Mask transfer device

Abstract

A mask transfer device, comprising a base (100), a cover removal mechanism (200), and a transfer mechanism (300). The cover removal mechanism (200) is arranged on the base (100) and has a support seat (210), a cover removal member (220), and a cover removal driver (230), wherein the cover removal member (220) is rotatably arranged on the support seat (210); the rotation axis of the cover removal member (220) coincides with the rotation axis of a cover (1200) of a mask storage box (1000) placed on the support seat (210); an output end of the cover removal driver (230) is in driving connection with the cover removal member (220); and a suction cup (221) is provided on the cover removal member (220) so as to suction the cover (1200). The transfer mechanism (300) is configured to grab a mask (2000) in a box body (1100) of the mask storage box (1000) and move the mask (2000) out of the box body (1100).

Description

Mask transfer device

[0001] This application claims priority to Chinese Patent Application No. 202411451517.2, filed on October 17, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of electronic product manufacturing technology, such as a mask transfer device. Background Technology

[0003] A photomask, also known as a lithography mask, is a pattern template used in photolithography. Photomasks need to be placed in a photomask storage box for shipping or storage. The photomask storage box consists of a box body and a cover. The box body positions and stores the photomask, while the cover is hinged to the box body, providing pressure and a degree of sealing. During use, the cover must be manually opened to remove the photomask. With the development of the semiconductor industry, the number of photomask storage boxes used is increasing, and the drawbacks of manual handling are becoming increasingly apparent. The process requires workers to maintain a high level of concentration and consumes a significant amount of manpower. Once the cover is opened, it must remain open to remove the photomask. Operators must control the cover with one hand and remove the photomask with the other to transfer it to another unit, resulting in low efficiency and a high risk of error, such as the photomask slipping and being damaged. Summary of the Invention

[0004] This application provides a mask transfer device to solve the problems of low mask transfer efficiency and easy slippage damage in related technologies.

[0005] This application provides a mask transfer device for opening the cover of a mask storage box and removing a mask from the box. The mask transfer device includes:

[0006] Base;

[0007] A lid opening mechanism is provided on the base, and the lid opening mechanism includes a support, a lid opening component, and a lid opening driver. The lid opening component is rotatably provided on the support, and the rotation axis of the lid opening component coincides with the rotation axis of the lid in the mask storage box placed on the support. The output end of the lid opening driver is drivenly connected to the lid opening component, and the lid opening component is provided with a suction cup to adsorb the lid.

[0008] The transfer mechanism is configured to grab the mask in the box and remove the mask out of the box.

[0009] In some embodiments, the opening member has a rotating part on each side along the width direction, both rotating parts are rotatably connected to the support, and the output end of the opening driver is drivenly connected to at least one of the rotating parts; the opening member has a clearance part to avoid the cover of the mask storage box.

[0010] In some embodiments, the opening member has a frame structure and includes two swing rods hinged to the support seat and a connecting rod connected between the two swing rods. The two swing rods and the connecting rod together form the clearance portion. The suction cup is disposed on the connecting rod, and the two rotating parts are disposed on the corresponding swing rods.

[0011] In some embodiments, the opening mechanism further includes a floating element, a first end of which is connected to the connecting rod, and a second end of which can float relative to the connecting rod and can be elastically reset, and the suction cup is disposed at the second end of the floating element.

[0012] In some embodiments, each of the two swing rods is provided with a connecting shaft whose axis is perpendicular to the extension direction of the swing rod. The connecting shaft forms the rotating part. The output end of the cover opening driver can rotate around its own axis and is driven connected to one of the two connecting shafts.

[0013] In some embodiments, the mask transfer device further includes an unlocking component, which includes an unlocking driver, an unlocking elastic element, two unlocking elements, two steering elements, and two unlocking transmission elements. The two unlocking elements are slidably constrained to the support seat along the width direction and can move closer to or further away from each other. The two steering elements are spaced apart along the width direction and are located on one side of the corresponding unlocking element. The two unlocking transmission elements are respectively wound around the corresponding steering elements, and the first ends of the two unlocking transmission elements are respectively connected to the corresponding unlocking elements. The unlocking driver is located between the two unlocking elements, and its output end is connected to the second ends of the two unlocking transmission elements and drags the two unlocking transmission elements to move the two unlocking elements further away from each other. The unlocking elastic element is configured to apply an elastic force to the two unlocking elements to bring them closer together.

[0014] In some embodiments, the unlocking elastic element is a tension spring, which is located between two unlocking elements, and both ends of the tension spring are detachably connected to the corresponding unlocking elements.

[0015] In some embodiments, each of the unlocking components has a drag portion on each side along the width direction. Among the four drag portions of the two unlocking components, the two inner drag portions are at the same height H1 from the support seat, and the two outer drag portions are at the same height H2 from the support seat, and H1≥H2. The two ends of the tension spring are respectively connected to the two inner drag portions, and the first ends of the two unlocking transmission components are respectively connected to the two outer drag portions.

[0016] In some embodiments, the steering component is a rotating wheel, which is rotatably mounted on the support seat and arranged to rotate about its own axis. The two unlocking transmission components are respectively in rolling engagement with the corresponding rotating wheels.

[0017] In some embodiments, the mask transfer device further includes at least one of the following:

[0018] A load-bearing driver, the output end of which can reciprocate relative to the base along the height direction and is drively connected to the load-bearing seat; or,

[0019] A linear bearing, wherein the axis of the linear bearing extends along the height direction, and the bearing seat is movably disposed on the base via the linear bearing. Attached Figure Description

[0020] Figure 1 is a schematic diagram of the mask transfer device in an embodiment of this application;

[0021] Figure 2 is a schematic diagram of the base structure in an embodiment of this application;

[0022] Figure 3 is a schematic diagram of the opening mechanism in an embodiment of this application;

[0023] Figure 4 is a schematic diagram of the transfer mechanism in an embodiment of this application;

[0024] Figure 5 is a structural schematic diagram of the grabbing component from a first-view perspective in an embodiment of this application;

[0025] Figure 6 is a structural schematic diagram of the grabbing component from a second perspective in an embodiment of this application;

[0026] Figure 7 is a schematic diagram of the structure of a mask storage box in some embodiments of this application.

[0027] In the diagram: 1000, Mask plate storage box; 1100, Box body; 1110, Locking slide rail; 1200, Cover; 1210, Lock; 1300, Lock body; 2000, Mask plate; 100, Base; 110, Position detection component; 111, Detection bracket; 120, Handle; 130, Bearing driver; 131, Air inlet; 132, Decoupling component; 133, Support bracket; 134, Linear bearing; 135, Upper limit bracket; 1351, Upper limit sensor; 136, Lower limit bracket; 1361, Lower limit sensor; 140, Second limit block; 200. Lid opening mechanism; 210. Support seat; 211. First limit block; 212. Guide rod; 213. Limit sheet metal; 214. Fixed driver; 215. Fixing component; 216. Lid detection sensor; 217. Left guide block; 218. Right guide block; 219. Rear guide block; 220. Lid opening component; 221. Suction cup; 222. Floating component; 223. Connector; 224. Connecting rod; 225. Swing rod; 226. Clearance part; 2251. Connecting shaft; 230. Lid opening driver; 231. Lid opening bracket; 240. Unlocking assembly; 241. Unlocking driver; 242. Unlocking elastic component; 243. Unlocking component; 2431. Driving part; 244. Steering component; 245. Unlocking transmission component; 246. Centering adjustment component; 300. Transfer mechanism; 310. Gripping assembly; 311. Gripping seat; 3111. Limiting block; 312. Clamping component; 3121. First slider; 3122. Limiting groove; 3123. Connecting block; 3124. Clamping plate; 3125. Hook; 313. Mounting shaft; 314. Clamping transmission component; 3141. Transmission part; 315. Clamping driver; 3151. Floating joint; 3152. Transmission plate; 316. Tensioning plate; 317. Elongated hole; 318. Gripping 319. Elastic component; 320. Rotating wheel; 321. Transfer seat; 322. Buffer component; 323. Rear limit sensor; 324. Second slide rail; 330. Lateral component; 340. Lateral drive; 341. Lead screw; 342. Nut; 343. Connector; 350. Trigger; 351. Position detection component; 360. Orientation detection component; 361. Telescopic drive; 362. Orientation bracket; 370. Mask plate detection component; 380. Rotation drive; 381. Rotation detection component. Detailed Implementation

[0028] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Specifically, the terms "first position" and "second position" refer to two different positions, and "above," "on top," and "over" the first feature in relation to the second feature include the first feature directly above and diagonally above the second feature, or indicating that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature include the first feature directly below and diagonally below the second feature, or indicating that the first feature is at a lower horizontal level than the second feature.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the meaning of the above terms in this application as appropriate.

[0030] Embodiments of this application are described below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application.

[0031] As shown in Figures 1 to 6, this embodiment provides a mask transfer device. Figure 7 shows a mask storage box 1000. The mask transfer device is used to open or close the cover 1200 of the mask storage box 1000 and take out the mask 2000 from the box body 1100 of the mask storage box 1000 or put the mask 2000 into the box body 1100 of the mask storage box 1000, so as to improve the opening and closing efficiency of the cover of the mask storage box 1000 and the transfer efficiency of the mask 2000, reduce the probability of the mask 2000 slipping and being damaged, and ensure that the mask 2000 is safely transferred.

[0032] The mask transfer device includes a base 100, a cover opening mechanism 200, and a transfer mechanism 300. The cover opening mechanism 200 is located on the base 100 and has a support 210, a cover opening component 220, and a cover opening driver 230. The cover opening component 220 is rotatably mounted on the support 210. The rotation axis of the cover opening component 220 coincides with the rotation axis of the cover 1200 in the mask storage box 1000 placed on the support 210. The output end of the cover opening driver 230 is drivenly connected to the cover opening component 220. The cover opening component 220 is provided with a suction cup 221 to adsorb the cover 1200 of the mask storage box 1000. The output end of the transfer mechanism 300 has a gripping component 310, which is configured to grip the mask 2000 in the box 1100 of the mask storage box 1000 and can remove the mask 2000 from the box 1100.

[0033] By aligning the rotation axis of the opening component 220 with that of the cover body 1200, the relative positions of the opening component 220 and the cover body 1200 remain unchanged during rotation. This prevents the suction cup 221 adsorbed onto the cover body 1200 from detaching, improving the success rate of opening the cover and keeping the cover body 1200 in the open state, facilitating the subsequent mask removal 2000 operation. To ensure the cover body 1200 remains in the open state, the support base 210 is equipped with a cover detection sensor 216, which is triggered when the cover body 1200 is in the open state.

[0034] Due to factors such as assembly precision, there may be a risk of relative misalignment between the opening component 220 and the cover 1200 during rotation, potentially leading to misalignment or even separation between the suction cup 221 and the cover 1200. To prevent misalignment or separation between the suction cup 221 and the cover 1200, the opening mechanism 200 also includes a floating component 222. The first end of the floating component 222 is connected to the opening component 220, and the second end of the floating component 222 can float relative to the opening component 220 and elastically return to its original position. The suction cup 221 is located at the second end of the floating component 222. The ability of the second end of the floating component 222 to float relative to the opening component 220 and elastically return to its original position ensures that even if relative misalignment occurs between the opening component 220 and the cover 1200 during opening, the presence of the floating component 222 allows the suction cup 221 to remain fixed relative to the cover 1200 and to move relative to the opening component 220, thus enabling the cover 1200 to open smoothly. After the suction cup 221 separates from the cover 1200, under the elastic force of the floating part 222, the suction cup 221 returns to its initial position relative to the cover opening part 220.

[0035] The floating component 222 is sheet-shaped and elastic. The first end of the floating component 222 is screwed to the connector 223 fixed to the connecting rod 224, and the second end of the floating component 222 is screwed to the suction cup 221. The floating component 222 is a bent component, including a first connecting portion, a second connecting portion, and an intermediate connecting portion. The intermediate connecting portion is located between the first and second connecting portions, which are parallel and form an angle with each other. The first connecting portion is connected to the connector 223, and the second connecting portion is connected to the suction cup 221.

[0036] The cover opening component 220 has a rotating part on each side along its width direction. Both rotating parts are rotatably connected to the support base 210, and the output end of the cover opening driver 230 is drivenly connected to at least one rotating part. The cover opening component 220 has a clearance part 226 to avoid the cover 1200 of the mask storage box 1000. The two rotating parts make the rotation of the cover opening component 220 more stable. The method of driving the cover opening driver 230 to one of the rotating parts makes the installation of the cover opening driver 230 convenient.

[0037] In some embodiments, referring to the schematic diagram of the mask transfer device shown in FIG1, it should be noted that the width direction in this application is the left-right direction shown in FIG1, the length direction is the front-back direction shown in FIG1, and the height direction is the up-down direction shown in FIG1; the length direction, width direction and height direction are perpendicular to each other.

[0038] Exemplarily, the cover opening component 220 has a frame structure and includes two swing rods 225 hinged to the support base 210 and a connecting rod 224 connecting the two swing rods 225. The two swing rods 225 and the connecting rod 224 together form a clearance portion 226, and a suction cup 221 is disposed on the connecting rod 224. In this embodiment, the first end of the floating component 222 is connected to the connecting rod 224, and the second end of the floating component 222 can float relative to the connecting rod 224 and can elastically return to its original position. In use, the two swing rods 225 are respectively disposed on both sides of the cover 1200 so that the rotation axis of the swing rods 225 coincides with the rotation axis of the cover 1200; the frame structure is beneficial for saving materials and costs; in addition, the frame structure helps to reduce weight and save driving costs.

[0039] Each of the two swing arms 225 is provided with a connecting shaft 2251 whose axis is perpendicular to the extension direction of the swing arm 225. The connecting shaft 2251 forms a rotating part, and the output end of the cover opening driver 230 can rotate around its own axis and is drivenly connected to one of the two connecting shafts 2251. In use, the space between the two swing arms 225 can accommodate covers 1200 of various shapes or structures. Even if the rear side of the rotation axis of the cover 1200 has some structure, the swing arms 225 are spaced apart in the width direction, so they will not interfere with the rotation of the cover 1200. The two connecting shafts 2251 are located on both sides of the two swing arms 225. The cover opening driver 230 is fixed to the support base 210 by the cover opening bracket 231.

[0040] Due to the high cost of the mask 2000, a sliding lock is provided between the box 1100 and the cover 1200 to ensure the stability of the latching mechanism and prevent the cover 1200 from separating from the box 1100 and falling out and being damaged during handling or accidental contact. The sliding lock includes a latch 1210 extending along the width direction on the cover 1200, a locking rail 1110 on the box 1100, and a lock body 1300 slidably mounted on the locking rail 1110 along the width direction. The lock body 1300 has a locking groove extending along the width direction. Under its own sliding action, the locking groove of the lock body 1300 engages with the latch 1210 to lock the cover 1200 and the box 1100 securely. Two sets of sliding locks are provided between the box body 1100 and the cover body 1200. The two lock bodies 1300 of the two sets of sliding locks can lock the box body 1100 and the cover body 1200 by sliding relative to each other, and can unlock the box body 1100 and the cover body 1200 by sliding opposite to each other.

[0041] To facilitate opening the sliding lock, the mask transfer device also includes an unlocking assembly 240. The unlocking assembly 240 includes an unlocking driver 241, an unlocking elastic element 242, two unlocking elements 243, two steering elements 244, and two unlocking transmission elements 245. The two unlocking elements 243 are slidably constrained to the support seat 210 along the width direction and can move closer or further away from each other. The two steering elements 244 are spaced apart along the width direction and are respectively located on one side of the corresponding unlocking element 243. The two unlocking transmission elements 245 are respectively wound around the corresponding steering elements 244, and the first ends of the two unlocking transmission elements 245 are respectively connected to the corresponding unlocking elements 243. The unlocking driver 241 is located between the two unlocking elements 243, and the output end of the unlocking driver 241 is connected to the second ends of the two unlocking transmission elements 245 and drags the two unlocking transmission elements 245 to drive the two unlocking elements 243 away from each other. The unlocking elastic element 242 is configured to apply an elastic force to the two unlocking elements 243 to make the two unlocking elements 243 move closer to each other. The unlocking component 243 has an unlocking groove extending along its height. When the mask storage box 1000 is placed on the support 210, the two lock bodies 1300 can be respectively inserted into the two unlocking grooves. When the unlocking driver 241 drives the two unlocking transmission components 245 to move, the two unlocking components 243 move away from each other, separating the two lock bodies 1300 in opposite directions, thereby unlocking the two sliding locks. When locking is required, the unlocking driver 241 can rotate in the opposite direction or be de-energized. Under the action of the unlocking elastic component 242, the two unlocking components 243 move closer to each other, thereby driving the two lock bodies 1300 to move closer to each other, thus locking the two sliding locks.

[0042] To simplify the structure, the unlocking elastic element 242 is a tension spring, located between the two unlocking elements 243, with both ends of the spring detachably connected to their respective unlocking elements 243. One tension spring can drive both unlocking elements 243, helping to reduce costs. In other embodiments, the unlocking elastic element 242 can also be a compression spring, with two compression springs, each elastically connected to its corresponding unlocking element 243 to drive the two unlocking elements 243 closer together.

[0043] Each unlocking member 243 has a dragging part 2431 on each side along its width. Of the four dragging parts 2431 on both unlocking members 243, the two inner dragging parts 2431 are at the same height H1 from the support seat 210, and the two outer dragging parts 2431 are at the same height H2 from the support seat 210, with H1 ≥ H2. The two ends of the tension spring are respectively connected to the two inner dragging parts 2431, and the first ends of the two unlocking transmission members 245 are respectively connected to the two outer dragging parts 2431. This arrangement ensures that the force-bearing point on the outside of the two unlocking members 243 is located below the force-bearing point on the inside. When the unlocking member 243 is pulled outwards, it moves outwards while simultaneously experiencing an elastic force on its upper inner side, causing it to tilt outwards and upwards. This helps prevent jamming between the unlocking member 243 and the support seat 210 during the unlocking process.

[0044] To improve the smoothness of the unlocking transmission component 245, the steering component 244 is a rotating wheel. The rotating wheel is located on the support seat 210 and is arranged to rotate about its own axis. The two unlocking transmission components 245 respectively roll into contact with their corresponding rotating wheels. The rolling contact reduces friction between the unlocking transmission component 245 and the rotating wheel, thus improving its service life.

[0045] In some embodiments, the unlocking transmission element 245 may be a transmission belt or a steel wire rope, respectively wound around the corresponding steering element 244. Transmission belts and steel wire ropes have good flexibility, can be adapted to steering transmission, are lightweight and easy to arrange, and have low cost.

[0046] The support base 210 is fixedly provided with a centering adjustment member 246. The centering adjustment member 246 is provided with an adjustment hole. The centering adjustment member 246 is slidably disposed on the support base 210 along the width direction and has an adjustment screw hole. The steering member 244 is disposed on the centering adjustment member 246 to move synchronously with the centering adjustment member 246. The adjustment screw passes through the adjustment hole and is screwed into the adjustment screw hole. Tightening the adjustment screw causes the centering adjustment member 246 to move, thereby adjusting the position of the steering member 244 to adapt to the lock body 1300 in different positions.

[0047] In use, the mask storage box 1000 is first placed on the support 210, and then the cover 220 is activated to open the cover 1200. To ensure that the mask storage box 1000 is successfully placed on the support 210, the base 100 is provided with a detection bracket 111, and the detection bracket 111 is equipped with an insertion detection component 110, which can detect whether the mask storage box 1000 is placed on the support 210. The support 210 is provided with a left guide block 217 and a right guide block 218 spaced apart, and a rear guide block 219 located at the rear of the support 210. The mask storage box 1000 is guided by the left guide block 217, the right guide block 218, and the rear guide block 219 during the placement process to ensure accurate placement.

[0048] The carrier 210 is provided with a fixed driver 214, and the fixing member 215 moves relative to the carrier 210 along the length direction and is driven connected to the output end of the fixed driver 214. When the fixing member 215 moves forward, it can bring the mask storage box 1000 to the front fixing block on the front side of the carrier 210.

[0049] During the transfer of the mask 2000, it needs to be moved from the position of the mask storage box 1000 to other positions. For this purpose, the support base 210 is movably mounted on the base 100 along the height direction. The transfer mechanism 300 includes a transfer seat 320, a transverse member 330, and a transverse driver 340. The transfer seat 320 is mounted on the base 100, the transverse member 330 is movably constrained to the transfer seat 320 along the length direction, the gripping assembly 310 is mounted on the transverse member 330, and the output end of the transverse driver 340 is drivenly connected to the transverse member 330. This arrangement allows the mask 2000 to be moved to the front of the mask storage box 1000 by the transverse member 330 after the gripping assembly 310 grips it. The transfer seat 320 is provided with a second slide rail 323, and a second slider connected to the transverse member 330 is slidably mounted on the second slide rail 323.

[0050] In some embodiments, the carrier driver 130 is disposed on the base 100, and the output end of the carrier driver 130 is drivenly connected to the carrier seat 210. The carrier driver 130 is a cylinder, and both the air inlet 131 and the air outlet of the cylinder are connected to an external air source. The carrier driver 130 is connected to the support frame 133 through a decoupling member 132, and the carrier seat 210 is disposed on the support frame 133.

[0051] The above configuration enables the separation of the mask 2000 from the housing 1100 of the mask storage box 1000 during the descent of the carrier 210 while the gripping component 310 grips the mask 2000. This prevents the gripping component 310 from moving the mask 2000 upwards after gripping it, thus avoiding slippage between the gripping component 310's clamping members 312 and the mask 2000 due to inertia during the upward movement, or even the mask 2000 slipping off between the two clamping members 312. Furthermore, the carrier driver 130 is located on the base 100, and the transverse driver 340 is located on the transfer seat 320. Both drivers are fixedly mounted, improving the connection stability of the carrier driver 130 and the transverse driver 340, and also enhancing the convenience of wiring.

[0052] The support seat 210 has a sliding groove on each of its left and right sides, and the base 100 has two sliding blocks that slide in the corresponding sliding grooves. The support seat 210 has a first limiting block 211, and the base 100 has a second limiting block 140. When the support seat 210 descends, it stops at the first limiting block 211 and abuts against the second limiting block 140. To improve the stability of the lifting and lowering of the support seat 210, the support seat 210 and the base 100 are connected by a linear bearing 134. The support seat 210 has a guide rod 212 on its lower side, and the guide rod 212 is connected to the linear bearing 134 fixed to the base 100.

[0053] To limit the extreme positions of the support 210, the base 100 is provided with an upper limit frame 135 and a lower limit frame 136. The upper limit sensor 1351 and the lower limit sensor 1361 are respectively fixed to the upper limit frame 135 and the lower limit frame 136. The support 210 is provided with a limit sheet metal 213. When the support 210 rises to the upper limit position, the limit sheet metal 213 triggers the upper limit sensor 1351. When the support 210 falls to the lower limit position, the limit sheet metal 213 triggers the lower limit sensor 1361.

[0054] The traverse drive 340 is a servo motor. A lead screw 341 is rotatably mounted on the transfer seat 320 and is connected to the output end of the traverse drive 340. A nut 342 is threadedly engaged with the lead screw 341 and connected to the traverse member 330 via a connector 343. To limit the traverse member 330 from exceeding its rear limit position, the transfer seat 320 is equipped with a buffer 321 and a rear limit sensor 322. When the traverse member 330 moves rearward to its limit position, the buffer 321 is triggered first, followed by the rear limit sensor 322. The buffer 321 is a hydraulic damper used to reduce noise and prevent violent collisions between the traverse member 330 and the transfer seat 320.

[0055] The transverse component 330 is equipped with a mask detection component 370, configured to detect whether a mask 2000 is placed inside the housing 1100 of the mask storage box 1000. In response to detecting that a mask 2000 is placed inside the housing 1100 of the mask storage box 1000, the mask 2000 is clamped; in response to detecting that no mask 2000 is placed inside the housing 1100 of the mask storage box 1000, an alarm is triggered. A handle 120 for gripping is provided on each of the left and right sides of the base 100 to facilitate the transfer of the entire device.

[0056] A very thin film is provided at the bottom of the mask 2000 in the mask storage box 1000. If the mask 2000 is tilted or otherwise damaged during the removal process, the film is easily damaged.

[0057] To prevent tilting during the removal of the mask 2000, the gripping assembly 310 includes a gripping base 311, two clamping members 312, two rotating members, a clamping transmission member 314, and a clamping driver 315. The two clamping members 312 are movably constrained to the gripping base 311 along the width direction and can move closer or further apart from each other. The two rotating members are spaced apart along the width direction and are arranged to rotate about their own axes. The clamping transmission member 314 is strip-shaped and wound between the two rotating members, forming two parallel transmission sections 3141 extending along the width direction between them. Each transmission section 3141 is connected to a corresponding clamping member 312. The clamping driver 315 is located on the gripping base 311, and its output end is drivenly connected to one of the clamping members 312 or one of the rotating members. Each clamping member 312 is connected to a clamping plate 3124, which is configured to clamp the transmission section 3141.

[0058] The clamping member 312 grips the mask 2000 from both sides to prevent tilting during the removal of the mask 2000. In addition, the clamping driver 315 ensures gripping efficiency, so that the gripping action can be completed quickly after the cover 1200 is opened. Compared with manual removal of the mask 2000, the preparation time is reduced and the probability of the mask 2000 being contaminated is reduced.

[0059] In addition, the clamping transmission member 314 has a strip-shaped structure, which can realize the power transmission between two clamping members 312 that are far apart in the width direction, and the overall height is small, which is beneficial to reduce the height dimension of the transfer mechanism 300.

[0060] The rotating component includes a rotating wheel 319 and a mounting shaft 313 that rotates with the rotating wheel 319. The mounting shaft 313 extends along the height direction, and the first end of the mounting shaft 313 is fixed to the gripping seat 311. The clamping component 312 is provided with a limiting groove 3122 that extends along the width direction. The second end of the mounting shaft 313 passes through the limiting groove 3122 and can slide relative to the limiting groove 3122 in the width direction, and can stop (abut) against the side wall of the limiting groove 3122. The above-mentioned configuration has several advantages. First, it allows the mounting shaft 313 and the limiting slide groove 3122 to limit the extreme position of the clamping member 312, preventing damage to the mask plate 2000. Second, the limiting slide groove 3122 avoids the mounting shaft 313, thereby reducing the height of the transfer mechanism 300. Third, the rotating wheel 319 rotates relative to the mounting shaft 313, and the mounting shaft 313 is fixedly connected to the gripper 311, avoiding direct connection between the rotating wheel 319 and the gripper 311, reducing the machining accuracy requirements of the gripper 311, and thus reducing the machining difficulty of the gripper 311. Fourth, the limiting slide groove 3122 functions as an installation interface, allowing the mounting shaft 313 to pass through the limiting slide groove 3122 and be screwed to the gripper 311.

[0061] In some embodiments, the gripper 311 is provided with a limiting block 3111. When the two grippers 312 approach each other, at least one of the grippers 312 can abut against the limiting block 3111 to limit the minimum distance between the two grippers 312, prevent collision between the two grippers 312, or prevent over-gripping that could cause the mask 2000 to fall or be damaged. The limiting groove 3122 limits the open position of the gripper 312, and the limiting block 3111 limits the clamping position of the gripper 312.

[0062] To achieve tensioning of the clamping transmission component 314, a tensioning plate 316 is adjustablely positioned on the gripping seat 311. One of the two rotating components is rotatably mounted on the tensioning plate 316. The tensioning plate 316 can move closer to or further away from the other rotating component and can be screwed onto the gripping seat 311. The tensioning plate 316 has an elongated hole 317 extending along its width, through which a screw is screwed onto the gripping seat 311.

[0063] To reduce wear between the rotating wheel 319 and the clamping transmission component 314, in some embodiments, the rotating wheel 319 is a synchronous wheel with circumferentially toothed sections, and the clamping transmission component 314 is a synchronous belt with teeth on its inner side that are adapted to the two synchronous wheels. The synchronous belt meshes with the synchronous wheels for transmission. This arrangement allows the synchronous belt to drive the synchronous wheels to rotate synchronously during movement, avoiding relative sliding friction between the rotating wheel 319 and the clamping transmission component 314, reducing the wear rate between the rotating wheel 319 and the clamping transmission component 314, and improving durability. At the same time, it also reduces the probability of uneven stretching between the two transmission parts 3141 due to friction between the rotating wheel 319 and the clamping transmission component 314, which could lead to asynchronous movement of the two clamping components 312 and clamping failure.

[0064] During the clamping and transfer of the mask 2000, if a power outage occurs causing the clamping driver 315 to lose power, the clamping force between the two clamping members 312 may disappear, leading to the mask 2000 falling off. To solve this problem, the gripping assembly 310 also includes a gripping elastic member 318, which is configured to apply an elastic force to the two clamping members 312 to bring them closer together. Even in the event of a power outage, when the clamping driver 315 is no longer driving the two clamping members 312, the gripping elastic member 318 ensures that the two clamping members 312 remain clamped, preventing the mask 2000 from falling off and providing power outage protection.

[0065] During use, the elastic element may fatigue and lose its elasticity. If the loosened elastic element falls, it will affect the normal gripping of the mask 2000. When the elastic element and the mask 2000 are gripped simultaneously during the gripping process, the mask 2000 may become unstable and fall. In this embodiment, the gripping elastic element 318 includes a tension spring, and the clamping member 312 has a connecting block 3123 with a hook 3125. The connecting block 3123 is located below the gripping seat 311, and the opening of the hook 3125 faces upward. The hanging ring at the end of the tension spring can hook onto the hook 3125 from top to bottom. The above structure ensures that even when the tension spring loses its elasticity, it can still be hooked onto the hook 3125 and will not fall off, thus avoiding affecting the normal gripping of the mask 2000 and ensuring the safety of the mask 2000 during the gripping process.

[0066] The clamping member 312 is connected to a first slider 3121, and the gripping seat 311 is provided with a first slide rail. The first slider 3121 is slidably disposed on the first slide rail. Each clamping member 312 corresponds to two first slide rails that are spaced apart along the length direction.

[0067] The transfer mechanism 300 also includes a position detection element 351 and a trigger element 350. The trigger element 350 is connected to one of the clamping elements 312. Two position detection elements 351 are arranged at intervals along the movement path of the trigger element 350. During the movement of the two clamping elements 312, the trigger element 350 can sequentially be in an open position, a clamping position, and a clamping-free position. When the trigger element 350 is in the open position, it can trigger one of the position detection elements 351. When the trigger element 350 is in the clamping-free position, it can trigger the other position detection element 351. When the trigger element 350 is in the clamping position, it can trigger both position detection elements 351 simultaneously. This configuration allows the two position detection elements 351 to cooperate in detecting the trigger element 350 in three positions, saving costs. For example, when the trigger element 350 is in the clamping-free position, the controller can stop the clamping driver 315 and send a fault message to the operator. For example, two position detection elements 351 are arranged spaced apart along the width direction. A trigger element 350 is connected to a right-hand clamping element 312. When the two clamping elements 312 separate, the trigger element 350 is in the open position and can trigger the right-hand position detection element 351. When the two clamping elements 312 approach and clamp the mask 2000, the trigger element 350 is in the clamping position and can trigger both position detection elements 351 simultaneously. When the two clamping elements 312 approach the clamping gap, and the distance between the two clamping elements 312 is less than the width of the mask 2000, the trigger element 350 is in the clamping gap position and can trigger the left-hand position detection element 351. The position detection element 351 can be a photosensitive sensor, and the trigger element 350 is sheet-shaped and can block the detection end of the photosensitive sensor.

[0068] To reduce the height of the transfer mechanism 300, and thus the height of the mask transfer device, in some embodiments, the clamping driver 315 is a linear driver. The sidewall of the linear driver, parallel to its own axis, is connected to the gripper 311. The output end of the linear driver can reciprocate along the width direction and is drivenly connected to the clamping member 312. The clamping driver 315 can be a linear motor, a telescopic cylinder, or an electric push rod. The movement direction of the output end of the clamping driver 315 is perpendicular to the height direction and is connected to the transmission plate 3152 via a floating joint 3151. The transmission plate 3152 is drivenly connected to one of the clamping members 312.

[0069] The mask 2000 has a cuboid structure with varying lengths and widths. During transfer, the orientation of the length and width sides of the mask 2000 needs to be determined by the receiving mechanism. For example, during gripping, the length and width directions of the mask 2000 are parallel; during transfer, the mask 2000 needs to be rotated 90 degrees to make its length side parallel to its length direction. The transfer mechanism 300 also includes a rotary driver 380 and two orientation detection elements 360. The rotary driver 380 is located on the transverse member 330, and its output end is connected to the gripper 311. The rotary driver 380 is configured to provide rotational power to drive the gripper 311 to rotate around its own axis. The two orientation detection elements 360 are spaced apart along the length direction, and the distance between the two orientation detection elements 360 is greater than 0 and less than the difference between the length and width of the mask 2000. If both orientation detection elements 360 are simultaneously blocked by the sidewalls on the length side of the mask 2000, it indicates that the length side of the mask 2000 is parallel to the length direction of the mask transfer device. If one orientation detection element 360 is blocked by the sidewall on the width side of the mask 2000, and the other orientation detection element 360 is not blocked, it indicates that the length side of the mask 2000 is perpendicular to the length direction of the mask transfer device. If neither orientation detection element 360 is blocked, it indicates that the mask 2000 is not clamped. The mask 2000 can be rotated 90 degrees as needed to accommodate different mating positions. The rotation detection element 381 is located on the transverse component 330 and is configured to detect whether the mask 2000 has rotated to the correct position.

[0070] During detection, the orientation detection element 360 needs to be close to the mask 2000 to ensure the reliability of the detection. However, when the mask 2000 needs to rotate, the orientation detection element 360 will interfere with the mask 2000. Therefore, in some embodiments, the transfer mechanism 300 also includes a telescopic driver 361. The output end of the telescopic driver 361 is provided with an orientation bracket 362. Both orientation detection elements 360 are located on the orientation bracket 362. This arrangement makes the position of the orientation detection element 360 adjustable. The orientation detection element 360 can detect the mask 2000 when the output end of the telescopic driver 361 is extended, and can also avoid the rotating mask 2000 when the output end of the telescopic driver 361 is retracted.

[0071] In some embodiments, this application provides a mask transfer device, which includes a cover opening mechanism 200 and a transfer mechanism 300. The cover opening mechanism 200 has a cover opening member 220 capable of opening the cover 1200 of a mask storage box 1000 placed on a support 210 to expose the mask 2000. The rotation axis of the cover opening member 220 coincides with the rotation axis of the mask storage box 1000, allowing the cover opening member 220 to smoothly open the cover 1200 during rotation. The cover 1200 is opened and can be kept open; the gripping component 310 of the transfer mechanism 300 can take out the mask 2000 from the box 1100 and remove it from the box 1100 so as to connect with other transfer mechanisms. This realizes the automatic opening of the mask storage box 1000 and the automatic removal of the mask 2000, which improves the operating efficiency and helps to reduce the probability of the mask 2000 slipping and being damaged, thus ensuring the safe transfer of the mask 2000.

[0072] The above embodiments of this application are merely illustrative examples to clearly illustrate the purpose of this application, and are not intended to limit the implementation of this application. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of the claims of this application.

Claims

1. A mask transfer device for opening the cover (1200) of a mask storage box (1000) and removing a mask (2000) from the box body (1100) of the mask storage box (1000), the mask transfer device comprising: Base (100); A cover opening mechanism (200) is provided on the base (100), and the cover opening mechanism (200) includes a support (210), a cover opening member (220) and a cover opening driver (230). The cover opening member (220) is rotatably provided on the support (210). The rotation axis of the cover opening member (220) coincides with the rotation axis of the cover (1200) in the mask storage box (1000) placed on the support (210). The output end of the cover opening driver (230) is drivenly connected to the cover opening member (220). The cover opening member (220) is provided with a suction cup (221) to adsorb the cover (1200). The transfer mechanism (300) is configured to grasp the mask (2000) in the box (1100) and remove the mask (2000) from the box (1100).

2. The reticle transfer device of claim 1, wherein, The opening member (220) has a rotating part on each side along the width direction. Both rotating parts are rotatably connected to the support base (210), and the output end of the opening driver (230) is drivenly connected to at least one of the rotating parts. The opening member (220) has a clearance part (226) to avoid the cover (1200) of the mask storage box (1000).

3. The reticle transfer device of claim 2, wherein, The opening component (220) has a frame structure and includes two swing rods (225) hinged to the bearing seat (210) and a connecting rod (224) connecting the two swing rods (225). The two swing rods (225) and the connecting rod (224) together form the clearance part (226). The suction cup (221) is provided on the connecting rod (224), and the two rotating parts are provided on the corresponding swing rods (225).

4. The reticle transfer device of claim 3, wherein, The opening mechanism (200) further includes a floating element (222), the first end of which is connected to the connecting rod (224), and the second end of which can float relative to the connecting rod (224) and can be elastically reset. The suction cup (221) is located at the second end of the floating element (222).

5. The reticle transfer device of claim 3, wherein, Each of the two swing rods (225) is provided with a connecting shaft (2251) whose axis is perpendicular to the extension direction of the swing rod (225). The connecting shaft (2251) forms the rotating part. The output end of the cover opening driver (230) can rotate around its own axis and is driven connected to one of the two connecting shafts (2251).

6. The mask transfer device according to any one of claims 1-5 further includes an unlocking component (240), the unlocking component (240) comprising an unlocking driver (241), an unlocking elastic member (242), two unlocking members (243), two steering members (244), and two unlocking transmission members (245), the two unlocking members (243) being slidably constrained to the support seat (210) along the width direction and being able to move closer to or further away from each other, the two steering members (244) being spaced apart along the width direction and respectively disposed on one side of the corresponding unlocking member (243), the two unlocking transmission members (245) being... 5) The two unlocking transmission members (245) are respectively wound around the corresponding steering member (244), and the first ends of the two unlocking transmission members (245) are respectively connected to the corresponding unlocking member (243). The unlocking driver (241) is located between the two unlocking members (243), and the output end of the unlocking driver (241) is connected to the second end of the two unlocking transmission members (245) and drags the two unlocking transmission members (245) to drive the two unlocking members (243) away from each other. The unlocking elastic member (242) is configured to apply elastic force to the two unlocking members (243) so that the two unlocking members (243) move closer to each other.

7. The reticle transfer device of claim 6, wherein, The unlocking elastic element (242) is a tension spring, which is located between the two unlocking elements (243), and the two ends of the tension spring are detachably connected to the corresponding unlocking elements (243).

8. The reticle transfer device of claim 7, wherein, Each of the unlocking components (243) has a drag part (2431) on each side along the width direction. Among the four drag parts (2431) of the two unlocking components (243), the two inner drag parts (2431) are at the same height H1 from the support seat (210), and the two outer drag parts (2431) are at the same height H2 from the support seat (210), and H1≥H2. The two ends of the tension spring are respectively connected to the two inner drag parts (2431), and the first ends of the two unlocking transmission components (245) are respectively connected to the two outer drag parts (2431).

9. The reticle transfer device of claim 6, wherein, The steering component (244) is a rotating wheel, which is rotatably mounted on the bearing seat (210) and arranged to rotate about its own axis. The two unlocking transmission components (245) are respectively in rolling cooperation with the corresponding rotating wheels.

10. The mask transfer apparatus according to any one of claims 1-5, further comprising at least one of the following: A carrier driver (130) is provided, the output end of which is reciprocating relative to the base (100) along the height direction and is connected in a transmission manner to the carrier (210); or, A linear bearing (134) with its axis extending along the height direction, and a support seat (210) movably disposed on the base (100) via the linear bearing (134).

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