Ceramic component

Abstract

A ceramic component (1) having a surface (2), at least 10% of the surface (2) having a mean roughness Ra of less than or equal to 1.00 µm and greater than or equal to 0.01 µm, with regard to the problem of specifying a ceramic component whose surface can be optically detected as effectively as possible for monitoring purposes, is characterized in that the mean roughness of the aforesaid at least 10% of the surface (2) is generated by blasting treatment.

Description

[0001] Patent application

[0002] Applicant: KYOCERA Fineceramics Europe GmbH

[0003] Steinzeugstraße 92 68229 Mannheim Germany

[0004] Ceramic component

[0005] The invention relates to a ceramic component according to the preamble of claim 1.

[0006] It is known from the prior art to first grind the surface of a ceramic component and then mechanically polish or lapp it to achieve specific properties. The typical grinding marks that appear after grinding the surface should be removed as far as possible.

[0007] This process aims to achieve isotropic behavior with regard to flexural strength, while also achieving a uniformly matte surface finish. Both physical properties of a ceramic guide plate favor its further processing into a test card for the semiconductor industry.

[0008] The mechanical processing of the ceramic guide plate is a complex process. In addition to a long processing time, this also results in increased scrap rates. Furthermore, the mechanical polishing or lapping process worsens the overall thickness variation compared to the ground state, thus limiting the potential application area. Against this background, the creation of surface structuring through laser processing is explained in the following publications.

[0009] WO 2020 / 147 170 A1 and CN 109 574 706 B describe a surface structuring of SiSn4 achieved by laser processing. This effectively results in a visible structuring and describes the process-induced formation of SiO2. Furthermore, CN 108 788482 B describes a surface structuring of ceramic components achieved by laser processing. CN 109 079 314 A also describes a surface structuring achieved by laser processing. The assumption is always that the component surface is both ground and polished.

[0010] Non-oxide ceramic guide plates are used in the semiconductor industry for component quality assurance. For this purpose, numerous holes are drilled into ceramic guide plates, and electrical contact pins are guided through these holes. The holes are typically created using a laser machining process. High-energy laser radiation acts perpendicularly on the ceramic guide plates, creating holes through targeted material removal. The wavelength of the laser radiation used is usually in the green (approx. 515 nm) or infrared (approx. 1030 nm) range. For greater precision, 515 nm is typically used for hole creation. The electrical contact pins are guided in the laser-drilled holes and electrically insulated from one another.In a probe card assembly, at least one of the ceramic carrier plates with its contact pins through it rests on the surface of the probe card. When a probe card is brought into contact with a silicon wafer, the probe card must be aligned with the chips on the silicon wafer so that the contact pins of the probe card can be aligned with the contacts of the chip. Alignment can be achieved using optical systems, among other things. The process of positioning the probe card can be simplified by reducing reflection from the ceramic guide plate.

[0011] Against this background, there is a need to achieve suitable optical properties of a surface of the ceramic guide plate for the above requirements.

[0012] The invention is therefore based on the object of providing a ceramic component whose surface can be optically detected as well as possible for inspection purposes.

[0013] The present invention solves the above-mentioned problem by the features of the independent claims.

[0014] The invention specifically relates to a ceramic component in which at least 10% of the surface has undergone a targeted surface modification. Such a component is preferably used as a guide plate, for example, in the production of test cards.

[0015] According to the invention, it was first recognized that a ceramic component with a merely ground, but not polished, surface must be suitably treated in order to exhibit certain advantageous optical properties.

[0016] According to the invention, it has been recognized in particular that these optical properties can be achieved by a radiation-based process, in particular a laser processing process.

[0017] Although the optical properties achieved by the invention are comparable to the state of the art in terms of isotropy, they differ advantageously from the optical properties of known ceramic elements. It was also discovered that beam shaping with the same laser system enables different laser spot diameters without changing lenses, allowing for quick and easy variation of the processing area per unit of time. In particular, it is possible to convert an input laser beam from a Gaussian to a vortex profile.

[0018] Finally, it was recognized that the pulse duration should advantageously be in the picosecond or femtosecond range in order to minimize material damage.

[0019] The ceramic component according to the invention has a surface in which at least 10% has a mean roughness R a that is less than or equal to 1.00 pm and greater than or equal to 0.01 pm. The aforementioned at least 10% of the surface is produced by optical beam treatment. This allows the surface to reflect scattered light, which can be detected with angle resolution.

[0020] According to the invention, the scattered light is reflected at a low level and over a wide angular range with little variance. As a result, the optical appearance of the component is approximately the same from all viewing directions within the plane of incidence. According to the invention, very little scattered light and a high degree of absorption occur.

[0021] At least 10% of the surface of the component could have the following optical properties: When measuring the angle-resolved scattered light (ARS) with the measuring device MLS10 (Fraunhofer IOF) at 532 nm, with a beam diameter of 2 mm and an angle of incidence of 10°, where ARS is calculated via ARS = AP s / (AQ Pi) with the scattered light power AP S into a solid angle element AD, normalized to the total incident light power Pi and the solid angle element AD and the angle of incidence refers to the sample normal, where ARS in intervals of 0.5° of the polar angle 9 at an azimuthal angle <p von 0° aufgenommen wird, ist die Standardabweichung o von ARS im Bereich -50° bis +50° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° des polaren Winkels Q kleiner als 2 sr -1 , is further preferably in the range 1 ■ 10" 6 sr -1 up to 2 ■ 10" 2 sr -1, further particularly preferred in the range 1 ■ 10" 5 sr -1 up to 1 ■ 10" 2 sr -1 . o is over ( s (ARS s - <ars>) 2 / (n-1 )) 1 / 2 with the sum £ s over all considered solid angles s, the mean value of the angle-resolved scattered light <ars>in the given range, the angle-resolved scattered light ARSs at the respective solid angle s and the number of considered data points n.

[0022] At least 10% of the surface of the component could have the following optical properties: When measuring the angle-resolved scattered light (ARS) with the measuring device MLS10 (Fraunhofer IOF) at 532 nm, with a beam diameter of 2 mm and an angle of incidence of 10°, where ARS is calculated via ARS = AP s / (AQ Pi) with the scattered light power AP S into a solid angle element AD, normalized to the total incident light power Pi and the solid angle element AD and the angle of incidence refers to the sample normal, where ARS in intervals of 0.5° of the polar angle Q at an azimuthal angle <p von 0°aufgenommen wird, ist der Mittelwert von ARS im Bereich -50° bis +50° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° des polaren Winkels Q kleiner als 3,5 sr -1 , is further preferably in the range 1 ■ 10 -6 sr -1 up to 7 10" 2 sr -1 , further particularly preferred in the range 1 ■ 10 -5 up to 4 10" 2 sr -1 .

[0023] At least 10% of the surface could have the following optical properties: When measuring the angle-resolved scattered light (ARS) with the measuring device MLS10 (Fraunhofer IOF) at 532 nm, with a beam diameter of 2 mm and an angle of incidence of 10°, where the angle of incidence refers to the sample normal, where ARS is measured at intervals of 1° of the polar angle 9 and at intervals of 5° of the azimuthal angle <p aufgenommen wird, wobei je ein Mittelwert von ARS im Bereich -40° bis +40° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° des polaren Winkels Q gebildet wird, liegt der Quotient aus dem Mittelwert von ARS bei einem azimutalen Winkel von 90° und dem Mittelwert von ARS bei einem azimutalen Winkel von 0° im Bereich 0,1 bis 1 ,1 , weiter bevorzugt im Bereich 0,8 bis 1 ,1 , weiter besonders bevorzugt im Bereich 0,9 bis 1 ,1 . Hierdurch zeigt das Streulicht ein isotropes Verhalten.The optical appearance of the component or its surface is the same from all viewing directions.

[0024] At least 10% of the surface could have the following optical properties: When measuring the angle-resolved scattered light (ARS) with the measuring device MLS10 (Fraunhofer IOF) at 532 nm, with a beam diameter of 2 mm and an angle of incidence of 10°, where the angle of incidence refers to the sample normal, where ARS is measured at intervals of 1° of the polar angle Q and at intervals of 5° of the azimuthal angle <p aufgenommen wird, wobei je ein Mittelwert von ARS im Bereich -40° bis +40° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° des polaren Winkels Q gebildet wird, liegt der Quotient aus dem Mittelwert von ARS bei jedem von 0° abweichenden azimutalen Winkel und dem Mittelwert von ARS bei einem azimutalen Winkel von 0° im Bereich 0,1 bis 1 , 1 , weiter bevorzugt im Bereich 0,8 bis 1 , 1 , weiter besonders bevorzugt im Bereich 0,9 bis 1 ,1. Hierdurch zeigt das Streulicht isotropes Verhalten.The optical appearance of the component or its surface is the same from all viewing directions.

[0025] The perceptible color of the area produced by blasting treatment according to the L*a*b* color space (ISO / CIE 11664-4) could have the following properties: L* is less than 50, more preferably in the range 10 to 45, more particularly preferably in the range 20 to 40, where a* is in the range -1.0 to 3.0, more preferably in the range -0.5 to 2.5, more particularly preferably in the range -0.1 to 2.0, where b* is in the range -5 to 20, more preferably in the range -3 to 15, more particularly preferably in the range -1 to 10. A uniform coloring of the component and increased absorption is achieved.

[0026] The quotient of the flexural strength of components produced by full-surface blasting on both sides, measured parallel to a first direction, and the flexural strength measured perpendicular to a first direction could be in the range 0.8 to 1.2, more preferably in the range 0.85 to 1.15, and even more preferably in the range 0.9 to 1.1. This gives the component isotropic mechanical properties. There is no preferred orientation with regard to fracture behavior.

[0027] The area created by blasting could have a mean roughness R a According to DIN EN ISO 4287, the roughness values ​​should be < 1.0 pm and > 0.01 pm, more preferably < 0.8 pm and > 0.01 pm, more preferably < 0.6 pm and > 0.01 pm, and particularly preferably < 0.4 pm and > 0.01 pm. This results in an easily adjustable mean roughness value.

[0028] The component could have a thickness of < 1,000 pm and > 0.1 pm, more preferably < 750 pm and > 0.1 pm, more preferably < 500 pm and > 0.1 pm, and even more preferably < 350 pm and > 0.1 pm. This allows processes and properties to be carried out or adjusted largely independent of thickness.

[0029] The component could be a non-oxide ceramic. Such a component can be manufactured cost-effectively. The component could consist of 15 wt% to 100 wt%, more preferably 20 wt% to 100 wt%, and even more preferably 25 wt% to 95 wt% SiSn4. Such a component is particularly stable.

[0030] TiC or WO3 could be added to the component as a colorant at a concentration of 0 to 5 wt%, more preferably at a concentration of 0.5 to 3 wt%, and even more preferably at a concentration of 0.5 to 2 wt%. This allows the component to be color-matched.

[0031] In a method for producing a ceramic component of the type described here, a radiation-based process changes the optical properties of at least 10% of the surface of an initial component.

[0032] The radiation used in the process could be photonic radiation. This allows the process to be carried out contact-free, meaning no instrument needs to come into physical contact with the surface of the original component. Due to radiation-based processing, the ceramic components can develop particularly good mechanical properties, thus enabling higher-quality products to be achieved.

[0033] The wavelength of the photonic radiation could be in the range of 1030 nm ± 10 nm or 515 nm ± 10 nm. These wavelengths can be generated with readily available commercial lasers.

[0034] The photonic radiation could be pulsed. This results in less heat input into the component and thus less damage to the component.

[0035] The pulse duration of the radiation used could be < 20 ps and > 0.01 ps, more preferably < 10 ps and > 0.01 ps. This results in low heat input and thus less damage to the components. Pulsed laser radiation can be used to remove several micrometers of material from a ceramic component. This makes it possible, for example, to give an initially anisotropic surface finish with grinding grooves an optically homogeneous, isotropic behavior.

[0036] The focused beam diameter of the incident light beam could

[0037] > 20 pm, more preferably > 40 pm, more preferably > 60 pm, more preferably > 80 pm, but always less than 5000 pm. The larger the beam diameter, the larger the surface area of ​​the component that can be processed per unit of time.

[0038] When creating the optical properties of the component area created by blasting, a material removal of < 50 pm and > 0.1 pm, more preferably < 30 pm and > 0.1 pm, and even more preferably < 15 pm and > 0.1 pm relative to the original component could occur. The lower the material removal, the better the controllability of a subsequent process in which the component is used.

[0039] The ceramic component described here, in which at least a partial area of ​​the surface was created by blasting, could be used as a semi-finished product for the production or formation of a probe card. Such a component can be easily monitored optically.

[0040] In the drawing show

[0041] Fig. 1 is a schematic representation of a component on whose surface light is incident, whereby the light falls as scattered light into a solid angle and is recorded for characterising the component, Fig. 2 is the measured angle-resolved scattered light (ARS) (beam diameter 2 mm at 10° angle of incidence) as a function of the polar angle on ground, lapped and laser-frosted (produced by blasting) surfaces using light with a wavelength of 532 nm,

[0042] Fig. 3 shows the measured angle-resolved scattered light (ARS) (beam diameter 2 mm at 10° angle of incidence) as a function of the polar angle on ground, lapped and laser-frosted (by blasting) surfaces using light with a wavelength of 1064 nm,

[0043] Fig. 4 the mean value of measured angle-resolved scattered light (ARS) (beam diameter 2 mm at 10° angle of incidence) as a function of the azimuthal angle on ground, lapped and laser-frosted (by blasting) surfaces using light with a wavelength of 532 nm,

[0044] Fig. 5 shows the measured angle-resolved scattered light (ARS) (beam diameter 2 mm at 10° angle of incidence) as a function of the polar angle on surfaces of various embodiments using light with a wavelength of 532 nm, and

[0045] Fig. 6 shows the measured angle-resolved scattered light (ARS) (beam diameter 2 mm at 10° angle of incidence) as a function of the polar angle on surfaces of various embodiments using light with a wavelength of 1064 nm. Concrete embodiments for the radiation treatment of areas and sub-areas of ceramic components are presented below.

[0046] The laser processing is carried out using the RDX 800 laser machine (Pulsar Photonics) and the CB3-80W laser (Light Conversion) installed in it.

[0047] Mechanical characterization is performed using a three-point bending test on specimens measuring 5 mm x 25 mm. The specimens are placed flat on two supports spaced 20 mm apart. The load is applied centrally from above.

[0048] The optical characterization is carried out by measuring the angle-resolved scattered light with the MLS10 measuring device (Fraunhofer IOF) at 532 nm and 1064 nm (beam diameter 2 mm at 10° angle of incidence).

[0049] The angle-resolved scattered light ARS (see formula (1 )) is defined as the scattered light power AP S into a solid angle element AD, normalized to the total incident light power Pi and the solid angle element AD. The angle of incidence refers to the sample normal (3).

[0050] For the following examples the following starting materials were used: Component Component Component Component

[0051] 1 2 3 4 3-7.5 wt% 3-7.5 wt% 0.5-2 wt%

[0052] Starting material AI2O3 Y2O3 TiO2 3-7.5 wt% 3-7.5 wt% 0.5-2 wt%

[0053] Starting material AI2O3 Y2O3 WO3 60-70 wt% 1-4 wt% 0.5-2 wt%

[0054] Source material ZrO2 MgO TiO2

[0055] The thickness of the starting materials used is (180 ± 10) pm to allow for good comparability of the flexural strength. Numerous tests have demonstrated that the optical properties achieved in the resulting component do not depend on the thickness of the starting materials.

[0056] The raw materials have a ground surface structure.

[0057] The perceptible color of the source materials according to the L*a*b* color space (ISO / CIE 11664-4) are as follows:

[0058] L* a* b*

[0059] Starting material 1 33 0.6 -0.6

[0060] Starting material 2 29 -0.2 -1.8

[0061] Starting material 3 43 -0.3 -2.1

[0062] The mean roughness value R a was determined according to DIN EN ISO 4287. Example 1:

[0063] The starting material 1 with a ground surface was used as the starting component.

[0064] The mean roughness value R a of the initial component was determined to be on average 83 nm parallel to the grinding direction and on average 340 nm perpendicular to the grinding direction.

[0065] The flexural strength was determined to be 1304 MPa on average parallel to the grinding direction and 996 MPa on average perpendicular to the grinding direction. This results in a quotient of 1.31.

[0066] The beam treatment was carried out with a laser with a wavelength of 1030 nm, a pulse duration of 10000 fs, a repetition rate of 175 kHz, a scanning speed of 8000 mm / s, a fluence of 1.66 J / cm 2 , a beam diameter of 162 pm and a line spacing of 45 pm. The surface of the original component was scanned twice, with the scan lines rotated by 90° to each other between the two scans.

[0067] This results in an average material removal of 5 pm. The blasting treatment was applied to the entire surface of both sides of the component.

[0068] The angle-resolved scattered light (ARS) shows for 532 nm and an azimuthal angle <p von 0° im Bereich -50° bis +50° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 2,9 10 -2 sr -1 and a standard deviation of 6.0-10' 3 sr 1 .

[0069] For 1064 nm and an azimuthal angle <p von 0° zeigt das winkelaufgelöste Streulicht (ARS) im Bereich -50° bis +50° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 3,3- 10 -2 sr -1 and a standard deviation of 5.8-10' 3 sr 1 .

[0070] The quotient of the mean value of the angle-resolved scattered light (ARS) at an azimuthal angle <p von 90° und bei einem azimutalen Winkel <p von 0° im Bereich -40° bis +40° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° liegt für 532 nm bei 9,8-10’ 1 .

[0071] After blasting on both sides, a mean roughness value of 511 nm was determined parallel to the initial grinding direction and 559 nm perpendicular to the initial grinding direction.

[0072] The flexural strength was determined to be 1273 MPa on average parallel to the initial grinding direction and 1182 MPa on average perpendicular to the initial grinding direction. This results in a quotient of 1.08.

[0073] The perceptible color was determined to be L* 37.0, a* 0.5 and b* 0.1.

[0074] Example 2:

[0075] The starting material 2 with a ground surface was used as the starting component.

[0076] The mean roughness value R a of the initial component was determined to be on average 164 nm parallel to the grinding direction and on average 326 nm perpendicular to the grinding direction.

[0077] The bending strength was determined to be 1145 MPa on average parallel to the grinding direction and 844 MPa on average perpendicular to the grinding direction. This results in a quotient of 1.36. Blasting was carried out using a laser with a wavelength of 1030 nm, a pulse duration of 184 fs, a repetition rate of 1000 kHz, a scanning speed of 5000 mm / s, and a fluence of 0.17 J / cm 2 , a beam diameter of 162 pm and a line spacing of 5 pm. The surface was scanned twice, with the scan lines rotated by 90° to each other between the two scans. This resulted in an average material removal of 9 pm. The blasting treatment was applied to the entire surface of both sides of the component.

[0078] The angle-resolved scattered light (ARS) shows for 532 nm and an azimuthal angle <p von 0° im Bereich -50° bis +50° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 1 ,7- 10 -2 sr 1 and a standard deviation of

[0079] 2.8-10' 3 sr 1 .

[0080] For 1064 nm and an azimuthal angle <p von 0° zeigt das winkelaufgelöste Streulicht (ARS) im Bereich -50° bis +50° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 2,3 10 -2 sr -1 and a standard deviation of

[0081] 3.9-10' 3 sr 1 .

[0082] The quotient of the mean value of the angle-resolved scattered light (ARS) at an azimuthal angle <p von 90° und bei einem azimutalen Winkel <p von 0° im Bereich -40° bis +40° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° liegt für 532 nm bei

[0083] 9.9-10' 1 .

[0084] After blasting on both sides, a mean roughness of 365 nm was determined parallel to the initial grinding direction and 393 nm perpendicular to the initial grinding direction. The flexural strength was determined to be 1120 MPa on average parallel to the initial grinding direction and 1098 MPa on average perpendicular to the initial grinding direction. This results in a quotient of 1.02.

[0085] The perceptible color was determined to be L* 30.8, a* 0.4 and b* 0.4.

[0086] Example 3:

[0087] The starting material 3 with a ground surface was used as the starting component.

[0088] The mean roughness value R a of the initial component was determined to be on average 83 nm parallel to the grinding direction and on average 360 ​​nm perpendicular to the grinding direction.

[0089] The flexural strength was determined to be 1050 MPa on average parallel to the grinding direction and 786 MPa on average perpendicular to the grinding direction. This results in a quotient of 1.34.

[0090] The beam treatment was carried out with a laser with a wavelength of 1030 nm, a pulse duration of 184 fs, a repetition rate of 1000 kHz, a scanning speed of 5000 mm / s, and a fluence of 0.17 J / cm 2 , a beam diameter of 162 pm, and a line spacing of 10 pm. The surface was scanned twice, with the scan lines rotated by 90° to each other between the two scans. This resulted in an average material removal of 7 pm. The blasting treatment was applied to the entire surface of both sides of the component.

[0091] The angle-resolved scattered light (ARS) shows for 532 nm and an azimuthal

[0092] angle <p von 0° im Bereich -50° bis +50° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 1 ,7- 10 -2 sr -1 and a standard deviation of 2.9-10' 3 sr 1 .

[0093] For 1064 nm and an azimuthal angle <p von 0° zeigt das winkelaufgelöste Streulicht (ARS) im Bereich -50° bis +50° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 2,4 10 -2 sr" 1 and a standard deviation of 4.2 W 3 sr 1 .

[0094] The quotient of the mean value of the angle-resolved scattered light (ARS) at an azimuthal angle <p von 90° und bei einem azimutalen Winkel <p von 0° im Bereich -40° bis +40° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° liegt für 532 nm bei 10.0-10- 1 .

[0095] After blasting on both sides, a mean roughness value of 471 nm was determined parallel to the initial grinding direction and 500 nm perpendicular to the initial grinding direction.

[0096] The flexural strength was determined to be 1051 MPa on average parallel to the initial grinding direction and 1045 MPa on average perpendicular to the initial grinding direction. This results in a quotient of 1.01.

[0097] The perceptible color was determined to be L* 30.9, a* 0.2 and b* 0.5.

[0098] Example 4:

[0099] The starting material 1 with a ground surface was used as the starting component. The mean roughness R a of the initial component was determined to be on average 83 nm parallel to the grinding direction and on average 340 nm perpendicular to the grinding direction.

[0100] The flexural strength was determined to be 1304 MPa on average parallel to the grinding direction and 996 MPa on average perpendicular to the grinding direction. This results in a quotient of 1.31.

[0101] The beam treatment was carried out with a laser with a wavelength of 1030 nm, a pulse duration of 184 fs, a repetition rate of 1000 kHz, a scanning speed of 5000 mm / s, and a fluence of 0.17 J / cm 2 , a beam diameter of 162 pm and a line spacing of 5 pm. The surface was scanned twice, with the scan lines rotated by 90° to each other between the two scans. This resulted in an average material removal of 13 pm. The blasting treatment was applied to the entire surface of both sides of the component.

[0102] The angle-resolved scattered light (ARS) shows for 532 nm and an azimuthal angle <p von 0° im Bereich -50° bis +50° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 2,0- 10 -2 sr" 1 and a standard deviation of 3.3-10' 3 sr 1 .

[0103] For 1064 nm and an azimuthal angle <p von 0° zeigt das winkelaufgelöste Streulicht (ARS) im Bereich -50° bis +50° des polaren Winkels Q unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° einen Mittelwert von 3,3- 10 -2 sr -1 and a standard deviation of 5.8-10' 3 sr 1 .

[0104] The quotient of the mean value of the angle-resolved scattered light (ARS) at an azimuthal angle <p von 90° und bei einem azimutalen Winkel <p von 0° im Bereich -40° bis +40° des polaren Winkels 9 unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° liegt für 532 nm bei 9,9-10’ 1 .

[0105] After blasting on both sides, a mean roughness value of 274 nm was determined parallel to the initial grinding direction and 326 nm perpendicular to the initial grinding direction.

[0106] The flexural strength was determined to be 1233 MPa on average parallel to the initial grinding direction and 1245 MPa on average perpendicular to the initial grinding direction. This results in a quotient of 0.99. The perceptible color was determined to be L* 32.0, a* 0.9, and b* 0.7.

[0107] List of reference symbols

[0108] 1 component

[0109] 2 Surface

[0110] 3 sample standards< / ars> < / ars>

Claims

Patent claims 1 . Ceramic component (1 ) with a surface (2), wherein at least 10% of the surface (2) has a mean roughness value R a which is less than or equal to 1.00 pm and greater than or equal to 0.01 pm, characterized in that the mean roughness value of the aforementioned 10% of the surface (2) is produced by blasting.

2. Component according to claim 1 or its preamble, characterized in that when measuring the angle-resolved scattered light (ARS) at 532 nm, a beam diameter of 2 mm at 10° angle of incidence, where ARS over ARS = AP s / (AQ Pi) with the scattered light power AP Sinto a solid angle element AO, normalized to the total incident light power Pi and the solid angle element AO, where the angle of incidence refers to the sample normal (3), where ARS is in intervals of 0.5° of the polar angle 9 at an azimuthal angle <p von 0° aufgenommen wird, die Standardabweichung o von ARS im Bereich -50° bis +50° des polaren Winkels 6 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° des polaren Winkels 6 kleiner als 2 sr 1 is, more preferably in the range 1 ■ 10 -6 sr 1 up to 2 10 -2 sr -1 , further particularly preferred in the range 1 ■ 10 -5 sr 1 to 1 ■ 10 -2 sr 1 lies.

3. Component according to claim 1 or 2 or according to the preamble of claim 1, characterized in that when measuring the angle-resolved scattered light (ARS) at 532 nm, with a beam diameter of 2 mm at 10° angle of incidence, where ARS is calculated via ARS = APs / (AQ Pi) with the scattered light power AP S into a solid angle element AO, normalized to the total incident light power Pi and the solid angle element AO, where the angle of incidence refers to the sample normal (3), where ARS is at intervals of 0.5° of the polar angle 9 at an azimuthal angle <p von 0°aufgenommen wird, der Mittelwert von ARS im Bereich -50° bis +50° des polaren Winkels 6 unter Ausschluss des Bereiches von einschließlich -10,5° bis einschließlich -9,5° des polaren Winkels 6 kleiner als 3,5 sr 1 is, more preferably in the range 1 ■ 10 -6 sr 1 up to 7 10 -2 sr 1 , further particularly preferred in the range 1 ■ 10 -5 up to 4 10-2 sr 1 lies.

4. Component according to one of the preceding claims, characterized in that when measuring the angle-resolved scattered light (ARS) at 532 nm, with a beam diameter of 2 mm at 10° angle of incidence, where ARS over ARS = AP s / (AQ Pi) with the scattered light power AP Sinto a solid angle element AQ, normalized to the total incident light power Pi and the solid angle element AO, where the angle of incidence refers to the sample normal (3), where ARS is defined at intervals of 1 ° of the polar angle 6 and at intervals of 5 ° of the azimuthal angle <p aufgenommen wird, wobei je ein Mittelwert von ARS im Bereich -40° bis +40° des polaren Winkels 6 unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° des polaren Winkels 6 gebildet wird, der Quotient aus dem Mittelwert von ARS bei einem azimutalen Winkel von 90° und dem Mittelwert von ARS bei einem azimutalen Winkel von 0° im Bereich 0,1 bis 1 ,1 , weiter bevorzugt im Bereich 0,8 bis 1 ,1 , weiter besonders bevorzugt im Bereich 0,9 bis 1 ,1 liegt.

5. Component according to one of the preceding claims, characterized in that when measuring the angle-resolved scattered light (ARS) at 532 nm, with a beam diameter of 2 mm at 10° angle of incidence, where ARS over ARS = AP s / (AO Pi) with the scattered light power AP S into a solid angle element AO, normalized to the total incident light power Pi and the solid angle element AO, where the angle of incidence refers to the sample normal (3), where ARS is defined at intervals of 1 ° of the polar angle 9 and at intervals of 5 ° of the azimuthal angle <p aufgenommen wird, wobei je ein Mittelwert von ARS im Bereich -40° bis +40° des polaren Winkels 6 unter Ausschluss des Bereiches von einschließlich -7° bis einschließlich -13° des polaren Winkels 6 gebildet wird, der Quotient aus dem Mittelwert von ARS bei jedem von 0° abweichenden azimutalen Winkel und dem Mittelwert von ARS bei einem azimutalen Winkel von 0° im Bereich 0,1 bis 1 , 1 , weiter bevorzugt im Bereich 0,8 bis 1 ,1 , weiter besonders bevorzugt im Bereich 0,9 bis 1 ,1 liegt.

6. Component according to one of the preceding claims, characterized in that its perceivable color according to L*a*b* color space according to ISO / CIE 11664-4 has the properties that L* is less than 50, more preferably in the range 10 to 45, more particularly preferably in the range 20 to 40, where a* is in the range -1.0 to 3.0, more preferably in the range -0.5 to 2.5, more particularly preferably in the range -0.1 to 2.0, and where b* is in the range -5 to 20, more preferably in the range -3 to 15, more particularly preferably in the range -1 to 10.

7. Component according to one of the preceding claims, characterized in that the quotient of the flexural strength measured parallel to a first direction and the flexural strength measured perpendicular to a first direction is in the range 0.8 to 1.2, more preferably in the range 0.85 to 1.15, more particularly preferably in the range 0.9 to 1.

1.

8. Component according to one of the preceding claims, characterized in that the ceramic component has a thickness of < 1,000 pm, more preferably < 750 pm, more preferably < 500 pm, more particularly preferably < 350 pm.

9. Component according to one of the preceding claims, characterized in that it is a non-oxide ceramic.

10. Component according to claim 9, characterized in that it comprises 15 wt% to 100 wt%, more preferably 20 wt% to 100 wt%, more particularly preferably 25 wt% to 95 wt% SisN4.

11. Component according to claim 10, characterized in that TiC or WO3 is added as a colorant, in particular in a proportion of 0 wt% to 5 wt%, more preferably in a proportion of 0.5 wt% to 3 wt%, more particularly preferably in a proportion of 0.5 wt% to 2 wt%.

12. A method for producing a ceramic component (1) according to one of the preceding claims, characterized in that a radiation-based process changes the optical properties of at least 10% of the surface (2) of an initial component.

13. Method according to claim 12, characterized in that the radiation applied is photonic radiation.

14. Method according to claim 12 or 13, characterized in that the wavelength of the photonic radiation is in the range 1030 nm ± 10 nm or 515 nm ± 10 nm.

15. Method according to one of claims 12 to 14, characterized in that the photonic radiation is pulsed radiation.

16. Method according to one of claims 12 to 15, characterized in that the pulse duration of the radiation used < 20 ps, more preferably < 10 ps.

17. The method according to any one of claims 12 to 16, characterized in that the focused beam diameter is > 20 pm, more preferably > 40 pm, more preferably > 60 pm, more preferably > 80 pm.

18. Method according to one of claims 12 to 17, characterized in that when producing the optical properties of the component (1) a material removal of < 50 pm, more preferably < 30 pm, more preferably < 15 pm with reference to an initial component.

19. Use of a component (1) according to one of claims 1 to 11 as a semi-finished product for forming a test card.

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