Simplified growth of nanowires

Abstract

The invention relates to a method for galvanically growing a plurality of nanowires (1) on an electrically conductive surface (2), comprising a) placing a film (3) on the surface (2), wherein the film (3) has a plurality of continuous pores (4), b) placing an elastic element (7), which is permeable to a first electrolyte (5), on the film (3), wherein the first electrolyte (5) is brought into contact with the film (3) via the elastic element (7), c) for a first growth period, galvanically growing the plurality of nanowires (1) via deposition from the first electrolyte (5) into the pores (4) of the film (3), while the surface is in a first growth zone (8), wherein the elastic element (7) is pressed against the film (3) by means of a pressing device (10) arranged in the first growth zone (8), d) lifting the elastic element (7) from the film (3), and e) for a second growth period, continuing the galvanic growth of the plurality of nanowires (1) via deposition from the first electrolyte (5) or from a second electrolyte (6) into the pores (4) of the film (3), while the surface (2) is in a second growth zone (9) different from the first growth zone (8).

Description

[0001] Simplified growth of nanowires

[0002] The invention relates to a method and an arrangement for the galvanic growth of a plurality of nanowires on an electrically conductive surface.

[0003] Methods and arrangements are known for producing nanowires. For example, nanowires can be obtained using galvanic processes or methods known from thin-film technology. Many known methods have in common that they require complex machinery and, therefore, are typically only used in laboratories and clean rooms. In particular, most known methods are not suitable for industrial use.

[0004] Many known arrangements and processes also have the disadvantage that the resulting nanowires vary greatly in their properties, particularly in terms of their quality. Nanowires from different growth processes often differ considerably, even when the same machines, starting materials, and / or recipes are used. The quality of nanowires often depends in particular on the skill of the user of a particular arrangement or process, on environmental influences, and / or simply on chance. All of this is made more difficult by the fact that nanowires are structures that are sometimes impossible to visualize even with a light microscope. Therefore, complex investigations may be necessary to even determine the described properties (and especially the fluctuations in them).

[0005] With known methods and arrangements, it is often not possible to cover larger areas with nanowires, particularly due to the quality differences described. It is therefore likely that the nanowire properties will differ between different areas of a larger covered area. This can be disadvantageous for many applications. DE 102021 105 125 describes a method for producing nanowires with particularly consistent quality.This is achieved by a method for galvanically growing a plurality of nanowires onto a surface, which method comprises: a) placing a foil onto the surface, the foil having a plurality of through-pores in which the nanowires can be grown from an electrolyte, b) placing an elastic element permeable to the electrolyte onto the foil, the electrolyte being brought into contact with the foil via the elastic element, c) for a first growth period, galvanically growing the plurality of nanowires, d) removing the elastic element, and e) for a second growth period, continuing the galvanic growth of the plurality of nanowires.

[0006] This process has proven successful in terms of the resulting nanowires. However, there is potential for improvement in terms of industrial-scale application. In particular, there is a need to more efficiently utilize available equipment for nanowire growth.

[0007] Based on this, the invention described is based on the task of being able to grow nanowires with the least possible equipment expenditure.

[0008] This object is achieved with the arrangement and the method according to the independent claims. Further advantageous embodiments are specified in the dependent claims. The features presented in the claims and in the description can be combined with one another in any technologically expedient manner. According to the invention, a method for the galvanic growth of a plurality of nanowires on an electrically conductive surface is presented. The method comprises: a) placing a film on the surface, wherein the film has a plurality of through-pores; b) placing an elastic element permeable to a first electrolyte on the film, wherein the first electrolyte is brought into contact with the film via the elastic element; c) for a first growth period, galvanically growing the plurality of nanowires by deposition from the first electrolyte into the pores of the film;while the surface is located in a first growth zone, wherein the elastic element is pressed against the film by a pressing device arranged in the first growth zone, d) lifting the elastic element from the film, and e) for a second growth period, continuing the galvanic growth of the plurality of nanowires by deposition from the first electrolyte or from a second electrolyte into the pores of the film, while the surface is located in a second growth zone different from the first growth zone.

[0009] Nanowires can be produced using the described process. A nanowire is defined here as any material body with a wire-like shape and a size in the range of a few nanometers to a few micrometers. A nanowire can, for example, have a circular, oval, or polygonal base. In particular, a nanowire can have a hexagonal base.

[0010] At the end of step e), the nanowires preferably have a length in the range from 100 nm [nanometers] to 100 μm [micrometers], in particular in the range from 500 nm to 60 μm. Furthermore, the nanowires preferably have a diameter in the range from 10 nm to 10 μm, in particular in the range from 30 nm to 2 μm. The term "diameter" refers to a circular base area; if the base area deviates from this, a comparable definition of a diameter is to be applied. It is particularly preferred that all nanowires used have the same length and the same diameter.

[0011] The described method is applicable to a wide variety of nanowire materials. Electrically conductive materials, especially metals such as copper, silver, gold, nickel, tin, and platinum, are preferred for the nanowires. However, non-conductive materials such as metal oxides are also preferred. Preferably, all nanowires are made of the same material.

[0012] The surface on which the nanowires are to be grown is electrically conductive. If the surface is part of an otherwise non-electrically conductive body (such as a substrate), electrical conductivity can be achieved, for example, by metallization. For example, a non-electrically conductive substrate can be coated with a thin layer of metal. In particular, an electrode layer can be created through metallization. Depending on the material of the surface and / or the electrode layer, it may be useful to provide an adhesive layer between the surface and the electrode layer to ensure adhesion between the surface and the electrode layer. In general, the surface can be formed on a component such as a wafer, a substrate or an electrical component, or on a tape.

[0013] Due to the electrical conductivity of the surface, it can be used as an electrode for the galvanic growth of nanowires. The substrate can be, in particular, a silicon substrate. The surface can be, in particular, the surface of a body provided with electrically conductive structures. This can be, in particular, a silicon chip or a so-called printed circuit board (PCB).

[0014] Using the described process, the nanowires can be grown galvanically in the pores of a foil onto the surface. An electrolyte is used for this purpose. The nanowires can be produced with particularly uniform quality if the foil is tightly pressed against the surface during growth and the electrolyte is evenly distributed over the foil. This is achieved in the described process by dividing the growth into two steps.

[0015] In the first growth step, an elastic element is applied to the film, which holds the film to the surface. The elastic element is permeable to the first electrolyte, allowing the first electrolyte to be released to the film via the elastic element. In the first growth step, the nanowires are grown to the point where the film is held to the surface by the nanowires. In the second growth step, the elastic element is no longer required. The elastic element is therefore lifted from the surface, allowing the electrolyte to be distributed even more evenly over the surface. Whether the elastic element is also permeable to the second electrolyte is therefore irrelevant.

[0016] In step a), the film is applied to the surface to be covered with nanowires. The film is preferably made of a plastic material, especially a polymer material. It is particularly preferred that the film be bonded to the surface in such a way that it does not slip. This could impair the quality of the grown nanowires.

[0017] The film has a large number of continuous pores in which the nanowires can be grown. The fact that the pores of the film are continuous is preferably realized in such a way that the pores form continuous channels from an upper side of the film to an underside of the film. In particular, it is preferred that the pores are cylindrical. However, it is also possible for the pores to be designed as channels with a curved course. A pore can, for example, have a circular, oval, or polygonal base area. In particular, a pore can have a hexagonal base area. The pores are preferably uniform (i.e., the pores preferably do not differ in terms of size, shape, arrangement, and / or distance from neighboring pores). If the nanowires are grown in steps c) and e), the pores are preferably filled (in particular completely) with the electrodeposited material.This gives the nanowires the size, shape, and arrangement of the pores. By selecting the film and the pores within it, the properties of the nanowires to be grown can be determined or influenced. The film can therefore also be referred to as a "template," "template film," or "stencil."

[0018] In step b), the elastic element permeable to the electrolyte is placed onto the film. The elastic element is preferably designed to dispense the first electrolyte at least at one dispensing point. The dispensing point is preferably flat, with particular preference for the first electrolyte to be able to be dispensed evenly over a dispensing surface. Furthermore, it is preferred for the elastic element to completely cover the film at the end of step b). The elastic element is preferably sponge-like. For example, the elastic element can be a sponge or a cloth. The elastic element is preferably designed such that it can additionally fix the film in place.

[0019] In steps c) and e), the nanowires are grown. This is initially carried out according to step c) in a first growth process. For this purpose, an electrical voltage is applied between the surface to be grown and an electrode. Both the surface and the electrode are in contact with the first electrolyte. This causes the nanowires to grow from the first electrolyte onto the surface and into the pores of the film. During the first growth period, the elastic element rests on the film. This prevents the film from slipping. During the first growth period, the nanowires are formed to the extent that they hold the film in place. The elastic element is then dispensable. It is therefore lifted from the film in step d) and removed to that extent. Preferably, the elastic element is removed in step d) to such an extent that it has no influence on step e).For the duration of step d), the applied electrical voltage can be switched off, thus interrupting growth to that extent. However, it is also conceivable for growth to continue uninterrupted, so that growth also takes place in step d). In this case, the first growth period and the second growth period are at least separated from each other by the removal of the elastic element between these two steps. In step e), the growth of the nanowires is continued for a second growth period using the second electrolyte. This basically occurs as in step c), but without the elastic element. In step e), therefore, no elastic element is in contact with the film. In step e), the same electrolyte as in step a) can be used, i.e. the first electrolyte. This electrolyte can accordingly also be referred to as the electrolyte.Alternatively, in step e) a different electrolyte can be used, which is referred to as the second electrolyte.

[0020] The first or second electrolyte can come into direct contact with the surface in step e). This facilitates the supply of the first or second electrolyte to the surface. This makes it easier to ensure that sufficient first or second electrolyte is present at all points on the surface at all times. If this were not the case, nanowire growth would not occur at that point despite the applied electrical voltage. This could compromise the quality of the resulting nanowires.

[0021] Growth in the first growth period occurs while the surface is located in a first growth zone. Growth in the second growth period occurs while the surface is located in a second growth zone, different from the first growth zone. The first growth zone and the second growth zone are spatial areas in which the surface can be located, particularly for the duration of the respective growth period. Steps c) and e) are therefore carried out spatially separated from each other. This allows for particularly efficient use of available equipment.

[0022] Growth in the first growth period requires more equipment than growth in the second growth period. In particular, the elastic element is used in the first growth period. This is pressed against the film using the pressing device. The pressing device is arranged in the first growth zone. This means that the pressing device is arranged far enough in the first growth zone that the elastic element can be pressed against the film using the pressing device when the surface is located in the first growth zone. It is not necessary, but also not excluded, that the pressing device extends beyond the first growth zone, for example into the second growth zone. However, it is preferred that the pressing device is arranged only in the first growth zone, but not in the second growth zone.It is sufficient that the pressing device is configured to exert a force on the film on the surface in the first growth zone, but not in the second growth zone. In the second growth zone, the pressing device preferably does not exert any force on the film on the surface.

[0023] By pressing the elastic element against the foil, the provision of the first electrolyte can be facilitated. For example, the electrolyte can be stimulated to escape from a sponge as the elastic element by pressing this sponge. Preferably, a spring is provided for the pressing, wherein the force with which the spring presses the elastic element against the foil is adjustable. Elastic or plastic devices, motor-driven, hydraulic and / or pneumatic adjustment units or lever mechanisms can also be used to generate the contact force. By adjusting the force, the dispensed amount of first electrolyte can be controlled. Furthermore, the foil is pressed onto the surface via the elastic element so that the foil is held positively, stationary and free of air pockets (between the foil and the surface as well as in the pores within the foil).

[0024] In step c), the elastic element is pressed against the film to such an extent that the elastic element is pressed against the film with a force that exceeds the weight of the elastic element. The elastic element's own weight is therefore not sufficient for the pressing action described in step c).

[0025] The elastic element is pressed against the film by the pressing device. For this purpose, the elastic element can rest loosely on a pressing surface of the pressing device on the one hand and loosely on the film on the other. The pressing surface of the pressing device can be formed, for example, on a stamp. In this case, the elastic element is held in position by the pressing force. However, it is also possible and even preferred for the elastic element to be firmly connected to the pressing surface of the pressing device. This makes handling of the elastic element easier because the elastic element can then be easily moved onto the film using the pressing device. The elastic element can, for example, be a cover for a stamp of the pressing device. If the elastic element is firmly connected to the pressing surface of the pressing device, the elastic element could also be considered part of the pressing device.For the sake of clarity, the elastic element is always considered to be a different element from the pressing device.

[0026] The equipment requirements for the second growth zone are lower than for the first. This is primarily due to the pressing device. This also applies if the pressing device extends into the second growth zone, because even in this case, it is sufficient for the pressing device to press the elastic element against the film in the first growth zone.

[0027] In the described process, growth in the second growth period, which places fewer demands on equipment, takes place at a different location than growth in the first growth period. This allows for particularly efficient use of the equipment. In particular, the pressing device is available for other purposes after step c).

[0028] The advantages of the described arrangement are particularly evident when growing comparatively long nanowires. If the entire growth process were carried out in one location and with the same equipment, the equipment commitment would be directly proportional to the length of the nanowires. However, if steps c) and e) are carried out spatially separated from each other, as in the described process, there is an effort for growing the nanowires in step c), which is independent of the length, and an effort for growth in step e). Only the latter is proportional to the length of the nanowires. The total effort for growing the nanowires is therefore comparatively low for comparatively long lengths. In particular, the equipment used for growth in the first growth period can be used after step c) to carry out the growth of a first growth period for a different surface or for a different part of the same surface.This can be done, in particular, while the second growth period is running for the surface considered first. Accordingly, it is preferred that steps a) to e) be performed at different times for different surfaces or for different sections of the surface.

[0029] In step c), the surface is located in the first growth zone, while in step e), the surface is located in the second growth zone. This implies that the surface is transferred from the first growth zone to the second growth zone after the end of step c) and before the beginning of step e). Whether this occurs before, during, or after the elastic element is lifted from the film on the surface according to step d) is irrelevant.

[0030] The first growth zone and the second growth zone can be spatially separated from one another and can even be located in different buildings. The first growth zone and the second growth zone can accordingly be formed in different machines. In this case, in addition to the first electrolyte bath, a second electrolyte bath is also provided, wherein the first growth zone is formed in the first electrolyte bath and the second growth zone in the second electrolyte bath. Alternatively, the first growth zone and the second growth zone can also be formed as different regions of the same machine. It is possible for the first growth zone and the second growth zone to be adjacent to one another. Both the first growth zone and the second growth zone can be formed within the first electrolyte bath.

[0031] Steps a) to e) can be carried out in an assembly line manner. Furthermore, further steps can also be carried out in an assembly line manner, for example, removing the film after step e), cleaning the surface after step e), and / or applying a protective substance after step e). The first growth period preferably has a length that is at least 5% of the length of the second growth period, preferably at least 10% of the length of the second growth period. The first growth period preferably has a length that is at most 50% of the length of the second growth period, preferably at most 30% of the length of the second growth period.

[0032] The length of the first growth period and the length of the second growth period can be fixed. Alternatively, the preferred embodiment of the method is one in which a transferred charge is determined from an electric current used in step c) for the galvanic growth of the nanowires, wherein step c) is terminated when the transferred charge has reached a predetermined limit.

[0033] In this embodiment, the length of the first growth period is variable. Step c) is terminated as soon as the growth of the nanowires has progressed to the point where they can hold the film without the elastic element. The progress of the nanowire growth is not measured directly. Instead, the charge transferred during galvanic growth is determined. This is a measure of how many atoms were converted according to the galvanic growth. The transferred charge can be determined by time integration of the electric current used for the galvanic growth of the nanowires. If the current is constant, the charge is determined by multiplying the current by time. The electric current used for the galvanic growth of the nanowires is the electron current flowing between the surface and the electrode.

[0034] In the present embodiment, step c) is terminated when the transferred charge has reached a predetermined limit. A suitable limit can be determined experimentally. The limit is preferably selected such that, after completion of step c), the film is held to the surface by the nanowires to a desired extent. It is sufficient for one side of a strip or component to be covered with nanowires. However, the method can also be used to cover two opposing surfaces with nanowires. In this way, a strip or component can be covered with nanowires on both sides simultaneously in one process. There are various ways to implement this.

[0035] In this case, the method can be described as one for the galvanic growth of a plurality of nanowires on a first electrically conductive surface and a second electrically conductive surface opposite the first surface. The two surfaces can in particular be formed on a strip or a component. The method can comprise the following steps: a) placing a first foil on the first surface and a second foil on the second surface, wherein the first foil and the second foil each have a plurality of through-pores; b) placing a first elastic element permeable to a first electrolyte on the first foil and placing a second elastic element permeable to the first electrolyte on the second foil;wherein the first electrolyte is brought into contact with the first film via the first elastic element and is brought into contact with the second film via the second elastic element, c) for a first growth period, galvanically growing the plurality of nanowires by deposition from the first electrolyte into the pores of the first film and the second film, while the first surface and the second surface are located in a first growth zone, wherein the first elastic element is pressed against the first film by a pressing device arranged in the first growth zone and the second elastic element is pressed against the second film by the pressing device, d) lifting the first elastic element from the first film and lifting the second elastic element from the second film, and e) for a second growth period,Continuing the galvanic growth of the plurality of nanowires by deposition from the first electrolyte or from a second electrolyte into the pores of the first film and the second film, while the first surface and the second surface are located in a second growth zone different from the first growth zone.

[0036] The galvanic growth of the nanowires on the first surface and on the second surface can be carried out with a common electrical energy source or with a first electrical energy source for the galvanic growth of the nanowires on the first surface and a second electrical energy source for the galvanic growth of the nanowires on the second surface.

[0037] In general, two opposing surfaces can be grown with nanowires by immersing the component or strip in an electrolyte bath in such a way that both surfaces are accessible to the electrolyte. This can be done in different ways. If a component is held vertically in an electrolyte bath, both surfaces are accessible to the electrolyte as long as the component is not resting against a side wall of the electrolyte bath. A component or strip can be held horizontally in an electrolyte bath, for example by using a spacer to prevent contact with the bottom of the electrolyte bath and / or by holding the component or strip with a holder. A component can also be inserted into a frame which ensures a distance from the bottom of the electrolyte bath.

[0038] As an alternative to simultaneously covering both sides of the opposing surfaces, it is also possible to first cover a first side of a component or strip with the nanowires, turn the component or strip over, and then cover a second side of the component or strip opposite the first side with nanowires. The nanowires on the first side can be protected, for example, by a protective varnish. However, simultaneously covering both sides is faster. In a preferred embodiment of the method, the plurality of nanowires is grown at a higher growth rate in the second growth period than in the first growth period.

[0039] Growth in the first growth period can be understood as the growth of the nanowires. The goal is, in particular, to grow the nanowires far enough on the surface that they can hold the film to the surface. A lower growth rate is advantageous for this purpose. This is particularly due to the elastic element used in the first growth period to press the film to the surface. Even if the elastic element is permeable to the first electrolyte, the elastic element can slow the supply of the first electrolyte to the surface. To achieve uniform growth of the nanowires, the nanowires are grown comparatively slowly in the present embodiment.

[0040] In the second growth period, the nanowires have already grown to the surface and can therefore continue to grow at a faster rate. Since the elastic element was removed before the start of the second growth period, the first or second electrolyte can reach the surface unhindered. In the second growth period, the nanowires can therefore grow evenly even at a comparatively higher growth rate. The second growth step can therefore be described as volume growth.

[0041] The growth rate can be adjusted by growth parameters, in particular by the electrical voltage used for growth. The growth rate in the first growth period is preferably 10 to 80% of the growth rate in the second growth period, in particular 30 to 60%.

[0042] In a further preferred embodiment of the method, the respective length of the nanowires at the end of the first growth period is 1 / 40 to 1 / 2 of the length of the nanowires at the end of the second growth period, in particular 1 / 30 to 1 / 10 of the length of the nanowires at the end of the second growth period. It is sufficient for the nanowires to be grown during the first growth period so that the nanowires hold the film to the surface.

[0043] The length of the nanowires at the end of the second growth period is preferably in the range of 100 nm (nanometers) to 100 μm (micrometers), especially in the range of 500 nm to 60 μm. If this length is, for example, 40 μm, 1 μm of it can be grown in the first growth period, while the remaining 39 μm are grown in the second growth period. In this case, the respective length of the nanowires at the end of the first growth period is 1 / 40 of the length of the nanowires at the end of the second growth period.

[0044] In a further preferred embodiment of the method, the surface is formed on a strip which is provided as a first roll before step a) and / or which is wound into a second roll after step e). The "and" case is preferred.

[0045] In this embodiment, the method can be referred to as a "roll-to-roll process." A particularly large surface can be covered with nanowires. Steps a) to e) are performed sequentially for each length of the ribbon. The individual lengths are sequentially covered with nanowires at staggered times. For example, while growth is carried out for a first length of the ribbon in the first growth period, growth for a second length of the ribbon can already be carried out in the second growth period. A third length of the ribbon can then already be fully covered.

[0046] In this embodiment, the surface can be moved through the assembly by pulling the tape through the first electrolyte bath. This can be done continuously or discontinuously.

[0047] The surface can be connected to the first electrical energy source by contacting the strip outside the first electrolyte bath. This can be the case, for example, at the first roller and / or the second roller. The "and" case is preferred because it ensures electrical contact when the strip enters the first electrolyte bath at the start of the process and when the strip exits the first electrolyte bath at the end of the process.

[0048] As a further aspect of the invention, an arrangement for the galvanic growth of a plurality of nanowires onto an electrically conductive surface is presented. The arrangement comprises: a first electrolyte bath containing a first electrolyte, a first electrode in contact with the first electrolyte in the first electrolyte bath, a first electrical energy source connected to the first electrode such that the nanowires are galvanically grown by deposition from the first electrolyte into through-pores of a film on the surface when the surface is immersed in the first electrolyte bath and an electrical voltage is applied between the surface and the first electrode using the first electrical energy source, wherein the arrangement has a first growth zone and a second growth zone, and wherein the arrangement further comprises: an elastic element permeable to the first electrolyte,which is arranged in the first growth zone, a pressing device for pressing the elastic element against the surface when the surface is located in the first growth zone.,

[0049] The advantages and features of the method are applicable and transferable to the arrangement, and vice versa. The method is preferably carried out with the arrangement. The arrangement is preferably configured to operate according to the method.

[0050] The arrangement comprises the first electrolyte bath with the first electrolyte, the first electrode, and the first electrical energy source. This means that there is at least one electrolyte bath, at least one electrode, and at least one electrical energy source. The fact that these elements are each referred to as "first" does not imply that there are further corresponding elements. However, since there may be further corresponding elements, as described below, for the sake of clarity, these are already referred to as the "first" elements. Alternatively, the designation "first" can always be omitted if there is no further corresponding element.

[0051] The first electrolyte bath can be designed as a container open at the top, in particular as a tub. The first electrolyte bath is at least partially filled with the first electrolyte. The surface can be immersed in the first electrolyte bath, for example, by placing a component or a strip on which the surface is formed into the first electrolyte bath.

[0052] The arrangement further comprises the first electrode, which is in contact with the first electrolyte in the first electrolyte bath. The first electrode can therefore be used for the galvanic growth of the nanowires. If only a single electrode is provided, this serves the galvanic growth of the nanowires in both the first growth zone and the second growth zone. However, it is preferred that the first electrode is formed only within the first growth zone and that the arrangement further comprises a second electrode, which is formed only within the second growth zone. This allows the growth of the nanowires in the two growth zones to be individually controlled.

[0053] The arrangement further comprises a first electrical energy source. The term electrical energy source is used herein as a generic term for current source and voltage source. The electrical energy source is preferably a current source. An electrical energy source is understood here to mean a device that can apply an electrical voltage between a pair of terminals. The term electrical energy source is to be understood functionally. It is therefore sufficient that there is a pair of terminals between which an electrical voltage is applied. These terminals can be designed as outputs of a housing, as is often the case with voltage sources and current sources. However, this is not required.

[0054] The first electrical energy source is connected to the first electrode in such a way that the nanowires are grown galvanically by deposition from the first electrolyte into continuous pores of a film on the surface when the surface is immersed in the first electrolyte bath and an electrical voltage is applied between the surface and the first electrode using the first electrical energy source.

[0055] The surface can be connected to the first electrical energy source in various ways. For example, a cable can be connected to the surface. Alternatively, a guide rail can be provided at the bottom of the first electrolyte bath.

[0056] If an electrical voltage is applied between the surface and the first electrode using the first electrical energy source, electroplating occurs from the first electrolyte. Even if the first electrical energy source is a current source, an electrical voltage is applied during operation. The difference from a voltage source concerns whether the output voltage is regulated as such or based on the corresponding electrical current.

[0057] The arrangement further comprises the elastic element. The elastic element is only required in the first growth period and consequently only in the first growth zone. Accordingly, it is preferred that the elastic element is only arranged within the first growth zone. However, it is fundamentally harmless if the elastic element also extends beyond the first growth zone. It is sufficient that the elastic element can be lifted off the surface before the surface reaches the second growth zone. It is therefore sufficient that the elastic element is not in contact with the surface in the second growth zone. However, this in turn is not a structural property of the arrangement, but can depend, for example, on the design of the component or the strip on which the surface is formed.The arrangement further comprises the pressing device for pressing the elastic element against the surface when the surface is located in the first growth zone. The pressing device can be designed in various ways. The precise design of the pressing device is not important for the functioning of the arrangement described here. Preferably, the pressing device for pressing the film against the surface comprises a spring, wherein the force with which the spring presses the elastic element against the film is adjustable. Elastic or plastic devices, motor-driven, hydraulic and / or pneumatic adjustment units or lever mechanisms can also be part of the pressing device and can be used to generate the pressing force. By adjusting the force, the dispensed amount of first electrolyte can be controlled.

[0058] Like the elastic element, the pressing device is only required during the first growth period and consequently only in the first growth zone. Accordingly, it is preferred that the pressing device be arranged only within the first growth zone. However, it is generally harmless if the pressing device also extends beyond the first growth zone. It is sufficient that the pressing device is not in contact with the surface in the second growth zone. However, this, in turn, is not a structural property of the arrangement, but can depend, for example, on the design of the component or the strip on which the surface is formed.

[0059] The surface can be moved through the arrangement in order to sequentially carry out the growth of the first growth period and the second growth period. The surface can be moved through the arrangement continuously or discontinuously. The surface can be driven in various ways. If the surface is formed on a belt, for example, the surface can be moved through the arrangement by pulling the belt through the first electrolyte bath. If the surface is formed on a component, for example, the surface can be moved through the arrangement by moving the component through the first electrolyte bath. For this purpose, the component can be driven manually or by a drive. The belt and the component can slide on a floor of the first electrolyte bath. Alternatively, transport rollers can be provided on the floor of the first electrolyte bath.A flat support surface is preferably provided beneath the pressing device. This prevents the pressing device from exerting uneven pressure on the surface, for example, due to transport rollers.

[0060] In a preferred embodiment of the arrangement, both the first growth zone and the second growth zone are formed within the first electrolyte bath.

[0061] In this embodiment, there is only one electrolyte bath. However, for the sake of clarity, this is referred to here as the first electrolyte bath. Both the first growth zone and the second growth zone are formed in the first electrolyte bath. This is possible by forming the first growth zone and the second growth zone in the same device. The first electrolyte bath is at least partially filled with the first electrolyte. This requires that growth in the first growth period and the second growth period is carried out with the same, the first, electrolyte.

[0062] In a further preferred embodiment of the arrangement, the first electrode is arranged in the first growth zone, the arrangement further comprising: a second electrode which is in contact with the first electrolyte in the first electrolyte bath and which is arranged within the second growth zone, a second electrical energy source which is connected to the second electrode in such a way that the galvanic growth of the nanowires continues by deposition from the first electrolyte into the pores of the film on the surface when the surface is immersed in the first electrolyte bath and an electrical voltage is applied between the surface and the second electrode using the second electrical energy source. In this embodiment, the two growth zones each have their own electrode.This makes it possible to use different growth parameters for the first and second growth periods, particularly different electrical voltages applied between the surface and the respective electrode. To make this possible, two electrical energy sources are also provided.

[0063] An electrical energy source is understood here as a device that can apply an electrical voltage between a pair of terminals. A device with two pairs of individually controllable terminals is therefore considered to be two electrical energy sources. This applies even if the two electrical energy sources share a common terminal. The first electrical energy source and the second electrical energy source can be housed in a common housing, but this is not required.The first electrical energy source and the second electrical energy source can also be realized, for example, in that, on the one hand, a first output and a second output of a voltage source form the first electrical energy source and, on the other hand, a first terminal of an electrical resistor is connected to the first output, so that a second terminal of the electrical resistor together with the second output of the voltage source forms the second electrical energy source.

[0064] In a further preferred embodiment of the arrangement, the first growth zone is formed in the first electrolyte bath, the arrangement further comprising: a second electrolyte bath with the first electrolyte or with a second electrolyte, the second growth zone being formed within the second electrolyte bath, a second electrode which is in contact with the first electrolyte or with the second electrolyte in the second electrolyte bath, a second electrical energy source which is connected to the second electrode in such a way that the galvanic growth of the nanowires is continued by deposition from the first electrolyte or from the second electrolyte into the pores of the film on the surface when the surface is immersed in the second electrolyte bath and an electrical voltage is applied between the surface and the second electrode using the second electrical energy source.

[0065] In this embodiment, the first growth zone and the second growth zone are formed in different electrolyte baths. Accordingly, the arrangement comprises, in addition to the first electrolyte bath, a second electrolyte bath. The second electrolyte bath is at least partially filled with the first electrolyte or with a second electrolyte.

[0066] The second electrolyte bath can be designed as a container open at the top, in particular as a tub. The second electrolyte bath is at least partially filled with the first or second electrolyte. The surface can be immersed in the second electrolyte bath, for example, by placing a component or a strip on which the surface is formed into the second electrolyte bath.

[0067] The arrangement further comprises a second electrode, which is in contact with the first electrolyte or with the second electrolyte in the second electrolyte bath. Which of the two electrolytes the second electrode is in contact with naturally depends on which of the two electrolytes is in the second electrolyte bath. If the second electrolyte bath is at least partially filled with the first electrolyte, the second electrode is in contact with the first electrolyte in the second electrolyte bath. If the second electrolyte bath is at least partially filled with the second electrolyte, the second electrode is in contact with the second electrolyte in the second electrolyte bath.

[0068] Preferably, the first electrode is formed only within the first growth zone, and the second electrode is formed only within the second growth zone. Thus, the growth of the nanowires in the two growth zones can be individually controlled. The second electrical energy source is connected to the second electrode in such a way that the galvanic growth of the nanowires continues by deposition from the first electrolyte or from the second electrolyte into the pores of the foil on the surface when the surface is immersed in the second electrolyte bath and an electrical voltage is applied between the surface and the second electrode using the second electrical energy source.

[0069] The surface can be connected to the second electrical energy source in various ways. For example, a cable can be connected to the surface. Alternatively, a guide rail can be provided at the bottom of the second electrolyte bath.

[0070] If an electrical voltage is applied between the surface and the second electrode using the second electrical energy source, electroplating occurs from either the first electrolyte or the second electrolyte—depending on which of these two electrolytes is present in the second electrolyte bath. Even if the second electrical energy source is a current source, it applies an electrical voltage during operation. The difference from a voltage source concerns whether the output voltage is regulated as such or based on the corresponding electrical current.

[0071] The second growth zone is formed within the second electrolyte bath. In the second growth zone, the component can be held vertically. This saves space. In the first growth zone, however, a vertical arrangement of the component would be more difficult to implement due to the pressing device. The pressing device has moving parts that are difficult to position within the first electrolyte bath. Keeping the surface in the second growth zone vertical also has the advantage that the electrolyte in the second electrolyte bath can be mixed particularly well by gas bubbles. Mixing the electrolyte has the advantage that fresh, unused electrolyte always reaches the film and is thus available for the growth of the nanowires. Such mixing would also be possible in principle with moving parts such as a stirrer. However, this could then also lead to electrodeposition on the surface of the stirrer.The gas bubbles rise in the second electrolyte bath and thus move spontaneously past the surface. If the surface were arranged horizontally, several nozzles would be required to achieve the same effect.

[0072] In the present embodiment, the nanowires can be grown on the surface of a component, in particular as a batch process. For this purpose, the growth of the first growth period can be carried out using a first device that has the first electrolyte bath with the first growth zone, the first electrode, the first voltage source, the elastic element, and the pressing device. The component can then be transferred to a second device that has the second electrolyte bath with the second growth zone, the second electrode, and the second voltage source. This allows the growth of the second growth period to be carried out. The equipment requirements for the second device are lower than for the first device, in particular because the second device does not require the elastic element and the pressing device. The first device is only required for growth in the first growth period.The simpler second device can be used for growth in the second growth period, while the first device is already used for growth in the first growth period, for example, for a subsequent component. Alternatively, the first device can also be used for a different purpose during this period, for example, for a single-stage growth process that requires the film to be pressed against the surface throughout its entire duration.

[0073] Dividing the process into a first device and a second device also has the advantage that the two devices can be subject to different legal requirements due to their different designs. For example, the first device requires little electrolyte and low electrical power. Accordingly, the safety requirements for the first device are lower, particularly with regard to protection against explosions, hazardous substances, and electricity. It is therefore easier to find a location for the first device. The transfer from the first device to the second device can, in principle, be unlimited in both space and time. For practical reasons, however, it is preferred that the component is transferred directly from the first device to the second device, for example to avoid the formation of an oxide layer on the parts of the nanowires that have already grown.However, this can also be achieved through other measures, such as applying a protective substance or using a protective atmosphere.

[0074] In a further preferred embodiment of the arrangement, the elastic element is designed to encircle a part of the pressing device.

[0075] The elastic element can be designed as an endless belt. The pressing device can, for example, comprise a body around which the elastic element is designed to encircle. The elastic element can be driven in such a way that the elastic element can move the surface through a portion of the assembly. The elastic element can serve as a track drive.

[0076] In a further preferred embodiment of the arrangement, the first electrode is formed on the pressing device.

[0077] The first electrode is in contact with the first electrolyte. For this purpose, the first electrode is conveniently held in the first electrolyte bath. In the present embodiment, this is achieved by the pressing device, so that a separate holder is unnecessary.

[0078] If a second electrode is also provided, this can also be formed on the pressing device. In this case, the pressing device serves as a holder for the second electrode. This is independent of the fact that the second electrode is not pressed against the film on the surface by the pressing device.

[0079] The invention is explained in more detail below with reference to the figures. The figures show particularly preferred embodiments, to which the invention is not limited, however. The figures and the proportions depicted therein are merely schematic. They show:

[0080] Fig. 1: a first embodiment of an arrangement according to the invention for galvanically growing a plurality of nanowires on an electrically conductive surface,

[0081] Fig. 2: a second embodiment of an arrangement according to the invention for galvanically growing a plurality of nanowires on an electrically conductive surface,

[0082] Fig. 3: a third embodiment of an arrangement according to the invention for galvanically growing a plurality of nanowires on an electrically conductive surface,

[0083] Fig. 4: a fourth embodiment of an arrangement according to the invention for galvanically growing a plurality of nanowires on an electrically conductive surface,

[0084] Fig. 5: a fifth embodiment of an arrangement according to the invention for galvanically growing a plurality of nanowires on an electrically conductive surface.

[0085] Fig. 6: an enlarged view of the surface as it can be used in the arrangements of Figs. 1 to 5.

[0086] Fig. 1 shows a first embodiment of an arrangement 15 for galvanically growing a plurality of nanowires 1 (shown in Fig. 6) onto an electrically conductive surface 2. The surface 2 is formed on a component 14. In the example shown, several such components 14 are moved successively through the arrangement 15, as indicated by arrows.

[0087] The arrangement 15 comprises a first (and in this embodiment only) electrolyte bath 16 with a first (and in this embodiment only) electrolyte 5. The arrangement 15 has a first growth zone 8 and a different second growth zone 9, both of which are formed within the first electrolyte bath 16. In the first growth zone 8, an elastic element 7 permeable to the first electrolyte 5 is provided. Furthermore, the arrangement 15 comprises a pressing device 10 for pressing the elastic element 7 against the surface 2 when the surface 2 is located in the first growth zone 8. The elastic element 7 is designed to encircle a part of the pressing device 10. If the elastic element 7 is moved in the manner of a caterpillar drive as indicated by a curved arrow, the component

[0088] 14 to the right and to that extent by part of the arrangement

[0089] 15. Furthermore, the component 14 can be moved manually or by a drive (not shown).

[0090] Furthermore, the arrangement 15 comprises a first electrode 18 arranged in the first growth zone 8 and a second electrode 19 arranged in the second growth zone 9, each of which is in contact with the first electrolyte 5 in the first electrolyte bath 16. The first electrode 18 is formed within the elastic element 7 and on the pressing device 10.

[0091] Furthermore, the arrangement 15 comprises a first electrical energy source 20, which is connected to the first electrode 18 in such a way that the nanowires 1 are grown galvanically by deposition from the first electrolyte 5 into through-pores 4 (shown in Fig. 6) of a film 3 on the surface 2 when the surface 2 is immersed in the first electrolyte bath 16 and an electrical voltage is applied between the surface 2 and the first electrode 18 using the first electrical energy source 20. For this purpose, the first electrical energy source 20 is still connected to the surface 2. This is indicated by way of example in that the first electrical energy source 20 is connected to the component 14 on the far left and the components 14 are interconnected.

[0092] Furthermore, the arrangement 15 comprises a second electrical energy source 21, which is connected to the second electrode 19 in such a way that the galvanic growth of the nanowires 1 continues by deposition from the first electrolyte 5 into the pores 4 of the film 3 on the surface 2 when the surface 2 is immersed in the first electrolyte bath 16 and an electrical voltage is applied between the surface 2 and the second electrode 19 using the second electrical energy source 21. This is indicated by way of example in that the second electrical energy source 21 is connected to the component 14 on the far left via the same connection as the first electrical energy source 20, and the components 14 are interconnected. The first electrical energy source 20 and the second electrical energy source 21 are formed in a common housing and share one of the two connections.

[0093] With the arrangement 15, a method for galvanically growing a plurality of nanowires 1 on the electrically conductive surface 2 can be carried out, which method comprises: a) placing the film 3 on the surface 2, wherein the film 3 has the plurality of through-pores 4, b) placing the elastic element 7 permeable to the first electrolyte 5 on the film 3, wherein the first electrolyte 5 is brought into contact with the film 3 via the elastic element 7, c) for a first growth period, galvanically growing the plurality of nanowires 1 by deposition from the first electrolyte 5 into the pores 4 of the film 3, while the surface 2 is located in the first growth zone 8, wherein the elastic element 7 is pressed against the film 3 by the pressing device 10 arranged in the first growth zone 8, d) lifting the elastic element 7 from the surface 2, and e) for a second growth period,Continuing the galvanic growth of the plurality of nanowires 1 by deposition from the first electrolyte 5 into the pores 4 of the film 3, while the surface 2 is located in the second growth zone 9.

[0094] Steps a) to e) are carried out for the components 14 at different times, one after the other. For example, a component 14 can be placed in the first electrolyte bath 16, as shown for the component 14 on the far left. The component 14 can then be transported to the first growth zone 8, and the growth of the first growth period can be carried out there. This is illustrated by a component 14 being shown in the first growth zone 8. The component 14 can then be transported to the second growth zone 9, and the growth of the second growth period can be carried out there. This is illustrated by a component 14 being shown in the second growth zone 9. As a result of the transfer from the first growth zone 8 to the second growth zone 9, the component 14 moves out of the effective range of the pressing device 10, via which the elastic element 7 is pressed against the film 3.In this respect, the elastic element 7 is lifted off the component 14. Finally, the component 14 can be removed from the first electrolyte bath 16, as shown for the component 14 on the far right. Several components 14 can thus be moved through the assembly 15 in a conveyor-like manner, continuously or discontinuously, and thereby undergo steps a) to e). The assembly 15 shown in Fig. 1 is particularly suitable for the continuous case.

[0095] The plurality of nanowires 1 can be grown at a higher growth rate, particularly in the second growth period, than in the first growth period. The respective length of the nanowires 1 at the end of the first growth period is 1 / 40 to 1 / 2 of the length of the nanowires at the end of the second growth period.

[0096] Fig. 2 shows a second embodiment of an arrangement 15 for the galvanic growth of a plurality of nanowires 1 (shown in Fig. 6) onto an electrically conductive surface 2. The arrangement 15 of Fig. 2 is similar to that of Fig. 1. Therefore, only the differences from the arrangement 15 of Fig. 1 will be described. In Fig. 2, the pressing device 10 is designed as a stamp. The first electrode 18 and the second electrode 19 are each formed on the underside of the stamp. In the first growth zone 8, the elastic element 7 is held below the stamp. The elastic element 7 can be pressed against the film 3 on the surface 2 via the stamp. The second electrode 19 can be brought close to the surface 2 in the second growth zone 9 using the stamp. The stamp therefore also has a significance in the second growth zone 9.However, the stamp does not come into contact with the surface 2 in the second growth zone 9, so that the pressing device 10 does not exert any force on the surface 2 in the second growth zone 9.

[0097] Several components 14 can be moved through the assembly 15 in a conveyor-like and discontinuous manner, particularly in a synchronized manner, and thereby undergo steps a) to e). The punch can be moved upwards at any time to advance the components 14 one position further.

[0098] Fig. 3 shows a third embodiment of an arrangement 15 for galvanically growing a plurality of nanowires 1 (shown in Fig. 6) onto an electrically conductive surface 2. The arrangement 15 of Fig. 3 is similar to that of Fig. 1. Therefore, only the differences from the arrangement 15 of Fig. 1 will be described. In Fig. 3, the surface 2 is formed on a belt 11, which is provided as a first roll 12 before step a) and which is wound into a second roll 13 after step e). The embodiment of Fig. 3 is an example of a "roll-to-roll" process. The belt 11 is guided by auxiliary rollers 22. The belt 11 can be moved through the arrangement 15 in a conveyor-like manner and continuously or discontinuously. The arrangement 15 of Fig. 3 is particularly suitable for the continuous case.The first electrical energy source 20 and the second electrical energy source 21 are connected to the first roller 12 and the second roller 13 via a common connection. In this respect, the electrical energy sources 20, 21 are connected to the surface 2.

[0099] Fig. 4 shows a fourth embodiment of an arrangement 15 for galvanically growing a plurality of nanowires 1 (shown in Fig. 6) onto an electrically conductive surface 2. The arrangement 15 of Fig. 4 is similar to that of Fig. 2. Therefore, only the differences from the arrangement 15 of Fig. 2 are described. In Fig. 4—as in Fig. 3—the surface 2 is formed on a belt 11, which is provided as a first roll 12 before step a) and which is wound into a second roll 13 after step e). The embodiment of Fig. 4 is a further example of a "roll-to-roll" process. The belt 11 is guided by auxiliary rollers 22. The belt 11 can be moved discontinuously, in particular in a synchronized manner, through the arrangement 15. The first electrical energy source 20 and the second electrical energy source 21 are - as in Fig. 3 - connected to the first roller 12 and the second roller 13 via a common connection.In this respect, the electrical energy sources 20,21 are connected to the surface 2.

[0100] Fig. 5 shows a fifth embodiment of an arrangement 15 for the galvanic growth of a plurality of nanowires 1 (shown in Fig. 6) onto an electrically conductive surface 2. The arrangement 15 of Fig. 5 has a functional principle which is comparable to that of the arrangement 15 of Fig. 1. Therefore, only the differences from the arrangement 15 of Fig. 1 are described. In Fig. 5, the first growth zone 8 is formed within the first electrolyte bath 16. The first growth zone 8 is formed in a first device 23. For this purpose, the first electrolyte bath 16 with the first electrolyte 5, the pressing device 10, the first electrode 18, the elastic element 7 and the first electrical energy source 20 are formed in the first device 23. The first electrical energy source 20 is separate from the second electrical energy source 21. The first device 23 is used for growth in the first growth period.

[0101] For growth in the second growth period (growth step), the arrangement 1 comprises a second device 24. In the example shown, the second device 24 has four treatment stations 25. Each of the components 14 is treated in only one of the treatment stations 25. Thus, while the first growth step can be performed in the first device 23 for only a single component 14 at a time, the second growth step can be performed in the second device 24 for up to four components 14 simultaneously or with an overlap. The second growth period can be correspondingly longer than the first growth period.

[0102] The individual treatment stations 25 are configured identically to one another. Each treatment station 25 comprises a second electrolyte bath 17 containing a second electrolyte 6 and a second electrode 19, which is in contact with the second electrolyte 6 in the second electrolyte bath 17. The second growth zone 9 is formed in the second electrolyte bath 17.

[0103] To save space, the second electrolyte baths 17 are designed so that the components 14 can be immersed vertically into the respective second electrolyte bath 17. Since no pressing device is provided in the second growth zone 9, this alignment of the components 14 is easier in the second growth zone 9 than in the first growth zone 8.

[0104] Furthermore, each of the treatment stations 25 comprises a respective second electrical energy source 21, which is connected to the corresponding second electrode 19 in such a way that the galvanic growth of the nanowires 1 continues by deposition from the second electrolyte 6 into the pores 4 of the film 3 on the surface 2 when the surface 2 is immersed in the respective second electrolyte bath 17 and an electrical voltage is applied between the surface 2 and the corresponding second electrode 19 using the corresponding second electrical energy source 21. The second electrical energy sources 21 can be formed in a common housing and thus be considered a single device.

[0105] Fig. 6 shows an enlarged view of surface 2, as it can be used in the arrangements 1 from Figs. 1 to 5. Surface 2 can be formed equally well on a strip 11 or on a component 14, which is indicated by the reference symbol "11 / 14". A film 3 with continuous pores 4 lies on surface 2. The nanowires 1 are grown into the pores 4. This only occurs where a structuring layer 26 has an opening 27. The elastic element 7 lies on film 3. List of reference symbols

[0106] 1 Nanowires

[0107] 2 Surface

[0108] 3 slides

[0109] 4 pores

[0110] 5 first electrolyte

[0111] 6 second electrolyte

[0112] 7 elastic element

[0113] 8 first growth zone

[0114] 9 second growth zone

[0115] 10 Pressing device

[0116] 11 volumes

[0117] 12 first role

[0118] 13 second role

[0119] 14 component

[0120] 15 Arrangement

[0121] 16 first electrolyte bath

[0122] 17 second electrolyte bath

[0123] 18 first electrode

[0124] 19 second electrode

[0125] 20 first electrical energy source second electrical energy source 22 auxiliary roller

[0126] 23 first device

[0127] 24 second device

[0128] 25 Treatment station 26 Structuring layer

[0129] 27 Omission

Claims

Claims 1. A method for the galvanic growth of a plurality of nanowires (1) on an electrically conductive surface (2), comprising a) placing a film (3) on the surface (2), wherein the film (3) has a plurality of through-pores (4), b) placing an elastic element (7) permeable to a first electrolyte (5) on the film (3), wherein the first electrolyte (5) is brought into contact with the film (3) via the elastic element (7), c) for a first growth period, galvanically growing the plurality of nanowires (1) by deposition from the first electrolyte (5) into the pores (4) of the film (3) while the surface (2) is located in a first growth zone (8), wherein the elastic element (7) is pressed against the film (3) by a pressing device (10) arranged in the first growth zone (8), d) lifting the elastic element (7) from the film (3), and e) for a second growth period,Continuing the galvanic growth of the plurality of nanowires (1) by deposition from the first electrolyte (5) or from a second electrolyte (6) into the pores (4) of the film (3), while the surface (2) is located in a second growth zone (9) different from the first growth zone (8).

2. The method according to claim 1, wherein the plurality of nanowires (1) are grown at a higher growth rate in the second growth period than in the first growth period.

3. Method according to one of the preceding claims, wherein a respective length of the nanowires (1) at the end of the first growth period is 1 / 40 to 1 / 2 of a length of the nanowires at the end of the second growth period.

4. Method according to one of the preceding claims, wherein the surface (2) is formed on a strip (11) which is provided as a first roll (12) before step a) and / or which is wound up into a second roll (13) after step e).

5. An arrangement (15) for the galvanic growth of a plurality of nanowires (1) on an electrically conductive surface (2), comprising: a first electrolyte bath (16) with a first electrolyte (5), a first electrode (18) which is in contact with the first electrolyte (5) in the first electrolyte bath (16), a first electrical energy source (20) which is connected to the first electrode (18) in such a way that the nanowires (1) are grown galvanically by deposition from the first electrolyte (5) into through-pores (4) of a film (3) on the surface (2) when the surface (2) is immersed in the first electrolyte bath (16) and an electrical voltage is applied between the surface (2) and the first electrode (18) using the first electrical energy source (20), wherein the arrangement (15) has a first growth zone (8) and a second growth zone (9),and wherein the arrangement (15) further comprises: an elastic element (7) permeable to the first electrolyte (5), which is arranged in the first growth zone (8), a pressing device (10) for pressing the elastic element (7) against the surface (2) when the surface (2) is located in the first growth zone (8).

6. Arrangement (15) according to claim 5, wherein both the first growth zone (8) and the second growth zone (9) are formed within the first electrolyte bath (16).

7. The arrangement (15) according to claim 6, wherein the first electrode (18) is arranged in the first growth zone (8), and wherein the arrangement (15) further comprises: a second electrode (19) which is in contact with the first electrolyte (5) in the first electrolyte bath (16) and which is arranged within the second growth zone (9), a second electrical energy source (21) which is connected to the second electrode (19) in such a way that the galvanic growth of the nanowires (1) is continued by deposition from the first electrolyte (5) into the pores (4) of the film (3) on the surface (2) when the surface (2) is immersed in the first electrolyte bath (16) and an electrical voltage is applied between the surface (2) and the second electrode (19) using the second electrical energy source (21).

8. The arrangement (15) according to claim 5, wherein the first growth zone (8) is formed in the first electrolyte bath (16), and wherein the arrangement (15) further comprises: a second electrolyte bath (17) with the first electrolyte (5) or with a second electrolyte (6), wherein the second growth zone (9) is formed within the second electrolyte bath (17), a second electrode (19) which is in contact with the first electrolyte (5) or with the second electrolyte (6) in the second electrolyte bath (17), a second electrical energy source (21) which is connected to the second electrode (19) such that the galvanic growth of the nanowires (1) is continued by deposition from the first electrolyte (5) or from the second electrolyte (6) into the pores (4) of the film (3) on the surface (2),when the surface (2) is immersed in the second electrolyte bath (17) and an electrical voltage is applied between the surface (2) and the second electrode (19) by the second electrical energy source (21).

9. Arrangement (15) according to one of claims 5 to 8, wherein the elastic element (7) is designed to encircle a part of the pressing device (10).

10. Arrangement (15) according to one of claims 5 to 9, wherein the first electrode (18) is formed on the pressing device (10).

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