Sealing performance detection device and use method therefor

Abstract

A sealing performance detection device, which is used for detecting the sealing performance of a sealing ring (20) mounted on a chuck (10). The chuck (10) comprises an annular base portion (101), wherein the inner side wall of the annular base portion (101) is provided with a support portion (1011) for supporting the edge of the surface of a substrate; and at least part of the sealing ring (20) covers the upper surface of the support portion (1011). The sealing performance detection device comprises a base (30) and a pressing disk (40), wherein the base (30) comprises a bottom wall (301) and an annular side wall (302); the pressing disk (40) is configured in such a way that when the pressing disk (40) is in a second position, same tightly fits to the sealing ring (20) to form a sealed cavity (50); the base (30) is provided with a first through hole (303); an air extraction device (60) is in communication with the first through hole (303), so as to extract air from the sealed cavity (50) to form a negative pressure; the base (30) is further provided with a second through hole (304); an air pressure gauge (70) is in communication with the second through hole (304), so as to measure the air pressure within the sealed cavity (50); and whether the sealing ring (20) assembled on the chuck (10) is damaged is determined by means of an air pressure value measured by the air pressure gauge (70), such that a sealing ring (20) with poor quality can be intercepted before the assembled chuck (10) is placed on an electroplating machine for use, thereby protecting the substrate. Further provided is a use method for a sealing performance detection device.

Description

Sealing test device and its usage method Technical Field

[0001] This application relates to a sealing performance testing device and its usage method, and particularly to a sealing performance testing device and its usage method for electroplating equipment. Background Technology

[0002] In the integrated circuit manufacturing industry, metal plating / deposition processes are becoming increasingly common. In the field of advanced wafer-level packaging, many technologies also utilize metal plating processes, such as copper pillars, RDLs (redistribution layers), TSVs, and adapter boards.

[0003] For electroplating equipment, the substrate holding device is crucial. In current electroplating processes, the substrate holding device includes a clamp and a clamping plate. The center of the clamp is configured with a penetrating receiving space. The substrate is placed into the receiving space, with its front and back sides clamped by the clamp and clamping plate respectively, leaving the front side exposed for processing. When the substrate is immersed in the electrolyte for electroplating a metal layer on its front side, the edges of the front side and the back side of the substrate need to be protected from contact with the electrolyte. Therefore, a sealing ring is required between the clamp and the substrate to prevent the electrolyte from reaching the edges of the front side. Otherwise, the edges of the front side will be plated with metal, resulting in poor uniformity of the deposited metal film.

[0004] Currently, after leaving the factory, the sealing rings are typically inspected for damage only by visual inspection, which has low accuracy. If a damaged sealing ring is installed on the clamp for subsequent processing, the sealing effect will be poor, and leakage is likely to occur during electroplating, damaging the substrate. Furthermore, during the assembly of the sealing ring and clamp, individual assembly techniques and unintentional damage to the sealing ring during assembly can also lead to poor sealing in subsequent electroplating processes, resulting in leakage. Summary of the Invention

[0005] The technical problem to be solved by this application is to overcome the defect of the prior art that it is difficult to judge the sealing performance of the sealing ring, and to provide a sealing performance testing device and its usage method.

[0006] This application solves the above-mentioned technical problems through the following technical solution:

[0007] This application provides a sealing performance testing device for testing the sealing performance of a sealing ring mounted on a clamp, the clamp including an annular base, the inner sidewall of the annular base being provided with a support portion for supporting the edge of a substrate surface, and at least a portion of the sealing ring covering the upper surface of the support portion;

[0008] The sealing performance testing device includes:

[0009] The base includes a bottom wall and an annular side wall. The upper surface of the annular side wall is used to support the annular base. The base has a first through hole and a second through hole.

[0010] A pressure plate is configured to move between a first position and a second position. When the pressure plate is in the first position, the pressure plate is spaced apart from the sealing ring. When the pressure plate is in the second position, the pressure plate is tightly fitted with the sealing ring so that the bottom wall, the annular side wall, the clamping plate, and the pressure plate together form a sealed cavity.

[0011] An air extraction device is connected to the first through hole, and the air extraction device is used to extract air from the sealed cavity through the first through hole to create a negative pressure in the sealed cavity.

[0012] A barometer is connected to the second through hole, and the barometer is used to measure the air pressure inside the sealed cavity through the second through hole.

[0013] This application also provides a method for using a sealing performance testing device, wherein the sealing performance of a sealing ring mounted on a clamping plate is tested using the sealing performance testing device as described above. The method for using the sealing performance testing device includes the following steps:

[0014] S1. Control the pressure plate to move to the second position to form the sealed cavity;

[0015] S2. Control the air extraction device to extract air from the sealed cavity to form a negative pressure, obtain the air pressure value measured by the air pressure measuring instrument, and turn off the air extraction device after the air pressure value stabilizes.

[0016] S3. Continue to acquire the air pressure value. If the air pressure value remains stable and within the preset range, the sealing ring is determined to be qualified; otherwise, the sealing ring is determined to be unqualified.

[0017] The positive and progressive effects of this application are as follows:

[0018] The sealing performance testing device of this application creates conditions for forming a sealed cavity by moving the pressure plate between a first position and a second position. A vacuum device then creates a negative pressure inside the sealed cavity. The pressure value inside the sealed cavity under negative pressure is measured by a pressure gauge to determine whether the sealing ring assembled on the clamp is damaged. This device can intercept defective sealing rings before the assembled clamp (with sealing ring) is placed on the electroplating machine, thereby reducing or avoiding leakage during subsequent electroplating and protecting the substrate. Furthermore, after the sealing ring is installed on the clamp, a sealing performance test is performed. If the test result is satisfactory, the clamp with the assembled sealing ring can be directly removed from the sealing performance testing device and placed in the electroplating machine for electroplating. This operation is convenient and avoids poor sealing performance caused by individual assembly techniques or unintentional damage to the sealing ring during assembly. This ensures both the good sealing performance of the sealing ring itself and the sealing performance after the sealing ring is assembled on the clamp.

[0019] Overview of the attached figures

[0020] The features and performance of this application are further described by the following embodiments and accompanying drawings.

[0021] Figure 1 is a schematic diagram of the sealing test device according to an embodiment of this application.

[0022] Figure 2 is a partial cross-sectional view of the sealing detection device when the pressure plate is in the first position according to an embodiment of this application.

[0023] Figure 3 is an enlarged view of point A in Figure 2.

[0024] Figure 4 is a partial cross-sectional view of the sealing detection device when the pressure plate is in the second position according to an embodiment of this application.

[0025] Figure 5 is an enlarged view of section B in Figure 4.

[0026] Figure 6 is a partial schematic diagram of the sealing detection device when the pressure plate is in the second position according to an embodiment of this application.

[0027] Figure 7 is a partial wiring diagram of a sealing detection device according to an embodiment of this application.

[0028] Preferred embodiments of this application

[0029] The present application is further illustrated below by way of embodiments, but this does not limit the present application to the scope of the following embodiments.

[0030] Please refer to Figures 1 to 7 for further understanding. This application provides a sealing performance testing device for detecting the sealing performance of a sealing ring 20 mounted on a clamp 10. The clamp 10 includes an annular base 101, and the inner sidewall of the annular base 101 is provided with a support portion 1011 for supporting the edge of the substrate surface. At least a portion of the sealing ring 20 covers the upper surface of the support portion 1011. In other words, when the substrate is placed on the support portion 1011, the surface edge of the substrate facing the electroplating solution contacts the sealing ring 20. The sealing ring 20 isolates the substrate from the support portion 1011, preventing the electrolyte from reaching the surface edge of the substrate or even the other side of the substrate surface. The sealing performance testing device includes a base 30, a pressure plate 40, an air extraction device 60, and a barometer 70. The base 30 includes a bottom wall 301 and an annular side wall 302. The upper surface of the annular side wall 302 supports the annular base 101 to allow the clamping plate 10 to be placed on the base 30. The base 30 has a first through hole 303 and a second through hole 304. The pressure plate 40 is configured to move between a first position and a second position. When the pressure plate 40 is in the first position, the pressure plate 40 and the sealing ring 20 are spaced apart. When the pressure plate 40 is in the second position, the pressure plate 40 and the sealing ring 20 are tightly fitted so that the bottom wall 301, the annular side wall 302, the clamping plate 10, and the pressure plate 40 enclose a sealed cavity 50. The air extraction device 60 communicates with the first through hole 303 and is used to extract air from the sealed cavity 50 through the first through hole 303 to create a negative pressure inside the sealed cavity 50. The barometer 70 is connected to the second through hole 304 and is used to measure the air pressure inside the sealed cavity 50 through the second through hole 304.

[0031] Specifically, when the pressure plate 40 is in the first position, as shown in Figures 2 and 3, the pressure plate 40 is positioned away from the sealing ring 20 and a gap is formed between them, leaving the space above the bottom wall 301 open. During testing, when the pressure plate 40 moves from the first position to the second position, as shown in Figures 4 to 6, the bottom of the pressure plate 40 presses against the support part 1011, making the pressure plate 40 and the sealing ring 20 circumferentially tightly fitted. At this time, the base 30, the clamping plate 10, and the lower surface of the pressure plate 40 form a sealed cavity 50. The air extraction device 60 is activated, and air is extracted from the sealed cavity 50 through the first through hole 303, creating a negative pressure inside the sealed cavity 50. The sealing performance of the sealing ring 20 is judged by the air pressure measured by the air pressure measuring gauge 70. If the measured air pressure value is stable and within the preset range, the sealing ring 20 is deemed qualified.

[0032] In this embodiment, the pressure plate 40 moves between the first and second positions to create conditions for forming a sealed cavity 50. Then, the vacuum device 60 is used to create a negative pressure inside the sealed cavity 50. The air pressure value inside the sealed cavity 50 under negative pressure is measured by the air pressure measuring gauge 70 to determine whether the sealing ring 20 assembled on the clamping plate 10 is damaged. Before the clamping plate 10 (with the sealing ring 20 assembled) is placed on the electroplating machine, the poor quality sealing ring 20 can be intercepted, thereby reducing or avoiding leakage in the subsequent electroplating process and protecting the substrate. In addition, after the sealing ring 20 is installed on the clamping plate 10, a sealing performance test is performed. Once the test result is qualified, the clamping plate 10 with the sealing ring 20 assembled can be directly removed from the sealing performance test device and placed into the electroplating machine for electroplating. This operation is convenient and can avoid poor sealing performance caused by factors such as different individual assembly methods or unintentional damage to the sealing ring 20 during assembly. This ensures that the sealing ring 20 itself has good sealing performance, and the sealing performance is also guaranteed after the sealing ring 20 is assembled on the clamping plate 10.

[0033] Specifically, the pressure plate 40 moves up and down between the first position and the second position. When the pressure plate 40 is in the first position, it is above the clamping plate 10. When the pressure plate 40 moves down from the first position to the second position, it is in close circumferential contact with the sealing ring 20.

[0034] Specifically, in this embodiment, the evacuation device 60 is preferably a vacuum pump. Of course, in other examples, as an alternative, the evacuation device 60 can be any other type of evacuation device 60 depending on the actual working conditions, as long as it can evacuate the inside of the sealed cavity 50.

[0035] Specifically, in this embodiment, the barometer 70 is preferably a negative pressure sensor. Of course, in other examples, as an alternative, the barometer 70 can be any other type of barometer 70 depending on the actual working conditions, as long as it can measure the air pressure inside the sealed cavity 50.

[0036] Specifically, in this embodiment, as shown in Figures 2 and 6, the first through hole 303 and the second through hole 304 are formed on the annular sidewall 302. The spatial layout is reasonable, which facilitates the arrangement of the air extraction device 60 and the barometer 70.

[0037] In this embodiment, as shown in FIG7, the sealing performance testing device further includes an air supply device 80, which is connected to the sealing cavity 50 to supply air into the sealing cavity 50. The sealing cavity 50 is evacuated by the air extraction device 60 so that the sealing performance of the sealing ring 20 is determined based on the air pressure value measured by the pressure gauge 70. After the test is completed, air is supplied to the sealing cavity 50 by the air supply device 80 to break the vacuum, allowing the pressure plate 40 to easily detach from the sealing ring 20 and move to the first position, facilitating preparation for the next test.

[0038] Specifically, in this embodiment, the air supply device 80 is preferably an air pump. Admittedly, in other examples, as an alternative, the air supply device 80 can be selected from other types depending on the actual working conditions, as long as it can disrupt the negative pressure environment inside the sealed cavity 50.

[0039] In this embodiment, as shown in Figure 7, the sealing test device further includes a first gas pipeline 90. The first end of the first gas pipeline 90 is connected to a first through hole 303, and the second end of the first gas pipeline 90 has two interfaces, which are respectively connected to a vacuum pump 60 and a gas supply device 80. When a vacuuming operation is required, the gas supply device 80 stops operating, and the vacuum pump 60 evacuates the sealed cavity 50 through the first gas pipeline 90. After the test is completed and a vacuum breaking operation is required, the vacuum pump 60 stops operating, and the gas supply device 80 supplies gas to the sealed cavity 50. By providing two interfaces at the input end of the first gas pipeline 90 to connect the vacuum pump 60 and the gas supply device 80 respectively, switching between the vacuum pump 60 and the gas supply device 80 can be achieved according to actual process requirements. This eliminates the need to open two holes on the base 30 to connect the vacuum pump 60 and the gas supply device 80 respectively, simplifying the manufacturing process.

[0040] Specifically, in this embodiment, the first gas pipeline 90 may be a T-shaped pipe. In other embodiments, a valve is provided on the first gas pipeline 90, the valve having a first connection port, a second connection port and a third connection port that are interconnected, the first connection port being connected to the first through hole 303, and the second connection port and the third connection port being connected to the gas extraction device 60 and the gas supply device 80, respectively.

[0041] Preferably, valves are respectively installed on two branches at the second end of the first gas pipeline 90. Specifically, a first valve is installed on the branch where the vacuum pump 60 is installed, and a second valve is installed on the branch where the gas supply device 80 is installed. When vacuuming is required, the first valve is opened, the second valve is closed, and the vacuum pump 60 is activated; when vacuum breaking is required, the first valve is closed, the second valve is opened, and the gas supply device 80 is activated. By installing the first valve and the second valve before the vacuum pump 60 and the gas supply device 80 respectively, accidental activation of the gas supply device 80 during vacuuming and accidental activation of the vacuum pump 60 during vacuum breaking are prevented, thus improving operational reliability.

[0042] In this embodiment, as shown in Figures 3 and 5, the upper surface of the annular sidewall 302 and the lower surface of the annular base 101 are in contact to support the annular base 101, and a sealing element 11 is provided between the upper surface of the annular sidewall 302 and the lower surface of the annular base 101. By providing the sealing element 11 between the base 30 and the clamping plate 10, the sealing performance of the sealing cavity 50 is ensured, thereby ensuring the accuracy of the values ​​measured by the barometer 70.

[0043] Specifically, a groove is formed on the upper surface of the annular sidewall 302, and the seal 11 is an O-ring. The O-ring is installed in the groove for easy installation.

[0044] Specifically, as shown in Figure 4, the annular sidewall 302 includes an upper sidewall and a lower sidewall. The cross-section of the annular sidewall 302 is L-shaped. The clamping plate 10 is placed on the lower sidewall, and the outer periphery of the clamping plate 10 is limited by the inner peripheral wall of the upper sidewall to fix the position of the clamping plate 10. The angle between the inner surface of the upper sidewall and the upper surface of the lower sidewall can be a right angle or an obtuse angle.

[0045] In this embodiment, as shown in FIG6, the sealing performance testing device further includes a plurality of clamping members 12, which are configured to apply a force to the clamping plate 10 toward the annular sidewall 302. By pressing the clamping members 12 downwards and pressing it against the base 30, the lower surface of the clamping plate 10 can be tightly fitted with the upper surface of the annular sidewall 302, thereby further improving the sealing performance of the sealing cavity 50.

[0046] In this embodiment, as shown in FIG6, a plurality of clamping members 12 are evenly spaced along the circumference of the clamping plate 10. By providing a plurality of clamping members 12, a force is applied to the circumference of the clamping plate 10 in the direction toward the base 30, and the plurality of clamping members 12 are evenly spaced, so that the clamping plate 10 can fit tightly and uniformly against the annular sidewall 302 in the circumference, further improving the sealing performance of the sealing cavity 50.

[0047] Specifically, there are four clamping elements 12, which are respectively installed on the outer periphery of the base 30. In other embodiments, the number and arrangement of the clamping elements 12 can be selected according to actual needs.

[0048] In this embodiment, as shown in FIG2, the sealing detection device further includes a drive component 13 and a connecting plate 14. The two ends of the connecting plate 14 are respectively connected to the output end of the drive component 13 and the pressure plate 40. The drive component 13 is configured to drive the pressure plate 40 to move between a first position and a second position. The drive component 13 drives the connecting plate 14 to move, thereby driving the pressure plate 40 to move between the first position and the second position, realizing automated operation control and facilitating management and control.

[0049] In this embodiment, as shown in FIG7, the sealing detection device further includes a solenoid valve 15. The input end of the solenoid valve 15 is connected to an air source (not shown in the figure), and the output end of the solenoid valve 15 is provided with a first branch 16, a second branch 17, and a third branch 18. The first branch 16 is connected to the air extraction device 60, the second branch 17 is connected to the driving component 13, and the third branch 18 is connected to the clamping component 12. The solenoid valve 15 controls the on / off state of the first branch 16, the second branch 17, and the third branch 18, resulting in a high degree of integration.

[0050] In some embodiments, the drive member 13 is a rodless cylinder, one end of the connecting plate 14 is mounted on the slider of the rodless cylinder, and the other end of the connecting plate 14 is connected to the middle of the pressure plate 40. The air source is connected to the solenoid valve 15, which distributes gas to the first branch 16 via the valve island to deliver it to the suction device 60. A first pressure regulating valve 23 is provided on the first branch 16 to control the flow rate. Gas is also distributed to the second branch 17 via the valve island, and the flow rate on the second branch 17 is controlled by the second pressure regulating valve 24 to control the downward stroke of the slider of the rodless cylinder, causing the pressure plate 40 to press down onto the clamping plate 10. Controlling the stroke of the slider of the rodless cylinder also ensures that the pressure plate 40 is pressed firmly onto the clamping plate 10. The clamping member 12 is a rotary clamping cylinder. The air source is connected to the solenoid valve 15, which distributes gas to the third branch 18 via the valve island to achieve the rotation of the clamping device on the rotary clamping cylinder. As shown in Figure 1, the pressure plate 40 is in the first position, and the clamping device on the rotary clamping cylinder is offset from the clamping plate 10. As shown in Figure 6, the rotary clamping cylinder is started to make the clamping device rotate clockwise so that it presses against the clamping plate 10.

[0051] Admittedly, in other examples, as an alternative, the connecting plate 14 can output vertical movement via other linear motion mechanisms, such as linear motion mechanisms based on hydraulic cylinders, electric cylinders, or cam mechanisms. In other embodiments, the clamping member 12 can be selected from other types of clamping members 12 depending on the actual working conditions, as long as it can apply a downward force to the clamping plate 10.

[0052] In this embodiment, as shown in FIG1, the sealing performance testing device further includes a control unit (not shown in the figure) and a display unit 19. The control unit is configured to determine the test result based on the result measured by the barometer 70, and the display unit 19 is used to display the determination result of the control unit. The display unit 19 provides a clear indication of whether the sealing ring 20 is qualified, making it easy to observe.

[0053] Specifically, the display unit 19 uses a three-color light, including red, yellow, and green. When the sealing test device is in operation (e.g., pressing down the pressure plate 40, starting the air extraction device 60, and starting the air supply device 80 for the next round of testing), the display unit 19 illuminates a yellow light; when the air pressure value measured by the barometer 70 is stable and within the preset air pressure value range, the control unit determines it to be qualified, and the display unit 19 illuminates a green light; when the air pressure value measured by the barometer 70 is not within the preset value range or gradually increases, the control unit determines it to be unqualified, and the display unit 19 illuminates a red light.

[0054] The sealing performance testing device includes a housing 26, which includes a base 261, a base 30, a clamping member 12, and a pressure gauge 70 mounted on the base 261. A solenoid valve 15, a suction device 60, a first pressure regulating valve 23, and a second pressure regulating valve 24 are mounted on the upper surface of the housing 26. A pressure plate 40, a clamping plate 10, and the base 30 are located within the inner cavity of the housing 26. A drive member 13 is located within the inner cavity of the housing 26, with its upper end extending beyond the upper wall of the housing 26 to connect with the solenoid valve 15. The sealing performance testing device also includes an upper cover 27, which covers the housing 26 so that components such as the solenoid valve 15, the suction device 60, the first pressure regulating valve 23, and the second pressure regulating valve 24 are placed within the space enclosed by the housing 26 and the upper cover 27, preventing them from being affected by the external environment. Furthermore, the pressure regulating knobs of the first pressure regulating valve 23 and the second pressure regulating valve 24 extend out of the upper cover 27 for easy operation.

[0055] The sealing test device also includes a heat sink (not shown in the figure), which is mounted on the upper surface of the housing 26, and the upper cover 27 has openings at positions corresponding to the heat sink for heat dissipation. Specifically, a fan is selected as the heat sink.

[0056] As shown in Figure 1, safety light curtains 21 are installed on both side walls of the housing 26, and a foolproof switch 22 is provided on the base 261 to ensure the safety of operators and prevent accidental activation.

[0057] This application embodiment also provides a method for using a sealing performance testing device, which uses the sealing performance testing device as described above to test the sealing performance of the sealing ring 20 installed on the clamping plate 10. The method for using the sealing performance testing device includes the following steps:

[0058] S1. Control the pressure plate 40 to move to the second position to form a sealed cavity 50;

[0059] S2. Control the air extraction device 60 to extract air from the sealed cavity 50 to form a negative pressure, obtain the air pressure value measured by the air pressure measuring instrument 70, and turn off the air extraction device 60 after the air pressure value stabilizes.

[0060] S3. Continue to acquire air pressure values. If the air pressure values ​​remain stable and within the preset range, the sealing ring 20 is deemed qualified; otherwise, the sealing ring 20 is deemed unqualified.

[0061] In this embodiment, the sealing performance of the sealing ring 20 is determined based on the air pressure value obtained from the barometer 70, which is convenient to operate. In other words, if the air pressure value measured by the barometer 70 remains stable and within the preset value range, the sealing performance of the sealing ring 20 is deemed to be qualified; if the air pressure value measured by the barometer 70 is not within the preset value range or gradually increases, the sealing performance of the sealing ring 20 is deemed to be unqualified.

[0062] In this embodiment, the sealing performance testing device further includes an air supply device 80, which is connected to the sealing cavity 50 to supply air to the interior of the sealing cavity 50. The method of using the sealing performance testing device further includes the following steps:

[0063] S4. Control the air supply device 80 to supply air into the sealed cavity 50, and control the pressure plate 40 to move from the second position to the first position.

[0064] During the specific testing, the clamp 10 with the sealing ring 20 assembled is placed on the annular sidewall 302, so that the lower surface of the annular base 101 is in contact with the upper surface of the annular sidewall 302. The solenoid valve 15 controls the drive component 13 to drive the connecting plate 14 to move downward, so that the pressure plate 40 presses on the sealing ring 20 to form a sealed cavity 50. During this process, the display unit 19 illuminates a yellow light. The air extraction device 60 is started to extract air from the sealed cavity 50 to form a negative pressure. The air pressure value measured by the barometer 70 is read. After the air pressure value measured by the barometer 70 stabilizes, the air extraction device 60 is turned off. The air pressure value measured by the barometer 70 is then obtained again. If the air pressure value remains stable and within the preset value range, the sealing performance of the sealing ring 20 is deemed qualified, and the display unit 19 illuminates a green light; if the air pressure value measured by the barometer 70 is not within the preset value range or gradually increases, the sealing performance of the sealing ring 20 is deemed unqualified, and the display unit 19 illuminates a red light. After the test is completed, air is supplied to the sealed cavity 50 through the air supply device 80 to break the vacuum, so that the pressure plate 40 can easily detach from the sealing ring 20 and move to the first position, which is convenient for preparing for the next test.

[0065] In addition, the control unit is configured to control the drive unit 13 to repeat the above actions on the same sealing ring 20, so that the pressure plate 40 can be pressed down cyclically to test the sealing performance of the same sealing ring 20 multiple times. When the display unit 19 lights up red, it indicates that the sealing ring 20 has reached its upper limit of use. The control unit records the number of times the pressure plate 40 is pressed down. The cumulative number of presses displayed can be used as the basis for judging the service life of the sealing ring 20 to determine the service life of the same batch of sealing rings 20.

[0066] While specific embodiments of this application have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of this application is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of this application, but all such changes and modifications fall within the scope of protection of this application.

Claims

1. A sealing performance testing device for testing the sealing performance of a sealing ring mounted on a clamp, characterized in that, The clamp includes an annular base, and the inner sidewall of the annular base is provided with a support portion for supporting the edge of the substrate surface. At least a portion of the sealing ring covers the upper surface of the support portion. The sealing performance testing device includes: The base includes a bottom wall and an annular side wall. The upper surface of the annular side wall is used to support the annular base. The base has a first through hole and a second through hole. A pressure plate is configured to move between a first position and a second position. When the pressure plate is in the first position, the pressure plate is spaced apart from the sealing ring. When the pressure plate is in the second position, the pressure plate is tightly fitted with the sealing ring so that the bottom wall, the annular side wall, the clamping plate, and the pressure plate together form a sealed cavity. An air extraction device is connected to the first through hole, and the air extraction device is used to extract air from the sealed cavity through the first through hole to create a negative pressure in the sealed cavity. A barometer is connected to the second through hole, and the barometer is used to measure the air pressure inside the sealed cavity through the second through hole.

2. The sealing performance testing device as described in claim 1, characterized in that, The sealing test device also includes an air supply device, which is connected to the sealing cavity to supply air into the sealing cavity.

3. The sealing performance testing device as described in claim 2, characterized in that, The sealing detection device further includes a first gas pipeline, the first end of which is connected to the first through hole, and the second end of which has two interfaces, which are respectively connected to the air extraction device and the air supply device.

4. The sealing performance testing device as described in claim 1, characterized in that, The upper surface of the annular sidewall contacts the lower surface of the annular base to support the annular base, and a sealing element is provided between the upper surface of the annular sidewall and the lower surface of the annular base.

5. The sealing performance testing device as described in claim 1, characterized in that, The sealing test device further includes a drive component and a connecting plate. The two ends of the connecting plate are respectively connected to the output end of the drive component and the pressure plate. The drive component is configured to drive the pressure plate to move between the first position and the second position.

6. The sealing performance testing device as described in claim 5, characterized in that, The sealing test device also includes a plurality of clamping elements configured to apply a force to the clamping plate toward the annular sidewall.

7. The sealing performance testing device as described in claim 6, characterized in that, The sealing detection device also includes a solenoid valve. The input end of the solenoid valve is connected to an air source, and the output end of the solenoid valve is provided with a first branch, a second branch, and a third branch. The first branch is connected to the air extraction device, the second branch is connected to the driving component, and the third branch is connected to the clamping component.

8. The sealing performance testing device as described in claim 1, characterized in that, The sealing test device further includes a control unit and a display unit. The control unit is configured to determine the test result based on the result measured by the barometer, and the display unit is used to display the determination result of the control unit.

9. A method of using a sealing performance testing device, characterized in that, The sealing performance of a sealing ring mounted on a clamping plate is tested using the sealing performance testing device as described in any one of claims 1-8. The method of using the sealing performance testing device includes the following steps: S1. Control the pressure plate to move to the second position to form the sealed cavity; S2. Control the air extraction device to extract air from the sealed cavity to form a negative pressure, obtain the air pressure value measured by the air pressure measuring instrument, and turn off the air extraction device after the air pressure value stabilizes. S3. Continue to acquire the air pressure value. If the air pressure value remains stable and within the preset range, the sealing ring is determined to be qualified; otherwise, the sealing ring is determined to be unqualified.

10. The method of using the sealing performance testing device as described in claim 9, characterized in that, The sealing performance testing device further includes a gas supply device, which is connected to the sealing cavity to supply gas to the interior of the sealing cavity. The method of using the sealing performance testing device further includes the following steps: S4. Control the air supply device to supply air into the sealed cavity, and control the pressure plate to move from the second position to the first position.

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