solid source vaporization device in this embodiment is substantially the same as that in Example 1, differing in the shape of the tray. The tray in this embodiment has a rectangular cross-section, with a length shorter than the interior length of the bottle and a width comparable to the interior width of the bottle.

[0153] Taking the second tray 22 as an example, its side wall is not provided with a receiving groove structure, a planar side wall of the tray is opposite to and spaced apart from a planar inner wall of the bottle body, and the position adjustment structure 30 is directly abutted between the planar side wall of the second tray 22 and the planar inner wall of the bottle body 11, which can also achieve the effect of Example 1.

[0154] For other structures in this embodiment, please refer to Example 1 and will not be described again here.

[0155] In other embodiments, the side wall of the tray and the inner wall of the bottle body used to abut the position adjustment structure 30 may also be a curved surface, an arc surface or other structures, and are not limited to the flat surface in this embodiment.

[0156] Example 10:

[0157] As shown in Figure 42, the solid source vaporization device in this embodiment is substantially the same as that in Example 6, differing in the shape of the tray assembly. The tray in this embodiment has a rectangular cross-section, with a length less than half the length of the bottle interior and a width comparable to the width of the bottle interior.

[0158] Taking the second tray assembly as an example, the cross-sections of the second sub-trays 22-1 and 22-2 are both rectangular structures, and their side walls are not provided with the first receiving grooves 224-1 and 224-2 in Example 6. The second sub-trays 22-1 and 22-2 are provided with two planar side walls that are opposite and spaced apart. The position adjustment structure 30 is directly in contact between the two planar side walls of the second sub-trays 22-1 and 22-2, and can also achieve the effect in Example 6.

[0159] For other structures in this embodiment, please refer to Example 6 and will not be described again here.

[0160] In other embodiments, the two oppositely disposed side walls of the second sub-trays 22 - 1 and 22 - 2 are not limited to flat surfaces, and may be curved surfaces, arc surfaces, and the like, which will not be described one by one with examples here.

[0161] Example 11:

[0162] As shown in FIG. 43 , the solid source gasification device in this embodiment is substantially the same as that in embodiment 6, with the difference being the shape of the tray assembly and the arrangement of the position adjustment structure.

[0163] Specifically, taking the second tray assembly as an example, each second tray assembly includes second sub-trays 22-1, 22-2, 22-3 and 22-4, and the two side walls of each second sub-tray are arranged opposite to the two adjacent side walls of the bottle body, and each sub-tray is provided with a sub-receiving groove recessed toward the inner wall (corner) of the bottle body, and the four sub-receiving grooves are adjacent and form a receiving groove with a rectangular cross-section.

[0164] As shown in Figures 44 and 45, a position adjustment structure 30-2 is provided between the second sub-trays 22-1, 22-2 and the second sub-trays 22-3, 22-4, and a position adjustment structure 30-1 is provided between the second sub-trays 22-1, 22-4 and the second sub-trays 22-2, 22-3. The position adjustment structures 30-1 and 30-2 are staggered in the vertical direction.

[0165] As in this embodiment, the position adjustment structure 30-1 includes a first baffle 31-1 abutting against the second sub-tray 22-1 and 22-2, a second baffle 32-1 abutting against the second sub-tray 22-3 and 22-4, and an adjustment member 33-1 located between the first baffle 31-1 and the second baffle 32-1; the position adjustment structure 30-2 includes a first baffle 31-2 abutting against the second sub-tray 22-1 and 22-4, a second baffle 32-2 abutting against the second sub-tray 22-2 and 22-3, and an adjustment member 33-2 located between the second baffle 32-2 and the second sub-tray 22-3.

[0166] For example, the adjusting member in this embodiment is the same as that in embodiment 8, which is a screw adjusting member. In other embodiments, a spring may also be used.

[0167] Similarly, the structure of the bottom first tray assembly is similar to that of the second tray assembly, the only difference being that no air duct is provided on each sub-tray in the first tray assembly. The structure of the first tray assembly will not be described in detail here.

[0168] In this embodiment, each tray assembly is illustrated using 4 separate sub-trays as an example. In other embodiments, 6, 8 or more (even number) sub-trays can be set, and correspondingly more groups of position adjustment structures can be set to achieve distance adjustment between every two corresponding sub-trays or multiple corresponding sub-trays.

[0169] In addition, the solid source gasification device in this embodiment is an example without carrier gas. The above-mentioned tray structure is also applicable to the structure with carrier gas. Correspondingly, it is only necessary to provide a carrier gas inlet connected to the carrier gas channel on the cover plate 12. The carrier gas inlet can be connected to an external carrier gas pipe, and the carrier gas pipe can be extended to the inside of the carrier gas channel to realize the transportation of carrier gas.

[0170] At this time, the first tray assembly at the bottom of the bottle body is replaced by a support member 40. The support member 40 can be set as a rectangular support member that fits the inner wall of the bottle body 11. In this way, there is no need to set a corresponding opening on the support member. The position adjustment structure extends to the inside of the support member and is directly connected to the cavity at the bottom.

[0171] Of course, the support member may also adopt a structure such as the corresponding structure of the sub-tray side wall. In this case, a number of openings need to be provided on the tray side wall to achieve communication between the carrier gas channel and the bottom of the bottle body, thereby realizing the transportation of the carrier gas.

[0172] The structure of the support member can be designed with reference to the above embodiments, and will not be described in detail here.

[0173] Example 12:

[0174] As shown in Figure 46, the bottle body 11 in this embodiment has a hollow cylindrical structure, and the tray assembly of each layer is composed of a tray 21 and a tray 22, wherein the side walls of the tray 21 and the tray 22 include a curved side wall (non-semi-cylindrical surface) and a flat side wall.

[0175] Specifically, the curved sidewalls and the inner wall of the bottle have the same curvature, allowing them to completely abut the inner wall of the bottle. The shaded area in Figure 46 shows the gap between the tray and the bottle in a normal state. Due to the structural arrangement of the curved sidewalls and the arc-shaped inner wall of the bottle, the gap is largest on the left and right sides and smallest on the top and bottom sides. Furthermore, the flat sidewalls are provided with recessed receiving grooves, into which the position adjustment structure 30 is mounted.

[0176] In this way, when the position adjustment structure 30 is working, the tray 21 and the tray 22 can be squeezed to the left and right sides respectively, so that the two curved side walls of the tray 21 and the tray 22 are completely against the inner wall of the bottle body, thereby improving the heat conduction efficiency between the tray and the inner wall of the bottle body.

[0177] Example 13:

[0178] As shown in Figure 47 , the bottle body 11 in this embodiment is a hollow cylindrical structure. Each tray assembly comprises tray 21, tray 22, and tray 33. The sidewalls of each tray include a curved sidewall and two flat sidewalls. The curved sidewalls have the same curvature as the inner wall of the bottle, allowing them to fully abut against the inner wall. Similarly, the trays are provided with receiving grooves at locations away from the curved sidewalls, into which the position adjustment structures 30 are mounted.

[0179] The position adjustment structure 30 of this embodiment can simultaneously press the trays 21, 22, and 33 toward the inner wall of the bottle, thereby completely abutting the curved sidewalls of each tray against the inner wall of the bottle. The design of the position adjustment structure 30 can adopt a mechanical structure in the prior art and will not be described in detail here.

[0180] It should be understood that the cross-section of the bottle body in the above embodiments is described by taking a rectangle or a circle as an example, and the flat side wall or the curved side wall of the tray is abutted against the corresponding inner wall of the bottle body through the position adjustment structure. Other structures may also be used in other embodiments, such as regular polygons, etc. The abutting part between the side wall of the tray and the inner wall of the bottle body may not be limited to a plane or a curved surface, but may also be a combination of multiple planes or curved surfaces, or a curved surface of other structures. Various shapes of trays and bottles will not be given examples one by one here.

[0181] It can be seen from the above technical solutions that the present invention has the following beneficial effects:

[0182] The solid-source vaporization device of the present invention utilizes a position adjustment structure and a corresponding structural design on the tray to allow portions of the tray's sidewall to abut against the inner wall of the bottle, thereby improving the heat transfer efficiency between the tray and the bottle. Furthermore, when the solid-source vaporization device is heated by a heating device, heat can be efficiently transferred to the solid source on the tray, improving the output efficiency of the solid-source vapor.

[0183] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0184] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A solid source vaporization device, the solid source vaporization device comprising a bottle body, a cover plate encapsulated on the bottle body, and a plurality of trays located inside the bottle body, characterized in that, The tray includes a bottom wall and a side wall surrounding the outer periphery of the bottom wall. At least part of the side wall matches the shape of the inner wall of the bottle. A position adjusting structure is provided in the bottle and abuts between the side wall of the tray and the inner wall of the bottle. The position adjusting structure is used to apply a pressure towards the center of the tray to the side wall of the tray, so that a part of the side wall of the tray away from the position adjusting structure abuts against the inner wall of the bottle.

2. The solid source vaporization device according to claim 1, characterized in that, A receiving groove recessed towards the center of the tray is provided on the tray, and all or part of the position adjusting structure is located in the receiving groove.

3. The solid source vaporization device according to claim 1, characterized in that, A part of the side wall of the tray and a part of the inner wall of the bottle are opposite and spaced apart, and the position adjusting structure abuts between the part of the side wall of the tray and the part of the inner wall of the bottle.

4. The solid source vaporization device according to claim 1, characterized in that, The position adjusting structure includes a first baffle abutting against the side wall of the tray, a second baffle abutting against the inner wall of the bottle, and a plurality of adjusting members installed between the first baffle and the second baffle. The adjusting members are used to adjust the distance between the first baffle and the second baffle.

5. The solid source vaporization device according to claim 4, characterized in that, The first baffle and the second baffle are metal baffles, and the adjusting members are metal adjusting members.

6. The solid source vaporization device according to claim 5, characterized in that, The adjusting member is a spring and / or a screw adjusting member.

7. The solid source vaporization device according to claim 1, characterized in that, The side wall of the tray is a combination of a plurality of planes, a plurality of arc surfaces, or a combination of a plurality of planes and a plurality of arc surfaces. The inner wall of the bottle is a combination of a plurality of planes, a plurality of arc surfaces, or a combination of a plurality of planes and a plurality of arc surfaces that matches the shape of the side wall of the tray.

8. The solid source vaporization device according to claim 2, characterized in that, The inner wall of the bottle includes a first inner wall and a second inner wall arranged oppositely, and a third inner wall and a fourth inner wall arranged oppositely and connected between the first inner wall and the second inner wall. The tray includes a first side wall and a second side wall arranged oppositely, and a third side wall and a fourth side wall arranged oppositely and connected between the first side wall and the second side wall.

9. The solid source vaporization device according to claim 8, characterized in that, A plurality of first receiving grooves are provided on the first side wall. A first position adjusting structure that abuts against the first side wall and the first inner wall of the bottle is provided in the first receiving groove. The first position adjusting structure is used to apply a pressure towards the second side wall of the tray to the first receiving groove, so that the second side wall of the tray abuts against the second inner wall of the bottle.

10. The solid source vaporization device according to claim 9, characterized in that, A plurality of second receiving grooves are provided on the third side wall. A second position adjusting structure that abuts against the third side wall and the third inner wall of the bottle is provided in the second receiving groove. The second position adjusting structure is used to apply a pressure towards the third side wall of the tray to the second receiving groove, so that the third side wall of the tray abuts against the third inner wall of the bottle.

11. The solid source vaporization device according to claim 1, characterized in that, An air outlet is provided on the cover plate. The bottle body includes a first tray at the bottom of the bottle and at least one second tray stacked on the first tray. A gas guide pipe penetrating the bottom wall of the tray is provided on the second tray.

12. The solid source vaporization device according to claim 1, characterized in that, An air outlet and a carrier gas inlet are provided on the cover plate. A support member is provided at the bottom of the bottle body, and at least one tray is stacked on the support member. A gas guide pipe penetrating the bottom wall of the tray is provided on the tray. The receiving groove on the tray and the inner wall of the bottle form a carrier gas channel communicating with the bottom of the bottle, and the carrier gas channel is communicated with the carrier gas inlet on the cover plate.

13. The solid source vaporization device according to claim 12, characterized in that, The position adjusting structure is installed on the support member and / or the bottom wall of the bottle.

14. A solid source vaporization device, the solid source vaporization device comprising a bottle body, a cover plate encapsulated on the bottle body, and a plurality of tray assemblies located inside the bottle body, characterized in that, The tray assembly includes a plurality of sub-trays that are separately arranged. Each sub-tray includes a bottom wall and a side wall surrounding the outer periphery of the bottom wall. Part of the side wall matches the shape of the inner wall of the bottle. A position adjustment structure is provided in the bottle and abuts between the side walls of the plurality of sub-trays. The position adjustment structure is used to apply a pressure towards the inner wall of the bottle to the sub-tray, so that part of the side wall of the sub-tray away from the position adjustment structure abuts against the inner wall of the bottle.

15. The solid source vaporization device according to claim 14, characterized in that, A sub-receiving groove recessed towards the inner wall of the bottle is provided on the sub-tray, and all or part of the position adjustment mechanism is located in the sub-receiving groove.

16. The solid source vaporization device according to claim 15, characterized in that, The tray assembly includes a first sub-tray and a second sub-tray that are separately arranged. A first sub-receiving groove and a second receiving groove recessed towards the inner wall of the bottle are respectively provided on the first sub-tray and the second sub-tray. A position adjustment structure is provided between the first sub-receiving groove and the second receiving groove.

17. The solid source vaporization device according to claim 14, characterized in that, The tray assembly includes a first sub-tray and a second sub-tray that are separately arranged. The first sub-tray and the second sub-tray respectively include two side walls that are opposite and spaced apart. The position adjustment structure abuts between the two side walls.

18. The solid source vaporization device according to claim 16 or 17, characterized in that, The position adjustment structure includes a first baffle that abuts against the side wall of the first sub-tray, a second baffle that abuts against the side wall of the second sub-tray, and a plurality of adjusting members installed between the first baffle and the second baffle. The adjusting members are used to adjust the distance between the first baffle and the second baffle.

19. The solid source gasification device according to claim 18, wherein The first baffle and the second baffle are metal baffles, and the adjusting members are metal adjusting members.

20. The solid source gasification device according to claim 19, wherein The adjusting member is a spring and / or a screw adjusting member.

21. The solid source gasification device according to claim 14, wherein The tray assembly includes at least four sub-trays that are separately arranged. A sub-receiving groove recessed towards the inner wall of the bottle is provided on each sub-tray. All the sub-receiving grooves are adjacent and form a receiving groove. The receiving groove has multiple pairs of opposite receiving groove surfaces, and a position adjustment structure is provided between each pair of receiving groove surfaces.

22. The solid source gasification device according to claim 14, wherein The side wall of the tray assembly is a combination of a plurality of planes, a plurality of arc surfaces, or a combination of a plurality of planes and a plurality of arc surfaces. The inner wall of the bottle is a combination of a plurality of planes, a plurality of arc surfaces, or a combination of a plurality of planes and a plurality of arc surfaces that matches the shape of the side wall of the tray.

23. The solid source gasification device according to claim 14, wherein An air outlet is provided on the cover plate. The bottle body includes a first tray assembly at the bottom of the bottle body and at least one second tray assembly stacked on the first tray assembly. A gas guide tube penetrating through the bottom wall of the sub-tray is provided on the sub-tray in the second tray assembly.

24. The solid source gasification device according to claim 14, wherein An air outlet and a carrier gas inlet are provided on the cover plate. A support member is provided at the bottom of the bottle body, and at least one tray assembly is stacked on the support member. A gas guide tube penetrating through the bottom wall of the sub-tray is provided on the sub-tray in the tray assembly. The sub-receiving grooves on the plurality of sub-trays form a carrier gas channel communicating with the bottom of the bottle body, and the carrier gas channel communicates with the carrier gas inlet on the cover plate.

25. The solid source gasification device according to claim 24, wherein The position adjustment structure is installed on the support member and / or the bottom wall of the bottle body.

26. A solid source gasification system, wherein The solid source vaporization system includes the solid source vaporization device according to any one of claims 1 to 25, and a heating device. The heating device is thermally installed on the side surface and / or the bottom surface of the bottle body in the solid source vaporization device.

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