Plasma generator

Abstract

A plasma generator, comprising a partition tube (1), an outer electrode (2) arranged on an outer surface of the partition tube (1), an inner electrode (3) arranged on an inner surface of the partition tube (1), and a joint (4) arranged at an end of the partition tube (1), and further comprising a heating strip arranged on an inner side of the partition tube (1), wherein the heating strip extends in the lengthwise direction of the partition tube (1). The heating strip is provided on the inner side of the partition tube (1), such that the plasma generator can be suitable for a low-temperature and humid environment.

Description

A plasma generator Technical Field

[0001] The present invention relates to the field of plasma technology equipment, and in particular to a plasma generator. Background Art

[0002] The plasma generator ionizes the air between the electrodes to produce positive and negative ions, and is widely used in the fields of disinfection and purification, semiconductor surface treatment, material preparation, etc. At present, among them, a structural form of a plasma generator is shown in a positive and negative example deodorization and purification generating tube disclosed in application number 202120911006.x. A thin metal tube is set on the inside of the glass tube and a metal mesh tube is set on the outside. An electric field is formed between the thin metal tube and the metal mesh tube. The metal mesh tube discharges and breaks down the gas on the outside of the glass tube to produce positive and negative ions on the outside of the glass tube. This type of plasma generator is enclosed in the tube and separated from the outside by the thin metal tube. It is less affected by the external environment and has better stability in use. Therefore, it has better applicability in some low temperature and humid environments. However, when this type of plasma generator is used in some low temperature and humid environments, such as in the winter in the Northeast and in cold storage environments, the plasma generator is prone to a decrease in the efficiency of positive and negative ion generation due to the low temperature. Moreover, the humid environment easily causes the outer electrode part to have abnormal capacitance due to moisture, affecting the discharge effect.

[0003] Therefore, there is an urgent need to improve the existing plasma generator. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides a plasma generator, which effectively solves the problems existing in the prior art by arranging heating strips in the separation tube.

[0005] In order to solve the above problems, the present invention provides a plasma generator, including a separator tube, an outer electrode arranged on the outer surface of the separator tube, an inner electrode arranged on the inner surface of the separator tube, and a node arranged at the end of the separator tube; the generator also includes a heating strip arranged on the inner side of the separator tube, and the heating strip extends along the length direction of the separator tube.

[0006] Furthermore, the heating strip includes a heating support tube and an electric heating portion arranged on the outer surface of the heating support tube.

[0007] Furthermore, a heat dissipation tube is provided on the inner side of the heating support tube, at least one end of the heat dissipation tube extends out of the outer side of the separation tube, and a heat dissipation gap is formed between the heat dissipation tube and the heating support tube; a connecting hole that can be connected to the heat dissipation gap is provided between the heating support tube and the heat dissipation tube, and the generator also includes a baffle provided on the connecting hole, and the baffle is configured to be movable to switch between blocking and opening the connecting hole.

[0008] Furthermore, the tube wall of the heating support tube is provided with the communicating hole, the electric heating part is provided as a heating wire, and the heating wire is provided at a portion of the heating support tube outside the communicating hole;

[0009] The plasma generator includes a baffle barrel slidably arranged inside the heating support tube, the baffle barrel is provided with a heat dissipation hole at a position corresponding to the communication hole, and the baffle barrel forms a baffle capable of covering and opening the communication hole at a portion other than the heat dissipation hole.

[0010] Furthermore, the heating support tube is provided with a pressure-through hole at a section facing the joint;

[0011] The plasma generator further includes a piston block sleeved on the outside of the heat dissipation pipe, the piston block is connected to the baffle, and the piston block is arranged on the side of the pressure-through hole facing the corresponding position of the joint head, and a pressure relief chamber is formed between the piston block, the joint head, the heat dissipation pipe, and the heating support pipe;

[0012] The node is provided with a first pressure relief hole communicating with the pressure relief chamber, and / or the heat dissipation pipe is provided with a second pressure relief hole communicating with the pressure relief chamber;

[0013] The piston block is connected to the blocking plate so that the piston block can drive the blocking plate to move.

[0014] Furthermore, a deformable sealing membrane is provided in the pressure relief chamber, and a protruding top block is provided on the side of the piston block facing the pressure relief chamber.

[0015] Furthermore, the sealing membrane is configured as an elastic sealing membrane.

[0016] Furthermore, the heating support tube is provided with a heat transfer mounting hole, and the plasma generator also includes a metal deformable part, at least a portion of the metal deformable part is located in the heat transfer mounting hole, and the metal deformable part is connected to the baffle, so that when the metal deformable part is deformed by temperature changes, it drives the baffle to move.

[0017] Furthermore, a spiral groove is provided on the surface of the separator tube, and the outer electrode includes a tungsten wire wound in the spiral groove.

[0018] Furthermore, the joint and the separation tube are sealed with epoxy.

[0019] The beneficial effects of the present invention are that the structure is simple, and by arranging a heating strip in the separation tube, the problems existing in the prior art are effectively solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0021] FIG1 is a schematic structural diagram of an embodiment of the present invention.

[0022] FIG2 is a schematic diagram of the structure of the embodiment shown in FIG1 after decomposition.

[0023] FIG3 is a schematic cross-sectional view of another embodiment of the present invention.

[0024] FIG4 is a schematic diagram of a partially enlarged structure of point A in the embodiment shown in FIG3 .

[0025] FIG5 is a schematic diagram of a partially enlarged structure of point B in the embodiment shown in FIG3 .

[0026] FIG6 is a schematic cross-sectional view of another embodiment of the present invention; FIG.

[0027] FIG7 is a schematic diagram of a partially enlarged structure of point C in the embodiment shown in FIG6 .

[0028] Among them: 1. Separator tube; 2. Outer electrode; 3. Inner electrode; 4. Joint; 5. Heating support tube; 6. Electric heating part; 7. Heat dissipation pipe; 8. Connecting hole; 9. Baffle tube; 10. Pressure-through hole; 11. Piston block; 12. Pressure relief chamber; 13. Sealing membrane; 14. Heat transfer mounting hole; 15. Metal deformation part; 16. Spiral groove; 17. Epoxy resin; 18. Welding piece; 19. First pressure relief hole. DETAILED DESCRIPTION

[0029] In order to more clearly illustrate the overall concept of the present invention, a detailed description is given below in combination with the accompanying drawings by way of examples.

[0030] It should be noted that many specific details are set forth in the following description to facilitate a full understanding of the present invention. However, the present invention can also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0031] In addition, in the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the present invention, unless otherwise expressly specified or limited, terms such as "installed," "connected," "connect," and "fixed" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integration; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or interactions between two components. However, the phrase "direct connection" indicates that the two connected entities are not connected through an intermediate structure, but are connected only through a connecting structure to form a whole. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0033] In the present invention, unless otherwise clearly specified and limited, a first feature "above" or "below" a second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in an appropriate manner in any one or more embodiments or examples.

[0034] In the present invention, as shown in Figures 1-7, a plasma generator is provided, including a separator tube 1, an outer electrode 2 arranged on the outer surface of the separator tube 1, an inner electrode 3 arranged on the inner surface of the separator tube 1, and a node 4 arranged at the end of the separator tube 1; the generator also includes a heating strip arranged on the inner side of the separator tube 1, and the heating strip extends along the length direction of the separator tube 1.

[0035] During use, the plasma generator of the present invention can be heated by heating strips disposed inside the generator to prevent the inner electrode 3 and outer electrode 2 from operating in low-temperature environments. Heating can also dry the outside of the separator tube 1 to prevent moisture on the outer electrode 2 from affecting plasma generation in humid environments. Heating by the heating strips allows the inner electrode 3 and outer electrode 2 to start operating at an appropriate temperature, such as 50°C, to ensure effective plasma generation. In some operating conditions, heating the inner side of the separator tube 1 by heating strips can prevent excessive shrinkage of the inner electrode 3 due to low temperatures. This can also prevent the resulting relative shrinkage between the inner electrode 3 and the separator tube 1, leading to instability in the connection between the inner electrode 3 and the inner surface of the separator tube 1 and misalignment of the inner electrode 3. This can also prevent abnormal plasma generation caused by changes in capacitance between the inner electrode 3 and the outer electrode 2. Heating can also reduce abnormal plasma generation caused by changes in resistance of the inner electrode 3 and outer electrode 2 due to temperature changes.

[0036] The heating strips provided can release heat more evenly in the separation tube 1 when heat is generated in the separation tube 1, thereby making the entire plasma generator heated evenly.

[0037] As a preferred embodiment, further detailing some of the structures of the present invention, the inner electrode 3 is constructed of a stainless steel sheet and is closely attached to the inner surface of the separator tube 1. Regarding the outer electrode 2, a spiral groove 16 is provided on the outer side of the separator tube 1. The outer electrode 2 includes a tungsten filament wound within the spiral groove 16. As shown in Figures 1 to 7, this ensures uniform heat dissipation from the outer electrode 2. The spiral groove 16 also guides the installation of the tungsten filament, preventing poor installation accuracy and loosening of the tungsten filament due to thermal deformation, which could lead to abnormal plasma generation.

[0038] In the embodiment shown in FIG1 , the joint 4 is a plastic joint 4 . The joint 4 and the separator tube 1 are sealed with epoxy, and the separator tube and joint are sealed with epoxy resin 17 , thereby preventing foreign matter and moisture from entering the interior of the separator tube 1 . In the embodiment shown in FIG1 , the heating strip is an electric heating strip. The conductive portion of the heating strip and the conductive portion of the inner electrode 3 pass through the joint 4 and are connected to the welding lug 18 of the joint 4 . The welding lug 18 and the heating strip, and the welding lug 18 and the inner electrode 3, are connected by wrapping contact, rather than welding, to prevent damage to the weld structure caused by temperature changes. The welding lug 18 is fixed to the joint 4 after being screwed to the joint 4 .

[0039] In the embodiment shown in Figure 2, the heating strip is preferably a DC heating strip, and the wire of the heating strip extends from the right node so that the welding piece at the right node position can be connected to an external DC power supply; the inner electrode and the outer electrode are arranged at the left node position so that the welding piece at the left node is connected to the external AC power.

[0040] Regarding the arrangement of the heating strip, in a preferred embodiment, more specifically, the heating strip includes a heating support tube 5 and an electric heating portion 6 disposed on the outer surface of the heating support tube 5. The heating support tube 5 thus forms a structural support for the heating strip within the separator tube 1, allowing the electric heating portion 6 to stably heat within the separator tube 1.

[0041] Among them, as shown in the embodiment of Figure 1, the heating support tube 5 is preferably an alumina ceramic tube, and the electric heating part 6 is a heating wire wrapped around the alumina ceramic tube. In some embodiments, in order to better fix the heating wire, a sleeve can be used to cover the outside of the heating wire, such as a heat shrink sleeve to fix the heating wire. The heat shrink sleeve can also be used to separate the inner electrode and the heating wire to insulate the two, so as to prevent the heating wire and the inner electrode from communicating.

[0042] The setting of the heating part is not limited to the form of alumina ceramic tube, heating wire, and heat shrink tubing. In optional embodiments, other forms can also be adopted, such as in the embodiments shown in Figures 4 to 7, where the heating wire is directly fixed to the heating support tube 5.

[0043] As for the structure of the heating strip, in an optional embodiment, other forms may be adopted, such as a hollow metal tube, in which an external heating medium flows through the metal tube to heat the interior of the separation tube 1.

[0044] In a selected embodiment, as shown in Figures 4 to 7, a further optimized setting of the present invention is that a heat dissipation pipe 7 is provided on the inner side of the heating support tube 5, at least one end of the heat dissipation pipe 7 extends out of the outer side of the separation tube 1, and a heat dissipation gap is formed between the heat dissipation pipe 7 and the heating support tube 5; a connecting hole 8 that can communicate with the heat dissipation gap is provided between the heating support tube and the heat dissipation pipe 7, and the generator further includes a baffle provided on the connecting hole 8, and the baffle is configured to be movable to switch between blocking and opening the connecting hole 8.

[0045] As shown in Figures 3 to 7, a heat transfer medium (such as thermal oil or thermal inert gas) can be set in the separation tube 1. By setting the heat dissipation tube 7, when the separation tube 1 needs to be heated, the baffle is in a position to block the connecting hole 8. At this time, the heat transfer on both sides of the heating support tube 5 is slowed down, and the heat generated by the electric heating part 6 is mainly used to transfer toward the inner electrode 3, which can reduce the heat dissipated outward from the heat dissipation tube 7, so that the plasma generator can quickly heat up to a suitable operating temperature range.

[0046] When the temperature inside the heat dissipation tube 7 is too high (for example, when the inner electrode 3 generates heat spontaneously during use), the baffle can be moved to open the connecting hole so that the heat-conducting medium on both sides of the heating support tube 5 can communicate and transfer heat, thereby accelerating the heat transfer from the separation tube 1 to the heat dissipation tube 7, and then from the heat dissipation tube 7 to the outside of the plasma generator.

[0047] With this arrangement, the present invention can use the heating strips to heat the plasma generator before starting it in a low-temperature environment, thus preventing the plasma generator from operating in a low-temperature, humid environment. Furthermore, in a high-temperature environment, when the inner electrode 3 overheats, the heat dissipation pipe 7 can be used to dissipate heat outward. In this way, the heating strips and the heat dissipation pipe 7 can be used in combination to allow the entire plasma generator to operate in a stable temperature range, thereby improving the operating efficiency and stability of the plasma generator.

[0048] Regarding the heat transfer from the heat pipe 7 to the outside, preferably, a water-cooled radiator, metal heat fins and other heat dissipation structural components can be connected to the outside of the heat pipe 7 to promote the heat dissipation of the heat pipe 7 to the outside.

[0049] In the embodiments shown in Figures 3 to 7, with regard to the structure of the heating strip and the baffle position, to be more specific, as shown in the figure, the tube wall of the heating support tube 5 is provided with the connecting hole 8, the electric heating part is provided with an electric heating wire, and the electric heating wire is provided at the portion of the heating support tube 5 outside the connecting hole 8; the plasma generator includes a baffle tube 9 slidably provided on the inner side of the heating support tube 5, the baffle tube 9 is provided with a heat dissipation hole corresponding to the position of the connecting hole 8, and the baffle tube 9 forms a baffle capable of covering and opening the connecting hole 8 at the portion outside the heat dissipation hole.

[0050] As shown in Figures 3 to 7, the baffle tube 9 has holes starting from the position corresponding to the connecting hole 8. The heating support tube 5 is provided with multiple rows of connecting hole 8 areas at intervals along its length direction. Each row of connecting hole 8 areas is provided with multiple connecting holes 8 at intervals along the circumference of the heating support tube 5. The baffle tube 9 is provided corresponding to the connecting hole 8, so that when the connecting hole 8 is opened, the medium can be evenly connected and heat exchanged on the heating separation tube 1.

[0051] As for the movement mode of the baffle, in a preferred embodiment, as shown in Figure 3, and more specifically, as shown in Figures 3 to 5, the heating support tube 5 is provided with a pressure-through hole 10 in a section facing the node 4; the plasma generator also includes a piston block 11 sleeved on the outside of the heat dissipation tube 7, the piston block 11 is connected to the baffle, and the piston block 11 is arranged on the side of the pressure-through hole 10 facing the corresponding position of the node 4, and a pressure relief chamber 12 is formed between the piston block 11 and the node 4, the heat dissipation tube 7, and the heating support tube 5; the node 4 is provided with a first pressure relief hole 19 connected to the pressure relief chamber 12, and / or the heat dissipation tube 7 is provided with a second pressure relief hole connected to the pressure relief chamber 12; the piston block 11 is connected to the baffle so that the piston block 11 can drive the baffle to move.

[0052] As shown in Figure 4, when the temperature inside the separator tube 1 is high and reaches a certain value, the medium inside the separator tube 1 expands due to the heat. The heated medium enters the right side of the piston through the pressure-releasing hole 10, pushing the piston block 11 to the right, thereby driving the blocking plate cylinder 9 to move and open the connecting hole 8. When the temperature of the medium inside the separator tube 1 drops to a certain level, the pressure inside the separator tube 1 gradually decreases, forming a negative pressure relative to the outside. At this time, under the influence of the air pressure outside the piston block 11, the piston block 11 gradually moves to the left, blocking the connecting hole 8. This reduces the amount of heat transferred to the heat pipe 7 after the medium enters the heat dissipation gap, thereby reducing the temperature drop inside the separator tube 1, making it easier to maintain the temperature of the separator tube 1, and shortening the operating time of the heating strip when the plasma generator is next started.

[0053] The present invention moves the blocking piece by utilizing the temperature change to cause the medium volume change to push the piston block 11 to move, which can automatically realize the opening and closing of the connecting hole 8. It is stable to use and the action response accurately corresponds to the temperature in the separation tube 1.

[0054] In the embodiment shown in Figure 3, the relevant structural settings of the position of the piston block 11 are used as an exemplary explanation. As shown in the figure, to be more specific, the heating support tube 5 includes a ceramic tube seat connected to the joint 4, a support tube body, and connecting ribs connected between the support tube body and the ceramic tube seat. A pressure-passing hole 10 is formed at the position of the connecting rib, and the piston block 11 is set at the position of the ceramic tube seat.

[0055] In the embodiment shown in Figure 3, the piston block 11 is arranged at the right end of the heating support block, and the baffle tube 9 extends integrally to the left side of the heating support tube 5. For the left end position of the heating support tube 5, the heating support tube 5 is directly connected to the position of the node 4 at the left end, and the node 4 on the left side is provided with a boss extending into the inner side of the baffle tube 9, and the left end of the baffle tube 9 is arranged to be slidable.

[0056] In an alternative embodiment, piston blocks 11 may be provided at both ends of the heating support tube 5 , and two independent baffle cylinders 9 may be provided inside the heating support tube 5 , each baffle cylinder 9 being connected to one piston block 11 .

[0057] In a preferred embodiment, a further optimization of the present invention is that a deformable sealing membrane 13 is provided within the pressure relief chamber 12, and a protruding top block is provided on the side of the piston block 11 facing the pressure relief chamber 12. As shown in FIG4 , the provision of the sealing membrane 13 prevents leakage of the medium within the separator tube 1.

[0058] In a preferred embodiment, a further optimization of the present invention is that the sealing membrane 13 is configured as an elastic sealing membrane 13. Thus, the elastic deformation of the sealing membrane 13 can be utilized to adapt to the movement of the piston block 11. Furthermore, when the piston block 11 returns to the left, the elastic force of the elastic sealing membrane 13 promotes the movement of the piston block 11. This allows the blocking piece to block the communicating hole 8 after the piston block 11 quickly returns to its original position, thereby reducing heat loss within the separator tube 1.

[0059] In a preferred embodiment, a further optimization of the present invention is that a position sensor can be installed in the joint 4 at a position corresponding to the pressure relief chamber 12 to monitor the position of the piston block 11, and thus determine the temperature within the separator tube 1 based on the position of the piston block 11. In this case, the determined temperature can be used to determine whether to operate the heat pipe 7. For example, when the heat pipe 7 uses a water-cooled radiator for heat dissipation, the intensity of the water-cooling heat dissipation can be adjusted.

[0060] The movement mode of the baffle is not limited to the form of the piston block 11 shown in Figure 3. In an optional embodiment, the form shown in Figure 6 can also be adopted. The heating support tube 5 is provided with a heat transfer mounting hole 14, and the plasma generator further includes a metal deformation member 15. The metal deformation member 15 is at least partially located in the heat transfer mounting hole 14, and the metal deformation member 15 is connected to the baffle, so that when the metal deformation member 15 is deformed by temperature changes, it drives the baffle to move.

[0061] As shown in Figures 6 and 7, when the temperature inside the separator tube 1 is low, the baffle blocks the connecting hole 8. When the temperature inside the separator tube 1 rises to a certain level, the metal deformable member 15 deforms and elongates upon heating, driving the baffle to open the connecting hole 8. In a specific embodiment, the metal deformable member 15 can be a spiral spring as shown, or it can be a conventional metal spring of other shapes. In the embodiment shown in Figure 6, the positions of the baffle cylinder 9 and the left end of the heating support tube 5 refer to the structure shown in Figure 5.

[0062] It should be noted that the improvement focus of the present invention is on the structure of the soil taking barrel, and no restriction is made to the improvement of the connection between the soil taking barrel and the power soil taking device. As one example, to be more specific, in the illustrated embodiment, a threaded connection column is provided on the top of the soil taking barrel, and the threaded connection column can be directly connected to the drive rod of the power soil taking device.

[0063] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

[0064] The foregoing is merely an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.

Claims

1. A plasma generator, characterized in that: It includes a separator tube, an outer electrode arranged on the outer surface of the separator tube, an inner electrode arranged on the inner surface of the separator tube, and a node arranged at the end of the separator tube; the generator also includes a heating strip arranged on the inner side of the separator tube, and the heating strip extends along the length direction of the separator tube.

2. The plasma generator according to claim 1, characterized in that The heating strip includes a heating support tube and an electric heating portion arranged on the outer surface of the heating support tube.

3. The plasma generator according to claim 2, characterized in that A heat dissipation pipe is provided on the inner side of the heating support tube, at least one end of the heat dissipation pipe extends out of the outer side of the separation tube, and a heat dissipation gap is formed between the heat dissipation pipe and the heating support tube; A connecting hole that can communicate with the heat dissipation gap is provided between the heating support tube and the heat dissipation tube. The generator also includes a baffle provided on the connecting hole. The baffle is configured to be movable to switch between blocking and opening the connecting hole.

4. The plasma generator according to claim 3, characterized in that The connecting hole is provided on the wall of the heating support tube, and the electric heating part is provided as a heating wire, which is provided on the portion of the heating support tube other than the connecting hole; The plasma generator includes a baffle barrel slidably arranged inside the heating support tube, the baffle barrel is provided with a heat dissipation hole at a position corresponding to the communication hole, and the baffle barrel forms a baffle capable of covering and opening the communication hole at a portion other than the heat dissipation hole.

5. The plasma generator according to claim 3 or 4, characterized in that: The heating support tube is provided with a pressure-through hole at a section facing the joint; The plasma generator further includes a piston block sleeved on the outside of the heat dissipation pipe, the piston block is connected to the baffle, and the piston block is arranged on the side of the pressure-through hole facing the corresponding position of the joint head, and a pressure relief chamber is formed between the piston block, the joint head, the heat dissipation pipe, and the heating support pipe; The node is provided with a first pressure relief hole communicating with the pressure relief chamber, and / or the heat dissipation pipe is provided with a second pressure relief hole communicating with the pressure relief chamber; The piston block is connected to the blocking plate so that the piston block can drive the blocking plate to move.

6. The plasma generator according to claim 5, characterized in that: A deformable sealing film is provided in the pressure relief chamber, and a protruding top block is provided on the side of the piston block facing the pressure relief chamber.

7. The plasma generator according to claim 6, characterized in that The sealing membrane is configured as an elastic sealing membrane.

8. The plasma generator according to claim 3 or 4, characterized in that: The heating support tube is provided with a heat transfer mounting hole, and the plasma generator further includes a metal deformable part, at least a portion of which is located in the heat transfer mounting hole, and the metal deformable part is connected to the baffle, so that when the metal deformable part is deformed by temperature changes, it drives the baffle to move.

9. The plasma generator according to claim 1, characterized in that A spiral groove is provided on the surface of the separator tube, and the outer electrode includes a tungsten wire wound around the spiral groove.

10. The plasma generator according to claim 1, characterized in that The joint and the separation tube are sealed by epoxy.

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