Detection device and detection method

Abstract

An adsorbent material (10) selectively co-adsorbs a first target component and a second target component in a sample gas. A stimulation unit (12) applies a stimulus to the adsorbent material (10) to simultaneously or separately desorb the first target component and the second target component. In a gas detection unit (2), the first target component and the second target component desorbed from the adsorbent material (10) are optically detected. A measurement unit (102) measures the first target component and the second target component on the basis of a first signal intensity of a wavelength corresponding to the first target component and a second signal intensity of a wavelength corresponding to the second target component.

Description

Detection device and detection method

[0001] The present disclosure relates to detection devices and methods, and more particularly to gas detection devices and methods.

[0002] Japanese Patent No. 7402474 (Patent Document 1) discloses a gas absorption spectroscopic device that uses laser light to analyze specific components in a sample gas by adsorption and desorption.

[0003] Patent No. 7402474

[0004] However, Patent Document 1 does not consider a method for analyzing multiple types of target components in a sample gas.

[0005] The present disclosure has been made to solve such problems, and its purpose is to provide a detection device that can simultaneously measure multiple types of target components in a sample gas with high sensitivity.

[0006] A first aspect of the present invention is a detection device including a first adsorbent, a first stimulating unit, a first gas detection unit, and a first measurement unit. The first adsorbent selectively co-adsorbs a first target component and a second target component in a sample gas. The first stimulating unit applies a stimulus to the first adsorbent to simultaneously or separately desorb the first target component and the second target component. The first gas detection unit optically detects the first target component and the second target component desorbed from the first adsorbent. The first measurement unit measures the first target component and the second target component based on a first signal intensity at a wavelength corresponding to the first target component and a second signal intensity at a wavelength corresponding to the second target component.

[0007] A second aspect of the present invention is a detection method comprising the steps of: introducing a gas into a first adsorbent that selectively co-adsorbs a first target component and a second target component in a sample gas; applying a stimulus to the first adsorbent; optically detecting the first target component and the second target component desorbed from the first adsorbent; and measuring the first target component and the second target component based on a first signal intensity at a wavelength corresponding to the first target component and a second signal intensity at a wavelength corresponding to the second target component.

[0008] According to the present disclosure, it is possible to provide a detection device capable of simultaneously measuring multiple types of target components in a gas with high sensitivity.

[0009] 1 is a schematic diagram showing the configuration of a detection device according to a first embodiment. FIG. 2 is a diagram for explaining a state in which a first target component and a second target component have been desorbed from an adsorbent. FIG. 3 is a diagram for explaining detection of a first target component and a second target component in a gas detection unit. FIG. 4 is a diagram showing an example of a detection device using Fourier Transform Infrared Spectroscopy (FT-IR). FIG. 5 is a diagram showing an example of a detection device using Non-dispersive infrared absorption (NDIR). FIG. 6 is a flowchart showing a detection process according to the first embodiment. FIG. 7 is a schematic diagram showing the configuration of a detection device according to a first modification. FIG. 8 is a schematic diagram showing the configuration of a detection device according to a second modification. FIG. 9 is a schematic diagram showing the configuration of a detection device according to a third embodiment. FIG. 10 is a schematic diagram showing the configuration of a detection device according to a first example. FIG. 11 is a diagram showing target components detected in each gas cell when the intersection is minimum. FIG. 12 is a diagram showing target components detected in each gas cell when the intersection is maximum. FIG. 13 is a schematic diagram showing the configuration of a detection device according to a second example.

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals and description thereof will not be repeated.

[0011] [Embodiment 1] Fig. 1 is a schematic diagram showing the configuration of a detection device 100 according to embodiment 1 of the present invention. The detection device 100 detects a target component in a gas introduced from the outside. The target component is a substance that is the target of detection by the detection device 100. In one embodiment, the detection device 100 measures the concentration of the target component in the gas. In another embodiment, the detection device 100 is used to detect the presence or absence of the target component in the gas. Note that in this specification, unless otherwise specified, the target component is a gaseous substance.

[0012] (1. Gas Piping and Flow Gas Supply Unit) In the example of FIG. 1 , a portion of the gas to be tested (sample gas) in the gas piping 80 or the flow gas in the flow gas supply unit 89 is introduced into the detection device 100 through piping 814.

[0013] The gas pipe 80 is a pipe through which a sample gas that may contain a target component passes. The sample gas contains a base gas that is a main component. However, the base gas may contain one type of gas or may contain multiple types of gases. The base gas is not limited to this, but may be, for example, hydrogen (H ２ ), carbon dioxide (CO ２ ), water vapor (H ２ O), and / or nitrogen (N ２） Includes:

[0014] The sample gas may also contain one or more target components to be detected. The target components may include, but are not limited to, ammonia (NH ３ ), nitric oxide (NO), nitrogen dioxide (NO ２ ), nitrous oxide (N ２ O), hydrogen cyanide (HCN), hydrogen sulfide (H ２ S), sulfur dioxide (SO ２ ), and / or sulfur trioxide (SO ３ ) The detection device 100 measures the concentration using an adsorbent (described below) that adsorbs each of multiple target components in the sample gas. As a specific example, if the concentration of a specific target component is 0, it is understood that the specific target component is not contained in the sample gas. As described above, the measurement of the concentration of each target component by the detection device 100 also includes a determination of the presence or absence of each target component.

[0015] In one example, the detection device 100 detects a first target component and a second target component, which are different types of substances, using an adsorbent, as described below. In this specification, the first target component and the second target component are, for example, different types of gases. In the first embodiment, the first target component and the second target component are substances whose responses to light do not overlap. The difference in the responses of the first target component and the second target component to light will be described below.

[0016] The flow gas supply unit 89 supplies a flow gas to the detection device 100. The flow gas is a gas for flushing out the target components after the detection device 100 detects the first and second target components. The flow gas is a gas that does not interfere with the detection of the first and second target components by the detection device 100. For example, the flow gas may be, but is not limited to, nitrogen (N ２ ), argon (Ar), or helium (He). An example of the flow gas supply unit 89 is a pipe that supplies the flow gas. Another example of the flow gas supply unit 89 is a cylinder that contains the flow gas.

[0017] (2. Configuration of the Detection Apparatus) The detection apparatus 100 includes a detection unit 101 and a control apparatus 102 .

[0018] The detection unit 101 includes a gas concentration section 1, a gas detection section 2, a light source 4, a detector 5, pipes 811 to 815, valves 821 to 825, and pumps 831 and 832. The gas detection section 2 corresponds to one example of a "first gas detection section."

[0019] (2-1. Introduction / Discharge of Gas by Piping and Valves) Piping 811 connects the gas piping 80 and the gas enrichment unit 1. Piping 811 is a piping for introducing a portion of the gas in the gas piping 80 into the gas enrichment unit 1. Piping 811 is provided with a valve 821. Valve 821 adjusts the presence / absence and / or amount of gas introduced into the gas enrichment unit 1.

[0020] Pipe 812 connects gas concentration unit 1 and gas detection unit 2. Pipe 812 is a pipe for introducing gas in gas concentration unit 1 into gas detection unit 2. Pipe 812 is provided with valve 822. Valve 822 adjusts whether or not and / or the amount of gas introduced from gas concentration unit 1 to gas detection unit 2.

[0021] The pipe 813 is a pipe for discharging gas discharged from the gas detection unit 2 to the outside. In one embodiment, one end of the pipe 813 is connected to the gas detection unit 2, and the other end is open to the outside air. The pipe 813 is provided with a valve 823 and a pump 831. The valve 823 adjusts whether or not and / or the amount of gas discharged from the gas detection unit 2. The pump 831 is a pump for driving the discharge of gas from the pipe 813.

[0022] The pipe 814 connects the flow gas supply unit 89 and the gas concentrating unit 1. The pipe 814 is a pipe for introducing a portion of the flow gas in the flow gas supply unit 89 into the gas concentrating unit 1. The pipe 814 is provided with a valve 824. The valve 824 adjusts whether or not to introduce the flow gas into the gas concentrating unit 1 and / or the amount of the flow gas.

[0023] Pipe 815 is a pipe for discharging gas discharged from gas concentrating unit 1 to the outside. In one embodiment, one end of pipe 815 is connected to gas concentrating unit 1, and the other end is open to the outside air. Pipe 815 is provided with a valve 825 and a pump 832. Valve 825 adjusts whether or not and / or the amount of gas discharged from gas concentrating unit 1. Pump 832 is a pump for driving the discharge of gas from pipe 815.

[0024] (2-2. Gas Concentration Section) The gas concentration section 1 is a section for concentrating the first target component and the second target component. In FIG. 1, the first target component and the second target component are represented by figures 91 and 92, respectively. The gas concentration section 1 includes an adsorbent 10, a housing 11, and a stimulation section 12. The adsorbent 10 and the stimulation section 12 correspond to an example of a "first adsorbent" and a "first stimulation section," respectively.

[0025] The housing 11 supports the entire structure of the gas enrichment unit 1. Therefore, the housing 11 is formed of a material having sufficient rigidity to support the entire structure of the gas enrichment unit 1. The housing 11 includes, for example, metal or ceramics. The housing 11 contains the adsorbent 10. The adsorbent 10 may occupy a portion of the space within the housing 11 as shown in FIG. 2 , or may fill the entire space within the housing 11.

[0026] The adsorbent 10 is an adsorbent that selectively co-adsorbs a first target component and a second target component in the sample gas. More specifically, the adsorbent 10 is an adsorbent that selectively adsorbs the first target component and the second target component and does not adsorb other substances. In the first embodiment, the adsorbent 10 is selected to adsorb the first target component and the second target component whose responses to light do not overlap.

[0027] By flowing a sample gas through the adsorbent 10, a first target component and a second target component in the gas are adsorbed onto the adsorbent 10. More specifically, by flowing the sample gas through the adsorbent 10 for a predetermined time, the first target component accumulates in an amount corresponding to the predetermined time and the concentration of the first target component in the gas, and the second target component accumulates in an amount corresponding to the predetermined time and the concentration of the second target component in the gas.

[0028] The adsorbent 10 has the property of desorbing both the adsorbed first and second target components when a predetermined stimulus is applied, thereby generating a gas containing the concentrated first and second target components in the gas concentrator 1 ( FIG. 2 ). Therefore, the gas containing the concentrated first and second target components can be discharged from the gas concentrator 1.

[0029] In one embodiment, the magnitude of the stimulus that desorbs the first target component is the same as the magnitude of the stimulus that desorbs the second target component in the adsorbent 10. For example, the adsorbent 10 used has the same temperature at which the first target component is desorbed and the same temperature at which the second target component is desorbed.

[0030] In another embodiment, the magnitude of the stimulus that desorbs the first target component may be different from the magnitude of the stimulus that desorbs the second target component in the adsorbent 10. For example, the adsorbent 10 may be an adsorbent 10 that desorbs the first target component at a temperature different from the temperature that desorbs the second target component.

[0031] In yet another embodiment, the type of stimulus that causes the first target component to be desorbed from the adsorbent 10 may be different from the type of stimulus that causes the second target component to be desorbed from the adsorbent 10. Examples of the type of stimulus include temperature, light, and a magnetic field.

[0032] In one embodiment, the adsorbent 10 is a metal-organic framework (MOF). MOFs can be configured to adsorb and desorb various types of gases, and MOFs that co-adsorb and desorb various combinations of gases are known. Therefore, by using a MOF as the adsorbent 10, it is easy to co-adsorb and desorb a first target component and a second target component. In another embodiment, the adsorbent 10 is porous silica.

[0033] The stimulating unit 12 applies a stimulus to the adsorbent 10 to simultaneously or separately desorb the first and second target components from the adsorbent 10. The type of stimulus applied by the stimulating unit 12 to desorb the first and second target components depends on the type of adsorbent 10. According to one embodiment, the stimulating unit 12 desorbs the first and second target components from the adsorbent 10 by microwave heating or heater heating of the adsorbent 10. This configuration makes it possible to easily control the desorption of the first and second target components from the adsorbent 10 and the adsorption of the first and second target components to the adsorbent 10. A combination of the stimulating unit 12 and the adsorbent 10 may be used that has the characteristic that the adsorbent 10 desorbs the first and second target components when the stimulating unit 12 applies a stimulus such as light or a magnetic field to the adsorbent 10.

[0034] As described above, in the gas concentration unit 1, the first target component and the second target component can be concentrated by accumulating the first target component and the second target component in the adsorbent 10 and desorbing the accumulated first target component and the second target component using the stimulation unit 12. Therefore, even if the original sample gas contains only trace amounts of the first target component and / or the second target component, the concentration can be increased to a level that can be detected by the gas detection unit 2.

[0035] (2-3. Gas detection section) The gas detection section 2 is a section for optically detecting the first target component and the second target component in the gas. A gas containing the first target component and the second target component desorbed from the adsorbent 10 is introduced into the gas detection section 2 (FIG. 3). The gas detection section 2 has an entrance window 22 and an exit window 23 formed therein.

[0036] In one embodiment, the gas detection unit 2 includes a housing 21 and an entrance window 22 and an exit window 23 formed in the housing 21 .

[0037] The housing 21 supports the entire structure of the gas detection unit 2. Therefore, the housing 21 is formed of a material having sufficient rigidity to support the entire structure of the gas detection unit 2. The housing 21 includes, for example, metal or ceramics.

[0038] The entrance window 22 and the exit window 23 are a pair of window members respectively fitted into two opposing hole portions formed in the housing 21 .

[0039] The space between the entrance window 22 and the exit window 23 in the housing 21 is a detection space 20 in which the first and second target components are detected. Specifically, the detection of the first and second target components in the detection space 20 is performed as follows: Light (see arrow 71 in FIG. 3 ) that passes through the entrance window 22 from the light source 4 is irradiated onto the first and second target components in the detection space 20. Then, due to this irradiation, light (see arrow 72 in FIG. 3 ) from the first and second target components passes through the exit window 23, enters the detector 5, and is detected.

[0040] (2-4. Light Source and Detector) The light source 4 irradiates light onto the gas detection unit 2. More specifically, the light source 4 is configured to irradiate light into the detection space 20 through the entrance window 22. In one embodiment, the light source 4 is disposed on the opposite side of the detection space 20 with respect to the entrance window 22 (see, for example, FIG. 3). In another embodiment, the light emitted from the light source 4 enters the detection space 20 via an optical system such as a mirror (see, for example, FIGS. 14 and 15, which will be described later).

[0041] The detector 5 detects the light emitted from the gas detection unit 2. More specifically, the detector 5 is configured so that light from the detection space 20 enters through an exit window 23. In one embodiment, the detector 5 is disposed on the opposite side of the detection space 20 with respect to the exit window 23 (see, for example, FIG. 3). In another embodiment, the light emitted from the detection space 20 enters the detector 5 via an optical system such as a mirror (see, for example, FIGS. 14 and 15, which will be described later).

[0042] (2-5. Control Device) The control device 102 corresponds to one embodiment of the "first measurement unit." The control device 102 receives the detection signal from the detector 5, and measures the first target component and the second target component based on the signal strength of the wavelength corresponding to the first target component and the signal strength of the wavelength corresponding to the second target component. The control device 102 controls the detection unit 101.

[0043] The control device 102 includes a processor 103 such as a CPU (Central Processing Unit) or FPGA (Field-Programmable Gate Array), a memory 104 such as a ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output port (not shown).

[0044] The control device 102 may be configured by dividing it into two or more units for each function. For example, the control device 102 may be divided into a unit that controls each device and a unit that executes various data processing.

[0045] The control device 102 may include a display and / or an input device (mouse, keyboard, etc.) not shown.

[0046] FT-IR or NDIR, for example, is used as a method for detecting the first target component and the second target component in the control device 102. The device configurations specific to the detection devices 100A and 100B when each of the detection methods is adopted will be described below.

[0047] (2-6. Configuration when the detection device is a Fourier transform infrared spectrophotometer) FIG. 4 is a diagram showing an example of a detection device 100A using FT-IR. In the detection device 100A, the light source 4A includes an infrared light source 41 and an interferometer 42. The infrared light source 41 is a light source that generates infrared light. The interferometer 42 includes a beam splitter 421, a fixed mirror 422, and a movable mirror 423. The interferometer 42 generates interference light as follows. First, light emitted from the infrared light source 41 is incident on the beam splitter 421. Half of the light incident on the beam splitter 421 is transmitted through the beam splitter 421 and incident on the fixed mirror 422, and the other half is reflected by the beam splitter 421 and incident on the movable mirror 423. The movable mirror 423 is moved over time horizontally to the incident direction of the light from the beam splitter 421. The light reflected by fixed mirror 422 and movable mirror 423 returns to beam splitter 421. Here, the difference in optical path between the light reflected by movable mirror 423 and the light reflected by fixed mirror 422 changes over time, causing the light to interfere.

[0048] The control device 102A in FIG. 4 acquires a detection signal (interferogram) from the gas detection unit 2A. The control device 102A performs a Fourier transform on the interferogram to generate a power spectrum. The control device 102A generates a transmittance spectrum by dividing the background power spectrum by the power spectrum of the gas in which the first target component and the second target component have been concentrated by the gas concentration unit 1. The background power spectrum is, for example, the power spectrum of the flow gas. When the amounts of the first target component and the second target component contained in the sample gas before concentration are small, the power spectrum of the sample gas before concentration may be used as the background power spectrum. The control device 102A measures the first target component and the second target component based on a first signal intensity at a frequency corresponding to the first target component and a second signal intensity at a frequency corresponding to the second target component in the transmittance spectrum.

[0049] In the first embodiment, the first target component and the second target component are substances whose responses to light do not overlap. Therefore, in the transmittance spectrum, the frequency corresponding to the first target component and the frequency corresponding to the second target component are different. Therefore, the control device 102A can calculate the concentration of the first target component in the sample gas from the first signal intensity of the frequency corresponding to the first target component. Furthermore, the control device 102A can calculate the concentration of the second target component in the sample gas from the second signal intensity of the frequency corresponding to the second target component. The detection device 100A using FT-IR can simultaneously measure multiple types of target components in the sample gas with high sensitivity based on the transmittance spectrum of the interference light.

[0050] (2-7. Configuration of a Detection Apparatus Using NDIR) FIG. 5 is a diagram showing an example of a detection apparatus 100B using NDIR. In the detection apparatus 100B, the light source 4B is an infrared light source. The detection apparatus 100B includes a filter apparatus 61. The filter apparatus 61 includes filters 611 and 612, a disk 613, and a rotation mechanism 614. The filters 611 and 612 correspond to an example of a "first bandpass filter" and a "second bandpass filter," respectively. The filters 611 and 612 are bandpass filters that transmit the absorption wavelengths of the first target component and the second target component, respectively. The filters 611 and 612 are fitted into two holes formed in a disk 613. The disk 613 is disposed between the exit window 23 and the detector 5. The rotation mechanism 614 is a mechanism for rotating the disk 613. By rotating the rotation mechanism 614, it is possible to switch between a state in which the filter 611 is placed between the exit window 23 and the detector 5 and a state in which the filter 612 is placed between the exit window 23 and the detector 5.

[0051] 5 , with a filter 611 disposed between the exit window 23 and the detector 5B, measures a first target component based on the amount of infrared absorption of light transmitted through the filter 611. Furthermore, with a filter 612 disposed between the exit window 23 and the detector 5B, the control device 102B measures a second target component based on the amount of infrared absorption of light transmitted through the filter 612. Specifically, the control device 102B measures the first target component and the second target component based on a first signal intensity of a wavelength corresponding to the first target component and a second signal intensity of a wavelength corresponding to the second target component.

[0052] In the first embodiment, the first target component and the second target component are substances whose responses to light (infrared light absorption wavelengths in the example of FIG. 5 ) do not overlap. Therefore, the control device 102B can calculate the concentration of the first target component in the sample gas from the first signal intensity of light transmitted through a first bandpass filter that transmits a wavelength corresponding to the first target component. The control device 102B can also calculate the concentration of the second target component in the sample gas from the second signal intensity of light transmitted through a second bandpass filter that transmits a wavelength corresponding to the second target component. The detection device 100B using NDIR does not include an interferometer, which allows for smaller size and lower costs compared to the detection device 100A.

[0053] 6 is a flowchart showing the process of detecting the first target component and the second target component. The process of FIG.

[0054] Referring to FIG. 6 , in ST01, the processor 103 introduces gas into the adsorbent 10, which selectively co-adsorbs the first and second target components in the sample gas. In one embodiment, in ST02, the processor 103 opens the valves 821 and 825 before and after the gas concentration unit 1 and drives the pump 832. This introduces the sample gas from the gas pipe 80 into the adsorbent 10 in the gas concentration unit 1, and the first and second target components in the gas are adsorbed ( FIG. 1 ). Components of the sample gas that are not adsorbed by the adsorbent 10 (e.g., components of the base gas) are discharged to the outside via the pipe 815. As described above, by continuing to introduce gas into the adsorbent 10, the amount of the target component adsorbed by the adsorbent 10 increases, and the target component is concentrated in the gas concentration unit 1.

[0055] In ST02, the processor 103 stops the introduction of gas into the adsorbent 10 after a predetermined time has elapsed since the start of the introduction of gas.

[0056] In one embodiment, in ST02, the processor 103 closes the valves 821 and 825, which were open. This causes the inside of the gas enrichment unit 1 to become a closed space. Therefore, enrichment of the first target component and the second target component in the gas enrichment unit 1 is stopped. Even if the first target component and / or the second target component are desorbed from the adsorbent 10, they will not leak outside the gas enrichment unit 1.

[0057] In ST03, the processor 103 applies a stimulus to the adsorbent 10 using the stimulating unit 12. In one embodiment, a predetermined type of stimulus is applied to the adsorbent 10 at a predetermined intensity for a predetermined time. This allows the first target component and the second target component to be desorbed from the adsorbent 10 simultaneously or separately ( FIG. 2 ). The desorbed first target component and second target component fill the gas concentrating unit 1. As described above, the first target component and the second target component can be concentrated simultaneously by the processes in ST01 to ST03.

[0058] In ST04, the processor 103 introduces the first target component and the second target component desorbed from the adsorbent 10 into the gas detection unit 2, which has an entrance window 22 and an exit window 23 formed therein ( FIG. 3 ). In one embodiment, in ST04, the processor 103 opens the valves 822 and 823 before and after the gas detection unit 2 for a predetermined time, and drives the pump 831 for a predetermined time. The predetermined time is set to the time required for the gas in the gas concentrating unit 1 to move to the gas detection unit 2. As a result, the gas in which the first target component and the second target component have been concentrated in the gas concentrating unit 1 is introduced into the gas detection unit 2.

[0059] In steps ST04 to ST06, the processor 103 optically detects the first and second target components desorbed from the adsorbent 10.

[0060] In ST05, the processor 103 controls the light source 4 to irradiate the entrance window 22 of the gas detection unit 2 with light. As a result, the light is irradiated into the detection space 20, and the light is incident on the first target component and the second target component in the detection space 20.

[0061] In the case of the detection device 100A using FT-IR, the processor 103B controls the infrared light source 41 to irradiate the entrance window 22 with interference light via the interferometer .

[0062] In the case of the detection device 100B using NDIR, the processor 103C controls the light source 4B to irradiate the entrance window 22 with infrared light.

[0063] In ST06, the processor 103 causes the detector 5 to detect the light emitted from the exit window 23 of the gas detection unit 2. As a result, the light from the first target component and the second target component in the detection space 20 is detected by the detector 5. Note that, since ST05 and ST06 are usually performed simultaneously, the detector 5 detects transmitted light (in the case of FT-IR or NDIR) emitted from the detection space 20 when the light source 4 irradiates the detection space 20 with light. More specifically, the detector 5 detects light in which some wavelength components are absorbed by the first target component and the second target component in the detection space 20, or light scattered by the first target component and the second target component.

[0064] More specifically, in the case of the detection device 100A using FT-IR, the processor 103A controls the detector 5A to detect interference light in which predetermined wavelength components are absorbed by each of the first target component and the second target component.

[0065] In the case of the detection device 100B using NDIR, the processor 103B controls the detector 5B and the filter device 61 to detect infrared light that has passed through the filters 611 and 612 after a predetermined wavelength component has been absorbed by each of the first target component and the second target component.

[0066] In ST07, the processor 103 measures the first target component and the second target component based on the detection signal of the detector 5. More specifically, the processor 103 measures the first target component and the second target component based on the signal intensity of the wavelength corresponding to the first target component and the signal intensity of the wavelength corresponding to the second target component. The methods for measuring the first target component and the second target component when using FT-IR and NDIR, respectively, are as described above.

[0067] In ST08, the processor 103 discharges the gas in which the first target component and the second target component are concentrated from the gas detection unit 2. In one embodiment, in ST08, the processor 103 opens the valves 822, 823 and 824 before and after the gas detection unit 2. This allows the flow gas from the flow gas supply unit 89 to be introduced into the gas detection unit 2, and the gas in which the first target component and the second target component are concentrated is discharged from the gas detection unit 2. Steps ST01 to ST08 constitute one cycle of target component detection.

[0068] In ST09, processor 103 determines whether a condition for ending the detection of the target component is met. One example of the condition is receiving a user instruction to end the detection. Another example of the condition is completion of a predetermined number of cycles of detection.

[0069] If the termination condition is not met (NO in ST09), the processor 103 returns the process to ST01, and the next detection cycle is then performed.

[0070] On the other hand, if the termination condition is met (YES in ST09), the processor 103 terminates the process.

[0071] Various setting values ​​used in the process of Figure 6 (for example, the time for which the sample gas is flowed through the adsorbent 10 in ST01, and the time for which a stimulus is applied to the adsorbent 10 in ST03) may be changed as appropriate depending on the desired concentration rate of the first target component and / or the second target component, the desired time interval between measurements, etc. The setting values ​​may be set by the user using a predetermined user interface. The setting values ​​set by the user are stored in memory 104 and used by the processor 103 in the process of Figure 6.

[0072] If the amount of the first target component and the second target component adsorbed by the gas detection unit 2 is small even when the sample gas is passed through the gas detection unit 2, the processor 103 may open the valves 821, 822, and 823 in ST01 to supply the sample gas to the gas concentrating unit 1 and discharge it to the outside via the gas detection unit 2. In this case, the detection device 100 may not include the piping 815, the valve 825, and the pump 832.

[0073] Furthermore, when the processor 103 opens the valves 821, 822, and 823 in ST01 to supply the sample gas to the gas concentrating unit 1 and discharge it to the outside via the gas detection unit 2, after the target component is concentrated, the processor 103 may discharge (purge) the gas in the gas detection unit 2 by flowing a flow gas. Specifically, after ST02 and before ST03, the processor 103 may open the valves 822, 823, and 824 to flow the flow gas into the gas detection unit 2.

[0074] (4. Comparison between a conventional detection device and the detection device according to embodiment 1) (4-1. Comparison with the spectroscopic system using the CRDS method of Patent Document 1) Conventionally, in the technical field of gas detection and gas analysis, there has been a demand for a technology that can measure multiple types of target components present in a base gas with high sensitivity.

[0075] Cavity ring-down spectroscopy (CRDS) is a technique for measuring target components in a base gas with high sensitivity. In a spectroscopic system using the CRDS method described in Patent Document 1, the target components in a sample can be adsorbed and thermally desorbed in an adsorption tube, which is a thermal desorption tube. The sample in which the target components have been concentrated by the adsorption tube is supplied to a ring-down cavity for CRDS. The ring-down cavity is equipped with a CO laser, a mid-infrared laser. ２ Laser and C １３ O ２ Laser light of two wavelengths can be introduced into the ring-down cavity. This allows target components to be detected at concentrations lower than the lower detection limit of a detection device using the CRDS method without an adsorption tube. However, this detection requires one laser light source for each target component. Furthermore, this detection requires that one laser light source be introduced into the ring-down cavity for each target component, making it impossible to simultaneously detect multiple target components.

[0076] The detection device 100 according to the first embodiment can simultaneously concentrate two or more types of gases using an adsorbent that adsorbs two or more types of target components, and then simultaneously detect them. In other words, a single detection device can simultaneously measure multiple types of target components in a base gas with high sensitivity. Therefore, multiple types of target components in a base gas can be simultaneously detected in trace amounts. More specifically, this device is useful for measuring the concentrations of environmental pollutant gases such as nitrogen oxides (NOx) and sulfur oxides (SOx) in exhaust gases, detecting leaks of multiple toxic gases that affect the human body, and so on. As described above, the detection device 100 can simultaneously measure the concentrations of multiple types of impurities generated in a chemical process with high sensitivity using a single detection device.

[0077] (4-2. Comparison with conventional optical detection methods for simultaneously detecting multiple types of gases) Conventionally, optical absorption measurement methods such as FT-IR and NDIR have been known as optical detection methods for simultaneously detecting multiple types of gases. However, when two or more types of gases have absorption at the same wavelength among the multiple types of gases, even if the signal intensity at the same wavelength is measured, the signal intensity reflects the absorption of the two or more types of gases, and therefore the amount of each type of gas cannot be accurately measured.

[0078] In this specification, the state in which two or more types of gases absorb at the same wavelength is also referred to as "crossover." The signal intensity obtained as a result of this crossover is also referred to as "crossover sensitivity." Crossover sensitivity can also become noise during measurement. As described above, with conventional optical absorption measurement methods, when a sample gas contains two or more types of gases that absorb at the same wavelength, the concentrations of the two or more types of gases cannot be accurately measured.

[0079] Cross-sensitivity (noise) can vary from measurement to measurement. In particular, when there is cross-sensitivity and one gas is highly concentrated, the values ​​obtained from repeated measurements of other gases can vary greatly.

[0080] In the first embodiment, an adsorbent 10 is used that adsorbs a first target component and a second target component that have different responses to light. This prevents cross-reaction problems even when the first target component and the second target component are detected simultaneously. This allows the first target component and the second target component to be measured simultaneously with high sensitivity.

[0081] [Variation 1] FIG. 7 is a schematic diagram showing the configuration of a detection device 100D according to Variation 1. Variation 1 includes a window 24 and a mirror 25 instead of the entrance window 22 and exit window 23 of Embodiment 1. Referring to FIG. 7 , in a detection device 100D according to Variation 2, a window 24 is disposed at the position of the entrance window 22 in FIG. 1 , and a mirror 25 is disposed at the position of the exit window 23 in FIG. 1 . The light source 4 and the detector 5 are disposed on the opposite side of the detection space 20 from the window 24. With this configuration, when light (see arrow 71D) is irradiated from the light source 4 into the detection space 20, transmitted light or scattered light (see arrow 72D) from the detection space 20 is reflected by the mirror 25 and enters the detector 5. According to Variation 1, even if it is difficult to install the light source 4 and the detector 5 on opposite sides of the detection space 20 as in the detection device 100 of Embodiment 1, a detection device 100D that can achieve the same effect as the detection device 100 can be created.

[0082] [Modification 2] In the first embodiment, the gas concentration unit 1 and the gas detection unit 2 are configured as separate units and connected via the pipe 812 and the valve 822. However, the gas concentration unit 1 and the gas detection unit 2 may be configured as an integrated unit. More specifically, as shown in Modification 2, the adsorbent and the gas detection unit may be configured as an integrated unit as a single gas cell 3.

[0083] FIG. 8 is a schematic diagram showing the configuration of a detection device 100E according to Modification 2. In the detection device 100E, the gas concentrator 1 and gas detector 2 of the detection device 100 according to Embodiment 1 are replaced with an integrated gas concentrator 1E and gas detector 2E. Specifically, in the detection device 100E, the housing 11, housing 21, piping 812, and valve 822 are removed from the gas concentrator 1 and gas detector 2 of the detection device 100, and these are integrated into a single gas cell 3. The gas cell 3 includes a housing 31. The housing 31 supports the entire structure of the gas cell. Therefore, the housing 31 is formed of a material having sufficient rigidity to support the entire structure of the gas cell 3. An entrance window 22 and an exit window 23 are fitted into two opposing holes formed in the housing 31. The space between the entrance window 22 and the exit window 23 in the housing 31 is a detection space 20E for detecting the first and second target components. The adsorbent 10E is stored in a portion of the housing 31 other than the detection space 20E. This configuration minimizes the volume of the space from the first target component and the second target component desorbed from the adsorbent 10E to the detection position (detection space 20E). This prevents the concentrated first target component and the second target component from being diluted, enabling highly sensitive detection of the first target component and the second target component. Furthermore, the transport path from the first target component and the second target component desorbed from the adsorbent 10E to the detection position (detection space 20E) can be minimized, enabling detection of the target components in a short period of time.

[0084] 6 , the step of applying a stimulus to the adsorbent 10 in ST03 and the step of introducing the first target component and the second target component desorbed from the adsorbent 10 into the gas detection unit 2 having the entrance window 22 and the exit window 23 in ST04 are integrated. Specifically, the processor 103E of the second modification applies a stimulus to the adsorbent 10E, thereby introducing the first target component and the second target component desorbed from the adsorbent 10E into the gas detection unit 2E of the gas cell 3.

[0085] [Detection device including multiple types of adsorbents] The detection device including one type of adsorbent that co-adsorbs multiple types of target components has been described in the above-mentioned embodiment 1 and modifications 1 and 2. The following embodiments 2, 3, and modifications will each describe a detection device including multiple types of adsorbents that co-adsorb multiple types of target components.

[0086] A detector that includes multiple adsorbents has the advantage of being able to simultaneously detect many target components. For example, a detector that includes three adsorbents, each of which co-adsorbs three target components, can simultaneously measure 3 x 3 = 9 target components.

[0087] Furthermore, in a detection device including multiple types of adsorbents, it is possible to avoid the degradation of measurement accuracy due to crossover in conventional FT-IR and NDIR. For example, in conventional FT-IR, ２ and SO ３ Since the absorption wavelength ranges of these components are close to each other, cross-sensitivity reduces measurement accuracy and worsens the detection limit. Furthermore, this reduction in measurement accuracy due to cross-sensitivity is even more pronounced in conventional detection methods, such as NDIR, that use a band-pass filter or the like for a specific wavelength range to average the response of the specific wavelength range. Specifically, when a wavelength range is selected and detected using a band-pass filter or the like to measure the concentration of a certain target component, cross-sensitivity occurs because the wavelength range also contains the absorption of other target components.

[0088] In embodiment 1, one type of adsorbent was used to simultaneously detect multiple target components whose responses to light do not overlap. However, when multiple target components whose responses to light overlap are to be simultaneously detected, multiple types of adsorbents are required, as in embodiments 2 and 3 described below.

[0089] In the second embodiment, a configuration is described in which a plurality of adsorbents are used, each having different adsorption efficiencies for a plurality of target components that have overlapping responses to light. In the third embodiment, a configuration is described in which the plurality of target components are adsorbed by a different adsorbent.

[0090] When MOF is used as the adsorbent, the selectivity of the type of gas to be adsorbed may be low, so a configuration using multiple types of adsorbents, as in embodiments 2 and 3, is particularly useful.

[0091] [Embodiment 2] In embodiment 2, an example is shown in which two types of adsorbents with different adsorption efficiencies are used to measure a first target component and a second target component whose responses to light overlap each other.

[0092] 9 is a schematic diagram showing the configuration of a detection device 100F according to embodiment 2. Note that in the subsequent drawings of the detection device, the control device will not be shown. The detection device 100F includes a detection unit 101F in addition to the detection unit 101 of embodiment 1.

[0093] Detection unit 101F includes a gas concentration unit 1F, a gas detection unit 2F, a light source 4F, and a detector 5F, instead of gas concentration unit 1, gas detection unit 2, light source 4, and detector 5 of detection unit 101. Gas detection unit 2F corresponds to one example of a "second gas detection unit."

[0094] The gas concentration section 1F includes an adsorbent 10F. The adsorbent 10F co-adsorbs the first target component and the second target component, similar to the adsorbent 10, but has a different adsorption efficiency for the first target component and / or the second target component from that of the adsorbent 10. The adsorbent 10F corresponds to an example of a "second adsorbent."

[0095] The gas detection unit 2F is formed with an entrance window 22F and an exit window 23F for detecting the first and second target components desorbed from the adsorbent 10F. The entrance window 22F and the exit window 23F correspond to an example of a "second entrance window" and a "second exit window," respectively.

[0096] In one example of embodiment 2, a dedicated light source and detector are provided for each of the plurality of gas detection units. Specifically, a light source 4F and a detector 5F for detecting the first and second target components in gas detection unit 2F are included, independent of a light source 4 and a detector 5 for detecting the first and second target components in gas detection unit 2.

[0097] The light source 4F irradiates the entrance window 22F with light. The detector 5F detects the light exiting from the exit window 23F.

[0098] 9, the adsorbent 10 adsorbs the first target component and the second target component in a ratio of 50:50, whereas the adsorbent 10F adsorbs the first target component and the second target component in a ratio of 75:25. With this configuration, even if the absorption wavelengths of the first target component and the second target component overlap, the concentrations of the first target component and the second target component can be measured by comparing the detection signals detected by the gas detection unit 2 and the detection signals detected by the gas detection unit 2F.

[0099] In another example of the second embodiment, a light source and / or a detector may be shared among multiple gas detection units. Specifically, in the second embodiment, instead of the light source 4F dedicated to the gas detection unit 2 described above, an optical system (for example, mirrors 66P to 66R in FIGS. 14 and 15 described later) may be included that causes light emitted from the light source 4 to enter the entrance window 22F. Furthermore, instead of the detector 5F dedicated to the gas detection unit 2 described above, an optical system (for example, mirrors 64P to 64R in FIG. 15 described later) may be included that causes light emitted from the exit window 23F to enter the detector 5.

[0100] For example, the detection device may include a mechanism that uses a mirror that totally reflects light emitted from a single light source to cause the light to be incident on multiple gas detection units in sequence, or a mechanism that totally reflects light emitted from multiple gas detection units to be incident on a single detector (see FIGS. 14 and 15 ).

[0101] As another example, a mechanism may be included in which a beam splitter is used to split the light emitted from one light source 4 at a predetermined split ratio, and the split light is incident simultaneously on a plurality of gas detection units.

[0102] As described above, by configuring a single light source and / or detector for multiple gas detection units, the number of light sources and / or detectors can be reduced compared to when multiple light sources and detectors are provided for each of the multiple gas detection units. This allows the detection device to be made smaller, and also reduces the manufacturing costs of the detection device.

[0103] On the other hand, if multiple light sources and detectors are provided for each of the multiple gas detection units, as shown in Figure 9, light from the light source can be irradiated to all of the gas detection units without being split, allowing simultaneous detection. Therefore, measurement can be completed in a shorter time than with a configuration in which light is incident sequentially on multiple gas detection units. Furthermore, a higher amount of light can be incident on the gas detection units than with a configuration in which split light is incident simultaneously on multiple gas detection units using a beam splitter. This enables highly sensitive measurement and improves the S / N ratio.

[0104] 10 is a schematic diagram showing the configuration of a detection device 100G according to embodiment 3. The detection device 100G includes a detection unit 101G in addition to the detection unit 101 of embodiment 1.

[0105] Detection unit 101G includes a gas concentration unit 1G, a gas detection unit 2G, a light source 4G, and a detector 5G instead of gas concentration unit 1, gas detection unit 2, light source 4, and detector 5 of detection unit 101. Gas detection unit 2G, light source 4G, and detector 5G correspond to an example of a "third gas detection unit," a "third light source," and a "third detector," respectively.

[0106] The gas enrichment unit 1G includes an adsorbent 10G. The adsorbent 10G adsorbs a third target component and a fourth target component, which are different from the first target component and the second target component, respectively. In FIG. 10 , the third target component and the fourth target component are indicated by figures 93 and 94, respectively. The adsorbent 10G corresponds to one example of a "third adsorbent."

[0107] The gas detection unit 2G is formed with an entrance window 22G and an exit window 23G for detecting the first and second target components desorbed from the adsorbent 10G. The entrance window 22G and the exit window 23G correspond to an example of a "third entrance window" and a "third exit window," respectively.

[0108] In one example of embodiment 3, a dedicated light source and detector are provided for each of the plurality of gas detection units. Specifically, a light source 4G and a detector 5G for detecting the first target component and the second target component in gas detection unit 2G are included, independent of a light source 4 and a detector 5 for detecting the first target component and the second target component in gas detection unit 2.

[0109] The light source 4G irradiates light onto an entrance window 22G of the gas detection unit 2G. The detector 5G detects the light exiting from an exit window 23G of the gas detection unit 2G.

[0110] With this configuration, the first target component and the second target component can be measured simultaneously in the detection unit 101. Then, the third target component and the fourth target component can be measured simultaneously in the detection unit 101G. Therefore, the detection device 100G can simultaneously detect the first to fourth target components.

[0111] As described above, the detection device 100G, which includes a plurality of adsorbents that adsorb different target components, can adsorb a larger number of target components at one time than the detection device 100, which includes a single adsorbent.

[0112] When detecting multiple target components with overlapping absorption wavelengths, it is effective to detect each of the multiple target components using a different detection unit. The detection units 101 and 101G are configured so that the overlap between the first signal component corresponding to the first target component and the second signal component corresponding to the second target component is smaller than either the overlap between the first signal component and the third signal component corresponding to the third target component or the overlap between the first signal component and the fourth signal component corresponding to the fourth target component. Furthermore, the overlap between the third signal component and the fourth signal component is smaller than either the overlap between the third signal component and the first signal component or the overlap between the third signal component and the second signal component.

[0113] This configuration can reduce cross-talk with the first target component compared to when the first target component and the third or fourth target component are detected by the same detection unit, and can also reduce cross-talk with the third target component compared to when the third target component and the first or second target component are detected by the same detection unit.

[0114] As in embodiment 3, by detecting multiple target components with overlapping absorption wavelengths using different detection units, the process of eliminating the influence of crossover by calculation as in embodiment 2 is not required. Therefore, embodiment 3 makes it possible to simply measure the multiple target components. On the other hand, embodiment 2 is useful when an adsorbent that adsorbs only the first target component but not the second target component cannot be found.

[0115] In another example of the third embodiment, a light source and / or a detector may be shared among multiple gas detection units. Specifically, in the third embodiment, instead of the light source 4G dedicated to the gas detection unit 2 described above, an optical system (for example, mirrors 66P to 66R in FIG. 14 described later) may be included that causes light emitted from the light source 4 to enter the entrance window 22G. Furthermore, instead of the detector 5G dedicated to the gas detection unit 2 described above, an optical system (for example, mirrors 64P to 64R in FIG. 15 described later) may be included that causes light emitted from the exit window 23G to enter the detector 5.

[0116] As described above, by configuring a single light source and / or detector for multiple gas detection units, the number of light sources and / or detectors can be reduced compared to when multiple light sources and detectors are provided for each of the multiple gas detection units. This allows the detection device to be made smaller, and also reduces the manufacturing costs of the detection device.

[0117] On the other hand, if a configuration is adopted in which a plurality of light sources and detectors are provided for each of a plurality of gas detection sections as shown in FIG. 10, rapid and highly sensitive measurement is possible.

[0118] Example 1 Fig. 11 is a schematic diagram showing the configuration of a detection apparatus 100K according to Example 1. The detection apparatus 100K according to Example 1 includes detection units 101K to 101M. The detection units 101K to 101M include gas cells 3K to 3M. The gas cells 3K to 3M each include a different type of adsorbent 10K to 10M. The gas cells 3K to 3M are configured to detect target components in the combinations shown in Fig. 12 below.

[0119] 12 is a diagram showing the target components detected by each gas cell when the intersection is minimum. ３ , NO, NO ２ , N ２ O, HCN, H ２ S, SO ２ , and SO ３ 13 shows, as a comparative example, a table showing the target components detected by each gas cell with the smallest crossover when the above eight target components are detected using three gas cells.

[0120] The tables in FIGS. 12 and 13 include columns A to D. The items in column A are "gas cell numbers," and the gas cell names are shown as values ​​corresponding to the items. FIG. 12 shows gas cells 3K, 3L, and 3M used in Example 1. FIG. 13 shows gas cells 3K', 3L', and 3M' used as comparative examples.

[0121] The item in column B is "target component," and the value corresponding to this item indicates the target component detected in the gas cell indicated by the gas cell name in column A. For example, in gas cell 3K, N ２ O, HCN, NO ２ In other words, in the gas cell 3K, N ２ O, HCN, NO ２ An adsorbent 10K that co-adsorbs the above three target components is used.

[0122] The items corresponding to columns C and D are "amount of false detection when the target component in column B is 10%." These items indicate the amount of false detection of other target components in the same cell when measuring a sample gas containing 10% by volume of the target component in column B and 90% by volume of base gas. The values ​​in column C indicate the "other target components in the same cell." The values ​​in column D indicate the amount of false detection of the target component listed in column C. This amount of false detection is an example of "cross-sensitivity."

[0123] For example, referring to FIG. 12, in gas cell 3K, N ２ When measuring a sample gas containing 10% by volume of O and 90% by volume of base gas, the concentration of HCN was 5 ppm, ２ It can be seen that the concentration of is measured to be 135 ppm.

[0124] Furthermore, if the target components adsorbed in each gas cell are combined to minimize the crossover, the maximum amount of false detection can be kept to 623 ppm or less, which is less than one-hundredth of the maximum false detection amount of 72,486 ppm when the target components adsorbed in each gas cell are combined to maximize the crossover ( FIG. 13 ).

[0125] As described above, in Example 3, the cross-sensitivity could be reduced by appropriately grouping the multiple target components detected in each gas cell so that the responses (e.g., absorption wavelengths) to light in each gas cell did not overlap, thereby providing a detection device capable of simultaneously detecting multiple target components with high sensitivity.

[0126] In Example 1, NDIR is used as the detection method, and therefore, when the wavelength range of the bandpass filter for NDIR is changed, the preferred combination of target components may be changed.

[0127] The detection process in each of the detection units 101K to 101M in Example 1 was performed in the same manner as the detection process in the detection unit 101 described with reference to FIG.

[0128] When a single detection device includes multiple detection units as in Example 1, the detection cycles of the multiple detection units may be run simultaneously or may be started at different times. By staggering the detection cycles of the detection units, it is possible to share a light source that emits incident light (see arrows 71K to 71M) and a detector that detects emitted light (see arrows 72K to 72M). Specifically, for example, as shown in the following Example 2, light emitted from a single light source can be made incident on multiple gas cells in sequence.

[0129] [Example 2] (Configuration of the detection apparatus according to Example 2) Figure 14 is a schematic diagram showing the configuration of a detection apparatus 100P according to Example 2. The detection apparatus 100P includes gas cells 3P-3R, a light source 4A, motors 65P, 65Q, mirrors 66P-66R, parabolic mirrors 67P-67R, 68P-68R, and detectors 5P-5R. In Figure 14, the piping and valves connecting the gas cells 3P-3R to the gas piping 80, the piping and valves connecting the gas cells 3P-3R to the flow gas supply unit 89, and the piping and valves for discharging gas from the gas cells 3P-3R to the outside are not shown. In addition, configurations other than the entrance windows 22P-22R and exit windows 23P-23R of the gas cells 3P-3R and the detection spaces 20P-20R are not shown. In Example 2, as in Example 1, NH ３ , NO, NO ２ , N ２ O, HCN, H ２ S, SO ２ , and SO ３ Eight types of target components are detected.

[0130] The light source 4A in FIG. 14 has the same configuration as the light source 4A in FIG. 4, including the infrared light source 41 and the interferometer 42.

[0131] The motors 65P and 65Q are connected to the mirrors 66P and 66Q, respectively, and switch the positions of the mirrors 66P and 66Q to either on or off the optical path 49 of the light emitted from the light source 4A.

[0132] The mirrors 66P to 66R are mirrors that totally reflect the light emitted from the light source 4 A. The light reflected by the mirrors 66P to 66R is incident on the parabolic mirrors 67P to 67R.

[0133] The parabolic mirrors 67P to 67R reflect and collect the light incident from the mirrors 66P to 66R, and the light enters the detection spaces 20P to 20R via the entrance windows 22P to 22R of the gas cells 3P to 3R.

[0134] The light incident on the detection spaces 20P to 20R (see arrows 71P to 71R in FIG. 14) passes through the detection spaces 20P to 20R and then enters the parabolic mirrors 68P to 68R (see arrows 72P to 72R in FIG. 14).

[0135] The parabolic mirrors 68P to 68R reflect and collect the light incident from the detection spaces 20P to 20R, and make the light incident on the detectors 5P to 5R.

[0136] When detecting the target component in the gas cell 3P, the processor drives the motor 65P to position the mirror 66P on the optical path 49. As a result, the interference light emitted from the interferometer 42 is reflected by the mirror 66P and focused on the gas cell 3P by the parabolic mirror 67P. The infrared light transmitted through the gas cell 3P is made incident on the detector 5P by the parabolic mirror 68P and detected. The interferogram detected by the detector 5P is converted into a power spectrum by Fourier transform and divided by the background power spectrum. As a result, a transmittance spectrum T reflecting the absorption profiles of the multiple target components in the gas cell 3P is obtained. １ is obtained.

[0137] When detecting the target component in the gas cell 3Q, the processor drives the motor 65P to place the mirror 66P outside the optical path 49, and drives the motor 65Q to place the mirror 66Q on the optical path 49. As a result, the interference light emitted from the interferometer 42 is reflected by the mirror 66Q and focused on the gas cell 3Q by the parabolic mirror 67Q. The infrared light transmitted through the gas cell 3Q is made incident on the detector 5Q by the parabolic mirror 68Q and detected. The detection signal (interference signal) detected by the detector 5Q is converted into a power spectrum by Fourier transform and divided by the power spectrum before concentration and / or the power spectrum during flow gas purging, etc. As a result, a transmittance spectrum T reflecting the absorption profiles of the multiple target components in the gas cell 3Q is obtained.２ is obtained.

[0138] When detecting the target component in the gas cell 3R, the processor drives the motor 65P to position the mirror 66P outside the optical path 49, and drives the motor 65Q to position the mirror 66Q outside the optical path 49. As a result, the interference light emitted from the interferometer 42 is reflected by the mirror 66R and focused on the gas cell 3R by the parabolic mirror 67R. The infrared light transmitted through the gas cell 3R is made incident on the detector 5R by the parabolic mirror 68R and detected. The detection signal (interferogram) detected by the detector 5R is converted into a power spectrum by Fourier transform, and then the background power spectrum is divided. As a result, a transmittance spectrum T reflecting the absorption profiles of the multiple target components in the gas cell 3R is obtained. ３ is obtained.

[0139] As described above, by using the mirrors 66P to 66Q that totally reflect infrared light, the light emitted from one light source 4A can be switched and used to detect target components in the multiple gas cells 3P to 3R. This allows the number of light sources to be reduced compared to when multiple light sources are provided to irradiate the multiple gas cells 3P to 3R with infrared light, respectively.

[0140] Furthermore, by replacing the mirrors 66P to 66Q with beam splitters, the light emitted from a single light source 4A can be split and used to detect target components in multiple gas cells 3P to 3R. This configuration is superior to a configuration using mirrors 66P to 66Q that totally reflect infrared light in that it allows simultaneous detection in multiple gas cells 3P to 3R. On the other hand, the configuration using mirrors 66P to 66Q that totally reflect infrared light is superior in that it allows detection of target components in each of multiple gas cells 3P to 3R without reducing the amount of light.

[0141] (Calculation of the concentration of the target component according to Example 2) In one example of a method for calculating the concentration, the transmittance spectrum T １ ~T ３ First, the absorbance spectrum A １ ~A ３ is converted to

[0142] Absorbance spectrum A １~A ３ is expressed as the concentration matrix C １ ~C ３ is converted to

[0143]

[0144] In Equation 1, i is a natural number, and in Example 2, it is a natural number between 1 and 3. １ ~C ３ is a matrix containing the measured concentration values ​​of each target component after concentration as matrix elements. The matrix K is a standard absorbance spectrum matrix consisting of the standard absorbance spectra of each target component measured in advance, and is expressed by the following equation 2: K Ｔ denotes the transpose of the matrix K.

[0145]

[0146] In Equation 2, n is a natural number, which is 8 in Example 2. In another example of the method for calculating the concentration, A in Equation 1 ｉ T ｉ and the matrix K can be a standard transmittance spectrum matrix consisting of standard transmittance spectra of each target component measured in advance. In this case, the concentration can be calculated without converting the transmittance spectrum into an absorbance spectrum.

[0147] In the above, a standard spectral matrix consisting of standard spectra of all target components in all gas cells is created, but the spectra of the base gas and / or flow gas may also be added. Alternatively, a standard spectral matrix including standard spectra of target components for each gas cell may be created.

[0148] Furthermore, the concentration rates of the target components in the gas cell are a １ , a ２ By using the standard spectral matrix K' (Equation 3) obtained by multiplying the standard absorbance spectrum of each target component in Equation 2 by the standard spectral matrix K' (Equation 3), it is also possible to calculate the concentration of each target component in the gas pipe 80 before it is concentrated by the gas concentration unit 1.

[0149]

[0150] In Equation 3, n is a natural number, and in Example 2, it is 8. As described above, in each of the above embodiments and modifications, the detection device can simultaneously concentrate and detect multiple target components using an adsorbent that adsorbs the multiple target components. Therefore, it is possible to provide a detection device that can simultaneously measure multiple types of target components in a gas with high sensitivity.

[0151] 15 is a schematic diagram showing the configuration of a detection device 100Q according to Example 3. The detection device 100Q includes a detector 5A instead of the detectors 5P to 5R of the detection device 100P in FIG. 14. The detection device 100Q also includes motors 63P and 63Q, mirrors 64P to 64R, and a parabolic mirror 69.

[0152] The mirrors 64P to 64R are mirrors that totally reflect the light emitted from the parabolic mirrors 68P to 68R. The light reflected by the mirrors 64P to 64R is incident on the parabolic mirror 69.

[0153] The parabolic mirror 69 reflects and collects the light incident from the mirrors 64P to 64R, and makes the light incident on the detector 5A.

[0154] The motors 63P and 63Q are connected to the mirrors 64P and 64Q, respectively, and switch the positions of the mirrors 64P and 64Q to either on the optical path 48 or outside the optical path 48.

[0155] When detecting the target component in the gas cell 3P, the processor drives the motor 63P to position the mirror 64P on the optical path 48. As a result, the infrared light transmitted through the gas cell 3P is reflected by the mirror 64P, and then focused by the parabolic mirror 69 onto the detector 5A and detected.

[0156] When detecting the target component in the gas cell 3Q, the processor drives the motor 63P to position the mirror 64P outside the optical path 48, and drives the motor 63Q to position the mirror 64Q on the optical path 48. As a result, the infrared light transmitted through the gas cell 3Q is reflected by the mirror 64Q, and then focused by the parabolic mirror 69 onto the detector 5A and detected.

[0157] When detecting the target component in the gas cell 3R, the processor drives the motor 63P to position the mirror 64P outside the optical path 48, and drives the motor 63Q to position the mirror 64Q outside the optical path 48. As a result, the infrared light transmitted through the gas cell 3R is reflected by the mirror 64R, and then focused by the parabolic mirror 69 onto the detector 5A and detected.

[0158] As described above, by using the mirrors 64P to 64R that totally reflect infrared light, it is possible to detect target components in the multiple gas cells 3P to 3R using a single detector 5A. This allows the number of detectors to be reduced compared to when the same number of detectors as the multiple gas cells 3P to 3R are provided.

[0159] In the above-described embodiment, an example of measuring infrared light absorption using FT-IR and NDIR has been described, but the present invention is not limited to this and can be applied to wavelength ranges other than infrared light (for example, visible light or ultraviolet light), and light scattering (for example, Raman scattering), fluorescence, or luminescence may be measured instead of light absorption.

[0160] [Aspects] It will be understood by those skilled in the art that the above-described embodiments and their modifications are specific examples of the following aspects.

[0161] (Item 1) A detection device according to one aspect includes a first adsorbent, a first stimulating unit, a first gas detection unit, and a first measurement unit. The first adsorbent selectively co-adsorbs a first target component and a second target component in a sample gas. The first stimulating unit applies a stimulus to the first adsorbent to simultaneously or separately desorb the first target component and the second target component. The first gas detection unit optically detects the first target component and the second target component desorbed from the first adsorbent. The first measurement unit measures the first target component and the second target component based on a first signal intensity at a wavelength corresponding to the first target component and a second signal intensity at a wavelength corresponding to the second target component.

[0162] According to the detection device described in paragraph 1, multiple target components can be simultaneously concentrated and detected using an adsorbent that adsorbs the multiple target components, thereby providing a detection device that can simultaneously measure multiple types of target components in a gas with high sensitivity.

[0163] (Item 2) In the detection device described in item 1, the first adsorbent and the first gas detection unit are integrally configured as one gas cell.

[0164] The detection device described in paragraph 2 allows for highly sensitive detection of the first and second target components, and also allows for detection of the target components in a short period of time.

[0165] (Item 3) The detection device according to items 1 or 2 further includes a first light source that irradiates light onto the first gas detection unit. The first light source includes an infrared light source and an interferometer that generates interference light from the light emitted from the infrared light source. The interference light is incident on the first gas detection unit.

[0166] According to the detection device described in paragraph 3, a plurality of target components in a sample gas can be measured simultaneously with high sensitivity based on the transmittance spectrum of interference light.

[0167] (Item 4) The detection device according to items 1 or 2 further includes a first light source that irradiates light onto the first gas detection unit and a first detector that detects the light emitted from the first gas detection unit. The first light source is a light source that generates infrared light. The detection device further includes a first bandpass filter that transmits the absorption wavelength of the first target component and is arranged to transmit the light emitted from the first gas detection unit and incident on the first detector, and a second bandpass filter that transmits the absorption wavelength of the second target component and is arranged to transmit the light emitted from the first gas detection unit and incident on the first detector. The first measurement unit measures the first target component and the second target component based on the amount of infrared absorption detected by the first detector.

[0168] According to the detection device described in paragraph 4, since an interferometer is not used, it is possible to reduce the size and cost.

[0169] (Item 5) In the detection device according to any one of items 1 to 4, the first adsorbent is a metal-organic framework.

[0170] According to the detection device described in paragraph 5, the first target component and the second target component can be easily co-adsorbed and desorbed.

[0171] (Item 6) The detection device described in Item 6 further includes a second adsorbent that selectively co-adsorbs the first target component and the second target component but has a different adsorption efficiency for the first target component and / or the second target component than the first adsorbent, and a second gas detection unit that optically detects the first target component and the second target component desorbed from the second adsorbent.

[0172] According to the detection device described in paragraph 6, even if the absorption wavelengths of the first target component and the second target component overlap, the concentrations of the first target component and the second target component can be measured by comparing the detection signal detected by gas detection unit 2 with the detection signal detected by gas detection unit 2F.

[0173] (Item 7) The detection device described in Item 6 further includes a first light source that irradiates light onto the first gas detection unit, a first detector that detects the light emitted from the first gas detection unit, a second light source that irradiates light onto the second gas detection unit, and a second detector that detects the light emitted from the second gas detection unit.

[0174] According to the detection device described in item 7, it is possible to shorten the measurement time and perform the measurement with high sensitivity.

[0175] (Item 8) The detection device described in Item 6 further includes a first light source that irradiates light onto the first gas detection unit, a first detector that detects the light emitted from the first gas detection unit, and an optical system that makes the light emitted from the first light source incident on the second gas detection unit, and / or an optical system that makes the light emitted from the second gas detection unit incident on the first detector.

[0176] According to the detection device described in item 8, the detection device can be made smaller, and the manufacturing cost of the detection device can be reduced.

[0177] (Item 9) The detection device described in any one of Items 1 to 8 further includes a third adsorbent that adsorbs a third target component and a fourth target component that are different from the first target component and the second target component, respectively, and a third gas detection unit that optically detects the third target component and the fourth target component desorbed from the third adsorbent.

[0178] The detection device described in paragraph 9 can adsorb multiple target components at once. Furthermore, when it is desired to detect multiple target components with overlapping absorption wavelengths, each of the multiple target components can be detected by a different detection unit.

[0179] (Item 10) In the detection device described in Item 9, the overlap between the first signal component corresponding to the first target component and the second signal component corresponding to the second target component is smaller than either the overlap between the first signal component and the third signal component corresponding to the third target component, or the overlap between the first signal component and the fourth signal component corresponding to the fourth target component.

[0180] According to the detection device described in paragraph 10, it is possible to reduce crossover with the first target component. (paragraph 11) The detection device described in paragraph 9 or 10 further includes a first light source that irradiates light onto the first gas detection unit, a first detector that detects the light emitted from the first gas detection unit, a third light source that irradiates light onto the third gas detection unit, and a third detector that detects the light emitted from the third gas detection unit.

[0181] The detection device described in paragraph 11 enables rapid and highly sensitive measurements. (paragraph 12) The detection device described in paragraphs 9 or 10 further includes a first light source that irradiates light onto the first gas detection unit, a first detector that detects the light emitted from the first gas detection unit, and an optical system that causes the light emitted from the first light source to be incident on the third gas detection unit and / or an optical system that causes the light emitted from the third gas detection unit to be incident on the first detector.

[0182] According to the detection device described in paragraph 12, the detection device can be made smaller, and the manufacturing cost of the detection device can be reduced.

[0183] (Item 13) A detection method according to another aspect includes the steps of introducing a sample gas into a first adsorbent that selectively co-adsorbs a first target component and a second target component in the sample gas, applying a stimulus to the first adsorbent, optically detecting the first target component and the second target component desorbed from the first adsorbent, and measuring the first target component and the second target component based on a first signal intensity at a wavelength corresponding to the first target component and a second signal intensity at a wavelength corresponding to the second target component.

[0184] According to the detection method described in item 13, a plurality of target components can be simultaneously concentrated and detected by using an adsorbent that adsorbs the target components.

[0185] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the description of the above embodiments, and is intended to include all modifications within the meaning and scope of the claims.

[0186] 1, 1E, 1F, 1G Gas concentration unit, 2, 2A, 2E, 2F, 2G Gas detection unit, 3, 3K, 3L, 3M, 3P, 3Q, 3R Gas cell, 4, 4A, 4B, 4F, 4G Light source, 5, 5A, 5B, 5F, 5G, 5P, 5Q, 5R Detector, 10, 10E, 10F, 10G, 10K, 10M Adsorbent, 11, 21, 31 Housing, 12 Stimulation unit, 20, 20E, 20P, 20R Detection space, 22, 22F, 22G, 22P, 22R Entrance window, 23, 23F, 23G, 23P, 23R Exit window, 24 Window, 25, 64P, 64Q, 64R, 66P, 66Q, 66R Mirror, 41 Infrared light source, 42 Interferometer, 49 Optical path, 61 Filter device, 63P, 63Q, 65P, 65Q Motor, 67P, 67Q, 67R, 68P, 68Q, 68R, 69 Parabolic mirror, 80 Gas piping, 89 Flow gas supply unit, 100, 100A, 100B, 100D, 100E, 100F, 100G, 100K, 100P, 100Q Detector, 101, 101F, 101G, 101K, 101M Detection unit, 102, 102A, 102B Control device, 103, 103A, 103B, 103E Processor, 104 Memory, 421 Beam splitter, 422 Fixed mirror, 423 Moving mirror, 611, 612 Filter, 613 Disk, 614 Rotating mechanism, 811, 812, 813, 814, 815 Piping, 821, 822, 823, 824, 825 Valves, 831, 832 Pump, A1, A3 Absorbance spectrum, C1, C3 Concentration matrix, K Standard spectrum matrix, T1, T2, T3 Transmittance spectrum.

Claims

1. A detection device comprising: a first adsorbent that selectively co-adsorbs a first target component and a second target component in a sample gas; a first stimulation unit that applies a stimulus to the first adsorbent to cause the first target component and the second target component to desorb simultaneously or separately; a first gas detection unit that optically detects the first target component and the second target component desorbed from the first adsorbent; and a first measurement unit that measures the first target component and the second target component based on a first signal intensity at a wavelength corresponding to the first target component and a second signal intensity at a wavelength corresponding to the second target component.

2. The detection device according to claim 1, wherein the first adsorbent and the first gas detection section are integrally configured as a single gas cell.

3. The detection device according to claim 1 or 2, further comprising a first light source that irradiates light onto the first gas detection unit, the first light source including an infrared light source and an interferometer that generates interference light from the light emitted from the infrared light source, and the interference light is incident on the first gas detection unit.

4. A detection device as described in claim 1 or 2, further comprising: a first light source that irradiates light onto the first gas detection unit; and a first detector that detects the light emitted from the first gas detection unit, wherein the first light source is a light source that generates infrared light, and the detection device further comprises: a first bandpass filter that transmits the absorption wavelength of the first target component, arranged to transmit the light emitted from the first gas detection unit and incident on the first detector, and a second bandpass filter that transmits the absorption wavelength of the second target component, arranged to transmit the light emitted from the first gas detection unit and incident on the first detector, and wherein the first measurement unit measures the first target component and the second target component based on the absorption amount of the infrared light detected by the first detector.

5. The detection device according to claim 1 or 2, wherein the first adsorbent is a metal-organic framework.

6. The detection device described in claim 1 or 2, further comprising: a second adsorbent that selectively co-adsorbs the first target component and the second target component but has an adsorption efficiency for the first target component and / or the second target component that differs from that of the first adsorbent; and a second gas detection unit that optically detects the first target component and the second target component desorbed from the second adsorbent.

7. The detection device according to claim 6, further comprising: a first light source that irradiates light onto the first gas detection unit; a first detector that detects light emitted from the first gas detection unit; a second light source that irradiates light onto the second gas detection unit; and a second detector that detects light emitted from the second gas detection unit.

8. The detection device according to claim 6, further comprising: a first light source that irradiates light onto the first gas detection unit; a first detector that detects the light emitted from the first gas detection unit; an optical system that causes the light emitted from the first light source to enter the second gas detection unit, and / or an optical system that causes the light emitted from the second gas detection unit to enter the first detector.

9. The detection device described in claim 1 or 2, further comprising: a third adsorbent that adsorbs a third target component and a fourth target component that are different from the first target component and the second target component, respectively; and a third gas detection unit that optically detects the third target component and the fourth target component desorbed from the third adsorbent.

10. A detection device as described in claim 9, wherein the overlap between the first signal component corresponding to the first target component and the second signal component corresponding to the second target component is smaller than either the overlap between the first signal component and the third signal component corresponding to the third target component or the overlap between the first signal component and the fourth signal component corresponding to the fourth target component.

11. The detection device according to claim 9, further comprising: a first light source that irradiates light onto the first gas detection unit; a first detector that detects light emitted from the first gas detection unit; a third light source that irradiates light onto the third gas detection unit; and a third detector that detects light emitted from the third gas detection unit.

12. The detection device according to claim 9, further comprising: a first light source that irradiates light onto the first gas detection unit; a first detector that detects the light emitted from the first gas detection unit; an optical system that causes the light emitted from the first light source to enter the third gas detection unit, and / or an optical system that causes the light emitted from the third gas detection unit to enter the first detector.

13. A detection method comprising the steps of: introducing a sample gas into a first adsorbent that selectively co-adsorbs a first target component and a second target component in the sample gas; applying a stimulus to the first adsorbent; optically detecting the first target component and the second target component desorbed from the first adsorbent; and measuring the first target component and the second target component based on a first signal intensity at a wavelength corresponding to the first target component and a second signal intensity at a wavelength corresponding to the second target component.

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