Device for measuring a mechanical load

Abstract

The invention relates to a device (10) for measuring a mechanical load (L), the device comprising: - a deformation structure (12, 12a) having a load-input region (14), a load-output region (16), and a spring region (18, 18', 18'', 18''') arranged therebetween, such that a mechanical load (L) can be transmitted through the deformation structure (12, 12a) by deformation of the spring region (18, 18', 18'', 18'''), - a mechanical displacement amplifier (20) having a displacement amplifier input (22), a transmission kinematic arrangement (24), and a displacement amplifier output (26), the transmission kinematic arrangement (24) also comprising a gauge body (28) which is arranged between the displacement amplifier input (22) and the displacement amplifier output (26) on a pivotable spring arm (30); and a sensor (40), wherein - the displacement amplifier input (22) is coupled to the load-input region (14) and the displacement amplifier output (26) is coupled to the load-output region (16) such that the displacement amplifier (20) is kinematically connected in parallel with the spring region (18, 18', 18'', 18''').

Description

[0001] Device for measuring a mechanical load.

[0002] The invention relates to a device for measuring a mechanical load.

[0003] Six-axis force-torque sensors are widely used in automation technology to determine the forces and torques acting in all directions. For example, such sensors can be used in the automatic joining or assembly of workpieces, deburring, polishing or grinding, haptic measurements, or other applications. These sensors measure the mechanical load (L) acting upon them, in particular the forces (F or Ex, Fy, Fz) and torques (M or Mx, My, Mz) in and around three coordinates (x, y, z). On the one hand, such sensors should be as rigid as possible so that they themselves do not deform due to the forces or torques. On the other hand, the highest possible resolution of the measured signals should be achievable, which is generally not possible with rigid measuring systems that, due to their stiffness, experience only small deformations.For determining forces and torques, conventional sensors use strain gauges, which can measure very small material strains. However, applying strain gauges is very complex. Furthermore, strain gauges require high signal amplification, which leads to high costs for such 6-axis force-torque sensors. If strain gauges are overloaded, the entire 6-axis force-torque sensor must be replaced, which also incurs high costs.

[0004] US Patent 8,243,024 B2 describes a device for measuring the spatial displacement of two bodies relative to each other along six axes using optical sensors. One of these bodies has a fixed position, while the second body is mounted on a movable platform and serves as an input device for a human-machine interface (HMI). The bodies are connected by springs, ensuring that the movable body always returns to its initial position. To detect a displacement, comparatively large displacements and, consequently, a low stiffness of the device are required.

[0005] German patent DE 10 2019 135 732 B4 discloses a group of lever elements arranged between two fasteners. These lever elements react to forces and torques acting between the fasteners by displacing a measuring element, which can then be measured. By measuring and evaluating these displacements, the acting forces and torques can be determined. The same lever elements perform both the task of bearing the forces and torques with a certain stiffness and the task of generating and measuring the resulting deformation. This device has the disadvantage that the entire device must be replaced in case of overload.

[0006] The object of the invention is therefore to provide an improved device for measuring a mechanical load, in particular for use in 6-axis force-torque sensors, which does not have to be completely replaced, especially in an overload case.

[0007] The problem is solved according to the invention by a device for measuring a mechanical load with the features of claim 1. Advantageous embodiments and further developments of the invention are specified in the dependent claims.

[0008] The device according to the invention for measuring a mechanical load (L) comprises the following components:

[0009] - a deformation structure with a load coupling area, a load coupling area and a spring area arranged in between, such that a mechanical load can be conducted through the deformation structure under deformation of the spring area ,

[0010] - a mechanical displacement amplifier with a displacement amplifier input, a translation kinematics and a displacement amplifier output, which are arranged kinematically in series in this order, wherein the translation kinematics further comprises a measure body which is arranged between the displacement amplifier input and the displacement amplifier output on a pivotable spring arm, as well as

[0011] - a sensor, whereby

[0012] - the displacement amplifier input is coupled to the load coupling area and the displacement amplifier output is coupled to the load coupling area, so that the displacement amplifier is kinematically connected in parallel to the spring area, and wherein

[0013] - when a mechanical load is passed through the deformation structure, a displacement of the load coupling area together with the displacement amplifier input relative to the load coupling area together with the displacement amplifier output results, thereby

[0014] - the measuring element on the spring arm performs a movement in a preferred direction relative to the sensor that corresponds to the displacement and is amplified compared to this displacement, which can be detected by means of the sensor.

[0015] The invention is based on the idea of ​​distributing the functions of load transmission and displacement measurement between two components, namely the spring section and the mechanical displacement amplifier, which offers several advantages. Firstly, a complete replacement of a device damaged by overload can be avoided if the deformation structure, which absorbs the acting force or torque, is separated from the components that measure the deformation, in particular the mechanical displacement amplifier, which at least partially absorbs the deformation of the structure and amplifies it for detection by a sensing element. This reduces or eliminates the effect of the components involved in measuring the deformation themselves undergoing deformation.The use of a mechanical displacement amplifier enables a local deflection of the measuring element that is many times greater than the displacement of the spring section, thus providing a clear measurement signal with high resolution. The spring section can be robust and rigid, capable of withstanding the applied forces and torques. Because the force flow is routed through the spring section, the mechanical displacement amplifier can be optimized for displacement measurement without affecting the load-bearing capacity of the device. The mechanical displacement amplifier is practically outside the force flow and therefore does not have to bear large mechanical loads, allowing it to be advantageously designed for displacement measurement and manufacturing without impacting the device's load-bearing capacity.Overall, it is possible to design the stiffness and load-bearing capacity of the spring section, together with the sensitivity and amplification of the at least one mechanical displacement amplifier, in such a way that the sensitivity of the device can be better tailored in different load directions, thus allowing the measuring ranges, linear independence, and crosstalk of the device to be designed and optimized particularly advantageously. In particular, the device can be designed and dimensioned very effectively and flexibly for a specific load range within which it is intended to measure the load.For this purpose, the stiffness of the spring area as well as the translation and preferred direction of the translation kinematics are coordinated in such a way that the spring area deforms within the load area in such a way that the displacement amplifier always generates a signal (movement in preferred direction) that can be clearly evaluated with respect to the load.

[0016] The preferred direction of motion refers specifically to a linear motion component in a direction defined by the design of the translation kinematics, which is greater than any other motion component (whether linear or rotational) that the measuring instrument could perform, regardless of any imposed displacement. In other words, the motion of the measuring instrument in the preferred direction is "translated" relative to the displacement and, regardless of the imposed displacement, always results in a motion of the measuring instrument in the preferred direction that is in a defined transfer function with the displacement.

[0017] According to a preferred embodiment of the invention, the spring section has a geometric structure which exhibits nearly identical stiffness in at least two degrees of freedom, preferably in all degrees of freedom. Stiffness describes the resistance of a body to elastic deformation caused by an external load, for example, a mechanical load in the form of a force and / or torque. The stiffness of a component depends primarily on the geometry of the object under consideration, in addition to the material used. Identical stiffness in at least two degrees of freedom results in the behavior of the spring section being identical in these degrees of freedom. If the stiffness is preferably identical in all degrees of freedom, the behavior of the spring section is also identical in all directions, which can simplify the measurement of the mechanical load.In this context, a suitable relationship between linear stiffness and rotational stiffness may need to be chosen, as these cannot be strictly equated mathematically due to their different meanings. In particular, these stiffnesses can be equated "functionally" such that the device exhibits the same sensitivity for forces and moments over the desired measuring range. By way of example, the stiffnesses can be chosen such that a movement of the measuring element can be set at the displacement amplifier, representing a measuring range for forces of, for example, + / - 25 N in one translational degree of freedom and for moments of, for example, + / - 2.5 Nm in one rotational degree of freedom.

[0018] According to a preferred embodiment of the invention, the spring region is designed in an annular form with a longitudinal axis, a wall, a first end face and a second end face, wherein the load coupling region is arranged at the first end face and the load decoupling region at the second end face, and wherein the wall has several through-openings and webs extending between the through-openings from the first end face to the second end face, each of the webs having at least one section with a web longitudinal axis which runs at an angle to the longitudinal axis of the spring region.A ring-shaped spring section can be designed to be particularly robust and with high stiffness, which can be especially advantageous for control engineering applications, for example in force control in robotics, as well as high load and overload capacity, which can be particularly important for operational safety in robotic applications that involve a very large measuring range, high overload and collisions.

[0019] Advantageously, the angle between the longitudinal axis of the web section and the longitudinal axis of the spring area is from 5° to 90°, preferably from 30° to 90°, and particularly preferably about 30°, about 60°, or about 90°. This allows for a particularly robust and stiff spring area.

[0020] Preferably, the wall has at least one circumferential row of through-openings, preferably two, three or more circumferential rows of through-openings. This allows the stiffness of the spring area to be influenced as desired.

[0021] Advantageously, the through-openings are round, oval, rectangular, hexagonal or triangular.

[0022] According to a preferred embodiment of the invention, the through-openings are oval or rectangular, each with a short and a long axis of symmetry and a center point, wherein the short axis of symmetry of the through-openings runs parallel to the longitudinal axis of the spring area, and wherein the wall has at least a first and a second circumferential row of through-openings, and the centers of the through-openings of the second row are offset in the direction of the longitudinal axis and are arranged between, preferably centrally between, the centers of the through-openings of the first row.

[0023] According to a further preferred embodiment of the invention, the through-openings are hexagonal, wherein the hexagonal through-openings are arranged in a honeycomb structure.

[0024] According to a further preferred embodiment of the invention, the through-openings are triangular in shape, wherein in a circumferential row the tips of the triangles are alternately aligned to the first end face and to the second end face.

[0025] By appropriately arranging the through-openings and choosing the shape of the through-openings, a desired requirement for the load-bearing capacity and the six-dimensional stiffness of the spring area can be met, especially with regard to the ratio of rotational and translational stiffness in the corresponding spatial directions.

[0026] Advantageously, the spring section is rotationally symmetrical, for example with a rotation angle of 120°. A symmetrical design promotes high signal quality of the device.

[0027] The spring section can be assembled from individual parts. Preferably, however, the spring section is formed monolithically, since spring sections formed in this way are generally less prone to damage.

[0028] According to an advantageous embodiment of the invention, the at least one mechanical displacement amplifier is designed as a solid-body mechanism, also called a compliant mechanism, which is preferably monolithic and has at least one elastic solid-body joint, preferably several elastic solid-body joints. A compliant mechanism is understood to be a single component that is particularly compliant at certain points, so that movement can be performed even though no conventional joints are present. In other words, a compliant mechanism is a flexible mechanism that utilizes deformations of an elastic body to transmit forces or movements. The compliant points are referred to as solid-body joints.The compliant areas can be created, for example, by cutouts in the material or by weakening the material. The compliant mechanism can be made of metal, preferably aluminum or steel.

[0029] Preferably, the spring arm of the transmission kinematics comprises a first spring arm element with a first end and a second end, and a second spring arm element with a first end and a second end, wherein the first end of the first spring arm element is preferably rigidly and the first end of the second spring arm element is preferably pivotally connected to the scale or a bearing surface for the scale, wherein the first spring arm element and the second spring arm element are arranged at an acute angle or nearly parallel to each other, and wherein the second end of the first spring arm element is preferably pivotally connected to the displacement amplifier output. Such a configuration can enable good sensitivity of the spring arm.

[0030] Advantageously, the second end of the second spring arm element is kinematically connected to the displacement amplifier input, in particular by means of a first rod element having a first end and a second end, a first coupling body, a second rod element having a first end and a second end, and a second coupling body, wherein the first end of the first rod element is preferably pivotally connected to the displacement amplifier input, the second end of the first rod element is preferably pivotally connected to the first coupling body, the first end of the second rod element is preferably rigidly connected to the first coupling body, the second end of the second rod element is preferably pivotally connected to the second coupling body, and the second end of the second spring arm element is preferably pivotally connected to the second coupling body.Such a design can enable a good translation of small movements between the load coupling and load decoupling areas into correspondingly large movements of the spring arm and thus of the measuring embodiment.

[0031] According to a preferred embodiment, the translation kinematics comprises a third rod element having a first end and a second end, and a fourth rod element having a first end and a second end, wherein the first end of the third rod element is preferably pivotally connected to the first coupling body, the second end of the third rod element is preferably pivotally connected to the displacement amplifier output, the first end of the fourth rod element is rigidly or pivotally connected to a mounting projection of the displacement amplifier output, and the second end of the fourth rod element is preferably pivotally connected to the second coupling body, wherein the mounting projection is in particular arranged between the second end of the third rod element and the second end of the first spring arm element.

[0032] According to a particularly advantageous embodiment of the invention, the translation kinematics comprise a toggle lever, which is preferably arranged between the displacement amplifier input and the displacement amplifier output, and which preferably comprises the first rod element and the third rod element. A toggle lever allows small movements to be converted into large movements in a simple manner.

[0033] Advantageously, the mechanical displacement amplifier is designed as a compliant mechanism such that, when a displacement is applied to the displacement amplifier input, the translation kinematics preferably translate the displacement solely on the basis of the structural elastic properties of the translation kinematics into a corresponding and amplified movement of the measuring element in the preferred direction. Such mechanical displacement amplifiers can enable a local deflection of the measuring element that is many times greater than the displacement of the spring section, thereby enabling a clear measurement signal with high sensor resolution.

[0034] According to a particularly preferred embodiment of the invention, the device has several, preferably at least three, more preferably at least six, mechanical displacement amplifiers and a number of sensors corresponding to the number of mechanical displacement amplifiers.

[0035] In particular, all mechanical displacement amplifiers are identical in design. The multiple mechanical displacement amplifiers are arranged equidistant from each other. Furthermore, the mechanical displacement amplifiers can be arranged both outside and inside the wall of the spring region.

[0036] The number of mechanical displacement amplifiers should be at least as large as the number of degrees of freedom of the applied load to be measured. For example, three mechanical displacement amplifiers are sufficient to measure a three-dimensional force Fx, Fy, Fz in the three coordinates x, y, z of the Cartesian coordinate system if no torques are to be measured. In particular, at least six mechanical displacement amplifiers are required to measure a six-dimensional mechanical load consisting of three force components and three torque components, for example, the forces Fx, Fy, Fz and the torques Mx, My, Mz in and around three coordinates x, y, z of the Cartesian coordinate system.If the number of mechanical displacement amplifiers is greater than the number of degrees of freedom of the load to be measured, they can be used, for example, to increase the sensitivity of the device or to reduce the cross-talk of the measurement.

[0037] Advantageously, the stiffness of the spring section and the structurally elastic properties of the translation kinematics are coordinated such that the sensitivity of the device is nearly identical in at least two degrees of freedom, preferably in all degrees of freedom. Advantageously, the scanning element is designed as an optical, capacitive, inductive, or magnetic sensor. Optical sensors, in particular, are especially robust and enable high-resolution scanning.

[0038] Preferably, the load coupling area is designed as a disk or disc ring with a first plane, and the load coupling area is designed as a disk or disc ring with a second plane, wherein the first plane and the second plane are arranged parallel to each other. The disk-like design allows for secure attachment to the components that are to move relative to each other, between which the forces and torques occurring are to be measured.

[0039] Devices for measuring force and / or torque, which are based on measuring the deformation or change in length of a linear element, are strongly influenced by temperature changes, for example, when the material of the linear element expands at higher temperatures. Advantageously, the device has at least one temperature sensor, preferably at least three temperature sensors, and particularly preferably six or eight temperature sensors, in order to take temperature changes into account when measuring the force and / or torque. The use of multiple temperature sensors, if these temperature sensors are distributed across the device, allows for a more precise determination of the temperature, for example, by averaging the temperatures measured by the multiple temperature sensors.Preferably, the evaluation unit is designed to perform a correction of the forces and / or torques acting between the two fastening elements with regard to temperature.

[0040] In one embodiment, the deformation structure can be designed as a deformation body. Furthermore, in one embodiment, the spring section can be designed as a spring element. Additionally, in one embodiment, the load coupling area can be designed as the first fastening element, for example, for attachment to a section of a robot arm, and the load decoupling area as the second fastening element, for example, for attachment to another section of a robot arm. In one embodiment, the mechanical displacement amplifier can be designed as a mechanical amplifier. Furthermore, in one embodiment, the displacement amplifier input can be designed as a drive-side input.

[0041] A measuring system according to the invention for measuring a mechanical load comprises a device as described above and an evaluation unit, wherein the measuring system is designed to evaluate the movement of the physical object detected by the sensor and to determine a mechanical load guided through the deformation structure.

[0042] Advantageously, the measuring system is designed to determine, from the movement of the measuring instrument detected by the sensor, a displacement of the displacement amplifier input relative to the displacement amplifier output, and from this a deformation of the spring section. Then, based on at least one mechanical parameter of the spring section available in the evaluation unit, the mechanical load transmitted through the deformation structure is determined. The evaluation unit can offer the possibility of performing signal processing or temperature correction digitally, which can be simpler and cheaper than an equivalent implementation with analog electronics. It can also provide communication interfaces. Furthermore, it can include all necessary components for connection to and communication with application-specific peripherals, including power supply and data transfer.

[0043] A robot component according to the invention comprises a device as described above and / or a measuring system as described above. A robot according to the invention has a robot component as described above. High resolution of the load to be measured is essential, particularly in robotic applications.

[0044] A method according to the invention for operating a measuring system as described above comprises the following steps:

[0045] - Guiding a mechanical load through the deformation structure,

[0046] - Detecting the movement of the measuring instrument using the sensor,

[0047] - Determining the mechanical load transmitted through the deformation structure.

[0048] The invention is explained in detail with reference to the following figures. They show

[0049] Fig. 1 shows a schematic representation of an exemplary embodiment of a measuring system with a device for measuring a mechanical load, which has a deformation structure comprising a spring section and a mechanical displacement amplifier, and with an evaluation unit.

[0050] Fig. 2 shows a side view of an embodiment of a purely structural elasticity-based mechanical displacement amplifier.

[0051] Fig. 3 shows a rigid substitute model of the mechanical displacement amplifier according to Fig. 2,

[0052] Fig. 4 shows a perspective view of an embodiment of a device according to the invention for measuring a mechanical load, which has a deformation structure comprising a spring section and several mechanical displacement amplifiers according to Fig. 2,

[0053] Fig. 5 shows a perspective view of the spring area of ​​the deformation structure of the device according to Fig. 4.

[0054] Fig. 6 shows a perspective view of another embodiment of a spring area,

[0055] Fig. 7 shows a perspective view of another embodiment of a spring area,

[0056] Fig. 8 shows a perspective view of another embodiment of a spring area,

[0057] Fig. 9 shows a perspective view of the device according to Fig. 4 without the circuit board and evaluation unit. Fig. 10 shows a perspective view of a further embodiment of a device for measuring a mechanical load, which has a deformation structure comprising a spring section and several mechanical displacement amplifiers according to Fig. 2, wherein the mechanical displacement amplifiers are arranged within the spring section.

[0058] Fig. 11 shows a schematic representation of an exemplary embodiment of a method according to the invention and

[0059] Fig. 12 shows a schematic representation of a robot with a robot component comprising a device for measuring a mechanical load.

[0060] Equal reference numbers denote identical or functionally equivalent parts, whereby, for better clarity, not all reference numbers are given in all figures.

[0061] Fig. 1 schematically illustrates an embodiment of a measuring system 90 with a device 10 for measuring a mechanical load L and with an evaluation unit 70 .

[0062] The device 10 comprises a deformation structure 12, which has a load coupling area 14, a load decoupling area 16 and a spring area 18 arranged between them, so that the mechanical load L can be conducted through the deformation structure 12 by deformation of the spring area 18.

[0063] Furthermore, the device 10 comprises a mechanical displacement amplifier 20 with a displacement amplifier input 22, a translation kinematics 24 and a displacement amplifier output 26, which are arranged kinematically in series in this order, wherein the translation kinematics 24 further comprises a measure body 28, which is arranged between the displacement amplifier input 22 and the displacement amplifier output 26 on a pivotable spring arm 30.

[0064] The device 10 further comprises a sensor 40, which can be configured as an optical, capacitive, inductive, or magnetically scanning sensor 40. The sensor 40 is arranged relative to the scale 28 in such a way that it can detect movements of the scale 28. For example, the sensor 40 can be rigidly connected to the load coupling area 14 and / or the displacement amplifier input 22.

[0065] The evaluation unit 70 can detect the displacements of the measuring instrument 28 and convert them into measurable signals, for example, electrical voltage. Particularly for safety-relevant applications, it can be advantageous to implement different measurement principles in a diverse and redundant manner, for example, by combining optical and capacitive scanning in the evaluation unit 70. The evaluation unit 70 can preferably digitize and evaluate the measured signals, possibly perform signal processing or temperature compensation, and / or provide communication interfaces.

[0066] The displacement amplifier input 22 is coupled to the load coupling area 14, and the displacement amplifier output 26 is coupled to the load coupling area 16, such that the displacement amplifier 20 is kinematically connected in parallel to the spring area 18. The displacement amplifier input 22 can be arranged, in particular, at the same height in direction Z as the load coupling area 14, while the displacement amplifier output 26 can be arranged, in particular, at the same height as the load coupling area 16. The coupling between the displacement amplifier input 22 and the load coupling area 14 on the one hand, and between the displacement amplifier output 26 and the load coupling area on the other, can be effected, for example, via a rigid mechanical connection.

[0067] When the mechanical load L is passed through the deformation structure 12, this results in a displacement u of the load coupling area 14 together with the displacement amplifier input 22 relative to the load coupling area 16 together with the displacement amplifier output 26. "Together" here means, in other words, that the displacement u of the displacement amplifier input 22 is kinematically representative of, or even identical to, the displacement u of the load coupling area 14. As a result, the dimensional embodiment 28 on the spring arm 30 performs a movement in a preferred direction R relative to the sensor 40 that corresponds to the displacement u and is amplified relative to this displacement u, in particular by the translation kinematics 24, which can be detected by means of the sensor 40.

[0068] The measuring system 90 is configured to evaluate the movement of the physical object 28 detected by the sensor 40 and to determine the mechanical load L transmitted through the deformation structure 12. In particular, the measuring system 90 is configured to determine the displacement u of the displacement amplifier input 22 relative to the displacement amplifier output 26 from the movement of the physical object 28 detected by the sensor 40, and from this a deformation of the spring section 18, and then, based on at least one mechanical parameter of the spring section 18 available in the evaluation unit 70, preferably a stiffness parameter, to determine the mechanical load L transmitted through the deformation structure 12.

[0069] A method for operating such a measuring system 90 may therefore comprise the following steps:

[0070] Step I: Guiding a mechanical load L through the deformation structure 12 ,

[0071] Step II: Detecting the movement of the measuring instrument 28 using the sensor 40 ,

[0072] Step III: Determining the mechanical load L transmitted through the deformation structure 12 (see Figure 11).

[0073] While Figure 1 depicts the measuring system 90 and the device 10 as a basic schematic, Figures 4, 5, and 9 show different views of an embodiment of the device 10 according to the invention for measuring the mechanical load L, as well as components of this device 10. Figures 6 to 8 show further embodiments of a component of this device 10, and Figure 10 illustrates an alternative arrangement of these components of the device 10.

[0074] The spring section 18 of the deformation structure 12 of the device 10 from Figure 4 is shown separately in Figure 5. The load coupling section 14 and the load coupling section 16 can, for example, be arranged at a distance A from each other in the direction Z. The coupling between the displacement amplifier input 22 and the load coupling section 14 can, for example, be effected by means of a first fastening element 11, while the coupling between the displacement amplifier output 26 and the load coupling section 16 can, for example, be effected by means of a second fastening element 13.

[0075] The first fastening element 11 can be disc-shaped or disc-ring-shaped with a first plane El, and the second fastening element 13 can be disc-shaped or disc-ring-shaped with a second plane E2, wherein the first plane El and the second plane E2 are arranged parallel to each other. The fastening elements 11, 13 can serve for mounting the device 10 and / or the measuring system 90, for example, in a robot component 100 or a robot 110 (see Fig. 12), as well as for introducing and removing the mechanical load L to be measured, in particular the forces F and / or torques M to be measured. The fastening elements 11, 13 can have fastening devices such as bores for screw or pin connections, clamping surfaces, or adhesive surfaces, via which the device 10 can be fastened.

[0076] The sensor 40 and the evaluation unit 70 can be arranged on a printed circuit board 80, which can be mounted on or attached to the first mounting element 11, in particular substantially parallel to the plane El of the first mounting element 11. The sensor 40 is arranged, in particular, on the side of the printed circuit board 80 facing the second mounting element 13. The first mounting element 11 has, in particular, an opening 11b through which the sensor 40 can view the scale 28 of the mechanical displacement amplifier 20 (see Fig. 9).

[0077] The spring section 18 is arranged between the load coupling area 14 and the load decoupling area 16. The spring section 18 can be annular with a longitudinal axis Z, a first end face 18a, a second end face 18b, and a wall 18c. The first end face 18a is arranged, in particular, at the load coupling area 14, while the second end face 18b is arranged at the load decoupling area 16. The first end face 18a, and in particular the load coupling area 14 of the spring section 18, can be rigidly arranged, in particular, on or in the first fastening element 11, while the second end face 18b, and in particular the load decoupling area 16 of the spring section 18, can be rigidly arranged on or in the second fastening element 13.To couple the load coupling area 14 with the mechanical displacement amplifier 20, the displacement amplifier input 22 can be rigidly arranged on the first fastening element 11 and, for example, glued in place. To couple the load coupling area 16 with the displacement amplifier output 26, the mechanical displacement amplifier 20 can have a contact surface 23, which, for example, can be arranged on the second fastening element 13, for example, in a form-fitting manner in a recess 13a, and in particular, can be glued in place.

[0078] The spring section 18 can have a geometric structure which exhibits nearly identical stiffness in at least two degrees of freedom, preferably in all degrees of freedom. The stiffness of the spring section 18 determines the displacement u caused by a load L acting on the device 10 between the load coupling area 14 and the load disengagement area 16. Preferably, the stiffness of the spring section 18 is so high compared to the stiffness of the displacement amplifier 20 (or the sum of all displacement amplifiers 20) that the force flow resulting from the load L through the device 10 is primarily directed through the spring section 18.Primarily means preferably that the proportion of the force flow which is directed through the spring area 18 is at least by a factor of 10, further preferably by a factor of 100 or 1000, greater than the proportion of the force flow which is directed through the displacement amplifier(s) 20.

[0079] The spring section 18 can preferably be monolithic in order to generate a particularly well-defined stiffness. This can be designed, for example, using the finite element method (FEM).

[0080] The spring area 18 and preferably also the deformation structure 12 can be designed in a rotationally symmetrical manner, for example with a rotation angle of 60° or 120°.

[0081] Various designs of the spring area 18 are explained with reference to Figures 4 to 8.

[0082] The wall 18c of the spring section 18 can have several through-openings 19 and webs 17 extending between the through-openings 19 from the first end face 18a to the second end face 18b, each web having at least one section 17a with a web longitudinal axis LS which runs at an angle α to the longitudinal axis Z of the spring section 18. The angle α between the web longitudinal axis LS of the section 17a of the web 17 and the longitudinal axis Z of the spring section 18 is, for example, from 5° to 90°, preferably from 30° to 90°, and particularly preferably about 30°, about 60°, or about 90°. The through-openings 19 can be arranged in one or more circumferential rows in the wall 18c. Furthermore, the passage openings can be round, oval, rectangular, hexagonal or triangular.The shape and arrangement of the through-openings 19 can be chosen such that the spring area 18 meets the desired stiffness requirements.

[0083] In the embodiment of the spring section 18 shown in Figures 4 and 5, the through-openings 19 are oval or rectangular, in particular with rounded corners, each having a short axis of symmetry SK and a long axis of symmetry SL and a center point M, wherein the short axis of symmetry SK of the through-openings 19 runs parallel to the longitudinal axis Z of the spring section 18, and wherein the wall 18c has at least a first circumferential row RI and a second circumferential row R2 of through-openings 19 and the centers M of the through-openings 19 of the second row R2 are offset in the direction of the longitudinal axis Z and are arranged between, preferably centrally between, the centers M of the through-openings 19 of the first row RI. Viewed longitudinally, a through opening 19 of the first row RI thus overlaps with two through openings 19 of the second row R2 .The webs 17 formed between the through-openings 19 of the two rows RI, R2 run in the first row RI essentially parallel to the longitudinal axis Z of the spring section 18, in a section 17a between the two rows RI, R2 essentially perpendicular, i.e. at an angle α of 90°, to the longitudinal axis Z of the spring section 18, and in the second row R2 again essentially parallel to the longitudinal axis Z of the spring section 15. The dashed line in Figure 5 illustrates the course of such a web 17, with the spring section 15 comprising a plurality of such webs 17.

[0084] Figure 6 shows an alternative embodiment of a spring section 18', which can be used in place of the spring section 18 in the device 10 according to Figure 4. In this spring section 18', the through-openings 19 are hexagonal, arranged in a honeycomb pattern. The through-openings 19 are arranged in three rows RI, R2, R3. The webs 17 arranged between the through-openings 19 have a total of four sections 17a, 17b, 17c, and 17d, which are alternately inclined at +30° or -30° to the longitudinal axis Z of the spring section 18'. The dashed line in Figure 6 illustrates the path of such a web 17, and the spring section 18' comprises a plurality of such webs 17.

[0085] Figure 7 shows a further alternative embodiment of a spring section 18'', which can be used instead of the spring section 18 in the device 10 according to Fig. 4. In this spring section 18'', the through-openings 19 are triangular. The spring section 18'' has only one row RI of through-openings 19, wherein in this circumferential row RI the apex of the triangular through-openings 19 are alternately oriented towards the first end face 18a and the second end face 18b of the spring section 18''. The webs 17 arranged between the triangular through-openings 19 are straight and are inclined at an angle α of approximately +30° or -30° to the longitudinal axis Z of the spring section 18''. The two dashed lines in Figure 7 illustrate the course of two such ridges 17, with the spring area 18'' comprising a multitude of such ridges 17 in total.

[0086] Figure 8 shows a further alternative embodiment of a spring section 18' '', which can be used instead of the spring section 18 in the device 10 according to Fig. 4. In this spring section 18' '', the through-openings 19 are round. The through-openings 19 are arranged in six rows RI, R2, R3, R4, R5, R6, with the through-openings 19 of one of the rows being located in the spaces between through-openings 19 adjacent to each other in the adjacent row.In other words, the through-openings 19 of the second row R2 are offset in the direction of the longitudinal axis Z and arranged between, preferably centrally between, the through-openings 19 of the first row RI, and the same applies to the arrangement of the through-openings 19 of the third row R3 in relation to the through-openings 19 of the second row, to the arrangement of the through-openings 19 of the fourth row R4 in relation to the through-openings 19 of the third row R3, to the arrangement of the through-openings 19 of the fifth row R5 in relation to the through-openings 19 of the fourth row R4, and to the arrangement of the through-openings 19 of the sixth row R6 in relation to the through-openings 19 of the fifth row R5. The webs 17 arranged between the through-openings 19 have a total of five sections, which are alternately inclined by +30° or -30° to the longitudinal axis Z of the spring area 18' ''.The dashed line in Figure 8 outlines the course of such a bridge 17, wherein the spring area 18' ' ' comprises a plurality of such bridges 17.

[0087] Apart from the shape and arrangement of the through-openings 19 and the webs 17, the other statements made regarding the deformation structure 12 and the spring area 18 also apply to the spring areas 18', 18'' and 18''''.

[0088] The mechanical displacement amplifier 20 can preferably be designed as a compliant mechanism 50. The compliant mechanism 50 can further preferably be monolithic and have at least one elastic compliant hinge 25 (see Figure 2), preferably several elastic compliant hinges 25. The compliant hinges 25 can be formed by corresponding recesses in the material, material weakening, or the selection of suitable material thicknesses. It is self-evident that the material of the compliant mechanism 50 must also have suitable elasticity to ensure the desired elastic properties of the compliant mechanism 50 overall. Therefore, a coordination of material and structural elasticity is regularly required, even though the structural elasticity contributes the most. Such designs and coordination can be carried out, for example, using FEM.

[0089] The solid-state mechanism 50 is particularly preferably made of metal, for example aluminum or steel.

[0090] The advantageous embodiment of the mechanical displacement amplifier 20 as a monolithic flexible mechanism based on solid-state hinges 25 is characterized by high precision and no mechanical play. Preferably, the mechanical displacement amplifier 20 is designed as a planar or prismatic mechanism, which is advantageous for manufacturing.

[0091] Preferably, identical mechanical displacement amplifiers 20 are manufactured as individual components. However, it is also possible, for example, to combine differently designed displacement amplifiers 20, to integrate several amplifier mechanisms into one component, or to perform the displacement of a dimensioning element 28 and its reading in several spatial directions. The mechanical displacement amplifiers 20 can be connected to the fastening elements 11, 13 by means of a material-locking, force-locking, and / or positive locking connection, for example, by gluing, soldering, welding, or by screwing, clamping, or pressing. A positive locking connection alone is disadvantageous because it is associated with high manufacturing tolerances and play; however, it can improve the assembly and alignment for a material-locking or force-locking connection, for example, by means of edges or pins that determine the position of the mechanical displacement amplifiers 20.

[0092] A particularly preferred embodiment of the mechanical displacement amplifier 20 is explained in more detail with reference to Figures 2 and 3, where Figure 2 shows a side view of an embodiment and Figure 3 illustrates a rigid substitute model or a rod model of the embodiment according to Figure 2. The mechanical displacement amplifier 20, in particular the embodiment shown in Figure 2, is designed as a compliant mechanism 50 such that, when a displacement u is applied to the displacement amplifier input 22, the translation kinematics 24 preferably translates the displacement u into a movement of the dimensional embodiment 28 in the preferred direction R, corresponding to and amplified by the displacement u, based solely on the structural elastic properties of the translation kinematics 24.

[0093] The rod model shown in Figure 3 serves only to model and explain the translation properties of the translation kinematics 24, which are represented in Figure 2 purely as structural elastics. The spring arm 30 of the translation kinematics 24 can have a first spring arm element 65 with a first end 65a and a second end 65b and a second spring arm element 66 with a first end 66a and a second end 66b, wherein the first end 65a of the first spring arm element 65 is preferably rigidly and the first end 66a of the second spring arm element 66 is preferably pivotally arranged on the dimensioning body 28 or, for example, a plate-like support surface for the dimensioning body 28, wherein the first spring arm element 65 and the second spring arm element 66 are arranged at an acute angle or almost parallel to each other and wherein the second end 65b of the first spring arm element 65 is preferably pivotally arranged on the displacement amplifier output 26.If the physical embodiment 28 is arranged approximately at height in the direction Z of the displacement amplifier input 22, a spring arm 30 can result which extends almost over the entire height of the mechanical displacement amplifier 20, thereby achieving high sensitivity.

[0094] The second end 66b of the second spring arm element 66 can be kinematically connected to the displacement amplifier input 22, in particular by means of a first rod element 61 having a first end 61a and a second end 61b, a first coupling body 67, a second rod element 62 having a first end 62a and a second end 62b, and a second coupling body 68, wherein the first end 61a of the first rod element 61 is preferably pivotally connected to the displacement amplifier input 22, the second end 61b of the first rod element 61 is preferably pivotally connected to the first coupling body 67, the first end 62a of the second rod element 62 is preferably rigidly connected to the first coupling body 67, the second end 62b of the second rod element 62 is preferably pivotally connected to the second coupling body 68, and the second end 66b of the second The spring arm element 66 is preferably articulated on the second coupling body 68.

[0095] The translation kinematics 24 can further comprise a third rod element 63 having a first end 63a and a second end 63b, and a fourth rod element 64 having a first end 64a and a second end 64b, wherein the first end 63a of the third rod element 63 is preferably pivotally attached to the first coupling body 67, the second end 63b of the third rod element 63 is preferably pivotally attached to the displacement amplifier output 26, the first end 64a of the fourth rod element 64 is rigidly or pivotally attached to a mounting projection 69 of the displacement amplifier output 26, and the second end 64b of the fourth rod element 64 is preferably pivotally attached to the second coupling body 68. The fastening projection 69 can be arranged in particular between the second end 63b of the third rod element 63 and the second end 65b of the first spring arm element 65 .

[0096] The articulated connections can be designed in particular as solid body joints.

[0097] The articulated connection between the first rod element 61 and the second rod element 62 forms, in particular, a toggle lever which translates a displacement u applied at the displacement amplifier input 22 via the third rod element 63 into a movement of the spring arm 60. Furthermore, this arrangement allows the movement of the spring arm 30 in the preferred direction R to be achieved, the preferred direction being, in particular, perpendicular to the height in the direction Z and, if the spring section 18 is round, particularly parallel to a tangent to the spring section 18. These properties can be replicated, for example, by means of the elastic solid-state joints 25, some of which are designated by way of example in Fig. 2. Such an elastic solid-state joint 25 can be located in Fig. 2 wherever a articulated end 61a-66b and, if applicable, a coupling body 67, 68 are provided in Fig. 3.Additionally, these properties in Figure 2 can also be achieved by means of elastic properties of one or more areas, which correspond to the bar elements 61-65 described in Figure 3. Other sections of the translation kinematics 24 from Figure 2 can also exhibit elastic properties in order to replicate the properties described above.

[0098] The transition of elastic properties between these elements can preferably be gradual. Preferably, the elastic properties of the translation kinematics 24 as a whole are designed accordingly, for example with the aid of an FEM model that takes structural and material properties into account.

[0099] In the embodiment described in Figure 2, the preferred direction R is realized in particular by a large-area projection of the solid mechanism 50 into the y-z plane, in relative comparison with all other planes. This results in a corresponding area moment of inertia that favors movement in the preferred direction R. In the rigid substitute model of Figure 3, the preferred direction R results from the direction of rotation of the articulated ends 61a-66b and coupling bodies 67, 68.

[0100] The mechanical displacement amplifier 20 can detect and amplify the displacement and / or rotation caused by an acting load L between the displacement amplifier input 22 and the displacement amplifier output 26, which results from the deformation of the spring section 18 between the load coupling area 14 and the load coupling area 16. In other words, the mechanical displacement amplifier 20 forms, in particular, a kinematic mechanism whose two inputs are the displacement amplifier input 22 and the displacement amplifier output 26, and whose output comprises the measuring element 28, the displacement of which is detected by the sensor 40 and the evaluation unit 70. Depending on the sensor 40, the measuring element 28 can, for example, be designed as an optical pattern or as a capacitive electrode.

[0101] The device 10 can have several, preferably at least two, at least three, at least four, at least five, and particularly preferably at least six, mechanical displacement amplifiers 20, as well as a number of sensors 40 corresponding to the number of mechanical displacement amplifiers 20. The mechanical displacement amplifiers 20 are preferably identical. The mechanical displacement amplifiers 20 can be arranged distributed around the circumference, preferably equidistant from one another. It is advantageous for adjacent mechanical displacement amplifiers 20 to be arranged alternately rotated by 180° about the Z-direction (see, in particular, Figures 4 and 9).

[0102] The number of mechanical displacement amplifiers 20 is preferably at least as large as the number of degrees of freedom of the acting force F and / or the acting torque M to be measured. In particular, at least six mechanical displacement amplifiers 20 are required to detect a six-dimensional mechanical load L consisting of three force components Fx, Fy, Fz and three torque components Mx, My, Mz along a Cartesian coordinate system with coordinates x, y, z (see Fig. 4). If the device 10 is only to measure a subspace of this general case, the number of mechanical displacement amplifiers 20 can be reduced to the dimension of this subspace. For example, at least three mechanical displacement amplifiers 20 are sufficient to measure a three-dimensional force consisting of Fx, Fy, Fz, but without torque components.If the number of mechanical displacement amplifiers 20 is greater than the number of degrees of freedom of the force to be measured and / or the acting torque, they can still be used, for example, to increase the sensitivity of the device 10 z or to reduce the cross-talk of the measurement.

[0103] The mechanical displacement amplifiers 20 can, on the one hand, fulfill the function of isolating a specific component from a general, for example, six-dimensional displacement u of the fastening elements 11, 13 relative to each other, which positively influences the structure of the representation between the acting forces F and / or torques M and dimension body displacements, and on the other hand, amplify the magnitude of this displacement u and present it as a dimension body 28 to the evaluation unit 70, which enables high sensitivity with simultaneously high stiffness of the device 10.

[0104] The mechanical displacement amplifiers 20 can be arranged between the mounting elements 11 and 13 such that the displacement amplifier input 22 is located at the first mounting element 11 and the displacement amplifier output 24 is located at the second mounting element 13. The mountings and the orientation of the mechanical displacement amplifiers 20 are selected such that the mechanical displacement amplifiers 20 detect and amplify the corresponding deformations of the spring section 18. The mechanical displacement amplifiers 20 should not be arranged in a singular configuration, meaning that the detected displacements u should be as linearly independent as possible within the desired measuring range of the device 10.A symmetrical arrangement, for example in 60° or 120° rotational symmetry or mirror symmetry, or the use of identical mechanical displacement amplifiers 20, may be advantageous for the measurement properties or manufacturing of the device 10, but is not absolutely necessary.

[0105] In an advantageous embodiment, the arrangement and properties of the mechanisms realized by the mechanical displacement amplifiers 20 are matched to the six-dimensional stiffness of the spring section 18 in such a way that the device exhibits a desired stiffness in the corresponding spatial directions, and the mechanical displacement amplifiers 20 simultaneously exhibit high sensitivity and linear independence of the amplified displacement of the measuring element in the desired measuring range. Of particular importance here is the matching between stiffness and sensitivity, for example between forces F and torques M, or between Kopp forces and torques Mx, My, and My, i.e., the coupling between different rotational and translational stiffnesses and sensitivities.The stiffness of the spring section 18 and the structural elastic properties of the transmission kinematics 24 can be coordinated such that the sensitivity of the device 10 is nearly identical in at least two degrees of freedom, preferably in all degrees of freedom. A force F acting on the deformation structure 12 or a torque M acting on the deformation structure 12 leads, within the limits of the mechanical stiffness of the deformation structure 12, in particular of the spring section 18, to an elastic deformation of the deformation structure 12, in particular of the spring section 18.Through the mechanical coupling between the spring section 18 and the mechanical displacement amplifiers 20, a displacement u is initiated at the displacement amplifier input 22 of the mechanical displacement amplifiers 20. This displacement, taking into account the structure, in particular the translation kinematics 24, of the mechanical displacement amplifier 20, is translated into a movement of the physical element 28. The mechanical displacement amplifier 20 specifically absorbs only a portion of the force F and / or torque M acting on the deformation structure 12, primarily transversely to the direction Z. The force flow is essentially directed through the spring section 18, without the involvement of the mechanical displacement amplifiers 20.In the event of an overload of the device 10, the spring section 18 is essentially the first component affected; all other components remain intact until the device 10 is completely impaired. The mechanical stiffness of the spring section 18 can determine the general measuring range of the device 10, while the structure of the mechanical displacement amplifiers 20 can determine the sensitivity and the absolute displacements of the measuring elements 28, whereby parasitic movements along or around the other spatial axes can be almost completely avoided.

[0106] Figure 10 illustrates an alternative embodiment of a deformation structure 12a, which differs from the deformation structure 12 of the device 10 according to Figure 4 only in that the mechanical displacement amplifiers 20 are arranged inside the wall 18c of the spring area 18 instead of outside it. The displacement amplifier input 22 of the mechanical displacement amplifier 20 can be attached by gluing it to a radial projection 11a arranged on the inner circumference of the first fastening element 11.

[0107] Figures 9 and 11 now provide a concise overview of how the mechanical load L applied by the deformation structure 12 is determined in step III of the procedure for operating the measuring system 90. This is particularly easy to understand using Figure 9, as the perspective view of the device 10 according to Figure 4 is shown without the circuit board 80 and evaluation unit 70, and at least partially allows a view of all six displacement amplifiers 20. The corresponding movements of the respective physical elements 28 are labeled rl to r6 here, purely for illustrative purposes. For the sake of simplicity, it is assumed that the load L always acts with respect to exactly one degree of freedom of the depicted coordinate system.

[0108] For example, if a mechanical load L is applied as a compressive force along the z-axis through the deformation structure 12 in step I, this results in exemplary movements +rl, +r2, +r3, +r4, +r5, +r6. Similarly, if a mechanical load L is applied as a tensile force along the z-axis through the deformation structure 12 in step I, this results in exemplary movements -rl, -r2, -r3, -r4, -r5, -r6. For the other degrees of freedom, only one loading direction is described as an example, since only the signs may change accordingly.

[0109] For example, if in step I a mechanical load L is applied as a compressive force along the y-axis through the deformation structure 12, this results in exemplary movements -rl, -r2, +r5, +r6. The movements r3 and r4 then practically do not occur, since the compressive force is applied exactly perpendicular to the respective displacement amplifier 20.

[0110] For example, if in step I a mechanical load L is applied as a compressive force along the x-axis through the deformation structure 12, this results in exemplary movements +rl, +r2, -r3, -r4. The movements r5 and r6 practically do not occur, since the compressive force is applied exactly perpendicular to the respective displacement amplifier 20.

[0111] For example, if in step I a mechanical load L is passed as a torque around the z-axis through the deformation structure 12, this results in exemplary movements -rl, -r2, +r3, -r4, +r5, +r6 (or with the opposite sign in the case of a different direction of rotation).

[0112] For example, if in step I a mechanical load L is passed as a torque around the x-axis through the deformation structure 12, this results in exemplary movements +rl, -r2, +r3, -r4, -r5, -r6 (or with the opposite sign in the case of a different direction of rotation).

[0113] For example, if in step I a mechanical load L is passed as a torque around the y-axis through the deformation structure 12, this results in exemplary movements -rl, +r2, -r3, -r4, -r5, +r6 (or with the opposite sign in the case of a different direction of rotation).

[0114] Since each of the exemplary movements rl to r6 represents a unique combination, the load L can also be uniquely assigned. Quantitatively, the load L is additionally derived from the magnitude of the respective movements rl to r6. A corresponding mixture of the loaded degrees of freedom may also be present.

[0115] Reference character list

[0116] 10 Device

[0117] 12 Deformation structure

[0118] 12a Deformation structure

[0119] 11 first fastening element

[0120] 11a advantage

[0121] 11b Breakthrough

[0122] 13 second fastening element

[0123] 13a Exemption

[0124] 14 Load coupling area

[0125] 16 Load decoupling area

[0126] 17 Bridge

[0127] Section 17a

[0128] Section 17b

[0129] Section 17c

[0130] Section 17d

[0131] 18 spring range

[0132] 18' spring range

[0133] 18 '' spring range

[0134] 18 ' ' ' spring range

[0135] 18a first front

[0136] 18b second front

[0137] 18c wall

[0138] 19 Passage opening

[0139] 20 displacement amplifiers

[0140] 22 Displacement amplifier input

[0141] 23 Contact area

[0142] 24 Translation kinematics

[0143] 25 elastic solid body joint

[0144] 26 Displacement amplifier output

[0145] 28 Scale 30 Spring arm

[0146] 40 Sensor

[0147] 50 Solid State Mechanism

[0148] 61 first rod element

[0149] 61a first end

[0150] 61b second end

[0151] 62 second rod element

[0152] 62a first end

[0153] 62b second end

[0154] 63 third rod element

[0155] 63a first end

[0156] 63b second end

[0157] 64 fourth rod element

[0158] 64a first end

[0159] 64b second end

[0160] 65 first spring arm element

[0161] 65a first end

[0162] 65b second end

[0163] 66 second spring arm element

[0164] 66a first end

[0165] 66b second end

[0166] 67 first coupling element

[0167] 68 second coupling element

[0168] 69 Mounting projection

[0169] 70 evaluation units

[0170] 80 circuit boards

[0171] 90 measuring system

[0172] 100 robot components

[0173] 110 Robot u Displacement rl Movement r2 Movement r3 Movement r4 Movement r5 Movement r6 Movement

[0174] L Last

[0175] Z direction (longitudinal axis)

[0176] F force

[0177] M torque

[0178] The first level

[0179] E2 second level

[0180] A distance

[0181] LS longitudinal axis

[0182] SK short axis of symmetry

[0183] SL long axis of symmetry

[0184] M Center

[0185] R preferred direction

[0186] RI series

[0187] R2 series

[0188] R3 series

[0189] R4 series

[0190] R5 series

[0191] R6 series a angle

Claims

Patent claims 1. Device (10) for measuring a mechanical load (L) , comprising: - a deformation structure (12, 12a) with a load coupling area (14), a load decoupling area (16) and a spring area (18, 18', 18'', 18'') arranged between them, such that a mechanical load (L) can be conducted through the deformation structure (12, 12a) by deformation of the spring area (18, 18', 18'', 18''). - a mechanical displacement amplifier (20) with a displacement amplifier input (22), a translation kinematics (24) and a displacement amplifier output (26) which are arranged kinematically in series in this order, wherein the translation kinematics (24) further comprises a measure body (28) which is arranged between the displacement amplifier input (22) and the displacement amplifier output (26) on a pivotable spring arm (30), and - a sensor (40) , wherein - the displacement amplifier input (22) is coupled to the load coupling area (14) and the displacement amplifier output (26) is coupled to the load coupling area (16), so that the displacement amplifier (20) is kinematically connected in parallel to the spring area (18, 18', 18'', 18''), and wherein - when a mechanical load (L) is passed through the deformation structure (12, 12a), a displacement (u) of the load coupling area (14) together with the displacement amplifier input (22) relative to the load coupling area (16) together with the displacement amplifier output (26) results, whereby - the measuring element (28) on the spring arm (30) opposite the Sensor (40) performs a movement (rl, r2, r3, r4, r5, r6) in a preferred direction (R) corresponding to and amplified compared to the displacement (u), which can be detected by means of the sensor (40).

2. Device (10) according to one of the preceding claims, characterized in that the spring area (18, 18', 18'', 18'') has a geometric structure which has almost the same stiffness in at least two degrees of freedom, preferably in all degrees of freedom.

3. Device (10) according to one of the preceding claims, characterized in that the spring region (18, 18', 18'', 18'') is annular with a longitudinal axis (Z), a wall (18c), a first end face (18a) and a second end face (18b), wherein the load coupling region (14) is arranged at the first end face (18a) and the load disengagement region (16) is arranged at the second end face (18b), and wherein the wall (18c) has several through-openings (19) and webs (17) extending between the through-openings (19) from the first end face (18a) to the second end face (18b), wherein each of the webs (17) has at least one section (17a, 17b, 17c, 17d) with a web longitudinal axis (LS) which is at an angle (a) to the The longitudinal axis (Z) of the spring area (18, 18', 18'', 18'') runs .

4. Device (10) according to claim 3, characterized in that the angle (a) between the longitudinal axis (LS) of the ab- The angle (17a, 17b, 17c, 17d) of the web (17) and the longitudinal axis (L) of the spring area (18, 18', 18'', 18'') is from 5° to 90°, preferably from 30° to 90°, particularly preferably about 30° or about 60° or about 90°.

5. Device (10) according to one of claims 3 to 4, characterized in that the wall (18c) has at least one circumferential row (RI, R2, R3, R4, R5, R6) of through openings (19), preferably two, three or more circumferential rows (RI, R2, R3, R4, R5, R6) of through openings (19).

6. Device (10) according to one of claims 3 to 5, characterized in that the through-openings (19) are round, oval, rectangular, hexagonal or triangular.

7. Device (10) according to one of claims 3 to 6, characterized in that the through-openings (19) are oval or rectangular, each with a short axis of symmetry (SK) and a long axis of symmetry (SL) and a center point (M), wherein the short axis of symmetry (SK) of the through-openings (19) runs parallel to the longitudinal axis (Z) of the spring area (18), and wherein the wall (18c) has at least a first row (RI) and a second circumferential row (R2) of through-openings (19) and the centers (M) of the through-openings (19) of the second row (R2) are offset in the direction of the longitudinal axis (Z) and are arranged between, preferably centrally between, the centers (M) of the through-openings (19) of the first row (RI).

8. Device (10) according to one of claims 3 to 7, characterized in that the through-openings (19) are hexagonal, wherein the hexagonal through-openings (19) are arranged in a honeycomb structure.

9. Device (10) according to one of claims 3 to 8, characterized in that the through-openings (19) are triangular in shape, wherein in a circumferential row (RI) the tips of the triangles are alternately aligned to the first end face (18a) and to the second end face (18b).

10. Device (10) according to one of the preceding claims, characterized in that the spring area (18, 18', 18'', 18'') is monolithic.

11. Device (10) according to one of the preceding claims, characterized in that the mechanical displacement amplifier (20) is designed as a compliant mechanism (50), which is preferably monolithic and has at least one elastic solid joint (25), preferably several elastic solid joints (25).

12. Device (10) according to one of the preceding claims, characterized in that the spring arm (30) of the transmission kinematics (24) has a first Fe- The spring arm element (65) has a first end (65a) and a second end (65b) and a second spring arm element (66) has a first end (66a) and a second end (66b), wherein the first end (65a) of the first spring arm element (65) is preferably rigidly arranged and the first end (66a) of the second spring arm element (66) is preferably pivotally arranged on the scale body (28) or a bearing surface for the scale body (28), wherein the first spring arm element (65) and the second spring arm element (66) are arranged at an acute angle or almost parallel to each other and wherein the second end (65b) of the first spring arm element (65) is preferably pivotally arranged on the displacement amplifier output (26).

13. Device (10) according to claim 12, characterized in that the second end (66b) of the second spring arm element (66) is kinematically connected to the displacement amplifier input (22), in particular by means of a first rod element (61) having a first end (61a) and a second end (61b), a first coupling body (67), a second rod element (62) having a first end (62a) and a second end (62b), and a second coupling body (68), wherein the first end (61a) of the first rod element (61) is preferably pivotally connected to the displacement amplifier input (22), the second end (61b) of the first rod element (61) is preferably pivotally connected to the first coupling body (67), and the first end (62a) of the second rod element (62) is preferably rigidly connected to the first coupling body (67). second end (62b) of the second rod element (62) preferably hinged to the second coupling body (68) and the second end (66b) of the The second spring arm element (66) is preferably articulated to the second coupling body (68).

14. Device (10) according to claim 13, characterized in that the translation kinematics (24) comprises a third rod element (63) having a first end (63a) and a second end (63b) and a fourth rod element (64) having a first end (64a) and a second end (64b), wherein the first end (63a) of the third rod element (63) is preferably pivotally connected to the first coupling body (67), the second end (63b) of the third rod element (63) is preferably pivotally connected to the displacement amplifier output (26), the first end (64a) of the fourth rod element (64) is rigidly or pivotally connected to a mounting projection (69) of the displacement amplifier output (26), and the second end (64b) of the fourth rod element (64) is preferably pivotally connected to the second coupling body (68).wherein the fastening projection (69) is arranged in particular between the second end (63b) of the third rod element (63) and the second end (65b) of the first spring arm element (65).

15. Device (10) according to claims 11 to 14, characterized in that the mechanical displacement amplifier (20) is designed as a compliant mechanism (50) such that when a displacement (u) is applied to the displacement amplifier input (22), the translation kinematics (24) preferably converts the displacement (u) into a movement corresponding to and amplified relative to the displacement (u) solely on the basis of structural elastic properties of the translation kinematics (24). (rl, r2, r3, r4, r5, r6) of the dimension embodiment (28) in the preferred direction (R).

16. Device (10) according to one of the preceding claims, characterized in that the device (10) comprises several, preferably at least two, at least three, at least four, at least five and particularly preferably at least six, mechanical displacement amplifiers (20) and a number of sensors (40) corresponding to the number of mechanical displacement amplifiers.

17. Device (10) according to one of the preceding claims, characterized in that the stiffness of the spring area (18, 18', 18'', 18'') and the structural elastic properties of the translation kinematics (24) are coordinated such that the sensitivity of the device (10) is nearly the same in at least two degrees of freedom, preferably in all degrees of freedom.

18. Device (10) according to one of the preceding claims, characterized in that the sensor (40) is designed as an optical, capacitive, inductive or magnetically scanning sensor.

19. Measuring system (90) for measuring a mechanical load (L) , comprising a device (10) according to one of the preceding claims and an evaluation unit (70) , wherein- where the measuring system is designed to evaluate the movement (rl, r2, r3, r4, r5, r6) of the physical medium (28) detected by the sensor (40) and to determine a mechanical load (L) guided through the deformation structure (12, 12a) from it.

20. Measuring system (90) according to claim 19, wherein the measuring system (90) is configured to determine a displacement (u) of the displacement amplifier input (22) relative to the displacement amplifier output (26) from the movement (rl, r2, r3, r4, r5, r6) of the physical embodiment (28) detected by the sensor (40) and from this a deformation of the spring section (18, 18', 18'', 18'') and then, on the basis of at least one mechanical characteristic parameter of the spring section (18, 18', 18'', 18'') available in the evaluation unit (70), to determine the mechanical load (L) directed through the deformation structure (12, 12a).

21. Robot component (100) comprising a device (10) according to any one of claims 1 to 18 and / or a measuring system (90) according to any one of claims 19 to 20.

22. Robot (110) with a robot component (100) according to claim 21.

23. Method for operating a measuring system (90) according to one of claims 19 to 20, comprising the steps: - Guiding a mechanical load (L) through the deformation structure (12, 12a) , - Detecting the movement (rl, r2, r3, r4, r5, r6) of the physical object (28) using the sensor (40) , - Determining the mechanical load (L) transmitted through the deformation structure (12, 12a).

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