An apparatus includes a top pad having a first plurality of protrusions and a first plurality of grooves between the first plurality of protrusions, a first
adhesive film underlying the top pad, and an anti-deformation layer underlying and attached to the top pad through the first
adhesive film. The anti-deformation layer has a first Young's modulus and a first Poisson's ratio. The apparatus further includes a second
adhesive film underlying the anti-deformation layer, and a main support layer underlying and attached to the anti-deformation layer through the second adhesive film. The main support layer has a second Young's modulus lower than the first Young's modulus.