Inspection device and inspection system

Abstract

An embodiment disclosed in the present specification relates to an inspection device and an inspection system which split light from a light source into a plurality of signals and then delay and transmit one or more of the plurality of signals to an object under inspection, receive a plurality of reflected light rays reflected from the object under inspection, and analyze the spectra of the plurality of reflected light rays, thereby inspecting the thickness and shape of the object under inspection at a plurality of points.

Description

Inspection device and inspection system

[0001] The present invention relates to a technology for inspecting one or more of the thickness and shape of an object to be inspected.

[0002] The technology forming the background of the present invention relates to a technology for measuring / inspecting the condition of materials.

[0003] In the production process, the condition of materials can be inspected in various ways. An example of such existing technology is a 1D galvanometer scanner disclosed in Prior Art 1 (Korean Published Patent Application 10-2023-0017166). A galvanometer scanner is a device that inspects the thickness and shape of a material by scanning along a straight line, and measures the thickness and shape by measuring the spectral signal of reflected light at a specific point on the line.

[0004] In the case of the aforementioned prior art document 1, there was a problem in that it was difficult to receive reflected light at an accurate position because an error in the scan mirror angle occurred due to noise in the galvanometer scanner drive signal. In addition, due to the characteristics of the galvanometer scanner, the measurement point changed depending on the direction of rotation, and there was a problem in that the scanning speed slowed down as the number of measurement points increased.

[0005] Meanwhile, prior art document 2 (Optics Express Vol. 31, Issue 20, pp.32241-32252 (2023), Line spectroscopic reflectometry for rapid and large-area thickness measurement) discloses a technique for simultaneously measuring thickness information at each point on a line by irradiating a line beam light source onto a measurement object and then measuring the line beam-shaped reflected light with a hyperspectral camera (Area Sensor).

[0006] However, in the case of the aforementioned prior art 2, there were limitations in that an expensive hyperspectral camera was used, crosstalk between reflected signals at each point increased for samples with large scattering, and it was difficult to implement a high-power line beam, making it difficult to measure samples with low reflectivity.

[0007] In other words, conventional technologies posed a risk of inaccurate measurement of the condition of the inspection target, and there were problems involving limitations on the measurement range and the configuration of the measurement equipment.

[0008] The present invention aims to improve upon the limitations of the prior art as described above.

[0009] Accordingly, the present specification aims to provide an embodiment capable of accurately measuring the thickness and shape of an object to be inspected.

[0010] In addition, we intend to provide an embodiment capable of measuring the thickness and shape of an inspection target at high speed.

[0011] Furthermore, we intend to provide an embodiment in which scanning at multiple points of an inspection target can be performed without an expensive spectroscopic camera.

[0012] In addition, we intend to provide an embodiment that can increase measurement resolution with minimal vibration.

[0013] The present invention, for solving the problem described above, is characterized by branching a light source into a plurality of signals and then delaying one or more of the plurality of signals to irradiate a target for inspection.

[0014] Accordingly, by receiving a plurality of reflected lights reflected from the inspection target and analyzing the spectrum of the plurality of reflected lights, the thickness and shape at a plurality of points of the inspection target can be inspected.

[0015] The present invention, which uses such technical features as a means of solution, can be implemented as an apparatus, system, and method for inspecting the 3D thickness and shape of materials in a production process, and the present specification aims to provide embodiments of an inspection apparatus and inspection system that are applied to such technical fields or can be applied and implemented in such technical fields.

[0016] An embodiment of the above inspection device comprises: a light source device that generates measurement light; a plurality of optical fibers into which the measurement light is branched; one or more delay elements that delay the output time of the branched light of all but one of the plurality of optical fibers by a certain amount of time; a fiber array that emits a plurality of branched lights output from each of the plurality of optical fibers; an imaging lens that irradiates the plurality of branched lights emitted from the fiber array to different locations of an inspection target; and a spectroscopic sensor that measures the spectrum of reflected light reflected from the inspection target and generates a measurement signal for the measurement result.

[0017] In an embodiment of the above inspection device, the plurality of optical fibers may be provided in N numbers, and the one or more delay elements may be provided in N-1 numbers.

[0018] In the embodiment of the above inspection device, when the one or more delay elements are provided in multiple quantities, each can delay the output time of the corresponding branch light by a different fixed time.

[0019] In an embodiment of the above inspection device, each of the plurality of delay elements can delay the output time of the branched light so that the branched light is sequentially output from the plurality of optical fibers at a constant interval.

[0020] In an embodiment of the inspection device above, the reflected light may be received by the spectroscopic sensor after being reflected from the inspection target, passing through the one or more delay elements, and being further delayed by the specified time.

[0021] In an embodiment of the inspection device described above, a control device may be further included to determine one or more of the thickness and shape of the inspection target based on the measurement signal, and to determine whether the inspection target is abnormal according to the result of the determination.

[0022] In an embodiment of the inspection device described above, the control device may determine that the inspection target is normal if the judgment result corresponds to a preset standard condition, and determine that the inspection target is abnormal if the judgment result does not correspond to the standard condition.

[0023] In an embodiment of the inspection device above, a driving device may be further included for moving the position of the fiber array within one or more of a first range corresponding to a first axis and a second range corresponding to a second axis orthogonal to the first axis.

[0024] In an embodiment of the inspection device above, the driving device can move the position of the fiber array within the second range while the inspection target is moved along the first axis and the plurality of branched lights are irradiated onto the inspection target.

[0025] In an embodiment of the inspection device above, the driving device can move the position of the fiber array within one or more of the first range and the second range while the plurality of branched lights are irradiated onto the inspection target while the inspection target is fixed at the inspection position.

[0026] An embodiment of the above inspection system comprises: a light source unit that generates a pulse-shaped optical signal; a spectroscopic unit that branches the optical signal into a plurality of branch signals and delays the others, excluding one, at different times; a lens unit that irradiates the plurality of branch signals onto an inspection target; a sensor unit that receives a plurality of reflected signals reflected from the inspection target by the plurality of branch signals and measures the spectrum of the plurality of reflected signals; and a control unit that determines one or more of the thickness and shape of the inspection target based on the measurement result of the sensor unit.

[0027] In an embodiment of the above inspection system, the spectrometer is positioned at N branching points and outputs an input signal as two identical signals. N -Including one fiber coupler, the optical signal 2 N It can be branched into several branch signals.

[0028] In an embodiment of the above inspection system, the fiber coupler is 2 at the Nth branch end N-1 Dogs can be deployed.

[0029] In an embodiment of the above inspection system, the spectrometer is positioned on one side of each of the two outputs of the fiber coupler and delays the input signal for a certain period of time. N - Including one delay element, 2 of the plurality of branch signals N -1 can be delayed.

[0030] In an embodiment of the above inspection system, the delay element can delay the fixed time differently for each branching stage.

[0031] In an embodiment of the above inspection system, the spectrometer is positioned at N branching points and outputs an input signal by converting it into two paths. N -Including one optical switch, the optical signal 2 N It can be branched into several branch signals.

[0032] In an embodiment of the inspection system above, the optical switch can output an input signal through a first path for a certain period of time, and then switch to a second path to output for the same certain period of time.

[0033] In an embodiment of the inspection system above, the control unit determines one or more of the thickness and shape of the inspection target based on the measurement result, and if the determination result corresponds to a preset standard condition, determines that the inspection target is normal, and if the determination result does not correspond to the standard condition, determines that the inspection target is abnormal.

[0034] The embodiments of the inspection device and inspection system described above are not limited to those described above and may include embodiments described in the specific description below or inferred / derived from the specific description.

[0035] According to the embodiment of the inspection device and inspection system described above, by diverting and delaying the light source and then irradiating it onto the inspection target, accurate irradiation of the measurement light and accurate reception of the reflected light are achieved, thereby enabling accurate measurement of the thickness and shape of the inspection target.

[0036] In addition, by diverting and delaying the light source before irradiating the inspection target, there is an effect that allows for the measurement of thickness and shape based on measurement results from multiple points on the inspection target.

[0037] Furthermore, by diverting and delaying the light source before irradiating the inspection target, it is possible to measure the thickness and shape of the inspection target over a wide range without using an expensive spectroscopic camera.

[0038] In addition, by moving the position of the optical fiber array and irradiating the inspection target with measurement light, it is possible to measure the thickness and shape of the entire area of ​​the inspection target.

[0039] In addition, by inspecting the thickness and shape of the object to be inspected through the branching and irradiation of the light source, there is an effect that 3D inspection can be performed in-line in a 1D manner.

[0040] The effects according to the embodiments of the inspection device and inspection system described above are not limited to those described above and may include effects described in the specific description below or inferred / derived from the specific description.

[0041] FIG. 1 is a configuration diagram of an inspection device according to an embodiment.

[0042] FIG. 2 is an exemplary diagram of an inspection device according to an embodiment 1.

[0043] FIG. 3 is an exemplary diagram of an inspection device according to an embodiment 2.

[0044] FIG. 4 is an illustrative diagram for explaining the scan range of an inspection device according to an embodiment.

[0045] FIG. 5 is a flowchart showing the inspection process of an inspection device according to an embodiment.

[0046] FIG. 6 is a configuration diagram of an inspection system according to an embodiment.

[0047] FIG. 7 is an exemplary diagram of an inspection system according to an embodiment 1.

[0048] FIG. 8 is an exemplary diagram of an inspection system according to an embodiment 2.

[0049] FIG. 9 is an example diagram of an inspection system according to an embodiment 3.

[0050] FIG. 10 is an example diagram of an inspection system according to an embodiment 4.

[0051] FIG. 11 is an exemplary diagram of an inspection system according to an embodiment 5.

[0052] FIG. 12 is an exemplary diagram showing an example of the arrangement of a fiber array of an inspection system according to an embodiment.

[0053] Hereinafter, embodiments of an inspection device and an inspection system will be described in detail with reference to the attached drawings. However, in order to clarify the features of the present invention, details corresponding to general technical matters of the relevant technical field disclosed in the aforementioned prior art, descriptions of some components that are well known and obvious, matters that a person skilled in the art can understand even without specific description, or matters that can be sufficiently predicted or derived from the contents to be mentioned below will be omitted.

[0054] First, an embodiment of the inspection device will be described with reference to FIGS. 1 to 4.

[0055] The above inspection device may be a device for inspecting the condition of the material in a production facility system that produces the material.

[0056] For example, the above material may be an electrode material, a coating material, or a separator, and the above production facility may be a facility for producing the electrode material, the coating material, or the separator.

[0057] The above inspection device may be placed at one or more locations of the above production facility system and included in a process or facility for inspecting (determining) whether the material is good or bad.

[0058] The above inspection device may also be installed as a separate configuration from a process or facility for determining whether the material is good or bad, and may be used for inspecting the condition of the material.

[0059] The above inspection device may also inspect the condition of other inspection targets in addition to the above material.

[0060] The above inspection device may be a device that detects one or more states of the inspection target by scanning the surface of the inspection target.

[0061] The above inspection device may detect, for example, one or more states among the surface condition, thickness, and shape of the inspection target.

[0062] The above inspection device can detect one or more states of the inspection target based on the reflected light after irradiating the inspection target with a measurement light and receiving the reflected light reflected from the inspection target.

[0063] The above inspection device can detect one or more states of the inspection target in this manner and inspect the state of the inspection target according to the detection result.

[0064] An embodiment of the above inspection device (10) may be as shown in FIG. 1.

[0065] The inspection device (10) comprises a light source device (11) that generates measurement light, a plurality of optical fibers (12) into which the measurement light is branched, one or more delay elements (13) that delay the output time of the branched light of the remaining parts excluding one of the plurality of optical fibers (12) by a certain amount of time, a fiber array (14) that emits a plurality of branched light output from each of the plurality of optical fibers (12), an imaging lens (15) that irradiates the plurality of branched light emitted from the fiber array (14) to different locations of the inspection target (1), and a spectroscopic sensor (16) that measures the spectrum of reflected light reflected from the inspection target (1) and generates a measurement signal for the measurement result.

[0066] As such, the inspection device (10) comprising the light source device (11), the plurality of optical fibers (12), the one or more delay elements (13), the fiber array (14), the imaging lens (15), and the spectroscopic sensor (16) further comprises a control device (17) that determines the state of the inspection target (1) based on the measurement signal, so that the control device (17) can determine the state of the inspection target (1) and whether there is an abnormality therefrom.

[0067] A specific example of the inspection device (10) including the light source device (11), the plurality of optical fibers (12), the one or more delay elements (13), the fiber array (14), the imaging lens (15), and the spectroscopic sensor (16) may be as shown in FIGS. 2 and FIGS. 3.

[0068] The inspection device (10) can be positioned above the inspection target (1).

[0069] The inspection device (10) can receive the reflected light reflected from the inspection target (1) by irradiating the measurement light onto the inspection target (1) from above the inspection target (1).

[0070] The inspection device (10) is positioned on the upper part of a transfer rail or chuck on which the inspection target (1) is placed, and can irradiate the measurement light onto the inspection target (1).

[0071] That is, the inspection target (1) can be placed on the transfer rail or the chuck.

[0072] When the inspection target (1) is placed on the transfer rail, the position of the inspection target (1) may be changed due to the operation of the transfer rail.

[0073] For example, as shown in FIG. 2, the transfer rail may be driven in the Y direction, and the inspection target (1) may move along the transfer rail in the Y direction.

[0074] In this case, the inspection device (10) may irradiate the measurement light onto the inspection target (1) while the inspection target (1) is positioned below the imaging lens (15) while the inspection target (1) is moving along the transfer rail.

[0075] Meanwhile, when the inspection target (1) is placed on the chuck, the position of the inspection target (1) can be fixed.

[0076] For example, as shown in FIG. 3, the inspection target (1) can be fixed in position by being placed on the fixed-position chuck.

[0077] In this case, the inspection device (10) may irradiate the measurement light onto the inspection target (1) while the inspection target (1) is fixed to the lower part of the imaging lens (15).

[0078] The light source device (11) above may be a device that generates a light source.

[0079] The light source device (11) can generate a pulse signal.

[0080] The light source device (11) can generate the measurement light according to a preset generation standard.

[0081] Here, the generation criteria may be criteria for one or more of the period, center wavelength, and bandwidth of the measurement light.

[0082] The light source device (11) can generate the measurement light at a period of 1 [kHZ] to 500 [kHZ].

[0083] The light source device (11) can generate the measurement light with a central wavelength of 400 [nm] to 10 [um].

[0084] The light source device (11) can generate the measurement light with a bandwidth of 10 [nm] to 1000 [nm].

[0085] The light source device (11) can generate the measurement light and transmit it to the plurality of optical fibers (12).

[0086] The plurality of optical fibers (12) may be optical fibers that transmit an optical signal between the light source device (11) and the fiber array (14).

[0087] Each of the above plurality of optical fibers (12) is connected to an output terminal from which the measurement light is output from the light source device (11), so as to receive the measurement light.

[0088] Accordingly, the measurement light transmitted to each of the plurality of optical fibers (12) may be of the same form.

[0089] The plurality of optical fibers (12) can receive the measurement light from the light source device (11) and branch the measurement light into a plurality of branched lights.

[0090] That is, each of the plurality of optical fibers (12) receives the measurement light from the light source device (11), so that the measurement light can be branched into a plurality of branched lights according to the number of the plurality of optical fibers (12).

[0091] The above plurality of optical fibers (12) may be provided in N numbers.

[0092] Accordingly, the above-mentioned measurement light can be branched into N branched lights.

[0093] Here, the above N may preferably be an even number of 2 or more.

[0094] The plurality of optical fibers (12) above may preferably be provided with four or more.

[0095] Accordingly, the measurement light can be branched into at least four branched lights.

[0096] The above one or more delay elements (13) may be elements provided in the optical fiber (12) and delay the output time of the branched light of the optical fiber (12) by a certain amount of time.

[0097] The above one or more delay elements (13) may be, for example, an optical time delay, an optical fiber coil, an integrated optical element, or a slow light optical element.

[0098] The above one or more delay elements (13) may be provided in each of the remaining ones excluding any one of the plurality of optical fibers (12).

[0099] For example, when the plurality of optical fibers (12) are provided with four fibers from the first to the fourth, the one or more delay elements (13) may be provided with a first delay element in the second fiber, a second delay element in the third fiber, and a third delay element in the fourth fiber, for a total of three.

[0100] That is, the above one or more delay elements (13) may be provided in N-1 numbers.

[0101] Accordingly, each of the branched light sources, excluding one of the plurality of optical fibers (12), can be output with a delay of a certain amount of time by the corresponding delay element (13).

[0102] Each of the plurality of delay elements (13) provided in each of the remaining fibers excluding one of the plurality of optical fibers (12) can delay the output time of the corresponding branch light by a different fixed time.

[0103] Accordingly, the above-mentioned plurality of branched lights can be output at different times.

[0104] The above plurality of delay elements (13) can delay the output time of the branch light so that the plurality of branch lights are output at regular time intervals.

[0105] For example, when there are four of the plurality of optical fibers (12), if the branch light of the second fiber is output with a delay of X time compared to the branch light of the first fiber, the branch light of the third fiber is output with a delay of 2X time compared to the branch light of the first fiber, and the branch light of the fourth fiber is output with a delay of 3X time compared to the branch light of the first fiber, each of the plurality of delay elements (13) may delay the output time of the corresponding branch light.

[0106] Each of the above-mentioned plurality of delay elements (13) can delay the output time of the branched light so that the branched light from the plurality of optical fibers (12) is output sequentially at a certain interval.

[0107] For example, when there are four of the plurality of optical fibers (12), the first delay element provided in the second fiber can delay the output time of the branched light of the second fiber by Δt, the second delay element provided in the third fiber can delay the output time of the branched light of the third fiber by 2Δt, and the third delay element provided in the fourth fiber can delay the output time of the branched light of the fourth fiber by 3Δt.

[0108] Accordingly, the branch light of the first fiber is output as the measurement light, the branch light of the second fiber is output with the measurement light delayed by Δt, the branch light of the third fiber is output with the measurement light delayed by 2Δt, and the branch light of the fourth fiber is output with the measurement light delayed by 3Δt, so that the plurality of branch lights can be output with a delay of multiples of Δt.

[0109] Accordingly, the plurality of branched lights from the plurality of optical fibers (12) can be sequentially output at time intervals of Δt.

[0110] In this way, when the plurality of branched lights are sequentially output from the plurality of optical fibers (12) by the plurality of delay elements (13), they can be emitted to the inspection target (1) through the fiber array (14).

[0111] The fiber array (14) may be an output section in which each of the output terminals of the plurality of optical fibers (12) is packaged and the plurality of branched light is emitted.

[0112] The fiber array (14) is provided on the upper part of the imaging lens (15) and can emit the plurality of branched lights to the imaging lens (15).

[0113] The fiber array (14) has the output terminals of each of the plurality of optical fibers (12) arranged in a line, so that the plurality of branched lights can be emitted in a line.

[0114] In this case, the output terminals of each of the plurality of optical fibers (12) can be arranged at regular intervals.

[0115] Accordingly, the plurality of branched lights emitted from the fiber array (14) can be emitted in the form of a series at a certain interval.

[0116] The imaging lens (15) above may be a lens that directs the plurality of branched lights emitted from the fiber array (14) toward the inspection target (1).

[0117] The imaging lens (15) can direct the plurality of branched lights to different locations of the inspection target (1).

[0118] The imaging lens (15) may also receive the reflected light and transmit it to the fiber array (14) when the plurality of branched lights are reflected from the inspection target (1).

[0119] In this way, the reflected light reflected from the inspection target (1) by the plurality of branched lights can be transmitted to the fiber array (14) through the imaging lens (15) and then received by the spectroscopic sensor (16).

[0120] Meanwhile, the reflected light may be received by the spectroscopic sensor (16) after being reflected from the inspection target (1), passing through the one or more delay elements (13), and being delayed for a certain amount of time.

[0121] That is, the reflected light received by the spectroscopic sensor (16) can be received in a form where the plurality of branched lights are delayed twice by the specified time.

[0122] The spectroscopic sensor (16) above may be a sensor that measures the spectrum of a received light signal.

[0123] The spectroscopic sensor (16) can receive the reflected light corresponding to the plurality of branched lights, measure the reflection spectrum of the reflected light, generate the measurement signal corresponding to the measurement result, and transmit the measurement signal to the control device (17).

[0124] Accordingly, the control device (17) may determine the state of the inspection target (1) based on the measurement signal.

[0125] Here, the reflected light received by the spectroscopic sensor (16) can be received by sequentially reflecting and receiving the plurality of branched lights delayed at different delay times, as shown in FIGS. 2 and 3, so that interference between the reflected lights can be prevented.

[0126] Therefore, measurements can be taken at multiple different locations of the above-mentioned inspection target (1).

[0127] In addition, as the light received between the reflection results is received by the spectroscopic sensor (16) without overlapping, accurate reception of the reflection results and accurate measurement of each of the plurality of locations can be achieved.

[0128] The control device (17) can determine one or more of the thickness and shape of the inspection target (1) based on the measurement signal.

[0129] The control device (17) can determine one or more of the thickness and shape at each of the plurality of locations based on the measurement signal.

[0130] The above control device (17) can determine whether there is an abnormality in the inspection target (1) based on the judgment result.

[0131] The above control device (17) can determine that the inspection target (1) is normal, for example, if the judgment result corresponds to a preset standard condition.

[0132] Here, the above standard condition may mean a standard thickness and standard shape of the inspection target (1).

[0133] The control device (17) can determine that the inspection target (1) is abnormal if the judgment result does not correspond to the standard condition.

[0134] Meanwhile, the inspection device (10), which inspects the state of the inspection target (1) by irradiating the inspection target (1) after branching and delaying the measurement light as described above, may further include a driving device (18) that moves the position of the fiber array (14) within one or more of a first range corresponding to a first axis and a second range corresponding to a second axis orthogonal to the first axis.

[0135] Here, the first range is a range corresponding to the length of the first axis of the imaging lens (15), and the second range may be a range corresponding to the length of the second axis of the imaging lens (15).

[0136] The above driving device (18) may be a device that moves the position of the fiber array (14) to one or more of the first axis and the second axis.

[0137] Here, movement to one or more axes may include vibration to the corresponding axis.

[0138] The above driving device (18) may be one of, for example, a stepping motor, a voice coil, and a piezo actuator.

[0139] The above driving device (18) can be controlled by the above control device (17).

[0140] In this case, the control device (17) can control the driving device (18) to drive while the plurality of branched lights are emitted from the fiber array (14).

[0141] That is, the driving device (18) may move the position of the fiber array (14) while the plurality of branched lights are emitted from the fiber array (14).

[0142] The above driving device (18) can move the position of the fiber array (14) within the second range while the inspection target (1) is moved along the first axis and the plurality of branched lights are irradiated onto the inspection target (1).

[0143] That is, the driving device (18) can move the position of the fiber array (14) to the second axis when the inspection target (1) moves to the first axis.

[0144] For example, as shown in FIG. 2, while the inspection target (1) moves along the transfer rail in the Y direction corresponding to the first axis, the position of the fiber array (14) can be moved so that the fiber array (14) vibrates in the X direction corresponding to the second axis, thereby allowing the plurality of branched lights to vibrate in the X direction and irradiate the inspection target (1).

[0145] The driving device (18) can move the position of the fiber array (14) within one or more of the first range and the second range while the plurality of branched lights are irradiated onto the inspection target (1) while the inspection target (1) is fixed at the inspection position.

[0146] That is, the driving device (18) can move the position of the fiber array (14) to one or more of the first axis and the second axis when the inspection target (1) is fixed.

[0147] For example, as illustrated in FIG. 3, while the inspection target (1) is seated on the chuck and its position is fixed, the position of the fiber array (14) can be moved so that the fiber array (14) vibrates in one or more directions, such as the Y direction corresponding to the first axis and the X direction corresponding to the second axis, so that the plurality of branched lights vibrate in one or more directions, such as the X direction and the Y direction, and are irradiated onto the inspection target (1).

[0148] In this way, the driving device (17) moves the position of the fiber array (14) and causes the plurality of branched lights to be irradiated onto the inspection target (1), thereby widening the area where the plurality of branched lights are irradiated onto the inspection target (1), so that the measurement resolution can be increased.

[0149] For example, compared to the case where a single scan beam moves along the left-right axis and scans are performed as shown in FIG. 4 (a), the case where a plurality of scan beams arranged in a row each move along the left-right axis and scans are performed as shown in FIG. 4 (b) has a larger scan area, so the measurement resolution can be increased.

[0150] In addition, compared to the case where a single scan beam moves from one side to the other as shown in FIG. 4 (a), the case where a plurality of scan beams arranged in a row each move along the left and right axes as shown in FIG. 4 (b) results in a shorter travel distance for each scan beam, thereby minimizing the driving range for scanning and enabling accurate driving (scanning).

[0151] As the measurement resolution increases in this way, the accuracy of the scan increases, thereby increasing the precision and accuracy of the measurement results, and the determination of whether there is an abnormality in the inspection target (1) can be made more accurately.

[0152] The process of the inspection device (10) as described above inspecting the condition of the inspection target (1) may be as illustrated in FIG. 5.

[0153] In the above inspection device (10), when the light source device (11) generates the measurement light (S1), the measurement light can be branched (S2) into the plurality of branched lights in the plurality of optical fibers (12).

[0154] Here, the plurality of branching lights can be branched into an even number of N.

[0155] Afterwards, the above one or more delay elements (13) delay the remainder of the plurality of branched lights, excluding one of them, for a certain amount of time (S3), so that they are emitted (S4) from the fiber array (14) and irradiated (S5) onto the inspection target (1) through the imaging lens (15).

[0156] Here, when the plurality of branched lights are branched into the first to fourth branched lights, the second branched light may be delayed by X hours compared to the first branched light, the third branched light may be delayed by 2X hours compared to the first branched light, and the fourth branched light may be delayed by 3X hours compared to the first branched light.

[0157] Afterwards, when the plurality of branched lights are reflected (S6) from the inspection target (1), the reflected light is incident (S7) on the spectroscopic sensor (16) through the imaging lens (15), the fiber array (14), and the plurality of optical fibers (12), and the spectroscopic sensor (16) measures the spectrum of the reflected light (S8) and transmits the measurement signal to the control device (17). Then, the control device (17) determines one or more of the thickness and shape of the inspection target (1) based on the measurement signal, and determines whether there is an abnormality (S9) in the inspection target (1) according to the result of the determination.

[0158] The inspection process of the above inspection device (10) may also be carried out as an inspection method of the above inspection device (10).

[0159] In addition, the above inspection method may be carried out as an independent inspection method separate from the inspection device (10).

[0160] For example, it may be carried out as a method to inspect the condition of the inspection target (1) in a device other than the inspection device (10).

[0161] Hereinafter, an embodiment of the inspection system will be described with reference to FIGS. 6 to 12.

[0162] The above inspection system may be a system for inspecting the condition of the material in a production facility system that produces the material.

[0163] The above inspection system may be implemented as part of a process / facility for inspecting the condition of the material, including a plurality of devices.

[0164] The above inspection system can also be implemented by the above inspection device (10).

[0165] An embodiment of the above inspection system (100) may be as shown in FIG. 6.

[0166] The inspection system (100) comprises: a light source unit (110) that generates a pulse-shaped light signal; a spectroscopic unit (120) that branches the light signal into a plurality of branch signals and delays the others, excluding one, at different times; a lens unit (130) that irradiates the plurality of branch signals onto an inspection target (1); a sensor unit (140) that receives a plurality of reflected signals reflected from the inspection target (1) by the plurality of branch signals and measures the spectrum of the plurality of reflected signals; and a control unit (150) that determines one or more of the thickness and shape of the inspection target (1) based on the measurement results of the sensor unit (140).

[0167] A specific example of the inspection system (100) including the light source unit (110), the spectroscopic unit (120), the lens unit (130), the sensor unit (140), and the control unit (150) as described above may be as shown in FIGS. 7 to 11.

[0168] The light source unit (110) may include a light source device that generates the light signal in the form of a pulse.

[0169] The light source unit (110) can generate the light signal and transmit it to the spectroscopic unit (120).

[0170] The above light source unit (110) can be controlled by the control unit (150).

[0171] The spectroscopic unit (120) may include a plurality of optical fibers through which the optical signal is transmitted.

[0172] The spectroscopic unit (120) above 2 the light signal N It can be branched into several branch signals.

[0173] That is, the plurality of branch signals mentioned above may be an even number.

[0174] The spectroscopic unit (120) is divided into N branching sections, and the optical signal through the N branching sections 2 NIt can be branched into several branch signals.

[0175] That is, the spectroscopic unit (120) receives the light signal 2 N To branch into N branch signals, it can be divided into N branching stages.

[0176] For example, when the optical signal is branched into 4 branch signals (N=2), it is divided into 2 branching sections, and when the optical signal is branched into 8 branch signals (N=3), it can be divided into 3 branching sections.

[0177] The spectroscopic unit (120) is positioned at N branching points and outputs an input signal as two identical signals. N - It may include one fiber coupler (121).

[0178] For example, if the spectroscopic unit (120) is composed of one branching section (N=1), it may include one fiber coupler (121), and if the spectroscopic unit (120) is composed of two branching sections (N=2), it may include three fiber couplers (121).

[0179] Here, at each of the N branching sections, the fiber couplers (121) may be arranged in different numbers.

[0180] The spectroscopic unit (120) above is 2 N - Including one of the above fiber couplers (121), the optical signal 2 N It can be branched into several branch signals.

[0181] For example, if the spectroscopic unit (120) is composed of two branching sections (N=2), it may include three fiber couplers (121) to branch the optical signal into four branched signals through the three fiber couplers (121).

[0182] The above fiber coupler (121) is 2 at the Nth branch end N-1 Dogs can be deployed.

[0183] For example, one fiber coupler (121) may be placed in the first branch (#1), and two fiber couplers (121) may be placed in the second branch (#2).

[0184] That is, two fiber couplers (121) may be arranged in the second branch section (#2), each connected to a fiber branched into two via the fiber coupler (121) of the first branch section (#1).

[0185] The spectroscopic unit (120) is positioned on one side of each of the two outputs of the fiber coupler (121) and delays the input signal for a certain period of time. N - It may include one delay element (122).

[0186] That is, the spectroscopic unit (120) may include a number of delay elements (122) corresponding to the number of fiber couplers (121).

[0187] The spectroscopic unit (120) includes a delay element (122) corresponding to each of the fiber couplers (121), and through the delay element (122), 2 of the plurality of branched signals N -1 can be delayed.

[0188] For example, if there are 2 of the plurality of branch signals (N=1), one of the plurality of branch signals may be delayed, and if there are 4 of the plurality of branch signals (N=2), 3 of the plurality of branch signals may be delayed.

[0189] The above delay element (122) can delay the above fixed time differently for each branching section.

[0190] For example, the delay element (122) of the first branching unit (#1) may delay the corresponding signal by twice the delay time of the delay element (122) of the second branching unit (#2).

[0191] The spectroscopic unit (120) is also positioned at N branching points to convert an input signal into two paths and output it. N - It may also include one optical switch (123).

[0192] The above optical switch (123) may be a switching element that switches between a plurality of outputs to switch the optical path of an optical signal.

[0193] The spectroscopic unit (120) includes the optical switch (123) and the optical signal 2 N It can be branched into several branch signals.

[0194] The above optical switch (123) can output the input signal through a first path for a certain period of time, and then switch to a second path to output for the same certain period of time.

[0195] Accordingly, the input signal is output through the first path for a certain period of time, and then output through the second path for a certain period of time, so that the signal input to the optical switch (123) can be output as two signals of different time periods.

[0196] Accordingly, through the switching of the optical switch (123), one signal can be branched into two signals and output.

[0197] The spectroscopic unit (120) can thus branch the light signal into the plurality of branch signals, delay the output time of the remaining signals excluding one of the plurality of branch signals, and transmit them to the lens unit (130).

[0198] The above spectroscopic unit (120) can be controlled by the control unit (150).

[0199] The lens unit (130) can receive the plurality of branch signals and irradiate the inspection target (1).

[0200] The lens unit (130) may include an array packaging (131) in which a plurality of optical fibers are packaged to which each of the plurality of branch signals is transmitted from the spectroscopic unit (120), and an imaging lens (132) that irradiates each of the plurality of branch signals to each of the plurality of points of the inspection target (1).

[0201] Here, the array packaging (131) can be moved by the control unit (150) while emitting the plurality of branch signals.

[0202] In this case, the array packaging (131) may be moved in position through a driving unit (160) that moves the position of the array packaging (131) along one or more of the first axis and the second axis, and the driving unit (160) may be controlled by the control unit (150).

[0203] Afterwards, when each of the plurality of branch signals is reflected from the inspection target (1), the reflected plurality of reflected signals are received by the sensor unit (140), and the sensor unit (140) can measure the spectrum of the plurality of reflected signals.

[0204] The sensor unit (140) may include a spectroscopic sensor.

[0205] The sensor unit (140) can generate a signal for the measurement result of the spectrum and transmit it to the control unit (150).

[0206] The control unit (150) receives a signal from the sensor unit (140) and can determine one or more of the thickness and shape of the inspection target (1) based on the measurement result.

[0207] The control unit (150) can determine one or more of the thickness and shape of the inspection target (1) based on the measurement result, and determine whether there is an abnormality in the inspection target (1) according to the result of comparing the determination result with a preset standard condition.

[0208] The control unit (150) can determine that the inspection target (1) is normal if the judgment result corresponds to the standard condition.

[0209] The control unit (150) can determine that the inspection target (1) is abnormal if the judgment result does not correspond to the standard condition.

[0210] Accordingly, the control unit (150) may inspect the good / bad status of the inspection target (1).

[0211] Specific examples of the above-mentioned inspection system (100), such as FIGS. 7 to FIGS. 11, are described in detail as follows.

[0212] FIG. 7 is one example of the inspection system (100), showing an example in which the sensor unit (140) is driven at 100 [kHZ].

[0213] In an example as illustrated in FIG. 7, the sensor unit (140) is positioned between the light source unit (110) and the spectroscopic unit (120), so that a plurality of reflected signals reflected from the inspection target (1) can be received by the sensor unit (140) after passing through the spectroscopic unit (120).

[0214] The light source unit (110) generates and outputs the light signal as a pulse signal of 25 [kHZ] through internal modulation of the SLD.

[0215] In this case, the period of the optical signal may be 40 [us] and the pulse width may be 4 [us].

[0216] The spectroscopic unit (120) is equipped with three fiber couplers (121) and three delay elements (122) each, so that one coupler (121) and one delay element (122) are placed in the first branching section (#1), and two couplers (121) and two delay elements (122) are placed in the second branching section (#2).

[0217] In this case, the delay element (122) of the first branch unit (#1) can delay the output time of any one of the outputs of the coupler (121) of the first branch unit (#1) by 10 [us], and the delay element (122) of the second branch unit (#2) can delay the output time of any one of the outputs of each of the two couplers (121) of the second branch unit (#2) by 5 [us].

[0218] Accordingly, among the plurality of branch signals, the first signal (upper output of the upper coupler of the second branch) is transmitted to the array packaging (131) in an undelayed state from the initial state of the optical signal, the second signal (lower output of the upper coupler of the second branch) is transmitted to the array packaging (131) in a delayed state of 5 [us] from the initial state of the optical signal, the third signal (upper output of the lower coupler of the second branch) is transmitted to the array packaging (131) in a delayed state of 10 [us] from the initial state of the optical signal, and the fourth signal (lower output of the lower coupler of the second branch) is transmitted to the array packaging (131) in a delayed state of 15 [us] from the initial state of the optical signal.

[0219] That is, the first to fourth signals are delayed at intervals of 5 [us] and can be irradiated onto the inspection target (1) through the lens unit (130).

[0220] Accordingly, the first to fourth signals are sequentially irradiated onto the inspection target (1) at intervals of 5 [us], thereby allowing them to be irradiated onto the inspection target (1) without mutual interference.

[0221] In addition, the first to fourth signals are sequentially irradiated onto the inspection target (1) at intervals of 5 [us], so that even after being reflected from the inspection target (1), they can be received by the sensor unit (140) without mutual interference.

[0222] Accordingly, the investigation of the plurality of branch signals and the reception of the plurality of reflected signals are performed accurately without overlap, so that an accurate state determination can be made for each of the plurality of points of the inspection target (1).

[0223] Meanwhile, the plurality of reflected signals reflected from the inspection target (1) are received by the sensor unit (140) through the lens unit (130) and the spectroscopic unit (120), and are received in the reverse order of the plurality of branched signals.

[0224] In this case, as the plurality of reflected signals pass through the plurality of delay elements (122) and the plurality of fiber couplers (121), time can be delayed once more by the plurality of delay elements (122).

[0225] For example, the reflected signal of the first signal is received by the sensor unit (140) in its original state by not passing through the delay element (122), the reflected signal of the second signal is received by the sensor unit (140) with a delay of 5 [us] further by passing through the lower delay element (122) of the upper coupler (121) of the second branch unit (#2), the reflected signal of the third signal is received by the sensor unit (140) with a delay of 10 [us] further by passing through the lower delay element (122) of the coupler (121) of the first branch unit (#2), and the reflected signal of the fourth signal is received by the sensor unit (140) with a delay of 15 [us] further by passing through the lower delay element (122) of the lower coupler (121) of the second branch unit (#2) and the lower delay element (122) of the coupler (121) of the first branch unit (#2). Light can be received by the sensor part (140).

[0226] Accordingly, the reflected signal of the first signal is received in the initial state, the reflected signal of the second signal is received in a state delayed by 10 [us] from the initial state, the reflected signal of the third signal is received in a state delayed by 20 [us] from the initial state, and the reflected signal of the fourth signal can be received in a state delayed by 30 [us] from the initial state.

[0227] Accordingly, the sensor unit (140) can receive four branch signals having a time difference of 10 [us] and acquire data at four points of the inspection target (1) at a period of 10 [us] (100 [kHZ]).

[0228] Meanwhile, the sensor unit (140) may be positioned between the imaging lens (132) and the inspection target (1), as shown in FIG. 8.

[0229] FIG. 8 shows another example of the inspection system (100) in which the sensor unit (140) is driven at 100 [kHZ] and receives the plurality of reflected signals through a beam splitter.

[0230] In an example as illustrated in FIG. 8, the sensor unit (140) is positioned between the imaging lens (132) and the inspection target (1), so that a plurality of reflected signals reflected from the inspection target (1) can be reflected through a beam splitter positioned between the imaging lens (132) and the inspection target (1) and received by the sensor unit (140).

[0231] In the case of such an example, since the plurality of reflected signals do not pass back through the spectroscopic unit (120), the delay time of the plurality of delay elements (122) can be set differently from the example shown in FIG. 6.

[0232] In this case, the delay element (122) of the first branch unit (#1) can delay the output time of any one of the outputs of the coupler (121) of the first branch unit (#1) by 20 [us], and the delay element (122) of the second branch unit (#2) can delay the output time of any one of the outputs of each of the two couplers (121) of the second branch unit (#2) by 10 [us].

[0233] Accordingly, among the plurality of branch signals, the first signal (upper output of the upper coupler of the second branch) is transmitted to the array packaging (131) in an undelayed state from the initial state of the optical signal, the second signal (lower output of the upper coupler of the second branch) is transmitted to the array packaging (131) in a delayed state of 10 [us] from the initial state of the optical signal, the third signal (upper output of the lower coupler of the second branch) is transmitted to the array packaging (131) in a delayed state of 20 [us] from the initial state of the optical signal, and the fourth signal (lower output of the lower coupler of the second branch) is transmitted to the array packaging (131) in a delayed state of 30 [us] from the initial state of the optical signal.

[0234] That is, the first to fourth signals are delayed at intervals of 10 [us] and can be irradiated onto the inspection target (1) through the lens unit (130).

[0235] Meanwhile, as shown in FIG. 9, the lens unit (130) may be provided with the array packaging (131) and the imaging lens (132) in a number corresponding to each of the plurality of branch signals.

[0236] FIG. 9 illustrates another example of the inspection system (100) in which the array packaging (131) and the imaging lens (132) are provided in a number corresponding to each of the plurality of branch signals, so that each of the plurality of branch signals is individually investigated.

[0237] In the case of such an example, each of the above-mentioned multiple branch signals is individually investigated to form four inspection channels, thereby allowing inspection of multiple inspection targets (1) to be performed.

[0238] Meanwhile, in this example, each of the array packaging (131) and the imaging lens (132) may have different positional movements.

[0239] That is, each of the plurality of array packagings (131) and the plurality of imaging lenses (132) can move their positions individually and irradiate a branch signal to each inspection target (1).

[0240] Additionally, the inspection system (100) may include one or more of the optical switches (123) as shown in FIG. 10, and may branch an optical signal through the optical switches (123).

[0241] FIG. 10 illustrates another example of the inspection system (100) including a plurality of optical switches (123) to further branch the plurality of branch signals by switching the optical switches (123).

[0242] The light source unit (110) generates and outputs the light signal as a pulse signal of 20 [kHZ] through internal modulation of the SLD.

[0243] In this case, the period of the optical signal may be 50 [us] and the pulse width may be 5 [us].

[0244] The spectroscopic unit (120) comprises four spectroscopic blocks, each equipped with three fiber couplers (121) and three delay elements (122), and three optical switches (123) are positioned at the front of the spectroscopic blocks.

[0245] In this case, one optical switch (123) is placed in the first switching section and two optical switches (123) are placed in the second switching section, each switching the optical path sequentially at a switching speed of 10 [us].

[0246] Here, each of the spectroscopic blocks can split the optical signal received from the optical switch (123) at the front end into four branch signals through three fiber couplers (121) and three delay elements (122).

[0247] Accordingly, the light signal is branched into a total of 16 branch signals and can be irradiated onto the inspection target (1).

[0248] Meanwhile, if the optical switch (123) consists of two or more ports, the inspection system (100) may include one optical switch (123) as shown in FIG. 11, and may branch an optical signal through the optical switch (123).

[0249] For example, as shown in FIG. 11, if a 1X4 switch is provided to convert an input optical signal into four optical paths, the optical signal may be converted so that it is applied sequentially to the four optical paths, thereby branching the optical signal into four signals.

[0250] In this case, the spectroscopic unit (120) is equipped with four fiber couplers (121) and four delay elements (122) each, and the optical switch (123) is positioned at the front end of the fiber coupler (121).

[0251] In this case, the optical switch (123) sequentially switches the optical path at a specific switching speed so that an optical signal is applied sequentially to the four fiber couplers (121).

[0252] Here, the specific switching speed may be, for example, less than 10 [ms].

[0253] In this way, the four fiber couplers (121) receive optical signals sequentially due to the switching of the optical switch (123), thereby allowing the optical signals to be branched into eight branch signals.

[0254] In an example further including the optical switch (123) as described above, the optical switch (123) may be one or more of a MEMS switch, a Magneto-Optic switch, and an Electro-Optic switch.

[0255] Meanwhile, when the fiber coupler (121) is composed of four or more of the above, the multiple branch signals can be irradiated to multiple spots or multiple inspection targets (1) according to the arrangement of the multiple optical fibers.

[0256] For example, as shown in FIG. 11, when the fiber coupler (121) is composed of 4 and 8 branch signals are irradiated, the 8 branch signals are composed of 4 sets (#1 to #4) of pairs, and each of the 4 sets can be irradiated to each of the plurality of irradiation targets (or, plurality of irradiation target areas).

[0257] That is, multiple branch signals are distributed to each of the multiple inspection targets (1) or multiple inspection areas so that they can be inspected, thereby enabling efficient inspection.

[0258] In addition, the scan beam may be formed in various shapes depending on the arrangement of the optical fibers within the array packaging (131).

[0259] For example, eight fibers may be arranged in a line as in Fig. 12 (a), or arranged in a 2D form with two or more rows as in Fig. 12 (b), or seven fibers may be arranged in a specific shape as in Fig. 12 (c).

[0260] Accordingly, the form of the branch signal to be investigated on the inspection target (1) can be varied, so that appropriate investigation can be performed according to the shape of the inspection target (1), the inspection target area of ​​the inspection target (1), or the inspection method, etc.

[0261] In an example further including the optical switch (123) as described above, the optical switch (123) may be one or more of a MEMS switch, a Magneto-Optic switch, and an Electro-Optic switch.

[0262] Although embodiments of the present invention have been described so far, various modifications are possible to the described embodiments without departing from the scope of the present invention, and the scope of the present invention is not limited to the described embodiments.

Claims

1. A light source device that generates measurement light; A plurality of optical fibers into which the above-mentioned measurement light is branched; One or more delay elements that delay the output time of the branched light, excluding any one of the plurality of optical fibers above, by a certain amount of time; A fiber array emitting a plurality of branched light outputs from each of the above plurality of optical fibers; An imaging lens that irradiates the plurality of branched lights emitted from the fiber array to different locations of the inspection target; and An inspection device characterized by including a spectroscopic sensor that measures the spectrum of reflected light reflected from the inspection target and generates a measurement signal for the measurement result.

2. In Paragraph 1, The above plurality of optical fibers, N are provided, The above one or more delay elements are, An inspection device characterized by having N-1 units.

3. In Paragraph 2, The above one or more delay elements are, When multiple units are provided, An inspection device characterized by delaying the output time of the corresponding branch light by a different fixed amount of time for each.

4. In Paragraph 3, Each of the multiple delay elements is, An inspection device characterized by delaying the output time of the branch light so that the branch light is sequentially output from the plurality of optical fibers according to a fixed interval.

5. In Paragraph 1, The above reflected light is, An inspection device characterized by being received by a spectroscopic sensor after being reflected from the inspection target, passing through one or more delay elements, and being further delayed by a certain amount of time.

6. In Paragraph 1, An inspection device characterized by further including a control device that determines one or more of the thickness and shape of the inspection target based on the above measurement signal, and determines whether the inspection target is abnormal according to the determination result.

7. In Paragraph 6, The above control device is, An inspection device characterized by determining that the inspection target is normal if the above judgment result corresponds to a preset standard condition, and determining that the inspection target is abnormal if the above judgment result does not correspond to the above standard condition.

8. In Paragraph 1, An inspection device further comprising a driving device for moving the position of the fiber array within one or more of a first range corresponding to a first axis and a second range corresponding to a second axis orthogonal to the first axis.

9. In Paragraph 8, The above driving device is, An inspection device characterized by moving the position of the fiber array within the second range while the inspection target is moved along the first axis and the plurality of branched lights are irradiated onto the inspection target.

10. In Paragraph 8, The above driving device is, An inspection device characterized by moving the position of the fiber array within one or more of the first range and the second range while the plurality of branched lights are irradiated onto the inspection target while the inspection target is fixed at the inspection position.

11. A light source unit that generates a pulse-shaped optical signal; A spectroscopic unit that branches the above optical signal into a plurality of branch signals and delays the others, excluding one, at different times; A lens unit that investigates the above plurality of branch signals as an inspection target; A sensor unit that receives a plurality of reflected signals reflected from the inspection target using the plurality of branch signals and measures the spectrum of the plurality of reflected signals; and An inspection system characterized by including a control unit that determines one or more of the thickness and shape of the inspection target based on the measurement results of the sensor unit.

12. In Paragraph 11, The above spectroscopic unit is, 2 arranged at N branching points that outputs the input signal as two identical signals N -Including one fiber coupler, the optical signal 2 N An inspection system characterized by branching into several branch signals.

13. In Paragraph 12, The above fiber coupler is, 2 at the Nth branch N-1 An inspection system characterized by the placement of dogs.

14. In Paragraph 12, The above spectroscopic unit is, 2 placed on one of the two outputs of each of the above fiber couplers to delay the input signal for a certain period of time N - Including one delay element, 2 of the plurality of branch signals N Inspection system characterized by delaying by -1.

15. In Paragraph 14, The above delay element is, An inspection system characterized by delaying the above-mentioned fixed time differently for each of the above-mentioned branches.

16. In Paragraph 11, The above spectroscopic unit is, 2 arranged at N branching points, switching the input signal into 2 paths and outputting N -Including one optical switch, the optical signal 2 N An inspection system characterized by branching into several branch signals.

17. In Paragraph 16, The above optical switch is, An inspection system characterized by outputting an input signal through a first path for a certain period of time, then switching to a second path and outputting for the said certain period of time.

18. In Paragraph 11, The above control unit is, An inspection system characterized by determining one or more of the thickness and shape of the inspection target based on the above measurement results, determining that the inspection target is normal if the determination result corresponds to a preset standard condition, and determining that the inspection target is abnormal if the determination result does not correspond to the standard condition.

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