Waveguide with recess for OPTO-electronic devices and coupled waveguides and method for producing the same

Abstract

An arrangement comprising a. a first waveguide adapted and arranged for the propagation of electromagnetic waves; b. at least one element, wherein, in a cross-sectional cut of the arrangement, the first waveguide and the at least one element are arranged to overlap; wherein the first waveguide comprises a recess that at least partially faces the at least one element, a depth of the recess is less than a height of the first waveguide, the depth of the recess and the height of the first waveguide are measured parallel to a further direction, and the further direction is perpendicular to a first direction.

Description

[0001] WAVEGUIDE WITH RECESS FOR OPTO-ELECTRONIC DEVICES AND COUPLED WAVEGUIDES AND

[0002] METHOD FOR PRODUCING THE SAME

[0003] FIELD OF THE INVENTION

[0004] The invention relates in general to the field of semiconductor devices and assemblies. A particular aspect of the invention is an arrangement comprising a first waveguide and at least one element, wherein, in a cross-sectional cut of the arrangement, the first waveguide and the at least one element are arranged to overlap, and wherein the first waveguide comprises a recess that faces the element. The invention also pertains to a method for producing an arrangement comprising a first waveguide with a recess and the use of an arrangement comprising a first waveguide with a recess.

[0005] BACKGROUND

[0006] In opto-electronic devices, such as photodetectors and modulators, there is typically a coupling between an element (such as a graphene layer) of the opto-electronic device and an electromagnetic wave propagating in a waveguide. This coupling allows said opto-electronic devices to send and / or receive data. The rate at which data can be sent and received is limited by the strength of this coupling. It is often also required to couple electromagnetic waves, propagating in a first waveguide, to a further waveguide. Increasing the strength of this coupling generally requires more energy and / or more complex production methods for the obtaining the opto-electronic devices and the arrangement of the first and further waveguides.

[0007] OBJECTS

[0008] An object of the present invention is to at least partially overcome at least one of the disadvantages encountered in the state of the art.

[0009] It is a further object of the invention to provide an arrangement that is adapted and arranged for the communication of data using optical signals. Examples of said arrangement include an opto-electronic device (e.g., a photodetector, a modulator) and an arrangement adapted and arranged to couple electromagnetic waves from a first waveguide to a further waveguide. Examples of the communication of data include, sending, receiving, and transmitting data.

[0010] It is a further object of the invention to provide an arrangement that allows for a higher bitrate.

[0011] It is a further object of the invention to provide an arrangement that allows for an improved responsivity.

[0012] It is a further object of the invention to provide an arrangement that has a reduced energy consumption.

[0013] It is a further object of the invention to provide an arrangement that has a reduced footprint.

[0014] It is a further object of the invention to provide an arrangement that has an increased extinction ratio.

[0015] It is a further object of the invention to provide an arrangement that has a reduced insertion loss. It is a further object of the invention to provide an arrangement that allows for an increased maximum intensity (e.g., increased coupling) in a further waveguide of said arrangement.

[0016] It is a further object of the invention to provide an arrangement that reduces cross-talk between a first waveguide and a further waveguide of said arrangement.

[0017] It is a further object of the invention to provide an arrangement that allows for an increase in misalignment tolerance between a first waveguide and a further waveguide of said arrangement.

[0018] PREFERRED EMBODIMENTS OF THE INVENTION

[0019] A contribution to at least partially fulfilling at least one of the above-mentioned objects is made by any of the embodiments of the invention.

[0020] A 1stembodiment of the invention is an arrangement comprising a. a first waveguide adapted and arranged for the propagation of electromagnetic waves; b. at least one element, wherein, in a cross-sectional cut of the arrangement, the first waveguide and the at least one element are arranged to overlap.

[0021] In a preferred embodiment of the arrangement, the arrangement is adapted and arranged for a coupling between an electromagnetic wave propagating in the first waveguide and the at least one element. This preferred embodiment of the arrangement is a 2ndembodiment of the invention, that preferably depends on the 1stembodiment of the invention.

[0022] In a preferred embodiment of the arrangement, at least one or all of the following applies: a. the first waveguide has a width that is in the range from 0.1 to 2 pm, preferably from 0.45 to 1.6 pm, and further preferably from 0.75 to 1.1 pm; b. the first waveguide has a height that is in the range from 100 to 800 nm, preferably from 150 to 600 nm, and further preferably from 200 to 400 nm.

[0023] This preferred embodiment of the arrangement is a 3rdembodiment of the invention, that preferably depends on any of the 1stto 2ndembodiments of the invention.

[0024] In an aspect of the 3rdembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b.

[0025] In a preferred embodiment of the arrangement, at least one or all of the following applies to the first waveguide: a. comprises less than 10 wt-%, preferably less than 5 wt- %, more preferably less than 3 wt-%, and further preferably less than 3 wt-% of a metal in elemental form, with the wt-% based on a total weight of the first waveguide; b. comprises less than 10 wt-%, preferably less than 5 wt- %, more preferably less than 3 wt-%, and further preferably less than 3 wt-% of an alloy, with the wt-% based on the total weight of the first waveguide; c. comprises at least one non-metal element, preferably at least one non-metal element selected from the group consisting of oxygen, nitrogen, arsenic, a combination of at least two thereof; d. comprises at least one or all of the following: an oxide, a nitride, a niobate, a phosphide, an arsenide, a titanate, a combination of at least two thereof.

[0026] This preferred embodiment of the arrangement is a 4'1' embodiment of the invention, that preferably depends on any of the 1stto 3rdembodiments of the invention.

[0027] In an aspect of the 4'1' embodiment, all possible combinations of the features a. to d. are preferred aspects of the embodiment. These combinations are e.g., a; b; c; d; a+b; a+c; a+d; b+c; b+d; c+d; a+b+c; a+b+d; a+c+d; b+c+d; a+b+c+d. In a preferred aspect of the 4thembodiment, feature c., the first waveguide comprises at least one or all of the following in an amount of at least 50 wt-% (based on a total weight of the first waveguide): an oxide, a nitride, a niobate, a phosphide, an arsenide, a titanate, a combination of at least two thereof. In a preferred aspect of the 4thembodiment, feature c., the first waveguide comprises at least one or all of the following in an amount of at least 75 wt-% (based on a total weight of the first waveguide): an oxide, a nitride, a niobate, a phosphide, an arsenide, a titanate, a combination of at least two thereof. In a preferred aspect of the 4thembodiment, feature c., the first waveguide comprises at least one or all of the following in an amount of at least 90 wt-% (based on a total weight of the first waveguide): an oxide, a nitride, a niobate, a phosphide, an arsenide, a titanate, a combination of at least two thereof.

[0028] In a preferred embodiment of the arrangement, the first waveguide is adapted and arranged for the propagation of electromagnetic waves that have wavelengths in the range from 300 nm to 3000 nm, preferably from 800 nm to 2100 nm, and more preferably from 1250 nm to 1650 nm. This preferred embodiment of the arrangement is a 51,1embodiment of the invention, that preferably depends on any of the 1stto 4'1' embodiments of the invention.

[0029] In a preferred embodiment of the arrangement, the first waveguide comprises a recess that at least partially faces, preferably faces, the at least one element, wherein a depth of the recess is less than a height of the first waveguide, the depth of the recess and the height of the first waveguide are measured parallel to a further direction, and the further direction is perpendicular to a first direction.

[0030] This preferred embodiment of the arrangement is a 6'1' embodiment of the invention, that preferably depends on any of the 1stto 5thembodiments of the invention.

[0031] In the 6'1' embodiment, the feature “a depth of the recess is less than a height of the first waveguide” should preferably be understood to mean that the recess does not extend through the first waveguide. In a preferred aspect of the 6'1' embodiment, an interface between the first waveguide and the recess is a non-plasmonic interface. In a preferred embodiment of the arrangement, a ratio of a width of the recess to a width of the first waveguide is in the range from 0.020 to 0.700, preferably from 0.045 to 0.500, more preferably from 0.070 to 0.350, and further preferably from 0.085 to 0.240, wherein said widths are measured parallel to the first direction. This preferred embodiment of the arrangement is a 7thembodiment of the invention, that preferably depends on the 6thembodiment of the invention.

[0032] The ratios in the 7thembodiment are obtained by dividing the width of the recess by the width of the first waveguide.

[0033] In a preferred embodiment of the arrangement, a ratio of the depth of the recess to the height of the first waveguide is in the range from 0.05 to 0.58, preferably from 0.13 to 0.46, more preferably from 0.15 to 0.40, and further preferably from 0.20 to 0.35. This preferred embodiment of the arrangement is an 8thembodiment of the invention, that preferably depends on any of the 6thto 7thembodiments of the invention.

[0034] In a preferred embodiment of the arrangement, at least one or all of the following applies: a. a width of the recess is in the range from 20 to 700 nm, preferably from 45 to 500 nm, more preferably from 70 to 350 nm, and further preferably from 85 to 240 nm, with the width measured parallel to the first direction; b. a depth of the recess is in the range from 20 to 200 nm, preferably from 45 to 160 nm, more preferably from 55 to 140 nm, and further preferably from 70 to 120 nm.

[0035] This preferred embodiment of the arrangement is a 9|J 1embodiment of the invention, that preferably depends on any of the 6thto 8thembodiments of the invention.

[0036] In an aspect of the 9'1' embodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b.

[0037] In a preferred embodiment of the arrangement, the recess is adapted and arranged (e.g., dimensioned) such that at least one or all of the following applies when an electromagnetic wave propagates in the first waveguide: a. a first distance is less than a second distance, wherein the first distance is measured between a maximum intensity of a transverse electric (TE) mode of the electromagnetic wave propagating in the first waveguide and an interface between the recess and the first waveguide, the second distance is measured between the maximum intensity of the TE mode and a centre of the first waveguide; b. the first distance is less than a third distance, wherein the first distance is measured between a maximum intensity of the TE mode of the electromagnetic wave propagating in the first waveguide and the interface between the recess and the first waveguide, the third distance is measured between the maximum intensity of the TE mode and a centre of the recess. This preferred embodiment of the arrangement is a I O'1' embodiment of the invention, that preferably depends on any of the 6'1' to 9|J 1embodiments of the invention.

[0038] In an aspect of the 10thembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b. The I O'1' embodiment should preferably be understood to mean that the recess is adapted and arranged such that there is at least one TE mode that has at least one maximum intensity for which feature a. and / or feature b. applies. In a preferred aspect of the I O'1' embodiment, the TE mode is at least one or all of the following: a TEO mode, a TE1 mode. In a preferred aspect of the I O'1' embodiment, the TE mode is selected from the group consisting of a TEO mode, a TE1 mode, or both (i.e., the 10thembodiment applies to both the TEO and the TE1 mode). In the I O'1' embodiment, the first distance is defined as the shortest distance between the maximum intensity of the TE mode and the interface between the recess and the first waveguide. In the I O'1' embodiment, the second distance is defined as the shortest distance between the maximum intensity of the TE mode and the centre of the first waveguide. In the IO'1' embodiment, the third distance is defined as the shortest distance between the maximum intensity of the TE mode and the centre of the recess. Here “shortest distance” should not necessarily be understood to mean a distance that is only measured either parallel to the first direction, the second direction, or the further direction. Rather, the “shortest distance” may have vector components along one or more of the first direction, the second direction, and the further direction.

[0039] In a preferred embodiment of the arrangement,

[0040] A. the recess extends from XRI to XR2, where XRI and XR2are coordinates measured on the first direction, and

[0041] B. the recess is adapted and arranged (e.g., dimensioned) such that when an electromagnetic wave propagates in the first waveguide, the maximum intensity of at least one TE mode of the electromagnetic wave propagating in the first waveguide has an X-coordinate, XI-TE, measured on the first direction, such that XI-TE < XRI and / or XR2< XI-TE.

[0042] This preferred embodiment of the arrangement is an 111,1embodiment of the invention, that preferably depends on any of the 6'1' to I O'1' embodiments of the invention.

[0043] In the 1 11,1embodiment, XRI < XR2. In a preferred aspect of the 11thembodiment, the at least one TE mode includes at least one or all of the following: a TEO mode, a TE1 mode. In a preferred aspect of the 11thembodiment, the at least one TE mode is selected from the group consisting of a TEO mode, a TE1 mode. In the 1 11,1embodiment, the optional feature XI-TE < XRI and XR2< XI-TE should be understood to mean that the at least one TE mode has at least two maximum intensities, wherein XI-TE < XRI holds for at least one of these maximum intensities and XR2< XI-TE also holds for at least one of these maximum intensities (however, it should be noted that XI-TE < XRI and XR2< XRTE do not simultaneously hold for the same maximum intensity). For example, a TE mode has a first maximum intensity and a further maximum intensity, wherein XI-TE < XRI holds for the first maximum intensity and XR2< Xi. TE holds for the second maximum intensity. In a preferred embodiment of the arrangement,

[0044] A. the recess extends from ZRI to ZR2, where ZRI and ZR2are coordinates measured on the further direction, and

[0045] B. the recess is adapted and arranged (e.g., dimensioned) such that when an electromagnetic wave propagates in the first waveguide, the maximum intensity of at least one TE mode of the electromagnetic wave propagating in the first waveguide has a Z-coordinate, ZI-TE, measured on the further direction, such that ZRI < ZI-TE.

[0046] This preferred embodiment of the arrangement is a 12'1' embodiment of the invention, that preferably depends on any of the 6'1' to 1 11,1embodiments of the invention.

[0047] In the 12thembodiment, ZRI < ZR2. In an optional aspect of the 12|J|embodiment, ZJ.TE is in the range from ZRI to ZR2(e.g., ZRi< ZI-TE < ZR2, ZRI < ZI-TE < ZR2, or ZRI < ZI-TE < ZR2). In a preferred aspect of the 12thembodiment, the at least one TE mode includes at least one or all of the following: a TEO mode, a TE1 mode. In a preferred aspect of the 12thembodiment, the at least one TE mode is selected from the group consisting of a TEO mode, a TE1 mode.

[0048] In a preferred embodiment of the arrangement, the recess is adapted and arranged (e.g., dimensioned) such that at least one or all of the following applies when an electromagnetic wave propagates in the first waveguide: a. a fourth distance is less than a fifth distance, wherein the fourth distance is measured between a maximum intensity of a transverse magnetic (TM) mode of the electromagnetic wave propagating in the first waveguide and the interface between the recess and the first waveguide, the fifth distance is measured between the maximum intensity of the TM mode and the centre of the first waveguide; b. the fourth distance is less than a sixth distance, wherein the fourth distance is measured between the maximum intensity of the TM mode of the electromagnetic wave propagating in the first waveguide and the interface between the recess and the first waveguide, the sixth distance is measured between the maximum intensity of the TM mode and the centre of the recess.

[0049] This preferred embodiment of the arrangement is a I 31'1embodiment of the invention, that preferably depends on any of the 6'1' to 12thembodiments of the invention.

[0050] In an aspect of the 13thembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b. The 131,1embodiment should preferably be understood to mean that the recess is adapted and arranged such that there is at least one TM mode that has at least one maximum intensity for which feature a. and / or feature b. applies. In a preferred aspect of the 131,1embodiment, the TM mode is at least one or all of the following: a TMO mode, a TM1 mode. In a preferred aspect of the 131,1embodiment, the TM mode is selected from the group consisting of a TMO mode, a TM1 mode, or both (i.e., the 131,1embodiment applies to both the TMO and the TM1 mode). In the 13thembodiment, the fourth distance is defined as the shortest distance between the maximum intensity of the TM mode and the interface between the recess and the first waveguide. In the 13thembodiment, the fifth distance is defined as the shortest distance between the maximum intensity of the TM mode and the centre of the first waveguide. In the 131,1embodiment, the sixth distance is defined as the shortest distance between the maximum intensity of the TM mode and the centre of the recess. Here “shortest distance” should not necessarily be understood to mean a distance that is only measured either parallel to the first direction, the second direction, or the further direction. Rather, the “shortest distance” may have vector components along one or more of the first direction, the second direction, and the further direction.

[0051] In a preferred embodiment of the arrangement,

[0052] A. the recess extends from XRI to XR2, where XRI and XR2are coordinates measured on the first direction, and

[0053] B. the recess is adapted and arranged (e.g., dimensioned) such that when an electromagnetic wave propagates in the first waveguide, the maximum intensity of at least one TM mode of the electromagnetic wave propagating in the first waveguide has an X-coordinate, XI-TM, measured on the first direction, such that XI-TM < XRI and / or XR2< XI-TM.

[0054] This preferred embodiment of the arrangement is a I41'1embodiment of the invention, that preferably depends on any of the 6'1' to 131,1embodiments of the invention.

[0055] In the 14J|embodiment, XRI < XR2. In a preferred aspect of the 14thembodiment, the at least one TM mode includes at least one or all of the following: a TMO mode, a TM1 mode. In a preferred aspect of the 14'1' embodiment, the at least one TM mode is selected from the group consisting of a TMO mode, a TM1 mode. In the 14|J|embodiment, the optional feature XI-TM < XRI and XR2< XI-T should be understood to mean that the at least one TM mode has at least two maximum intensities, wherein XI-TM < XRI holds for at least one of these maximum intensities and XR2< XI-TM also holds for at least one of these maximum intensities (however, it should be noted that XI-TM < XRI and XR2< XI-TM do not simultaneously hold for the same maximum intensity). For example, a TM mode has a first maximum intensity and a further maximum intensity, wherein XI-TM < XRI holds for the first maximum intensity and XR2< XI-TM holds for the second maximum intensity.

[0056] In a preferred embodiment of the arrangement,

[0057] A. the recess extends from ZRito ZR2, where ZRiand ZR2are coordinates measured on the further direction, and

[0058] B. the recess is adapted and arranged (e.g., dimensioned) such that when an electromagnetic wave propagates in the first waveguide, the maximum intensity of at least one TM mode of the electromagnetic wave propagating in the first waveguide has a Z-coordinate, ZI.TM, measured on the further direction, such that ZRI < ZI-TM.

[0059] This preferred embodiment of the arrangement is a 15* embodiment of the invention, that preferably depends on any of the 6'1' to 14'1' embodiments of the invention.

[0060] In the 15thembodiment, ZRI < ZR2. In an optional aspect of the 15thembodiment, ZI-TM is in the range from ZRI to ZR2(e.g., ZRi< ZI-TM < ZR2, ZRI < ZI-TM < ZR2, or ZRI < ZI-TM < ZR2). In a preferred aspect of the 15thembodiment, the at least one TM mode includes at least one or all of the following: a TMO mode, a TM1 mode. In a preferred aspect of the 15thembodiment, the at least one TM mode is selected from the group consisting of a TMO mode, a TM1 mode.

[0061] In a preferred embodiment of the arrangement, the first waveguide has a first refractive index , the recess has a further refractive index m, and wherein the recess is adapted and arranged (e.g., dimensioned) such that one of the following applies when an electromagnetic wave propagates in the first waveguide: a. < nf and Gi < , where Gi is a group index of a mode propagating in the first waveguide; b. ni > nfand nf< Gi < n, . where Gi is the group index of the mode propagating in the first waveguide.

[0062] This preferred embodiment of the arrangement is a 16* embodiment of the invention, that preferably depends on any of the 6'1' to 151,1embodiments of the invention.

[0063] In a preferred aspect of the 16'1' embodiment, feature b., either of the following applies: m < Gi < or m < Gi < . The 16thembodiment should preferably be understood to mean that the recess is adapted and arranged such that there is at least one mode for which feature a. or feature b. applies. In a preferred aspect of the 16thembodiment, the mode is at least one or all of the following: a TE mode, a TM mode, with a TE mode more preferred than a TM mode. In this aspect, it is preferred that the mode is at least one or all of the following: a TEO mode, a TE1 mode, a TMO mode, and a TM1 mode. In this aspect, it is preferred that the mode is at least one or all of the following: a TEO mode, a TE1 mode. In this aspect, it is preferred that the mode is selected from the group consisting of the following: a TEO mode, a TE1 mode, a TMO mode, and a TM1 mode, at least two thereof. In this aspect, it is preferred that the mode is selected from the group consisting of the following: a TEO mode, a TE1 mode, or both (i.e., the 16thembodiment applies to both the TEO and the TE1 mode).

[0064] In a preferred embodiment of the arrangement, the first waveguide has a first refractive index , the recess has a further refractive index nf, and at least one or all of the following applies: a. ni and nfvary by 23 % or less, preferably 18 % or less, more preferably 12 % or less, even more preferably by 10 % or less, further preferably by 7 % or less, and even further preferably by 5 % or less; b. a difference between and nf is 0.5 or less, preferably 0.3 or less, more preferably 0.2 or less, and further preferably 0.1 or less.

[0065] This preferred embodiment of the arrangement is a 17'1' embodiment of the invention, that preferably depends on any of the 6'1' to 16'1' embodiments of the invention.

[0066] In an aspect of the 17thembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b. In the 17thembodiment, feature a., the variation between and nf is determined as follows: |ni - m| / x 100 %. In a preferred aspect of the 17thembodiment, feature a., and nf vary by a value that is in the range from 1 to 12 %, more preferably from 2 to 10 %, and further preferably from 3 to 7 %. In the 17'1' embodiment, feature b., the difference between and m is determined as follows: | - nf|. In a preferred aspect of the 17thembodiment, feature b., the difference between and nf is at least 0.01, more preferably at least 0.02, and further preferably at least 0.05. In a preferred aspect of the 17|J|embodiment, feature b., the difference between ni and nf is in the range from 0.01 to 0.5, more preferably from 0.02 to 0.3 and further preferably from 0.05 to 0.2.

[0067] In a preferred embodiment of the arrangement, at least one or all of the following applies: a. the recess extends along at least 50 %, preferably at least 75 %, more preferably at least 85 %, and further preferably at least 95 % of a length of the first waveguide; b. a length of the recess varies by less than 20 %, preferably by less than 15 %, more preferably by less than 10 %, and further preferably by less than 5 % from the length of the at least one element.

[0068] This preferred embodiment of the arrangement is an 18* embodiment of the invention, that preferably depends on any of the 6'1' to 17thembodiments of the invention.

[0069] In an aspect of the 18thembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b.

[0070] In a preferred embodiment of the arrangement, the centre of the recess has coordinates (Xci, Zci) and the centre of the first waveguide has coordinates (XC2, ZC2), with X being a coordinate along the first direction and Z being a coordinate along the further direction, and wherein the distance |XCi- XC2| is 300 nm or less, preferably 250 nm or less, and further preferably 200 nm or less. This preferred embodiment of the arrangement is a 19thembodiment of the invention, that preferably depends on any of the 6'1' to 18'1' embodiments of the invention.

[0071] In a preferred embodiment of the arrangement, in a cross-sectional cut of the first waveguide made perpendicular to a length of the first waveguide, a shape of the recess is selected from the group consisting of a square, a rectangle, a triangle, a half-ellipse, a half-circle, a polygon, a trapezoid, a combination of at least two thereof. This preferred embodiment of the arrangement is a 20* embodiment of the invention, that preferably depends on any of the 6thto 19'1' embodiments of the invention.

[0072] In a preferred embodiment of the arrangement, the at least one element is at least one electrically conductive element, wherein the at least one electrically conductive element is preferably adapted and arranged to be electrically charged and / or discharged. This preferred embodiment of the arrangement is a 21stembodiment of the invention, that preferably depends on any of the 1stto 20thembodiments of the invention.

[0073] In a preferred embodiment of the arrangement, an average distance between the first waveguide and the at least one electrically conductive element is 1 pm or less, preferably 500 nm or less, more preferably 100 nm or less, even more preferably 50 nm or less, further preferably 30 nm or less, and even further preferably 15 nm or less. This preferred embodiment of the arrangement is a 22ndembodiment of the invention, that preferably depends on the 21stembodiment of the invention.

[0074] In a preferred aspect of the 22ndembodiment, the average distance between the first waveguide and the at least one electrically conductive element is in the range from 0 to 15 nm, more preferably from 5 to 10 nm. In a preferred aspect of the 22ndembodiment, the average distance between the first waveguide and the at least one electrically conductive element is measured parallel to the further direction. In the 22ndembodiment of the invention, if the arrangement comprises multiple electrically conductive elements, the average distance is determined by measuring the distance between each of the electrically conductive elements and the first waveguide and calculating the average from these measurements.

[0075] In a preferred embodiment of the arrangement, the arrangement is adapted and arranged for modifying at least one property of electromagnetic waves propagating in the first waveguide, more preferably the at least one element is adapted and arranged for at least partially absorbing electromagnetic waves propagating in the first waveguide. This preferred embodiment of the arrangement is a 23rdembodiment of the invention, that preferably depends on any of the 21stto 22ndembodiments of the invention.

[0076] In a preferred embodiment of the arrangement, the at least one electrically conductive element has at least one or all of the following properties: a. comprises at least one or all of the following: carbon, preferably graphene, a nitride, at least one metal, at least one metal alloy, at least one conductive oxide, at least one conductive polymer, at least one chalcogen, a combination of at least two or more thereof; b. has in the range from 1 to 100, preferably from 1 to 50, and more preferably from 1 to 20 atomic layers.

[0077] This preferred embodiment of the arrangement is a 24|J 1embodiment of the invention, that preferably depends on any of the 21stto 23rdembodiments of the invention.

[0078] In an aspect of the 24thembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b. In a preferred aspect of the 24thembodiment, feature b., the at least one electrically conductive element has in the range from 1 to 10, preferably from 1 to 6, and more preferably from 1 to 3 atomic layers.

[0079] In a preferred embodiment of the arrangement, the at least one electrically conductive element has at least one or all of the following properties: a. a width in the range from 10 nm to 40 mm, preferably from 100 nm to 20 mm, and further preferably from 500 nm to 1 mm; b. a length in the range from 100 nm to 400 mm, preferably from 500 nm to 250 mm, and more preferably from 10 mm to 100 mm; c. a thickness in the range from 0.1 to 100 nm, preferably from 0.2 to 50 nm, and more preferably from 0.3 to 10 nm.

[0080] This preferred embodiment of the arrangement is a 25|J|embodiment of the invention, that preferably depends on any of the 21stto 24'1' embodiments of the invention.

[0081] In an aspect of the 25'1' embodiment, all possible combinations of the features a. to c. are preferred aspects of the embodiment. These combinations are e.g., a; b; c; a+b; a+c; b+c; a+b+c. In a preferred aspect of the 25th embodiment, feature c., the at least one electrically conductive element has a thickness in the range from 0.1 to 1 nm, preferably from 0.2 to 0.7 nm, and further preferably from 0.3 to 0.45 nm. In a preferred aspect of the 25thembodiment, feature a., the width is in the range from 10 nm to 40 pm, more preferably from 100 nm to 20 pm, and further preferably from 500 nm to 1 pm. In a preferred aspect of the 25thembodiment, feature b., the length is in the range from 100 nm to 400 pm, more preferably from 500 nm to 250 pm, and further preferably from 10 pm to 100 pm.

[0082] In a preferred embodiment of the arrangement, the at least one electrically conductive element has at least one or all of the following properties: a. an electrical conductivity of at least 104S / m, preferably at least 105S / m, and further preferably at least 106S / m; b. comprise graphene; c. is adapted and arranged to have an optical attenuation coefficient in the range from 2 x IO-4to 0.6 dB / pm, preferably from 2 x IO-2to 0.40 dB / pm, and more preferably from 0.15 to 0.25 dB / pm; d. is adapted and arranged to have a variable optical attenuation coefficient.

[0083] This preferred embodiment of the arrangement is a 2641embodiment of the invention, that preferably depends on any of the 21stto 25'1' embodiments of the invention.

[0084] In an aspect of the 26thembodiment, all possible combinations of the features a. to d. are preferred aspects of the embodiment. These combinations are e.g., a; b; c; d; a+b; a+c; a+d; b+c; b+d; c+d; a+b+c; a+b+d; a+c+d; b+c+d; a+b+c+d.

[0085] In a preferred embodiment of the arrangement, the at least one electrically conductive element is arranged as a layer. This preferred embodiment of the arrangement is a 27|J|embodiment of the invention, that preferably depends on any of the 21stto 26'1' embodiments of the invention.

[0086] In a preferred embodiment of the arrangement, the first waveguide is adapted and arranged to be in optoelectronic interaction with the at least one electrically conductive element. This preferred embodiment of the arrangement is a 28* embodiment of the invention, that preferably depends on any of the 21stto 27'1' embodiments of the invention.

[0087] In a preferred embodiment of the arrangement, the arrangement is an opto-electronic device, preferably an opto-electronic device selected from the group consisting of a photodetector; a modulator; a detector adapted and arranged for the detection of viruses, antibodies, biomarkers, biomolecules, or a combination of at least two thereof. This preferred embodiment of the arrangement is a 29'1' embodiment of the invention, that preferably depends on any of the 1stto 28'1' embodiments of the invention.

[0088] In the 29'1' embodiment a modulator and a photodetector are particularly preferred, with a photodetector more preferred than a modulator. In a preferred embodiment of the arrangement, the at least one element is at least one further waveguide. This preferred embodiment of the arrangement is a 3 O'1' embodiment of the invention, that preferably depends on any of the 1stto 20'1' embodiments of the invention.

[0089] In a preferred embodiment of the arrangement, a distance between the first waveguide and the at least one further waveguide is 2 pm or less, preferably 1.5 pm or less, more preferably 1.0 pm or less, and further preferably 0.5 pm or less. This preferred embodiment of the arrangement is a 31stembodiment of the invention, that preferably depends on the 3 O'1' embodiment of the invention.

[0090] In a preferred aspect of the 31stembodiment, the distance between the first waveguide and the at least one further waveguide is in the range from 0 to 2 pm, more preferably from 0 to 1.5 pm, even more preferably from 0 to 1.0 pm, and further preferably from 0 to 0.5 pm. In a preferred aspect of the 31stembodiment, the distance between the first waveguide and the at least one further waveguide is measured parallel to the further direction. In the 31stembodiment, if the arrangement has more than one further waveguide, the distance is measured between the first waveguide and the further waveguide closest to the first waveguide.

[0091] In a preferred embodiment of the arrangement, the at least one further waveguide comprises a further recess that faces the first waveguide. This preferred embodiment of the arrangement is a 32ndembodiment of the invention, that preferably depends on any of the 3 O'1' to 31stembodiments of the invention.

[0092] In a preferred aspect of the 32ndembodiment, the 6thto 20thpreferred embodiments (and their preferred aspects) are, mutatis mutandis, also preferred embodiments (and preferred aspects) of the at least one further waveguide and / or the further recess. For example, a ratio of the depth of the further recess to the height of the further waveguide is preferably in the range from 0.05 to 0.58, more preferably from 0.13 to 0.46, even more preferably from 0.15 to 0.40, and further preferably from 0.20 to 0.35.

[0093] In a preferred embodiment of the arrangement, the first waveguide has a first refractive index , the at least one further waveguide has a third refractive index n3, and wherein and n3vary by 10 % or less, preferably by 7 % or less, more preferably by 5 % or less, and further preferably by 3 % or less. This preferred embodiment of the arrangement is a 33rdembodiment of the invention, that preferably depends on any of the 30* to 32ndembodiments of the invention.

[0094] In the 33rdembodiment, the variation between and n3is determined as follows: | - n3| / x 100 %.

[0095] In a preferred embodiment of the arrangement, the arrangement further comprises a layer of a first kind, wherein, in a cross-sectional cut of the arrangement, the at least one element is arranged between the first waveguide and the layer of the first kind, wherein i. the first waveguide has a first refractive index iii. ii. the layer of the first kind has a second refractive index n2, and wherein and n2vary by 30 % or less, preferably by 27 % or less, more preferably by 25 % or less, and further preferably by 23 % or less. This preferred embodiment of the arrangement is a 34'1' embodiment of the invention, that preferably depends on any of the 1stto 33rdembodiments of the invention.

[0096] In the 34thembodiment, if the arrangement comprises multiple elements, it is preferred that, in a cross-sectional cut of the arrangement, the multiple elements are arranged between the first waveguide and the layer of the first kind. In a preferred aspect of the 34'1' embodiment, a distance between the at least one element and the layer of the first kind is 30 nm or less, more preferably 20 nm or less, and further preferably 10 nm or less, where said distance is measured parallel to the further direction. In this aspect, if the arrangement comprises multiple elements, the aforementioned distance is measured between the layer of the first kind and the element closest to the layer of the first kind. In a preferred aspect of the 34thembodiment, the at least one element and the layer of the first kind touch. In this aspect, if the arrangement comprises multiple elements, it is preferred that at least one element, of said multiple elements, and the layer of the first kind touch. In the 34thembodiment, the variation between and n2is determined as follows: | - n2| / x 100 %. In a preferred aspect of the 34'1' embodiment, and n2vary by 15 % or less, more preferably by 10 % or less, even more preferably by 7 % or less, further preferably by 5 % or less, and even further preferably by 3 % or less. In a preferred aspect of the 34|J 1embodiment, and n2vary by a value that is in the range from 0 to 2 %. In a preferred aspect of the 34thembodiment, the at least one element is an electrically conductive element, wherein the at least one electrically conductive element preferably has one of more properties as given in any of the 21stto 29thembodiments of the invention. In a preferred aspect of the 34thembodiment, a thickness of the layer of the first kind is equal to or less than a height of the first waveguide.

[0097] In a preferred embodiment of the arrangement, i. the first waveguide comprises a recess that faces the at least one element, ii. a depth of the recess is less than a height of the first waveguide, iii. the depth of the recess and the height of the first waveguide are measured parallel to a further direction, iv. the further direction is perpendicular to a first direction, and v. the recess has a further refractive index nf, wherein

[0098] I. n2< and preferably n2< m, and

[0099] II. wherein the recess is adapted and arranged (e.g., dimensioned) such that one of the following applies when an electromagnetic wave propagates in the first waveguide: a. < m, and a group index Gi of a mode is such that n2< Gi < ; or b. ni > nf, and the group index Gi of the mode is such that n2= xGi, where x is in the range from 1 to 2, preferably from 1.1 to 1.8, and further preferably from 1.2 and 1.6.

[0100] This preferred embodiment of the arrangement is a 351,1embodiment of the invention, that preferably depends on the 34'1' embodiment of the invention.

[0101] The 35'1' embodiment should preferably be understood to mean that the recess is adapted and arranged such that there is at least one mode for which feature Il.a. or feature Il.b. applies. In a preferred aspect of the 35'1' embodiment, the mode is at least one or all of the following: a TE mode, a TM mode, with a TE mode more preferred than a TM mode. In this aspect, it is preferred that the mode is at least one or all of the following: a TEO mode, a TE1 mode, a TMO mode, and a TM1 mode. In this aspect, it is preferred that the mode is at least one or all of the following: a TEO mode, a TE1 mode. In this aspect, it is preferred that the mode is selected from the group consisting of the following: a TEO mode, a TE1 mode, a TMO mode, and a TM1 mode, at least two thereof. In this aspect, it is preferred that the mode is selected from the group consisting of the following: a TEO mode, a TE1 mode, or both (i.e., the 35thembodiment applies to both the TEO and the TE1 mode). In a preferred aspect of the 35'1' embodiment, feature Kb., either of the following applies: m < Gi < or nf< Gi < .

[0102] In a preferred embodiment of the arrangement, the layer of the first kind has a thickness that is in the range from 1 to 60 nm, preferably from 5 to 55 nm, more preferably from 10 to 45 nm, and further preferably from 15 to 40 nm. This preferred embodiment of the arrangement is a 36'1' embodiment of the invention, that preferably depends on any of the 34thto 35'1' embodiments of the invention.

[0103] In an alternatively preferred embodiment to the 36'1' embodiment, the thickness of the layer of the first kind is in the range from 1 to 300 nm, preferably from 2 to 250 nm, more preferably from 5 to 200 nm, and further preferably from 8 to 150 nm.

[0104] In a preferred embodiment of the arrangement, the layer of the first kind comprises at least one oxide, at least one nitride, or both. This preferred embodiment of the arrangement is a 37'1' embodiment of the invention, that preferably depends on any of the 34thto 36thembodiments of the invention.

[0105] In a preferred aspect of the 37thembodiment, the layer of the first kind comprises at least one or all of the following: aluminium oxide, aluminium nitride, silicon nitride, boron nitride (preferably hexagonal boron nitride), a combination of at least two thereof.

[0106] In a preferred embodiment of the arrangement, the arrangement further comprises a layer of a second kind superimposed on the layer of the first kind, wherein, in a cross-sectional cut of the arrangement, the layer of the first kind is arranged between the at least one element and the layer of the second kind, and wherein the layer of the first kind and the layer of the second kind preferably touch. This preferred embodiment of the arrangement is a 38thembodiment of the invention, that preferably depends on any of the 34thto 37'1' embodiments of the invention.

[0107] In a preferred aspect of the 38'1' embodiment, a total thickness of the layer of the first kind and the layer of the second kind is in the range from 30 to 300 nm, more preferably from 40 to 250 nm, even more preferably from 50 to 200 nm, and further preferably from 60 to 150 nm.

[0108] In a preferred embodiment of the arrangement, at least one or all of the following applies: a. a thickness of the layer of the first kind is less than a thickness of the layer of the second kind; b. a total thickness of the layer of the first kind and the layer of the second kind is less than a height of the first waveguide; c. a refractive index of the layer of the first kind is less than a refractive index of the layer of the second kind.

[0109] This preferred embodiment of the arrangement is a 39'1' embodiment of the invention, that preferably depends on the 38* embodiments of the invention.

[0110] In an aspect of the 39'1' embodiment, all possible combinations of the features a. to c. are preferred aspects of the embodiment. These combinations are e.g., a; b; c; a+b; a+c; b+c; a+b+c.

[0111] In a preferred embodiment of the arrangement, at least one or all of the following applies: a. the layer of the first kind comprises at least one oxide, e.g., aluminium oxide; b. the layer of the second kind comprises at least one nitride, e.g., silicon nitride, aluminium nitride. This preferred embodiment of the arrangement is a 40* embodiment of the invention, that preferably depends on any of the 38* to 39'1' embodiments of the invention.

[0112] In an aspect of the 40thembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b. In a preferred aspect of the invention, the layer of the first kind comprises, more preferably consists of, at least one or all of the following: aluminium oxide, silicon nitride.

[0113] In a preferred embodiment of the arrangement, at least one or all of the following applies: a. the layer of the first kind has a thickness in the range from 1 to 60 nm, preferably from 5 to 55 nm, more preferably from 10 to 45 nm, and further preferably from 15 to 40 nm; b. the layer of the second kind has a thickness in the range from 50 to 250 nm, preferably from 60 to 200 nm, more preferably from 70 to 150 nm, and further preferably from 80 to 100 nm.

[0114] This preferred embodiment of the arrangement is a 41stembodiment of the invention, that preferably depends on any of the 38'1' to 40'1' embodiments of the invention.

[0115] In an aspect of the 41stembodiment, all possible combinations of the features a. and b. are preferred aspects of the embodiment. These combinations are e.g., a; b; a+b.

[0116] In a preferred embodiment of the arrangement, the first waveguide has a width that is in the range from 500 to 1000 nm, preferably from 600 to 900 nm, and further preferably from 700 to 800 nm. This preferred embodiment of the arrangement is a 42ndembodiment of the invention, that preferably depends on any of the 34'1' to 41stembodiments of the invention.

[0117] In a particularly preferred aspect of the 42ndembodiment, the at least one element is an electrically conductive element.

[0118] A 43rdembodiment of the invention is an electronic device comprising an arrangement according to the invention, preferably an arrangement according to any of the 1stto 42ndembodiments of the invention. In a preferred embodiment of the electronic device, the arrangement is adapted and arranged for at least one or all of the following: a. transferring data between a first part of an integrated circuit of the electronic device and a further part of said integrated circuit; b. transferring data between a first integrated circuit of the electronic device and a further integrated circuit, wherein the further integrated circuit can be in the same electronic device as the first integrated circuit, or in a different electronic device, preferably the same electronic device; c. to inject an optical vector in an optical network and / or to read out an optical vector from an optical network.

[0119] This preferred embodiment of the electronic device is a 44thembodiment of the invention, that preferably depends on the 43rdembodiment of the invention.

[0120] In a preferred embodiment of the electronic device, the electronic device is selected from the group consisting of a sensor, a chip, a computer, a combination of at least two thereof. This preferred embodiment of the electronic device is a 45|J|embodiment of the invention, that preferably depends on any of the 43rdto 44thembodiments of the invention.

[0121] A 46thembodiment of the invention is a method for producing an arrangement, preferably an arrangement according to any of the 1stto 42ndembodiments of the invention, wherein the method comprises the step of superimposing at least one element and a first waveguide onto each other.

[0122] In a preferred embodiment of the method for producing an arrangement, the at least one element is superimposed on the first waveguide using at least one or all of the following: a. chemical vapour deposition; b. physical vapour deposition; c. exfoliation; d. transferring the at least one element (e.g., an electrically conductive element) from a further substrate; e. spin coating.

[0123] This preferred embodiment of the method is a 47|J 1embodiment of the invention, that preferably depends on the 46thembodiment of the invention.

[0124] In a preferred embodiment of the method for producing an arrangement, prior to superimposing the at least one element and the first waveguide onto each other, the method further comprises the following steps: a. superimposing a first waveguide layer, preferably on a substrate; b. removing at least one section of the first waveguide layer to obtain the first waveguide.

[0125] This preferred embodiment of the method is a 48* embodiment of the invention, that preferably depends on any of the 46|J 1to 47|J 1embodiments of the invention. In a preferred embodiment of the method for producing an arrangement, the first waveguide comprises a recess, and wherein the at least one element and the first waveguide are superimposed onto each other such that the recess faces the at least one element. This preferred embodiment of the method is a 49|J|embodiment of the invention, that preferably depends on any of the 46|J|to 48* embodiments of the invention.

[0126] In a preferred embodiment of the method for producing an arrangement, the method further comprises a step of providing the first waveguide, wherein said step comprises the following sub-steps: a. superimposing a first waveguide layer, preferably on a substrate; b. either i. removing at least one section of the first waveguide layer to obtain the first waveguide; ii. removing a section of the first waveguide to form a recess in the first waveguide; or i. removing a section of the first waveguide layer to form a recess in the first waveguide layer; ii. removing at least one section of the first waveguide layer to obtain the first waveguide. This preferred embodiment of the method is a 50'1' embodiment of the invention, that preferably depends on the 49thembodiment of the invention.

[0127] In a preferred embodiment of the method for producing an arrangement, the method further comprises a step of providing the first waveguide, wherein said step comprises the following sub-steps: a. superimposing a layer of a further kind; b. reducing a thickness of at least one section of the layer of the further kind such that a projection is formed from the layer of the further kind; c. superimposing a first waveguide layer on the projection, thereby forming said first waveguide layer with the recess; d. removing at least one section of the first waveguide layer to obtain the first waveguide.

[0128] This preferred embodiment of the method is a 51stembodiment of the invention, that preferably depends on the 49|J 1embodiment of the invention.

[0129] In a preferred embodiment of the method for producing an arrangement, the method further comprises one of the following steps: a. superimposing a layer of the first kind and the at least one element onto each other, after the first waveguide and the at least one element have been superimposed onto each other; b. superimposing the layer of the first kind and the at least one element onto each other, prior to superimposing the first waveguide and the at least one element onto each other.

[0130] This preferred embodiment of the method is a 52ndembodiment of the invention, that preferably depends on any of the 46'1' to 51stembodiments of the invention. A 53rdembodiment of the invention is an arrangement obtainable by a method, according to the invention, for producing an arrangement, preferably the method according to any of the 46'1' to 52ndembodiments of the invention.

[0131] A 54'1' embodiment of the invention is a use of a recess in a first waveguide to increase a coupling between an electromagnetic wave propagating in the first waveguide and an element arranged at a distance of 1 pm or less, preferably 500 nm or less, more preferably 100 nm or less, even more preferably 50 nm or less, further preferably 30 nm or less, and even further preferably 15 nm or less, from the first waveguide.

[0132] In one preferred aspect of the 54thembodiment, the element is an electrically conductive element. In another preferred aspect of the 54thembodiment, the element is a further waveguide. In the 54|J 1embodiment, the coupling can be, e.g., between the first waveguide and an electrically conductive element (such as a graphene layer), between the first waveguide arranged in a first chip and a further waveguide arranged in a further chip.

[0133] A 55thembodiment of the invention is a use of an arrangement according to the invention, preferably an arrangement according to any of the 1stto 42nd, and 53rdembodiments of the invention, for at least one or all of the following: a. receiving of an optical signal, preferably an optical signal carrying data; b. sending of an optical signal, preferably an optical signal carrying data; c. transporting of an optical signal, preferably an optical signal carrying data; d. coupling an electromagnetic wave propagating in the first waveguide to an element such that an electromagnetic wave propagates in the element.

[0134] In an aspect of the 55thembodiment, all possible combinations of the features a. to d. are preferred aspects of the embodiment. These combinations are e.g., a; b; c; d; a+b; a+c; a+d; b+c; b+d; c+d; a+b+c; a+b+d; a+c+d; b+c+d; a+b+c+d.

[0135] A 56thembodiment of the invention is a use of an arrangement according to the invention, preferably an arrangement according to any of the 1stto 42nd, and 53rdembodiments of the invention, for at least one or all of the following: a. transferring data between a first part of an integrated circuit of an electronic device and a further part of said integrated circuit; b. transferring data between a first integrated circuit of an electronic device and a further integrated circuit, wherein the further integrated circuit can be in the same electronic device as the first integrated circuit, or in a different electronic device, preferably the same electronic device; c. to inject an optical vector in an optical network and / or to read out an optical vector from an optical network.

[0136] In an aspect of the 56'1' embodiment, all possible combinations of the features a. to c. are preferred aspects of the embodiment. These combinations are e.g., a; b; c; a+b; a+c; b+c; a+b+c. A 57|J 1embodiment of the invention is a first assembly 1000 comprising a. a first sub-assembly 1001, wherein the first sub-assembly 1001 comprises i. a first arrangement 1002 according to the invention, wherein the first arrangement 1002 is preferably a modulator; ii. preferably a second arrangement 1003 according to the invention, wherein the second arrangement 1003 is more preferably a photodetector; iii. a first integrated circuit 1004 in electrical connection with the first arrangement 1002, and preferably the second arrangement 1003, if present; iv. preferably a first data storage means 1005 adapted and arranged to be in electrical connection with the first integrated circuit 1004; b. a further sub-assembly 1007, wherein the further sub-assembly 1007 comprises i. a further arrangement 1009 according to the invention, wherein the further arrangement

[0137] 1009

[0138] A. is adapted and arranged to be in optical connection with the first arrangement

[0139] 1002,

[0140] B. is preferably a photodetector; ii. preferably an even-further arrangement 1008 according to the invention, wherein the even-further arrangement 1008 is

[0141] A. adapted and arranged to be in optical connection with the second arrangement

[0142] 1003, if present,

[0143] B. is preferably a modulator; iii. a further integrated circuit 1010 in electrical connection with the further arrangement 1009, and preferably the even-further arrangement 1008, if present; iv. preferably a further data storage means 1011 adapted and arranged to be in electrical connection with the further integrated circuit 1010; c. a first light emitting means 1006, wherein i. the first arrangement 1002 and the first light emitting means 1006 are adapted and arranged to be in optical connection with each other, ii. preferably, the first light emitting means 1006 is arranged in the first sub-assembly 1001; d. preferably a further light emitting means 1012, wherein i. the even-further arrangement 1008, if present, and the further light emitting means 1012 are adapted and arranged to be in optical connection with each other, ii. preferably, the further light emitting means 1012 is arranged in the further sub-assembly 1007; wherein the first sub-assembly 1001 and the further sub-assembly 1007 are adapted and arranged to communicate data between said sub-assemblies via an optical signal, and preferably, wherein at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34thto 42nd, and 53rdembodiments of the invention: the first arrangement, the second arrangement, the further arrangement, the even-further arrangement.

[0144] In a preferred aspect of the 57thembodiment of the invention, the first sub-assembly and the further sub-assembly are adapted and arranged to communicate data between said sub-assemblies via an optical signal, over a distance of at least 1 mm, more preferably at least 2 mm, even more preferably at least 5 mm, and further preferably at least 10 mm. In a preferred aspect of the 57'1' embodiment of the invention, the first sub-assembly and the further subassembly are adapted and arranged to communicate data between said sub-assemblies via an optical signal, over a distance of at least 10 cm, more preferably at least 30 cm, and further preferably at least 50 cm.

[0145] In a preferred embodiment of the first assembly, the first assembly is selected from the group consisting of an assembly adapted and arranged for communication, an assembly adapted and arranged for telecommunication, an assembly adapted and arranged for high-performance computing, an assembly adapted and arranged for artificial intelligence (e.g., machine learning), an assembly adapted and arranged for a data centre, a switch (e.g., a network switch), an optical interconnect, a chip. This preferred embodiment is a 58thembodiment of the invention, that preferably depends on the 57thembodiment of the invention.

[0146] A 59'1' embodiment of the invention is a fifth assembly 2200 comprising a. a first sub-assembly 2201, wherein the first sub-assembly 2201 comprises i. preferably a first arrangement 2202 according to the invention, wherein the first arrangement 2202 is more preferably a modulator; ii. preferably a second arrangement 2203 according to the invention, wherein the second arrangement 2203 is more preferably a photodetector; iii. a first integrated circuit 2204 preferably in electrical connection with the first arrangement 2202, and preferably the second arrangement 2203, if present; iv. preferably a first data storage means 2205 adapted and arranged to be in electrical connection with the first integrated circuit 2204; b. a further sub-assembly 2207, wherein the further sub-assembly 2207 comprises i. preferably a further arrangement 2209 according to the invention, wherein the further arrangement 2209

[0147] A. is adapted and arranged to be in optical connection with the first arrangement

[0148] 2202,

[0149] B. is preferably a photodetector; ii. preferably an even-further arrangement 2208 according to the invention, wherein the even-further arrangement 2208 is

[0150] A. adapted and arranged to be in optical connection with the second arrangement

[0151] 2203, if present,

[0152] B. is preferably a modulator; iii. a further integrated circuit 2210 that is preferably in electrical connection with the further arrangement 2209, and preferably the even-further arrangement 2208, if present; iv. preferably a further data storage means 2211 adapted and arranged to be in electrical connection with the further integrated circuit 2210; c. a third arrangement 2213 according to the invention, preferably an arrangement according to any of the 1stto 5th, 30'1' to 42nd, and 53rdembodiments of the invention, wherein i. the third arrangement 2213 comprises a first waveguide and a further waveguide, ii. preferably the third arrangement 2213 is in optical connection with at least one or all of the following: the first arrangement, the second arrangement, the further arrangement, the even-further arrangement; d. a first light emitting means 2206, wherein i. preferably the third arrangement 2213 and the first light emitting means 2206 are adapted and arranged to be in optical connection with each other, ii. preferably the first arrangement 2202 and the first light emitting means 2206 are adapted and arranged to be in optical connection with each other, iii. preferably, the first light emitting means 2206 is arranged in the first sub-assembly 2201; e. preferably a further light emitting means 2212, wherein i. preferably the third arrangement 2213 and the further light emitting means 2212 are adapted and arranged to be in optical connection with each other ii. preferably the even-further arrangement 2208, if present, and the further light emitting means 2212 are adapted and arranged to be in optical connection with each other, iii. preferably, the further light emitting means 2212 is arranged in the further sub-assembly 2207; wherein the first sub-assembly 2201 and the further sub-assembly 2207 are adapted and arranged to communicate data between said sub-assemblies via an optical signal, and preferably wherein one of the following applies:

[0153] I. the third arrangement 2223 is arranged in the first sub-assembly 2201,

[0154] II. the third arrangement 2223 is arranged in the further sub-assembly 2207,

[0155] III. the first waveguide is arranged in the first sub-assembly 2201 and the further waveguide is arranged in the further sub-assembly 2207, or

[0156] IV. the further waveguide is arranged in the first sub-assembly 2201 and the first waveguide is arranged in the further sub-assembly 2207; and preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29th, 34thto 42nd, and 53rdembodiments of the invention: the first arrangement, the second arrangement, the further arrangement, the even-further arrangement In a preferred aspect of the 59thembodiment of the invention, the first sub-assembly and the further sub-assembly are adapted and arranged to communicate data between said sub-assemblies via an optical signal, over a distance of at least 1 mm, more preferably at least 2 mm, even more preferably at least 5 mm, and further preferably at least 10 mm. In a preferred aspect of the 59'1' embodiment of the invention, the first sub-assembly and the further subassembly are adapted and arranged to communicate data between said sub-assemblies via an optical signal, over a distance of at least 10 cm, more preferably at least 30 cm, and further preferably at least 50 cm.

[0157] In a preferred embodiment of the fifth assembly, the fifth assembly is selected from the group consisting of an assembly adapted and arranged for communication, an assembly adapted and arranged for telecommunication, an assembly adapted and arranged for high-performance computing, an assembly adapted and arranged for artificial intelligence (e.g., machine learning), an assembly adapted and arranged for a data centre, a switch (e.g., a network switch), an optical interconnect, a chip. This preferred embodiment is a 60thembodiment of the invention, that preferably depends on the 59thembodiment of the invention.

[0158] A 61stembodiment of the invention is an optical data communication module 2100 comprising a. a first arrangement 2101 according to the invention, wherein the first arrangement 2101 is preferably a modulator; b. preferably, a light emitting means 2102 adapted and arranged to be in optical connection with the first arrangement 2101; c. preferably a further arrangement 2103 according to the invention, wherein i. the further arrangement 2103 is more preferably a photodetector, ii. preferably is in optical connection with the first arrangement 2101; d. an integrated circuit 2104 in electrical connection with the first arrangement 2101, and preferably in electrical connection with the further arrangement 2103, if present; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0159] A 62ndembodiment of the invention is an optical data communication module 2300 comprising a. a first arrangement 2301 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2301 preferably comprises a first waveguide and a further waveguide; b. preferably a second arrangement according to the invention, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2301; c. preferably a further arrangement according to the invention, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2301; d. preferably a light emitting means 2302 adapted and arranged to be in optical connection with the first arrangement 2301, e. preferably an integrated circuit 2304 in data communication with the first arrangement 2301; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0160] A 63rdembodiment of the invention is an optical sensing module 1100 comprising: a. a first arrangement 1101 according to the invention, wherein i. the first arrangement 1101 is adapted an arranged to modulate first electromagnetic waves directed towards a target area 1102, and ii. preferably, the first arrangement 1101 is a modulator; b. a sensing means 1103 adapted and arranged to detect further electromagnetic waves from the target area 1102, thereby generating an electrical signal, wherein i. the sensing means preferably comprises a further arrangement, and ii. the further arrangement is preferably a photodetector; c. preferably, optics 1104 adapted and arranged to focus the further electromagnetic waves onto the sensing means 1103, and d. preferably, an integrated circuit 1105, wherein the integrated circuit is i. in electrical connection with the first arrangement 1101, ii. preferably in electrical connection with the sensing means 1103, iii. preferably adapted and arranged to process the electrical signal generated by the sensing means 1103; e. preferably, a light emitting means 1106, in optical connection with the first arrangement 1101; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0161] A 641,1embodiment of the invention is an optical sensing module 2400 comprising: a. a first arrangement 2401 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2401 preferably comprises a first waveguide and a further waveguide; b. preferably a second arrangement according to the invention, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2401; c. preferably a further arrangement according to the invention, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2401; d. a sensing means 2403 that is adapted and arranged i. to detect further electromagnetic waves from a target area 2402, thereby generating an electrical signal, and ii. preferably to be in data communication with the first arrangement 2401 ; e. preferably optics 2404 adapted and arranged to focus the further electromagnetic waves onto the sensing means 2403, and f. preferably, an integrated circuit 2405, wherein the integrated circuit is i. preferably in electrical connection with the sensing means 2403, ii. preferably adapted and arranged to process the electrical signal generated by the sensing means 2403; iii. preferably adapted and arranged to be in data communication with the first arrangement 2401 g. preferably a light emitting means 2406 in optical connection with the first arrangement 2401; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29th, 34thto 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0162] A 65thembodiment of the invention is an apparatus 1200 adapted and arranged for a medical application, comprising a. a first arrangement 1201, wherein the first arrangement 1201 is preferably a modulator; b. preferably a further arrangement 1202, wherein the further arrangement 1202 is more preferably a photodetector; c. preferably a first light emitting means 1203 in optical connection with the first arrangement 1201; d. a first integrated circuit 1204 in electrical connection with the first arrangement 1201, and preferably in electrical connection with the further arrangement 1202, if present, e. preferably a sensing unit 1205, wherein the sensing unit 1205 is adapted and arranged to measure at least one physical property of a body, preferably a mammalian body, wherein the sensing unit 1205 i. preferably comprises an optical data communication module according to any of the 61stand 62ndembodiments of the invention, ii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iii. is preferably in data communication, and more preferably in optical connection, with at least one or all of the following: A. the first arrangement 1201, and

[0163] B. the further arrangement 1202, if present; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0164] A 66thembodiment of the invention is an apparatus 2500 adapted and arranged for a medical application, comprising a. a first arrangement 2501 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2501 preferably comprises a first waveguide and a further waveguide; b. preferably a second arrangement, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2501; c. preferably a further arrangement, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2501; d. preferably a first light emitting means 2503, more preferably in optical connection with the first arrangement 2501, and further preferably in optical connection with at least one or all of the following: the second arrangement, the further arrangement; e. a first integrated circuit 2504, more preferably in data communication with the first arrangement 2501; f. preferably a sensing unit 2505, wherein the sensing unit 2505 is adapted and arranged to measure at least one physical property of a body, preferably a mammalian body, wherein the sensing unit 2505 i. preferably comprises an optical data communication module according to any of the 61stand 62ndembodiments of the invention, ii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iii. is preferably in data communication, and more preferably in optical connection, with the first arrangement 2501; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0165] A 67thembodiment of the invention is a vehicle 1300 adapted and arranged for flight, wherein the vehicle 1300 comprises a. a first arrangement 1301 according to the invention, wherein the first arrangement 1301 is preferably a modulator; b. preferably a first light emitting means 1302 adapted and arranged to be in optical connection with the first arrangement 1301; c. preferably a further arrangement 1303, wherein the further arrangement 1303 is preferably a photodetector; d. preferably a first integrated circuit 1304 in electrical connection with the first arrangement 1301, and preferably in electrical connection with the further arrangement 1303, if present; e. preferably a propulsion means 1305; f. preferably a means to generate lift 1306; g. preferably a control system 1307 adapted and arranged to control a movement of the vehicle, h. preferably a sensing unit 1308, wherein the sensing unit 1308 i. is preferably adapted and arranged to provide information about surroundings (e.g., a target area) of the vehicle 1300, more preferably spatial information about surroundings of the vehicle 1300, ii. preferably comprises an optical data communication module according to any of the 61stand 62ndembodiments of the invention, iii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iv. is preferably in data communication, and more preferably in optical connection, with at least one or all of the following:

[0166] A. the first arrangement 1301, and

[0167] B. the further arrangement 1303, if present; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0168] In a preferred embodiment of the vehicle adapted and arranged for flight, said vehicle is selected from the group consisting of an airplane, a helicopter, a drone, a rocket, a satellite, a balloon (e.g., a weather balloon, a hotair balloon) and a missile. This preferred embodiment is a 68thembodiment of the invention, that preferably depends on the 67|J 1embodiment of the invention.

[0169] A 69thembodiment of the invention is a vehicle 2600 adapted and arranged for flight, wherein the vehicle 2600 comprises a. a first arrangement 2601 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2601 preferably comprises a first waveguide and a further waveguide; b. preferably a first light emitting means 2602 that is more preferably adapted and arranged to be in optical connection with the first arrangement 2601; c. preferably a second arrangement, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2601; d. preferably a further arrangement, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2601; e. preferably a first integrated circuit 2604 that is more preferably in data communication with the first arrangement 2601; f. preferably a propulsion means 2605; g. preferably a means to generate lift 2606; h. preferably a control system 2607 adapted and arranged to control a movement of the vehicle, i. preferably a sensing unit 2608, wherein the sensing unit 2608 i. is preferably adapted and arranged to provide information about surroundings (e.g., a target area) of the vehicle 2600, more preferably spatial information about surroundings of the vehicle 2600, ii. preferably comprises an optical data communication module according to any of the 61stand 62ndembodiments of the invention, iii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iv. is preferably in data communication, and more preferably in optical connection, the first arrangement 2601; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0170] In a preferred embodiment of the vehicle adapted and arranged for flight, said vehicle is selected from the group consisting of an airplane, a helicopter, a drone, a rocket, a satellite, a balloon (e.g., a weather balloon, a hotair balloon) and a missile. This preferred embodiment is a 70thembodiment of the invention, that preferably depends on the 69'1' embodiment of the invention.

[0171] A 71stembodiment of the invention is a robotic system 1400, comprising: a. a first arrangement 1401 according to the invention, wherein the first arrangement 1401 is preferably a modulator; b. preferably a first light emitting means 1402 in optical connection with the first arrangement 1401; c. preferably a further arrangement 1403, wherein more preferably the further arrangement 1403 is a photodetector; d. preferably a first integrated circuit 1404 in electrical connection with the first arrangement 1401, and preferably the further arrangement 1403, if present. e. a robotic body 1405 adapted and arranged for movement, wherein the robotic body 1405 preferably comprises the first arrangement 1401 and / or the further arrangement 1403, if present; f. a sensing unit 1406, wherein the sensing unit 1406 i. is preferably adapted and arranged to provide spatial information about surroundings (e.g., the target area) of the robotic body 1405, ii. preferably comprises an optical data communication module according to any of the 61stand 62ndembodiments of the invention, iii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iv. is preferably in data communication with at least one or all of the following: the first arrangement 1401, the further arrangement 1403, if present; g. a control module 1407 adapted and arranged to control a movement of the robotic body 1405, preferably based on the spatial information provided by the sensing unit 1406, wherein the control module 1407 is preferably in data communication, and more preferably optical connection, with at least one or all of the following: i. the first arrangement 1401, ii. the further arrangement 1403, iii. the first integrated circuit 1404; h. preferably, an external entity 1408 in data communication with the robotic body 1405; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0172] A 72ndembodiment of the invention is a robotic system 2700, comprising: a. a first arrangement 2701 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2701 preferably comprises a first waveguide and a further waveguide; b. preferably a first light emitting means 2702 in optical connection with the first arrangement 2701; c. preferably a second arrangement, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2701; d. preferably a further arrangement, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2701; e. preferably a first integrated circuit 2704, more preferably in data communication with the first arrangement 2701; f. a robotic body 2705 adapted and arranged for movement, wherein the robotic body 2705 preferably comprises the first arrangement 2701, and more preferably at least one or all of the following: the second arrangement, the further arrangement; g. a sensing unit 2706, wherein the sensing unit 2706 i. is preferably adapted and arranged to provide spatial information about surroundings (e.g., the target area) of the robotic body 2705, ii. preferably comprises an optical data communication module according to any of the 61stand 62ndembodiments of the invention, iii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iv. is preferably in data communication with the first arrangement 2701; h. a control module 2707 adapted and arranged to control a movement of the robotic body 2705, preferably based on the spatial information provided by the sensing unit 2706, wherein the control module 2707 is preferably in data communication, and more preferably optical connection, with at least one or all of the following: i . the first arrangement 2701, ii. the first integrated circuit 2704; i. preferably, an external entity 2708 in data communication with the robotic body 2705; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0173] A 73rdembodiment of the invention is a second assembly 1500, comprising: a. one or more memory units 1501, preferably one or more optical memory units, adapted and arranged to store instructions and / or data; b. one or more processors 1502, preferably one or more optical processors, that are adapted and arranged i. to be in data communication, and preferably in optical connection, with the one or more memory units 1501, ii. to execute the instructions stored in the one or more memory units 1501 and / or to perform operations using optical signals, c. preferably, a data communication module 1503, more preferably an optical data communication module according to any of the 61stand 62ndembodiments of the invention, wherein the data communication module 1503 is adapted and arranged for the communication of data, more preferably optical data, between at least one or all of the following: i. at least one of the one or more memory units 1501 and at least one of the one or more processors 1502, ii. between at least two of the memory units 1501, iii. between at least two of the processors 1502; d. at least one arrangement 1504 according to the invention, preferably according to any of the 1stto 42nd, and 53rdembodiments of the invention, wherein the at least one arrangement 1504 is preferably arranged in at least one or all of the following: the at least one memory unit 1501, the at least one processer 1502, the data communication module 1503.

[0174] In a preferred aspect of the 73rdembodiment, the “at least one arrangement” includes at least one arrangement according to any of the 1stto 29th, 34|J|to 42nd, and 53rdembodiments of the invention. In another preferred aspect of the 73rdembodiment, the “at least one arrangement” includes at least one arrangement according to any of the 1stto 5'1'. 30'1' to 42nd, and 53rdembodiments of the invention. For example, in the 73rdembodiment, the at least one arrangement may include at least one or all of the following: a modulator according to the invention, a photodetector according to the invention, an arrangement according to the invention that comprises a first waveguide and a further waveguide.

[0175] A 74'1' embodiment of the invention is a third assembly 1600 comprising: a. a homomorphic operation module 1601 that is adapted and arranged for performing homomorphic operations on encrypted optical data to obtain modified encrypted optical data, b. preferably, a photonic encryption module 1602, wherein the photonic encryption module 1602 i. is in optical connection with the homomorphic operation module 1601, ii. is adapted and arranged for encrypting optical data, preferably using an optical encoding scheme, to obtain the encrypted optical data; c. preferably, a photonic decryption module 1603, wherein the photonic decryption module i. is in optical connection with the homomorphic operation module 1601, the photonic encryption module 1602, or both, ii. is adapted and arranged for decrypting the modified encrypted optical data, preferably using an optical decoding scheme; d. at least one arrangement 1604 according to the invention, preferably according to any of the 1stto 42nd, and 53rdembodiments of the invention, wherein the at least one arrangement 1604 is preferably arranged in at least one or all of the following: the homomorphic operation module 1601, the photonic encryption module 1602, the photonic decryption module 1603; e. preferably, at least one light emitting means 1606 that is in optical connection with at least one or all of the following; i. the homomorphic operation module 1601, ii. the photonic encryption module 1602, iii. the photonic decryption module 1603.

[0176] In a preferred aspect of the 74|J|embodiment, the “at least one arrangement” includes at least one arrangement according to any of the 1stto 29th, 34|J|to 42nd, and 53rdembodiments of the invention. In another preferred aspect of the 74thembodiment, the “at least one arrangement” includes at least one arrangement according to any of the 1stto 5'1'. 30'1' to 42nd, and 53rdembodiments of the invention. For example, in the 74'1' embodiment, the at least one arrangement may include at least one or all of the following: a modulator according to the invention, a photodetector according to the invention, an arrangement according to the invention that comprises a first waveguide and a further waveguide. A 75'1' embodiment of the invention is an optical connection module 1700, comprising: a. a first arrangement 1701 according to the invention, wherein the first arrangement 1701 is preferably a modulator; b. preferably a further arrangement 1702 in optical connection with the first arrangement 1701, wherein the further arrangement 1702 is preferably a photodetector; c. preferably at least one waveguide 1703 in optical connection with the first arrangement 1701, the further arrangement 1702, if present, or both; d. preferably a light emitting means 1704 in optical connection with the first arrangement 1701; e. preferably at least one integrated circuit 1705 in electrical connection with the first arrangement 1701, the further arrangement 1702, if present, or both; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0177] In a preferred embodiment of the optical connection module, the optical connection module is selected from the group consisting of an optical interconnect, an optical transmitter, an optical receiver, an optical transceiver, and an optical switch. This preferred embodiment is a 76|J|embodiment of the invention, that preferably depends on the 751,1embodiment of the invention.

[0178] A 77|J|embodiment of the invention is an optical connection module 2800, comprising: a. a first arrangement 2801 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2801 preferably comprises a first waveguide and a further waveguide; b. preferably a light emitting means 2804 in optical connection with the first arrangement 2801; c. preferably at least one integrated circuit 2805 in data communication with the first arrangement 2801; d. preferably a second arrangement, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2801; e. preferably a further arrangement, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2801; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0179] In a preferred embodiment of the optical connection module, the optical connection module is selected from the group consisting of an optical interconnect, an optical transmitter, an optical receiver, an optical transceiver, and an optical switch. This preferred embodiment is a 78* embodiment of the invention, that preferably depends on the 77'1' embodiment of the invention.

[0180] A 79thembodiment of the invention is a first transportation means 1800, preferably adapted and arranged for autonomous travel, comprising: a. a first arrangement 1801 according to the invention, wherein the first arrangement 1801 is preferably a modulator; b. preferably a first light emitting 1812 means adapted and arranged to be in optical connection with the first arrangement 1801; c. preferably a further arrangement 1802, wherein the further arrangement 1802 is preferably a photodetector; d. preferably a first integrated circuit 1811 in electrical connection with the first arrangement 1801, the further arrangement 1802, if present, or both; e. a sensing unit 1803, wherein the sensing unit 1803 i. is preferably adapted and arranged to provide spatial information about surroundings (e.g., a target area) of the first transportation means 1800, ii. preferably comprises a data communication module, more preferably an optical data communication module according to any of the 61stand 62ndembodiments of the invention, iii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iv. is preferably in data communication, and more preferably in optical connection, with at least one or all of the following:

[0181] A. the first arrangement 1801, and

[0182] B. the further arrangement 1802, if present; f. a processing module 1804 that i. comprises a perception sub-module 1805 adapted and arranged to analyse and / or process the spatial information from the sensing unit 1803 to provide perception data on a presence and / or a classification of patterns and / or items in the target area, ii. comprises a generation sub-module 1806 adapted and arranged to process the perception data, and to preferably generate a recommendation, a control instruction, or both; i. is preferably in data communication, and more preferably in optical connection, with at least one or all of the following:

[0183] A. the first arrangement 1801, and

[0184] B. the further arrangement 1802, if present; g. preferably a human-machine interface 1807 adapted and arranged to provide feedback to a user based on the recommendation, the control instruction, or both; h. preferably a control unit 1808 adapted and arranged to execute the recommendation, the control instruction, or both; i. a steering means 1809 adapted and arranged to steer the first transportation means 1800, wherein the control unit 1808 is preferably adapted and arranged to control the steering means; j. a propulsion means 1810 adapted and arranged to provide propulsion to the first transportation means 1800, wherein the control unit 1808 is preferably adapted and arranged to control the propulsion means 1810; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0185] An 80* embodiment of the invention is a first transportation means 2900, preferably adapted and arranged for autonomous travel, comprising: a. a first arrangement 2901 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 2901 preferably comprises a first waveguide and a further waveguide; b. preferably a second arrangement, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 2901; c. preferably a further arrangement, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 2901; d. preferably a first light emitting 2912 means adapted and arranged to be in optical connection with the first arrangement 2901; e. preferably a first integrated circuit 2911 in data communication with the first arrangement 2901; f. a sensing unit 2903, wherein the sensing unit 2903 i. is preferably adapted and arranged to provide spatial information about surroundings (e.g., a target area) of the first transportation means 2900, ii. preferably comprises a data communication module, more preferably an optical data communication module according to any of the 61stand 62ndembodiments of the invention, iii. preferably comprises an optical sensing module according to any of the 63rdand 64thembodiments of the invention, iv. is preferably in data communication with the first arrangement 2901; g. a processing module 2904 that i. comprises a perception sub-module 2905 adapted and arranged to analyse and / or process the spatial information from the sensing unit 2903 to provide perception data on a presence and / or a classification of patterns and / or items in the target area, ii. comprises a generation sub-module 2906 adapted and arranged to process the perception data, and to preferably generate a recommendation, a control instruction, or both; iii. is preferably in data communication, and more preferably in optical connection, the first arrangement 2901; h. preferably a human-machine interface 2907 adapted and arranged to provide feedback to a user based on the recommendation, the control instruction, or both; i. preferably a control unit 2908 adapted and arranged to execute the recommendation, the control instruction, or both; j. a steering means 2909 adapted and arranged to steer the first transportation means 2900, wherein the control unit 2908 is preferably adapted and arranged to control the steering means; k. a propulsion means 2910 adapted and arranged to provide propulsion to the first transportation means 2900, wherein the control unit 2908 is preferably adapted and arranged to control the propulsion means 2910; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0186] An 81stembodiment of the invention is a further transportation means 1900 comprising: a. a first arrangement 1901 according to the invention, wherein the first arrangement 1901 is preferably a modulator; b. preferably a further arrangement 1902, more preferably in optical connection with the first arrangement 1901, wherein the further arrangement 1902 is preferably a photodetector; c. a steering means 1903 adapted and arranged to steer the further transportation means 1900; d. a propulsion means 1904 adapted and arranged to provide propulsion to the further transportation means 1900; wherein preferably at least one or all of the following is an arrangement according to any of the 1stto 29'1'. 34* to 42nd, and 53rdembodiments of the invention: the first arrangement, the further arrangement.

[0187] An 82ndembodiment of the invention is a further transportation means 3000 comprising: a. a first arrangement 3001 according to the invention, preferably an arrangement according to any of the 1stto 5'1'. 30thto 42nd, and 53rdembodiments of the invention, wherein the first arrangement 3001 preferably comprises a first waveguide and a further waveguide; b. preferably a second arrangement, wherein the second arrangement is more preferably a modulator, and is further preferably in optical connection with the first arrangement 3001; c. preferably a further arrangement, wherein the further arrangement is more preferably a photodetector, and is further preferably in optical connection with the first arrangement 3001; d. a steering means 3003 adapted and arranged to steer the further transportation means 3000; e. a propulsion means 3004 adapted and arranged to provide propulsion to the further transportation means 3000; wherein preferably at least one or all of the following, if present, is an arrangement according to any of the 1stto 29'1'. 34'1' to 42nd, and 53rdembodiments of the invention: the second arrangement, the further arrangement.

[0188] An 83rdembodiment of the invention is a fourth assembly 2000, comprising: a. one or more memory units 2001 adapted and arranged to store instructions and / or data; b. one or more processors 2002 that are adapted and arranged i. to be in data communication with the one or more memory units 2001, ii. to execute the instructions stored in the one or more memory units 2001 and / or to perform operations; c. at least one arrangement 2003 according to the invention, preferably according to any of the 1stto 42nd, and 53rdembodiments of the invention, wherein the fourth assembly is preferably adapted and arranged for at least one or all of the following: artificial intelligence, machine learning, graphics rendering, large-scale visualisation, gaming, high-frequency trading, video streaming, audio recognition, image recognition, object recognition, virtual reality, molecular simulation, scientific simulations (e.g., the modelling of weather patterns and / or climate, the modelling of star formation), the solving of equations, data mining, cloud-based applications.

[0189] In a preferred aspect of the 83rdembodiment, the “at least one arrangement” includes at least one arrangement according to any of the 1stto 29th, 34|J|to 42nd, and 53rdembodiments of the invention. In another preferred aspect of the 83rdembodiment, the “at least one arrangement” includes at least one arrangement according to any of the 1stto 5'1'. 30'1' to 42nd, and 53rdembodiments of the invention. For example, in the 83rdembodiment, the at least one arrangement may include at least one or all of the following: a modulator according to the invention, a photodetector according to the invention, an arrangement according to the invention that comprises a first waveguide and a further waveguide.

[0190] An 841,1embodiment of the invention is a use of the first assembly according to the invention, preferably according to any of the 57thto 58thembodiments of the invention, for at least one or all of the following: communication, telecommunication, high-performance computing, for use in a data centre, a switch (e.g., a network switch), an optical interconnect, a chip.

[0191] An 851,1embodiment of the invention is a use of the first assembly according to the invention, preferably according to any of the 57thto 58'1' embodiments of the invention, in at least one or all of the following: artificial intelligence applications and / or machine learning applications, an apparatus adapted and arranged for a medical application, a vehicle adapted and arranged for flight, a robotic system, an assembly adapted and arranged for optical computing, a homomorphic operation module, a photonic encryption module, photonic decryption module, an optical connection module, a transportation means.

[0192] An 86thembodiment of the invention is a use of the fifth assembly according to the invention, preferably according to any of the 59thto 60thembodiments of the invention, for at least one or all of the following: communication, telecommunication, high-performance computing, for use in a data centre, a switch (e.g., a network switch), an optical interconnect, a chip.

[0193] An 87thembodiment of the invention is a use of the fifth assembly according to the invention, preferably according to any of the 59thto 60* embodiments of the invention, in at least one or all of the following: artificial intelligence applications and / or machine learning applications, an apparatus adapted and arranged for a medical application, a vehicle adapted and arranged for flight, a robotic system, an assembly adapted and arranged for optical computing, a homomorphic operation module, a photonic encryption module, photonic decryption module, an optical connection module, a transportation means.

[0194] A 88'1' embodiment of the invention is a use of a fourth assembly according to the invention, preferably according to the 83rdembodiment of the invention, for at least one or all of the following: artificial intelligence, machine learning, graphics rendering, large-scale visualisation, gaming, high-frequency trading, video streaming, audio recognition, image recognition, object recognition, virtual reality, molecular simulation, scientific simulations (e.g., the modelling of weather patterns and / or climate, the modelling of star formation), the solving of equations, data mining, cloud-based applications.

[0195] An 89thembodiment of the invention is a use of an arrangement according to the invention, preferably the arrangement according to any of the 1stto 42nd, and 53rdembodiments of the invention, for at least one or all of the following: a. communication, preferably in an assembly adapted and arranged for communication; b. telecommunication, preferably in an assembly adapted and arranged for telecommunication; c. high-performance computing, preferably in an assembly adapted and arranged for high performance computing; d. a data centre; e. a switch; f. an optical interconnect; g. a computer chip; h. a vehicle adapted and arranged for flight; i. an apparatus adapted and arranged for a medical application; j. a module adapted and arranged for optical sensing; k. a module adapted and arranged for optical data communication; l. a robotic system; m. optical computing, preferably an assembly adapted and arranged for optical computing; n. at least one or all of a homomorphic operation module, a photonic encryption module, photonic decryption module; o. an optical connection module; p. a transportation means; q. an assembly adapted and arranged for artificial intelligence and / or machine learning.

[0196] In the 89* embodiment of the invention, all possible combinations of the features a. to q. are preferred aspects of the invention.

[0197] A 90* embodiment of the invention is a use of an arrangement according to the invention, preferably the arrangement according to any of the 1stto 42nd, and 53rdembodiments of the invention, for at least one or all of the following: a. an apparatus adapted and arranged for consumer applications; b. an apparatus adapted and arranged for laser and / or light detection and ranging; c. an apparatus adapted and arranged for optical spectroscopy; d. a system adapted and arranged for high performance computing, preferably for memory intensive applications, big data, or search engines; e. an apparatus adapted and arranged for virtual reality, augmented reality, gaming; f. an apparatus adapted and arranged for streaming and / or video broadcasting; g. a system adapted and arranged for trading, brokerage, and / or financing; h. a system adapted and arranged for wireless communication; i. an apparatus adapted and arranged for biometric searches, personal data management, or patient data management; j. an apparatus adapted and arranged for climate prediction, weather forecast, and / or scientific simulations (e.g., the modelling of star formation); k. an apparatus adapted and arranged for molecular simulation, drug discovery, and / or gene sequencing; and l. an apparatus adapted and arranged for an enterprise cloud.

[0198] In the 90* embodiment of the invention, all possible combinations of the features a. to 1. are preferred aspects of the invention.

[0199] A 91stembodiment of the invention is an item comprising an arrangement according to the invention, preferably the arrangement according to any of the 1stto 42nd, and 53rdembodiments of the invention, wherein the item is selected from a group consisting of: a. an assembly adapted and arranged for communication; b. an assembly adapted and arranged for telecommunication; c. an assembly adapted and arranged for high performance computing; d. a data centre; e. a switch; f. an optical interconnect; g. a computer chip; h. a vehicle adapted and arranged for flight; i. an apparatus adapted and arranged for a medical application; j. a module adapted and arranged for optical sensing; k. a module adapted and arranged for optical data communication; l. a robotic system; m. an assembly adapted and arranged for optical computing; n. at least one or all of a homomorphic operation module, a photonic encryption module, photonic decryption module; o. an optical connection module; p. a transportation means; q. an assembly adapted and arranged for artificial intelligence and / or machine learning.

[0200] In the 91stembodiment of the invention, all possible combinations of the features a. to q. are preferred aspects of the invention.

[0201] A 92ndembodiment of the invention is an item comprising an arrangement according to the invention, preferably the arrangement according to any of the 1stto 42nd, and 53rdembodiments of the invention, wherein the item is selected from a group consisting of: a. an apparatus adapted and arranged for consumer applications; b. an apparatus adapted and arranged for laser and / or light detection and ranging; c. an apparatus adapted and arranged for optical spectroscopy; d. a system adapted and arranged for high performance computing, preferably for memory intensive applications, big data, or search engines; e. an apparatus adapted and arranged for virtual reality, augmented reality, gaming; f. an apparatus adapted and arranged for streaming and / or video broadcasting; g. a system adapted and arranged for trading, brokerage, and / or financing; h. a system adapted and arranged for wireless communication; i. an apparatus adapted and arranged for biometric searches, personal data management, or patient data management; j. an apparatus adapted and arranged for climate prediction, weather forecast, and / or scientific simulations (e.g., the modelling of star formation); k. an apparatus adapted and arranged for molecular simulation, drug discovery, and / or gene sequencing; and l. an apparatus adapted and arranged for an enterprise cloud.

[0202] In the 92ndembodiment of the invention, all possible combinations of the features a. to 1. are preferred aspects of the invention. DETAILED DESCRIPTION OF THE INVENTION

[0203] Features described as preferred in one category of the invention, for example according to the assembly, are analogously preferred in embodiments of the other categories according to the invention, such as a method for producing an assembly and a use of the assembly.

[0204] Throughout this document, disclosures of ranges should preferably be understood to include both end points of the range. Furthermore, each disclosure of a range in the document should preferably be understood as also disclosing preferred sub-ranges in which one end point is excluded or both end points are excluded. For example, a disclosure of a range from JQ to X2is to be understood as disclosing a range that includes both of the end points AG and X2. Furthermore, it is to be understood as also disclosing a range that includes the end point AG but excludes the end point X2, a range that excludes the end point Xi but includes the end point X2, and a range that excludes both end points Xi and A).

[0205] Some preferred embodiments and preferred aspects have various combinations of features as alternatives. If the various combinations are disclosed, these combinations are separated by a semi-colon For example, the list of features “a; a+b; a+c+d” for a preferred embodiment discloses a preferred embodiment that comprises the feature “a”, a preferred embodiment that comprises the features “a” and “b”, and a preferred embodiment that comprises the features “a”, “c”, and “d”.

[0206] Directions

[0207] Length of, e.g., a first waveguide, a recess, and an element are measured parallel to a second direction (that is perpendicular to the first direction). The further direction is preferably perpendicular to a surface of a substrate on which the arrangement is superimposed. An example of a substrate is a silicon substrate, e.g., a silicon wafer. Preferably, the further direction is perpendicular to a surface of a wafer on which the arrangement is produced.

[0208] Cross-section of arrangement

[0209] Unless specified otherwise, a “cross-section of an arrangement” should preferably be understood as a cross-section that is made perpendicular to a length of the first waveguide. An electromagnetic wave should preferably be understood as propagating along a length of the first waveguide.

[0210] Superimposed

[0211] A first component (e.g., a first waveguide layer, an element, a layer of the first kind, a layer of a further kind) and a further component (e.g., a first waveguide layer, an element, a layer of the first kind, a layer of a further kind) may be superimposed on each other. This “superimposing” should be understood as either of the following: superimposing the first component on the further component; superimposing the further component on the first component.

[0212] If a first component and a further component are superimposed on each other, this should not be understood to mean that the first component and the further component necessarily have to touch each other. However, the first component and the further component may touch each other. E.g., a first component is superimposed on a further component, wherein a second component is arranged between the first component and the further component, i.e., the first component and the further component both touch the second component, but the first component and the further component do not touch each other. E.g., a first component is superimposed on a further component, and the first component and the further component touch other.

[0213] Waveguide

[0214] A cross-sectional shape of the first waveguide (made perpendicular to the length of the first waveguide) is not particularly limited. For example, the cross-sectional shape of the first waveguide may be, to a first approximation, square or rectangular. For example, the first waveguide may be a ribbed waveguide.

[0215] A further waveguide suitable for the invention includes, but is not limited to, strip waveguides, rib waveguides, slot waveguides, buried waveguides, and diffused waveguides.

[0216] A preferred waveguide (e.g., the first waveguide, the further waveguide) comprises at least one or all of the following: silicon, oxygen, aluminium, iridium, tantalum, titanium, nitrogen, lithium, niobium, indium, phosphorus, gallium, arsenic, barium, a chalcogenide, at least one polymer, a resin, a combination of at least two thereof. Examples of combinations of the aforementioned materials include titanium dioxide, aluminium nitride, tantalum pentoxide, silicon nitride, aluminium oxide, silicon oxynitride, lithium niobate, silica, indium phosphide, gallium arsenide, indium gallium arsenide, barium titanate, and aluminium gallium arsenide. A preferred chalcogenide is a dichalcogenide, more preferably a transition metal dichalcogenide.

[0217] A preferred waveguide (e.g. , the first waveguide, the further waveguide) is adapted and arranged for the propagation of electromagnetic waves that have wavelengths in the range from 1000 to 2700 nm, preferably from 1100 to 2600 nm, and further preferably from 1200 to 2500 nm. A more preferred waveguide (e.g., the first waveguide, the further waveguide) is adapted and arranged for the propagation of electromagnetic waves that have wavelengths in at least one or all of the following ranges: 1260 to 1360 nm (also known as the Original Band or O-Band), 1360 tol460 nm (also known as the Extend Band or E-Band), 1460 tol530 nm (also known as the Short Band or S-Band), 1530 to 1565 nm (also known as the Conventional Band or C-Band), and 1565 to 1625 nm (also known as the Long Band or L-Band). In an aspect of the invention, it is particularly preferred that a waveguide (e.g., the first waveguide, the further waveguide) is adapted and arranged for the propagation of electromagnetic waves that have wavelengths in the O-band, the C-band, or both.

[0218] When it is disclosed that a waveguide (e.g., the first waveguide, the further waveguide) is adapted and arranged for the propagation of electromagnetic waves that have wavelengths in a specified wavelength range, this should not be understood to mean that the waveguide is necessarily only adapted for the propagation of electromagnetic waves in that specified wavelength range. Rather, it should preferably be understood to mean that the waveguide is at least adapted and arranged for the propagation of electromagnetic waves in the specified wavelength range.

[0219] A waveguide (e.g., the first waveguide, the further waveguide) is adapted and arranged for the propagation of electromagnetic waves along a length of the waveguide. Recess

[0220] Where it is disclosed that “the recess is adapted and arranged (e.g., dimensioned) such that” at least one property applies “when an electromagnetic wave propagates in the first waveguide”, this should preferably be understood to mean that said at least one property applies for at least one wavelength, and not necessarily for all wavelengths of the electromagnetic waves propagating in the first waveguide. It is, however, preferred that said at least one property applies for at least 30 %, more preferably at least 50%, and further preferably at least 75 % of the wavelengths of the electromagnetic waves propagating in the first waveguide.

[0221] An interface between the first waveguide and the recess should preferably be understood as the interface between the first waveguide and the material with which the recess is filled. The interface should preferably also be understood as a surface where the first waveguide and the material, filling the recess, are in contact.

[0222] In a particularly preferred aspect of the invention, an interface between the first waveguide and the recess is a non- plasmonic interface. A plasmonic interface should preferably be understood as a metal-dielectric interface. For example, a plasmonic interface is the interface between a waveguide made from metal and a layer made from a dielectric material.

[0223] Mode

[0224] Unless specified otherwise, a “mode” should preferably be understood as a mode of an electromagnetic wave propagating in the first waveguide.

[0225] The transverse magnetic (TM) mode of an electromagnetic wave should preferably be understood as having a magnetic vector (the H-vector, e.g., a magnetic field) that is perpendicular to the direction of propagation of the electromagnetic wave in a waveguide. A TM mode of an electromagnetic wave should preferably be understood as having no magnetic vector (e.g., a magnetic field) in the direction of propagation of the electromagnetic wave in a waveguide.

[0226] The transverse electric (TE) mode of an electromagnetic wave should preferably be understood as having an electric vector (e.g., an electric field) that is perpendicular to the direction of propagation of the electromagnetic wave in a waveguide. A TE mode of an electromagnetic wave should preferably be understood as having no electric vector (e.g., an electric field) in the direction of propagation of the electromagnetic wave in a waveguide.

[0227] Electromagnetic waves propagating in a waveguide may have hybrid modes. A hybrid mode may have a non-zero electric vector and / or a non-zero magnetic vector in the direction of propagation. Such hybrid modes may generally also be decomposed in component TE mode(s) and / or TM mode(s). Multiple modes (multiple TE modes and / or multiple TM modes) may also exist in a waveguide during propagation of the electromagnetic wave. Where reference is made to, e.g., a TE mode in this disclosure, this should be understood to include pure TE modes (i.e., the propagating electromagnetic wave has only one or more TE modes), as well as the one or more component TE modes of a hybrid mode. Similarly, where reference is made to, e.g., a TM mode in this disclosure, this should be understood to include pure TM modes (i.e., the propagating electromagnetic wave has only one or more TM modes), as well as the one or more component TM modes of a hybrid mode.

[0228] The group velocity of electromagnetic waves is well-known to the skilled person and is discussed in many textbooks and articles. TM and TE modes of electromagnetic waves are well-known to the skilled person and are discussed in many textbooks and online resources. One such online resource can be found at the following link: https: / / web.mit.edU / 6.013_book / www / book.html (see Chapter 13, and in particular Chapter 13.4).

[0229] Examples of a maximum intensity of a mode include a local maximum intensity and a global maximum intensity. A preferred maximum intensity is a global maximum intensity.

[0230] Refractive index

[0231] When it is disclosed that the first waveguide has a first refractive index, this should preferably be understood to mean that the first waveguide is made from a material that has a first refractive index. When it is disclosed that the layer of the first kind has a second refractive index, this should preferably be understood to mean that the layer of the first kind is made from a material that has a second refractive index. When it is disclosed that the at least one further waveguide has a third refractive index, this should preferably be understood to mean that the at least one further waveguide is made from a material that has a third refractive index. When it is disclosed that the recess has a further refractive index, this should preferably be understood to mean that the recess is at least partially filed, more preferably filled, with a material that has a further refractive index.

[0232] A material (e.g., from which the first waveguide is made, from which the at least one further waveguide is made, from which the layer of the first kind is made, that at least partially fdls the recess) may be a mixture, a blend, or a composition of two or more constituent materials. Examples of constituent materials include silicon, oxygen, and nitrogen, with an example of a composition of these constituent materials being silicon oxynitride.

[0233] In a preferred aspect of the invention, the first waveguide has a refractive index in the range from 1.5 to 2.4, more preferably from 1.7 to 2.2, even more preferably from 1.8 to 2.1, and further preferably from 1.9 to 2.0. Inapreferred aspect of the invention, the first recess has a refractive index in the range from 1.00 to 4.00, more preferably from 1.20 to 3.80, even more preferably from 1.34 to 3.60, and further preferably from 1.44 to 3.50. In apreferred aspect of the invention, a layer of the first kind has a refractive index in the range from 1.1 to 2.4, more preferably from

[0234] 1.3 to 2.2, even more preferably from 1.4 to 2.1, and further preferably from 1.5 to 2.0. In a preferred aspect of the invention, the recess has a refractive index in the range from 1.00 to 4.00, more preferably from 1.20 to 3.80, even more preferably from 1.34 to 3.60, and further preferably from 1.44 to 3.50.

[0235] In one preferred aspect of the invention, the first waveguide has a refractive index in the range from 1.7 to 2.3, more preferably from 1.9 to 2.1, while the recess has a refractive index in the range from 2.1 to 2.7, more preferably from

[0236] 2.3 to 2.5. In a preferred aspect of the invention, the first waveguide comprises at least 85 wt-%, more preferably at least 95 wt-% stochiometric silicon nitride, wherein the wt-% is based on the total weight of the first waveguide. In this aspect, it is preferred that the recess is filled with a material that comprises at least 85 wt-%, more preferably at least 95 wt-% silicon-rich silicon nitride, wherein the wt-% is based on the total weight of the material present in the recess.

[0237] Coupling

[0238] Examples of coupling include the following: an electromagnetic wave propagating in the first waveguide is coupled to a further waveguide such that an electromagnetic wave propagates in the further waveguide; an electromagnetic wave propagating in the first waveguide is at least partially absorbed by an electrically conductive element. For example, the electromagnetic wave is at least partially absorbed by a graphene layer in an opto-electronic device.

[0239] Electrically conductive element

[0240] A preferred electrically conductive element has a width in the range from 10 nm to 40 pm, more preferably from 100 nm to 20 pm, and further preferably from 500 nm to 1 pm. A preferred electrically conductive element has a length in the range from 100 nm to 400 pm, more preferably from 500 nm to 250 pm, and further preferably from 10 pm to 100 pm. A preferred electrically conductive element has a thickness in the range from 0.1 nm to 100 nm, more preferably from 0.7 nm to 50 nm, and further preferably from 1.5 nm to 10 nm.

[0241] A preferred electrically conductive element has an electrical conductivity, at 20 °C, of at least 104S / m, more preferably at least 105S / m, even more preferably at least 106S / m, and further preferably at least 107S / m. The values for the electrical conductivity are preferably for an electrically conductive element that has a thickness of 0.35 nm. A preferred electrically conductive element is in the form of a layer. A preferred electrically conductive element comprises graphene, at least one perovskite, or both. Graphene is particularly preferred.

[0242] A preferred electrically conductive element is adapted and arranged for at least partially absorbing electromagnetic waves. This should preferably be understood to mean that at least one electromagnetic wavelength, more preferably multiple electromagnetic wavelengths can be absorbed. For example, the electrically conductive element can absorb electromagnetic waves with wavelengths that fall within the O-band.

[0243] Optical attenuation coefficient

[0244] The optical attenuation coefficient should preferably be understood to be a measure that describes the extent to which a radiant flux of a beam of electromagnetic waves is reduced per unit length when it passes through a specific material.

[0245] Variable optical attenuation coefficient

[0246] An electrically conductive element that is adapted and arranged to have a variable optical attenuation coefficient should preferably be understood to mean that an optical attenuation coefficient of the electrically conductive element can be modified, preferably when the electrically conductive element is placed in an external electrical field and / or when an electric field is present between the electrically conductive element and at least one other component (e.g., another electrically conductive element). For example, the optical attenuation coefficient of an electrically conductive element can be increased or decreased when a first electrically conductive element and a second electrically conductive element are electrically charged such that an electric field is present between the first electrically conductive element and the second electrically conductive element. In an aspect of the invention, it is preferred that the optical attenuation coefficient of an electrically conductive element can be reduced, preferably by at least 20 %, more preferably by at least 50 %, and further preferably by at least 85 %.

[0247] In an aspect of the invention, if an electrically conductive element is adapted and arranged to have a variable optical attenuation coefficient, it is preferred that the optical attenuation coefficient is modifiable for multiple wavelengths of electromagnetic waves, preferably for electromagnetic waves that have wavelengths in the range from 1200 to 1700 nm.

[0248] Opto-electronic device and modification

[0249] An opto-electronic device is adapted and arranged to modify an electromagnetic wave. Examples of preferred optoelectronic devices include modulators, photodetectors, and interferometers. More preferred examples are modulators and photodetectors. A preferred modulator at least partially converts an electrical signal to an optical signal. A preferred photodetector at least partially converts an optical signal to an electrical signal.

[0250] Modification of an electromagnetic wave should preferably be understood as the modification of one or more properties of an electromagnetic wave. Examples of these properties include amplitude, phase, frequency, and polarisation.

[0251] A modulator preferably modifies an electromagnetic wave by modulating the electromagnetic wave, more preferably by modulating an amplitude of the electromagnetic wave. It is preferred that the modulator modulates the electromagnetic wave for the sending of data, more preferably by imposing a signal on the electromagnetic wave.

[0252] A photodetector preferably modifies an electromagnetic wave by at least partially absorbing the electromagnetic wave. The at least partial absorption of the electromagnetic wave preferably leads to a decrease in the amplitude of the electromagnetic wave. It is preferred that the photodetector at least partially absorbs the electromagnetic wave for the receiving of data.

[0253] For example, if a modulator and a photodetector are in optical connection, the modulator sends data and the photodetector receives the data, e.g., data is transmitted between the modulator and photodetector.

[0254] An opto-electronic device preferably has a height that is at least 10 nm, more preferably at least 100 nm, and further preferably at least 200 nm. For example, an opto-electronic device may have a height in the range from 300 to 400 nm. A height of an opto-electronic device is measured parallel to the further direction. A preferred opto-electronic device comprises at least one electrically conductive element, wherein said electrically conductive element more preferably comprises graphene.

[0255] Opto-electronic interaction

[0256] An element (e.g., an electrically conductive element) that is adapted and arranged to be in opto-electronic interaction with a waveguide should preferably be understood to mean that electromagnetic waves that propagate in the waveguide can interact with the element. A preferred opto-electronic interaction modifies at least one property of the electromagnetic waves that propagate in the waveguide.

[0257] Optical connection

[0258] Two components that are in optical connection should preferably be understood to mean that said two components are adapted and arranged for a propagation (e.g., transmission) of electromagnetic waves between said two components. Here the two components can be, e.g., two arrangements, a light emitting means and an opto-electronic device, two opto-electronic devices (e.g., a modulator and a photodetector). Two components that are in optical connection are preferably adapted and arranged for the communication (e.g., transfer) of data between the two components, however this is not a requirement. Two components that are in optical connection are not required to be in, e.g., the same arrangement, the same assembly, the same sub-assembly, the same apparatus, the same system, but can be in e.g., in different arrangements.

[0259] A modulator that is adapted and arranged to be in optical connection with a photodetector is preferably adapted and arranged to communicate data via an optical signal between the modulator and the photodetector, more preferably transmit data via an optical signal from the modulator to the photodetector.

[0260] Electrical connection

[0261] Two components that are in electrical connection should preferably be understood to mean that an electrical current can flow between the two components. Here the two components can be, e.g., an element and an electrode, an integrated circuit and an arrangement, an integrated circuit and a sensing means. An electrical connection is preferably adapted and arranged for at least one or all of the following: data communication, to provide power to a component.

[0262] Electrically charged and discharged

[0263] An element (e.g., an electrically conductive element) that is adapted and arranged to be electrically charged should preferably be understood to mean that the element is adapted an arranged to store a net electrical charge, preferably on a surface of the element. The storing of a net electrical charge preferably produces an electric field around the element.

[0264] An element that is adapted and arranged to be electrically charged can, for example, be charged by at least one or all of the following: connecting the element to an electric circuit (e.g., connecting the element to an electrode), the element has an intrinsic net electrical charge (e.g., without requiring connection to a circuit), the element is charged by irradiating the element with photons.

[0265] An element (e.g., an electrically conductive element) that is adapted and arranged to be electrically discharged should preferably be understood to mean that at least a fraction of any net charge stored in and / or on a surface of the element can be removed, thereby reducing the net electrical charge.

[0266] Composition of element

[0267] Examples of transitional metals are molybdenum and tungsten. A chalcogen is defined as a chemical element in Group 16 of the periodic table (e.g., S, Se, and Te). An example of a combination of at least one transitional metal and at least one chalcogen is a transition metal dichalcogenide (e.g., M0S2, WS2, MoSe2, WSe2, MoTe2).

[0268] A conductive polymer should preferably be understood as an organic polymer that is adapted and arranged to conduct electricity. A preferred conductive polymer has an electrical conductivity of at least 104S / m, more preferably at least 105S / m, and further preferably at least 106S / m.

[0269] A conductive oxide should preferably be understood as an oxide that is adapted and arranged to conduct electricity. A preferred conductive oxide has an electrical conductivity of at least 104S / m, more preferably at least 105S / m, and further preferably at least 106S / m. In an aspect of the invention, a preferred form of carbon is graphene. In an aspect of the invention, a preferred metal is a transitional metal. In an aspect of the invention, a preferred nitride is boron nitride, more preferably hexagonal boron nitride.

[0270] A 2D material should preferably be understood as a solid, more preferably a crystalline solid. In one aspect of the invention, it is preferred that a 2D material consists of a single layer of atoms. In another aspect of the invention, it is preferred that the 2D material comprises more than one layer of atoms (e.g., more than one individual atomic plane), where these layers are bonded to each other by van der Waals forces.

[0271] Graphene

[0272] Graphene suitable for the present invention is commercially available from, e.g., Graphenea S.A. (Spain), Graphene Laboratories Inc. (USA), and Grolltex Inc (USA).

[0273] Biomolecules and biomarkers

[0274] Example of biomolecules include DNA, amino acids, fat, constituents of animal or human cells, and proteins. A biomarker should preferably be understood as a marker for biomolecules, wherein the biomarker is adapted and arranged to attach to biomolecules, preferably to make the biomolecules detectable (e.g., by fluorescence).

[0275] Dielectric layer

[0276] A dielectric layer preferably has a dielectric constant of at least 3, and more preferably at least 5. A dielectric layer preferably has an electrical conductivity that is less than IO-5S / m. A dielectric layer preferably comprises at least one or all of the following: at least one oxide, at least one nitride, a combination thereof. Examples of an oxide include silicon dioxide, aluminium oxide, zirconium dioxide, hafnium oxide, titanium dioxide, niobium pentoxide, tantalum pentoxide. An example of a nitride is silicon nitride, aluminium nitride, and silicon oxynitride.

[0277] Integrated circuit

[0278] Examples of a preferred integrated circuit include the following: a processing unit, a memory unit, an applicationspecific integrated circuit, a microcontroller, a field-programmable gate array, and a system-on-chip.

[0279] A processing unit is preferably adapted and arranged to execute instructions of a computer program. Examples of these instructions include arithmetic, logic, controlling, and input / output operations. A memory unit is preferably adapted and arranged to store instructions of a computer program.

[0280] Examples of a processing unit include a central processing unit (CPU), a graphics processing unit (GPU), an X- processing unit (XPU), a tensor processing unit (TPU), a neuromorphic processing unit (NPU). Examples of a memory unit include random access memory (RAM), static RAM (SRAM), synchronous dynamic RAM (SDRAM), double data rate SDRAM (DDR SDRAM), graphics DDR SDRAM (GDDR SDRAM), flash memory, magnetoresistive RAM (MRAM), magnetic tunnel junction MRAM, and spin-orbit torque MRAM.

[0281] Examples of a data storage means is a hard drive and a flash drive. Data communication

[0282] Two components that are in data communication should preferably be understood to mean that data can be communicated between said two components. Here the two components can be, e.g., two arrangements, an integrated circuit and an arrangement, a sensing means and an arrangement, an integrated circuit and a sensing means. The data may be communicated using electrical signals, optical signals, or both. Data that is communicated between a first component and a further component includes at least one or all of the following: A.] a transmission (e.g., transfer) of data from the first component to the further component, B.] a transmission (e.g., transfer) of data from the further component to the first component, both A.] and B.]. For example, the first and further components are a modulator and a photodetector, respectively. For example, the first component is an opto-electronic device and the further component is an arrangement comprising a first waveguide and a further waveguide. When two components are in data communication, data may also be communicated between said two components via one or more additional components. For example, data is communicated between two opto-electronic devices via an arrangement comprising a first waveguide and a further waveguide.

[0283] Light emitting means

[0284] A light emitting means is adapted and arranged to emit electromagnetic waves. For example, a light emitting means is adapted and arranged to emit radio waves, microwaves, or optical waves. A preferred light emitting means is adapted and arranged to facilitate at least one or all of the following: communication, sensing, imaging. An example of a light emitting means is a laser.

[0285] Light and photonics

[0286] The terms “optical” and “light”, as used herein, should preferably be understood as electromagnetic radiation, more preferably electromagnetic radiation in any of the visible, infrared, and ultraviolet spectral ranges. An example of an optical signal is a signal and / or data that is communicated using electromagnetic waves. Optical data should preferably be understood as data that is communicated using electromagnetic waves.

[0287] Photonics should preferably be understood to include at least one or all of the following: generation, detection, manipulation, emission, transmission, modulation, signal processing, switching, amplification, and sensing of electromagnetic waves.

[0288] Artificial intelligence and machine learning

[0289] Artificial intelligence (Al) should preferably be understood to include at least one or all of the following: perceiving, synthesizing, inferring, predicting and / or generating information using computerised tools and / or techniques (e.g., machine learning models). Machine learning includes supervised learning (e.g., linear regression, decision trees, support vector machines), unsupervised learning (e.g., hierarchical clustering, k-means clustering), and reinforced learning. Machine learning also includes deep learning, such as convolutional neural networks and recurrent neural networks. Sensing means

[0290] A sensing means is preferably adapted and arranged to sense (e.g., measure) at least one or all of the following: sound waves, electromagnetic waves, electrical signals, a movement, a temperature, a speed, an acceleration, a rotation. For example, a movement, a speed, an acceleration and / or a rotation may be of a mammalian body, a vehicle, a robotic body, a transportation means. It is particularly preferred that a sensing means is adapted and arranged to at least partially absorb electromagnetic waves. A sensing means is preferably adapted and arranged to generate an electrical signal, an optical signal, or both, wherein a signal generated is preferably based on an input received by the sensing means. Examples of such input include a measurement and / or the at least partial absorption of an electromagnetic wave.

[0291] A sensing means may comprise at least one or all of the following: photodiodes, phototransistors, image sensors, optical fibre sensors, laser diodes, optical biosensor, optical position sensors, optical touch sensors, photomultiplier tubes, avalanche photodiodes, charge-coupled devices, complementary metal-oxide-semiconductor sensors, thermal infrared detectors, photon counting detectors, superconducting nanowire single-photon detectors.

[0292] Sensing unit

[0293] A sensing unit comprises a sensing means. A sensing unit preferably comprises an integrated circuit.

[0294] A sensing unit is preferably adapted and arranged to analyse and / or process data of a target area obtained by the sensing unit, wherein said data may be images, sounds, temperature measurements, and / or other sensor readings. The output of a sensing unit is preferably structured data that represents the interpretation and / or analysis of the data obtained by the sensing unit, such as a health of a patient, item detection and recognition, scene information, localization and mapping data, preferably including road geometry and / or landmarks, feature extraction results (including edges, comers, textures, shapes, and / or keypoints), and / or pattern recognition output.

[0295] Spatial information should preferably be understood as information about a space wherein an entity, such as a vehicle, a robotic body, and / or a transportation means, is located. Spatial information may include information on a presence of an item in the vicinity of the entity (e.g., a distance between the element and the item), a speed of the entity, an acceleration of the entity, and / or a rotation of the entity.

[0296] Data communication module

[0297] A data communication module is preferably adapted and arranged to communicate data between one or more components, such as electrical components. Here the electrical components may be, e.g., one or more chips; one or more dies; one or more integrated circuits located in, e.g., a robotic body, a robotic system, and an assembly; a sensing means and an integrated circuit; a sensing unit and a control system.

[0298] First assembly and fifth assembly

[0299] The below preferred aspects of the first assembly and the fifth assembly are independently preferred aspects of the first assembly and the fifth assembly.

[0300] In a preferred aspect of the first assembly and the fifth assembly, the first sub-assembly and the further sub-assembly are part of the same chip. In another preferred aspect of the first assembly and the fifth assembly, the first sub- assembly and the further sub-assembly are part of different chips. In this aspect, the different chips may have different functions. For example, a first chip may be a processing unit and a further chip may be a memory unit (e.g., random access memory). In one preferred aspect of the first assembly and the fifth assembly, the first sub-assembly and the further sub-assembly are part of the same computational means (such as a computer). In another preferred aspect of the first assembly and the fifth assembly, the first sub-assembly and the further sub-assembly are part of different computational means (such as different computers). For example, the first and further sub-assemblies are part of different computers in a computer cluster.

[0301] In a preferred aspect of the first assembly and the fifth assembly, the first sub-assembly and the further sub-assembly are adapted and arranged to communicate data between said sub-assemblies, via an optical signal, over a distance of at least X mm and / or at least Y cm. This should preferably not be understood to mean that said sub-assemblies cannot communicate data at distances that are smaller than X mm and / or Y cm. Rather, this should preferably be understood mean that said sub-assemblies can communicate data over distances that range from 0 mm up to at least X mm and / or up to at least Y cm, and preferably distances that are larger than X mm and / or larger than Y cm.

[0302] An assembly that is adapted and arranged for communication should preferably be understood as an assembly that is adapted and arranged to communicate data over a distance of less than 10 km. An assembly that is adapted and arranged for communication may communicate the data using at least one or all of the following: at least one modulator, at least one photodetector, at least one arrangement comprising a first waveguide and a further waveguide. Alternatively, an assembly that is adapted and arranged for communication may communicate the data using at least one further communication means and at least one or all of the following: at least one modulator, at least one photodetector, at least one arrangement comprising a first waveguide and a further waveguide. Examples of a further communication means include an antenna, an optical cable (such as an optical fibre), a wired connection.

[0303] An assembly that is adapted and arranged for telecommunication should preferably be understood as an assembly that is adapted and arranged to communicate data over a distance of at least 10 km. An assembly that is adapted and arranged for telecommunication may communicate the data using at least one or all of the following: at least one modulator, at least one photodetector, at least one arrangement comprising a first waveguide and a further waveguide. Alternatively, an assembly that is adapted and arranged for telecommunication may communicate the data using at least one further communication means and at least one or all of the following: at least one modulator, at least one photodetector, at least one arrangement comprising a first waveguide and a further waveguide. Examples of a further communication means include an antenna, an optical cable (such as an optical fibre), a wired connection.

[0304] An assembly that is adapted and arranged for high-performance computing preferably comprises at least one supercomputer and / or at least one computer cluster. A supercomputer should preferably be understood as a computer that can perform at least 1014floating-point operations per second. An assembly for high-performance computing is preferably adapted and arranged for parallel computing.

[0305] An assembly that is adapted and arranged for a data centre is preferably adapted and arranged to store data, and more preferably, to communicate data. An assembly that is adapted and arranged for artificial intelligence is preferably an assembly that can be used to obtain artificial intelligence models, more preferably to obtain machine learning models, using e.g., supervised learning, semi-supervised learning, and unsupervised learning.

[0306] A switch is preferably adapted and arranged for, e.g., optically connecting two networks and / or optically connecting a computational means (such as a computer) and a network.

[0307] An optical interconnect is preferably adapted and arranged for optically connecting at least one or all of the following: two integrated circuits, two computer chips. Here the two integrated circuits and / or two computer chips may be parts of a system-in-package or a chiplet. Here the two integrated circuits may be part of the same chip.

[0308] A first assembly and a fifth assembly according to the invention allow for an increased data transfer rate, an improved signal-to-noise ratio, a reduced crosstalk and a reduced energy consumption. A first assembly and a fifth assembly also allow for a communication of data over increased distances, while simultaneously allowing for at least one of all of the following: a reduced energy consumption, an increased data transfer rate, an improved signal- to-noise ratio.

[0309] Optical data communication module

[0310] An optical data communication module should preferably be understood as a data communication module that communicates data via optical signals. An optical data communication module is preferably adapted and arranged to communicate data via an optical signal by using an arrangement according to the invention. An optical data communication module is preferably adapted and arranged to send data via an optical signal using a modulator. An optical data communication module is preferably adapted and arranged to receive data via an optical signal using a photodetector. An optical data communication module is preferably adapted and arranged to facilitate data transmission via an optical signal using an arrangement comprising a first waveguide and a further waveguide.

[0311] An optical data communication module is preferably adapted and arranged to communicate data between one or more components, such as electrical components. Here the electrical components may be, e.g., one or more chips; one or more dies; one or more integrated circuits located in, e.g., a robotic body, a robotic system, an assembly; a sensing means and an integrated circuit; a sensing unit and a control system.

[0312] An optical data communication module may comprise at least one or all of the following: an optical fibre, an optical interconnect.

[0313] An optical data communication module according to the invention allows for an increased bandwidth, reduced energy consumption, and a reduced error rate in the data communicated.

[0314] Electromagnetic waves from target area

[0315] Further electromagnetic waves detected by a sensing means and / or sensing unit from a target area include, amongst other, electromagnetic waves reflected by an item in the target area, and / or electromagnetic waves emitted by an item in the target area. Optical sensing module

[0316] An optical sensing module may comprise at least one or all of the following: photodiodes, phototransistors, image sensors, optical fibre sensors, laser diodes, optical biosensor, optical position sensors, optical touch sensors, photomultiplier tubes, avalanche photodiodes, charge-coupled devices, complementary metal-oxide-semiconductor sensors, thermal infrared detectors: photon counting detectors, superconducting nanowire single-photon detectors. Examples of optics include lenses, prisms, and diffraction gratings.

[0317] An example of an optical sensing module is disclosed in WO2023076132 Al.

[0318] An optical sensing module according to the present invention allows for improved sensing capabilities and performance. Specifically, the optical sensing module according to the present invention allows for enhanced sensitivity, improved signal-to-noise ratio, reduced crosstalk and reduced energy consumption, allowing for an improved performance and versatility in various sensing applications.

[0319] Apparatus adapted and arranged for a medical application

[0320] A medical application should preferably be understood as including at least one or all of the following: monitoring a health of a patient, diagnosing a pathological condition in a patient; maintaining a state of health of a patient; sending and / or receiving data from a further apparatus, preferably a further apparatus adapted and arranged for a medical application; controlling a further apparatus, preferably a further apparatus adapted and arranged for a medical application. Here a patient is preferably a mammal, and more preferably a human. The apparatus may be implantable in a patient (internal use) and / or may be for use outside a body of a patient.

[0321] Examples of a physical property of a body include an oxygen concentration (e.g., of blood, tissue), a temperature of the body, a heart rate of the body, a blood glucose level. Examples of a sensing means adapted and arranged to measure at least one physical property of a body include a blood glucose monitor, a heart rate monitor, a thermometer, an oximeter.

[0322] The apparatus is preferably adapted and arranged to communicate data via an optical signal by using an arrangement according to the invention. The apparatus preferably comprises one or more integrated circuits adapted and arranged to control the arrangement according to the invention.

[0323] An apparatus, adapted and arranged for a medical application, and according to the present invention, allows for an improved patient safety, an improved monitoring of the health of a patient and an improved diagnosing of a pathological condition in a patient. An apparatus according to the invention also allows for an improved sensitivity, an increased data transfer rate, an improved signal-to-noise ratio, a reduced crosstalk and a reduced energy consumption.

[0324] Vehicle adapted and arranged for flight

[0325] A vehicle, adapted and arranged for flight, is preferably adapted and arranged to communicate data via an optical signal by using an arrangement according to the invention. Here the communication of data may be a communication of data within the vehicle, between the vehicle and another entity (e.g., another vehicle, a ground station), or both. It is particularly preferred that the communication of data is within the vehicle, e.g., between a sensing unit and an integrated circuit in the vehicle. Flight should preferably be understood to include both controlled flight and uncontrolled flight. Here controlled flight should preferably be understood to mean that a movement of the vehicle can be controlled by, e.g., a human operator and / or an integrated circuit (such as a processing unit). For example, an airplane is adapted and arranged for controlled flight by a human and / or an autopilot. Here the vehicle may be controlled remotely. Uncontrolled flight should preferably be understood to mean that a movement of the vehicle is generally not controlled by, e.g., a human operator and / or an integrated circuit (such as a processing unit). For example, a weather balloon is generally adapted and arranged for uncontrolled flight. Flight should preferably be understood to include flight in the atmosphere, as well as above the atmosphere. Flight should preferably be understood to include an orbit of the vehicle, e.g., around the Earth.

[0326] Examples of a propulsion means include an engine, jet propulsion, burners of a hot-air balloon, an envelope of a hot-air balloon, a balloon. Here engines include, but are not limited to, jet engines and turbine engines.

[0327] An example of a means for generating lift is wings.

[0328] A control system preferably comprises a control means and / or a control module. Examples of a control means include a rudder, an elevator, and an aileron. Example of a control module is an integrated circuit that is adapted and arranged to control a movement of a control means.

[0329] A vehicle adapted and arranged for flight may be used for commercial and / or defence purposes.

[0330] A vehicle, adapted and arranged for flight, and according to the present invention, allows for an improved safety of the vehicle, including passengers in the vehicle, an improved control of the vehicle, an improved control of the vehicle when operated remotely, and an improved communication with the vehicle (e.g., including a tracking of the vehicle, a faster data transfer rate, less disruption when communication with the vehicle).

[0331] Robotic system

[0332] A term robotic system should preferably be understood to comprise a robotic body that is designed to perform tasks autonomously and / or under remote control. In a preferred aspect of the robotic system, the robotic system is adapted and arranged for an autonomous movement of the robotic body.

[0333] A robotic system may be used for commercial and / or defence purposes. For example, a robot system can comprise an industrial robot, a service robot, a personal and domestic robot, an educational robot, a research robot, an entertainment robot. A robotic body may be a robotic arm. Robotic arms typically comprise multiple segments connected by joints, resembling a human arm.

[0334] In a preferred aspect of the robotic system, the robotic system comprises a data communication module, more preferably an optical data communication module. In this aspect, it is particularly preferred that the data communication module is arranged in the robotic body. In this aspect, it is alternatively preferred that the data communication module is arranged at a location that is removed from the robotic body (e.g., does not touch the robotic body). In this aspect, it is alternatively preferred that the data communication module is partly arranged in both the robotic body (e.g., some sub-modules of the data communication module are arranged in the robotic body, while other submodules of the data communication module are arranged at a location that is removed from the robotic body). In this aspect, it is preferred that the data communication module is adapted and arranged for at least one or all of the following: data communication in the robotic body (more preferred), data communication between the robotic body and an external entity. An example of the communicating of data in the robotic body is the transfer of data between different parts of the robotic body (e.g., between different computer chips located in the robotic body). An example of the communicating of data between the robotic body and an external entity is the transfer of data between the robotic body and a computer that is located outside the robotic body.

[0335] In a particularly preferred aspect of the robotic system, the robotic body comprises a sensing unit. In another preferred aspect of the robotic system, the sensing unit is arranged at a location that is removed from the robotic body (e.g., does not touch the robotic body). In another preferred aspect of the robotic system, the sensing unit is partly arranged in both the robotic body (e.g., some sub-modules of the sensing unit are arranged in the robotic body, while other sub-modules of the sensing unit are arranged at a location that is removed from the robotic body).

[0336] In a particularly preferred aspect of the robotic system, the robotic body comprises a control module. In another preferred aspect of the robotic system, the control module is arranged at a location that is removed from the robotic body (e.g., does not touch the robotic body). In another preferred aspect of the robotic system, the control module is partly arranged in both the robotic body (e.g., some sub-modules of the control module are arranged in the robotic body, while other sub-modules of the control module are arranged at a location that is removed from the robotic body).

[0337] In a particularly preferred aspect of the robotic system, at least one or all of the following forms part of the robotic body: a data communication module, the sensing unit, the control module. In an alternatively preferred aspect of the robotic system, the robotic body does not comprise the data communication module, the sensing unit, or the control module.

[0338] The robotic system according to the present invention allows for improved reliability of the robotic system, improved communication (e.g., data transfer rate) in the robotic system, improved safety, increased versatility of the robotic system, and a reduced energy usage of the robotic system.

[0339] Second assembly

[0340] A second assembly is preferably adapted and arranged for optical computing. A second assembly as used herein should preferably be understood as a computational architecture that uses the principles of optics and photonics for at least one or all of the following: data processing, data transmission, data storage.

[0341] In a preferred aspect of the second assembly, the at least one or more memory units is at least one or more optical memory units and the at least one of more processors is at least one or more optical processors.

[0342] In a preferred aspect of the second assembly, a memory unit comprises at least one or all of the following: a modulator, a photodetector, an arrangement comprising a first waveguide and further waveguide. In a preferred aspect of the second assembly, a processor comprises at least one or all of the following: a modulator, a photodetector, an arrangement comprising a first waveguide and further waveguide.

[0343] An optical processor preferably comprises at least one or all of the following: an optical switch, an optical transistor. Examples of optical processor include photonic integrated circuits (PICs), Fourier optical processors, optical neural networks (ONNs), all-optical switches, and quantum optical processors.

[0344] Examples of an optical memory unit include holographic memory, photorefractive crystals, optical RAM (ORAM), phase change materials and optical fibre delay lines. In a preferred aspect of the second assembly, at least one arrangement according to the invention is arranged in at least one or all of the following: the at least one processor, the at least one memory unit, the data communications module. If “at least one arrangement is arranged in the at least one processer and the at least one memory unit”, this should preferably be understood to mean that at least one arrangement is arranged in at least one processor and at least one arrangement is arranged in at least one memory unit (i.e., the second assembly comprises at least two arrangements according to the invention). If “at least one arrangement is arranged in the at least one processer and the data communication module”, this should preferably be understood to mean that at least one arrangement is arranged in at least one processor and at least one arrangement is arranged in at data communication module (i.e., the second assembly comprises at least two arrangements according to the invention). If “at least one arrangement is arranged in the data communication module and the at least one memory unit”, this should preferably be understood to mean that at least one arrangement is arranged in the data communication module and at least one arrangement is arranged in at least one memory unit (i.e., the second assembly comprises at least two arrangements according to the invention). If “at least one arrangement is arranged in the at least one processer, the at least one memory unit, and the data communication module”, this should preferably be understood to mean that at least one arrangement is arranged in at least one processor, at least one arrangement is arranged in at least one memory unit, and at least one arrangement is arranged in the data communication module (i.e., the second assembly comprises at least three arrangements according to the invention).

[0345] The second assembly according to the invention allows for an increased computational speed, improved energy efficiency, improved scalability, and an improved resistance to electromagnetic interference.

[0346] Optical computing is described in, e.g., WO2023145206 Al and WO2021245701 Al.

[0347] Third assembly

[0348] Homomorphic encryption should preferably be understood as a form of encryption that allows mathematical operations to be performed on encrypted data without decrypting said data first. E.g., it enables computations to be carried out directly on ciphertext, yielding an encrypted result that, when decrypted, corresponds to the result of the operations performed on the unencrypted data. Photonic homomorphic encryption should preferably be understood as an encryption technique that combines principles of both photonics and homomorphic encryption to enable computations on encrypted data using optical signals. In photonic homomorphic encryption, encryption and / or decryption are performed using photonic components and techniques, while homomorphic properties are preserved to allow computations on the encrypted data without decryption. A third assembly adapted and arranged for photonic homomorphic encryption is preferably used for at least one or all of the following: secure data processing, cloud computing, secure multiparty computation, and privacy -preserving data analysis.

[0349] Examples of photonic encryption and / or decryption modules include optical phase encoders and / or decoders, optical polarization encoders and / or decoders, optical frequency encoders and / or decoders, optical chaos-based encryption and / or decryption modules, a quantum key distribution system, and an optical one-time pad system.

[0350] In a preferred aspect of the third assembly, the third assembly comprises at least one or all of the following: a modulator, a photodetector, an arrangement comprising a first waveguide and further waveguide. In a preferred aspect of the third assembly, at least one arrangement according to the invention is arranged in at least one or all of the following: the homomorphic operation module, the photonic encryption module, the photonic decryption module. If “at least one arrangement is arranged in the homomorphic operation module and the photonic encryption module”, this should preferably be understood to mean that at least one arrangement is arranged in the homomorphic operation module and at least one arrangement is arranged in the photonic encryption module (i.e., the third assembly comprises at least two arrangements according to the invention). If “at least one arrangement is arranged in the homomorphic operation module and the photonic decryption module”, this should preferably be understood to mean that at least one arrangement is arranged in the homomorphic operation module and at least one arrangement is arranged in the photonic decryption module (i.e., the third assembly comprises at least two arrangements according to the invention) . If “at least one arrangement is arranged in the photonic encryption module and the photonic decryption module”, this should preferably be understood to mean that at least one arrangement is arranged in the photonic encryption module and at least one arrangement is arranged in the photonic decryption module (i.e., the third assembly comprises at least two arrangements according to the invention). If “at least one arrangement is arranged in the homomorphic operation module, the photonic encryption module, and the photonic decryption module”, this should preferably be understood to mean that at least one arrangement is arranged in the homomorphic operation module, at least one arrangement is arranged in the photonic encryption module, and at least one arrangement is arranged in the photonic decryption module (i.e., the third assembly comprises at least three arrangements according to the invention).

[0351] A light emitting means that is in optical connection with the homomorphic operation module is preferably in optical connection with at least one arrangement, according to the invention, that is arranged in the homomorphic operation module. A light emitting means that is in optical connection with the photonic encryption module is preferably in optical connection with at least one arrangement, according to the invention, that is arranged in the photonic encryption module. A light emitting means that is in optical connection with the photonic decryption module is preferably in optical connection with at least one arrangement, according to the invention, that is arranged in the photonic decryption module.

[0352] The third assembly according to the present invention allows for an increased computational speed, improved energy efficiency, improved scalability, improved resistance to electromagnetic interference, improved encryption, improved encryption and decryption speed, enhanced security, and an improved compatibility with optical networks.

[0353] Homomorphic encryption is described in, e.g., WO2022213048 Al, US20220116198 Al, US20220366059 Al, and US20240022394 Al.

[0354] Optical connection module

[0355] An optical connection module should preferably be understood as a link that utilises optical signals, typically transmitted through waveguides, optical fibres and / or free-space optical channels, to transmit data e.g., between electronic devices and / or components, such as between processors, memory modules, input / output devices, and networking equipment. A transmitter is adapted and arranged to convert electrical signals received from, e.g., an electrical component and / or an integrated circuit, into optical signals. A receiver is adapted and arranged to convert optical signal into electrical signals that are transmitted to, e.g., an electrical component and / or an integrated circuit. A transceiver is adapted and arranged to both convert electrical signals into optical signals and optical signals into electrical signals. The optical connection module according to the invention allows for an increased bandwidth, a decreased latency, increased transmission distances, less susceptibility to electromagnetic interference, increased security, increased compactness, decreased insertion loss, and increased energy efficiency.

[0356] Optical connection modules are described in, e.g., WO2023124580 Al, WO2023122711 Al, and US20230314711 Al.

[0357] First and further transportation means

[0358] A transportation means includes a vehicle (e.g., a car, a truck), a train, an airplane, a ship, a bicycle, a drone, a satellite. Examples of autonomous movement include autonomous driving, autonomous flying, autonomous sailing, autonomous walking.

[0359] A processing module is preferably adapted and arranged for executing instructions and performing computations. A processing module preferably comprises a processing unit. In a preferred aspect of the first transportation means, the processing module comprises at least one arrangement according to the invention. In a preferred aspect of the first transportation means, the processing module comprises at least one light emitting means.

[0360] Examples of a human-machine interface include a screen, preferably a touch screen, a device adapted and arranged to play a sound, a device adapted and arranged to emit a signal, preferably a light signal. Examples of a steering means include a steering wheel, a rudder, handlebars, ailerons. Examples of a propulsion means include a combustion engine, a jet engine, a sail, a drivetrain of a bicycle.

[0361] A sensing unit may comprise at least one or all of the following: photodiodes, phototransistors, image sensors, optical fibre sensors, laser diodes, optical biosensor, optical position sensors, optical touch sensors, photomultiplier tubes, avalanche photodiodes, charge-coupled devices, complementary metal-oxide-semiconductor sensors, thermal infrared detectors, photon counting detectors, superconducting nanowire single-photon detectors.

[0362] A perception sub-module is adapted and arranged to analyse and / or process data of a target area obtained by a sensing unit, wherein said data may be images, sounds, and / or other sensor readings. The output of a perception sub-module is preferably structured data that represents the interpretation and / or analysis of the data obtained by the sensing unit, such as item detection and recognition, scene information, localization and mapping data, preferably including road geometry and / or landmarks, feature extraction results (including edges, comers, textures, shapes, and / or keypoints), and / or pattern recognition output.

[0363] A generation sub-module may be used in e.g., autonomous systems. The generation sub-module is adapted and arranged to process and / or analyse the data provided by the perception module in order to, e.g., determine actions and / or responses based on predefined objectives, rules, and / or constraints. For example, the generation sub-module outputs driving commands, including trajectory planning, path selection, and control commands for steering, acceleration, and braking in autonomous vehicles. Subsequently, a control unit may execute a driving command generated by the generation sub-module and control the transportation means’ motion accordingly. A further transportation means preferably comprises an integrated circuit that is adapted and arranged to be in data communication with an arrangement. A further transportation means preferably comprises a light emitting means that is adapted and arranged to be in optical connection with the arrangement.

[0364] The first and further transportation means according to the present invention allow for improved safety, enhanced traffic efficiency, reduced environmental impact, increased accessibility, enhanced user experience, increased scalability, and increased adaptability.

[0365] A transportation means is described in, e.g., DE102021121918 Al.

[0366] Fourth assembly

[0367] The fourth assembly preferably comprises a light emitting means that is adapted and arranged to be in optical connection with the arrangement.

[0368] Examples of artificial intelligence (Al) include perceiving, synthesizing, inferring, predicting and / or generating information using, e.g., machine learning. For example, a fourth assembly may use a combination of hardware and software to perform operation to perceive, synthesize, infer, predict, and / or generate information.

[0369] The fourth assembly according to the present invention allows for a handling of increased volumes of data, faster processing speeds, reduced susceptibility to electromagnetic interference, and lower energy consumption. The fourth assembly according to the present invention allows for massive parallelism (e.g., parallel computing) and high-speed data processing, such as big data analytics, neural network training, and real-time simulations.

[0370] An assembly for machine Al and machine learning is described in, e.g., US20230114847 Al, WO2018187487 Al, and US20220188155 Al.

[0371] Removal of a section / reducing thickness of a section

[0372] In a preferred aspect of the invention, one or more sections of a first waveguide layer is removed using at least one or all of the following: patterning, lithography (e.g., deep UV lithography, extreme ultraviolet lithography, electron beam lithography), two photon polymerisation, laser ablation, reactive ion etching, ion milling.

[0373] In a preferred aspect of the invention, a section of the first waveguide is removed using at least one or all of the following: patterning, lithography (e.g., deep UV lithography, extreme ultraviolet lithography, electron beam lithography), laser ablation, reactive ion etching, ion milling.

[0374] In a preferred aspect of the invention, a thickness of one or more sections of a layer of the further kind are reduced using at least one or all of the following: patterning, lithography (e.g., deep UV lithography, extreme ultraviolet lithography, electron beam lithography), laser ablation, reactive ion etching, ion milling.

[0375] In a preferred aspect of the invention, one or more section of an element layer and / or element are removed using oxygen plasma etching. This aspect is particularly preferred if the element layer and / or element is an element (layer) of the first kind, and even further preferably if the element (layer) of the first kind comprises graphene.

[0376] Superimposing of a layer

[0377] An example of superimposing a layer is a deposition of a layer. Various methods for superimposing a layer (e.g., a waveguide layer, a layer of the first kind, a layer of a further kind) are well known in the art. Any method, which the skilled person deems suitable for the present invention, may be used. Suitable methods include atomic layer deposition, chemical vapour deposition, physical vapour deposition, surface activation by plasma, sacrificial layers or molecular monolayers, a combination of at least two thereof.

[0378] Examples of lithography include nanoimprint lithography, laser lithography, electron beam lithography, and optical lithography.

[0379] Atomic layer deposition, chemical vapour deposition, physical vapour deposition, and lithography are well-known to the skilled person. Any device which the skilled person deems suitable can be used for the layer deposition.

[0380] In a preferred aspect of the invention, a first waveguide layer is superimposed using at least one or all of the following: chemical vapour deposition, physical vapour deposition, atomic layer deposition, spin coating.

[0381] In a preferred aspect of the invention, a layer of the first kind is superimposed using at least one or all of the following: chemical vapour deposition, physical vapour deposition, atomic layer deposition, spin coating. In this aspect, atomic layer deposition is particularly preferred.

[0382] In a preferred aspect of the invention, a layer of the second kind is superimposed using at least one or all of the following: chemical vapour deposition, physical vapour deposition, atomic layer deposition, spin coating.

[0383] In a preferred aspect of the invention, a layer of the further kind is superimposed using at least one or all of the following: chemical vapour deposition, physical vapour deposition, atomic layer deposition, spin coating.

[0384] Patterning

[0385] Various patterning methods for, e.g., removing a section of a layer, are well known in the art. Any patterning method, which the skilled person deems suitable for the present invention, may be used.

[0386] A preferred patterning method uses lithography. Various lithography methods are also well known in the art. Any lithography method, which the skilled person deems suitable for the present invention, may be used. These lithography methods include, but are not limited to, photolithography (such as deep ultraviolet lithography, extreme ultraviolet lithography), electron beam lithography, nanoimprint lithography, interference lithography, magneto-lithography, scanning probe lithography, surface -charge lithography, and diffraction lithography.

[0387] A preferred patterning method comprises the steps of depositing a masking layer, such as a photoresist, on a layer; removing at least one section of the masking layer to expose at least one section of the layer; etching the at least one exposed section of the layer. After the at least one exposed section of the layer has been etched, it is preferred to remove the masking layer.

[0388] Etching

[0389] Various etching methods (e.g., for reducing a thickness of a layer and / or a section of layer, for removing a layer and / or a section of a layer) are well known in the art. Any etching method, which the skilled person deems suitable for the present invention, may be used. These etching methods include wet etching methods and dry etching methods. Examples of suitable dry etching methods include plasma etching, reactive-ion etching, ion beam etching, and vapour phase etching. A preferred etching method uses at least one masking layer to mask at least one section of the layer being etched. An etchant should preferably be understood as a processing chemical substance that is used during an etching method. A preferred etchant can be a liquid, a gas, or a combination thereof.

[0390] Preferred processing chemical substances that are suitable to be used for a wet etching method include, but are not limited to, hydrofluoric acid, buffered hydrofluoric acid, buffered oxide etch, ammonium fluoride, phosphoric acid, and combinations of at least two or more thereof. Preferred processing chemical substances that are suitable to be used for a dry etching method include, but are not limited to, boron trichloride (BCI3), hydrofluoric acid, buffered hydrofluoric acid, buffered oxide etch, ammonium fluoride, phosphoric acid, chlorine (O2), sulphur hexafluoride (SF6), hydrobromic acid (HBr), tetrafluoromethane (CF4), trifluoromethane (CHF3), 1,2-difluoroethylene (C2H2F2), methyl fluoride (CH3F), and combinations of at least two or more thereof.

[0391] Vapour deposition

[0392] Various chemical vapour deposition (CVD) methods for e.g., depositing a layer, are well known in the art. Any CVD method, which the skilled person deems suitable for the present invention, may be used. These CVD methods include, but are not limited to, atmospheric pressure CVD (APCVD), low-pressure CVD (LPCVD), ultrahigh vacuum CVD (UHCVD), plasma-enhanced CVD (PECVD), atomic-layer deposition (ALD), and metalorganic CVD (MOCVD).

[0393] Various physical vapour deposition (PVD) methods for, e.g., depositing a layer, are well known in the art. Any PVD method, which the skilled person deems suitable for the present invention, may be used. These PVD methods include, but are not limited to, sputtering and evaporation deposition methods. Evaporation deposition methods pertain to the evaporation and condensation of a chemical substance on a component. Suitable sputtering deposition methods include, but are not limited to, high-power impulse magnetron sputtering, high-target-utilisation sputtering, ion beam sputtering, reactive sputtering, ion-assisted deposition, and gas flow sputtering.

[0394] Chemical-mechanical polishing

[0395] Chemical-mechanical polishing (CMP) should preferably be understood as a method that uses a combination of chemical and mechanical forces. A preferred CMP method is adapted and arranged for at least one or all of the following: to reduce a thickness of a layer and / or a thickness of a section of a layer; to remove a layer and / or a section of a layer; to increase a smoothness of a surface of a layer and / or a section of a layer; to increase a flatness of a layer and / or a section of a layer.

[0396] A preferred CMP method uses a slurry in combination with a rotating pad. A preferred pad comprises a polymer. A preferred slurry comprises at least one liquid and particles mixed with the at least one liquid. A preferred slurry is in the form of a colloid. The particles in a preferred slurry comprise at least one or all of the following: aluminium oxide, cerium oxide, zirconium oxide, titanium oxide, thorium oxide, silica, ceria, a combination of at least two thereof.

[0397] Any CMP process parameters, including the chemical composition of the slurry and the rotation rate of the rotating pad, which the skilled person deems suitable for the present invention, may be used. Suitable slurries are commercially available from, e.g., BASF SE (Germany) and Hitachi Chemical Co Ltd (Japan). Any CMP machine, which the skilled person deems suitable for the present invention, may be used. Examples of a CMP machine include the F-REX200M2 or F-REX300X, both commercially available from Ebara Engineering Singapore Pte Ltd.

[0398] Preferred embodiments

[0399] A preferred embodiment Al of the invention is an arrangement comprising a. a first waveguide adapted and arranged for the propagation of electromagnetic waves; b. at least one electrically conductive element, wherein, in a cross-sectional cut of the arrangement, the first waveguide and the at least one electrically conductive element are arranged to overlap; wherein the first waveguide comprises a recess that at least partially faces, preferably faces, the at least one electrically conductive element, a depth of the recess is less than a height of the first waveguide, the depth of the recess and the height of the first waveguide are measured parallel to the further direction, and the further direction is perpendicular to the first direction.

[0400] The 2ndto 5'1'. 7thto 29th, and 34thto 42ndpreferred embodiments of the invention are also further preferred embodiments of the preferred embodiment Al.

[0401] A preferred embodiment A2 of the invention is an arrangement comprising a. a first waveguide adapted and arranged for the propagation of electromagnetic waves; b. a layer of the first kind; c. at least one electrically conductive element, wherein, in a cross-sectional cut of the arrangement, i. the first waveguide and the at least one electrically conductive element are arranged to overlap; ii. the at least one electrically conductive element is arranged between the first waveguide and the layer of the first kind, wherein the first waveguide has a first refractive index , the layer of the first kind has a second refractive index n2, and and n2vary by 30 % or less, preferably by 27 % or less, more preferably by 25 % or less, and further preferably by 23 % or less.

[0402] The 2ndto 29th, and 35thto 42ndpreferred embodiments of the invention are also further preferred embodiments of the preferred embodiment A2.

[0403] A preferred embodiment A3 of the invention is an arrangement comprising a. a first waveguide a. that is adapted and arranged for the propagation of electromagnetic waves, and b. that has a first refractive index ; b. a layer of the first kind that has a second refractive index n2, c. at least one electrically conductive element, wherein, in a cross-sectional cut of the arrangement, i. the first waveguide and the at least one electrically conductive element are arranged to overlap; ii. the at least one electrically conductive element is arranged between the first waveguide and the layer of the first kind, wherein the first waveguide comprises a recess that at least partially faces, preferably faces, the at least one electrically conductive element, a depth of the recess is less than a height of the first waveguide, the depth of the recess and the height of the first waveguide are measured parallel to the further direction, the further direction is perpendicular to the first direction, and wherein and n2preferably vary by 30 % or less, more preferably by 27 % or less, even more preferably by 25 % or less, and further preferably by 23 % or less.

[0404] The 2ndto 5'1'. 7thto 29th, and 35thto 42ndpreferred embodiments of the invention are also further preferred embodiments of the preferred embodiment A3.

[0405] A preferred embodiment A4 of the invention is an arrangement comprising a. a first waveguide adapted and arranged for the propagation of electromagnetic waves; b. at least one element of a further kind, wherein, i. in a cross-sectional cut of the arrangement, the first waveguide and the at least one element of the further kind are arranged to overlap, and ii. the at least one element of the further kind is a further waveguide; wherein the first waveguide comprises a recess that at least partially faces, preferably faces, the at least one element of the further kind, a depth of the recess is less than a height of the first waveguide, the depth of the recess and the height of the first waveguide are measured parallel to the further direction, and the further direction is perpendicular to the first direction.

[0406] The 2ndto 5th, and 31stto 42ndpreferred embodiments of the invention are also further preferred embodiments of the preferred embodiment A4.

[0407] TEST METHODS

[0408] The test methods which follow were utilized within the context of the invention. Unless stated otherwise, the measurements were conducted at an ambient temperature of 23 °C, an ambient air pressure of 100 kPa (0.986 atm) and a relative air humidity of 50 %. Dimensions and distance

[0409] For producing a sample lamella, a focused ion beam is used to make a cut through the arrangement. The thickness of the sample lamella is 50 nm. The sample lamella preparation is conducted automatically using the Thermo Scientific AutoTEM 5 software from Thermo Fisher Scientific Inc.

[0410] Dimensions (such as length, width and height) of, e.g., a first waveguide, a recess, and an element are measured using scanning electron microscopy (SEM).

[0411] Width of, e.g., a first waveguide, a recess, and an element are measured parallel to a first direction. Length of, e.g., a first waveguide, a recess, and an element are measured parallel to a second direction (that is perpendicular to the first direction). Height, depth, and thickness of, e.g., a first waveguide, a recess, and an element are measured parallel to the further direction (that is perpendicular to both the first direction and the second direction).

[0412] Refractive index

[0413] The refractive indices used herein are for a wavelength of 1550 nm.

[0414] The refractive index of a material is measured using ellipsometry. A model VUV-VASE ellipsometer, commercially available from J.A. Woollam Co. (USA) is used. For the measurement, a 100 nm thick film of the material is irradiated using electromagnetic waves with a wavelength of 1550 nm. For the materials indicated below, the following models are used for the ellipsometry analysis: i. oxides (e.g., SiOx, A1OX): the Cauchy model with three coefficients (commonly denoted by A, B, and C), ii. nitrides (e.g., SiNx): the Tauc-Lorentz model, iii. amorphous materials (e.g., oc-Si): the Cody-Lorentz model.

[0415] Further details may be found in, e.g., An Introduction to Modeling in Spectroscopic Ellipsometry, Focusing on Models for Transparent Materials: the Cauchy and Sellmeier Models". Cushman, C., Smith, N., Kaykhaii, M., Podraza, N., and Linford. M. (2016), Vacuum Technology and Coating, 7.

[0416] Modes

[0417] To determine the modes, as well as the intensity of the modes, in a waveguide the simulation software Lumerical MODE, commercially available from Ansys Inc. (USA), is used. The simulation software uses a finite difference eigenmode solver. Three-dimensional simulations are performed, wherein the spatial grid uses a perfectly matched layer (PML) boundary condition for all three spatial dimensions. The spatial mesh size should be 1 % of the smallest wavelength of the electromagnetic waves that are propagated in the waveguide.

[0418] With the maximum intensity of the TEO mode normalised to 1, the dimensions of the spatial grid should be chosen sufficiently large such that intensities of the TEO mode with values of 10-7or higher are present in the spatial region simulated. If the TEO mode is not present, then the lowest order TE mode present should be used as the reference to determine the dimensions of the spatial grid. For example, if the TEO mode is not present, the TE1 mode should be used as the reference. For example, if neither the TEO mode nor the TE1 mode are present, the TE2 mode should be used as the reference. If no TE mode is present, the lowest order TM mode present should be used as the reference. The simulations are also used to determine the first distance, the second distance, the third distance, the fourth distance, the fifth distance, and the sixth distance.

[0419] The invention is now illustrated by non-limiting examples and exemplifying embodiments.

[0420] FIGURES

[0421] List of figures

[0422] The figures serve to exemplify the present invention and should not be viewed as limiting the invention (e.g., the figures show preferred embodiments and preferred aspects of the invention). The figures are not drawn to scale. Unless specific otherwise, the same reference numbers indicate the same features in the figures.

[0423] Fig. 1A: schematic illustration showing a cross-section of a first embodiment of an arrangement according to the invention.

[0424] Fig. IB: schematic illustration showing a cross-section of a second embodiment of an arrangement according to the invention.

[0425] Fig. 2A: schematic illustration showing a cross-section of a third embodiment of an arrangement according to the invention.

[0426] Fig. 2B: schematic illustration showing a cross-section of the third embodiment of the arrangement according to the invention, viewed from the side.

[0427] Fig. 2C: schematic illustration showing a cross-section of an alternative of the third embodiment of the arrangement according to the invention.

[0428] Fig. 3A: schematic illustration showing a cross-section of a fourth embodiment of an arrangement according to the invention.

[0429] Fig. 3B: schematic illustration showing a cross-section of a fifth embodiment of an arrangement according to the invention.

[0430] Fig. 4A: schematic illustration showing a cross-section of a sixth embodiment of an arrangement according to the invention.

[0431] Fig. 4B: schematic illustration showing a cross-section of a seventh embodiment of an arrangement according to the invention.

[0432] Fig. 5: schematic illustration showing how dimensions of a first waveguide according to the invention are determined.

[0433] Fig. 6 A: schematic illustration showing a first waveguide and an element that overlap each other. Fig. 6B : schematic illustration showing a first waveguide and an element that do not overlap each other.

[0434] Fig. 7A: schematic illustration showing a first waveguide with a recess that faces an element.

[0435] Fig. 7B: schematic illustration showing a first waveguide with a recess that does not face an element.

[0436] Figs 8 A and 8B: schematic illustrations showing an intensity of a mode of an electromagnetic wave propagating in an arrangement according to the invention.

[0437] Figs 9A - 9D: schematic illustrations showing various alternative embodiments of the first waveguide.

[0438] Fig. 10: schematic illustration of a method for producing an arrangement according to the invention. Figs 11 and 12: variations of the method shown in Fig. 10.

[0439] Fig. 13: flow diagram showing the steps of a method for producing an arrangement according to the invention. Figs 14 to 34: schematic diagrams illustrating various embodiments that comprise at least one arrangement according to the invention.

[0440] Fig. 35: variation of the method shown in Fig. 10.

[0441] Description of figures

[0442] Fig. 1A is a schematic illustration showing a cross-section of a first embodiment of an arrangement 1 according to the invention. The arrangement 1 in Fig. 1 A is a modulator that is adapted and arranged to modulate electromagnetic waves. The arrangement comprises a first waveguide 101 that is adapted and arranged for the propagation of electromagnetic waves (the cross-section of the arrangement is made perpendicular to a length of the first waveguide 101). The first waveguide 101 can be made from, e.g., silicon nitride. The arrangement also has two elements 103A and 103B that are arranged to overlap the first waveguide 101. The elements 103A and 103B are electrically conductive elements that are in the form of graphene layers. The elements 103 A and 103B are also adapted and arranged to allow for a coupling between the first waveguide 101 and the elements 103 A and 103B (i.e., an electromagnetic wave propagating in the first waveguide 101 can be at least partially absorbed by the elements 103A and 103B). The arrangement is also adapted and arranged such that an electric potential can be applied (and varied) between the sections of the elements 103A and 103B that overlap. By varying the electric potential, the level of absorption of electromagnetic waves by the elements 103 A and 103 B can be increased and decreased. The elements 103 A and 103B are also in electrical connection with electrodes 111 A and 11 IB, respectively.

[0443] The first waveguide 101 has a recess 102 that faces the elements 103A and 103B. The recess 102 does not extend through the waveguide 101. In other words, a depth of the recess 102 is less than a height of the first waveguide 101, with the depth of the recess 102 and the height of the first waveguide 101 measured parallel to a further direction 108, wherein the further direction 108 is perpendicular to a first direction 107. In Fig. 1 A the first waveguide 101 is arranged on a first dielectric layer 104. The first dielectric layer 104 may be, e.g., a substrate (such as a silicon substrate) or a silicon dioxide layer. A second dielectric layer 105 is arranged next to the first waveguide 101 (i.e., the first waveguide 101 is embedded in the second dielectric layer 105). The recess 102 is filled with a dielectric material 125. This dielectric material 125 may be the same or different to the material of the second dielectric layer 105. The second dielectric layer 105 can be made from, e.g., aluminium oxide or silicon dioxide. While the dielectric material 125 in the recess 102 may also be e.g., aluminium oxide or silicon dioxide, it is preferred that the dielectric material 125 is, e.g., amorphous silicon or silicon nitride. A third dielectric layer 106 separates the elements 103A and 103B. The third dielectric layer 106 may be made from, e.g., aluminium oxide.

[0444] Fig. IB is a schematic illustration showing a cross-section of a second embodiment of an arrangement 2 according to the invention. The arrangement 2 in Fig. IB is a photodetector that is adapted and arranged to detect electromagnetic waves (e.g., by the at least partial absorption of electromagnetic waves propagating in the first waveguide 101). The arrangement in Fig. IB is similar to the arrangement in Fig. 1A, with the difference that the arrangement in Fig. IB has only one element 103.

[0445] Fig. 2A is a schematic illustration showing a cross-section of a third embodiment of an arrangement 3 according to the invention. The arrangement 3 comprises a first waveguide 101 that is adapted and arranged for the propagation of electromagnetic waves (the cross-section of the arrangement is made perpendicular to a length of the first waveguide 101). The first waveguide 101 can be made from, e.g., silicon nitride. The arrangement also has an element 109 that is arranged to overlap the first waveguide 101. In Fig. 2A the element 109 is a further waveguide. The further waveguide 109 can also be made from, e.g., silicon nitride. The arrangement in Fig. 2A is adapted and arranged to couple electromagnetic waves propagating in the first waveguide 101 into the further waveguide 109. The first waveguide 101 has a recess 102 that faces the further waveguide 109. A depth of the recess 102 is less than a height of the first waveguide 101, with the depth of the recess 102 and the height of the first waveguide 101 measured parallel to a further direction 108, and wherein the further direction 108 is perpendicular to a first direction 107. The first waveguide 101 and the further waveguide 109 are surrounded by a second dielectric layer 105 (e.g., the first waveguide 101 and the further waveguide 109 are embedded in the second dielectric layer 105). The second dielectric layer 105 also fills the recess 102. The second dielectric layer 105 can be made from, e.g., aluminium oxide. Alternatively, the recess 102 may be filled with a dielectric material that is different to the material from which the second dielectric layer 105 is made (as shown in Figs 1A and IB).

[0446] Fig. 2B is a schematic illustration showing a cross-section of the arrangement 3 of Fig. 2A, viewed from the side. The cross-section in Fig. 2A is made perpendicular to the length of the first waveguide 101, wherein the cross-section in Fig. 2B is made parallel to a length of the first waveguide 101. As can be seen in Fig. 2B, the first waveguide 101 and the further waveguide 109 also overlap along a second direction 110. The second direction 110 is perpendicular to both the first direction 107 and the further direction 108.

[0447] Fig. 2C is schematic illustration showing a cross-section of an alternative arrangement 4 of the third embodiment of the arrangement according to the invention, as shown in Figs 2A and 2B. As can be seen in Fig. 2C, the first waveguide 101 and the further waveguide 109 have a similar configuration. In particular, the first waveguide 101 has a recess 102A that faces the further waveguide 109, while the further waveguide 109 has a recess 102B that faces the first waveguide 101.

[0448] Fig. 3A is a schematic illustration showing a cross-section of a fourth embodiment of an arrangement 5 according to the invention. The arrangement 5 in Fig. 3 A is a modulator that is adapted and arranged to modulate electromagnetic waves. The arrangement comprises a first waveguide 101 that is adapted and arranged for the propagation of electromagnetic waves (the cross-section of the arrangement is made perpendicular to a length of the first waveguide 101). The first waveguide 101 can be made from, e.g., silicon nitride. The arrangement also has two elements 103A and 103B that are arranged to overlap the first waveguide 101. The elements 103A and 103B are electrically conductive elements that are in the form of graphene layers. The elements 103 A and 103B are also adapted and arranged to allow for a coupling between the first waveguide 101 and the elements 103 A and 103B (i.e., an electromagnetic wave propagating in the first waveguide 101 can be at least partially absorbed by the elements 103A and 103B). The arrangement is also adapted and arranged such that an electric potential can be applied (and varied) between the sections of the elements 103A and 103B that overlap. By varying the electric potential, the level of absorption of electromagnetic waves by the elements 103 A and 103 B can be increased and decreased. The elements 103 A and 103B are also in electrical connection with electrodes 111 A and 11 IB, respectively.

[0449] In Fig. 3 A the first waveguide 101 is arranged on a first dielectric layer 104. The first dielectric layer 104 may be, e.g., a substrate (such as a silicon substrate) or a silicon dioxide layer. A second dielectric layer 105 is arranged next to the first waveguide 101 (i.e., the first waveguide 101 is embedded in the second dielectric layer 105). Arranged between the elements 103A and 103B is a third dielectric layer 106 made from, e.g., aluminium oxide. Arranged above the element 103B is a layer of a first kind 112, that is also made from, e.g., aluminium oxide. Superimposed on the layer of the first kind 112 is a layer of a second kind 126 that is made from, e.g., silicon nitride. The layer of the first kind 112 and the layer of the second kind 126 touch each other.

[0450] Fig. 3B is a schematic illustration showing a cross-section of a fifth embodiment of an arrangement 6 according to the invention. The arrangement 6 in Fig. 3B is a photodetector that is adapted and arranged to detect electromagnetic waves (e.g., by the at least partial absorption of electromagnetic waves propagating in the first waveguide 101). The arrangement in Fig. 3B is similar to the arrangement in Fig. 3 A, with a difference being that the arrangement in Fig. 3B has only one element 103.

[0451] The arrangement 7 in Fig. 4A is the same as the arrangement 5 in Fig. 3 A, except that the first waveguide 101 has a recess 102 that faces the elements 103A and 103B. A depth of the recess 102 is less than a height of the first waveguide 101, with the depth of the recess 102 and the height of the first waveguide 101 measured parallel to a further direction 108, wherein the further direction 108 is perpendicular to a first direction 107.

[0452] The arrangement 8 in Fig. 4B is the same as the arrangement 6 Fig. 3B, except that the first waveguide 101 has a recess 102 that faces the element 103. A depth of the recess 102 is less than a height of the first waveguide 101, with the depth of the recess 102 and the height of the first waveguide 101 measured parallel to a further direction 108, wherein the further direction 108 is perpendicular to a first direction 107.

[0453] Variations in the modulator and photodetector of Figs 1 A to 4B are also possible. These variations include, e.g., the number and / or arrangement of graphene layer(s) and / or dielectric layers. For example, the photodetector of Fig. 4B may have more than one element and more than one layer of the first kind.

[0454] Fig. 5 is a schematic illustration showing how dimensions of a first waveguide according to the invention are determined. Shown in Fig. 5 is cross-section of a first waveguide 101 with a recess 102. The cross-section is made perpendicular to a length of the first waveguide 101. The first waveguide 101 has a height 113 (measured parallel to the further direction 108) and a width 114 (measured parallel to the first direction 107). The height 113 is measured between the points ZWiand ZW2 and the width 114 is measured between the points XWiand XW2- If the first waveguide 101 has a non-uniform height, the “height 113 of the first waveguide 101” is measured at a position where the first waveguide 101 has a maximum value for the height (e.g., the height is not measured at the position of the recess 102). If the first waveguide 101 has a non-uniform width, the “width 114 of the first waveguide 101” is measured at a position where the first waveguide 101 has a maximum value for the width. The “height 113” and “width 114” of the first waveguide 101 should thus be understood as a maximum height and a maximum width of the first waveguide 101, respectively.

[0455] The recess 102 has a depth 115 (measured parallel to the further direction 108) and a width 116 (measured parallel to the first direction 107). The depth 115 is measured between the points ZRI and ZR2and the width 116 is measured between the points XRI and XR2. If the recess 102 has a non-uniform depth, the “depth 115 of the recess 102” is measured at a position where the recess 102 has a maximum value for the depth. If the recess 102 has a non-uniform width, the “width 116 of the recess 102” is measured at a position where the recess 102 has a maximum value for the width. The “depth 115” and “width 116” of the recess 102 should thus be understood as a maximum depth and a maximum width of the recess 102, respectively.

[0456] A centre of the first waveguide 101 has coordinates (XC2, ZC2), wherein said coordinates are determined as follows:

[0457] Xc2 = (Xw2 + Xwi) / 2, and

[0458] Zc2 = (Zw2 + Zwi) / 2.

[0459] The first waveguide 101 extends between the coordinates Xwi and XW2 on the first direction 107. The first waveguide 101 extends between the coordinates Zwi and ZW2 on the further direction 108.

[0460] A centre of the recess 102 has coordinates (XCi, Zci), wherein said coordinates are determined as follows:

[0461] Xci = (XR2+ XRI) / 2, and

[0462] Zci = (ZR2 + ZRI) / 2.

[0463] The recess 102 extends between the coordinates XRI and XR2on the first direction 107. The recess 102 extends between the coordinates ZRI and ZR2on the further direction 108.

[0464] Fig. 6A is a schematic illustration showing a first waveguide and an element that overlap each other. Fig. 6B is a schematic illustration showing a first waveguide and an element that do not overlap each other. Fig. 6A shows a cross-section of an arrangement comprising a first waveguide 101 A and an element 103 A. The crosssection is made perpendicular to a length of the first waveguide 101 A. In the sense of Fig. 6A, a section 127 of the element 103 A is arranged directly above the first waveguide 101 A. The first waveguide 101 A and the element 103 A therefore overlap each other. Alternatively, if a section of the first waveguide 101 A was arranged directly above the element 103 A, then the first waveguide 101 A and the element 103 A would also overlap each other.

[0465] Fig. 6B shows a cross-section of an arrangement comprising a first waveguide 101B and an element 103B. The cross-section is made perpendicular to a length of the first waveguide 101B. In the sense of Fig. 6B, no section of the element 103B is arranged directly above the first waveguide 101B. The first waveguide 101B and the element 103B therefore do not overlap each other.

[0466] Fig. 7A is a schematic illustration showing a first waveguide with a recess that faces an element. Fig. 7A shows a cross-section of an arrangement comprising a first waveguide 101 A and an element 103 A. The crosssection is made perpendicular to a length of the first waveguide 101A. The first waveguide 101A has a recess 102A that faces the element 103 A. Fig. 7B is a schematic illustration showing a first waveguide with a recess that does not face an element. Fig. 7B shows a cross-section of an arrangement comprising a first waveguide 10 IB and an element 103B. The cross-section is made perpendicular to a length of the first waveguide 101B. The first waveguide 101B has a recess 102B that does not face the element 103B.

[0467] Fig. 8A is a schematic illustration showing an intensity of a mode of an electromagnetic wave propagating in an arrangement according to the invention. Here the mode can be a transverse magnetic mode and / or a transverse electric mode. Fig. 8A shows an arrangement that comprises a first waveguide 101 that has a recess 102 with a centre 117 (see Fig. 5 and the corresponding figure description above). The arrangement has an interface 118 between the first waveguide 101 and the recess 102. Also shown in Fig. 8A is a maximum intensity 119 of a mode propagating in the first waveguide 101. A first graph 120 shows the intensity of the mode along the first direction 107, and a second graph 121 shows the intensity of the mode along the further direction 108. In Fig. 8A it can be seen that, when measured along the further direction 108, the maximum intensity 119 is arranged closer to the interface 118 than to the centre 117 of the recess 102. A distance between the maximum intensity 119 and the interface 118 is measured as the shortest distance between the interface 118 and the maximum intensity 119.

[0468] Fig. 8B is the same as Fig. 8A, with the difference that the mode has two maximum intensities 119A and 119B. These maximum intensities 119A and 119B are arranged next to the recess 102 (in the sense of Fig. 8B). Alternatively stated, the Z-coordinate Zi of the maximum intensities is such that ZRI < Zi < ZR2(the Z-coordinates are measured on the further direction 108). Furthermore, the maximum intensity 119A has an X-coordinate XIA, with XIA < XRbwhile the maximum intensity 119B has an X-coordinate XiB, with XR2< XIB, wherein said X- coordinates are measured on the first direction 107 (the recess extends between XRI and XR2). In Fig. 8B there are thus two maximum intensities so that both the relations XI-TE < XRI (for maximum intensity 119A) and XR2< Xi.TB(for maximum intensity 119B) apply.

[0469] A distance between the maximum intensity 119A and the interface 118A is less than a distance between the maximum intensity 119A and the centre 117 of the recess 102, as well as being less than a distance between the maximum intensity 119A and a centre 124 of the first waveguide 101. Similarly, a distance between the maximum intensity 119B and the interface 118B is less than a distance between the maximum intensity 119B and the centre 117 of the recess 102, as well as being less than a distance between the maximum intensity 119B and the centre 124 of the first waveguide 101. Figs 9A to 9D are schematic illustrations showing various alternative embodiments of the first waveguide. These figures show a cross-section of the first waveguide made perpendicular to a length of the waveguide. As shown in Fig. 9A, the recess 102A is not arranged in a middle of the first waveguide 101 A but is arranged closer to a first side 122 of the first waveguide 101A than a further side 123 of the first waveguide 101A. As shown in Figs 9B to 9D, the recesses 102B to 102D may have shapes that are not rectangular. The shape of a recess (of a first waveguide according to the invention) is not limited to the shapes shown in Figs 9A to 9D but may also have a shape not shown in said figures.

[0470] Fig. 10 shows a schematic illustration of a method for producing an arrangement according to the invention. In Fig. 10A a substrate 201 is provided with a first waveguide layer 202 superimposed on the substrate 201. The substrate 201 may be made from, e.g., silicon or silicon dioxide. The first waveguide layer 202 may be made from, e.g., silicon nitride. In Fig. 10B-I, sections of the first waveguide layer 202 have been removed to obtain a first waveguide 203. The sections of the first waveguide layer 202 can be removed using, e.g., patterning. In Fig. 10C-I, a further section of the first waveguide 203 has been removed to form a recess 204 in the first waveguide 203. The further section of the first waveguide 203 can also be removed using, e.g., patterning.

[0471] As alternatives to the steps of Figs 10B-I and 10C-I, the steps shown in Figs 10B-II and 10C-II may be performed. In Fig. 10B-II a section of the first waveguide layer 202 is removed (using, e.g., patterning) to obtain a recess 204 in the first waveguide layer 202. In Fig. 10C-II, further sections of the first waveguide layer 202 are removed (using, e.g., patterning) to obtain a first waveguide 203 with a recess 204.

[0472] In Fig. 10D a dielectric layer A 205 is superimposed (e.g., using chemical vapour deposition) on the first waveguide 203. The dielectric layer A 205 also fills the recess 204. The dielectric layer A 205 can be, e.g., aluminium oxide. The dielectric layer A 205 may also be subjected to a chemical-mechanical polishing.

[0473] In Fig. 10E an element 206 is superimposed on the first waveguide 203 such that the element 206 overlaps the first waveguide 203 and such that the recess 204 faces the element 206. This superimposition may include the sub-steps of superimposing an element layer on the first waveguide 203 and removing sections of the element layer to obtain the element 206.

[0474] In Fig. 10F a layer of the first kind 207 is superimposed (e.g., using chemical vapour) on the element 206. Sections of the layer of the first kind 207 are removed (e.g., using patterning) and electrodes 208A and 208B are formed in the removed sections. The electrodes 208A and 208B are in electrical contact with the element 206.

[0475] Various different variations of the method shown in Fig. 10 are also possible, as shown in Fig. 11. The steps in Figs 11 A and 1 IB are as described in Figs 10A and 10B-I, respectively. In Fig. 11C, the dielectric layer A 205 is superimposed on the first waveguide 203. Said dielectric layer A 205 is subsequently subjected to chemicalmechanical polishing. In Fig. 1 ID, a section of the first waveguide 203 is removed to form a recess 204. The recess 204 is thus not filled with the dielectric layer A 205. In Fig. HE a dielectric layer B 209 is superimposed on the first waveguide 203, with the dielectric layer B 209 thereby filling the recess 204. The dielectric layer B 209 may be subjected to chemical-mechanical polishing. The steps in Figs 10E and 10F may then be repeated following the step in Fig. 11D. Various different variations of the method shown in Fig. 10 are also possible, as shown in Fig. 35. The steps in Figs 35A and 35B are as described in Figs 10A and 10B-I, respectively. In Fig. 35C, the dielectric layer A 205 is superimposed on the first waveguide 203. Said dielectric layer A 205 is subsequently subjected to chemicalmechanical polishing. In Fig. 35D, a section of the first waveguide 203 is removed to form a recess 204. The recess 204 is thus not filled with the dielectric layer A 205. In Fig. 35E a dielectric layer B 209 is superimposed on the first waveguide 203, with the dielectric layer B 209 thereby filling the recess 204. The dielectric layer B 209 may be subjected to chemical-mechanical polishing. The steps in Figs 10E and 10F may then be repeated following the step in Fig. 35E.

[0476] Another alternative of the method shown in Fig. 10 is also shown in Fig. 12. In Fig. 12A sections of a dielectric layer B 209 have been removed to form a projection 210. A first waveguide layer 202 is then superimposed on the dielectric layer B 209, with the projection 210 forming a recess 204 in the first waveguide layer 202. The superposition of any further dielectric layer and one or more elements may be performed according to any method deemed suitable by the skilled person. For example, in Fig. 12B sections of the first waveguide layer 202 have been removed to obtain a first waveguide 203. The sections of the first waveguide layer 202 can be removed using, e.g., patterning. In Fig. 12C, a dielectric layer A 205 is superimposed (e.g., using chemical vapour deposition) on the first waveguide 203. The dielectric layer A 205 can be, e.g., aluminium oxide. The dielectric layer A 205 has also been subjected to a chemical-mechanical polishing. In Fig. 12D, the dielectric layer B 209 has also been subjected to chemical-mechanical polishing. The steps in Figs 10E and 10F may then be repeated following the step in Fig. 12D.

[0477] Fig. 13 is a flow diagram showing the steps of a method for producing an arrangement according to the invention. In step 301, a first waveguide layer is superimposed on a substrate. Subsequently, either steps 302A and 303 A are performed, or steps 302B and 303B are performed. In step 302A, at least one section of the first waveguide layer is removed to obtain the first waveguide. In step 303 A, a section of the first waveguide is removed to form a recess in the first waveguide. Alternatively, in step 302B a section of the first waveguide layer is removed to form a recess in the first waveguide layer. In step 303B, at least one section of the first waveguide layer is removed to obtain the first waveguide. In step 304 a dielectric layer is superimposed on the first waveguide, with the dielectric layer subsequently subjected to chemical-mechanical polishing. In step 305, an element is superimposed on the first waveguide such that the element and the first waveguide overlap. In optional step 306, a layer of the first kind is superimposed on the element.

[0478] EXAMPLES

[0479] The invention is illustrated further by way of examples. The invention is not restricted to the examples. In the examples the following scale is used for the technical effects, arranged from smallest to largest: “ - , - — , — , --, -

[0480] , +, ++, +++, ++++, +++++”. Example 1

[0481] In Example 1 arrangements in the form of photodetectors are provided. Electromagnetic waves propagating in the first waveguide are detected using the photodetectors. The electromagnetic waves have a wavelength of 1550 nm and a polarised TE mode.

[0482] The following applies to the photodetectors of Example 1 : the first waveguide is made from silicon nitride and has a height and width of 350 nm and 1000 nm, respectively. The element is a graphene layer with a width of 2500 nm. A biasing voltage of 5 V is applied to the photodetectors, with a peak-to-peak voltage of 1 V.

[0483] In Example 1, the following photodetectors are used. i. Example 1.1 : an photodetector according to the invention is provided, as shown in Fig. IB. The first waveguide thus has a recess that faces the graphene layer (the element). A depth and a width of the recess are 100 nm and 150 nm, respectively. ii. Example 1.2: a photodetector similar to the photodetector of Example 1.1 is provided, with the difference that the first waveguide does not have a recess.

[0484] Table 1

[0485] The technical effects in Table 1 are as follows:

[0486] Bitrate: the rate of data flow in digital networks are typically measured in bits per second. This technical effect is the bitrate that is achievable by using the photodetectors of the examples. A indicates a smaller bitrate, while a “+” indicates a larger bitrate. It is desired to have a larger bitrate.

[0487] Responsivity: the ratio of current output by the photodetector to optical power of the electromagnetic waves propagating in the first waveguide. A indicates a lower responsivity, while a “+” indicates a larger responsivity. It is desired to have a larger responsivity. Energy consumption: the energy required by the photodetector to detect one bit of data. A indicates a smaller energy consumption, while a “+” indicates a larger energy consumption. It is desired to have a smaller energy consumption.

[0488] Footprint: the area occupied by the photodetector on, e.g., a substrate. A indicates a smaller footprint, while a “+” indicates a larger footprint of the photodetectors. It is desired to have a smaller footprint.

[0489] Example 2

[0490] In Example 2 arrangements comprising a first waveguide and a further waveguide (an element) are provided. Electromagnetic waves propagating in the first waveguide are coupled to the further waveguide. The electromagnetic waves propagating in the first waveguide have a wavelength of 1550 nm and a polarised TE mode.

[0491] The following applies to the arrangements of Example 2: both the first waveguide and the further waveguide are made from silicon nitride. Both the first waveguide and the further waveguide have a height and width of 350 nm and 1000 nm, respectively.

[0492] In Example 2.1, the following arrangements are used. i. Example 2.1: an arrangement according to the invention is provided, as shown in Figs 2A and 2B. The first waveguide thus has a recess that faces the further waveguide. A depth and a width of the recess are 100 nm and 150 nm, respectively. ii. Example 2.2: an arrangement, not according to the invention, is provided. The first waveguide does not have a recess.

[0493] Table 2 The technical effects in Table 2 are as follows:

[0494] Overlap between first and further waveguides: the length of the first waveguide that overlaps with the second waveguide, as measured parallel to the second direction (the length of the waveguides are also measured parallel to the second direction). A indicates a smaller overlap, while a “+” indicates a larger overlap. It is desired to have a smaller overlap.

[0495] Bitrate: the rate of data flow in digital networks are typically measured in bits per second. This technical effect is the bitrate that is achievable by using the arrangements of the examples. A indicates a smaller bitrate, while a “+” indicates a larger bitrate. It is desired to have a larger bitrate.

[0496] Maximum intensity of electromagnetic waves in further waveguide: the maximum intensity of the electromagnetic waves that have been coupled from the first waveguide to the further waveguide. A “+” indicates a larger maximum intensity, and a indicates a smaller intensity. It is desired to increase the maximum intensity.

[0497] Cross-talk between first and further waveguides: electromagnetic waves coupled into the further waveguide may partially be coupled back into the first waveguide. A “+” indicates a larger cross-talk, and a “- ” indicates a smaller cross-talk. It is desired to reduce the cross-talk.

[0498] Misalignment tolerance: the effect of a misalignment between the first and further waveguides on the coupling of electromagnetic waves from the first waveguide into the further waveguide. For example, two waveguides in two separate chips often require a precise alignment between said two waveguides in order to couple electromagnetic waves between the two chips. A “+” a larger misalignment tolerance, and a “- ” indicates a smaller misalignment tolerance. It is desired to increase the misalignment tolerance.

[0499] Example 3

[0500] In Example 3 arrangements in the form of modulators are provided. Electromagnetic waves propagating in the first waveguide are modulated using the modulators. The electromagnetic waves that are modulated initially have a wavelength of 1550 nm and a polarised TE mode.

[0501] The following applies to the modulators of Example 3 : the first waveguide is made from silicon nitride and has a height and width of 350 nm and 1000 nm, respectively. The elements are two graphene layers arranged to overlap. A width of the overlapping region in each graphene layer is 600 nm (the overlap as measured parallel to the first direction). The graphene layers have a total width of 2500 nm. A biasing voltage of 5 V is applied to the modulators, with a peak-to-peak voltage of 1 V.

[0502] In Example 3, the following modulator are used. i. Example 3.1: an modulator according to the invention is provided, as shown in Fig. 1A. The first waveguide thus has a recess that faces the graphene layers (the elements). A depth and a width of the recess are 100 nm and 150 nm, respectively. ii. Example 3.2 : a modulator similar to the modulator of Example 3.1 is provided, with the difference that the first waveguide does not have a recess. Table 3

[0503] The technical effects in Table 3 are as described in Table 1, with the following additional technical effects.

[0504] Extinction ratio: the extinction is the optical power ratio between transmitting a “1” and a “0” with the modulator. A “+” indicates a larger ratio, and a indicates a smaller ratio. It is desired to increase the extinction rate.

[0505] Insertion loss: an undesired loss in the intensity of the electromagnetic wave as a result of the presence of a modulator. indicates a smaller insertion loss, while a “+” indicates a larger insertion loss. It is desired to decrease the insertion loss.

[0506] Example 4

[0507] In Example 4 arrangements in the form of photodetectors are provided. Electromagnetic waves propagating in the first waveguide are detected using the photodetectors. The electromagnetic waves that are modulated initially have a wavelength of 1550 nm and a polarised TE mode.

[0508] The following applies to the photodetectors of Example 4: the first waveguide is made from silicon nitride and has a height and width of 350 nm and 1000 nm, respectively. The element is a graphene layer with a width of 2500 nm. A biasing voltage of 5 V is applied to the photodetectors, with a peak-to-peak voltage of 1 V.

[0509] In Example 4, the following photodetectors are used. i. Example 4.1 : a photodetector according to the invention is provided, as shown in Fig 4B. The photodetector thus has a layer of the first kind that is made from aluminium oxide and that has a thickness of 30 nm. Superimposed on the layer of the first kind (and in contact with the layer of the first kind) is a layer of a second kind. The layer of the second king is made from silicon nitride. A total thickness of the layers of the first and second kinds is 200 nm. The first waveguide also has a recess that faces the graphene layer (the element). A depth and a width of the recess are 100 nm and 150 nm, respectively. ii. Example 4.2: a photodetector similar to the photodetector of Example 4.1 is provided, with the difference that the first waveguide does not have a recess. iii. Example 4.3: a photodetector, not according to the invention, is provided. The first waveguide does not have a recess, and the photodetector does not have a layer of the first kind.

[0510] Table 4 The technical effects in Table 4 are as described in Table 1.

[0511] REFERENCE LIST

[0512] First waveguide

[0513] Recess

[0514] Element

[0515] First dielectric layer

[0516] Second dielectric layer

[0517] Third dielectric layer

[0518] First direction

[0519] Further direction

[0520] Further waveguide

[0521] Second direction

[0522] Electrodes

[0523] Layer of the first kind

[0524] Height of first waveguide

[0525] Width of first waveguide

[0526] Depth of recess

[0527] Width of recess

[0528] Centre of recess

[0529] Interface between first waveguide and recess

[0530] Maximum intensity of mode propagating in first waveguide

[0531] Intensity measured along first direction

[0532] Intensity measured along further direction

[0533] First side of first waveguide

[0534] Further side of first waveguide

[0535] Centre of first waveguide

[0536] Dielectric material in recess

[0537] Layer of the second kind

[0538] Section of element overlapping first waveguide

[0539] Substrate

[0540] First waveguide layer

[0541] First waveguide

[0542] Recess

[0543] Dielectric layer A

[0544] Element

[0545] Layer of the first kind

[0546] Electrode 09 Dielectric layer B 10 Projection

[0547] 1000 First assembly

[0548] 1001 First sub-assembly

[0549] 1002 First arrangement

[0550] 1003 Second arrangement

[0551] 1004 First integrated circuit

[0552] 1005 First data storage means

[0553] 1006 First light emitting means

[0554] 1007 Further sub-assembly

[0555] 1008 Even-further arrangement

[0556] 1009 Further arrangement

[0557] 1010 Further integrated circuit

[0558] 1011 Further data storage means

[0559] 1012 Further light emitting means

[0560] 1100 Optical sensing module

[0561] 1101 First arrangement

[0562] 1102 Target area

[0563] 1103 Sensing means

[0564] 1104 Optics

[0565] 1105 Integrated circuit

[0566] 1106 Light emitting means

[0567] 1200 Apparatus adapted and arranged for a medical application

[0568] 1201 First arrangement

[0569] 1202 Further arrangement

[0570] 1203 First light emitting means

[0571] 1204 First integrated circuit

[0572] 1205 Sensing unit

[0573] 1300 Vehicle adapted and arranged for flight

[0574] 1301 First arrangement

[0575] 1302 First light emitting means

[0576] 1303 Further arrangement

[0577] 1304 First integrated circuit

[0578] 1305 Propulsion means 1306 Means to generate lift

[0579] 1307 Control system

[0580] 1308 Sensing unit

[0581] 1400 Robotic system

[0582] 1401 First arrangement

[0583] 1402 First light emitting means

[0584] 1403 Further arrangement

[0585] 1404 First integrated circuit

[0586] 1405 Robotic body

[0587] 1406 Sensing unit

[0588] 1407 Control module

[0589] 1408 External entity

[0590] 1500 Second assembly adapted and arranged for optical computing

[0591] 1501 Optical memoiy unit

[0592] 1502 Optical processor

[0593] 1503 Data communication module

[0594] 1504 Arrangement

[0595] 1600 Third assembly

[0596] 1601 Homomorphic operation module

[0597] 1602 Photonic encryption module

[0598] 1603 Photonic decryption module

[0599] 1604 Arrangement

[0600] 1606 Light emitting means

[0601] 1700 Optical connection module

[0602] 1701 First arrangement

[0603] 1702 Further arrangement

[0604] 1703 Waveguide

[0605] 1704 Light emitting means

[0606] 1705 Integrated circuit

[0607] 1800 F irst transportation means

[0608] 1801 First arrangement

[0609] 1802 Further arrangement

[0610] 1803 Sensing unit

[0611] 1804 Processing module 1805 Perception sub-module

[0612] 1806 Generation sub-module

[0613] 1807 Human-machine interface

[0614] 1808 Control unit

[0615] 1809 Steering means

[0616] 1810 Propulsion means

[0617] 1811 First integrated circuit

[0618] 1812 First light emitting means

[0619] 1900 Further transportation means

[0620] 1901 First arrangement

[0621] 1902 Further arrangement

[0622] 1903 Steering means

[0623] 1904 Propulsion means

[0624] 2000 Fourth assembly

[0625] 2001 Memory unit

[0626] 2002 Processor

[0627] 2003 Arrangement

[0628] 2100 Optical data communication module

[0629] 2101 First arrangement

[0630] 2102 Light emitting means

[0631] 2103 Further arrangement

[0632] 2104 Integrated circuit

[0633] 2200 Fifth assembly

[0634] 2201 First sub-assembly

[0635] 2202 First arrangement

[0636] 2203 Second arrangement

[0637] 2204 First integrated circuit

[0638] 2205 First data storage means

[0639] 2206 First light emitting means

[0640] 2207 Further sub-assembly

[0641] 2208 Even-further arrangement

[0642] 2209 Further arrangement

[0643] 2210 Further integrated circuit

[0644] 2211 Further data storage means

[0645] 2212 Further light emitting means 2213 Third arrangement

[0646] 2300 Optical data communication module

[0647] 2301 First arrangement

[0648] 2302 Light emitting means

[0649] 2304 Integrated circuit

[0650] 2400 Optical sensing module

[0651] 2401 First arrangement

[0652] 2402 Target area

[0653] 2403 Sensing means

[0654] 2404 Optics

[0655] 2405 Integrated circuit

[0656] 2406 Light emitting means

[0657] 2500 Apparatus adapted and arranged for a medical application

[0658] 2501 First arrangement

[0659] 2503 First light emitting means

[0660] 2504 First integrated circuit

[0661] 2505 Sensing unit

[0662] 2600 Vehicle adapted and arranged for flight

[0663] 2601 First arrangement

[0664] 2602 First light emitting means

[0665] 2604 First integrated circuit

[0666] 2605 Propulsion means

[0667] 2606 Means to generate lift

[0668] 2607 Control system

[0669] 2608 Sensing unit

[0670] 2700 Robotic system

[0671] 2701 F irst arrangement

[0672] 2702 First light emitting means

[0673] 2704 First integrated circuit

[0674] 2705 Robotic body

[0675] 2706 Sensing unit

[0676] 2707 Control module

[0677] 2708 External entity 2800 Optical connection module

[0678] 2801 First arrangement

[0679] 2804 Light emitting means

[0680] 2805 Integrated circuit

[0681] 2900 First transportation means

[0682] 2901 First arrangement

[0683] 2903 Sensing unit

[0684] 2904 Processing module

[0685] 2905 Perception sub-module

[0686] 2906 Generation sub-module

[0687] 2907 Human-machine interface

[0688] 2908 Control unit

[0689] 2909 Steering means

[0690] 2910 Propulsion means

[0691] 2911 First integrated circuit

[0692] 2912 First light emitting means

[0693] 3000 Further transportation means

[0694] 3001 First arrangement

[0695] 3003 Steering means

[0696] 3004 Propulsion means

Claims

CLAIMS1. An arrangement comprising a. a first waveguide adapted and arranged for the propagation of electromagnetic waves; b. at least one element, wherein, in a cross-sectional cut of the arrangement, the first waveguide and the at least one element are arranged to overlap; wherein the first waveguide comprises a recess that at least partially faces the at least one element, a depth of the recess is less than a height of the first waveguide, the depth of the recess and the height of the first waveguide are measured parallel to a further direction, and the further direction is perpendicular to a first direction.

2. The arrangement according to claim 1, wherein at least one or all of the following applies: a. a ratio of a width of the recess to a width of the first waveguide is in the range from 0.020 to 0.700, wherein said widths are measured parallel to the first direction.; b. a ratio of the depth of the recess to the height of the first waveguide is in the range from 0.05 to 0.58.

3. The arrangement according to any of the preceding claims, wherein at least one or all of the following applies: a. a width of the recess is in the range from 20 to 700 nm, with the width measured parallel to the first direction; b. a depth of the recess is in the range from 20 to 200 nm.

4. The arrangement according to any of the preceding claims, wherein the recess is adapted and arranged such that at least one or all of the following applies when an electromagnetic wave propagates in the first waveguide: a. a first distance is less than a second distance, wherein the first distance is measured between a maximum intensity of a transverse electric (TE) mode of the electromagnetic wave propagating in the first waveguide and an interface between the recess and the first waveguide, the second distance is measured between the maximum intensity of the TE mode and a centre of the first waveguide; b. the first distance is less than a third distance, wherein the first distance is measured between a maximum intensity of the TE mode of the electromagnetic wave propagating in the first waveguide and the interface between the recess and the first waveguide,- 82 -the third distance is measured between the maximum intensity of the TE mode and a centre of the recess.

5. The arrangement according to any of the preceding claims, wherein the first waveguide has a first refractive index n i . the recess has a further refractive index m, and wherein the recess is adapted and arranged such that one of the following applies when an electromagnetic wave propagates in the first waveguide: a. < nf and Gi < , where Gi is a group index of a mode propagating in the first waveguide; b. > nfand m < Gi < , where Gi is the group index of the mode propagating in the first waveguide.

6. The arrangement according to any of the preceding claims, wherein the at least one element is at least one electrically conductive element arranged as a layer.

7. The arrangement according to any of the preceding claims, wherein the arrangement is an opto-electronic device.

8. The arrangement according to any of the preceding claims 1 to 5, wherein the at least one element is at least one further waveguide.

9. The arrangement according to any of the preceding claims, wherein the arrangement further comprises a layer of a first kind, wherein, in a cross-sectional cut of the arrangement, the at least one element is arranged between the first waveguide and the layer of the first kind, wherein i. the first waveguide has a first refractive index , ii. the layer of the first kind has a second refractive index n2, and wherein ni and n2vary by 30 % or less.

10. The arrangement according to claim 9, wherein the layer of the first kind has a thickness that is in the range from 1 to 60 nm.

11. An electronic device comprising an arrangement according to any of the preceding claims.

12. A method for producing an arrangement, comprising the step of superimposing at least one element and a first waveguide onto each other, wherein the first waveguide has a recess, and wherein the at least one element and the first waveguide are superimposed onto each other such that the recess faces the at least one element.

13. An arrangement obtainable by the method according to claim 12.

14. Use of an arrangement according to any of the preceding claims 1 to 10, and 13, for at least one or all of the following: a. receiving of an optical signal; b. sending of an optical signal; c. transporting of an optical signal; d. coupling an electromagnetic wave propagating in the first waveguide to an element such that an electromagnetic wave propagates in the element.

15. Use of an arrangement according to any of the preceding claims 1 to 10, and 13, for at least one or all of the following: a. transferring data between a first part of an integrated circuit of an electronic device and a further part of said integrated circuit; b. transferring data between a first integrated circuit of an electronic device and a further integrated circuit; c. to inject an optical vector in an optical network and / or to read out an optical vector from an optical network.- 84 -

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