Reaction by-product collection apparatus

Abstract

A reaction by-product collection apparatus is provided. The reaction by-product collection apparatus according to one aspect of the present invention collects powder from exhaust gas, which is a reaction by-product of a semiconductor process, and comprises: a powder collection unit for precipitating the powder from the exhaust gas and separating out and eliminating the precipitated powder; a powder transfer unit which is provided below the powder collection unit, and which transfers the powder separated out by the powder collection unit; and a powder collection unit which is detachably connected to the powder transfer unit, and which collects and stores the powder transferred by the powder transfer unit.

Description

Reaction by-product capture device

[0001] The present invention relates to a reaction by-product collection device. More specifically, the present invention relates to a reaction by-product collection device capable of effectively removing solidified powder of semiconductor process by-products by heating exhaust gas, which is a semiconductor process by-product.

[0002]

[0003] In general, semiconductor devices can be manufactured by repeatedly performing a number of processes centered on depositing thin films and etching the thin films on a semiconductor substrate such as a wafer to form a circuit pattern having set characteristics, and then dicing and packaging the circuit pattern into chip units.

[0004] At this time, a unit process involving a chemical reaction, such as the deposition or etching process, supplies various gases including a source gas and a carrier gas to a process chamber and controls the internal environment of the chamber, thereby forming a thin film of an appropriate thickness on the substrate through a chemical reaction or performing an etching process on the formed thin film.

[0005] At this time, reaction by-products generated as a result of the chemical reaction and unreacted residual gases that did not participate in the reaction are generated as process by-products and are discharged outside the process chamber in the form of exhaust gas whenever a unit process is completed.

[0006] Exhaust gas is composed of toxic gases that can cause environmental pollution or harm the human body. Therefore, it is transported to a scrubber device to purify the exhaust gas into gases that are harmless to the environment or human health. The scrubber device purifies the transported exhaust gas into gases that are harmless to the human body and do not cause environmental pollution, and then disposes of the exhaust gas or releases it into the atmosphere.

[0007] Accordingly, a piping structure is connected to the lower portion of the process chamber to transport the exhaust gas to a scrubber device. For example, depending on the purification capacity of the scrubber device, a plurality of process chambers may be connected to a single scrubber device via the piping structure.

[0008] At this time, the exhaust gas discharged at a high temperature and high pressure is exposed to a low temperature and low pressure environment as it is discharged through a pipe placed in the atmosphere. Accordingly, the exhaust gas flowing inside the pipe partially precipitates, forming a powder that accumulates inside the pipe. The powder blocks the inside of the pipe, hindering the flow of exhaust gas, preventing the discharge of the process byproducts and causing them to flow back into the process chamber, contaminating the substrate on which the process has been completed.

[0009] Accordingly, the above pipe structure is provided with a powder collection device for collecting and removing powder accumulated within the pipes. The powder collection device is arranged in the middle of the pipes to remove powder from exhaust gas flowing along the pipes.

[0010] Conventional powder collection devices have been developed to increase collection efficiency by expanding the contact area with the exhaust gas without considering the flow characteristics of the exhaust gas. However, this increased contact area, coupled with the dense arrangement of contact elements that come into contact with the exhaust gas, has resulted in rapid saturation of the powder, shortening the replacement cycle of the collection device.

[0011] In addition, since the capture efficiency may decrease after a certain amount of by-products is captured in the by-product capture device, it is necessary to remove the by-products captured within the device. However, as the amount of by-products to be captured increases, the task of removing the by-products captured within the device may become cumbersome.

[0012]

[0013] The present invention provides a reaction by-product capturing device capable of efficiently capturing powder from exhaust gas and improving capturing efficiency and replacement.

[0014]

[0015] According to one aspect of the present invention, a reaction by-product collecting device for collecting powder from exhaust gas, which is a reaction by-product of a semiconductor process, is provided, comprising: a powder collecting unit for precipitating the powder from the exhaust gas and separating and dropping the precipitated powder; a powder transfer unit installed at a lower portion of the powder collecting unit for transferring the powder separated from the powder collecting unit; and a powder collection unit detachably connected to the powder transfer unit for collecting and storing the powder transferred by the powder transfer unit.

[0016] At this time, a valve unit for opening and closing a connection path between the powder transfer unit and the powder collection unit may be further included to control movement of the exhaust gas and the powder between the powder transfer unit and the powder collection unit.

[0017] At this time, the valve unit may further include a first valve that is arranged on the powder transfer unit side of the connection path and can be opened and closed independently, and a second valve that is arranged between the first valve and the powder collection unit of the connection path and can be opened and closed independently.

[0018] At this time, when the powder collection unit is separated, the first valve and the second valve in the valve unit are separated from each other in a closed state, and the first valve is coupled to the powder transfer unit side to seal the powder transfer unit so as to prevent leakage of the exhaust gas and the powder from the powder transfer unit, and the second valve is coupled to the powder collection unit side to seal the powder collection unit so as to prevent leakage of the exhaust gas and the powder from the powder transfer unit.

[0019] In addition, the powder collection unit may include a powder collection container having an inlet formed at the top for introducing the powder transferred to the powder transfer unit, a storage space for storing the powder, and a powder distribution unit having a rotating body installed in the storage space of the powder collection container and rotating to disperse the powder stored in the storage space.

[0020] In addition, the powder transfer unit may include a transfer pipe having one end connected to the powder collection unit and a transfer screw extending from below the powder collection unit to the transfer pipe and rotating to transfer powder separated from the powder collection unit to the transfer pipe.

[0021] At this time, the powder transfer unit may further include a powder receiving container installed below the powder collecting unit, which receives the powder separated from the powder collecting unit inside, and has the transfer screw installed at the bottom.

[0022] The above powder receiving container may include an inclined wall slanted downward toward the conveying screw so that the powder received therein is moved to the conveying screw, and an exhaust hole may be formed to discharge the exhaust gas introduced therein.

[0023]

[0024] According to an embodiment of the present invention, the reaction by-products to be captured can be dropped into powder (in powder form) and the captured powder can be discharged through a powder collection unit that is separately separated and replaced, so that the amount of reaction by-products captured in the powder collection unit at one time can be maximized and the replacement cycle of the powder collection unit can be extended as much as possible.

[0025] In addition, when separating the powder collection unit for processing the collected powder, it is possible to prevent toxic exhaust gases and powder from leaking to the outside.

[0026]

[0027] Figures 1 and 2 are drawings showing a reaction by-product capture device according to one embodiment of the present invention.

[0028] Figure 3 is a drawing showing a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0029] FIG. 4 and FIG. 5 are drawings showing the first housing of the powder collection unit in the reaction by-product collection device according to one embodiment of the present invention.

[0030] FIGS. 6 to 8 are drawings showing a powder collecting plate of a powder collecting unit in a reaction by-product collecting device according to one embodiment of the present invention.

[0031] FIG. 9 is a drawing showing a scraper of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0032] FIG. 10 and FIG. 11 are drawings showing a heater block of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0033] Fig. 12 is a drawing showing a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0034] FIG. 13 and FIG. 14 are drawings showing a second housing of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0035] FIGS. 15 to 18 are drawings showing a cover member and a collection tower of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0036] FIG. 19 is a drawing showing a driving control unit and a heater control unit in a reaction by-product capture device according to one embodiment of the present invention.

[0037] FIG. 20 and FIG. 21 are drawings showing a reaction by-product capture device according to another embodiment of the present invention.

[0038] Figure 22 is a drawing showing the movement of exhaust gas and powder in a reaction by-product capture device according to another embodiment of the present invention.

[0039] Figures 23 and 24 are drawings showing a powder transfer unit in a reaction by-product collection device according to another embodiment of the present invention.

[0040] Figures 25 and 26 are drawings showing a powder collection unit in a reaction by-product collection device according to another embodiment of the present invention.

[0041] Fig. 27 is a drawing showing a valve section in a reaction by-product collection device according to another embodiment of the present invention.

[0042]

[0043] The present invention is susceptible to various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, but rather to encompass all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present invention. In describing the present invention, detailed descriptions of related known technologies will be omitted if they are deemed to obscure the gist of the present invention.

[0044] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. In describing with reference to the attached drawings, identical or corresponding components are assigned the same drawing numbers, and redundant descriptions thereof will be omitted.

[0045] FIG. 1 and FIG. 2 are drawings showing a reaction by-product collection device according to one embodiment of the present invention.

[0046] Referring to FIGS. 1 and 2, a reaction by-product collection device (1000) according to one embodiment of the present invention includes a powder collection unit (1100) and a powder collection unit (1200).

[0047] The reaction by-product collection device (1000) of this embodiment is connected to a process chamber (not shown) that performs a unit process for semiconductor manufacturing, and is disclosed as a device that collects powder from exhaust gas, which is a reaction by-product of the semiconductor process.

[0048] After being introduced into the reaction by-product collection device (1000), the powder dissolved in the exhaust gas is precipitated, and the exhaust gas from which the powder has been precipitated is discharged from the reaction by-product collection device (1000). Thereafter, the exhaust gas may be supplied from the process chamber to a vacuum pump device and then continuously supplied to a piping structure connected to a scrubber device. Accordingly, the exhaust gas discharged from the process chamber may be ultimately transported to the scrubber device and purified.

[0049]

[0050] The powder collection unit (1100) precipitates powder from exhaust gas.

[0051] FIG. 3 is a drawing showing a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0052] Referring to FIG. 3, the powder collection unit (1100) of the present embodiment may include a first housing (1110), an inlet pipe (1116), a powder collection plate (1120), and a scraper (1130, see FIG. 6).

[0053]

[0054] The first housing (1110) has a first internal space (1112) through which exhaust gas passes, and an inlet pipe (1116) is installed in the first housing (1110) and forms a path for introducing exhaust gas into the first internal space (1112).

[0055] FIG. 4 and FIG. 5 are drawings showing the first housing of the powder collection unit in the reaction by-product collection device according to one embodiment of the present invention.

[0056] Referring to FIGS. 4 and 5, in the first housing (1110) of the present embodiment, exhaust gas can be introduced into the first internal space (1112) through the inlet pipe (1116). In addition, a powder collecting plate (1120) and a scraper (1130) are installed in the first internal space (1112) to precipitate and separate powder from the exhaust gas.

[0057] The first housing (1110) of this embodiment can be configured by combining a housing upper body (1111) and a housing cover (1115).

[0058] Referring to Fig. 4, the housing upper body (1111) of the present embodiment has a first internal space (1112) through which powder can be precipitated by the introduced exhaust gas. The housing upper body (1111) of the present embodiment constitutes the overall exterior of the powder collection unit (1100) and can be combined with a housing cover (1115) to block the first internal space (1112) from the outside.

[0059] A second housing (1210) is placed and combined at the bottom of the first housing (1110), so that the first internal space (1112) of the first housing (1110) can be provided as a sealed space separated from the outside.

[0060] The housing upper body (1111) may be provided in various shapes depending on the situation and environment in which the powder is collected. In the present embodiment, the housing upper body (1111) is provided in an oval-shaped cylinder shape. The housing upper body (1111) of the present embodiment may have an outer wall in the shape of an oval-shaped cylinder. However, it is obvious that the shape of the housing upper body (1111) is not limited to an oval-shaped cylinder.

[0061] Referring to FIG. 5, the housing cover (1115) is coupled to the upper portion of the housing upper body (1111) and has an inlet pipe (1116) installed therein for introducing exhaust gas. In this embodiment, the exhaust gas can be introduced into the interior of the housing upper body (1111) through the inlet pipe (1116) provided in the housing cover (1115).

[0062] The housing cover (1115) of this embodiment has a size and shape corresponding to the upper part of the housing upper body (1111) and has a coupling means that can be detachably coupled to the upper part of the housing upper body (1111), and can be connected to or separated from the housing upper body (1111) by operating the coupling means.

[0063] At this time, the inlet pipe (1116) may be provided to penetrate the housing cover (1115). For example, the inlet pipe (1116) of the present embodiment may be installed vertically on the upper portion of the first housing (1110) and may penetrate the housing cover (1115).

[0064] Accordingly, the exhaust gas is supplied to the interior of the housing upper body (1111) by penetrating the housing cover (1115), and the housing cover (1115) and the housing upper body (1111) are sufficiently sealed to prevent the exhaust gas inside the housing upper body (1111) from leaking to the outside.

[0065]

[0066] The powder collection plate (1120) is installed in the first internal space (1112) and extracts powder from exhaust gas. The powder collection plate (1120) of the present embodiment is a plate-shaped member, and when it comes into contact with heated exhaust gas, reaction byproducts from the exhaust gas can be attached in the form of powder on both sides.

[0067] FIGS. 6 to 8 are drawings showing a powder collecting plate of a powder collecting unit in a reaction by-product collecting device according to one embodiment of the present invention.

[0068] Referring to FIGS. 2 and 6 to 8, the powder collection plate (1120) of the present embodiment may be rotatably installed in the first internal space (1112). At this time, a driving unit (1150) for rotating the powder collection plate (1120) may be further included. At this time, the driving unit (1150) may include a rotation shaft (1125) that is vertically coupled to the powder collection plate (1120) and rotatably installed vertically in the first housing (1110), and a motor (1155) for rotating the rotation shaft (1125).

[0069] Referring to FIGS. 2 and 3, the rotation shaft (1125) is installed by penetrating the housing cover (1115) through a through hole (1117, see FIG. 5) of the housing cover (1115), and the upper end of the rotation shaft (1125) can be rotatably supported by the housing cover (1115). For example, a shaft support member (1126) that is coupled to the rotation shaft (1125) and supported by the housing cover (1115) can be coupled to the upper end of the rotation shaft (1125) that penetrates the housing cover (1115).

[0070] Referring to FIGS. 7 and 8, the lower end of the rotation shaft (1125) may be rotatably supported by a support member (1128). For example, a first support tab (1113) protruding from the inside of the first housing (1110) may be formed, and a rod-shaped support member (1128) that crosses the inside of the first housing (1110) may be coupled to the first support tab (1113) using a bracket (1129). At this time, the lower end of the rotation shaft (1125) may be rotatably connected and supported by being fitted into a hole formed in the support member (1128).

[0071] In addition, referring to FIG. 2, a motor (1155) is installed on the upper portion of the housing cover (1115), and the motor (1155) can be connected to a rotational shaft (1125) to transmit rotational force. For example, a stepper motor (1155) is installed on the upper portion of the housing cover (1115), and the stepper motor (1155) can be connected to a speed controller such as a reducer (1160). The reducer (1160) of the present embodiment is coupled to the upper portion of the rotational shaft (1125), so that the rotational force of the stepper motor (1155) can be transmitted to the rotational shaft (1125) through the reducer (1160). Accordingly, the powder collection plate (1120) in the first internal space (1112) can receive rotational force from the motor (1155) and rotate.

[0072] In particular, the powder collection plate (1120) of the present embodiment may be provided with a plurality of pieces. At this time, a plurality of rotation shafts (1125) are also provided, and a plurality of powder collection plates (1120) may be installed in a divided manner.

[0073] Referring to FIGS. 6 to 8, in the present embodiment, a pair of rotational axes (1125) may be installed in parallel. Two powder collection plates (1120) may be installed on each rotational axle (1125), so that four powder collection plates (1120) may be divided and combined on one pair of rotational axes (1125). The powder collection plates (1120) have a disc-shaped structure, and the center of the disc may be combined with the rotational axle (1125).

[0074] At this time, a plurality of powder collecting plates (1120) rotating on different rotation axes (1125) may have a structure in which they are partially overlapped with each other. In the present embodiment, between a pair of rotation axes (1125), disc-shaped powder collecting plates (1120) coupled to each rotation axle (1125) may overlap with each other. For example, a powder collecting plate (1120) coupled to one rotation axle (1125) may be overlapped with a structure in which a powder collecting plate (1120) coupled to another rotation axle (1125) is stacked with a predetermined interval therebetween. That is, between a pair of rotation axes (1125), a plurality of powder collecting plates (1120) may have a structure in which they are stacked with a predetermined interval therebetween in a partially overlapped form.

[0075] At this time, the overlapping portion of the plurality of powder collecting plates (1120) may be arranged below the inlet pipe (1116). Accordingly, the exhaust gas introduced from the inlet pipe (1116) may pass in a zigzag pattern between the plurality of powder collecting plates (1120) that are partially overlapped with each other. In addition, since the plurality of powder collecting plates (1120) rotate when the exhaust gas passes, the entire surface of each powder collecting plate (1120) may evenly come into contact with the exhaust gas, and powder may evenly be deposited on the surface.

[0076] In addition, an exhaust hole (1122) and a distribution hole (1123) smaller than the exhaust hole (1122) may be formed in the powder collecting plate (1120). Accordingly, the exhaust gas may be distributed by passing through the exhaust hole (1122) and the distribution hole (1123), and may sequentially pass through a structure in which a plurality of powder collecting plates (1120) are stacked. For example, a plurality of fan-shaped exhaust holes (1122) may be formed in a circular powder collecting plate (1120) and arranged to be divided at a certain angle. Small circular distribution holes (1123) may be formed between the fan-shaped exhaust holes (1122). At this time, in the powder collecting plates (1120) that are vertically coupled to one rotation axis (1125), the fan-shaped exhaust holes (1122) may be arranged to be vertically misaligned with each other. Accordingly, when the exhaust gas flows from top to bottom while being dispersed, the rate at which the exhaust gas passing through the upper exhaust hole (1122) contacts the surface of the powder collection plate (1120) below can increase.

[0077] In addition, when a plurality of powder collecting plates (1120) rotate, the exhaust holes (1122) may have a structure in which they overlap in an area where the plurality of powder collecting plates (1120) overlap. That is, when the overlapping portion of the plurality of powder collecting plates (1120) is arranged below the inlet pipe (1116), the exhaust holes (1122) overlap to form a path through which the exhaust gas passes. When the exhaust holes (1122) overlap, the exhaust gas can quickly flow into the space between the plurality of powder collecting plates (1120).

[0078] At this time, since the plurality of powder collecting plates (1120) are continuously rotated, after the exhaust holes (1122) overlap, the portions between the exhaust holes (1122) overlap, and the path through which the exhaust gas passes is opened and then closed again. Accordingly, the portion where the plurality of powder collecting plates (1120) overlap may have a structure in which the exhaust holes (1122) overlap and open, and the exhaust holes (1122) pass through.

[0079]

[0080] The scraper (1130) separates the powder from the powder collecting plate (1120) in powder form and removes it.

[0081] FIG. 9 is a drawing showing a scraper of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0082] Referring to FIGS. 6 and 9, the scraper (1130) of the present embodiment may be formed in a rod shape that is placed on a rotating powder collecting plate (1120) to contact and separate powder deposited on the surface. The rod-shaped scraper (1130) may be placed in contact with the surface of the powder collecting plate (1120) or spaced apart from the surface at a predetermined interval. Accordingly, when the powder collecting plate (1120) rotates, the powder deposited on the surface of the powder collecting plate (1120) may be scraped by the rod-shaped scraper (1130) and separated into powder form, and may fall down.

[0083] At this time, a plurality of rod-shaped scrapers (1130) are provided, and the plurality of scrapers (1130) can be supported by being coupled to a support rod (1132). For example, a second support tab (1114) protruding from the inside of the first housing (1110) is formed, and the support rod (1132) can be vertically coupled to the second support tab (1114). One end of the plurality of scrapers (1130) can be coupled to the support rod (1132), and the other end can be extended to the powder collection plate (1120).

[0084]

[0085] Referring to FIG. 2, the powder collection unit (1100) of the present embodiment may further include a heater block (1180) disposed below the inlet pipe (1116) to heat the exhaust gas.

[0086] FIG. 10 and FIG. 11 are drawings showing a heater block of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0087] Referring to FIGS. 2, 10 and 11, the heater block (1180) of the present embodiment may include a heater base (1182), a plurality of dispersion blades (1184) and a heater (1185).

[0088] The heater base (1182) of the present embodiment has a plate-shaped structure positioned below the inlet pipe (1116). At this time, the center portion may be positioned to align with the central axis of the inlet pipe (1116). Accordingly, exhaust gas may be supplied to the center portion of the heater base (1182) and heated.

[0089] In addition, a plurality of dispersion blades (1184) are arranged on the upper surface of the heater base (1182) so that the exhaust gas can be radially dispersed along the dispersion blades (1184). The dispersion blades (1184) are arranged radially from the center of the heater base (1182) toward the periphery, so that the exhaust gas supplied to the center of the heater base (1182) can change its flow direction from vertical to horizontal along the dispersion blades (1184). Accordingly, the exhaust gas supplied through the inlet pipe (1116) changes from vertical flow to horizontal flow by the dispersion blades (1184).

[0090] A heater (1185) can be coupled to the upper surface of a heater base (1182) to heat the heater base (1182). At this time, the heater (1185) can be provided with a plurality of ring members (1186) that are formed with a through hole (1187) formed vertically in the center thereof and are stacked vertically, and a heating wire (1189) arranged between the plurality of ring members (1186). The plurality of ring members (1186) are connected to each other by a connecting member (1188) while being spaced apart from each other, so that the heat of the heating wire (1189) can be evenly transferred to the plurality of ring members (1186) through the connecting member (1188). Accordingly, when exhaust gas flows into the upper surface of the heater base (1182), it flows into the through hole (1187) and can be quickly heated by the heating wire (1189) and the plurality of ring members (1186).

[0091] In addition, the heater (1185) is in contact with the heater base (1182), and when the heater base (1182) is heated, not only the heater base (1182) but also the dispersion blades (1184) on the upper surface of the heater base (1182) can be heated. Accordingly, the space between the housing cover (1115) and the heater base (1182) is sufficiently heated by heat, so that the exhaust gas supplied through the inlet pipe (1116) can be quickly heated to a temperature required for a chemical reaction.

[0092] As the temperature of the exhaust gas increases, powder deposition can be promoted through chemical reactions between substances contained in the exhaust gas. Accordingly, the powder deposition efficiency can be increased by heating the heater base (1182).

[0093] Accordingly, exhaust gas supplied vertically toward the center of the heater base (1182) through the inlet pipe (1116) is dispersed into a horizontal flow in a 360-degree direction by the dispersion blade (1184) and can flow downward with high uniformity in the housing body.

[0094]

[0095] The powder collection unit (1200) collects powder that has been precipitated from the powder collection unit (1100) and separated in powder form. The powder collection unit (1200) is positioned below the powder collection unit (1100) and may have a structure that is detachably connected to the powder collection unit (1100).

[0096] FIG. 12 is a drawing showing a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0097] The powder collection unit (1200) of the present embodiment may include a second housing (1210) that is detachably coupled to the lower portion of the first housing (1110). The second housing (1210) has a second internal space (1212) arranged below the first internal space (1112). At this time, the first housing (1110) may have a structure that is open downwards, and the second housing (1210) may have a structure that is open upwards. Accordingly, when the second housing (1210) is coupled to the lower portion of the first housing (1110), the first internal space (1112) and the second internal space (1212) may be connected to a single space.

[0098] Additionally, the powder collection unit (1200) may be equipped with a discharge pipe (1216) that discharges exhaust gas from the second housing (1210).

[0099] Accordingly, the powder that is precipitated and separated from the powder collection unit (1100) and falls downward can be collected in the second internal space (1212) of the powder collection unit (1200). In addition, the second housing (1210) can be separated from the first housing (1110), and the powder collected by accumulating in powder form in the second housing (1210) can be processed.

[0100] In this embodiment, the powder collection unit (1100) positioned at the top can precipitate reaction by-products, separate them in powder form, and drop them downward, and the powder collection unit (1200) positioned at the bottom can collect the reaction by-products by depositing them in powder form. This method can maximize the amount of reaction by-products collected at once by the powder collection unit (1200), thereby maximizing the replacement cycle of the powder collection unit (1200).

[0101]

[0102] FIG. 13 and FIG. 14 are drawings showing a second housing of a powder collection unit in a reaction by-product collection device according to one embodiment of the present invention.

[0103] Referring to FIGS. 12 to 14, the second housing (1210) of the present embodiment can be configured by combining a housing lower body (1211) and a housing support (1215).

[0104] Referring to Fig. 13, the housing lower body (1211) of the present embodiment has a second internal space (1212) to accommodate precipitated powder. The housing lower body (1211) of the present embodiment constitutes the overall exterior of the powder collection unit (1200) and can be combined with the housing support (1215) to block the second internal space (1212) from the outside.

[0105] Since the second housing (1210) is placed and coupled to the bottom of the first housing (1110), the second internal space (1212) of the second housing (1210) can be provided as a sealed space that is connected to the first internal space (1112) and separated from the outside.

[0106] The housing lower body (1211) may be provided in various shapes depending on the situation and environment in which the powder is collected. In the present embodiment, the housing lower body (1211) is provided in a rectangular cylindrical shape. The housing lower body (1211) of the present embodiment may have an outer wall in the shape of a rectangular cylinder. However, it is obvious that the shape of the housing lower body (1211) is not limited to a rectangular cylindrical shape.

[0107] The housing support (1215) is coupled to the lower part of the housing lower body (1211) and has an exhaust pipe (1216) for discharging exhaust gas from the housing lower body (1211). The housing support (1215) is coupled to the lower part of the housing lower body (1211) and provides the second internal space (1212) as a sealed space separated from the outside.

[0108] A discharge pipe (1216) is arranged in the housing support (1215) so that exhaust gas can be discharged to the outside of the housing lower body (1211). For example, a discharge pipe (1216) may be installed through the center of the housing support (1215), and a pipe structure connected to a vacuum pump (not shown) or a scrubber device that applies vacuum pressure to discharge exhaust gas from the process chamber may be connected to the discharge pipe (1216).

[0109] Referring to FIG. 14, the housing support (1215) may further include a support member (1218) that is fixed to and supports the lower surface. In addition, a wheel (1219) for easy movement may be installed at the end of the support member (1218).

[0110]

[0111] Meanwhile, the powder collection unit (1200) of the present embodiment may further include a cover member (1220) that prevents powder from flowing into the discharge pipe (1216).

[0112] FIGS. 15 to 18 are drawings showing a cover member (1220) of a powder collection unit and a collection tower in a reaction by-product collection device according to one embodiment of the present invention.

[0113] Referring to FIGS. 15 and 16, in the present embodiment, the discharge pipe (1216) may be installed vertically on the bottom of the second housing (1210). For example, the discharge pipe (1216) may be installed vertically by penetrating the center of the housing support (1215). At this time, the discharge pipe (1216) arranged vertically has an upwardly open structure, and a cover member (1220) may be arranged on the upper portion of the discharge pipe (1216) to prevent powder from flowing into the discharge pipe (1216). The cover member (1220) may be formed in a cone-like structure and may cover the discharge pipe (1216) such that the upper portion of the discharge pipe (1216) is arranged inside (1221). Accordingly, the problem of powder falling from above in the form of powder flowing into the discharge pipe (1216) may be prevented. On the other hand, since the exhaust gas is in a gaseous state, it can flow into the inside of the cover member (1220) and be discharged to the outside through the exhaust pipe (1216).

[0114] At this time, the side of the cover member (1220) may further include a protruding plate (1222) coupled with a structure that protrudes outward. The protruding plate (1222) may be contacted by the exhaust gas flowing into the cover member (1220) to cause additional powder to be precipitated.

[0115]

[0116] In addition, the powder collection unit (1200) of the present embodiment may further include a collection tower (1230) that additionally precipitates powder in the second housing (1210). The collection tower (1230) is installed at the bottom of the second housing (1210) and can precipitate powder from exhaust gas in the second internal space (1212).

[0117] Referring to FIGS. 15, 17, and 18, the collection tower (1230) of the present embodiment may be composed of a first flat member (1232) and a second flat member (1234) that are perpendicular to each other. The first flat member (1232) and the second flat member (1234) have a plate-shaped structure and may be vertically arranged on the upper surface of the housing support (1215).

[0118] For example, a plurality of first flat plate members (1232) may be vertically arranged parallel to each other in a first direction (1D1), and a plurality of second flat plate members (1234) may be vertically arranged parallel to each other in a second direction (1D2) perpendicular to the first direction. At this time, a plurality of second flat plate members (1234) may be connected by inserting a plurality of first flat plate members (1232), so that a plurality of second flat plate members (1234) and a plurality of first flat plate members (1232) may form a single structure. At this time, a discharge pipe (1216) may be discharged through the center of the structure formed of the first flat plate members (1232) and the second flat plate members (1234). Accordingly, the exhaust gas heading to the exhaust pipe (1216) comes into contact with the first flat plate member (1232) and the second flat plate member (1234), so that powder may be additionally deposited on the first flat plate member (1232) and the second flat plate member (1234). In addition, a plurality of through holes (1233, 235) may be formed in the first flat plate member (1232) and the second flat plate member (1234) so ​​that the exhaust gas may flow smoothly.

[0119] The exhaust gas flowing into the capture tower (1230) while heading to the exhaust pipe (1216) passes between the structures formed by the first flat plate member (1232) and the second flat plate member (1234), and may repeatedly collide with the first flat plate member (1232) and the second flat plate member (1234) to form a vortex. The contact area between the capture tower (1230) and the exhaust gas increases, and the flow velocity of the exhaust gas decreases due to the characteristics of the vortex, so that powder can be sufficiently deposited on the surface (1 capture surface) of the capture tower (1230). Accordingly, the efficiency of the reaction by-product capture device (1000) can be further increased by increasing the precipitation efficiency for precipitating powder from the exhaust gas.

[0120]

[0121] Meanwhile, the reaction by-product capture device of the present embodiment may further include a driving control unit that controls the operation of the driving unit.

[0122] Referring to FIG. 1, in the present embodiment, the motor (1155, see FIG. 2) of the driving unit (1150) that provides rotational force to rotate the powder collecting plate (1120) is electrically connected to the driving control unit (1300) so that its operation can be controlled. For example, the driving control unit (1300) can control the rotational speed, rotational interval, and rotational force (torque) of the motor (1155). At this time, the driving control unit (1300) can measure the rotational force at which the motor (1155) operates. By measuring the rotational force of the motor (1155) by the driving control unit (1300), the driving control unit (1300) can check whether the rotational force of the motor (1155) is normally provided and determine whether the powder collecting unit (1100) is operating normally. For example, if the rotational force of the motor (1155) is provided abnormally large, it can be predicted that a problem has occurred in the powder collection plate (1120) or the rotation shaft (1125) of the powder collection unit (1100). If an abnormality is determined in the operation of the powder collection unit (1100), the drive control unit (1300) can display an error on an externally attached display (1310) or generate a sound, etc. to inform the operator of the abnormal operation of the powder collection unit (1100). In addition, the drive control unit (1300) can display the rotational force of the motor (1155) on the externally attached display (1310) under normal conditions, so that the operator can monitor the status of the motor (1155).

[0123]

[0124] Meanwhile, the reaction by-product collection device (1000) of the present embodiment can also control the overall operation of the reaction by-product collection device (1000) when the powder collection unit (1100) is operating abnormally.

[0125] FIG. 19 is a drawing showing a driving control unit and a heater control unit in a reaction by-product capture device according to one embodiment of the present invention.

[0126] Referring to FIG. 19, the reaction by-product capturing device (1000) of the present embodiment may further include a heater control unit (1400) that controls the operation of the heater block (1180). At this time, not only the main body of the reaction by-product capturing device (1000) and the drive control unit (1300) may be electrically connected by signal (1N1), but also the drive control unit (1300) and the heater control unit (1400) may be electrically connected by signal (1N2), and the main body of the reaction by-product capturing device (1000) and the heater control unit (1400) may also be electrically connected by signal (1N3).

[0127] Accordingly, when the drive control unit (1300) determines that the powder collection unit (1100) is not operating properly, the drive control unit (1300) can transmit an electrical signal to the heater control unit (1400) to stop the operation of the heater block (1180). In addition, the heater control unit (1400) can transmit an electrical signal to the main body of the reaction by-product collection device (1000) to stop the operation of the heater block (1180).

[0128]

[0129] FIG. 20 and FIG. 21 are drawings showing a reaction by-product collection device according to another embodiment of the present invention, and FIG. 22 is a drawing showing the movement of exhaust gas and powder in a reaction by-product collection device according to another embodiment of the present invention.

[0130] Referring to FIGS. 20 and 21, a reaction by-product collection device (2000) according to the present embodiment is a reaction by-product collection device (2000) that collects powder from exhaust gas, which is a reaction by-product of a semiconductor process, and may include a powder collection unit (2100), a powder transport unit (2200), and a powder collection unit (2300).

[0131] The reaction by-product collection device (2000) of this embodiment is connected to a process chamber (not shown) that performs a unit process for semiconductor manufacturing, as in the above-described embodiment, and is disclosed as a device that collects powder from exhaust gas, which is a reaction by-product of the semiconductor process.

[0132] After being introduced into the reaction by-product collection device (2000), the powder dissolved in the exhaust gas is precipitated, and the exhaust gas from which the powder has been precipitated is discharged from the reaction by-product collection device (2000). Thereafter, the exhaust gas may be supplied from the process chamber to a vacuum pump device and then continuously supplied to a piping structure connected to a scrubber device. Accordingly, the exhaust gas discharged from the process chamber may be ultimately transported to the scrubber device and purified.

[0133]

[0134] The powder collection unit (2100) precipitates powder from exhaust gas and separates and drops the precipitated powder.

[0135] The powder collection unit (2100) of the present embodiment may have a structure identical or similar to that of the above-described embodiment, and may include a first housing (2110), an inlet pipe (2116), a powder collection plate (2120), and a scraper (2130). The specific configurations of the first housing (2110), the inlet pipe (2116), the powder collection plate (2120), and the scraper (2130) may be identical or similar to that of the above-described embodiment.

[0136] In addition, the powder collection unit (2100) of the present embodiment may further include a heater block (not shown) that is positioned below the inlet pipe (2116) and heats the exhaust gas, similar to or identical to the embodiment described above. The specific configuration of the heater block may be similar to or identical to the embodiment described above.

[0137]

[0138] The powder transfer unit (2200) is installed below the powder collection unit (2100) and transfers powder separated from the powder collection unit (2100).

[0139] Referring to FIGS. 21 and 22, powder is precipitated from exhaust gas in the powder collection unit (2100), and the precipitated powder can be separated and dropped. The powder separated from the powder collection unit (2100) can fall downwards in powder form by gravity. Since the powder transfer unit (2200) of the present embodiment is positioned below the powder collection unit (2100), the powder falling from the powder collection unit (2100) can be supplied to the powder transfer unit (2200).

[0140] The powder transfer unit (2200) of the present embodiment may include a second housing (2210) that is detachably coupled to the lower portion of the first housing (2110). The second housing (2210) has a second internal space (2212) disposed below the first internal space (2112). At this time, the first housing (2110) may have a structure that is open downwards, and the second housing (2210) may have a structure that is open upwards. Accordingly, when the second housing (2210) is coupled to the lower portion of the first housing (2110), the first internal space (2112) and the second internal space (2212) may be connected to one space. Accordingly, powder that is precipitated and separated in the powder collection unit (2100) and falls downwards may fall in the form of powder into the second internal space (2212) of the second housing (2210).

[0141] Additionally, the powder transfer unit (2200) may be equipped with an exhaust pipe (2216) that discharges exhaust gas from the second housing (2210).

[0142] FIG. 23 and FIG. 24 are drawings showing a powder transfer unit (2200) in a reaction by-product collection device (2000) according to another embodiment of the present invention.

[0143] Referring to FIGS. 22 and 23, the powder transfer unit (2200) of the present embodiment may include a transfer pipe (2220) and a transfer screw (2230).

[0144] The transfer pipe (2220) has a tubular structure and one end is connected to a powder collection unit (2300) to be described later. Accordingly, powder can be transferred from the second housing (2210) to the powder collection unit (2300) through the internal path formed by the transfer pipe (2220). The other end of the transfer pipe (2220) of the present embodiment is connected to the interior of the second housing (2210), and the transfer pipe (2220) may have a structure that protrudes from the side surface of the second housing (2210).

[0145] The conveying screw (2230) conveys powder by rotating a shaft with spiral-shaped blades. The conveying screw (2230) of the present embodiment may have a structure that is arranged below the powder collecting unit (2100) and extends to the conveying pipe (2220). Accordingly, when powder is separated and falls from the powder collecting unit (2100), the conveying screw (2230) arranged below the powder collecting unit (2100) can convey the powder to the conveying pipe (2220). Since the powder collecting unit (2300) is connected to one end of the conveying pipe (2220), the powder conveyed to the conveying pipe (2220) by the conveying screw (2230) can be supplied to the powder collecting unit (2300).

[0146] The powder transfer unit (2200) of the present embodiment may further include a powder receiving container (2240) that receives powder therein and has a transfer screw (2230) installed at the bottom.

[0147] Referring to FIGS. 23 and 24, the powder receiving container (2240) of the present embodiment is formed concavely and can be installed below the powder collecting unit (2100). Accordingly, powder separated and falling from the powder collecting unit (2100) can be collected within the concave interior of the powder receiving container (2240). At this time, since a transfer screw (2230) is installed at the bottom of the powder receiving container (2240), the powder collected at the bottom of the powder receiving container (2240) can be effectively transferred by the transfer screw (2230).

[0148] In addition, the powder receiving container (2240) may further include an inclined wall (2242) that is inclined downward toward the conveying screw (2230) so that the powder received therein is moved to the conveying screw (2230), and an exhaust hole (2244) that discharges exhaust gas introduced therein may be formed.

[0149] Referring to FIGS. 22 to 24, the inclined wall (2242) of the present embodiment is inclined downward from the side toward the center of the powder receiving container (2240), and a transfer screw (2230) may be arranged at the lower end of the inclined wall (2242). Accordingly, the powder (P) that has fallen into the interior of the powder receiving container (2240) may meet the inclined wall (2242) and be collected along the inclined wall (2242) to the transfer screw (2230) arranged on the floor.

[0150] Meanwhile, a discharge hole (2244) penetrating through the side of the powder container (2240) may be formed. Accordingly, when exhaust gas (G) descends together with powder (P) and flows into the powder container (2240), only the exhaust gas (G) can exit the powder container (2240) through the discharge hole (2244). The exhaust gas (G) flowing out through the discharge hole (2244) of the powder container (2240) can be discharged to the outside through the discharge pipe (2216).

[0151]

[0152] The powder collection unit (2300) is detachably connected to the powder transfer unit (2200), and powder transferred by the powder transfer unit (2200) is collected and stored.

[0153] Referring to FIGS. 21 and 23, the powder collection unit (2300) of the present embodiment may be arranged below the transfer pipe (2220) of the powder transfer unit (2200) and may have a structure that is detachably connected to one end of the transfer pipe (2220).

[0154] Accordingly, when the powder collection unit (2100) precipitates the reaction by-products and separates them into powder form and drops them down, the powder transfer unit (2200) transfers the fallen powder, so that the reaction by-products can be collected by being deposited in powder form in the powder collection unit (2300).

[0155]

[0156] FIG. 25 and FIG. 26 are drawings showing a powder collection unit (2300) in a reaction by-product collection device (2000) according to another embodiment of the present invention.

[0157] Referring to FIGS. 25 and 26, the powder collection unit (2300) of the present embodiment may include a powder collection bin (2310) having an inlet (2315) formed at the top through which powder transferred to the powder transfer unit (2200) flows in, and a storage space formed to store powder.

[0158] The powder collection container (2310) may be provided with a storage space to accommodate the precipitated powder. The powder collection container (2310) may be configured by combining a collection container body (2312) and a collection container cover (2314). The collection container body (2312) has an internally hollow shape to form a storage space, and a collection container cover (2314) may be combined with the collection container body (2312) to block the storage space from the outside.

[0159] In the powder collection container (2310) of the present embodiment, an inlet (2315) penetrating through the collection container cover (2314) may be formed. The inlet (2315) of the powder collection container (2310) is connected to a transfer pipe (2220) of a powder transfer unit (2200), so that powder can be supplied to the storage space of the powder collection container (2310) through the inlet (2315).

[0160] Meanwhile, the collection container body (2312) may further include a support member (2313) that is fixed to the lower surface and supports it. In addition, a wheel may be installed at the end of the support member for easy movement.

[0161] Referring to FIGS. 25 and 26, the powder collection unit (2300) of the present embodiment may further include a powder distribution unit (2320) installed in the storage space of the powder collection bin (2310). The powder distribution unit (2320) may be provided with a rotating body (2322) that rotates to distribute the powder stored in the storage space. The powder distribution unit (2320) may be installed in the collection bin cover (2314). A rotating body (2322) having a rod or propeller structure may be rotatably installed on the lower surface of the collection bin cover (2314). In addition, a driving unit (2324) that rotates the upper surface rotating body (2322) of the collection bin cover (2314) may be installed. Accordingly, when powder is supplied through the inlet (2315), the powder distribution unit (2320) can evenly distribute and deposit the supplied powder in the storage space.

[0162]

[0163] Meanwhile, the reaction by-product collection device (2000) of the present embodiment may further include a valve unit (2400) that opens and closes a connection path between the powder transfer unit (2200) and the powder collection unit (2300). The valve unit (2400) is interposed between the powder transfer unit (2200) and the powder collection unit (2300), and can control the movement of exhaust gas and powder between the powder transfer unit (2200) and the powder collection unit (2300).

[0164] FIG. 27 is a drawing showing a valve unit (2400) in a reaction by-product collection device (2000) according to another embodiment of the present invention.

[0165] Referring to FIG. 27, the valve unit (2400) of the present embodiment may further include a first valve (2410) that is positioned on the powder transfer unit (2200) side of the connection path and can be opened and closed independently, and a second valve (2420) that is positioned between the first valve (2410) and the powder collection unit (2300) of the connection path and can be opened and closed independently.

[0166] In this embodiment, the transfer pipe (2220) of the powder transfer unit (2200) and the powder collection container (2310) of the powder collection unit (2300) may be connected to form a connection path by a connection pipe (2402). At this time, a first valve (2410) may be connected to the transfer pipe (2220) side of the connection pipe (2402), and a second valve (2420) may be connected to the powder collection container (2310) side. At this time, the first valve (2410) and the second valve (2420) may be independently opened and closed.

[0167] In particular, when the powder collection unit (2300) is separated, the valve unit (2400) may have a structure in which the first valve (2410) and the second valve (2420) are separated from each other. For example, the first valve (2410) and the second valve (2420) may be flange-coupled and detachable from each other.

[0168] Accordingly, the first valve (2410) and the second valve (2420) are separated from each other, and when separated, both the first valve (2410) and the second valve (2420) can be separated in a closed state. At this time, the first valve (2410) is coupled to the powder transfer unit (2200) side to seal the powder transfer unit (2200), thereby preventing leakage of exhaust gas and powder from the powder transfer unit (2200). In addition, the second valve (2420) is coupled to the powder collection unit (2300) side to seal the powder collection unit (2300), thereby preventing leakage of exhaust gas and powder from the powder collection unit (2300). Therefore, the reaction by-product collection device (2000) of the present embodiment can prevent toxic exhaust gases and powder from leaking to the outside when separating the powder collection unit (2300) for processing the collected powder.

[0169]

[0170] Above, the preferred embodiments of the present invention have been described, but a person having ordinary skill in the art will be able to modify and change the present invention in various ways by adding, changing, deleting or adding components, etc., within the scope that does not depart from the spirit of the present invention described in the claims, and this will also be considered to be included within the scope of the rights of the present invention.

[0171]

[0172] [Explanation of symbols]

[0173] 1000: Reaction by-product capture device

[0174] 1100: Powder collection unit

[0175] 1110: 1st Housing

[0176] 1111: Housing upper body

[0177] 1112: First interior space

[0178] 1115: Housing cover

[0179] 1116: Inlet pipe

[0180] 1120: Powder collection plate

[0181] 1122: Exhaust hole

[0182] 1123: Dispersion Hall

[0183] 1130: Scraper

[0184] 1150: Drive unit

[0185] 1125: Rotation axis

[0186] 1155: Motor

[0187] 1180: Heater block

[0188] 1182: Heater Base

[0189] 1184: Dispersion Wings

[0190] 1185: Heater

[0191] 1200: Powder collection unit

[0192] 1210: Second Housing

[0193] 1211: Housing lower body

[0194] 1212: Second interior space

[0195] 1215: Housing Support

[0196] 1216: Exhaust pipe

[0197] 1220: Cover member

[0198] 1230: Capture Tower

[0199] 1300: Drive Control Unit

[0200] 1400: Heater control unit

[0201]

[0202] 2000: Reaction By-Product Capture Device

[0203] 2100: Powder collection unit

[0204] 2110: First Housing

[0205] 2112: First Interior Space

[0206] 2116: Inlet pipe

[0207] 2120: Powder collection plate

[0208] 2130: Scraper

[0209] 2200: Powder transfer unit

[0210] 2210: Second Housing

[0211] 2212: Second interior space

[0212] 2216: Exhaust pipe

[0213] 2220: Transfer pipe

[0214] 2230: Feed screw

[0215] 2240: Powder container

[0216] 2242: Inclined wall

[0217] 2244: Exhaust hole

[0218] 2300: Powder collection unit

[0219] 2310: Powder bin

[0220] 2312: Collection bin body

[0221] 2314: Bin cover

[0222] 2315: Inlet

[0223] 2320: Powder dispersing section

[0224] 2322: Rotor

[0225] 2324: Drive Unit

[0226] 2400: Valve section

[0227] 2402: Connector

[0228] 2410: Valve 1

[0229] 2420: Second valve

Claims

1. A reaction by-product collection device that collects powder from exhaust gas, which is a reaction by-product of a semiconductor process. A powder collection unit for precipitating the powder from the exhaust gas and separating and dropping the precipitated powder; A powder transfer unit installed at the lower part of the powder collection unit and transferring the powder separated from the powder collection unit; and A reaction by-product collection device comprising a powder collection unit that is detachably connected to the powder transfer unit and collects and stores the powder transferred by the powder transfer unit.

2. In paragraph 1, A reaction by-product collection device further comprising a valve unit that opens and closes a connecting path between the powder transport unit and the powder collection unit to control movement of the exhaust gas and the powder between the powder transport unit and the powder collection unit.

3. In paragraph 2, The above valve part, A first valve disposed on the powder transfer side of the above connection path and capable of being opened and closed independently; and A reaction by-product collection device further comprising a second valve that is positioned between the first valve and the powder collection unit among the above connection paths and can be opened and closed independently.

4. In paragraph 3, When the above powder collection unit is separated, the first valve and the second valve in the valve unit are separated from each other in a closed state, In order to prevent leakage of the exhaust gas and the powder from the powder transfer unit, the first valve is coupled to the powder transfer unit side to seal the powder transfer unit. A reaction by-product collection device, wherein the second valve is coupled to the powder collection side to seal the powder collection section so as to prevent leakage of the exhaust gas and the powder from the powder collection section.

5. In paragraph 1, The above powder collection unit, A powder collection container having an inlet formed at the top for the powder transferred to the powder transfer unit to flow in and a storage space formed for storing the powder; and A reaction by-product collection device comprising a powder dispersing unit having a rotating body installed in the storage space of the powder collection bin and rotating to disperse the powder stored in the storage space.

6. In paragraph 1, The above powder transfer unit, A conveying pipe having one end connected to the powder collection unit; and A reaction by-product collection device including a transfer screw that extends from below the powder collection unit to the transfer pipe and rotates to transfer powder separated from the powder collection unit to the transfer pipe.

7. In paragraph 6, The above powder transfer unit, A reaction by-product collection device further comprising a powder receiving container installed below the powder collecting unit, the powder separated from the powder collecting unit being received therein, and the transfer screw being installed at the bottom.

8. In paragraph 7, The above powder container is, Including an inclined wall inclined downward toward the conveying screw so that the powder contained therein is moved to the conveying screw, A reaction by-product collection device having an exhaust hole formed therein for discharging the exhaust gas introduced therein.

Images