Two-dimensional motion stage device

Abstract

Provided in the present invention is a two-dimensional motion stage device. A first sliding structure is rigidly connected to a center portion of a first motion stage and is flexibly connected to both side portions thereof; and the first motion stage is rigidly connected to a center portion of a second-direction measuring scale and is flexibly connected to both side portions thereof. By means of the rigid connection between the first sliding structure and the center portion of the first motion stage and the flexible connection between the first sliding structure and both side portions of the first motion stage, as well as the rigid connection between the first motion stage and the center portion of the second-direction measuring scale and the flexible connection between the first motion stage and both side portions of the second-direction measuring scale, the present invention prevents positional drifts of the second-direction measuring scale caused by thermal deformation of the first motion stage, thus improving the measurement precision of the motion stage; moreover, the lengths of a first decoupling surface and a second decoupling surface in a second direction being configured to be smaller than that of a mounting surface can reduce the influence of thermal deformation of the first motion stage on the position of the second-direction measuring scale; additionally providing a second flexible member which is made of a material having a low expansion coefficient reduces the influence of thermal deformation on the second-direction measuring scale; and finally, respectively providing on the first decoupling surface and the second decoupling surface a first position and a second position each having a minimum length in the second direction further reduces the influence of thermal deformation of the first motion stage on the position of the second-direction measuring scale.

Description

A two-dimensional motion platform device Technical Field

[0001] This invention belongs to the field of semiconductor integrated circuit manufacturing equipment technology, and in particular relates to a two-dimensional motion platform device. Background Technology

[0002] With the development of the semiconductor equipment industry, higher requirements have been placed on the motion stage, one of the core components of semiconductor assembly. Semiconductor assembly requires higher production efficiency, thus placing higher demands on the motion speed, acceleration, and duty cycle of the motion stage; at the same time, as silicon wafer manufacturing processes become smaller and smaller, higher demands have also been placed on the motion measurement and control accuracy of the motion stage.

[0003] However, with further increases in motion speed and miniaturization of semiconductor manufacturing processes, the temperature rise caused by factors such as motor heating, frictional heat generation, and localized ambient temperature increases on the motion stage has begun to have a significant impact on the measuring tools on the motion stage. The temperature rise of the motion stage can easily cause thermal deformation of the materials of components connected to the measuring tools, such as linear scales, leading to thermal drift and inaccurate measurement scales. The measuring tools are used to measure and provide feedback on the motion distance and position of the motion stage, and to adjust the stage's position and motion state accordingly. The accuracy of the measuring tools is fundamental to controlling the motion speed and position accuracy of the motion stage. Therefore, the increasingly prominent heat generation problem in the miniaturization and high-speed development of motion stages has a significant adverse impact on the control accuracy of the motion stage, hindering its adaptation to miniaturized, high-precision application scenarios.

[0004] Therefore, there is an urgent need for a new motion table design that can reduce or eliminate the impact of thermal deformation on the measurement accuracy of the motion table.

[0005] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating the understanding of those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because these solutions have been described in the background section of this application.

[0006] Summary of the Invention

[0007] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a two-dimensional motion platform device to solve the problem of poor measurement accuracy caused by thermal drift of the measuring tool of the motion platform in the prior art.

[0008] To achieve the above objectives, the present invention provides a two-dimensional motion platform device, which includes: a first-direction motion system and a second-direction motion system;

[0009] The first direction motion system includes: a first motion stage, a base, and a first sliding structure;

[0010] The first motion platform is slidably connected to the base platform along the first direction via a first sliding structure;

[0011] The first sliding structure includes a guide rail portion and a slider portion that are arranged opposite to each other;

[0012] The guide rail is fixedly mounted on the base; the slider is rigidly connected to the center of the first motion stage and flexibly connected to both sides of the first motion stage; the two sides of the first motion stage are symmetrically arranged about the center of the first motion stage along the second direction.

[0013] The first motion platform is self-symmetrical with respect to the first symmetry plane perpendicular to the second direction, and the center of the first motion platform is positioned corresponding to the position of the first symmetry plane.

[0014] The second-direction motion system includes: a second motion table, and a second-direction measuring ruler and a second-direction measuring reading head arranged opposite to each other;

[0015] The second motion platform is slidably connected to the first motion platform along the second direction;

[0016] The center of the second direction measuring ruler is rigidly connected to the first motion table, and the two sides of the second direction measuring ruler are flexibly connected to the first motion table; the two sides of the second direction measuring ruler are symmetrically arranged about the center of the second direction measuring ruler along the second direction.

[0017] The second direction measuring ruler is self-symmetrical with respect to the second symmetry plane perpendicular to the second direction, and the center of the second direction measuring ruler is set to correspond to the position of the second symmetry plane.

[0018] The second direction measuring head is fixedly mounted on the second motion table;

[0019] The first sliding structure is self-symmetrical with respect to the third symmetry plane perpendicular to the second direction, and the first, second, and third symmetry planes coincide; the first direction is perpendicular to the second direction.

[0020] Optionally, the two-dimensional motion platform device further includes: a first flexible connector;

[0021] Both sides of the first motion table are flexibly connected to the slider part through the first flexible connector;

[0022] The first flexible connector includes: a first motion mounting surface, a first decoupling surface, and a guide rail mounting surface connected in sequence;

[0023] The first motion mounting surface is connected to the first motion table, and the guide rail mounting surface is connected to the slider part;

[0024] The length of the first decoupling surface along the second direction is less than the lengths of the first motion mounting surface and the guide rail mounting surface along the second direction.

[0025] Optionally, the length of the first motion mounting surface in the third direction is 5 mm to 10 mm; and / or the length of the first decoupling surface in the third direction is 2 mm to 8 mm; and / or the length of the guide rail mounting surface in the third direction is 1 mm to 5 mm.

[0026] Optionally, the length of the first decoupling surface along the second direction is uniform; or the length of the first decoupling surface along the second direction is shortest at the first position and increases from the first position to both sides along the third direction; the first position is located on the first decoupling surface, and the first position is not the end position of the first decoupling surface in the third direction; the third direction is perpendicular to the first direction and the second direction.

[0027] Optionally, when the length of the first decoupling surface along the second direction is uniform, the length of the first moving mounting surface along the second direction is greater than or equal to 10 times the length of the first decoupling surface along the second direction, and the length of the guide rail mounting surface along the second direction is greater than or equal to 10 times the length of the first decoupling surface along the second direction.

[0028] When the length of the first decoupling surface along the second direction increases from the first position along the third direction to both sides, the length of the first moving mounting surface along the second direction is greater than or equal to 10 times the length of the first decoupling surface along the second direction at the first position, and the length of the guide rail mounting surface along the second direction is greater than or equal to 10 times the length of the first decoupling surface along the second direction at the first position.

[0029] Optionally, when the length of the first decoupling surface along the second direction is uniform, the length of the first decoupling surface along the second direction is 0.4 mm to 1.2 mm;

[0030] When the length of the first decoupling surface along the second direction increases from the first position along the third direction to both sides, the length of the first decoupling surface along the second direction at the first position is 0.4 mm to 1.2 mm.

[0031] Optionally, when the length of the first decoupling surface along the second direction increases from the first position along the third direction to both sides, the maximum length of the first decoupling surface along the second direction is 2 mm to 4 mm.

[0032] Optionally, the two-dimensional motion platform device further includes: a second connector; the second connector includes a mounting base, a central fixing structure, and two sets of second flexible members, one side of the mounting base is fixed to the second direction measuring scale, and the other side is fixed to the central fixing structure and the second flexible members respectively;

[0033] The second direction measuring ruler is rigidly connected to the first motion table through a central fixed structure.

[0034] The second direction measuring ruler is flexibly connected to the first motion table through the second flexible component;

[0035] The central fixing structure is set at the center of the measuring scale in the second direction; the two sets of second flexible members are set at the two sides of the measuring scale in the second direction, respectively; the two sets of second flexible members are symmetrically arranged about the central fixing structure along the second direction.

[0036] Optionally, the coefficient of thermal expansion of the material of the second connector is less than 10. -6 / ℃.

[0037] Optionally, the second flexible component includes: a second motion mounting surface and a second decoupling surface connected in sequence, wherein the second decoupling surface is fixed to the mounting base and the second motion mounting surface is fixed to the first motion stage; the length of the second decoupling surface along the second direction is less than the length of the second motion mounting surface along the second direction.

[0038] Optionally, the length of the second decoupling surface in the first direction is 1 mm to 4 mm; and / or the length of the second motion mounting surface in the first direction is 1 mm to 3 mm.

[0039] Optionally, the length of the second decoupling surface along the second direction is uniform; or the length of the second decoupling surface along the second direction is shortest at the second position and increases from the second position along the first direction to both sides, the second position is located on the second decoupling surface, and the second position is not the end position of the second decoupling surface in the first direction; the third direction is perpendicular to the first direction and the second direction.

[0040] Optionally, when the length of the second decoupling surface along the second direction is uniform, the length of the second moving mounting surface along the second direction is greater than or equal to 10 times the length of the second decoupling surface along the second direction.

[0041] When the length of the second decoupling surface along the second direction increases from the second position along the first direction to both sides, the length of the second moving mounting surface along the second direction is greater than or equal to 10 times the length of the second decoupling surface along the second direction at the second position.

[0042] Optionally, when the length of the second decoupling surface along the second direction is uniform, the length of the second decoupling surface along the second direction is 0.4 mm to 0.8 mm;

[0043] When the length of the second decoupling surface along the second direction increases from the second position along the first direction to both sides, the length of the second decoupling surface along the second direction at the second position is 0.4 mm to 0.8 mm.

[0044] Optionally, when the length of the second decoupling surface along the second direction increases from the second position along the first direction to both sides, the maximum length of the second decoupling surface along the second direction is 2 mm to 4 mm.

[0045] As described above, the two-dimensional motion platform device of the present invention has the following beneficial effects:

[0046] The present invention uses a first sliding structure and a second direction measuring scale that are rigidly connected to the center of the first motion platform and flexibly connected to both sides, so that the second direction measuring scale does not drift due to the thermal deformation of the first motion platform in the second direction, thereby improving the measurement accuracy of the motion platform.

[0047] The present invention sets a first decoupling surface and a second decoupling surface with a length in the second direction that is smaller than the mounting surface, thereby further reducing the influence of the thermal deformation of the first motion stage in the second direction on the position of the measuring scale in the second direction;

[0048] The present invention uses a material with a low coefficient of thermal expansion for the second flexible component to reduce the influence of thermal deformation on the measuring ruler in the second direction.

[0049] The present invention sets the first position and the second position with the minimum length on the first decoupling surface and the second decoupling surface, respectively, to further reduce the influence of the thermal deformation of the first motion stage in the second direction on the position of the measuring scale in the second direction. Attached Figure Description

[0050] Figure 1 shows a schematic diagram of the structure of the two-dimensional motion platform device in Embodiment 1 of the present invention.

[0051] Figure 2 shows a schematic diagram of the first direction motion system in Embodiment 1 of the present invention.

[0052] Figure 3 shows a schematic diagram of the second-direction motion system in Embodiment 1 of the present invention.

[0053] Figure 4 shows a schematic diagram of the structure of the first flexible connector in Embodiment 1 of the present invention.

[0054] Figure 5 shows a schematic diagram of the structure of the second connector in Embodiment 1 of the present invention.

[0055] Figure 6 shows a schematic diagram of the structure of the second decoupling surface in Embodiment 1 of the present invention.

[0056] Figure 7 shows a schematic diagram of the structure of the heat insulation component and the heat sink in Embodiment 1 of the present invention.

[0057] Figure 8 shows a schematic diagram of the structure of the first decoupling surface in Embodiment 2 of the present invention.

[0058] Figure 9 shows a schematic diagram of the structure of the second decoupling surface in Embodiment 3 of the present invention.

[0059] Component Numbering Explanation: 11. First Motion Stage; 12. Base; 131. Side Guide Rail; 132. Center Guide Rail; 133. Side Slider; 134. Center Slider; 14. First Direction Motor; 15. First Flexible Connector; 151. First Motion Mounting Surface; 152. First Decoupling Surface; 153. Guide Rail Mounting Surface; 161. First Direction Measuring Ruler; 162. First Direction Measuring Reading Head; AA. First Symmetry Plane; 21. Second Motion Stage; 221. Guide Rail Assembly; 222. Slider Assembly; 23. Second Connector; 231. Mounting Base; 232. Center Fixed Structure; 233. Second Flexible Component; 2331. Second Motion Mounting Surface; 2332. Second Decoupling Surface; 234. Clamping Plate; 241. Second Direction Measuring Ruler; 242. Second Direction Measuring Reading Head; 25. Second Direction Motor; BB. Fourth Symmetry Plane; 31. Thermal insulation components; 32. Heat sink; 331. Heat dissipation channel inlet; 332. Heat dissipation channel outlet; 34. Motion cable. Detailed Implementation

[0060] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0061] In the detailed description of embodiments of the present invention, for ease of explanation, the schematic diagrams illustrating the device structure may be partially enlarged without adhering to the general scale, and the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. Furthermore, in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0062] For ease of description, spatial relation terms such as “below,” “under,” “lower than,” “below,” “above,” and “upper” may be used herein to describe the relationship between one element or feature shown in the accompanying drawings and other elements or features. It will be understood that these spatial relation terms are intended to include directions other than those depicted in the accompanying drawings for devices in use or operation.

[0063] In the context of this application, the structure described above the first feature may include embodiments in which the first and second features are in direct contact, or embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0064] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0065] For ease of explanation, the first direction mentioned in the following embodiments is the X direction, the second direction is the Y direction, and the third direction is the Z direction. The first symmetry plane AA is parallel to the XOZ plane, and the fourth symmetry plane BB is parallel to the YOZ plane.

[0066] Example 1:

[0067] As shown in Figure 1, this embodiment provides a two-dimensional motion platform device, which includes: a first direction motion system and a second direction motion system;

[0068] As shown in Figures 1 and 2, the first direction motion system includes: a first motion platform 11, a base 12, and a first sliding structure;

[0069] The first motion platform 11 is slidably connected to the base platform 12 along the first direction via a first sliding structure;

[0070] The first sliding structure includes a guide rail portion and a slider portion that are arranged opposite to each other;

[0071] The guide rail is fixedly mounted on the base 12; the slider is rigidly connected to the center of the first motion stage 11 and flexibly connected to both sides of the first motion stage 11; the two sides of the first motion stage 11 are symmetrically arranged about the center of the first motion stage 11 along the second direction.

[0072] The first motion platform 11 is self-symmetrical with respect to the first symmetry plane AA perpendicular to the second direction, and the center of the first motion platform 11 is positioned corresponding to the position of the first symmetry plane AA.

[0073] As shown in Figures 1 and 3, the second direction motion system includes: a second motion table 21, and a second direction measuring ruler 241 and a second direction measuring reading head 242 arranged opposite to each other;

[0074] The second motion platform 21 is slidably connected to the first motion platform 11 along the second direction;

[0075] The center of the second direction measuring ruler 241 is rigidly connected to the first motion table 11, and the two sides of the second direction measuring ruler 241 are flexibly connected to the first motion table 11; the two sides of the second direction measuring ruler 241 are symmetrically arranged about the center of the second direction measuring ruler 241 along the second direction.

[0076] The second direction measuring ruler 241 is self-symmetrical with respect to the second symmetry plane perpendicular to the second direction, and the center of the second direction measuring ruler 241 is set to correspond to the position of the second symmetry plane.

[0077] The second direction measuring head 242 is fixedly mounted on the second motion table 21;

[0078] The first sliding structure is self-symmetrical with respect to the third symmetry plane perpendicular to the second direction. The first symmetry plane AA, the second symmetry plane, and the third symmetry plane coincide. The first direction is perpendicular to the second direction.

[0079] In the prior art, when the motion speed, acceleration and duty cycle of the motion table are increased, the measuring tools used to measure the motion state and position of the motion table will deform due to thermal expansion caused by the heat generated by the motor and friction of the motion table. This will cause the scale position to shift, resulting in inaccurate measurement readings and affecting the control accuracy of the motion state of the motion table.

[0080] This invention, by setting a slider portion of the first sliding structure to rigidly connect with the center of the first motion stage 11, and by aligning the first symmetry plane AA, the second symmetry plane, and the third symmetry plane, ensures that the thermal center plane of the overall motion stage structure is referenced to the center of the first motion stage 11, thus guaranteeing that the center plane of the second-direction measuring ruler 241 coincides with the thermal center plane. Simultaneously, by flexibly connecting the slider portion of the first sliding structure to both sides of the first motion stage 11, with the two sides of the first motion stage 11 symmetrically arranged about their center along the second direction, the flexible connection between the first motion stage 11 and the slider portion of the first sliding structure is rigidly connected in the second direction. The degree of interaction between the first motion stage 11 and the slider part of the first sliding structure in the second direction is close to 0 (i.e., the interaction force between the first motion stage 11 and the slider part of the first sliding structure in the second direction is close to 0). Combined with the rigid connection of the central part, the thermal center plane of the first motion stage 11 perpendicular to the second direction is relatively fixed, so that the first motion stage 11 undergoes thermal deformation on both sides of the second direction with the thermal center plane as the center. The flexible connection between the two sides of the first motion stage 11 and the measuring scale 241 in the second direction, and the rigid connection between the central part of the first motion stage 11 and the measuring scale 241 in the second direction, reduces the impact of the thermal deformation of the first motion stage 11 in the second direction on the measuring scale 241 in the second direction, thereby ensuring the reliability of the structure.

[0081] In one embodiment, as shown in Figures 2 and 4, the two-dimensional motion platform device further includes: a first flexible connector 15;

[0082] Both sides of the first motion table 11 are flexibly connected to the slider part through the first flexible connector 15.

[0083] The first flexible connector 15 includes: a first motion mounting surface 151, a first decoupling surface 152, and a guide rail mounting surface 153 connected in sequence;

[0084] The first motion mounting surface 151 is connected to the first motion table 11, and the guide rail mounting surface 153 is connected to the slider part;

[0085] The length of the first decoupling surface 152 along the second direction is less than the lengths of the first motion mounting surface 151 and the guide rail mounting surface 153 along the second direction.

[0086] This invention sets the length of the first decoupling surface 152 in the second direction to be smaller than the lengths of the first motion mounting surface 151 and the guide rail mounting surface 153 in the second direction, making the first decoupling surface 152 more prone to deformation. When the first motion stage 11 undergoes thermal deformation, the first flexible connector 15 is subjected to deformation stress. Since the length of the first decoupling surface 152 in the second direction is small, its stiffness in the second direction is infinitely close to 0. This makes the reaction force of the first flexible connector 15 on the first motion stage 11 in the second direction close to 0, and makes the stiffness of the flexible connection between the first motion stage 11 and the slider part of the first sliding structure close to 0. Combined with the rigid connection of the first motion stage 11 at the thermal center surface, the first motion stage 11 undergoes thermal deformation on both sides in the second direction with the thermal center surface as the center.

[0087] Specifically, the lengths of the first motion mounting surface 151 in the first and second directions are determined by the size and position of the first motion stage 11; the lengths of the guide rail mounting surface 153 in the first and second directions are determined by the size and position of the first sliding structure.

[0088] In one embodiment, the first flexible connector 15 is made of Invar or stainless steel.

[0089] The present invention further improves the ability to guide the thermal deformation of the first motion stage 11 by setting the first flexible connector 15 to a material with a low coefficient of thermal expansion.

[0090] In one embodiment, the bottom of the first motion table 11 and the first flexible connector 15 are provided with a groove, the first motion mounting surface 151 is disposed in the groove, and the side of the first motion mounting surface 151 is connected to the side of the groove.

[0091] This invention increases the contact area between the first motion mounting surface 151 and the first motion platform 11 by setting the first motion mounting surface 151 to extend into the bottom groove of the first motion platform 11, thereby improving the connection reliability between the first motion mounting surface 151 and the first motion platform 11 and improving space utilization. At the same time, this connection method can be applied to structures in which the first motion mounting surface 151 is longer in the third direction and shorter in the second direction. When the first motion platform 11 is used in a confined space, the size of the first motion platform 11 in the second direction will be limited. The structure of the first motion mounting surface 151 can adapt to the space requirements of such a first motion platform 11, improving the flexibility of structural design and installation.

[0092] In one embodiment, the length of the first motion mounting surface 151 in the third direction is 5 mm to 10 mm.

[0093] In one embodiment, the length of the first decoupling surface 152 in the third direction is 2 mm to 8 mm.

[0094] In one embodiment, the length of the guide rail mounting surface 153 in the third direction is 1 mm to 5 mm.

[0095] The present invention further forms a flexible connection with near-zero rigidity between the first motion stage 11 and the slider part of the first sliding structure by setting the first motion mounting surface 151, the first decoupling surface 152 and the guide rail mounting surface 153 within the length range of the third direction. Combined with the rigid connection of the first motion stage 11 at the thermal center surface, the first motion stage 11 undergoes thermal deformation on both sides along the second direction with the thermal center surface as the center.

[0096] In this embodiment, as shown in FIG4, the length of the first decoupling surface 152 along the second direction is uniform.

[0097] In one embodiment, the length of the first motion mounting surface 151 along the second direction is greater than or equal to 10 times the length of the first decoupling surface 152 along the second direction, and the length of the guide rail mounting surface 153 along the second direction is greater than or equal to 10 times the length of the first decoupling surface 152 along the second direction.

[0098] By setting the length relationship of the first motion mounting surface 151, the guide rail mounting surface 153, and the first decoupling surface 152 in the second direction, this invention can further ensure that the stiffness of the flexible connection between the first motion stage 11 and the slider part of the first sliding structure is close to 0. Combined with the rigid connection of the first motion stage 11 on the thermal center surface, the first motion stage 11 undergoes thermal deformation on both sides along the second direction with the thermal center surface as the center.

[0099] In one embodiment, the length of the first decoupling surface 152 along the second direction is 0.4 mm to 1.2 mm.

[0100] By setting the absolute length of the second direction of the first decoupling surface 152, the present invention enables the flexible feature of the first decoupling surface 152 to better ensure that the stiffness of the flexible connection between the first motion stage 11 and the slider part of the first sliding structure is close to 0. Combined with the rigid connection of the first motion stage 11 at the thermal center surface, the first motion stage 11 undergoes thermal deformation on both sides along the second direction with the thermal center surface as the center; at the same time, it ensures that its stiffness can support the first motion stage 11.

[0101] In one embodiment, as shown in FIG5, the two-dimensional motion platform device further includes: a second connector 23; the second connector 23 includes a mounting base 231, a central fixing structure 232 and two sets of second flexible members 233, one side of the mounting base 231 is fixed to the second direction measuring ruler 241, and the other side is fixed to the central fixing structure 232 and the second flexible members 233 respectively.

[0102] The second direction measuring ruler 241 is rigidly connected to the first motion table 11 through the central fixed connection structure 232;

[0103] The second direction measuring ruler 241 is flexibly connected to the first motion table 11 through the second flexible member 233;

[0104] The central fixed structure 232 is set at the center of the second direction measuring ruler 241; the two sets of second flexible members 233 are respectively set at the two sides of the second direction measuring ruler 241; the two sets of second flexible members 233 are symmetrically arranged about the central fixed structure 232 along the second direction.

[0105] The present invention utilizes the structure of the second connecting member 23, in which the central fixed structure 232 achieves a rigid connection between the center of the second direction measuring ruler 241 and the first motion stage 11, and the second flexible member 233 achieves a flexible connection between the two sides of the second direction measuring ruler 241 and the first motion stage 11. The mounting base 231 enables the installation of the second direction measuring ruler 241 with both rigid and flexible connections. At the same time, by setting two sets of second flexible members 233 symmetrically about the central fixed structure 232 along the second direction, when the first motion stage 11 deforms, the reaction forces of the two sets of second flexible members 233 on the mounting base 231 are equal in magnitude and opposite in direction, thus canceling each other out, thereby ensuring the reliability of the rigid connection between the center of the second direction measuring ruler 241 and the first motion stage 11.

[0106] In one embodiment, each group of second flexible elements 233 includes 2-8 second flexible elements 233. Specifically, as shown in FIG5, each group includes 2 second flexible elements 233.

[0107] The present invention improves the ability of the second flexible member 233 to absorb the thermal deformation of the first motion stage 11 by setting the number of second flexible members 233 in each group, while ensuring the support strength of the second flexible member 233 for the second direction measuring ruler 241.

[0108] In one embodiment, as shown in FIG5, when the length of the second direction measuring ruler 241 along the second direction is greater than or equal to 300 mm, the contact area between the central fixed connection structure 232 and the first motion table 11 is fixedly connected in the second direction with a length f of 5 mm to 20 mm.

[0109] The present invention ensures the reliability of the connection between the central fixed structure 232 and the first motion stage 11 and the ability to withstand deformation forces in the second direction by setting the contact area between the central fixed structure 232 and the second motion stage 21 within the length range of the second direction.

[0110] In one embodiment, the coefficient of thermal expansion of the material of the second connector 23 is less than 10. -6 / ℃.

[0111] In one embodiment, the material of the second connector 23 is Invar steel.

[0112] By setting the material of the second connector 23 to a material with a low coefficient of thermal expansion, the present invention reduces the thermal deformation of the second connector 23, thereby further reducing the impact of the thermal deformation of the first motion stage 11 on the thermal drift of the second direction measuring ruler 241.

[0113] In one embodiment, as shown in FIG6, the second flexible member 233 includes a second motion mounting surface 2331 and a second decoupling surface 2332 connected in sequence. The second decoupling surface 2332 is fixed to the mounting base 231, and the second motion mounting surface 2331 is fixed to the first motion stage 11. The length of the second decoupling surface 2332 along the second direction is less than the length of the second motion mounting surface 2331 along the second direction.

[0114] This invention, by setting the length of the second decoupling surface 2332 in the second flexible member 233 in the second direction to be less than that of the second motion mounting surface 2331, ensures that when the first motion stage 11 undergoes thermal deformation, the second flexible member 233 is subjected to deformation stress. Due to the small length of the second decoupling surface 2332 in the second direction, the stiffness of the second decoupling surface 2332 deforming along the second direction is infinitely close to 0. The stress of the second decoupling surface 2332 on the mounting base 231 and the reaction force on the first motion stage 11 are close to 0. Thus, the second decoupling surface 2332 absorbs the thermal deformation from the first motion stage 11 in the second direction, preventing the second direction measuring scale 241 from being affected by the deformation of the first motion stage 11 and causing thermal drift.

[0115] Specifically, the length of the second motion mounting surface 2331 in the second direction and the third direction is determined by the size and position of the first motion stage 11.

[0116] In one embodiment, as shown in FIG6, the length h1 of the second decoupling surface 2332 in the first direction is 1 mm to 4 mm.

[0117] In one embodiment, as shown in FIG6, the length h2 of the second motion mounting surface 2331 in the first direction is 1 mm to 3 mm.

[0118] By setting the length of the second decoupling surface 2332 and the second motion mounting surface 2331 in the first direction, the present invention further improves the absorption capacity of the second flexible member 233 for the thermal deformation of the first motion stage 11 and further reduces the possibility of thermal drift of the measuring ruler 241 in the second direction.

[0119] In this embodiment, as shown in FIG6, the length h3 of the second decoupling surface 2332 along the second direction is uniform.

[0120] In one embodiment, the length of the second motion mounting surface 2331 along the second direction is greater than or equal to 10 times the length of the second decoupling surface 2332 along the second direction.

[0121] The present invention further ensures the ability of the second decoupling surface 2332 to absorb the thermal deformation of the first motion stage 11 by setting the length relationship of the second motion mounting surface 2331 and the second decoupling surface 2332 in the second direction.

[0122] In one embodiment, the length of the second decoupling surface 2332 along the second direction is 0.4 mm to 0.8 mm.

[0123] The present invention sets the absolute length of the second decoupling surface 2332 in the second direction, so that the second decoupling surface 2332 can absorb the thermal deformation of the first motion stage 11 to the maximum extent, while ensuring that its rigidity can support the measuring scale 241 in the second direction.

[0124] Specifically, the rigid connection in this embodiment mainly refers to glue connection and welding connection; glue connection is preferred because it is more convenient to operate.

[0125] In one embodiment, as shown in FIG5, the second direction measuring ruler 241 and the mounting base 231 are fixedly connected at the position of the first symmetry plane AA by hard glue, and the second direction measuring ruler 241 and the mounting base 231 are connected at the position of the first symmetry plane AA by a clip 234.

[0126] In one embodiment, the second flexible member 233 is fixedly connected to the first motion table 11 by means of screws.

[0127] In one embodiment, the central fixed structure 232 is fixedly connected to the first motion table 11 by rigid adhesive.

[0128] In one embodiment, the rigid adhesive is preferably an epoxy resin adhesive.

[0129] In one embodiment, the slider portion is located inside the guide rail portion; or the slider portion partially surrounds the upper and side portions of the guide rail portion. Specifically, other suitable positional relationships and connection methods between the slider and the guide rail can also be selected, all of which are within the protection scope of this invention.

[0130] In one embodiment, the slider portion and the guide rail portion are a mechanical sliding structure or an air-bearing sliding structure. Specifically, other suitable sliding structures can also be selected, all of which are within the protection scope of this invention.

[0131] In one embodiment, as shown in FIG2, the guide rail portion includes a central guide rail 132 and two sets of side guide rails 131, and the slider portion includes a central slider 134 and two sets of side sliders 133. The central slider 134 is rigidly connected to the center of the first motion table 11, and the two sets of side sliders 133 are flexibly connected to the two sides of the first motion table 11 respectively. The central guide rail 132 is correspondingly arranged with the central slider 134, and the two sets of side guide rails 131 are correspondingly arranged with the two sets of side sliders 133 respectively.

[0132] In one embodiment, as shown in FIG3, the second direction motion system further includes a second sliding structure, which also includes a guide rail group 221 and a slider group 222. The guide rail group 221 is self-symmetrical with respect to the first symmetry plane AA.

[0133] In one embodiment, the second motion table 21 is self-symmetrical with respect to the fourth symmetry plane BB perpendicular to the first direction, and both the guide rail assembly 221 and the slider assembly 222 are self-symmetrical with respect to the fourth symmetry plane BB.

[0134] This embodiment sets the second motion stage 21 and the second sliding structure to be self-symmetrical about the fourth symmetry plane BB, so that the thermal deformation of the second motion stage 21 along the first direction can also be symmetrically distributed, thereby reducing the problems of misalignment and deformation caused by uneven stress distribution and thus improving the reliability of the structure.

[0135] In one embodiment, the slider assembly 222 is located inside the guide rail assembly 221; or the slider assembly 222 partially surrounds the upper and side portions of the guide rail assembly 221. Specifically, other suitable positional relationships and connection methods between the slider and the guide rail can also be selected, all of which are within the protection scope of this invention.

[0136] In one embodiment, the slider assembly 222 and the guide rail assembly 221 are mechanical sliding structures or air-bearing sliding structures. Specifically, other suitable sliding structures can also be selected, all of which are within the scope of protection of this invention.

[0137] In one embodiment, the first direction motion system further includes two sets of first direction measuring rulers 161 and two sets of first direction measuring heads 162. The two sets of first direction measuring rulers 161 are symmetrically arranged about a first symmetry plane AA along a second direction, and the two sets of first direction measuring heads 162 are symmetrically arranged about a first symmetry plane AA along a second direction. One set of first direction measuring rulers 161 and one set of first direction measuring heads 162 are arranged opposite to each other.

[0138] In one embodiment, the first direction measuring ruler 161 is fixed to the base 12, and the first direction measuring reading head 162 is fixed to the first motion table 11.

[0139] The present invention reduces the thermal drift of the first direction measuring scale 161 caused by the thermal deformation of the first motion stage 11 by fixing the first direction measuring scale 161 to the base 12.

[0140] In one embodiment, the base 12 is made of marble, and / or the first direction measuring ruler 161 is made of Invar, glass, or ceramic.

[0141] The present invention further reduces the thermal drift of the first direction measuring scale 161 caused by the thermal deformation of the motion stage by setting the base 12 and the first direction measuring scale 161 to be made of materials with low thermal expansion coefficient.

[0142] In one embodiment, the material of the second direction measuring ruler 241 is Invar, glass, or ceramic.

[0143] The present invention further reduces the influence of thermal deformation of the motion table on the thermal drift of the second direction measuring ruler 241 by setting the second direction measuring ruler 241 to a material with a low coefficient of thermal expansion.

[0144] In one embodiment, the first direction measuring scale 161 and / or the second direction measuring scale 241 are other suitable measuring scales such as grating scales, capacitive scales, and inductive scales, and the first direction measuring head 162 and the second direction measuring head 242 are reading heads that correspond to and are matched with the measuring scales.

[0145] In one embodiment, as shown in FIG2, the first direction motion system further includes a first direction motor 14, which drives the first motion table 11 to move along the first direction. The first direction motor 14 is self-symmetrical with respect to the first symmetry plane AA perpendicular to the second direction.

[0146] In one embodiment, as shown in FIG2, a heat insulation component 31 and / or a heat dissipation plate 32, as shown in FIG7, are provided between the first directional motor 14 and the first motion table 11. The heat dissipation plate 32 is provided with a heat dissipation channel, and a cooling medium is introduced into the heat dissipation channel through the heat dissipation channel inlet 331, and the cooling medium that carries away heat is discharged from the heat dissipation channel outlet 332. Specifically, the heat insulation component 31 can be a low thermal conductivity material such as PEEK (polyetheretherketone) or ceramic, and the cooling medium can be compressed air or water at a temperature below 22°C.

[0147] The present invention improves the heat insulation and heat dissipation capacity of the motion table by setting a heat insulation component 31 and a heat dissipation plate 32 between the motor and the motion table, and further reduces the thermal deformation of the motion table. This, together with other heat-absorbing deformation settings of the present invention, reduces the thermal drift of the measuring scale.

[0148] In one embodiment, as shown in FIG3, the second direction motion system further includes a second direction motor 25, which drives the second motion table 21 to move along the second direction. The second direction motor 25 is self-symmetrical with respect to the fourth symmetry plane BB perpendicular to the second direction.

[0149] In one embodiment, as shown in FIG3, a heat insulation component 31 and / or a heat sink 32, as shown in FIG7, are provided between the second directional motor 25 and the second motion table 21. The heat sink 32 has heat dissipation channels, and a cooling medium is introduced into the heat dissipation channels to remove heat. Specifically, the heat insulation component 31 can be a low thermal conductivity material such as PEEK (polyetheretherketone) or ceramic, and the cooling medium can be compressed air or water at a temperature below 22°C.

[0150] The present invention improves the heat insulation and heat dissipation capacity of the motion table by setting a heat insulation component 31 and a heat dissipation plate 32 between the motor and the motion table, and further reduces the thermal deformation of the motion table, thereby reducing the thermal drift of each measuring scale in conjunction with other heat-absorbing deformation settings of the present invention.

[0151] In one embodiment, as shown in FIG1, the two-dimensional motion platform device supplies power to the first direction motor 14, the second direction motor 25, the first direction measuring head 162, and the second direction measuring head 242 via motion cable 34, and / or provides cooling medium in the heat sink 32 via motion cable 34.

[0152] Example 2:

[0153] This embodiment provides a two-dimensional motion platform device. Other features of the two-dimensional motion platform device are basically the same as those of Embodiment 1. The difference is that, as shown in Figure 8, the length of the first decoupling surface 152 along the second direction is shortest at the first position and increases from the first position along the third direction to both sides; the first position is located on the first decoupling surface 152, and the first position is not the end position of the first decoupling surface 152 in the third direction; the third direction is perpendicular to the first direction and the second direction.

[0154] By setting the first decoupling surface 152 to have the shortest second direction length at the first position and increasing towards both ends, the present invention can further reduce the reaction force of the first decoupling surface 152 on the first motion platform 11 in the second direction to close to 0, thereby further improving the strength of the first decoupling surface 152 compared to Embodiment 1.

[0155] In one embodiment, the length of the first motion mounting surface 151 along the second direction is greater than or equal to 10 times the length of the first decoupling surface 152 along the second direction at the first position, and the length of the guide rail mounting surface 153 along the second direction is greater than or equal to 10 times the length of the first decoupling surface 152 along the second direction at the first position.

[0156] By setting the length relationship between the first motion mounting surface 151 and the first decoupling surface 152 in the second direction at the first position, the present invention can further ensure that the stiffness of the flexible connection between the first motion stage 11 and the slider part of the first sliding structure in the second direction is close to 0. Combined with the rigid connection of the first motion stage 11 at the thermal center surface, the first motion stage 11 undergoes thermal deformation on both sides along the second direction with the thermal center surface as the center.

[0157] In one embodiment, as shown in FIG8, the first decoupling surface 152 has a length b of 0.4 mm to 1.2 mm along the second direction at the first position.

[0158] The present invention sets the absolute length of the first decoupling surface 152 in the second direction at the first position, so that the flexibility of the first decoupling surface 152 can better guide the thermal deformation of the first motion stage 11, while ensuring that its rigidity can support the first motion stage 11.

[0159] In one embodiment, as shown in FIG8, the maximum length c of the first decoupling surface 152 along the second direction is 2 mm to 4 mm.

[0160] The present invention sets the maximum length of the first decoupling surface 152 in the second direction, so that it matches the length of the second direction at the first position. The resulting structure can guide the thermal deformation of the first motion stage 11 to the maximum extent, while ensuring the structural rigidity and reliability that can support the first motion stage 11.

[0161] Example 3:

[0162] This embodiment provides a two-dimensional motion platform device. Other features of the two-dimensional motion platform device are basically the same as those of Embodiment 1. The difference is that, as shown in Figure 9, the length of the second decoupling surface 2332 along the second direction is shortest at the second position and increases from the second position along the first direction to both sides. The second position is located on the second decoupling surface 2332, and the second position is not the end position of the second decoupling surface 2332 in the first direction; the third direction is perpendicular to the first direction and the second direction.

[0163] By setting the second decoupling surface 2332 to have the shortest length in the second direction at the second position and increasing towards both ends, the present invention can further make the reaction force of the second decoupling surface 2332 on the first moving platform 11 in the second direction and the stress on the mounting base 231 close to 0, thereby further improving the absorption capacity of the second decoupling surface 2332 for the thermal deformation of the first moving platform 11 in the second direction.

[0164] In one embodiment, the length of the second motion mounting surface 2331 along the second direction is greater than or equal to 10 times the length of the second decoupling surface 2332 along the second direction at the second position.

[0165] By setting the length relationship between the second motion mounting surface 2331 and the second decoupling surface 2332 in the second direction at the second position, the present invention further ensures the ability of the second decoupling surface 2332 to absorb the thermal deformation of the first motion stage 11 in the second direction.

[0166] In one embodiment, as shown in FIG9, the second decoupling surface 2332 has a length e of 0.4 mm to 0.8 mm along the second direction at the second position.

[0167] The present invention sets the absolute length of the second decoupling surface 2332 in the second direction at the second position, so that the flexibility of the second decoupling surface 2332 can better absorb the thermal deformation of the first motion stage 11 in the second direction, while ensuring that its rigidity can support the measuring scale 241 in the second direction.

[0168] In one embodiment, the maximum length of the second decoupling surface 2332 along the second direction is 2 mm to 4 mm.

[0169] The present invention sets the second decoupling surface 2332 to have a maximum length in the second direction, so that it matches the length in the second direction of the second position. The resulting structure can absorb the thermal deformation of the first motion stage 11 in the second direction to the greatest extent, while ensuring the structural rigidity and reliability of the measuring scale 241 in the second direction.

[0170] In summary, the two-dimensional motion platform device of the present invention can be flexibly connected to both sides of the center of the first motion stage through a first sliding structure and a second direction measuring scale, respectively, so that the second direction measuring scale does not drift due to thermal deformation of the first motion stage in the second direction, thereby improving the measurement accuracy of the motion platform. At the same time, the first decoupling surface and the second decoupling surface are set to have a length in the second direction that is smaller than the mounting surface, thereby reducing the influence of thermal deformation of the first motion stage in the second direction on the position of the second direction measuring scale. In addition, the second flexible component is made of a material with a low coefficient of thermal expansion, which reduces the influence of thermal deformation of the second direction measuring scale. Finally, the first position and the second position with the smallest length in the second direction are respectively set on the first decoupling surface and the second decoupling surface, thereby further reducing the influence of thermal deformation of the first motion stage in the second direction on the position of the second direction measuring scale.

[0171] Therefore, this invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0172] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A two-dimensional motion platform device, characterized in that, include: First direction motion system and second direction motion system; The first directional motion system includes: a first motion platform (11), a base (12), and a first sliding structure; The first motion platform (11) is slidably connected to the base (12) along the first direction via the first sliding structure; The first sliding structure includes a guide rail portion and a slider portion disposed opposite to each other; The guide rail is fixedly mounted on the base (12); the slider is rigidly connected to the center of the first motion platform (11) and flexibly connected to both sides of the first motion platform (11); the two sides of the first motion platform (11) are symmetrically arranged about the center of the first motion platform (11) along the second direction. The first motion table (11) is self-symmetrical with respect to the first symmetry plane (AA) perpendicular to the second direction, and the center of the first motion table (11) is positioned corresponding to the first symmetry plane (AA). The second direction motion system includes: a second motion table (21), and a second direction measuring ruler (241) and a second direction measuring reading head (242) arranged opposite to each other; The second motion platform (21) is slidably connected to the first motion platform (11) along the second direction; The center of the second direction measuring ruler (241) is rigidly connected to the first motion table (11), and the two sides of the second direction measuring ruler (241) are flexibly connected to the first motion table (11); the two sides of the second direction measuring ruler (241) are symmetrically arranged about the center of the second direction measuring ruler (241) along the second direction. The second direction measuring ruler (241) is self-symmetrical with respect to the second symmetry plane perpendicular to the second direction, and the center of the second direction measuring ruler (241) is set at the position corresponding to the second symmetry plane; The second direction measuring head (242) is fixedly mounted on the second motion table (21); The first sliding structure is self-symmetrical with respect to the third symmetry plane perpendicular to the second direction, and the first symmetry plane (AA), the second symmetry plane, and the third symmetry plane coincide; the first direction is perpendicular to the second direction.

2. The two-dimensional motion platform device as described in claim 1, characterized in that, The two-dimensional motion platform device further includes: a first flexible connector (15); Both sides of the first motion table (11) are flexibly connected to the slider part through the first flexible connector (15); The first flexible connector (15) includes: a first motion mounting surface (151), a first decoupling surface (152), and a guide rail mounting surface (153) connected in sequence; The first motion mounting surface (151) is connected to the first motion table (11), and the guide rail mounting surface (153) is connected to the slider portion; The length of the first decoupling surface (152) along the second direction is less than the lengths of the first motion mounting surface (151) and the guide rail mounting surface (153) along the second direction.

3. The two-dimensional motion platform device as described in claim 2, characterized in that, The length of the first motion mounting surface (151) in the third direction is 5 mm to 10 mm; and / or the length of the first decoupling surface (152) in the third direction is 2 mm to 8 mm; and / or the length of the guide rail mounting surface (153) in the third direction is 1 mm to 5 mm.

4. The two-dimensional motion platform device as described in claim 2, characterized in that, The length of the first decoupling surface (152) along the second direction is uniform; or the length of the first decoupling surface (152) along the second direction is shortest at the first position and increases from the first position along the third direction to both sides; the first position is located on the first decoupling surface (152), and the first position is not the end position of the first decoupling surface (152) in the third direction; the third direction is perpendicular to the first direction and the second direction.

5. The two-dimensional motion platform device as described in claim 4, characterized in that, When the length of the first decoupling surface (152) along the second direction is uniform, the length of the first moving mounting surface (151) along the second direction is greater than or equal to 10 times the length of the first decoupling surface (152) along the second direction, and the length of the guide rail mounting surface (153) along the second direction is greater than or equal to 10 times the length of the first decoupling surface (152) along the second direction. When the length of the first decoupling surface (152) along the second direction increases from the first position along the third direction to both sides, the length of the first moving mounting surface (151) along the second direction is greater than or equal to 10 times the length of the first decoupling surface (152) along the second direction at the first position, and the length of the guide rail mounting surface (153) along the second direction is greater than or equal to 10 times the length of the first decoupling surface (152) along the second direction at the first position.

6. The two-dimensional motion platform device as described in claim 4, characterized in that, When the length of the first decoupling surface (152) along the second direction is uniform, the length of the first decoupling surface (152) along the second direction is 0.4 mm to 1.2 mm; Or, when the length of the first decoupling surface (152) along the second direction increases from the first position along the third direction to both sides, the length of the first decoupling surface (152) along the second direction at the first position is 0.4 mm to 1.2 mm.

7. The two-dimensional motion platform device as described in claim 4, characterized in that, When the length of the first decoupling surface (152) along the second direction increases from the first position to both sides along the third direction, the maximum length of the first decoupling surface (152) along the second direction is 2 mm to 4 mm.

8. The two-dimensional motion platform device as described in claim 1, characterized in that, The two-dimensional motion platform device further includes: a second connector (23); the second connector (23) includes a mounting base (231), a central fixing structure (232) and two sets of second flexible components (233), one side of the mounting base (231) is fixed to the second direction measuring ruler (241), and the other side is fixed to the central fixing structure (232) and the second flexible component (233) respectively; The second direction measuring ruler (241) is rigidly connected to the first motion table (11) through the central fixed structure (232); The second direction measuring ruler (241) is flexibly connected to the first motion table (11) through the second flexible member (233); The central fixed structure (232) is provided at the center of the second direction measuring ruler (241); the two sets of second flexible members (233) are provided at the two sides of the second direction measuring ruler (241); the two sets of second flexible members (233) are symmetrically arranged about the central fixed structure (232) along the second direction.

9. The two-dimensional motion platform device as described in claim 8, characterized in that, The coefficient of thermal expansion of the material of the second connector (23) is less than 10. -6 / ℃.

10. The two-dimensional motion platform device as described in claim 8, characterized in that, The second flexible component (233) includes a second motion mounting surface (2331) and a second decoupling surface (2332) connected in sequence. The second decoupling surface (2332) is fixed to the mounting base (231), and the second motion mounting surface (2331) is fixed to the first motion stage (11). The length of the second decoupling surface (2332) along the second direction is less than the length of the second motion mounting surface (2331) along the second direction.

11. The two-dimensional motion platform device as described in claim 10, characterized in that, The second decoupling surface (2332) has a length of 1 mm to 4 mm in the first direction; and / or the second motion mounting surface (2331) has a length of 1 mm to 3 mm in the first direction.

12. The two-dimensional motion platform device as described in claim 10, characterized in that, The second decoupling surface (2332) has a uniform length along the second direction; or the length of the second decoupling surface (2332) along the second direction is shortest at the second position and increases from the second position along the first direction to both sides, the second position is located on the second decoupling surface (2332), and the second position is not the end position of the second decoupling surface (2332) in the first direction; the third direction is perpendicular to the first direction and the second direction.

13. The two-dimensional motion platform device as described in claim 12, characterized in that, When the length of the second decoupling surface (2332) along the second direction is uniform, the length of the second moving mounting surface (2331) along the second direction is greater than or equal to 10 times the length of the second decoupling surface (2332) along the second direction. When the length of the second decoupling surface (2332) along the second direction increases from the second position along the first direction to both sides, the length of the second moving mounting surface (2331) along the second direction is greater than or equal to 10 times the length of the second decoupling surface (2332) along the second direction at the second position.

14. The two-dimensional motion platform device as described in claim 12, characterized in that, When the length of the second decoupling surface (2332) along the second direction is uniform, the length of the second decoupling surface (2332) along the second direction is 0.4 mm to 0.8 mm; When the length of the second decoupling surface (2332) along the second direction increases from the second position along the first direction to both sides, the length of the second decoupling surface (2332) along the second direction at the second position is 0.4 mm to 0.8 mm.

15. The two-dimensional motion platform device as described in claim 12, characterized in that, When the length of the second decoupling surface (2332) along the second direction increases from the second position to both sides along the first direction, the maximum length of the second decoupling surface (2332) along the second direction is 2 mm to 4 mm.

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