Upper electrode device and magnetron sputtering apparatus

Abstract

Provided in the present disclosure are an upper electrode device and a magnetron sputtering apparatus. The device comprises a magnetron component, a cooling cavity, a sleeve assembly, a hollow shaft and a driving mechanism, wherein a target material assembly is fixedly provided at the bottom of the cooling cavity, and the magnetron component is disposed in the cooling cavity; the hollow shaft partially passes into the cooling cavity, a medium channel is provided inside the hollow shaft, and the medium channel is configured to convey a cooling liquid into the cooling cavity; the sleeve assembly is sleeved on the periphery of the hollow shaft and supports the hollow shaft; and one of the hollow shaft and the sleeve assembly is fixedly arranged, and the other of the hollow shaft and the sleeve assembly is connected to the magnetron component and connected to the driving mechanism, and is used for driving the magnetron component to rotate about the axis of the hollow shaft. The cooling liquid is conveyed into the cooling cavity via the medium channel. The magnetron component rotates around the hollow shaft to drive the cooling liquid to flow, such that the cooling liquid is uniformly diffused in the cooling cavity, thereby improving a flow path of the cooling liquid, and further increasing the cooling efficiency of the target material assembly. In addition, the cooling liquid can be distributed more uniformly in the cooling cavity, thereby improving the cooling uniformity of the target material assembly.

Description

Upper electrode device and magnetron sputtering equipment TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, in particular to an upper electrode device and a magnetron sputtering equipment. BACKGROUND

[0002] The magnetron sputtering technology is a kind of physical vapor deposition coating technology, which can be used for preparing metals, insulators and the like. In a semiconductor device, the magnetron sputtering applies a cathode electric field to a target material under low pressure, and the gas is ionized under the electric field to bombard the target material surface to realize sputtering of the target material surface substance to the substrate surface. In the magnetron sputtering, the magnetic field is used to constrain the charged particles to improve the density and sputtering rate of the plasma. During the process, a large amount of heat is generated by ion bombardment of the target material, and the target material needs to be cooled. With the increase of the power supply power applied to the target material, the cooling efficiency becomes particularly important.

[0003] Therefore, how to improve the cooling efficiency of the target material is a technical problem that needs to be solved by those skilled in the art. SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art, and proposes an upper electrode device and a magnetron sputtering equipment, which improves the heat dissipation efficiency of the target material assembly.

[0005] To achieve the purpose of the present application, an upper electrode device is provided, which is applied to a magnetron sputtering equipment, and includes a magnetron component, a cooling cavity, a sleeve assembly, a hollow shaft and a driving mechanism, wherein,

[0006] A target material assembly is fixedly arranged at the bottom of the cooling cavity, and the magnetron component is arranged in the cooling cavity;

[0007] The hollow shaft partially penetrates into the cooling cavity, and a medium channel is arranged in the hollow shaft, which is used for conveying cooling liquid into the cooling cavity;

[0008] The sleeve assembly is sleeved on the outer periphery of the hollow shaft and supports the hollow shaft; one of the hollow shaft and the sleeve assembly is fixedly arranged, and the other is connected with the magnetron component and connected with the driving mechanism, which is used for driving the magnetron component to rotate around the axis of the hollow shaft.

[0009] In some embodiments, the sleeve assembly is sealingly connected with the cooling cavity, and the upper electrode device further includes a first sealing assembly, which is used for realizing dynamic sealing between the sleeve assembly and the hollow shaft.

[0010] In some embodiments, the sleeve assembly comprises a barrel and a bottom cover, the barrel is sleeved on the outer periphery of the hollow shaft, the bottom cover is fixedly connected with the lower end of the barrel, the central part of the bottom cover is provided with a through hole, the hollow shaft is arranged in the through hole and supported by the bottom cover.

[0011] The first sealing assembly is arranged between the bottom cover, the barrel and the hollow shaft.

[0012] In some embodiments, the first sealing assembly comprises a first static ring and a first dynamic ring, the first static ring is sealingly connected with one of the hollow shaft and the sleeve assembly which is fixedly arranged, the first dynamic ring is sealingly connected with the other one of the hollow shaft and the sleeve assembly which is connected with the magnetic control component, and the end surface of the first dynamic ring is rotatably attached to the first static ring.

[0013] In some embodiments, the sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetic control component and the driving mechanism;

[0014] The bottom cover is provided with an annular boss around the through hole on the side close to the barrel, the outer peripheral surface of the boss is provided with a second sealing ring with the inner peripheral surface of the barrel; the inner peripheral surface of the boss and the outer peripheral surface of the hollow shaft are spaced apart, the first static ring is arranged in the space and attached to the inner peripheral surface of the boss and the upper end surface of the bottom cover; the first dynamic ring is located above the first static ring and sleeved on the outer peripheral surface of the hollow shaft; the hollow shaft is further provided with a first stepped surface, the first stepped surface abuts against the upper end surface of the first dynamic ring, and the upper end surface of the bottom cover supports the first static ring.

[0015] In some embodiments, the hollow shaft is fixedly arranged, the sleeve assembly is connected with the magnetic control component and the driving mechanism;

[0016] The bottom cover is provided with the annular boss around the through hole on the side close to the barrel, the outer peripheral surface of the boss is spaced apart from the inner peripheral surface of the barrel, the first dynamic ring is arranged in the space, and the inner peripheral surface of the first dynamic ring is attached to the outer peripheral surface of the boss; the first static ring is located above the first dynamic ring and sleeved on the hollow shaft, and the inner peripheral surface of the first static ring is attached to the outer peripheral surface of the hollow shaft, the hollow shaft is further provided with a first stepped surface, the first stepped surface abuts against the upper end surface of the first static ring, and the upper end surface of the bottom cover supports the first dynamic ring.

[0017] In some embodiments, the sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetic control component and the driving mechanism;

[0018] The driving mechanism comprises a driving part and a transmission assembly, the transmission assembly comprises a driving wheel, a transmission belt and a driven wheel, the driving wheel is connected with the driving part, the driven wheel is fixedly arranged on the outer periphery of the hollow shaft, and the transmission belt is tensioned through the driving wheel and the driven wheel.

[0019] In some embodiments, the hollow shaft is further provided with two locking nuts, the two locking nuts are threadedly connected with the hollow shaft, and the driven wheel is locked from both sides in the axial direction of the hollow shaft.

[0020] In some embodiments, the driven wheel is provided with a containing cavity on the side close to the cooling cavity, and the sleeve assembly is arranged in the containing cavity.

[0021] In some embodiments, the sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetron component, and the driving mechanism is connected;

[0022] The upper electrode device further comprises a connecting assembly, the connecting assembly comprises a rotating shield and a second sealing assembly, the rotating shield is rotatably connected with the hollow shaft, the second sealing assembly is used for realizing dynamic sealing between the rotating shield and the end of the hollow shaft away from the magnetron component, and the rotating shield is provided with a liquid inlet communicated with the medium channel.

[0023] In some embodiments, the second sealing assembly comprises a second dynamic ring and a second static ring, the second dynamic ring is arranged on the outer periphery of the hollow shaft, the inner periphery surface of the second dynamic ring is attached to the outer periphery surface of the hollow shaft, the outer periphery surface of the second static ring is attached to the inner periphery surface of the rotating shield, and the lower end surface of the second static ring is rotatably attached to the upper end surface of the second dynamic ring.

[0024] In some embodiments, the sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetron component, and the driving mechanism is connected;

[0025] The cooling cavity is provided with a mounting hole, the hollow shaft partially penetrates into the cooling cavity through the mounting hole, the outer periphery surface of the cylinder body is provided with a connecting table, the connecting table is stacked on the upper surface of the cooling cavity, and a first sealing ring is arranged between the connecting table and the cooling cavity.

[0026] In some embodiments, the hollow shaft is fixedly arranged, the sleeve assembly is connected with the magnetron component, and the driving mechanism is connected;

[0027] The upper electrode device further comprises a shaft fixing member, and the hollow shaft is fixedly connected with the cooling cavity through the shaft fixing member.

[0028] The driving mechanism comprises a driving part and a transmission assembly, the transmission assembly comprises a driving wheel and a transmission belt, the transmission belt is tensioned by the driving wheel and the cylinder, the cooling cavity is provided with a mounting hole, the lower end of the sleeve assembly is dynamically sealed with the mounting hole through a third sealing assembly, and the driving part is used for driving the sleeve assembly to rotate around the axis of the hollow shaft.

[0029] In some embodiments, the third sealing assembly comprises a third dynamic ring and a third static ring, the cooling cavity is provided with a mounting hole, the cylinder part is located in the mounting hole, the third static ring is located in the mounting hole, and the outer circumferential surface of the third static ring is attached to the hole wall of the mounting hole; the third dynamic ring is located above the third static ring in the mounting hole and is sleeved on the outer circumferential surface of the part of the cylinder located in the mounting hole, the inner circumferential surface of the third dynamic ring is attached to the outer circumferential surface of the cylinder; and the upper end surface of the third static ring is rotatably attached to the lower end surface of the third dynamic ring.

[0030] As another technical solution, the application further provides a magnetron sputtering device comprising a process chamber and the upper electrode device.

[0031] The application has the following beneficial effects:

[0032] The upper electrode device provided by the application can drive the cooling liquid in the cooling cavity to flow away from the hollow shaft, so that the cooling liquid is uniformly diffused in the cooling cavity, the flow speed of the cooling liquid can be improved, and the cooling efficiency of the target assembly is improved. In addition, the cooling liquid can be more uniformly distributed in the cooling cavity, and the uniformity of the cooling of the target assembly is improved.

[0033] The application further provides a magnetron sputtering device comprising the upper electrode device and has the above advantages. BRIEF DESCRIPTION OF DRAWINGS

[0034] Fig. 1 is a structural schematic view of the upper electrode device provided by one specific embodiment of the application;

[0035] Fig. 2 is a structural schematic view of the cooperation of the connecting assembly, the hollow shaft and the sleeve assembly in Fig. 1;

[0036] Fig. 3 is a structural schematic view of the upper electrode device provided by another specific embodiment of the application;

[0037] Fig. 4 is a structural schematic view of the cooperation of the hollow shaft and the sleeve assembly in Fig. 3.

[0038] In the figures 1-4, the reference signs are: 100, cooling cavity; 110, upper electrode shield; 120, upper electrode cover plate; 120a, mounting hole; 130, liquid outlet; 140, target assembly; 210, hollow shaft; 211, shaft fixing part; 220, sleeve assembly; 221, barrel; 221a, connecting table; 221b, positioning part; 222, bottom cover; 222a, boss; 223, second sealing ring; 224, sleeve bearing; 225, shaft sleeve; 226, gland; 228, first sealing ring; 230, first sealing assembly; 231, first static ring; 232, first dynamic ring; 240, driving motor; 241, motor fixing part; 251, synchronous belt; 252, driving wheel; 253, driven wheel; 254, locking nut; 260, connecting assembly; 261, rotating shield; 262, second static ring; 263, second dynamic ring; 264, shield bearing; 265, check ring; 266, liquid inlet; 270, third sealing assembly; 271, third static ring; 272, third dynamic ring; 280, liquid delivery pipe; 300, magnetron component. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the technical solutions of the present application, the upper electrode device and the magnetron sputtering equipment provided by the present application are described in detail below in combination with the drawings.

[0040] In the related art, the liquid inlet and the liquid outlet of the upper electrode are both arranged on the upper electrode cover plate, and the cooling liquid flows from the liquid inlet to the liquid outlet after entering the cooling cavity. The cooling liquid often flows along the upper electrode cover plate, and the flow path is relatively short and the resistance is relatively small, so the cooling liquid flow is relatively large, forming a short circuit flow. The short circuit flow reduces the cooling liquid that contacts the target assembly, affecting the cooling efficiency of the target assembly.

[0041] The upper electrode device provided by the present application is applied to a semiconductor process equipment. As shown in FIG. 1 or FIG. 3, the upper electrode device comprises a magnetron component 300, a cooling cavity 100, a sleeve assembly 220, a hollow shaft 210, and a driving mechanism. The bottom of the cooling cavity 100 is provided with a target assembly 140, for example, fixedly connected with the cooling cavity 100. The magnetron component 300 is arranged in the cooling cavity 100; the hollow shaft 210 partially penetrates into the cooling cavity 100, and the hollow shaft 210 is internally provided with a medium channel for delivering cooling liquid into the cooling cavity 100.

[0042] In some embodiments, the cooling cavity 100 comprises a cylindrical upper electrode shield 110 and an upper electrode cover plate 120, the upper electrode cover plate 120 is sealingly connected to the upper end of the upper electrode shield 110, and the target assembly 140 is sealingly connected to the lower end of the upper electrode shield 110. The lower end of the hollow shaft 210 passes through the central hole of the upper electrode cover plate 120 into the interior of the cooling cavity 100, and the cooling cavity 100 is further provided with a liquid outlet 130. The cooling liquid can be transported into the cooling cavity 100 by the hollow shaft 210 and flow out of the liquid outlet 130. The medium contacts the target assembly 140 during the flow process, thereby reducing the temperature of the target assembly 140.

[0043] The sleeve assembly 220 is sleeved on the outer periphery of the hollow shaft 210 for supporting the hollow shaft 210. One of the hollow shaft 210 and the sleeve assembly 220 is fixedly arranged, and the other is connected to the magnetron component 300 and connected to a driving mechanism for driving the magnetron component 300 to rotate around the axis of the hollow shaft 210.

[0044] The hollow shaft 210 is fixedly arranged, the sleeve assembly 220 rotates around the axis of the hollow shaft 210, and the magnetron component 300 is connected to the sleeve assembly 220. Alternatively, the sleeve assembly 220 is fixedly arranged, the hollow shaft 210 rotates around its axis, and the magnetron component 300 is connected to the hollow shaft 210. In both embodiments, the cooling liquid is transported into the cooling cavity 100 by the hollow shaft 210, and the magnetron component 300 can drive the cooling liquid in the cooling cavity 100 to rotate during the rotation of the magnetron component 300 around the axis of the hollow shaft 210. The cooling liquid flows away from the hollow shaft 210 under the action of centrifugal force, thereby playing a role in diffusing the cooling liquid.

[0045] In this embodiment, the hollow shaft 210 penetrates into the interior of the cooling cavity 100, and the hollow shaft 210 is usually close to or located at the center of the cooling cavity 100. The lower end of the hollow shaft 210 is close to the target assembly 140, and the cooling liquid can directly contact the target assembly 140 after flowing downward from the hollow shaft 210 into the cooling cavity 100, thereby improving the heat dissipation efficiency of the target assembly 140. In addition, the magnetron component 300 is driven to rotate by the hollow shaft 210 or the sleeve assembly 220, and pushes the cooling liquid flowing out of the hollow shaft 210 to flow in various directions in the cooling cavity 100. The rotation of the magnetron component 300 not only increases the relative speed between the cooling liquid and the target assembly 140, thereby improving the heat exchange efficiency of the target assembly 140, but also makes the flow speed of the cooling liquid in various directions in the cooling cavity 100 approximately equal, thereby making the distribution of the cooling liquid in the cooling cavity 100 more uniform, and further improving the uniformity of the temperature of the target assembly 140.

[0046] In some embodiments, the sleeve assembly 220 is sealingly connected with the cooling cavity 100, and the upper electrode device further comprises a first sealing assembly 230 for achieving dynamic sealing between the sleeve assembly 220 and the hollow shaft 210.

[0047] Further, in some embodiments, as shown in FIG. 1, the liquid outlet 130 is arranged on the upper electrode cover plate 120, and the cooling liquid needs to be in a positive pressure state to be discharged from the liquid outlet 130. Thus, to avoid leakage of the cooling liquid from the installation position of the sleeve assembly 220, the sleeve assembly 220 and the cooling cavity 100 are sealingly connected. Moreover, to avoid the cooling liquid entering between the sleeve assembly 220 and the hollow shaft 210, the two are dynamically sealed by the first sealing assembly 230. Since there is relative movement between the sleeve assembly 220 and the hollow shaft 210, the first sealing assembly 230 can refer to dynamic sealing structures, such as dynamic static ring sealing, labyrinth sealing, etc. In embodiments in which the sleeve assembly 220 is fixedly arranged, for example, fixedly connected with the cooling cavity 100, the sleeve assembly 220 and the cooling cavity 100 can be sealed by a sealing ring or the like structure, for example, in the specific embodiment shown in FIG. 1, the sleeve assembly 220 and the cooling cavity 100 are sealingly connected by the first sealing ring 228. In embodiments in which the sleeve assembly 220 is connected with the driving mechanism, the sleeve assembly 220 is used to drive the magnetic control component 300 to rotate under the driving of the driving mechanism, and the sleeve assembly 220 and the cooling cavity 100 also need to be sealed by a dynamic sealing structure.

[0048] In some embodiments, as shown in FIGS. 2 and 4, the sleeve assembly 220 comprises a cylinder body 221 and a bottom cover 222, the cylinder body 221 is sleeved on the outer periphery of the hollow shaft 210, the bottom cover 222 is fixedly connected with the lower end of the cylinder body 221, the bottom cover 222 is provided with a through hole, the hollow shaft 210 is arranged in the through hole and supported by the bottom cover 222; the first sealing assembly 230 is arranged between the bottom cover 222, the cylinder body 221 and the hollow shaft 210, and is used to ensure that the cylinder body 221 and the hollow shaft 210 can relatively move while sealing the through hole.

[0049] As shown in FIGS. 2 and 4, the cylinder body 221 is sleeved on the outer periphery of the hollow shaft 210 and relatively rotates with the hollow shaft 210 through the sleeve bearing 224. In some embodiments, the number of sleeve bearings 224 can be two and distributed along the axial direction of the cylinder body 221. The inner ring of the sleeve bearing 224 is fixedly connected with the hollow shaft 210, and the outer ring of the sleeve bearing 224 is fixedly connected with the cylinder body 221. The sleeve bearing 224 can reduce the frictional resistance when the cylinder body 221 and the hollow shaft 210 relatively move.

[0050] Further, in some embodiments, the sleeve assembly 220 further comprises a shaft sleeve 225, which is sleeved on the outer periphery of the hollow shaft 210 and located between the two sleeve bearings 224. The two ends of the shaft sleeve 225 abut the inner rings of the two sleeve bearings 224 respectively, and function as limiting parts. The inner periphery of the sleeve body 221 is provided with a supporting surface for abutting the end surface of the outer ring of the sleeve bearing 224 located below the shaft sleeve 225, so as to position the sleeve bearing 224 in the axial direction. The sleeve assembly 220 further comprises a gland 226, which is installed on the upper end of the sleeve body 221 and abuts the end surface of the outer ring of the sleeve bearing 224. The gland 226 and the supporting surface cooperate to position the sleeve bearing 224 in the axial direction, and the shaft sleeve 225 is located between the two sleeve bearings 224 to limit the distance between the two sleeve bearings 224. Of course, the sleeve assembly 220 can also adopt other structures to position the sleeve bearing 224, which is not limited herein.

[0051] The bottom cover 222 can be fixedly connected with the lower end of the sleeve body 221 by welding, bolting or the like, and the hollow shaft 210 is arranged in the through hole of the bottom cover 222 and supported by the bottom cover 222. The first sealing assembly 230 is arranged around the hollow shaft 210, and can be attached to the outer wall of the hollow shaft 210, with a gap between the first sealing assembly 230 and the inner wall of the sleeve body 221, and dynamic sealing between the first sealing assembly 230 and the bottom cover 222, so as to ensure that the sleeve body 221 and the hollow shaft 210 can move relative to each other, while sealing the through hole. In addition, the bottom cover 226 provides support for the hollow shaft 210 through the first sealing assembly 230.

[0052] In some embodiments, the first sealing assembly 230 comprises a first static ring 231 and a first dynamic ring 232, the first static ring 231 being sealingly connected with one of the hollow shaft 210 and the sleeve assembly 220 fixedly arranged (for example, fixedly connected with the cooling cavity 100), and the first dynamic ring 232 being sealingly connected with the other of the hollow shaft 210 and the sleeve assembly 220 connected with the magnetic control component 300, the end surface of the first dynamic ring 232 being rotatably attached to the first static ring 231, so as to achieve dynamic sealing.

[0053] Embodiment one

[0054] In the embodiment where the sleeve assembly 220 is fixedly arranged, for example, fixedly connected with the cooling cavity 100, as shown in FIGS. 1 and 2, the bottom cover 222 has an annular boss 222a arranged around the through hole on the side close to the barrel 221, and the outer circumferential surface of the boss 222a is provided with a second sealing ring 223, which is compressed when the boss 222a is installed in the barrel 221. The second sealing ring 223 can prevent the cooling liquid from entering the inside of the barrel 221 through the gap between the barrel 221 and the bottom cover 222, thereby improving the sealing performance of the sleeve assembly 220. The inner circumferential surface of the boss 222a is spaced apart from the outer circumferential surface of the hollow shaft 210, and the first static ring 231 is arranged in the space and tightly abuts against the inner circumferential surface of the boss 222a and the upper end surface of the bottom cover 222. The first static ring 231 is rotatable relative to the hollow shaft 210. The first dynamic ring 232 is located above the first static ring 231 and is sleeved on the outer circumferential surface of the hollow shaft 210. The hollow shaft 210 can also be provided with a first step surface for limiting the first dynamic ring 232 in the axial direction of the hollow shaft 210. The first step surface abuts against the upper end surface of the first dynamic ring 232, and the upper end surface of the bottom cover 222 supports the first static ring 231, so that the lower end surface of the first dynamic ring 232 and the upper end surface of the first static ring 231 can be rotatably and tightly abutted and sealed. When the hollow shaft 210 rotates, the first static ring 231 tightly abuts against the inner circumferential surface of the boss 222a and the upper end surface of the bottom cover 222, and the first static ring 231 is fixed relative to the hollow shaft 210; the first dynamic ring 232 tightly abuts against the outer circumferential surface of the hollow shaft 210 and the first step surface, and rotates synchronously with the hollow shaft 210; the lower end surface of the first dynamic ring 232 and the upper end surface of the first static ring 231 can be rotatably and tightly abutted and sealed, so as to block the channel of the cooling liquid into the inside of the barrel 221 and realize the sealing between the sleeve assembly 220 and the hollow shaft 210, while ensuring that the barrel 221 and the hollow shaft 210 can move relative to each other.

[0055] In some embodiments, as shown in FIG. 1, the driving mechanism includes a driving part and a transmission assembly, the transmission assembly includes a driving wheel 252, a transmission belt and a driven wheel 253, the driving wheel 252 is connected with the driving part, the driven wheel 253 is fixedly arranged on the outer circumferential surface of the hollow shaft 210, and the transmission belt is tensioned through the driving wheel 252 and the driven wheel 253.

[0056] In this embodiment, the drive unit is connected to the hollow shaft 210 via a transmission assembly to drive the hollow shaft 210 to rotate. The sleeve assembly 220 is fixedly connected to the cooling chamber 100, and the hollow shaft 210 is rotatably connected to the sleeve assembly 220, so that the hollow shaft 210 can be installed in the cooling chamber 100 through the sleeve assembly 220. In addition, the hollow shaft 210 passes through the cooling chamber 100 and is connected to the magnetic control component 300 inside the cooling chamber 100, thereby driving the magnetic control component 300 to rotate. The lower end of the hollow shaft 210 is located inside the cooling chamber 100, and the coolant flows out from the lower end of the hollow shaft 210, thus reducing the inlet height of the coolant. The low-temperature coolant will flow downwards, thereby contacting the target assembly 140 more quickly.

[0057] In some embodiments, the drive unit is a drive motor 240, which is fixed to the upper electrode cover plate 120 by a motor fixing member 241. The driving pulley 252 and the driven pulley 253 are at approximately the same height, and are inserted into a transmission belt and tensioned to achieve transmission between them. To improve the synchronization rate between the drive motor 240 and the hollow shaft 210, the transmission belt can be a synchronous belt 251, and the driving pulley 252 and the driven pulley 253 can be synchronous pulleys. Of course, ordinary belts and pulleys can also be used for the transmission assembly, which is not limited here.

[0058] In some embodiments, the driven wheel 253 is provided with a receiving cavity on the side near the cooling cavity 100, and the sleeve assembly 220 is partially disposed in the receiving cavity.

[0059] As shown in Figure 2, in this embodiment, the driven wheel 253 is provided with a cavity for accommodating the sleeve assembly 220. Therefore, the driven wheel 253 and the sleeve assembly 220 can partially overlap in the axial direction, thereby reducing the space occupied by the driven wheel 253 and the sleeve assembly 220 and making the upper electrode device structure more compact.

[0060] In some embodiments, as shown in FIG2, the hollow shaft 210 is further provided with two locking nuts 254 on its outer periphery. The two locking nuts 254 fix the driven wheel 253 from both sides of the hollow shaft 210 along its axial direction. For example, the two locking nuts 254 are respectively locked to the upper end face of the driven wheel 253 and the inner surface of the receiving cavity opposite to it. Specifically, the lower side of the receiving cavity of the driven wheel 253 has an opening, and the cavity wall of the driven wheel 253 constituting the receiving cavity and opposite to the opening is provided with a through hole. The hollow shaft 210 passes through the through hole and is inserted into the driven wheel 253. The two locking nuts 254 are threadedly connected to the hollow shaft 210 and are respectively locked to the upper and lower surfaces of the cavity wall, thereby fixing the driven wheel 253 to the hollow shaft 210. Of course, the driven wheel 253 can also be fixedly connected to the hollow shaft 210 in other ways, which are not limited here.

[0061] In some embodiments, as shown in FIG. 1, the cooling cavity 100 is provided with a mounting hole 120a through which the hollow shaft 210 is partially inserted into the cooling cavity 100, and the outer circumferential surface of the cylinder 221 is provided with a connecting platform 221a which is stacked on the upper surface of the cooling cavity 100, and a first sealing ring 228 is arranged between the connecting platform 221a and the upper surface of the cooling cavity 100 to seal the mounting hole 120a. Further, in some embodiments, the lower end of the cylinder 221 is provided with an annular positioning portion 221b which is nested in the mounting hole 120a, and the positioning portion 221b surrounds the hollow shaft 210, and the outer circumferential surface of the positioning portion 221b is limitedly fitted with the hole wall of the mounting hole 120a.

[0062] Specifically, the positioning portion 221b of the cylinder 221 is inserted into the mounting hole 120a, and the two are connected by interference fit, threaded connection or the like. The connecting platform 221a is attached to the upper surface of the upper electrode cover plate 120, the first sealing ring 228 is arranged between the connecting platform 221a and the upper electrode cover plate 120, and the mounting hole 120a is located on the inner side of the first sealing ring 228. The connecting platform 221a and the upper electrode cover plate 120 press the first sealing ring 228 tightly, which improves the sealing between the cylinder 221 and the cooling cavity 100, and prevents the cooling liquid from leaking between the cylinder 221 and the cooling cavity 100.

[0063] In some embodiments, as shown in FIG. 1, the upper electrode device further comprises a connecting assembly 260, which comprises a rotating shield 261 and a second sealing assembly. The rotating shield 261 is rotatably connected with the hollow shaft 210, and the second sealing assembly is used to realize dynamic sealing between the rotating shield 261 and the end of the hollow shaft 210 away from the magnetron component 300. The rotating shield 261 is provided with a liquid inlet 266 which communicates with the medium channel.

[0064] The hollow shaft 210 is rotated under the driving of the driving motor 240, and the hollow shaft 210 needs to be connected with the infusion tube 280. The rotating shield 261 is provided with the liquid inlet 266 which can be connected with the infusion tube 280, and the upper end of the hollow shaft 210 is inserted into the rotating shield 261 and rotatably connected with the rotating shield 261. The cooling liquid enters the rotating shield 261 from the liquid inlet 266 and then enters the medium channel of the hollow shaft 210 from the rotating shield 261. The second sealing assembly is arranged between the rotating shield 261 and the hollow shaft 210 to realize dynamic sealing between the rotating shield 261 and the hollow shaft 210, thereby preventing the cooling liquid from leaking.

[0065] In some embodiments, as shown in FIG. 2, the connecting assembly 260 further comprises shield bearings 264, which are located between the hollow shaft 210 and the rotating shield 261 and on the side of the second sealing assembly away from the liquid inlet 266. In the specific implementation shown in FIGS. 1 and 2, the number of shield bearings 264 can be two and distributed along the axial direction of the hollow shaft 210. Of course, the number of shield bearings 264 is not limited thereto. The inner ring of the shield bearing 264 is fixedly connected with the outer circumferential surface of the hollow shaft 210, and the outer ring of the shield bearing 264 is fixedly connected with the inner circumferential surface of the rotating shield 261. The shield bearing 264 can support the hollow shaft 210 and reduce the friction between the hollow shaft 210 and the rotating shield 261. The connecting assembly 260 further comprises two retainer rings 265, which are respectively an upper retainer ring and a lower retainer ring. The upper retainer ring is connected with the hollow shaft 210, and the outer circumferential surface of the hollow shaft 210 is further provided with a shaft shoulder for supporting the inner ring of the shield bearing 264. The inner rings of the two shield bearings 264 are located between the shaft shoulder and the upper retainer ring, and the upper retainer ring and the shaft shoulder are used for positioning the shield bearings 264. The inner circumferential surface of the rotating shield 261 is provided with a limiting step, and the lower retainer ring is connected with the rotating shield 261 and arranged below the limiting step. The two shield bearings 264 are located between the limiting step and the lower retainer ring, and the lower retainer ring and the limiting step are used for positioning the shield bearings 264. Of course, the shield bearings 264 can also be positioned in other ways, which are not limited herein.

[0066] In some embodiments, the second sealing assembly comprises a second dynamic ring 263 and a second static ring 262. The second dynamic ring 263 is arranged on the outer circumference of the hollow shaft 210, and the inner circumferential surface of the second dynamic ring 263 is in contact with the outer circumferential surface of the hollow shaft 210. The outer circumferential surface of the second static ring 262 is in contact with the inner circumferential surface of the rotating shield 261, and the lower end surface of the second static ring 262 is rotatably in contact with the upper end surface of the second dynamic ring 263. The hollow shaft 210 can be inserted into the second static ring 262, for example.

[0067] As shown in FIG. 2, the second sealing assembly adopts a dynamic and static ring seal. The inside of the rotating shield 261 has an annular mounting groove, the groove bottom of which faces downward, and the second static ring 262 is arranged in the mounting groove and tightly fits the side surface and groove bottom of the mounting groove. The groove bottom of the mounting groove can limit the second static ring 262 in the axial direction. The second dynamic ring 263 is sleeved on the outer circumferential surface of the hollow shaft 210 and tightly fits the same; the hollow shaft 210 can further be provided with a second step surface for limiting the second dynamic ring 263 in the axial direction, and the second dynamic ring 263 is arranged on the second step surface. The second static ring 262 is located above the second dynamic ring 263, the groove bottom of the mounting groove of the rotating shield 261 abuts against the upper end surface of the second static ring 262, and the lower end surface of the second static ring 262 and the upper end surface of the second dynamic ring 263 can relatively rotate and tightly fit. When the hollow shaft 210 rotates, the second static ring 262 tightly fits the side surface and groove bottom of the mounting groove, the second dynamic ring 263 tightly fits the outer circumferential surface and second step surface of the hollow shaft 210, and the lower end surface of the second static ring 262 and the upper end surface of the second dynamic ring 263 can relatively rotate and tightly fit, thereby blocking the flow channel of the cooling liquid between the rotating shield 261 and the hollow shaft 210, and realizing the sealing between the connecting assembly 260 and the hollow shaft 210.

[0068] Example Two

[0069] In the embodiment that the hollow shaft 210 is fixedly arranged, for example, fixedly connected with the cooling cavity 100, as shown in FIG. 3 and FIG. 4, the bottom cover 222 has an annular boss 222a arranged around the through hole on the side close to the barrel 221, the outer circumferential surface of the boss 222a is arranged in a spaced manner with the inner circumferential surface of the barrel 221, and the inner circumferential surface of the boss 222a is arranged in a spaced manner with the outer circumferential surface of the hollow shaft 210. The first dynamic ring 232 is arranged in the space between the outer circumferential surface of the boss 222a and the inner circumferential surface of the barrel 221, and the inner circumferential surface of the first dynamic ring 232 is tightly attached to the outer circumferential surface of the boss 222a. The first static ring 231 is located above the first dynamic ring 232, is sleeved on the hollow shaft 210, and the inner circumferential surface of the first static ring 231 is tightly attached to the outer circumferential surface of the hollow shaft 210, and the outer circumferential surface of the first static ring 231 is arranged in a spaced manner with the inner circumferential surface of the barrel 221. The hollow shaft 210 can also be provided with a first step surface for limiting the first static ring 231 in the axial direction of the hollow shaft 210. After the assembly of the hollow shaft 210 and the sleeve assembly 220 is completed, the first step surface abuts against the upper end surface of the first static ring 231, the upper end surface of the bottom cover 222 supports the first dynamic ring 232, and the lower end surface of the first static ring 231 and the upper end surface of the first dynamic ring 232 are relatively rotatable and tightly attached. When the sleeve assembly 220 rotates, the first dynamic ring 232 is tightly attached to the upper end surface of the bottom cover 222 and the outer circumferential surface of the boss 222a, and the first dynamic ring 232 rotates synchronously with the sleeve assembly 220; the first static ring 231 is tightly attached to the outer circumferential surface of the hollow shaft 210 and the first step surface, and is fixed relative to the sleeve assembly 220; the lower end surface of the first dynamic ring 232 and the upper end surface of the first static ring 231 are relatively rotatable and tightly attached, so that the passage of the cooling liquid into the inside of the barrel 221 is blocked on the basis of ensuring that the barrel 221 and the hollow shaft 210 can move relative to each other, and the sealing between the sleeve assembly 220 and the hollow shaft 210 is realized.

[0070] In some embodiments, as shown in FIG. 3, a shaft fixing member 211 is further included, and the hollow shaft 210 is fixedly connected with the cooling cavity 100 through the shaft fixing member 211. The driving part is used to drive the sleeve assembly 220 to rotate around the axis of the hollow shaft 210, and the magnetic control component 300 is fixedly connected with the sleeve assembly 220; the driving mechanism includes the driving part and a transmission assembly, the transmission assembly includes a driving wheel 252 and a transmission belt, the transmission belt is tensioned through the driving wheel 252 and the barrel 221, the cooling cavity 100 is provided with a mounting hole 120a, and the lower end of the sleeve assembly 220 is dynamically sealed with the mounting hole 120a through a third sealing assembly 270.

[0071] Specifically, as shown in FIG. 3, the shaft fixing member 211 is fixedly connected with the upper electrode cover plate 120, the shaft fixing member 211 is provided with a through hole, and the hollow shaft 210 penetrates through and is fixed in the through hole. The sleeve assembly 220 is sleeved on the outer periphery of the hollow shaft 210 and rotates under the driving of the driving assembly. The lower end of the hollow shaft 210 penetrates into the cooling cavity 100, as shown in FIG. 3, the lower end of the hollow shaft 210 extends to the inside of the cooling cavity 100, the cooling liquid flows out from the lower end of the hollow shaft 210, thereby reducing the liquid inlet height of the cooling liquid, the low-temperature cooling liquid flows downward, thereby more quickly contacting the target material assembly 140, and the heat dissipation efficiency of the target material is improved.

[0072] In some embodiments, the driving part is a driving motor 240, the driving motor 240 is fixed on the upper electrode cover plate 120 through a motor fixing member 241. The outer peripheral surface of the barrel 221 is provided with a transmission structure, a driving wheel 252 and the transmission structure are at substantially the same height, the driving wheel 252 and the barrel 221 penetrate into and tension a transmission belt, and transmission between the driving wheel 252 and the barrel 221 is achieved. In order to improve the synchronization rate between the driving motor 240 and the hollow shaft 210, the transmission belt can be a synchronous belt 251, the driving wheel 252 can be a synchronous wheel, and the transmission structure can be a transmission tooth. Of course, the transmission assembly can also adopt a common belt and pulley, and the transmission structure can be a transmission surface or a transmission groove, which is not limited here.

[0073] As shown in FIG. 4, the transmission structure is arranged on the outer peripheral surface of the barrel 221, and by arranging the transmission structure on the barrel 221, the barrel 221 can be used as a driven wheel, so that a driven wheel does not need to be additionally arranged, and the structure of the upper electrode device is more compact.

[0074] In some embodiments, as shown in FIG. 4, the third sealing assembly 270 includes a third movable ring 272 and a third stationary ring 271, the cooling cavity 100 is provided with a mounting hole 120a, the barrel 221 is partially located in the mounting hole 120a, the third stationary ring 271 is located in the mounting hole 120a, and the outer peripheral surface of the third stationary ring 271 is attached to the hole wall of the mounting hole 120a; the third movable ring 272 is located above the third stationary ring 271 in the mounting hole 120a and is sleeved on the outer periphery of the part of the barrel 221 located in the mounting hole 120a, the inner peripheral surface of the third movable ring 272 is attached to the outer peripheral surface of the barrel 221, and the upper end surface of the third stationary ring 271 is relatively rotatably attached to the lower end surface of the third movable ring 272.

[0075] As shown in FIG. 3 and FIG. 4, the third sealing assembly 270 also adopts a dynamic and static ring seal. The mounting hole 120a is provided with a first hole section, a second hole section and a third hole section from top to bottom, the diameters of the three hole sections are successively reduced, the diameters of the first two hole sections are greater than or equal to the diameter of the third static ring 271, the diameter of the third hole section at the lowermost end is less than the diameter of the third static ring 271, the third static ring 271 can be installed in the second hole section and tightly abuts the inner wall of the second hole section, and the upper end surface of the third hole section can limit the third static ring 271 in the axial direction. The outer circumferential surface of the cylinder body 221 is provided with a downward third stepped surface, and the third dynamic ring 272 is sleeved on the outer circumference of the cylinder body 221 and tightly abuts the outer circumferential surface and the third stepped surface of the cylinder body 221. After the sleeve assembly 220 and the cooling cavity 100 are assembled, the third static ring 271 is located below the third dynamic ring 272, the third stepped surface abuts the upper end surface of the third dynamic ring 272, and the third hole section supports the third static ring 271, so that the lower end surface of the third dynamic ring 272 and the upper end surface of the third static ring 271 can be abutted in relative rotation. When the sleeve assembly 220 rotates, the third dynamic ring 272 abuts the inner circumferential surface of the second hole section and the upper end surface of the third hole section of the mounting hole 120a, the third static ring 271 abuts the outer circumferential surface and the third stepped surface of the cylinder body 221, and the lower end surface of the third dynamic ring 272 and the upper end surface of the third static ring 271 can be abutted in relative rotation, thereby blocking the passage of the cooling liquid flowing out between the cylinder body 221 and the mounting hole, and realizing the sealing between the sleeve assembly 220 and the cooling cavity 100.

[0076] The application also provides a magnetron sputtering device comprising a process chamber and the upper electrode device in any one of the above embodiments. The structure of other parts of the magnetron sputtering device can refer to the prior art, which will not be described here.

[0077] It can be understood that the above embodiments are only exemplary embodiments adopted to illustrate the principles of the application, but the application is not limited thereto. Various modifications and improvements can be made by those of ordinary skill in the art without departing from the spirit and essence of the application, and these modifications and improvements are also considered within the protection scope of the application.

Claims

1. A top electrode device applied to a magnetron sputtering apparatus, characterized in that, The magnetron assembly, the cooling cavity, the sleeve assembly, the hollow shaft and the driving mechanism are arranged in sequence. The bottom of the cooling cavity is provided with a target assembly, and the magnetron assembly is arranged in the cooling cavity. The hollow shaft is partially inserted into the cooling cavity, and a medium channel is arranged in the hollow shaft to supply cooling liquid into the cooling cavity. The sleeve assembly is arranged around the outer periphery of the hollow shaft and supports the hollow shaft.

2. The upper electrode device according to claim 1, characterized by The sleeve assembly is sealingly connected with the cooling cavity, and the upper electrode device further comprises a first sealing assembly for realizing dynamic sealing between the sleeve assembly and the hollow shaft.

3. The upper electrode arrangement of claim 2, wherein The sleeve assembly comprises a cylinder and a bottom cover, the cylinder is arranged around the outer periphery of the hollow shaft, the bottom cover is fixedly connected with the lower end of the cylinder, the bottom cover is provided with a through hole, the hollow shaft is arranged in the through hole and supported by the bottom cover. The first sealing assembly is arranged between the bottom cover, the cylinder and the hollow shaft.

4. The upper electrode arrangement of claim 3, wherein The first sealing assembly comprises a first static ring and a first dynamic ring, the first static ring is sealingly connected with one of the hollow shaft and the sleeve assembly which is fixedly arranged, the first dynamic ring is sealingly connected with the other one of the hollow shaft and the sleeve assembly which is connected with the magnetron assembly, and the first dynamic ring is sealingly connected with the end surface of the first static ring.

5. The upper electrode arrangement of claim 4, wherein The sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetron assembly and connected with the driving mechanism. The bottom cover is provided with an annular boss around the through hole on the side close to the cylinder, the outer peripheral surface of the boss is provided with a second sealing ring with the inner peripheral surface of the cylinder, the inner peripheral surface of the boss and the outer peripheral surface of the hollow shaft are spaced apart, the first static ring is arranged in the space and abuts against the inner peripheral surface of the boss and the upper end surface of the bottom cover, the first dynamic ring is located above the first static ring and arranged around the outer peripheral surface of the hollow shaft, the hollow shaft is further provided with a first stepped surface which abuts against the upper end surface of the first dynamic ring, and the upper end surface of the bottom cover supports the first static ring.

6. The upper electrode device of claim 4, wherein The sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetron assembly and connected with the driving mechanism. The bottom cover is provided with an annular boss around the through hole on the side close to the cylinder, the outer peripheral surface of the boss is provided with a second sealing ring with the inner peripheral surface of the cylinder, the inner peripheral surface of the boss and the outer peripheral surface of the hollow shaft are spaced apart, the first dynamic ring is arranged in the space and abuts against the inner peripheral surface of the boss and the upper end surface of the bottom cover, the first dynamic ring is located above the first static ring and arranged around the outer peripheral surface of the hollow shaft, the hollow shaft is further provided with a first stepped surface which abuts against the upper end surface of the first dynamic ring, and the upper end surface of the bottom cover supports the first static ring.

7. The upper electrode device of claim 1, wherein The sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetron assembly and connected with the driving mechanism. The bottom cover is provided with an annular boss around the through hole on the side close to the cylinder, the outer peripheral surface of the boss is provided with a second sealing ring with the inner peripheral surface of the cylinder, the inner peripheral surface of the boss and the outer peripheral surface of the hollow shaft are spaced apart, the first dynamic ring is arranged in the space and abuts against the inner peripheral surface of the boss and the upper end surface of the bottom cover, the first dynamic ring is located above the first static ring and arranged around the outer peripheral surface of the hollow shaft, the hollow shaft is further provided with a first stepped surface which abuts against the upper end surface of the first dynamic ring, and the upper end surface of the bottom cover supports the first static ring. The driving mechanism comprises a driving part and a transmission assembly, the transmission assembly comprises a driving wheel, a transmission belt and a driven wheel, the driving wheel is connected with the driving part, the driven wheel is fixedly arranged on the outer periphery of the hollow shaft, and the transmission belt is tensioned through the driving wheel and the driven wheel.

8. The upper electrode arrangement of claim 7, wherein The outer periphery of the hollow shaft is further provided with two locking nuts, the two locking nuts are threadedly connected with the hollow shaft, and the driven wheel is locked from both sides in the axial direction of the hollow shaft.

9. The upper electrode device of claim 7, wherein, The driven wheel is provided with a containing cavity on the side close to the cooling cavity, and the sleeve assembly is arranged in the containing cavity.

10. The upper electrode device of claim 1, wherein, The sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetically controllable part, and the driving mechanism is connected. The upper electrode device further comprises a connecting assembly, the connecting assembly comprises a rotating shield and a second sealing assembly, the rotating shield is rotatably connected with the hollow shaft, the second sealing assembly is used for realizing dynamic sealing between the rotating shield and the end of the hollow shaft away from the magnetically controllable part, and the rotating shield is provided with a liquid inlet in communication with the medium channel.

11. The upper electrode arrangement of claim 10, wherein The second sealing assembly comprises a second dynamic ring and a second static ring, the second dynamic ring is arranged on the outer periphery of the hollow shaft, the inner periphery surface of the second dynamic ring is attached to the outer periphery surface of the hollow shaft, the outer periphery surface of the second static ring is attached to the inner periphery surface of the rotating shield, and the lower end surface of the second static ring is rotatably attached to the upper end surface of the second dynamic ring.

12. The upper electrode device of claim 3, wherein, The sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetically controllable part, and the driving mechanism is connected. The cooling cavity is provided with a mounting hole, the hollow shaft partially penetrates into the cooling cavity through the mounting hole, the outer periphery surface of the cylinder body is provided with a connecting table, the connecting table is stacked on the upper surface of the cooling cavity, and a first sealing ring is arranged between the connecting table and the cooling cavity.

13. The upper electrode arrangement of claim 3, wherein The sleeve assembly is fixedly arranged, the hollow shaft is connected with the magnetically controllable part, and the driving mechanism is connected. The upper electrode device further comprises a shaft fixing member, the hollow shaft is fixedly connected with the cooling cavity through the shaft fixing member. The driving mechanism comprises a driving part and a transmission assembly, the transmission assembly comprises a driving wheel and a transmission belt, the transmission belt is tensioned through the driving wheel and the cylinder body, the cooling cavity is provided with a mounting hole, the lower end of the sleeve assembly is dynamically sealed with the mounting hole through a third sealing assembly, and the driving part is used for driving the sleeve assembly to rotate around the axis of the hollow shaft.

14. The upper electrode arrangement of claim 13, wherein The third sealing assembly comprises a third dynamic ring and a third static ring, the cooling cavity is provided with a mounting hole, the cylinder body is partially located in the mounting hole, the third static ring is located in the mounting hole, and the outer periphery surface of the third static ring is attached to the hole wall of the mounting hole; the third dynamic ring is located above the third static ring in the mounting hole and is sleeved on the outer periphery of the part of the cylinder body located in the mounting hole, the inner periphery surface of the third dynamic ring is attached to the outer periphery surface of the cylinder body; and the upper end surface of the third static ring is rotatably attached to the lower end surface of the third dynamic ring.

15. A magnetron sputtering apparatus, characterized by, The upper electrode device comprises a process cavity and the upper electrode device according to any one of claims 1 to 14.

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