Detection device, prediction device, detection method, and prediction method

Abstract

The present invention detects foreign metal matter of a prescribed size that is deposited on a substrate. A detection device (1) comprises an electrode sheet (5), a measurement unit (31), and a determination unit (32). The electrode sheet (5) has a pair of counter electrodes (11, 12) and an insulating sheet (13). The pair of counter electrodes (11, 12) include a first counter electrode (11) and a second counter electrode (12). The insulating sheet (13) supports the pair of counter electrodes (11, 12). The first counter electrode (11) has a plurality of first wiring electrode parts, and the second counter electrode (12) has a plurality of second wiring electrode parts. The plurality of second wiring electrode parts alternate with the plurality of first wiring electrode parts with a space (s1) therebetween. The measurement unit (31) measures an electrical value between the pair of counter electrodes (11, 12) of the electrode sheet (5). On the basis of measurement results from the measurement unit (31), the determination unit (32) determines whether short circuits occur between the pair of counter electrodes (11, 12) due to foreign metal matter (F1) deposited on a substrate (10). The electrode sheet (5) is provided to an outer circumferential surface (6a) of a roller (6) that moves in a relative manner over the substrate (10).

Description

Detection device, prediction device, detection method, and prediction method

[0001] Generally, the present disclosure relates to a detection device, a prediction device, a detection method, and a prediction method. More specifically, it relates to a detection device including an electrode sheet, a prediction device including the detection device, a detection method using the electrode sheet, and a prediction method including the detection method.

[0002] In the inspection method of the electrode substrate described in Patent Document 1, a smooth conductive substrate is used to detect the presence or absence of conductive foreign matter deposited on the inspection target substrate. The smooth conductive substrate has a substrate, a conductive layer provided on the substrate, and an electrically insulating thin film provided on the conductive layer. The inspection target substrate has a substrate and an electrode layer provided on the substrate.

[0003] The inspection target electrode substrate is arranged so that the electrode layer of the inspection target electrode substrate contacts the electrically insulating thin film of the smooth conductive substrate. Then, an alternating voltage is applied between the conductive layer of the smooth conductive substrate and the electrode layer of the inspection target electrode substrate. When there is conductive foreign matter on the inspection target electrode substrate, the conductive foreign matter penetrates the electrically insulating thin film of the smooth conductive substrate and contacts the conductive layer of the smooth conductive substrate. Due to this contact, a short circuit occurs between the smooth conductive substrate and the electrode layer of the inspection target substrate. By determining the presence or absence of this short circuit, it is determined whether conductive foreign matter is deposited on the inspection target substrate.

[0004] In the inspection method of the electrode substrate described in Patent Document 1, it is possible to determine whether conductive foreign matter is deposited on the inspection target substrate, but it is not possible to detect the size of the conductive foreign matter.

[0005] Japanese Patent Application Laid-Open No. 2001-50725

[0006] An object of the present disclosure is to provide a detection device, a prediction device, a detection method, and a prediction method capable of detecting metal foreign matter of a predetermined size deposited on a substrate.

[0007] A detection device according to one aspect of the present disclosure comprises an electrode sheet, a measuring unit, and a determination unit. The electrode sheet has a pair of counter electrodes and an insulating sheet. The pair of counter electrodes includes a first counter electrode and a second counter electrode. The insulating sheet supports the pair of counter electrodes. The first counter electrode has a plurality of first wiring electrode portions, and the second counter electrode has a plurality of second wiring electrode portions. The plurality of second wiring electrode portions are arranged alternately with the plurality of first wiring electrode portions at intervals. The measuring unit measures the electrical value between the pair of counter electrodes on the electrode sheet. The determination unit determines, based on the measurement result of the measuring unit, whether or not a short circuit has occurred between the pair of counter electrodes due to metallic foreign matter deposited on the substrate. The electrode sheet is provided on the outer circumferential surface of a roller that moves relatively over the substrate.

[0008] A prediction device according to one aspect of the present disclosure comprises the detection device. The electrode sheet of the detection device has a plurality of pairs of counter electrodes, including the pair of counter electrodes. The spacing between each of the plurality of pairs of counter electrodes is of a different size. The insulating sheet of the electrode sheet supports the plurality of pairs of counter electrodes. The prediction device comprises a time measuring unit, a counting unit, and a prediction unit. The time measuring unit measures the detection time of the short circuit caused by the metal foreign matter, which is smaller than a predetermined size, as determined by the determination unit. The counting unit counts the cumulative number of short circuits determined by the determination unit for each detection time and for each spacing between the plurality of pairs of counter electrodes. The prediction unit predicts the detection time of the short circuit caused by the metal foreign matter, which is larger than a predetermined size, deposited on the substrate. Based on the counting result of the counting unit, the prediction unit determines a first correlation between the cumulative number of short circuits occurring at two or more pairs of counter electrodes among the plurality of pairs of counter electrodes, where the spacing is smaller than the predetermined size, and the spacing for each detection time. The prediction unit predicts the detection time of the metal foreign object of the predetermined size based on the obtained first correlation.

[0009] A detection method according to one aspect of the present disclosure comprises a measurement step and a determination step. In the measurement step, an electrical value is measured between a pair of counter electrodes of an electrode sheet. The electrode sheet comprises the pair of counter electrodes and an insulating sheet. The pair of counter electrodes includes a first counter electrode and a second counter electrode. The insulating sheet supports the pair of counter electrodes. The first counter electrode has a plurality of first wiring electrode portions, and the second counter electrode has a plurality of second wiring electrode portions. The plurality of second wiring electrode portions are arranged alternately with the plurality of first wiring electrode portions at intervals. In the determination step, based on the measurement result of the measurement step, it is determined whether or not a short circuit has occurred between the pair of counter electrodes due to metallic foreign matter deposited on the substrate. The electrode sheet is provided on the outer circumferential surface of a roller that moves relatively over the substrate.

[0010] A prediction method according to one aspect of the present disclosure includes the detection method. The electrode sheet of the detection method has a plurality of pairs of counter electrodes, including the pair of counter electrodes. The spacing between each of the plurality of pairs of counter electrodes is of a different size. The prediction method includes a time measurement step, a counting step, and a prediction step. In the time measurement step, the detection time of the short circuit caused by the metal foreign matter smaller than a predetermined size, which was determined to have occurred in the determination step, is measured. In the counting step, the cumulative number of short circuits determined to have occurred in the determination step is counted for each detection time and for each spacing between the plurality of pairs of counter electrodes. In the prediction step, the detection time of the short circuit caused by the metal foreign matter of a predetermined size deposited on the substrate is predicted. In the prediction step, based on the counting result in the counting step, a first correlation is determined between the cumulative number of short circuits that occurred at two or more pairs of counter electrodes among the plurality of pairs of counter electrodes, where the spacing is smaller than the predetermined size, and the spacing, for each detection time. In the prediction step, the detection time of the metal foreign object of the predetermined size is predicted based on the obtained first correlation.

[0011] Figure 1 is a configuration diagram of a detection device according to Embodiment 1. Figure 2 is an unfolded view of the electrode sheet provided in the above detection device. Figure 3 is a cross-sectional view taken along line A-A in Figure 2. Figure 4 is a cross-sectional view illustrating a state in which a short circuit occurs between the wiring electrode parts due to a metallic foreign object. Figure 5 is a cross-sectional view illustrating a state in which a short circuit does not occur between the wiring electrode parts due to a metallic foreign object. Figure 6 is a cross-sectional view illustrating the contact state between the electrode sheet and the metal film when no metallic foreign object is present. Figure 7 is a configuration diagram showing an example of a conveying device for conveying a metal film. Figure 8 is an explanatory diagram illustrating the relationship between the size of the metallic foreign object and the spacing of the wiring electrode parts. Figure 9 is another explanatory diagram illustrating the relationship between the size of the metallic foreign object and the spacing of the wiring electrode parts. Figure 10 is yet another explanatory diagram illustrating the relationship between the size of the metallic foreign object and the spacing of the wiring electrode parts. Figure 11 is an explanatory diagram illustrating an example of the relationship between the short-circuit rate and the size of the foreign object. Figure 12 is an explanatory diagram illustrating an example of the relationship between the number of foreign objects and the size of the foreign object. Figure 13 is an explanatory diagram illustrating an example of the relationship between the number of detected objects and the size of the foreign object. Figure 14 is a flowchart illustrating the operation of the above detection device. Figure 15 is a configuration diagram of the prediction device according to Embodiment 2. Figure 16 is an explanatory diagram illustrating the correlation between the cumulative number of occurrences and the size of the foreign object. Figure 17 is an explanatory diagram illustrating the correlation between the cumulative number of occurrences of metal foreign objects of a predetermined size and the detection time. Figure 18 is a flowchart illustrating the operation of the prediction device described above. Figure 19 is an explanatory diagram illustrating the electrode sheet of the prediction device according to Modification 1 of Embodiment 2. Figure 20 is a configuration diagram of the prediction device according to Embodiment 3. Figure 21 is a flowchart illustrating the operation of the prediction device described above.

[0012] A detection device according to an embodiment will be described with reference to the drawings.

[0013] (1) Embodiment 1 The detection device 1 according to Embodiment 1 will be described with reference to Figures 1 to 14.

[0014] (1-1) As shown in the schematic diagram 1, the detection device 1 according to Embodiment 1 comprises an electrode sheet 5, a measuring unit 31, and a determination unit 32. The electrode sheet 5 has a pair of counter electrodes 11, 12 and an insulating sheet 13. The pair of counter electrodes 11, 12 includes a first counter electrode 11 and a second counter electrode 12. The insulating sheet 13 supports the pair of counter electrodes 11, 12. The first counter electrode 11 has a plurality of first wiring electrode portions 11a, and the second counter electrode 12 has a plurality of second wiring electrode portions 12a (see Figure 2). The plurality of second wiring electrode portions 12a are arranged alternately with the plurality of first wiring electrode portions 11a at intervals. The measuring unit 31 measures the electrical value (e.g., resistance value) between the pair of counter electrodes 11, 12 of the electrode sheet 5. Based on the measurement result of the measuring unit 31, the determination unit 32 determines whether or not a short circuit has occurred between the pair of counter electrodes 11, 12 due to metallic foreign matter F1 deposited on the substrate 10. The electrode sheet 5 is provided on the outer circumferential surface 6a of the roller 6, which moves relative to the substrate 10.

[0015] With this configuration, it is possible to detect metallic foreign matter F1 of a predetermined size (i.e., a size corresponding to the distance s1 between the first wiring electrode portion 11a and the second wiring electrode portion 12a) deposited on the substrate 10.

[0016] (1-2) Detailed Explanation As shown in Figure 1, the detection device 1 according to Embodiment 1 detects a metal foreign object F1 of a predetermined size deposited on the substrate 10. The detection device 1 has an electrode sheet 5 and a detection circuit unit 3. The electrode sheet 5 is provided on the outer peripheral surface 6a of a roller 6 that moves relative to the substrate 10.

[0017] (1-2-1) As shown in Figure 1, the substrate 10 is the object to be detected by the detection device 1. The substrate 10 is, for example, a metal or insulating film. More specifically, the substrate 10 is, for example, a metal film 10A coated with the material for lithium-ion battery electrodes, used to manufacture lithium-ion battery electrodes. That is, the detection device 1 detects metallic foreign matter F1 deposited on the metal film 10A. Embodiment 1 will be described using the case where the substrate 10 is a long metal film 10A as an example.

[0018] (1-2-2) As shown in Figure 1, the roller 6 on which the electrode sheet 5 is provided moves relatively over the substrate 10 to be detected, as described above. More specifically, the roller 6 is a driven roller rotatably supported on a support installed on the floor, for example. The metal film 10A is, for example, a long metal film. The metal film 10A is fed out in the longitudinal direction of the metal film 10A and transported by a transport device. The roller 6 is positioned in contact with one main surface 10a of the metal film 10A. The roller 6 rolls on the transported metal film 10A. That is, the roller 6 moves relatively over the metal film 10A by rolling on the transported metal film 10A.

[0019] More specifically, as shown in Figure 7, the conveying device (conveying device 70) comprises a feeding device for feeding out the metal film 10A and a plurality of conveying rollers 71 to 74 for conveying the fed-out metal film 10A. The plurality of conveying rollers 71 to 74 sequentially convey the fed-out metal film 10A to a plurality of manufacturing processes H1 and H2. The conveying device 70 is also equipped with foreign object detection rollers 6A and 6B, separate from the conveying rollers 71 to 74. The rollers 6A and 6B are driven rollers, but they may also be driven rollers that rotate with the driving force of a motor.

[0020] The rollers 6A and 6B are positioned on both sides of the metal film 10A. The rollers 6A and 6B sandwich the metal film 10A from both sides in the thickness direction of the metal film 10A. The rollers 6A and 6B roll on the metal film 10A as the metal film 10A is transported (moved). That is, the rollers 6A and 6B move relative to each other on the metal film 10A. Roller 6A moves relative to each other on the upper main surface of the metal film 10A. Roller 6B moves relative to each other on the lower main surface of the metal film 10A.

[0021] The roller 6 on which the electrode sheet 5 is placed is at least one of the two rollers 6A and 6B (in Embodiment 1, roller 6A). In other words, the roller 6 on which the electrode sheet 5 is placed is a different roller from the transport rollers 71-74 that transport the metal film 10A (i.e., a roller for detecting foreign objects).

[0022] (1-2-3) Electrode Sheet As shown in Figure 1, the electrode sheet 5 captures metallic foreign matter F1 deposited on the substrate 10. The electrode sheet 5 is provided on the outer circumferential surface 6a of the roller 6.

[0023] The electrode sheet 5 is flexible enough to be wrapped around the outer surface 6a of the roller 6. As shown in Figure 2, the electrode sheet 5 comprises a pair of opposing electrodes 11 and 12 and an insulating sheet 13.

[0024] The pair of opposing electrodes 11 and 12 are formed from a conductive material (for example, copper and a copper alloy). The pair of opposing electrodes 11 and 12 have a first opposing electrode 11 and a second opposing electrode 12 that face each other.

[0025] The first opposing electrode 11 is, for example, a comb-shaped electrode. The first opposing electrode 11 has a plurality of (six in the example of Figure 2) first wiring electrode portions 11a and a first connecting portion 11b. Each of the plurality of first wiring electrode portions 11a is strip-shaped and arranged in a line with a certain distance between them in the width direction. That is, the plurality of first wiring electrode portions 11a are arranged parallel to each other. Each first wiring electrode portion 11a is assumed to be straight, but may also be curved. The first connecting portion 11b is, for example, strip-shaped and is connected to one end of the plurality of first wiring electrode portions 11a. The first connecting portion 11b is assumed to be straight, but may also be curved. The plurality of first wiring electrode portions 11a protrude from one of the two sides of the first connecting portion 11b in the width direction of the first connecting portion 11b.

[0026] The second opposing electrode 12 is, for example, a comb-shaped electrode. The second opposing electrode 12 has a plurality of (five in the example of Figure 2) second wiring electrode portions 12a and a second connecting portion 12b. Each of the plurality of second wiring electrode portions 12a is strip-shaped and arranged in a line with a certain distance between them in the width direction. That is, the plurality of second wiring electrode portions 12a are arranged parallel to each other. Each second wiring electrode portion 12a is assumed to be straight, but may also be curved. The second connecting portion 12b is, for example, strip-shaped and is connected to one end of the plurality of second wiring electrode portions 12a. The second connecting portion 12b is assumed to be straight, but may also be curved. The plurality of second wiring electrode portions 12a protrude from one of the two sides of the second connecting portion 12b in the width direction of the second connecting portion 12b.

[0027] Multiple second wiring electrode portions 12a are arranged alternately with respect to multiple first wiring electrode portions 11a with a gap s1 between them. More specifically, the multiple first wiring electrode portions 11a and the multiple second wiring electrode portions 12a are arranged such that the first wiring electrode portions 11a and the second wiring electrode portions 12a are arranged alternately with a gap s1 between them.

[0028] The widths w1 of the first wiring electrode portion 11a and the second wiring electrode portion 12a are the same size, but they may be different sizes.

[0029] A bias voltage is applied to one of the two opposing electrodes, the first opposing electrode 11 and the second opposing electrode 12 (for example, the first opposing electrode 11), and a ground voltage is applied to the other opposing electrode (for example, the second opposing electrode 12).

[0030] In the example shown in Figure 1, all of the multiple second wiring electrode sections 12a are arranged alternately with the multiple first wiring electrode sections 11a, but it is sufficient if at least a portion of the multiple second wiring electrode sections 12a are arranged alternately with the multiple first wiring electrode sections 11a. Similarly, all of the multiple first wiring electrode sections 11a are arranged alternately with the multiple second wiring electrode sections 12a, but it is sufficient if at least a portion of the multiple first wiring electrode sections 11a are arranged alternately with the multiple second wiring electrode sections 12a.

[0031] The insulating sheet 13 supports the first opposing electrode 11 and the second opposing electrode 12. The insulating sheet 13 is formed in sheet form from an insulating material (for example, a resin material (more specifically, PET resin and acrylic resin)). The insulating sheet 13 is flexible.

[0032] The insulating sheet 13 has a first main surface 13a and a second main surface 13b (see Figure 3). The first main surface 13a is, for example, the top surface, and the second main surface 13b is, for example, the bottom surface. The first main surface 13a is provided with a plurality of (two in the example of Figure 3) first recesses 131 and a plurality of (two in the example of Figure 3) second recesses 132.

[0033] The first recess 131 is a groove into which the first opposing electrode 11 is fitted and accommodated. The first recess 131 is formed to be the same shape and size as the first opposing electrode 11 when viewed from a plan view from a direction perpendicular to the first main surface 13a of the insulating sheet 13. The first opposing electrode 11 is fitted and positioned in the first recess 131. When the first opposing electrode 11 is fitted and positioned in the first recess 131, the exposed surface (i.e., top surface) 11u of the first opposing electrode 11 is at a lower height than, for example, the first main surface 13a of the insulating sheet 13. Therefore, the exposed surface (i.e., top surface) 11p of the first wiring electrode portion 11a is at a lower height than, for example, the first main surface 13a of the insulating sheet 13. Also, the sides of the first opposing electrode 11 are in contact with the inner surfaces of the first recess 131 on both sides. As a result, the position of the first opposing electrode 11 within the first recess 131 is fixed even when the electrode sheet 5 is wrapped around the outer surface 6a of the roller 6.

[0034] The second recess 132 is a groove for fitting and accommodating the second opposing electrode 12. The second recess 132 is formed to be the same shape and size as the second opposing electrode 12 when viewed from a plan view in a direction perpendicular to the first main surface 13a of the insulating sheet 13. When the second opposing electrode 12 is fitted and positioned in the second recess 132, the exposed surface (i.e., top surface) 12u of the second opposing electrode 12 is at a lower height than, for example, the first main surface 13a of the insulating sheet 13. Therefore, the exposed surface (i.e., top surface) 12p of the second wiring electrode portion 12a is at a lower height than, for example, the first main surface 13a of the insulating sheet 13. In addition, the sides of the second opposing electrode 12 are in contact with the inner surfaces on both sides of the second recess 132. As a result, the position of the second opposing electrode 12 within the second recess 132 is fixed even when the electrode sheet 5 is wrapped around the outer circumferential surface 6a of the roller 6.

[0035] A conductive protective film 133 is provided on the exposed surface 11u of the first counter electrode 11 and the exposed surface 12u of the second counter electrode 12. The protective film 133 protects the exposed surfaces 11u and 12u from, for example, rust. The protective film 133 is made of a material that has conductivity and rust resistance, such as Ni (nickel) or Au (gold). Note that the protective film 133 is not an essential component and may be omitted.

[0036] As shown in Figure 2, in the electrode sheet 5, if a metallic foreign object F1 is placed across the adjacent first wiring electrode portion 11a and second wiring electrode portion 12a, the first counter electrode 11 and the second counter electrode 12 will short-circuit. The metallic foreign object F1 is detected when this short-circuit is detected by the determination unit 32. The pair of counter electrodes 11 and 12 have a detection range 14 for detecting the metallic foreign object F1 (see Figure 2). The detection range 14 is the area surrounding the pair of counter electrodes 11 and 12.

[0037] As described above, the electrode sheet 5 is provided on the outer circumferential surface 6a of the roller 6. More specifically, the electrode sheet 5 is provided on the outer circumferential surface 6a of the roller 6 such that, for example, the longitudinal direction of the wiring electrode portion (first wiring electrode portion 11a and second wiring electrode portion 12a) is perpendicular to the circumferential direction T1 of the roller 6. However, the electrode sheet 5 is not limited to being provided on the outer circumferential surface 6a of the roller 6 such that the longitudinal direction of the wiring electrode portion is perpendicular to the circumferential direction T1 of the roller 6. For example, the electrode sheet 5 may be provided on the outer circumferential surface 6a of the roller 6 such that the longitudinal direction of the wiring electrode portion is parallel to the circumferential direction T1 of the roller 6.

[0038] (1-2-4) Principle of detecting metallic foreign objects As shown in Figure 1, the roller 6 and the metal film 10A are in contact with each other in the contact area R1. The metal film 10A is transported along the transport direction J1 and passes through the contact area R1 with the roller 6 at a constant width. The roller 6 rolls as the metal film 10A is fed out. As the roller 6 rolls, the electrode sheet 5 passes through the contact area R1 at a constant width in the direction of the roller 6's rolling. In the contact area R1, the electrode sheet 5 is pressed against the metal film 10A by the roller 6.

[0039] When a predetermined-size metal foreign object F1 deposited on the metal film 10A enters the contact area R1, the metal foreign object F1 straddles the pair of opposing electrodes 11 and 12 of the electrode sheet 5 within the contact area R1, causing a short circuit between the pair of opposing electrodes 11 and 12. At this time, the metal foreign object F1 is pressed against the pair of opposing electrodes 11 and 12 by the roller 6, improving the current flow of the short circuit caused by the metal foreign object F1 (i.e., the amount of current flow when a short circuit occurs). As a result, the electrical value (e.g., electrical resistance) between the pair of opposing electrodes 11 and 12 decreases sharply. This decrease in electrical value is detected by the determination unit 32 described later, and the predetermined-size metal foreign object F1 deposited on the metal film 10A is detected. Then, when the metal film 10A is further advanced and the metal foreign object F1 passes through the contact area R1, the short circuit caused by the metal foreign object F1 is released.

[0040] In this way, when multiple metal foreign objects F1 of a predetermined size deposited on the metal film 10A enter the contact area R1 in sequence, the first wiring electrode portion 11a and the second wiring electrode portion 12a that simultaneously enter the contact area R1 are short-circuited only while the entered metal foreign objects F1 of the predetermined size are present in the contact area R1. The short-circuit is then detected by the determination unit 32, thereby detecting the entered metal foreign objects F1 of the predetermined size.

[0041] More specifically, as shown in Figure 4, if a metal foreign object F1 of a predetermined size (i.e., the same size as or larger than the gap s1) is present in the contact area R1, the roller 6 presses the electrode sheet 5 against the metal film 10A via the metal foreign object F1. At this time, the metal foreign object F1 locally and elastically compresses the insulating sheet 13 of the electrode sheet 5 in the thickness direction of the insulating sheet 13. In this case, since the size of the metal foreign object F1 (determined size) is the same as or larger than the gap s1 between the first wiring electrode portion 11a and the second wiring electrode portion 12a, the metal foreign object F1 comes into contact with both the first wiring electrode portion 11a and the second wiring electrode portion 12a. As a result, the metal foreign object F1 causes a short circuit between the first wiring electrode portion 11a and the second wiring electrode portion 12a. Therefore, in this case, the metal foreign object F1 is detected by the determination unit 32 described later.

[0042] Further, as shown in FIG. 5, when there is a metal foreign object F2 having a size smaller than the predetermined size (i.e., smaller than the interval s1) within the contact region R1, the electrode sheet 5 is pressed against the metal film 10A by the roller 6 via the metal foreign object F2. At this time, the metal foreign object F2 elastically compresses the insulating sheet 13 of the electrode sheet 5 locally in the thickness direction of the insulating sheet 13. In this case, since the size of the metal foreign object F2 is smaller than the interval s1, the metal foreign object F2 cannot contact both the first wiring electrode portion 11a and the second wiring electrode portion 12a simultaneously. That is, the metal foreign object F2 cannot contact both the first wiring electrode portion 11a and the second wiring electrode portion 12a, or can contact only one of the first wiring electrode portion 11a and the second wiring electrode portion 12a. As a result, the first wiring electrode portion 11a and the second wiring electrode portion 12a do not short-circuit due to the metal foreign object F2. Therefore, in this case, the metal foreign object F2 is not detected by the determination of the determination unit 32 described later.

[0043] Further, as shown in FIG. 6, when there is no metal foreign object within the contact region R1, the electrode sheet 5 is pressed directly against the metal film 10A by the roller 6. In this case, in the electrode sheet 5, the exposed surface 11u of the first counter electrode 11 disposed in the first recess 131 is at a height position lower than the first main surface 13a of the insulating sheet 13, and the exposed surface 12u of the second counter electrode 12 disposed in the second recess 132 is at a height position lower than the first main surface 13a of the insulating sheet 13. Therefore, in the contact region R1, even when the electrode sheet 5 is pressed directly against the metal film 10A, the metal film 10A does not contact the exposed surface 11p of the first wiring electrode portion 11a and the exposed surface 12p of the second wiring electrode portion 12a. As a result, the first wiring electrode portion 11a and the second wiring electrode portion 12a do not short-circuit due to the metal film 10A.

[0044] (1-2-5) Detection Circuit Unit The detection circuit unit 3 detects a metal foreign object F1 of a predetermined size captured by the electrode sheet 5. More specifically, as shown in FIG. 1, the detection circuit unit 3 includes a measurement unit 31, a determination unit 32, a time measurement unit 33, a display unit 34, a counting unit 37, and an output unit 38.

[0045] The measurement unit 31 measures the electrical value between the first counter electrode 11 and the second counter electrode 12. The measurement unit 31 measures, for example, the resistance value as the electrical value. Note that the electrical value is not limited to the resistance value, and may be, for example, the current value.

[0046] The determination unit 32 determines whether or not a short circuit has occurred between the first counter electrode 11 and the second counter electrode 12 due to the metal foreign matter F1 based on the measurement result of the measurement unit 31. More specifically, when the resistance value between the first counter electrode 11 and the second counter electrode 12 becomes less than a predetermined value, the determination unit 32 determines that a short circuit has occurred between the first counter electrode 11 and the second counter electrode 12 due to the metal foreign matter F1. Further, when the resistance value between the first counter electrode 11 and the second counter electrode 12 is greater than or equal to the predetermined value, the determination unit 32 determines that no short circuit has occurred between the first counter electrode 11 and the second counter electrode 12 due to the metal foreign matter F1.

[0047] The time measurement unit 33 measures the detection time of the short circuit determined to have occurred by the determination unit 32 (measurement process). The time measurement unit 33 is, for example, a timer. The detection time is the time from a predetermined time point to the time point when the determination unit 32 determines that a short circuit has occurred. The above-mentioned predetermined time point may be, for example, the start time of the detection device 1 or the start time of the detection process for detecting the metal foreign matter F1.

[0048] The counting unit 37 counts the number of occurrences of the short circuit generated in the electrode sheet 5 (that is, the number of occurrences of the metal foreign matter F1 of a predetermined size) based on the determination result of the determination unit 32 (counting process). The counting unit 37 determines whether or not the number of occurrences of the metal foreign matter F1 is equal to or greater than a threshold value (determination process). When the number of occurrences of the metal foreign matter F1 becomes equal to or greater than the threshold value, the counting unit 37 notifies the determination result (the number of occurrences of the metal foreign matter F1 has become equal to or greater than the threshold value) from the output unit 38.

[0049] The output unit 38 outputs, for example, voice or buzzer sound. When the counting unit 37 determines that the number of occurrences of the metal foreign matter F1 is equal to or greater than the threshold value, the output unit 38 notifies the surrounding of the determination result by voice or buzzer sound. Note that the output of the output unit 38 is not limited to sound (voice or buzzer sound), and may be, for example, LED lighting or vibration.

[0050] The display unit 34 is a display device capable of displaying various information, such as a liquid crystal display device. The display unit 34 displays the counting result of the counting unit 37 (the number of detected metal foreign objects F1) and the measurement time (detection time) of the time measurement unit 33. More specifically, the display unit 34 displays, for example, a graph showing the number of metal foreign objects F1 generated in relation to the elapsed time (detection time) (for example, a graph where the horizontal axis shows the elapsed time (detection time) and the vertical axis shows the number of metal foreign objects F1 generated).

[0051] The detection circuit unit 3 primarily consists of a computer having, for example, one or more processors and memory. By executing a program stored in memory using the processor, the detection circuit unit 3 realizes various functions. The program may be pre-recorded in the computer's memory, provided on a recording medium such as a memory card, or provided via a telecommunication line such as the Internet.

[0052] (1-3) Applications of the detection device The detection device 1 can be used, for example, to detect metallic foreign matter that is generated in the manufacturing process of lithium-ion batteries and scattered into the surroundings, and which has accumulated on the metal film described later, which is an intermediate product of the electrodes of lithium-ion batteries.

[0053] More specifically, the manufacturing process of a lithium-ion battery includes an electrode process for forming electrode hoops for the positive or negative electrode of the lithium-ion battery. The electrode process includes several manufacturing steps (a mixing step, a coating step, a compression step, and a cutting step). In the mixing step, an active material for the positive or negative electrode and a solvent (such as a binder) are mixed to prepare a slurry. In the coating step, the prepared slurry is applied to a metal foil and dried to form an electrode plate with an active material layer (metal film). The metal film formed (manufactured) in the coating step is sequentially conveyed by conveying rollers to each subsequent step (for example, a compression step and a cutting step). In the compression step, the thickness of the conveyed metal film is adjusted by compressing it. In the cutting step, the metal film with adjusted thickness is cut to a predetermined width using a cutting device.

[0054] In the cutting process, when the metal film is cut using a cutting device, metal chips (metal foreign matter F1) are generated and scattered into the surroundings. The scattered chips fall onto the metal film that is transported to each process and accumulate. The sharpness of the cutting blade of the cutting device decreases over time. As the sharpness of the cutting blade decreases, the size of the generated metal chips (metal foreign matter F1) gradually increases. In other words, in the cutting process, the size of the generated metal chips (metal foreign matter F1) gradually increases as time passes from the start of the cutting process. That is, the size of the metal chips (metal foreign matter F1) that accumulate on the metal film transported to each process also gradually increases. For example, the size of the metal chips (metal foreign matter F1) is between a minimum of 5 μm and a maximum of 200 μm. Also, in the cutting process, the number of generated metal chips (metal foreign matter F1) increases exponentially as the size decreases. In other words, the number of metal chips (metal foreign matter F1) that accumulate on the metal film transported to each process also increases exponentially as the size of the chips decreases.

[0055] In the manufacturing process of such a lithium-ion battery, the metal film 10A of Embodiment 1 is the metal film used in the above manufacturing process, and the transport rollers 71 to 74 of Embodiment 1 are the transport rollers used in the above manufacturing process. Then, between two adjacent processes among the plurality of manufacturing processes in the above manufacturing process, foreign object detection rollers 6A and 6B are installed.

[0056] As described above, by applying the detection device 1 of Embodiment 1 to the lithium-ion battery manufacturing process, the detection device 1 of Embodiment 1 can detect metal foreign matter F1 that has accumulated on the metal film manufactured in the lithium-ion battery manufacturing process. In this case, as described above, the size of the generated metal foreign matter (metal foreign matter F1) gradually increases over time, so the size of the metal foreign matter F1 that falls and accumulates on the metal film transported to each process also gradually increases over time. In this way, when the size of the metal foreign matter F1 to be detected gradually increases over time, the detection device 1 can detect metal foreign matter F1 of a predetermined size (the same size as or slightly larger than the distance s1 between the first wiring electrode portion 11a and the second wiring electrode portion 12a) as soon as it begins to be generated.

[0057] Furthermore, since rollers 6A and 6B for detecting foreign objects are positioned between the two processes, the detection process for metal foreign objects F1 can be prevented from affecting the manufacturing process.

[0058] As described later, by adjusting the distance s1 between the first wiring electrode portion 11a and the second wiring electrode portion 12a, and the width w1 of the first wiring electrode portion 11a and the second wiring electrode portion 12a, it is possible to detect a metal foreign object F1 of a desired size.

[0059] (1-4) Estimating the Optimal Size of a Detectable Metal Foreign Object This section describes how to estimate the optimal size (i.e., the size that is easiest to detect) of a metal foreign object F1 that can be detected by a pair of opposing electrodes 11 and 12.

[0060] In the following explanation, we assume that the frequency of occurrence of metal foreign matter F1 increases as the size of metal foreign matter F1 decreases (i.e., the number of occurrences of metal foreign matter F1 increases as the size of metal foreign matter F1 decreases).

[0061] As shown in Figure 8, when the size d1 of the metal foreign object F1 is smaller than the spacing s1 (see Figure 8), the probability (short-circuit rate) P1 that the fallen metal foreign object F1 short-circuits the first wiring electrode section 11a and the second wiring electrode section 12a is given by the following equation 1. Note that in the short-circuit rate P1, 100% is normalized to 1. Note that the size d1 of the metal foreign object F1 is the length of the longest part of the metal foreign object F1.

[0062] P1 = 0 ... Equation 1 Furthermore, when the size d1 of the metal foreign object F1 is greater than or equal to the distance between adjacent first wiring electrode portions 11a (2 × s1 + w1) (see Figure 9, Figure 9 shows the case where the size d1 is equal to the distance (2 × s1 + w1)), the short-circuit rate P1 is given by the following Equation 2.

[0063] P1 = 1 ... Equation 2 Furthermore, when the size d1 of the metallic foreign object F1 is greater than or equal to the spacing s1 and smaller than the spacing between adjacent first wiring electrode portions 11a (2 × s1 + w1) (see Figure 10), the short-circuit rate P1 is given by the following Equation 3.

[0064] P1 = (d1 - s1) / (s1 + w1) ... Equation 3 As shown above, when the number of metal foreign objects F1 changes, if a pair of opposing electrodes 11 and 12 with a spacing s1 and a width w1 are used, the number of detected metal foreign objects F1 will be maximized when the size d1 is between s1 and (2 × s1 + w1). The size d1 that takes this maximum value is the optimal size of metal foreign object F1 that can be detected by the pair of opposing electrodes 11 and 12. This will be confirmed by calculation below.

[0065] We calculate a specific example of the optimal size when s1 = 50 μm and w1 = 2 μm. In this case, the spacing between adjacent first wiring electrode portions 11a (2 × s1 + w1) is 102 μm. In this case, the relationship between the short-circuit rate P1 and the size d1 (foreign object size) of the metal foreign object F1 is calculated based on equations 1 to 3 and is shown in the graph in Figure 11. In this case, the relationship between the number of occurrences (number of foreign objects) and the average size of the metal foreign object F1 (average foreign object size) is shown in the graph in Figure 12 when actually measured. It can be seen that the number of foreign objects changes by an order of magnitude compared to the foreign object size. In this case, from Figures 11 and 12, the relationship between the number of detected metal foreign objects F1 and the size d1 (foreign object size) of the metal foreign object F1 is shown in the graph in Figure 13. The number of detections in Figure 13 is obtained by multiplying the short-circuit rate in Figure 11 and the number of foreign objects in Figure 12. Figure 13 shows that the size d1 (i.e., the optimal size) that maximizes the detection of metallic foreign matter F1 is 75 μm. As mentioned above, this optimal size is a value between s1 (= 50 μm) and 2 × s1 + w1 (= 102 μm).

[0066] The optimal size can be adjusted by changing the spacing s1 and width w1. That is, by changing the spacing s1 and width w1, it is possible to detect a metal foreign object F1 of a desired size. In Embodiment 1, the spacing s1 and electrode width w1 of the pair of opposing electrodes 11 and 12 are set so that the optimal size is, for example, about 100 μm.

[0067] (1-5) The operation (detection method) of the detection device 1 will be explained with reference to the operation diagram 14.

[0068] The time measurement unit 33 starts timing the detected time (ST1). Then, it starts transporting the metal film 10A (ST2). As this transport begins, the roller 6 starts rolling on the metal film 10A (that is, the roller 6 starts moving relative to the metal film 10A). As a result, the electrode sheet 5 provided on the outer surface 6a of the roller 6 enters the contact area R1 between the roller 6 and the metal film 10A by a certain width as the roller 6 rolls. The electrode sheet 5 is then pressed against the metal film 10A by the roller 6 in the contact area R1.

[0069] Then, as the relative movement of the roller 6 begins, the measuring unit 31 starts measuring the resistance value between the pair of opposing electrodes 11 and 12 of the electrode sheet 5 (ST3). When a metal foreign object F1 of a predetermined size (for example, about 100 μm) deposited on the metal film 10A enters the contact area R1, the metal foreign object F1 that enters straddles the first wiring electrode portion 11a and the second wiring electrode portion 12a of the electrode sheet 5 that have also entered the contact area R1, causing a short circuit between the pair of opposing electrodes 11 and 12. At that time, the metal foreign object F1 is pressed against the pair of opposing electrodes 11 and 12 by the roller 6, so the current flowing due to the short circuit caused by the metal foreign object F1 improves, and the resistance value between the pair of opposing electrodes 11 and 12 drops sharply to below the threshold. When the metal foreign object F1 passes through the contact area R1, the short circuit caused by the metal foreign object F1 is released, and the resistance value returns to its original value before the drop.

[0070] The determination unit 32 determines whether or not a short circuit has occurred in the electrode sheet 5 based on the measurement result of the measurement unit 31 (ST4). More specifically, the determination unit 32 determines that a short circuit has occurred if the measurement result (resistance value) of the measurement unit 31 falls below a threshold, and determines that a short circuit has not occurred if the measurement result of the measurement unit 31 does not fall below the threshold. If the determination unit 32 does not determine that a short circuit has occurred in the electrode sheet 5 (ST4: No), the process returns to step ST4.

[0071] On the other hand, if the determination unit 32 determines that a short circuit has occurred as a result of the determination in step ST4 (ST4: Yes), the time measurement unit 33 measures the time (detection time) from the start of timing in step ST1 to the determination time in step ST4 (ST5). In this way, the time measurement unit 33 measures the detection time of the short circuit that was determined to have occurred in step ST4.

[0072] Then, the counting unit 37 counts the occurrence of short circuits (i.e., the occurrence of metal foreign matter F1 of a predetermined size) that were determined to have occurred in step ST4 (ST6). The display unit 34 then displays the measurement results of the time measurement unit 33 and the counting results of the counting unit 37 (ST7). More specifically, the display unit 34 displays, for example, a graph showing the number of occurrences of metal foreign matter F1 in relation to the elapsed time (detection time).

[0073] The counting unit 37 then determines whether the number of metal foreign objects F1 generated is above a threshold (ST8). If the result of this determination is that the number of metal foreign objects F1 generated is not above a threshold (ST8: No), the process returns to step ST4. On the other hand, if the result of the determination in step ST8 is that the number of metal foreign objects F1 generated is above a threshold (ST8: Yes), the counting unit 37 notifies the determination result (that the number of metal foreign objects F1 generated is above a threshold) via the output unit 38 (ST9). Then the process ends.

[0074] Thus, when the detection device 1 detects a metal foreign object F1 of a predetermined size (for example, about 100 μm) a threshold number of times (for example, three times), the lithium-ion battery manufacturing process may be stopped, for example, and various devices used in the manufacturing process may be maintained.

[0075] (1-6) The detection device 1 according to the first embodiment of the effect comprises an electrode sheet 5, a measuring unit 31, and a determination unit 32. The electrode sheet 5 has a pair of counter electrodes 11, 12 and an insulating sheet 13. The pair of counter electrodes 11, 12 includes a first counter electrode 11 and a second counter electrode 12. The insulating sheet 13 supports the pair of counter electrodes 11, 12. The first counter electrode 11 has a plurality of first wiring electrode portions 11a, and the second counter electrode 12 has a plurality of second wiring electrode portions 12a. The plurality of second wiring electrode portions 12a are arranged alternately with the plurality of first wiring electrode portions 11a at intervals s1. The measuring unit 31 measures the electrical value between the pair of counter electrodes 11, 12 of the electrode sheet 5. Based on the measurement result of the measuring unit 31, the determination unit 32 determines whether or not a short circuit has occurred between the pair of counter electrodes 11, 12 due to metallic foreign matter F1 deposited on the substrate 10. The electrode sheet 5 is provided on the outer circumferential surface 6a of the roller 6, which moves relative to the substrate 10.

[0076] With this configuration, it is possible to detect metallic foreign matter F1 of a predetermined size (i.e., a size corresponding to the distance s1 between the first wiring electrode portion 11a and the second wiring electrode portion 12a) deposited on the substrate 10.

[0077] Furthermore, in the detection device 1 according to Embodiment 1, the substrate 10 is made of metal or an insulating film. With this configuration, it is possible to detect a metal foreign object F1 of a predetermined size that falls onto the metal or insulating film.

[0078] Furthermore, in the detection device 1 according to Embodiment 1, the film is a metal film 10A coated with the electrode material of a lithium-ion battery. With this configuration, it is possible to detect metallic foreign matter F1 deposited on the metal film 10A coated with the electrode material of a lithium-ion battery.

[0079] Furthermore, in the detection device 1 according to Embodiment 1, the roller 6 is a separate roller 6A from the conveying rollers 71 to 74. With this configuration, the roller 6 can be configured under conditions optimal for the detection device 1, as it is not limited by the various conditions required for the conveying rollers 71 to 74.

[0080] Furthermore, in the detection device 1 according to Embodiment 1, the first main surface 13a (main surface) of the insulating sheet 13 has a first recess 131 and a second recess 132. The first recess 131 is fitted into the first opposing electrode 11. The second recess 132 is fitted into the second opposing electrode 12. The exposed surface 11u (first exposed surface) of the first opposing electrode 11 is positioned at a lower height than the first main surface 13a of the insulating sheet 13. The exposed surface 12u (second exposed surface) of the second opposing electrode 12 is positioned at a lower height than the first main surface 13a of the insulating sheet 13.

[0081] With this configuration, when the electrode sheet 5 comes into contact with the substrate 10 without the metal foreign object F1, it is possible to suppress short circuits between the pair of opposing electrodes 11 and 12 of the electrode sheet 5 and the conductive part of the substrate 10. Furthermore, since the first opposing electrode 11 is fitted into the first recess 131, even if the electrode sheet 5 is wrapped around the outer surface 6a of the roller 6 or repeatedly comes into contact with and separates from the substrate 10, it is possible to suppress displacement of the first opposing electrode 11 within the first recess 131. Similarly, since the second opposing electrode 12 is fitted into the second recess 132, even if the electrode sheet 5 is wrapped around the outer surface 6a of the roller 6 or repeatedly comes into contact with and separates from the substrate 10, it is possible to suppress displacement of the second opposing electrode 12 within the second recess 132.

[0082] Furthermore, the detection device 1 according to Embodiment 1 further includes a time measuring unit 33. The time measuring unit 33 measures the detection time of a short circuit determined to have occurred by the determination unit 32. The detection time is the time from a predetermined point in time to the point in time when the determination unit 32 determines that a short circuit has occurred. With this configuration, the detection time of an occurring short circuit can be measured.

[0083] (1-7) Aspects other than the detection device The same functions as the detection device 1 according to Embodiment 1 may be embodied in a detection method, a computer program (program), or a non-temporary recording medium on which a computer program is recorded.

[0084] A detection method according to one embodiment comprises a measurement step and a determination step. In the measurement step, the electrical value between a pair of opposing electrodes 11 and 12 of the electrode sheet 5 is measured. The electrode sheet 5 has a pair of opposing electrodes 11 and 12 and an insulating sheet 13. The pair of opposing electrodes 11 and 12 include a first opposing electrode 11 and a second opposing electrode 12. The insulating sheet 13 supports the pair of opposing electrodes 11 and 12. The first opposing electrode 11 has a plurality of first wiring electrode portions 11a, and the second opposing electrode 12 has a plurality of second wiring electrode portions 12a. The plurality of second wiring electrode portions 12a are arranged alternately with the plurality of first wiring electrode portions 11a at intervals s1. In the determination step, based on the measurement result of the measurement step, it is determined whether or not a short circuit has occurred between the pair of opposing electrodes 11 and 12 due to metallic foreign matter F1 accumulated on the substrate 10. The electrode sheet 5 is provided on the outer circumferential surface 6a of a roller 6 that moves relatively over the substrate 10.

[0085] A program according to one embodiment causes one or more processors to execute the above-described detection method.

[0086] A non-temporary recording medium according to one embodiment records a program that causes one or more processors to execute the above-described detection method.

[0087] (1-8) Modifications of Embodiment 1 are listed below. The modifications described below can be applied in appropriate combinations.

[0088] (1-8-1) Modification 1 In Embodiment 1, the roller 6 on which the electrode sheet 5 is provided is a different roller 6A from the transport rollers 71-74 that transport the metal film 10A. However, roller 6 may be one of the transport rollers 71-74 that transport the metal film 10A (film). With this configuration, since the existing transport rollers 71-74 can be used, there is no need to prepare a new roller 6.

[0089] (1-8-2) Modification 2 In Embodiment 1, the time measurement unit 33, display unit 34, counting unit 37, and output unit 38 may be located in an external processing unit (for example, an external personal computer) instead of being located in the detection circuit unit 3. In this case, the detection circuit unit 3 further includes a communication unit that performs data communication with the external processing unit. When the determination unit 32 determines that a short circuit has occurred, the communication unit transmits the determination result to the external processing unit. In the external processing unit, the time measurement unit 33 performs the measurement process based on the determination result received by the external processing unit. The counting unit 37 also performs the counting process and the determination process based on the determination result received by the external processing unit. The display unit 34 displays the measurement result of the time measurement unit 33 and the counting result of the counting unit 37, as in Embodiment 1. The output unit 38 also notifies that the number of metal foreign objects F1 generated has exceeded a threshold, as in Embodiment 1.

[0090] In this way, by locating the time measurement unit 33, display unit 34, counting unit 37, and output unit 38 in an external processing unit, the processing load on the detection circuit unit 3 can be reduced. Furthermore, by using an external processing unit with higher performance, the processing of each of the time measurement unit 33, display unit 34, and counting unit 37 can be performed more quickly.

[0091] (1-8-3) Modification 3 Embodiment 1 exemplifies the case where the substrate 10 is a metal film 10A. However, the substrate 10 is not limited to a metal film 10A, and may be an insulating sheet. Also, Embodiment 1 exemplifies the case where the substrate 10 is a sheet (i.e., a flexible member). However, the substrate 10 may be a rigid member that is not flexible.

[0092] (1-8-4) Modification 4 Embodiment 1 illustrates the case in which the detection device 1 is used in the manufacturing process of a lithium-ion battery. However, the detection device 1 is not limited to use in the manufacturing process of a lithium-ion battery, and may be used for any purpose as long as it is used to detect metal foreign matter F1 of a predetermined size deposited on the substrate 10.

[0093] (2) Embodiment 2 A prediction device 100 according to Embodiment 2 will be described with reference to Figures 15 and 16.

[0094] (2-1) The prediction device 100 according to the second embodiment predicts the detection time of a metal foreign object F1 of a predetermined size deposited on the substrate 10. The detection time is the time from a predetermined point in time to the point in time when the metal foreign object F1 is detected, similar to the detection time in the first embodiment. The prediction device 100 is configured using the detection device 1 of the first embodiment. In the following description, components that are the same as those in the detection device 1 of the first embodiment are denoted by the same reference numerals and their descriptions are omitted, and the description may focus on components that are different from the detection device 1.

[0095] The prediction device 100 assumes that the size of the metallic foreign matter F1 deposited on the substrate 10 will gradually increase over time (Assumption 1). It also assumes that the number of metallic foreign matter F1 deposited on the substrate 10 will increase exponentially as the size decreases (Assumption 2). Note that Assumption 2 is not a mandatory assumption and can be omitted.

[0096] As shown in Figure 15, the prediction device 100 comprises an electrode sheet 5 and a detection circuit unit 3.

[0097] (2-1-1) Electrode Sheet The electrode sheet 5 of Embodiment 2 captures multiple metallic foreign objects F1 of different sizes that have accumulated on the substrate 10. As shown in Figure 15, the electrode sheet 5 of Embodiment 2 is configured similarly to the electrode sheet 5 of Embodiment 1 (see Figure 2), except that the electrode sheet 5 has multiple pairs of opposing electrodes 11 and 12 (five pairs G1 to G5 in the example of Figure 15).

[0098] In other words, the electrode sheet 5 of Embodiment 2 has multiple pairs of counter electrodes 11, 12, G1 to G5. The multiple pairs of counter electrodes 11, 12, G1 to G5 are configured in the same way as the pair of counter electrodes 11, 12 of Embodiment 1. The spacing s1 between each of the multiple pairs of counter electrodes 11, 12 (i.e., the spacing between the first wiring electrode portion 11a and the second wiring electrode portion 12a) is different from one another.

[0099] The first main surface 13a of the insulating sheet 13 in Embodiment 2 has a plurality of first recesses 131 and a plurality of second recesses 132 (see Figure 15). The plurality of first recesses 131 correspond one-to-one with a plurality of pairs G1 to G5, and the corresponding pairs of first opposing electrodes 11 are fitted into and arranged therein. The plurality of first recesses 131 are formed in the same way as the first recesses 131 in Embodiment 1. Therefore, when the exposed surfaces 11u of the plurality of pairs G1 to G5 first opposing electrodes 11 are fitted into the corresponding first recesses 131, they are positioned at a lower height than the first main surface 13a of the insulating sheet 13 (see Figure 3). Similarly, when the exposed surfaces 12u of the plurality of pairs G1 to G5 second opposing electrodes 12 are fitted into the corresponding second recesses 132, they are positioned at a lower height than the first main surface 13a of the insulating sheet 13 (see Figure 3).

[0100] The electrode sheet 5 of Embodiment 2 is provided on the outer circumferential surface 6a of the roller 6 (see Figure 1), similar to the electrode sheet 5 of Embodiment 1. In the example of Figure 15, the multiple pairs G1 to G5 are arranged in two rows perpendicular to the circumferential direction T1 of the roller 6. The arrangement of the multiple pairs G1 to G5 is not limited to the arrangement shown in Figure 15. For example, the multiple pairs G1 to G5 may be arranged in a single row in the circumferential direction T1 of the roller 6.

[0101] When distinguishing between the intervals s1 of multiple pairs G1 to G5, the interval s1 of pair G1 may be described as interval s11, the interval s1 of pair G2 as interval s12, the interval s1 of pair G3 as interval s13, the interval s1 of pair G4 as interval s14, and the interval s1 of pair G5 as interval s15. The relative sizes of the intervals s1 of each pair G1 to G5 are, for example, in the order of interval s11, interval s12, interval s13, interval s14, and interval s15.

[0102] The interval s1 between each pair of G1 to G5 is set so that the optimal size of the metal foreign object F1 detectable by each pair of G1 to G5 is, for example, approximately 10 μm, 20 μm, 40 μm, 80 μm, and 160 μm.

[0103] Each of the multiple pairs of counter electrodes 11 and 12 (G1 to G5) captures a metallic foreign object F1 of a size (optimal size) corresponding to the interval s1 specific to each pair of G1 to G5. Therefore, the multiple pairs of counter electrodes 11 and 12 (G1 to G5) capture multiple metallic foreign objects F1 of different sizes.

[0104] (2-1-2) Detection Circuit Unit The detection circuit unit 3 of the second embodiment predicts the detection time of a larger predetermined size (for example, about 100 μm) of metal foreign matter F1, based on the correlation between the size and cumulative number of occurrences at each detection time for a plurality of metal foreign matter F1 of different sizes (for example, about 10 μm to 80 μm) captured by the electrode sheet 5.

[0105] As shown in Figure 15, the detection circuit unit 3 of Embodiment 2 is configured similarly to the detection circuit unit 3 of Embodiment 1, except that it includes a plurality of measurement units 31 and a plurality of determination units 32, and a prediction unit 40, while omitting the output unit 38. That is, the detection circuit unit 3 of Embodiment 2 includes a plurality of (five in the example of Figure 14) measurement units 31, a plurality of (five in the example of Figure 14) determination units 32, a time measurement unit 33, a counting unit 37, a display unit 34, and a prediction unit 40.

[0106] Multiple measuring units 31 correspond one-to-one with multiple pairs of counter electrodes 11, 12, and measure the electrical value (e.g., resistance value) between the corresponding pairs of counter electrodes 11, 12.

[0107] Each of the multiple determination units 32 corresponds one-to-one with each of the multiple measurement units 31. Therefore, each of the multiple determination units 32 also corresponds to the corresponding measurement unit 31 and the corresponding pair of counter electrodes 11 and 12. Based on the measurement results of the corresponding measurement unit 31, each determination unit 32 determines whether or not a short circuit has occurred between the corresponding pair of counter electrodes 11 and 12. More specifically, each determination unit 32 determines whether or not a short circuit has occurred between the corresponding pair of counter electrodes 11 and 12 depending on whether or not the measurement result (resistance value) of the corresponding measurement unit 31 falls below a threshold.

[0108] The time measurement unit 33 measures the detection time of a short circuit (a short circuit caused by a metal foreign object F1 smaller than a predetermined size) that has been determined to have occurred by each determination unit 32. The detection time of a short circuit is, as described in Embodiment 1, the time from a predetermined point in time (when the prediction device is started or when short circuit detection begins) to the point in time when the determination unit 32 determines that a short circuit has occurred (i.e., the point in time when the metal foreign object F1 is detected). More specifically, for each short circuit that has been determined to have occurred by each determination unit 32, the time measurement unit 33 measures the time from a predetermined point in time to the point in time when the determination unit 32 determines that a short circuit has occurred (detection time).

[0109] The counting unit 37 counts the cumulative number of short circuits that have occurred for each interval s1 between pairs in which a short circuit occurred and for each short circuit detection time, based on the determination results of each determination unit 32 and the measurement results of the time measurement unit 33.

[0110] The "cumulative number of short circuits per detection time" refers to the cumulative number of short circuits that occurred from the start of timing the detection time until each of the detection time intervals (e.g., 0.5 days, 2.5 days, 4 days, 6 days) when the detection time is divided into multiple detection time intervals. The "multiple detection time intervals" mentioned above are predetermined. In Embodiment 2, the multiple detection time intervals are set to four intervals, for example, 0.5 days, 2.5 days, 4 days, and 6 days, as described above. For example, the cumulative number of short circuits when the short circuit time is 0.5 days is the cumulative number of short circuits that occurred from the start of timing the detection time until the detection time reaches 0.5 days.

[0111] The prediction unit 40 predicts the detection time for a short circuit caused by a metal foreign object F1 of a predetermined size (the detection time for a metal foreign object F1 of a predetermined size).

[0112] More specifically, the prediction unit 40, based on the counting results of the counting unit 37, determines a first correlation (for example, the correlation diagram and correlation lines L1 to L4 in Figure 16) between the cumulative number of short circuits occurring in two or more pairs of multiple pairs G1 to G5 where the interval s1 is smaller than the predetermined size, and the interval s1 (i.e., the size of the foreign object) for each short circuit detection time. Then, based on the first correlation obtained, the prediction unit 40 predicts the detection time of a short circuit caused by the metal foreign object F1 of the predetermined size (i.e., the detection time of the metal foreign object F1 of the predetermined size).

[0113] More specifically, the prediction unit 40 determines whether a short circuit has occurred in any of the pairs G1 to G5 based on the determination results of each determination unit 32. If the prediction unit 40 determines that a short circuit has occurred in any of the pairs G1 to G5, it associates the interval s1 of the pair where the short circuit occurred (i.e., the size of the foreign object) with the detection time of the short circuit (the detection time of the metal foreign object F1) (first correspondence relationship). Then, when each determination unit 32 determines that a short circuit has occurred, the counting unit 37 counts the cumulative number of short circuits for each detection time and interval s1 based on the result of the association (first correspondence relationship) by the prediction unit 40.

[0114] The prediction unit 40 then determines, based on the counting result of the counting unit 37, whether the counting unit 37 has counted the cumulative number of short circuits over two or more predetermined detection times (for example, four). Here, "a predetermined number of detection times (for example, four)" refers to a predetermined number (for example, four) of the multiple detection times (for example, four detection times of 0.5 days, 2.5 days, 4 days, and 6 days) that are handled "per detection time" as explained in the processing of the counting unit 37. Here, the "determined number of detection times" is set to four detection times of 0.5 days, 2.5 days, 4 days, and 6 days.

[0115] Then, when the prediction unit 40 determines that the counting unit 37 has counted the cumulative number of short circuits over a predetermined number of detection times, it determines a correspondence relationship (second correspondence relationship) between the interval s1 (i.e., foreign object size) and the cumulative number of short circuits (i.e., the cumulative number of metal foreign objects F1) for each predetermined number of detection times, based on the counting results of the counting unit 37. Then, based on the second correspondence relationship for each predetermined number of detection times, the prediction unit 40 determines a first correlation relationship (correlation diagram and correlation lines L1 to L4 in Figure 16) between the interval s1 and the cumulative number of short circuits for each predetermined number of detection times.

[0116] The correlation diagram between the interval s1 for each predetermined number of detection times and the cumulative number of short circuits is, for example, as shown in Figure 16, a planar coordinate system with the horizontal axis representing the foreign object size (interval s1) and the vertical axis representing the cumulative number of short circuits (i.e., the cumulative number of metal foreign objects F1). Points are plotted at coordinate positions specified by the interval s1 and the cumulative number of short circuits for each predetermined number of detection times (0.5 days, 2.5 days, 4 days, 6 days). The foreign object size on the horizontal axis is the size of the detected metal foreign object F1. Since the size of the metal foreign object F1 is determined according to the interval s1 of the counter electrodes 11 and 12, the foreign object size on the horizontal axis corresponds to the interval s1. The horizontal axis may also represent the interval s1. Furthermore, "the cumulative number of short circuits occurring for a predetermined number of detection time periods" refers to the cumulative number of short circuits that occurred from the start of timing for each of the predetermined number of detection time periods (for example, 0.5 days, 2.5 days, 4 days, and 6 days) when the detection time is divided into multiple detection time periods (for example, 0.5 days, 2.5 days, 4 days, and 6 days). For example, the cumulative number of short circuits for 0.5 days refers to the cumulative number of short circuits that occurred from the start of timing for timing for 0.5 days to 0.5 days.

[0117] In the example in Figure 16, for example, two second correspondences (two second correspondences at intervals of 10 μm and 20 μm) when the detection time is 0.5 days are illustrated by black triangular marks. Also, three second correspondences (second correspondences at intervals of 10 μm, 20 μm, and 40 μm) when the detection time is 2.5 days are illustrated by black square marks. Three second correspondences (three second correspondences at intervals of 10 μm, 20 μm, and 40 μm) when the detection time is 4 days are illustrated by black diamond marks. Four second correspondences (four second correspondences at intervals of 10 μm, 20 μm, 40 μm, and 80 μm) when the detection time is 6 days are illustrated by black circular marks.

[0118] In the example in Figure 16, correlation line L1 shows the correlation between two second correspondences (marked with black triangles) when the detection time is 0.5 days. Correlation line L2 shows the correlation between three second correspondences (marked with black squares) when the detection time is 2.5 days. Correlation line L3 shows the correlation between three second correspondences (marked with black diamonds) when the detection time is 4 days. Correlation line L4 shows the correlation between four second correspondences (marked with black circles) when the detection time is 6 days.

[0119] The prediction unit 40 then determines the cumulative number of occurrences N1 to N4 of metal foreign matter F1 of a predetermined size M1 for each detection time (e.g., 0.5 days, 2.5 days, 4 days, 6 days) based on the first correlation relationship obtained (correlation lines L1 to L4 in Figure 16). More specifically, the prediction unit 40 determines the cumulative occurrences N1 to N4 at the intersection of the correlation lines L1 to L4 and the dashed line V1 which is parallel to the vertical axis and passes through a predetermined scale on the horizontal axis (i.e., the predetermined size M1 (e.g., 100 μm)). Here, the cumulative occurrences N1 to N4 are the cumulative number of occurrences of metal foreign matter F1 of a predetermined size M1 when the detection time is 0.5 days, 2 days, 4 days, and 6 days, respectively.

[0120] The prediction unit 40 then predicts the detection time at which the cumulative number of metal foreign objects F1 of a predetermined size M1 becomes 1 (the time at which the first one is detected) based on the calculated cumulative number of occurrences N1 to N4 of a predetermined size M1 for each detection time. More specifically, the prediction unit 40 determines a second correlation relationship (correlation diagram and correlation line Q1 in Figure 17) between the detection time and the cumulative number of occurrences N1 to N4 of a predetermined size M1 for each detection time.

[0121] Here, the correlation diagram between detection time and the cumulative number of occurrences N1 to N4 of metal foreign objects F1 of a predetermined size M1 is, for example, as shown in Figure 17, a diagram in which points are plotted on a planar coordinate system with detection time on the horizontal axis and the cumulative number of occurrences of metal foreign objects F1 of a predetermined size M1 on the vertical axis, at coordinate positions specified by the detection time and the cumulative number of occurrences of metal foreign objects F1 of a predetermined size M1. The correlation line Q1 is a straight line drawn to best fit the plotted points (i.e., multiple points) mentioned above.

[0122] The prediction unit 40 then determines the detection time U1 at which the cumulative number of metal foreign objects F1 of a predetermined size M1 becomes 1, based on the correlation function (correlation line Q1) between the detection time and the cumulative number of occurrences N1 to N4 of a predetermined size M1. This detection time U1 is the predicted value of the detection time for metal foreign objects F1 of a predetermined size M1. In this way, the prediction unit 40 predicts the detection time (detection time U1) for metal foreign objects F1 of a predetermined size M1. In the above explanation, the detection time U1 is described as the time when the cumulative number of occurrences of metal foreign objects F1 becomes 1, but the cumulative number of occurrences may be set arbitrarily.

[0123] The display unit 34 is a display device capable of displaying various information, such as a liquid crystal display device, similar to the display unit 34 in Embodiment 1. The display unit 34 displays the prediction result of the prediction unit 40 (the predicted value of the detection time of a metal foreign object F1 of a predetermined size M1).

[0124] (2-2) The operation (prediction method) of the prediction device 100 will be explained with reference to the operation diagram 18.

[0125] The time measurement unit 33 starts timing the detected time (ST21). Then, it starts transporting the metal film 10A (ST22). As this transport begins, the roller 6 starts rolling on the metal film 10A (that is, the roller 6 starts moving relative to the metal film 10A). As a result, the electrode sheet 5 provided on the outer surface 6a of the roller 6 enters the contact area R1 between the roller 6 and the metal film 10A by a certain width as the roller 6 rolls. The electrode sheet 5 is then pressed against the metal film 10A by the roller 6 in the contact area R1.

[0126] Then, as the relative movement of the rollers 6 begins, the multiple measuring units 31 start measuring the resistance between the corresponding pairs of counter electrodes 11 and 12 from among the multiple pairs G1 to G5 (ST23). When metal foreign matter F1 of various sizes deposited on the metal film 10A enters the contact area R1 in sequence, the entered metal foreign matter F1 straddles the space between any one pair of counter electrodes 11 and 12 from among the multiple pairs G1 to G5 that entered the contact area R1 at the same time, causing a short circuit between the pair of counter electrodes 11 and 12. At this time, the metal foreign matter F1 is pressed against the pair of counter electrodes 11 and 12 by the rollers 6, so the current flowing due to the short circuit caused by the metal foreign matter F1 is improved, and the resistance between the pair of counter electrodes 11 and 12 drops sharply to below the threshold. When the metal foreign matter F1 passes through the contact area R1, the short circuit caused by the metal foreign matter F1 is released, and the resistance returns to its original value before the drop.

[0127] Multiple determination units 32 determine whether a short circuit has occurred in a corresponding pair among multiple pairs G1 to G5 based on the measurement results of the corresponding measurement unit 31 (ST24). More specifically, if the measurement result (resistance value) of the corresponding measurement unit 31 falls below a threshold, the multiple determination units 32 determine that a short circuit has occurred in the corresponding pair, and if the measurement result of the corresponding measurement unit 31 does not fall below the threshold, they determine that a short circuit has not occurred in the corresponding pair. If none of the multiple determination units 32 determine that a short circuit has occurred in the corresponding pair (ST24: No), the process returns to step ST24.

[0128] On the other hand, if, as a result of the determination in step ST24, any one of the determination units 32 determines that a short circuit has occurred in the corresponding pair (ST24: Yes), the time measurement unit 33 measures the time (detection time) from the start of timing in step ST21 to the determination time in step ST24 (ST25). In this way, the time measurement unit 33 measures the detection time of the short circuit that was determined to have occurred in step ST24. Then, the counting unit 37 counts the cumulative number of short circuits that have occurred for each interval s1 between pairs where a short circuit occurred and for each detection time of the short circuit, based on the determination results of each determination unit 32 and the measurement results of the time measurement unit 33 (ST26).

[0129] Then, the prediction unit 40 determines, based on the counting result of the counting unit 37, whether or not the counting unit 37 has counted the cumulative number of short circuits within a predetermined number of detection times (for example, four) (ST27). If the prediction unit 40 determines that the counting unit 37 has not counted the cumulative number of short circuits within the predetermined number of detection times (ST27: Yes), the process returns to step ST24. On the other hand, if the prediction unit 40 determines that the counting unit 37 has counted the cumulative number of short circuits within the predetermined number of detection times (ST27: Yes), the prediction unit 40 determines, based on the counting result of the counting unit 37, the correspondence relationship (second correspondence relationship) between the interval s1 (i.e., foreign object size) and the cumulative number of short circuits (i.e., the cumulative number of metal foreign objects F1) for each of the predetermined number of detection times (ST28). Then, the prediction unit 40 determines a first correlation relationship (correlation diagram and correlation lines L1 to L4 in Figure 16) between the interval s1 and the cumulative number of short circuits for each predetermined number of detection times, based on the second correspondence relationship for each predetermined number of detection times (ST29).

[0130] Then, the prediction unit 40 determines a second correlation between detection time and the cumulative number of occurrences N1 to N4 of predetermined size M1 based on the first correlation obtained (correlation diagram and correlation line Q1 in Figure 17) (ST30). More specifically, the prediction unit 40 determines the cumulative number of occurrences N1 to N4 of metal foreign objects F1 of predetermined size M1 for each detection time (see Figure 16) based on the first correlation obtained (correlation lines L1 to L4 in Figure 16). Then, the prediction unit 40 determines a second correlation between detection time and the cumulative number of occurrences N1 to N4 of metal foreign objects F1 of predetermined size M1 for each detection time (correlation diagram and correlation line Q1 in Figure 17) based on the obtained cumulative number of occurrences N1 to N4 of metal foreign objects F1 of predetermined size M1 for each detection time.

[0131] Then, the prediction unit 40 calculates the detection time U1 at which the cumulative number of metal foreign objects F1 of a predetermined size M1 becomes 1, based on the second correlation relationship (correlation line Q1) obtained (ST31). The display unit 34 then displays the prediction result of the prediction unit 40 (ST32). Then, the process ends.

[0132] Thus, the prediction device 100 can predict the detection time U1 of a metal foreign object F1 of a predetermined size M1 (for example, 100 μm) deposited on the metal film 10A. For this reason, for example, in a lithium-ion manufacturing process, by predicting the detection time of a metal foreign object F1 of a predetermined size (for example, about 100 μm) that would require the product to be discarded, the manufacturing line can be stopped before the predicted time has elapsed, and various devices used in the manufacturing process can be maintained, thereby avoiding the discarding of the product when a metal foreign object F1 of a predetermined size M1 is detected.

[0133] (2-3) The prediction device 100 according to the second embodiment of the effect comprises the detection device 1 according to the first embodiment. The electrode sheet 5 of the detection device 1 has a plurality of pairs of counter electrodes 11, 12, including a pair of counter electrodes 11, 12, totaling G1 to G5. The spacing s1 between each of the plurality of pairs of counter electrodes 11, 12, totaling G1 to G5, is different from that of the others. The insulating sheet 13 of the electrode sheet 5 supports the plurality of pairs of counter electrodes 11, 12, totaling G1 to G5. The prediction device 100 further comprises a time measurement unit 33, a counting unit 37, and a prediction unit 40. The time measurement unit 33 measures the detection time of a short circuit caused by a metal foreign object F1 smaller than a predetermined size, which has been determined to have occurred by the determination unit 32. The counting unit 37 counts the cumulative number of short circuits determined to have occurred by the determination unit 32 for each detection time and for each spacing s1 between the plurality of pairs of counter electrodes 11, 12, totaling G1 to G5. The prediction unit 40 predicts the detection time for a short circuit caused by a predetermined size metal foreign object F1 deposited on the substrate 10. Based on the counting results of the counting unit 37, the prediction unit 40 determines, for each detection time, a first correlation L1 to L4 between the cumulative number of short circuits occurring at two or more pairs of counter electrodes 11, 12 among multiple pairs G1 to G5 where the interval s1 is smaller than a predetermined size, and the interval s1. Based on the first correlation obtained, the prediction unit 40 predicts the detection time for the predetermined size metal foreign object F1. With this configuration, the detection time for a predetermined size metal foreign object F1 deposited on the substrate 10 can be predicted.

[0134] Furthermore, in the prediction device 100 according to Embodiment 2, the prediction unit 40 predicts the cumulative number of metal foreign objects F1 of a predetermined size N1 to N4 for each detection time based on the first correlations L1 to L4, and obtains a second correlation Q1 between the predicted cumulative number of occurrences N1 to N4 and the detection time. Based on the obtained second correlation Q1, the prediction unit 40 predicts the detection time of the metal foreign object F1 of a predetermined size. With this configuration, the detection time of the metal foreign object F1 of a predetermined size can be predicted more easily.

[0135] Furthermore, the prediction device 100 according to Embodiment 2 includes a plurality of measurement units 31 and a plurality of determination units 32. The plurality of measurement units 31 correspond to a plurality of pairs of counter electrodes 11 and 12 G1 to G5 and measure the electrical values ​​between the corresponding pairs of counter electrodes 11 and 12. The plurality of determination units 32 correspond to the plurality of measurement units 31 and determine whether or not a short circuit has occurred between the corresponding pairs of counter electrodes 11 and 12 based on the measurement results of the corresponding measurement units 31. With this configuration, since a measurement unit 31 and a determination unit 32 are provided for each pair of counter electrodes 11 and 12, the correspondence between the short circuit determined by the determination unit 32 and the pair in which the short circuit occurred can be easily determined.

[0136] Furthermore, in the prediction device 100 according to Embodiment 2, the installation area of ​​each pair of opposing electrodes 11, 12 of the multiple pairs G1 to G5 is larger as the distance s1 between the pairs of opposing electrodes 11, 12 increases. With this configuration, larger metal foreign objects F1, i.e., metal foreign objects F1 that occur infrequently, can be detected more reliably. In this configuration, it is assumed that the larger the size of the metal foreign object F1, the less frequently it occurs.

[0137] Furthermore, in the prediction device 100 according to Embodiment 2, the first main surface 13a (main surface) of the insulating sheet 13 has a plurality of first recesses 131 and a plurality of second recesses 132. The plurality of first recesses 131 correspond to a plurality of pairs of opposing electrodes 11 and 12 G1 to G5, and the first opposing electrode 11 of the corresponding pair of opposing electrodes 11 and 12 is fitted into each of the first recesses 131. The plurality of second recesses 132 correspond to a plurality of pairs of opposing electrodes 11 and 12 G1 to G5, and the second opposing electrode 12 of the corresponding pair of opposing electrodes 11 and 12 is fitted into each of the second recesses 132. The exposed surface 11u (first exposed surface) of the first opposing electrode 11 is positioned at a lower height than the first main surface 13a of the insulating sheet 13. The exposed surface 12u (second exposed surface) of the second opposing electrode 12 is positioned at a lower height than the first main surface 13a of the insulating sheet 13.

[0138] With this configuration, when the electrode sheet 5 comes into contact with the substrate 10 without the metal foreign object F1 in between, it is possible to suppress short circuits between the pair of opposing electrodes 11 and 12 of the electrode sheet 5 and the conductive part of the substrate 10. Furthermore, since the first opposing electrode 11 is fitted into the first recess 131, even if the electrode sheet 5 is wrapped around the outer surface 6a of the roller 6 or repeatedly comes into contact with and separates from the substrate 10, it is possible to suppress displacement of the first opposing electrode 11 within the first recess 131. Similarly, since the second opposing electrode 12 is fitted into the second recess 132, even if the electrode sheet 5 is wrapped around the outer surface 6a of the roller 6 or repeatedly comes into contact with and separates from the substrate 10, it is possible to suppress displacement of the second opposing electrode 12 within the second recess 132.

[0139] (2-4) Functions similar to those of the prediction device 100 according to Embodiment 2 of an embodiment other than the prediction device may be embodied in a prediction method, a computer program (program), or a non-temporary recording medium on which a computer program is recorded.

[0140] One embodiment of the prediction method includes the detection method described above. The electrode sheet 5 of the detection method has a plurality of pairs G1 to G5 of counter electrodes 11, 12, including a pair of counter electrodes 11, 12. The spacing s1 between each of the plurality of pairs G1 to G5 of counter electrodes 11, 12 is different from that of the others. The prediction method includes a time measurement step, a counting step, and a prediction step. In the time measurement step, the detection time of a short circuit caused by a metal foreign object F1 smaller than a predetermined size, which was determined to have occurred in the determination step, is measured. In the counting step, the cumulative number of short circuits determined to have occurred in the determination step is counted for each detection time and for each spacing s1 between the plurality of pairs G1 to G5 of counter electrodes 11, 12. In the prediction step, the detection time of a short circuit caused by a metal foreign object F1 of a predetermined size deposited on the substrate 10 is predicted. In the prediction step, based on the counting results from the counting step, a first correlation L1 to L4 is determined for each detection time between the cumulative number of short circuits occurring in two or more pairs of counter electrodes 11, 12 among multiple pairs G1 to G5 where the spacing s1 is smaller than a predetermined size, and the spacing s1. In the prediction step, the detection time U1 of a metal foreign object F1 of a predetermined size is predicted based on the first correlation L1 to L4 obtained.

[0141] A program according to one embodiment causes one or more processors to execute the above-described prediction method.

[0142] A non-temporary recording medium according to one embodiment records a program that causes one or more processors to execute the above prediction method.

[0143] (2-5) Modifications of Embodiment 2 are listed below. The modifications described below can be combined and applied as appropriate.

[0144] (2-5-1) Modification 1 In Embodiment 2, an example is given where the larger the interval s1, the larger the installation area (e.g., detection range 14) of the opposing electrodes 11 and 12 of each pair G1 to G5 (see Figure 15). If the installation area of ​​the opposing electrodes 11 and 12 of a pair (e.g., G4) is made relatively larger than the reference area (e.g., the installation area of ​​the opposing electrodes 11 and 12 of pair G1), the number of detected short circuits (number of occurrences) at the opposing electrodes 11 and 12 of pair G4 when the installation area is made relatively larger than the reference area will be greater than the number of detected short circuits that occurred at the opposing electrodes 11 and 12 of pair G4 when the installation area is not made relatively larger than the reference area (i.e., the reference area), by the amount of the increased installation area. For example, if the installation area of ​​the counter electrodes 11 and 12 for G4 is increased to N times the standard area, the number of detected short circuits (number of foreign objects) at the counter electrodes 11 and 12 for G4 when the installation area is increased to N times the standard area will be N times the number of detected short circuits at the counter electrodes 11 and 12 for G4 when the installation area is the standard area. For this reason, it is desirable to correct the measured value of the number of detected short circuits at the counter electrodes 11 and 12 for G4 when the installation area is increased to N times the standard area by multiplying it by 1 / N. For this reason, when the counting unit 37 measures the number of detected short circuits at a pair of counter electrodes 11 and 12 with an installation area increased to N times the standard area, it is desirable to correct the measured value by multiplying it by 1 / N. Alternatively, instead of correcting the measured value by 1 / N, if a threshold is set for the number of detections, that threshold may be corrected by N times.

[0145] Increasing the installation area of ​​the counter electrodes 11 and 12 for pairs G1 to G5 means that the counter electrodes 11 and 12 for pairs G1 to G5 may be configured so that the detection range 14 of the counter electrodes 11 and 12 for pairs G1 to G5 is increased, or the number of the same pairs G1 to G5 may be increased. In the example in Figure 19, when there are two types of counter electrodes 11 and 12 for pairs G2 and G4 with different spacing s1 (s12, s14), the installation area of ​​the counter electrodes 11 and 12 for pair G4 with a relatively large spacing s14 is increased by making the number of counter electrodes 11 and 12 for pair G4 with a relatively large spacing s14 (3 electrodes) greater than the number of counter electrodes 11 and 12 for pair G2 with a relatively small spacing s12 (1 electrode).

[0146] (2-5-2) Modification 2 A metal foreign object F1 (large foreign object) of a size corresponding to a relatively large interval s1 (e.g., interval s14) is detected by the opposing electrodes 11, 12 of pair G4 having a relatively small interval s1 (e.g., interval s12) and is detected as a metal foreign object F1 (small foreign object) of a size corresponding to a relatively small interval s1. Furthermore, the larger the size of the metal foreign object F1 (i.e., the larger the foreign object), the lower the frequency of occurrence of the metal foreign object F1. Considering these factors, in Embodiment 2, if the installation area (e.g., detection range 14) of each of the multiple pairs of opposing electrodes 11, 12 of G1 to G5 with different intervals s11 to s15 is the same size, then a large foreign object (metal foreign object F1 with a low occurrence frequency) is detected as a small foreign object with a higher probability. For this reason, it may become impossible to accurately measure the detection time of a large foreign object.

[0147] Therefore, the larger the interval s1, the larger the set area of ​​the counter electrodes 11 and 12 for each pair of G1 to G5. This makes it easier to detect large foreign objects as large foreign objects, allowing for more accurate measurement of the detection time of large foreign objects. Furthermore, regarding small foreign objects, although the installation range of the pairs of counter electrodes 11 and 12 with the corresponding interval s1 becomes relatively small, the frequency of small foreign objects is high, and small foreign objects are not detected as large foreign objects, allowing for accurate measurement of the detection time of small foreign objects.

[0148] Furthermore, increasing the installation area of ​​the counter electrodes 11 and 12 for each of the G1 to G5 means that the counter electrodes 11 and 12 for each of the G1 to G5 may be configured to increase the detection range 14 of the counter electrodes 11 and 12 for each of the G1 to G5, or the number of the same G1 to G5 electrodes may be increased.

[0149] (2-5-3) Modification 3 In Embodiment 2, the interval s1 between multiple pairs of G1 to G5 is set such that the optimal size of the metal foreign matter F1 detectable by each pair of G1 to G5 is, for example, about 10 μm, 20 μm, 40 μm, 80 μm, and 160 μm. However, the interval s1 between multiple pairs of G1 to G5 is not limited to this setting. For example, the interval s1 between multiple pairs of G1 to G5 may be set such that the optimal size of the metal foreign matter F1 detectable by each pair of G1 to G5 is, for example, minute (5 μm or more and less than 15 μm), small (15 μm or more and less than 25 μm), medium (25 μm or more and less than 50 μm), large (50 μm or more and less than 100 μm), and huge (100 μm or more and less than 150 μm).

[0150] Furthermore, to improve the accuracy of the first correlation (correlation lines L1 to L4), the interval s1 between each pair G1 to G5 may be made smaller, thereby increasing the number of pairs. For example, in the above example, the optimal size of the metal foreign matter F1 is divided into three categories (tiny, small, and medium) between tiny and medium, but the categories may be further subdivided within the range from tiny to medium. Note that the number of metal foreign matter occurrences is large in the range of tiny to medium size, making it suitable for subdividing categories.

[0151] More specifically, the range from minute to medium may be further subdivided into six categories, 1 to 6. In other words, increasing the number of categories to six will also increase the number of pairs. In this case, category 1 is, for example, a size of 5 μm or more and less than 15 μm. Category 2 is, for example, a size of 15 μm or more and less than 25 μm. Category 3 is, for example, a size of 25 μm or more and less than 35 μm. Category 4 is, for example, 35 μm or more and less than 45 μm. Category 5 is, for example, 45 μm or more and less than 55 μm. Category 6 is, for example, 55 μm or more and less than 65 μm.

[0152] In this way, by adjusting the number of pairs and the interval s1 between each pair to further subdivide the category, the accuracy of the first correlation (correlation lines L1 to L4) can be improved.

[0153] (3) Embodiment 3 A prediction device 100 according to Embodiment 3 will be described with reference to Figures 20 and 21.

[0154] (3-1) The prediction device 100 according to the configuration embodiment 3 is configured to predict the detection time of a metal foreign object F1 of a predetermined size deposited on the substrate 10 using a pair of counter electrodes (a pair of connected counter electrodes 18, 19) in the prediction device 100 according to embodiment 2. In the following description, components that are the same as those in the prediction device 100 of embodiment 2 are denoted by the same reference numerals and their descriptions are omitted, and the description may focus on components that are different from the prediction device 100.

[0155] As shown in Figure 20, the prediction device 100 according to Embodiment 3 comprises an electrode sheet 15 and a detection circuit unit 3.

[0156] (3-1-1) Electrode Sheet As shown in Figure 20, the electrode sheet 15 of Embodiment 3 is configured similarly to the electrode sheet 5 of Embodiment 2, except that it is equipped with a pair of connected counter electrodes 18, 19 instead of a plurality of pairs of counter electrodes 11, 12 G1 to G5.

[0157] The pair of connected opposing electrodes 18 and 19 are configured in the multiple pairs of opposing electrodes 11 and 12 of G1 to G5 in Embodiment 2 by connecting the first opposing electrodes 11 to each other (more specifically, the first connecting portions 11b to each other) and the second opposing electrodes 12 to each other (more specifically, the second connecting portions 12b to each other). In other words, the electrode sheet 15 of Embodiment 3 is configured similarly to the electrode sheet 5 of Embodiment 2, except that the first opposing electrodes 11 to each other and the second opposing electrodes 12 to each other are connected in the multiple pairs of opposing electrodes 11 and 12 of G1 to G5. In Embodiment 3, the multiple pairs of opposing electrodes 11 and 12 of G1 to G5 are arranged in a line along the circumferential direction T1 of the roller 6.

[0158] More specifically, the pair of connected opposing electrodes 18 and 19 comprises a first connected opposing electrode 18 and a second connected opposing electrode 19.

[0159] The first connecting opposing electrode 18 has multiple pairs of first wiring electrode portions 11a each of G1 to G5, and a first connecting portion 18b. The multiple pairs of first wiring electrode portions 11a each of G1 to G5 are arranged in a line with spacing along the circumferential direction T1 of the roller 6. The first connecting portion 18b is, for example, strip-shaped and is formed by connecting, for example, the multiple pairs of first connecting portions 11b each of G1 to G5. The first connecting portion 18b is connected to one end of the multiple pairs of first wiring electrode portions 11a each of G1 to G5. That is, the multiple pairs of first wiring electrode portions 11a each of G1 to G5 protrude from one side of the first connecting portion 18b in the width direction of the first connecting portion 18b.

[0160] The second connecting opposing electrode 19 has multiple pairs of second wiring electrode portions 12a each of G1 to G5, and a second connecting portion 19b. The multiple pairs of second wiring electrode portions 12a each of G1 to G5 are arranged at intervals along the circumferential direction T1 of the roller 6. The second connecting portion 19b is, for example, strip-shaped and is formed by connecting, for example, the multiple pairs of second connecting portions 12b each of G1 to G5. The second connecting portion 19b is connected to one end of the multiple pairs of second wiring electrode portions 12a each of G1 to G5. That is, the multiple pairs of second wiring electrode portions 12a each of G1 to G5 protrude from one side of the second connecting portion 19b in the width direction of the second connecting portion 19b.

[0161] The multiple second wiring electrode portions 12a of each pair G1 to G5 are arranged alternately with the multiple first wiring electrode portions 11a of the same pair, with a spacing s1 specific to that pair. That is, the multiple first wiring electrode portions 11a and the multiple second wiring electrode portions 12a of pair G1 are arranged alternately with a spacing s11 specific to pair G1. The multiple first wiring electrode portions 11a and the multiple second wiring electrode portions 12a of pair G2 are arranged alternately with a spacing s12 specific to pair G2. The multiple first wiring electrode portions 11a and the multiple second wiring electrode portions 12a of pair G3 are arranged alternately with a spacing s13 specific to pair G3. The multiple first wiring electrode portions 11a and the multiple second wiring electrode portions 12a of pair G4 are arranged alternately with a spacing s14 specific to pair G4. The multiple first wiring electrode portions 11a and multiple second wiring electrode portions 12a relative to G5 are arranged alternately with a specific interval s15 between them relative to G5.

[0162] The installation areas of the opposing electrodes 11 and 12 for each pair G1 to G5 are, for example, different in size. More specifically, the installation areas of each pair G1 to G5 are larger in the order of G1, G2, G3, G4, and G5. The installation area of ​​the opposing electrodes 11 and 12 for each pair G1 to G5 is the same as the detection range 14 for each pair G1 to G5. The installation areas of each pair G1 to G5 may also be the same size.

[0163] The detection range 16 of the electrode sheet 15 is the area that exactly surrounds the pair of connected opposing electrodes 18 and 19.

[0164] (3-1-2) Detection Circuit Unit The detection circuit unit 3 of Embodiment 3, similar to the detection circuit unit 3 of Embodiment 2, predicts the detection time of a larger predetermined size metal foreign object F1 based on the correlation between the size and cumulative number of occurrences of multiple metal foreign objects F1 of various sizes captured by the electrode sheet 15 at each detection time. As shown in Figure 20, the detection circuit unit 3 of Embodiment 3 includes a measurement unit 31, a determination unit 32, a time measurement unit 33, a display unit 34, a position measurement unit 36, and a counting unit 37.

[0165] The measuring unit 31 measures the electrical value (e.g., resistance value) between the pair of connected opposing electrodes 18 and 19 of the electrode sheet 15.

[0166] The position measuring unit 36 ​​measures the rotation angle of the roller 6. More specifically, the position measuring unit 36 ​​measures the rotation angle of the roller 6 when its rotation position is at a predetermined position, with the rotation angle of the roller 6 being defined as 0 degrees. The phrase "when the rotation position of the roller 6 is at a predetermined position" means, for example, when the first end 16a of the detection range 16 of the electrode sheet 15 is located at the center of the circumferential direction T1 of the contact area R1 between the roller 6 and the metal film 10A. From the rotation angle of the roller 6, it is possible to identify the pair of electrode sheets 15 that has entered the contact area R1 (i.e., the pair where a short circuit has occurred) among the multiple pairs G1 to G5 of the electrode sheet 15.

[0167] The determination unit 32 determines whether a short circuit has occurred between the pair of connected opposing electrodes 18 and 19 of the electrode sheet 15, based on the measurement results of the measurement unit 31. More specifically, the determination unit 32 determines whether a short circuit has occurred depending on whether the measurement result (e.g., resistance value) of the measurement unit 31 falls below a threshold. For example, the determination unit 32 determines that a short circuit has occurred if the measurement result (e.g., resistance value) of the measurement unit 31 falls below a threshold, and determines that a short circuit has not occurred if the measurement result (e.g., resistance value) of the measurement unit 31 is not below a threshold. The determination unit 32 also identifies the pair in which the short circuit occurred from among the multiple pairs G1 to G5, based on the measurement result (rotation angle of the roller 6) of the position measurement unit 36 ​​at the time of determination.

[0168] The time measurement unit 33, similar to the time measurement unit 33 in Embodiment 2, measures the detection time of a short circuit (a short circuit caused by a metal foreign object F1 smaller than a predetermined size) that has been determined to have occurred by the determination unit 32. More specifically, the time measurement unit 33 measures the time (detection time) from a predetermined point in time (for example, when the prediction device 100 is started or when short circuit detection begins) to the point in time when the determination unit 32 determines that a short circuit has occurred.

[0169] Based on the measurement results of the position measurement unit 36, the counting unit 37 identifies the interval s1 of the pair in which a short circuit occurred, as determined by the determination unit 32, from among the intervals s11 to s15 of the multiple pairs G1 to G5. Then, based on the determination result of the determination unit 32, the measurement result of the time measurement unit 33, and the identification result of the counting unit 37 (i.e., the interval s1 of the pair in which the short circuit occurred), the counting unit 37 counts the cumulative number of short circuits that have occurred for each interval s1 of the pair in which the short circuit occurred and for each short circuit detection time, similar to the counting unit 37 of Embodiment 2.

[0170] The prediction unit 40 predicts the detection time for a short circuit caused by a metal foreign object F1 of a predetermined size (i.e., the detection time for a metal foreign object F1 of a predetermined size), similar to the prediction unit 40 of Embodiment 2.

[0171] More specifically, the prediction unit 40, similar to the prediction unit 40 in Embodiment 2, calculates a first correlation (for example, the correlation diagram and correlation lines L1 to L4 in Figure 16) between the cumulative number of short circuits occurring in two or more pairs of multiple pairs G1 to G5 where the interval s1 is smaller than the predetermined size, and the interval s1 (i.e., the size of the foreign object), based on the counting results of the counting unit 37, for each short circuit detection time. Then, the prediction unit 40 predicts the detection time of a short circuit caused by the metal foreign object F1 of the predetermined size (i.e., the detection time of the metal foreign object F1) based on the first correlation obtained.

[0172] More specifically, when the determination unit 32 determines that a short circuit has occurred, the prediction unit 40 identifies the interval s1 of the pair where the short circuit occurred from among the intervals s11 to s15 of the multiple pairs G1 to G5, based on the measurement results of the position measurement unit 36 ​​at the time of determination. The prediction unit 40 also identifies the pair where the short circuit occurred from among the multiple pairs G1 to G5, based on the measurement results of the position measurement unit 36 ​​at the time of determination, and identifies the interval s1 of the identified pair. The prediction unit 40 also associates the interval s1 of the pair where the short circuit occurred (i.e., the size of the foreign object) with the detection time of the short circuit (the detection time of the metal foreign object F1) based on the identification result of the prediction unit 40 (i.e., the identification result of the interval s1) and the measurement result of the time measurement unit 33 (first correspondence relationship). Then, when the determination unit 32 determines that a short circuit has occurred, the counting unit 37 counts the cumulative number of short circuits for each detection time and interval s1 of the short circuit, based on the result of the association (first correspondence relationship) of the prediction unit 40.

[0173] Then, based on the counting results of the counting unit 37, the prediction unit 40 determines whether the counting unit 37 has counted the cumulative number of short circuits over two or more predetermined detection times (for example, four) (for example, 0.5 days, 2.5 days, 4 days, and 6 days). If the prediction unit 40 determines that the counting unit 37 has counted the cumulative number of short circuits over two or more predetermined detection times (for example, four), it sequentially determines the first correspondence relationship (correlation diagram and correlation lines L1 to L4 in Figure 16) and the second correlation relationship (correlation diagram and correlation line Q1 in Figure 17), similar to the prediction unit 40 of Embodiment 2. Then, similar to the prediction unit 40 of Embodiment 2, the prediction unit 40 determines the detection time U1 at which the cumulative number of metal foreign objects F1 of a predetermined size M1 becomes one (i.e., the predicted value of the detection time for metal foreign objects F1 of a predetermined size M1) based on the determined correlation line Q1. In the above explanation, the detection time U1 is described as the time when the cumulative number of metal foreign objects F1 becomes 1, but the cumulative number of occurrences may be set arbitrarily.

[0174] The display unit 34 displays the prediction result of the prediction unit 40 (the predicted detection time of a metal foreign object F1 of a predetermined size) in the same manner as the display unit 34 of the second embodiment.

[0175] (3-2) Referring to the operation diagram 21, the operation (prediction method) of the prediction device 100 according to Embodiment 3 will be described.

[0176] The time measurement unit 33 starts timing the detected time (ST71). Then, it starts transporting the metal film 10A (ST72). As this transport begins, the roller 6 starts rolling on the metal film 10A (i.e., the roller 6 starts moving relative to the metal film 10A). As a result, the electrode sheet 5 provided on the outer surface 6a of the roller 6 enters the contact area R1 between the roller 6 and the metal film 10A by a certain width as the roller 6 rolls. Then, the electrode sheet 5 is pressed against the metal film 10A by the roller 6 in the contact area R1. Also, as the transport of the metal film 10A begins, the position measurement unit 36 ​​starts measuring the rotation angle of the roller 6 (ST73).

[0177] Then, as the relative movement of the roller 6 begins, the measuring unit 31 starts measuring the resistance value between the pair of connected opposing electrodes 18 and 19 of the electrode sheet 5 (ST74). When metal foreign matter F1 of various sizes accumulated on the metal film 10A enters the contact area R1, the entered metal foreign matter F1 straddles the space between one of the pairs of opposing electrodes 11 and 12 from among the multiple pairs G1 to G5 of the pair of connected opposing electrodes 18 and 19 that entered the contact area R1 at the same time as the metal foreign matter F1, causing a short circuit between the pair of opposing electrodes 11 and 12 due to the metal foreign matter F1. At that time, the metal foreign matter F1 is pressed against the pair of opposing electrodes 11 and 12 by the roller 6, so the current flowing due to the short circuit caused by the metal foreign matter F1 improves, and the resistance value between the pair of opposing electrodes 11 and 12 drops sharply to below the threshold. Then, when the metal foreign object F1 passes through the contact area R1, the short circuit caused by the metal foreign object F1 is released, and the resistance value returns to its original value before the decrease.

[0178] The determination unit 32 determines whether or not a short circuit has occurred in the pair of connected opposing electrodes 18 and 19 based on the measurement result of the measurement unit 31 (ST75). More specifically, the determination unit 32 determines that a short circuit has occurred if the measurement result (resistance value) of the measurement unit 31 falls below a threshold, and determines that a short circuit has not occurred if the measurement result of the measurement unit 31 does not fall below a threshold. If the determination unit 32 does not determine that a short circuit has occurred (ST75: No), the process returns to step ST75.

[0179] On the other hand, if the determination unit 32 determines that a short circuit has occurred as a result of the determination in step ST75 (ST75: Yes), the time measurement unit 33 measures the time (detection time) from the start of timing in step ST71 to the determination time in step ST75 (ST76). In this way, the time measurement unit 33 measures the detection time of the short circuit that was determined to have occurred in step ST75. Then, the position measurement unit 36 ​​measures the rotation angle of the roller 6 at the time of the determination in step ST75. Based on this measurement result, the prediction unit 40 identifies the interval s1 of the pair in which the short circuit determined in step ST75 occurred from the intervals s11 to s15 of the multiple pairs G1 to G5 (ST77). Then, the counting unit 37 counts the cumulative number of short circuits that have occurred for each interval s1 of the pair in which the short circuit occurred and for each short circuit detection time, based on the determination result of the determination unit 32, the measurement result of the time measurement unit 33, and the identification result of the prediction unit 40 (ST78). Then, the process proceeds to step ST27.

[0180] Note that steps ST27 to ST32 in Embodiment 3 are the same as steps ST27 to ST32 in Figure 18 of Embodiment 2, so their explanation will be omitted.

[0181] (3-3) Application Fields of the Prediction Device In the prediction device 100 according to Embodiment 3, similar to the prediction device 100 according to Embodiment 2, for example, in the lithium-ion manufacturing process, by predicting the detection time of a metal foreign object F1 of a predetermined size (for example, about 100 μm) that requires the product to be discarded, the manufacturing line can be stopped before the predicted time has elapsed, and various devices used in the manufacturing process can be maintained, thereby reducing the amount of product that needs to be discarded when the above-mentioned metal foreign object F1 of the predetermined size is detected.

[0182] (3-4) The prediction device 100 according to the third embodiment of the effect comprises a pair of connected opposing electrodes 18 and 19 and a position measuring unit 36. The pair of connected opposing electrodes 18 and 19 are configured such that the first opposing electrodes 11 are connected to each other and the second opposing electrodes 12 are connected to each other in a plurality of pairs of opposing electrodes 11 and 12 G1 to G5. The position measuring unit 36 ​​measures the rotation angle of the roller 6 at the time the determination unit 32 determines that a short circuit has occurred. Based on the measurement result of the position measuring unit 36 ​​at the time of determination by the determination unit 32, the prediction unit 40 identifies the pair in which the short circuit occurred, as determined by the determination unit 32, from among the plurality of pairs G1 to G5. With this configuration, since a pair of connected opposing electrodes 18 and 19 are used, the number of measuring units 31 and determination units 32 can be reduced to the number of the pair of connected opposing electrodes 18 and 19, i.e., to one.

[0183] Furthermore, in the prediction device 100 according to Embodiment 3, the multiple pairs of opposing electrodes 11 and 12 G1 to G5 are arranged in a line along the circumferential direction T1 of the roller 6. With this configuration, a one-to-one correspondence can be established between the multiple pairs of opposing electrodes 11 and 12 G1 to G5 and the rotation angle of the roller 6. As a result, based on the rotation angle of the roller 6, the pair in which a short circuit has occurred can be easily identified from among the multiple pairs G1 to G5.

[0184] (3-5) Modifications of Embodiment 3 are listed below. The modifications described below can be combined and applied as appropriate.

[0185] (3-5-1) Modification 1 In Embodiment 3, as in Modification 1 of Embodiment 2, the installation area of ​​each pair of opposing electrodes 11 and 12 G1 to G5 may be assumed to be larger than the reference area (for example, the set area of ​​the pair G1 with the smallest set area). In this case, it is desirable to correct the number of detected short circuits occurring in pairs with a relatively larger installation area compared to the reference area so that it is reduced by the amount by which the installation area is relatively increased compared to the reference area. Alternatively, instead of correcting the measured value to be reduced, if a threshold is set for the number of detections, it may be corrected to make that threshold larger.

[0186] (3-5-2) Modification 2 In Embodiment 3, as in Modification 2 of Embodiment 2, it is desirable to increase the set area for G1 to G5 as the interval s1 increases.

[0187] (3-5-3) Modification 3 In Embodiment 3, as in Modification 2 of Embodiment 2, the short-circuit position determination process of the determination unit 32 may be performed by an external processing unit.

[0188] Furthermore, in Embodiment 3, the identification process of the counting unit 37 and the prediction unit 40 (the process of identifying the pair in which a short circuit has occurred, as determined by the determination unit 32, from among the multiple pairs G1 to G5) may also be performed by an external processing unit. In this case, similar to Modification 2 of Embodiment 2, the detection circuit unit 3 further includes a communication unit that communicates data with the external processing unit. The detection circuit unit 3 transmits the measurement value of the position measuring unit 36 ​​at the time the determination unit 32 determined that a short circuit had occurred to the external processing unit via the communication unit. The external processing unit stores the received measurement value in its storage unit. Based on the received measurement value, the external processing unit identifies the location of the short circuit determined by the determination unit 32, and based on the identified short circuit location, it identifies which pair of the multiple pairs G1 to G5 corresponds to the identified short circuit location. The external processing unit then transmits the identification result to the detection circuit unit 3 via the communication unit. The detection circuit unit 3 then executes processing based on the identification result from the external processing unit, with the counting unit 37 and the prediction unit 40 performing the processing.

[0189] (3-5-4) Other modified embodiments 1 to 3 and their modified embodiments may be implemented in combination.

[0190] (4) The following aspects are disclosed in this disclosure:

[0191] The detection device (1) of the first embodiment comprises an electrode sheet (5), a measuring unit (31), and a determination unit (32). The electrode sheet (5) has a pair of counter electrodes (11, 12) and an insulating sheet (13). The pair of counter electrodes (11, 12) includes a first counter electrode (11) and a second counter electrode (12). The insulating sheet (13) supports the pair of counter electrodes (11, 12). The first counter electrode (11) has a plurality of first wiring electrode portions (11a), and the second counter electrode (12) has a plurality of second wiring electrode portions (12a). The plurality of second wiring electrode portions (12a) are arranged alternately with the plurality of first wiring electrode portions (11a) at intervals (s1). The measuring unit (31) measures the electrical value between the pair of counter electrodes (11, 12) of the electrode sheet (5). The determination unit (32) determines, based on the measurement results from the measurement unit (31), whether or not a short circuit has occurred between the pair of opposing electrodes (11, 12) due to metallic foreign matter (F1) deposited on the substrate (10). The electrode sheet (5) is provided on the outer circumferential surface (6a) of the roller (6) which moves relatively over the substrate (10).

[0192] This configuration makes it possible to detect metallic foreign matter (F1) of a predetermined size (i.e., a size corresponding to the distance (s1) between the first wiring electrode portion (11a) and the second wiring electrode portion (12a)) deposited on the substrate (10).

[0193] In the detection device (1) of the second embodiment, the substrate (10) is made of metal or an insulating film, as in the first embodiment.

[0194] This configuration allows for the detection of a predetermined size of metallic foreign object (F1) falling onto a metal or insulating film.

[0195] In the detection device (1) of the third embodiment, the film is a metal film (10A) coated with the electrode material of a lithium-ion battery.

[0196] This configuration makes it possible to detect metallic foreign matter (F1) deposited on a metal film (10A) coated with the electrode material of a lithium-ion battery.

[0197] In the detection device (1) of the fourth embodiment, the roller (6) is a transport roller (71-74) that transports the film, as in the second or third embodiment.

[0198] With this configuration, existing transport rollers (71-74) can be used, eliminating the need to prepare a new roller (6).

[0199] In the detection device (1) of the fifth embodiment, as in the fourth embodiment, the roller (6) is a separate roller (6A, 6B) from the conveying rollers (71-74).

[0200] With this configuration, the rollers (6) can be configured under conditions optimal for the detection device (1), as they are not limited to the various conditions required for the conveying rollers (71-74).

[0201] In the sixth embodiment of the detection device (1), in any one of the second to fifth embodiments, the main surface (13a) of the insulating sheet (13) has a first recess (131) and a second recess (132). The first recess (131) is fitted with a first counter electrode (11). The second recess (132) is fitted with a second counter electrode (12). The first exposed surface (11u) of the first counter electrode (11) is positioned at a lower height than the main surface (13a) of the insulating sheet (13). The second exposed surface (12u) of the second counter electrode (12) is positioned at a lower height than the main surface (13a) of the insulating sheet (13).

[0202] With this configuration, when the electrode sheet (5) comes into contact with the substrate (10) without the presence of a metallic foreign object (F1), it is possible to suppress short circuits between the pair of opposing electrodes (11, 12) of the electrode sheet (5) and the conductive portion of the substrate (10). Furthermore, since the first opposing electrode (11) is fitted into the first recess (131), even if the electrode sheet (5) is wrapped around the outer surface (6a) of the roller (6) or repeatedly comes into contact with and separates from the substrate (10), it is possible to suppress displacement of the first opposing electrode (11) within the first recess (131). Similarly, since the second opposing electrode (12) is fitted into the second recess (132), even if the electrode sheet (5) is wrapped around the outer surface (6a) of the roller (6) or repeatedly comes into contact with and separates from the substrate (10), it is possible to suppress displacement of the second opposing electrode (12) within the second recess (132).

[0203] The detection device (1) of the seventh embodiment further comprises a time measuring unit (33) in any one of the first to sixth embodiments. The time measuring unit (33) measures the detection time of a short circuit determined to have occurred by the determination unit (32). The detection time is the time from a predetermined point in time to the point in time when the determination unit (32) determines that a short circuit has occurred.

[0204] This configuration allows for the measurement of the detection time of a short circuit.

[0205] The prediction device (100) of the eighth embodiment comprises the detection device (1) of the first embodiment. The electrode sheet (5) of the detection device (1) has a plurality of pairs (G1 to G5) of counter electrodes (11, 12), including a pair of counter electrodes (11, 12). The spacing (s1) between each of the plurality of pairs (G1 to G5) of counter electrodes (11, 12) is of a different size. The insulating sheet (13) of the electrode sheet (5) supports the plurality of pairs (G1 to G5) of counter electrodes (11, 12). The prediction device (100) comprises a time measuring unit (33), a counting unit (37), and a prediction unit (40). The time measuring unit (33) measures the detection time of a short circuit caused by a metal foreign object (F1) smaller than a predetermined size, which has been determined to have occurred by the determination unit (32). The counting unit (37) counts the cumulative number of short circuits determined to have occurred by the determination unit (32) for each detection time and for each interval (s1) of the multiple pairs (G1 to G5) of counter electrodes (11, 12). The prediction unit (40) predicts the detection time of a short circuit caused by a metal foreign object (F1) of a predetermined size deposited on the substrate (10). Based on the counting results of the counting unit (37), the prediction unit (40) determines a first correlation (L1 to L4) between the cumulative number of short circuits occurring in two or more pairs of counter electrodes (11, 12) among the multiple pairs (G1 to G5) of counter electrodes (11, 12) where the interval (s1) is smaller than a predetermined size, and the interval (s1), for each detection time. Based on the first correlation (L1 to L4) obtained, the prediction unit (40) predicts the detection time of a metal foreign object (F1) of a predetermined size.

[0206] This configuration makes it possible to predict the detection time of a metal foreign object (F1) of a predetermined size deposited on the substrate (10).

[0207] In the ninth embodiment of the prediction device (100), in the eighth embodiment, the prediction unit (40) predicts the cumulative number of metal foreign objects (F1) of a predetermined size (N1 to N4) for each detection time based on the first correlation (L1 to L4), and obtains a second correlation (Q1) between the predicted cumulative number of occurrences (N1 to N4) and the detection time. Based on the obtained second correlation (Q1), the prediction unit (40) predicts the detection time of metal foreign objects (F1) of a predetermined size.

[0208] This configuration makes it easier to predict the detection time for a metal foreign object (F1) of a predetermined size.

[0209] The prediction device (100) of the tenth embodiment comprises a plurality of measuring units (31) and a plurality of determination units (32) in the ninth embodiment. The plurality of measuring units (31) include a measuring unit (31) and correspond to a plurality of pairs (G1 to G5) of counter electrodes (11, 12), and measure the electrical value between the corresponding pairs of counter electrodes (11, 12). The plurality of determination units (32) include a determination unit (32) and correspond to the plurality of measuring units (31), and determine whether or not a short circuit has occurred between the corresponding pairs of counter electrodes (11, 12) based on the measurement results of the corresponding measuring units (31).

[0210] With this configuration, a measurement unit (31) and a determination unit (32) are provided for each pair of opposing electrodes (11, 12), making it easy to determine the correspondence between the short circuit determined by the determination unit (32) and the pair in which the short circuit occurred.

[0211] In the prediction device (100) of the eleventh embodiment, in the tenth embodiment, the installation area of ​​each pair of opposing electrodes (11, 12) of the multiple pairs (G1 to G5) is larger the greater the distance (s1) between the pairs of opposing electrodes (11, 12).

[0212] This configuration allows for more reliable detection of larger metal foreign objects (F1) (i.e., metal foreign objects that occur infrequently (F1)).

[0213] The prediction device (100) of the twelfth embodiment includes, in the eighth or ninth embodiment, a pair of connected opposing electrodes (18, 19) and a position measuring unit (36). The pair of connected opposing electrodes (18, 19) are configured such that the first opposing electrodes (11) are connected to each other and the second opposing electrodes (12) are connected to each other in a plurality of pairs (G1 to G5) of opposing electrodes (11, 12). The position measuring unit (36) measures the rotation angle of the roller (6) at the time the determination unit (32) determines that a short circuit has occurred. Based on the measurement result of the position measuring unit (36) at the time of the determination unit (32)'s determination, the prediction unit (40) identifies the pair of the plurality of pairs (G1 to G5) in which the determination unit (32) determined that a short circuit had occurred.

[0214] With this configuration, since a pair of connected opposing electrodes (18, 19) are used, the number of measurement units (31) and determination units (32) can be reduced to the number of the pair of connected opposing electrodes (18, 19) (i.e., one unit).

[0215] In the prediction device (100) of the 13th embodiment, as in the 12th embodiment, multiple pairs (G1 to G5) of opposing electrodes (11, 12) are arranged in the circumferential direction (T1) of the roller (6).

[0216] This configuration allows for a one-to-one correspondence between multiple pairs (G1 to G5) of opposing electrodes (11, 12) and the rotation angles of the rollers (6). As a result, the pair in which a short circuit occurred can be easily identified from among the multiple pairs (G1 to G5) based on the rotation angle of the rollers (6).

[0217] In the prediction device (100) of the 14th embodiment, in any one of the 8th to 13th embodiments, the main surface (13a) of the insulating sheet (13) has a plurality of first recesses (131) and a plurality of second recesses (132). The plurality of first recesses (131) correspond to a plurality of pairs (G1 to G5) of counter electrodes (11, 12), and the first counter electrode (11) of the corresponding pair of counter electrodes (11, 12) is fitted into each of the first recesses (131). The plurality of second recesses (132) correspond to a plurality of pairs (G1 to G5) of counter electrodes (11, 12), and the second counter electrode (12) of the corresponding pair of counter electrodes (11, 12) is fitted into each of the second recesses (132). The first exposed surface (11u) of the first counter electrode (11) is positioned at a height lower than the main surface (13a) of the insulating sheet (13). The second exposed surface (12u) of the second opposing electrode (12) is positioned at a lower height than the main surface (13a) of the insulating sheet (13).

[0218] With this configuration, when the electrode sheet (5) comes into contact with the substrate (10) without the presence of a metallic foreign object (F1), it is possible to suppress short circuits between the pair of opposing electrodes (11, 12) of the electrode sheet (5) and the conductive portion of the substrate (10). Furthermore, since the first opposing electrode (11) is fitted into the first recess (131), even if the electrode sheet (5) is wrapped around the outer surface (6a) of the roller (6) or repeatedly comes into contact with and separates from the substrate (10), it is possible to suppress displacement of the first opposing electrode (11) within the first recess (131). Similarly, since the second opposing electrode (12) is fitted into the second recess (132), even if the electrode sheet (5) is wrapped around the outer surface (6a) of the roller (6) or repeatedly comes into contact with and separates from the substrate (10), it is possible to suppress displacement of the second opposing electrode (12) within the second recess (132).

[0219] The detection method of the 15th embodiment comprises a measurement step and a determination step. In the measurement step, an electrical value is measured between a pair of counter electrodes (11, 12) of an electrode sheet (5). The electrode sheet (5) has a pair of counter electrodes (11, 12) and an insulating sheet (13). The pair of counter electrodes (11, 12) includes a first counter electrode (11) and a second counter electrode (12). The insulating sheet (13) supports the pair of counter electrodes (11, 12). The first counter electrode (11) has a plurality of first wiring electrode portions (11a), and the second counter electrode (12) has a plurality of second wiring electrode portions (12a). The plurality of second wiring electrode portions (12a) are arranged alternately with the plurality of first wiring electrode portions (11a) at intervals (s1). In the determination step, based on the measurement results from the measurement step, it is determined whether or not a short circuit has occurred between the pair of opposing electrodes (11, 12) due to metallic foreign matter (F1) deposited on the substrate (10). The electrode sheet (5) is provided on the outer circumferential surface (6a) of the roller (6) that moves relatively over the substrate (10).

[0220] This configuration makes it possible to detect metallic foreign matter (F1) of a predetermined size (i.e., a size corresponding to the distance (s1) between the first wiring electrode portion (11a) and the second wiring electrode portion (12a)) deposited on the substrate (10).

[0221] The sixteenth embodiment of the prediction method includes the fifteenth embodiment of the detection method. The electrode sheet (5) of the detection method has multiple pairs (G1 to G5) of counter electrodes (11, 12), including a pair of counter electrodes (11, 12). The spacing (s1) between each of the multiple pairs (G1 to G5) of counter electrodes (11, 12) is of a different size. The prediction method includes a time measurement step, a counting step, and a prediction step. In the time measurement step, the detection time of a short circuit caused by a metal foreign object (F1) smaller than a predetermined size, which was determined to have occurred in the determination step, is measured. In the counting step, the cumulative number of short circuits determined to have occurred in the determination step is counted for each detection time and for each spacing (s1) between the multiple pairs (G1 to G5) of counter electrodes (11, 12). In the prediction step, the detection time of a short circuit caused by a metal foreign object (F1) of a predetermined size deposited on the substrate (10) is predicted. In the prediction process, based on the counting results from the counting process, a first correlation (L1 to L4) is determined for each detection time between the cumulative number of short circuits occurring in two or more pairs of counter electrodes (11, 12) among multiple pairs (G1 to G5) where the spacing (s1) is smaller than a predetermined size, and the spacing (s1). In the prediction process, the detection time (U1) of a metal foreign object (F1) of a predetermined size is predicted based on the determined first correlation (L1 to L4).

[0222] This configuration makes it possible to predict the detection time of a metal foreign object (F1) of a predetermined size deposited on the substrate (10).

[0223] 1 Detection device 5 Electrode sheet 6 Roller 6a Outer surface 10 Substrate 10A Metal film 11 First opposing electrode 11a First wiring electrode section 11u Exposed surface (first exposed surface) 12 Second opposing electrode 12a Second wiring electrode section 12u Exposed surface (second exposed surface) 13 Insulating sheet 31 Measurement section 32 Judgment section 100 Prediction device 131 First recess 132 Second recess F1 Metal foreign matter G1-G5 vs L1-L4 Correlation line (first correlation) N1-N4 Cumulative number of occurrences s1 Interval Q1 Correlation line (second correlation)

Claims

1. A detection device comprising: an electrode sheet having a pair of counter electrodes including a first counter electrode and a second counter electrode, and an insulating sheet supporting the pair of counter electrodes, wherein the first counter electrode has a plurality of first wiring electrode portions, and the second counter electrode has a plurality of second wiring electrode portions arranged alternately with the plurality of first wiring electrode portions at intervals; a measuring unit for measuring the electrical value between the pair of counter electrodes on the electrode sheet; and a determination unit for determining whether or not a short circuit has occurred between the pair of counter electrodes due to metallic foreign matter deposited on a substrate, based on the measurement result of the measuring unit, wherein the electrode sheet is provided on the outer circumferential surface of a roller that moves relatively over the substrate.

2. The detection device according to claim 1, wherein the substrate is made of metal or an insulating film.

3. The detection device according to claim 2, wherein the film is a metal film coated with the electrode material of a lithium-ion battery.

4. The detection device according to claim 2 or 3, wherein the roller is a conveying roller for conveying the film.

5. The detection device according to claim 4, wherein the roller is a different roller from the conveying roller.

6. The detection device according to any one of claims 2 to 5, wherein the main surface of the insulating sheet has a first recess into which the first opposing electrode is fitted and a second recess into which the second opposing electrode is fitted, the first exposed surface of the first opposing electrode is positioned at a lower height than the main surface of the insulating sheet, and the second exposed surface of the second opposing electrode is positioned at a lower height than the main surface of the insulating sheet.

7. The detection device according to any one of claims 1 to 6, further comprising a time measuring unit for measuring the detection time of the short circuit determined to have occurred by the determination unit, wherein the detection time is the time from a predetermined point in time to the point in time when the determination unit determined that the short circuit had occurred.

8. A prediction device comprising the detection device according to claim 1, wherein the electrode sheet of the detection device has a plurality of pairs of counter electrodes, including the pair of counter electrodes, the spacing between each of the plurality of pairs of counter electrodes is of a different size, the insulating sheet of the electrode sheet supports the plurality of pairs of counter electrodes, the prediction device further comprises: a time measuring unit for measuring the detection time of the short circuit caused by the metal foreign matter of a size smaller than a predetermined size, which has been determined to have occurred by the determination unit; a counting unit for counting the cumulative number of short circuits determined to have occurred by the determination unit for each detection time and for each spacing between the plurality of pairs of counter electrodes; and a prediction unit for predicting the detection time of the short circuit caused by the metal foreign matter of a predetermined size deposited on the substrate, wherein the prediction unit, based on the counting result of the counting unit, determines a first correlation between the cumulative number of short circuits that have occurred at two or more pairs of counter electrodes among the plurality of pairs of counter electrodes whose spacing is smaller than the predetermined size and the spacing, and predicts the detection time of the metal foreign matter of the predetermined size based on the first correlation obtained. Prediction device.

9. The prediction device according to claim 8, wherein the prediction unit predicts the cumulative number of metal foreign objects of a predetermined size for each detection time based on the first correlation, obtains a second correlation between the predicted cumulative number of occurrences and the detection time, and predicts the detection time of the metal foreign objects of a predetermined size based on the obtained second correlation.

10. The prediction device according to claim 9, comprising: a plurality of measuring units, each including the measuring unit, corresponding to the plurality of pairs of counter electrodes, and measuring the electrical value between the corresponding pairs of counter electrodes; and a plurality of determining units, each including the determining unit, corresponding to the plurality of measuring units, and determining whether or not a short circuit has occurred between the corresponding pairs of counter electrodes based on the measurement results of the corresponding measuring units.

11. The prediction device according to claim 10, wherein the installation area of ​​each pair of counter electrodes of the plurality of pairs of counter electrodes is larger the greater the distance between the pairs of counter electrodes.

12. A prediction device according to claim 8 or 9, comprising: a pair of connected opposing electrodes configured such that the first opposing electrodes are connected to each other and the second opposing electrodes are connected to each other in a plurality of pairs of opposing electrodes; and a position measuring unit that measures the rotation angle of the roller at the time the determination unit determines that the short circuit has occurred, wherein the prediction unit identifies the pair of the plurality of pairs in which the short circuit has occurred, which the determination unit has determined to have occurred, based on the measurement result of the position measuring unit at the time of determination by the determination unit.

13. The prediction device according to claim 12, wherein the plurality of pairs of opposing electrodes are arranged in the circumferential direction of the roller.

14. The prediction device according to any one of claims 8 to 13, wherein the main surface of the insulating sheet has a plurality of first recesses corresponding to the plurality of pairs of opposing electrodes into which a first opposing electrode from the corresponding pair of opposing electrodes is fitted, and a plurality of second recesses corresponding to the plurality of pairs of opposing electrodes into which a second opposing electrode from the corresponding pair of opposing electrodes is fitted, the first exposed surface of the first opposing electrode is positioned at a height lower than the main surface of the insulating sheet, and the second exposed surface of the second opposing electrode is positioned at a height lower than the main surface of the insulating sheet.

15. A detection method comprising: a measurement step of measuring an electrical value between the pair of opposing electrodes of an electrode sheet having a pair of opposing electrodes including a first opposing electrode and a second opposing electrode, wherein the first opposing electrode has a plurality of first wiring electrode portions, and the second opposing electrode has a plurality of second wiring electrode portions arranged alternately with the plurality of first wiring electrode portions at intervals; and a determination step of determining whether or not a short circuit has occurred between the pair of opposing electrodes due to metallic foreign matter deposited on a substrate, based on the measurement result of the measurement step, wherein the electrode sheet is provided on the outer circumferential surface of a roller that moves relatively over the substrate.

16. A prediction method comprising the detection method according to claim 15, wherein the electrode sheet of the detection method has a plurality of pairs of counter electrodes, including the pair of counter electrodes, the spacing between each of the plurality of pairs of counter electrodes is of a different size, the insulating sheet of the electrode sheet supports the plurality of pairs of counter electrodes, and the prediction method comprises: a time measurement step of measuring the detection time of the short circuit caused by the metal foreign matter smaller than a predetermined size, which is determined to have occurred in the determination step; a counting step of counting the cumulative number of short circuits determined to have occurred in the determination step for each detection time and for each spacing between the plurality of pairs of counter electrodes; and a prediction step of predicting the detection time of the short circuit caused by the metal foreign matter of a predetermined size deposited on the substrate, wherein in the prediction step, based on the counting result in the counting step, a first correlation is obtained between the cumulative number of short circuits that have occurred at two or more pairs of counter electrodes among the plurality of pairs of counter electrodes whose spacing is smaller than the predetermined size and the spacing, and the detection time of the metal foreign matter of the predetermined size is predicted based on the obtained first correlation. Prediction method.

Images