A low-agglomerated spherical aluminum nitride powder and a method for preparing the same

By employing a three-stage heat treatment and cross-linking structure design for aluminum nitride powder, the problem of powder agglomeration was solved, resulting in high-purity and high-conversion-rate aluminum nitride powder suitable for high-integration semiconductor substrates and electronic device packaging.

CN117285017BActive Publication Date: 2026-02-17FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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Patent Information

Application Number
CN202311276748.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-10-06
Publication Date
2026-02-17
Estimated Expiration
2043-10-06

AI Technical Summary

Technical Problem

Existing methods for preparing aluminum nitride powder result in low powder purity and easy agglomeration, which affects its application in highly integrated semiconductor substrates and electronic device packaging.

Method used

Aluminum nitrate nonahydrate, film-forming solution, and glucose monohydrate are mixed and cross-linked, and then subjected to a three-stage heating treatment of argon combustion and multiple ammonia calcinations to form a dense spiral network. This promotes the uniform distribution of aluminum nitrate and glucose inside and on the surface of the network, increasing the dispersion and reaction area.

Benefits of technology

Aluminum nitride powder with fine particle size, high conversion rate, and low agglomeration was prepared, which improved the uniformity and dispersibility of the material and enhanced its performance in electronic devices.

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Abstract

A kind of low agglomeration aluminum nitride powder preparation method, comprising the following steps: S1: 50-60 parts of aluminum nitrate nine water, 60-80 parts of film-forming solution and 20-30 parts of glucose monohydrate are mixed uniformly, after stirring 1-2h, it is poured into polytetrafluoroethylene dish at room temperature 25 ℃ and is stationary 4-6h, and crosslinked film is obtained;S2: the crosslinked film obtained in step S1 is burned at 300-400 ℃ for 30-40 min in argon environment, calcined at 800-900 ℃ for 1-2h in ammonia environment, then at 900-1000 ℃, heat preservation 1-2h, finally at 1200-1400 ℃, calcined 1-2h, and aluminum nitride powder is obtained.The low agglomeration spherical aluminum nitride powder machine preparation method of the application, the particle size of the prepared aluminum nitride powder is fine, the agglomeration rate is low, the conversion rate is high and the specific surface area is large.
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