Door opening and closing device of load port module

Abstract

The present invention provides a door opening / closing device of a load port module, comprising: a load port portion comprising a holder on which a FOUP is seated, and a support board which is arranged perpendicularly to the holder to be supported by an installation surface and having an opening formed in one side direction of the FOUP; a door unit selectively opening / closing the opening; and an opening / closing operation unit which opens / closes the door unit on the load port portion, wherein the opening / closing operation unit opens the door unit after tilting the door unit by a preset angle on the opening and linearly moving the door unit.

Description

Door opening / closing device of the load port module

[0001] The present invention relates to a door opening / closing device of a load port module, and more particularly, to a door opening / closing device of a connected load port module that can open / close a door provided in a load port module for loading or unloading a foup through an equipment front end module (EFEM).

[0002] Typically, semiconductor wafers are processed through deposition, exposure, etching, and cleaning processes. In other words, semiconductors are manufactured by performing various processing steps on wafers.

[0003] Recently, semiconductor manufacturing has been progressing with methods that enhance the efficiency of the processing process while also increasing the yield of the semiconductor manufacturing process. For example, highly integrated semiconductors are being produced by patterning microscopic circuits on wafers.

[0004] However, as fine patterning is processed on the circuit, short circuits caused by molecular contaminants can easily occur. These short circuits are emerging as a problem that reduces semiconductor yield. Therefore, active research and development is underway to develop devices that enhance cleanliness in each process to maximize semiconductor yield.

[0005] For example, a device has been developed that fills the interior of the EFEM, which connects the load port module (LPM) and the transfer module, with nitrogen and then naturally creates a nitrogen atmosphere around the FOUP mounted on the load port module (LPM).

[0006] However, in order to transfer the wafer mounted inside the hopper from the load port module (LPM) to the transfer chamber, the door of the load port module (LPM) must be slid and then vertically moved. At this time, both an actuator for sliding the door and an actuator for vertically moving the door must be provided, and as the size of the door increases, the problem of increasing the capacity of the actuators is being raised.

[0007] The present invention is intended to solve such a problem, and more specifically, to provide a door opening / closing device for a load port module that can open / close a door provided in a load port module using a single actuator, and can simultaneously perform tilting and sliding movements during the door opening process.

[0008] The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those skilled in the art from the description below.

[0009] In order to achieve the above object, the present invention provides a door opening / closing device of a load port module, including a stand on which a hopper is mounted, a support positioned vertically to the stand and supported on an installation surface, and having an opening formed in one side direction of the hopper; a door portion for selectively opening / closing the opening; and an opening / closing operating portion for opening / closing the door portion on the load port portion; wherein the opening / closing operating portion tilts the door portion at a set angle on the opening portion and then moves it linearly to open it.

[0010] The above opening / closing operating unit may include a linear moving unit that moves the door unit linearly on the load port unit, and a tilting rotating unit that rotates the door unit within a set angle range on the load port unit.

[0011] The tilting rotation part may include a frame part that extends from the lower portion of the door part and is connected to the linear movement part so as to be rotatable, an elastic part that always provides elastic restoring force in the direction in which the door part is opened between the linear movement part and the frame part, and an angle block provided at the front end of the frame part so as to selectively interfere with a roller provided on the support.

[0012] The above angle block may include an inclined surface that comes into contact with the roller during the process of tilting the door part to a set angle for opening from a closed state.

[0013] The above slope can be formed in the range of 30 to 40°.

[0014] The above linear moving part may include a guide member arranged in a vertical direction from the stand, a slider arranged to slide on the guide member and to at least partially penetrate a slit formed in the support, and a power unit that provides power to the slider.

[0015] The above slider may include a rotation axis that connects the tilting rotation part to the linear moving part so that it can rotate, a first stopper positioned above the rotation axis, and a second stopper positioned below the rotation axis.

[0016] The first stopper can elastically contact the frame portion when the door portion is closed, and the second stopper can elastically contact the frame portion when the door portion is opened and the frame portion tilts and rotates at a set angle.

[0017] When the door part is open, the angle formed between the frame part and the virtual vertical line by the second stopper can be formed in the range of 5 to 10°.

[0018] The above angle block can be positioned on the frame portion so that its height can be adjusted.

[0019] Specific details of other embodiments are included in the detailed description and drawings.

[0020] According to the door opening / closing device of the load port module according to an embodiment of the present invention,

[0021] First, the tilting rotation and linear movement of the door part can be implemented using one actuator.

[0022] Second, when the door is opened, the door does not slide horizontally but tilts and rotates first, so the space required for opening the door can be minimized.

[0023] Third, it can be applied to the opening of the door part even with a smaller actuator, so the installation space of the actuator can be minimized.

[0024] Fourth, by implementing the height of the angle block on the frame to be adjustable, it is easy to apply to the size of the roller or to the size of various doors.

[0025] The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

[0026] The above summary, as well as the detailed description of preferred embodiments of the present application described below, will be better understood when read in conjunction with the accompanying drawings. For the purpose of illustrating the present invention, preferred embodiments are depicted in the drawings. However, it should be understood that the present application is not limited to the precise arrangements and means illustrated.

[0027] FIG. 1 is a perspective view schematically illustrating a load port module according to an embodiment of the present invention from the front.

[0028] Fig. 2 is a perspective view showing the door opening / closing device as viewed from the rear of the load port module shown in Fig. 1.

[0029] Figure 3 is a side view showing the door opening / closing device of the load port module shown in Figure 2.

[0030] Fig. 4 is a front view showing the linear moving part of the door opening / closing device of the load port module shown in Fig. 3.

[0031] Fig. 5 is a partially enlarged view showing a tilting rotation part of the door opening / closing device of the load port module shown in Fig. 3.

[0032] Fig. 6 is a side view showing a tilted state with the door part partially opened in the load port module shown in Fig. 2.

[0033] Fig. 7 is a partially enlarged view showing the door opening / closing device of the load port module shown in Fig. 6.

[0034] Figure 8 is a reference drawing showing a state in which the door part of the load port module shown in Figure 2 is fully opened.

[0035] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention, and methods for achieving them, will become clear with reference to the embodiments described in detail below together with the attached drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

[0036] The present invention can have various modifications and embodiments, and specific embodiments are illustrated and described in the drawings.

[0037] However, this is not intended to limit the present invention to a specific embodiment, but should be understood to include all modifications, equivalents, or substitutes included in the spirit and technical scope of the present invention.

[0038] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms.

[0039] The above terms are used solely to distinguish one component from another.

[0040] For example, without departing from the scope of the present invention, the second component may be referred to as the first component, and similarly, the first component may also be referred to as the second component.

[0041] The term and / or includes any combination of a plurality of related described items or any one of a plurality of related described items.

[0042] When it is said that a component is "connected" or "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but there may also be other components in between.

[0043] On the other hand, when it is said that a component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0044] The terminology used in this application is for the purpose of describing specific embodiments only and is not intended to limit the present invention.

[0045] Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0046] In this application, terms such as “include” or “have” are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0047] Hereinafter, embodiments will be described in detail with reference to the attached drawings. Regardless of the drawing numbers, identical or corresponding components are given the same reference numbers, and redundant descriptions thereof will be omitted.

[0048] FIG. 1 is a perspective view schematically illustrating a load port module according to an embodiment of the present invention from the front, and FIG. 2 is a perspective view illustrating a state in which a door opening / closing device is viewed from the rear of the load port module illustrated in FIG. 1.

[0049] Referring to FIGS. 1 and 2, a load port module (10) according to an embodiment of the present invention may include a load port portion (100), a door portion (200), and an opening / closing operation portion (300).

[0050] First, the load port module (10) is positioned in front of the EFEM to check information on wafers (not shown) stored inside the FOUP (130), and also allows the wafer to be returned by opening the door (200) so that the FOUP (130) and the door (200) are in close contact with each other. In FIGS. 1 and 2, only the load port module (10) is illustrated, and in order to express the opening / closing operation unit (300) at the rear of the load port module (10) as in FIG. 2, separate components of the EFEM (e.g., ATM robot, aligner, etc.) are omitted.

[0051] The load port portion (100) may include a stand (110) and a support (120).

[0052] The stand (110) may be an area where the hopper (130) is placed. The stand (110) may be arranged horizontally.

[0053] The support (120) is arranged vertically on one side of the stand (110) and can be supported on the installation surface. An opening (121) can be formed in the upper region of the stand (110) on the support (120) to correspond to the open region of the hopper (130). Detailed components of the opening / closing operating unit (300) can be arranged in the lower region of the stand (110) on the support (120).

[0054] Although the drawing illustrates and describes one load port module (10), multiple load port modules may be provided.

[0055] Additionally, a door part (200) may be arranged on the back surface of the support (120) to correspond to the opening part (121). The door part (200) may open the opening part (121) by tilting and moving linearly backward with respect to the support (120).

[0056] In addition, the opening / closing operation unit (300) can tilt and linearly move the door part (200). At this time, the door part (200) rotates while tilting at a set angle on the support (120) and then linearly moves. Since the tilting and linear movement operations are performed organically and simultaneously using one actuator, the number of actuators can be reduced, and also, by improving the tilting mechanism of the door part (200) through the opening / closing operation unit (300), the size of the actuator can be prevented from linearly increasing as the size of the door part (200) increases.

[0057] Below, the structure and operation effect of the opening / closing operation unit (300) will be described in detail.

[0058] FIG. 3 is a side view showing the door opening / closing device of the load port module shown in FIG. 2, FIG. 4 is a front view showing the linear moving part (310) of the door opening / closing device of the load port module shown in FIG. 3, and FIG. 5 is a partially enlarged view showing the tilting rotation part (320) of the door opening / closing device of the load port module shown in FIG. 3.

[0059] Referring to FIG. 3, the opening / closing operation unit (300) shown in FIG. 2 may include a linear moving unit (310) and a tilting rotating unit (320). At this time, the cover (111) may be removed from the lower portion of the load port module (10) of FIGS. 3 and 4.

[0060] The linear moving part (310) can be provided on one side with respect to the support (120) of the load port part (100), and the tilting rotating part (320) can be provided on the other side with respect to the support (120).

[0061] Referring to FIG. 4, the linear moving part (310) may include a guide member (311), a slider (312), and a power unit.

[0062] Two guide members (311) may be provided side by side along the vertical direction on one side of the support member (120). For example, an LM guide may be applied as the guide member (311).

[0063] Additionally, the slider (312) can be installed on the guide members (311) on both sides so as to be able to move linearly along the length direction of the guide member (311).

[0064] And, the power unit may include an actuator (316) and a shaft (313).

[0065] The actuator (316) can provide power to the shaft (313).

[0066] The shaft (313) can be positioned to interfere with the slider (312).

[0067] For example, the shaft (313) may rotate by receiving power from an actuator (316) which is a motor, and a connecting member (314) may be coupled to the shaft (313) so as to mesh with it. The shaft (313) is connected so as to penetrate the connecting member (314), and a male screw and a female screw or a male gear and a female gear may be formed, respectively, and the connecting member (314) may convert the rotational motion of the shaft (313) into a linear motion according to the rotation of the shaft (313). The connecting member (314) may be coupled to a slider (312), and the connecting member (314) and the slider (312) may be arranged to move linearly on the guide member (311) according to the rotation of the shaft (313).

[0068] At this time, the support (120) may be provided with a slit (122) formed to penetrate between the guide members (311) on both sides. The slit (122) may be formed parallel to the longitudinal direction of the guide member (311), and may be formed in at least a height range in which the door part (200) is spaced from the opening (121) or a range greater than this.

[0069] Accordingly, a portion of the slider (312) may be arranged to penetrate the slit (122) and be coupled with the tilting rotation part (320).

[0070] When power is applied to the actuator (316), the shaft (313) can be rotated in one direction to lower the slider (312), and the shaft (313) can be rotated in the other direction to raise the slider (312). At this time, when the slider (312) is lowered, the tilting rotation part (320) connected to it can be lowered simultaneously, and when it is raised, the tilting rotation part (320) can be raised simultaneously.

[0071] Referring to FIG. 5, the tilting rotation part (320) may include a frame part (321), an elastic part (322), and an angle block (323).

[0072] The frame portion (321) can be coupled to the door portion (200) at one end, and the central region can be coupled to the rotation axis (317) that penetrates the slit (122) from the slider (312) and is exposed on the other side of the support (120). Accordingly, the frame portion (321) can be tilted within a set angle range centered on the rotation axis (317), and at the same time, the door portion (200) can be tilted.

[0073] The frame portion (321) may be formed into a single structure by assembling multiple frames. Of course, the frame portion (321) may also be implemented through a single steel pipe structure. In the present embodiment, the frame portion (321) may be formed by two side plates facing each other being joined to the door portion (200) and the rotation shaft (317), and rear frames covering the rear surfaces of both side plates being joined to form the rear surface between the side plates.

[0074] In addition, the elastic member (322) may have one end coupled to the slider (312) and the other end coupled to the frame member (321). The elastic member (322) may provide an elastic restoring force that constantly pulls the frame member (321) with respect to the slider (312).

[0075] At this time, the other end of the elastic part (322) can be coupled closer to the other end of the frame part (321) with respect to the rotation axis (317) of the slider (312) as the center. Therefore, with reference to FIG. 5, tension can be provided so that the frame part (321) rotates clockwise with respect to the rotation axis (317) in the absence of an external force. In FIG. 5, since the angle block (323) and the roller (140) are in contact, the elastic part (322) is shown in a state where it is tensioned at a predetermined interval between the slider (312) and the frame part (321).

[0076] An angle block (323) can be coupled to the other end of the frame portion (321).

[0077] The angle block (323) can come into contact with the roller (140) provided on the back surface of the support (120). The angle block (323) can participate in tilting rotation during the process of opening the door part (200) with the opening part (121) closed, or conversely, during the process of closing the door part (200).

[0078] When the door part (200) closes the opening (121), the angle block (323) can be positioned so that the inclined surface (324) is in close contact with the roller (140).

[0079] In the closed state of the door part (200) in which the frame part (321) is arranged perpendicularly to the installation surface, the angle (θ1) of the inclined surface (324) of the angle block (323) can be formed in a range of about 30 to 40°. More preferably, the angle (θ1) formed by the inclined surface (324) with respect to the installation surface in the state of FIG. 5 can be formed to be about 30°. Of course, the angle (θ1) of the inclined surface (324) can be changed depending on the overall length of the frame part (321), the distance between the rotation axis (317) and the angle block (323), and the tilting angle range of the door part (200).

[0080] And, the linear moving part (310) may include a first stopper (315a) and a second stopper (315b).

[0081] The first stopper (315a) and the second stopper (315b) may be positioned to protrude toward the frame portion (321) through the slit (122) on the slider (312). Alternatively, each stopper (315a, 315b) may be additionally provided on a protrusion extending toward the frame portion (321) on the slider (312) so as to selectively contact the frame portion (321).

[0082] The first stopper (315a) may be positioned to correspond to an area closer to one end of the frame portion (321) with respect to the rotation axis (317) of the slider (312), and the second stopper (315b) may be positioned to correspond to an area closer to the other end of the frame portion (321) with respect to the rotation axis (317) of the slider (312). Accordingly, with reference to FIG. 5, the first stopper (315a) may be positioned above the rotation axis (317), and the second stopper (315b) may be positioned below the rotation axis (317).

[0083] When the door part (200) is closed, the tip of the first stopper (315a) can be positioned to come into contact with the frame part (321).

[0084] And, when the door part (200) is open, the tip of the second stopper (315b) can be positioned to come into contact with the frame part (321).

[0085] The first stopper (315a) and the second stopper (315b) may have a shock absorber function, and thus may provide a function of absorbing a predetermined shock during the process in which each stopper (315a, 315b) comes into contact with the frame portion (321).

[0086] In addition, the first stopper (315a) can absorb shock by contacting the frame portion (321) when the door portion (200) is in close contact with the opening portion (121), i.e., when the door portion (200) is completely closed, and limit the rotation angle of the frame portion (321) in the counterclockwise direction.

[0087] Fig. 6 is a side view showing a tilted state with the door part of the load port module shown in Fig. 2 partially opened, and Fig. 7 is a partially enlarged view showing the door opening / closing device of the load port module shown in Fig. 6.

[0088] When the actuator (316) is operated to open the door (200) and the slider (312) is lowered, the frame (321) can be lowered and tilted and rotated.

[0089] When the frame part (321) is lowered in this way, the angle block (323) can be lowered at the same time, and the inclined surface (324) of the angle block (323) in contact with the roller (140) can rotate toward the back surface of the support (120) to achieve tilting. The angle (θ1) of the inclined surface (324) with respect to the installation surface decreases and rotates to achieve tilting.

[0090] That is, as shown in Fig. 7, the frame part (321) is subjected to tension to rotate clockwise around the rotation axis (317) by the elastic part (322) during the process of opening the door part (200), and further, as the contact angle between the angle block (323) and the roller (140) decreases, tilting rotation is performed along with the lowering of the door part (200) and the opening / closing operation part (300).

[0091] At this time, since the second stopper (315b) is arranged to contact each other in response to the set angle of the frame portion (321), the rotation of the frame portion (321) can be stopped by contacting the second stopper (315b). Of course, since the second stopper (315b) also has a shock absorber function, it can reduce the impact or noise between the frame portion (321) and the load port portion (100) during the tilting rotation process of the frame portion (321). In addition, when the door portion (200) is open, the tip of the second stopper (315b) can be arranged to contact the frame portion (321).

[0092] Here, when the second stopper (315b) comes into contact with the frame portion (321), the set angle (θ2) of the frame portion (321) with respect to the support (120) may be in the range of about 5 to 10°. More preferably, the set angle (θ2) of the frame portion (321) may be set to about 5°. Of course, the set angle (θ2) at which the door portion (200) must be tilted may be changed depending on the thickness or size of the door portion (200).

[0093] And, although not shown in the drawing, the angle block (323) may be positioned so that the joining height can be adjusted from the other end of the frame portion (321). This may have the effect of increasing versatility because it can respond to various diameters of the roller (140). For example, the angle block (323) may be positioned so that the height can be adjusted from the frame portion (321), or a configuration in which an inclined surface (324) is formed on the angle block (323) may be partially combined so that the height can be adjusted. Of course, the position or height of the roller (140) may be designed so that it can be adjusted to achieve a similar effect.

[0094] Figure 8 is a reference drawing showing a state in which the door part of the load port module shown in Figure 2 is fully opened.

[0095] Referring to Fig. 8, the door part (200) and the frame part (321) are lowered to the lowest end of the support (120), indicating a state in which the opening part (121) is completely open.

[0096] At this time, the door part (200) and the frame part (321) can maintain the tilted angle during the initial opening process of the door part (200) even during the process of lowering to the lowest point of the support (120).

[0097] In this way, when the opening (121) is fully opened, the wafer can be taken out from inside the above-described hole, and the wafer can also be moved for another process.

[0098] And, in the process of closing the door part (200), the door part (200) and the frame part (321) move vertically upward in a straight line (or rise) until the roller (140) and the angle block (323) come into contact again, and tilting can be performed while rising from the point where the roller (140) and the angle block (323) come into contact until the door part (200) is completely closed.

[0099] Therefore, according to the door opening / closing device of the load port module according to the embodiment of the present invention, tilting rotation and linear movement of the door part can be implemented using one actuator, and since the door part does not slide horizontally when opening the door part and tilting rotation is performed first, the space required for opening the door part can be minimized, and since the door part can be opened with a smaller actuator, the installation space of the actuator can be minimized, and since the height of the angle block on the frame part can be adjusted, there is an effect of making it easy to apply to correspond to the size of the roller or to correspond to the size of various doors.

[0100] While specific embodiments have been illustrated and described above to illustrate the technical concepts of the present invention, the present invention is not limited to the configuration and operation of the specific embodiments described above, and various modifications may be implemented without departing from the scope of the present invention. Therefore, such modifications should be considered within the scope of the present invention, and the scope of the present invention should be determined by the claims set forth below.

Claims

1. A load port section including a stand on which a hopper is mounted at the top, and a support positioned vertically to the stand and supported on an installation surface, and having an opening formed in one side of the hopper; A door part that selectively opens and closes the above opening; and An opening / closing operating unit for opening and closing the door unit on the load port unit; The above opening / closing operating unit is a door opening / closing device of a load port module that tilts the door unit at a set angle on the opening and then moves it in a straight line to open it.

2. In paragraph 1, The above opening and closing operation part is, A linear moving part that moves the door part linearly on the load port part, A door opening / closing device of a load port module, comprising a tilting rotation part that rotates the door part within a set angle range on the load port part.

3. In paragraph 2, The above tilting rotation part, A frame part extending from the lower part of the door part and connected to the linear moving part so as to be rotatable; An elastic part that always provides elastic restoring force in the direction in which the door part is opened between the linear moving part and the frame part, A door opening / closing device of a load port module, comprising an angle block provided at the front end of the frame portion so as to selectively interfere with a roller provided on the support.

4. In paragraph 3, The above angle block is, A door opening / closing device of a load port module, comprising a sloped surface that comes into contact with the roller during the process of tilting the door portion to a set angle for opening while the door portion is closed.

5. In paragraph 4, The door opening / closing device of the load port module, wherein the above slope is formed in the range of 30 to 40°.

6. In paragraph 3, The above linear moving part, A guide member arranged in a vertical direction from the above stand, A slider that slides on the above guide member and is positioned to at least partially penetrate the slit formed in the support member; A door opening / closing device of a load port module, comprising a power unit that provides power to the above slider.

7. In paragraph 6, The above slider is, A rotation axis that connects the tilting rotation part to the linear moving part so that it can rotate, A first stopper positioned at the top with the rotation axis as the center, A door opening / closing device of a load port module, comprising a second stopper positioned at the bottom with the rotation axis as the center.

8. In paragraph 7, The above first stopper elastically contacts the frame portion when the door portion is closed, The second stopper is a door opening / closing device of a load port module that elastically contacts the frame portion when the door portion is opened and the frame portion tilts and rotates at a set angle.

9. In paragraph 7, A door opening / closing device of a load port module, wherein the angle formed between the frame portion and the virtual vertical line by the second stopper when the door portion is open is in the range of 5 to 10°.

10. In paragraph 2, The above angle block is, A door opening / closing device of a load port module, which is arranged so as to be height-adjustable on the above frame portion.

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