Optical beam-shaping device, and method for producing same

Abstract

The invention relates to an optical beam-shaping device (1) with a phase-change material, PCM, layer (2), which has an amorphous region (3) and a crystalline nanostructure (4) produced therein by means of laser writing, wherein the crystalline nanostructure (4) has a metallic behavior and is formed and situated within the PCM layer (2) so as to have a beam-shaping effect on light beams when the optical device (1) is irradiated with the light beams.

Description

[0001] [File: 103116890.docx / / RW05K17WO] Description

[0002] Optical device for beam shaping and method for manufacturing the same

[0003] RWTH Aachen University, a public corporation

[0004] Description

[0005] Optical device for beam shaping and method for manufacturing the same

[0006] TECHNICAL AREA

[0007] The invention relates to an optical device for beam shaping with a phase change material (PCM) layer having an amorphous region and a crystalline nanostructuring therein produced by laser writing, and to a method for manufacturing such an optical device.

[0008] The following background information is intended solely to provide information necessary for understanding the relationship between the inventive ideas and concepts disclosed herein. Therefore, this background section may contain patentable subject matter and should not be considered prior art per se.

[0009] BACKGROUND

[0010] Predefined intensity distributions of laser beams are in high demand for various technological fields such as materials processing, thermal imaging, infrared detection systems, and signal processing. A novel solution for modifying the incident light is based on metasurfaces, which consist of metallic or dielectric nanoantennas smaller than the wavelength to adjust the properties of the scattered light, such as amplitude, phase, and polarization. However, the fabrication of these metasurfaces requires complex and expensive manufacturing techniques.

[0011] The functionality of the metasurface is freely adaptable based on the applied phase mask, thus enabling predefined functionalities for light sources. This concept allows for the arbitrary adjustment of the light source's properties, for example, those of a laser. Not only can the intensity distribution on the target plane be freely adjusted, but further advantages can arise, for example, in material processing for creating specific temperature profiles, in infrared detection systems that require sophisticated beam profiles to increase the sensitivity and efficiency of measurements, or in thermal imaging, where the temperature profile and heat detection of objects could be modified or even masked. The ability to utilize the orbital angular momentum of photons mediated by topological charges can also improve signal processing and encryption by adding an additional degree of freedom.

[0012] Applications involving infrared lasers require predefined intensity and polarization distributions. Conventional lasers often exhibit elliptical and imperfect intensity distributions, and modifications to the laser source are only possible with considerable effort and expensive techniques. However, adjusting the laser intensity with predefined optical elements would increase efficiency and even enable the investigation of novel physical phenomena. [File: 103116890.docx / / RW05K17WO] Description

[0013] Optical device for beam shaping and method for manufacturing the same

[0014] RWTH Aachen University, a public corporation

[0015] However, the production of optical components requires several processing steps, including etching and deposition of various materials, and the functionality of the designed component is fixed after production and cannot be changed.

[0016] An example of this can be found in EP 3 410 184 B1, which proposes a device for the switchable manipulation of electromagnetic radiation. The device comprises a phase-changing material that is switchable between at least a first state and a second state, wherein the first state and the second state have different electrical and / or magnetic properties. The device further comprises an optically responsive structure in contact with the phase-changing material, wherein the optically responsive structure has at least a first nanostructure and a second nanostructure, the first nanostructure being different from the second nanostructure.The first nanostructure is optically responsive at a predetermined electromagnetic wavelength when the phase-change material is in its first state, and non-responsive at the same predetermined wavelength when the phase-change material is in its second state, and wherein the second nanostructure is optically responsive at the same predetermined electromagnetic wavelength when the phase-change material is in its second state, and non-responsive at the same predetermined wavelength when the phase-change material is in its first state.

[0017] The invention is based on the objective of eliminating the disadvantages of the prior art, in particular saving effort and time in the manufacture of an optical device with a metasurface.

[0018] SUMMARY

[0019] This summary serves to present a selection of features and concepts of the invention, which are explained further in the description below. This summary is not intended to identify important or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter.

[0020] According to the invention, the above-mentioned problem is solved by the features of the independent claims.

[0021] Specifically, the problem is solved by an optical beam shaping device, in particular an optical beam shaping device. The optical beam shaping device has a phase change material (PCM) layer. The PCM layer has an amorphous region and a crystalline region (also called the amorphous and crystalline phases, respectively). In particular, the PCM layer consists of these two regions. The crystalline region is a crystalline nanostructure created by laser writing. The crystalline nanostructure exhibits metallic behavior. Furthermore, the crystalline nanostructure is formed and arranged within the PCM layer, enabling beam shaping of light beams when the optical device is irradiated with the [File: 103116890.docx / / RW05K17WO] description

[0022] Optical device for beam shaping and method for manufacturing the same

[0023] RWTH Aachen University, a public corporation

[0024] to shape light beams. Alternatively or additionally, the amorphous region can be an amorphous nanostructure or nanostructure created by laser writing. In this case, the crystalline region can exhibit metallic behavior. Furthermore, the amorphous nanostructure within the PCM layer can be formed and arranged in conjunction with the crystalline region to shape light beams when the optical device is irradiated with light beams.

[0025] The invention has the advantage that, through nanostructuring by directly laser-describing previous amorphous areas of the PCM layer, time in production, space and costs can be saved.

[0026] The nanostructuring can comprise a plurality of nanoantenna fragments. The nanoantenna fragments can have crystalline or metallic properties. Furthermore, the number of nanoantenna fragments can exceed 1,000 (or 10,000 or 100,000). The dimensions of the nanoantenna fragments can be in the subwavelength range relative to an operating wavelength of the optical device. This can apply to each of the three dimensions, for example, in the case of cuboid-shaped nanoantenna fragments. For instance, the thickness / depth of the nanoantenna fragments in the thickness / depth direction of the PCM layer can be smaller than the length and / or width in the horizontal or lateral direction of the PCM layer. Length and width can also differ. The thickness / depth of individual nanoantenna fragments can correspond to the thickness of the PCM layer. The thickness / depth of some of the nanoantenna fragments can correspond to the thickness of the PCM layer.The thickness / depth of some of the nanoantenna fragments can be less than the thickness of the PCM layer. For example, some nanoantenna fragments can extend from one top surface of the PCM layer towards the opposite bottom surface of the PCM layer, without touching the bottom surface. Similarly, some nanoantenna fragments can extend from the bottom surface of the PCM layer to the opposite top surface of the PCM layer, again without touching the top surface. Some nanoantenna fragments can also extend between the top and bottom surfaces of the PCM layer without touching either surface.

[0027] PCMs can have the property of exhibiting one or two phases and being switchable between these two phases. Each phase can thus be switched reversibly. One phase is amorphous and the other is crystalline.

[0028] Advantageous embodiments of the invention are specified in the dependent claims.

[0029] The PCM layer can be a non-volatile PCM layer. For example, the PCM layer can be lnsSbTe2. In the PCM layer used here, the crystalline phase can be metallic.

[0030] This allows the application range of the PCM layer to be expanded.

[0031] The optical device can be a passive optical component, for example in the form of a flat disk. The term "flat" here means that the thickness / depth of the disk is comparatively small compared to a horizontal / lateral dimension of the disk, for example less than 1 / 10 (or 1 / 100). [File: 103116890.docx / / RW05K17WO] Description

[0032] Optical device for beam shaping and method for manufacturing the same

[0033] RWTH Aachen University, a public corporation

[0034] Consequently, the optical device can be used very flexibly and modularly.

[0035] The crystalline nanostructure can consist of a plurality of metallic nanoelements (for example, the nanoantenna fragments mentioned above). The metallic nanoelements can be optically resonant, preferably at a predetermined wavelength. The nanoelements can be resonant at one and the same wavelength.

[0036] This allows both the default settings and the area of ​​application to be defined more precisely.

[0037] The PCM layer can be a metasurface. In the metasurface, the crystalline nanostructuring can form a one- or two-dimensional plasmonic array of, preferably uniform, nanoelements rotated relative to each other in a plane of the PCM layer. The nanoelements can have geometries in which their size and the spacing between neighboring nanoelements are both in the subwavelength range. For example, the size of the respective nanoelements can be smaller than X (or X / 2, X / 4, X / 8, X / 16) relative to the predetermined wavelength. Similarly, the spacing between neighboring nanoelements can be smaller than X (or X / 2, X / 4, X / 8, X / 16) relative to the predetermined wavelength.

[0038] This simplifies the process of defining the specific application of the optical device.

[0039] The nanoelements consisting of crystalline PCM can have the property of influencing the phase of the light scattered by irradiation.

[0040] The nanoelements of the PCM layer can form crystalline and metallic-looking components within the amorphous region of the PCM layer. The amorphous and / or crystalline regions can be coplanar. Within the same plane, adjacent components (nanoelements) can be spaced apart in a first direction and a second direction. (Directly) adjacent components (nanoelements) can have different or the same orientation(s) in the first direction. The first direction can be different, preferably perpendicular, to the second direction. Due to periodicity, for example, non-adjacent components can periodically exhibit the same orientation in the first direction; for example, several consecutively adjacent components can exhibit the same orientation in the second direction.

[0041] Thus, a beam pattern of the optical device can be designed in a simple way.

[0042] In the same plane, adjacent components can be spaced apart. Also, (directly) adjacent components along one or more closed curves can have the same orientation. Adjacent curves can have different orientations. Here, the term "closed curve" with respect to the components can mean that, in a (counter-)clockwise direction along the closed curve, adjacent components [File: 103116890.docx / / RW05K17WO] Description

[0043] Optical device for beam shaping and method for manufacturing the same

[0044] RWTH Aachen University, a public corporation

[0045] Individual parts must have the same orientation. The closed curves can be symmetrical to each other and / or concentric.

[0046] The optical device may be designed or used for beam deflection, beam focusing, changing the torque of the light, and / or beam shaping by means of holography.

[0047] The optical device can have a window layer that is at least partially transparent, preferably containing calcium fluoride, CaF₂. The optical device can have a PCM layer. The optical device can have an anti-reflective composite layer, preferably containing zinc sulfide, ZnS, and silicon dioxide, SiC₂, more preferably containing 80% ZnS and 20% SiC₂. The order of the layers can be as follows: the window layer, the PCM layer, and the composite layer.

[0048] This can result in an optical structure that is easier to rework.

[0049] The anti-reflective composite layer can, for example, be designed as an anti-reflective coating. For example, the anti-reflective composite layer can be arranged and configured for a processing laser intended for reconfiguring at least a portion of the PCM layer. The translucent window layer can be arranged and configured to have a transmission area in the infrared range and, for example, to allow infrared radiation to pass through and preferably transmit it at least to the PCM layer.

[0050] This allows for the provision of infrared optics that are tuned to a specific wavelength range.

[0051] The aforementioned problem is also solved by a method for manufacturing an optical device for beam shaping, preferably as described above. The method comprises providing a substrate, preferably a partially transparent window layer. The method further comprises sputtering an amorphous phase-change material (PCM) layer onto the provided substrate. The method further comprises laser writing into the amorphous PCM layer by locally heating it with a focused laser, for example, with the processing laser described herein, above a glass transition temperature, so that a crystalline nanostructure is formed between a remaining amorphous region of the PCM layer. The crystalline nanostructure behaves like a metallic material.The crystalline nanostructuring within the PCM layer is designed and arranged in such a way that it causes beam shaping of light rays when the optical device is irradiated with the light rays.

[0052] After sputtering the amorphous PCM layer, an anti-reflective composite layer can be sputtered directly onto the PCM layer to position the PCM layer between the substrate and the composite layer, thus protecting the PCM layer from oxidation. [File: 103116890.docx / / RW05K17WO] Description

[0053] Optical device for beam shaping and method for manufacturing the same

[0054] RWTH Aachen University, a public corporation

[0055] Laser writing, for example using the laser (possibly the same one as above), can involve creating a pattern (e.g., periodic or (ir)regular) in at least one direction from a first plurality of individual metallic nanoelements (see the individual parts or the nanoantenna pieces) of nanostructuring in the subwavelength range in the PCM layer, in which the nanoelements have a rotating changing orientation, seen along the first direction, in order to effect targeted beam shaping.

[0056] The process can further include downstream laser writing into the PCM layer, so that one or more of the nanoelements are adjusted in one or more horizontal dimensions, so that the pattern occurring in the first direction (e.g. periodic or (ir)regular) is changed, without changing the corresponding orientations of the nanoelements.

[0057] The process can further include heating the PCM layer above its melting temperature and immediately quenching it to completely return the PCM layer to an amorphous phase and provide a rewritable blank.

[0058] The process can further include renewed laser writing into the PCM layer, resulting in a different pattern (e.g., periodic or (ir)regular) occurring at least in the second direction, which differs from the first direction, from a further plurality of individual crystalline and metallic-looking nanoelements (see the individual parts or the nanoantenna pieces) in the subwavelength range in the PCM layer, in which neighboring nanoelements have different orientations or directly adjacent individual parts have the same orientation along a closed curve.

[0059] The aforementioned task can also be accomplished by a computer program. The computer program comprises instructions which, when executed by a computer or processor, cause the computer or processor to execute or initiate the procedure described above, or at least one of its steps. The computer program could, for example, be a module for starting / operating the laser (especially a processing laser), as described herein.

[0060] The aforementioned task can also be accomplished using a data storage medium. The computer program can be stored on machine-readable, processor-readable, or computer-readable data storage media, such as permanent or rewritable storage media. This also includes the possibility of making the computer program available for download on a server or cloud server, for example, via a data network such as the internet or a communication connection such as a wireless connection.

[0061] In other words, the invention relates to an infrared beam shaping element with a plasmonic phase-change material lnsSbTe2. There is a significant shortage of beam shaping elements in the mid-infrared range, and existing elements and concepts require cumbersome and expensive manufacturing techniques. Direct laser writing of metasurfaces offers great potential for accelerating manufacturing and [File: 103116890.docx / / RW05K17WO] description

[0062] Optical device for beam shaping and method for manufacturing the same

[0063] RWTH Aachen University, a public corporation

[0064] Enabling rapid prototyping of various metasurfaces with different functionalities.

[0065] In particular, the plasmonic phase-change material lnsSbTe2 (IST) can be reversibly switched from an amorphous dielectric phase to a crystalline metallic phase across the entire infrared range. By locally structuring a thin layer of amorphous IST, complex phase-modulated metasurfaces can be directly programmed with predefined properties.

[0066] The design can incorporate predefined phase masks consisting of twisted rod antennas made of the plasmonic phase-change material (PCM) lnsSbTe2 (IST), which can be directly programmed by laser irradiation. In combination with circularly polarized light, arbitrary phase masks can be encoded to adjust the intensity distribution of the incident light in the image plane. Specifically, laser modifications can be demonstrated by beam steering at a specific angle, focusing the light to a precisely defined focal length, exploiting the orbital angular momentum of the light to generate ring-shaped intensity distributions mediated by the topological charges, and holography by achieving arbitrary intensity patterns at specific distances behind the metasurfaces.The concept of directly programming metasurfaces with IST antennas is much simpler and more cost-effective compared to cumbersome manufacturing techniques such as conventional lithography, which involves several expensive and complex etching and design steps. The operating wavelength of the metasurfaces is determined solely by the length of the turned antennas and can be easily reduced or increased to cover the entire infrared range or to shift the operating wavelength towards longer wavelengths (e.g., into the THz range).

[0067] The invention can consist of an arrangement of twisted rod nanoantennas for generating beam-shaping elements designed to arbitrarily change the amplitude and / or intensity of an incident spectrum in the infrared range. The nanoantennas can be fabricated by direct crystallization of a thin layer of amorphous lnsSbTe2 (IST) using laser irradiation. The structures obtained by direct laser writing can also be returned to an amorphous state. The operating wavelength of the metasurface (covering the entire infrared range) can be defined by the length and orientation of the twisted antennas. Conventional lithographic steps are not required.

[0068] The resulting structures can be used to direct the beam at a specific angle, to focus the light to a precisely defined focal length, to exploit the orbital angular momentum of the light to generate ring-shaped intensity distributions mediated by the topological charges, and to create holographic patterns of arbitrary intensity at specific distances behind the metasurfaces.

[0069] The concept described herein enables the direct programming of these optical components through the local crystallization of the material. This significantly increases the manufacturing speed and simplifies the entire process. Furthermore, customized devices can be easily manufactured without altering or adapting the manufacturing process. Additionally, the functionality and operating wavelength of this [File: 103116890.docx / / RW05K17WO] description

[0070] Optical device for beam shaping and method for manufacturing the same

[0071] RWTH Aachen University, a public corporation

[0072] Devices are fixed after manufacturing and cannot be easily modified. The present concept, using PCM IST, allows for the reconfiguration of previously created structures and even the reprogramming or adaptation of devices to increase performance or change functionality. Therefore, predefined optical elements can be provided for various applications.

[0073] Although some of the aspects described above relate to the optical device, the manufacturing process, the computer / processor, the laser, or the computer program or the data carrier itself, these aspects can also apply to the other aspects accordingly.

[0074] In one example, the computer with the laser can be implemented using hardware circuits, software, or a combination of both. Multiple computer units can each be realized in a single physical unit, for instance, when several functions are implemented in software. The computer units can also be implemented in hardware components. The computer units are to be understood as functional units that are not necessarily physically separate from one another. Thus, the computer can be implemented, at least partially, as a computer, field-programmable logic array (FPLA), field-programmable gate array (FPGA), microcontroller, CPU (e.g., with multiple cores), graphics processing unit (GPU), application-specific integrated circuit (ASIC), and / or digital signal processor (DSP).

[0075] In the computer with the laser, methods related to laser data pipelining, particularly with predefined phase masks, can be applied. Instead of executing an entire instruction in a single clock cycle of the processor in the computer or laser, only a subtask, such as a portion of the laser data, is processed. The various subtasks of multiple instructions are executed simultaneously. Furthermore, methods similar to multithreading, and their extensions, can be applied to the laser data, such as simultaneous multithreading of laser data. This allows for better processor utilization through the parallel use of multiple processor cores. The computer or laser can be scalar or superscalar.The processor in the computer can be connected to a buffer memory that temporarily stores the laser data before and / or after processing the laser data or a portion thereof. The buffer memory can be integrated into the computer's volatile memory, such as (D)RAM, or into the computer's persistent memory, such as a non-volatile storage device like an SSD. This can increase the computer's performance.

[0076] All technical and scientific terms used herein have the meaning that corresponds to the general understanding of a person skilled in the art in the field of optics; they are to be interpreted based on the definitions found in the dictionary or the technical jargon of this field. If technical terms are used incorrectly herein and thus do not express the technical concept of the present invention, they are to be replaced by technical terms that convey a correct understanding to a person skilled in the art. [File: 103116890.docx / / RW05K17WO] Description

[0077] Optical device for beam shaping and method for manufacturing the same

[0078] RWTH Aachen University, a public corporation

[0079] The terms "first," "second," etc., are used solely to distinguish components from one another. For example, a first component can be referred to as a second component, and a second component as a first component. The terms "first," "second," etc., can indicate a sequence, at least for the purposes of disclosure, particularly a direct or indirect succession. It should be noted that these terms, as well as all numerical references ("one," "two," etc.), are not to be understood as exhaustive with regard to the scope of protection, but are also exhaustively disclosed with regard to the content of the disclosure ("only one," "only two," etc.). Thus, for example, the expression "two ABC" can mean either "exactly two ABC" or "two or more ABC."

[0080] When it is stated that one component is "connected" to or "communicates" with another component, this can mean, for the purposes of this disclosure, that these components can also be directly connected to or communicate with each other. The term "directly" indicates that no other component is present between them.

[0081] The procedural steps described herein should not be interpreted as requiring them to be performed in a specific order, unless explicitly or implicitly stated otherwise, for example, if these procedural steps cannot be exchanged for technical reasons. The procedural steps may also be performed directly one after the other (without any intervening steps) and / or continuously.

[0082] BRIEF DESCRIPTION OF THE DRAWINGS

[0083] Further objectives, features, advantages, and applications will become apparent from the following description of embodiments, which are not to be understood as limiting, with reference to the accompanying drawings. These show:

[0084] Fig. 1 shows a schematic representation of an optical device for beam shaping in two different perspectives, a cross-section and a top view, as well as a magnification;

[0085] Fig. 2 shows a schematic representation of a method for manufacturing the optical device for beam shaping; and

[0086] Fig. 3 shows a schematic representation of a computer in conjunction with a laser for the manufacture and processing of an optical device for beam shaping.

[0087] The reference numerals used in the drawings and their meanings are summarized in the list of reference numerals at the end of this description. Identical or similar components in the drawings are always identified by the same or similar reference numerals. Detailed explanations of known functions and structures are omitted if they would distract from the invention.

[0088] DETAILED DESCRIPTION OF THE DRAWINGS [File: 103116890.docx / / RW05K17WO] Description

[0089] Optical device for beam shaping and method for manufacturing the same

[0090] RWTH Aachen University, a public corporation

[0091] Device 1 and method SO will now be described with regard to their embodiments. Without being definitively bound to do so, specific details will be explained to provide a deeper understanding of the invention.

[0092] Furthermore, spatially relative descriptors, such as "below" or "above," and the like, can be used here to easily describe the relationship between the components shown in the drawings. These spatially relative descriptors should also encompass other orientations of the device in use or operation. The device may be oriented differently (rotated by 90 degrees or in another orientation), and the spatially relative descriptors used herein can be interpreted accordingly.

[0093] Fig. 1 shows a schematic representation of the optical device 1 for beam shaping. The optical device 1 has a PCM layer 2 with an amorphous region 3 and a crystalline region, which is a crystalline nanostructure 4. The PCM layer 2 can be lnsSbTe2. Optionally, the optical device 1 can have a substrate 5 below the PCM layer 2, e.g., a transparent window layer made of CaF2. Optionally, the optical device 1 can have a composite material layer 6 above the PCM layer 2, e.g., made of 80% ZnS and 20% Si2.

[0094] For the sake of simplicity, the orientation of the optical device 1 is represented here according to the coordinate system shown. The various layers 2, 5, and 6 lie in the XY plane, and their normal extends perpendicularly to it in the Z direction. Layers 2, 5, and 6 can be flush with each other. Alternatively, the planes can be offset from one another, with the lower layer overlapping. At a minimum, the substrate 5 can overlap the PCM layer 2 in the Z direction. Furthermore, the PCM layer 2 can overlap the composite material layer 6 in the Z direction. For example, there can be no overlap of layers 2, 5, and 6 in the XY direction.

[0095] The optical device 1 is fabricated by providing the substrate 5 in S1, onto which the PCM layer 2, for example with exclusively amorphous phase, is sputtered in S2. Subsequently, the amorphous PCM layer 2 is laser-described in S3 by locally heating (for the nanostructuring 4 according to the phase mask) above a glass transition temperature, so that the crystalline nanostructuring 4 is formed between a remaining amorphous region 3 of the PCM layer 2. The crystalline nanostructuring 4 exhibits metallic behavior and, within the PCM layer 2, causes beam shaping of light rays when the optical device 1 is irradiated with light rays, directing them outwards.

[0096] The process steps represented as blocks of the block diagram in Fig. 2 can, for example, be substantially represented on a machine-, processor-, or computer-readable data carrier and thus executed by a computer 7 or a processor 8, as described below with reference to Fig. 3. Examples can also include a computer program, or refer to one, that contains program code for executing at least some of the process steps from Fig. 2 when the computer program is executed on the computer 7 or processor 8. An example can be found in [File: 103116890.docx / / RW05K17WO] Description

[0097] Optical device for beam shaping and method for manufacturing the same

[0098] RWTH Aachen, a public corporation, may also have a volatile memory 9 or permanent memory 10, as described below with reference to Fig. 3, which is machine-, processor- or computer-readable and encodes machine-executable, processor-executable or computer-executable programs with instructions that cause the execution of some or all of the process steps.

[0099] Fig. 3 shows a schematic representation (as a block diagram) of the computer 7 in conjunction with the laser 16 for the manufacture and, for example, processing of the optical (beam shaping) device 1. The computer 7 can represent at least a part of a processing laser or laser system, or be an integrated part thereof. Thus, the aspects relating to the computer 7 described below can apply to a manufacturing / processing method of the optical device 1 as well as to a laser system itself, which is intended for the manufacture and processing of the optical device 1. The computer 7 implements one or more steps of the process SO, as shown in Fig. 2. In particular, the computer 7 provides functionality, such as computer software, that runs on the computer 7 and executes one or more steps of the process SO.

[0100] The term laser data used below may include one or more of the following data or information: PCM layer data, laser processing data, and phase mask data.

[0101] In particular, the computer 7 can execute commands related to the laser data contained in the computer program described herein and cause the computer 7 to execute or initiate one or more steps of the procedure SO.

[0102] This provides that Computer 7 can take any suitable physical form. For example, Computer 7 can be at least partially configured as an embedded computer, system-on-a-chip (SoC), single-board computer (SBC), server, and / or user equipment (UE). Computer 7 can be uniform or distributed; span one or more locations; span one or more machines or data centers; or be located in a cloud, which may include cloud components in a network. Computer 7 can execute or initiate one or more steps of the SO procedure without significant spatial or temporal limitations. For example, Computer 7 can execute or initiate one or more steps of the SO procedure in real time, in parallel, or in batch mode. Computer 7 can execute or initiate step(s) of the SO procedure at different times or locations.

[0103] The computer 7 has at least one or more of the following components: the processor 8, the volatile memory 9, the persistent memory 10, a bus 11, an arbiter 12, one or more interface(s) 13, the laser 16 (which may also be part of the computer 7), a main power supply 14, and an auxiliary power supply 15. For the sake of simplicity, the interconnection of the components of the computer 7 is structured as shown in Fig. 3.

[0104] Processor 8 has means for executing instructions related to the laser data, e.g., the computer program described herein. For example, Processor 8 can execute the laser data-related instructions described in [File: 103116890.docx / / RW05K17WO]

[0105] Optical device for beam shaping and method for manufacturing the same

[0106] The computer program described by the Rheinisch-Westfälische Technische Hochschule Aachen, abbreviated RWTH Aachen, a public corporation, contains, for example, the volatile memory 9 and / or the permanent memory 10, and then the instructions are loaded and executed, which in turn causes the processor 8 to execute or initiate one or more steps of the procedure SO, as shown, for example, in Fig. 2.

[0107] The volatile memory 9 can contain main memory for storing instructions related to the laser data for the processor 8, which then executes these instructions; or it can contain the laser data for the processor 8, which the processor 8 uses to work with it. For example, the computer 7 can load these instructions from persistent memory 10 or another source (such as another computer, the network, or the cloud) into the volatile memory 9. The processor 8 can then load these instructions from the volatile memory 9 into the processor 8's internal register / cache. To execute these instructions, the processor 8 can retrieve and decode them from the appropriate internal register / cache. During or after the execution of these instructions, the processor 8 can write a result (which can be intermediate or final results) to the internal register / cache.The processor 8 can then write the result to the volatile memory 9. The persistent memory 10 has a non-volatile mass storage (NVM) for the laser data or the instructions associated with the laser data. The persistent memory 10 can, in particular, be configured as the data carrier described herein, on which the computer program described herein can be stored.

[0108] Bus 11 can be understood here as a subsystem of computer 7 that transmits laser data and / or electrical power between the components of computer 7. Bus 11 can connect the components of computer 7 to each other via the same set of lines. Bus 11 can also include a data bus, an address bus, and a control bus. In this configuration, the laser data is transmitted bidirectionally between the components of computer 7 via the data bus. The address bus is operated solely by processor 8 and transmits memory addresses associated with the laser data unidirectionally. The control bus is controlled solely by arbiter 12, for example, acting as a monitor, and passes control over it to the processor in a pipeline-like manner, as described above, to control the transmission of the laser data.

[0109] The interface(s) 13 enable, among other things, the computer 7 to communicate with the laser 16. The interface(s) 13 can be connected to the external laser 16, which is coupled to the processor 8 of the computer 7. The interface(s) 13 can include device and / or software drivers that allow the processor 8 to control the interface(s) 13 in order to provide the laser data, or a portion thereof, to the laser for processing the optical device 1.

[0110] The main power supply 14 provides electrical power to at least one or more of the components of the computer 7, e.g., via bus 11. The main power supply 14 can be a preferred component used for powering the components of the computer 7. The auxiliary power supply 15 is connected to the volatile memory 9 and / or the persistent memory 10 via bus 11. The auxiliary power supply 15 can be in the form of a supercapacitor, an accumulator, and / or a battery. The power capacity / energy capacity of the [File: 103116890.docx / / RW05K17WO] description

[0111] Optical device for beam shaping and method for manufacturing the same

[0112] RWTH Aachen University, a public corporation

[0113] The main power supply 14 can be many times larger, for example at least 10 times or 50 times larger, than the power capacity / energy capacity of the auxiliary power supply 15.

[0114] The processor 8 monitors changes in the electrical power supplied by the main power supply 14. In the event of a sudden power failure, for example, if the main power supply 14 weakens or fails for any reason, and the processor 8 determines that the electrical power supplied by the main power supply 14 to one or more of the components of the computer 7 has fallen below a threshold value, for example, 0.8 or 0.75 of the operating power of the main power supply 14, the processor 8 causes the auxiliary power supply 15 to provide the remaining power for a shutdown operation of the computer 7. The shutdown operation includes supplying electrical power to at least the processor 8, the volatile memory 9, and / or the persistent memory 10 for the duration of the shutdown operation.During the shutdown process, the laser data currently stored in volatile memory 9 and / or the laser data currently being processed in processor 8, for example in the register / cache of processor 8, are transferred from volatile memory 9 and / or processor 8 to a meta-area of ​​persistent memory 10. This meta-area of ​​persistent memory 10 can be reserved specifically for the shutdown process.

[0115] When the computer 7 starts up and the main power supply 14 resumes operation, the processor 8 loads the laser data from the metadata area of ​​the persistent memory 10 to enable faster data processing. After the startup process, the metadata area of ​​the persistent memory 10 can be released, either partially or successively during the startup process.

[0116] This means the laser process can continue even in the event of a malfunction.

[0117] In conclusion, the following advantages arise from the concept described herein. Faster prototype development of predefined optical elements: Predefined beam-shaping elements often require cumbersome manufacturing techniques. The present concept enables a quick and easy way to design optical components for the desired application. Any modifications after manufacturing: Since the PCM IST offers the possibility of modifying structures once created, the optical elements can be subsequently altered to, for example, correct manufacturing defects and increase performance. Furthermore, it is even possible to reprogram the entire structure to achieve different functionality or to change the operating wavelength. Infrared beam shaping: Designing arbitrary intensity profiles of laser beams in the mid-infrared range is a challenging task.The application of the designed metasurfaces with IST enables arbitrary intensity profiles for adjusting heat distribution during material processing, modifying thermal signatures, and improving infrared light detection with predefined incident light and detectors. Infrared information encoding: Utilizing the orbital angular momentum of infrared photons adds an additional degree of freedom for information encryption. The intrinsic modes achieved through orbital angular momentum increase the information capacity and communication systems. The proposed concept offers particular advantages for thermal imaging, infrared sensor technologies, [File: 103116890.docx / / RW05K17WO] description.

[0118] Optical device for beam shaping and method for manufacturing the same

[0119] RWTH Aachen University, a public corporation, has expertise in information encryption / processing, near-field microscopes, and infrared spectroscopy.

[0120] It should be noted here that all the parts described above, considered individually and in any combination, especially the details shown in the drawings, are claimed as essential to the invention. Modifications to this are familiar to those skilled in the art.

[0121] REFERENCE MARK LIST

[0122] 1 Optical device

[0123] 2 PCM layer

[0124] 3 Amorphous Region

[0125] 4 Crystalline Nanostructuring

[0126] 5 Substrat

[0127] 6 composite material layer

[0128] 7 computers

[0129] 8 processor

[0130] 9 Volatile Memory

[0131] 10 permanent storage

[0132] 11 Bus

[0133] 12 Arbiter

[0134] 13 interface(s)

[0135] 14 Main power supply

[0136] 15 Auxiliary power supply

[0137] 16 lasers

Claims

[File: 103116893.docx / / RW05K17WO] Claims Optical device for beam shaping and method for manufacturing the same RWTH Aachen University, a public corporation Claims 1. Optical device (1) for beam shaping with a phase change material, PCM, layer (2) which has an amorphous region (3) and a crystalline nanostructure (4) produced therein by laser writing, characterized in that the crystalline nanostructure (4) has metallic behavior and is formed and arranged within the PCM layer (2) to effect beam shaping of light beams when the optical device (1) is irradiated with the light beams.

2. Optical device (1) according to claim 1, characterized in that the PCM layer (2) is a non-volatile PCM layer (2) such as lnsSbTe2.

3. Optical device (1) according to claim 1 or 2, characterized in that the optical device (1 ) is a passive optical component in the form of a flat disk.

4. Optical device (1) according to one of the preceding claims, characterized in that the crystalline nanostructuring (4) consists of a plurality of metallic nanoelements which are optically resonant at a predetermined wavelength.

5. Optical device (1) according to claim 4, characterized in that the PCM layer (2) is a metasurface in which the crystalline nanostructuring (4) forms a one- or two-dimensional plasmonic array of nanoelements of the plurality of nanoelements rotated relative to each other in a plane of the PCM layer (2), the nanoelements having geometries in which a size of the same and a distance of neighboring nanoelements are each in the subwavelength range.

6. Optical device (1) according to claim 4 or 5, characterized in that the nanoelements of the PCM layer (2) form crystalline and metallic-looking components between the uniform amorphous region (3) of the PCM layer (2), wherein, in the same plane, adjacent components are spaced apart from each other in a first and second direction (X, Y) and adjacent components have different orientations in the first direction (X), and wherein the first direction (X) is different, preferably perpendicular, to the second direction (Y), or the nanoelements of the PCM layer (2) form crystalline components between the uniform amorphous region (3) of the PCM layer (2), wherein, in the same plane, adjacent components are spaced apart from each other and directly adjacent components have the same orientation.

7. Optical device (1) according to one of the preceding claims, characterized in that the optical device (1) has the following layers (2, 5, 6) in the specified order: [File: 103116893.docx / / RW05K17WO] Claims Optical device for beam shaping and method for manufacturing the same RWTH Aachen University, a public corporation, a window layer (5) that is at least partially translucent, preferably with Calcium fluoride, CaF2, the PCM layer (2), and an anti-reflective composite material layer (6), preferably with zinc sulfide, ZnS, and silicon dioxide, SiO2, further preferably with 80% ZnS and 20% SiC>2.

8. Optical device (1) according to claim 7, characterized in that the anti-reflective composite material layer (6) is arranged and designed as an anti-reflective coating, for example for a processing laser intended for reconfiguring at least a part of the PCM layer (2), and the light-transmitting window layer (5) is designed and arranged to have a transmission area in the infrared range and to allow infrared radiation to pass through and transmit it at least to the PCM layer (2).

9. Method (SO) for manufacturing an optical device (1 ) for beam shaping, preferably according to one of the preceding claims, the method (SO) comprising: Providing (S1 ) a substrate (5), preferably a partially translucent window layer (5), Sputtering (S2) of an amorphous phase change material, PCM, - layer (2) onto the provided substrate (5), and Laser writing (S3) into the amorphous PCM layer (2) by locally heating with a focused laser above a glass transition temperature, such that a crystalline nanostructure (4) is formed between a remaining amorphous region (3) of the PCM layer (2), characterized in that the crystalline nanostructure (4) exhibits metallic behavior and is formed and arranged within the PCM layer (2) in such a way that beam shaping of light beams is effected when the optical device (1) is irradiated with the light beams.

10. Computer program, characterized in that the computer program comprises instructions which, when the computer program is executed by a computer (7) or a processor (8), cause the computer (7) or the processor (8) to execute or initiate the method according to claim 9 or at least one of its steps.

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