Heater and semiconductor process device

Abstract

The present application relates to the technical field of semiconductors, and discloses a heater and a semiconductor process device. The heater comprises an annular heating body, a thermal insulation ring arranged around the heating body, and a support assembly. The support assembly is connected to the thermal insulation ring; the support assembly is provided with a limiting space for supporting the heating body; the heating body is lapped in the limiting space; and the width of the limiting space in an extension direction from the outer wall of the thermal insulation ring to the inner wall of the thermal insulation ring is greater than the thickness of the heating body. In this solution, the heating body can normally expand and deform in the limiting space, so that the heating body does not easily twist and deform, and the support assembly does not easily separate from the thermal insulation ring, thereby prolonging the service life of the heating body and the thermal insulation ring.

Description

Heater and semiconductor process equipment TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor, and particularly relates to a heater and semiconductor process equipment. BACKGROUND

[0002] The semiconductor process equipment is an important process equipment for semiconductor device manufacturing, and is suitable for various processes such as oxidation, annealing and thin film growth in the semiconductor device manufacturing process. Various processes are carried out at a certain temperature. The heater is a core component of the semiconductor process equipment, and is mainly used to heat the product sheet to meet the process temperature requirement. The heating body is one of the core components of the heater, and is mainly used for heating.

[0003] In the prior art, the heating body is fixed on the heat preservation ring of the heater through multiple pins. During the heating and cooling process of the heating body, the heating body will repeatedly expand and contract, which will cause repeated friction between the heating body and the pins, and will easily cause wear of the heating body. In addition, due to the friction between the heating body and the pins, the heating body is easy to twist and deform during thermal expansion, which will cause damage to the heating body. When the heating body twists and deforms, a large force will be applied to the pins to cause the pins to be pulled out of the heat preservation ring, thereby reducing the strength of the heat preservation ring and causing the heat preservation ring to be easy to break, thereby shortening the service life of the heater.

[0004] Therefore, the existing heater has the defects that the heating body is easy to be damaged and the heat preservation ring is easy to be broken. SUMMARY

[0005] The purpose of the embodiments of the present application is to provide a heater and semiconductor process equipment, which can solve the problems of easy damage of the heating body and easy breakage of the heat preservation ring in the related art.

[0006] In a first aspect, the embodiments of the present application provide a heater, comprising a ring-shaped heating body, a heat preservation ring arranged around the heating body, and a support assembly, wherein:

[0007] The support assembly is connected with the heat preservation ring, and the support assembly is provided with a limiting space for supporting the heating body, the heating body is overlapped in the limiting space, and the width of the limiting space in the extension direction from the outer wall of the heat preservation ring to the inner wall of the heat preservation ring is greater than the thickness of the heating body.

[0008] In a second aspect, the embodiments of the present application also provide a semiconductor process equipment, comprising a reaction chamber and the above-mentioned heater, and the heating body of the heater is arranged around the reaction chamber.

[0009] In the embodiment of the present application, the heating body is overlapped in the limiting space, the connection of the heating body and the heat preservation ring can be realized, and meanwhile, since the width of the limiting space in the extending direction from the outer wall to the inner wall of the heat preservation ring is greater than the thickness of the heating body, the heating body can normally expand and deform in the limiting space, so that the heating body is not easy to interact with the supporting assembly in the process of normal deformation, the friction between the heating body and the supporting assembly can be reduced or eliminated, on the one hand, the heating body is not easy to twist and deform, thus, the heating body is not easy to be damaged, and the service life of the heating body can be prolonged, on the other hand, the supporting assembly is not easy to be separated from the heat preservation ring due to the smaller or no force of the heating body, and thus the strength of the heat preservation ring can be guaranteed, which is beneficial to prolong the service life of the heat preservation ring. BRIEF DESCRIPTION OF DRAWINGS

[0010] Fig. 1 is a structural schematic diagram of a semiconductor process equipment disclosed by the embodiment of the present application;

[0011] Fig. 2 is a perspective view of a heater disclosed by the embodiment of the present application (with a hidden outer heat preservation member);

[0012] Fig. 3 is an exploded view of the heater disclosed by the embodiment of the present application (with a hidden outer heat preservation member);

[0013] Fig. 4 is a partial schematic view of the heater disclosed by the embodiment of the present application;

[0014] Fig. 5 is another partial schematic view of the heater disclosed by the embodiment of the present application;

[0015] Fig. 6 is a perspective view of a supporting assembly disclosed by the embodiment of the present application;

[0016] Fig. 7 is an exploded view of the supporting assembly disclosed by the embodiment of the present application;

[0017] Fig. 8 is a perspective view of a hook disclosed by the embodiment of the present application;

[0018] Fig. 9 is a top view of the supporting assembly disclosed by the embodiment of the present application;

[0019] Fig. 10 is a connection relationship diagram of a first limiting member and the hook disclosed by the embodiment of the present application (when the hook is inserted into the slot);

[0020] Fig. 11 is another connection relationship diagram of the first limiting member and the hook disclosed by the embodiment of the present application (when the hook is not inserted into the slot);

[0021] Fig. 12 is a third connection relationship diagram of the first limiting member and the hook disclosed by the embodiment of the present application (when the hook is inserted into the slot);

[0022] Fig. 13 is a perspective view of the first limiting member disclosed by the embodiment of the present application;

[0023] Fig. 14 is a connection relationship diagram of the first limiting member and the guide member disclosed by the embodiment of the present application;

[0024] Fig. 15 is a partial sectional view of the heater disclosed by the embodiment of the present application;

[0025] Fig. 16 is a partial top view of the heater disclosed by the embodiment of the present application;

[0026] Fig. 17 is a partial top view of the heater disclosed by the embodiment of the present application;

[0027] Fig. 18 is a connection relationship diagram of the heating body and the guide member disclosed by the embodiment of the present application;

[0028] Fig. 19 is a second perspective view of the first limiting member disclosed by the embodiment of the present application;

[0029] Fig. 20 is a third perspective view of the second limiting member disclosed by the embodiment of the present application;

[0030] Fig. 21 is a first perspective view of the guide member disclosed by the embodiment of the present application;

[0031] Fig. 22 is a second perspective view of the guide member disclosed by the embodiment of the present application;

[0032] Fig. 23 is a connection relationship diagram of the support assembly and the heating body disclosed by the embodiment of the present application;

[0033] Fig. 24 is a top view of the support assembly and the heating body disclosed by the embodiment of the present application.

[0034] Legend: 100 - reaction chamber; 200 - product support structure; 300 - heat preservation ring; 400 - outer heat preservation member; 500 - heating body; 501 - socket; 502 - second gap; 510 - heating section; 600 - support assembly; 610 - first limiting member; 611 - first limiting portion; 6111 - first through hole; 612 - second limiting portion; 6121 - second through hole; 6122 - insertion slot; 6123 - insertion limiting portion; 613 - heat preservation ring connecting portion; 614 - connecting convex portion; 615 - limiting slot; 616 - limiting space; 620 - second limiting member; 621 - hook; 6211 - insertion portion; 6212 - first connecting portion; 6213 - second connecting portion; 6214 - first gap; 630 - guide member; 631 - guide portion; 632 - concentric connecting portion; 6321 - limiting convex portion; 6322 - avoiding slot; 700 - lead terminal; 800 - concentric control member; 810 - first connecting slot; 820 - second connecting slot; 830 - first protrusion; 840 - second protrusion; 900 - first fixing ring; 910 - first fixing hole; 1000 - second fixing ring; 1010 - second fixing hole. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some, but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art belong to the scope of protection of the present application.

[0036] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than that illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally of a kind and do not limit the number of objects, for example, the first object can be one or more. In addition, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / ", generally indicates that the objects before and after are in a "or" relationship.

[0037] The heater and semiconductor process equipment provided by the embodiments of the present application will be described in detail below with reference to the drawings and specific embodiments and their application scenarios.

[0038] Referring to FIGS. 1-24, the heater provided by the embodiments of the present application can include a heating body 500, a heat preservation ring 300 arranged around the heating body 500, and a support assembly 600. The heat preservation ring 300 can be arranged outside the reaction chamber 100 to insulate the inside of the heater from the external environment, slow down the heat exchange between the reaction chamber 100 and the external environment. The heating body 500 can be annular in structure, and can be arranged around the reaction chamber 100 to heat the reaction chamber 100. The support assembly 600 can be used to connect the heating body 500 and the heat preservation ring 300, so that the heating body 500 is fixed inside the heat preservation ring 300 and the position of the heating body 500 is kept stable. Here, the heater can further include a lead terminal 700, one end of which can be connected to a power supply system, and the other end of which can pass through the heat preservation ring 300 and be connected to the heating body 500 to transmit electric energy to the heating body 500, so that the heating body 500 can convert the electric energy into heat energy, thereby heating the reaction chamber 100, and finally heating the product support structure 200 and the product wafer in the reaction chamber 100. In some embodiments, the product wafer here can be a wafer, and the product support structure 200 can be a wafer boat.

[0039] In some embodiments, the heater can further comprise an outer thermal insulation member 400, which is arranged outside the thermal insulation ring 300 to further reduce the heat conduction between the inside of the heater and the outside, so as to ensure the temperature inside the heater, so that the temperature inside the heater can reach the temperature requirement required for the heat treatment process of the product sheet. Here, the outer thermal insulation member 400 can be bonded with the outer wall of the thermal insulation ring 300, and one end of the lead terminal 700 can pass through the outer thermal insulation member 400 and be connected with the power supply system. The outer thermal insulation member 400 can be made of thermal insulation cotton.

[0040] The support assembly 600 can be connected with the thermal insulation ring 300, and the support assembly 600 can be provided with a limiting space 616, and the heating body 500 can be overlapped in the limiting space 616. The limiting space 616 can be used to support the heating body 500, so that the heating body 500 is fixed on the thermal insulation ring 300.

[0041] In addition, as shown in FIG. 16, the width of the limiting space 616 in the extension direction c from the outer wall of the thermal insulation ring 300 to the inner wall of the thermal insulation ring 300 can be greater than the thickness of the heating body 500. In this way, the heating body 500 can normally heat and expand and deform in the limiting space 616, and the heating body 500 is not easy to interact with the support assembly 600 in the normal deformation process, which can reduce or eliminate the friction between the heating body 500 and the support assembly 600. On the one hand, the heating body 500 is not easy to twist and deform, so the heating body 500 is not easy to be damaged, thereby prolonging the service life of the heating body 500, on the other hand, the support assembly 600 is not easy to be separated from the thermal insulation ring 300, thereby ensuring the strength of the thermal insulation ring 300, which is beneficial to prolong the service life of the thermal insulation ring 300.

[0042] It should be noted that the width of the limiting space 616 in the extension direction c from the outer wall of the thermal insulation ring 300 to the inner wall of the thermal insulation ring 300 is not specifically the width in the extension direction c from the outer wall of the thermal insulation ring 300 to the inner wall of the thermal insulation ring 300. It is the same width as the width of the limiting space 616 in the extension direction d from the inner wall of the thermal insulation ring 300 to the outer wall of the thermal insulation ring 300. Specifically, when the thermal insulation ring 300 is a cylindrical structure, the direction of the width here is the radial direction of the thermal insulation ring 300.

[0043] In some embodiments, the overlapping positions of the heating body 500 in the limiting spaces 616 can be located on the same side of the heating body 500 in the first direction, where the first direction can be parallel to the axial direction of the heating body 500. In this way, the support positions of the support assembly 600 on the heating body 500 can be located on the same side of the heating body 500 in the first direction, thereby achieving detachable connection of the heating body 500 and the heat preservation ring 300, and facilitating disassembly and assembly of the heating body 500 when the heating body 500 is damaged or needs to be repaired.

[0044] In some embodiments, as shown in FIG. 6, the support assembly 600 can include at least two first limiters 610, which can be provided with the above-mentioned limiting spaces 616 (as shown in FIG. 13), and each first limiter 610 can be distributed along the circumferential direction of the heat preservation ring 300, and the limiting space 616 of each first limiter 610 can be used for the overlapping of the heating body 500. In this way, the stability of the fixed heating body 500 can be improved.

[0045] In other embodiments, the support assembly 600 can also include only one first limiter 610.

[0046] In some embodiments, as shown in FIGS. 3, 4, 6, 7 and 9, the support assembly 600 can further include a second limiter 620, both ends of the second limiter 620 can be connected with two adjacent first limiters 610 respectively, specifically, both ends of the second limiter 620 can be connected with two adjacent second limiting portions 612 described below respectively, the second limiter 620 can be located on the side of the heating body 500 away from the heat preservation ring 300, and the second limiter 620 is limitedly matched with the heating body 500 in the extension direction c of the outer wall to the inner wall of the heat preservation ring 300, it should be noted that, as shown in FIG. 16, the second limiter 620 is limitedly matched with the heating body 500 only in the extension direction c of the outer wall to the inner wall of the heat preservation ring 300, and in the extension direction d of the inner wall to the outer wall of the heat preservation ring 300, the second limiter 620 is not limitedly matched with the heating body 500. In this way, the second limiter 620 can limit the deformation of the heating body 500 towards the center direction of the heat preservation ring 300, so as to further prolong the service life of the heating body 500.

[0047] In other embodiments, the support assembly 600 can also not include the second limiter 620.

[0048] In some embodiments, the second limiting member 620 can be an arc-shaped structure, and the center of the arc-shaped structure is located on the axis of the heat preservation ring 300. In this way, since the second limiting member 620 is an arc-shaped structure, and the bending direction of the second limiting member 620 is consistent with the bending direction of the heating body 500, during the deformation of the heating body 500, the bending feature of the arc-shaped structure controls the direction and point of action of the external force, so that the heating body 500 is resisted by the arc-shaped structure when it tries to deform inwardly towards the center of the arc-shaped structure, thereby limiting the development of such deformation. Specifically, when the heating body 500 tries to deform inwardly towards the center of the arc-shaped structure, the bending feature of the arc-shaped structure provides additional mechanical support, effectively resisting the deformation trend inwardly towards the center by changing the stress distribution and deformation law of the heating body 500. Of course, the second limiting member 620 can also not be an arc-shaped structure, specifically, the second limiting member 620 can be a rectangular straight strip structure.

[0049] Further, in some embodiments, as shown in FIG. 15, the heating body 500 can include a plurality of heating segments 510, the plurality of heating segments 510 can be distributed and connected along the circumference of the heat preservation ring 300, and at least two heating segments 510 can be located between the same second limiting member 620 and the heat preservation ring 300, so that the second limiting member 620 can simultaneously limit a plurality of heating segments 510, which is beneficial to reduce the number of support assemblies 600, thereby effectively shortening the assembly time and improving the assembly efficiency.

[0050] Of course, there can also be only one heating segment 510 between the second limiting member 620 and the heat preservation ring 300, that is, the second limiting member 620 can only limit one heating segment 510.

[0051] In some embodiments, the two ends of the second limiting member 620 can be respectively inserted with two adjacent first limiting members 610, specifically, the two ends of the second limiting member 620 can be respectively inserted with two adjacent second limiting portions 612 described below. In this way, it is convenient to disassemble and assemble the first limiting member 610 and the second limiting member 620, thereby facilitating the maintenance or replacement of the support assembly 600 and the heating body 500. Of course, in other embodiments, the two ends of the second limiting member 620 can also be respectively connected with two adjacent first limiting members 610 in a non-detachable fixed connection manner such as welding.

[0052] In some embodiments, as shown in FIG. 13, the first limiting member 610 can be provided with a slot 6122, specifically, the slot 6122 can be provided at the top end of the second limiting part 612 described below, and the slot 6122 can be provided upwardly, both ends of the second limiting member 620 can be provided with hooks 621, and the hooks 621 can be inserted into the slot 6122. In this way, the hooks 621 and the slot 6122 can be formed into a hooking connection to improve the stability of the connection between the second limiting member 620 and the first limiting member 610. Of course, both ends of the second limiting member 620 can also not be provided with hooks 621, and both ends of the second limiting member 620 can be directly inserted into the slot 6122 of the first limiting member 610.

[0053] In some embodiments, the hooks 621 can protrude upwardly from the second limiting member 620, so that compared with the way of inserting the insertion part 6211 downwardly protruding from the second limiting member 620 into the slot 6122 described below, the second limiting member 620 can limit a larger area of the heating body 500, and thus can more effectively avoid the deformation of the second limiting member 620 in the direction of the center. Of course, both ends of the second limiting member 620 can also be directly provided with downwardly protruding insertion parts 6211.

[0054] Further, in some embodiments, as shown in FIG. 11, the hooks 621 can include a first connecting part 6212, a second connecting part 6213 and an insertion part 6211, the bottom end of the first connecting part 6212 can be connected with the second limiting member 620, the insertion part 6211 can be inserted into the slot 6122, and the top end of the insertion part 6211 and the top end of the second connecting part 6213 can be connected through the second connecting part 6213, so that the hooks 621 can protrude upwardly from the second limiting member 620. Here, through the connection between the insertion part 6211 and the slot 6122, the insertion of the second limiting member 620 and the first limiting member 610 can be achieved. Of course, the hooks 621 can only include the insertion part 6211, and the top end of the insertion part 6211 can be connected with the second limiting member 620.

[0055] Here, the insertion part 6211 and the slot 6122 can be limited in cooperation in the horizontal direction to avoid the relative shaking of the second limiting member 620 and the first limiting member 610 in the horizontal direction, so that the insertion part 6211 can not be easily pulled out of the slot 6122, and thus the stability of the connection between the second limiting member 620 and the first limiting member 610 can be improved. Of course, in order to facilitate the insertion of the insertion part 6211 into the slot 6122, the insertion part 6211 and the slot 6122 can not be limited in cooperation in the horizontal direction, that is, the size of the slot 6122 can be larger than the size of the insertion part 6211.

[0056] In some embodiments, the same slot 6122 can be connected with two adjacent second limiters 620 at the same time, that is, the same slot 6122 can be connected with two adjacent connecting portions 6211 at the same time, at this time, the size of a single connecting portion 6211 is smaller than the size of the slot 6122, and the two connecting portions 6211 can be limited and matched with the slot 6122 in the horizontal direction by abutting against each other. In this way, two second limiters 620 can be connected by one first limiter 610, thereby facilitating the reduction of the number of first limiters 610.

[0057] In addition, a first gap 6214 can be left between the first connecting portion 6212 and the connecting portion 6211, and in the circumferential direction of the heat preservation ring 300, the width of the first gap 6214 can be greater than or equal to the thickness of the slot wall of the slot 6122. In this way, the first connecting portion 6212 and the slot wall of the slot 6122 can be prevented from interfering with each other to cause the connecting portion 6211 to be unable to be inserted into the slot 6122.

[0058] In the present embodiment, in the circumferential direction of the heat preservation ring 300, the width of the first gap 6214 can be equal to the thickness of the slot wall of the slot 6122, so that the hook 621 and the slot wall of the slot 6122 can be limited and matched in the circumferential direction of the heat preservation ring 300, so as to further improve the stability of the connection between the second limiter 620 and the first limiter 610.

[0059] In some embodiments, as shown in FIGS. 8 and 13, the first limiting piece 610 can further be provided with a plug-in limiting portion 6123. Specifically, the plug-in limiting portion 6123 can be provided at the top end of the second limiting portion 612 described below, the plug-in limiting portion 6123 can protrude upward from the first limiting piece 610, and the plug-in limiting portion 6123 can be located on the side of the insertion slot 6122 close to the heat preservation ring 300. The hook 621 can be limited and matched with the plug-in limiting portion 6123 in the extension direction d of the inner wall to the outer wall of the heat preservation ring 300. It should be noted that the hook 621 is limited and matched with the plug-in limiting portion 6123 only in the extension direction d of the inner wall to the outer wall of the heat preservation ring 300, and in the extension direction c of the outer wall to the inner wall of the heat preservation ring 300, the hook 621 is not limited and matched with the plug-in limiting portion 6123. In this way, on the one hand, when the second limiting piece 620 is plugged with the first limiting piece 610, the plug-in limiting portion 6123 can limit and fix the hook 621 to avoid the hook 621 from entering the limiting space 616. Specifically, when the operator assembles, the operator can first place the hooks 621 at both ends of the second limiting piece 620 above the insertion slots 6122 of the two adjacent first limiting pieces 610. Since the second limiting piece 620 is an arc-shaped strip structure, it has a certain elasticity, and the hooks 621 at both ends of the second limiting piece 620 are respectively attached to the plug-in limiting portions 6123 on the two first limiting pieces 610 under the elastic action. At this time, the plug-in limiting portions 6123 on the two first limiting pieces 610 can limit and fix the second limiting piece 620. On the other hand, the plug-in limiting portion 6123 can guide the plug-in portion 6211. Specifically, continuing to press the second limiting piece 620 downward can make the plug-in portion 6211 move along the plug-in limiting portion 6123 to ensure that the plug-in portion 6211 can be moved downward and inserted into the insertion slot 6122, thereby realizing the plug-in of the second limiting piece 620 with the first limiting piece 610.

[0060] Of course, the first limiting piece 610 can also not be provided with the plug-in limiting portion 6123.

[0061] In some embodiments, the first limiting piece 610 can include a heat preservation ring connecting part 613, a first limiting part 611, and a second limiting part 612. The heat preservation ring connecting part 613 can be connected with the heat preservation ring 300. The first limiting part 611 can be connected with the inner wall of the heat preservation ring 300. The second limiting part 612 is located on the side of the first limiting part 611 away from the heat preservation ring 300. The bottom end of the first limiting part 611 and the bottom end of the second limiting part 612 can be connected with the heat preservation ring connecting part 613. A limiting space 616 is formed between the first limiting part 611, the second limiting part 612, and the heat preservation ring connecting part 613. The heating body 500 can be overlapped in the limiting space 616. In this way, the connection between the heating body 500 and the heat preservation ring 300 can be achieved. Since the heat preservation ring connecting part 613 and the first limiting part 611 are both connected with the heat preservation ring 300, the contact area between the first limiting piece 610 and the heat preservation ring 300 can be increased, so as to improve the strength of the heat preservation ring 300, thereby prolonging the service life of the heat preservation ring 300, and further prolonging the service life of the heater.

[0062] In other embodiments, the first limiting piece 610 can also not include the first limiting part 611. The second limiting part 612, the heat preservation ring connecting part 613, and the inner wall of the heat preservation ring 300 can form the limiting space 616.

[0063] In some embodiments, part of the heat preservation ring connecting part 613 can be embedded in the heat preservation ring 300. In this way, the connection strength between the heat preservation ring connecting part 613 and the heat preservation ring 300 can be improved, and further the connection strength between the first limiting piece 610 and the heat preservation ring 300 can be improved. Specifically, part of the heat preservation ring connecting part 613 can be integrally formed with the heat preservation ring 300 by injection molding. In this way, the connection strength between the heat preservation ring connecting part 613 and the heat preservation ring 300 can be further improved.

[0064] Of course, the heat preservation ring connecting part 613 can also not be embedded in the heat preservation ring 300. Specifically, the heat preservation ring connecting part 613 can be connected with the bottom end of the heat preservation ring 300.

[0065] In some embodiments, the support assembly 600 can further include a guide piece 630, the guide piece 630 can include a guide portion 631 penetrating through the heat preservation ring 300, the guide portion 631 can be connected with the heat preservation ring 300, and one end of the guide portion 631 can pass through the first limiting portion 611 and the limiting space 616 and be connected with the second limiting portion 612, it should be noted that the length direction of the guide portion 631 is parallel to the extension direction c of the outer wall of the heat preservation ring 300 to the inner wall of the heat preservation ring 300. The heating body 500 can be provided with a socket 501, and the heating body 500 can be lapped on the guide portion 631 through the socket 501. In this way, the guide portion 631 can limit the expansion deformation of the heating body 500 along the axial direction, and the guide portion 631 cooperates with the socket 501 of the heating body 500, which can further play a role in fixing the heating body 500, thereby improving the stability of the heating body 500.

[0066] In the present embodiment, the first limiting portion 611 can be provided with a first through hole 6111, the second limiting portion 612 can be provided with a second through hole 6121, and one end of the guide portion 631 can penetrate into the second through hole 6121 after passing through the first through hole 6111 and the limiting space 616. In order to avoid the guide portion 631 extending out of the second through hole 6121, the second through hole 6121 can be a blind hole.

[0067] Here, the guide portion 631 penetrates through the heat preservation ring 300 and is connected with the heat preservation ring 300, so that the strength of the heat preservation ring 300 can be improved. In some embodiments, the guide portion 631 and the heat preservation ring 300 can be integrally injection molded, so that the connection strength of the heat preservation ring 300 and the guide portion 631 can be improved, and the connection strength of the support assembly 600 and the heat preservation ring 300 can be improved.

[0068] In other embodiments, the support assembly 600 can also not include the guide piece 630.

[0069] In some embodiments, a second gap 502 can be left between the inner wall surface of the socket 501 and the guide portion 631. In this way, the friction between the heating body 500 and the guide portion 631 can be reduced, and the distortion of the heating body 500 caused by friction can be effectively reduced or avoided, so as to further prolong the service life of the heating body 500. Of course, the second gap 502 can also not be provided between the inner wall surface of the socket 501 and the guide portion 631.

[0070] It should be noted that the above-mentioned socket 501 can be provided on the heating section 510 described above, and the slot of the socket 501 is downwardly arranged. Here, the socket 501 can be a U-shaped port.

[0071] In some embodiments, the heater can include at least two stacked heat preservation rings 300, specifically, each heat preservation ring 300 can be distributed along the axial direction of the heat preservation ring 300 and abut in sequence, and each heat preservation ring 300 can be provided with a support assembly 600 and a heating body 500, so that the internal space of the heater can be larger, so that the heater can be suitable for a larger size reaction chamber 100, and the heating effect of the heater can be improved, so as to facilitate uniform heating of the reaction chamber 100. Of course, the heater can also include only one heat preservation ring 300.

[0072] The heater can further include a concentric control member 800, which can be located outside the heat preservation ring 300, and the concentric control member 800 can be connected with the heat preservation ring connecting part 613 of each first limiting part 610, and the concentric control member 800 can be attached to the outer wall of each heat preservation ring 300. In this way, the concentric control member 800 can limit each heat preservation ring 300 to ensure that the axes of each heat preservation ring 300 coincide, so as to reduce or eliminate the gap between each heat preservation ring 300, thereby improving the heat preservation effect of the heat preservation ring 300 and improving the strength of the heat preservation ring 300, which is beneficial to prolong the service life of the heater, and can prevent the support assembly 600 from moving towards the axial direction of the heat preservation ring 300, and at the same time, the inner end face of the concentric control member 800 is attached to the outer wall of the heat preservation ring 300, which can increase the stress area of the heat preservation ring 300.

[0073] In other embodiments, the heater can also not include a concentric control member 800.

[0074] In some embodiments, one side of the concentric control member 800 close to the heat preservation ring 300 is an arc surface, and the center of the arc surface can coincide with the axis of the heat preservation ring 300. In this way, the axes of each heat preservation ring 300 can be further ensured to coincide.

[0075] In some embodiments, one of the heat preservation ring connecting part 613 and the concentric control piece 800 can be provided with a connecting protrusion 614, and the other can be provided with a first connecting groove 810. The connecting protrusion 614 can be embedded in the first connecting groove 810, and the connecting protrusion 614 and the first connecting groove 810 are limited in the second direction. It should be noted that the second direction is perpendicular to the axial direction of the heating body 500, that is, the second direction can include the extension direction d of the inner wall to the outer wall of the heat preservation ring 300, the extension direction c of the outer wall to the inner wall of the heat preservation ring 300, and the circumferential direction of the heat preservation ring 300. Specifically, the connecting protrusion 614 and the first connecting groove 810 can be limited in the horizontal direction. In this way, the connection of the heat preservation ring connecting part 613 and the concentric control piece 800 can be realized, and the concentric control piece 800 can be conveniently disassembled and assembled. Of course, the heat preservation ring connecting part 613 and the concentric control piece 800 can also be fixedly connected in other ways, for example, the heat preservation ring connecting part 613 and the concentric control piece 800 can be connected by screws or other fixing members or by fixed glue, or the heat preservation ring connecting part 613 and the concentric control piece 800 are integrated.

[0076] In some embodiments, the heat preservation ring connecting part 613 is provided with a connecting protrusion 614, and the concentric control piece 800 is provided with a first connecting groove 810. The first connecting groove 810 can be a through groove, and the first connecting groove 810 penetrates the concentric control piece 800 along the length direction of the concentric control piece 800, that is, the first connecting groove 810 penetrates the concentric control piece 800 along the direction parallel to the axial direction of the heat preservation ring 300. In this way, the concentric control piece 800 can be installed on the connecting protrusion 614 from top to bottom or from bottom to top, which facilitates the assembly of the concentric control piece 800 and can reduce the manufacturing difficulty and simplify the manufacturing process.

[0077] In some embodiments, the guide piece 630 can further include a concentric connecting part 632, which can be connected to the other end of the guide part 631. The concentric connecting part 632 can be located outside the heat preservation ring 300 and abut the outer wall of the heat preservation ring 300. The concentric control piece 800 can be provided with a second connecting groove 820, and the concentric connecting part 632 can be embedded in the second connecting groove 820. In this way, through the cooperation of the concentric connecting part 632 and the second connecting groove 820, the connection strength of the concentric control piece 800 and the support assembly 600 can be further improved to improve the stability of the concentric control piece 800, thereby further ensuring that the axes of the heat preservation rings 300 coincide.

[0078] In other embodiments, the guide piece 630 can not include a concentric connecting part 632, and the concentric control piece 800 can not be provided with a second connecting groove 820.

[0079] In some embodiments, the heat preservation ring connecting part 613 can be provided with a limiting groove 615 near one end of the concentric control part 800, the concentric connecting part 632 can be provided with a limiting protrusion 6321, the limiting protrusion 6321 can be embedded in the limiting groove 615, and the limiting protrusion 6321 and the groove wall of the limiting groove 615 can be limited and matched in the extension direction c of the outer wall of the heat preservation ring 300 to the inner wall of the heat preservation ring 300. It should be noted that the limiting protrusion 6321 and the groove wall of the limiting groove 615 are only limited and matched in the extension direction c of the outer wall of the heat preservation ring 300 to the inner wall of the heat preservation ring 300, and are not limited and matched in the extension direction d of the inner wall of the heat preservation ring 300 to the outer wall of the heat preservation ring 300. In this way, the guide part 631 can be limited, the guide part 631 can be prevented from moving in the axial direction under the action of the heating body 500, and the guide part 631 can be prevented from moving in the axial direction of the heat preservation ring 300 to press the heat preservation ring 300 and damage the heat preservation ring 300.

[0080] Of course, the heat preservation ring connecting part 613 near one end of the concentric control part 800 can also not be provided with a limiting groove 615, and the concentric connecting part 632 can also not be provided with a limiting protrusion 6321, that is, the heat preservation ring connecting part 613 and the concentric connecting part 632 are not limited and matched in the extension direction c of the outer wall of the heat preservation ring 300 to the inner wall of the heat preservation ring 300.

[0081] In some embodiments, the heat preservation ring connecting part 613 can be provided with two limiting grooves 615, the concentric connecting part 632 can be provided with two limiting protrusions 6321, the two limiting grooves 615 can be located on both sides of the connecting protrusion 614 in the circumferential direction of the heat preservation ring 300, and an avoiding groove 6322 can be provided between the two limiting protrusions 6321, the connecting protrusion 614 can pass through the avoiding groove 6322, so that the connecting protrusion 614 is embedded in the first connecting groove 810. Here, the part of the heat preservation ring connecting part 613 between the two limiting grooves 615 can be embedded in the avoiding groove 6322.

[0082] In some embodiments, one side of the concentric connecting part 632 near the heat preservation ring 300 can be an arc-shaped surface, so as to facilitate the fit of the concentric connecting part 632 and the heat preservation ring 300, thereby increasing the stress area of the heat preservation ring 300 and avoiding the fracture of the heat preservation ring 300 due to excessive stress.

[0083] In some embodiments, the heater can further include a first fixing ring 900 and a second fixing ring 1000, the heat preservation rings 300 can be located between the first fixing ring 900 and the second fixing ring 1000, and the top end of the concentric control member 800 can be connected with the first fixing ring 900, and the bottom end of the concentric control member 800 can be connected with the second fixing ring 1000. In this way, the first fixing ring 900 and the second fixing ring 1000 can not only limit the heat preservation rings 300 in the axial direction of the heat preservation rings 300 to improve the stability of the connection of the heat preservation rings 300, but also can fix the concentric control member 800 to better ensure the concentricity of the heat preservation rings 300 during installation.

[0084] In other embodiments, the heater can not include the first fixing ring 900 and the second fixing ring 1000.

[0085] In some embodiments, the first fixing ring 900 can be provided with a first fixing hole 910, the second fixing ring 1000 can be provided with a second fixing hole 1010, the top end of the concentric control member 800 can be provided with a first protrusion 830, the first protrusion 830 can be embedded in the first fixing hole 910, and the bottom end of the concentric control member 800 can be provided with a second protrusion 840, the second protrusion 840 can be embedded in the second fixing hole 1010, to realize the detachable connection of the concentric control member 800 with the first fixing ring 900 and the second fixing ring 1000, so as to facilitate assembly. Of course, the two ends of the concentric control member 800 can also be fixedly connected with the first fixing ring 900 and the second fixing ring 1000, respectively, in a non-detachable manner.

[0086] It should be noted that the first limiting member 610, the second limiting member 620, the guide member 630 and the concentric control member 800 can all be made of ceramic or corundum type insulating hard materials.

[0087] In some embodiments, the overlapping position of the socket 501 and the guide portion 631 is located on the same side of the heating body 500 in a first direction, and here, the first direction can be parallel to the axial direction of the heating body 500. In this way, the heating body 500 can be overlapped on the guide portion 631 from the same side, and compared with the prior art described below, the limiting position of the support assembly 600 to the heating body 500 can be located on the same side in the first direction, and then the detachable connection of the heating body 500 with the heat preservation rings 300 can be realized, so as to facilitate the disassembly and assembly of the heating body 500 when the heating body 500 is damaged or needs to be overhauled.

[0088] In the prior art, in the first direction, the pin has two limiting positions for the heating body 500, and the two limiting positions are located at different sides of the heating body 500 in the first direction, specifically, the two limiting positions are located at the upper side and the lower side of the heating body 500, so that the heating body 500 can be fixed on the heat preservation ring 300 in a non-detachable manner.

[0089] Based on the heater provided by the embodiments of the present application, the embodiments of the present application further provide a semiconductor process equipment, which can include the reaction chamber 100 and the heater provided by any one of the above embodiments, and the heating body 500 of the heater can be arranged around the outside of the reaction chamber 100.

[0090] The semiconductor process equipment provided by the embodiments of the present application has the same beneficial effects as the heater provided by the embodiments of the present application, and thus will not be described here.

[0091] Here, the reaction chamber 100 has good heat conductivity and is arranged inside the heater, and the reaction chamber 100 is mainly used to provide an environment for process treatment of product wafers, and the product support structure 200 is arranged in the reaction chamber 100, the product support structure 200 is used to store product wafers, support the product wafers in the vertical direction, and ensure that the adjacent product wafers have a proper distance during process treatment.

[0092] The embodiments of the present application are described above in combination with the drawings, but the present application is not limited to the above specific embodiments, and the above specific embodiments are only illustrative but not restrictive, and those skilled in the art can make many forms under the guidance of the present application without departing from the scope of the present application and the scope protected by the claims, and all the forms belong to the protection of the present application.

Claims

1. A heater characterized by, The heating body comprises a ring-shaped heating body, a heat preservation ring arranged around the heating body, and a support assembly, wherein: The support assembly is connected with the heat preservation ring, and the support assembly is provided with a limiting space for supporting the heating body, the heating body is overlapped in the limiting space, and a width of the limiting space in an extension direction from an outer wall of the heat preservation ring to an inner wall of the heat preservation ring is greater than a thickness of the heating body.

2. The heater of claim 1, wherein The support assembly comprises at least two first limiting members, the first limiting members are provided with the limiting space, the first limiting members are distributed along a circumferential direction of the heat preservation ring, and the limiting space of each first limiting member is used for overlapping the heating body.

3. The heater of claim 2, wherein, The support assembly further comprises a second limiting member, two ends of the second limiting member are respectively connected with two adjacent first limiting members, the second limiting member is located on a side of the heating body away from the heat preservation ring, the second limiting member is in an arc-shaped structure, a center of the second limiting member is located on an axis of the heat preservation ring, and the second limiting member is in limiting cooperation with the heating body in the extension direction from the outer wall of the heat preservation ring to the inner wall of the heat preservation ring.

4. The heater of claim 3, wherein, The heating body comprises a plurality of heating sections, the heating sections are sequentially connected along the circumferential direction of the heat preservation ring, and at least two heating sections are located between the second limiting member and the heat preservation ring.

5. The heater of claim 3, wherein, Two ends of the second limiting member are respectively inserted with two adjacent first limiting members.

6. The heater of claim 5, wherein, The first limiting member is provided with a slot, and a slot opening of the slot is arranged upward; Two ends of the second limiting member are respectively provided with hooks, and the hooks are inserted with the slot.

7. The heater of claim 6, wherein, The hook comprises a first connecting part, a second connecting part and an insertion part, a bottom end of the first connecting part is connected with the second limiting member, the insertion part is inserted into the slot, a top end of the insertion part is connected with a top end of the first connecting part through the second connecting part, a first gap is left between the first connecting part and the insertion part, and a width of the first gap is greater than or equal to a thickness of a slot wall of the slot in a circumferential direction of the heat preservation ring.

8. The heater of claim 6, wherein, The first limiting member is further provided with an insertion limiting part protruding upward, the insertion limiting part is located on a side of the slot close to the heat preservation ring, and the hook can be in limiting cooperation with the insertion limiting part in the extension direction from the inner wall of the heat preservation ring to the outer wall of the heat preservation ring.

9. The heater of claim 2, wherein, The first limiting member comprises: A heat preservation ring connecting part connected with the heat preservation ring; A first limiting part connected with an inner wall of the heat preservation ring; A second limiting part located on a side of the first limiting part away from the heat preservation ring; The bottom end of the first limiting part and the bottom end of the second limiting part are connected with the heat preservation ring connecting part, and the limiting space is formed between the first limiting part, the second limiting part and the heat preservation ring connecting part.

10. The heater of claim 9, wherein, The support assembly further comprises a guide piece, the guide piece comprises a guide portion penetrating through the heat preservation ring, the guide portion is connected with the heat preservation ring, and one end of the guide portion penetrates through the first limiting portion and the limiting space and is connected with the second limiting portion, the length direction of the guide portion is parallel to the extension direction from the outer wall of the heat preservation ring to the inner wall of the heat preservation ring; The heating body is provided with a socket, the heating body is overlapped on the guide portion through the socket, and a second gap is left between the inner wall surface of the socket and the guide portion.

11. The heater of claim 10, wherein, The overlapped position of the socket and the guide portion is located on the same side of the heating body in a first direction, and the first direction is parallel to the axial direction of the heating body.

12. The heater of claim 10, wherein, The heater comprises at least two heat preservation rings arranged in a stack, and each of the heat preservation rings is provided with the support assembly and the heating body. The heater further comprises a concentric control piece, the concentric control piece is located outside the heat preservation ring, and the concentric control piece is connected with the heat preservation ring connecting portion of each first limiting piece, and the concentric control piece is attached to the outer wall of each heat preservation ring.

13. The heater of claim 12, wherein, One of the heat preservation ring connecting portion and the concentric control piece is provided with a connecting protrusion, and the other is provided with a first connecting groove, the connecting protrusion is embedded in the first connecting groove, and the connecting protrusion and the first connecting groove are limited and matched in a second direction, and the second direction is perpendicular to the axial direction of the heating body.

14. The heater of claim 12, wherein, The guide piece further comprises a concentric connecting portion, the concentric connecting portion is connected with the other end of the guide portion, the concentric connecting portion is located outside the heat preservation ring and is attached to the outer wall of the heat preservation ring, and the concentric control piece is further provided with a second connecting groove, and the concentric connecting portion is embedded in the second connecting groove.

15. The heater of claim 14, wherein, The end of the heat preservation ring connecting portion close to the concentric control piece is further provided with a limiting groove, and the concentric connecting portion is further provided with a limiting protrusion, the limiting protrusion is embedded in the limiting groove, and the limiting protrusion and the groove wall of the limiting groove are limited and matched in the extension direction from the outer wall of the heat preservation ring to the inner wall of the heat preservation ring.

16. The heater of claim 12, wherein, The heater further comprises a first fixing ring and a second fixing ring, the heat preservation ring is located between the first fixing ring and the second fixing ring, the top end of the concentric control piece is connected with the first fixing ring, and the bottom end of the concentric control piece is connected with the second fixing ring.

17. The heater of claim 1, wherein, The overlapped position of the heating body in the limiting space is located on the same side of the heating body in a first direction, and the first direction is parallel to the axial direction of the heating body.

18. A semiconductor process apparatus, characterized by, The heater comprises a reaction chamber and the heater of any one of claims 1-17, and the heating body of the heater is arranged outside the reaction chamber.

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