Cutter assembly and breaking machine

Abstract

The present invention relates to a cutter assembly and a breaking machine. The cutter assembly comprises a cutter and a pressing module, and the cutter can move along a preset direction to apply a processing force to a surface to be processed of a part to be processed. The pressing module can reciprocate along a preset direction. The pressing module is provided with a pressing part, and along the preset direction, the pressing part contacts the surface to be processed before the cutter, so as to, by means of the pressing part, pre-press the surface to be processed before the cutter applies processing force to the surface to be processed. During operation, the pressing part of the pressing module compresses a wafer, and the cutter applies processing force to the wafer driven by a cutter driving mechanism. In this way, since the pressing part is compressing near a cutting line of the wafer, warping displacement of the wafer during processing can be avoided, and processing precision and yield can be improved.

Description

Cutter assemblies and splitters

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 18, 2023, with application number 202311754836.6 and invention name “Tool Assembly and Splitting Machine”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of semiconductor processing technology, and in particular to a tool assembly and a splitting machine. Background Art

[0003] In the manufacturing process of semiconductor components, after the patterns and electrodes are formed on the wafer through the front-end process, the laser scribing is performed in the back-end process, and then the chip is separated from the entire wafer by mechanical tool splitting. If the wafer warps and shifts during the splitting process, it will affect the processing accuracy and thus reduce the yield rate. Summary of the Invention

[0004] The first purpose of the present application is to provide a tool assembly to prevent the wafer from warping during the splitting process, thereby improving processing accuracy and yield.

[0005] A second object of the present application is to provide a splitting machine comprising the above-mentioned tool assembly.

[0006] To achieve the above objectives, this application provides the following technical solutions:

[0007] In a first aspect, the present application provides a tool assembly for a processing device, the tool assembly comprising:

[0008] A tool capable of moving along a preset direction to apply a machining force to a machining surface of a workpiece;

[0009] A clamping module, which can move back and forth along the preset direction. The clamping module has a clamping part. Along the preset direction, the clamping part contacts the surface to be processed before the tool, so as to pre-clamp the surface to be processed through the clamping part before the tool applies processing force to the surface to be processed.

[0010] In one possible implementation, the compression module includes:

[0011] base;

[0012] A connecting piece, wherein a pressure strip serving as the pressing portion is provided on a surface of the connecting piece facing the workpiece to be processed;

[0013] An elastic mechanism, one end of the elastic mechanism is connected to the base, and the other end of the elastic mechanism is connected to the connecting member.

[0014] In a possible implementation, the connecting member is provided with the pressure strips on both sides of the preset direction, and a gap is formed between the two pressure strips for the tool to pass through to apply the processing force.

[0015] In a possible implementation, the elastic mechanism includes:

[0016] a guide post, the guide post being disposed on one of the base and the connecting member;

[0017] a guide sleeve, the guide sleeve being sleeved on the guide post and being able to slide relative to the guide post along a preset direction, wherein an end of the guide sleeve away from the guide post is connected to the other of the base and the connector;

[0018] A first resetting member is provided between the guide post and the guide sleeve and is pressed into the guide sleeve by the guide post.

[0019] In one possible implementation, the elastic mechanism also includes a limiting member for limiting the end of the guide column away from the guide sleeve, and the guide column is set on one of the base and the connecting member through the limiting member, and the limiting member is set on one of the base and the connecting member.

[0020] In a possible implementation, the pressing module further includes a lighting mechanism having a lighting bracket and a light source.

[0021] In one possible implementation, the tool assembly further includes a hammer for driving the tool, wherein the hammer is disposed on a side of the tool away from the workpiece to be processed, and the hammer is used to strike the back of the tool to drive the tool to move along a preset direction.

[0022] In one possible implementation, the hammer is an electromagnetic hammer, and the tool assembly includes a plurality of electromagnetic hammers spaced apart along the extension direction of the blade of the tool. Each electromagnetic hammer is connected to a power supply and a controller via an electric control switch, and the controller is used to control the actions of the electromagnetic hammers of corresponding numbers and positions according to preset instructions.

[0023] In a possible implementation, the electromagnetic hammer includes:

[0024] An electromagnetic striking rod, the electromagnetic striking rod is used to strike the back of the knife, and the electromagnetic striking rod is made of ferromagnetic material;

[0025] An electromagnetic coil sleeve, the electromagnetic coil sleeve being sleeved outside the electromagnetic striking rod, a driving coil being arranged inside the electromagnetic coil sleeve, and the driving coil being energized to drive the electromagnetic striking rod to strike the tool;

[0026] A second reset member is provided between the electromagnetic striking rod and the electromagnetic coil sleeve.

[0027] In a possible implementation, the tool assembly further includes a limit block, which is disposed on a side of the electromagnetic hammer away from the tool, and a buffer is disposed between the limit block and the electromagnetic hammer rod.

[0028] In a possible implementation, the tool assembly further includes:

[0029] A fixed plate, the pressing module and the cutter are respectively arranged on the fixed plate;

[0030] A sliding guide mechanism, the sliding guide mechanism comprising a sliding member provided on the fixed plate and a sliding matching member provided on the tool, the sliding member and the sliding matching member being in sliding cooperation;

[0031] The third resetting member is arranged between the tool and the fixed plate, or the third resetting member is arranged between the sliding fitting member and the sliding member, or the third resetting member is arranged between the tool and the sliding member, or the third resetting member is arranged between the sliding fitting member and the fixed plate.

[0032] A second aspect of the present application provides a splitting machine, comprising a tool assembly as described above.

[0033] It can be seen from the above technical solution that the present application discloses a tool assembly, which includes a tool and a clamping module, wherein the tool can move along a preset direction to apply a processing force to the processing surface of the workpiece to be processed; the clamping module can move back and forth along a preset direction, and the clamping module has a clamping part. Along the preset direction, the clamping part contacts the processing surface before the tool, so that the processing surface is pre-clamped by the clamping part before the tool applies the processing force to the processing surface, thereby avoiding warping and displacement of the workpiece to be processed when being chopped.

[0034] During application, after laser scribing is completed, horizontal and vertical cutting lines are drawn on the surface of the wafer, and then the wafer is attached to a sticky white film or blue film, and the wafer is placed on a splitting machine. The tool assembly moves until the tool is aligned with the cutting line on the wafer, and then moves toward the wafer until the clamping part of the clamping module is pressed against the wafer. The tool falls under the drive of external force to apply processing force to the wafer. In this way, since the wafer is pressed by the clamping part near the cutting line, warping and displacement of the wafer during processing can be avoided, thereby improving processing accuracy and yield.

[0035] The present application also provides a splitting machine, which includes the tool assembly as described above. Since the splitting machine adopts the tool assembly in the above embodiment, the splitting machine should have the same beneficial effects as the above tool assembly, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0037] FIG1 is a schematic structural diagram of a tool assembly provided in an embodiment of the present application;

[0038] FIG2 is a front view of a tool assembly provided in an embodiment of the present application;

[0039] FIG3 is a side view of a tool assembly provided in an embodiment of the present application;

[0040] FIG4 is a schematic structural diagram of a tool of a tool assembly provided in an embodiment of the present application;

[0041] FIG5 is a schematic structural diagram of a clamping module of a tool assembly provided in an embodiment of the present application;

[0042] FIG6 is a cross-sectional view of an elastic mechanism provided in an embodiment of the present application;

[0043] FIG7 is a schematic structural diagram of a component base of a tool assembly provided in an embodiment of the present application.

[0044] In the figure: 1 is a tool; 101 is a tool body; 102 is a tool mounting plate; 2 is a clamping module; 201 is a base; 202 is a connecting part; 203 is a pressure strip; 204 is an elastic mechanism; 2041 is a guide column; 2042 is a guide sleeve; 2043 is a first reset part; 2044 is a limit part; 205 is a lighting bracket; 206 is a light source; 207 is a gap; 3 is a hammer; 301 is an electromagnetic coil sleeve; 302 is an electromagnetic rod; 4 is an assembly base; 401 is a fixing plate; 402 is an electromagnetic hammer fixing block; 403 is a limit block; 404 is a buffer; 405 is a mounting block; 406 is a third reset part. DETAILED DESCRIPTION

[0045] One aspect of the present application is to provide a tool assembly, the structural design of which can prevent the wafer from warping and displacement during the splitting process, thereby improving processing accuracy and yield.

[0046] Another aspect of the present application is to provide a splitting machine comprising the above-mentioned tool assembly.

[0047] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0048] Please refer to Figures 1 to 5, Figure 1 is a structural schematic diagram of the tool assembly provided in an embodiment of the present application, Figure 2 is a front view of the tool assembly provided in an embodiment of the present application, Figure 3 is a side view of the tool assembly provided in an embodiment of the present application, Figure 4 is a structural schematic diagram of the tool of the tool assembly provided in an embodiment of the present application, and Figure 5 is a structural schematic diagram of the clamping module of the tool assembly provided in an embodiment of the present application.

[0049] A tool assembly is disclosed in an embodiment of the present application. The tool assembly includes a tool 1 and a pressing module 2 .

[0050] The tool 1 is capable of moving in a preset direction to apply a machining force to the machining surface of the workpiece. In one embodiment, the tool assembly includes a tool drive mechanism, and the tool 1 is capable of moving in a preset direction under the drive of the tool drive mechanism. In the embodiment of the present application, in order to facilitate the installation and arrangement of the tool assembly, the tool assembly also includes an assembly base 4. The tool 1, the clamping module 2, and the tool drive mechanism are all arranged on the assembly base 4. Of course, the assembly base 4 is not necessary for the tool assembly. In other embodiments, the tool 1, the clamping module 2, and the tool drive mechanism can also be arranged separately, as long as the tool 1, the clamping module 2, and the tool drive mechanism can achieve their corresponding functions.

[0051] The clamping module 2 can move back and forth along a preset direction. The clamping module has a clamping part. Along the preset direction, the clamping part contacts the surface to be processed before the tool, so as to pre-press the surface to be processed through the clamping part before the tool applies processing force to the surface to be processed. The setting of the clamping part should ensure that the surface of the wafer will not be damaged during clamping. The above-mentioned preset direction refers to the movement direction of the tool 1 approaching or away from the workpiece to be processed. Of course, in the actual processing process, in addition to moving in the preset direction, the tool 1 also needs to move radially along the wafer or rotate around the center of the wafer, that is, according to the splitting order, move from the previous cutting line to the next cutting line. When the clamping module 2 is only provided with a clamping part on one side of the splitting path of the tool 1, the clamping part is preferably located on the side of the tool 1 away from the previous cutting line in the splitting order direction.

[0052] The clamping module 2 can move back and forth along a preset direction to pre-press the surface to be processed of the workpiece to be processed through the clamping part before the tool 1 chops the surface to be processed of the workpiece to be processed, so as to avoid warping and displacement of the workpiece to be processed during processing. When the clamping module 2 presses the surface to be processed of the workpiece to be processed, the clamping module 2 remains stationary relative to the surface to be processed of the workpiece to be processed, and the tool 1 moves toward the surface to be processed of the workpiece to be processed under the drive of the tool driving mechanism. At this time, the clamping module 2 needs to have relative movement with the tool 1 along the preset direction.

[0053] Compared with the prior art, the tool assembly provided in the embodiment of the present application, when used, after the laser scribing is completed, horizontal and vertical cutting lines are drawn on the surface of the wafer, and then the wafer is attached to a sticky white film or blue film, and the wafer is placed on a splitting machine. The tool assembly moves until the tool 1 is aligned with the cutting line on the wafer, and then moves toward the wafer until the clamping part of the clamping module 2 is clamped on the wafer. The tool 1 falls under the drive of the tool drive mechanism to apply processing force to the wafer. In this way, since the wafer is clamped by the clamping part near the cutting line, warping and displacement of the wafer during the splitting process can be avoided, thereby improving processing accuracy and yield.

[0054] In order to prevent the clamping module 2 from damaging the processing surface of the workpiece to be processed when clamping the splitting surface of the workpiece to be processed, the clamping part of the clamping module 2 can be made of flexible or soft elastic materials, such as rubber, silicone, etc., and / or, the clamping module can also use an elastic device to absorb the action force between the clamping module 2 and the processing surface of the workpiece to be processed, so as to avoid the action force between the clamping module 2 and the processing surface of the workpiece to be processed being too large and pressing the processing surface of the workpiece to be processed. In the embodiment of the present application, as shown in Figure 5, the above-mentioned clamping module 2 includes a base 201, a connecting member 202 and an elastic mechanism 204, wherein the base 201 is used to fix the clamping module 2, and a pressure strip 203 as a clamping part is provided on the surface of the workpiece to be processed facing the connecting member 202, one end of the elastic mechanism 204 is connected to the base 201, and the other end of the elastic mechanism 204 is connected to the connecting member 202. When the clamping module 2 presses the processing surface of the workpiece to be processed, the elastic mechanism 204 can shrink to play a certain buffering role.

[0055] Furthermore, in an embodiment of the present application, in a non-processing state, the above-mentioned connecting member 202 is located below the tool 1, and the connecting member 202 is provided with pressure strips 203 on both sides of a preset direction, and a gap 207 is formed between the two pressure strips 203 for the tool 1 to pass through to apply processing force, or the above-mentioned gap 207 can also be surrounded by two pressure strips 203, which is not limited here.

[0056] As shown in Figures 5 and 6, in the embodiment of the present application, the elastic mechanism 204 includes a guide column 2041, a guide sleeve 2042 and a first reset member 2043, wherein the guide column 2041 is provided on one of the base 201 and the connecting member 202, the guide sleeve 2042 is sleeved on the guide column 2041, and the guide sleeve 2042 and the guide column 2041 can slide relative to each other along a preset direction, and the end of the guide sleeve 2042 away from the guide column 2041 is connected to the other of the base 201 and the connecting member 202. In the illustrated embodiment, the end of the guide column 2041 away from the guide sleeve 2042 is connected to the base 201, one end of the guide sleeve 2042 away from the guide column 2041 is connected to the connecting member 202. Of course, in other embodiments, it can also be the other way around, the end of the guide column 2041 away from the guide sleeve 2042 is connected to the connecting member 202, and the end of the guide sleeve 2042 away from the guide column 2041 is connected to the base 201, and the first reset member 2043 is arranged between the guide column 2041 and the guide sleeve 2042 and is pressed into the guide sleeve 2042 through the guide column 2041. The first reset member 2043 can be a compression spring, a spring or other elastic structure. It should be noted that the elastic mechanism 204 is not limited to the above structure.

[0057] In order to adjust the distance between the pressure strip 203 and the fixed end of the pressing module 2, thereby adjusting the pressing force of the pressure strip 203 on the surface to be processed of the workpiece to be processed, in an embodiment of the present application, as shown in Figure 5, the elastic mechanism 204 also includes a limit member 2044, which is used to limit the end of the guide column 2041 away from the guide sleeve 2042. The guide column 2041 is set on one of the base 201 and the connecting member 202 through the limit member 2044. The limit member 2044 is set on one of the base 201 and the connecting member 202. Preferably, the limit member 2044 is adjustably set on one of the base 201 and the connecting member 202. When in use, the position of the elastic mechanism 204 can be adjusted by adjusting the position of the limit member 2044, thereby realizing the adjustment of the distance between the pressure strip 203 and the fixed end of the pressing module 2, and realizing the adjustment of the pressing force of the pressure strip 203 on the surface to be processed of the workpiece to be processed.

[0058] It can be understood that the splitting machine generally identifies the cutting seam through a visual acquisition and recognition system, that is, by acquiring an image of the wafer surface, identifying and selecting the cutting line that needs to be split, and then controlling the tool 1 to move toward the cutting line until the tool 1 is aligned with the cutting line. In this process, the visual acquisition and recognition system requires bright light in order to capture accurate and clear images. For this reason, in an embodiment of the present application, the clamping module 2 also includes a lighting mechanism, which is arranged on the base 201 to provide lighting for the surface to be processed of the workpiece to be processed. The lighting mechanism can use a point light source or a linear light source, as long as it can ensure that the surface to be processed of the workpiece to be processed below the tool 1 is illuminated.

[0059] Specifically, in an embodiment of the present application, the lighting mechanism includes a lighting bracket 205 and a light source 206, wherein the lighting bracket 205 is arranged on the base 201, and the light source 206 is adjustably arranged on the base 201 to facilitate adjusting the position of the light source 206 and accurately illuminate the target area.

[0060] Furthermore, in an embodiment of the present application, the lighting bracket 205 can be set on the base 201 so as to be reciprocally adjustable along a preset direction, and the light source 206 can be rotated and can be set on the base 201 so as to be close to or away from the pressure strip 203 in a direction perpendicular to the preset direction. In this way, the position of the light source 206 can be adjusted from three directions, making the position adjustment of the light source 206 more flexible.

[0061] As shown in Figures 1 to 3, the tool assembly further includes a hammer 3 for driving the tool 1. The hammer 3 is disposed on the side of the tool 1 away from the workpiece to be processed. The hammer 3 is used to strike the blade back of the tool 1 to drive the tool 1 to move in a predetermined direction. In one embodiment, the hammer 3 is an electromagnetic hammer. Thus, when energized, the hammer 3 strikes the blade back of the tool 1 to drive the tool 1 to move in a predetermined direction.

[0062] Furthermore, it can be understood that the specifications of wafers are different, the lengths of cutting lines are different, and the corresponding splitting forces required are also different. If the strength of the processing force provided by the tool 1 is always the same, it is obviously not suitable for cutting wafers of different specifications and cutting lines of different lengths. For this reason, in the embodiment of the present application, the tool assembly includes a plurality of electromagnetic hammers 3 arranged at intervals along the extension direction of the blade of the tool 1. Each electromagnetic hammer 3 is connected to the power supply and the controller through an electric control switch. The controller is used to control the action of the corresponding number and position of the electromagnetic hammers 3 according to preset instructions. In this way, the operator can control the action of different numbers and positions of the electromagnetic hammers 3 as needed to achieve the adjustment of the strength of the processing force.

[0063] As shown in Figures 1 and 6, in the embodiment of the present application, the above-mentioned electromagnetic hammer 3 includes an electromagnetic hammer rod 302, an electromagnetic coil sleeve 301 and a second reset member, wherein the electromagnetic hammer rod 302 is used to strike the back of the knife 1, the electromagnetic hammer rod 302 is made of ferromagnetic material, the electromagnetic coil sleeve 301 is sleeved on the outside of the electromagnetic hammer rod 302, the electromagnetic hammer rod 302 can slide back and forth relative to the electromagnetic coil sleeve 301, a driving coil is set in the electromagnetic coil sleeve 301, and the driving coil drives the electromagnetic hammer rod 302 to strike the knife 1 after being energized, and the second reset member is set between the electromagnetic hammer rod 302 and the electromagnetic Between the coil sleeve 301, when the driving coil in the electromagnetic coil sleeve 301 is energized, it acts on the electromagnetic striking rod 302. Driven by the electromagnetic force, the electromagnetic striking rod 302 overcomes the force of the second reset member and moves rapidly toward the direction of the tool 1. After the driving coil is energized and the preset speed is achieved, the electromagnetic striking rod 302 has a suitable speed, and the driving coil is de-energized. Thereafter, the electromagnetic striking rod 302 continues to move toward the back of the tool 1 under the action of inertia until it hammers onto the back of the tool 1, thereby driving the tool 1. When the hammer hits the back of the tool, the electromagnetic striking rod 302 is reset under the action of the second reset member.

[0064] Specifically, in the embodiment of the present application, the end of the electromagnetic striking rod 302 away from the tool 1 passes through the electromagnetic coil sleeve 301, and a striking rod limiting plate is provided at this end, and the second reset member is provided between the striking rod limiting plate and the end face of the electromagnetic coil sleeve 301. The second reset member is a compression spring. Of course, in other embodiments, the second reset member may also adopt other structures and setting positions.

[0065] As shown in Figure 6, in an embodiment of the present application, the tool assembly also includes a limit block 402, which is arranged on the side of the electromagnetic hammer 3 away from the tool 1. A buffer member 404 is arranged between the limit block 402 and the electromagnetic hammer 302 to slow down the impact between the electromagnetic hammer 302 and the limit block 402 when it is reset. The position of the limit block 402 is adjustable so that the initial position of the electromagnetic hammer 302 can be adjusted.

[0066] Preferably, as shown in Figures 1 and 6, the tool assembly also includes a fixed plate 401, a sliding guide mechanism and a third reset member 406, wherein the clamping module 2 and the tool 1 are respectively arranged on the fixed plate 401, the sliding guide mechanism includes a sliding member arranged on the fixed plate 401 and a sliding mating member arranged on the tool 1, the sliding member and the sliding mating member are slidably matched, and the third reset member 406 is arranged between the tool 1 and the fixed plate 401, or the third reset member 406 is arranged between the sliding mating member and the sliding member, or the third reset member 406 is arranged between the tool 1 and the sliding member, or the third reset member 406 is arranged between the sliding mating member and the fixed plate 401.

[0067] As shown in FIG4 , the tool 1 includes a tool body 101 and a tool mounting plate 102 . The tool mounting plate 102 is connected to the above-mentioned sliding fitting. The tool body 101 and the tool mounting plate 102 are detachably connected to facilitate replacement of the tool body 101 after it is damaged.

[0068] An embodiment of the present application further provides a splitting machine, which includes the tool assembly as described in the above embodiment. Since the splitting machine adopts the tool assembly in the above embodiment, the technical effects of the splitting machine please refer to the above embodiment.

[0069] Example:

[0070] Embodiment 1: A tool assembly for a processing device, comprising:

[0071] A tool 1, wherein the tool 1 is movable in a predetermined direction to apply a machining force to a machining surface of a workpiece;

[0072] The clamping module 2 can move back and forth along the preset direction. The clamping module 2 has a clamping portion. Along the preset direction, the clamping portion contacts the surface to be processed before the tool 1, so as to pre-clamp the surface to be processed through the clamping portion before the tool 1 applies a processing force to the surface to be processed.

[0073] Embodiment 2: The tool assembly according to embodiment 1, wherein the pressing module 2 comprises:

[0074] Base 201;

[0075] A connecting member 202, wherein a pressure strip 203 serving as the pressing portion is provided on the surface of the connecting member 202 facing the workpiece to be processed;

[0076] The elastic mechanism 204 has one end connected to the base 201 and the other end connected to the connecting member 202 .

[0077] Example 3: The tool assembly according to Example 1 or 2, wherein the pressure strips 203 are respectively provided on both sides of the connection member 202 in the preset direction, and a gap 207 is formed between the two pressure strips 203 for the tool 1 to pass through to apply the processing force.

[0078] Embodiment 4: The tool assembly according to any one of embodiments 1-3, wherein the elastic mechanism 204 comprises:

[0079] a guide post 2041 , the guide post 2041 being disposed on one of the base 201 and the connector 202 ;

[0080] a guide sleeve 2042 , the guide sleeve 2042 being sleeved on the guide post 2041 and being slidable relative to the guide post 2041 along a predetermined direction, wherein an end of the guide sleeve 2042 away from the guide post 2041 is connected to the other of the base 201 and the connector 202 ;

[0081] The first restoring member 2043 is disposed between the guide post 2041 and the guide sleeve 2042 and is pressed into the guide sleeve 2042 by the guide post 2041 .

[0082] Example 5: The tool assembly according to any one of Examples 1-4, wherein the elastic mechanism 204 also includes a limiting member 2044 for limiting the end of the guide column 2041 away from the guide sleeve 2042, and the guide column 2041 is arranged on one of the base 201 and the connecting member 202 through the limiting member 2044, and the limiting member 2044 is arranged on one of the base 201 and the connecting member 202.

[0083] Example 6: The tool assembly according to any one of Examples 1-5, wherein the pressing module 2 further includes a lighting mechanism having a lighting bracket 205 and a light source 206.

[0084] Example 7: The tool assembly according to any one of Examples 1-6, wherein the tool assembly further comprises a hammer 3 for driving the tool 1, the hammer 3 being arranged on a side of the tool 1 away from the workpiece to be processed, and the hammer 3 being used to strike the back of the tool 1 to drive the tool 1 to move along a preset direction.

[0085] Example 8: A tool assembly according to any one of Examples 1 to 7, wherein the hammer 3 is an electromagnetic hammer 3, and the tool assembly includes a plurality of electromagnetic hammers 3 spaced apart along the blade extension direction of the tool 1, and each electromagnetic hammer 3 is connected to a power supply and a controller via an electric control switch, and the controller is used to control the actions of the corresponding number and positions of the electromagnetic hammers 3 according to preset instructions.

[0086] Embodiment 9: The tool assembly according to any one of embodiments 1 to 8, wherein the electromagnetic hammer 3 comprises:

[0087] An electromagnetic striking rod 302, the electromagnetic striking rod 302 is used to strike the back of the knife, and the electromagnetic striking rod 302 is made of ferromagnetic material;

[0088] An electromagnetic coil sleeve 301, which is sleeved on the electromagnetic striking rod 302. A driving coil is provided in the electromagnetic coil sleeve 301. When the driving coil is energized, it drives the electromagnetic striking rod 302 to strike the tool.

[0089] The second restoring member is arranged between the electromagnetic striking rod 302 and the electromagnetic coil sleeve 301.

[0090] Example 10: The tool assembly according to any one of Examples 1-9, wherein the tool assembly further comprises a limit block 403, the limit block 403 is arranged on the side of the electromagnetic hammer 3 away from the tool 1, and a buffer member 404 is arranged between the limit block 403 and the electromagnetic hammer rod 302.

[0091] Embodiment 11: The tool assembly according to any one of embodiments 1-10, wherein the tool assembly further comprises:

[0092] A fixed plate 401, on which the pressing module 2 and the cutter are respectively arranged;

[0093] A sliding guide mechanism, the sliding guide mechanism comprising a sliding member provided on the fixed plate 401 and a sliding matching member provided on the tool, the sliding member and the sliding matching member being in sliding cooperation with each other;

[0094] The third resetting member 406 is arranged between the tool and the fixed plate 401, or the third resetting member 406 is arranged between the sliding fitting member and the sliding member, or the third resetting member 406 is arranged between the tool and the sliding member, or the third resetting member 406 is arranged between the sliding fitting member and the fixed plate 401.

[0095] Embodiment 12: A splitting machine, wherein the splitting machine includes a tool assembly as described in any one of embodiments 1-11.

[0096] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the technical features indicated. Thus, a feature designated "first" or "second" may explicitly or implicitly include one or more of the features.

[0097] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same and similar parts between the various embodiments can be referenced to each other.

[0098] This document uses specific examples to illustrate the principles and implementation methods of this application. The description of the above examples is only intended to help understand the core ideas of this application. It should be noted that for those skilled in the art, without departing from the principles of this application, various improvements and modifications can be made to this application, and such improvements and modifications also fall within the scope of protection of the claims of this application.

Claims

1. A tool assembly for a processing device, characterized in that: include: A tool, the tool being movable in a preset direction to apply a machining force to a machining surface of a workpiece; A clamping module, which can move back and forth along the preset direction, and has a clamping portion. Along the preset direction, the clamping portion contacts the surface to be processed before the tool, so as to pre-clamp the surface to be processed through the clamping portion before the tool applies a processing force to the surface to be processed.

2. The tool assembly according to claim 1, characterized in that The compression module comprises: Pedestal; A connecting piece, wherein a pressure strip serving as the pressing portion is provided on a surface of the connecting piece facing the workpiece to be processed; An elastic mechanism, one end of which is connected to the base, and the other end of which is connected to the connecting piece.

3. The tool assembly according to claim 2, characterized in that: The connecting member is provided with the pressure strips on both sides of the preset direction, and a gap is formed between the two pressure strips for the tool to pass through to apply the processing force.

4. The tool assembly according to claim 2 or 3, characterized in that: The elastic mechanism comprises: A guide post, the guide post being disposed on one of the base and the connecting member; A guide sleeve, wherein the guide sleeve is sleeved on the guide post and can slide relative to the guide post along a preset direction, and an end of the guide sleeve away from the guide post is connected to the other of the base and the connector; A first resetting member is disposed between the guide post and the guide sleeve and is pressed into the guide sleeve through the guide post.

5. The tool assembly according to claim 4, characterized in that The elastic mechanism also includes a limiting member for limiting the end of the guide column away from the guide sleeve, and the guide column is arranged on one of the base and the connecting member through the limiting member, and the limiting member is arranged on one of the base and the connecting member.

6. The tool assembly according to any one of claims 1 to 5, characterized in that: The pressing module further comprises a lighting mechanism having a lighting bracket and a light source.

7. The tool assembly according to any one of claims 1 to 6, characterized in that: The tool assembly also includes a hammer for driving the tool. The hammer is arranged on a side of the tool away from the workpiece to be processed. The hammer is used to strike the back of the tool to drive the tool to move along a preset direction.

8. The tool assembly according to claim 7, characterized in that The hammer is an electromagnetic hammer, and the tool assembly includes a plurality of electromagnetic hammers spaced apart along the extension direction of the blade of the tool. Each electromagnetic hammer is connected to a power supply and a controller via an electric control switch, and the controller is used to control the actions of the electromagnetic hammers of corresponding quantity and position according to preset instructions.

9. The tool assembly according to claim 8, characterized in that The electromagnetic hammer comprises: An electromagnetic striking rod, the electromagnetic striking rod is used to strike the back of the knife, and the electromagnetic striking rod is made of ferromagnetic material; An electromagnetic coil sleeve, wherein the electromagnetic coil sleeve is sleeved outside the electromagnetic striking rod, and a driving coil is arranged inside the electromagnetic coil sleeve, and when the driving coil is energized, the electromagnetic striking rod is driven to strike the tool; A second reset member is disposed between the electromagnetic striking rod and the electromagnetic coil sleeve.

10. The tool assembly according to claim 9, characterized in that The tool assembly further comprises a limit block, which is arranged on a side of the electromagnetic hammer away from the tool, and a buffer is arranged between the limit block and the electromagnetic hammer rod.

11. The tool assembly according to any one of claims 1 to 10, characterized in that: The tool assembly also includes: A fixing plate, the pressing module and the cutter are respectively arranged on the fixing plate; A sliding guide mechanism, the sliding guide mechanism comprising a sliding member arranged on the fixing plate and a sliding matching member arranged on the tool, the sliding member and the sliding matching member being in sliding matching relationship; A third resetting member is disposed between the tool and the fixed plate, or between the sliding fitting member and the sliding member, or between the tool and the sliding member, or between the sliding fitting member and the fixed plate.

12. A splitting machine, characterized in that: The splitting machine comprises a tool assembly as claimed in any one of claims 1-11.

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