Array substrate and preparation method therefor, and flexible electronic paper display panel

Abstract

An array substrate (200) and a preparation method therefor, and a flexible electronic paper display panel (10). A first passivation layer (410) corresponding to a bending region (20) comprises a plurality of first recessed portions (411) and a plurality of first protruding portions (412), the first recessed portions (411) and the first protruding portions (412) are arranged at intervals, a second passivation layer (430) comprises a plurality of second recessed portions (431) and a plurality of second protruding portions (432), the second recessed portions (431) and the second protruding portions (432) are arranged at intervals, each first protruding portion (412) is located in the corresponding second recessed portion (431), and each second protruding portion (432) is located in the corresponding first recessed portion (411). The failure rate of the flexible electronic paper display panel (10) is reduced, and the service life is prolonged.

Description

Array substrate and its fabrication method and flexible electronic paper display panel

[0001] This application claims priority to Chinese Patent Application No. 2024114445377, filed on October 16, 2024, entitled "Array Substrate and Method for Preparing the Same and Flexible Electronic Paper Display Panel", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of display technology, and in particular to an array substrate, a method for fabricating the same, and a flexible electronic paper display panel. Background Technology

[0003] With the development of digital technology, more and more display devices are entering people's lives, such as electronic paper (EP) display panels. Because electronic paper display panels can maintain display for a long time when the power is off, and have advantages such as being lightweight, thin, having low power consumption, and being simple to manufacture, they are becoming increasingly popular.

[0004] Current flexible electronic paper display panels can be rolled up and folded arbitrarily by using flexible substrates made of polyimide film. However, during use, individual pixels in the bending area of ​​the flexible electronic paper display panel may fail and be unable to participate in the display. Even worse, black lines may appear along the length of the bending area. Summary of the Invention

[0005] The purpose of this application is to provide an array substrate and its fabrication method, as well as a flexible electronic paper display panel, to reduce the failure rate and improve the service life of the flexible electronic paper display panel.

[0006] This application discloses an array substrate for use in a flexible electronic paper display panel; the array substrate includes a flexible substrate, an active switching layer, a protective layer and a pixel electrode layer, wherein the active switching layer, the protective layer and the pixel electrode layer are sequentially deposited on the flexible substrate, and the array substrate includes a bending region and an unfolding region;

[0007] The protective layer includes a first passivation layer, a spacer layer, and a second passivation layer. The first passivation layer, the spacer layer, and the second passivation layer are sequentially deposited on the active switching layer. The spacer layer is located at least between the first passivation layer and the second passivation layer in the bending region. The first passivation layer in the bending region includes a plurality of first recesses and a plurality of first protrusions, which are spaced apart. The second passivation layer includes a plurality of second recesses and a plurality of second protrusions, which are spaced apart. The first protrusions are located within the second recesses, and the second protrusions are located within the first recesses.

[0008] Optionally, in the protective layer of the unfolded area, the first passivation layer and the second passivation layer are in contact; only in the protective layer of the bending area, the first passivation layer includes a plurality of first recesses and a plurality of first protrusions, the first recesses and the first protrusions being spaced apart, the second passivation layer includes a plurality of second recesses and a plurality of second protrusions, the second recesses and the second protrusions being spaced apart, the first protrusions being located within the second recesses, the second protrusions being located within the first recesses, and the spacer layer being located only between the first protrusions and the second recesses, and between the first recesses and the second protrusions, in the bending area.

[0009] Optionally, in the protective layer of the unfolded area, the first passivation layer includes a plurality of first recesses and a plurality of first protrusions, the first recesses and the first protrusions being spaced apart; the second passivation layer includes a plurality of second recesses and a plurality of second protrusions, the second recesses and the second protrusions being spaced apart; the first protrusions are located within the second recesses; the second protrusions are located within the first recesses; and the spacer layer is also located between the first protrusions and the second recesses, and between the first recesses and the second protrusions, within the unfolded area.

[0010] Optionally, the length direction of the bending region is taken as the first direction, and the width direction of the bending region is taken as the second direction; along the first direction, the first recess is adjacent to the upper and lower sides of the first protrusion, and the first protrusion is adjacent to the upper and lower sides of the first recess.

[0011] Along the second direction, the first recess is adjacent to the left and right sides of the first protrusion, and the first protrusion is adjacent to the left and right sides of the first recess.

[0012] Optionally, the length direction of the bending region is taken as the first direction, and the width direction of the bending region is taken as the second direction; along the second direction, the first recesses are adjacent to the left and right sides of the first protrusion, and the first protrusions are adjacent to the left and right sides of the first recess.

[0013] Along the first direction, the first recess and the first protrusion are adjacent to each other on the upper and lower sides of the first protrusion, and the first protrusion is located between the first recess and the first protrusion. The first recess and the first protrusion are adjacent to each other on the upper and lower sides of the first recess, and the first recess is located between the first recess and the first protrusion.

[0014] Optionally, the array substrate further includes data lines and scan lines, which are disposed on the flexible substrate and are arranged in a crisscross pattern to divide multiple pixel unit regions; the active switch layer includes multiple active switches, each active switch corresponding to each pixel unit region; the orthographic projection of the first recess on the flexible substrate covers the orthographic projection of the active switch on the flexible substrate.

[0015] This application also discloses a method for fabricating an array substrate, used to fabricate the array substrate described above, wherein the array substrate includes a bending region and an unfolding region, comprising the following steps:

[0016] An active switching layer is formed on a flexible substrate;

[0017] A first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, the first recesses and the first protrusions being spaced apart; a spacer layer is formed at least on the first passivation layer in the bending region; a second passivation layer is formed on the spacer layer, and a plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer in the bending region near the first passivation layer, the second recesses and the second protrusions being spaced apart, the first protrusions being located within the second recesses, and the second protrusions being located within the first recesses, to form a protective layer;

[0018] A pixel electrode layer is formed on the protective layer.

[0019] Optionally, a first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, the first recesses and the first protrusions being spaced apart; a spacer layer is formed at least on the first passivation layer in the bending region; a second passivation layer is formed on the spacer layer, and a plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer in the bending region near the first passivation layer, the second recesses and the second protrusions being spaced apart, the first protrusions being located within the second recesses, and the second protrusions being located within the first recesses, the step of forming a protective layer includes:

[0020] A first passivation layer is formed on the active switching layer;

[0021] Multiple first recesses and multiple first protrusions are formed only on the first passivation layer in the bending region, with the first recesses and the first protrusions being spaced apart.

[0022] Spacer layers are formed only on the first passivation layer within the bending region;

[0023] A second passivation layer is formed on the spacer layer. A plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer near the first passivation layer corresponding to the bending region. The second recesses and the second protrusions are spaced apart. The first protrusion is located in the second recess and the second protrusion is located in the first recess to form a protective layer.

[0024] In the protective layer of the unfolded region, the adjacent sides of the first passivation layer and the second passivation layer are flush. Optionally, a first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, the first recesses and the first protrusions being spaced apart; a spacer layer is formed at least on the first passivation layer in the bending region; a second passivation layer is formed on the spacer layer, and a plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer in the bending region that is close to the first passivation layer, the second recesses and the second protrusions being spaced apart, the first protrusions being located within the second recesses, and the second protrusions being located within the first recesses, the step of forming the protective layer includes:

[0025] A first passivation layer is formed on the active switching layer;

[0026] A plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region and the unfolding region, and the first recesses and the first protrusions are spaced apart.

[0027] A spacer layer is formed on the first passivation layer in the bending region and the unfolded region;

[0028] A second passivation layer is formed on the spacer layer. Corresponding to the bending region and the unfolded region, the second passivation layer has a plurality of second recesses and a plurality of second protrusions. The second recesses and second protrusions are spaced apart. A first protrusion is located within a second recess, and a second protrusion is located within a first recess, to form a protective layer. This application also discloses a flexible electronic paper display panel, which includes an electronic paper film layer and the array substrate, the electronic paper film layer being attached to the array substrate.

[0029] Compared to existing flexible electronic paper display panel solutions, this application divides the protective layer into a first passivation layer, a spacer layer, and a second passivation layer. A first protrusion and a first recess are spaced apart on the first passivation layer in the bending region to disperse stress on the first passivation layer. Furthermore, a second protrusion and a second recess are spaced apart on the second passivation layer in the bending region. Importantly, the second protrusion is located within the first recess, and the first protrusion is located within the second recess. This ensures that when excessive stress causes cracks, they will not simultaneously appear at the same location on the first and second passivation layers, preventing the entire protective layer from completely cracking. This preserves the connection stability between the pixel electrode layer and the active switching layer, thereby reducing the failure rate of the flexible electronic paper display panel and increasing its lifespan. Attached Figure Description

[0030] The accompanying drawings, which form part of the specification, are used to provide a further understanding of the embodiments of this application and illustrate the implementation methods of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any creative effort. In the drawings:

[0031] Figure 1 is a schematic diagram of a flexible electronic paper display panel according to an embodiment of this application;

[0032] Figure 2 is a plan view of the array substrate of the first embodiment of this application;

[0033] Figure 3 is a cross-sectional schematic diagram of the array substrate according to the first embodiment of this application;

[0034] Figure 4 is a cross-sectional schematic diagram of the pixel unit region of the first embodiment of this application;

[0035] Figure 5 is a planar schematic diagram of the pixel unit region of the first embodiment of this application;

[0036] Figure 6 is a plan view of another arrangement of the first recess and the first protrusion according to the first embodiment of this application;

[0037] Figure 7 is a schematic diagram of an array substrate according to a second embodiment of this application;

[0038] Figure 8 is a schematic flowchart of a method for fabricating an array substrate according to an embodiment of this application;

[0039] Figures 9a and 9b are schematic diagrams of a fabrication method for an array substrate according to an embodiment of this application.

[0040] Figure 10 is a schematic flowchart of a method for fabricating an array substrate according to an embodiment of this application;

[0041] Figures 11a-11b are schematic diagrams of a fabrication method for an array substrate according to an embodiment of this application. Detailed Implementation

[0042] It should be understood that the terminology, specific structural and functional details used herein are merely for describing particular embodiments and are representative. However, this application may be implemented in many alternative forms and should not be construed as being limited to the embodiments set forth herein.

[0043] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating relative importance or implying the number of technical features indicated. Therefore, unless otherwise stated, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; "multiple" means two or more. The term "comprising" and any variations thereof mean non-exclusive inclusion, where one or more other features, integers, steps, operations, units, components, and / or combinations thereof may be present or added.

[0044] In addition, terms such as “center,” “horizontal,” “up,” “down,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer” that indicate orientation or positional relationship are based on the orientation or relative positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this application and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0045] Furthermore, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0046] The present application will now be described in detail with reference to the accompanying drawings and optional embodiments.

[0047] Figure 1 is a schematic diagram of a flexible electronic paper display panel according to an embodiment of this application. As shown in Figure 1, this application discloses a flexible electronic paper display panel 10, which includes an electronic paper film layer 100 and an array substrate 200. The electronic paper film layer 100 is attached to the array substrate 200.

[0048] The flexible electronic paper display panel 10 can be folded or rolled into a tube shape during use.

[0049] The electronic paper film layer 100 includes a particle layer 110 and a common electrode layer 120. The particle layer 110 includes a capsule structure and a microcup structure. This application describes the microcup structure. Electrophoretic particles and spacers 111 are disposed in the particle layer 110. The spacers 111 form a plurality of chambers 112. The electrophoretic particles are disposed in the chambers 112. One chamber 112 corresponds to one pixel unit region 630.

[0050] The electrophoretic particles include black electrophoretic particles and white electrophoretic particles, and may also include colored electrophoretic particles, such as red electrophoretic particles, blue electrophoretic particles and green electrophoretic particles. The common electrode layer 120 is located on the side of the particle layer 110 away from the array substrate 200. An electric field is formed between the common electrode and the pixel electrode layer 500 on the array substrate 200, which drives the electrophoretic particles to move and realize the display of the image.

[0051] This application also discloses an array substrate 200, which can be used in the flexible electronic paper display panel 10 described above. Regarding the array substrate 200, this application provides the following design, which is specifically described through several embodiments:

[0052] Example 1:

[0053] During the use of the flexible electronic paper display panel 10, a problem may occur where pixels within the pixel unit area 630 fail and cannot participate in the display. In severe cases, black lines may appear along the length of the bending area 20. In existing electronic paper display panels, the electronic paper film layer 100 covers the display area of ​​the array substrate 200, while the non-display areas at the edges are exposed. Therefore, a thicker passivation layer is required on the array substrate 200 to protect the underlying metal lines. The flexible electronic paper display panel 10 of this application also follows this principle.

[0054] On the flexible electronic paper display panel 10 where the problem occurred, for example, the pixel electrode layer 500 at the location where the black line appeared was disconnected from the underlying active switching layer 300. Furthermore, when the flexible electronic paper display panel 10 was bent, cracks were observed in the thick passivation layer. Therefore, this application further improves the existing passivation layer. Specifically: Figure 2 is a planar schematic diagram of the array substrate of the first embodiment of this application; Figure 3 is a cross-sectional schematic diagram of the array substrate of the first embodiment of this application; Figure 4 is a cross-sectional schematic diagram of the pixel unit region of the first embodiment of this application. Referring to Figures 2 to 4, this application discloses an array substrate 200 for use in the flexible electronic paper display panel 10; the array substrate 200 includes a flexible substrate 210, an active switching layer 300, a protective layer 400, and a pixel electrode layer 500, wherein the active switching layer 300, the protective layer 400, and the pixel electrode layer 500 are sequentially deposited on the flexible substrate 210.

[0055] The array substrate 200 includes a bending region 20 and an unfolding region 30. The exemplary flexible electronic paper display panel 10 can be folded left and right. In this case, the left and right sides of the array substrate 200 are defined as the unfolding region 30 and the middle one is defined as the bending region 20. During the folding or unfolding process, the unfolding regions 30 on the left and right sides move closer to each other or further away from each other.

[0056] The protective layer 400 includes a first passivation layer 410, a spacer layer 420, and a second passivation layer 430, wherein the spacer layer 420 may be made of polyvinyl chloride.

[0057] The first passivation layer 410, the spacer layer 420 and the second passivation layer 430 are sequentially deposited on the active switching layer 300, and the spacer layer 420 is located at least between the first passivation layer 410 and the second passivation layer 420 in the bending region 20.

[0058] The first passivation layer 410 corresponding to the bending region 20 includes a plurality of first recesses 411 and a plurality of first protrusions 412, with the first recesses 411 and the first protrusions 412 spaced apart. The second passivation layer 430 includes a plurality of second recesses 431 and a plurality of second protrusions 432, with the second recesses 431 and the second protrusions 432 spaced apart. The first protrusions 412 are located within the second recesses 431, and the second protrusions 432 are located within the first recesses 411.

[0059] In simple terms, this application changes the existing passivation layer into a three-layer protective layer 400, and provides a first protrusion 412 and a first recess 411 on the first passivation layer 410 in the bending region 20, and provides a second protrusion 432 and a second recess 431 on the corresponding second passivation layer 430.

[0060] Compared to existing flexible electronic paper display panel solutions, this application divides the protective layer 400 into a first passivation layer 410, a spacer layer 420, and a second passivation layer 430. First protrusions 412 and first recesses 411 are spaced apart on the first passivation layer 410 in the bending region 20 to disperse stress on the first passivation layer 410. Similarly, second protrusions 432 and second recesses 431 are spaced apart on the second passivation layer 430 in the bending region 20 to disperse stress on the second passivation layer 430. Importantly, the second protrusion 432 is located within the first recess 411, and the first protrusion 412 is located within the second recess 431. This ensures that when excessive stress causes cracks, they will not appear simultaneously in the same location as the first passivation layer 410 and the second passivation layer 430. This prevents the entire protective layer 400 from completely cracking, thus maintaining the connection stability between the pixel electrode layer 500 and the active switching layer 300. This reduces the failure rate of the flexible electronic paper display panel 10 and improves its service life.

[0061] The first protrusion 412 has a trapezoidal cross-section, the first recess 411 has an inverted trapezoidal cross-section, the second protrusion 432 has an inverted trapezoidal cross-section, and the second recess 431 has a trapezoidal cross-section, thereby further reducing stress concentration.

[0062] In order to allow the flexible electronic paper display panel 10 to be folded according to the user's usage, the bending area 20 is not fixed. Therefore, in this embodiment, a first recess 411 and a first protrusion 412 are also provided on the first passivation layer 410 of the unfolded area 30. Correspondingly, a second recess 431 and a second protrusion 432 are also provided on the second passivation layer 430 of the unfolded area 30. In short, the first recess 411 and the first protrusion 412 are provided on the entire first passivation layer 410, and the second recess 431 and the second protrusion 432 are also provided on the entire second passivation layer 430.

[0063] Specifically, in the protective layer 400 of the unfolded region 30, the first passivation layer 410 includes a plurality of first recesses 411 and a plurality of first protrusions 412, with the first recesses 411 and the first protrusions 412 spaced apart. The second passivation layer 430 includes a plurality of second recesses 431 and a plurality of second protrusions 432, with the second recesses 431 and the second protrusions 432 spaced apart. The first protrusions 412 are located within the second recesses 431, and the second protrusions 432 are located within the first recesses 411. The spacer layer 420 is also located between the first protrusions 412 and the second recesses 431 in the unfolded region 30, and the spacer layer 420 is also located between the first recesses 411 and the second protrusions 432 in the unfolded region 30.

[0064] This makes the flexible electronic paper display panel 10 more adaptable to various bending options for users, thereby further improving the service life of the flexible electronic paper display panel 10. Furthermore, the first protrusion 412 and the first recess 411 are provided on the entire first passivation layer 410, eliminating the need to use different masks for array substrates 200 of different sizes, which can save costs.

[0065] Figure 5 is a planar schematic diagram of the pixel unit region of the first embodiment of this application. As shown in Figure 5, when bent, the stress on the first passivation layer 410 will be concentrated on the thicker first protrusion 412, and the stress on the second passivation layer 430 will be concentrated on the thicker second protrusion 432. Since the first passivation layer 410 is relatively close to the active switch 310 below, this application also places the active switch 310 below the first recess 411. Specifically:

[0066] The array substrate 200 further includes a first metal layer, a first insulating layer, a semiconductor layer, a second metal layer, and a second insulating layer, wherein the first metal layer, the first insulating layer, the first semiconductor layer, the second metal layer, and the second insulating layer are sequentially deposited on the flexible substrate 210.

[0067] The array substrate 200 further includes data lines 610 and scan lines 620, which are disposed on the flexible substrate 210 and are arranged in a crisscross pattern to divide multiple pixel unit regions 630; the active switch layer 300 includes multiple active switches 310, each active switch 310 corresponding to each pixel unit region 630; the orthographic projection of the first recess 411 on the flexible substrate 210 covers the orthographic projection of the active switch 310 on the flexible substrate 210.

[0068] In this way, when the first passivation layer 410 develops cracks due to bending, the cracks will not appear directly above the active switch 310, thus preventing damage to the active switch 310.

[0069] For example, the scan line 620 can be disposed in the first metal layer, the data line 610 can be disposed in the second metal layer, the gate of the active switch 310 can be disposed in the first metal layer, the semiconductor structure of the active switch 310 can be disposed in the semiconductor layer, and the source and drain of the active switch 310 can be disposed in the second metal layer.

[0070] Furthermore, taking the length direction of the bending region 20 as the first direction 21 and the width direction of the bending region 20 as the second direction 22; along the first direction 21, the first recessed portion 411 is adjacent to the upper and lower sides of the first protrusion 412, and the first protrusion 412 is adjacent to the upper and lower sides of the first recessed portion 411.

[0071] Along the second direction 22, the first recessed portion 411 is adjacent to the left and right sides of the first protrusion 412, and the first protrusion 412 is adjacent to the left and right sides of the first recessed portion 411.

[0072] In simple terms, the four adjacent protrusions 412 on the top, bottom, left, and right are all first recesses 411, and the four adjacent protrusions 412 on the top, bottom, left, and right are all first protrusions 412. Correspondingly, the four adjacent protrusions 432 on the top, bottom, left, and right are all second recesses 431, and the four adjacent protrusions 431 on the top, bottom, left, and right are all second protrusions 432. This ensures that each first protrusion 412 and second protrusion 432 is relatively independent. Therefore, even if cracks occur on the first protrusions 412 and second protrusions 432, the cracks will not expand further, thus avoiding exacerbating the display problems of the flexible electronic paper display panel 10.

[0073] Figure 6 is a plan view of another arrangement of the first recess and the first protrusion according to the first embodiment of this application. As shown in Figure 6, the length direction of the bending region 20 is taken as the first direction 21, and the width direction of the bending region 20 is taken as the second direction 22. Along the second direction 22, the first recess 411 is adjacent to the left and right sides of the first protrusion 412, and the first protrusion 412 is adjacent to the left and right sides of the first recess 411. Along the first direction 21, the first recess 411 and the first protrusion 412 are adjacent to the upper and lower sides of the first protrusion 412, and the first protrusion 412 is located between the first recess 411 and the first protrusion 412. The first recess 411 and the first protrusion 412 are adjacent to the upper and lower sides of the first recess 411, and the first recess 411 is located between the first recess 411 and the first protrusion 412. In simple terms, the boundary line between the first protrusion 412 and the first recess 411 in the previous row is located in the middle of the first protrusion 412 or the middle of the first recess 411 in the current row. That is, the boundary line between the first protrusion 412 and the first recess 411 in the previous row is not on the same straight line as the boundary line between the first protrusion 412 and the first recess 411 in the current row. In this way, when a crack occurs at the boundary line between the first recess 411 and the first protrusion 412, a longer crack is avoided. Therefore, the problem of black lines appearing on the flexible electronic paper display panel 10 after bending can be eliminated.

[0074] Example 2:

[0075] Figure 7 is a schematic diagram of an array substrate according to a second embodiment of the present application. As shown in Figure 7, unlike the first embodiment, this embodiment only provides a first protrusion 412 and a first recess 411 in the first passivation layer 410 of the bending region 20, and no spacer layer 420 is provided between the first passivation layer 410 and the second passivation layer 430 in the unfolded region 30.

[0076] Specifically, in the protective layer 400 of the unfolded region 30, the first passivation layer 410 and the second passivation layer 430 are in contact; only in the protective layer 400 within the bending region 20, the first passivation layer 410 includes a plurality of first recesses 411 and a plurality of first protrusions 412, the first recesses 411 and the first protrusions 412 being spaced apart, the second passivation layer 430 includes a plurality of second recesses 431 and a plurality of second protrusions 432, the second recesses 431 and the second protrusions 432 being spaced apart, the first protrusions 412 being located within the second recesses 431, the second protrusions 432 being located within the first recesses 411, and the spacer layer 420 being located only between the first protrusions 412 and the second recesses 431, and between the first recesses 411 and the second protrusions 432 within the bending region 20. Compared to the solution in the first embodiment, this embodiment only provides a first protrusion 412 and a first recess 411 in the first passivation layer 410 of the bending region 20. Correspondingly, the second passivation layer 430 also only provides a second protrusion 432 and a second recess 431 in the bending region 20, which makes the first passivation layer 410 and the second passivation layer 430 in the unfolded region 30 fit more tightly, thereby preventing moisture from entering the surface from between the first passivation layer 410 and the second passivation layer 430.

[0077] Figure 8 is a flowchart illustrating a method for fabricating an array substrate according to an embodiment of this application. Figures 9a and 9b are process diagrams illustrating a method for fabricating an array substrate according to an embodiment of this application. As shown in Figures 8 and 9b, this application also discloses a method for fabricating an array substrate 200, used to fabricate the array substrate 200 described above. The array substrate 200 includes a bending region 20 and an unfolding region 30, and includes the following steps:

[0078] S1: An active switching layer is formed on a flexible substrate;

[0079] S2: A first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, the first recesses and the first protrusions being spaced apart; a spacer layer is formed at least on the first passivation layer in the bending region; a second passivation layer is formed on the spacer layer, and a plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer in the bending region that is close to the first passivation layer, the second recesses and the second protrusions being spaced apart, the first protrusions being located in the second recesses, and the second protrusions being located in the first recesses, to form a protective layer;

[0080] S3: A pixel electrode layer is formed on the protective layer.

[0081] Compared to existing flexible electronic paper display panel solutions, this application divides the protective layer 400 into a first passivation layer 410, a spacer layer 420, and a second passivation layer 430. First protrusions 412 and first recesses 411 are spaced apart on the first passivation layer 410 in the bending region 20 to disperse stress on the first passivation layer 410. Similarly, second protrusions 432 and second recesses 431 are spaced apart on the second passivation layer 430 in the bending region 20 to disperse stress on the second passivation layer 430. Importantly, the second protrusion 432 is located within the first recess 411, and the first protrusion 412 is located within the second recess 431. This ensures that when excessive stress causes cracks, they will not appear simultaneously in the same location as the first passivation layer 410 and the second passivation layer 430. This prevents the entire protective layer 400 from completely cracking, thus maintaining the connection stability between the pixel electrode layer 500 and the active switching layer 300. This reduces the failure rate of the flexible electronic paper display panel 10 and improves its service life.

[0082] It is permissible to provide a first protrusion 412 and a first recess 411 only on the first passivation layer 410 of the bending region 20, and to provide a second protrusion 432 and a second recess 431 on the bending region 20 of the corresponding second passivation layer 430. Specifically, step S2 involves: forming a first passivation layer on the active switching layer; forming a plurality of first recesses and a plurality of first protrusions on the first passivation layer in the bending region, with the first recesses and first protrusions spaced apart; forming a spacer layer at least on the first passivation layer in the bending region; forming a second passivation layer on the spacer layer, with a plurality of second recesses and a plurality of second protrusions formed on the side of the second passivation layer near the first passivation layer corresponding to the bending region, with the second recesses and second protrusions spaced apart; the first protrusion located within the second recess, and the second protrusion located within the first recess, to form a protective layer including:

[0083] S211: A first passivation layer is formed on the active switching layer;

[0084] S212: A plurality of first recesses and a plurality of first protrusions are formed only on the first passivation layer in the bending region, wherein the first recesses and the first protrusions are spaced apart.

[0085] S213: A spacer layer is formed only on the first passivation layer within the bending region;

[0086] S214: A second passivation layer is formed on the spacer layer. A plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer near the first passivation layer corresponding to the bending region. The second recesses and the second protrusions are spaced apart. The first protrusion is located in the second recess and the second protrusion is located in the first recess to form a protective layer.

[0087] In the protective layer 400 of the unfolded region 30, the first passivation layer 410 and the second passivation layer 430 are in contact. After etching the first recess 411, the first protrusion 412 is formed directly in the unetched area. The spacer layer 420 is uniformly disposed on the first passivation layer 410. When the second passivation layer 430 is disposed, the second recess 431 can be formed directly at the position corresponding to the first protrusion 412, and the second protrusion 432 can be formed directly at the position corresponding to the first recess 411. The surface of the second passivation layer 430 is flush with the surface away from the first passivation layer 410.

[0088] This makes the first passivation layer 410 and the second passivation layer 430 in the unfolded area 30 adhere more tightly, thereby preventing moisture from entering the surface from between the first passivation layer 410 and the second passivation layer 430.

[0089] Figure 10 is a flowchart illustrating a method for fabricating an array substrate according to an embodiment of this application. Figures 11a-11b are process diagrams illustrating a method for fabricating an array substrate according to an embodiment of this application. As shown in Figures 10-11b, a first protrusion 412 and a first recess 411 can be formed on the entire surface of the first passivation layer 410, and a second protrusion 432 and a second recess 431 can be formed on the entire surface of the second passivation layer 430. Specifically, in step S2: a first passivation layer is formed on the active switching layer; and in the bending region... A plurality of first recesses and a plurality of first protrusions are formed on a first passivation layer, the first recesses and the first protrusions being spaced apart; a spacer layer is formed on the first passivation layer at least in the bending region; a second passivation layer is formed on the spacer layer, and a plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer corresponding to the bending region near the first passivation layer, the second recesses and the second protrusions being spaced apart, the first protrusions being located within the second recesses, and the second protrusions being located within the first recesses, to form a protective layer comprising:

[0090] S221: A first passivation layer is formed on the active switching layer;

[0091] S222: A plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region and the unfolded region, wherein the first recesses and the first protrusions are spaced apart.

[0092] S223: A spacer layer is formed on the first passivation layer in the bending region and the unfolding region;

[0093] S224: A second passivation layer is formed on the spacer layer. A plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer near the first passivation layer corresponding to the bending region and the unfolded region. The second recesses and the second protrusions are spaced apart. The first protrusion is located in the second recess and the second protrusion is located in the first recess to form a protective layer.

[0094] Compared to providing the first protrusion 412 and the first recess 411 only on the first passivation layer 410 in the bending region 20, the second protrusion 432 and the second recess 431 are also provided on the bending region 20 of the corresponding second passivation layer 430. By providing the first protrusion 412 and the first recess 411 on the entire surface of the first passivation layer 410, and providing the second protrusion 432 and the second recess 431 on the entire surface of the second passivation layer 430, the flexible electronic paper display panel 10 can be more adaptable to various bending options of users, thereby further improving the service life of the flexible electronic paper display panel 10. Furthermore, by providing the first protrusion 412 and the first recess 411 on the entire surface of the first passivation layer 410, it is not necessary to use different masks for array substrates 200 of different sizes, which saves costs.

[0095] It should be noted that the limitations on each step involved in this solution are not considered as limiting the order of steps, provided that they do not affect the implementation of the specific solution. The steps listed first can be executed first, later, or even simultaneously. As long as this solution can be implemented, it should be considered to fall within the scope of protection of this application.

[0096] It should be noted that the inventive concept of this application can lead to numerous embodiments, but due to space limitations in the application documents, they cannot all be listed. Therefore, without conflict, the embodiments described above or the technical features can be arbitrarily combined to form new embodiments. The combination of embodiments or technical features will enhance the original technical effect. The above description is a further detailed explanation of this application in conjunction with specific optional embodiments, and it should not be considered that the specific implementation of this application is limited to these descriptions. For those skilled in the art, several simple deductions or substitutions can be made without departing from the concept of this application, and all such modifications or substitutions should be considered to fall within the protection scope of this application.

Claims

1. An array substrate, wherein, Used in flexible electronic paper display panels; the array substrate includes a flexible substrate, an active switching layer, a protective layer, and a pixel electrode layer, wherein the active switching layer, the protective layer, and the pixel electrode layer are sequentially deposited on the flexible substrate, and the array substrate includes a bending region and an unfolding region; The protective layer includes a first passivation layer, a spacer layer, and a second passivation layer. The first passivation layer, the spacer layer, and the second passivation layer are sequentially deposited on the active switching layer. The spacer layer is located at least between the first passivation layer and the second passivation layer in the bending region. The first passivation layer in the bending region includes a plurality of first recesses and a plurality of first protrusions, which are spaced apart. The second passivation layer includes a plurality of second recesses and a plurality of second protrusions, which are spaced apart. The first protrusions are located within the second recesses, and the second protrusions are located within the first recesses.

2. The array substrate according to claim 1, wherein, In the protective layer of the unfolded area, the first passivation layer and the second passivation layer are in contact with each other; only in the protective layer of the bending area, the first passivation layer includes a plurality of first recesses and a plurality of first protrusions, the first recesses and the first protrusions being spaced apart, the second passivation layer includes a plurality of second recesses and a plurality of second protrusions, the second recesses and the second protrusions being spaced apart, the first protrusions being located within the second recesses, the second protrusions being located within the first recesses, and the spacer layer being located only between the first protrusions and the second recesses, and between the first recesses and the second protrusions, in the bending area.

3. The array substrate of claim 1, wherein, In the protective layer of the unfolded area, the first passivation layer includes a plurality of first recesses and a plurality of first protrusions, the first recesses and the first protrusions being spaced apart; the second passivation layer includes a plurality of second recesses and a plurality of second protrusions, the second recesses and the second protrusions being spaced apart; the first protrusions are located within the second recesses; the second protrusions are located within the first recesses; and the spacer layer is also located between the first protrusions and the second recesses, and between the first recesses and the second protrusions, within the unfolded area.

4. The array substrate of claim 2, wherein, The length direction of the bending region is taken as the first direction, and the width direction of the bending region is taken as the second direction; Along the first direction, the first recesses are adjacent to the upper and lower sides of the first protrusion, and the first protrusions are adjacent to the upper and lower sides of the first recess. Along the second direction, the first recess is adjacent to the left and right sides of the first protrusion, and the first protrusion is adjacent to the left and right sides of the first recess.

5. The array substrate according to claim 3, wherein, The length direction of the bending region is taken as the first direction, and the width direction of the bending region is taken as the second direction; Along the first direction, the first recesses are adjacent to the upper and lower sides of the first protrusion, and the first protrusions are adjacent to the upper and lower sides of the first recess. Along the second direction, the first recesses are adjacent to the left and right sides of the first protrusion, and the first protrusions are adjacent to the left and right sides of the first recesses.

6. The array substrate of claim 2, wherein, The length direction of the bending region is taken as the first direction, and the width direction of the bending region is taken as the second direction; Along the second direction, the first recess is adjacent to the left and right sides of the first protrusion, and the first protrusion is adjacent to the left and right sides of the first recess. Along the first direction, the first recess and the first protrusion are adjacent to each other on the upper and lower sides of the first protrusion, and the first protrusion is located between the first recess and the first protrusion. The first recess and the first protrusion are adjacent to each other on the upper and lower sides of the first recess, and the first recess is located between the first recess and the first protrusion.

7. The array substrate according to claim 3, wherein, The length direction of the bending region is taken as the first direction, and the width direction of the bending region is taken as the second direction; Along the second direction, the first recess is adjacent to the left and right sides of the first protrusion, and the first protrusion is adjacent to the left and right sides of the first recess. Along the first direction, the first recess and the first protrusion are adjacent to each other on the upper and lower sides of the first protrusion, and the first protrusion is located between the first recess and the first protrusion. Similarly, the first recess and the first protrusion are adjacent to each other on the upper and lower sides of the first recess, and the first recess is located between the first recess and the first protrusion.

8. The array substrate of claim 2, wherein, The array substrate also includes data lines and scan lines, which are disposed on the flexible substrate and are arranged in a crisscross pattern to divide multiple pixel unit regions. The active switch layer includes a plurality of active switches, each of which corresponds one-to-one with each pixel unit region; the orthographic projection of the first recess on the flexible substrate covers the orthographic projection of the active switch on the flexible substrate.

9. The array substrate of claim 3, wherein, The array substrate also includes data lines and scan lines, which are disposed on the flexible substrate and are arranged in a crisscross pattern to divide multiple pixel unit regions. The active switch layer includes a plurality of active switches, each of which corresponds one-to-one with each pixel unit region; the orthographic projection of the first recess on the flexible substrate covers the orthographic projection of the active switch on the flexible substrate.

10. The array substrate of claim 1, wherein, The spacer layer is made of polyvinyl chloride.

11. The array substrate of claim 1, wherein, The first protrusion has a cross-sectional shape that is a regular trapezoid, the first recess has a cross-sectional shape that is an inverted trapezoid, the second protrusion has a cross-sectional shape that is an inverted trapezoid, and the second recess has a cross-sectional shape that is a regular trapezoid.

12. A method of manufacturing an array substrate, wherein, To prepare an array substrate according to any one of claims 1-11, the array substrate comprising a bent region and an unfolded region, the steps include: An active switching layer is formed on a flexible substrate; A first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, wherein the first recesses and the first protrusions are spaced apart. A spacer layer is formed on at least the first passivation layer in the bending region; A second passivation layer is formed on the spacer layer. A plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer near the first passivation layer corresponding to the bending region. The second recesses and the second protrusions are spaced apart. The first protrusion is located in the second recess and the second protrusion is located in the first recess to form a protective layer. A pixel electrode layer is formed on the protective layer.

13. The method of manufacturing an array substrate according to claim 12, wherein, A first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, wherein the first recesses and the first protrusions are spaced apart. A spacer layer is formed on at least the first passivation layer in the bending region; A second passivation layer is formed on the spacer layer. The second passivation layer corresponding to the bending region has a plurality of second recesses and a plurality of second protrusions on the side closest to the first passivation layer. The second recesses and second protrusions are spaced apart. The first protrusion is located within the second recess, and the second protrusion is located within the first recess. The step of forming a protective layer includes: A first passivation layer is formed on the active switching layer; Multiple first recesses and multiple first protrusions are formed only on the first passivation layer in the bending region, with the first recesses and the first protrusions being spaced apart. Spacer layers are formed only on the first passivation layer within the bending region; A second passivation layer is formed on the spacer layer. A plurality of second recesses and a plurality of second protrusions are formed on the side of the second passivation layer near the first passivation layer corresponding to the bending region. The second recesses and the second protrusions are spaced apart. The first protrusion is located in the second recess and the second protrusion is located in the first recess to form a protective layer. In the protective layer of the unfolded area, the adjacent sides of the first passivation layer and the second passivation layer are flush.

14. The method of manufacturing an array substrate according to claim 12, wherein, A first passivation layer is formed on the active switching layer; and a plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region, wherein the first recesses and the first protrusions are spaced apart. A spacer layer is formed on at least the first passivation layer in the bending region; A second passivation layer is formed on the spacer layer. The second passivation layer corresponding to the bending region has a plurality of second recesses and a plurality of second protrusions on the side closest to the first passivation layer. The second recesses and second protrusions are spaced apart. The first protrusion is located within the second recess, and the second protrusion is located within the first recess. The step of forming a protective layer includes: A first passivation layer is formed on the active switching layer; A plurality of first recesses and a plurality of first protrusions are formed on the first passivation layer in the bending region and the unfolding region, and the first recesses and the first protrusions are spaced apart. A spacer layer is formed on the first passivation layer in the bending region and the unfolded region; A second passivation layer is formed on the spacer layer. The second passivation layer corresponding to the bending region and the unfolded region has a plurality of second recesses and a plurality of second protrusions. The second recesses and the second protrusions are spaced apart. The first protrusion is located in the second recess and the second protrusion is located in the first recess to form a protective layer.

15. A flexible electronic paper display panel, wherein, The flexible electronic paper display panel includes an electronic paper film layer and an array substrate as described in any one of claims 1-11, wherein the electronic paper film layer is attached to the array substrate.

16. The flexible e-paper display panel of claim 15, wherein, The electronic paper film layer includes a particle layer and a common electrode layer. The common electrode layer is located on the side of the particle layer away from the array substrate. An electric field is formed between the common electrode and the pixel electrode layer on the array substrate, driving the electrophoretic particles to move and display the image.

17. The flexible e-paper display panel of claim 16, wherein, The particle layer contains electrophoretic particles and spacers, the spacers forming multiple chambers, and the electrophoretic particles are disposed within the chambers, with each chamber corresponding to a pixel unit region.

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