Adjusting device, use of such an adjusting device for positioning objects, and method for positioning objects using such an adjusting device

Abstract

The present invention relates to an adjusting device, comprising: a base (50); a multi-part platform (10) having at least a first part (13) and a second part (11); and a first drive device and a second drive device which are configured to adjust the multi-part platform (10) relative to the base (50); wherein the first drive device, the second drive device and the multi-part platform (10) are configured and interact such that the first drive device can effect a rotational movement of only the first part (13) of the platform (10) about an axis of rotation (R) and the second drive device can effect a joint translational movement of the first part (13) and of the second part (11) of the platform (10) along the axis of rotation (R) and / or a joint tilting movement of the first part (13) and of the second part (11) of the platform (10) about at least one tilting axis oriented perpendicularly to the axis of rotation (R). The present invention also relates to the use of such an adjusting device for positioning objects, and to a method for positioning objects using such an adjusting device.

Description

[0001] Adjustment device, use of such an adjustment device for positioning objects and methods for positioning objects using such an adjustment device

[0002] The present invention relates to an adjustment device, in particular for positioning objects, such as wafers. The present invention also relates to the use of such a device for positioning objects and to a method for positioning objects using such an adjustment device.

[0003] Adjustment devices are known from the prior art that can rotate planar objects, particularly wafers, about an axis of rotation, move them translationally along the axis of rotation, and tilt them about a tilting axis oriented perpendicular to the axis of rotation to enable processing or inspection of the object in various orientations. For this purpose, the object is arranged on a platform of the adjustment device, which can perform the corresponding rotational, translational, and tilting movements. The known adjustment devices are based on a stacked structure in which the drives (Z-drives) that enable the translational and tilting movements (Z / tip / tilt movement) of the platform are arranged on a component that can be driven by a rotary drive and causes the rotational movement of the platform.In other words, in known adjustment devices, the rotary drive is attached to a base ("fixed world"), and the Z-axis drives are located on a part driven by the rotary drive and guided relative to the base by a rotary bearing, and are consequently dragged along by the rotational movement. Finally, the moving platform is attached to the output of the Z-axis drives; its design may vary depending on the intended use of the adjustment device (customer interface). This design leads to the following disadvantages:

[0004] • The mass moved by the rotary drive is very large, which severely limits the resonant frequency of this drive.

[0005] • The rotation angle is severely limited because the Z-axis drives and their cables must also move. A solution based on a cable carrier is not practical due to space constraints, especially since the changing influences of the trailing cables would significantly affect precision. Even with a cable carrier, a movement of approximately 360° or greater is practically impossible. • Because the Z-axis drives are moved along with the rotary drive, this movement results in a continuous change in the coordinate system with respect to the tip / tilt axes, making the control system more complex.

[0006] Therefore, it is an object of the present invention to provide an improved adjustment device that avoids the aforementioned disadvantages. In particular, an adjustment device with a high resonant frequency, the possibility of a large rotation angle, and simple control is to be provided.

[0007] To solve this problem, the present invention provides an adjusting device according to claim 1.The adjustment device according to the invention comprises a base, a multi-part platform with at least a first part and a second part, a first drive unit and a second drive unit which are configured to adjust the multi-part platform relative to the base, wherein the first drive unit, the second drive unit and the multi-part platform are configured and interact such that the first drive unit can effect a rotational movement of only the first part of the platform about an axis of rotation and the second drive unit can effect a common translational movement of the first part and the second part of the platform along the axis of rotation and / or a common tilting movement of the first part and the second part of the platform about at least one tilting axis oriented perpendicular to the axis of rotation.

[0008] By structurally decoupling the rotational movement of the first part of the platform from the translational movement and / or tilting movement (Z / Tip / Tilt movement) of the first and second parts of the platform, the aforementioned disadvantages can be avoided and an improved adjustment device can be provided with respect to resonance frequency, rotation angle and control.

[0009] Preferred embodiments are the subject of the dependent claims.

[0010] It can be advantageous if the first and second drive units are rigidly connected to the base, particularly if they are permanently mounted on the base. The outputs of the first and second drive units are preferably each directly connected to the platform. This reduces the moving mass for all axes of movement, especially the axis of rotation, to the mass of the platform or parts thereof, since the first drive unit, due to its parallel design, does not have to pull the second drive unit along. It can be beneficial if the first part of the platform is positioned closer to the axis of rotation than the second part, with the first part preferably completely surrounding the axis of rotation. This allows for a compact design of the adjustment device.

[0011] It can be useful if the adjustment device further includes at least one rotational decoupling element, which is configured to decouple the first part of the platform and the second part of the platform with respect to rotational movement, at least over a certain angular range, and to couple the first part of the platform and the second part of the platform with respect to translational movement and / or tilting movement. With the rotational decoupling element, the rotational movement of the first part can be decoupled from the second part with virtually no resistance or friction.

[0012] It can be advantageous for the rotation decoupling element to incorporate a rolling element bearing, a sliding bearing, or a solid-state joint. Depending on the design of the rotation decoupling element, different rotation angles can be achieved. For larger rotation angles (from approximately 0.5° to >360°), rotation decoupling based on rolling element bearings or sliding bearings, preferably in a tilt-resistant design such as double angular contact ball bearings, is recommended. For small rotation angles (< approximately 0.5°), however, rotation decoupling based on (frictionless) solid-state joints is recommended.

[0013] It can be advantageous if the adjusting device further includes a rotational transmission element configured to transmit a drive movement from the first drive unit to the first part of the platform, thereby effecting the rotational movement of the first part of the platform and simultaneously allowing translational movement and / or tilting movement of the platform. The rotational transmission element is designed, in particular, to exhibit high stiffness in a plane perpendicular to the axis of rotation R and low stiffness in a plane parallel to the axis of rotation R. Due to the low stiffness in the direction of the axis of rotation (Z-direction), the second drive unit experiences only very low resistance, especially at larger strokes. Likewise, the platform experiences only very low deformation due to the opposing force distributions.At the same time, due to the high rotational stiffness, the drive torque of the first drive unit can be transferred to the first part of the platform with almost no loss.

[0014] It can prove practical if the rotational transfer element has a closed shape that encompasses an aperture. Such a shape allows the rotational transfer element to be designed as a compact and rotationally rigid component. It can be advantageous if the rotational transfer element has regions of varying stiffness along the shape encompassing the aperture. These regions of varying stiffness allow the stiffness of the rotational transfer element to be precisely adjusted in the plane perpendicular to the axis of rotation and in a plane parallel to the axis of rotation.

[0015] It can be advantageous if the rotational transmission element is ring-shaped and the areas with varying stiffness are arranged regularly along the ring shape. Such a rotationally symmetrical design has a beneficial effect on the function of the rotational transmission element.

[0016] It can be advantageous for the rotational transfer element to be constructed from multiple layers, with a damping layer positioned between at least two adjacent layers. This allows the rotational stiffness of the rotational transfer element to be increased while simultaneously achieving a moderate increase in stiffness along the axis of rotation (Z-direction) compared to a monolithic design of the same thickness.

[0017] It can be helpful if the adjusting device further includes a rotary output element configured to be driven by the first drive unit, with the rotary transmission element connecting the rotary output element and the first part of the platform. This allows the rotary output element and rotary transmission element to optimally perform their individual functions.

[0018] It can be advantageous for the first drive unit to comprise several drive units arranged around the axis of rotation. This allows the drive torque to be transferred evenly to the first part of the platform.

[0019] It can be advantageous if the drive units are designed as electromechanical stepping drives, each with at least two independently controllable actuator units. Such a configuration enables the generation of precise and easily controllable drive movement. Furthermore, this configuration allows for coordinated drive movements of the individual actuator units, which may be ideally suited or advantageous for the specific application. In particular, a wide variety of intermittent drive configurations can be implemented in this way.

[0020] It can be advantageous if each of the drive units is configured to transmit a drive motion via frictional contact to a rotary output element connected to the first part of the platform, wherein the rotary output element is biased against one, more, or all of the drive units, preferably magnetically biased. By means of the magnetic bias between the rotary output element and the drive unit, a high system bias can be generated independently of the rotary transmission element.

[0021] It can be advantageous if the second drive unit comprises several drive elements in the form of electromechanical linear actuators. Electromechanical linear actuators enable the generation of precise and easily controllable drive motion.

[0022] It can prove advantageous if the second drive unit comprises three drive elements arranged at intervals of 120° around the axis of rotation. With this configuration, tilting movements of the platform about any tilting axes oriented perpendicular to the axis of rotation, as well as stable translational movement of the platform along the axis of rotation, can be performed.

[0023] It can be helpful if each drive element is articulated to the second part of the platform via a coupling element designed as a solid-state joint. This allows the drive element to create the degree of freedom required for a tilting movement of the platform.

[0024] It can be advantageous for the adjustment device to include at least one stiffening element connecting the base to the second part of the platform. This stiffening element exhibits high stiffness in a plane perpendicular to the axis of rotation and low stiffness in a plane parallel to the axis of rotation. This increases the platform's stiffness in the platform plane and thus its positional accuracy within that plane. Furthermore, it can be beneficial for the stiffening element to be composed of multiple layers, with a damping layer positioned between at least two adjacent layers. This increases the stiffness of the stiffening element in the platform plane while simultaneously providing a moderate increase in stiffness along the axis of rotation (Z-direction) compared to a monolithic design of the same thickness.

[0025] It can be advantageous for the adjustment device to further include a third drive unit configured to perform a translational movement of one or more actuating elements along the axis of rotation independently of the platform, with the third drive unit being connected to the base. The third drive unit allows an object placed on the platform to be lifted off, thus facilitating its handling. It can be advantageous for the first drive unit to be located closer to the axis of rotation than the second drive unit. This improves the compactness of the adjustment device, especially if the first part of the platform is also located closer to the axis of rotation than the second part.

[0026] However, it can also be practical if the second drive unit is located closer to the axis of rotation than the first drive unit, and preferably if the second part of the platform is located closer to the axis of rotation than the first part of the platform. In a case where the maximum travel of the second drive unit is a limitation with respect to the maximum tilting angle of the platform to be achieved, it can be particularly advantageous if the second drive unit is located as close as possible to the axis of rotation. In this context, if the first drive unit is located further from the axis of rotation than the second drive unit, a greater torque can be generated.

[0027] Another aspect of the present invention relates to the use of an adjustment device according to one of the preceding embodiments for positioning preferably planar objects, in particular wafers, especially in a state in which the object is arranged on the first part of the platform, by a rotational movement of the first part of the platform about the axis of rotation and / or a translational movement of the first part and the second part of the platform along the axis of rotation and / or a tilting movement of the first part and the second part of the platform about at least one tilting axis oriented perpendicular to the axis of rotation.

[0028] Another aspect of the present invention relates to a method for positioning preferably planar objects, in particular wafers, using an adjustment device according to one of the preceding embodiments, wherein the object is arranged on the first part of the platform, comprising: rotating the object about the axis of rotation, and / or translationally moving the object along the axis of rotation, and / or tilting the object about at least one tilting axis oriented perpendicular to the axis of rotation.

[0029] An additional aspect of the present invention relates to a method according to the preceding embodiment using an adjusting device according to the preceding embodiment, which includes the third drive device, comprising: lifting the object from the platform.

[0030] Brief description of the figures Fig. 1 shows a schematic top view of an adjustment device according to a first embodiment.

[0031] Fig. 2 shows a schematic sectional view (section AA) of the adjusting device according to the first embodiment.

[0032] Fig. 3 shows the left side of the sectional view from Fig. 2 as an enlarged detail view.

[0033] Fig. 4 shows a schematic top view of an adjustment device according to a second embodiment.

[0034] Fig. 5 shows a schematic sectional view (section BB) of the adjustment device according to the second embodiment.

[0035] Fig. 6 shows the left side of the sectional view from Fig. 5 as an enlarged detail view.

[0036] Fig. 7 shows a schematic top view of an adjustment device according to a third embodiment.

[0037] Fig. 8 shows a schematic sectional view (section CC) of the adjustment device according to the third embodiment.

[0038] Fig. 9 shows a top view of the rotational transmission element according to one embodiment.

[0039] Fig. 10 shows a side view of the rotational transfer element from Fig. 9.

[0040] Fig. 11 shows a schematic arrangement of the drive units of the first drive device.

[0041] Fig. 12 shows a schematic configuration in which the rotary output element is magnetically biased against a drive unit of the first drive device.

[0042] Detailed description of preferred embodiments

[0043] A first embodiment of the adjusting device is described below with reference to Figures 1 to 3.

[0044] The adjustment device essentially comprises a base 50, a multi-part platform 10 with a first part 13 and a second part 11, a first drive unit (drive unit(s) 40), and a second drive unit (drive element(s) 60) configured to adjust the multi-part platform 10 relative to the base 50. The first drive unit (drive unit(s) 40) can initiate a rotational movement of only the first part 13 of the platform.

[0045] 10 about a rotational axis R and the second drive device (drive element(s) 60) can cause a common translational movement of the first part 13 and the second part

[0046] 11 of the platform 10 along the axis of rotation R and / or cause a joint tilting movement of the first part 13 and the second part 11 of the platform 10 about at least one tilting axis oriented perpendicular to the axis of rotation R. In the depicted, unadjusted initial state of the platform 10, the axis of rotation R runs in the Z direction according to the coordinate system given in the figures, and the platform 10 lies in the XY plane.

[0047] The decoupling of the first part 13 of the platform 10 from the second part 11 of the platform 10 with respect to a rotational movement of the first part 13 and the coupling of the second part 11 of the platform 10 with the first part 11 of the platform 10 with respect to a translational movement and / or a tilting movement of the entire platform 10 is made possible by the special design of the platform 10 and the interaction of the parts 11 , 13 of the platform 10 with the first and second drive unit (drive unit(s) 40, drive element(s) 60), as explained below.

[0048] In addition to the first part 13 and the second part 11, the platform 10 includes a rotation decoupling element 12, which is arranged between the first part 13 and the second part 11. The rotation decoupling element 12 decouples the rotational movement of the first part 13 of the platform 10 from that of the second part 11 of the platform 10. In other words, due to the rotation decoupling element 12, the first part 13 of the platform 10 can perform a rotational movement relative to the second part 11 of the platform 10. At the same time, the rotation decoupling element 12 couples the first part 13 with the second part 11 with respect to a translational movement and / or a tilting movement.In other words, the rotational decoupling element 12 can transmit a translational movement and / or a tilting movement (Z / tip / tilt movement) acting on the second part 11 to the first part 13 without loss and with rigidity, so that the entire platform 10 performs the translational movement and / or the tilting movement (Z / tip / tilt movement). For this purpose, the rotational decoupling element 12 has the lowest possible section modulus with respect to the rotational movement of the first part 13 about the axis of rotation R and is simultaneously designed to be as rigid as possible in the other axes.

[0049] In the first embodiment, the rotation decoupling element 12 is configured such that the first part 13 of the platform 10 is completely rotationally decoupled from the second part 11 of the platform, allowing the first part 13 of the platform 10 to be rotated relative to the second part 11 of the platform 10 by any desired angle of rotation, in particular up to 360° and even beyond. For this purpose, the rotation decoupling element 12 is designed as a rolling bearing, in particular as an angular contact ball bearing, or as a sliding bearing. In the schematic embodiment, the first part 13 and the second part 11 of the platform 10 are each ring-shaped, with the second part 11 completely surrounding the first part 13. The first part 13, the second part 11, and the rotation decoupling element 12 arranged between them are arranged concentrically around the axis of rotation R.Parts 13 and 11 are not limited to a ring shape but can have any shape, as long as this allows for the rotational decoupling of the first part 13 from the second part 11. In any case, it is advantageous if the second part 11 surrounds the first part 13, at least partially. Furthermore, it is advantageous if the first part 11 has a central opening. The rotational decoupling element 12 also need not be designed as a ring-shaped bearing but can, for example, be formed from several mutually opposed bearing sections, each designed as a circular segment.

[0050] The first drive unit is stationary on the base 50 and rigidly connected to it. The first drive unit comprises at least one drive unit 40, which is designed, for example, as an electromechanical stepping drive with at least two independently controllable actuator units. The drive unit 40 can, in particular, be a drive unit known from DE 10 2019 126 702 B3. Preferably, the first drive unit comprises several such drive units 40, which are arranged at regular intervals around the axis of rotation R. Each of the drive units 40 is configured to transmit a drive movement by means of friction contact to a rotary output element 30, which is connected to the first part 13 of the platform 10.Each drive unit 40 includes a friction contact section that transmits the drive motion to the rotary output element 30, thereby causing the rotary motion of the first part 13 of the platform 10. The rotary output element 30 is preloaded against the drive units 40. An example of how such a preload can be implemented will be described later with reference to Fig. 12.

[0051] The second drive unit is also fixedly mounted on the base 50 and rigidly connected to it. The second drive unit comprises several drive elements (Z-drives) 60, which can, for example, be designed as electromechanical linear actuators. Preferably, the first drive unit comprises three such drive elements 60, arranged at intervals of 120° around the axis of rotation (R). Each of the drive elements 60 is configured to transmit a drive movement in the Z-direction to the second part 11 of the platform 10. Through suitable interaction of the three drive elements 60, a purely translational movement of the platform 10 along the axis of rotation and / or a tilting movement of the platform 10 about a tilting axis oriented perpendicular to the axis of rotation R can be performed.Each drive element 60 is articulated to the second part 11 of the platform 10 via a coupling element 61 designed as a solid joint in order to provide a corresponding degree of freedom for the tilting movement of the platform 10.

[0052] The adjusting device further comprises a rotary transmission element 20, which is configured to transmit a drive movement of the first drive unit (drive unit(s) 40) to the first part 13 of the platform 10 in order to effect the rotary movement of the first part 13 of the platform 10 and simultaneously allow the translational movement and / or the tilting movement of the platform 10. In the present embodiment, the rotary transmission element 20 is arranged between the rotary output element 30 and the first part 13 of the platform 10 and is connected to each of them. The rotary transmission element 20 is designed to have high stiffness in a plane perpendicular to the axis of rotation R and low stiffness in a plane parallel to the axis of rotation R.This allows the drive movement of the first drive unit (the rotational movement of the rotary output element 30) to be transmitted as rigidly as possible to the first part 13 of the platform 10, and only a very small resistance force is encountered against the drive movement of the drive elements 60 of the second drive unit (the translational movement and / or the tilting movement of the platform), which is particularly important for larger travel distances in the Z-direction. Furthermore, deformation of the platform 10 can be largely avoided. As described, the stiffness of the rotary transmission element 20 in the Z-direction is as low as possible, whereby the rotational stiffness of the rotary transmission element 20 is not based on the stiffness in the Z-direction, but rather on the section modulus of the rotary decoupling element 12.The rotational stiffness of the rotational transmission element 20 is greater, preferably at least 5 times greater, particularly preferably at least 10 times greater than the rotational stiffness of the rotational decoupling element 12.

[0053] To achieve high rotational stiffness and minimal stiffness in the Z-direction, the rotational transmission element 20 preferably has a closed shape encompassing an aperture. Areas of varying stiffness can be formed along the aperture-enclosing shape. A specific embodiment of the rotational transmission element is shown in Figures 9 and 10. The rotational transmission element 20 is ring-shaped, and areas of varying stiffness (stiffened areas 21 and flexible areas 22) are arranged alternately along the ring shape. Furthermore, the rotational transmission element 20 includes fastening sections (bores) where it can be connected to the rotational output element 30 and the first part 13 of the platform 10.The rotational transmission element 20 can be a single-piece component or can be made up of several layers, with at least one damping layer arranged between two adjacent layers.

[0054] The adjustment device further comprises at least one stiffening element 70 that connects the base 50 to the second part 11 of the platform 10. The stiffening element 70 exhibits high stiffness in a plane perpendicular to the axis of rotation R and low stiffness in a plane parallel to the axis of rotation R. This stiffening element 70 contributes to increasing the stiffness of the platform 10 in the platform plane (XY plane) and thus the positional accuracy of the platform 10 in the platform plane. An individual stiffening element 70 can be arranged in the area of ​​each drive element 60 between the base 50 and the second part 11 of the platform 10. However, the stiffening element can also be a single component that connects the base 50 and the second part 11 of the platform 10 at several points.

[0055] At the center of the base 50, a free space 80 is provided, which is essentially bounded by the drive units 40 and the first part 13 of the platform 10. Since the first part 13 of the platform 10 has a central opening, the free space is open in the positive Z-direction. The significance of this free space 80 will be described later with reference to Figures 7 and 8.

[0056] The described adjustment device can be used to position preferably planar objects, in particular wafers, in a state where the object is placed on the first part 13 of the platform 10, according to the movement capabilities of the platform 10. Accordingly, the described adjustment device can also be used to perform a method for positioning the object placed on the first part 13 of the platform 10. This method essentially comprises the following steps: rotating the object about the axis of rotation R, and / or translationally moving the object along the axis of rotation R, and / or tilting the object about at least one tilting axis oriented perpendicular to the axis of rotation R.

[0057] A second embodiment of the adjusting device is described below with reference to Figures 4 to 6. The adjusting device according to the second embodiment is largely identical to the adjusting device according to the first embodiment. Therefore, the differences between the adjusting device according to the second embodiment and the adjusting device according to the first embodiment are described below.

[0058] The essential difference between the adjustment device according to the second embodiment and the adjustment device according to the first embodiment lies in the configuration of the rotational decoupling element 12. In the second embodiment, several, in particular three, rotational decoupling elements 12 are provided, each configured as a solid-state joint. The first part 13 of the platform 10 is connected to the second part 11 of the platform via these solid-state joints. Accordingly, the first part 13 of the platform 10 is rotationally decoupled from the second part 11 of the platform only over a specific angular range defined by the solid-state joints. This angular range depends on the type of solid-state joint and can be varied by selecting different types of solid-state joints.Preferably, the rigid joints are designed such that the first part 13 of the platform 10 can be rotated relative to the second part 11 of the platform 10 by a rotation angle of < 0.5°. Analogous to the first embodiment, the rigid joints can transmit a translational movement and / or a tilting movement (Z / tip / tilt movement) acting on the second part 11 to the first part 13 without loss and with rigidity, so that the entire platform 10 performs the translational movement and / or the tilting movement (Z / tip / tilt movement). For this purpose, the rigid joints have the lowest possible rotational stiffness with respect to the rotational movement of the first part 13 about the axis of rotation R and are simultaneously as stiff as possible in the other axes. In the second embodiment, the first part 13 and the second part 11 of the platform 10 are also schematically designed as ring-shaped.The parts 13 and 11 are not limited to a ring shape, but can have any shape, as long as they are connected to each other via solid-state joints that allow rotational movement of the first part 13 relative to the second part 11. In particular, the first part 13 can have an approximate triangular or polygonal shape, which is connected at its vertices to the second part 11 via the solid-state joints, and which surrounds the first part 13 at least section by section.

[0059] A third embodiment of the adjusting device is described below with reference to Figures 7 and 8. The adjusting device according to the third embodiment is largely identical to the adjusting device according to the second embodiment and differs from it only by the provision of a third drive unit 90 on the base 50 in the central free space 80. The third drive unit 90 is configured to execute a translational movement of one or more actuating elements 91, which are arranged in the region of the central opening of the first part 13 of the platform 10, along the axis of rotation R independently of the platform 10.The adjusting device according to the third embodiment allows an object placed on the first part 13 of the platform 10 to be lifted from the platform 10, for example, to facilitate handling of the object and, in particular, to enable easy replacement of the object. The adjusting elements 91 are therefore provided in sufficient number and in a suitable arrangement to lift the object from the platform 10 securely and stably. Instead of several individual adjusting elements 91, a platform can also be provided that lifts the object from the platform 10. A third drive unit 90 according to the preceding description can also be provided in the adjusting device according to the first embodiment.

[0060] Fig. 11 shows an advantageous arrangement of the drive units 40 around the axis of rotation R. As described above, a drive unit 40 can be designed as an electromechanical stepping drive with at least two independently controllable actuator units (see drive unit in DE 10 2019 126 702 B3). In this case, it can be advantageous to divide the drive units 40 into two groups, which are controlled in opposite phases, and to pair up one drive unit 40 from each of the first and second groups, so that the distance between the two friction contact sections is as small as possible. This can be particularly advantageous if the drive units 40 are arranged on a large diameter, since an increased support distance results in greater deflection of the friction partner / output (rotational output element 30), which can adversely affect the lifting behavior.

[0061] Fig. 11 shows the difference between drive units 40 arranged in pairs and controlled in opposite phases: In the drive units 40 arranged in pairs, the first group is engaged with the friction partner / output and provides the feed. The second group is lifted off, with the gap between the friction contact sections reduced due to deflection. In the drive units 40 arranged in pairs, the first group is engaged with the friction partner / output and provides the feed. The second group is lifted off. Due to its proximity to the active drive unit, the deflection has a less significant negative impact on its lift-off behavior.

[0062] Fig. 12 shows a configuration in which the rotary output element 30 is magnetically biased against a drive unit 40 of the first drive device. As described above, the rotary output element 30 is connected to the first part 13 of the platform 10 via the rotary transmission element 20. The rotary output element 30 comprises a friction element 32 and a magnetic carrier 31 on which the friction element 32 is mounted. The drive unit 40 comprises a base 42 and a drive element 41 (actuator unit) arranged thereon, at the end of which a friction contact section (not shown) is arranged, which can be brought into frictional contact with the friction element 32. A magnet 43 is provided on the base 42 parallel to the drive element 41.Because the magnetic carrier 31 of the rotary drive element 30 is positioned opposite this magnet 43, the carrier 31 is attracted to the magnet 43 (see magnetic field lines 44), resulting in the rotary output element 30 being preloaded against the drive unit 40. This magnetic preload between the rotary output element 30 and the drive unit 40 allows a high system preload to be generated independently of the rotary transmission element 20. Accordingly, the rotary transmission element 20 can be designed as described above, exhibiting high stiffness in a plane perpendicular to the axis of rotation R and low stiffness in a plane parallel to the axis of rotation R.

[0063] Figures 1 to 8 show embodiments of the adjusting device in which the first drive unit (rotational drive unit 40) is arranged closer to the axis of rotation R than the second drive unit (Z-drive elements 60) and the first part 13 of the platform 10 is arranged closer to the axis of rotation R than the second part 11 of the platform 10, so that the first drive unit acts on the first part 13 of the platform 10 and the second drive unit acts on the second part 11 of the platform.

[0064] However, embodiments are also possible in which the second drive unit (Z-drive elements 60) is arranged closer to the axis of rotation R than the first drive unit (rotational drive unit 40). In this case, the second drive unit acts on the part of the platform 10 designated with reference numeral 13. In this case, part 13 of the platform 10 corresponds to the second part of the platform 10. Furthermore, in this case, the first drive unit acts on the part of the platform 10 designated with reference numeral 11. In this case, part 11 of the platform 10 corresponds to the first part of the platform 10. The functional and structural relationships, which refer to Fig.The provisions described in sections 1 to 12 are also applicable to embodiments in which the second drive unit (Z-drive elements 60) is arranged closer to the axis of rotation R than the first drive unit (rotational drive unit 40), or require only minor modifications. Furthermore, an embodiment is conceivable which has only one axis of rotation (i.e., the first drive unit (rotational drive unit 40) acts on the first part 13 of the platform, and Z-drive elements 60 are not present in this embodiment). The second part 11 of the platform 10 is directly connected to the base 50.

[0065] Reference symbol list

[0066] 10 multi-part platform

[0067] 11 second part of the platform

[0068] 12 Rotation decoupling element

[0069] 13 first part of the platform

[0070] 20 Rotary transmission element

[0071] 21 reinforced area

[0072] 22 flexible area

[0073] 30 Rotary output element

[0074] 31 carriers

[0075] 32 Friction element

[0076] 40 Drive unit of the first drive device

[0077] 41 Drive element of the drive unit of the first drive device

[0078] 42 Base of the drive unit of the first drive device

[0079] 43 Magnet

[0080] 44 magnetic field lines

[0081] 50 base

[0082] 60 Drive element of the second drive unit

[0083] 61 Coupling element

[0084] 70 stiffening element

[0085] 80 free space

[0086] 90 third drive unit

[0087] 91 Actuator

[0088] R axis of rotation

Claims

Claims 1. Adjustment device comprising: a base (50), a multi-part platform (10) with at least a first part (13) and a second part (11), a first drive unit and a second drive unit configured to adjust the multi-part platform (10) relative to the base (50), wherein the first drive unit, the second drive unit and the multi-part platform (10) are configured and interact such that the first drive unit can cause a rotational movement of only the first part (13) of the platform (10) about an axis of rotation (R) and the second drive unit can cause a common translational movement of the first part (13) and the second part (11) of the platform (10) along the axis of rotation (R) and / or a common tilting movement of the first part (13) and the second part (11) of the platform (10) about at least one tilting axis oriented perpendicular to the axis of rotation (R).

2. Adjustment device according to claim 1, wherein the first drive unit and the second drive unit are fixedly connected to the base (50), in particular provided in a fixed position on the base (50).

3. Adjustment device according to claim 1 or 2, wherein the first part (13) of the platform (10) is arranged closer to the axis of rotation (R) than the second part (11) of the platform (10), wherein the first part (13) of the platform (10) preferably completely surrounds the axis of rotation (R).

4. Adjustment device according to one of the preceding claims, further comprising at least one rotation decoupling element (12) which is configured to adjust the first part (13) of the platform (10) and the second part (11) of the platform (10) with respect to rotational movement at least over a certain angular range, and to couple the first part (13) of the platform (10) and the second part (11) of the platform (10) with respect to translational movement and / or tilting movement.

5. Adjustment device according to claim 4, wherein the rotation decoupling element (12) comprises a rolling bearing or a sliding bearing or a solid joint.

6. Adjustment device according to one of the preceding claims, further comprising a rotational transmission element (20) which is configured to transmit a drive movement of the first drive device to the first part (13) of the platform (10) in order to effect the rotational movement of the first part (13) of the platform and at the same time allow the translational movement and / or the tilting movement of the platform (10).

7. Adjustment device according to claim 6, wherein the rotation transmission element (20) has a closed shape and thereby surrounds an aperture.

8. Adjustment device according to claim 7, wherein the rotation transmission element (20) has differently stiff areas (21, 22) along the shape surrounding the aperture.

9. Adjustment device according to claim 8, wherein the rotation transmission element (20) is ring-shaped and the differently stiff areas (21, 22) are arranged regularly along the ring shape.

10. Adjustment device according to one of claims 6 to 9, wherein the rotation transmission element (20) is made up of several layers, and wherein at least between two adjacent layers a damping layer is arranged.

11. Adjustment device according to one of claims 6 to 10, further comprising a rotary output element (30) which is configured to be driven by the first drive device, wherein the rotary transmission element (20) connects the rotary output element (30) and the first part (13) of the platform (10).

12. Adjustment device according to one of the preceding claims, wherein the first drive device comprises several drive units (40) arranged around the axis of rotation (R).

13. Adjustment device according to claim 12, wherein the drive units are designed as electromechanical stepping drives with at least two independently controllable actuator units each.

14. Adjustment device according to claim 12 or 13, wherein each of the drive units (40) is configured to transmit a drive movement by means of frictional contact to a rotary output element (30) which is connected to the first part (13) of the platform (10), wherein the rotary output element (30) is against one of the or several or all of the drive units (40) are pre-tensioned, preferably magnetically pre-tensioned.

15. Adjustment device according to one of the preceding claims, wherein the second drive device comprises several drive elements (60) in the form of electromechanical linear actuators.

16. Adjustment device according to claim 15, wherein the second drive device comprises three drive elements (60) arranged at intervals of substantially 120° around the axis of rotation (R).

17. Adjustment device according to claim 15 or 16, wherein each drive element (60) is pivotally connected to the second part (11) of the platform (10) via a coupling element (61) designed as a solid joint.

18. Adjustment device according to one of the preceding claims, further comprising at least one stiffening element (70) which connects the base (50) to the second part (11) of the Platform (10) connects, wherein the stiffening element (70) has a high stiffness in a plane perpendicular to the axis of rotation (R) and a low stiffness in a plane parallel to the axis of rotation (R).

19. Adjustment device according to one of the preceding claims, further comprising a third drive unit (90) which is configured to perform a translational movement of one or more actuating elements (91) along the axis of rotation (R) independently of the platform (10), wherein the third drive unit (90) is connected to the base (50).

20. Adjustment device according to one of the preceding claims, wherein the first drive device is arranged closer to the axis of rotation (R) than the second drive device.

21. Adjustment device according to one of claims 1 to 19, wherein the second drive device is arranged closer to the axis of rotation (R) than the first drive device and preferably the second part (13) of the platform (10) is arranged closer to the axis of rotation (R) than the first part (11) of the platform (10).

22. Use of an adjustment device according to one of the preceding claims for positioning preferably planar objects, in particular wafers, especially in a state in which the object is arranged on the first part (13) of the platform (10) is, by a rotational movement of the first part (13) of the platform about the axis of rotation (R) and / or a translational movement of the first part (13) and the second part (11) of the platform (10) along the axis of rotation (R) and / or a tilting movement of the first part (13) and the second part (11) of the platform (10) about at least one tilting axis oriented perpendicular to the axis of rotation (R).

23. Method for positioning preferably planar objects, in particular wafers, using an adjustment device according to one of claims 1 to 21, wherein the object is arranged on the first part (13) of the platform (10), comprising: Rotating the object around the axis of rotation (R), and / or Translational movement of the object along the axis of rotation (R), and / or tilting of the object about at least one tilting axis oriented perpendicular to the axis of rotation (R).

24. The method of claim 23 using an adjusting device of claim 19, comprising: Lifting the object from the platform (10).

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