Ignition circuit and plasma generation device

Abstract

The present application relates to the technical field of radio frequency power supplies. Provided are an ignition circuit and a plasma generation device. The ignition circuit comprises: an input circuit, used for connecting to a radio frequency power supply; an output circuit, used for outputting a first voltage; a switch circuit, separately and electrically connected to the input circuit and the output circuit and used for turning on or off a path between the input circuit and the output circuit; and a control circuit, connected to a controlled end of the switch circuit and used for outputting a corresponding control signal so as to control the switch circuit to be turned on or off.

Description

Ignition circuit and plasma generation device

[0001] This application claims priority to Chinese patent application No. 202411446892.8, filed on October 16, 2024, the entire contents of which are incorporated herein by reference.

[0002] Technical Field

[0003] This application relates to the field of radio frequency power supply technology, and in particular to an ignition circuit and a plasma generating device. Background Technology

[0004] In existing plasma generation devices, the design of the ignition circuit of the radio frequency power supply directly affects the plasma generation efficiency and stability. With the advancement of technology, especially in fields such as semiconductor manufacturing, materials processing, and environmental purification, the requirements for plasma generation devices are increasing, which has prompted continuous optimization and innovation of the radio frequency power supply ignition circuit.

[0005] In existing technologies, although the ignition circuit of radio frequency power supply can basically meet the plasma generation requirements under certain conditions, it still has problems such as low ignition efficiency and high circuit complexity in high frequency and high power applications. Summary of the Invention

[0006] The main objective of this application is to provide an ignition circuit that optimizes the circuit structure to reduce circuit complexity, improve ignition efficiency, and thereby enhance the overall performance of the plasma generation device.

[0007] To achieve the above objectives, this application provides an ignition circuit configured in an RF power supply, the ignition circuit comprising:

[0008] Input circuit, used to connect to RF power supply;

[0009] The output circuit is used to output the first voltage;

[0010] A switching circuit is electrically connected to the input circuit and the output circuit respectively, and is used to turn on or off the path between the input circuit and the output circuit;

[0011] A control circuit, connected to the controlled terminal of the switching circuit, is used to output a corresponding control signal to control the switching circuit to turn on or off.

[0012] In one embodiment, the switching circuit includes:

[0013] A relay, wherein the first conducting terminal of the relay is connected to the input circuit, the second conducting terminal of the relay is electrically connected to the output circuit, and a first controlled terminal of the relay is connected between the first controlled terminal and the second controlled terminal.

[0014] In one embodiment, the relay includes a single-pole relay or a double-pole relay.

[0015] In one embodiment, the output circuit includes:

[0016] A capacitor array circuit, wherein the input terminal of the capacitor array circuit is connected to the output terminal of the switching circuit, and the output terminal of the capacitor array circuit is used to output a first voltage.

[0017] In one embodiment, there are multiple output circuits.

[0018] In one embodiment, the capacitor array circuit includes:

[0019] An output terminal for connecting a load and at least one capacitor;

[0020] The first end of each capacitor is connected to the output terminal, and the second end of each capacitor is electrically connected to the switching circuit.

[0021] In one embodiment, the input circuit includes:

[0022] A first voltage conversion circuit, the output terminal of which is connected to the input terminal of the switching circuit, is used to output a first voltage.

[0023] In one embodiment, the first voltage conversion circuit includes:

[0024] The first transformer has an input terminal for connecting to an RF power supply and an output terminal for outputting a first voltage. The output terminal of the first transformer is connected to the input terminal of the switching circuit.

[0025] In one embodiment, the output circuit includes:

[0026] A second voltage conversion circuit, wherein the input terminal of the second voltage conversion circuit is connected to the output terminal of the switching circuit, and the output terminal of the second voltage conversion circuit is used to output the first voltage;

[0027] A resonant circuit, wherein the input terminal of the resonant circuit is connected to the output terminal of the second voltage conversion circuit, and the output terminal of the resonant circuit is used to connect a load.

[0028] In one embodiment, the second voltage conversion circuit includes:

[0029] The second transformer has its input terminal connected to the output terminal of the switching circuit and its output terminal connected to the input terminal of the resonant circuit. The second transformer is used to output the first voltage.

[0030] In one embodiment, the resonant circuit includes:

[0031] The second diode, the negative terminal of which is connected to the output terminal of the second voltage conversion circuit;

[0032] A first resistor circuit, wherein a first terminal of the first resistor circuit is connected to the positive terminal of the second diode, and a second terminal of the first resistor circuit is used to connect a load.

[0033] At least one first capacitor, the first terminal of each first capacitor is connected to the common node of the first resistor circuit and the second diode, and the second terminal of each first capacitor is grounded;

[0034] At least one second capacitor, the first terminal of each second capacitor is connected to the second terminal of the first resistor circuit, and the second terminal of each second capacitor is grounded.

[0035] In one embodiment, the control circuit includes:

[0036] An operational amplifier circuit is provided, wherein the input terminal of the operational amplifier circuit is used to receive a control signal, the output terminal of the operational amplifier circuit is connected to the controlled terminal of the switching circuit, and the operational amplifier circuit is used to adjust the control signal to a corresponding switching control signal.

[0037] In addition, to achieve the above objectives, this application also provides a plasma generating device, including an annular chamber, an annular iron core, and an ignition circuit as described above;

[0038] The annular iron core has a first end and a second end. The first end of the annular iron core is electrically connected to the ignition circuit, and the second end of the annular iron core is nested in the outer periphery of the annular cavity. The output terminal of the ignition circuit outputs a first voltage to the annular cavity.

[0039] In one embodiment, the ignition circuit includes:

[0040] A third voltage conversion circuit is used to output a second voltage, and the output terminal of the third voltage conversion circuit is connected to the first end of the annular iron core.

[0041] In one embodiment, the ignition circuit includes a first voltage conversion circuit;

[0042] The third voltage conversion circuit and the first voltage conversion circuit are integrated in the same third transformer. The input terminal of the third transformer is used to connect to the radio frequency power supply, the first output terminal of the third transformer is used to output the first voltage, and the second output terminal of the third transformer is used to output the second voltage.

[0043] This embodiment of the application includes an input circuit connected to a radio frequency power supply and an output circuit outputting a first voltage. A switching circuit is then electrically connected to both the input and output circuits to turn the path between them on or off. Finally, a control circuit is connected to the controlled terminal of the switching circuit to output a corresponding control signal to control the switching circuit to turn on or off. This circuit structure is simple and efficient, reducing circuit complexity, improving ignition efficiency, and enhancing plasma generation efficiency and stability. Attached Figure Description

[0044] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0045] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0046] Figure 1 is a structural block diagram of an ignition circuit according to an embodiment of this application;

[0047] Figure 2 is a structural block diagram of an ignition circuit according to another embodiment of this application;

[0048] Figure 3 is a structural block diagram of an ignition circuit according to another embodiment of this application;

[0049] Figure 4 is a structural block diagram of an ignition circuit according to another embodiment of this application;

[0050] Figure 5 is a structural block diagram of an ignition circuit according to another embodiment of this application;

[0051] Figure 6 is a structural block diagram of an ignition circuit according to another embodiment of this application;

[0052] Figure 7 is a first schematic diagram of the ignition circuit of this application;

[0053] Figure 8 is a second schematic diagram of the ignition circuit of this application;

[0054] Figure 9 is a structural block diagram of a plasma generating device according to an embodiment of this application;

[0055] Figure 10 is a schematic diagram of the installation positions of the annular chamber and the annular iron core in Figure 9;

[0056] Figure 11 is a structural block diagram of a plasma generating device according to another embodiment of this application;

[0057] Figure 12 is the third schematic diagram of the RF power supply ignition circuit of this application.

[0058] Explanation of icon numbers:

[0059]

[0060] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Embodiments of the present invention

[0061] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Well-known modules, units, and their connections, links, communications, or operations are not shown or described in detail. Furthermore, the described features, architectures, or functions can be combined in any way in one or more embodiments. Those skilled in the art should understand that the various embodiments described below are only for illustration and not for limiting the scope of protection of this application. It is also readily understood that the modules or units or processing methods in the various embodiments described herein and shown in the accompanying drawings can be combined and designed in various different configurations. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0062] The definitions of various terms or methods used in the following embodiments are, except where logically impossible, generally defined as broad concepts that can be implemented based on the content disclosed in the embodiments. Under this understanding, all specific subordinate limitations of the terms or methods should be considered as part of the invention of this application, and should not be narrowly interpreted or biased simply because the specification does not disclose such a specific limitation. Similarly, provided that it is logically feasible, the order of the steps in the method is flexible and varied, and all specific subordinate limitations in the broad concepts of various terms or methods fall within the scope of protection of this application.

[0063] The main solution of this application embodiment is as follows: an input circuit is provided to connect to an RF power supply, and an output circuit is provided to output a first voltage. A switching circuit is then electrically connected to the input circuit and the output circuit respectively to conduct or cut off the path between the input circuit and the output circuit. Finally, a control circuit is provided to connect to the controlled terminal of the switching circuit to output a corresponding control signal to control the switching circuit to conduct or cut off.

[0064] While existing RF power supply ignition circuits can basically meet the plasma generation requirements under certain conditions, they still suffer from low ignition efficiency and high circuit complexity in high-frequency, high-power applications.

[0065] This application provides a solution that makes the circuit structure simple and efficient, reduces circuit complexity, improves ignition efficiency, and enhances plasma generation efficiency and stability.

[0066] It should be understood that the ignition circuit provided in this embodiment is configured in the radio frequency power supply.

[0067] Referring to Figure 1, in one embodiment of this application, the ignition circuit includes an input circuit 100, an output circuit 200, a switching circuit 300, and a control circuit 400, wherein:

[0068] Input circuit 100 is used to connect to an RF power supply; output circuit 200 is used to output a first voltage; switching circuit 300 is electrically connected to input circuit 100 and output circuit 200 respectively, and switching circuit 300 is used to turn on or off the path between input circuit 100 and output circuit 200; control circuit 400 is connected to the controlled terminal of switching circuit 300, and control circuit 400 is used to output a corresponding control signal to control switching circuit 300 to turn on or off.

[0069] In this embodiment, the switching circuit 300 can employ transistors or other types of switching elements to achieve fast and precise control. The control circuit 400 may include a microcontroller or an application-specific integrated circuit (ASIC) for generating control signals according to a preset ignition strategy. Furthermore, the input circuit 100 and output circuit 200 may include necessary filtering and protection components to ensure stable circuit operation and equipment safety. The input circuit 100 may include one or more filters to reduce noise and interference introduced by the RF power supply. The output circuit 200 may be designed with specific impedance matching characteristics to ensure efficient energy transfer to the plasma load. The preset ignition strategy may be optimized based on specific conditions such as the operating frequency and power requirements of the ignition circuit, as well as the operational requirements of the downstream load. For example, if the downstream load is a plasma generation chamber, the control circuit 400 can dynamically adjust the conduction time, frequency, and voltage level of the switching circuit 300 according to the plasma generation state to achieve optimal ignition performance.

[0070] In this embodiment, the control circuit 400 receives externally or internally generated control signals and outputs precise control signals to the switching circuit 300, enabling the ignition circuit to flexibly control the opening and closing of the path between the input circuit 100 and the output circuit 200, as well as adjust the timing and amplitude of the voltage output, according to actual needs.

[0071] Control signals can originate from various sources, including but not limited to manual user operation, preset programs, and sensor feedback. For example, on an industrial automated production line, control signals may be automatically sent by the production line control system according to the production process to ensure that ignition occurs at the correct time to complete specific processing tasks. In a laboratory environment, however, control signals may be manually input by researchers through a control panel to conduct detailed research and debugging of the ignition process.

[0072] The control circuit 400 can integrate a high-performance microprocessor or logic control unit, which possesses powerful data processing and logical judgment capabilities. These components can analyze the characteristics of the control signal in real time, such as frequency, amplitude, and phase, and output corresponding control signals according to a preset control strategy or algorithm. These control signals, after amplification and driving, directly act on the controlled terminal of the switching circuit 300, achieving precise control of the voltage output.

[0073] The control circuit 400 can be implemented using a main controller, such as an MCU (Micro Controller Unit), a DSP (Digital Signal Processor), an FPGA (Field Programmable Gate Array), or a SOC (System On Chip).

[0074] In this embodiment, the control circuit 400 aims to improve the overall stability and safety of the ignition circuit. The control circuit 400 can integrate multiple sensor interfaces for connecting real-time monitoring sensors for key parameters such as temperature, current, and voltage. These sensors can continuously collect status information of the ignition circuit and its surrounding environment, and feed the collected data back to the control circuit 400 for analysis and processing.

[0075] In one embodiment, referring to Figures 2 and 7, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in Figure 1 above, the switching circuit 300 includes a relay 310, wherein:

[0076] The first conducting terminal of relay 310 is connected to the input circuit 100, the second conducting terminal of relay 310 is electrically connected to the output circuit 200, and a first diode D1 is connected between the first controlled terminal and the second controlled terminal of relay 310.

[0077] In this embodiment, the use of relay 310 enables contactless switching when controlling the voltage output, effectively avoiding the arcing and sparking problems that may occur with traditional mechanical switches, thereby protecting other components in the circuit from damage. Furthermore, the addition of the first diode D1 constitutes a simple protection circuit, providing freewheeling current to the primary coil of relay 310, allowing relay 310 to return to its initial state. This enables precise control of the plasma generation process and efficient energy conversion, providing a stable and reliable plasma source for various industrial applications.

[0078] In one embodiment, as shown in Figures 7 and 8, the relay 310 includes a single-pole relay 310 or a double-pole relay 310.

[0079] In this embodiment, the choice between a single-pole relay 310 and a double-pole relay 310 depends on the specific application requirements. A single-pole relay 310 is typically used for simple on / off control, while a double-pole relay 310 can provide more control options. For example, when a power supply is directly connected to the input of the relay 310, it can simultaneously control both ends of the power supply to be connected or disconnected, thereby achieving more complex control logic.

[0080] In one embodiment, referring to FIG3, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in FIG1 above, the output circuit 200 includes a capacitor array circuit 210, wherein:

[0081] The input terminal of the capacitor array circuit 210 is connected to the output terminal of the switching circuit 300, and the output terminal of the capacitor array circuit 210 is used to output the first voltage.

[0082] In this embodiment, the design of the capacitor array circuit 210 makes the output voltage more stable. Simultaneously, by rationally configuring the capacitor values ​​and quantities, the output voltage ripple can be effectively reduced, improving the stability and efficiency of plasma generation. Furthermore, the use of the capacitor array circuit 210 allows for flexible adjustment of the output voltage magnitude and characteristics according to different application requirements, adapting to various plasma generation environments.

[0083] In one embodiment, referring to FIG4, another embodiment of this application provides an ignition circuit, based on the embodiment shown in FIG3 above, wherein there are multiple output circuits 200.

[0084] In this embodiment, to address the challenges of higher power demands or complex operating environments, multiple independent output circuits 200 are integrated to achieve multi-channel output, thereby improving the system's flexibility and reliability. By providing multiple output circuits 200 to output the first voltage, independent control of each output circuit 200 is possible. The design of multiple output circuits 200 also enables balanced load distribution, preventing system failure due to a single point of failure, thus improving the stability and reliability of the entire ignition circuit. This multi-channel power supply design not only enhances the overall performance of the ignition circuit but also strengthens its ability to cope with different operating conditions. Each independent output circuit 200 is equipped with complete voltage stabilization, filtering, and protection mechanisms to ensure that each ignition position receives a stable and high-quality voltage signal.

[0085] Furthermore, the multi-channel design also brings convenience to maintenance and repair. When one output circuit 200 fails, the other channels can continue to operate, ensuring uninterrupted operation of the ignition circuit. At the same time, since each channel is relatively independent, maintenance personnel can quickly locate and resolve problems, reducing downtime and improving equipment utilization.

[0086] In one embodiment, referring to FIG7, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in FIG3 above, the capacitor array circuit 210 includes an output terminal J1 and at least one capacitor, wherein:

[0087] Output terminal J1 is used to connect to the load; the first end of each capacitor is connected to output terminal J1, and the second end of each capacitor is electrically connected to the switching circuit 300.

[0088] In this embodiment, the introduction of a capacitor brings additional stability and filtering effect to the ignition circuit. During high-frequency AC signal transmission, the capacitor plays a crucial filtering role, effectively suppressing voltage fluctuations and electromagnetic interference to ensure that the output first voltage signal is pure and stable.

[0089] The selection and configuration of capacitors are precisely calculated and optimized based on the operating frequency and power requirements of the RF power supply, as well as the electrical characteristics of the annular chamber 500. By appropriately setting the capacitance value and number of capacitors, the impact on RF signal transmission can be minimized while ensuring voltage stability, achieving high-efficiency voltage conversion and transmission. Furthermore, the output terminal J1 in this embodiment is made of a low-impedance conductive material to ensure that voltage signal loss is minimized during transmission. Simultaneously, the connection between the output terminal J1 and the annular chamber 500 employs a precise contact design to ensure the stability and reliability of the electrical connection.

[0090] In one embodiment, referring to Figures 5 and 12, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in Figure 1 above, the input circuit 100 includes a first voltage conversion circuit 110, wherein:

[0091] The output terminal of the first voltage conversion circuit 110 is connected to the input terminal of the switching circuit 300, and the first voltage conversion circuit 110 is used to output the first voltage.

[0092] In this embodiment, the first voltage conversion circuit 110 can be a tunable AC-AC converter, which can flexibly adjust the amplitude of the output first voltage according to the requirements of the load corresponding to the output terminal. This ensures the optimization of the ignition process and improves energy conversion efficiency and plasma stability.

[0093] In one embodiment, referring to FIG12, another embodiment of this application provides an ignition circuit. Based on the embodiments shown in FIG5 and FIG12 above, the first voltage conversion circuit 110 includes a first transformer T3, wherein:

[0094] The input terminal of the first transformer T3 is used to connect to the radio frequency power supply, the output terminal of the first transformer T3 outputs the first voltage, and the output terminal of the first transformer T3 is connected to the input terminal of the switching circuit 300.

[0095] In this embodiment, the first transformer T3 transforms the input radio frequency power signal through electromagnetic induction to output a first voltage required by the downstream load. A switching circuit 300 is connected to the output of the first transformer T3. This switching circuit 300 acts as a control valve for the voltage output, and its response speed and stability have a significant impact on the ignition process. To ensure the reliable operation of the switching circuit 300, high-performance switching elements can be selected to ensure that the switching circuit 300 maintains a stable and reliable operating state under various working environments, thereby achieving flexible adjustment of the output voltage to meet the ignition requirements of different downstream loads.

[0096] To optimize the performance of the first transformer T3, high-quality core materials and meticulous winding processes are employed. These materials feature low losses and high saturation magnetic induction, effectively reducing energy loss during conversion and improving conversion efficiency. Simultaneously, precise control of the winding process ensures the waveform quality and stability of the output voltage.

[0097] In one embodiment, referring to FIG6, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in FIG1 above, the output circuit 200 includes a second voltage conversion circuit 220 and a resonant circuit 230, wherein:

[0098] The input terminal of the second voltage conversion circuit 220 is connected to the output terminal of the switching circuit 300, and the output terminal of the second voltage conversion circuit 220 is used to output the first voltage; the input terminal of the resonant circuit 230 is connected to the output terminal of the second voltage conversion circuit 220, and the output terminal of the resonant circuit 230 is used to connect the load.

[0099] In this embodiment, the input terminal of the second voltage conversion circuit 220 is closely connected to the output terminal of the switching circuit 300. When the switching circuit 300 is in the closed state, it can be connected to the input circuit 100 to access the radio frequency power supply and convert it into the first voltage. The second voltage conversion circuit 220 can be an AC-AC converter with specific voltage output characteristics. Its selection is related to the ignition requirements of the downstream load. Through precise adjustment and feedback mechanisms of the internal circuitry, the second voltage conversion circuit 220 can output a precisely controlled and stable voltage, which can be preset or dynamically adjusted according to the specific needs of experimental or industrial applications.

[0100] In this embodiment, the RF power supply is first connected to the switching circuit 300, and then to the second voltage conversion circuit 220. Compared with the embodiment shown in Figure 5, where the RF power supply line is connected to the first voltage conversion circuit 110 before being connected to the switching circuit 300, this embodiment connects the switching circuit 300 before the second voltage conversion circuit 220. When the switching circuit 300 is disconnected, the second voltage conversion circuit 220 is completely isolated from the RF power supply. This not only improves circuit safety but also avoids the impact of voltage transients that may occur during switching on the downstream load. Furthermore, this design allows the second voltage conversion circuit 220 to independently and precisely adjust the voltage according to the actual operating state of the downstream load, without needing to indirectly control the RF power supply output through a complex feedback loop, thereby improving the accuracy and response speed of voltage control.

[0101] In one embodiment, referring to FIG8, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in FIG6 above, the second voltage conversion circuit 220 includes a second transformer T4, wherein:

[0102] The input terminal of the second transformer T4 is connected to the output terminal of the switching circuit 300, and the output terminal of the second transformer T4 is connected to the input terminal of the resonant circuit 230. The second transformer T4 is used to output the first voltage.

[0103] In this embodiment, the second transformer T4 differs from a conventional transformer. The second transformer T4 in this embodiment employs a special winding and magnetic circuit design to address the characteristics of high-frequency AC signals from the radio frequency power supply. This design not only reduces energy loss at high frequencies but also improves electromagnetic coupling efficiency, resulting in a significant increase in voltage conversion efficiency.

[0104] The primary winding of the second transformer T4 is tightly wound and can use low-resistivity, high-conductivity copper wire to reduce heat generation and resistance loss under high-frequency current. The secondary winding is finely designed according to the ignition voltage requirements of the downstream load. By adjusting the turns ratio and winding distribution, precise control of the output voltage is achieved.

[0105] In practical applications, by adjusting parameters such as the input voltage (i.e., the output voltage of the switching circuit 300) and the turns ratio of the transformer itself, the voltage value output to the downstream load can be effectively regulated. This regulatory capability allows the ignition circuit to adapt to different types and conditions of ignition requirements, providing a stable and reliable voltage source for the ignition process. Simultaneously, since the second transformer T4 is directly connected to the downstream load, the fluctuation and stability of its output voltage directly affect the ignition effect.

[0106] In one embodiment, referring to FIG8, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in FIG8, the resonant circuit 230 includes a second diode D3, a first resistor circuit 232, at least one first capacitor 231, and at least one second capacitor 233, wherein:

[0107] The negative terminal of the second diode D3 is connected to the output terminal of the second voltage conversion circuit 220; the first terminal of the first resistor circuit 232 is connected to the positive terminal of the second diode D3, and the second terminal of the first resistor circuit 232 is used to connect to the load; the first terminal of each first capacitor 231 is connected to the common node of the first resistor circuit 232 and the second diode D3, and the second terminal of each first capacitor 231 is grounded; the first terminal of each second capacitor 233 is connected to the second terminal of the first resistor circuit 232, and the second terminal of each second capacitor 233 is grounded.

[0108] In this embodiment, the second diode D3 acts as a clamping diode, protecting the subsequent circuitry from excessive voltage surges. When the voltage of the RF power supply connected to the input circuit 100 momentarily exceeds the normal range, the second diode D3 clamps the excess voltage to a safe level, thereby preventing voltage peaks from damaging subsequent circuits. Furthermore, the fast response characteristics of the second diode D3 also help improve the transient protection capability of the entire ignition circuit, enhancing its stability and reliability.

[0109] The first resistor circuit 232 includes at least one resistor, or is composed of two or more resistors connected in series. This first resistor circuit 232 is used to limit the magnitude of the output current. During circuit startup or load changes, the first resistor circuit 232 can effectively suppress sudden current changes, preventing damage to circuit components due to excessive current. Simultaneously, the first resistor circuit 232 also has a voltage dividing function, adjusting the output voltage value to better meet ignition requirements.

[0110] The combination of the first capacitor 231 and the second capacitor 233 forms a more complex filtering network, which better improves the voltage stability and anti-interference capability of the ignition circuit. The first capacitor 231 is connected in parallel between the common node of the second diode D3 and the first resistor circuit 232, mainly used to filter out high-frequency noise and voltage fluctuations, ensuring that the output voltage signal is smooth and stable. The second capacitor 233 is connected in parallel between the first resistor circuit 232 and the common node of the output terminal, mainly used to suppress low-frequency ripple and electromagnetic interference, further improving the purity of the voltage signal, and maintaining a stable output voltage and high energy conversion efficiency under complex and variable operating conditions.

[0111] In one embodiment, referring to FIG7, another embodiment of this application provides an ignition circuit. Based on the embodiment shown in FIG1 above, the control circuit 400 includes an operational amplifier circuit U1, wherein:

[0112] The input terminal of the operational amplifier circuit U1 is used to receive the control signal, and the output terminal of the operational amplifier circuit U1 is connected to the controlled terminal of the switching circuit 300. The operational amplifier circuit U1 is used to adjust the control signal to the corresponding switching control signal.

[0113] In this embodiment, the operational amplifier circuit U1, through its precise amplification and adjustment functions, accurately converts the input control signal into a switching control signal suitable for the switching circuit 300. The operational amplifier circuit U1 not only effectively amplifies weak control signals and enhances their driving capability, but also, through its internal feedback mechanism, finely adjusts the signal to ensure that the output switching control signal has high accuracy and stability.

[0114] The operational amplifier circuit U1 uses a high-precision operational amplifier as its core component. This component has excellent characteristics such as low noise, high common-mode rejection ratio, and low temperature drift, and can maintain stable performance in various complex environments. By properly configuring the peripheral circuits of the operational amplifier circuit U1, such as resistors and capacitors, precise adjustment of parameters such as gain, phase, and frequency of the control signal can be achieved to meet the needs of different application scenarios.

[0115] Furthermore, the operational amplifier circuit U1 possesses a fast response capability, enabling it to react to changes in the control signal within an extremely short time and output corresponding switching control signals. This characteristic is particularly important for the ignition circuit, as the plasma generation process demands extremely high voltage fluctuations and switching speeds; any minute delay or instability can lead to ignition failure.

[0116] In practical applications, the operational amplifier circuit U1 enables precise control of the ignition circuit. When external or internal control signals change, the operational amplifier circuit U1 can quickly capture and process this change, outputting a corresponding switching control signal to the controlled terminal of the switching circuit 300. Upon receiving this signal, the switching circuit 300 quickly switches its operating state, thereby achieving precise control of the voltage output by the output circuit 200.

[0117] Referring to Figure 9, this application also proposes a plasma generating device, which includes an annular chamber 500, an annular iron core 600, and an ignition circuit as described in the above embodiment, wherein:

[0118] The annular iron core 600 has a first end and a second end. The first end of the annular iron core 600 is electrically connected to the ignition circuit, and the second end of the annular iron core 600 is nested around the annular chamber 500. The output terminal of the ignition circuit outputs a first voltage to the annular chamber 500.

[0119] It is worth noting that since the plasma generating device of this application is based on the above-mentioned ignition circuit, the embodiments of the plasma generating device of this application include all the technical solutions of all the embodiments of the above-mentioned ignition circuit, and the technical effects achieved are exactly the same, so they will not be repeated here.

[0120] In this embodiment, the annular core 600 is an auxiliary component that utilizes the principle of electromagnetic induction to enhance the plasma generation process. When the output circuit 200 outputs a first voltage to the annular chamber 500, current flows through the loop formed between the annular chamber 500 and the annular core 600, causing a changing magnetic field to be generated around the annular core 600. This changing magnetic field then induces an induced current within the annular chamber 500. These induced currents, together with the original current, promote the flow of plasma within the annular chamber 500, making plasma generation more rapid and stable.

[0121] As shown in Figure 10, the annular iron core 600 and the annular chamber 500 are connected in a manner similar to two nested key rings, but with a certain gap maintained to ensure electromagnetic induction rather than direct electrical conduction. This design utilizes the principle of non-contact energy transfer, avoiding energy loss and increased circuit complexity that could result from direct contact.

[0122] As shown in Figure 10, the annular chamber 500 is equipped with multiple ignition units IG1, IG2, etc., and the output circuit 200 is electrically connected to the ignition units IG1, IG2, etc., so that the output circuit 200 is electrically connected to the annular chamber 500. The output circuit 200 is not only responsible for providing the necessary voltage to excite the gas molecules in the annular chamber 500, but also for precisely controlling the output and stop of the voltage through the control circuit 400, thereby realizing fine control of the plasma generation process. The output circuit 200 can be connected to an external radio frequency power supply through the input circuit 100 or can generate a radio frequency power supply internally. It provides a first voltage through the on or off of the switching circuit 300. The voltage value of the first voltage provided can be determined according to the type and pressure of the gas in the annular chamber 500 and the desired plasma characteristics, ensuring that the plasma generation process is both efficient and stable.

[0123] In one embodiment, referring to FIG11, this application also provides a plasma generating apparatus. Based on the embodiments shown in FIG9 and FIG10 above, the ignition circuit includes a third voltage conversion circuit 240, wherein:

[0124] The third voltage conversion circuit 240 is used to output the second voltage, and the output terminal of the third voltage conversion circuit 240 is connected to the first end of the annular iron core 600.

[0125] In this embodiment, the third voltage conversion circuit 240 is designed to independently regulate and supply a stable second voltage to the annular core 600. This second voltage, together with the first voltage, acts on the electromagnetic circuit between the annular chamber 500 and the annular core 600, thereby enabling the plasma in the annular chamber 500 to flow. This greatly enhances the activity and uniformity of the plasma, and improves the plasma generation efficiency and stability.

[0126] The third voltage conversion circuit 240 can be an independent DC-AC or AC-AC converter, and its input can be connected to an external DC power supply or a rectified and filtered AC power supply. Through the adjustment and feedback mechanism of the internal circuit, the third voltage conversion circuit 240 can output a precise and stable second voltage. This voltage value can be preset or dynamically adjusted according to experimental requirements to adapt to the plasma generation requirements under different operating conditions.

[0127] In one embodiment, referring to FIG12, this application also provides a plasma generating apparatus. Based on the embodiment shown in FIG11 above, the ignition circuit includes a first voltage conversion circuit 110, wherein:

[0128] The third voltage conversion circuit 240 and the first voltage conversion circuit 110 are integrated in the same third transformer 700. The input terminal of the third transformer 700 is used to connect to the radio frequency power supply, the first output terminal of the third transformer 700 is used to output the first voltage, and the second output terminal of the third transformer 700 is used to output the second voltage.

[0129] In this embodiment, to improve the compactness and efficiency of the circuit design, the third voltage conversion circuit 240 and the first voltage conversion circuit 110 are integrated into the same third transformer 700, simplifying the circuit structure and reducing the number of connection lines between components, thereby reducing energy loss and electromagnetic interference in signal transmission. By rationally arranging the transformer windings, two independent output voltages (i.e., the first voltage and the second voltage) can be efficiently converted within the same transformer, ensuring voltage stability and accuracy.

[0130] The third transformer 700 comprises a primary winding, a first-stage winding, and a second-stage winding. The primary winding is connected to a radio frequency power supply. The first-stage winding outputs a first voltage to ignite ignition positions IG1 and IG2 on the annular chamber 500 shown in Figure 10. The second-stage winding outputs a second voltage. The annular chamber 500, as the equivalent coil portion of the second-stage winding, together with the annular core 600, forms the equivalent structure T2 of the third transformer 700, jointly participating in the construction of the electromagnetic field and energy transfer. This integrated design not only optimizes the circuit layout but also improves the coupling efficiency of the electromagnetic field, making the plasma generation process more efficient and stable.

[0131] It is understandable that the annular chamber 500, as shown in Figure 10, can serve as the equivalent coil of the secondary winding of the third transformer 700, and be electrically connected to the primary winding of the transformer 700 through the annular core 600, thereby generating an induced current in the annular chamber 500 and achieving efficient energy transfer. Alternatively, a secondary winding can be wound on the third transformer 700, and the output terminal of the secondary winding can be electrically connected to the first end of the annular core 600. Then, through electromagnetic induction between the annular core 600 and the annular chamber 500, the power supply is transferred, thus forming a closed current loop.

[0132] In the design of the third transformer 700, the primary winding serves as the energy input terminal, receiving a high-frequency AC signal from the radio frequency power supply. This high-frequency AC signal, through electromagnetic induction within the transformer, excites the first and second primary windings to generate the required first and second voltages, respectively. The first voltage is primarily used to excite gas molecules within the annular chamber 500, forming plasma; while the second voltage acts on the annular iron core 600, guiding the plasma flow by changing its potential or generating an additional electromagnetic field, promoting its uniform distribution and increased activity within the annular chamber 500. Furthermore, after successful ignition, the plasma within the annular chamber 500 requires a continuous power input to maintain its stability, and the second voltage can continuously maintain the stable state of the plasma within the annular chamber 500.

[0133] Furthermore, to improve voltage conversion efficiency and stability, the third transformer 700 can also adopt a multi-layer winding structure. Through precise interlayer insulation and winding layout, leakage flux and energy loss are effectively reduced. At the same time, the use of high-quality core materials and advanced winding technology ensures that the transformer maintains stable operating performance and a long service life even under high-frequency, high-power operating environments.

[0134] In practical applications, the ignition circuit can be flexibly configured and adjusted according to different needs. For example, by adjusting the turns ratio of the third transformer 700 and changing the frequency and power of the input RF power supply, precise control of the first and second voltages can be achieved, thereby meeting the excitation requirements under different gas types, pressures, and plasma characteristics, and realizing precise control of the plasma generation process and efficient energy conversion.

[0135] To better illustrate the inventive concept of this application, the working principle of the ignition circuit of this application will be explained below in conjunction with all the above embodiments:

[0136] The operational amplifier circuit U1 acquires the PWM signal provided by the main controller of the plasma generator and adjusts the PWM signal into a switch control signal for switching the state of the switchable line switching unit. According to the switch control signal, it controls the switch circuit 300 to close or close, so that the first voltage output by the T3 coil of the third transformer 700 is output to the ignition position on the annular chamber 500 through the switch circuit 300 to ionize the gas in the annular chamber 500. At this time, the second voltage output by the T2 coil of the third transformer 700 passes through the annular iron core 600 and, through the principle of electromagnetic inductance, causes the plasma in the annular chamber 500 to flow. The annular chamber 500 serves as the equivalent structure of the T2 coil of the third transformer 700, and the T3 coil of the third transformer 700 is the ignition coil.

[0137] When the power supply outputs power, the ratio of coil T1 to coil T2 of the third transformer 700 is X:Y, where Y≤X. The pipes of the annular chamber 500 are driven by the magnetic excitation signal, causing the gas / plasma inside the pipes of the annular chamber 500 to flow in a directional manner according to the magnetic excitation signal. The ratio of coil T1 to coil T3 of the third transformer 700 is X:Z. In one embodiment, Z≥X. Coil T3 will generate a potential signal sufficient to start the ignition unit IG1 or IG2 as shown in Figure 10 due to electromagnetic induction. The potential signal generated by coil T3 will pass through the switching circuit 300 and then be output to the ignition unit (IG1 / IG2) through the output circuit 200. The ignition unit (IG1 / IG2) will then perform ignition. Conversely, if there is no circuit between the signal output unit and the potential boosting unit, the ignition operation will stop.

[0138] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.

[0139] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0140] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) as described above, and includes several instructions to cause a terminal device (which may be a mobile phone, computer, server, or network device, etc.) to execute the methods of the various embodiments of this application.

[0141] The above are merely embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. An ignition circuit configured in a radio frequency power supply, wherein, The ignition circuit includes: Input circuit, used to connect to RF power supply; The output circuit is used to output the first voltage; A switching circuit is electrically connected to the input circuit and the output circuit respectively, and is used to turn on or off the path between the input circuit and the output circuit; A control circuit, connected to the controlled terminal of the switching circuit, is used to output a corresponding control signal to control the switching circuit to turn on or off.

2. The ignition circuit of claim 1, wherein, The switching circuit includes: A relay, wherein the first conducting terminal of the relay is connected to the input circuit, the second conducting terminal of the relay is electrically connected to the output circuit, and a first controlled terminal of the relay is connected between the first controlled terminal and the second controlled terminal.

3. The ignition circuit of claim 2, wherein, The relay includes a single-pole relay or a double-pole relay.

4. The ignition circuit of claim 1, wherein, The output circuit includes: A capacitor array circuit, wherein the input terminal of the capacitor array circuit is connected to the output terminal of the switching circuit, and the output terminal of the capacitor array circuit is used to output a first voltage.

5. The ignition circuit of claim 4, wherein, There are multiple output circuits.

6. The ignition circuit of claim 4, wherein, The capacitor array circuit includes: An output terminal for connecting a load and at least one capacitor; The first end of each capacitor is connected to the output terminal, and the second end of each capacitor is electrically connected to the switching circuit.

7. The ignition circuit of claim 1, wherein, The input circuit includes: A first voltage conversion circuit, the output terminal of which is connected to the input terminal of the switching circuit, is used to output a first voltage.

8. The ignition circuit of claim 7, wherein, The first voltage conversion circuit includes: The first transformer has an input terminal for connecting to an RF power supply and an output terminal for outputting a first voltage. The output terminal of the first transformer is connected to the input terminal of the switching circuit.

9. The ignition circuit of claim 1, wherein, The output circuit includes: A second voltage conversion circuit, wherein the input terminal of the second voltage conversion circuit is connected to the output terminal of the switching circuit, and the output terminal of the second voltage conversion circuit is used to output the first voltage; A resonant circuit, wherein the input terminal of the resonant circuit is connected to the output terminal of the second voltage conversion circuit, and the output terminal of the resonant circuit is used to connect a load.

10. The ignition circuit of claim 9, wherein, The second voltage conversion circuit includes: The second transformer has its input terminal connected to the output terminal of the switching circuit and its output terminal connected to the input terminal of the resonant circuit. The second transformer is used to output the first voltage.

11. The ignition circuit of claim 9, wherein, The resonant circuit includes: The second diode, the negative terminal of which is connected to the output terminal of the second voltage conversion circuit; A first resistor circuit, wherein a first terminal of the first resistor circuit is connected to the positive terminal of the second diode, and a second terminal of the first resistor circuit is used to connect a load. At least one first capacitor, the first terminal of each first capacitor is connected to the common node of the first resistor circuit and the second diode, and the second terminal of each first capacitor is grounded; At least one second capacitor, the first terminal of each second capacitor is connected to the second terminal of the first resistor circuit, and the second terminal of each second capacitor is grounded.

12. The ignition circuit of any one of claims 1 to 11, wherein, The control circuit includes: An operational amplifier circuit is provided, wherein the input terminal of the operational amplifier circuit is used to receive a control signal, the output terminal of the operational amplifier circuit is connected to the controlled terminal of the switching circuit, and the operational amplifier circuit is used to adjust the control signal to a corresponding switching control signal.

13. A plasma generating device, wherein, The plasma generating device includes an annular chamber, an annular iron core, and an ignition circuit as described in any one of claims 1 to 12; The annular iron core has a first end and a second end. The first end of the annular iron core is electrically connected to the ignition circuit, and the second end of the annular iron core is nested in the outer periphery of the annular cavity. The output terminal of the ignition circuit outputs a first voltage to the annular cavity.

14. The plasma generating device of claim 13, wherein, The ignition circuit includes: A third voltage conversion circuit is used to output a second voltage, and the output terminal of the third voltage conversion circuit is connected to the first end of the annular iron core.

15. The plasma generating device of claim 14, wherein, The ignition circuit includes a first voltage conversion circuit; The third voltage conversion circuit and the first voltage conversion circuit are integrated in the same third transformer. The input terminal of the third transformer is used to connect to the radio frequency power supply, the first output terminal of the third transformer is used to output the first voltage, and the second output terminal of the third transformer is used to output the second voltage.

Images