A method, device and detection equipment for automatically loading and unloading iron ring blue film

Abstract

The present invention provides an automatic loading and unloading method for iron ring blue film, in which the material box used for loading and unloading is recorded as the first material box, and the material box that completes loading and unloading is recorded as the second material box; comprising: loading at least two of the first material boxes in the material box turnover area, and the material box turnover area is divided into a working position and at least two switching positions; placing the first material box in the working position, and after taking out new material sheets and / or filling old material sheets, moving the first material box previously located at the switching position to the working position; during the loading and unloading process and / or when the loading and unloading work stops, removing the second material box and / or replenishing the first material box. The material box switching work prolongs the material box replacement cycle, improves the fluency and continuity of the detection process, and the material box replacement operation is convenient and efficient, with high labor time utilization, which can optimize the allocation of production resources. The iron ring blue film automatic loading and unloading device and detection equipment also provided by the present invention have corresponding advantages.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor manufacturing, and in particular relates to an automatic loading and unloading method, device and detection equipment for an iron ring blue film. Background Art

[0002] Loading and unloading are important process links in semiconductor manufacturing. Taking the whole process of automatic chip inspection as an example, a clean wafer is usually pasted on the wafer cutting film (blue film), and an iron ring is used to support the blue film to fix the wafer to prevent the wafer from being hit by the outside world. It is more convenient to store the wafer in circulation so that the chips to be tested will not fall off after being cut. For the entire inspection process, the loading and unloading operation of the iron ring blue film sheet is directly related to the smoothness and inspection efficiency of the entire inspection process.

[0003] The turnover of wafers in the form of iron ring blue film sheets through material boxes is completely different from that placed in trays, and they cannot be loaded and unloaded by adsorption. The material box is large in size and is a multi-layer storage form, so conventional loading and unloading methods are not applicable. In the existing loading and unloading method, a robot is set at the loading position of the detection equipment to grab new sheets from a material box and transfer them to the subsequent process, and a special robot is set at the unloading position of the detection equipment to take away the old sheets that have been taken from the iron ring blue film sheets and put them into another material box for recycling. The robot has a large movement range, a long loading and unloading route, a large device structure, and a complex algorithm needs to be set to accurately control the robot. The development cost of the device is very high and the detection equipment occupies a large space, which cannot meet the actual production needs of the enterprise.

[0004] In addition, with the existing loading and unloading method, the staff can only replace the material box at the work station through one operation port, and can only load one material box at a time for loading. After the production of one material box is completed, the machine will be shut down, and the staff will replace a new material box before continuing to work. Moreover, some personnel are required to recycle old sheets at the unloading position. The normal operation of the testing equipment requires personnel to take and put the material box in time. If the empty material box cannot be placed on time when the chip to be tested needs to be replenished, it will seriously affect the detection efficiency of the entire testing equipment. The time for replenishing the material is tight, and staff need to be arranged to stay on duty, resulting in low human resource utilization and high labor costs.

[0005] It can be seen that the existing iron ring blue film loading and unloading method has at least the following problems: 1. The loading and unloading continuity is poor, which affects the improvement of detection efficiency; 2. The machine is stopped at a time to pick up and place one material box, the material box replacement cycle is too short, the degree of automation is low and the machine is stopped frequently, and the high error rate can easily cause failures in the entire detection process; 3. The cycle time for outputting new sheets and recycling old sheets is not coordinated and utilized, the overall loading and unloading efficiency is low, and the output and recycling are carried out in one direction. The equipment occupies a large space and is difficult to design. Summary of the invention

[0006] The present invention is to solve all or part of the problems of the above-mentioned prior art. On one hand, the present invention provides an automatic loading and unloading method of an iron ring blue film. On the other hand, the present invention provides an automatic loading and unloading device of an iron ring blue film, which is applied to an automatic detection process. On the other hand, the present invention provides a detection device for automatic detection.

[0007] The present invention provides an automatic loading and unloading method for iron ring blue film, in which the material box used for loading and unloading is recorded as the first material box, and the material box that completes loading and unloading is recorded as the second material box; the method comprises: loading at least two of the first material boxes in a material box turnover area, wherein at least one of the first material boxes stores multiple layers of new material sheets, and the material box turnover area is divided into a working position and at least two switching positions; placing the first material box in the working position, and after taking out new material sheets and / or filling old material sheets, moving the first material box to the switching position and moving the first material box previously located at the switching position to the working position to continue taking out new material sheets and / or recycling old material sheets; during the loading and unloading process and / or when the loading and unloading work stops, removing the second material box located at the switching position and / or replenishing the first material box to the switching position.

[0008] At least one of the two first material boxes is filled with new sheets, and one of them is empty. The first material box located at the working position is switched according to the actual unloading work situation. For example, in some implementations, the first material box filled with new sheets is placed at the working position to take out new sheets for loading, and after taking out the new sheets, the empty material box is moved to the switching position, and when unloading is required, the empty first material box is moved from the switching position to the working position for unloading, and the method is not limited thereto.

[0009] By loading at least two of the first material boxes in the material box turnover area, the material boxes can be switched for loading and unloading, thereby avoiding the defect of the existing iron ring blue film material loading and unloading method that when the turnover capacity of one material box is exhausted (new material sheets are taken out or old material sheets are recovered), the work needs to be stopped and the material box needs to be replaced immediately. The operation of replacing the material box located at the switching position is not limited by the working state of the first material box located at the working position. According to the specific process requirements, when loading and unloading the first material box, the second material box moved to the switching position can be taken away or the new first material box can be added to the switching position, and the first material box can be continuously provided to the working position; the second material box can also be taken away and / or the first material box can be added when the loading and unloading work stops; the second material box can also be taken away and the first material box can be added synchronously at different switching positions, or they can be performed alternately; the material box replacement operation time is ample, it is convenient for personnel to operate, and the material turnover continuity is strong. More iron ring blue film materials can be continuously supplied in one detection process, which can further coordinate the use of the flow of chips to be tested and the beat time of chip detection, shorten the overall working time of the detection process, and improve the detection efficiency.

[0010] When all the boxes in the box turnover area are filled with the old sheets, the loading and unloading work stops and a signal is sent to notify the replacement of the box; the box located at the switching position and the working position is replaced. After the replacement is completed, the next round of loading and unloading work is started again.

[0011] When all the material boxes are the second material boxes, the loading and unloading work is stopped and the personnel are notified to replace all the material boxes at one time. The loading and unloading cycle is longer, and there is no need for special personnel to be on duty all the time to wait for the material box to be replaced. The degree of automation is further improved and the probability of operational errors is greatly reduced. During a loading and unloading work cycle, the operator can use this time to perform other work, which further releases manpower, is conducive to improving overall production capacity and saving labor costs.

[0012] All of the first material boxes store the new material sheets; during the loading and unloading process, the new material sheets are taken out and the old material sheets are recovered alternately from the same first material box; when the new material sheets of one layer in the first material box are replaced by the old material sheets, the first material box is moved to continue loading and unloading the other layer; until all the new material sheets in the first material box are replaced by the old material sheets, the material box is moved to the switching position as the second material box.

[0013] By alternately taking out new sheets and recycling old sheets layer by layer from the same first material box, new sheets can be output and old sheets that have already taken out the chips to be tested in the subsequent process can be recycled at the same work station. The entire sheet loading and unloading route is shortened by half, which is conducive to meeting the miniaturized design of equipment structure and improving the utilization rate of enterprise production space. The output of a new sheet and the recycling of the old sheet that has been taken out of the chips to be tested by the subsequent process in the previous cycle are carried out alternately. There is no need to wait for a new sheet to be taken out of the chips to be tested by the subsequent process before recycling the old sheet. The action stroke is compact and the beat time is coordinated, which further improves the work efficiency of automatic loading and unloading.

[0014] On one hand, the present invention provides an automatic loading and unloading device for iron ring blue film, which is used to implement the automatic loading and unloading method for iron ring blue film of the present invention; it includes a material box module and a material sheet loading and unloading module; the material box module includes a material box support component and a material box switching component; the material box support component can carry at least two material boxes; the material box switching component is connected to the material box support component in a transmission manner, driving the material box support component to reciprocate through the working position of the material box module; the material sheet loading and unloading module is docked with the working position, including an X-axis lateral movement component and a material picking claw component; the output end of the X-axis lateral movement component is connected to the material picking claw component in a transmission manner, driving the material picking claw component to reciprocate along the X-axis, and moving the material sheet between the working position and the material receiving platform. The at least two material boxes carried by the material box support component, when one of the material boxes is placed in the working position, the other material boxes are placed in the switching position. The material box in the working position can be switched by the cooperation between the material box support component and the material box switching component. More material boxes can be switched to the working position for work, which greatly prolongs the cycle of replacing the material boxes in the material box module. The operator does not need to stay at the post all the time to wait for the replacement of the material box, and can leave for a long time. The material boxes carried by the material box support component can be replaced after all the material boxes are loaded and unloaded. The mobility of the operator is effectively improved, and the optimal configuration of production resources is utilized to reduce labor costs and increase the output of a single person. In addition, since the operator can replace multiple material boxes at a time and does not need to replace them frequently, the number of downtimes is reduced. The ability to switch multiple material boxes for uninterrupted loading and unloading also reduces the downtime waiting time caused by loading and unloading.

[0015] The iron ring blue film automatic loading and unloading device also includes a material lifting Z-axis module; the bottom of the material box support component is provided with a hollow area, and the output end of the material lifting Z-axis module is connected to the bottom of the material box located at the working position through the hollow area, so as to lift and lower the material box. The material sheet layer of the material box located at the working position is switched by the material lifting Z-axis module, and the material box is lifted up so that each layer of the material sheet is moved to the corresponding loading and unloading position.

[0016] The material box module is provided with a shell outside, and the shell is provided with at least two operation ports; the operation ports are connected to the switching position of the material box module and are used to take and put the material box. The shell is provided outside the material box module to better prevent dust and protect the material box from damage to the material sheet. At least two operation ports are provided on the shell to facilitate operators to more flexibly replace the material box at the switching position from different positions, further reduce downtime waiting time, and help improve the production capacity of the production line.

[0017] The material box switching component is a linear motion mechanism, and the output end of the linear motion mechanism is transmission-connected to the bottom of the material box support component, driving the material box support component to intermittently reciprocate along the Y-axis with the width of the material box in the Y-axis direction as the step length. The material box support component is driven by the linear motion mechanism to intermittently reciprocate along a straight line with the width of a material box as the step length, and can move the material boxes carried in different areas of the material box support component to the working position and then stop moving and keep still for loading and unloading. After completing loading and unloading, continue to move the completed material box to the switching position to wait for the operator to take it away and replace it with a new material box. The switching stroke occupies a small space, has a simple structure, and uses a linear motion mechanism to operate stably and reliably and is easy to configure, which is conducive to saving manufacturing costs.

[0018] In a specific embodiment, the linear motion mechanism is driven by a cylinder or a motor, and cooperates with a lead screw to achieve linear movement according to a preset step length. The linear motion mechanism can also be driven by other driving mechanisms, which is not limited. The material box switching component can also use a rotating mechanism to achieve arc motion for position switching. According to the specific structure and space design, the switching motion path can avoid structural interference, which is not limited.

[0019] The material picking clamp assembly includes a first lifting part, a first push rod, and a clamping claw part arranged at the lower end of the first push rod; the output end of the first lifting part is transmission-connected with the upper end of the first push rod to drive the first push rod to rise and fall.

[0020] The material picking clamp assembly also includes a second lifting part and a second push rod; the output end of the second lifting part is transmission-connected with the second push rod to drive the second push rod to move up and down.

[0021] The distance between the first push rod and the second push rod in the X-axis direction ranges from 350 mm to 400 mm.

[0022] The material loading and unloading module also includes a material transfer component arranged between the working position and the material receiving platform; the material transfer component includes a transfer platform and a third lifting part; the output end of the third lifting part is transmission-connected with the bottom of the transfer platform to drive the transfer platform to rise and fall; the transfer platform includes a first material layer and a second material layer stacked, which are respectively used to receive new materials from a material box and old materials from the material receiving platform.

[0023] The first material layer and / or the second material layer is provided with a positioning structure; the positioning structure comprises a position sensor and a limiting sensing block; the position sensor cooperates with the limiting sensing block to control the material to be moved to a preset position.

[0024] The width of the intermediate transfer platform in the X-axis direction is equal to the distance between the first push rod and the second push rod in the X-axis direction.

[0025] The number of layers of the material box ranges from 13 to 25 layers.

[0026] Another aspect of the present invention provides a detection device provided with the iron ring blue film automatic loading and unloading device of the present invention.

[0027] Compared with the prior art, the main beneficial effects of the present invention are:

[0028] 1. The invention discloses an automatic loading and unloading method for iron ring blue film, which can take and place at least two material boxes at a time, and the material box switching operation is beneficial to extend the material box replacement cycle, improve the fluency of the detection process, and optimize the detection process. It has a high degree of automation and good continuity. The material box replacement operation is convenient and efficient, and the man-hour utilization rate is high. It can optimize the production resource allocation and greatly save production costs.

[0029] 2. The iron ring blue film automatic loading and unloading device of the present invention has a simple structure, does not require a manipulator, has a reasonable loading and unloading movement stroke, a small movement amplitude, high operating stability, a small structural space occupation, is easy to repair and maintain, and can meet the automatic loading and unloading needs of production lines with short operating cycles. It is suitable for practical applications in most companies in the same field. It is equipped with a switching position and a working position, which can facilitate and quickly load and unload materials and replace material boxes, increase the working cycle of personnel replacing material boxes, further reduce the waiting time caused by personnel loading and unloading, and improve the overall production capacity of the production line.

[0030] 3. A detection device of the present invention has corresponding advantages due to the use of the iron ring blue film automatic loading and unloading device of the present invention. It can continuously obtain iron ring blue film sheets to perform automatic optical detection on the chip to be tested, and the loading and unloading is convenient and the detection efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic diagram of the process of the automatic loading and unloading method of the iron ring blue film according to the first embodiment of the present invention.

[0032] Figure 2 It is an overall schematic diagram of the iron ring blue film automatic loading and unloading device according to the second embodiment of the present invention.

[0033] Figure 3 It is a top view schematic diagram of the iron ring blue film automatic loading and unloading device according to the second embodiment of the present invention.

[0034] Figure 4 It is a side view schematic diagram of a material box module according to the second embodiment of the present invention.

[0035] Figure 5 It is a side view schematic diagram of the iron ring blue film automatic loading and unloading device according to the second embodiment of the present invention.

[0036] Figure 6This is a schematic diagram of the positioning structure of the second embodiment of the present invention.

[0037] Figure 7 This is a schematic diagram of the automatic loading and unloading process of the iron ring blue film according to the second embodiment of the present invention.

[0038] Figure 8 This is a schematic diagram of a detection device according to Embodiment 2 of the present invention. DETAILED DESCRIPTION

[0039] The technical solutions in the specific embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] Embodiment 1

[0041] The embodiment is introduced by taking the application of Micro LED automatic detection as an example, in order to facilitate the professional and technical personnel in this field to fully understand the present invention, but the present invention is not limited in any form. In the first embodiment of the present invention, an automatic loading and unloading method of an iron ring blue film is provided. For the convenience of explanation, the material box used for loading and unloading is recorded as the first material box, and the material box that completes loading and unloading is recorded as the second material box. The exemplary method includes: loading at least two first material boxes in the material box turnover area, wherein at least one first material box stores multiple layers of new material sheets, and the material box turnover area is divided into a working position and at least two switching positions; placing the first material box in the working position, after taking out the new material sheets and / or filling the old material sheets, the first material box is moved to the switching position and the first material box previously located at the switching position is moved to the working position to continue taking out the new material sheets and / or recycling the old material sheets; during the loading and unloading process and / or when the loading and unloading work stops, remove the second material box located at the switching position and / or replenish the first material box to the switching position. As Figure 1As shown, in a specific process, in the initial stage, two first material boxes are first loaded in the material box turnover area; the first loading and unloading work is started, a first material box is placed in the working position, and the new material sheets and the old material sheets are alternately taken out of the first material box; after all the old material sheets are recycled in the first material box, it is moved to the switching position as the second material box and the other first material box previously located at the switching position is moved to the working position; when the loading and unloading work stops, the second material box is taken out and a new first material box is added. The personnel have ample time to replace the material box between the two loading and unloading work, which is convenient for personnel to operate. In actual applications, more first material boxes can be loaded and are not limited to two. In some practices, the second material box located at the switching position is removed and replaced with a new first material box during the loading and unloading work of the second first material box. In this practice, the first material box can be continuously provided to the working position, and the turnover of the material sheets is strong. It is also possible for two operators to synchronously take out the second material box located at a switching position and add the first material box to another switching position at different switching positions, or one operator can intersperse different switching positions, which is not limited.

[0042] In a specific method, when the new sheets of a layer in the first material box are replaced by the old sheets, the first material box is moved to continue loading and unloading the other layer; until all the new sheets in the first material box are replaced by the old sheets, the material box is moved to the switching position as the second material box. In this example method, the two first material boxes are pre-filled with new sheets, and the new sheets are taken out and the old sheets are recycled layer by layer in the same first material box alternately. The new sheets can be output and the old sheets that have been taken out of the chips to be tested in the later process can be recycled at the same work position. The loading and unloading route of the entire sheet is shortened by half, which is conducive to meeting the miniaturization design of the equipment structure and improving the utilization rate of the enterprise's production space. The output of a new sheet and the recycling of the old sheet that has been taken out of the chips to be tested by the later process in the previous cycle are carried out alternately. There is no need to wait for a new sheet to be taken out of the chips to be tested by the later process before recycling the old sheet. The action stroke is compact and the beat time is used in a coordinated manner, which further improves the work efficiency of automatic loading and unloading. In the example, the two first material boxes can be loaded with new sheets in one first material box and empty in the other first material box. After starting the loading and unloading work, new sheets are taken from one first material box and old sheets are put into the other first material box alternately. The first material box that is empty of new sheets can also be used to recycle old sheets in the next round of work, and the specific method is not limited here.

[0043] In the example, when one loading and unloading work stops, the material box in the material box turnover area is replaced to start the next loading and unloading work. In the example, when all the material boxes in the material box turnover area are filled with the old sheets, the loading and unloading work stops and a signal is sent to notify the replacement of the material box; the material box located at the switching position and the working position is replaced. The loading and unloading work cycle is longer, and there is no need for a dedicated person to be on duty all the time to wait for the material box to be replaced. The degree of automation is further improved, and the probability of operational errors is greatly reduced. In a loading and unloading work cycle, the operator can use this time to do other work.

[0044] Embodiment 2

[0045] In the second embodiment of the present invention, Figure 2 and Figure 3 As shown, the automatic loading and unloading device of the iron ring blue film can be used to implement the automatic loading and unloading method of the iron ring blue film of the above-mentioned embodiment 1, including a material box module 1 and a material sheet loading and unloading module 2. The material sheet loading and unloading module 2 is docked with the working position W of the material box module 1, and includes an X-axis lateral movement component 21 and a material picking clamping claw component 22. The output end of the X-axis lateral movement component 21 is transmission-connected with the material picking clamping claw component 22, driving the material picking clamping claw component 22 to reciprocate along the X-axis, and the material picking clamping claw component 22 moves the material sheet between the working position W and the material receiving platform T (material receiving position T'). In some implementation situations, other motion mechanisms can also be used in the material sheet loading and unloading module 2 to move the material sheet up and down along other motion paths. For example, a multi-axis manipulator is used to reciprocate along an arc to move the material sheet between the working position W and the material receiving platform T (material receiving position T'), and it is set accordingly according to the relative position of the working position W and the material receiving position T', and is not limited. The material box module 1 includes a material box support component 11 and a material box switching component 12. The material box support component 11 can carry at least two material boxes. The material box switching component 12 is connected to the material box support component 11 in a transmission manner, driving the material box support component 11 to reciprocate through the working position W to switch the material box located at the working position W. In the exemplary case, the material box support component 11 is a support frame, and the upper part of the support frame carries two material boxes side by side. When one material box is in the working position W, the other material box is in the switching position S, such as Figure 3 In the illustrated case, the switching position S can be on both sides of the working position W. After the material box of one working position is completed, it moves to the switching position S on one side, and the material box waiting for work at the switching position S on the other side of the working position W is synchronously moved to the working position W for work. The illustrated material box module 1 is provided with a shell (not shown) on the outside, and the shell has two operation ports; the operation ports are connected to the switching position of the material box module 1, and are used by the staff to take and put the material box.

[0046] In this embodiment, Figure 4As shown, the automatic loading and unloading device of the iron ring blue film also includes a top material Z-axis module 3, and a hollow area is provided at the bottom of the material box support component 11. The output end of the top material Z-axis module 3 is connected to the bottom of the material box at the working position W through the hollow area, and is used to lift the material box to switch the material layer of the material box. The bearing surface of the exemplary support frame is frame-shaped, and a hollow area is provided in the area corresponding to the working position W. The output end of the top material Z-axis module 3 is provided with a supporting surface, and the size of the hollow area is sufficient for the supporting surface to pass through. The supporting surface is connected to the bottom of the material box at the working position W, and the material box at the working position W can be lifted from the material box support component 11. The top material Z-axis module 3 can be driven by a cylinder or a servo motor. In some implementations, the top material Z-axis module 3 can also use other drive mechanisms in combination with specific equipment design to achieve Z-axis movement, which is not limited. In some specific implementations, there may be no material ejection Z-axis module 3, and the material box support component 11 is provided with a shelf structure, with one layer carrying one material box. The material box switching component 12 drives the material box support component 11 to move up and down, and different material boxes can be vertically switched to the working position W, and the specific material sheet layer of the material box at the working position W can also be switched for loading and unloading. By setting an external control module to control specific actions, the movement of switching the material box can be designed to be vertical or horizontal in combination with the spatial layout of the actual application site of the enterprise, which is not limited here.

[0047] In this embodiment, the material box switching component 12 is a linear motion mechanism, and the output end of the linear motion mechanism is connected to the bottom of the material box support component 11, driving the material box support component 11 to intermittently reciprocate along the Y axis with the width of the material box in the Y axis direction as the step length. The linear motion mechanism sampling cylinder drives the screw to realize intermittent reciprocating movement along the Y axis with the width as the step length. Each time the width of a material box is moved, the movement stops, and the material box of the working position W is in place to work. After the work is completed, the width of the material box is moved again. The material box of the working position W is replaced and the material box that has completed the work is moved to the switching position S to wait for the personnel to take it away. The operation is stable and there is no extra stroke. The material box of the working position W and the material box of the switching position S are synchronously in place through a moving action of one step length, which is low in cost, simple in structure, easy to operate, and saves power consumption. In some embodiments, the material box switching component 12 can also use a rotating mechanism to drive the material box support component 11 to intermittently rotate and switch the material box of the working position W, or use a lifting mechanism to move up and down to realize the material box switching. The specific switching movement path can be set accordingly according to the actual space layout and is not limited.

[0048] like Figure 5 As shown, in this embodiment, the material taking clamping claw assembly 22 includes a first lifting part 221, a first push rod 222, and a clamping claw part 223 arranged at the lower end of the first push rod 222. The output end of the first lifting part 221 is transmission-connected with the upper end of the first push rod 222 to drive the first push rod 222 to rise and fall.

[0049] In a specific practice, the material picking clamp assembly 22 also includes a second lifting part 224 and a second push rod 225. The output end of the second lifting part 224 is in transmission connection with the second push rod 225 to drive the second push rod 225 to rise and fall. The X-axis traverse assembly 21 can use a cylinder, and the material picking clamp assembly 22 is provided with two push rods and corresponding two lifting parts, which can be driven by a cylinder to rise and fall. The clamp part 223 can be realized by a clamp cylinder facing the material box, which is conducive to flexibly combining the position of the material sheet in the flow to complete the grabbing and pushing actions, simplifying the movement steps, reducing the movement stroke, and improving the handling efficiency.

[0050] In this embodiment, the sheet loading and unloading module 2 also includes a sheet transfer assembly 23 arranged between the working position W and the receiving position T' of the receiving platform T. The sheet transfer assembly 23 includes a transfer platform 231 and a third lifting part 232. The output end of the third lifting part 232 is connected to the bottom of the transfer platform 231 by transmission to drive the transfer platform 231 to rise and fall. The transfer platform 231 includes a first sheet layer 231a and a second sheet layer 231b stacked, which are used to receive new sheets from the material box and old sheets from the receiving platform T, respectively. In this embodiment, the sheet transfer assembly 23 is provided so that the old sheets from the receiving platform T and the new sheets from the material box can be alternately circulated, further reducing the operating cycle time and shortening the movement stroke, speeding up the loading and unloading speed, using one material box to realize the output of new sheets and the recovery of old sheets, greatly shortening the overall operation cycle of the production line, and realizing the continuous operation of the production line, without the need to receive the new sheets one by one and then load the old sheets one by one, the entire production line can continuously load the new sheets and unload the old sheets synchronously, greatly improving the work efficiency and further reducing the number of shutdowns. The first push rod 222 and the second push rod 225 are driven by the X-axis traverse assembly 21, and the distance between the two does not change when they move synchronously in the X-axis direction. The spacing range of the first push rod 222 and the second push rod 225 in the X-axis direction is 350 mm to 400 mm, and one preferred example value is 360 mm. The first push rod 222 and the second push rod 225 in this spacing range can reach both sides of a sheet at the same time for the current conventional sheet width; the width of the exemplary transfer platform 231 in the X-axis direction is equal to the spacing between the first push rod 222 and the second push rod 225 in the X-axis direction, and can also reach both sides of the transfer platform 231 at the same time. The material picking claw assembly 22 can move at least two sheets in one round trip, further improving the stroke effectiveness, helping to improve the operating efficiency and smoothness of the production line, and reducing power consumption and work time loss caused by ineffective actions.

[0051] In the example approach, Figure 6As shown, the first sheet layer 231a and the second sheet layer 231b are provided with a positioning structure. The positioning structure includes a position sensor 2311 and a limiting sensing block 2312. The position sensor 2311 cooperates with the limiting sensing block 2312 to control the sheet to be moved to a preset position. The exemplary positioning structures are respectively arranged on both sides of the right side of the first sheet layer 231a in the Y-axis direction and on both sides of the left side of the second sheet layer 231b in the Y-axis direction. The limiting sensing block 2312 is connected to the edge of the sheet layer through a reset torsion spring. When the sheet overshoots during movement and touches the limiting sensing block 2312, it returns to the internal area of ​​the sheet layer through the reset torsion spring and synchronously triggers the position sensor 2311. The position sensor 2311 sends a signal to the external control module to control the material picking clamp assembly 22 to stop moving or to perform a proper return action to place the sheet at a preset position on the sheet layer.

[0052] The following specific examples of the process of loading and unloading the iron ring blue film automatic loading and unloading device using the present embodiment can enable professionals in the field to more fully understand the iron ring blue film automatic loading and unloading method of the present invention, but do not limit the present invention in any way.

[0053] Combined with reference Figures 2 to 6 In this embodiment, an automatic loading and unloading device for iron ring blue film is used to load and unload the iron ring blue film sheet. Figure 7 As shown, step S1. carry at least two material boxes that store multiple layers of new sheets respectively on the material box support component 11. Step S2. move the new sheets in the current material box located at the working position W to the material receiving platform T, and move the old sheets completed on the material receiving platform T to the current material box. Step S3. The movement of the material box switching component 12 drives the material box support component 11 to move the current material box to the switching position S, and at the same time moves the material box that was originally waiting for work at the switching position S to the working position W. Until there are no new sheets in all the material boxes carried by the material box support component 11, a signal is sent to notify the replacement of the material box. The signal can be perceived by the personnel in the production space of the enterprise through the set signal light or the buzzer. After receiving the signal, the personnel can come over immediately to replace several material boxes, or they can wait for the next batch of material boxes to arrive and transport them to the loading and unloading work area at one time for material box replacement. It should be implemented accordingly according to the actual production arrangements, and there is no restriction. The cycle of replacing the material box is long, and multiple material boxes can be replaced in one replacement process, which is convenient for practical implementation and flexible operation, improves the mobility of personnel, and is conducive to the overall arrangement and coordinated implementation of work. By carrying at least two material boxes at a time for switching work, the workload of replacing the material box is greatly reduced, and the cycle of replacing the material box is fully extended, which solves the limitation of the existing loading and unloading method that requires personnel to pay attention on the job, further releases the output capacity of a single person, reduces labor costs, and improves the work efficiency of the overall production line.

[0054] In the example, the process of step S2 includes: step S21. The material picking clamp assembly 22 clamps the new material sheet in the current material box to the first material sheet layer 231a. Step S22. The material picking clamp assembly 22 moves to push the old material sheet on the receiving platform T to the second material sheet layer 231b. Step S23. The material picking clamp assembly 22 pushes the new material sheet to the receiving position T' of the receiving platform T, and pushes the old material sheet back to the empty position of the current material box. Repeat steps S21 to S23 until all the new material sheets in the current material box are replaced by the old material sheets.

[0055] The transfer platform 231 has two layers, the upper layer is the first material layer 231a, and the lower layer is the second material layer 231b. The transfer handling process is described as an example. Before step S21, the material lifting Z-axis module 3 moves the first layer of the current material box from top to bottom to the same height as the first material layer 231a, and the first material layer 231a is at the same height as the material receiving position T' of the receiving platform T. After step S23, the material lifting Z-axis module 3 moves the current material box up one layer and then starts to repeat the operation on the second layer.

[0056] In step S21, after the clamping claw part 223 clamps the new sheet in the current material box out of the material box and moves it to the specified position of the first sheet layer 231a, the first lifting part 221 drives the first push rod 222 to rise and leave the working range. The third lifting part 232 drives the intermediate transfer platform 231 to rise and fall so that the second sheet layer 231b is at the same height as the material receiving position T'. At this time, the first push rod 222 and the second push rod 225 move to both sides of the material receiving position T' in the X-axis direction. In step S22, after the second push rod 225 reaches the side of the material receiving position T' away from the intermediate transfer platform 231, it is driven by the second lifting part 224 to descend to the working range, pushing the old sheet on the material receiving platform T that flows to the material receiving position T' to the second sheet layer 231b. At this time, the first push rod 222 and the second push rod 225 move to both sides of the intermediate transfer platform 231 in the X-axis direction. In step S23, the third lifting unit 232 first drives the intermediate transfer platform 231 to descend so that the first material layer 231a is at the same height as the receiving position T', the second lifting unit 224 drives the second push rod 225 to rise and leave the working range, and the first lifting unit 221 drives the first push rod 222 to descend to the side of the intermediate transfer platform 231 away from the receiving platform T and return to the working range, pushing the new material from the first material layer 231a to the receiving position T'. At this time, the first push rod 222 and the second push rod 225 move to both sides of the receiving position T' in the X-axis direction, and the first push rod 222 is in the working range, and the second push rod 225 is not in the working range. The third lifting unit 232 then drives the intermediate transfer platform 231 to rise so that the second material layer 231b is at the same height as the empty position of the current material box, and the first push rod 222 moves in the opposite direction to push the old material to the empty position of the current material box. The material picking clamp assembly 22 is driven by the X-axis transverse movement assembly to reciprocate between the intermediate transfer platform and the material receiving platform, and cooperates with the third lifting part 232 to switch the first material layer 231a and the second material layer 231b, and according to the position of the material picking clamp assembly 22, the first push rod 222 and the second push rod 225 are alternately lifted and lowered to flexibly perform clamping and pushing actions, which saves power consumption and has smooth cooperation, without unnecessary reciprocating and lifting strokes, thereby avoiding waste of transportation time and further shortening the cycle time.

[0057] refer to Figure 6 In the exemplary step S2, when the new sheet or the old sheet acts on the limiting sensing block 2312, the position sensor 2311 is triggered, and a signal is transmitted to the external control module to control the X-axis lateral movement component 21 to stop the material picking clamp component 22 from moving.

[0058] Through this embodiment, it can be understood that the automatic loading and unloading method of the iron ring blue film of the present invention is used for loading and unloading, and the steps are simple and the cycle time is short. It also does not require personnel to pay attention and does not rely on manual switching of material boxes, avoiding frequent shutdowns to replace material boxes, further releasing production capacity, high production efficiency and conducive to stable operation of equipment. It should be noted that the automatic loading and unloading method of the iron ring blue film of the present invention can also be combined with the specific automated production equipment of the enterprise and adopt other designed loading and unloading mechanisms for implementation, and is not limited.

[0059] like Figure 8 As shown, this embodiment also provides a detection device which is sequentially provided with the iron ring blue film automatic loading and unloading device A and the automatic optical detection module B of this embodiment along the flow direction of the chip to be tested. The automatic optical detection module B is used to perform automatic optical detection on the chip to be tested on the iron ring blue film sheet. Figure 8 In the example case, the loading and unloading positions M of the detection equipment are opened corresponding to the working position W and the switching position S, so that the material boxes can be taken and placed at the working position W and the switching position S when the loading and unloading work stops. Figure 8 In the example, a chip taking mechanism is also provided between the iron ring blue film automatic loading and unloading device A and the automatic optical inspection module B, which can take the chip to be tested from the iron ring blue film sheet and transport it to the automatic optical inspection module B for inspection. The inspection equipment can be designed according to the specific inspection process needs and production space of the enterprise, and the specific situation is not limited here.

[0060] It should be noted that, in this document, relational terms such as “first” and “second” are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0061] The present invention has been described in detail above. For those skilled in the art, several improvements and modifications may be made to the present invention without departing from the principles of the present invention. These improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A method for automatically loading and unloading iron ring blue film, characterized in that: The material box used for loading and unloading is recorded as the first material box, and the material box that completes loading and unloading is recorded as the second material box; including: Load at least two of the first material boxes in a material box turnover area, wherein at least one of the first material boxes stores multiple layers of new material sheets, and the material box turnover area is divided into a working position and at least two switching positions; The first material box is placed at the working position, and after taking out new sheets and / or filling old sheets, the first material box is moved to the switching position, and the first material box previously located at the switching position is moved to the working position to continue taking out new sheets and / or recycling old sheets; During the loading and unloading process and / or when the loading and unloading process stops, the second material box located at the switching position is removed and / or the first material box is replenished to the switching position; all the first material boxes store the new material sheets; during the loading and unloading process, the new material sheets are taken out and the old material sheets are recovered alternately from the same first material box; When the new sheet of one layer in the first material box is replaced by the old sheet, the first material box is moved to continue loading and unloading the other layer; After all the new sheets in the first material box are replaced by the old sheets, the material box is moved to the switching position as the second material box.

2. The method for automatically loading and unloading iron ring blue film according to claim 1, characterized in that: When all the material boxes in the material box turnover area are filled with the old material sheets, the loading and unloading work stops and a signal is sent to notify the replacement of the material box; the material boxes located at the switching position and the working position at this time are replaced.

3. An automatic loading and unloading device for iron ring blue film, characterized in that: Used to implement the automatic loading and unloading method of the iron ring blue film according to any one of claims 1 to 2; comprising a material box module (1) and a material sheet loading and unloading module (2); The material box module (1) comprises a material box supporting component (11) and a material box switching component (12); the material box supporting component (11) is capable of carrying at least the first material box and / or the second material box; The material box switching component (12) is in transmission connection with the material box supporting component (11), driving the material box supporting component (11) to make reciprocating movement through the working position of the material box module (1); The sheet loading and unloading module (2) is docked with the working position, and comprises an X-axis lateral movement component (21) and a material picking clamping claw component (22); the output end of the X-axis lateral movement component (21) is transmission-connected with the material picking clamping claw component (22), driving the material picking clamping claw component (22) to reciprocate along the X-axis, thereby moving the sheet between the working position and the material receiving platform.

4. The automatic loading and unloading device for iron ring blue film according to claim 3 is characterized in that: It also includes a material ejection Z-axis module (3); a hollow area is provided at the bottom of the material box support component (11); an output end of the material ejection Z-axis module (3) is transmission-connected to the bottom of the material box located at the working position through the hollow area, so as to be used for lifting the material box.

5. The automatic loading and unloading device for iron ring blue film according to claim 3 is characterized in that: The material taking clamping claw assembly (22) comprises a first lifting part (221), a first push rod (222), and a clamping claw part (223) arranged at the lower end of the first push rod (222); the output end of the first lifting part (221) is transmission-connected to the upper end of the first push rod (222) to drive the first push rod (222) to rise and fall.

6. The automatic loading and unloading device for iron ring blue film according to claim 5 is characterized in that: The material taking clamping claw assembly (22) further comprises a second lifting part (224) and a second push rod (225); the output end of the second lifting part (224) is drivingly connected to the second push rod (225) to drive the second push rod (225) to move up and down.

7. The automatic loading and unloading device for iron ring blue film according to claim 5 is characterized in that: The sheet loading and unloading module (2) also includes a sheet transfer component (23) arranged between the working position and the material receiving platform; the sheet transfer component (23) includes a transfer platform (231) and a third lifting part (232); the output end of the third lifting part (232) is connected to the bottom of the transfer platform (231) in a transmission manner to drive the transfer platform (231) to rise and fall; the transfer platform (231) includes a first sheet layer (231a) and a second sheet layer (231b) which are stacked and are used to receive new sheets from a material box and old sheets from the material receiving platform, respectively.

8. The automatic loading and unloading device for iron ring blue film according to claim 7 is characterized in that: The first material sheet layer (231a) and / or the second material sheet layer (231b) are provided with a positioning structure; the positioning structure comprises a position sensor (2311) and a limiting sensing block (2312); the position sensor (2311) cooperates with the limiting sensing block (2312) to control the material sheet to be moved to a preset position.

9. A detection device, characterized in that: An automatic loading and unloading device for the iron ring blue film as described in any one of claims 3-8 is provided.

Images