A hot stage horizontal detection device and wafer processing equipment

Abstract

The present disclosure provides a hot plate level detection device and wafer processing equipment. The device comprises a detection assembly, which comprises a detection signal transmitter and a receiver arranged on opposite side walls of a reaction chamber in a horizontal direction; a detection signal transmission path between the detection signal transmitter and the receiver passes through a position in the lifting stroke of the hot plate; a controller is coupled to at least the detection signal receiver, and is configured to determine the level of the bearing surface according to the difference between the first signal value of the output signal obtained during the lifting / descending process of the hot plate and the second signal value of the reference signal at the same height position; wherein the reference signal is the output signal output by the detection signal receiver during the lifting / descending process of the hot plate with a horizontal bearing surface. The hot plate level detection device has a simple structure, is easy to install, does not affect the structure of the reaction chamber, can meet the demand of real-time detection of the level of the hot plate, avoids wafer scrap, and improves the processing yield.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor processing equipment, and particularly relates to a heat table level detection device and wafer processing equipment. BACKGROUND

[0002] Chemical vapor deposition (CVD) refers to a method for synthesizing a coating or nanomaterial on a substrate surface by reacting chemical gas or vapor, and is the most widely used technology in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials, most metal materials and metal alloy materials.

[0003] In some CVD processes, such as plasma enhanced chemical vapor deposition (PECVD), a reaction chamber for gas and wafer reaction is provided in the corresponding semiconductor processing equipment. The heat table in the reaction chamber is provided with a heating device, which can heat the wafer to a specified temperature, so it is called a heat table (HEATER). The level of the wafer carrying surface of the heat table determines the level of the wafer processing part, so the level of the heat table has a particularly large impact on the process. When the level of the heat table changes, the level of the wafer surface on the heat table will change, which will cause the uniformity of the film deposited on the wafer surface to change, which is not allowed in the process (PROCESS) and may cause the wafer to be scrapped.

[0004] The factors causing the level of the heat table to change may be, for example, due to the loosening of the mounting structure. Specifically, the heat table is usually fixed in the lifting mechanism by a fixing member such as a screw, and the screw may loosen during the heat table movement process. Moreover, since the temperature of the heat table changes, sometimes high and sometimes low, the thermal expansion and contraction effect caused by the switching of high and low temperatures also easily causes the screw to loosen or deform. SUMMARY

[0005] In view of the above-mentioned disadvantages of the prior art, the purpose of the present disclosure is to provide a heat table level detection device and wafer processing equipment to solve the problems in the related art.

[0006] According to a first aspect of the present disclosure, there is provided a hot plate level detection device, which is applied to wafer processing equipment. The wafer processing equipment includes a reaction chamber and a hot plate arranged in a liftable manner in the reaction chamber; the top surface of the hot plate is a supporting surface for supporting wafers; the top of the reaction chamber is provided with an air inlet for introducing reaction gas to the supporting surface; the hot plate level detection device includes: a detection component, including: a detection signal transmitter and a detection signal receiver, which are arranged on opposite side walls of the reaction chamber in a horizontal direction; the detection signal transmitter is used to send a detection signal; the detection signal receiver is used to receive the detection signal and output a corresponding output A signal, wherein the signal value of the output signal corresponds to the signal strength of the received detection signal; wherein the detection signal transmission path between the detection signal transmitter and the detection signal receiver passes through a position in the lifting stroke of the heating stage; a controller, coupled to at least the detection signal receiver, is used to determine the horizontality of the carrying surface based on a comparison between a first signal value of the output signal obtained during the lifting / lowering process of the heating stage and a second signal value of a reference signal at the same height position; wherein the reference signal is the output signal output by the detection signal receiver during the lifting / lowering process corresponding to the heating stage with a horizontal carrying surface.

[0007] In an embodiment of the first aspect, the determining the horizontal condition of the carrying surface based on the comparison of the difference between the first signal value of the output signal and the second signal value of the reference signal at the same height position during the raising / lowering process of the hot stage includes one of the following: 1) determining the horizontal condition of the carrying surface based on the amplitude difference comparison of the first signal value and the second signal value at at least one same height position; 2) determining the horizontal condition of the carrying surface based on the difference comparison of the amplitude change rate of the first signal value and the second signal value at at least one same height position; 3) determining the horizontal condition of the carrying surface based on the difference comparison of the amplitude and amplitude change rate of the first signal value and the second signal value at multiple same height positions.

[0008] In an embodiment of the first aspect, the horizontality of the supporting surface is determined based on a comparison of the difference in amplitude and amplitude change rate between the first signal value and the second signal value at multiple positions at the same height, including: judging whether the amplitude difference between the first signal value and the second signal value at at least one of the positions at the same height reaches a preset amplitude difference threshold, and whether the slope difference of the tangent on the curve that changes with the height of the hot stage reaches a preset change rate difference threshold; if the amplitude difference at any of the positions at the same height reaches the preset amplitude difference threshold or the slope difference reaches the preset change rate difference threshold, determining that the supporting surface does not meet the horizontality requirement; if the amplitude difference at each of the positions at the same height does not reach the preset amplitude difference threshold and the slope difference does not reach the preset change rate difference threshold, determining that the supporting surface meets the horizontality requirement.

[0009] In an embodiment of the first aspect, determining the level of the bearing surface according to the comparison of the amplitude difference of the first signal value and the second signal value at the at least one same height position comprises: judging whether the amplitude difference of the first signal value and the second signal value at the at least one same height position reaches a preset amplitude difference threshold value; and determining that the bearing surface does not meet the level requirement if the amplitude difference at any one of the same height positions reaches the preset amplitude difference threshold value, and determining that the bearing surface meets the level requirement if the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold value.

[0010] In an embodiment of the first aspect, determining the level of the bearing surface according to the comparison of the amplitude difference of the first signal value and the second signal value at the at least one same height position comprises: judging whether the amplitude difference of the first signal value and the second signal value at the at least one same height position reaches a preset amplitude difference threshold value; and determining that the bearing surface does not meet the level requirement if the amplitude difference at any one of the same height positions reaches the preset amplitude difference threshold value, and determining that the bearing surface meets the level requirement if the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold value.

[0011] In an embodiment of the first aspect, determining the level of the bearing surface according to the comparison of the amplitude difference of the first signal value and the second signal value at the at least one same height position comprises: judging whether the amplitude difference of the first signal value and the second signal value at the at least one same height position reaches a preset amplitude difference threshold value; and determining that the bearing surface does not meet the level requirement if the amplitude difference at any one of the same height positions reaches the preset amplitude difference threshold value, and determining that the bearing surface meets the level requirement if the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold value.

[0012] In an embodiment of the first aspect, determining the level of the bearing surface according to the comparison of the amplitude difference of the first signal value and the second signal value at the at least one same height position comprises: judging whether the amplitude difference of the first signal value and the second signal value at the at least one same height position reaches a preset amplitude difference threshold value; and determining that the bearing surface does not meet the level requirement if the amplitude difference at any one of the same height positions reaches the preset amplitude difference threshold value, and determining that the bearing surface meets the level requirement if the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold value.

[0013] In an embodiment of the first aspect, the determination of the level of the carrying surface according to the comparison of the difference of the amplitude variation rates of the first signal values and the second signal values at the same height positions comprises: judging whether the slope difference between the first signal values and the second signal values at the same height positions reaches a preset variation rate difference threshold; if the slope difference at the preset number of the same height positions reaches the preset variation rate difference threshold, it is determined that the carrying surface does not meet the level requirement; if the slope difference at less than the preset number of the same height positions does not reach the preset variation rate difference threshold, it is determined that the carrying surface meets the level requirement.

[0014] In an embodiment of the first aspect, the controller is coupled to a height acquisition component configured to determine the height position information of the hot plate, and the height acquisition component comprises at least one of: an encoder of a driving motor configured to drive the hot plate to move up and down; a distance sensor configured to detect the height of the hot plate; and / or the detection signal of the detection assembly is one of: an optical signal; an electromagnetic wave signal; and an ultrasonic wave signal.

[0015] The second aspect of the present disclosure provides a wafer processing equipment, comprising: a reaction chamber, and a hot plate arranged in the reaction chamber and capable of moving up and down, wherein the top surface of the hot plate is a carrying surface for carrying a wafer; the top of the reaction chamber is provided with a gas inlet for introducing a reaction gas to the carrying surface; and the hot plate level detection device according to any one of the first aspect is arranged in the reaction chamber.

[0016] In an embodiment of the second aspect, a gas uniformizing component is arranged in the reaction chamber, above the hot plate and below the gas inlet, and the side edge of the gas uniformizing component is connected to the inner wall of the reaction chamber; and the gas uniformizing component is provided with a plurality of gas flow channels in communication with the gas inlet and the carrying surface.

[0017] As described above, the present disclosure provides a hot plate level detection device and a wafer processing equipment, wherein the device comprises: a detection assembly comprising: a detection signal transmitter and a receiver arranged on opposite side walls of the reaction chamber in a horizontal direction; a detection signal transmission path between the detection signal transmitter and the receiver passing through a position in the lifting stroke of the hot plate; and a controller coupled to at least the detection signal receiver and configured to determine the level of the carrying surface according to the comparison of the difference between the first signal values and the second signal values of the output signals at the same height positions during the lifting and lowering of the hot plate; wherein the reference signal is the output signal output by the detection signal receiver during the lifting and lowering of the hot plate with a horizontal carrying surface. The hot plate level detection device has a simple structure, is easy to install, does not affect the structure of the reaction chamber, can meet the real-time detection of the level of the hot plate, avoid wafer scrap, and effectively improve the processing yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a wafer processing device in one embodiment of the present disclosure is shown.

[0019] Figure 2 A schematic diagram illustrating a state in which a hot stage blocks a detection signal when a carrying surface is horizontal in a wafer processing apparatus according to an embodiment of the present disclosure.

[0020] Figure 3 A schematic diagram illustrating a state in which a hot stage blocks a detection signal when a supporting surface in a wafer processing apparatus according to an embodiment of the present disclosure is tilted.

[0021] Figure 4 A schematic diagram showing a process for determining the level of a bearing surface based on signal amplitude differences in one embodiment of the present disclosure.

[0022] Figure 5 A schematic diagram showing a process for determining the level of a bearing surface based on signal amplitude differences in another embodiment of the present disclosure.

[0023] Figure 6 A schematic diagram showing a flow chart of determining the level of a bearing surface based on a difference in the rate of change of a signal in one embodiment of the present disclosure.

[0024] Figure 7 A schematic diagram showing a process for determining the level of a bearing surface based on a difference in the rate of change of a signal in another embodiment of the present disclosure.

[0025] Figure 8 A schematic diagram showing a flow chart of determining the level of a bearing surface based on the difference in signal amplitude and rate of change in one embodiment of the present disclosure.

[0026] Figure 9 A schematic diagram showing a flow chart of determining the level of a bearing surface based on the difference in signal amplitude and rate of change in another embodiment of the present disclosure.

[0027] Figure 10 A schematic diagram showing the circuit structure of a controller in one embodiment of the present disclosure is shown. DETAILED DESCRIPTION

[0028] The following describes the embodiments of the present disclosure through specific examples. Those skilled in the art can easily understand the other advantages and effects of the present disclosure from the information disclosed in this disclosure. The present disclosure can also be implemented or applied through different specific embodiments. The details of the present disclosure can also be modified or changed according to different viewpoints and application modules without departing from the spirit of the present disclosure. It should be noted that the embodiments and features in the embodiments of the present disclosure can be combined with each other unless there is a conflict.

[0029] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings, so that those skilled in the art to which the present disclosure pertains can easily implement the present disclosure. The present disclosure can be embodied in various ways, and is not limited to the embodiments described herein.

[0030] In the present disclosure, the expressions of "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like mean that the specific features, structures, materials or characteristics represented in connection with the embodiment or example are included in at least one embodiment or example of the present disclosure. Also, the specific features, structures, materials or characteristics represented can be combined in an appropriate manner in any one or a set of embodiments or examples. In addition, the different embodiments or examples represented in the present disclosure and the features of the different embodiments or examples can be combined and combined by those skilled in the art without contradiction.

[0031] In addition, the terms "first", "second" are used only for the purpose of representation, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the present disclosure, the meaning of "a set" is two or more, unless specifically limited.

[0032] In order to clearly explain the present disclosure, devices irrelevant to the description are omitted, and the same reference numerals are assigned to the same or similar constituent elements throughout the specification.

[0033] Throughout the specification, when it is said that a device is "connected" to another device, it includes not only the case of "direct connection", but also the case of "indirect connection" in which other elements are interposed therebetween. In addition, when it is said that a device "includes" a certain constituent element, unless specifically stated to the contrary, other constituent elements are not excluded, but it means that other constituent elements can also be included.

[0034] Although the terms first, second, etc. are used in this document to represent various elements in some examples, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, the first interface and the second interface, etc. are represented. Furthermore, as used in this document, the singular forms "one," "an," and "the" are intended to also include the plural forms, unless there is a contrary indication in the context. It should be further understood that the terms "comprise" and "include" indicate the presence of the described features, steps, operations, elements, modules, projects, types, and / or groups, but do not exclude the presence, occurrence, or addition of one or a group of other features, steps, operations, elements, modules, projects, types, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C." Exceptions to this definition only occur when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0035] The technical terms used herein are intended only to refer to specific embodiments and are not intended to limit the present disclosure. The singular form used herein also includes the plural form unless the statement explicitly indicates otherwise. The term "comprising" as used in this specification is intended to specify specific features, regions, integers, steps, operations, elements, and / or components and does not exclude the presence or addition of other features, regions, integers, steps, operations, elements, and / or components.

[0036] Although not defined differently, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art to which this disclosure belongs. Terms defined in commonly used dictionaries are additionally interpreted as having meanings consistent with relevant technical literature and the current message. Unless otherwise defined, they should not be overly interpreted as ideal or highly formalized meanings.

[0037] In certain CVD processes, such as plasma-enhanced chemical vapor deposition (PECVD), the levelness of the hot platen's wafer support surface determines the levelness of the wafer's processing area. Deterioration in the hot platen's levelness can also affect the wafer's surface levelness, leading to poor uniformity in the deposited film and potentially resulting in wafer rejection.

[0038] In view of this, an embodiment of the present disclosure provides a hot plate level detection device, which can accurately detect the level of the hot plate support surface in the reaction chamber through a simple structure, effectively solving the problems in the related art.

[0039] like Figure 1As shown, a schematic diagram of a wafer processing apparatus is shown.

[0040] The wafer processing apparatus comprises a reaction chamber 101, in which a hot plate 102 is arranged. As an example, the reaction chamber 101 is provided with a gas inlet 111 at the top thereof, through which a reaction gas is introduced into the reaction chamber 101. Figure 1 In the example, the reaction gas is introduced into the reaction chamber 101 from the gas inlet 111 in the direction indicated by the arrow, and reacts with the surface of the wafer 201 carried by the hot plate 102 downward to deposit a metal or non-metal material layer. Optionally, the reaction chamber 101 is provided with a gas uniformizing component 103. The gas uniformizing component 103 is arranged above the hot plate 102 and below the gas inlet 111, and the side edge of the gas uniformizing component 103 is connected to the inner wall of the reaction chamber 101. The gas uniformizing component 103 is arranged with a plurality of gas flow channels 131 in a spaced manner, which are connected to the gas inlet 111 and the wafer carrying surface 121. As an example, the gas uniformizing component 103 can be in the form of a disc / plate, and each gas flow channel 131 can be formed by a through hole in the gas uniformizing component 103, which is connected to the gas inlet 111 and the hot plate 102 at two ends thereof. As an example, the gas uniformizing component 103 can be separately arranged with the reaction chamber 101 and connected thereto, or can be integrally connected to the inner wall of the reaction chamber 101.

[0041] The hot plate 102 is arranged in the reaction chamber 101 in a liftable manner. As an example, the hot plate 102 is connected to a lifting mechanism (not shown) to perform lifting movement. As a further example, the lifting mechanism can be realized by a telescopic or sliding mechanism such as a cylinder, a guide rail, a screw rod, etc. In the example, Figure 1 As an example, the hot plate 102 can be fixedly connected to a seat 104 arranged below the hot plate 102 and outside the reaction chamber 101, and the seat 104 can be connected to a lifting mechanism to perform lifting movement. As an example, the hot plate 102 and the seat 104 are fixedly connected by a lifting column 105, and the reaction chamber 101 is provided with an opening 112 at the bottom thereof to allow the lifting column 105 to pass therethrough. As an example, a bellows 106 is connected between the seat 104 and the hot plate 102, which can keep the space between the opening 112 and the seat 104 airtight, and can expand or contract with the lifting movement of the lifting column 105.

[0042] The top surface of the hot plate 102 is a wafer carrying surface 121. In order to detect the level of the wafer carrying surface 121, the reaction chamber 101 is provided with a hot plate level detection device. It can be understood that the space above the hot plate 102 needs to pass through the reaction gas, and the gas uniformizing component 103 can also be arranged as in the previous example, so it is difficult to arrange a device to detect the level of the wafer carrying surface 121 from the top and bottom directions.

[0043] Thus, the present disclosure provides a hot plate level detection device, which includes a probe signal transmitter 107, a probe signal receiver 108, and a controller 109. The probe signal transmitter 107 and the probe signal receiver 108 are arranged on opposite sides of the reaction chamber 101 in the horizontal direction, avoiding the space above the hot plate 102. The probe signal transmitter 107 is configured to transmit a probe signal, and the probe signal receiver 108 is configured to receive the probe signal and output a corresponding output signal. The signal value of the output signal corresponds to the signal strength of the received probe signal. In some embodiments, the probe signal of the probe assembly is one of the following: an optical signal; an electromagnetic wave signal; an ultrasonic wave signal. Preferably, the probe signal transmitter 107 can be a laser transmitter, and the probe signal receiver 108 can be a corresponding laser receiver. The laser signal emitted by the laser transmitter is received by the probe signal receiver 108, which is converted into an output signal corresponding to the light intensity amplitude of the received laser signal, such as a current or voltage signal. In some embodiments, the probe signal transmitter 107 can include a transmitting optical fiber 171, and the probe signal receiver 108 can include a receiving optical fiber 181. The opposite ends of the transmitting optical fiber 171 and the receiving optical fiber 181 can be provided with a first glass 172 and a second glass 182, respectively. As an example, the first glass 172 and the second glass 182 can be sapphire glass.

[0044] The probe signal transmission path between the probe signal transmitter 107 and the probe signal receiver 108 passes through a position in the lifting stroke of the hot plate 102, i.e., as shown in Figure 1 Changes to Figure 2 As shown, as the hot plate 102 rises, it gradually blocks the probe signal transmission path between the probe signal transmitter 107 and the probe signal receiver 108, causing the signal strength of the probe signal received by the probe signal receiver 108 to weaken until the hot plate 102 rises to a position that completely blocks the probe signal, causing the probe signal received by the probe signal receiver 108 to change to a minimum intensity, and the corresponding output signal amplitude is minimum. Thus, by judging the output signal amplitude output by the probe signal receiver 108, it can be determined whether the hot plate 102 has entered a position that blocks the probe signal.

[0045] It can be understood that, Figure 2 As shown, when the bearing surface 121 is not horizontal, the hot plate 102 blocks the transmission path of the probe signal S during the rising and falling process. Figure 3 As shown, when the bearing surface 121 is not horizontal, the hot plate 102 blocks the transmission path of the probe signal S during the rising and falling process. Figure 2 As shown, when the bearing surface 121 is not horizontal, the hot plate 102 blocks the transmission path of the probe signal S during the rising and falling process. Figure 3The blocked shape of the light path when the display hot plate 102 bearing surface 121 is tilted. The part of the bearing surface 121 tilted upward will first block the detection signal, and then gradually block the detection signal completely. It can be inferred that the output signal amplitude of the detection signal receiver 108 will be completely different when the bearing surface 121 is horizontal or not horizontal. When the bearing surface 121 is horizontal, the detection signal is blocked by the side of the hot plate 102; when the bearing surface 121 is tilted, the detection signal is blocked by the side of the hot plate 102 and the tilted bearing surface 121. Therefore, during the lifting / lowering of the hot plate 102, the output signal amplitude will be more obvious when the bearing surface 121 is horizontal than when the bearing surface 121 is tilted. Thus, the output signal amplitude in the two cases can be compared to detect the horizontal state of the bearing surface 121.

[0046] The controller 109 can be coupled to the detection signal receiver 108 to receive the output signal output by the detection signal receiver 108. The controller 109 can also be coupled to the detection signal transmitter 107 to control the emission of the detection signal. According to the principle described above, the controller 109 can store a plurality of reference signal second signal values of different heights (or lifting / lowering motion times corresponding to the heights) in advance as a reference for comparison. When the bearing surface 121 is determined to be horizontal, the output signal output by the detection signal receiver 108 during the lifting / lowering of the hot plate 102 is used as the reference signal. Then, the first signal of the output signal obtained during the actual lifting / lowering of the hot plate 102 is compared with the second signal value of the same height, and the difference is used to determine the horizontal state of the bearing surface 121.

[0047] In some embodiments, the difference comparison can be based on the difference in signal value, the difference in signal value change rate, or the difference in signal value combined with the difference in signal value change rate, etc.

[0048] Taking the light signal as an example, the detection principle is briefly described. The amplitude of the output signal of the detection signal receiver 108 represents the light intensity of the light signal received by the detection signal receiver 108. The controller 109 can record the first and second signal values of the output signal or their corresponding converted light intensity values to represent the corresponding light intensity. When the hot plate 102 is in a lower position, the light path is not blocked, and the emitted light is completely received. During the lifting of the hot plate 102, to a certain height, the light path starts to be blocked, and then the blocked part of the light path gradually increases, and the light intensity gradually decreases. Therefore, at the same height, the size of the light path blocked by the hot plate 102 is different when the bearing surface 121 is horizontal or tilted, i.e., the light intensity received by the detection signal receiver 108 at the same height position is different, so the light intensity recorded by the controller 109 is different.

[0049] In addition, it can be understood that the light intensity change rate of the signal received by the detection signal receiver 108 is different when the hot table 102 is in a horizontal state or an inclined state during the lifting and lowering process of the hot table 102, and therefore, the difference in the amplitude change rate of the output signal in the two states at the same height position can be used to determine whether the hot table 102 is horizontal. Alternatively, the two judgment conditions based on the amplitude change rate difference and the amplitude difference (such as the corresponding light intensity value difference) can be combined into one condition to determine the horizontal condition.

[0050] For example, the light intensity value of the hot table 102 at a specified height or heights can be detected by the detection controller 109 to determine whether the hot table 102 is horizontal. For example, when the hot table 102 is horizontal at a certain height, the light intensity recorded by the controller 109 is M, which is used as a reference and a tolerance value ±n is added. If the light intensity value at this height is detected to be outside the range of M±n, it can be determined that the horizontality of the hot table 102 does not meet the requirements.

[0051] In addition, the change rate of the light intensity recorded by the controller 109 at one or more heights during the lifting and lowering process of the hot table 102 can also be used to determine whether the hot table 102 is horizontal. The principle is also to set a standard value for the change rate, and then add a tolerance value. If it exceeds the range, it is considered that the horizontality of the hot table 102 has deteriorated. In some embodiments, the horizontality of the bearing surface 121 can be determined according to the difference in the amplitude change rate of the first signal value and the second signal value at at least one same height position. Exemplarily, a plurality of first signal values and a plurality of second signal values can form a curve respectively, and the slope of the tangent line of the signal value corresponding to each height position on the curve can be used to represent the amplitude change rate thereof.

[0052] In some embodiments, the controller 109 is coupled with a height acquisition component configured to determine the height position information of the hot plate 102. The height acquisition component can include at least one of an encoder of a driving motor configured to drive the hot plate 102 to move up / down, and a distance sensor configured to detect the height of the hot plate 102. In one example, the controller 109 can determine the number of rotations of the driving motor by reading the data of the encoder, and the number of rotations of the driving motor corresponds to the displacement stroke of the hot plate 102 moving up / down. As an example, the distance sensor can be implemented by an optical sensor, a magnetic induction sensor, or other types of sensors. For example, the distance sensor can be implemented by an optical sensor, which can include a light emitter and a receiver arranged side by side below the hot plate 102, and a light reflecting portion arranged on the hot plate 102. The light emitter emits light, and the light reflecting portion reflects the light to be received by the receiver. The height of the hot plate 102 can be calculated by a time-of-flight method. Alternatively, the light emitter and the light receiver can be arranged in a vertical direction, and the light emitter or the light receiver can be arranged on the bottom of the reaction chamber 101 and the bottom surface of the hot plate 102, respectively, to detect the height of the hot plate 102 moving up / down. It can be understood that the height can be calculated based on the stroke data of the driving motor, and no additional sensor needs to be installed on the reaction chamber 101, which is simple and low in cost.

[0053] In one embodiment, the level of the bearing surface can be determined based on the comparison of the amplitude difference between the first signal value and the second signal value at the at least one same height position.

[0054] As an example, it can be seen that Figure 4 As shown, a flowchart for determining the level of the bearing surface based on the amplitude difference of the signals in one embodiment of the present disclosure is shown.

[0055] Step S401: determining whether the amplitude difference between the first signal value and the second signal value at the at least one same height position reaches a preset amplitude difference threshold.

[0056] In one example, the preset amplitude difference threshold can be n as described above.

[0057] Step S402: if the amplitude difference at any one of the same height positions reaches the preset amplitude difference threshold, it is determined that the bearing surface does not meet the level requirement.

[0058] Step S403: if the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold, it is determined that the bearing surface meets the level requirement.

[0059] For example, assuming that the difference comparison of the first signal value and the second signal value is performed at multiple height positions A, B, C, if the difference between the first signal value and the second signal value at the A point reaches the preset amplitude difference threshold, that is, the tilt condition is met, even if the B and C positions do not meet the tilt condition, the tilt can be determined. Alternatively, if the difference between the first signal value and the second signal value at each of the height positions A, B, and C does not reach the preset amplitude difference threshold, it can be determined that the bearing surface is horizontal.

[0060] The single height position determination of the tilt, that is, the determination of the tilt of the bearing surface, is relatively strict. In other examples, the requirements can be relaxed. Figure 5 The flowchart shown shows a flowchart for determining the level of the bearing surface based on the amplitude difference of the signals in another embodiment of the present disclosure.

[0061] Step S501: Determine whether the amplitude difference between the first signal value and the second signal value at multiple same height positions reaches a preset amplitude difference threshold.

[0062] Step S502: If the amplitude difference at a preset number of same height positions reaches the preset amplitude difference threshold, it is determined that the bearing surface does not meet the level requirement.

[0063] Step S503: If the amplitude difference at less than the preset number of same height positions reaches the preset amplitude difference threshold, it is determined that the bearing surface meets the level requirement.

[0064] The preset number can be set according to the tightness of the level requirement, and the preset number is greater than or equal to 2. For example, assuming that the preset number is 2, the difference comparison of the first signal value and the second signal value is performed at multiple height positions A, B, and C, if the difference between the first signal value and the second signal value at the A and B points reaches the preset amplitude difference threshold, that is, the tilt condition is met, the tilt can be determined. Alternatively, if only one of the height positions A, B, and C meets the tilt condition, the level can be determined.

[0065] For example Figure 6 The flowchart shown shows a flowchart for determining the level of the bearing surface based on the amplitude difference of the signals in another embodiment of the present disclosure.

[0066] Step S601: Determine whether the slope difference of the tangent on the curve of the first signal value and the second signal value at each height change of the heat table at at least one same height position reaches a preset rate difference threshold.

[0067] Step S602: If the slope difference at any one of the same height positions reaches the preset rate difference threshold, it is determined that the bearing surface does not meet the level requirement.

[0068] Step S603: If the slope difference at each same height position does not reach the preset variation rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

[0069] For example, assuming that the difference comparison of the first signal value and the second signal value is performed at multiple height positions A, B, and C, if the slope difference of the first signal value and the second signal value at the A point reaches the preset variation rate difference threshold, that is, the inclination condition is met, even if the B and C positions do not meet the inclination condition, the inclination can be determined. Alternatively, if the slope difference of the first signal value and the second signal value at each height position A, B, and C does not reach the preset variation rate difference threshold, it can be determined that the bearing surface is horizontal.

[0070] The inclination determination at a single height position is relatively strict. In other examples, the requirement can be lowered. Figure 7 The flowchart shown shows a flowchart for determining the level of the bearing surface based on the variation rate difference of the signals in another embodiment of the present disclosure.

[0071] Step S701: Determine whether the slope difference between the tangent slopes of the corresponding points on the respective amplitude and height related curves of the first signal value and the second signal value at multiple same height positions reaches a preset variation rate difference threshold.

[0072] Step S702: If the slope difference at the preset number of same height positions reaches the preset variation rate difference threshold, it is determined that the bearing surface does not meet the horizontal requirement.

[0073] Step S703: If the slope difference at less than the preset number of same height positions does not reach the preset variation rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

[0074] For example, assuming that the preset number is 2, the difference comparison of the first signal value and the second signal value is performed at multiple height positions A, B, and C, if the slope difference of the first signal value and the second signal value at the A and B points reaches the preset variation rate difference threshold, that is, the inclination condition is met, the inclination can be determined. Alternatively, if only one of the A, B, and C height positions meets the inclination condition, it can be determined that the bearing surface is horizontal.

[0075] In some embodiments, the level of the bearing surface can be determined based on the difference comparison of the amplitudes and variation rates of the first signal value and the second signal value at multiple same height positions.

[0076] For example Figure 8 The flowchart shown shows a flowchart for determining the level of the bearing surface based on the amplitude and variation rate difference of the signals in an embodiment of the present disclosure.

[0077] Step S801: Determine whether the amplitude difference between the first signal value and the second signal value at at least one of the same height positions reaches a preset amplitude difference threshold, and whether the slope difference of the tangent on the curves that change with the height of the hot stage reaches a preset change rate difference threshold.

[0078] Step S802: If the amplitude difference at any of the same height positions reaches the preset amplitude difference threshold or the slope difference reaches the preset change rate difference threshold, it is determined that the bearing surface does not meet the horizontal requirement.

[0079] Step S803: If the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold and the slope difference does not reach the preset change rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

[0080] For example, assuming that the difference between the first signal value and the second signal value is compared at multiple height positions A, B, and C, if the difference between the first signal value and the second signal value at point A reaches a preset amplitude difference threshold, or the slope difference between the first signal value and the second signal value at point A reaches a preset rate of change difference threshold, that is, the tilt condition is met, then tilt can be determined even if positions B and C do not meet the tilt condition. Alternatively, if the slope difference between the first signal value and the second signal value at each height position A, B, and C does not reach the preset rate of change difference threshold, then the supporting surface can be determined to be level.

[0081] As in the previous example, judging the inclination at a single height position is relatively strict, and in other examples, the requirements can be relaxed. Figure 9 The process shown is a schematic diagram showing a process of judging the level of the bearing surface based on the difference in the amplitude change rate of the signal in another embodiment of the present disclosure.

[0082] Step S901: Determine whether the amplitude difference between the first signal value and the second signal value at the same height position reaches a preset amplitude difference threshold, and whether the slope difference of the tangent on the curves that change with the height of the hot stage reaches a preset change rate difference threshold.

[0083] Step S902: If the amplitude difference at the same height position for more than a preset number reaches the preset amplitude difference threshold or the slope difference reaches the preset change rate difference threshold, it is determined that the bearing surface does not meet the horizontal requirement.

[0084] Step S903: If the amplitude difference at the same height position less than the preset number does not reach the preset amplitude difference threshold and the slope difference does not reach the preset change rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

[0085] According to the above various embodiments, it can be seen that according to the difference comparison of the signal values of the received probe signal strength corresponding to a certain height position and the signal strength in the horizontal state, the result of whether the bearing surface of the hot stage is horizontal can be obtained conveniently, accurately and quickly. Moreover, according to the above various embodiments, the signal values of the received probe signal strength corresponding to a certain height position and the signal strength in the horizontal state are compared, and the result of whether the bearing surface of the hot stage is horizontal can be obtained conveniently, accurately and quickly. Figure 1 It can be seen that the hot stage horizontal detection device is installed to the reaction chamber, only occupies a small area on the side wall of the reaction chamber, does not need to occupy the space above the hot stage of the reaction chamber, has a simple structure and is convenient to install.

[0086] It should be particularly pointed out that in the above embodiments, the bearing surface is judged to be horizontal according to the amplitude difference of the signals at several height position points and the signal change rate difference, which is only a convenient and simple example, and in other embodiments, the curvature difference between the overall or local section of the curves of the first signal value and the second signal value can be compared, and the above embodiments are not limited.

[0087] In addition, according to the above various embodiments, the signal values of the received probe signal strength corresponding to a certain height position and the signal strength in the horizontal state are compared, and the result of whether the bearing surface of the hot stage is horizontal can be obtained conveniently, accurately and quickly. Figure 2 It can be seen that the greater the inclination of the bearing surface is, the earlier the probe signal will be blocked by the bearing surface, that is, at the same height position, the height position forming the blockage is the position at which the amplitude difference and / or the amplitude change rate difference between the first signal value and the second signal value begins to occur, and the lower the height position at which the difference occurs is, the greater the inclination is. Therefore, in some embodiments, the inclination of the bearing surface can also be estimated according to the height position at which the amplitude difference and / or the amplitude change rate difference between the first signal value and the second signal value begins to occur (the difference can be set to be greater than a certain threshold value), and the degree of the horizontal of the bearing surface of the hot stage can be obtained in the opposite direction of the inclination.

[0088] As shown in FIG. 8, a schematic diagram of a circuit structure of a controller in an embodiment of the present disclosure is shown. Figure 10

[0089] The controller 1000 includes a bus 1001, a processor 1002 and a memory 1003. The processor 1002 and the memory 1003 can communicate through the bus 1001. The memory 1003 can store program instructions. The processor 1002 implements the steps in the product attribute processing method in the previous embodiments by running the program instructions in the memory 1003, for example Figure 1 .

[0090] The bus 1001 can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The bus can be divided into an address bus, a data bus and a control bus, etc. For the convenience of representation, although only one thick line is shown in the figure, it does not mean that there is only one bus or only one type of bus.​

[0091] In some embodiments, the processor 1002 can be implemented as a Central Processing Unit (CPU), a Micro Processing Unit (MCU), a System On Chip (SoC), or a Field Programmable Gate Array (FPGA), etc. The memory 1003 can include a volatile memory for data storage during program execution, such as a Random Access Memory (RAM).

[0092] The memory 1003 can also include a non-volatile memory for data storage, such as a Read-Only Memory (ROM), a flash memory, a Hard Disk Drive (HDD), or a Solid-State Disk (SSD).

[0093] In some embodiments, the controller 1000 can also include a communicator 1004. The communicator 1004 is configured to communicate with the outside. In specific examples, the communicator 1004 can include one or a set of wired and / or wireless communication circuit modules. For example, the communicator 1004 can include one or more of, for example, a wired network card, a USB module, a serial interface module, etc. The wireless communication module can comply with one or more of, for example, a Near Field Communication (NFC) technology, an Infared (IR) technology, a Global System for Mobile communications (GSM), a General Packet Radio Service (GPRS), a Code Division Multiple Access (CDMA), a Wideband Code division multiple access (WCDMA), a Time-Division Code Division Multiple Access (TD-SCDMA), a Long Term Evolution (LTE), a Blue Tooth (BT), a Global Navigation Satellite System (GNSS), etc.

[0094] The embodiments of the present disclosure can also provide a computer readable storage medium storing program instructions, which, when executed, implement the flow steps in any of the preceding embodiments, for example Figure 4 to Figure 9 .

[0095] That is, the method steps in the above embodiments are implemented as software or computer code that can be stored in a recording medium (such as a CD ROM, RAM, floppy disk, hard disk, or magneto-optical disk), or computer code that is originally stored in a remote recording medium or non-transitory machine-readable medium and downloaded through a network and stored in a local recording medium, so that the method represented herein can be processed by such software on a recording medium using a general-purpose computer, a special-purpose processor, or programmable or special-purpose hardware (such as an ASIC or an FPGA).

[0096] In summary, the embodiments of the present disclosure provide a hot plate level detection device and wafer processing equipment, the device comprising: a detection assembly comprising: a detection signal transmitter and a receiver arranged on opposite sides of the reaction wall in the horizontal direction; the detection signal transmission path between the detection signal transmitter and the receiver passes through the position in the lifting stroke of the hot plate; a controller coupled to at least the detection signal receiver, for determining the level of the bearing surface according to the difference between the first signal value of the output signal obtained during the lifting / descending process of the hot plate and the second signal value of the reference signal at the same height position; wherein the reference signal is the output signal output by the detection signal receiver during the lifting / descending process of the hot plate with a horizontal bearing surface. The hot plate level detection device is simple in structure, easy to install, does not affect the structure of the reaction chamber, can meet the real-time detection of the hot plate level, avoid wafer scrap, and effectively improve the processing yield.

[0097] The above embodiments are only illustrative of the principles and effects of the present disclosure, and are not intended to limit the present disclosure. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present disclosure. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed by the present disclosure shall still be covered by the protection scope of the present disclosure.

Claims

1. A hot stage level detection device, characterized in that: Applicable to wafer processing equipment, the wafer processing equipment includes a reaction chamber and a heat stage arranged in the reaction chamber in a liftable manner; the top surface of the heat stage is a carrying surface for carrying wafers; The top of the reaction chamber is provided with an air inlet for introducing reaction gas to the carrying surface; The hot stage level detection device comprises: A detection assembly comprising: a detection signal transmitter and a detection signal receiver, disposed horizontally on opposite side walls of the reaction chamber; the detection signal transmitter for transmitting a detection signal; the detection signal receiver for receiving the detection signal and outputting a corresponding output signal, the signal value of the output signal corresponding to the signal strength of the received detection signal; wherein a detection signal transmission path between the detection signal transmitter and the detection signal receiver passes through a position within the lifting stroke of the hot stage; a controller coupled to at least the detection signal receiver, and configured to determine the horizontality of the carrying surface based on a comparison of a difference between a first signal value of an output signal obtained during the ascent / descending process of the hot stage and a second signal value of a reference signal at the same height position; wherein the reference signal is an output signal output by the detection signal receiver during the ascent / descending process corresponding to a hot stage having a horizontal carrying surface.

2. The hot stage level detection device according to claim 1, characterized in that: Determining the horizontality of the carrying surface based on a comparison of a difference between a first signal value of an output signal obtained during the raising / lowering process of the hot stage and a second signal value of a reference signal at the same height position includes one of the following: 1) determining the horizontality of the supporting surface based on a comparison of the amplitude difference between the first signal value and the second signal value at at least one position having the same height; 2) determining the horizontality of the bearing surface based on a comparison of a difference in amplitude change rate between the first signal value and the second signal value at at least one same height position; 3) Determining the horizontality of the bearing surface based on a comparison of the amplitudes and amplitude change rates of the first signal value and the second signal value at a plurality of positions having the same height.

3. The hot stage level detection device according to claim 2, characterized in that: Determining the horizontality of the bearing surface based on a comparison of the amplitudes and amplitude change rates of the first signal values ​​and the second signal values ​​at a plurality of positions having the same height, including: Determining whether an amplitude difference between a first signal value and a second signal value at at least one of the same height positions reaches a preset amplitude difference threshold, and whether a slope difference between tangent lines on respective curves varying with the height of the hot stage reaches a preset rate of change difference threshold; If the amplitude difference at any of the same height positions reaches the preset amplitude difference threshold or the slope difference reaches the preset rate of change difference threshold, it is determined that the bearing surface does not meet the horizontal requirement; If the amplitude difference at each of the same height positions does not reach the preset amplitude difference threshold and the slope difference does not reach the preset change rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

4. The hot stage level detection device according to claim 2, characterized in that: Determining the horizontality of the bearing surface based on a comparison of the amplitudes and amplitude change rates of the first signal values ​​and the second signal values ​​at a plurality of positions having the same height, including: Determining whether the amplitude difference between the first signal value and the second signal value at the plurality of positions having the same height reaches a preset amplitude difference threshold, and whether the slope difference of the tangent line on the respective curves varying with the height of the hot stage reaches a preset rate of change difference threshold; If the amplitude difference at the same height position for more than a preset number reaches the preset amplitude difference threshold or the slope difference reaches the preset rate of change difference threshold, it is determined that the bearing surface does not meet the horizontal requirement; If the amplitude difference at the same height position less than the preset number does not reach the preset amplitude difference threshold and the slope difference does not reach the preset change rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

5. The hot stage level detection device according to claim 2, characterized in that: Determining the horizontality of the bearing surface based on a comparison of the amplitude difference between the first signal value and the second signal value at at least one same height position includes: determining whether an amplitude difference between a first signal value and a second signal value at at least one same height position reaches a preset amplitude difference threshold; If the amplitude difference at any position of the same height reaches the preset amplitude difference threshold, it is determined that the bearing surface does not meet the horizontal requirement; If the amplitude difference at each position of the same height does not reach the preset amplitude difference threshold, it is determined that the bearing surface meets the horizontal requirement.

6. The hot stage level detection device according to claim 2, characterized in that: Determining the horizontality of the bearing surface based on a comparison of the amplitude difference between the first signal value and the second signal value at at least one same height position includes: Determining whether an amplitude difference between a first signal value and a second signal value at a plurality of positions having the same height reaches a preset amplitude difference threshold; If the amplitude difference at the same height position at a preset number or more reaches the preset amplitude difference threshold, it is determined that the bearing surface does not meet the horizontal requirement; If the amplitude difference at the same height position below the preset number reaches the preset amplitude difference threshold, it is determined that the bearing surface meets the horizontal requirement.

7. The hot stage level detection device according to claim 2, characterized in that: Determining the horizontality of the bearing surface based on a comparison of a difference in amplitude change rate between a first signal value and a second signal value at at least one same height position includes: determining whether a difference in slope of a tangent line between a first signal value and a second signal value at at least one same height position on a curve varying with the height of the heating stage reaches a preset rate of change difference threshold; If the slope difference at any of the same height positions reaches the preset change rate difference threshold, it is determined that the bearing surface does not meet the horizontal requirement; If the slope difference at each position of the same height does not reach the preset change rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

8. The hot stage level detection device according to claim 2, characterized in that: Determining the horizontality of the bearing surface based on a comparison of a difference in amplitude change rate between a first signal value and a second signal value at at least one same height position includes: Determine whether a difference in slope between a tangent line slope of a first signal value and a tangent line slope of a second signal value at corresponding points on respective amplitude-height correlation curves at a plurality of positions at the same height reaches a preset rate-of-change difference threshold; If the slope difference at the same height position for more than a preset number reaches the preset change rate difference threshold, it is determined that the bearing surface does not meet the horizontal requirement; If the slope differences at the same height positions less than a preset number do not reach the preset change rate difference threshold, it is determined that the bearing surface meets the horizontal requirement.

9. The hot stage level detection device according to claim 1, characterized in that: The controller is coupled to a height acquisition component for determining height position information of the heat stage, wherein the height acquisition component includes at least one of the following: an encoder of a drive motor that drives the heat stage to rise / lower; a distance sensor configured to detect the height of the heat stage; And / or, the detection signal of the detection component is one of the following: an optical signal; an electromagnetic wave signal; an ultrasonic signal.

10. A wafer processing equipment, characterized in that: include: A reaction chamber and a heat stage that is liftably disposed in the reaction chamber, wherein the top surface of the heat stage is a support surface for supporting wafers; an air inlet is provided on the top of the reaction chamber for introducing reaction gas to the support surface; The hot stage level detection device according to any one of claims 1 to 9, arranged in the reaction chamber.

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