Coating apparatus, system, and method

Abstract

The invention relates to a coating apparatus comprising a vacuum chamber (1) and a workpiece chamber (2), each of the chambers (1, 2) having an inner volume and a connection opening (3, 4) over which the vacuum chamber (1) and the workpiece chamber (2) are connected or connectable to each other, wherein the vacuum chamber (1) is provided with a vacuum device (5) adapted to generate a vacuum within the vacuum chamber (1) and the workpiece chamber (2), wherein a coating device (6) is adapted to provide a workpiece placed in the workpiece chamber (2) with a coating, wherein the vacuum chamber (1) is further provided with an interface (7), wherein the interface (7) can be brought into at least an open position and a closed position, and wherein in its closed position, the interface (7) separates the inner volume of the vacuum chamber (1) into two parts (8, 9), in particular in a vacuum-tight manner. The invention further relates to a coating system and a coating method.

Description

[0001] 65178 / MB / -

[0002] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0003] Coating apparatus, system, and method

[0004] The present invention relates generally to technical field of vacuum coating, and more specifically to the deposition of coatings on workpieces using plasma-based processes such as Physical Vapour Deposition (PVD) or Chemical Vapour Deposition (CVD). The invention particularly concerns an apparatus, a system, and a method for vacuum coating according to the preamble of the independent claims with the general aim to enable precise positioning of workpieces within a vacuum environment while maintaining high coating process efficiency and throughput.

[0005] The manufacture of coatings on workpieces represents an industrially significant process in numerous technological fields. Coatings are commonly applied to improve surface properties such as wear resistance, fatigue strength, oxidation resistance, and corrosion resistance of components. Typical applications include cutting tools, forming tools, stress-bearing automotive components, and general mechanical elements requiring surface characteristics superior to those of the base material.

[0006] In conventional PVD or CVD systems, the workpieces to be coated are introduced into a vacuum chamber over an opening and positioned relative to a coating source, typically by the use of a substrate or workpiece holder. After loading the workpiece, the chamber’s opening is closed, the chamber is evacuated, and the coating process is carried out under controlled plasma and gas conditions. Upon completion of the coating 65178 / MB / -

[0007] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) process, the chamber is vented to atmospheric pressure, the coated workpiece is removed, typically together with the substrate holder, and a new workpiece to be coated is introduced into the chamber, whereinafter the process as described above is repeated.

[0008] This batch-type coating approach is widely used in industry. However, it is inefficient from a time perspective, as the positioning of a new workpiece within the chamber requires that the already coated workpiece has been removed from the chamber already. To improve handling efficiency, systems have been developed, which are equipped with two opposing chamber doors for one chamber opening, wherein one door can be used for coating and unloading already coated workpieces while the opposite door allows for simultaneous loading of still uncoated workpieces. In such configurations, the substrate holder may be integrated into the door assembly, thereby minimizing idle time between coating cycles and enabling efficient handling of parts outside the vacuum chamber. Other handling efficiency improvements are systems with two opposing chamber openings and respective doors for improved access.

[0009] A further approach to increase coating throughput is the implementation of so-called inline coating systems. In such systems, multiple vacuum chambers are arranged sequentially, separated by gate valves or other mechanisms to allow for different pressures in neighboring chambers. Each individual chamber is designed for a specific process stage, such as pumping, pre-cleaning, coating, or cooling and venting. The chambers are interconnected by transfer mechanisms that allow the controlled movement of workpieces between zones of differing pressure and process conditions. In these systems, coating is not performed as a temporal sequence within one chamber, but rather as a spatial sequence across multiple chambers.

[0010] While in-line systems enable high-throughput production, if all workpieces have essentially the same size and shape, they are generally complex, costly, and mechanically constrained due to the vacuum environment, which needs to be maintained within large chamber volumes. The precise and reliable movement of workpieces between chambers, as well as accurate positioning within the coating zones, becomes increasingly challenging as the weight and size of the workpieces 65178 / MB / -

[0011] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) increase. The mechanical systems required to handle such movements must combine robustness, precision, and vacuum compatibility, often resulting in compromises between throughput and positional accuracy. Additionally, such systems are typically not suitable for coating workpieces of differing sizes and shapes.

[0012] The present invention aims to overcome or at least mitigate the limitations associated with the prior art. Specifically, an object of the invention may be seen in providing an improved vacuum coating apparatus, system, and method that enable the coating of workpieces of different geometries with high throughput in a time- and energy-saving manner, while ensuring precise positioning and repeatability.

[0013] A further objective of the invention may be seen in providing a coating apparatus, system, and method suitable for automation, allowing weight-independent handling and positioning of workpieces within the vacuum environment in at least two spatial directions.

[0014] The inventors have now surprisingly found that these and potentially also other objects can be achieved by providing an apparatus, a system, and a method, wherein a two- part chamber design is provided, having an exchangeable workpiece chamber and a fixed vacuum chamber, and wherein the chambers are connected or connectable via a connection opening.

[0015] While the workpiece is mountable or mounted in the workpiece chamber, the vacuum chamber is equipped with the installations necessary to provide the desired vacuum conditions. The coating device to provide the workpiece coating can be placed within the vacuum chamber or within the workpiece chamber. By providing such two-part construction, the workpiece can be placed within the workpiece chamber, typically via a workpiece holder, under ambient conditions, whereinafter the workpiece chamber is connected with the vacuum chamber via the connection opening.

[0016] The vacuum chamber is preferably designed in a manner that vacuum can be maintained in a part thereof, even if the workpiece chamber is detached from the connection opening. This can for example be achieved via an interface, allowing sealing 65178 / MB / -

[0017] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) of a part of the vacuum chamber in a vacuum-tight manner without the need of the connection opening of the vacuum chamber being closed. This configuration provides the beneficial advantage that the vacuum conditions can be maintained in large parts of the apparatus or system, even if the workpiece is exchanged and / or the workpiece chamber is removed. It particularly allows an energy- and time-saving exchange of workpieces, as only a part of the total chamber volume needs to be brought to vacuum conditions again after the workpiece chamber has been re-attached to the connection opening.

[0018] Furthermore, positioning of the workpiece within the workpiece chamber can be performed while the apparatus is in operation with another workpiece chamber, allowing a time-efficient door-to-door process, as the downtime of the apparatus or system during the exchange of workpieces can be reduced.

[0019] In particular, a system may therefore comprise a vacuum chamber and two or more workpiece chambers. One or more devices may be provided, which are adapted to exchange one or more of the following: the workpiece chamber; the workpiece holder inside the workpiece chambers; the workpiece inside the workpiece chamber; the workpiece inside or arranged at the workpiece holder; the coating device or at least one component thereof.

[0020] Additionally, the dimensions and geometry of the workpiece chamber may be adapted to the specific workpiece while maintaining a standardized connection interface at the connection opening, which can further increase adaptability and versatility of the apparatus, system, and method of the invention.

[0021] Therefore, the multiple workpiece chambers of a system may have inner volumes with the same or different geometry or size.

[0022] It is particularly provided that the workpiece chamber has an inner volume that is surrounded on all sides by a sidewall or sidewalls, such that at least one opening is provided. Said opening typically serves the purpose to insert a workpiece into the inner volume as well as to connect the workpiece chamber to the vacuum chamber. 65178 / MB / -

[0023] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0024] Generally, the workpiece chamber or its inner volume may have any shape, but a cylindrical or cuboid shape will typically be desirable due to constructional aspects and ease of use.

[0025] The workpiece chamber is typically distinct form the workpiece itself. However, it may also be provided that the workpiece or a part of the workpiece forms a part of the workpiece chamber.

[0026] Positioning of the workpiece within the workpiece chamber may be achieved using a workpiece holder. Additionally, a masking may be provided, which can be used to mask certain areas of the workpiece, which are intended to remain uncoated. The masking can for example be part of the workpiece holder and / or the chamber itself may provide a masking.

[0027] The vacuum chamber also has an inner volume that is surrounded by a sidewall or sidewalls, wherein at least one opening is provided. Said opening is designed such that it can be connected to the opening of the workpiece chamber in a vacuum-tight manner. It is therefore also referred to as connection opening.

[0028] It is envisaged that the vacuum chamber may have one chamber or more than one subchambers. For example, it may be provided that the vacuum chamber has two subchambers, which are both connected or connectable to the workpiece chamber. In such case, the workpiece chamber may have a respective number of connection openings, such as two connection openings.

[0029] The vacuum chamber is particularly provided with the installations necessary to obtain vacuum conditions. Such installations may comprise a vacuum pump and a control system, collectively referred to as vacuum device.

[0030] The coating device, which may be arranged within the vacuum chamber or within the workpiece chamber (or both), may be any device that allows for the deposition of material on the workpiece, especially under vacuum conditions. In specific embodiments, the coating device may be a PVD device and / or a CVD device. 65178 / MB / -

[0031] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0032] It may be provided that the workpiece chamber and / or the vacuum chamber is / are equipped with further installations, such as heaters, gas inlets, sensors and other auxiliary systems.

[0033] In order to obtain the desired vacuum-tight connection, the connection opening may be provided with a sealing element. Such sealing element may for example be an 0-ring, a gasket, or a metallic seal, depending on the specific operating environment and conditions.

[0034] The preferably provided interface of the vacuum chamber is particularly adapted to seal a part of the inner volume of the vacuum chamber in a vacuum-tight manner against the outer atmosphere, even if the workpiece chamber is disconnected from the vacuum chamber. This means that the interface can divide the inner volume of the vacuum chamber into two parts, wherein a first part is arranged adjacent to the opening, and wherein a second part is arranged at a distance from the opening. With interface being closed and without the workpiece chamber being connected to the vacuum chamber, said first part will therefore remain under ambient conditions, whereas said second part will remain under vacuum conditions. The second part may generally refer to any part or volume of the vacuum chamber.

[0035] Said interface generally provides an openable and closeable boundary between two parts of the vacuum chamber. It may be for example in the form of a valve or a shutter, wherein the specific embodiment of the interface can be selected by a skilled person based on the characteristics of the apparatus or system, such as the required vacuum level or the size and geometry of the opening.

[0036] It is understood that at least in its open position, the interface will allow the workpiece to be exposed to the coating source, i.e. , the interface will not substantially obstruct the passage of material emitted from the coating source towards the workpiece.

[0037] In the context of the invention, the term “vacuum-tight” generally denotes a level of sealing integrity that is suitable for maintaining vacuum conditions within an inner volume of a container, such as a chamber. A vacuum-tight structure is particularly 65178 / MB / -

[0038] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) capable of preventing a substantial ingress of gases from the surrounding atmosphere into the evacuated inner volume over a certain period of time. The term “vacuum-tight” may specifically mean that a pressure of at least 10 mbar, 1 mbar, 10’1mbar, 10’2mbar, or 10’3mbar can be kept substantially constant for a duration of at least one hour without the vacuum device or another pumping system being active, while the surrounding atmosphere is at a pressure of 1 bar.

[0039] A “vacuum” or “vacuum conditions” refers to an environment in which the gas pressure is reduced below the normal atmospheric pressure, such that the mean free path of gas molecules increases significantly, enabling processes that are not possible or not controllable under atmospheric conditions. The amount of reduced pressure will depend on the specific coating technology to be used and can be selected based on the skilled person’s common general knowledge. Typically, a “vacuum” or “vacuum conditions” will refer to a pressure of below 10 mbar, below 1 mbar, below 10’1mbar, below 10’2mbar, or below 10’3mbar and up to 10’5mbar, 10’6mbar, 10’7mbar, or even below.

[0040] The invention particularly relates to a coating apparatus comprising a vacuum chamber and a workpiece chamber, each of the chambers having an inner volume and a connection opening over which the vacuum chamber and the workpiece chamber are connected or connectable to each other, wherein the vacuum chamber is provided with a vacuum device adapted to generate a vacuum within the vacuum chamber and the workpiece chamber, and wherein a coating device is adapted to provide a workpiece placed in the workpiece chamber with a coating.

[0041] It is preferably provided that the vacuum chamber is further provided with an interface, wherein the interface can be brought into at least an open position and a closed position, and wherein in its closed position, the interface separates the inner volume of the vacuum chamber into two parts, in particular in a vacuum-tight manner.

[0042] It may be provided that the coating device is a Physical Vapor Deposition device and / or wherein the coating device is a Chemical Vapor Deposition device. 65178 / MB / - Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0043] It may be provided that the workpiece chamber has a workpiece holder, which optionally has a masking adapted to keep a part of the workpiece placed on the workpiece holder free from coating.

[0044] It may be provided that the apparatus is provided with a control device, which controls the operation of the vacuum device, the coating device, and the interface.

[0045] It may be provided that a sealing element is arranged between the connection openings, and / or that the vacuum chamber and the workpiece chamber are connected or connectable to each other in a vacuum-tight manner.

[0046] It may be provided that the vacuum chamber and / or the workpiece chamber has / have one or more of the following: a heating device, a vent, a gas delivery device, another auxiliary installation.

[0047] It may be provided that the coating device is arranged in the vacuum chamber or in the workpiece chamber.

[0048] It may be provided that the interface is selected from the group consisting of: a gate valve, a sliding shutter plate, a pendulum valve, a butterfly valve; and wherein the interface optionally is provided with sealing means.

[0049] It may be provided that the vacuum device comprise(s) a pump selected from one or more of the group consisting of: an oil-sealed rotary vane pump, a dry scroll pump, a dry screw vacuum pump, a roots booster pump, a turbomolecular pump, a diffusion pump, a cryogenic pump.

[0050] The invention particularly also relates to a coating system comprising a coating apparatus as described herein and at least one further workpiece chamber, having a connection opening over which the further workpiece chamber is connectable to the connection opening of the vacuum chamber. 65178 / MB / -

[0051] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0052] It may be provided that the further workpiece chamber differs in geometry from the workpiece chamber, or wherein the further workpiece chamber has the same geometry as the workpiece chamber.

[0053] The invention particularly also relates to a method for coating a workpiece using an apparatus as described herein, wherein the method comprises the following steps: (a) arranging the workpiece within the workpiece chamber, in particular at atmospheric pressure; (b) connecting workpiece chamber to the vacuum chamber via their respective connection openings; (c) bringing the interface of the vacuum chamber from the closed position in the open position, and allowing the inner volume of the chambers to reach vacuum conditions; (d) coating the workpiece using the coating device; (e) bringing the interface of the vacuum chamber from the open position in the closed position; and (f) disconnecting the workpiece chamber from the vacuum chamber.

[0054] It may be provided that after step (f), the workpiece is removed from the workpiece chamber and replaced by a further workpiece, where after the steps (a) to (f) are repeated.

[0055] It may be provided that a further workpiece is arranged within a further workpiece chamber and the steps (a) to (f) are repeated with the further workpiece chamber connected to the vacuum chamber.

[0056] It may be provided that in step (c) the pressure within the inner volume of the chambers is brought to at least 10 mbar.

[0057] It may be provided that in step (d) additional gas is introduced into the inner volume of the chambers.

[0058] Further features of the invention will become apparent from the claims, the drawing, and the description of exemplary embodiment.

[0059] In the following, an exemplary embodiment of the invention will be described in further detail with the aim to highlight beneficial aspects of the invention in even more detail. 65178 / MB / -

[0060] Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0061] This embodiment shall in no way limit the scope of the invention, which is solely defined by the patent claims.

[0062] Fig. 1 and 2 illustrate schematic drawings of a coating apparatus according to embodiments of the present invention. Except where otherwise mentioned or clearly apparent from the context to the contrary, the drawing shows the following features and elements: vacuum chamber 1 ; workpiece chamber 2; connection opening 3 (of vacuum chamber 1 ); connection opening 4 (of workpiece chamber 2); vacuum device 5; coating device 6; interface 7; first part 8 (of the vacuum chamber’s 1 inner volume); second part 9 (of the vacuum chamber’s 1 inner volume); workpiece holder 10; control device 11 ; workpiece 12; vent opening 13; connection means 14; valve 15.

[0063] The apparatus shown in Fig. 1 comprises a vacuum chamber 1 and a workpiece chamber 2, each having a connection opening 3, 4 which can be coupled to each other to connect the inner volumes of the chambers 1 , 2. The connection is established using connection means 14, which is a flange in the present embodiment. At the contact surface, a sealing element in the form of a gasket is arranged (not shown) to allow vacuum-tight connection.

[0064] A workpiece holder 10 is arranged within the workpiece chamber 2, wherein a workpiece 12 to be coated is placed on the holder 10.

[0065] The vacuum chamber 1 is equipped with a vacuum device 5, which is a vacuum pump, such that vacuum conditions can be created in the inner volume of the chambers 1 , 2. In the present embodiment, the vacuum pump allows to obtain a minimum pressure of approx. 10’5mbar, but this can be easily adjusted through the choice of another suitable pump, depending on the specific requirements of the coating process.

[0066] Furthermore, a coating device 6, which in the present embodiment is a PVD device, is arranged within the vacuum chamber 1 .

[0067] The vacuum chamber 1 has an interface 7 in the form of a sliding valve, which in its closed state (illustrated in Fig. 1 ) separates the inner volume of the vacuum chamber 65178 / MB / - Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) into two parts 8, 9 in a vacuum-tight manner. The first part 8 is arranged at a distance from the connection opening 3, such that vacuum conditions can be maintained, even if the workpiece chamber 2 is disconnected from the vacuum chamber 1 . In contrast to the first part 8, the second part 9 of the inner volume of the vacuum chamber 1 is arranged adjacent to the connection opening 3. Therefore, the second part 9 will be vented, if the workpiece chamber 2 is disconnected from the vacuum chamber 1.

[0068] The vacuum device 5 is connected to both parts 8, 9 of the vacuum chamber 1 , while a valve 15 is provided between the vacuum device 5 and the second part 9.

[0069] In open position, the interface 7 will not obstruct the passage of material emitted from the coating device 6 to the workpiece 12 and the inner volume of the vacuum chamber 1 and the workpiece chamber 2 will be held at uniform vacuum conditions.

[0070] This arrangement will allow vacuum conditions to be maintained in a large fraction of the inner volume, i.e. , in the first part 8, even if the workpiece chamber 2 is exchanged.

[0071] The workpiece chamber 2 further has a vent opening 13, which is openable and closeable over a valve, such that the workpiece chamber 2 can be vented if desired. A vent opening 13 is also provided in the second part 9 of the vacuum chamber 1 . A further optional vent opening 13 is provided in the first part 8 of the vacuum chamber 1 .

[0072] The apparatus further includes a control device, which is operably connected to the interface 7, the vacuum device 5, and the coating device 6, such that the operation of the coating apparatus can be controlled centrally.

[0073] In an exemplary coating method using the apparatus of the embodiment described above, the workpiece 12 is arranged on the workpiece holder 10 in a first step. Then, the connection between the vacuum chamber 1 and the workpiece chamber 2 is established such that the state illustrated in Fig. 1 is obtained. It is to be noted that the interface 7 is still in closed position. 65178 / MB / - Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0074] In the next step, the interface 7 is brought to the open position using the control device 11 , such that the inner volumes of the vacuum chamber 1 and the workpiece chamber 2 get connected. Upon opening of the interface 7, the vacuum conditions that were previously established exclusively within the first part 8 of the inner volume of the vacuum chamber 1 are subsequently established throughout the combined inner volume of the chambers 1 , 2 by means of the suction provided by the vacuum device 5.

[0075] After the desired vacuum conditions have been established, the actual coating process can be started, wherein material from the coating device 6 is evaporated and deposited on the workpiece 12 in a commonly known manner.

[0076] Upon completion of the actual coating process, the interface 7 is brought back into the closed position, such that the first part 8 of the inner volume of the vacuum chamber 1 is separated from the remainder of the inner volume of the chambers 1 , 2 in a vacuum- tight manner again. The workpiece chamber 2 is then vented over the vent opening 13 to bring its inner volume back to ambient pressure.

[0077] Now, the workpiece chamber 2 can be disconnected from the vacuum chamber 1 and the coated workpiece 12 can be removed from the workpiece chamber 2.

[0078] A further workpiece can be inserted into the same workpiece chamber 2, or, for even faster turnaround times, the further workpiece has been inserted into a further workpiece chamber already, such that the further workpiece chamber can be connected to the vacuum chamber 1 immediately after the workpiece chamber 2 has been disconnected therefrom.

[0079] Such further workpiece chamber may have the same or different size and / or geometry compared to the workpiece chamber 2, making it adaptable to the specific requirements of each workpiece.

[0080] The apparatus shown in Fig. 2 is similar to the one shown in Fig. 1 . In order to avoid unnecessary repetitions, only the differences compared to the first embodiment shown in Fig. 1 will be discussed. 65178 / MB / - Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)

[0081] Compared to Fig. 1 , the interface 7 is not arranged between the coating device 6 and the workpiece chamber 2, such that the division of the parts 8, 9 is altered. Such arrangement can be beneficial, as the vacuum device 5 may be kept running, if the coating device 6 is exchanged or altered.

Claims

65178 / MB / -Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT)Claims1. A coating apparatus comprising a vacuum chamber (1 ) and a workpiece chamber (2), each of the chambers (1 , 2) having an inner volume and a connection opening (3, 4) over which the vacuum chamber (1 ) and the workpiece chamber (2) are connected or connectable to each other, wherein the vacuum chamber (1 ) is provided with a vacuum device (5) adapted to generate a vacuum within the vacuum chamber (1 ) and the workpiece chamber (2), and wherein a coating device (6) is adapted to provide a workpiece placed in the workpiece chamber (2) with a coating, characterized in that the vacuum chamber (1 ) is further provided with an interface (7), wherein the interface (7) can be brought into at least an open position and a closed position, and wherein in its closed position, the interface (7) separates the inner volume of the vacuum chamber (1 ) into two parts (8, 9), in particular in a vacuum-tight manner.

2. The coating apparatus according to claim 1 , wherein the coating device (6) is a Physical Vapor Deposition device and / or wherein the coating device (6) is a Chemical Vapor Deposition device.

3. The coating apparatus according to claim 1 or 2, wherein the workpiece chamber (2) has a workpiece holder (10), which optionally has a masking adapted to keep a part of the workpiece placed on the workpiece holder (10) free from coating.

4. The coating apparatus according to any of claims 1 to 3, wherein the apparatus is provided with a control device (11 ), which controls the operation of the vacuum device (5), the coating device (6), and the interface (7).

5. The coating apparatus according to any of claims 1 to 4, wherein a sealing element is arranged between the connection openings (3, 4), and / or wherein the vacuum chamber (1 ) and the workpiece chamber (2) are connected or connectable to each other in a vacuum-tight manner.

6. The coating apparatus according to any of claims 1 to 5, wherein the vacuum chamber (1 ) and / or the workpiece chamber (2) has / have one or more of the65178 / MB / -Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) following: a heating device, a vent, a gas delivery device, another auxiliary installation.

7. The coating apparatus according to any of claims 1 to 6, wherein the coating device (6) is arranged in the vacuum chamber (1 ) or in the workpiece chamber (2).

8. The coating apparatus according to any of claims 1 to 7, wherein the interface (7) is selected from the group consisting of: a gate valve, a sliding shutter plate, a pendulum valve, a butterfly valve; and wherein the interface (7) optionally is provided with sealing means.

9. The coating apparatus according to any of claims 1 to 8, wherein the vacuum device (6) comprise(s) a pump selected from one or more of the group consisting of: an oil-sealed rotary vane pump, a dry scroll pump, a dry screw vacuum pump, a roots booster pump, a turbomolecular pump, a diffusion pump, a cryogenic pump.

10. A coating system comprising a coating apparatus according to any of claims 1 to 9 and at least one further workpiece chamber, having a connection opening over which the further workpiece chamber is connectable to the connection opening (3) of the vacuum chamber (1 ).

11. The coating system according to claim 10, wherein the further workpiece chamber differs in geometry from the workpiece chamber (2), or wherein the further workpiece chamber has the same geometry as the workpiece chamber (2).

12. A method for coating a workpiece using an apparatus according to any of claims 1 to 9, wherein the method comprises the following steps: a. arranging the workpiece within the workpiece chamber (2), in particular at atmospheric pressure, b. connecting workpiece chamber (2) to the vacuum chamber (1 ) via their respective connection openings (3, 4),65178 / MB / - Plasmateria GmbH, Lembockgasse 49 / 1 / B / EG, 1230 Wien (AT) c. bringing the interface (7) of the vacuum chamber (1 ) from the closed position in the open position, and allowing the inner volume of the chambers (1 , 2) to reach vacuum conditions, d. coating the workpiece using the coating device (6), e. bringing the interface (7) of the vacuum chamber (1 ) from the open position in the closed position, and f. disconnecting the workpiece chamber (2) from the vacuum chamber (1 ).

13. The method according to claim 12,- wherein after step (f), the workpiece is removed from the workpiece chamber (2) and replaced by a further workpiece, where after the steps (a) to (f) are repeated, or- wherein a further workpiece is arranged within a further workpiece chamber and the steps (a) to (f) are repeated with the further workpiece chamber connected to the vacuum chamber (1 ).

14. The method according to claim 12 or 13, wherein in step (c) the pressure within the inner volume of the chambers (1 , 2) is brought to at least 10 mbar.

15. The method according to any of claims 12 to 14, wherein in step (d) additional gas is introduced into the inner volume of the chambers (1 , 2).

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