A Method for Generating Surface Damage Distribution Map of Large Aperture Optical Components
A technology for optical components and surface damage, which is applied in the direction of optical testing flaws/defects, etc., can solve problems such as inaccuracy, affecting the production efficiency of optical components, errors, etc., and achieve the effect of avoiding low efficiency and inaccuracy
Active Publication Date: 2016-08-17
INST OF AUTOMATION CHINESE ACAD OF SCI
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Existing methods require a lot of manual intervention, and at the same time affect the production efficiency of optical components, and there will be errors in human observation with the naked eye, and the obtained distribution map is not accurate or precise
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[0015] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0016] The present invention proposes a method for generating surface damage distribution maps of large-diameter optical components, which can reduce manual intervention and automatically generate a complete surface damage distribution map based on existing surface damage images, which is a preliminary method for surface damage distribution of large-diameter optical components. Provide basis for detection, in which the large-aperture optical element referred to in the present invention is an optical element with an aperture greater than 810*460mm, the existing surface damage images are easy to obtain, and generally refer to multiple surfaces obtained by using CCD equipment through different acquisition methods Damage image...
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The invention discloses a method for generating a distribution diagram of surface damage of a heavy calibre optical element. The method comprises the following steps of extracting the damage contours of multiple existing sub-images of the surface damage of heavy calibre optical elements to obtain the sequences of all the damage contours; calculating the characteristics of the obtained damage contours; classifying and marking the damage contours based on the characteristics of the damage contours; and screening, processing and displaying the damage contours according to specified requirements and classified and marked information so as to generate the distribution diagram of the surface damage of the heavy calibre optical element. By adopting the method, manual operation can be reduced to a great extent, and the surface quality of the element can be tracked in total process and subjected to closed-loop control.
Description
technical field [0001] The invention belongs to the field of surface damage detection of large-diameter optical components, and in particular relates to a method for generating a surface damage distribution map of large-diameter optical components. Background technique [0002] With the needs of scientific research and equipment manufacturing, the effective aperture of the optical system is getting larger and larger. However, due to the inevitable various damages left in the processing process, these damages will have a serious impact on the performance of the precision optical system. These damages will cause different degrees of scattering of the light passing through them, which not only increases the loss of light energy, but also may cause more serious damage to the components and affect the operation of the entire optical system. [0003] At present, there will be a pre-judgment process for the preliminary inspection of the surface damage distribution of large-aperture...
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IPC IPC(8): G01N21/88
Inventor 陶显张正涛张峰史亚莉尹英杰白明然
Owner INST OF AUTOMATION CHINESE ACAD OF SCI