Freely rotatable hollow shaft of industrial robot

Abstract

One embodiment of the present invention pertains to a freely rotatable hollow shaft of an industrial robot, the robot comprising: a first driving module in charge of moving forklifts in a straight line; and a second driving module in charge of rotating and vertically moving the first driving module, the second driving module including a housing forming the exterior, and a lifting body disposed in the housing to be able to ascend and comprising a lifting shaft having therein a rotation shaft for rotating the first driving module, wherein the rotation shaft is formed to have a hollow therein in an axial direction and may have, in the upper portion thereof, the hollow shaft supported by ball bearings to rotate freely.

Description

Free-rotating hollow shaft for industrial robots

[0001] The present invention relates to a freely rotatable hollow shaft of a freely rotatable industrial robot.

[0002] Display devices, solar cells, semiconductor devices, etc. (hereinafter referred to as "electronic components") are manufactured through various processes. These manufacturing processes are carried out using a substrate for manufacturing the electronic components. For example, the manufacturing process may include a deposition process for depositing a thin film of a conductor, semiconductor, dielectric, etc. on the substrate, an etching process for forming the deposited thin film into a predetermined pattern, etc. These manufacturing processes are carried out in a process chamber that performs the relevant processes. A plurality of process chambers may be aligned around a vacuum robot located at the center. Some of the process chambers and the vacuum robot are installed in a vacuum area to prevent the substrate from being contaminated with foreign substances.

[0003] A vacuum robot (or industrial robot) according to the prior art is composed of a hand including a fork for supporting a substrate, an arm coupled to the hand and formed of a multi-joint or slider for moving the hand, a support for supporting the arm, a swivel for rotating the support, and a base to which the swivel is rotatably coupled. Here, the swivel, support, arm, and hand are installed in a vacuum area.

[0004] Meanwhile, the process chamber, which performs various processes on the substrate, reaches an internal temperature of 300-400 degrees Celsius or higher. The heat generated in the process chamber moves to the vacuum area where the vacuum robot is installed due to thermal equilibrium during substrate transport, resulting in an average temperature of approximately 300 degrees Celsius or higher in the vacuum area.

[0005] Accordingly, in the vacuum robot according to the prior art, the swivel part, the support part, the arm part, and the hand part installed in the vacuum area are exposed to high temperatures. In particular, the support part is the largest in the vacuum robot located in the vacuum area, so the area exposed to heat is the largest. Therefore, the vacuum robot according to the prior art has a problem in that the support part, which has the largest area exposed to high temperatures, is subject to thermal deformation such as bending due to the high temperature in the vacuum area. If the support part is thermally deformed, the position of the arm part connected to the support part is deformed, making it difficult to accurately transfer the substrate.

[0006] In addition, industrial robots according to conventional technology had the problem of requiring forklifts with highly complex structures due to the characteristics of the objects being transported, which inevitably led to high manufacturing costs.

[0007] Therefore, there is an urgent need to develop a vacuum robot that can perform accurate transfer of substrates even at high temperatures and has a simple and rational structure while also being high-performance.

[0008] In order to solve at least some of the above problems, the present invention aims to provide an industrial robot that is easy to manufacture and maintain by making the structure as simple as possible, has low noise, is easy to precisely control, and allows for simplification of the device.

[0009] The purpose of the present invention is not limited to the purposes mentioned above, and other purposes not mentioned will be clearly understood by those skilled in the art to which the present invention pertains from the description below.

[0010] According to one embodiment of the present invention for achieving the above object, a freely rotatable hollow shaft of an industrial robot comprises: a first drive module responsible for linear motion of a forklift; and a second drive module responsible for rotational motion and up-and-down movement of the first drive module; wherein the second drive module comprises: a housing forming an exterior; and an elevation body including an elevation shaft that is provided in the housing so as to be able to ascend and descend and has a rotational shaft therein for rotating the first drive module; wherein the rotational shaft is provided in a hollow shape having a space in an axial direction therein, and a freely rotatable hollow shaft supported by a ball bearing may be provided at an upper end of the rotational shaft.

[0011] The above hollow shaft may be provided on an extension line of the above rotation axis.

[0012] The above hollow shaft may be made of Teflon material.

[0013] A power or control cable can be inserted through the hollow shaft.

[0014] A support frame is provided between the first driving module and the second driving module, the support frame is fixed to the lifting shaft of the second driving module, and the lifting shaft and the support frame can move upward or downward together.

[0015] The above support frame has a through hole in the center, through which a power or control cable can be inserted.

[0016] The above hollow shaft and the above through hole of the support frame may be provided on an extension line of the rotation axis.

[0017] An industrial robot according to one embodiment of the present invention has a structure that is as simple as possible, making it easy to manufacture and maintain, making less noise, enabling easy precision control, and enabling simplification of the device.

[0018] The effects of the present invention are not limited to those described above, and other effects not mentioned will be clearly recognized by those skilled in the art from the description below.

[0019] Figure 1 is a perspective view of the entire assembly of an industrial robot according to one embodiment of the present invention.

[0020] Figure 2 is a cross-sectional view of the entire assembly of an industrial robot according to one embodiment of the present invention.

[0021] Figure 3 is an exploded perspective view of the first drive module and the second drive module of an industrial robot according to one embodiment of the present invention.

[0022] Figure 4 is an exploded perspective view of a first drive module of an industrial robot according to one embodiment of the present invention.

[0023] FIG. 5a and FIG. 5b are exploded perspective views of the arm tube of the first drive module of the industrial robot according to one embodiment of the present invention.

[0024] Figure 6 is a perspective view of the combined arm tube of the first drive module of an industrial robot according to one embodiment of the present invention.

[0025] Fig. 7 is a cross-sectional view showing the structure of a straight rail provided in an arm tube of an industrial robot according to one embodiment of the present invention.

[0026] FIG. 8 is a perspective view illustrating the driving structure of the first driving module of an industrial robot according to one embodiment of the present invention.

[0027] Fig. 9 is a cross-sectional view of a pulley module of an industrial robot according to one embodiment of the present invention.

[0028] FIG. 10a and FIG. 10b are reference drawings explaining counter balancing according to the position of the drive motor of the first drive module of an industrial robot according to one embodiment of the present invention.

[0029] FIG. 11 is a perspective view illustrating a power transmission structure of a first drive module of an industrial robot according to one embodiment of the present invention.

[0030] FIG. 12a and FIG. 12b are reference drawings (each a plan view) separately illustrating the power transmission by two drive motors provided in the first drive module of an industrial robot according to one embodiment of the present invention.

[0031] FIG. 13 is a reference drawing (front view) showing at once the power being transmitted by two drive motors provided in the first drive module of an industrial robot according to one embodiment of the present invention.

[0032] FIG. 14 is a reference diagram explaining that the interior of the drive motor of the first drive module of an industrial robot according to one embodiment of the present invention is sealed by a magnetic fluid.

[0033] FIG. 15 is a cross-sectional view of a drive motor of a first drive module of an industrial robot according to one embodiment of the present invention.

[0034] FIG. 16a and FIG. 16b are perspective views showing a structure in which the first and second forklifts of an industrial robot according to one embodiment of the present invention are fixed to a moving block that moves along a straight rail.

[0035] Figure 17 is a reference drawing for explaining how the angle of a forklift of an industrial robot according to one embodiment of the present invention is adjusted on a moving block.

[0036] FIG. 18 is a reference drawing explaining a structure in which a vibration damping pad is interposed between a forklift and a moving block of an industrial robot according to one embodiment of the present invention.

[0037] Figures 19a and 19b are partially exploded perspective views of a second drive module of an industrial robot according to one embodiment of the present invention.

[0038] Figure 20 is an exploded perspective view of the second drive module of an industrial robot according to one embodiment of the present invention.

[0039] Figure 21 is a cross-sectional view of a second drive module of an industrial robot according to one embodiment of the present invention.

[0040] Figure 22 is a cross-sectional view of a second drive module of an industrial robot according to one embodiment of the present invention.

[0041] FIG. 23 is a full cross-sectional view illustrating a magnetic fluid sealing structure of a rotational shaft used for rotation of a first drive module of an industrial robot according to one embodiment of the present invention.

[0042] Figure 24 is an enlarged view of part A of Figure 21,

[0043] Figure 25 is a full cross-sectional view for explaining the sealing structure of the lifting shaft used for lifting the first drive module of the industrial robot according to one embodiment of the present invention.

[0044] Figure 26 is an enlarged view of part B of Figure 21,

[0045] FIG. 27 is a cross-sectional view illustrating the relative positions of the lifting rail and the power transmission ball screw rail for movement of the second drive module of an industrial robot according to one embodiment of the present invention.

[0046] Figures 28 and 29 are cross-sectional schematic diagrams showing the lifting drive structure of the second drive module of an industrial robot according to one embodiment of the present invention.

[0047] FIG. 30 is a reference drawing for explaining the relative positions of the lifting rail and the power transmission ball screw rail for movement of the second drive module of an industrial robot according to one embodiment of the present invention.

[0048] Figure 31 is a reference drawing showing an example of the use of a hollow shaft provided in a second drive module of an industrial robot according to one embodiment of the present invention.

[0049] FIG. 32 is a reference drawing showing an example of an integrated body constituting a housing of a second drive module of an industrial robot according to one embodiment of the present invention.

[0050] FIG. 33 is a reference drawing showing an example of use of an integrated body constituting a housing of a second drive module of an industrial robot according to one embodiment of the present invention.

[0051] The present invention is susceptible to various modifications and embodiments. Specific embodiments are illustrated and described in detail in the drawings. However, this is not intended to limit the present invention to specific embodiments, but rather to encompass all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present invention.

[0052] While terms such as "first" and "second" may be used to describe various components, these components should not be limited by these terms. These terms are used solely to distinguish one component from another. For example, without departing from the scope of the present invention, a first component could be referred to as a "second component," and similarly, a second component could also be referred to as a "first component." The term "and / or" includes any combination of multiple related items described herein or any one of multiple related items described herein.

[0053] The terms "~bu, ~part, ~section, etc." may be used to describe various components, but the components should not be limited by the terms. The terms may refer not only to components that are physically / visibly distinct, but also to terms that describe the function or composition of a part even if the distinction / division is not clearly defined.

[0054] The terminology used in this application is only used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, it should be understood that the terms "comprise" or "have" indicate the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0055] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and will not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

[0056] In the description below, the terms "front", "rear", "side", "front", "back", "upper", "upper", "lower", "lower", "lower", "left and right", etc. used in relation to direction are defined based on the vehicle or body. In addition, the terms first and second, etc. may be used to describe various components, but these components are not limited in order, size, location, or importance by the terms first and second, etc., and are named only for the purpose of distinguishing one component from another.

[0057] Hereinafter, with reference to the attached drawings, a preferred embodiment of the present invention will be described in more detail.

[0058] FIG. 1 is a perspective view of the entire assembly of an industrial robot according to one embodiment of the present invention, FIG. 2 is a cross-sectional view of the entire assembly of an industrial robot according to one embodiment of the present invention, and FIG. 3 is an exploded perspective view of a first drive module and a second drive module of an industrial robot according to one embodiment of the present invention.

[0059] Referring to FIGS. 1 to 3, an industrial robot (1000) according to one embodiment of the present invention may include a forklift (2333, 2334) for transporting a target object, a first drive module (2000) for moving the forklift (2333, 2334) in a linear manner, and a second drive module (3000) for raising or lowering or rotating the first drive module (2000).

[0060] In the drawing, the X-axis direction can be defined as the length direction (the direction in which the forklift moves in a straight line), the Y-direction can be defined as the width direction, and the Z-direction can be defined as the height direction (the direction in which the first drive module rises or falls). In addition, the R-direction can be the direction in which the first drive module rotates relative to the second drive module.

[0061] In addition, the first driving module (2000) can be driven in a vacuum state, and the second driving module (3000) can be driven in a standby state. The first driving module (2000) can be installed in a vacuum chamber, and the second driving module (3000) can be installed outside the vacuum chamber.

[0062] In addition, the interior of the drive motor (2360-2361, 2362) of the first drive module (2000) is in a standby state, but must be driven in a vacuum chamber, so the drive motor (2360) itself is in a vacuum state. Accordingly, the interior and exterior of the drive motor (2360) must be sealed.

[0063] As will be explained later, since the drive motor (2360) includes a stator and a rotor, a magnetic fluid can be used to implement this sealing.

[0064] In addition, since the first driving module (2000) is driven in a vacuum state, but the second driving module (3000) is driven in an air state, they must also be sealed along a predetermined boundary. As will be described later, the elevation module (3300) of the second driving module (3000) connected to the first driving module (2000) can be surrounded and sealed by a bellows (jawbar), and a vacuum state can be maintained between the outer surface of the elevation shaft and the inner surface of the bellows (jawbar).

[0065] Additionally, the rotation shaft (3563) that rotates the first drive module (2000) is located inside the elevation shaft (3311), and the space between the rotation shaft (3563) and the elevation shaft (3311) must also be sealed.

[0066] As will be explained later, the rotary drive unit (3510) includes a rotating unit (3562) including a fixed unit (3561) and a rotating shaft (3563), so a magnetic fluid can be used to implement sealing between the rotating shaft (3563) and the fixed unit (3561).

[0067] Hereinafter, the first driving module (2000) will be described first, and then the second driving module (3000) will be described with additional reference to FIGS. 4 to 18.

[0068] Referring additionally to FIG. 4, the first driving module (2000) of one embodiment may include a module housing (2100) forming the exterior of the first driving module (2000), and a linear motion module (2300) provided inside and outside the module housing (2100).

[0069] In addition, a forklift (2333, 2334) that moves linearly in the longitudinal direction in conjunction with the linear motion module (2300) can be protruded to the outside of the module housing (2100) while being connected to the linear motion module (2300) provided inside the module housing (2100).

[0070] The linear motion module (2300) may include an arm tube (2310), an arm module (2330), and a driving unit (2350).

[0071] The side of the module housing (2100) may be provided with a groove extending in the longitudinal direction (X-axis direction) so that the forklift (2333, 2334) can extend outward and move in the longitudinal direction.

[0072] A first drive module (2000) may be provided inside the module housing (2100).

[0073] The first driving module (2000) may include an arm tube (2310) that serves as a support frame, a driving unit (2350) provided in the arm tube (2310), and a forklift (2333, 2334) that is connected to the driving unit (2350) to receive power and is supported by the arm tube (2310) so as to be able to move linearly in the longitudinal direction (X-axis direction).

[0074] The forklift (2333, 2334) is connected to the moving block (2331, 2332), and the moving block (2331, 2332) can be provided to enable linear movement in the longitudinal direction (X-axis direction) on the arm tube (2310).

[0075] Referring further to FIGS. 5a and 5b, the arm tube (2310) may include a box-shaped housing (2311) and a reinforcing rib (2312) provided inside the housing (2311) to supplement the rigidity of the housing (2311).

[0076] A plurality of reinforcing ribs (2312) are provided spaced apart in the longitudinal direction of the housing (2311), and each reinforcing rib (2312) can be divided into at least two unit ribs (2312-1, 2, 3, 4).

[0077] The housing (2311) may have a square box shape. In addition, the reinforcing rib (2312) may be provided with four unit ribs (2312-1, 2, 3, 4) each of which is connected to an inner corner portion of the housing (2311).

[0078] Each unit rib (2312-1, 2, 3, 4) can be joined as a rigid reinforcement member to the inner right-angled corner portion of the housing (2311). The unit ribs (2312-1, 2, 3, 4) can be joined to the housing (2311) by various joining methods such as welding, bolting, and riveting.

[0079] The unit ribs (2312-1, 2, 3, 4) can be interconnected. For example, the unit ribs (2312-1, 2, 3, 4) can be interconnected by bolting, riveting, wiring, etc. without any additional parts.

[0080] Additionally, the unit ribs (2312-1,2,3,4) can be interconnected and combined by connecting members (2312-5,6,7,8).

[0081] The reinforcing rib (2312) formed by interconnecting four unit ribs (2312-1, 2, 3, 4) can correspond to the cross-sectional shape of the housing (2311).

[0082] A gap for joint flexibility can be provided at the adjacent portions of the four unit ribs (2312-1, 2, 3, 4), and the connecting member (2312-5, 6, 7, 8) can interconnect the unit ribs (2312-1, 2, 3, 4) while maintaining the gap between them.

[0083] In one embodiment, to supplement the internal rigidity of a square box-shaped housing (2311), at least two branched unit ribs (2312-1, 2, 3, 4) may be used instead of reinforcing members having the same cross-sectional shape.

[0084] Accordingly, it is possible to resolve difficulties in joining or additional problems arising due to manufacturing tolerances, etc., and to easily supplement the rigidity of the housing (2311).

[0085] Referring to Fig. 6, a moving block (2331, 2332) can be connected to the outer side of the arm tube (2310) so as to be able to move linearly.

[0086] In other words, the outer side of the arm tube (2310), i.e., the housing (2311), may be provided with a straight rail (2313, 2314) on which a moving block (2331, 2332) can ride and move. A forklift (2333, 2334) may be connected to the moving block (2331, 2332).

[0087] The straight rail (2313, 2314) may be provided in two pieces, and each piece may be provided with two moving blocks (2331, 2332) to which two forklifts (2333, 2334) are connected.

[0088] The moving block (2331, 2332) may be equipped with a clamp connection part (2335, 2336). The belt (2370) connected to the driving motor (2360) may be equipped with a clamp (2373, 2374), and the driving force of the driving motor (2360) may be transmitted to the clamp (2373, 2374).

[0089] Clamps (2373, 2374) can interconnect the connecting portions of the mutual ends of the power-transmitting belts (2370).

[0090] The clamps (2373, 2374) can be connected to the clamp connection parts (2335, 2336) of the moving blocks (2331, 2332). The moving blocks (2331, 2332) can receive the rotational driving force of the driving motor (2360) through the clamps (2373, 2374), and the rotational force of the driving motor (2360) can be transmitted to the moving blocks (2331, 2332) through the belt (2370).

[0091] Accordingly, the forklift (2333, 2334) connected to the moving block (2331, 2332) can move in a straight line along the straight rail (2313, 2314).

[0092] The clamp (2373, 2374) may be equipped with a tension unit (2373-1, 2374-1), and the tension of the connection between the belts (2370) may be adjusted by the tension unit (2373-1, 2374-1).

[0093] The housing (2311) has a box shape with a hollow interior, and the female tube (2310), that is, the side constituting the housing (2311), may be plate-shaped.

[0094] One embodiment can form a rail reinforcement structure for linear movement of a forklift, including an arm tube (2310) having a frame that supports a forklift (2333, 2334) to be able to move reciprocally in a straight line, a linear rail (2313, 2314) coupled to an outer surface of the arm tube (2310), specifically a housing (2311), and coupled to enable linear movement of the forklift (2333, 2334), and a reinforcing member (2315, 2316) provided on an inner surface of the arm tube (2310), specifically the housing (2311), and coupled to the linear rail (2313, 2314) by bolts (2317, 2318).

[0095] The reinforcing members (2315, 2316) may be provided with a length corresponding to or shorter than the length of the straight rail (2313, 2314), and may be provided in multiple pieces corresponding to the entire length of one straight rail (2313, 2314).

[0096] Reinforcing members (2315, 2316) can be provided at positions corresponding to the inner surface and the outer surface with the side of the female tube (2310), specifically the housing (2311), interposed therebetween.

[0097] Bolts (2317, 2318) can simultaneously connect the straight rail (2313, 2314), the arm tube (2310), and more specifically, the side of the housing (2311) and the reinforcing member (2315, 2316).

[0098] In detail, the bolts (2317, 2318) can be combined to simultaneously penetrate the straight rail (2313, 2314), the arm tube (2310), and more specifically, the side of the housing (2311) and the reinforcing member (2315, 2316).

[0099] The reinforcing members (2315, 2316) may be provided with female threads to which bolts (2317, 2318) are coupled. In addition, male threads formed on the outer surface of the bolts (2317, 2318) may be provided corresponding to the female threads.

[0100] With further reference to FIGS. 8 and 9, the installation structure of a pulley used for power transmission in a first drive module (2000) according to one embodiment of the present invention is disclosed.

[0101] In one embodiment, the arm tube (2310) may be a frame supporting a forklift (2333, 2334). In addition, the arm tube (2310) may be equipped with a drive motor (2360) and may include a pulley (2393) that transmits the driving force of the drive motor (2360) to the forklift (2333, 2334) via a belt (2370).

[0102] Here, the pulley (2393) may be provided in a pulley module (2390) coupled to the arm tube (2310) in a structure in which both ends of the rotation axis are supported. The rotation axis of the pulley (2393) may be supported by a ball bearing.

[0103] The pulley module (2390) can be provided at each of the four corners of the arm tube (2310) which is provided in a square box shape. Since the belt (2370) is wound around the pulley (2393) and transmits power while rotating, the pulley module (2390) can be coupled to the outside of the four corners of the arm tube (2310).

[0104] The pulley module (2390) may include a pulley housing (2391) fixedly mounted on the arm tube (2310) and a pulley (2393) having a structure in which both ends of the rotational axis are supported by the pulley housing (2391). The rotational axis of the pulley (2393) may be supported by a ball bearing on the pulley housing (2391).

[0105] The pulleys (2393) provided on both sides in the width direction (Y-axis direction) can be mutually rotatably linked by a power transmission link (2395). In addition, the power transmission link (2395) can cause the pulleys (2393) on both sides to rotate together and simultaneously apply driving force to both sides of the same forklift.

[0106] Meanwhile, the forklift (2333, 2334) may include first and second forklifts provided at the upper and lower portions, and the driving motor (2361, 2362) may include first and second driving motors that drive the first and second forklifts, respectively.

[0107] In addition, each pulley housing (2391) may be equipped with two pulleys, one upper and one lower, which are connected to the first and second drive motors by a belt.

[0108] Each pulley provided in the upper and lower directions can be mutually rotatably linked with the upper and lower pulleys provided on both sides in the width direction by a power transmission link (2395).

[0109] Referring further to FIG. 10a, a first drive module (2000) according to one embodiment of the present invention may be equipped with a drive motor (2360) for driving a forklift (2333, 2334). In one embodiment, the drive motor (2360) may perform a weight balancing function.

[0110] An industrial robot (1000) of one embodiment may include a first drive module (2000) responsible for linear movement of a forklift and a second drive module (3000) responsible for vertical movement and rotational movement of the first drive module (2000).

[0111] And, the first drive module (2000) may include an arm tube (2310) that is coupled to the rotation axis that rotates the second drive module (3000) and has a frame that supports the forklift, and a drive motor (2360) that is provided in the arm tube (2310) and provides a driving force for the linear movement of the forklift, and the drive motor (2360) may be provided to be biased to one side from the rotation axis.

[0112] That is, the driving motor (2360) can be placed on the arm tube (2310) so that it is offset to one side from the rotation axis to perform the weight balancing function.

[0113] The drive motor (2360) may be positioned on the opposite side of the direction in which the forklift moves linearly relative to the rotation axis. When the forklift (2333, 2334) moves, the weight may move to the opposite side of the side where the drive motor (2360) is installed, and further, when a transport object is placed on the forklift (2333, 2334), the weight on the opposite side may increase.

[0114] Referring to Fig. 10b, the arm tube (2310) may be provided with one side, where the drive motor (2360) is installed, sagging downwards around the rotation axis before the forklift is driven. That is, weight can be added in advance to prepare for weight balancing in consideration of the future movement of the forklift or the weight of the object to be transported.

[0115] Alternatively, in a similar manner, the arm tube (2310) may be provided such that the opposite side of the one side where the drive motor (2360) is not provided is raised around the rotation axis before driving the forklift.

[0116] The arm tube (2310) may be provided so that one side, where the drive motor (2360) is installed, sags downward or remains horizontal around the rotation axis when the forklift moves in a straight line to the opposite end. Alternatively, the arm tube may be provided so as to remain horizontal, taking into account the weight of the object to be transported.

[0117] Referring additionally to FIGS. 11 to 13, a power transmission structure of a first drive module according to one embodiment of the present invention is disclosed.

[0118] The power transmission structure of the first drive module (2000) of one embodiment may include an arm tube (2310) having a frame that supports a forklift, a drive motor (2360) provided in the arm tube (2310), and a pulley (2393) that transmits the driving force of the drive motor (2360) to the forklift through a belt (2370).

[0119] In addition, the pulley (2393) may include a first belt (2371-1, 2372-1) connected to the driving motor (2360) and a second belt (2371-2, 2372-2) that provides power for the movement of the forklift.

[0120] Pulleys (2393) can be provided at all four corners of the arm tube (2310). In addition, the pulleys (2393) provided at the same positions in the width direction can rotate while being supported at both ends by the second belt (2371-2, 2372-2).

[0121] Pulleys (2393) provided on both sides in the width direction can be mutually rotated by a power transmission link (2395).

[0122] And, only one of the pulleys provided on both sides in the width direction that are interconnected by the power transmission link (2395) can be connected to either one of the first or second driving motors (2360-2361, 2362) and the first belt (2371-1, 2372-1).

[0123] The pulley (2392) may be provided with a pulley housing (2391) that is fixedly mounted on the arm tube (2310), and may be provided with a double-end support structure in which both ends of the rotation shaft are supported by the pulley housing (2391).

[0124] The forklift may include first and second forklifts provided at the upper and lower portions, and the drive motor may include first and second drive motors for driving the first and second forklifts, respectively.

[0125] Additionally, two pulleys driven by the first and second driving motors may be provided at the four corners of the arm tube, one above the other.

[0126] Each of the four corners of the arm tube is equipped with two pulleys, one above the other and one below, and each of the pulleys equipped above and below can be mutually rotated with the upper and lower pulleys equipped on both sides in the width direction by a power transmission link.

[0127] With further reference to FIGS. 14 and 15, the sealing structure of the driving motor (2360) provided in the first driving module (2000) according to one embodiment of the present invention is disclosed.

[0128] The first driving module (2000) can be driven in a vacuum state, and the second driving module (3000) can be driven in a standby state. The first driving module (2000) can be installed in a vacuum chamber, and the second driving module (3000) can be installed outside the vacuum chamber.

[0129] In addition, the interior of the drive motor (2360-2361, 2362) of the first drive module (2000) is in a standby state, but must be driven in a vacuum chamber, so the drive motor (2360) itself is in a vacuum state. Accordingly, the interior and exterior of the drive motor (2360) must be sealed.

[0130] The drive motor (2360) includes a stator and a rotor, and a magnetic fluid can be used to achieve such sealing. A magnetic fluid can be used to seal the space between the stator, which is a stationary member, and the rotor, which is a rotating member.

[0131] A driving motor (2360) of one embodiment may include a stator (2361a, 2362a), a rotor (2361b, 2362b) including a rotation shaft (2361-1, 2362-1), and a sealing module (2363, 2364) provided between the stator and the rotation shaft.

[0132] The sealing module can seal between the stator and the rotating shaft by means of a magnetic fluid (2363-3, 2364-3).

[0133] A sealing module (2363, 2364) of one embodiment may include a rotating module (2363-1, 2364-1) coupled to a rotating shaft (2361-1, 2362-1), a sealing block (2363-2, 2364-2) coupled to a stator (2361a, 2362a), and a magnetic fluid (2363-3, 2364-3) filled between the rotating module (2363-1, 2364-1) and the sealing block (2363-2, 2364-2).

[0134] The sealing block (2363-2, 2364-2) may be made of a magnetic material so that it exerts an attractive force on the magnetic fluid (2363-3, 2364-3).

[0135] An O-ring for sealing may be interposed between the rotation shaft (2361-1, 2362-1) and the rotation module (2363-1, 2364-1), and an O-ring for sealing may be interposed between the stator (2361a, 2362a) and the sealing block (2363-2, 2364-2).

[0136] The sealing block (2363-2, 2364-2) may be provided in a round ring shape surrounding the rotation axis, and the magnetic fluid (2363-3, 2364-3) may be provided in a round ring shape along the sealing block (2363-2, 2364-2).

[0137] The rotation shaft (2361-1, 2362-1) can be rotatably supported by a ball bearing (2363-4, 2364-4) interposed between the rotation module (2363-1, 2364-1) and the stator (2361a, 2362a).

[0138] Ball bearings (2363-4, 2364-4) can be provided on the upper and lower sides with magnetic fluid (2363-3, 2364-3) interposed therebetween in the direction of the rotation axis.

[0139] Referring additionally to FIGS. 16a to 18, a structure in which a forklift equipped in a first drive module of one embodiment is fixed to a moving block is disclosed.

[0140] In one embodiment, the first drive module (2000) may be configured such that a forklift (2333, 2334) is fixed to a moving block (2335, 2336), and the moving block (2335, 2336) can be connected to the side of the arm tube (2330) so as to be able to move linearly.

[0141] The side of the moving block (2335, 2336) and the female tube (2310) - more specifically, the housing (2311) - may optionally be provided with a female rail or a male rail (2331-1, 2332-1) (2313, 2314), and the moving block (2335, 2336) can move linearly in the longitudinal direction (X-axis direction) by riding the female rail fitted into the male rail.

[0142] That is, the first driving module (2000) of one embodiment includes an arm tube (2330) to which a moving block (2335, 2336) is connected so as to be able to move linearly, and a forklift (2333, 2334) connected to the moving block (2335, 2336), and the moving block (2335, 2336) may be equipped with an angle adjustment module (2337, 2338) for reinforcing the sagging of the forklift (2333, 2334).

[0143] In other words, the forklift (2333, 2334) is fixedly connected to the moving block (2335, 2336) by a fixing screw (2341, 2342). If the forklift (2333, 2334) sags due to repeated use, the fixing screw (2341, 2342) can be loosened, the angle can be adjusted using the angle adjustment module (2337, 2338), and the fixing screw (2341, 2342) can be tightened again.

[0144] An angle adjustment module (2337, 2338) of one embodiment includes at least two set screw bolts (2337-1, 2338-1) spaced apart in the longitudinal direction in which the forklift (2333, 2334) moves in a straight line, and the set screw bolts (2337-1, 2338-1) can be provided to adjust the relative distance between the moving block (2335, 2336) and the forklift (2333, 2334).

[0145] In an angle adjustment module (2337, 2338) of one embodiment, a set screw bolt (2337-1, 2338-1) is simultaneously fitted into a moving block (2335, 2336) and a forklift (2333, 2334), and the set screw bolt (2337-1, 2338-1) is screw-connected to only one of the moving block (2335, 2336) and the forklift (2333, 2334) so ​​that the relative gap can be adjusted by rotation.

[0146] A vibration damping pad (2337-2, 2338-2) may be interposed between the moving block (2335, 2336) and the forklift (2333, 2334).

[0147] Set screw bolts (2337-1, 2338-1) can be simultaneously fitted to the moving block (2335, 2336), vibration damping pad (2337-2, 2338-2) and forklift (2333, 2334).

[0148] In an angle adjustment module (2337, 2338) of one embodiment, a set screw bolt (2337-1, 2338-1) is freely rotatably fixed to a moving block (2335, 2336), and the set screw bolt (2337-1, 2338-1) is screw-connected to a forklift (2333, 2334) so ​​that the relative distance between the forklift (2333, 2334) and the moving block (2335, 2336) can be adjusted by rotation.

[0149] Next, the second drive module (3000) and other components will be described in detail with additional reference to FIGS. 19a to 33.

[0150] Referring additionally to FIGS. 19A to 22, the second driving module (3000) of one embodiment may include a housing (3100) forming the exterior of the second driving module (3000), an elevation module (3300) provided within the housing (3100), and a rotation module (3500). The rotation module (3500) may be provided in the elevation module (3300) and may ascend or descend together with the elevation module (3300).

[0151] The housing (3100) may be provided in a roughly cylindrical shape. The housing (3100) may include an integral body (3110) including at least a portion of an upper surface and a side surface, a round-shaped bottom plate (3120) coupled to the integral body (3110), and a cover (3130) covering the side surface of the integral body (3110).

[0152] The industrial robot (1000) of the present embodiment may include a first drive module (2000) that is responsible for the linear motion of the forklift and a second drive module (3000) that is responsible for the rotational motion and the up-and-down movement of the first drive module (3000). The second drive module (2000) may include a housing (3100) that forms an exterior, and an elevation body (3310) that includes an elevation shaft (3311) that is provided in the housing (3100) so as to be able to ascend and descend and has a rotation shaft (3563) that rotates the first drive module (2000) therein.

[0153] The housing (3100) may be provided in a cylindrical shape and may include an integral body (3110) in which at least a portion of the upper surface and side surface of the housing (3100) are provided integrally.

[0154] The bottom plate (3120) forming the bottom of the housing (3100) may be provided separately and joined to the integrated body (3110).

[0155] The housing (3100) includes a cover (2130), and the cover (2130) can be provided separately and joined to the integrated body (3110).

[0156] The floor plate (3120) may be equipped with an elevator drive motor (3340), an elevator rail (3320), and a power transmission ball screw rail (3330) used for the elevator movement of the first driving module (2000).

[0157] A support frame (4000) may be provided between the first driving module (2000) and the second driving module (3000), and the support frame (4000) is fixed to the lifting shaft (3311) of the second driving module (3000), and the support frame (4000) can move up or down relative to the fixed integral body (3110).

[0158] FIG. 32 illustrates an integral body (3110) according to one embodiment of the present invention, wherein the integral body (3110) is disclosed to include at least a portion of an upper surface and a side surface.

[0159] And, FIG. 33 illustrates an example of utilizing an integrated body (3110) according to one embodiment of the present invention, and as illustrated, when the integrated body (3110) is used, a portion of the side surface and the upper surface of the housing (3100), which is the basis of the second drive module (3000), are formed integrally, so that it can have very strong rigidity.

[0160] Accordingly, the lifting shaft (3311) responsible for the rising and falling of the first driving module (2000) can be firmly supported on the housing (3100), and the overall structure and driving rigidity can be improved.

[0161] Referring to FIGS. 21 to 30, an elevator module (3300) and a rotation module (3500) are disclosed.

[0162] The lifting module (3300) includes an lifting body (3310) that moves up and down along an lifting rail (3320) provided in a housing (3100). The lifting body (3310) includes an lifting shaft (3311), and a rotation shaft (3563) may be provided inside the lifting shaft (3311).

[0163] The lifting module (3300) includes an lifting drive motor (3340) that provides driving force for up and down movement to the lifting body (3310), and may be equipped with a power transmission ball screw rail (3330) that transmits the driving force of the lifting drive motor (3340) to the lifting body (3310).

[0164] The elevator drive motor (3340) can be connected by a power transmission ball screw rail (3330) and a power transmission belt (3345).

[0165] The second driving module (3000) may include a housing (3100) forming an exterior, an elevating body (3310) including an elevating shaft (3311) that is provided to be able to be lifted in the housing (3100) and has a rotation shaft (3563) inside that rotates the first driving module (2000), and a bellows (3350) that surrounds the elevating shaft (3311) from the outside to seal the outer surface of the elevating shaft (3311).

[0166] As disclosed in FIGS. 23 and 25, the first driving module (2000) can be driven in a vacuum state, and the second driving module (3000) can be driven in a standby state. The first driving module (2000) can be provided in a vacuum chamber, and the second driving module (3000) can be provided outside the vacuum chamber.

[0167] The first drive module (2000) is driven in a vacuum state, but the second drive module (3000) is driven in an air state, so they must also be sealed along a predetermined boundary.

[0168] The lifting module (3300) of the second driving module (3000) connected to the first driving module (2000) can be surrounded and sealed by a bellows (jawbar), and a vacuum state can be maintained between the outer surface of the lifting shaft and the inner surface of the bellows (jawbar).

[0169] In addition, the rotation shaft (3563) that rotates the first drive module (2000) is located inside the elevation shaft (3311), and the space between the rotation shaft (3563) and the elevation shaft (3311) must also be sealed. Since the rotation drive unit (3510) includes a rotation unit (3562) that includes a fixed unit (3561) and a rotation shaft (3563), a magnetic fluid can be used to implement sealing between the rotation shaft (3563) and the fixed unit (3561).

[0170] Referring further to FIG. 24, a rotation module (3500) of one embodiment may include a fixed portion (3561), a rotation portion (3562) including a rotation shaft (3563), and a sealing module (3564) provided between the fixed portion and the rotation shaft.

[0171] The sealing module can seal between the fixed part and the rotating shaft by means of a magnetic fluid (3567).

[0172] A sealing module (3564) of one embodiment may include a rotating module (3565) coupled to a rotating shaft (3563), a sealing block (3566) coupled to a fixed part (3561), and a magnetic fluid (3567) filled between the rotating module (3564) and the sealing block (3566).

[0173] The sealing block (3566) may be made of a magnetic material so that it exerts an attractive force on the magnetic fluid (3567).

[0174] An O-ring for sealing may be interposed between the rotation shaft (3563) and the rotation module (3565), and an O-ring for sealing may be interposed between the fixed part (3561) and the sealing block (3566).

[0175] The sealing block (3566) may be provided in a round ring shape surrounding the rotation axis, and the magnetic fluid (3567) may be provided in a round ring shape along the sealing block (3566).

[0176] The rotation shaft (3563) can be rotatably supported by a ball bearing (3568) interposed between the rotation module (3565) and the fixed part (3561). The ball bearing (3568) can be provided at the upper and lower portions with a magnetic fluid (3567) interposed therebetween in the direction of the rotation shaft.

[0177] The ball bearing (3568) may be located above the midpoint of the axial length of the rotation shaft (3563).

[0178] Accordingly, since the ball bearing (3568) supporting the rotation shaft (3563) is positioned close to the first drive module (2000), the moment arm length is shortened, thereby enabling the heavy first drive module (2000) to rotate while supporting it more firmly.

[0179] Referring further to FIG. 26, an elevator module (3300) of one embodiment may include an elevator body (3310) including an elevator shaft (3311) having a rotation shaft (3563) therein, an elevator rail (3320) provided in a housing (3100) so that the elevator body (3310) moves up and down, an elevator drive motor (3340) that provides a driving force for the up and down movement to the elevator body (3310), and a power transmission ball screw rail (3330) that transmits the driving force of the elevator drive motor (3340) to the elevator body (3310).

[0180] The elevator drive motor (3340) can be connected by a power transmission ball screw rail (3330) and a power transmission belt (3345).

[0181] In addition, the second driving module (3000) may include a housing (3100) forming an exterior, an elevating body (3310) including an elevating shaft (3311) that is provided to be able to be lifted in the housing (3100) and has a rotation shaft (3563) inside that rotates the first driving module (2000), and a bellows (3350) that surrounds the elevating shaft (3311) from the outside to seal the outer surface of the elevating shaft (3311).

[0182] As shown in Fig. 25, the second driving module (3000) includes a housing (3100) forming an exterior, and an elevating body (3310) including an elevating shaft (3311) that is provided to be elevable on the housing (3100) and has a rotation shaft (3563) therein that rotates the first driving module (2000).

[0183] In addition, since the lifting shaft (3311) is lifted into a vacuum space where the first driving module (2000) is installed, the outer surface of the lifting shaft (3311) must be sealed with the atmosphere.

[0184] Accordingly, the present embodiment may include a bellows (3350) that wraps the lifting shaft (3311) from the outside and seals the outer surface of the lifting shaft (3311).

[0185] A second driving module (3000) of one embodiment may include a housing (3100) forming an exterior, an elevating body (3310) including an elevating shaft (3311) that is provided to be liftable in the housing (3100) and has a rotation shaft (3563) therein for rotating the first driving module (2000), and a bellows (3350) that surrounds the elevating shaft (3311) from the outside to seal the outer surface of the elevating shaft (3311).

[0186] The lifting shaft (3311) can enter and exit the vacuum space where the first driving module (2000) is provided, and the bellows (3350) can seal the outer surface of the lifting shaft (3311) from the outside, i.e., the vacuum space where the second driving module (3000) is provided, by folding or unfolding together with the rising or falling of the lifting shaft (3311).

[0187] The lower part of the bellows (3350) can be sealedly connected to the lifting body (3310) to which the lower part of the lifting shaft (3311) is connected.

[0188] And, the upper part of the bellows (3350) can be sealedly connected to the upper part of the housing (3100) forming the exterior of the second drive module (3000).

[0189] The bellows (3350) is coupled to a folding support structure (3360), and the folding support structure (3360) can serve as a guide to support the bellows (3350) to be folded or unfolded.

[0190] It includes a rotary drive motor (3530) that provides power to drive a rotary shaft (3563) that rotates the first drive module (2000), and the rotary drive motor (3530) is provided in the lifting body (3310) and can be lifted and lowered in the housing (3100) together with the lifting body (3310).

[0191] Referring additionally to FIGS. 27 to 30, a structure in which an elevator module (3300) of one embodiment is driven is disclosed.

[0192] An industrial robot (1000) of one embodiment may include a first drive module (2000) responsible for linear motion of a forklift (2333, 2334) and a second drive module (3000) responsible for rotational motion and up-down movement of the first drive module (2000).

[0193] In one embodiment, the second drive module (3000) may include at least a portion of a housing (3100) forming an exterior, an elevation body (3310) including an elevation shaft (3311) that is provided to be liftable in the housing (3100) and has a rotation shaft (3563) therein for rotating the first drive module (2000), an elevation rail (3320) provided to guide the elevation and descent of the elevation body (3310) in the housing (3100), an elevation drive motor (3340) provided in the housing (3100), and a power transmission ball screw rail (3330) that transmits the power of the elevation drive motor (3340) to the elevation body (3310).

[0194] In one embodiment, the elevator rail (3320) is provided in two on the left and right, and the power transmission ball screw rail (3330) may be provided in two on the front and back, or one on the front or rear.

[0195] In one embodiment, a virtual line connecting the two above-mentioned elevator rails (3320) horizontally may be arranged orthogonally to a virtual line connecting the power transmission ball screw rail (3330) and the rotation shaft (3563) horizontally.

[0196] In one embodiment, when two power transmission ball screw rails (3330) are provided in the front and rear, a virtual line connecting the two lifting rails (3320) horizontally to each other can be arranged orthogonally to a virtual line connecting the two power transmission ball screw rails (3330) horizontally to each other.

[0197] In one embodiment, a virtual line connecting two elevator rails (3320) horizontally may or may not intersect the rotation axis (3563).

[0198] In one embodiment, when two power transmission ball screw rails (3330) are provided in the front and back, a virtual line connecting the two power transmission ball screw rails (3330) horizontally may intersect the rotation axis (3563).

[0199] Referring further to FIG. 31, the second driving module (3000) of one embodiment may include a housing (3100) forming an exterior, and an elevating body (3310) including an elevating shaft (3311) that is provided in the housing (3100) to be able to be lifted and lowered and has a rotation shaft (3563) therein that rotates the first driving module (2000).

[0200] In one embodiment, the rotation shaft (3563) is provided as a hollow type having an axial space therein, and a hollow shaft (3700) that is supported on the rotation shaft (3563) by a ball bearing (3710) and can freely rotate may be provided at the upper end of the inner hollow portion of the rotation shaft (3563).

[0201] Here, a hollow shaft (3700) may be provided on an extension of the rotation axis (3563). In addition, the hollow shaft (3700) may be provided with a Teflon material that is resistant to friction or wear. A power or control cable may be inserted through the hollow shaft (3700).

[0202] Since the hollow shaft (3700) is provided to be freely rotatable, even if the first drive module (2000) rotates around the rotation axis (3563), the power or control cable inserted through the hollow portion of the rotation axis (3563) is provided to pass through the inside of the hollow shaft (3700) and rotate together with the hollow shaft (3700), so that the frictional force is significantly reduced and the amount of wear can be very small. Accordingly, durability can be improved.

[0203] In one embodiment, a support frame (4000) may be provided between the first driving module (2000) and the second driving module (3000), and the support frame (4000) is fixed to the lifting shaft (3311) of the second driving module (3000), and the lifting shaft (3311) and the support frame (4000) may move upward or downward together.

[0204] In one embodiment, the support frame (4000) may have a through hole (4100) in the center, and a power or control cable that is inserted through the hollow shaft (3700) may be extended and inserted into the through hole (4100).

[0205] In one embodiment, the through hole (4100) of the hollow shaft (3700) and the support frame (4000) may be provided on an extension of the rotation axis (3563).

[0206] In one embodiment, the support frame (4000) may be provided in a square shape.

[0207] Although the present invention has been described with reference to the above embodiments, it will be understood by those skilled in the art that various modifications and changes can be made to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below.

[0208] [Explanation of symbols]

[0209] 1000 industrial robots

[0210] 2000 1st drive module

[0211] 2100 module housing

[0212] 2300 linear motion module

[0213] 2310 Amtube

[0214] 2311 Housing (2311a, 2311b)

[0215] 2312 reinforcing rib

[0216] 2312-1~4 unit ribs

[0217] 2312-5~8 connecting rod

[0218] 2313, 2314 No. 1-1, 1-2 straight rail

[0219] 2315, 2316 No. 1-1, 1-2 reinforcing members

[0220] 2317, 2318 No. 1-1, 1-2 connecting bolts

[0221] 2330 dark module

[0222] 2331, 2332 1st and 2nd moving blocks

[0223] 2331-1, 2332-1 No. 2-1, 2-2 straight rail

[0224] 2333, 2334 No. 1 and No. 2 forklifts

[0225] 2335, 2336 (1st, 2nd) Clamp connection - provided on the moving block

[0226] 2337, 2338 angle adjustment module

[0227] 2337-1, 2338-1 Angle adjusting bolt (set screw bolt)

[0228] 2337-2, 2338-2 vibration damping pads

[0229] 2337-3, 2338-3 Fixed Bracket

[0230] 2341, 2342 set screws

[0231] 2350 drive unit

[0232] 2360 drive motor is installed on one side

[0233] 2361, 2362 first and second drive motors

[0234] 2361a,b, 2362a,b stator, rotor

[0235] 2361-1, 2362-1 Rotating shaft

[0236] 2363, 2364 sealing modules

[0237] 2363-1, 2364-1 rotary module

[0238] 2363-2, 2364-2 sealing block

[0239] 2363-3, 2364-3 Ferrofluid

[0240] 2363-4, 2364-4 ball bearings

[0241] 2370 belt

[0242] 2371-1,2 1st and 2nd belts

[0243] 2372-1,2 1st and 2nd belts

[0244] 2373, 2374 (1st, 2nd) clamps

[0245] 2373-1, 2374-1 tension unit

[0246] 2390 Pulley Module Double-Ended Support Structure

[0247] 2391-1~4 Pulley Housing

[0248] 2393-1~4 Upper and lower pulleys

[0249] 2395-1~2 Power transmission link

[0250] 2395-1~2 Power transmission link

[0251] 3000 2nd drive module

[0252] 3100 Housing

[0253] 3110 integrated body

[0254] 3120 floor plate

[0255] 3130 cover

[0256] 3300 Lift Module

[0257] 3310 Elevator Body

[0258] 3311 Elevator shaft

[0259] 3320 elevator rail

[0260] 3330 Power Transmission Ball Screw Rail

[0261] 3340 elevator drive motor

[0262] 3345 Power Transmission Belt

[0263] 3350 Bellows (Javara)

[0264] 3360 folding support structure

[0265] 3370 top cap

[0266] 3500 rotation module

[0267] 3510 rotary drive unit

[0268] 3561 fixed part

[0269] 3562 Rotating part

[0270] 3563 Rotation axis

[0271] 3564 sealing module

[0272] 3565 Rotating Module

[0273] 3566 sealing block

[0274] 3567 Ferrofluid

[0275] 3568 ball bearing

[0276] 3530 rotary drive motor

[0277] 3550 Power transmission means

[0278] 3700 hollow shaft

[0279] 3710 ball bearing

[0280] 3720 Control or Power Cable

[0281] 4000 support frame

[0282] 4100 penetration

[0283]

[0284] The present invention is useful, for example, in providing a device for lifting and rotating an industrial robot.

Claims

1. Regarding industrial robots, A first drive module responsible for the linear movement of the forklift; and A second driving module responsible for the rotational motion and the up-and-down movement of the first driving module; The second driving module includes a housing forming an exterior; and an elevating body including an elevating shaft that is provided to be liftable in the housing and has a rotational shaft therein for rotating the first driving module; The above rotational axis is provided as a hollow type having an axial space inside, A freely rotatable hollow shaft of an industrial robot supported by ball bearings at the upper end of the above rotation axis.

2. In paragraph 1, The above hollow shaft is a freely rotatable hollow shaft of an industrial robot provided on an extension of the above rotation axis.

3. In paragraph 1, The above hollow shaft is a freely rotatable hollow shaft for an industrial robot made of Teflon material.

4. In paragraph 1, A freely rotatable hollow shaft of an industrial robot through which a power or control cable is inserted.

5. In paragraph 1, A support frame is provided between the first driving module and the second driving module, The above support frame is fixed to the lifting shaft of the second drive module, and the lifting shaft and the support frame are a freely rotatable hollow shaft of an industrial robot that moves upward or downward together.

6. In paragraph 5, The above support frame has a through hole in the center, A freely rotatable hollow shaft of an industrial robot through which a power or control cable is inserted.

7. In paragraph 6, A freely rotatable hollow shaft of an industrial robot, wherein the hollow shaft and the through hole of the support frame are provided on an extension of the rotation axis.

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