Measurement apparatus and method for global thickness scan of membrane

By combining a linear laser and an industrial camera with a negative pressure stage, a high-precision scanning of the global thickness of the bovine pericardium was achieved, solving the problem that traditional methods can only detect a few points and providing a more comprehensive thickness detection method.

WO2025246077A1PCT designated stage Publication Date: 2025-12-04JUYI TECH SHANGHAI CO LTD +1
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Patent Information

Application Number
PCT/CN2024/118874
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-05-27
Filing Date
2024-09-13
Publication Date
2025-12-04

AI Technical Summary

Technical Problem

Existing technologies are insufficient for high-precision, global detection of the thickness of bovine pericardium. Traditional methods can only detect a few points and cannot comprehensively detect the thickness of the entire bovine pericardium.

Method used

The detection device, consisting of a linear laser, an industrial camera, a negative pressure stage, and an XY two-dimensional moving platform, combines negative pressure adsorption and 3D measurement principles to achieve non-contact, global thickness scanning.

Benefits of technology

It achieves high-precision, global thickness measurement of the entire bovine pericardium, provides complete physical dimension data and image storage, and improves the accuracy and efficiency of detection.

✦ Generated by Eureka AI based on patent content.

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Abstract

A measurement apparatus and a method for a global thickness scan of a membrane. In the apparatus, a negative-pressure object support platform (3) comprises an air-permeable flat adsorption face (3.1) and a negative-pressure chamber (3.2), the air-permeable flat adsorption face (3.1) being used to place a bovine pericardium (4), and the negative pressure chamber (3.2) being used to apply a negative pressure to the air-permeable flat adsorption face (3.1). An X-Y two-dimensional mobile platform (5) is provided at a bottom portion of the negative-pressure object support table (3), and is used to drive the negative-pressure object support table (3) to translate and scan along an X axis and a Y axis. A line laser (1) is mounted above the negative-pressure object support table, and is used to vertically emit a line laser beam downward and irradiate an object to be measured (4). An industrial camera (2) is mounted diagonally above the negative-pressure object support table (3), and is used to capture a scene and focus on a portion irradiated by the line laser, and transmit an acquired image to an industrial controller. The industrial controller controls the entire apparatus to operate automatically, and analyzes and measures the height of an upper surface of the membrane relative to an upper surface of the air-permeable flat adsorption face, namely, global thickness data of the membrane. The present invention provides measurement results with high precision and efficiency.
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Description

A thin film global thickness scanning detection device and method Technical Field

[0001] This invention belongs to the field of biological tissue film thickness detection technology, specifically relating to a film global thickness scanning detection device and method. Background Technology

[0002] Bovine pericardium is widely used in surgical implantation procedures for various cardiovascular diseases. The thickness of bovine pericardium tissue is approximately 0.1-0.8 mm, varying depending on the location. The tissue structure of different bovine pericardia is basically the same, mainly composed of collagen fibers, elastic fibers, and various connective tissue components. Clinically used glutaraldehyde-fixed bovine pericardium slices are approximately 0.25-0.34 mm thick, with the mesothelial cells of the serosal layer largely sloughed off, leaving only the submesothelial layer.

[0003] In the pre-processing and quality control of bovine pericardium for cardiovascular surgery, in addition to various biochemical tests, physical dimensional measurements are also required, with thickness being one of the key dimensions. However, bovine pericardium is a biological membrane, making precise global thickness measurement difficult. Currently, a method similar to vernier calipers is used to measure the thickness at a few points. Besides low accuracy, the biggest drawback of this method is that it can only measure the thickness at a few points, failing to comprehensively measure the thickness of the entire bovine pericardium product point by point.

[0004] Therefore, how to detect the global thickness of bovine pericardium with high precision and efficiency has become a technical problem that urgently needs to be solved in the quality inspection of bovine pericardium production.

[0005] Summary of the Invention

[0006] This invention aims to address the technical problems existing in the background art by providing a thin film global thickness scanning detection device and method, which realizes global thickness measurement and scanning of the entire bovine pericardium, without contact and with high precision, thus greatly upgrading the accuracy and efficiency of current detection methods.

[0007] To achieve the above technical objectives, the present invention adopts the following technical solution:

[0008] A thin film global thickness scanning and detection device includes a line laser, an industrial camera, a negative pressure stage, an XY two-dimensional moving platform, and an industrial control computer;

[0009] The negative pressure stage includes an upper air-permeable adsorption plane and a negative pressure chamber located at the bottom of the air-permeable adsorption plane. The air-permeable adsorption plane is used to place the film to be tested, and the negative pressure chamber is used to apply negative pressure to the air-permeable adsorption plane.

[0010] The XY two-dimensional moving platform is set at the bottom of the negative pressure stage and is used to drive the negative pressure stage to translate along the X-axis and Y-axis to perform line laser planar scanning.

[0011] The linear laser is mounted above the negative pressure stage and is used to emit a vertically downward linear laser beam to illuminate the object under test; the industrial camera is mounted diagonally above the negative pressure stage and is used to capture and focus on the linear laser irradiation area of ​​the linear laser, and transmit the captured image to the industrial control computer.

[0012] The industrial control computer controls the automatic operation of the industrial camera, the linear laser, the negative pressure chamber, and the XY two-dimensional moving platform, and analyzes and calculates the height of the upper surface of the film relative to the upper surface of the air-permeable adsorption plane, which is the detected global thickness data of the film.

[0013] Furthermore, the breathable adsorption surface is made of breathable steel material.

[0014] Furthermore, the breathable adsorption surface is made of a porous breathable steel material with an internal pore size of 7-35μm, and the surface roughness of the breathable adsorption surface is within ±0.1μm.

[0015] Furthermore, a negative pressure suction port is provided on one side of the bottom of the negative pressure chamber. The negative pressure suction port is connected to a negative pressure pump. The negative pressure pump is used to apply negative pressure to the air-permeable adsorption plane, so that the film to be tested is tightly attached to the upper surface of the air-permeable adsorption plane without gaps.

[0016] Furthermore, a vibration isolation platform is also provided at the bottom of the XY two-dimensional mobile platform.

[0017] Furthermore, the industrial control computer automatically draws a global thickness topographic map of the film based on the calculated global thickness data of the film and the scanning displacement data.

[0018] Furthermore, the linewidth of the line laser scanning beam of the line laser is less than 0.1 mm.

[0019] Furthermore, the industrial camera may be one or two;

[0020] If one industrial camera is used, the industrial camera is mounted at an angle, frames and focuses on the area illuminated by the online laser;

[0021] If two industrial cameras are used, the two industrial cameras are mounted at a symmetrical angle and simultaneously view and focus on the area illuminated by the online laser.

[0022] Meanwhile, the present invention also provides a method for global thickness scanning detection of thin films, implemented using the apparatus described in any of the preceding claims, the method comprising the following steps:

[0023] Step S1: Lay the film flat on the breathable adsorption surface;

[0024] Step S2: Activate the negative pressure chamber and apply negative pressure to the air-permeable adsorption plane so that the film to be tested is tightly attached to the upper surface of the air-permeable adsorption plane without gaps.

[0025] Step S3: Turn on the line laser and emit a line laser scanning beam vertically downward to scan the film. Turn on the industrial camera to view and focus on the line laser irradiation area. The industrial control computer controls the XY two-dimensional moving platform to move according to the set program and simultaneously acquires the line laser scanning image on the upper surface of the film.

[0026] Step S4: After the entire upper surface of the film has been scanned, remove the film and reset the XY two-dimensional moving platform;

[0027] Step S5: The industrial control computer repeats the program set in step S3, controls the XY two-dimensional moving platform to move, and simultaneously acquires the line laser scanning image of the upper surface of the breathable adsorption plane.

[0028] Step S6: Based on the line laser scan image of the upper surface of the film acquired in step S3 and the line laser scan image of the upper surface of the breathable adsorption plane acquired in step S5, the industrial control computer analyzes and calculates the height of the upper surface of the film relative to the upper surface of the breathable adsorption plane, and thus obtains the global thickness data of the film.

[0029] Furthermore, it also includes the following steps:

[0030] Step S7: The industrial control computer draws a global thickness topographic map of the thin film based on the global thickness data of the thin film calculated in step S6 and the displacement data of the image scan.

[0031] Compared with the prior art, the beneficial effects of the present invention are:

[0032] (1) The thin film global thickness scanning detection device and method provided by the present invention can realize the global thickness measurement and scanning of the entire bovine pericardium. It is non-contact and highly accurate, which greatly upgrades the current detection methods. It provides complete physical size data of the entire bovine pericardium and can store global images at the same time, providing a more complete, more accurate and more traceable inspection method for the production of bovine pericardium.

[0033] (2) Existing 3D line laser measuring instruments are common object contour measuring tools, usually used for three-dimensional space scanning, reconstruction and modeling, etc. However, there is no precedent for using them to measure biological films such as bovine pericardium because: First, the 3D line laser measuring instruments currently on the market are usually used to scan large-sized objects, and the thickness scanning accuracy is not high enough for thin film objects such as bovine pericardium, so they cannot be used to measure the thickness of the film; Second, it is difficult to place the film flat on a plane, and if the height is directly scanned and measured, it is difficult to obtain an accurate thickness measurement value of the film.

[0034] This invention first places the film to be tested, such as bovine pericardium, on a breathable adsorption plane on a highly flat negative pressure platform. Then, using negative pressure adsorption, the film is completely adhered to the breathable adsorption plane without gaps or air bubbles between them. Based on the 3D measurement principle, a linear laser combined with an industrial camera is used to measure the height of the film and the height of the breathable adsorption plane. The global thickness data of the film is obtained by subtracting the height of the breathable adsorption plane at the corresponding scanning point from the height of the film. Compared with traditional caliper measurement, this method has the advantages of non-contact, fully automatic, no human error, high precision, and global measurement. Attached Figure Description

[0035] Figure 1 is a schematic diagram of the thin film global thickness scanning detection device according to an embodiment of the present invention;

[0036] Figure 2 is a block diagram of the control structure of the industrial control computer according to an embodiment of the present invention;

[0037] Figure 3 is a partial scanning result of laser scanning of the bovine pericardium line according to an embodiment of the present invention;

[0038] The markings in the diagram are as follows: 1-Line laser; 2-Industrial camera; 3-Negative pressure stage; 3.1-Permeable adsorption plane; 3.2-Negative pressure chamber; 3.3-Negative pressure exhaust port; 4-Bull pericardium; 5-XY two-dimensional moving platform; 5.1-Slide table; 5.2-Drive motor; 6-Vibration isolation table. Detailed Implementation

[0039] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] In the description of this invention, it should be understood that the terms "coaxial," "bottom," "one end," "top," "middle," "other end," "upper," "side," "top," "inner," "front," "center," "both ends," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0041] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "setting," "connection," "fixing," "screw connection," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0042] Example 1

[0043] As shown in Figures 1-3, this embodiment of the invention provides a thin film global thickness scanning and detection device, including a line laser 1, an industrial camera 2, a negative pressure stage 3, an XY two-dimensional moving platform 5, and an industrial control computer.

[0044] The negative pressure stage 3 includes a flat, breathable adsorption surface 3.1 at its upper end and a negative pressure chamber 3.2 located at the bottom of the breathable adsorption surface 3.1. The breathable adsorption surface 3.1 is used to place the membrane to be tested. In this embodiment, the membrane to be tested is bovine pericardium 4. The breathable adsorption surface 3.1 is made of breathable steel, a porous and breathable metal material that has both breathability and high strength. In this embodiment, the porous and breathable properties of the breathable steel are used to make the breathable adsorption surface 3.1. Placing the breathable adsorption surface 3.1 on the negative pressure chamber 3.2 generates a negative pressure adsorption force on the surface of the breathable adsorption surface 3.1, thereby adsorbing the bovine pericardium 4 placed on it onto its upper surface, ensuring close contact between the two without gaps or air bubbles. A negative pressure suction port 3.3 is provided on one side of the bottom of the negative pressure chamber 3.2. The negative pressure suction port 3.3 is connected to a negative pressure pump. The negative pressure pump is used to apply negative pressure to the air-permeable adsorption plane 3.1, so that the bovine pericardium 4 to be tested is tightly attached to the upper surface of the air-permeable adsorption plane 3.1 without gaps.

[0045] The XY two-dimensional moving platform 5 is located at the bottom of the negative pressure stage 3 and is used to drive the negative pressure stage 3 to translate along the X-axis and Y-axis to perform line laser planar scanning.

[0046] Referring to Figure 1, the XY two-dimensional moving platform 5 adopts a cross-shaped motion structure, consisting of upper and lower mutually perpendicular platforms on the X and Y axes. The XY two-dimensional moving platform 5 includes a drive motor 5.2, a ball screw assembly, a slider, and a slide table 5.1. The drive motor 5.2 drives the slider via the ball screw assembly. The slider is slidably mounted on the slide table. Simultaneously, the negative pressure stage 3 is fixedly connected above the slider. In use, the drive motor 5.2 drives the ball screw assembly to move the slider along the slide table 5.1, thereby moving the negative pressure stage 3. To ensure movement accuracy, the drive motor 5.2 is a stepper motor. The XY two-dimensional moving platform 5 is a commonly used component in the prior art and will not be described in detail here.

[0047] Meanwhile, a vibration isolation table 6 is also provided at the bottom of the XY two-dimensional mobile platform 5. The vibration isolation table 6 effectively blocks the interference force applied by the external environment, ensuring that the entire device maintains a stable and balanced state during the measurement process, further reducing measurement errors and ensuring measurement accuracy.

[0048] The linear laser 1 is installed above the negative pressure stage 3 and is used to emit a vertically downward linear laser scanning beam to scan the object under test; the industrial camera 2 is installed diagonally above the negative pressure stage 3 and is used to capture and focus on the linear laser irradiation area of ​​the linear laser 1 and transmit the acquired image to the industrial control computer.

[0049] As shown in Figure 2, the industrial control computer is connected to the industrial camera 2 via a signal, and is connected to the drive motor 5.2 of the linear laser 1, the negative pressure pump, and the XY two-dimensional moving platform 5 via a control interface. The industrial control computer controls the automatic operation of each component, analyzes and calculates the height of the upper surface of the pericardium 4 relative to the upper surface of the breathable adsorption plane 3.1, which is the global thickness data of the pericardium 4, and draws a global thickness topographic map of the pericardium 4.

[0050] During measurement, the industrial control computer controls the negative pressure pump to apply negative pressure to the breathable adsorption plane 3.1, ensuring that the pericardium 4 to be measured is tightly adhered to the upper surface of the breathable adsorption plane 3.1 without gaps. Then, the industrial control computer controls the linear laser 1 to irradiate the pericardium 4 to be measured, and controls the industrial camera 2, which is fixed at a certain tilt angle to the linear laser 1, to locally image the pericardium 4 irradiated by the linear laser. According to the 3D measurement principle, the position of the linear laser beam in the image is proportional to the height of the pericardium. By calculating the position of the linear laser in the image acquired by the industrial camera 2, the local measurement height of the pericardium can be calculated, and the height of the breathable adsorption plane 3.1 can be calculated in the same way. Finally, by subtracting the height of the breathable adsorption plane 3.1 at the corresponding scanning point from the calculated local measurement height of the pericardium, the local thickness of the pericardium 4 at that point can be obtained.

[0051] Simultaneously, the industrial control computer controls the drive motor 5.2 to drive the XY two-dimensional moving platform 5, so that the XY two-dimensional moving platform 5 moves and scans the entire pericardium 4 at equal intervals and point by point according to the set program, and collects the local line laser irradiation image of the pericardium 4 at each movement; according to the 3D measurement principle, the industrial control computer calculates the local measurement height of the pericardium at each point, and subtracts the local measurement height of the pericardium from the height of the corresponding scanning point of the air permeable adsorption plane 3.1 calculated in the same way, so as to calculate the local thickness of the pericardium 4. By measuring each scanning point, the global thickness data of the pericardium 4 can be obtained;

[0052] Finally, the industrial control computer automatically draws a topographic map of the global thickness of the bovine pericardium based on the calculated global thickness data and the scanning displacement data.

[0053] Specifically, the line laser 1 is a high-precision line laser with a line width of less than 0.1 mm.

[0054] The industrial camera 2 is one or two high-resolution industrial vision cameras with a resolution of not less than 4000×3000dpi.

[0055] If one industrial camera 2 is used, the industrial camera 2 is mounted at an angle, frames and focuses on the line laser irradiation area of ​​the line laser 1.

[0056] If two industrial cameras 2 are used, the two industrial cameras 2 are installed at a symmetrical angle, simultaneously capturing and focusing on the line laser irradiation area of ​​the line laser 1; the industrial cameras 2 transmit the captured images to the industrial control computer in real time.

[0057] The air-permeable adsorption plane 3.1 of the negative pressure stage 3 is made of a porous air-permeable steel material with an internal pore size of 7-35μm. For example, it can be made by sintering stainless steel particles. Through fine processing, its surface roughness is controlled within ±0.1μm. The bearing surface of the air-permeable adsorption plane 3.1 is larger than the maximum outer size of the bovine pericardium 4 to be tested, so that the bovine pericardium 4 to be tested can be placed completely flat on the air-permeable adsorption plane 3.1.

[0058] Example 2

[0059] This invention provides a method for scanning and detecting the global thickness of a thin film, using the device described in Example 1 to scan and detect the global thickness of the bovine pericardium. The method includes the following steps:

[0060] Step S1: Lay the bovine pericardium 4 flat on the breathable and absorbent surface 3.1;

[0061] Step S2: Start the negative pressure pump and apply negative pressure to the air-permeable adsorption plane 3.1 through the negative pressure suction port 3.3, so that the bovine pericardium 4 to be tested is tightly attached to the upper surface of the air-permeable adsorption plane 3.1 without gaps;

[0062] Step S3: Turn on the line laser 1 to emit a vertically downward line laser scanning beam to scan the pericardium 4, turn on the industrial camera 2 to view and focus on the area irradiated by the line laser, and control the XY two-dimensional moving platform 5 to move according to the set program, and simultaneously acquire the line laser scanning image of the upper surface of the pericardium 4.

[0063] Step S4: After the entire upper surface of the bovine pericardium 4 has been scanned, remove the bovine pericardium 4 and reset the XY two-dimensional moving platform 5.

[0064] Step S5: The industrial control computer repeats the program set in step S3, controls the XY two-dimensional moving platform 5 to move, and simultaneously acquires the line laser scanning image of the upper surface of the breathable adsorption plane 3.1;

[0065] Step S6: Based on the line laser scan image of the upper surface of the bovine pericardium 4 acquired in step S3 and the line laser scan image of the upper surface of the breathable adsorption plane 3.1 acquired in step S5, the industrial control computer analyzes and calculates the height of the upper surface of the bovine pericardium 4 relative to the upper surface of the breathable adsorption plane 3.1, thereby obtaining the global thickness data of the bovine pericardium 4. Specifically, by subtracting the height of the breathable adsorption plane 3.1 at the corresponding scanning point from the locally measured height of the bovine pericardium, the local thickness of the bovine pericardium 4 is obtained. By measuring each scanning point, the global thickness data of the bovine pericardium 4 can be obtained.

[0066] Step S7: The industrial control computer uses the global thickness data of the bovine pericardium 4 calculated in step S6 and the displacement data from the image scan to draw a global thickness topographic map of the bovine pericardium 4, from which the global thickness of the bovine pericardium can be more intuitively understood.

[0067] Figure 3 shows a partial scanning result of the laser scanning of the bovine pericardium line in an embodiment of the present invention. The upper image in Figure 3 is a local thickness topographic map (a gray image shown with the white dotted line as the center line), and the lower image is the local thickness data at the corresponding location.

[0068] The above description is merely an embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the scope of the present invention should be included within the protection scope of the present invention.

Claims

1. A thin film global thickness scanning and detection device, characterized in that, This includes a line laser, an industrial camera, a negative pressure stage, an XY 2D moving platform, and an industrial computer; The negative pressure stage includes an upper air-permeable adsorption plane and a negative pressure chamber located at the bottom of the air-permeable adsorption plane. The air-permeable adsorption plane is used to place the film to be tested, and the negative pressure chamber is used to apply negative pressure to the air-permeable adsorption plane. The XY two-dimensional moving platform is set at the bottom of the negative pressure stage and is used to drive the negative pressure stage to translate along the X-axis and Y-axis to perform line laser planar scanning. The linear laser is mounted above the negative pressure stage and is used to emit a vertically downward linear laser beam to irradiate the object under test; the industrial camera is mounted diagonally above the negative pressure stage and is used to capture and focus on the linear laser irradiation area of ​​the linear laser, and transmit the captured image to the industrial control computer. The industrial control computer controls the automatic operation of the industrial camera, the linear laser, the negative pressure chamber, and the XY two-dimensional moving platform, and analyzes and calculates the height of the upper surface of the film relative to the upper surface of the air-permeable adsorption plane, which is the detected global thickness data of the film.

2. The apparatus according to claim 1, characterized in that, The breathable adsorption surface is made of breathable steel material.

3. The apparatus according to claim 2, characterized in that, The breathable adsorption surface is made of porous breathable steel material with an internal pore size of 7-35μm, and the surface roughness of the breathable adsorption surface is within ±0.1μm.

4. The apparatus according to claim 1, characterized in that, A negative pressure suction port is provided on one side of the bottom of the negative pressure chamber. The negative pressure suction port is connected to a negative pressure pump. The negative pressure pump is used to apply negative pressure to the air-permeable adsorption plane so that the film to be tested is tightly attached to the upper surface of the air-permeable adsorption plane without gaps.

5. The apparatus according to claim 1, characterized in that, The bottom of the XY two-dimensional mobile platform is also equipped with a vibration isolation platform.

6. The apparatus according to claim 1, characterized in that, The industrial control computer automatically draws a global thickness topographic map of the thin film based on the calculated global thickness data and the scanning displacement data.

7. The apparatus according to claim 1, characterized in that, The line width of the line laser scanning beam of the line laser is less than 0.1 mm.

8. The apparatus according to claim 1, characterized in that, The industrial camera may be one or two; If one industrial camera is used, the industrial camera is mounted at an angle, frames and focuses on the area illuminated by the online laser; If two industrial cameras are used, the two industrial cameras are mounted at a symmetrical angle and simultaneously view and focus on the area illuminated by the online laser.

9. A method for detecting the global thickness of a thin film, implemented using the apparatus described in any one of claims 1-8, characterized in that the method comprises the following steps: Step S1: Lay the film flat on the breathable adsorption surface; Step S2: Activate the negative pressure chamber and apply negative pressure to the air-permeable adsorption plane so that the film to be tested is tightly attached to the upper surface of the air-permeable adsorption plane without gaps. Step S3: Turn on the line laser and emit a line laser scanning beam vertically downward to scan the film. Turn on the industrial camera to view and focus on the line laser irradiation area. The industrial control computer controls the XY two-dimensional moving platform to move according to the set program and simultaneously acquires the line laser scanning image on the upper surface of the film. Step S4: After the entire upper surface of the film has been scanned, remove the film and reset the XY two-dimensional moving platform; Step S5: The industrial control computer repeats the program set in step S3, controls the XY two-dimensional moving platform to move, and simultaneously acquires the line laser scanning image of the upper surface of the breathable adsorption plane. Step S6: Based on the line laser scan image of the upper surface of the film acquired in step S3 and the line laser scan image of the upper surface of the breathable adsorption plane acquired in step S5, the industrial control computer analyzes and calculates the height of the upper surface of the film relative to the upper surface of the breathable adsorption plane, and thus obtains the global thickness data of the film.

10. The method according to claim 9, characterized in that, It also includes the following steps: Step S7: The industrial control computer draws a global thickness topographic map of the thin film based on the global thickness data of the thin film calculated in step S6 and the displacement data of the image scan.

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