Vacuum fiber-optic introduction device and vacuum apparatus

Abstract

This invention provides a vacuum fiber optic insertion device and a vacuum equipment, relating to the field of vacuum connector technology. The fiber optic insertion device includes a first mounting body, a second mounting body, and a light-transmitting element. The first mounting body has at least one first through-hole for inserting an optical fiber, and the second mounting body has a second through-hole for inserting an optical fiber. The first mounting body is detachably disposed on the second mounting body, and the first through-hole corresponds to the second through-hole. The light-transmitting element is correspondingly disposed between the first through-hole, the second through-hole, or the first and second mounting bodies, enabling a corresponding seal between the first and second through-holes, and allowing the optical fiber inserted in the first through-hole and the optical fiber inserted in the second through-hole to communicate with each other through the light-transmitting element. The light-transmitting element achieves both vacuum sealing and fiber-optic communication, thereby reducing costs and resulting in less optical signal attenuation compared to reflection or through-beam methods.

Description

Technical Field

[0001] This invention relates to the field of vacuum connector technology, and more specifically, to a vacuum fiber optic introduction device and a vacuum equipment. Background Technology

[0002] Fiber optic sensors have the characteristics of good stability, fast response speed, strong resistance to electromagnetic interference, short circuit protection, reverse electrode protection, and non-contact conduction, and have broad application prospects.

[0003] In vacuum system applications, such as coating and deposition equipment, we frequently use signal devices such as fiber optic sensors. Optical signals need to be introduced from the atmospheric environment into the vacuum environment or exported from the vacuum environment back to the atmosphere. Currently, a common method is the vacuum observation window, where light passes directly through a transparent medium and the signal is obtained using reflection or through-beam transmission principles. This method typically has significant uncertainties and substantial signal loss. Another commonly used structure utilizes fiber optic coupling connectors combined with materials such as glass, ceramics, or plastics to conduct optical signals and achieve the sealing effect required for a vacuum environment. However, such products have complex manufacturing processes and high costs. Summary of the Invention

[0004] The present invention aims to provide, for example, a vacuum fiber optic introduction device and a vacuum apparatus that can reduce the cost of the vacuum fiber optic introduction device while also reducing optical signal loss.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a vacuum optical fiber introduction device for vacuum connection between optical fibers, comprising a first mounting body, a second mounting body and a light-transmitting element, wherein the first mounting body is provided with at least one first through hole for inserting the optical fiber, and the second mounting body is provided with a second through hole for inserting the optical fiber.

[0007] The first mounting body is detachably disposed on the second mounting body, and the first wire hole corresponds to the second wire hole;

[0008] The light-transmitting element is correspondingly disposed between the first wire hole or the second wire hole or between the first mounting body and the second mounting body, which can seal the first wire hole and the second wire hole respectively, and allow the optical fiber inserted in the first wire hole and the optical fiber inserted in the second wire hole to communicate with each other through the light-transmitting element.

[0009] In an optional embodiment, the vacuum optical fiber introduction device further includes a first sealing ring and a second sealing ring, the first sealing ring and the second sealing ring being respectively disposed on opposite sides of the light-transmitting element, and the first sealing ring abutting against the light-transmitting element and the first mounting body, and the second sealing ring abutting against the light-transmitting element and the second mounting body.

[0010] In an optional embodiment, a limiting groove is provided on the side of the first mounting body near the second mounting body. The limiting groove corresponds one-to-one with the first threading hole. The first sealing ring and the light-transmitting element are installed in the limiting groove, and the first sealing ring abuts against the bottom wall of the limiting groove and the light-transmitting element.

[0011] In an optional embodiment, the first mounting body includes an upper cover plate, a base, and a first guide sleeve;

[0012] The upper cover plate and the first guide sleeve are detachably connected. The first guide sleeve is disposed between the upper cover plate and the base. The first through hole is disposed in the first guide sleeve. The first guide sleeve can fix the optical fiber inserted into the first through hole.

[0013] In an optional embodiment, the first guide sleeve includes a first segment and a second segment connected to each other, the diameter of the second segment being larger than the diameter of the first segment, and the first thread hole passing through the first segment and the second segment.

[0014] The upper cover plate is provided with a first through hole that matches the diameter of the first section, and the upper cover plate is provided with a first slot that matches the diameter of the second section on the side near the base, and the first through hole and the first slot are connected.

[0015] The first segment is assembled in the first through hole, the second segment is assembled in the first slot, and the end of the second segment away from the first segment abuts against the base, and the end of the second segment close to the first segment abuts against the bottom wall of the first slot.

[0016] The base is provided with a second through hole corresponding to the first through hole, and the optical fiber can extend through the first through hole into the second through hole.

[0017] In an optional embodiment, the first mounting body further includes a third sealing ring;

[0018] The third sealing ring is disposed between the first guide sleeve and the base to seal the first guide sleeve against the base.

[0019] In an optional embodiment, the second mounting body includes a lower cover plate and a second guide sleeve;

[0020] The second guide sleeve includes a third segment and a fourth segment that are connected to each other, and the diameter of the fourth segment is larger than the diameter of the third segment. The second thread passes through the second guide sleeve.

[0021] The lower cover plate is detachably connected to the base;

[0022] The lower cover plate is provided with a third through hole, and the lower cover plate is provided with a second slot that matches the fourth section at one end near the base, and the second slot communicates with the third through hole;

[0023] The third segment is assembled in the third through hole, the fourth segment is assembled in the second slot, and the second sealing ring abuts against the end of the fourth segment away from the third segment and the light-transmitting element, and the end of the fourth segment near the third segment abuts against the bottom wall of the second slot.

[0024] In an optional embodiment, the first mounting body further includes a first fastening screw, a first opening is provided on the first segment along the height direction of the first segment, and a first threaded hole communicating with the first through hole is provided on the side wall of the upper cover plate in the radial direction. The first fastening screw is assembled in the first threaded hole. Rotating the first fastening screw can deform the first segment along the first opening, thereby fixing the optical fiber passing through the first wire hole to the first guide sleeve.

[0025] In an optional embodiment, the second mounting body further includes a second fastening screw, and the third segment is provided with a second opening along the height direction of the third segment. The side wall of the lower cover plate is provided with a second threaded hole communicating with the third through hole in the radial direction. The second fastening screw is assembled in the second threaded hole. Rotating the second fastening screw can deform the third segment along the second opening, thereby fixing the optical fiber passing through the second wire hole to the second guide sleeve.

[0026] In an optional embodiment, the first guide sleeve and / or the second guide sleeve and / or the lower cover plate are provided with an elongated groove, which is used for air discharge from the vacuum optical fiber introduction device.

[0027] In an optional embodiment, the vacuum fiber optic introduction device further includes a clamp, an internal sealing ring, and a flange joint. The first mounting body or the second mounting body is provided with a flange that matches the clamp, and the internal sealing ring is disposed with the flange.

[0028] The flange joint is used for installation on vacuum equipment;

[0029] The clamp can be used to install the vacuum optical fiber introduction device onto the flange joint via the flange.

[0030] Secondly, the present invention provides a vacuum device, including the vacuum optical fiber introduction device described in any of the foregoing embodiments.

[0031] The beneficial effects of the vacuum fiber optic introduction device and vacuum equipment provided in the embodiments of the present invention include, for example:

[0032] This embodiment provides at least one first through-hole for inserting the optical fiber into a first mounting body, and a second through-hole for inserting the optical fiber into a second mounting body. The first mounting body is detachably mounted on the second mounting body, with the first through-hole corresponding to the second through-hole. A light-transmitting element is correspondingly positioned between the first through-hole, the second through-hole, or the first and second mounting bodies, ensuring a seal between the two holes and allowing the optical fiber inserted in the first through-hole and the optical fiber inserted in the second through-hole to communicate with each other through the light-transmitting element. Thus, the light-transmitting element can achieve both vacuum-sealed isolation and communication between optical fibers, thereby reducing costs and resulting in less optical signal attenuation compared to reflection or through-beam methods. Furthermore, this application can also connect multiple pairs of optical fibers, further saving costs. Attached Figure Description

[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a cross-sectional schematic diagram of the vacuum optical fiber introduction device provided in an embodiment of the present invention;

[0035] Figure 2 This is a schematic diagram of the structure of the vacuum optical fiber introduction device provided in an embodiment of the present invention;

[0036] Figure 3 This is a schematic diagram of the vacuum optical fiber introduction device provided in an embodiment of the present invention with the clamp in the open state;

[0037] Figure 4 A schematic diagram of the first guide sleeve structure of the vacuum optical fiber introduction device provided in an embodiment of the present invention;

[0038] Figure 5 This is a schematic diagram of the second guide sleeve structure of the vacuum optical fiber introduction device provided in an embodiment of the present invention;

[0039] Figure 6 This is a schematic diagram of the lower cover plate structure of the vacuum optical fiber introduction device provided in an embodiment of the present invention.

[0040] Icons: 100 - Vacuum fiber optic introduction device; 110 - First mounting body; 111 - First wire hole; 113 - Limiting groove; 115 - Top cover plate; 117 - Base; 119 - First guide sleeve; 121 - First section; 123 - Second section; 125 - First through hole; 127 - First slot; 129 - Second through hole; 131 - Third sealing ring; 133 - Third slot; 135 - Third sealing ring groove; 137 - First fastening screw; 138 - First opening; 139 - First threaded hole; 141 - First sealing ring 143 - Slender groove; 145 - Flange; 150 - Second mounting body; 151 - Second wire hole; 153 - Lower cover plate; 155 - Second guide sleeve; 157 - Third section; 159 - Fourth section; 161 - Third through hole; 163 - Second slot; 165 - Second opening; 167 - Second fastening screw; 169 - Second threaded hole; 191 - Light-transmitting element; 192 - First sealing ring; 193 - Second sealing ring; 194 - Clamp; 195 - Internal sealing ring; 196 - Flange joint; 200 - Optical fiber. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0043] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0044] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0045] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0046] It should be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.

[0047] Please refer to Figure 1 This embodiment provides a vacuum device, which can be a vacuum coating device for coating workpieces, or a vacuum device for atomic layer or chemical deposition. The vacuum device has at least one vacuum chamber for workpiece surface treatment. Inside the vacuum chamber are a motion mechanism, an optical fiber sensor for detecting the motion state of the motion mechanism and parameters within the vacuum chamber, an optical fiber 200 for transmitting the optical signal from the optical fiber sensor out of the vacuum chamber, and a vacuum optical fiber introduction device 100. The vacuum optical fiber introduction device 100 can introduce the optical signal outside the vacuum chamber while ensuring the vacuum chamber is sealed.

[0048] Please refer to Figures 1-6 In this embodiment, the vacuum fiber optic introduction device 100 includes a first mounting body 110, a second mounting body 150, and a light-transmitting element 191. The first mounting body 110 is provided with at least one first through hole 111 for inserting an optical fiber 200, and the second mounting body 150 is provided with a second through hole 151 for inserting an optical fiber 200. The first mounting body 110 is detachably disposed on the second mounting body 150, and the first through hole 111 corresponds to the second through hole 151. The light-transmitting element 191 is correspondingly disposed between the first through hole 111 or the second through hole 151 or between the first mounting body 110 and the second mounting body 150, which can seal the first through hole 111 and the second through hole 151, and allow the optical fiber 200 inserted into the first through hole 111 and the optical fiber 200 inserted into the second through hole 151 to communicate with each other through the light-transmitting element 191.

[0049] In this embodiment, the first mounting body 110 is provided with at least one first through hole 111 for inserting an optical fiber 200, and the second mounting body 150 is provided with a second through hole 151 for inserting an optical fiber 200. The first mounting body 110 is detachably disposed on the second mounting body 150, with the first through hole 111 corresponding to the second through hole 151. A light-transmitting element 191 is correspondingly disposed between the first through hole 111 or the second through hole 151, or between the first mounting body 110 and the second mounting body 150, so that the first through hole 111 and the second through hole 151 are correspondingly sealed, and the optical fiber 200 inserted into the first through hole 111 and the optical fiber 200 inserted into the second through hole 151 can communicate with each other through the light-transmitting element 191. The light-transmitting element 191 can achieve both vacuum-sealed isolation and communication between optical fibers 200, thereby reducing costs and resulting in less optical signal attenuation compared to reflection or through-beam transmission.

[0050] In use, one end of an optical fiber 200 can be inserted through the first through hole 111 and abutted against one side of the light-transmitting element 191, and the other end of an optical fiber 200 can be inserted through the second through hole 151 and abutted against the other side of the light-transmitting element 191, thereby connecting the two optical fibers 200 through the light-transmitting element 191.

[0051] In this embodiment, there are four first threading holes 111 and four second threading holes 151, which are evenly distributed on the first mounting body 110 and the second mounting body 150. Of course, in other embodiments of this application, the number of first threading holes 111 and two threading holes 151 may be one or more, such as two, three, five or more. The number can be set according to the quantity used.

[0052] In this embodiment, the light-transmitting element 191 is transparent quartz glass. Quartz glass is a special industrial technical glass composed of a single component of silicon dioxide. This type of glass has a hardness of up to Mohs 7, and features high temperature resistance, low coefficient of expansion, thermal shock resistance, good chemical stability and electrical insulation properties, and can transmit ultraviolet and infrared rays.

[0053] Please refer to Figures 1-6 In this embodiment, the vacuum fiber optic introduction device 100 further includes a first sealing ring 192 and a second sealing ring 193. The first sealing ring 192 and the second sealing ring 193 are respectively disposed on opposite sides of the light-transmitting element 191, and the first sealing ring 192 abuts against the light-transmitting element 191 and the first mounting body 110, and the second sealing ring 193 abuts against the light-transmitting element 191 and the second mounting body 150.

[0054] This embodiment uses an abutment method to make the installation of the light-transmitting component 191 more convenient and secure. Sealing both sides of the light-transmitting component 191 with the first sealing ring 192 and the second sealing ring 193 ensures a vacuum environment, reduces costs, lowers the requirements for workpiece machining precision and materials, and makes cost control easier.

[0055] In other embodiments of this application, the light-transmitting element 191 can also be assembled into the first wire hole 111 or the second wire hole 151 by means of adhesive bonding, snap-fitting or other installation methods.

[0056] In this embodiment, a limiting groove 113 is provided on the side of the first mounting body 110 near the second mounting body 150. The limiting groove 113 corresponds one-to-one with the first wire hole 111. The first sealing ring 192 and the light-transmitting element 191 are installed in the limiting groove 113, and the first sealing ring 192 abuts against the bottom wall of the limiting groove 113 and the light-transmitting element 191.

[0057] In this embodiment, by setting the limiting groove 113, the side wall of the light-transmitting component 191 can be restricted, thereby preventing the light-transmitting component 191 from moving and causing the first wire hole 111 and the second wire hole 151 to connect, thus affecting the sealing and vacuum, and making the installation of the light-transmitting component 191 more stable.

[0058] Please refer to Figures 1-6 In this embodiment, the first mounting body 110 includes an upper cover plate 115, a base 117, and a first guide sleeve 119. The upper cover plate 115 and the first guide sleeve 119 are detachably connected. The first guide sleeve 119 is disposed between the upper cover plate 115 and the base 117. A first through hole 111 is disposed in the first guide sleeve 119. The first guide sleeve 119 can fix the optical fiber 200 inserted into the first through hole 111.

[0059] In this embodiment, the first guide sleeve 119 facilitates the insertion of the optical fiber 200 and the fixing of the optical fiber 200 inserted into the first through hole 111. Furthermore, the first guide sleeve 119 is installed by the snap-fit ​​between the upper cover plate 115 and the base 117, thereby limiting the position of the guide sleeve and making the assembly of the vacuum optical fiber introduction device 100 more convenient.

[0060] In this embodiment, the first guide sleeve 119 includes a first segment 121 and a second segment 123 connected to each other. The diameter of the second segment 123 is larger than the diameter of the first segment 121. A first threading hole 111 passes through the first segment 121 and the second segment 123. The upper cover plate 115 is provided with a first through hole 125 matching the diameter of the first segment 121, and the side of the upper cover plate 115 near the base 117 is provided with a first slot 127 matching the diameter of the second segment 123. The first through hole 125 and the first slot 127 are connected. The first segment 121 is fitted into the first through hole 125, and the second segment 123 is fitted into the first slot 127. The end of the second segment 123 away from the first segment 121 abuts against the base 117, and the end of the second segment 123 near the first segment 121 abuts against the bottom wall of the first slot 127. The base 117 has a second through hole 129 corresponding to the first through hole 111, through which the optical fiber 200 can extend to the second through hole 129. The ends of the first segment 121 at both the inner and outer periphery are chamfered to facilitate the insertion of the optical fiber 200. The first segment 121 is inserted into the first through hole 125. The first guide sleeve 119, through surface-to-surface contact, allows for more precise installation and better alignment of the two optical fibers 200.

[0061] Of course, in some other embodiments of this application, the top cover 115, the base 117 and the first guide sleeve 119 can be integrally formed.

[0062] Please refer to Figures 1-6In this embodiment, the first mounting body 110 further includes a third sealing ring 131; the third sealing ring 131 is disposed between the first guide sleeve 119 and the base 117 so that the first guide sleeve 119 is sealed to the base 117.

[0063] This embodiment achieves a seal between the first guide sleeve 119 and the base 117 by setting a third sealing ring 131, thereby further enhancing the sealing performance. It also prevents external light from affecting the joint.

[0064] In this embodiment, the top wall of the base 117 is provided with a third slot 133 corresponding to the first slot 127, and the third slot 133 communicates with the second through hole 129. The second segment 123 is partially installed in the first slot 127 and partially assembled in the third slot 133. This arrangement allows the second segment 123 to be used for positioning between the base 117 and the upper cover plate 115, eliminating the need for positioning pillars or other positioning structures.

[0065] In this embodiment, a third sealing ring groove 135 is provided on the bottom wall of the third slot 133, and the third sealing ring 131 is partially installed in the third sealing ring groove 135. This arrangement can prevent the sealing ring from shifting during installation, thus affecting the insertion of the optical fiber 200.

[0066] Please refer to Figures 1-6 In this embodiment, the base 117 and the upper cover 115 are fixed by screws. Since the upper cover 115 and the base 117 are positioned by the surface abutment of the second segment 123, fasteners such as screws or bolts ensure precise alignment of the base 117 and the upper cover 115 even without a positioning structure. Furthermore, adjusting the fasteners can control the compression of the third sealing ring 131.

[0067] Generally, when there are multiple first guide sleeves 119, the upper cover plate 115 and the base 117 can be fixed with a central screw, and multiple first guide sleeves 119 can be positioned.

[0068] In this embodiment, the second mounting body 150 includes a lower cover plate 153 and a second guide sleeve 155. The second guide sleeve 155 includes a third segment 157 and a fourth segment 159 connected to each other, and the diameter of the fourth segment 159 is larger than the diameter of the third segment 157. A second through hole 151 passes through the second guide sleeve 155. The lower cover plate 153 is detachably connected to the base 117. A third through hole 161 is provided on the lower cover plate 153, and a second slot 163 matching the fourth segment 159 is provided at one end of the lower cover plate 153 near the base 117. The second slot 163 communicates with the third through hole 161. The third segment 157 is fitted into the third through hole 161, and the fourth segment 159 is fitted into the second slot 163. The second sealing ring 193 abuts against the end of the fourth segment 159 away from the third segment 157 and the light-transmitting element 191. The end of the fourth segment 159 near the third segment 157 abuts against the bottom wall of the second slot 163. The inner and outer circumferential surfaces of the third segment 157 are chamfered. The chamfer allows the optical fiber 200 to be better inserted into the second through hole 151, and also allows the fourth segment 159 to be easily inserted into the third through hole 161. Secondly, the surface-to-surface fit between the second guide sleeve 155 and the lower cover plate 153 can improve the installation accuracy of the optical fiber 200.

[0069] In this embodiment, the light-transmitting element 191 is disposed between the base 117 and the lower cover plate 153, and the limiting groove 113 is disposed on the bottom surface of the base 117, with the same diameter as the third segment 157. A first sealing ring groove 141 is provided on the bottom wall of the limiting groove 113, and a first sealing ring 192 is installed within the first sealing ring groove 141. The diameter of the light-transmitting element 191 is slightly smaller than the diameter of the limiting groove 113, and the top of the light-transmitting element 191 abuts against the first sealing ring 192. That is, the first sealing ring 192 is disposed between the bottom wall of the limiting groove 113 and the top surface of the light-transmitting element 191 for sealing. The slightly smaller diameter of the light-transmitting element 191 prevents damage due to thermal expansion and contraction. Part of the third segment 157 is accommodated within the second slot 163, and another part is accommodated within the limiting groove 113, with the second sealing ring 193 disposed between the top surface of the second guide sleeve 155 and the bottom surface of the light-transmitting element 191.

[0070] Please refer to Figures 1-6In this embodiment, the first mounting body 110 also includes a first fastening screw 137. A first opening 138 is provided on the first segment 121 along the height direction of the first segment 121. A first threaded hole 139 communicating with the first through hole 125 is provided on the side wall of the upper cover plate 115 in the radial direction. The first fastening screw 137 is assembled in the first threaded hole 139. Rotating the first fastening screw 137 can deform the first segment 121 along the first opening 138, thereby fixing the optical fiber 200 passing through the first wire hole 111 to the first guide sleeve 119. The second mounting body 150 also includes a second fastening screw 167. A second opening 165 is provided on the third segment 157 extending along its height direction. A second threaded hole 169 communicating with the third through hole 161 is provided radially on the side wall of the lower cover plate 153. The second fastening screw 167 is fitted into the second threaded hole 169. Rotating the second fastening screw 167 causes the third segment 157 to deform along the second opening 165, thereby fixing the optical fiber 200 passing through the second through hole 151 to the second guide sleeve 155. In this embodiment, the first opening 138 and the second opening 165 facilitate the fixing of the inserted optical fiber 200.

[0071] In this embodiment, the first guide sleeve 119 and the second guide sleeve 155 are made of PTFE material. The lower cover plate 153 and the base 117 are connected by fasteners. Rotating the fasteners can adjust the deformation of the first sealing ring 192 and the second sealing ring 193.

[0072] In this embodiment, the sidewalls and end faces of the first segment 121 and the third segment 157 are provided with elongated grooves 143 that communicate with each other. These elongated grooves 143 can discharge the air between the light-transmitting element 191 and the second guide sleeve 155, or the residual air between the first guide sleeve 119, the upper cover plate 115, and the base 117, when the vacuum chamber is evacuated. In addition, the bottom surface of the upper cover plate 115 and the top surface of the lower cover plate 153 are also provided with elongated grooves 143 for evacuation. These grooves generally communicate with the holes or slots provided in the upper cover plate 115 and the lower cover plate 153, and extend to their sidewalls. This allows air to be extracted from the vacuum fiber optic introduction device 100 during the vacuum chamber evacuation process.

[0073] Please refer to Figures 1-6 In this embodiment, the vacuum fiber optic introduction device 100 further includes a clamp 194, an internal sealing ring 195, and a flange connector 196. A flange 145 matching the clamp 194 is provided on the first mounting body 110 or the second mounting body 150, and the internal sealing ring 195 is disposed on the flange 145. The flange connector 196 is installed on a vacuum device and communicates with the vacuum chamber. The clamp 194 can install the vacuum fiber optic introduction device 100 onto the flange connector 196 via the flange 145.

[0074] In this embodiment, the flange joint 196 is generally welded to the vacuum chamber. The flange joint 196 has a KF flange interface, the flange 145 is a KF flange 145 that matches the KF flange interface, and the clamp 194 is a KF clamp 194. Its model can be determined according to the number of introduced optical fibers 200.

[0075] The installation method using clamp 194 and internal sealing ring 195 facilitates the installation of the vacuum fiber optic introduction device 100 and makes subsequent maintenance easier.

[0076] In summary, the working principle and beneficial effects of the vacuum optical fiber introduction device 100 and vacuum equipment provided in this embodiment of the invention include:

[0077] In this embodiment, the first mounting body 110 is provided with at least one first through hole 111 for inserting an optical fiber 200, and the second mounting body 150 is provided with a second through hole 151 for inserting an optical fiber 200. The first mounting body 110 is detachably mounted on the second mounting body 150, with the first through hole 111 corresponding to the second through hole 151. A light-transmitting element 191 is correspondingly disposed between the first through hole 111 or the second through hole 151, or between the first mounting body 110 and the second mounting body 150, so that the first through hole 111 and the second through hole 151 are correspondingly sealed, and the optical fiber 200 inserted into the first through hole 111 and the optical fiber 200 inserted into the second through hole 151 can communicate with each other through the light-transmitting element 191. Thus, the light-transmitting element 191 can achieve both vacuum-sealed isolation and communication between optical fibers 200, thereby reducing costs and resulting in less optical signal attenuation compared to reflection or through-beam transmission.

[0078] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A vacuum optical fiber introduction device for vacuum connection between optical fibers (200), characterized in that, The vacuum optical fiber lead-in device comprises a first mounting body (110), a second mounting body (150) and a light-transmitting piece (191), the first mounting body (110) is provided with at least one first threading hole (111) for inserting the optical fiber (200), the second mounting body (150) is provided with a second threading hole (151) for inserting the optical fiber (200); The first mounting body (110) is detachably arranged on the second mounting body (150), and the first threading hole (111) corresponds to the second threading hole (151); The light-transmitting piece (191) is arranged correspondingly on the first threading hole (111); or, The light-transmitting piece (191) is arranged correspondingly on the second threading hole (151); or, The light-transmitting piece (191) is arranged correspondingly between the first mounting body (110) and the second mounting body (150); The light-transmitting piece (191) can seal the first threading hole (111) and the second threading hole (151) correspondingly, and the optical fiber (200) inserted into the first threading hole (111) and the optical fiber (200) inserted into the second threading hole (151) can communicate with each other through the light-transmitting piece (191); The first mounting body (110) comprises an upper cover plate (115), a base (117) and a first guide sleeve (119); The first guide sleeve (119) comprises a first section (121) and a second section (123) connected with each other, the diameter of the second section (123) is larger than that of the first section (121), and the first threading hole (111) penetrates through the first section (121) and the second section (123); The upper cover plate (115) is provided with a first through hole (125) matching the diameter of the first section (121), and the side of the upper cover plate (115) close to the base (117) is provided with a first slot hole (127) matching the diameter of the second section (123), and the first through hole (125) and the first slot hole (127) are communicated; The first section (121) is assembled in the first through hole (125), the second section (123) is assembled in the first slot hole (127), and the end of the second section (123) away from the first section (121) abuts against the base (117), and the end of the second section (123) close to the first section (121) abuts against the bottom wall of the first slot hole (127).

2. The vacuum fiber optic launch, according to claim 1, wherein, The vacuum optical fiber lead-in device further comprises a first sealing ring (192) and a second sealing ring (193), the first sealing ring (192) and the second sealing ring (193) are arranged on opposite sides of the light-transmitting piece (191) respectively, the first sealing ring (192) abuts against the light-transmitting piece (191) and the first mounting body (110), and the second sealing ring (193) abuts against the light-transmitting piece (191) and the second mounting body (150).

3. The vacuum optical fiber termination of claim 2, wherein, The first mounting body (110) is provided with a limiting groove (113) on one side close to the second mounting body (150), the limiting groove (113) corresponds to the first threading hole (111) one by one, the first sealing ring (192) and the light-transmitting piece (191) are installed in the limiting groove (113), and the first sealing ring (192) abuts against the bottom wall of the limiting groove (113) and the light-transmitting piece (191).

4. The vacuum optical fiber lead-in device according to claim 2 or 3, characterized in that, The upper cover plate (115) and the first guide sleeve (119) are detachably connected.

5. The vacuum optical fiber termination of claim 1, wherein, The base (117) is provided with a second through hole (129) corresponding to the first threading hole (111), and the optical fiber (200) can extend to the second through hole (129) through the first threading hole (111).

6. The vacuum optical fiber termination of claim 4, wherein, The first mounting body (110) further comprises a third sealing ring (131); The third sealing ring (131) is arranged between the first guide sleeve (119) and the base (117) to seal the first guide sleeve (119) and the base (117).

7. The vacuum optical fiber termination of claim 4, wherein, The second mounting body (150) comprises a lower cover plate (153) and a second guide sleeve (155); The second guide sleeve (155) comprises a third segment (157) and a fourth segment (159) connected to each other, and the diameter of the fourth segment (159) is greater than that of the third segment (157), and the second threading hole penetrates through the second guide sleeve (155); The lower cover plate (153) is detachably connected with the base (117); The lower cover plate (153) is provided with a third through hole (161), and one end of the lower cover plate (153) close to the base (117) is provided with a second slot hole (163) matched with the fourth segment (159), the second slot hole (163) is in communication with the third through hole (161); The third segment (157) is assembled in the third through hole (161), the fourth segment (159) is assembled in the second slot hole (163), and the second sealing ring (193) abuts against the end of the fourth segment (159) away from the third segment (157) and the light-transmitting piece (191), and the end of the fourth segment (159) close to the third segment (157) abuts against the bottom wall of the second slot hole (163).

8. The vacuum optical fiber termination of claim 1, wherein, The first mounting body (110) further comprises a first fastening screw (137), the first segment (121) is provided with a first opening (138) in the height direction of the first segment (121), the side wall of the upper cover plate (115) is provided with a first threaded hole (139) in communication with the first through hole (125) in the radial direction, the first fastening screw (137) is assembled in the first threaded hole (139), and rotating the first fastening screw (137) can deform the first segment (121) along the first opening (138), so that the optical fiber (200) threaded in the first threading hole (111) and the first guide sleeve (119) can be fixed.

9. The vacuum optical fiber termination of claim 7, wherein, The second mounting body (150) further comprises a second fastening screw (167), a second opening (165) is arranged on the third section (157) in the height direction of the third section (157), a side wall of the lower cover plate (153) is arranged with a second threaded hole (169) in communication with the third through hole (161), the second fastening screw (167) is assembled in the second threaded hole (169), and rotation of the second fastening screw (167) can deform the third section (157) along the second opening (165), so that the optical fiber (200) passing through the second through hole (151) can be fixed with the second guide sleeve (155).

10. The vacuum optical fiber termination apparatus of claim 7, wherein, The first guide sleeve (119) and / or the second guide sleeve (155) and / or the lower cover plate (153) are arranged with an elongated slot (143) for air exhaust of the vacuum optical fiber introduction device.

11. The vacuum optical fiber termination of claim 1, wherein, The vacuum optical fiber introduction device further comprises a clamp (194), an inner sealing ring (195) and a flange joint (196), the first mounting body (110) or the second mounting body (150) is arranged with a flange plate (145) matched with the clamp (194), and the inner sealing ring (195) is arranged on the flange plate (145); The flange joint (196) is used for mounting on a vacuum device; The clamp (194) can mount the vacuum optical fiber introduction device on the flange joint (196) through the flange plate (145).

12. A vacuum apparatus, characterized by The vacuum optical fiber introduction device comprises the vacuum optical fiber introduction device according to any one of claims 1-11. The vacuum optical fiber introduction device comprises the vacuum optical fiber introduction device according to any one of claims 1-11.

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