Flexible functional film vacuum heat treatment device

Abstract

The application discloses a kind of flexible functional film vacuum heat treatment device, including heating mechanism, still including fixed mechanism, the fixed mechanism includes first fixed part and second fixed part, axial cavity is provided in the first fixed part, the axial cavity one end is provided with opening, the second fixed part is tubular structure, the second fixed part can enter axial cavity from opening, and the second fixed part at least has partial area and is contained in the axial cavity.Heated flexible functional film roll is along the second fixed part outer wall circumferential winding, and the first fixed part and the second fixed part are vacuum or controllable atmosphere, and the space required for vacuum or forming atmosphere (such as inert gas, nitrogen or oxygen etc.) is very small, i.e. only the gap part of the first fixed part and the second fixed part, greatly reduce the difficulty that the space volume is large in traditional vacuum heat treatment and not easy to realize high vacuum and the precision control of vacuum and atmosphere, improve the heat treatment efficiency and precision under vacuum or atmosphere state.

Description

Technical Field

[0001] This invention relates to heat treatment apparatus, and more specifically to a flexible functional membrane vacuum heat treatment apparatus. Background Technology

[0002] Flexible functional film materials possess significant advantages such as flexibility and wearability. They exhibit excellent mechanical and chemical stability, as well as superior physical properties including photothermal and electronic properties, leading to their increasingly widespread application in displays, packaging, photovoltaics, automotive construction, and new energy batteries, resulting in a rapidly growing market. Flexible functional films are generally prepared by attaching functional materials to a flexible substrate through methods such as blending, coating, or vacuum deposition. Recently, advancements in roll-to-roll vacuum deposition technologies such as magnetron sputtering have led to significant development in various high-performance flexible functional films, such as flexible transparent conductive films.

[0003] In the deposition or coating process of flexible functional films, heat treatment of the flexible substrate is required during the process to obtain functional films with good crystallinity. However, it is very difficult to implement substrate heating under vacuum conditions in general flexible functional film preparation equipment, especially roll-to-roll deposition equipment. In particular, most flexible polymer substrates, such as PET, have reduced heat resistance under stretching and are difficult to withstand prolonged heating under vacuum conditions. Therefore, heat treatment equipment for flexible films that can achieve deposition under vacuum or atmospheric conditions is extremely rare. In addition, the complex structure and high cost of such equipment greatly limit its application.

[0004] The solution to the above problems usually involves flexible coating at room temperature or lower, followed by removal of the resulting base film and subsequent heat treatment using a rapid heating furnace, such as for transparent conductive films like ITO, to improve the film's electrical properties. This subsequent heat treatment typically still needs to be carried out in a vacuum; for example, a roll-to-roll heating method is generally used, where the film is heated and transported in a planar manner within a vacuum. Based on the same roll-to-roll principle, this vacuum heating method is complex in structure, expensive, and unsuitable for the heat treatment of large-area, multi-variety, small-batch coated samples. Summary of the Invention

[0005] To overcome the above-mentioned shortcomings, the present invention aims to provide a flexible functional membrane vacuum heat treatment device. This heat treatment device has a simple structure, small size, fast heating rate, uniform temperature distribution, large processing area, and great flexibility. It is a novel flexible functional membrane vacuum heat treatment equipment suitable for multi-variety small-batch production and pilot-scale product development.

[0006] To achieve the above objectives, the technical solution adopted by this invention is: a flexible functional membrane vacuum heat treatment device, including a heating mechanism and a fixing mechanism. The fixing mechanism includes a first fixing member and a second fixing member. The first fixing member has an axial cavity with an opening at one end. The second fixing member is a tubular structure that can enter the axial cavity from the opening, and at least a portion of the second fixing member is accommodated within the axial cavity. The heated flexible functional membrane is wound circumferentially along the outer wall of the second fixing member. The space between the first and second fixing members is a vacuum or a controllable atmosphere. The space required for the vacuum or atmosphere (such as inert gas, nitrogen, or oxygen) is extremely small, only the gap between the first and second fixing members. This greatly reduces the difficulties of achieving high vacuum and precise control of vacuum and atmosphere in traditional vacuum heat treatment due to the large space volume, thus improving the efficiency and accuracy of heat treatment under vacuum or atmosphere conditions.

[0007] This invention utilizes the flexibility of flexible functional films and the principle that the circumference of the tubular structure (second fixing member) is greater than its diameter to provide a high-efficiency, large-area flexible functional film heat treatment device. It has significant features such as small size, high efficiency, uniform heating, and precise temperature and atmosphere control. It can be widely used in display, packaging, photovoltaic, automotive, construction, new energy battery and other fields for the large-scale development or small-batch production of flexible functional films.

[0008] Furthermore, it also includes a translation mechanism, one end of which is connected to the second fixing member. The translation mechanism can drive the second fixing member into or away from the axial cavity. When the translation mechanism drives the second fixing member into the second cavity, the heating mechanism heats the flexible functional membrane fixed on the outer surface of the second fixing member. When the translation mechanism drives the second fixing member out of the second cavity, the flexible functional membrane fixed on the outer surface of the second fixing member is replaced, similar to the "load-lock" function in a vacuum system, which greatly improves sample processing efficiency.

[0009] Furthermore, it also includes a rotating mechanism connected to the second fixed member, which drives the second fixed member to rotate. The rotating mechanism achieves a uniform and efficient heating effect.

[0010] Furthermore, the first fixing member is provided with a ventilation hole and a vacuum gauge, the ventilation hole is connected to the axial cavity, and the vacuum gauge can test the vacuum level in the axial cavity.

[0011] Furthermore, the heating mechanism includes a refractory box, which comprises an upper box and a lower box, hinged together. The upper box can rotate around the hinge point. The refractory box can be opened or closed by pulling the upper box upward.

[0012] Furthermore, the lower surface of the upper housing is provided with a first groove, and the upper surface of the lower housing is provided with a second groove. The first groove and the second groove are matched in size and position, and the first groove and the second groove are mirror-symmetrical in shape. The first groove and the second groove form a housing cavity. The shape of the housing cavity is matched with the fixing mechanism, and the fixing mechanism is disposed in the housing cavity.

[0013] Furthermore, the heating mechanism includes a heating component disposed on the sidewall of the first groove and / or the second groove. The heating component heats the fixing mechanism disposed within the first and second grooves, thereby heating the flexible functional membrane.

[0014] Furthermore, the heating assembly includes a plurality of strip-shaped heat sources, which are arranged in parallel on the sidewalls of the first groove and / or the second groove.

[0015] Furthermore, the strip-shaped heat sources are arranged in a ring array within the first and second grooves, centered on the fixing mechanism. The strip-shaped heat sources can utilize fast and efficient infrared lamps for rapid heat treatment in a short time, or resistance heating can be used, or both can be employed simultaneously to achieve the optimal heat treatment effect.

[0016] Furthermore, the materials of the first fastener and the second fastener are selected from any one of transparent materials, ceramic materials, or metallic materials, respectively.

[0017] The beneficial effects of this invention are:

[0018] 1) The space between the first and second fixing parts is a vacuum or a controllable atmosphere. The space required for the vacuum or atmosphere (such as inert gas, nitrogen or oxygen) is extremely small, that is, only the gap between the first and second fixing parts. This greatly reduces the difficulty of achieving high vacuum and precise control of vacuum and atmosphere in traditional vacuum heat treatment due to the large space volume. It improves the efficiency and accuracy of heat treatment under vacuum or atmosphere conditions.

[0019] 2) This invention utilizes the flexibility of the flexible functional film and the principle that the circumference of the second fixing part is greater than the diameter to provide a high-efficiency, large-area flexible functional film heat treatment device. It has significant features such as small size, high efficiency, uniform heating, and precise temperature and atmosphere control. It can be widely used in display, packaging, photovoltaic, automotive, construction, new energy battery and other fields for large-scale research and development or multi-variety small-batch production of flexible functional films. Attached Figure Description

[0020] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a cross-sectional view of a vacuum heat treatment apparatus according to an embodiment of the present invention;

[0023] Figure 2 This is a side view of a vacuum heat treatment apparatus according to an embodiment of the present invention;

[0024] Figure 3 This is a perspective view of a fixing device according to an embodiment of the present invention;

[0025] Figure 4 This is a side view of a fire-resistant box according to an embodiment of the present invention;

[0026] Figure 5 The image shows the spectroscopic transmittance curve of the vanadium dioxide thin film after heat treatment.

[0027] In the diagram: 1. Workbench; 2. Support frame; 3. Fixing mechanism; 31. First fixing component; 311. Opening; 32. Second fixing component; 33. Axial cavity; 34. Ventilation hole; 35. Vacuum gauge; 4. Heating mechanism; 41. Refractory box; 411. Upper box; 4111. First groove; 412. Lower box; 4121. Second groove; 413. Hinge point; 42. Heating assembly; 421. Strip heat source; 5. Flexible functional membrane. Detailed Implementation

[0028] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0029] Furthermore, the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this article, unless otherwise specified, generally indicates that the preceding and following related objects have an "or" relationship.

[0030] See appendix Figure 1-4As shown in this embodiment, a flexible functional film vacuum heat treatment device is provided. The flexible functional film refers to a flexible functional film material with bendable properties, such as ultra-thin glass, polyimide film, polyester film, etc. The vacuum heat treatment device includes a heating mechanism 4 and a fixing mechanism 3. The fixing mechanism 3 fixes the flexible functional film, and the heating mechanism 4 heats the flexible functional film 5 fixed on the fixing mechanism 3. It also includes a support frame 2 and a worktable 1. One end of the fixing mechanism 3 is connected to the support frame 2, and the other end of the support frame 2 is fixedly connected to the worktable 1. The support frame 2 fixes and supports the fixing mechanism 3.

[0031] In some embodiments, the fixing mechanism 3 includes a first fixing member 31 and a second fixing member 32. The first fixing member 31 is a tubular structure, and one end of the first fixing member 31 is connected to the support frame 2. An axial cavity 33 is provided inside the first fixing member 31, and an opening 311 is provided at the end of the axial cavity 33 away from the support frame 2. The second fixing member 32 can enter the axial cavity 33 through the opening 311, so that a portion of the area of ​​the second fixing member 32 is accommodated within the axial cavity 33. The outer surface of the second fixing member 32 accommodated in the axial cavity 33 is used to fix the flexible functional membrane 5. The flexible functional membrane 5 is rolled and adhered to the surface of the second fixing member 32 (the flexible functional membrane and the second fixing member abut against each other; a gap is left between the flexible functional membrane 5 and the second fixing member 32 in the figure, only for clarity). Then, the flexible functional membrane 5 is heated by the heating mechanism 4. In this embodiment, the second fixing member 32 is a tubular structure, and the flexible functional membrane 5 is fixed to the outside of the second fixing member 32 by utilizing its flexible characteristics. By utilizing the fact that the perimeter of the columnar structure is much larger than its diameter, this structure significantly reduces the size of the equipment and improves the heat treatment effect compared to the traditional planar heating method of placing flexible functional membranes. The second fixing member 32 can also be a columnar structure, as long as it can be fixed to the outer surface of the second fixing member 32 by utilizing the flexibility of the flexible functional membrane.

[0032] In some embodiments, the first fixing member 31 and the second fixing member 32 may be made of transparent materials (e.g., quartz glass), ceramic materials (transparent or translucent ceramic tubes), or metal materials, depending on the light transmittance, heat transfer performance, and mechanical strength required for heating the sample. The specific materials used need to be determined according to the actual application.

[0033] In some embodiments, a translation mechanism is further included. One end of the translation mechanism is connected to the second fixing member 32. The translation mechanism can drive the second fixing member 32 into the axial cavity 33 or drive it away from the axial cavity 33. When the translation mechanism drives the second fixing member 32 into the second cavity, the heating mechanism 4 heats the flexible functional membrane 5 fixed to the outer surface of the second fixing member 32. When the translation mechanism drives the second fixing member 32 out of the second cavity, the flexible functional membrane 5 fixed to the outer surface of the second fixing member 32 is replaced, similar to the "load-lock" function in a vacuum system, greatly improving sample processing efficiency. The translation mechanism can be a driving cylinder or other mechanisms capable of driving the second fixing member 32 to translate; this application is not limited to any particular mechanism.

[0034] In some embodiments, a rotating mechanism is also included, which is connected to the second fixed member 32. The rotating mechanism can drive the second fixed member 32 to rotate. By setting the rotating mechanism, a uniform and efficient heating effect can be obtained. The rotating mechanism can be a motor or other mechanism that can drive the second fixed member to rotate; this application is not limited to any particular type.

[0035] In some embodiments, the first fixing member 31 is provided with a ventilation hole 34 and a vacuum gauge 35. The ventilation hole 34 is connected to the axial cavity 33. Gas is extracted from the axial cavity 33 through the ventilation hole 34, so that the axial cavity 33 is in a vacuum state. The vacuum gauge 35 is used to test the vacuum degree in the axial cavity 33. Other gases, such as inert gases (nitrogen, argon) or oxygen, can also be introduced into the axial cavity 33 through the ventilation hole 34. Whether the axial cavity 33 is in a vacuum state or filled with other gases depends on the actual situation.

[0036] During use, the second fixing member 32 is moved into the axial cavity 33 by a translation mechanism, and then air is evacuated through the vent 34, so that the axial cavity 33 is in a vacuum state. That is, the flexible functional membrane 5 located on the outer surface of the second fixing member 32 is also in a vacuum state. The flexible functional membrane is heated by a heating device in the vacuum state. In this structure, the space required for vacuum or atmosphere formation (such as inert gas, nitrogen or oxygen) is extremely small, that is, only the gap between the first fixing member 31 and the second fixing member 32. This overcomes the difficulty of achieving high vacuum and precise control of vacuum and atmosphere in traditional vacuum heat treatment due to the large space volume, and improves the efficiency and accuracy of heat treatment in vacuum or atmosphere state.

[0037] In some embodiments, the heating mechanism 4 includes a refractory box 41 and a heating assembly 42. The refractory box 41 is disposed above the workbench 1, and the workbench 1 supports and fixes the refractory box 41. The refractory box 41 includes an upper box 411 and a lower box 412, which are hinged together. The upper box 411 can rotate about the hinge point 413.

[0038] In some embodiments, the lower surface of the upper housing 411 is provided with a first groove 4111, and the upper surface of the lower housing 412 is provided with a second groove 4121. The first groove 4111 and the second groove 4121 are matched in size and position, forming a housing cavity, and the fixing mechanism 3 is disposed within the housing cavity. A heating component 42 is provided on the inner wall of the first groove 4111 and the second groove 4121, and the flexible functional membrane 5 fixed on the fixing mechanism 3 is heated by the heating component 42.

[0039] In some embodiments, the heating assembly 42 includes a plurality of strip-shaped heat sources 421, which are equidistantly and parallelly arranged on the sidewalls of the first groove 4111 or the second groove 4121, and the strip-shaped heat sources 421 and the first fixing member 31 are arranged in parallel. The strip-shaped heat sources 421 can use fast and efficient infrared lamps to achieve rapid heat treatment in a short time, or they can use resistance heating, or both can be used simultaneously to achieve the best heat treatment effect. There are no limitations on the heat source as long as the heating requirements of the present invention are met.

[0040] Example 1

[0041] As attached Figure 1 The vacuum heat treatment apparatus for flexible functional films shown has two fixing components, the first fixing member 31 and the second fixing member 32, both made of quartz glass. The second fixing member 32 has a diameter of 160 mm, the first fixing member 31 has a diameter of 250 mm, and the gap between the first fixing member 31 and the second fixing member 32 is 45 mm. The heating mechanism 4 is 600 mm long, and 14 infrared heating lamps (strip heat sources 421) are installed on the refractory box 41, forming an effective heat treatment area of ​​500 mm x 500 mm for the flexible film. This size meets the needs of pilot-scale experiments in most scientific research projects and is also suitable for the production of some multi-variety, small-batch flexible functional films.

[0042] This embodiment is merely an example to illustrate the heat treatment apparatus of the present invention. The size of the apparatus and the area of ​​the heated sample can be further enlarged or reduced as needed.

[0043] A 100 nm thick amorphous vanadium dioxide film was prepared on a 550 x 10000 mm polyimide film using roll-to-roll magnetron sputtering. The main process parameters were: reactive magnetron sputtering using a vanadium metal target and a DC power supply, with a target sputtering power of 10 W / cm². 2 Place the PI film roll (polyimide film) into the vacuum chamber and evacuate to a vacuum level of 1x10⁻¹. -3 A mixture of argon and oxygen gas was introduced at Pa, with the oxygen-argon ratio controlled at 2.0–2.5 and the total pressure at 1.2 Pa. Reactive magnetron sputtering was performed at room temperature to obtain amorphous vanadium oxide thin films.

[0044] A 550x550mm amorphous vanadium oxide film was cut, wound around the outside of the second fixing member 32 of the equipment, and fixed. It was then moved into the first fixing member 31 and secured. The refractory chamber 41 was closed, and a vacuum of 1 Pa was pumped using a molecular pump. The temperature was then rapidly increased to 380 degrees Celsius and maintained for 1-15 minutes for rapid heat treatment. The rotating mechanism rotated the second fixing member 32 at a speed of 10 revolutions per minute. After treatment, the temperature was allowed to drop below 100 degrees Celsius. The refractory chamber 41 was then opened, the vacuum was removed, and the sample was taken out for analysis and testing.

[0045] Figure 5 The image shows the spectroscopic transmittance curves of the heat-treated vanadium dioxide film. The solid line represents the low-temperature condition (25 degrees Celsius), and the dashed line represents the test results at the high-temperature condition (80 degrees Celsius). Different colors indicate two different samples, No. 10 and No. 11 (samples taken from different test locations on the vanadium dioxide film). Figure 5 It is evident that after heat treatment, the amorphous vanadium dioxide film has transformed into a crystalline state and exhibits typical temperature-controlled optical phase transition characteristics.

[0046] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0048] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable those skilled in the art to understand the content of the present invention and implement it. They should not be used to limit the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A flexible functional membrane vacuum heat treatment device, comprising a heating mechanism (4), characterized in that, It also includes a fixing mechanism (3), which includes a first fixing member (31) and a second fixing member (32). The first fixing member (31) has an axial cavity (33) and an opening (311) at one end of the axial cavity (33). The second fixing member (32) is a tubular structure and can enter the axial cavity (33) from the opening (311). At least a portion of the second fixing member (32) is accommodated in the axial cavity (33). It also includes a translation mechanism, one end of which is connected to the second fixing member (32), and the translation mechanism can drive the second fixing member (32) into or away from the axial cavity (33). It also includes a rotating mechanism, which is connected to the second fixing member (32), and the rotating mechanism can drive the second fixing member (32) to rotate. The diameter of the second fastener (32) is 160mm, the diameter of the first fastener (31) is 250mm, and the gap width between the first fastener (31) and the second fastener (32) is 45mm. The first fixing member (31) is provided with a ventilation hole (34) and a vacuum gauge (35). The ventilation hole (34) is connected to the axial cavity (33), and the vacuum gauge (35) can test the vacuum level in the axial cavity (33). The heating mechanism (4) includes a refractory box (41), which includes an upper box (411) and a lower box (412). The upper box (411) and the lower box (412) are hinged together, and the upper box (411) can rotate around the hinge point (413). The lower surface of the upper box (411) is provided with a first groove (4111), and the upper surface of the lower box (412) is provided with a second groove (4121). The size and position of the first groove (4111) and the second groove (4121) are matched. The first groove (4111) and the second groove (4121) are mirror symmetrical in shape. The first groove (4111) and the second groove (4121) form a box cavity. The fixing mechanism (3) is disposed in the box cavity. The heating mechanism (4) includes a heating component (42), which is disposed on the sidewall of the first groove (4111) and / or the second groove (4121); The heating assembly (42) includes a plurality of strip heat sources (421), which are arranged in parallel on the sidewalls of the first groove (4111) and / or the second groove (4121); The strip-shaped heat source (421) is arranged in a ring array in the first groove (4111) and the second groove (4121) with the fixing mechanism (3) as the center.

2. The flexible functional membrane vacuum heat treatment device according to claim 1, characterized in that, The materials of the first fastener (31) and the second fastener (32) are selected from any one of transparent materials, ceramic materials or metal materials.

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