Vapor chamber for cooling electronic components and method for manufacturing the same, and electronic device

Abstract

Embodiments of the present disclosure relate to a steam chamber for cooling electronic components, an electronic device, and a manufacturing method for manufacturing a steam chamber. The steam chamber includes: a bottom cover for receiving waste heat from the electronic components; a top cover arranged on the bottom cover, wherein the bottom cover and the top cover are formed so that a steam cavity for accommodating liquid is formed between the bottom cover and the top cover; a crate element for providing mechanical strength to the steam chamber, wherein the crate element has at least one compartment, the at least one compartment being formed by at least three side panels interconnected and extending from the bottom cover to the top cover, and a top recess facing the top cover and a bottom recess facing the bottom cover; and at least one porous column for transferring liquid from the top cover to the bottom cover, wherein the porous column is arranged in the compartment and extends from the bottom cover through the bottom recess and the top recess to the top cover.

Description

Technical Field

[0001] The present invention relates to the field of heat transfer devices. In particular, the present invention relates to a vapor chamber for cooling electronic components. Background Art

[0002] It is known in the art to arrange a steam chamber containing a liquid on an electronic component so that the heat generated during the operation of the electronic component is dissipated from the electronic component to the steam chamber. The thermal energy corresponding to the heat causes the liquid in the steam chamber to become vaporized, wherein the energy "stored" in the corresponding steam is transferred from the hot side of the steam chamber connected to the electronic component to the cold side of the steam chamber. At the cold side, the steam condenses and transfers the stored energy as thermal energy to the cold side, so that the cold side is heated, while the condensed liquid is transferred back to the hot side of the steam chamber. The heat is dissipated into the surrounding environment at the outside of the cold side of the steam chamber, thereby very effectively cooling the electronic component.

[0003] The conventional two-dimensional steam chamber is composed of a solid top cover, a solid bottom cover, a porous top core structure, a porous bottom core structure, a solid column and an annular porous column. The top cover and the bottom cover form a steam cavity, in which a porous top core structure, a porous bottom core structure and a solid column are arranged. The porous top core structure is arranged at the top cover, and the porous bottom core structure is arranged at the bottom cover. The solid column is embedded in the annular porous column and surrounded by it, and these combined columns are arranged in the recess of the core structure so that the combined column extends from the bottom cover through the recess to the top cover. The solid column is arranged to provide mechanical strength to the steam chamber. The annular porous column and the porous core structure are provided for distributing the liquid in the steam cavity.

[0004] Standard manufacturing methods for steam chambers are, for example, powder sintering or diffusion bonding. In order to be economical, these manufacturing methods only allow the use of cylindrical and annular columns. The disadvantage of this constraint is that the structural strength provided by the cylindrical solid column is limited to the contact area with the solid cover, while the annular porous column provides a limited flow rate of the liquid from the cold side to the hot side due to the high flow resistance of the corresponding porous structure. Therefore, the structural strength and cooling efficiency of the steam chamber are limited. Summary of the invention

[0005] It is therefore an object of the present invention to provide a vapor chamber for cooling electronic components, the vapor chamber having improved structural strength and improved cooling efficiency.

[0006] Another object of the present invention is to provide an electronic device which can operate very efficiently.

[0007] Another object of the present invention is to provide a method for manufacturing a vapor chamber for cooling electronic components, which method helps the vapor chamber have improved structural strength and improved cooling efficiency, and the vapor chamber can be manufactured at a relatively low cost.

[0008] According to one aspect, a steam chamber for cooling electronic components is provided. The steam chamber includes a bottom cover for receiving waste heat from the electronic components; a top cover arranged on the bottom cover, the bottom cover and the top cover being formed so that a steam cavity for containing liquid is formed between the bottom cover and the top cover; a crate element for providing mechanical strength to the steam chamber, wherein the crate element has at least one compartment, the at least one compartment being formed by at least three side panels connected to each other and extending from the bottom cover to the top cover, and a top recess facing the top cover and a bottom recess facing the bottom cover; and at least one porous column for transferring liquid from the top cover to the bottom cover, wherein the porous column is arranged in the compartment and extends from the bottom cover to the top cover through the bottom recess and the top recess.

[0009] The crate element and the porous column form a support structure for the steam chamber. The crate element (specifically, the side panels of the crate element enclosing the compartment) contributes to the fact that the support area where the cover is supported by the support structure can be made relatively large compared to the prior art, so that the structural strength of the steam chamber is improved. In addition, less material is required to form the crate element compared to forming the solid column of the prior art, so that the crate element achieves a more optimized material utilization.

[0010] During normal use of the steam chamber, liquid is arranged in the steam cavity of the steam chamber. The steam cavity can be sealed so that a fixed amount of liquid remains in the steam cavity. Alternatively, the steam chamber can include an inlet and / or outlet that is communicated with the steam cavity for exchanging liquid.

[0011] When the steam chamber is used to cool the electronic components, the steam chamber is preferably arranged on the electronic components, wherein the bottom cover is in thermal contact with the electronic components. In this context, the steam chamber can be referred to as a heat transfer device. When the electronic components generate heat and dissipate to the bottom cover of the steam chamber, the temperature of the bottom cover increases, so that the bottom cover forms the hot side of the steam chamber. Then, the liquid in the steam cavity is vaporized by the thermal energy of the heat, wherein the thermal energy is "stored" in the steam due to its aggregation state. Steam transfers energy from the hot side of the steam chamber to the cold side (i.e., the top cover) of the steam chamber. Specifically, steam transfers energy to the top cover of the steam chamber, while its aggregation state changes again, wherein the steam is at least partially condensed, and the corresponding liquid is led back to the hot side, i.e., the bottom cover, at least partially led back to the hot side by a porous column. Specifically, the purpose of the porous column is to ensure the uniform flow of the liquid in the entire steam chamber, and to provide the capillary pumping required to keep the internal fluid circulation, regardless of gravity.

[0012] The cross section of the crate element may be circular or polygonal, for example triangular, rectangular, square, etc. In this description, the term "cross section" always refers to a cross section parallel to the bottom cover or top cover and / or perpendicular to the extension of the porous column.

[0013] The cross-section of the compartment may be polygonal, for example, triangular, rectangular, square, etc.

[0014] The cross-section of the porous column can be circular or polygonal, for example, triangular, rectangular, square, etc.

[0015] According to one or more embodiments, the cross-sectional area of ​​the porous column is smaller than the cross-sectional area of ​​the compartment, so that an open channel for guiding the liquid from the top cover to the bottom cover is formed between the porous column and at least one of the side panels of the compartment. The open channel contributes to a very efficient transfer of liquid from the hot side to the cold side of the steam chamber. In other words, the purpose of the vacant open channel is to allow free circulation of liquid from the cold side to the hot side of the steam chamber. Because the pressure drop through the vacant open channel is negligible compared to the pressure drop through the porous column, this allows an increase in the flow rate of the liquid (i.e., high permeability) compared to the prior art.

[0016] According to one or more embodiments, the porous column is arranged on at least one of the side panels. Specifically, the porous column can be in direct contact with the corresponding side panel. For example, one edge or side surface of the porous column is fixedly connected to the inner wall of the compartment of the crate element, that is, the surface of the corresponding side panel facing the porous column. Optionally, more than one side (for example, two or three sides) of the porous column can be in direct contact with the crate element. The arrangement of the porous column directly at the crate element provides mechanical strength to the porous column and the crate element, thereby contributing to improving the mechanical strength of the steam chamber.

[0017] According to one or more embodiments, the compartment is formed by at least four side panels. Therefore, the compartment can have a rectangular (e.g., square) cross section. Optionally, the compartment is formed by five or more side panels, so that, for example, a honeycomb structure is formed. This can contribute to a very efficient use of the space inside the steam chamber.

[0018] According to one or more embodiments, at least one of the side panels has side recesses. For example, each side panel may have side recesses. The side recesses may be referred to as through cuts and / or may be formed as polygons (e.g., prismatic or circular). These recesses reduce the material required for the crate elements and the support structure and steam chamber, improve the overall mechanical resistance, and reduce the weight of the support structure and steam chamber.

[0019] According to one or more embodiments, the porous column has a polygonal cross section parallel to the bottom cover or the top cover. For example, the porous column may have a square or rectangular cross section, so that each side surface of the porous column facing a corresponding one of the side panels of the crate element may be a plane. If the porous column (specifically, at least one of its side surfaces) is directly attached to one or more of the side panels, this facilitates proper coupling of the porous column to the crate element.

[0020] According to one or more embodiments, the crate element comprises an array of corresponding compartments, wherein adjacent compartments share at least one of their side panels, and wherein at least one corresponding porous column is arranged in each of the compartments. The array of compartments helps to further increase the mechanical strength of the support structure and the mechanical strength of the steam chamber. The array of corresponding porous columns helps to further enhance the flow of liquid in the steam cavity, thereby resulting in more efficient heat dissipation and cooling efficiency of the steam chamber.

[0021] According to one or more embodiments, the steam chamber includes an array of corresponding crate elements, wherein corresponding porous columns are arranged in corresponding compartments. The array of crate elements helps to further increase the mechanical strength of the steam chamber. The array of corresponding porous columns helps to further enhance the flow of liquid in the steam cavity, thereby resulting in more effective heat dissipation and cooling efficiency of the steam chamber.

[0022] According to one or more embodiments, the steam chamber comprises at least one perforated plate parallel to the bottom cover or parallel to the top cover and having one plate recess for each crate element, wherein the crate element is arranged in the corresponding plate recess and extends through the corresponding plate recess. Optionally, the steam chamber comprises a perforated top plate arranged at or beside the top cover and / or a perforated bottom plate arranged at or beside the bottom cover. The perforated plate may be referred to as a core structure.

[0023] According to one or more embodiments, the top cover includes at least one top chamber extending in a direction away from the bottom cover, the top chamber being in communication with the steam chamber. The top chamber can contain steam during cooling of the electronic components and provide an increased surface to dissipate heat to the surrounding environment. Therefore, the top chamber contributes to a very high cooling efficiency of the steam chamber.

[0024] According to one or more embodiments, the top cover comprises at least two corresponding top chambers, wherein the outer walls of the top chambers are connected to each other by at least one cooling rib. The cooling ribs further increase the surface for dissipating heat and thus contribute to a very high cooling efficiency of the steam chamber.

[0025] According to another aspect, an electronic device is provided. The electronic device includes an electronic component that generates heat while being operated; and the above-mentioned steam chamber, wherein a bottom cover of the steam chamber is in thermal contact with the electronic component for cooling the electronic component. It must be understood that the features, advantages and / or embodiments of the steam chamber described above and below may be features, advantages and / or embodiments of the electronic device.

[0026] It has to be understood that features, advantages and / or embodiments of the steam chamber and / or the electronic device as described above and below may be features, advantages and / or embodiments of the method described below.

[0027] According to another aspect, a method for manufacturing a vapor chamber for cooling electronic components is provided. The method comprises the following steps: providing a bottom cover for receiving waste heat from the electronic components; forming a crate element for providing mechanical strength to the vapor chamber on the bottom cover by using a first energy input additive manufacturing, wherein the crate element has at least one compartment, the at least one compartment is formed by at least three side panels connected to each other and has a top recess and a bottom recess, and the at least one compartment faces the bottom cover; forming at least one porous column on the bottom cover in the compartment by using a second energy input additive manufacturing, wherein the first energy input is greater than the second energy input; and providing a top cover on the bottom cover, the crate element and the porous column, so that a vapor cavity for containing liquid is formed between the bottom cover and the top cover, the crate element and the porous column are arranged in the vapor cavity, and the compartment and the porous column extend from the bottom cover to the top cover, wherein the top recess of the compartment faces the top cover.

[0028] Producing the steam chamber by additive manufacturing facilitates that the steam chamber can be formed in a simple and cost-effective manner. Forming the crate element using a first energy input and forming the porous column using a second energy input, wherein the first energy input is greater than the second energy input, enables providing the solid structure of the crate element and the porous structure of the porous column in a simple manner, simultaneously and / or in the same process.

[0029] According to one or more embodiments, the bottom cover is provided by forming the bottom cover by additive manufacturing. Manufacturing the bottom cover by additive manufacturing helps to form the bottom cover, and thus the steam chamber, in a simple and cost-effective manner. Further, the bottom cover and the support structure can be formed during the same additive manufacturing process, so that the support structure can be formed integrally with the bottom cover. This helps that the support structure can be fixed firmly at the bottom cover without having to be fixed to the bottom cover in a separate process. This contributes to a very high mechanical strength of the steam chamber and a quick and simple manufacture of the steam chamber.

[0030] According to one or more embodiments, the top cover is provided by forming the top cover by additive manufacturing. Manufacturing the top cover by additive manufacturing helps to form the top cover, and thus the steam chamber, in a simple and cost-effective manner. Further, the bottom cover and the support structure can be formed during the same additive manufacturing process, so that the support structure can be formed integrally with the bottom cover. This helps that the support structure can be fixed firmly at the bottom cover without having to be fixed to the bottom cover in a separate process. This contributes to a very high mechanical strength of the steam chamber and a fast and simple manufacture of the steam chamber.

[0031] Optionally, the bottom cover, the top cover and the support structure are formed by additive manufacturing, for example during the same additive manufacturing process. This contributes to a very high mechanical strength of the steam chamber and to a fast and simple manufacturing of the steam chamber.

[0032] These and other aspects of the invention will be apparent from and elucidated with reference to the embodiments described hereinafter. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In the following text, the subject matter of the invention is explained in more detail with reference to exemplary embodiments illustrated in the drawings.

[0034] Figure 1 schematically illustrates a top view of a bottom cover and support structure of a steam chamber according to one or more embodiments;

[0035] Figure 2 Schematically shows the Figure 1 A cross-sectional side view of a steam chamber;

[0036] Figure 3 Schematically shows Figure 1 A perspective view of a crate element of a support structure;

[0037] Figure 4 Schematically shows Figure 1 A three-dimensional view of a porous column of a support structure;

[0038] Figure 5 Schematically shows Figure 1 A three-dimensional view of the supporting structure;

[0039] Figure 6 schematically illustrates a perspective view of another crate element according to one or more embodiments;

[0040] Figure 7 schematically illustrates a cross-sectional side view of another steam chamber according to one or more embodiments;

[0041] Figure 8 schematically illustrates a top view of a perforated plate of a steam chamber according to one or more embodiments;

[0042] Fig. 9 A flow chart illustrating a method of manufacturing a steam chamber according to one or more embodiments;

[0043] The reference numerals used in the drawings and their meanings are listed in summary form in the reference numeral list. In principle, identical components are provided with the same reference numerals in the drawings. DETAILED DESCRIPTION

[0044] Figure 1 shows a top view of the bottom cover 24 of the steam chamber 20 according to one embodiment, and Figure 2 Shows Figure 1 A cross-sectional side view of a short side of the steam chamber 20 is shown. Figure 1 and Figure 2 The steam chamber 20 may be referred to as a two-dimensional steam chamber 20 and / or a heat transfer device.

[0045] The steam chamber 20 includes a bottom cover 24, a top cover 26, and a plurality of support structures 30. The top cover 26 is arranged on the bottom cover 24 so that a steam cavity 22 is formed between the top cover 26 and the bottom cover 24. During normal operation of the steam chamber 20, liquid is arranged in the steam cavity 22. The steam cavity 22 can be sealed so that a fixed amount of liquid remains in the steam cavity 22. Alternatively, the steam chamber 20 may include an inlet and / or an outlet (not shown) that are connected to the steam cavity 22 for exchanging liquid during operation.

[0046] The support structure 30 is arranged in the steam cavity 22 and extends from the bottom cover 24 to the top cover 26. Figure 1 In the illustrated embodiment, the support structures 30 are arranged in rows and columns, wherein adjacent rows are arranged such that a given distance exists between corresponding rows.

[0047] The steam chamber 20 can be used to cool the electronic components 28 that generate heat during operation. To this end, the steam chamber 20 is in thermal contact with the electronic components 28. Specifically, the bottom cover 24 is in thermal contact with the electronic components 28. For example, the bottom cover 24 is directly attached to the electronic components 28. If the electronic components 28 generate heat, the heat is transferred to the steam chamber 20 via the bottom cover 24. Therefore, the bottom cover 24 can be referred to as the warm side of the steam chamber 20, and the top cover 26 can be referred to as the cold side of the steam chamber 20.

[0048] The thermal energy of the transferred heat changes the state of aggregation of the liquid in the steam cavity 22, causing it to at least partially vaporize, wherein the corresponding energy is "stored" in the corresponding steam as heat of vaporization. The steam is distributed in the steam cavity 22 and condenses at least partially inside the top cover 26, thereby releasing the stored energy to the top cover 26 facing away from the electronic component 28 by changing its state of aggregation again. The top cover 26 is heated accordingly and can dissipate heat to the surroundings of the steam chamber 20. The condensed liquid flows back to the bottom cover 24 at least partially with the help of the support structure 30. In addition, heat is transferred from the bottom cover 24 to the top cover 26 through the support structure 30, which is directly connected to the bottom cover 24 and the top cover 26. Therefore, the steam chamber 20 dissipates heat from the electronic component 28, thereby cooling the electronic component 28 very effectively.

[0049] Figure 1 and Figure 2 The embodiment shown includes a given number of support structures 30 (i.e., 60 support structures 30). However, more or fewer support structures 30 may be arranged, such as Figure 1 and Figure 2 Further, Figure 1 and Figure 2 The support structures 30 are arranged in rows and columns (i.e., arranged in 5 rows and 12 columns). However, there may be more or fewer rows and / or columns of corresponding support structures, and / or the support structures 30 may be arranged in different patterns, for example, including circular structures or random structures. Figure 1 As can be seen in FIG. 1 , each support structure 30 has a rectangular (specifically, square) cross section. Alternatively, each support structure 30 may have another polygonal cross section or a circular cross section.

[0050] Figure 3 According to one or more embodiments, Figure 1 A crate element 32 of one of the support structures 30 is shown. The crate element 32 has a plurality of compartments 34, wherein each compartment 34 is formed by four side panels 36 and wherein adjacent compartments 34 share at least two of the side panels 36. In other words, some of the side panels 36 extend along and / or contribute to forming two or more of the compartments 34. Each compartment 34 has a bottom recess 38 and a top recess 40 facing away from the bottom recess 38. If the support structure 30 is arranged in the steam cavity 22, the bottom recess 38 faces the bottom cover 24 and the top recess 40 faces the top cover 26. In addition, the side panels 36 are in direct contact with the bottom cover 24 on one side of the bottom recess 38, and the side panels 36 are in direct contact with the top cover 26 on one side of the top recess 40. Each side panel 36 has a corresponding side recess 42. The thickness of the side panels may be about 0.1 mm to 1 mm.

[0051] The crate element 32 has a square cross-section. Alternatively, the crate element 32 may have another rectangular or polygonal cross-section, or the crate element 32 may have a circular cross-section. The crate element 32 has four rows and four columns, with four compartments 34 in each column and each row, respectively. Alternatively, the crate element 32 may have more or fewer rows and / or columns, with more or fewer compartments 34 in each row and / or column. Each compartment 34 is formed by four side panels 36 and has a square cross-section. Alternatively, the compartment 34 may be formed by only three or more than four side panels 36 and may therefore have a triangular, another rectangular or polygonal cross-section. The bottom recess 38 and the top recess 40 are square in shape for partially accommodating the porous column 50 (see Figure 4 ). Alternatively, the bottom recess 38 and / or the top recess 40 may have another rectangular or polygonal cross section, or the bottom recess 38 and / or the top recess 40 may have a circular cross section. The side recess 42 is prismatic. Alternatively, the side recess 42 may have a rectangular shape, for example, a square shape or a polygonal shape, or the side recess 42 may have a circular shape.

[0052] Figure 4 A perspective view of an array of porous columns 50 of the support structure 30 is shown. Each porous column 50 includes a bottom surface 52 and a top surface 54 facing away from the bottom surface 52. If the porous column 50 is arranged in the vapor cavity 22, the porous column 50 extends from the bottom cover 24 to the top cover 26, the bottom surface 52 is in direct contact with the bottom cover 24, and the top surface 54 is in direct contact with the top cover 26. The porous columns 50 of the support structure 30 are formed so that at least a portion of the liquid in the vapor cavity 22 can be transferred through the pores of the porous columns 50.

[0053] Figure 4 The porous columns 50 of the illustrated embodiment are cuboid in shape, each having a square cross-section. Alternatively, the porous columns 50 may be formed in a different manner and may, for example, have a rectangular, polygonal or circular cross-section. Figure 4 In the illustrated embodiment, the array of porous pillars 50 has four rows and four columns, each having four porous pillars 50. Alternatively, the array of porous pillars 50 may have more or fewer rows and / or columns, each having more or fewer porous pillars 50.

[0054] Figure 5A support structure 30 including a crate element and a porous column 50 is shown. The porous column 50 is arranged in the compartment 34 of the crate element 32. Specifically, each compartment 34 contains each of the porous columns 50. The height of the porous column 50 is the same as the height of the crate element 32 (specifically, the side panel 36). If the support structure 30 is arranged in the steam cavity 22, the crate element 32 (specifically, the side panel 36) and the porous column 50 extend from the bottom cover 24 to the top cover 26 and are in direct contact with the bottom cover 24 and the top cover 26.

[0055] The porous columns 50 are arranged in the compartments 34 so that both sides of each porous column 50 are in direct contact with at least one of the side panels 36. The cross-section of the porous column 50 is smaller than the cross-section of the corresponding compartment 34. Therefore, an open channel for guiding liquid from the cold side of the steam chamber 20 to the hot side is formed between each porous column 50 in the porous columns 50 and the corresponding side panel 36 of the corresponding compartment 34. The area of ​​the open channel may be 0.1 mm to 0.5 mm by 1 mm, which is about 10% to 50% by 100% of the cross-section of the porous column 50, wherein the cross-section is parallel to the bottom cover 24 or the top cover 26.

[0056] Combined with the above Figure 3 and Figure 4 The described alternative embodiments of the crate element 32 and the porous column 50 may be delivered to a Figure 5 Alternative embodiments of the support structure 30 including the crate element 32 and the porous column 50 are shown. Therefore, repeated descriptions of these alternatives are omitted to avoid confusing the concept of the present invention. In addition, alternatively, the porous column 50 can be arranged in the corresponding compartment 34 so that only one side or three sides of the porous column 50 are in direct contact with the corresponding side panel 36 of the corresponding compartment 34, wherein the open channel between the porous column 50 and the other side panel 36 of the corresponding compartment 34 is modified accordingly. Further, in Figure 5 In the illustrated embodiment, each compartment 34 includes at least one porous column 50. Alternatively, some of the compartments 34 may not include any porous columns 50 and / or some of the compartments 34 may include more than one porous column 50.

[0057] In one embodiment, the crate elements 32 and the porous columns 50 are made by additive manufacturing, wherein the crate elements 32 are formed by a first energy input and the porous columns 50 are formed by a second energy input that is less than the first energy input. The first energy input being greater than the second energy input contributes to the material density of the crate elements 32 being greater than the density of the porous columns 50. In other words, the different energy inputs for forming the crate elements 32 and the porous columns 50 result in the material of the crate elements 32 being stronger than the material of the porous columns 50 and the material of the porous columns 50 having pores as compared to the material of the crate elements 32. The solid structure of the crate elements 32 contributes to improving the mechanical strength of the steam chamber 20. The porous structure of the porous columns 50 contributes to a more efficient distribution of the liquid in the steam chamber 20, thereby contributing to a very high cooling efficiency of the steam chamber 20.

[0058] The crate elements 32 and the porous columns 50 can be manufactured simultaneously, wherein in this specification, if one element is referred to as being formed "simultaneously" with another element, the one element is formed into the other element "during the same process" and / or "by the same equipment without removing one element." For example, the crate elements 32 and the porous columns 50 can be selectively sintered from loose metal powder particles by additive manufacturing. Metal powder particles have good thermal conductivity. The particles can be made of a metal material. The particles can be sintered together. The metal material can be, for example, a copper material or an aluminum material. The metal material can be an alloy. The crate elements 32 and the porous columns 50 can be sintered according to a CAD model. The porous column 50 has a three-dimensional shape to optimize the pumping capacity of the micropores and to optimize the flow resistance in the macropores of the porous column.

[0059] According to the above-described embodiment, the crate element 32 and the porous column 50 are connected to the bottom cover 24 and the top cover 26. In this context, the bottom cover 24 and the top cover 26 may be integrally formed (e.g., sintered) with the crate element 32 and the porous column 50. The bottom cover 24 and the top cover 26 may be produced simultaneously with the crate element 32 and the porous column 50. By integrally connecting the bottom cover 24, the crate element 32, the porous column 50, and the top cover 26, an optimal thermal connection may be achieved between the bottom cover 24, the crate element 32, the porous column 50, and the top cover 26. Further, by integrally connecting the bottom cover 24, the crate element 32, the porous column 50, and the top cover 26, an optimal mechanical strength of the steam chamber 20 may be achieved.

[0060] Figure 6 An alternative embodiment of a crate element 32 is shown. The circumference of the crate element 32 parallel to the cross section of the bottom cover 24 or the top cover 26 is circular. For example, the crate element 32 has been formed from one piece of several connected crate elements 32 and subsequently separated from the other crate elements 32, for example by cutting or sawing along circular lines. This can contribute to a simple and cost-effective manufacture of the crate element 32.

[0061] Figure 7 A cross-sectional side view of an alternative embodiment of a steam chamber 20 is shown. The steam chamber 20 may be referred to as a 3-dimensional steam chamber 20. The steam chamber 20 includes a top chamber 60, wherein each top chamber includes a top cavity 62. The top cavity 62 is connected to the steam cavity 22 to exchange liquid and / or steam. Compared to a steam chamber 20 without a top chamber 60, the top chamber 60 increases the outer surface of the steam chamber 20, thereby increasing the cooling capacity of the steam chamber 20. Optionally, cooling ribs 64 connect adjacent top chambers 60 for further increasing the outer surface of the steam chamber 20, thereby increasing the cooling capacity of the steam chamber 20.

[0062] Figure 7 The illustrated embodiment of the steam chamber 20 has ten top chambers 60 and three cooling ribs 64. Alternatively, the steam chamber 20 may include more or fewer top chambers 60. Further, more or fewer of the top chambers 60 may include being connected by corresponding cooling ribs 64. For example, at least one cooling rib 64 may be arranged between two adjacent top chambers 60 in the top chamber 60. Further, two or more cooling ribs 64 adjacent to each other may be arranged between each pair of top chambers 60 in the top chamber 60.

[0063] Figure 8 An embodiment of a perforated plate 70 is shown. The perforated plate 70 may be referred to as a core structure. The perforated plate 70 includes several plate recesses 72. The plate recesses 72 are formed and arranged so that the perforated plate 70 can be arranged in Figure 1 The support structure 30 is arranged on the bottom cover 24 of the steam chamber 20 and extends through the plate recess 72. Figure 1 and Figure 2 With the explained alternative embodiments of the steam chamber 20 and the support structure 30, the perforated plate 70 and in particular the floor recesses 72 may be modified accordingly. For example, if there are more or fewer support structures 30 in the support structure, the perforated plate 70 may include correspondingly more or fewer plate recesses 72. Alternatively or additionally, if the support structure 30 has another cross-sectional area, for example, a circular cross-sectional area, the plate recesses 72 may be adjusted accordingly, for example, so that they are circular.

[0064] The perforated plate 70 can support the steam chamber 20 and / or the support structure 30. Therefore, the perforated plate 70 can contribute to the mechanical strength of the steam chamber 20. Alternatively or additionally, if the perforated plate 70 is made of a porous material, the perforated plate 70 can contribute to the distribution of the liquid in the steam cavity 22. The perforated plate 70 arranged on the bottom cover 24 can be referred to as a perforated bottom plate. Alternatively or additionally, another perforated plate 70 can be arranged at the top cover 26 of the steam chamber 20, which can be referred to as a porous top plate. The perforated bottom plate and / or the perforated top plate can be formed by the same material as the bottom cover 24, the crate element 32, the porous column 50 and / or the top cover 26. The perforated bottom plate and / or the perforated top plate can be manufactured by additive manufacturing, for example, simultaneously with the bottom cover 24, the support structure 30 and / or the top cover 26.

[0065] Fig. 9 A flow chart of an embodiment of a method of manufacturing a vapor chamber for cooling, for example, electronic components, such as vapor chamber 20 for cooling electronic components 28 as explained according to one of the above embodiments, is shown.

[0066] In step S2, preparation and start of manufacturing a steam chamber (e.g., steam chamber 20). For example, in step S2, materials and / or software, structural design (e.g., CAD file) and / or corresponding parameters for manufacturing the steam chamber 20 are prepared and loaded into a device for manufacturing the steam chamber. The device may be a 3D printer.

[0067] In step S4, a bottom cover is provided, for example, the above-mentioned bottom cover 24. Optionally, the bottom cover 24 may be provided by forming the bottom cover 24 by additive manufacturing. If the bottom cover 24 is formed by additive manufacturing, the bottom cover 24 may be formed simultaneously and / or integrally with the crate element 32 and / or the porous column 50. Optionally, a perforated plate (e.g., a perforated plate 70, e.g., a perforated bottom plate) may be formed on the bottom cover 24.

[0068] In step S6, a crate element (eg, the crate element 32 described above) is formed on the bottom cover 24. The crate element 32 is formed by additive manufacturing using a first energy input. The first energy input causes the material of the crate element 32 to be solid without any pores.

[0069] In step S8, a porous column (e.g., the porous column 50 described above) is formed in a compartment of a crate element, for example, a compartment 34 of a crate element 32. The porous column 50 is formed by additive manufacturing using a second energy input, wherein the first energy input is greater than the second energy input. The second energy input causes the material of the porous column 50 to be a porous material having both micropores and / or macropores. The porous column 50 can be formed simultaneously and / or integrally with the corresponding crate element 32.

[0070] Step S8 may be performed before step S6, or steps S6 and S8 may be performed simultaneously. For example, the crate element 32 and the porous column 50 may be produced simultaneously. For example, the crate element 32 and the porous column 50 may be selectively sintered from loose metal powder particles by additive manufacturing. The metal powder particles have good thermal conductivity. The particles may be made of a metal material. The particles may be sintered together. The metal material may be, for example, a copper material or an aluminum material. The metal material may be an alloy. The crate element 32 and the porous column 50 may be sintered according to a CAD model represented by a CAD file. The porous column 50 is in a three-dimensional shape to optimize the pumping capacity of the micropores and to optimize the flow resistance in the macropores of the porous column.

[0071] Fig. 9 One possible embodiment of a manufacturing method is shown. However, when the vapor chamber 20 or at least a portion thereof is manufactured using an additive manufacturing process, there may be other printing steps or only one printing step at all. These one or more printing steps may depend on the printing direction of the part in the printer and / or the laser path selected. Layers may be printed successively on top of each other, and within each layer, the laser path may be programmed to follow a specific pattern. The optimal laser path may not be determined in advance and may depend on the part function and the expertise of the engineer.

[0072] When the porous column 50 is formed by additive manufacturing, an energy beam having a given energy (e.g., the second energy described above) can be directed to the surface of the loose metal powder particle feedstock over a wide area of ​​the porous column 50 to heat the near-surface particles forming the porous column 50 to the sintering temperature of the metal and fuse the heated particles to the body of the porous column 50, wherein the energy exposure of the particles forming the body of the porous column 50 is limited to the sintering energy density and the particles in the large pores of the porous column 50 are surrounded by the energy beam. Optionally, a perforated plate (e.g., perforated plate 70, e.g., a perforated top plate) can be formed around the porous column 50.

[0073] In step S10, a top cover is provided, for example, the above-mentioned top cover 26. Optionally, the top cover 26 may be provided by forming the top cover 26 by additive manufacturing. If the top cover 26 is formed by additive manufacturing, the top cover 26 may be formed simultaneously and / or integrally with the crate element 32 and / or the porous column 50.

[0074] When one of the elements in the group consisting of the bottom cover 24, the crate element 32 and / or the top cover 26 is formed by additive manufacturing, the corresponding element can be formed by manipulating a corresponding energy beam having a given energy (e.g., the second energy described above) within a wide area of ​​the corresponding element to heat near-surface particles forming the element to the melting temperature of the metal and melt the particles into the element, wherein the energy exposure of the particles forming the element is equal to at least the melting energy density.

[0075] The feedstock may be a bed of metal powder particles. The bed may have a flat surface. The feedstock may contain excess material. Unused material of the feedstock may be reused.

[0076] For example, the energy beam can be an electron beam or a laser beam. The energy beam can be directed toward the surface. The energy beam can narrow toward the surface. The energy beam may hit the surface at one point. Specifically, the energy beam can be oriented approximately perpendicular to the surface. The energy beam can be steered in two dimensions across the surface. Multiple energy beams can also be directed toward the surface.

[0077] The temperature of the particles can be increased by absorbing energy from the energy beam and by heat conduction from the heated particles to adjacent cooler particles. Particles at the surface can be heated directly by the beam. Particles below the surface can be heated by the beam and / or heat conduction.

[0078] The sintering temperature may be lower than the melting temperature. The sintering temperature may depend on the raw material. For copper materials, the sintering temperature may be between 700°C and 1070°C, and for aluminum materials, the sintering temperature may be between 400°C and 660°C. At the sintering temperature, the particles may still be solid. At the sintering temperature, the contacting surfaces of the particles may interact and fuse together at the atomic level. The fused particles may still be distinguishable as individual particles. The fused or sintered particles may grow together at their contact points.

[0079] The sintering energy density can be between 2J / mm 3 Up to 15J / mm 3 Within this range, the particles may only reach the sintering temperature. The energy density can be increased slowly to facilitate uniform distribution of energy.

[0080] Melting energy density can be between 30J / mm 3 Up to 70J / mm 3 The melting temperature of the copper material may be between 900°C and 2500°C. The melting temperature of the aluminum material may be between 500°C and 2400°C.

[0081] The above-mentioned steam chamber 20 can be defined by a CAD model. The steam chamber 20 can be a two-dimensional or three-dimensional steam chamber. The CAD model can be cut into two-dimensional layers. In each layer, the steam chamber 20 can have a cross-sectional area defined by the CAD model. The area of ​​the steam chamber 20 can be equal to the cross-sectional area. The broad area can be defined by the boundary of the cross-sectional area. The microporous body (i.e., porous column 50) layer can be embedded in the loose raw material material during the production process. After the particles forming the body are fused after the sintering process, the loose raw material particles in the macropores are removed.

[0082] In step S12 , the steam chamber 20 is completed and can be removed from the manufacturing equipment of the steam chamber 20 , for example, from a 3D printer.

[0083] Although the invention has been described and illustrated in detail in the drawings and the foregoing description, such description and illustration are to be considered illustrative or exemplary rather than restrictive; the invention is not limited to the disclosed embodiments. By studying the drawings, the disclosure and the appended claims, those skilled in the art can understand and implement and practice other variations of the claimed invention to the disclosed embodiments. In the claims, the word "comprising" does not exclude other elements or steps, and the indefinite article "a" or "an" does not exclude the plural. A single processor or controller or other unit may perform the functions of several items recited in a claim. The fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any figure marks in the claims should not be interpreted as limiting the scope.

[0084] Reference numerals list

[0085] 20 Steam Chamber

[0086] 22 Steam cavity

[0087] 24 Bottom cover

[0088] 26 Top cover

[0089] 28 Electronic components

[0090] 30 Support structure

[0091] 32 Crate Elements

[0092] 34 compartments

[0093] 36 Side Panel

[0094] 38 Bottom recess

[0095] 40 Top recess

[0096] 42 side recess

[0097] 50 Porous Column

[0098] 52 bottom surface

[0099] 54 Top surface

[0100] 60 Top chamber

[0101] 62 Top cavity

[0102] 64 Cooling ribs

[0103] 70 Perforated Plate

[0104] 72 Plate concave

[0105] S2-S12 Steps 2 to 12

Claims

1. A vapor chamber (20) for cooling electronic components (28), comprising: A bottom cover (24) for receiving waste heat from the electronic components (28); a top cover (26) arranged on the bottom cover (24), wherein the bottom cover (24) and the top cover (26) are formed such that a vapor cavity (22) for containing liquid is formed between the bottom cover (24) and the top cover (26); a crate element (32) for providing mechanical strength to the steam chamber (20), wherein the crate element (32) has at least one compartment (34) formed by at least three side panels (36) connected to each other and extending from the bottom cover (24) to the top cover (26), and a top recess (40) facing the top cover (26) and a bottom recess (38) facing the bottom cover (24); and at least one porous column (50) for transferring the liquid from the top cover (26) to the bottom cover (24), wherein the porous column (50) is arranged in the compartment (34) and extends from the bottom cover (24) through the bottom recess (38) and the top recess (40) to the top cover (26); The cross-sectional area of ​​the porous column (50) is smaller than the cross-sectional area of ​​the compartment (34), so that an open channel for guiding the liquid from the top cover (26) to the bottom cover (24) is formed between the porous column (50) and at least one of the side panels (36) of the compartment (34).

2. The steam chamber (20) according to claim 1, wherein the porous column (50) is arranged on at least one of the side panels (36).

3. The steam chamber (20) according to claim 1, wherein the compartment (34) is formed by at least four side panels (36).

4. The steam chamber (20) of claim 1, wherein at least one of the side panels (36) has a side recess (42).

5. The steam chamber (20) of claim 1, wherein the porous pillar (50) has a polygonal cross-section.

6. The steam chamber (20) according to claim 1, wherein The crate element (32) comprises an array of corresponding compartments (34), Adjacent compartments (34) share at least one of their side panels (36), and At least one corresponding porous column (50) is arranged in each of the compartments (34).

7. The steam chamber (20) of claim 1, comprising an array of corresponding crate elements (32), wherein corresponding porous columns (50) are arranged in the corresponding compartments (34).

8. The steam chamber (20) according to claim 1 comprises at least one perforated plate (70), wherein the at least one perforated plate (70) is parallel to the bottom cover (24) or parallel to the top cover (26) and has at least one plate recess (72) for each crate element (32), wherein each crate element (32) is arranged in the corresponding plate recess (72) and extends through the corresponding plate recess (72).

9. A steam chamber (20) according to any one of the preceding claims, wherein the top cover (26) includes at least one top chamber (60), which extends in a direction away from the bottom cover (24) and forms a top cavity (62), wherein the top cavity (62) is connected to the steam chamber (20) to exchange liquid and / or steam.

10. The steam chamber (20) according to claim 9, wherein the top cover (26) comprises at least two corresponding top chambers (60), and wherein the outer walls of the top chambers (60) are connected to each other by at least one cooling rib (64).

11. An electronic device comprising: an electronic component (28) that generates heat while being operated; and A steam chamber (20) according to any one of the preceding claims, wherein the bottom cover (24) of the steam chamber (20) is in thermal contact with the electronic component (28) to cool the electronic component (28), and wherein the top cover (26) of the steam chamber (20) is arranged facing away from the electronic component (28).

12. A method for manufacturing a vapor chamber (20) for cooling electronic components (28), comprising: providing a bottom cover (24) for receiving waste heat from the electronic components (28); forming a crate element (32) for providing mechanical strength to the steam chamber (20) on the bottom cover (24) by additive manufacturing using a first energy input, wherein the crate element (32) has at least one compartment (34), the at least one compartment (34) being formed by at least three side panels (36) connected to each other and having a top recess (40) and a bottom recess (38), the at least one compartment (34) facing the bottom cover (24); as well as forming at least one porous column (50) on the bottom cover (24) in the compartment (34) by additive manufacturing using a second energy input, wherein the first energy input is greater than the second energy input; and A top cover (26) is provided on the bottom cover (24), the crate element (32), and the porous column (50), so that a steam cavity (22) for accommodating liquid is formed between the bottom cover (24) and the top cover (26), the crate element (32) and the porous column (50) are arranged in the steam cavity (22), and the compartment (34) and the porous column (50) extend from the bottom cover (24) to the top cover (26), wherein the top recess (40) of the compartment (34) faces the top cover (26).

13. The method of claim 12, wherein the bottom cover (24) is provided by forming the bottom cover (24) by additive manufacturing.

14. A method according to claim 12 or 13, wherein the top cover (26) is provided by forming the top cover (26) by additive manufacturing.

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