Spin chuck

Abstract

The present invention provides a spin chuck in which a reduction in the durability of a chuck pin part due to thermal deformation of an upper cover in a high temperature environment is prevented. A spin chuck according to one feature of the present invention comprises: an upper cover; a chuck pin part installed in the upper cover so as to protrude from the upper cover; and a metal plate coupled to a lower portion of the upper cover and supporting the chuck pin part so that the chuck pin part is able to rotate. The shaft of the chuck pin part is fixed by a plate having relatively low thermal deformation.

Description

Spin chuck

[0001] The present invention relates to a spin chuck that supports a substrate and can rotate in a semiconductor process, etc.

[0002] Semiconductor processes involve etching or cleaning thin films, foreign substances, particles, etc. on wafers. The wafer is mounted on the upper cover of a spin chuck with the pattern surface facing up or down.

[0003] The wafer cleaning process is performed by spraying a cleaning solution on top of a wafer mounted on a spin chuck and rotating the spin chuck at high speed. The spin chuck supports the outer side of the wafer by installing chuck pins on the upper cover and secures the wafer during high-speed rotation.

[0004] Recently, changes in semiconductor cleaning process conditions have led to issues with chuck pin product defects. Recent semiconductor cleaning processes are operating at higher temperatures (250°C to 300°C) than in the past, and the chemicals used in these processes are also potent. These changes in process conditions have resulted in chuck pin deformation and chemical solutions penetrating the chuck pin, increasing the number of product repairs.

[0005] More specifically, the conventional spin chuck has a structure in which an upper cover made of a resin material (preferably a fluororesin material) rotatably supports a chuck pin. In this structure, when the spin chuck is exposed to a high-temperature environment, the upper cover made of the resin material is thermally deformed, and the thermal deformation of the upper cover presses the chuck pin from the outside. When the upper cover presses the chuck pin, a problem may occur in which the rotational axis of the chuck pin is misaligned, and a problem may occur in which the chuck pin does not properly rotate in the direction in which the wafer is fixed or in the direction in which the wafer is released.

[0006] Additionally, a sealing member is provided between the upper cover and the chuck pin to prevent cleaning fluid from flowing into the chuck pin. However, if the upper cover is thermally deformed, a gap will form in the sealing structure between the upper cover and the chuck pin by the sealing member. This gap will become even larger when the upper cover is thermally deformed in the z-axis direction. If cleaning fluid flows into the gap, the durability of the chuck pin will be reduced, which may lead to an increase in the number of product repairs. This may further lead to a problem of reduced durability of the spin chuck.

[0007] Therefore, a technology is needed that can prevent the rotation axis of the chuck pin from being distorted even if the upper cover is thermally deformed, and at the same time, prevent the cleaning solution from penetrating into the chuck pin even if the upper cover is thermally deformed.

[0008] [Prior Art Literature]

[0009] [Patent Document]

[0010] (Patent Document 1) Korean Patent No. 10-1499921

[0011] The purpose of the present invention is to provide a spin chuck that prevents deterioration of the durability of the chuck pin portion due to thermal deformation of the upper cover in a high-temperature environment.

[0012] A spin chuck according to one feature of the present invention comprises: an upper cover; a chuck pin portion installed on the upper cover so as to protrude from the upper cover; and a metal plate coupled to the lower portion of the upper cover and supporting the chuck pin portion so as to be rotatable; wherein the axis of the chuck pin portion is fixed by the plate, which has relatively little thermal deformation.

[0013] In addition, the upper cover has a first through-hole into which the chuck pin part is inserted, and the chuck pin part is provided at a distance from the inner wall of the first through-hole within the first through-hole so as not to make direct contact with the upper cover.

[0014] In addition, the upper cover has a partition wall portion protruding upward from the upper surface of the upper cover around the first through-hole of the upper cover, and a sealing member is interposed between the partition wall portion and the chuck pin portion, so that the sealing member is positioned between the chuck pin portion inserted into the first through-hole and the upper cover.

[0015] In addition, the sealing member is formed by integrally combining the upper part with an O-ring part and the lower part with a spring part.

[0016] In addition, the upper cover includes a flat portion having a plurality of first through holes formed into which the chuck pin portion is inserted; and an extension portion extending downward from an edge of the flat portion; and a buffer portion formed concavely along a circumferential direction in the flat portion.

[0017] In addition, the plate has a protrusion protruding from its upper surface, the upper cover has a concave portion formed concavely from its lower surface, and the protrusion is inserted into the concave portion with a gap distance at least on one side.

[0018] In addition, it includes an insert coupled to the upper cover and exposed toward the first through hole; a bushing member coupled to the outside of the chuck pin; and a sealing member provided between the insert and the bushing member.

[0019] The present invention provides a spin chuck capable of preventing the lower part of the chuck pin from being affected by heat by fixing the lower part of the chuck pin in a rotatably supported state with a plate having relatively little thermal deformation, and forming a buffer part in the upper cover and forming a distance between the first through hole and the chuck pin part to minimize thermal deformation of the first through hole, thereby preventing the upper part of the chuck pin part from being affected by heat.

[0020] FIG. 1 is a schematic diagram illustrating a spin chuck according to a preferred embodiment of the present invention.

[0021] Figure 2 is an enlarged view of a portion of the upper cover on which the chuck pin is installed.

[0022] Figure 3 is a drawing showing the upper cover viewed from above.

[0023] Fig. 4 is an enlarged view showing another embodiment of the joint structure of the upper cover and the plate.

[0024] Figure 5 is an enlarged view of an embodiment having inserts in the plate and upper cover.

[0025] Figure 6 is a partially enlarged view showing a state in which a sealing member is provided by integrally combining an O-ring part and a spring part.

[0026] Fig. 7 is a partially enlarged view showing a state in which a first sealing member and a second sealing member are additionally provided to the spin chuck of Fig. 6.

[0027] Figure 8 is a perspective view of a sealing member formed by integrally combining an O-ring portion and a spring portion.

[0028] Figure 9 is a drawing showing a section cut along line A-A' of Figure 8.

[0029] The following merely exemplifies the principles of the invention. Therefore, those skilled in the art will be able to implement the principles of the invention and invent various devices within the scope and spirit of the invention, even if not explicitly described or illustrated herein. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention, and should be understood as not being limited to the specifically listed embodiments and conditions.

[0030] The above-described purposes, features and advantages will become clearer through the following detailed description with reference to the attached drawings, so that a person having ordinary skill in the art to which the invention pertains can easily practice the technical idea of ​​the invention.

[0031] Embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal examples of the present invention. The widths and thicknesses of regions depicted in these drawings are exaggerated for the purpose of effectively explaining the technical content. The shapes of the exemplary drawings may vary depending on manufacturing techniques and / or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes depicted, but also encompass variations in shape resulting from manufacturing processes.

[0032] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0033] FIG. 1 is a schematic diagram showing a spin chuck (SC) according to a preferred embodiment of the present invention, FIG. 2 is a diagram showing a part of an upper cover (10) having a chuck pin portion (CP) installed in an enlarged manner, FIG. 3 is a diagram showing the upper cover (10) as seen from above, FIG. 4 is a diagram showing a part of an enlarged manner another embodiment of a joint structure of an upper cover (10) and a plate (11), FIG. 5 is a diagram showing a part of an embodiment in which an insert (40) is provided in a plate (11) and an upper cover (10), FIG. 6 is a diagram showing a part of a spin chuck (SC) having a sealing member (SL') formed by integrally combining an O-ring portion (OR) and a spring portion (SR), FIG. 7 is a diagram showing a part of an enlarged manner a state in which a first sealing member (SL1) and a second sealing member (SL2) are additionally provided to the spin chuck (SC) of FIG. 6, and FIG. 8 is a diagram showing a state in which an O-ring portion (OR) and a spring portion (SR) are additionally provided, and FIG. This is a perspective view of a sealing member (SL') formed by integrally combining a spring member (SR), and FIG. 9 is a drawing showing a surface cut along line A-A' of FIG. 8.

[0034] Referring to FIGS. 1 and 2, the spin chuck (SC) is configured to include an upper cover (10), a chuck pin portion (CP) installed on the upper cover (10), a plate (11) coupled to the lower portion of the upper cover (10), and a lower cover (10, 13) coupled to the upper cover (10) and provided on the lower portion of the plate (11).

[0035] Referring to Fig. 1, a spin chuck (SC) is installed with chuck pins (PN) that support the outer side of a substrate (W) provided on the spin chuck (SC) and have the function of fixing the substrate (W) when the spin chuck (SC) rotates. The spin chuck (SC) is provided on a support frame (SF) and performs a substrate (W) cleaning process by rotating at high speed when a cleaning solution is sprayed onto the substrate (W) through a cleaning solution spray device (CA).

[0036] The upper cover (10) may be made of a material having corrosion resistance and / or chemical resistance to cleaning solutions. The upper cover (10) may preferably be made of a resin material. More specifically, the upper cover (10) may be made of a fluororesin material. For example, the upper cover (10) may be made of PTFE, PFA, PVDF, or PCTFE, and preferably PTFE.

[0037] The spin chuck (SC) has a metal plate (11) on the lower part of the upper cover (10).

[0038] The upper cover (10) and the plate (11) can be fixedly joined through various joining methods for fixing dissimilar materials, such as injection molding, bonding, and bolting.

[0039] The plate (11) is provided with a second through hole (H2) corresponding to the first through hole (H1) and is joined to the lower part of the upper cover (10) so that the second through hole (H2) corresponds to the first through hole (H1). Accordingly, the first and second through holes (H1, H2) are connected.

[0040] The lower portion of the chuck pin (CP) is located inside the second through hole (H2). Specifically, the lower portion of the chuck pin (PN) is located inside the second through hole (H2).

[0041] A bearing part (12) is coupled to the lower outer side of the chuck pin (PN). Accordingly, a bearing part (12) is provided on the inner side of the second through hole (H2) to surround and couple the lower part of the chuck pin (PN) and the lower part of the chuck pin (PN) from the outer side. The bearing part (12) is coupled to the lower outer side of the chuck pin (PN) and supports the chuck pin (PN) so that it can rotate on the inner side of the second through hole (H2). More specifically, the bearing part (12) supports the chuck pin (PN) so that it can rotate.

[0042] The bearing part (12) is provided on the inside of the second through hole (H2) and is coupled to the plate (11). Accordingly, the plate (11) can rotatably support the lower part of the chuck pin part (CP) (specifically, the lower part of the chuck pin (PN)) through the bearing part (12).

[0043] In other words, the plate (11) supports the lower part of the chuck pin (PN) so that it can rotate through the bearing part (12) coupled to the second through hole (H2) and supports the axis of the chuck pin part (CP) (the central axis of the chuck pin (PN) constituting the rotation axis) so that it maintains concentricity.

[0044] The plate (11) is made of a metal material, preferably aluminum or SUS material. Accordingly, the plate (11) has a relatively lower coefficient of thermal expansion than the upper cover (10) and is less subject to thermal deformation.

[0045] Accordingly, the plate (11) can maintain fixing force to the chuck pin (CP) even in a high-temperature environment.

[0046] In other words, the plate (11) is made of a metal material and has a relatively low coefficient of thermal expansion, so it is less susceptible to thermal deformation. Accordingly, the plate (11) supports the chuck pin portion (specifically, the lower portion of the chuck pin (PN)) in a rotatably manner and may not deform the alignment position of the chuck pin portion (CP) even when exposed to a high-temperature environment.

[0047] Accordingly, the plate (11) supports the lower part of the chuck pin (CP) so that it can rotate even if thermal deformation occurs on the upper cover (10) side in a high-temperature environment, and maintains this state, thereby preventing the problem of the chuck pin (PN) not rotating properly due to the alignment position of the chuck pin (CP) being disturbed.

[0048] The spin chuck (SC) is installed by inserting a chuck pin (CP) into the first and second through-holes (H1, H2) that are connected between the upper cover (10) and the plate (11) while supporting the lower part of the upper cover (10) with the plate (11) by joining the plate (11) to the lower part of the upper cover (10).

[0049] Referring to FIGS. 2 and 3, the upper cover (10) is configured to include a flat portion (10a) in which a plurality of first through holes (H1) are formed, and an extension portion (10b) extending downward from the edge of the flat portion (10a).

[0050] The flat portion (10a) is preferably configured in a shape having a circular cross-sectional shape. The first through hole (H1) is provided on the outer portion of the flat portion (10a). Preferably, a plurality of first through holes (H1) are provided, and are provided at a distance apart from each other in the circumferential direction.

[0051] The upper cover (10) has a partition wall portion (10c) that protrudes from the upper surface of the flat portion (10a), which is the upper surface of the upper cover (10), while forming an opening of the first through hole (H1) around the first through hole (H1) formed in the flat portion (10a). The partition wall portion (10c) forms the opening of the first through hole (H1) and protrudes from the upper surface of the flat portion (10a), thereby forming a step between the opening of the first through hole (H1) and the upper surface of the upper cover (10).

[0052] The upper cover (10) may preferably have a groove formed concavely on the upper portion of the partition wall portion (10c). The concave groove formed on the partition wall portion (10c) may provide a space for a sealing member (SL) that seals between the chuck pin portion (CP) and the upper cover (10).

[0053] The flat portion (10a) is provided with a buffer portion (10d) that is formed concavely along the circumferential direction. The buffer portion (10d) is preferably provided on the inner side of the outer portion of the flat portion (10a) and may be provided radially inward from the first through hole (H1).

[0054] The buffer portion (10d) may be formed concavely on the upper surface of the flat portion (10a) with a radial distance therebetween, and may be formed concavely on the lower surface of the flat portion (10a) with a radial distance therebetween. The buffer portion (10d) may be formed concavely on the upper and lower surfaces of the flat portion (10a), and may be formed to intersect in the upper and lower directions.

[0055] Specifically, the buffer portions (10d) formed on the upper surface of the flat portion (10a) are provided with a radial distance apart from each other, and the buffer portions (10d) formed on the lower surface of the flat portion (10a) are provided between positions corresponding to the distance between the buffer portions (10d) formed on the upper surface of the flat portion (10a). In addition, the buffer portions (10d) formed on the lower surface of the flat portion (10a) are provided with a radial distance apart from each other, and the buffer portions (10d) formed on the upper surface of the flat portion (10a) are provided between positions corresponding to the distance between the buffer portions (10d) formed on the lower surface of the flat portion (10a).

[0056] Accordingly, the buffer portion (10d) formed on the upper surface of the flat portion (10a) and the buffer portion (10d) formed on the lower surface of the flat portion (10a) may not be provided in positions corresponding to each other in the upper and lower directions, but may be provided in a form that intersects in the upper and lower directions.

[0057] Alternatively, the buffer portion (10d) may be formed only on one surface of the flat portion (10a). In this case, the buffer portion (10d) may preferably be formed only on the upper surface of the flat portion (10a).

[0058] The upper cover (10) is provided with a buffer portion (10d), so that even if thermal expansion occurs in a high-temperature environment, the first through-hole (H1) for inserting the chuck pin portion (CP) can be prevented from being thermally deformed.

[0059] To explain in detail, the spin chuck (SC) inserts a chuck pin (CP) into a first through-hole (H1) of the upper cover (10). When the upper cover (10) undergoes thermal expansion and thermal deformation in a high-temperature environment, the first through-hole (H1) into which the chuck pin (CP) is inserted undergoes thermal deformation and can pressurize the chuck pin (CP).

[0060] The spin chuck (SC) of the present invention has a groove-shaped empty space that is continuously formed concavely in the circumferential direction within a distance from the central axis of the upper cover (10) to the first through-hole (H1) by providing a buffer portion (10d) on the upper cover (10). As a result, the spin chuck (SC) allows relatively thermal deformation in the empty space by the buffer portion (10d) when the upper cover (10) is thermally deformed, and minimizes thermal deformation from the central axis of the upper cover (10) toward the first through-hole (H1), thereby minimizing thermal deformation of the first through-hole (H1). Accordingly, the spin chuck (SC) can prevent the problem of the first through-hole (H1) being thermally deformed and pressurizing the chuck pin portion (CP).

[0061] The chuck pin (CP) is installed in the upper cover (10) through the first through hole (H1).

[0062] The chuck pin portion (CP) is configured to include a chuck pin (PN) that penetrates the first through hole (H1) so that the upper portion protrudes more than the upper cover (10), a bushing member (22) that is coupled to the outer side of the middle portion of the chuck pin (PN), and a spacing member (23) that is interposed between the chuck pin (PN) and the bushing member (22).

[0063] The chuck pin (PN) is inserted into the inside of the first through hole (H1). The chuck pin (PN) is provided with its upper portion protruding from the first through hole (H1). The chuck pin (PN) rotates by the chuck pin driving unit (30).

[0064] A bushing member (22) is coupled to the outside of the chuck pin (PN). Preferably, the bushing member (22) is provided on the inside of the first through-hole (H1), but is not in contact with the inner wall (IW) of the first through-hole (H1) and is coupled to the outside of the middle portion of the chuck pin (PN) located on the inside of the first through-hole (H1) while having a distance (DS). Since the bushing member (22) is provided at a distance (DS) from the inner wall (IW) of the first through-hole (H1), the chuck pin portion (CP) is installed on the upper cover (10) while having a distance (DS) from the inner wall (IW) of the first through-hole (H1) and does not directly contact the upper cover (10).

[0065] The bushing member (22) is configured to include a body portion (22a) in which a through hole is formed and a flange portion (22b) provided on the upper portion of the body portion (22a). The middle portion of the chuck pin (PN) is located in the through hole of the body portion (22a) of the bushing member (22). The spin chuck (SC) may have a spacing member (23) between the middle portion of the bushing member (22) and the chuck pin (PN). The spacing member (23) may be interposed in the gap existing between the bushing member (22) and the chuck pin (PN) on the inside of the bushing member (22).

[0066] The bushing member (22) is provided with a body portion (22a) on the inside of the first through hole (H1) and a flange portion (22b) positioned to protrude beyond the first through hole (H1) so as to correspond to the partition wall portion (10c) of the upper cover (10) forming the opening of the first through hole (H1).

[0067] Accordingly, the bushing member (22) provides a function of supporting the chuck pin (PN) so that it can rotate inside the first through-hole (H1). The spin chuck (SC) can prevent the problem of the upper cover (10) directly pressing and damaging the chuck pin portion (CP) due to thermal expansion by providing the bushing member (22) in a non-contact state with the inner wall (IW) of the first through-hole (H1) at a distance (DS).

[0068] A sealing member (SL) is provided in a concave groove formed on the upper portion of the partition wall portion (10c). Accordingly, the sealing member (SL) is provided between the flange portion (22b) of the bushing member (22) and the partition wall portion (10c). The spin chuck (SC) is formed such that the sealing member (SL) is provided between the bushing member (22) and the partition wall portion (10c), and the sealing member (SL) is positioned between the chuck pin portion (CP) inserted into the first through-hole (H1) and the upper cover (10). As a result, the spin chuck (SC) can prevent the problem of the cleaning liquid penetrating into the inside of the first through-hole (H1) and damaging the chuck pin portion (CP).

[0069] A receiving groove (24a) is formed at the lower part of the outer portion of the upper portion of the protruding chuck pin (PN) to receive a flange portion (22b) of a bushing member (22). As the chuck pin (PN) receives the flange portion (22b) in the receiving groove (24a) and is coupled to the upper portion of the bushing member (22), a partition wall portion (10c) corresponding to the flange portion (22b) is also received on the inner side of the receiving groove (24a).

[0070] The spin chuck (SC) forms a buffer portion (10d) in the upper cover (10) and forms a distance (DS) between the first through hole (H1) and the chuck pin portion (CP) to minimize thermal deformation of the first through hole (H1), thereby preventing the upper portion of the chuck pin portion (CP) from being affected by thermal influence. In addition, a plate (11) having relatively little thermal deformation is provided in the lower portion of the upper cover (10) to support and fix the lower portion of the chuck pin portion (CP) so as to be rotatable, thereby preventing the lower portion of the chuck pin portion (CP) from being affected by thermal influence.

[0071] In other words, the spin chuck (SC) can prevent the upper part of the chuck pin part (CP) from being thermally affected by the buffer part (10d) and the distance DS between the upper part of the chuck pin part (CP) inside the first through hole (H1) and the first through hole (H1) while allowing thermal deformation of the upper cover (10). Here, the thermal effect refers to the upper part of the chuck pin part (CP) located in the first chuck through hole (H1) being pressed and the positional alignment being disturbed due to thermal deformation of the first through hole (H1) caused by thermal expansion of the upper cover (10).

[0072] In addition, the spin chuck (SC) supports the lower part of the chuck pin part (CP) in a rotatably manner with a metal plate (11). As a result, even if thermal deformation occurs on the upper cover (10) side where the upper part of the chuck pin part (CP) is located, the lower plate (11) of the spin chuck (SC) undergoes relatively less thermal deformation, so that the positional alignment of the lower part of the chuck pin part (CP) is not disturbed. The spin chuck (SC) can prevent abnormal rotation problems of the chuck pin part (CP) (problems of not properly rotating in the direction of fixing or releasing the substrate (W)) without causing thermal influence on the lower part of the chuck pin part (CP) through the metal plate (11). Here, the thermal effect refers to the fact that the through hole where the lower part of the chuck pin (CP) is located is thermally deformed by a material with a large thermal expansion coefficient and large thermal deformation, thereby pressurizing the bearing part (12), and thus the lower part of the chuck pin (CP) is pressed and does not rotate properly by the chuck pin drive part (30).

[0073] The plate (11) has at least one protrusion (11a) protruding from the upper surface of the plate (11).

[0074] The protrusion (11a) is inserted into a concave portion (10e) formed concavely from the lower surface of the upper cover (10). The protrusion (11a) may be inserted in a form in which at least one side is not in contact with the inner wall of the concave portion (10e) with a distance (DS') from at least one side on the inner side of the concave portion (10e), or may be inserted in a form in which it is in contact with the entire inner wall of the concave portion (10e).

[0075] Figure 2 is a drawing showing a state in which the protrusion (11a) of the plate (11) is inserted with a distance (DS') from at least one side inside the concave portion (10e) of the upper cover (10).

[0076] As an example, the spin chuck (SC) may be provided with one concave portion (10e) between the first through hole (H1) of the upper cover (10) and the buffer portion (10d) located at the radially outermost side. The plate (11) may be provided with a protrusion (11a) around the second through hole (H2) to correspond to the concave portion (10e) of the upper cover (10).

[0077] The plate (11) is coupled to the lower part of the upper cover (10) with the bearing part (12) coupled to the inner side of the second through hole (H2) and the lower part of the chuck pin (PN) provided on the inner side of the bearing part (12), and the protrusion (11a) inserted into the concave part (10e). At this time, the protrusion (11a) may be provided to have a width dimension smaller than the width dimension of the concave part (10e) and may be provided with a distance (DS') from at least one side of the inner side of the concave part (10e).

[0078] In Fig. 2, the protrusion (11a) can be inserted with a distance (DS') apart from the other side (right side in the drawing) of the protrusion (11a) so that one side (left side in the drawing) comes into contact with the inner wall of the concave part (10e) and the other side (right side in the drawing) does not come into contact with the inner wall of the concave part (10e).

[0079] The plate (11) can be joined to the lower part of the upper cover (10) in a form in which the protrusion (11a) is inserted into the concave portion (10e) of the upper cover (10), but can be joined with a distance (DS') between the protrusion (11a) and the concave portion (10e) on the inside of the concave portion (10e).

[0080] The spin chuck (SC) can provide a space that allows thermal deformation of the upper cover (10) through a distance (DS') between the concave portion (10e) and the protrusion portion (11a).

[0081] Alternatively, the spin chuck (SC) may be connected to the lower portion of the upper cover (10) by inserting the protrusion (11a) into the concave portion (10e) in a form that makes contact with the entire inner wall of the concave portion (10e).

[0082] Figure 4 is a drawing showing a state in which the protrusion (11a) is inserted in a form in which it contacts the entire inner wall of the concave portion (10e).

[0083] In this case, the spin chuck (SC) may, for example, form a buffer portion (10d) on the upper surface of the upper cover (10) and form a plurality of concave portions (10e) on the lower surface of the upper cover (10). In Fig. 3, three concave portions (10e) are provided.

[0084] The plate (11) has three protrusions (11a) corresponding to the concave portions (10e).

[0085] The protrusion (11a) is provided in a form that completely fills the groove forming the concave portion (10e) so that it comes into contact with the entire inner wall of the concave portion (10e). Accordingly, when the protrusion (11a) is inserted into the concave portion (10e), there is no separation distance between the inner wall of the concave portion (10e) and the protrusion (11a) on the inside of the concave portion (10e).

[0086] The spin chuck (SC) has a plurality of concave portions (10e) on the lower surface of the upper cover (10) and a plurality of protrusions (11a) on the upper surface of the plate (11), so that the plate (11) can be joined to the lower portion of the upper cover (10) by inserting the protrusions (11a) into the concave portions (10e). At this time, the protrusions (11a) on the inner side of the concave portions (10e) can be inserted while making contact with the entire inner wall of the concave portions (10e) without leaving a gap.

[0087] The spin chuck (SC) can minimize thermal deformation of the upper cover (10) in a high-temperature environment by inserting the protrusion (11a) of the plate (11) with relatively little thermal deformation into the concave portion (10e) of the upper cover (10) and joining the plate (11) to the lower portion of the upper cover (10).

[0088] Specifically, the spin chuck (SC) allows relatively thermal deformation through the buffer portion (10d) formed on the upper surface of the upper cover (10), and minimizes thermal deformation from the upper portion of the upper cover (10) toward the first through hole (H1), thereby minimizing thermal deformation of the first through hole (H1).

[0089] In addition, the spin chuck (SC) forms a concave portion (10e) on the lower surface of the upper cover (10) and inserts a protrusion (11a) formed on the upper surface of the plate (11) into the concave portion (10e) to join the upper cover (10) and the plate (11). At this time, the protrusion (11a) can be inserted in a form in which it makes full contact with the inner wall of the concave portion (10e) without leaving a gap distance from the inner side of the concave portion (10e). The plate (11) is made of a material with relatively little thermal deformation (metal material (specifically, aluminum)). The spin chuck (SC) can prevent the first through-hole (H1) from being thermally deformed at the lower portion of the upper cover (10) by minimizing thermal deformation of the concave portion (10e) through the protrusion (11a).

[0090] In FIG. 2, FIG. 5 and FIG. 6, as an example, a spin chuck (SC) is provided with buffer portions (10d) on the upper and lower surfaces of the upper cover (10), and one concave portion (10e) provided on the lower surface of the upper cover (10) and one protrusion (11a) provided on the plate (11) correspond to each other to couple the plate (11) to the lower surface of the upper cover (10).

[0091] Meanwhile, in FIG. 7, as an example, a spin chuck (SC) is provided with a buffer portion (10d) on the upper surface of the upper cover (10) and a plurality of concave portions (10e) on the lower surface, such that the concave portions (10e) and the protrusion portions (11a) correspond to each other and a plate (11) is coupled to the lower portion of the upper cover (10).

[0092] The spin chuck (SC) may be equipped with an insert (40).

[0093] The insert (40) can preferably be coupled to the upper cover (10). The insert (40) is coupled to the upper cover (10) and is exposed toward the first through hole (H1). In this case, the insert (40) may be provided in a space formed by radially expanding the first through hole (H1) of the upper cover (10) and may be provided at a distance from the outside of the bush member (22) of the chuck pin portion (CP) located on the inside of the first through hole (H1).

[0094] The spin chuck (SC) preferably has a sealing member (SL) in a concave groove formed in the insert (40) so as to have the sealing member (SL) at a distance (DS) between the insert (40) and the bushing member (22).

[0095] In other words, the spin chuck (SC) has a sealing member (SL) between the bushing member (22) and the insert (40), and has an insert (40) between the sealing member (SL) and the upper cover (10).

[0096] The insert (40) has a coefficient of thermal expansion smaller than that of the upper cover (10) and larger than that of the plate (11). The insert (40) may preferably be made of polychlorotrifluoroethylene (PCTFE) material. For example, the insert (40) may be made of PCTFE material, the upper cover (10) may be made of Teflon material, and the plate (11) may be made of aluminum material.

[0097] Accordingly, since the thermal deformation of the insert (40) is small, even if the upper cover (10) is thermally deformed, the sealing effect of the sealing member (SL) provided between the insert (40) and the bushing member (22) can be prevented from being reduced.

[0098] Referring to Fig. 5, the insert (40) may be provided so that, for example, at least a portion (lower portion) is coupled to the second through-hole (H2) of the plate (11), and the remaining portion (upper portion) is coupled to the first through-hole (H1) of the upper cover (10). Since at least a portion of the insert (40) is coupled to the plate (11) having a relatively small coefficient of thermal expansion, it is possible to minimize positional changes of the insert (40) under high-temperature conditions.

[0099] Referring to FIG. 5, the spin chuck (SC) can expand at least a portion of the first through hole (H1) of the upper cover (10) in the radial direction and expand at least a portion of the second through hole (H2) of the lower cover (10, 13) in the radial direction. The first through hole (H1) and the second through hole (H2) can expand in the radial direction by the same amount.

[0100] The spin chuck (SC) can be provided with an insert (40) in a space formed by expanding each of the first and second through holes (H1, H2) in the radial direction.

[0101] Specifically, the upper portion of the insert (40) is positioned in the expanded space of the first through hole (H1) and can be coupled to the upper cover (10). The insert (40) can be coupled to the upper cover (10) in a fitting manner.

[0102] The lower part of the insert (40) can be coupled to the plate (11) so as to be positioned on the outer side of the bearing part (12). The insert (40) can be coupled by turning to the screw thread formed on the inner wall of the second through hole (H2) expanded through the screw thread formed on the lower outer surface.

[0103] The spin chuck (SC) can be coupled to the upper part of the insert (40) in the first through-hole (H1) of the upper cover (10) while forming a gap distance (DS) between the upper part of the insert (40) and the bushing member (22) included in the middle part of the chuck pin portion (CP).

[0104] The spin chuck (SC) may have a groove formed radially concavely on the upper portion of the insert (40). The spin chuck (SC) has a sealing member (SL) in the concave groove provided in the insert (40). Accordingly, the sealing member (SL) is provided at a distance (DS) between the insert (40) and the bushing member (22).

[0105] The insert (40) is provided on the outer side of the bush member (22) located on the inner side of the first through hole (H1) with the sealing member (SL) interposed therebetween. The spin chuck (SC) can more effectively prevent the problem of the cleaning liquid penetrating between the upper cover (10) and the chuck pin portion (CP) by providing the insert (40) on the outer side of the bush member (22) with the sealing member (SL) interposed therebetween.

[0106] The insert (40) is provided on the outside of the bush member (22) with its upper part joined to the upper cover (10). The upper part of the insert (40) is located on the outside of the body part (22a) of the bush member (22).

[0107] The lower part of the insert (40) is connected to the plate (11) and is provided between the bearing part (12) and the plate (11).

[0108] Accordingly, the insert (40) is provided with its upper part between the bush member (22) and the upper cover (10), and its lower part between the bearing member (12) and the plate (11).

[0109] The lower part of the insert (40) has screw threads formed on the outer surface and can be fixedly connected by turning to the screw threads formed on the plate (11).

[0110] The spin chuck (SC) is provided by coupling the upper portion of the insert (40) to the first through-hole (H1) of the upper cover (10) and coupling the lower portion of the insert (40) to the second through-hole (H2) of the plate (11), thereby preventing the problem of the middle portion of the chuck pin portion (CP) located inside the first through-hole (H1) (including the middle portion of the chuck pin (PN) and the body portion (22a) of the bush member (22)) being pressed by the thermal expansion of the upper cover (10) and the positional alignment being disturbed when the upper cover (10) is thermally deformed.

[0111] In addition, the bearing part (12) located inside the second through hole (H2) is pressed by thermal deformation of the plate (11), and the problem of the lower part of the chuck pin (PN) supported to be rotatable by the bearing part (12) being pressed and not rotating properly can be prevented.

[0112] The spin chuck (SC) may be provided with a sealing member (SL) to prevent the cleaning liquid from penetrating into the chuck pin portion (CP) inserted into the first and second through holes (H1, H2).

[0113] Referring to FIGS. 2 and 5, the spin chuck (SC) has a plurality of sealing members (SL).

[0114] The spin chuck (SC) can be provided with, for example, an O-ring-shaped sealing member (SL) in a concave groove formed on the upper portion of the partition wall portion (10c). The sealing member (SL) can be pressed by the flange portion (22b) of the bushing member (22) corresponding to the partition wall portion (10c) to seal the space between the upper cover (10) and the chuck pin portion (CP). By interposing the sealing member (SL) between the partition wall portion (10c) and the flange portion (22b) of the bushing member (22), the spin chuck (SC) can prevent the problem of the cleaning liquid from penetrating into the chuck pin portion (CP) through the stepped portion between the partition wall portion (10c) and the flat portion (10a).

[0115] In addition, the spin chuck (SC) may be provided with an O-ring-shaped sealing member (SL) between the insert (40) and the bushing member (22). In this case, the sealing member (SL) may be provided in a concave groove formed in the insert (40). The sealing member (SL) is compressed between the bushing member (22) and the insert (40), thereby preventing the problem of the cleaning liquid from penetrating between the upper cover (10) and the chuck pin portion (specifically, the middle portion of the chuck pin portion (CP)) and flowing to the lower side of the chuck pin portion (CP).

[0116] Referring to FIGS. 6, 8 and 9, the sealing member (SL') may be configured such that the upper part is composed of an O-ring part (OR) and the lower part is composed of a spring part (SR), so that the O-ring part (OR) and the spring part (SR) are integrally combined.

[0117] The sealing member (SL') formed by integrally combining an O-ring (OR) and a spring (SR) may be formed of a Teflon material or a fluororesin material. Since the sealing member (SL') is formed of a Teflon material or a fluororesin material rather than a rubber material, the slipperiness at the interface is improved, making it possible to reliably maintain a contact state.

[0118] The sealing member (SL') that integrally combines an O-ring (OR) and a spring (SR) allows the upper O-ring (OR) to flexibly move in the z-axis direction through the lower spring (SR). Through this, even if the upper cover (10) undergoes thermal expansion in the z-axis direction, the space between the flange (22b) and the bulkhead (10c) can be completely sealed through the upper O-ring (OR), and the problem of cleaning liquid penetrating toward the chuck pin (CP) can be more effectively prevented.

[0119] The spin chuck (SC) has a structure in which a sealing member (SL') that integrally combines an O-ring member (OR) and a spring member (SR) in a concave groove of a partition wall member (10c) is provided, and a first sealing member (SL1) may be additionally provided on the upper portion of a bushing member (22), and a second sealing member (SL2) may be additionally provided at a distance (DS) between the bushing member (22) and the first through hole (H1).

[0120] Referring to Fig. 7, the chuck pin (PN) may be provided with a first sealing groove (SH1) that is formed concavely from the bottom surface of a receiving groove (24a) that receives a flange portion (22b) of a bushing member (22). The spin chuck (SC) is provided with a first sealing member (SL1) in the first sealing groove (SH1).

[0121] Due to this, the first sealing member (SL1) is positioned between the chuck pin (PN) and the flange portion (22b) of the bush member (22), and the cleaning liquid can be prevented from penetrating through the interface between the groove wall portion (24b) of the receiving groove (24a) and the flange portion (22b) of the bush member (22).

[0122] The spin chuck (SC) may be provided with a second sealing groove (SH2) formed radially concavely on at least a portion of the inner wall of the first through hole (H1) corresponding to the body portion (22a) of the bush member (22).

[0123] The second sealing member (SL2) may be provided in the second sealing groove (SH2) and positioned between the body portion (22a) of the bushing member (22) and the inner wall (IW) of the first through hole (H1), which is provided on the inner side of the first through hole (H1) with a distance (DS) apart from the inner wall (IW) of the first through hole (H1). The second sealing member (SL2) may be pressed between the inner wall of the first through hole (H1) and the body portion (22a) of the bushing member (22), thereby preventing the cleaning liquid from penetrating into the lower portion of the chuck pin portion (CP) (specifically, the lower portion of the chuck pin (PN) positioned in the second through hole (H2)) and the bearing portion (12). There may be a gap (DS) between the body part (22a) of the bushing member (22) and the inner wall (IW) of the first through hole (H1) at the upper and lower portions of the second sealing member (SL2) on the inner side of the first through hole (H1).

[0124] The spin chuck (SC) connects the lower cover (10, 13) to the lower portion of the upper cover (10). The lower cover (10, 13) may be configured to include a lower flat portion (13a) and an upper extension portion (13b) extending upward from the edge of the lower flat portion (13a). The lower cover (10, 13) may be connected to the upper cover (10) by matching the extension portion (10b) and the upper extension portion (13b) of the upper cover (10).

[0125] The spin chuck (SC) has an internal space formed by combining upper and lower covers (10, 13). The chuck pin portion (CP) and the chuck pin driving portion (30) are installed in a state supported by the upper cover (10) and the plate (11) and can be installed in a state floating in the air in the internal space of the spin chuck (SC).

[0126] As described above, according to a preferred embodiment of the present invention, the upper cover (10) having corrosion resistance and / or chemical resistance to the cleaning solution prevents the metal plate (11) from being exposed to the cleaning solution, and at the same time, the plate (11) having little thermal deformation rotatably supports the axis of the chuck pin portion (CP), thereby preventing the problem of the axis of the chuck pin portion (CP) from being tilted even if the upper cover (10) is thermally deformed according to temperature.

[0127] In addition, the upper cover (10) is provided with a buffer portion (10d) to prepare for thermal deformation of the upper cover (10), and the upper cover (10) and the plate (11) are coupled to each other through a concave portion (10e) and a protruding portion (11a), so that even if the upper cover (10) is thermally deformed in the x and y-axis directions (horizontal direction as a surface reflection direction of the wafer), thermal deformation is minimized around the chuck pin portion (CP), thereby preventing the sealing effect by the sealing member from being reduced.

[0128] In addition, by providing a sealing member (SL') that integrally combines an O-ring (OR) and a spring (SR) in a concave groove of the bulkhead (10c), even if the upper cover (10) is thermally deformed in the z-axis direction (the direction perpendicular to the surface direction of the wafer), the space between the flange (22b) and the bulkhead (10c) can be completely sealed through the O-ring (OR) on the upper side, and the problem of the cleaning liquid penetrating into the chuck pin (CP) side can be more effectively blocked.

[0129] In addition, by protruding a partition wall portion (10c) on the upper cover (10) and providing a groove wall portion (24b) to surround the partition wall portion (10c) on the outside of the partition wall portion (10c), the cleaning liquid is prevented from flowing into the chuck pin (PN). In addition, by providing a sealing member between the partition wall portion (10c) of the upper cover (10) and the flange portion (22b) of the bush member (22) and / or between the flange portion (22b) of the bush member (22) and the chuck pin (PN), the cleaning liquid is prevented from penetrating into the chuck pin (PN). Through this, even if the upper cover (10) is thermally deformed depending on the temperature, the cleaning liquid can be reliably prevented from penetrating into the chuck pin (PN).

[0130] In addition, by providing a sealing member between the insert (40) and the bushing member (22) having a smaller thermal expansion coefficient than the upper cover (10), even if the cleaning liquid penetrates into the chuck pin (PN), the sealing member blocks the liquid from flowing into the lower portion thereof, thereby preventing it from reaching the rotary drive component of the chuck pin (PN) provided thereunder.

[0131] The above-described preferred embodiment can be more usefully applied to a high-temperature rotary single chuck pin type spin chuck product.

[0132] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0133] [Explanation of symbols]

[0134] *Major symbols in the drawing

[0135] 10: Top cover

[0136] 11: Plate

[0137] 13: Lower cover

[0138] CP: Chuck Finbu

[0139] W: substrate

[0140] SC: Spin Chuck

Claims

1. Top cover; A chuck pin portion installed in the upper cover so as to protrude from the upper cover; and It includes a metal plate that is connected to the lower part of the upper cover and supports the chuck pin portion so that it can rotate; A spin chuck that secures the axis of the chuck pin portion with the plate having relatively little thermal deformation.

2. In paragraph 1, The above upper cover has a first through hole into which the chuck pin portion is inserted, A spin chuck in which the above-mentioned chuck pin portion is provided at a distance from the inner wall of the first through-hole within the first through-hole and does not directly contact the upper cover.

3. In paragraph 1, The upper cover has a partition wall portion that protrudes upward from the upper surface of the upper cover around the first through hole of the upper cover, A spin chuck, which positions a sealing member between the chuck pin part and the upper cover, the sealing member being inserted into the first through hole, by interposing the sealing member between the bulkhead part and the chuck pin part.

4. In paragraph 3, The above sealing member is a spin chuck in the form of an integral unit, with the upper part composed of an O-ring and the lower part composed of a spring.

5. In paragraph 1, The above upper cover, A flat portion having a plurality of first through holes formed into which the chuck pin portion is inserted; and Including an extension extending downward from the edge of the above flat portion; A spin chuck including a buffer portion formed concavely along the circumferential direction on the above flat portion.

6. In paragraph 1, The above plate has a protrusion protruding from its upper surface, The upper cover has a concave portion formed concavely from its lower surface, A spin chuck in which the above protrusion is inserted into the above concave portion, but is inserted with a gap distance at least on one side.

7. In paragraph 1, An insert coupled to the upper cover and exposed toward the first through hole; A bushing member coupled to the outer side of the chuck pin; and A spin chuck including a sealing member provided between the insert and the bushing member.

Images