Adjustment device and multi-axial positioning means comprising such an adjustment device

Abstract

The present invention relates to an adjustment device comprising a base, an adjusting element, which is movable relative to the base at least along one linear adjustment path, and a drive unit having electromechanical actuators, which is designed to adjust the adjusting element along the adjustment path by electrically actuating the electromechanical actuators. In order to prevent a displacement of the zero point position of the adjusting element in the event of temperature changes, the drive unit comprises at least two electromechanical actuators and a connecting portion, on which the electromechanical actuators act and which is fixedly connected to the adjusting element, the electromechanical actuators being mirror-symmetrical to each other with respect to a plane of symmetry running through the connecting portion and perpendicularly intersecting the adjustment path. A further aspect of the present invention relates to a multi-axial positioning means comprising such an adjustment device.

Description

[0001] Adjustment device and multi-axis positioner comprising such an adjustment device

[0002] The present invention relates to an adjustment device, in particular an adjustment device whose adjustment range is in the micrometer range and whose resolution is in the nanometer range, and to a multi-axis positioner comprising such an adjustment device.

[0003] Such adjustment devices are used, for example, to position an object and include an actuating element on which the object can be placed. Known adjustment devices utilize materials with significantly different temperature coefficients. For instance, housing structures are often made of metal, while actuators made of piezoceramics are used for the drive structures. This leads to significantly different expansion and contraction behavior of the materials during temperature changes, and thus, in particular, to an undesirable displacement of the actuating element from its zero or home position. This displacement can significantly exceed the active adjustment range of the actuator or the measuring range of the sensor. Passive compensation of the zero-point displacement by combining different materials is frequently attempted, but is only possible to a limited extent due to nonlinearities in the expansion behavior.

[0004] Against this background, it is an object of the present invention to provide an adjustment device in which a temperature-induced shift of the zero-point position of the adjusting element is largely eliminated or prevented. This applies in particular to applications of the adjustment device at cryogenic temperatures.

[0005] The foregoing problem is solved by an adjusting device according to claim 1. The adjusting device comprises a base, an adjusting element that is movable relative to the base at least along a linear travel path, and a drive unit with electromechanical actuators configured to adjust the adjusting element along the travel path by electrically controlling the electromechanical actuators. To prevent a shift in the zero position of the adjusting element due to temperature changes, the drive unit comprises at least two electromechanical actuators and a connecting section on which the electromechanical actuators act and which is rigidly connected to the adjusting element, wherein the electromechanical actuators are arranged in a mirror-symmetrical manner with respect to a plane of symmetry passing through the connecting section and intersecting the travel path perpendicularly.The symmetrical arrangement of the actuator pair largely eliminates or even completely prevents unwanted displacement of the actuator along its travel path, i.e., a shift in the actuator's zero position, due to temperature changes. Likewise, the symmetrical arrangement of the actuator pair ensures that unwanted displacement of the actuator along its travel path is prevented or largely eliminated when the actuators are driven in sync. In particular, with such a configuration, temperature changes or sync-mode control of the actuators result in deformations of the actuators that act perpendicular to the actuator's travel path and do not change the actuator's zero position in the direction of the travel path.A suitable push-pull control of the actuators, in which one of the actuators experiences an extension and the other actuator a shortening, leads, however, to the desired positioning movement of the actuating element along the positioning path.

[0006] Advantageous further training is the subject of sub-claims.

[0007] It can be advantageous if the actuator, in the uncontrolled state of the electromechanical actuators, is in a home position that corresponds to a zero point position with respect to the travel distance, where the zero point of the travel distance lies in the plane of symmetry. The zero point position of the actuator is thus defined as the position in which the actuator is located when the actuators are not controlled.

[0008] It can be advantageous, if the drive unit is configured, to adjust the actuator in opposite directions along its travel path. By allowing the actuator to be adjusted in opposite directions, particularly beyond the zero point of the travel path, the application range of the adjustment device can be expanded.

[0009] It can prove advantageous if the drive unit is designed approximately as an isosceles triangle, with the electromechanical actuators forming the legs of the triangle and the connecting section the apex, the angle formed by the electromechanical actuators at the apex preferably being between 7° and 120°, and particularly preferably between 10° and 53°. With a drive unit in the form of an isosceles triangle, the symmetrical arrangement of the actuators can be achieved simply and compactly. The mechanical transmission ratio Ü, from the amount of travel to the actuator stroke, can be adjusted via the angle formed by the actuators at the apex of the triangle. A practical range for the transmission ratio Ü lies between 0.5 and 15. For this range of the transmission ratio Ü, the corresponding range of the angle formed by the actuators lies between 7° and 120°.However, the electromechanical efficiency decreases significantly in both extreme positions. Depending on the desired application and the available installation space, gear ratios Ü between 2 and 10 therefore prove to be practical. The corresponding range of the angle enclosed by the actuators lies in this case between 10° and 53°.

[0010] It can prove practical if the base and the adjusting element have the same length in a direction parallel to the adjustment path, and preferably the same width and / or height in a direction perpendicular to the adjustment path. With the same length and width, the base and the adjusting element are designed as bodies with congruent main surfaces, which facilitates a compact design of the adjusting device.

[0011] It can be advantageous for the electromechanical actuators to be articulated to the base, preferably supported by connecting elements that are articulated to the base. These connecting elements are particularly preferably designed as integral solid joints formed with the base. The articulated connection of the actuators to the base allows for pivoting movement of the actuators relative to the base, and thus a linear movement of the connecting section and the associated actuating element parallel to the actuating path. By designing the connecting elements as integral solid joints, the number of components of the adjusting device is reduced, and the assembly effort is minimized.

[0012] It can be advantageous if the adjusting device includes a guide element configured to guide the adjusting element along its travel path, wherein the guide element preferably comprises at least two rod- or plate-shaped guide elements that are opposite each other with respect to the plane of symmetry and that are preferably each pivotally connected to the base and the adjusting element, particularly preferably via solid-state joints. The guide elements ensure precise movement of the adjusting element along its travel path.

[0013] It can be practical if the base, the adjusting element, and the guide elements form a flexible, preferably one-piece, enclosed frame that accommodates the drive unit. This allows for a compact design of the adjusting device, and the enclosed frame also protects the sensitive components and connections of the drive unit from environmental influences.

[0014] It can be advantageous if the base and / or the adjusting element and / or, if applicable, the guide elements and / or, if applicable, the solid joints are made of materials belonging to the same material group, preferably of the same material, with metals forming a preferred material group. This can improve the interaction of the aforementioned components of the adjusting device, particularly with regard to the elasticity or elastic deformation of the respective components. Furthermore, this can also achieve homogeneous material behavior of the aforementioned components under temperature changes.

[0015] It can be advantageous if the adjusting device includes a motion absorption device configured to absorb movement of the connecting section in a direction perpendicular to the adjustment path, thus preventing the transmission of such movement to the actuating element. This prevents the actuating element from performing an unwanted movement in a direction perpendicular to the adjustment path. This is particularly advantageous when temperature changes cause deformations of the actuators that act on the connecting section perpendicular to the adjustment path.

[0016] It can be advantageous if the motion absorption device comprises an elastically deformable section, in particular a leaf spring section, provided in or on the actuating element or in or on the connecting section, wherein the connecting section is rigidly connected to the actuating element via the elastically deformable section, and the connecting section, the elastically deformable section, and the actuating element are preferably formed integrally. The elastically deformable section effectively absorbs movement of the connecting section in a direction perpendicular to the actuating path and reliably prevents the transmission of such movement to the actuating element.

[0017] In this context, it can be helpful if the elastically deformable section is arranged (essentially) parallel to or along the travel path of the actuating element in its home position. In any case, it is advantageous if the elastically deformable section exhibits high stiffness in a direction parallel to the travel path and low stiffness in a direction perpendicular to the travel path.

[0018] It can also be useful if the motion absorption device includes an opening arranged between the elastically deformable section and the actuating element to provide space for the deformation of the elastically deformable section.

[0019] It can be advantageous if the adjusting device includes a preloading device configured to exert a force on the connecting section in the direction of the base to preload the electromechanical actuators, wherein the preloading device connects the connecting section to the base and is preferably designed to be mirror-symmetrical with respect to the plane of symmetry. It is particularly advantageous if the preloading device is arranged between the electromechanical actuators, which facilitates a compact design of the adjusting device.

[0020] It can be advantageous for the preloading device to include an element connecting the connecting section and the base, which comprises a spring-elastic section, in particular an annular, preferably elliptical, web section. Integrating a spring-elastic section into an element connecting the connecting section and the base allows for the preloading of the electromechanical actuators while reducing the number of components in the adjustment device.

[0021] It can also be advantageous for the preloading device to include an element connected to the connecting section, which is linked to the base via a screw, preferably with an interposed spring. The screw allows for precise adjustment of the preload on the electromechanical actuators.

[0022] It may be useful if the adjusting device includes a control device that is configured to control the electromechanical actuators in opposite directions in order to adjust the adjusting element along the adjustment path.

[0023] It can be advantageous for the adjustment device to have a system for acquiring and processing measurement or operating data relevant to its condition. This system is designed to continuously acquire and process the measurement or operating data during the adjustment device's operation and, optionally, to link it together, so that a picture of the adjustment device's condition or its components can be derived. For example, this allows for the early detection, preferably remotely or online, of an impending failure of a component, such as an actuator, and enables the initiation of appropriate countermeasures.

[0024] A further aspect of the present invention relates to a multi-axis positioner comprising at least two adjustment devices according to one of the preceding embodiments, wherein the adjustment devices are arranged stacked, the actuating element of one adjustment device being connected to the base of an adjustment device arranged above it, and the adjustment devices preferably being oriented relative to each other such that their planes of symmetry intersect perpendicularly. Such a multi-axis positioner is capable of positioning an object along several axes, in particular along two mutually perpendicular axes, and thus in the plane spanned by the axes.A further aspect of the present invention relates to a multi-axis positioner comprising at least two adjustment devices according to one of the preceding embodiments, wherein the adjustment devices are arranged in a common plane, wherein the actuating element of one adjustment device is connected to the actuating element of the other adjustment device, or the adjustment devices comprise a common actuating element, and the adjustment devices are preferably oriented relative to each other such that their planes of symmetry intersect perpendicularly. Such a multi-axis positioner is capable of positioning an object along several axes, in particular along two mutually perpendicular axes, and thus in the plane spanned by the axes.

[0025] The features described above, as well as other features of the embodiments according to the invention, are explained in the description of the figures and the claims. The individual features can be implemented either separately or in combination as embodiments of the invention. The drawings each show preferred embodiments in which individual features of the present invention are shown in combination with one another. Features of an embodiment can also be implemented independently of the other features of the same embodiment and can therefore be readily combined by a person skilled in the art to form further meaningful combinations and sub-combinations with features of other embodiments.

[0026] Brief description of the drawings

[0027] Fig. 1 shows a schematic side view of an adjusting device according to a first embodiment in a state in which the electromechanical actuators are not controlled and the adjusting element is in a basic position which corresponds to a zero point position with respect to the actuating path, wherein the zero point of the actuating path lies in the plane of symmetry.

[0028] Fig. 2 shows a schematic side view of the adjusting device according to the first embodiment in a state in which the electromechanical actuators are deformed in opposite directions due to push-pull control and the adjusting element is adjusted along the adjustment path.

[0029] Fig. 3 shows a schematic side view of the adjusting device according to the first embodiment in a state in which the electromechanical actuators are deformed equally due to a temperature change or common-mode control.

[0030] Fig. 4 shows a schematic side view of an adjusting device according to a second embodiment in a state in which the electromechanical actuators are not controlled and the adjusting element is in a basic position which corresponds to a zero point position with respect to the actuating path, wherein the zero point of the actuating path lies in the plane of symmetry.

[0031] Detailed description of preferred embodiments

[0032] The preferred embodiments of the adjusting device according to the invention are described below with reference to the drawings. Functionally or structurally similar elements are designated with the same or similar reference numerals wherever possible. Therefore, to understand the features of the individual elements of a particular embodiment, reference should be made to the description of other embodiments or the general description of the invention.

[0033] Figures 1 to 3 show a first embodiment of the adjusting device in various states. The extension of the adjusting device in the X direction corresponds to its width, the extension of the adjusting device in the Y direction corresponds to its length, and the extension of the adjusting device in the Z direction corresponds to its height.

[0034] The adjusting device essentially comprises a base 1, an adjusting element 2 which is movable relative to the base 1 along a linear travel path s, and a drive unit 3 with electromechanical actuators 3a, 3b. The drive unit 3 is configured to adjust the adjusting element 2 along the travel path s by electrically controlling the electromechanical actuators 3a, 3b. The travel path s runs parallel to the Y-direction. Fig. 1 shows a home position of the adjusting element 2, in which the adjusting element 2 is located when the electromechanical actuators 3a, 3b of the drive unit 3 are not controlled. This home position of the adjusting element 2 corresponds to a zero point position (Y=0) of the adjusting element 2 with respect to the travel path s.

[0035] The base 1 and the actuating element 2 are each designed as an essentially block-shaped body and have the same length in the Y direction. Preferably, the base 1 and the actuating element 2 have the same width in the X direction and the same or a similar height in the Z direction.

[0036] The drive unit 3 comprises two electromechanical actuators 3a, 3b, preferably in the form of piezoelectric actuators, each connecting the actuating element 2 to the base 1. For this purpose, a first end section of each of the two electromechanical actuators 3a, 3b is pivotally connected to the base 1 via a connecting element 1a, 1b integrally formed with the base 1. In particular, the electromechanical actuators 3a, 3b are each supported with their first end section by the corresponding connecting elements 1a, 1b, which are pivotally connected to the base 1 via solid-state joints integrally formed with it. The drive unit 3 further comprises a connecting section 3c, which connects the respective second end sections of the two electromechanical actuators 3a, 3b to each other and is rigidly connected to the actuating element 2.

[0037] The electromechanical actuators 3a, 3b are arranged in a mirror-symmetrical manner with respect to a plane of symmetry E passing through the connecting section 3c and intersecting the travel s perpendicularly. In particular, the plane of symmetry E passes through the zero point (Y=0) of the travel s. The electromechanical actuators 3a, 3b are, at least in the uncontrolled state, aligned in a mirror-symmetrical manner with respect to the plane of symmetry E. However, it should be emphasized that the deformations of the electromechanical actuators 3a, 3b in the controlled state are so small that even in this state, an obvious mirror-symmetrical alignment of the electromechanical actuators 3a, 3b with respect to the plane of symmetry E exists. The deformations of the electromechanical actuators 3a, 3b shown in Figures 2 and 3 are exaggerated for illustrative purposes.

[0038] In the present embodiment, the drive unit 3 is designed approximately as an isosceles triangle. The electromechanical actuators 3a, 3b form the legs of the triangle, and the connecting section 3c forms the apex of the triangle. The angle that the electromechanical actuators 3a, 3b enclose at the apex of the triangle is preferably between 7° and 120°, and particularly preferably between 10° and 53°, including the limits of the aforementioned angle ranges.

[0039] The adjusting device further comprises a guide assembly 4a, 4b, which is configured to guide the actuating element 2 during its movement along the actuating path s. The guide assembly includes two rod- or plate-shaped guide elements 4a, 4b, which are opposite each other with respect to the plane of symmetry E and are arranged at the respective ends of the base 1 and the actuating element 2 in the Y-direction. In the case of plate-shaped guide elements 4a, 4b, these preferably have the same length in the X-direction as the base 1 and / or the actuating element 2. The guide elements 4a, 4b are each pivotally connected to both the base 1 and the actuating element 2. These connections are each effected by solid-state hinges. An end section of each guide element 4a, 4b connected to the actuating element 2 is designed to be complementary to the end section of the actuating element 2.The base 1, the actuating element 2, and the guide elements 4a and 4b form a shape-changing, closed frame in which the drive unit 3 is housed. The shape-changing capability is achieved by the solid-state joints that connect each of the guide elements 4a and 4b to the base 1 and the actuating element 2. The frame is designed as a single piece, although embodiments are also conceivable in which the frame is formed from separately existing and articulated components or parts of the frame. The shape-changing capability is such that the frame can be transformed from a rectangular or square shape (in the basic position of the actuating element 2) into a parallelogram shape (when the actuating element 2 is adjusted).

[0040] The adjusting device further comprises a motion absorption device 5, which is configured to absorb movement of the connecting section 3c in a direction perpendicular to the adjustment path s in order to prevent the transmission of such movement to the actuating element 2. The motion absorption device 5 primarily serves to absorb movement of the connecting section 3c in the Z-direction, but may also be configured to absorb movement of the connecting section 3c in the X-direction. The motion absorption device 5 comprises an elastically deformable section 5a, via which the connecting section 3c is rigidly connected to the actuating element 2. In general, the elastically deformable section 5a is designed to have high stiffness in a direction parallel to the adjustment path s, i.e., in the Y-direction, and low stiffness in a direction perpendicular to the adjustment path, i.e., in the Z-direction and, optionally, in the X-direction.

[0041] The elastically deformable section 5a comprises, in particular, two elastic web sections formed by an opening 5b in the actuating element 2 near its underside and located on both sides of the connecting section 3c. The opening 5b, and thus also the elastic web sections, are arranged symmetrically with respect to the plane of symmetry E, with the area connecting the elastic web sections being integrally connected to the connecting section 3c and exhibiting only slight elasticity due to the resulting material accumulation. The elastically deformable section 5a, the actuating element 2, and the connecting section 3c are therefore integrally formed. In its function and form, the elastically deformable section 5a corresponds to a leaf spring section.

[0042] The adjusting device further comprises a preloading device 6, which is configured to exert a force on the connecting section 3c in the negative Z-direction, i.e., in the direction of the base 1, in order to preload the electromechanical actuators 3a, 3b, and thus create the conditions for the proper operation of the electromechanical actuators 3a, 3b. The preloading device 6 connects the connecting section 3c to the base 1 and is mirror-symmetrical with respect to the plane of symmetry E. Specifically, the preloading device 6 is arranged between the electromechanical actuators 3a, 3b, i.e., within the isosceles triangle spanned by them, and is intersected mirror-symmetrically by the plane of symmetry E. In the first embodiment of the adjusting device according to the Fig.The preloading device 6 comprises an element connecting the connecting section 3c and the base 1, which includes a spring-elastic section, in particular an elliptical web section, which exerts a tensile force on the connecting section 3c. The preload of the electromechanical actuators 3a, 3b is determined in particular by the elasticity of the spring-elastic section.

[0043] Furthermore, the adjusting device includes a control device (not shown in the figures) configured to actuate the electromechanical actuators 3a and 3b. In the case of push-pull actuation by the control device, the actuators behave in opposite directions; that is, one actuator extends along its longitudinal axis while the other actuator shortens along its longitudinal axis, as illustrated in Fig. 2. As a result of such actuation of the electromechanical actuators 3a and 3b, the connecting section 3c experiences a force in the Y-direction. Since the connecting section 3c is connected to the actuating element 2 via the elastically deformable section 5a, which is rigid in the Y-direction, this force is transmitted to the actuating element 2 without loss, causing it to move in the Y-direction, i.e., along the actuating path s.Depending on the control signal, the actuator 2 can thus perform an adjustment movement in the positive or negative Y direction. During such an adjustment movement of the actuator 2, the guide elements 4a, 4b perform a tilting movement about their joints connected to the base 1. If the actuator 2 is moved into a position other than its home position by the adjustment movement, the frame formed by base 1, actuator 2, and guide elements 4a, 4b has a parallelogram shape.

[0044] When the temperature changes or the electromechanical actuators 3a, 3b are driven in the same mode by the control device, they behave identically. Fig. 3 illustrates a state in which the electromechanical actuators 3a, 3b elongate equally along their longitudinal axis. It should be noted that piezoceramic materials, which are preferably used for the electromechanical actuators 3a, 3b, have a negative coefficient of thermal expansion. This means that such actuators lengthen when cooled and shorten when heated. In the state shown in Fig. 3, a force in the positive Z-direction acts on the connecting section 3c to the same extent due to the increase in length of both electromechanical actuators 3a, 3b.The movement of the connecting section 3c in the positive Z-direction is absorbed by the elastic deformation of the elastically deformable section 5a of the motion absorption device 5 and consequently is not transmitted to the actuating element 2, thus preventing unwanted movement of the actuating element 2 in the Z-direction. This applies analogously to a case in which the two electromechanical actuators 3a, 3b shorten equally and the connecting section 3c performs a movement in the negative Z-direction.

[0045] The base 1, the adjusting element 2, the guide elements 4a, 4b, and the sections integrally connected to these components (solid joints, elastically deformable section 5a, connecting section 3c, integrally connected sections of the preloading device 6) preferably consist of materials belonging to the same material group. In the exemplary embodiments of an adjusting device according to the invention shown herein in Figures 1 to 4, the aforementioned elements of the adjusting device consist of the same material, namely stainless steel 316. In general, metallic materials that exhibit good spring properties and low thermal expansion, and that do not become brittle, particularly in the cryogenic temperature range, are suitable for realizing the aforementioned components of the adjusting device. In addition to the aforementioned stainless steel 316, stainless steels 304 and 310, as well as the titanium alloy Ti-6Al-4V, are also suitable for this purpose.For certain applications with low cycle counts, Invar is also suitable from the range of metallic materials due to its very low coefficient of thermal expansion. It is also conceivable to manufacture the aforementioned components of the adjustment device from materials belonging to the polymer, ceramic, or glass groups. It is also possible for the aforementioned components of the adjustment device to consist of different materials.

[0046] A second embodiment of the adjusting device is shown in Fig. 4. This second embodiment is largely identical or at least similar to the first embodiment. Therefore, the following section mainly describes the differences between the second and first embodiments.

[0047] The second embodiment of the adjusting device differs from the first embodiment of the adjusting device essentially in the configuration of the preloading device 6 and the angle enclosed by the electromechanical actuators 3a, 3b.

[0048] In the second embodiment, the preloading device 6 comprises an element connected to the connecting section 3c, which is connected to the base 1 via a screw. Specifically, the preloading device 6 comprises a web section that extends integrally from the connecting section 3c towards the base 1 and transitions integrally into a socket section. A threaded bore is provided in the underside of the socket section. A screw, whose shank penetrates a through-hole in the base 1 and whose head is supported by a disc spring against a shoulder of the through-hole, is screwed into the threaded bore of the socket section. By tightening or loosening the screw, the preload of the electromechanical actuators 3a, 3b can be selectively adjusted.

[0049] In the second embodiment of the adjusting device, the angle enclosed by the electromechanical actuators 3a, 3b at the apex of the isosceles triangle is smaller than in the first embodiment. This results in a different, in particular smaller, mechanical transmission ratio Ü between the amount of travel and the actuator stroke.

[0050] A multi-axis positioner can be configured by providing at least two of the adjustment devices described above and arranging them appropriately relative to each other. In principle, various arrangements of the adjustment devices are conceivable for such a multi-axis positioner. One option is to arrange the adjustment devices in a stacked configuration, with the actuating element 2 of one adjustment device connected to the base 1 of the adjustment device arranged above it. The adjustment devices can be oriented relative to each other such that their planes of symmetry E intersect perpendicularly. Another option is to arrange the adjustment devices in a common plane, with the actuating element 2 of one adjustment device connected to the actuating element 2 of the other adjustment device, or with the adjustment devices comprising a common actuating element.The adjustment devices can be oriented relative to each other such that their planes of symmetry E intersect perpendicularly. Both multi-axis positioners described above enable the positioning of an object along at least two translational degrees of freedom, for example in the XY plane. By appropriately arranging several adjustment devices, three translational degrees of freedom are also possible, i.e., movements of the positioning element(s) along the X, Y, and Z directions. Reference numeral list.

[0051] 1 Base

[0052] 1a, 1b Connecting element

[0053] 2 Actuator

[0054] 3 Drive unit

[0055] 3a, 3b electromechanical actuator

[0056] 4a, 4b Guide element

[0057] 5 Motion absorption device

[0058] 5a elastically deformable section

[0059] 5b Opening

[0060] 6 Pre-tensioning device

Claims

REQUIREMENTS 1. Adjustment device comprising: a base (1), an actuating element (2) which is movable relative to the base (1) at least along a linear actuating path (s), a drive unit (3) with electromechanical actuators (3a, 3b) which is configured to adjust the actuating element (2) by electrically controlling the electromechanical actuators (3a, 3b) along the actuating path (s), characterized in that the drive unit (3) comprises at least two electromechanical actuators (3a, 3b) and a connecting section (3c) on which the electromechanical actuators (3a, 3b) act and which is fixedly connected to the actuating element (2), and the electromechanical actuators (3a, 3b) are arranged in a mirror-symmetrical manner with respect to a plane of symmetry (E) which runs through the connecting section (3c) and intersects the actuating path (s) perpendicularly.

2. Adjustment device according to claim 1, characterized in that the actuating element (2) is in a basic position in the uncontrolled state of the electromechanical actuators (3a, 3b) which corresponds to a zero point position with respect to the actuating path (s), wherein the zero point of the actuating path (s) lies in the plane of symmetry (E).

3. Adjustment device according to one of the preceding claims, characterized in that the drive unit (3) is configured to adjust the actuating element (2) along the actuating path (s) in opposite directions.

4. Adjustment device according to one of the preceding claims, characterized in that the drive unit (3) is designed approximately as an isosceles triangle, wherein the electromechanical actuators (3a, 3b) form the legs of the triangle and the connecting section (3c) forms the apex of the triangle, wherein the angle enclosed by the electromechanical actuators (3a, 3b) at the apex of the triangle is preferably between 7° and 120°, particularly preferably between 10° and 53°.

5. Adjustment device according to one of the preceding claims, characterized in that the base (1) and the adjusting element (2) have the same length in a direction parallel to the adjustment path (s), and preferably have the same width and / or height in a direction perpendicular to the adjustment path (s).

6. Adjustment device according to one of the preceding claims, characterized in that the electromechanical actuators (3a, 3b) are pivotally connected to the base (1), wherein the electromechanical actuators (3a, 3b) preferably support themselves on connecting elements (1a, 1b) which are pivotally connected to the base (1), wherein the connecting elements (1a, 1b) are particularly preferably designed as solid body joints formed integrally with the base (1).

7. Adjustment device according to one of the preceding claims, characterized in that the adjustment device comprises a guide device (4a, 4b) which is configured to guide the actuating element (2) along the actuating path (s), wherein the guide device preferably comprises at least two rod- or plate-shaped guide elements (4a, 4b) which are opposite each other with respect to the plane of symmetry (E) and which are preferably each pivotally connected to the base (1) and the actuating element (2), particularly preferably via solid body joints.

8. Adjustment device according to the preceding claim, characterized in that the base (1), the adjusting element (2) and the guide elements (4a, 4b) form a shape-changing and closed frame, preferably of one-piece construction, in which the drive unit (3) is received.

9. Adjustment device according to one of the two preceding claims, characterized in that the base (1) and / or the adjusting element (2) and / or optionally the guide elements (4a, 4b) and / or optionally the solid joints consist of materials belonging to the same material group, preferably consisting of the same material, wherein metals form a preferred material group.

10. Adjustment device according to one of the preceding claims, characterized in that the adjustment device comprises a motion absorption device (5) which is configured to absorb a movement of the connecting section (3c) in a direction perpendicular to the adjustment path (s) in order to prevent the transmission of such a movement to the actuating element (2).

11. Adjustment device according to the preceding claim, characterized in that the motion absorption device (5) comprises an elastically deformable section (5a), in particular a leaf spring section, which is provided in or on the adjusting element (2) or in or on the connecting section (3c), wherein the connecting section (3c) is connected via the elastically deformable The malleable section (5a) is firmly connected to the actuating element (2), and the connecting section (3c), the elastically deformable section (5a) and the actuating element are preferably made in one piece.

12. Adjustment device according to one of the preceding claims, characterized in that the adjustment device comprises a preloading device (6) which is configured to exert a force on the connecting section (3c) in the direction of the base (1) in order to preload the electromechanical actuators (3a, 3b), wherein the preloading device (6) connects the connecting section (3c) to the base (1) and is preferably designed to be mirror-symmetrical with respect to the plane of symmetry (E).

13. Adjustment device according to the preceding claim, characterized in that the preloading device (6) comprises an element connecting the connecting section (3c) and the base (1), which comprises a spring-elastic section, in particular an annular, preferably elliptical web section.

14. Adjustment device according to claim 12, characterized in that the preloading device (6) comprises an element connected to the connecting section (3c) which is connected to the base (1) via a screw, preferably with an intermediate spring.

15. Adjustment device according to one of the preceding claims, characterized in that the adjustment device comprises a control device which is configured to control the electromechanical actuators (3a, 3b) in opposite directions in order to adjust the actuating element (2) along the actuating path (s).

16. Adjustment device according to one of the preceding claims, characterized in that it has a device for recording and processing measurement or operating data relevant to the condition of the adjustment device and which is designed to record and process the measurement or operating data during the operation of the adjustment device and optionally to link them together, so that a picture of the condition of the adjustment device or its components can be derived from it.

17. Multi-axis positioner comprising at least two adjustment devices according to one of the preceding claims, characterized in that the adjustment devices are arranged stacked, wherein the actuating element (2) of an adjustment device is connected to the base (1) of an adjustment device arranged above it, and the adjustment devices are preferably oriented to each other such that their planes of symmetry (E) intersect perpendicularly. 16 18. Multi-axis positioner comprising at least two adjustment devices according to any one of claims 1 to 16, characterized in that the adjustment devices are arranged in a common plane, wherein the actuating element (2) of one adjustment device is connected to the actuating element (2) of the other adjustment device or the adjustment devices comprise a common actuating element and the adjustment devices are preferably oriented to each other such that their planes of symmetry (E) intersect perpendicularly. 17

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