Composite material for insulating one or more components

Abstract

There is provided a method (400) of manufacturing a composite material for insulating one or more components of a vacuum pump system, comprising: providing (410) a first material having an exterior surface, wherein the first material comprises an aerogel; and arranging (420) a second material on the exterior surface of the first material to enclose the first material, wherein the second material comprises a metal.

Description

[0001] COMPOSITE MATERIAL FOR INSULATING ONE OR MORE COMPONENTS OF A VACUUM PUMP SYSTEM

[0002] FIELD OF THE INVENTION

[0003] The field of the invention relates to vacuum pump systems, and more specifically to a composite material for insulating one or more components of a vacuum pump system.

[0004] BACKGROUND

[0005] A wide variety of materials for thermal insulation are known. These include polymeric fibres, resins and foams, in addition to mineral fibres such as glass wool, slag wool and wood wool. Vacuum-based materials may also be used in thermal insulation applications.

[0006] It is desirable that insulation materials have a relatively high efficiency of heat insulation. This can be characterised in a number of different ways. One approach is to consider the thermal conductivity of the material - a property intrinsic to the material itself. Another approach is to consider the overall thermal conduction resistance of the material which may depend on other aspects of the insulation, such as material thickness.

[0007] Some insulation materials tend to be less desirable owing to their use of per-and-polyfluoroalkyl substances (PFAS) which are widely used, long-lasting chemicals, components of which tend to break down very slowly. PFAS are generally considered less desirable owing to their persistence in the Environment after their useful life.

[0008] PFAS-free materials for thermal insulation do exist and have desirable thermal insulation properties (i.e., thermal conductivity and / or thermal conduction resistance) but can be challenging to deploy as an insulation material. Some materials can be challenging or even hazardous to manufacture, handle and integrate into applications. Aerogel insulation is one such insulation material. Aerogel insulation is a type of insulation manufactured by grinding down a solid aerogel into a fine powder. The fine powder is then impregnated into a substrate or matrix. The aerogel insulation has excellent thermal properties but can produce excessive dust when handled. This not only presents a health hazard but is particularly problematic in applications vulnerable to contaminants. Such applications include semiconductor manufacturing and clean rooms wherein strict controls are placed on particulates and contaminants. In these applications, not only should fabrication rooms and vessels remain free from dust contaminants, but also peripheral equipment including but not limited to pipework and vacuum pump components.

[0009] Accordingly, it is desirable to provide a material for insulating one or more components of a vacuum pump system that mitigates these issues.

[0010] SUMMARY OF THE INVENTION

[0011] In a first aspect, there is provided a composite material for insulating one or more components of a vacuum pump system, comprising: a first material having an exterior surface, wherein the first material comprises an aerogel; and a second material arranged on the exterior surface of the first material to enclose the first material, wherein the second material comprises a metal.

[0012] A composite material as referred to herein is a material formed of two or more constituent materials. The first material comprises an aerogel (i.e., a silica aerogel such as pyrogel) which may be provided as an aerogel powder and a substrate or matrix for the powder. For instance, the powder may be provided upon or within a fibre matrix such as a polymer fibre matrix or fibreglass mat. Such materials, also referred to as aerogel insulation, have desirable thermal insulation properties.

[0013] When handling aerogel insulation, dust tends to be generated from the powder composition which is generally unacceptable for contaminant-free applications such as vacuum pump systems. The dust contaminants tend to be generated when the aerogel insulation material is used proximal to equipment, such as semiconductor fabrication equipment, pipework, or other vacuum pump system components. This tends to be as a result of vibration, impact, or movement proximal the aerogel insulation material provoking dust generation. In certain applications such as semiconductor manufacturing it is desirable to eliminate or at least mitigate the presence of contaminants in the fabrication process (and any fabrication equipment or peripherals).

[0014] The Inventor has found that the desirable thermal insulation properties of insulation manufactured at least in part from powder-based materials such as aerogel powders, can be advantageously deployed in applications such as semiconductor fabrication and vacuum pump systems if the dust-contaminant risk is mitigated. In this regard, the inventor has found that providing a layer of a second material on an exterior surface of the first material to cover the exterior surface of the first material (i.e., enclose or provide an air-tight seal to the first material) results in dust being contained.

[0015] By using a metal as the second material, PFAS materials tend to be avoided. PFAS materials tend to be used currently for containing insulation materials, having the drawbacks as hereinbefore discussed. Furthermore, a metal can be selected that has a melting point that is lower than a rated operating temperature of the first material. This tends to allow for the metal to be applied as a layer through deposition techniques or by melting the metal onto the exterior surface of the first material using a heat source. Example heat sources include an oven, oven conveyer, resistance welding or flame sealing, for instance. A rated operating temperature of an aerogel insulation may be up to and including 650°C in some examples.

[0016] As described above, the aerogel may comprise an aerogel powder. Such a powder may be generated by grinding down a solid aerogel. Solid aerogels include, for instance, silica aerogels or polymer aerogels The aerogel powder may be integrated into a substrate or matrix to provide an aerogel-based insulation board or mat than can be cut to a required size or shape. Aerogel powder may have a thermal conductivity of less than or equal to 100mW / m-k for instance, more preferably 20-89mW / m-K over, for instance, a temperature range of 0-600°C. The first material may comprise at least one of: a precut or stamped port or hole; an engraving; and another shaped part.

[0017] The second material arranged on the exterior surface of the first material tends to ensure the second material forms a layer that conforms to the exterior surface. Hence, the first material can be shaped for a particular application / deployment, including the cutting or holes or ports (for instance for pipework), prior to application of the second material. Hence, even where the first material comprises precut or stamped ports or holes, engravings, or other shaped parts, the exterior surface of the first material tends to be fully enclosed or sealed by the second material.

[0018] The metal may comprise a metal foil. The metal foil tends to be able to be moulded and / or wrapped around the first material. This tends to include moulding and / or wrapping the metal foil around any ports, stampings, engravings, protrusions and other shapes of the first material. The metal foil may comprise a single layer of overlapping material or a plurality of layers of overlapping material (for instance, each side of the first material may be layered with separate pieces of metal foil that overlap partially or fully). Furthermore, the metal foil tends to be flexible allowing the composite material to be used in applications such as insulating around pipework where other, more rigid insulation materials tend not to be usable.

[0019] The metal foil may comprise an aluminium alloy. Pure aluminium foils tend to have a melting point of approximately 660°C. By utilising an aluminium alloy, the melting point of the metal foil can be reduced below a rated operating temperature of the first material (for instance, below the ~650°C rated operating temperature of aerogel insulation) to, for instance, 500°C. This tends to allow the metal foil to be applied to the first material through melting or deposition without exceeding the rated operating temperature of the first material. Furthermore, the metal foil can still be specified to have a melting point greater than the operating temperature of the one or more components of the vacuum pump system being insulated. Generally the components of vacuum pump systems may need to tolerate temperatures greater than or equal to 200°C, greater than or equal to 250°C, greater than or equal to 300°C, greater than or equal to 350°C. Furthermore, aluminium alloys tend to be low cost owing to their relatively thin construction.

[0020] The aluminium alloy may comprise an aluminium alloy selected from the list of aluminium alloys consisting of: 2024 aluminium alloy; 2017 aluminium alloy; and 7075 aluminium alloy. These aluminium alloys are particularly suitable for the composite material owing to their respective melting points of 502°C; 513°C; and 477°C which tend to be below the rating operating temperature of aerogel insulation, whilst also being suitable for operation in vacuum pump / equipment environments. More generally the aluminium alloy may have a respective melting point in the range 450°C-550°C, more preferably 475°C-525°C, even more preferably 477°C-513°C. The preferred melting point temperatures may for instance be in the range 477°C-502°C or 502°C-513°C.

[0021] The metal may be bonded to the exterior surface of the first material. The metal may be bonded to the exterior surface using a heat process. The metal foil may be bonded to the exterior surface of the first material through melting. The metal foil may comprise one or more overlapping parts bonded together to enclose the first material.

[0022] The composite material may be configured as: a panel; a blanket; or a wrap. The composite material tends to be able to be configured in different formats depending upon application / deployment. For instance, the first material may be rigid or flexible. The second material may be a rigid metal layer or a flexible thin foil layer, for instance.

[0023] The aerogel may comprise an aerogel powder, the first material comprising the aerogel powder on or in a substrate material or matrix material. The substrate material or matrix material may comprise a fibrous material. The fibrous material may comprise natural fibres, mineral wool, wood wool, for example. The fibrous material may comprise a fibre-polymer matrix. The substrate material or matrix material may alternatively comprise a resin or foam.

[0024] In a second aspect, there is further provided a component for a vacuum pump system, wherein the component is insulated with the composite material of the first aspect. The vacuum pump system may be any system using vacuum pump equipment. This includes vacuum pump apparatuses themselves, vacuum pumps, and semiconductor manufacturing systems, for instance.

[0025] The component may comprise at least one of: a pipe or port; an exhaust; a vacuum pump; and a semiconductor fabrication apparatus. The vacuum pump may comprise a booster pump or a dry pump, for instance. The pipe or port may be interconnecting pipework.

[0026] In a third aspect, there is further provided a vacuum pump system comprising the component of the second aspect.

[0027] In a fourth aspect, there is further provided a method of manufacturing a composite material for insulating one or more components of a vacuum pump system, comprising: providing a first material having an exterior surface, wherein the first material comprises an aerogel; and arranging a second material on the exterior surface of the first material to enclose the first material, wherein the second material comprises a metal.

[0028] The step of arranging the second material may comprise: depositing the metal onto the exterior surface of the first material using vapour deposition.

[0029] The metal may comprise a metal foil, wherein the step of arranging the second material may comprise: wrapping the metal foil around the exterior surface of the first material; and then bonding the metal foil to the exterior surface using heating. Example heat sources for the heating include, but are not limited to, Example an oven, oven conveyer, resistance welding or flame sealing.

[0030] The composite material and methods described herein tend to enable the use of insulation comprising aerogels (i.e., aerogel powders integrated with a substrate or matrix) for vacuum pump systems, apparatuses and applications. This tends to be because the aerogels are enclosed within a layer of a second material, the second material comprising metal. The methods described herein are particularly advantageous for insulation comprising aerogel powder integrated / arranged with a substrate or matrix that would otherwise generate dust-contaminants. The composite material and methods described herein tend to enable higher efficiency vacuum pump systems owing to the use of aerogel insulation, which tends to reduce the power consumption for running said vacuum pump systems.

[0031] The composite material and methods described herein tend to provide an alternative to PFAS materials (such as Teflon) used in insulation for vacuum pump systems.

[0032] The composite material and methods described herein tend to be deployable at reduced cost.

[0033] The composite material and methods described herein tend to be able to be used to layer the first material to enclose the first material even when the first material comprises one or more cut-outs, ports, holes, engraving or other shaping.

[0034] The composite material and methods described herein tend to be able to be used in automated manufacturing systems.

[0035] It will be appreciated that particular features of different aspects of the invention tend to share the technical effects and benefits of corresponding features of other aspects of the invention

[0036] It will also be appreciated that the use of the terms “first” and “second”, and the like, are merely intended to help distinguish between similar features and are not intended to indicate a relative importance of one feature over another, unless otherwise specified.

[0037] BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The present invention will now be described, by way of example only, with reference to the accompanying drawings, in which:

[0039] Figure 1 shows an example, in cross-sectional view, of a composite material in accordance with aspects of the disclosure herein;

[0040] Figure 2 shows a further example, in cross-sectional view, of a composite material in accordance with aspects of the disclosure herein; Figure 3 shows an example, in cross-sectional view, of a component of a vacuum pump system insulated using the composite material according to aspects of the disclosure herein; and

[0041] Figure 4 shows an example, of a method in accordance with aspects of the disclosure herein.

[0042] DETAILED DESCRIPTION

[0043] Figure 1 shows an example, in cross-sectional view, of a composite material 100 in accordance with aspects of the disclosure herein.

[0044] The composite material 100 is for insulating one or more components of a vacuum pump system. The composite material comprises a first material 110. The first material 110 is for providing thermal insulation. The first material 110 is shown as having a rectangular cross-section. The first material 110 comprises an aerogel, more specifically an aerogel powder impregnated in a substrate. The aerogel is a silica aerogel. The substrate is a fibrous substrate that is flexible.

[0045] The composite material 100 further comprises a second material 120 arranged on an exterior surface of the first material 110. The second material 120 comprises a single layer of material enclosing the first material 110.

[0046] The second material 120 comprises a single sheet of metal foil wrapped around the first material 110 to form an air-tight seal. The metal foil of the second material 120 has a melting temperature that is less that the rated operational use temperature of the first material 110. The rated operational use temperature of the first material 110 is up to 650°C. An aluminium alloy is used for the second material 120 having a melting temperature less than 650°C.

[0047] The second material 120 is bonded to the exterior surface of the first material 110 through melting. More specifically, the composite material 100 has been subjected to a heat source (i.e., an oven) after the second material 120 has been wrapped around the first material 110. Owing to the difference in melting temperature of the second material 120 compared to the rated operational temperature of the first material 110, the composite material 100 can be subjected to heat at temperatures greater than the melting temperature of the second material 120 but less than the rated temperature of the first material 110, in order to melt the second material 120 to the first material 110 without damaging the first material 110.

[0048] The first material 110 may have a thickness of less than or equal to 25mm, less than or equal to 10mm, less than or equal to 5mm, for instance. The thickness may be in the range 1 mm-22mm for instance, or in the range 1- 3mm for instance. The second material 120 may have a thickness to maintain flexibility but also be robust. For example, the thickness of the second material 120 may be less than or equal to 1mm, less than or equal to 0.5mm, less than or equal to 0.2mm, less than or equal to 0.127mm (1 inch), less than or equal to 0.1 mm. The thickness may be in the range 0.1mm-1 mm for instance, or 0.1mm- 0.5mm, or 0.1mm-0.2mm.

[0049] Figure 2 shows a further example, in cross-sectional view, of a composite material 200 in accordance with aspects of the disclosure herein.

[0050] The composite material 200 is for insulating one or more components of a vacuum pump system. The composite material comprises a first material 210. The first material 210 is for providing thermal insulation. The first material 210 is shown as having a rectangular cross-section. The first material 210 comprises an aerogel, more specifically an aerogel powder impregnated in a substrate. The aerogel is a silica aerogel. The substrate is a fibrous substrate that is flexible.

[0051] The composite material 200 further comprises a second material 220a, 220b arranged on an exterior surface of the first material 210. The second material 220a, 220b encloses the first material 210.

[0052] The second material 220a, 220b comprises multiple sheets of metal foil wrapped around the first material 210 to form an air-tight seal. A first sheet 220a of metal foil partially covers the first material 210, whilst a second sheet 220b of metal foil covers the remainder of the first material 210 and partially overlaps the first sheet 220a. The metal foil of the second material 220a, 220b has a melting temperature that is less that the rated operational use temperature of the first material 210. Similar to the example composite material 100 of Figure 1 , the rated operational use temperature of the first material 210 is up to 650°C. An aluminium alloy is used for the second material 220a, 220b having a melting temperature less than 650°C.

[0053] The second material 220a, 220b is bonded to the exterior surface of the first material 210 through melting. More specifically, the composite material 200 has been subjected to a heat source (i.e., an oven) after the second material 220a, 220b has been wrapped around the first material 210. The first sheet 220a of metal foil is initially partially wrapped around the first material 210. The second sheet 220b of metal foil is then wrapped around the remainder of the first material 210 and to overlap the first sheet 220a. The sheets 220a, 220b of the second material are then melted together. Similar to the example of the composite material 100 of Figure 1 , owing to the difference in melting temperature of the second material 220a, 220b compared to the rated operational temperature of the first material 210, the composite material 200 can be subjected to heat at temperatures greater than the melting temperature of the second material 220 but less than the rated temperature of the first material 210 in order to melt the second material 220a, 220b without damaging the first material 210.

[0054] The first material 210 may have a thickness as described for the first material 110 of Figure 1. The second material 220 may have a thickness as described for the second material 120 of Figure 1 .

[0055] Figure 3 shows an example, in cross-sectional view, of a component 330 of a vacuum pump system insulated using the composite material 300 according to aspects of the disclosure herein.

[0056] The component 330 is a pipe which may be an interconnecting pipe between vacuum pumps of a vacuum pump system. The pipe may be an exhaust of a vacuum pump system.

[0057] The component 330 is surrounded by a composite material 300. The composite material 300 may be the composite material 100 of Figure 1. The composite material 300 may be the composite material 200 of Figure 2. Owing to the relatively thin profile of the metal foil 120, 220 used in the composite materials 100, 200, the composite material 300 can be wrapped around the component 330. More generally, the flexibility of the composite material 300 enables the composite material 300 to be used to insulate non-planar components of vacuum pump systems.

[0058] Figure 4 shows an example, of a method 400 in accordance with aspects of the disclosure herein. The method 400 is a method of manufacturing a composite material 100, 200 for insulating one or more components of a vacuum pump system.

[0059] A first step 410 comprises providing a first material 110, 210 having an exterior surface, wherein the first material 110, 210 comprises an aerogel.

[0060] A further step 420 comprises arranging a second material 120, 220a, 220b on the exterior surface of the first material 110, 210 to enclose the first material 110, 210, wherein the second material 120, 220a, 220b comprises a metal.

[0061] Although illustrative examples of the invention have been disclosed in detail herein, with reference to the accompanying drawings, it is understood that the invention is not limited to the precise examples and that various changes and modifications can be effected therein by one skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

[0062] Whilst the examples described herein may refer to specific dimensions, it will be appreciated that the dimensions may vary dependent upon the specific application.

[0063] Whilst the examples described herein may refer to use of aerogel as part of the first material, it will be generally understood that the composite material and methods described herein could be applied to a first material comprising any insulation with a risk of producing dust.

[0064] Whilst the examples described herein may refer to the second material comprising metal foil, the second material may alternatively comprise a metal deposited using a vapour deposition technique. Whilst the examples described herein may refer to Aluminium alloys, this is not intended to be limiting. Other metals or metal alloys with appropriate melting point temperatures may be used.

[0065] Whilst the examples described herein are shown as having substantially rectangular cross-sections, this is not intended to be limiting. Other crosssections are possible including, but not limited to, square, circular, oval.

[0066] Whilst the examples described herein show cross-sectional views of the composite materials, it will be appreciated that the composite materials are three-dimensional. The composite materials may be provided as a sheet, for instance.

[0067] Generally, the disclosure herein tends to relate to the use of a low melting point metal foil, the melting point being lower than a rated use temperature of an aerogel insulation (such as a mat), the metal foil being used to wrap and seal the aerogel insulation, sealing in dust and providing an air-tight seal. The disclosure herein tends to avoid PFAS issues and complications in fabrication and use of aerogel insulation where dust from the aerogel insulation would otherwise escape.

[0068] Reference numeral list

[0069] 100 composite material

[0070] 110 first material

[0071] 120 second material

[0072] 200 composite material

[0073] 210 first material

[0074] 220a, 220b second material

[0075] 300 composite material

[0076] 330 component

[0077] 400 method

[0078] 410 providing step

[0079] 420 arranging step

Claims

CLAIMS1 . A composite material for insulating one or more components of a vacuum pump system, comprising: a first material having an exterior surface, wherein the first material comprises an aerogel; and a second material arranged on the exterior surface of the first material to enclose the first material, wherein the second material comprises a metal foil; wherein the metal foil is bonded to the exterior surface of the first material through melting.

2. The composite material of claim 1 , wherein the first material comprises at least one of: a precut or stamped port or hole; an engraving; and another shaped part.

3. The composite material of claim 1 or 2, wherein the metal foil comprises an aluminium alloy.

4. The composite material of claim 3, wherein the aluminium alloy comprises an aluminium alloy selected from the list of aluminium alloys consisting of:2024 aluminium alloy;2017 aluminium alloy; and7075 aluminium alloy.

5. The composite material of any preceding claim configured as: a panel; a blanket; or a wrap.

6. The composite material of any preceding claim wherein the aerogel comprises an aerogel powder, the first material comprising the aerogel powder on or in a substrate material or matrix material.

7. A component for a vacuum pump system, wherein the component is insulated with the composite material of any preceding claim.

8. The component of claim 7, wherein the component comprises at least one of: a pipe or port; an exhaust; a vacuum pump; and a semiconductor fabrication apparatus.

9. A vacuum pump system comprising the component of any one of claims 7-8.

10. A method of manufacturing a composite material for insulating one or more components of a vacuum pump system, comprising: providing a first material having an exterior surface, wherein the first material comprises an aerogel;arranging a second material on the exterior surface of the first material to enclose the first material, wherein the second material comprises a metal foil; wrapping the metal foil around the exterior surface of the first material; and then bonding the metal foil to the exterior surface by melting it using heat.

11. The method of claim 10, wherein the metal foil comprises an aluminium alloy.

12. The method of claim 11 , wherein the aluminium alloy comprises an aluminium alloy selected from the list of aluminium alloys consisting of:2024 aluminium alloy;2017 aluminium alloy; and7075 aluminium alloy.

13. The method of any one of claims 10-12, wherein the composite material is configured as: a panel; a blanket; or a wrap.

14. The method of any one of claims 10-13, wherein the aerogel comprises an aerogel powder, the first material comprising the aerogel powder on or in a substrate material or matrix material.

15. The method of any one of claims 10-14, wherein the component comprises at least one of:a pipe or port; an exhaust; a vacuum pump; and a semiconductor fabrication apparatus.

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