Throttle valve assembly and substrate processing apparatus including same

Abstract

A throttle valve assembly according to an embodiment of the present invention comprises: a pipe-shaped flange having a channel formed therein; a flapper installed on the flange and adjusting an exhaust degree by rotation; and a first supporter and a second supporter coupled to the flange to support the flapper in a bidirectionally rotatable structure, wherein the flapper includes a flapper body having a flat plate shape, having a coupling hole formed therethrough along the central rotary axis, and having receiving spaces, which are formed on opposite sides of the central rotary axis, respectively, and through each of which a temperature-controlling fluid is circulated; a rod-shaped shaft coupled to the first supporter and the second supporter along the coupling hole and connected to a driving motor to transmit a driving force to rotate the flapper; and a fluid inflow and outflow channel formed on a side surface of the coupling hole to provide an inflow and outflow path of the temperature-controlling fluid.

Description

Throttle valve assembly and substrate processing device including the same

[0001] The present invention relates to a throttle valve assembly and a substrate processing device including the same.

[0002] In order to manufacture semiconductor devices, liquid crystal displays, etc., various processes such as deposition, photolithography, etching, and cleaning are performed, and these processes are performed using a substrate processing device equipped with a process chamber for processing the substrate.

[0003] A substrate processing device may include an exhaust unit for maintaining a constant internal pressure of a process chamber in which a processing space for a substrate is formed during a substrate processing process and for discharging process byproducts generated during the process. The exhaust unit includes an exhaust pipe connected to the process chamber, and a fluid inside the process chamber can be discharged through negative pressure provided from the exhaust pipe. A gas path is formed inside the exhaust pipe, and a throttle valve installed on the gas path can be used to maintain the internal pressure of the process chamber at a constant level.

[0004] The throttle valve includes a flat-plate flapper for controlling negative pressure, and controls negative pressure by rotating the flapper to adjust the opening ratio. In addition, a sealing member, such as an O-ring, is installed on the outer surface of the edge of the flapper to airtightly separate the fluid passage space.

[0005] However, the sealing member as described above tends to corrode easily when the temperature of the flapper rises, and when the surface temperature of the flapper changes during the process, it can easily wear out due to causes such as particle deposition, making it impossible to precisely control the opening / closing rate of the throttle valve.

[0006] An embodiment of the present invention provides a throttle valve assembly and a substrate processing device including the same, which enable a substrate processing process to be stably performed for a long period of time by controlling the temperature of a flapper to prevent damage to a sealing member.

[0007] A throttle valve assembly according to an embodiment of the present invention includes a tubular flange forming a flow path therein, a flapper installed on the flange and controlling an exhaust amount by rotation, and a first supporter and a second supporter coupled to the flange to support the flapper in a bidirectional rotatable structure, wherein the flapper has a flat plate shape and a coupling hole formed therethrough along a central axis of rotation, and a receiving space formed on each side of the central axis of rotation for circulating a temperature-controlling fluid, a rod-shaped shaft coupled to the first supporter and the second supporter along the coupling hole and connected to a driving motor to transmit a driving force to rotate the flapper, and a fluid inlet / outlet channel formed on a side of the coupling hole to provide an inlet / outlet path for the temperature-controlling fluid.

[0008] According to one embodiment, the flapper body may include at least one partition wall extending from the fluid inlet / outlet passage to the edge of the flapper body in a direction perpendicular to the rotational center axis to form a plurality of partition spaces in the receiving space, and at least one guide wall formed inside the partition space to guide the flow of the temperature-controlling fluid and extending from the fluid inlet / outlet passage in a direction perpendicular to the rotational center axis.

[0009] According to one embodiment, the flapper body may include a first connection channel connected to the fluid inlet / outlet passage for supplying the temperature control fluid to the compartment space, and a second connection channel connected to the compartment space for discharging the fluid inside the compartment space to the fluid inlet / outlet passage.

[0010] According to one embodiment, the fluid inlet / outlet path may have a tubular structure formed along the perimeter of the coupling hole and having both sides connected to the first supporter and the second supporter, respectively.

[0011] According to one embodiment, the flapper body may include a heat exchange structure formed inside the receiving space.

[0012] According to one embodiment, the first supporter and the second supporter may each have a structure that rotates together with the flapper.

[0013] According to one embodiment, the first supporter includes a central connecting hole providing a connecting space so that the shaft can be connected to the driving motor, a first buffer channel formed along a side periphery of the central connecting hole and connected to the fluid inlet / outlet channel, and a supply channel connected to the first buffer channel to supply a temperature-controlling fluid to the receiving space, and can be coupled to the flange in a bidirectional rotatable structure.

[0014] According to one embodiment, the second supporter includes a support hole in which one end of the shaft is received, a second buffer passage formed along a side periphery of the support hole and connected to the fluid inlet / outlet passage, and a discharge passage connected to the second buffer passage to discharge temperature-control fluid supplied to the receiving space through the supply passage or to exhaust fluid filled inside the receiving space to the outside, and may be coupled to the first supporter in a structure capable of bidirectional rotation at a position corresponding to the flange.

[0015] According to one embodiment, the throttle valve assembly can control the temperature of the flapper by exhausting the fluid filled inside the receiving space to the outside through the fluid inlet / outlet passage, thereby creating a vacuum inside the receiving space. Alternatively, the throttle valve assembly can control the temperature of the flapper by circulating the temperature-controlling fluid inside the receiving space through the fluid inlet / outlet passage. In this case, the temperature-controlling fluid may be a liquid or a gas.

[0016] In one embodiment, at least one of the flange, the flapper, the first supporter, and the second supporter may be manufactured using a 3D printing method. Furthermore, the throttle valve assembly may include a ring-shaped sealing member coupled along the outer circumferential surface of the flapper.

[0017] A substrate processing device according to an embodiment of the present invention comprises a process chamber forming a sealed processing space for performing substrate processing, an exhaust unit coupled to the process chamber and connected to a vacuum pump for performing exhaust and pressure control of the processing space, and a throttle valve assembly installed in the exhaust unit to control a fluid flow rate through the exhaust unit for exhaust and pressure control of the processing space, and described above.

[0018] The throttle valve assembly according to an embodiment of the present invention can effectively control the surface temperature of the flapper by creating a vacuum state in the internal accommodation space of the flapper or distributing a fluid for temperature control in the internal accommodation space of the flapper, thereby reducing the maintenance cost of the substrate processing device.

[0019] In addition, by forming an accommodation space inside the flapper, the weight of the flapper is reduced, which can reduce the load on the driving motor and save driving energy.

[0020] FIG. 1 is a drawing showing the structure of a substrate processing device according to an embodiment of the present invention.

[0021] Figure 2 is a top view of a throttle valve assembly according to an embodiment of the present invention.

[0022] FIG. 3 is a perspective view showing a portion of a throttle valve assembly according to an embodiment of the present invention.

[0023] FIG. 4 is a perspective view showing the structure of a flapper, a first supporter, and a second supporter of a throttle valve assembly according to an embodiment of the present invention.

[0024] FIG. 5 is a drawing showing the internal structure of a flapper of a throttle valve assembly according to an embodiment of the present invention.

[0025] FIG. 6 is a drawing showing a fluid flow path in a throttle valve assembly according to an embodiment of the present invention.

[0026] A drawing showing the best mode for carrying out the present invention is FIG. 5.

[0027] FIG. 1 is a drawing showing the structure of a substrate processing device (10) according to an embodiment of the present invention.

[0028] Referring to FIG. 1, a substrate processing device (10) may include a process chamber (100) forming a sealed processing space (S) for performing substrate processing, an exhaust unit (150) coupled to the process chamber (100) and connected to a vacuum pump (not shown) for performing exhaust and pressure control of the processing space (S), and a throttle valve assembly (20) installed in the exhaust unit (150) to control the fluid flow rate through the exhaust unit (150) for exhaust and pressure control of the processing space (S).

[0029] The substrate (W) may include a wafer for semiconductor manufacturing, a display panel, a solar electric substrate, etc. that require processing processes such as etching, thin film deposition, etc.

[0030] The process chamber (100) is configured to form a sealed processing space (S) for processing a substrate (W), and can have various configurations. For example, the process chamber (100) may include a chamber body (110) having an open upper side, and an upper lid (120) detachably coupled to the upper portion of the chamber body (110). The chamber body (110), together with the upper lid (120), forms a sealed processing space (S) for processing a substrate (W), and can have various configurations.

[0031] Additionally, at least one gate (111) may be formed on the side wall of the chamber body (110) to introduce a substrate (W) into the processing space (S) or to remove the substrate (W) from the processing space (S).

[0032] The chamber body (110) may have various structures depending on process conditions, and may have an open upper portion and an upper lid (120) detachably coupled to the opening. The upper lid (120) may be installed together with a gas injection unit (140) on the upper portion of the chamber body (110) to form a sealed processing space (S).

[0033] The substrate processing device (10) may include a substrate mounting portion (130) and a gas injection portion (140).

[0034] The substrate mounting portion (130) may be installed on the lower side of the processing space (S) and may support the substrate (W). For example, the substrate mounting portion (130) may include a configuration capable of moving up and down for introducing and removing the substrate (W) through the gate (111). The substrate mounting portion (130) may include a temperature control member (not shown), such as a heater, for controlling the temperature, such as heating or cooling the substrate (W).

[0035] The gas injection unit (140) is positioned opposite to the substrate mounting unit (130) and can inject gas for performing a substrate processing process into the processing space (S). The gas injected from the gas injection unit (140) may include, but is not particularly limited to, a process gas for thin film deposition, an etching gas for thin film etching, a cleaning gas for performing cleaning, etc.

[0036] The exhaust unit (150) is installed on one side of the process chamber (100) and can be connected to a vacuum pump (not shown) to perform exhaust and flow control of the processing space (S). The exhaust unit (150) can include at least one exhaust pipe (151, 153) for forming a fluid path (F) through which fluid circulates. The exhaust pipe (151, 153) can include a connecting flange formed protruding along an edge for connection with a throttle valve assembly (20) to be described later. The connecting flange of the exhaust pipe (151, 153) can be connected to the upper and lower surfaces of the valve body of the throttle valve assembly (20) by a connecting member.

[0037] The throttle valve assembly (20) is installed in the exhaust section (150) and can control the flow rate through the exhaust section (150) to control exhaust and pressure of the processing space (S) of the process chamber (100).

[0038] FIG. 2 is a top view of a throttle valve assembly (20) according to an embodiment of the present invention, and FIG. 3 is a perspective view showing a part of a throttle valve assembly (20) according to an embodiment of the present invention. In addition, FIG. 4 is a perspective view showing the structure of a flapper (230), a first supporter (250), and a second supporter (270) of a throttle valve assembly (20) according to an embodiment of the present invention, and FIG. 5 is a drawing showing the internal structure of a flapper (230) of a throttle valve assembly (20) according to an embodiment of the present invention, and FIG. 6 is a drawing conceptually showing a fluid flow path in a throttle valve assembly (20) according to an embodiment of the present invention.

[0039] A throttle valve assembly (20) according to an embodiment of the present invention is installed in an exhaust section (150) connected to a process chamber (100) and controls the pressure inside the processing space (S) of the process chamber (100) and the exhaust of gas by adjusting the opening ratio. Hereinafter, the components of the throttle valve assembly (20) according to an embodiment of the present invention will be examined in detail.

[0040] Referring to FIGS. 2 to 6, the throttle valve assembly (20) has a structure including a flange (210), a flapper (230), a first supporter (250), a second supporter (270), and a driving unit (290).

[0041] The flange (210) may have a tubular structure forming a flow path therein. The flange (210) may be installed between the upper exhaust pipe (151, see FIG. 1) and the lower exhaust pipe (153, see FIG. 1) forming the exhaust section (150) of the substrate processing device. The flange (210) may be integrally connected to the connecting flanges formed in the upper exhaust pipe (151) and the lower exhaust pipe (153) using a fastening member. Accordingly, the flange (210) may form a part of the fluid flow path (F, see FIG. 1) through which the fluid flows.

[0042] A flapper (230) is accommodated in the central region of the flange (210), and a driving shaft (253) that transmits driving force for driving the flapper (230) can be inserted and installed. Since the flange (210) forms a connecting passage through its inner surface, a structure that blocks the flow of fluid through the fluid passage (F) can be formed by the inner wall of the flange (210) and the outer wall of the flapper (230) coming into contact with each other.

[0043] The flange (210) may have a structure in which two installation holes (211) are formed at positions facing each other so that the first supporter (250) and the second supporter (250) can be installed, respectively.

[0044] The flapper (230) can control the amount of exhaust gas distributed along the internal passage of the flange (210) by rotation. For example, the flapper (230) is installed in a central region of the flange (210) so as to be rotatable in both directions. For example, the flapper (230) can rotate in one direction to open the central region of the flange (210) to allow the fluid to flow through the fluid passage (F). In addition, the flapper (230) can rotate in the opposite direction to the one direction to completely cover the open central region of the flange (210), thereby blocking the flow of the fluid through the fluid passage (F).

[0045] The flapper (230) may have various configurations, such as a circular disk or a circular flat plate, having a shape corresponding to the cross-sectional shape of the fluid path (F). In the drawing, the flapper (230) is illustrated as having a circular panel shape, but is not particularly limited thereto. The outer peripheral side wall of the flapper (230) may be formed to have a predetermined curvature to prevent interference with the inner peripheral surface of the flange (210) during rotation.

[0046] The throttle valve assembly (20) may further include a ring-shaped sealing member (not shown) that is coupled along the outer circumference of the flapper (230). The sealing member may include an O-ring, but is not particularly limited thereto.

[0047] The flapper (230) may have a structure including a flapper body (231), a shaft (232), and a fluid inlet / outlet passage (240).

[0048] The flapper body (231) has a circular disk shape and has a structure in which a connecting hole (233) is formed through the center axis of rotation (CA), and a receiving space for fluid circulation is formed on each side of the center axis of rotation (CA).

[0049] The shaft (232) is coupled along the coupling hole (233) of the flapper body (231), and a first supporter (250) and a second supporter (270) can be connected on both sides. In addition, the shaft (232) is connected to a driving motor and serves to transmit driving force to rotate the flapper (230) in both directions, and may have a rod-shaped structure.

[0050] The flapper body (231) has a structure including a partition wall (235) and an induction wall (237) formed inside the receiving space.

[0051] The partition wall (235) serves to form a plurality of partition spaces (C1 to C6) in the internal receiving space of the flapper body (231). The partition wall (235) has a structure that extends from the fluid inlet / outlet passage (240) to the edge of the flapper body (231) in a direction perpendicular to the rotational center axis (CA) of the flapper (230). At least one partition wall (235) can be formed in the flapper body (231).

[0052] The induction wall (237) is formed inside the compartment space (C1 to C6) to induce the flow of temperature-controlled fluid and has a structure extending from the fluid inlet / outlet passage (240) in a direction perpendicular to the rotational center axis (CA). The induction wall (237) forms a connection space through which the fluid can flow toward the edge of the flapper body (231). At least one induction wall (237) can be formed on the flapper body (231).

[0053] In Fig. 5, the guide wall (237) is illustrated as being formed to extend from the fluid inlet / outlet passage (240) toward the flapper body (231) in a direction perpendicular to the rotational center axis (CA), but is not particularly limited thereto. For example, the guide wall (237) may be formed to extend from the edge of the flapper body (231) toward the fluid inlet / outlet passage (240). In this case, the guide wall (237) may form a connecting space through which fluid can flow toward the rotational center axis (CA) of the flapper body (231).

[0054] The flapper (230) according to an embodiment of the present invention includes the above-described partition wall (235) and the guide wall (237), thereby increasing the movement path of the fluid and thus increasing the contact time between the flapper (230) and the fluid, thereby enabling more effective control of the surface temperature of the flapper (230).

[0055] The flapper (230) has a structure including a fluid inlet / outlet passage (240), a first connection passage (241), and a second connection passage (243) formed in the flapper body (231).

[0056] The fluid inlet / outlet path (240) is formed on the side of the coupling hole (233) and serves to provide a path for fluid inlet / outlet.

[0057] The fluid inlet / outlet passage (240) can serve to control the temperature of the flapper (230) by supplying a temperature-controlling fluid from the outside and to discharge the temperature-controlling fluid inside the flapper (230) to the outside of the flapper (230).

[0058] The fluid inlet / outlet passage (240) is formed along the circumference of the coupling hole (233) to maintain connection with the first supporter (250) and the second supporter (250) even when the flapper (230) rotates, and may have a circular tubular structure in which both sides are connected to the first supporter (250) and the second supporter (270), respectively.

[0059] One end and the other end of the first connecting passage (241) are connected to a fluid inlet / outlet passage (240) and one side of the compartment space (C1 to C6), respectively, so that fluid can be supplied to the compartment space (C1 to C6). In addition, one end and the other end of the second connecting passage (243) are connected to the other side of the compartment space (C1 to C6) and the fluid inlet / outlet passage (240), respectively, so that fluid inside the compartment space (C1 to C6) can be discharged to the fluid inlet / outlet passage (240).

[0060] As shown in Fig. 5, the first connection path (241) and the second connection path (243) may be installed for each compartment space (C1 to C6), but are not particularly limited thereto.

[0061] Additionally, the flapper body (231) may have a structure in which a heat exchange structure (239) is formed inside the receiving space. The heat exchange structure (239) can improve the temperature control performance of the flapper (230) by increasing the area in contact with the fluid.

[0062] The heat exchange structure (239) may be formed using a plurality of panels so that the cross-section has a polygonal lattice structure such as a square or honeycomb. Alternatively, without limitation, the heat exchange structure (239) may have a structure of heat dissipation fins that protrude in a vertical direction from the upper or lower surface of the flapper body (231). In addition, the heat exchange structure (239) may have various conventional structures utilized to improve heat exchange performance.

[0063] The first supporter (250) and the second supporter (270) are each coupled to the flange (210) and serve to support the flapper (230) in a structure that can rotate in both directions.

[0064] The first supporter (250) and the second supporter (270) may be installed to rotate together with the flapper (230). For example, the first supporter (250) and the second supporter (270) may have a structure in which connecting protrusions or receiving grooves are formed at corresponding positions so as to be coupled with keyways or connecting protrusions at both ends of the connecting groove (233) of the flapper body (231), respectively. Accordingly, the first supporter (250) and the second supporter (270) are integrated with the flapper body (231) and can rotate in both directions together with the flapper body (231) by driving the shaft (232).

[0065] The first supporter (250) accommodates the shaft (232) and can supply temperature-regulating fluid to the fluid inlet / outlet passage (240). The first supporter (250) can maintain connection with the fluid inlet / outlet passage (240) even when the flapper (230) rotates, thereby allowing the fluid to be supplied into the receiving space. To this end, the first supporter (250) has a structure including a central connecting hole (251), a first buffer passage (253), and a supply passage (255).

[0066] The central connecting hole (251) provides a space for accommodating the shaft (232) in order to connect one end of the shaft (232) to the driving motor.

[0067] The first buffer passage (253) may have a tubular structure formed along the side perimeter of the central connecting hole (251) and having one side connected to the fluid inlet / outlet passage (240). As described above, since the first buffer passage (253) has a tubular structure corresponding to the fluid inlet / outlet passage (240), it may be coupled to one side of the inner circumferential surface of the flange (210) in a structure that can rotate in both directions, and may maintain connection with the fluid inlet / outlet passage (240) even when the flapper (230) rotates.

[0068] The supply passage (255) is connected to the other side of the first buffer passage (253) and can supply temperature control fluid from the outside into the receiving space of the flapper body (231). In addition, the supply passage (255) can provide negative pressure inside the receiving space.

[0069] The supply path (255) can form a structure in which a fluid supply pipe is connected at one end to supply a temperature-controlled fluid from the outside.

[0070] The second supporter (270) can support one end of the shaft (232) and form a structure that discharges fluid flowing along the fluid inlet / outlet passage (240) to the outside of the receiving space of the flapper body (231). The second supporter (270) can discharge the fluid to the outside of the receiving space by maintaining a connection with the fluid inlet / outlet passage (240) even when the flapper (230) rotates. To this end, the second supporter (270) has a structure that includes a support hole (271), a second buffer passage (273), and a discharge passage (275).

[0071] The support hole (271) provides a space for supporting the other end of the shaft (232).

[0072] The second buffer passage (273) may have a tubular structure formed along the side perimeter of the support hole (271) and having one side connected to the fluid inlet / outlet passage (240). In this way, since the second buffer passage (273) has a tubular structure corresponding to the fluid inlet / outlet passage (240), it can be coupled to one side of the inner circumferential surface of the flange (210) in a structure that can rotate in both directions, and can maintain connection with the fluid inlet / outlet passage (240) even when the flapper (230) rotates.

[0073] The discharge path (275) is connected to the other side of the second buffer path (273) to provide a path for discharging fluid within the receiving space to the outside. The discharge path (275) is connected to an external pipe to discharge fluid within the receiving space. The discharge path (275) may be connected to an exhaust pump for discharging fluid.

[0074] The throttle valve assembly (20) according to an embodiment of the present invention can control the temperature of the flapper (230) by applying negative pressure through the fluid inlet / outlet passage (240).

[0075] For example, the temperature of the flapper (230) can be controlled by discharging the fluid flowing in the internal receiving space of the flapper body (231) to the outside through the fluid inlet / outlet passage (240) to make the internal receiving space into a vacuum state.

[0076] In addition, the throttle valve assembly (20) according to an embodiment of the present invention can control the temperature of the flapper (230) by supplying a temperature-controlling fluid through a fluid inlet / outlet passage (240) and causing the temperature-controlling fluid to flow into the internal receiving space of the flapper body (231).

[0077] Here, the temperature-regulating fluid may be a gas or liquid. Furthermore, the temperature-regulating fluid may have a temperature for cooling or heating to reduce temperature differences. For example, the temperature-regulating fluid may include, but is not limited to, cooling water, refrigerants, cooling gases, etc.

[0078] The drive unit (290) provides driving force to rotate the flapper (230) in both directions. To this end, the drive unit (290) may include a drive motor (not shown). The drive motor may receive external power to generate driving force to rotate the flapper (230) in both directions, and transmit the generated driving force to the flapper (230) through the shaft (232). The drive motor and the shaft (232) may each have the form of a conventional motor and shaft, respectively.

[0079] Additionally, the drive motor may be configured as a continuous rotation motor or as a step motor so that the flapper (230) can be moved in preset angular units.

[0080] At least one of the flange (210), flapper (230), first supporter (250), and second supporter (270) of the throttle valve assembly (20) according to an embodiment of the present invention may be manufactured using a 3D printing method.

[0081] The throttle valve assembly (20) according to an embodiment of the present invention can effectively control the surface temperature of the flapper (230) by creating a vacuum state in the internal accommodation space of the flapper (230) or by circulating a fluid for temperature control in the internal accommodation space of the flapper (230).

[0082] In addition, as a receiving space is formed inside the flapper (230), the weight of the flapper (230) is reduced, which can reduce the load on the driving motor and save driving energy.

[0083] Embodiments of the present invention can be usefully utilized in a substrate processing device that performs a substrate processing process, such as a deposition process, an etching process, a cleaning process, etc., on a substrate (or wafer).

Claims

1. A tube-shaped flange forming a flow path inside, a flapper installed on the flange and adjusting the exhaust amount by rotation, and a first supporter and a second supporter coupled to the flange to support the flapper in a bidirectional rotatable structure, The above flapper, A flapper body having a flat shape and a connecting hole formed through the center axis of rotation, and a receiving space formed on each side of the center axis of rotation through which a temperature control fluid is circulated; A rod-shaped shaft coupled to the first supporter and the second supporter along the coupling hole and connected to a driving motor to transmit driving force to rotate the flapper; and A fluid inlet / outlet path formed on the side of the above-mentioned joining hole to provide an inlet / outlet path for the temperature-controlling fluid. Throttle valve assembly including.

2. In paragraph 1, The above flapper body, At least one partition wall extending from the fluid inlet / outlet passage to the edge of the flapper body in a direction perpendicular to the rotational center axis to form a plurality of partition spaces in the receiving space; and At least one induction wall formed inside the above compartment space to induce the flow of the temperature-controlling fluid and extending from the fluid inlet / outlet passage in a direction perpendicular to the rotational center axis Throttle valve assembly including.

3. In paragraph 2, The above flapper body, A first connecting passage connected to the fluid inlet and outlet passage for supplying the temperature-controlling fluid to the compartment space; and A second connecting passage connected to the above compartment space and for discharging the temperature-controlled fluid inside the above compartment space to the fluid inlet / outlet passage Throttle valve assembly including.

4. In paragraph 1, The above fluid inlet and outlet paths are, A throttle valve assembly characterized by having a tubular structure formed along the periphery of the above-mentioned joining hole and having both sides connected to the first supporter and the second supporter, respectively.

5. In paragraph 1, The above flapper body, A throttle valve assembly characterized in that a heat exchange structure is formed inside the above-mentioned receiving space.

6. In paragraph 1, The first supporter and the second supporter are each, A throttle valve assembly characterized by having a structure that rotates together with the flapper.

7. In paragraph 1, The above first supporter, A central connecting hole providing a connecting space so that the above shaft can be connected to the above driving motor; A first buffer passage formed along the side perimeter of the central connecting hole and connected to the fluid inlet / outlet passage; and Includes a supply channel connected to the first buffer channel and supplying a temperature-controlling fluid to the receiving space, A throttle valve assembly characterized in that it is coupled to the above flange in a structure that can rotate in both directions.

8. In paragraph 7, The above second supporter, A support hole in which one end of the above shaft is accommodated; A second buffer passage formed along the side perimeter of the support hole and connected to the fluid inlet and outlet passage; and It includes a discharge channel that is connected to the second buffer channel and discharges the temperature control fluid supplied to the receiving space through the supply channel or discharges the fluid filled inside the receiving space to the outside. A throttle valve assembly characterized in that it is coupled in a bidirectional rotatable structure at a position corresponding to the first supporter on the flange.

9. In paragraph 1, The above throttle valve assembly, A throttle valve assembly characterized in that the temperature of the flapper is controlled by regulating the inside of the receiving space to be in a vacuum state by exhausting the fluid filled inside the receiving space to the outside through the fluid inlet / outlet passage.

10. In paragraph 1, The above throttle valve assembly, A throttle valve assembly characterized in that the temperature of the flapper is controlled by distributing the temperature-controlling fluid to the receiving space through the fluid inlet / outlet passage.

11. In paragraph 1, The above temperature control fluid is, A throttle valve assembly characterized by being liquid or gaseous.

12. In paragraph 1, A throttle valve assembly characterized in that at least one of the flange, the flapper, the first supporter, and the second supporter is manufactured by a 3D printing method.

13. In paragraph 1, The above throttle valve assembly, A throttle valve assembly including a ring-shaped sealing member coupled along the outer circumference of the flapper.

14. A process chamber forming a sealed processing space for performing substrate processing; An exhaust unit coupled to the process chamber and connected to a vacuum pump to perform exhaust and pressure control of the above processing space; and A substrate processing device installed in the exhaust section to control the fluid flow rate through the exhaust section for exhaust and pressure control of the processing space, and including a throttle valve assembly as described in any one of claims 1 to 13.

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