Quartz crucible coating device

Abstract

The invention relates to the technical field of quartz crucible production, in particular to a quartz crucible coating device which comprises a spraying cabin, a spraying assembly and a multi-dimensional crucible support, the spraying assembly is used for evenly spraying coating materials to the surfaces of crucibles in the coating process, and the multi-dimensional crucible support is responsible for enabling the crucibles to receive spraying from different angles through a multi-axis rotating system. The device is further provided with a vacuum and exhaust system, a gas supply system and an atmosphere heating system which are respectively responsible for controlling a vacuum environment, gas supply and heating conditions in the spraying cabin. According to the invention, the multi-dimensional crucible bracket with high integration level has a flexible rotation function in the horizontal axial direction and the vertical axial direction, so that the crucible can be sprayed from multiple angles in the coating process, the rotation and positioning of the crucible in the horizontal axial direction and the vertical axial direction are more accurate, and the accurate control of the coating process is ensured; and the uniformity and the consistency of the coating thickness are effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of quartz crucible production, in particular to a quartz crucible coating device. Background Art

[0002] In the coating process of quartz crucibles, the existing technology usually uses a fixed crucible support and a simple spraying system to perform surface coating. However, this type of traditional device has significant limitations. First, due to the fixed support structure, the crucible can only be sprayed in limited directions during the coating process, resulting in the coating material being unable to evenly cover all surface areas of the crucible, and the coating layer thickness is often uneven, which in turn affects the performance of the crucible and the quality stability of the coating layer. Especially in applications that require high coating uniformity, the capabilities of traditional equipment are obviously insufficient.

[0003] Secondly, the operation of traditional devices mostly relies on manual intervention to adjust the crucible position and control the spraying angle, and the level of automation is low. Due to the complexity of manual operation and human errors, the accuracy and consistency of the coating process are difficult to be effectively guaranteed, and production efficiency and product quality are not easy to improve. In addition, the existing technology has low control accuracy in vacuum environment, gas supply and heating control system, and cannot perform real-time and precise automatic adjustments according to actual process requirements. It is difficult to meet the needs of complex coating processes for multi-parameter control, resulting in insufficient flexibility and stability of the overall process.

[0004] Although some improvement schemes improve the uniformity of coating by adding a rotating bracket or adjusting the angle of the spray system, the existing technology still has many shortcomings in multi-axis control, degree of automation and precise control of process parameters, and it is difficult to adapt to high-demand coating application scenarios. In view of this, research and improvement are carried out on the existing problems, and a quartz crucible coating device is provided to solve the current problems. The purpose is to achieve the purpose of solving problems and improving practical value through this technology. Summary of the invention

[0005] The present invention aims to solve one of the technical problems existing in the prior art or related technology.

[0006] To this end, the technical solution adopted by the present invention is: a quartz crucible coating device, comprising: a spraying cabin, a spraying assembly and a multi-dimensional crucible support, wherein the spraying assembly and the multi-dimensional crucible support are both fixedly arranged inside the spraying cabin; The surface of the spraying chamber is provided with: a vacuum and exhaust system for evacuating air in the spraying chamber to reach a predetermined vacuum degree and discharging waste gas generated during the coating process; A gas supply system, connected to the input end of the spray assembly, is used to provide the reaction gas required in the coating process and accurately control the gas flow and ratio; Atmosphere heating system, used to provide a constant and uniform temperature environment for the coating process and ensure the temperature stability in the chamber; Control system, used to monitor and control various parameters during the coating process, including temperature, pressure, gas flow, and the movement of the crucible and spray components; The visual window is set on the surface of the spraying chamber to observe the operating status of the chamber during the coating process. In a preferred example, the present invention can be further configured as follows: the spraying assembly includes: a fixing frame, a spray head and a driving motor, and a shaft is rotatably mounted on the inner side of the fixing frame; Among them, the fixed frame is fixedly installed on the inner wall of the spraying cabin, the two ends of the shaft rod are rotatably connected to the inner side of the fixed frame, the nozzle is fixedly arranged on the surface of the shaft rod, and a connecting rod is provided on the surface of the nozzle head. The driving motor is connected to the connecting rod through a crank mechanism to drive the shaft rod to deflect, so that the nozzle can realize reciprocating swing on the inner side of the fixed frame.

[0007] In a preferred example, the present invention can be further configured as follows: the multidimensional crucible support includes a transmission rudder, a turntable gear plate and a transmission gear shaft, and a first drive motor and a second drive motor fixed to the surface of the transmission rudder, the turntable gear plate is rotatably installed on the top surface of the transmission rudder, the transmission gear shaft is rotatably sleeved on the surface of the transmission rudder and is transmission-engaged with the outer periphery of the turntable gear plate, the output end of the second drive motor is provided with a worm gear transmission-engaged with the surface of the transmission gear shaft, the surface of the turntable gear plate is fixedly installed with an axis frame, the surface of the turntable gear plate is rotatably installed with a transmission key shaft, the multi-claw chuck is rotatably installed on the surface of the axis frame and a gear plate transmission-engaged with the surface of the transmission key shaft is provided on one side, the bottom end of the transmission key shaft is transmission-engaged with the output end of the first drive motor, the first drive motor drives the multi-claw chuck to rotate in the horizontal axis through the transmission key shaft, and the second drive motor drives the axis frame, the axis frame and the multi-claw chuck to rotate in the vertical axis through the transmission gear shaft and the turntable gear plate.

[0008] In a preferred example, the present invention can be further configured as follows: the multi-jaw chuck comprises: a fixed disk seat, a turntable and a plurality of clamping rods; wherein, the turntable is rotatably mounted on the fixed disk seat, and a plurality of guide grooves are provided on the surface of the fixed disk seat and the turntable, and the guide grooves on the surface of the fixed disk seat and the turntable are arranged in opposite directions, and the clamping rods are slidably sleeved on the inner sides of the guide grooves on the surface of the fixed disk seat and the turntable, so as to clamp the quartz crucible; through the deflection movement of the turntable on the surface of the fixed disk seat, the relative radial movement of the multi-jaw chuck on the surface of the turntable is realized by two reverse guide grooves.

[0009] In a preferred example, the present invention can be further configured as follows: the guide groove is an arc-shaped sleeve groove structure, and one end of the guide groove is close to the axis of the turntable, and the other end is far away from the axis of the guide groove, the number of guide grooves on the fixed disk seat and the turntable surface corresponds to the number of guide grooves, and an abutment plate for increasing the rotation damping of the turntable is fixedly installed on the surface of the fixed disk seat.

[0010] In a preferred example, the present invention can be further configured as follows: the vacuum and exhaust system includes: Rough vacuum pump: used to initially reduce the pressure in the spray chamber to a predetermined vacuum level; High vacuum pump: used to further reduce the pressure in the spray chamber to meet the high vacuum requirements of the coating process; Vacuum valve: used to control the connection between the vacuum pump and the spraying chamber; Vacuum gauge: used to monitor the vacuum degree in the spraying chamber in real time; Waste gas treatment system: used to filter and treat waste gas generated during the coating process to prevent environmental pollution; A rough vacuum pump, a high vacuum pump, a vacuum valve, a vacuum gauge and an exhaust gas treatment system are connected in sequence.

[0011] In a preferred example, the present invention can be further configured as follows: the gas supply system includes: High-purity reaction gas source: including silane (SiH4), ammonia (NH3) and other gases used for coating reactions; High-purity carrier gas source: including argon (Ar), nitrogen (N2) and other carrier gases used to assist coating; Gas pipeline: Use stainless steel pipeline with polished inner wall to prevent impurities from adhering; Mass flow controller (MFC): used to accurately control the flow and ratio of reaction gas and carrier gas; Gas purification device: including dehumidifiers and filters to remove moisture and particulate impurities from the gas; Safety devices: including flashback preventer and gas leak detector to ensure the safety of gas transportation; A high-purity reaction gas source, a high-purity carrier gas source, a gas pipeline, a mass flow controller (MFC) and a gas purification device are connected in sequence, and a safety device is arranged on the gas pipeline.

[0012] In a preferred example, the present invention can be further configured as follows: the control system includes: Industrial control computer (IPC): used to run coating control software and process and store relevant data; Human-machine interface (HMI): used to display the operating status of the equipment and allow operators to monitor and set relevant parameters; Sensors and detectors: including temperature sensors, pressure sensors and gas flow sensors, which collect various key parameters in real time; Programmable logic controller (PLC): used to receive sensor signals and control the operation of each actuator; Driver: used to control the operation of the drive motor, the first drive motor and the second drive motor; Data recording and alarm system: records various parameters and events during the coating process, issues alarm signals in abnormal situations and takes corresponding protective measures.

[0013] The beneficial effects achieved by the present invention are: 1. In the present invention, the flexible rotation and swing of the crucible in the horizontal and vertical directions are achieved through the coordinated movement of the multi-dimensional crucible support and the spraying assembly, thereby ensuring the uniformity and accuracy of the coating process and reducing human operation errors.

[0014] 2. In the present invention, a highly integrated multi-dimensional crucible support has flexible rotation functions in the horizontal and vertical axes, so that the crucible can be sprayed from multiple angles during the coating process, effectively ensuring that all areas of the crucible surface can be evenly coated with the coating material. The precise transmission structure of the support (such as worm gear transmission and gear disk transmission) ensures that the crucible has high-precision motion control during the rotation process, making its rotation and positioning in the horizontal and vertical axes more accurate, ensuring precise control of the coating process, and effectively improving the uniformity and consistency of the coating thickness.

[0015] 3. In the present invention, the control system of the equipment integrates the industrial control computer (IPC) and the programmable logic controller (PLC) through the fine control of the vacuum and exhaust system, the gas supply system and the atmosphere heating system, and can quickly adjust the temperature, gas flow, pressure and other parameters under different working conditions, ensuring the flexibility and stability of the production process and significantly improving the production efficiency. In addition, the automatic alarm function of the equipment can respond in time under abnormal circumstances, ensuring the safety of the equipment and the continuity of operation, and reducing downtime and maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention; Figure 2 A schematic diagram of the internal structure of a spraying cabin according to an embodiment of the present invention; Figure 3 A schematic diagram of a multi-dimensional crucible support structure according to an embodiment of the present invention; Figure 4 A schematic diagram of the exploded structure of a multi-dimensional crucible support according to an embodiment of the present invention; Figure 5A schematic diagram of the structure of a spraying assembly according to an embodiment of the present invention; Figure 6 The figure is a schematic diagram of the structure of a multi-jaw chuck according to an embodiment of the present invention.

[0017] Reference numerals: 100, spraying chamber; 110, vacuum and exhaust system; 120, gas supply system; 130, atmosphere heating system; 140, control system; 101, visual window; 200, spraying assembly; 210, fixing frame; 220, spray head; 230, driving motor; 211, shaft rod; 212, swing rod; 300, multi-dimensional crucible support; 310, transmission steering platform; 320, turntable gear plate; 330, transmission gear shaft; 311, first drive motor; 312, second drive motor; 321, shaft frame; 322, transmission key shaft; 400, multi-claw chuck; 410, fixed plate seat; 420, turntable; 430, guide groove; 440, clamping claw rod. DETAILED DESCRIPTION

[0018] To make the purpose, technical solution and advantages of the present invention more clear, the present invention is further described in detail below in combination with specific implementations and with reference to the accompanying drawings. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0019] It is to be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention.

[0020] A quartz crucible coating device provided by some embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0021] Combination Figure 1-Figure 6 As shown, a quartz crucible coating device provided by the present invention realizes the rotation and spraying operation of the crucible in multi-dimensional directions through the cooperation of the multi-dimensional crucible support 300 and the spraying assembly 200, thereby ensuring the uniformity and accuracy of the coating process and effectively improving the quality of the coating layer and the overall production efficiency.

[0022] The spraying chamber 100 is provided with a spraying assembly 200 and a multi-dimensional crucible support 300. The spraying assembly 200 is used to spray the coating material evenly onto the surface of the crucible during the coating process, while the multi-dimensional crucible support 300 is responsible for spraying the crucible from different angles through a multi-axis rotation system. The device is also equipped with a vacuum and exhaust system 110, a gas supply system 120 and an atmosphere heating system 130, which are respectively responsible for controlling the vacuum environment, gas supply and heating conditions in the spraying chamber 100 to ensure that the entire coating process is carried out efficiently under a controlled environment. In addition, the device is intelligently controlled through a control system 140 to precisely adjust multiple subsystems to achieve fully automated operation of the coating process.

[0023] The multi-dimensional crucible support 300 has a multi-axis rotation function. Driven by the first drive motor 311 and the second drive motor 312, the crucible can be flexibly rotated in the horizontal and vertical directions. Specifically, the multi-dimensional crucible support 300 allows the crucible to be positioned and rotated from multiple angles through a transmission device to ensure that each surface can be evenly coated with the coating material. This rotation design not only ensures the uniform coverage of the coating material on the crucible surface, but also greatly improves the accuracy of the coating and reduces the local uneven thickness. The rotation system of the multi-dimensional crucible support 300 is composed of multiple transmission components, including a worm drive and a gear drive, which ensures high precision and stability of the rotation.

[0024] The spray assembly 200 is installed in the spray chamber 100 through a fixed frame 210, and its spray head is driven by a driving motor 230 to achieve reciprocating swinging motion. The position and spray angle of the spray head are controlled by the transmission system of the spray assembly 200, and the spray path can be dynamically adjusted according to the rotation state of the crucible to ensure that each area on the surface of the crucible can evenly receive the coating material. Through such a design, the spray process in the present invention can be completed automatically without human intervention, while ensuring high precision and consistency of the coating.

[0025] The vacuum and exhaust system 110 is responsible for maintaining the vacuum environment in the spray chamber 100. By using a combination of a rough vacuum pump and a high vacuum pump, the system can quickly establish and maintain a high vacuum state to prevent the influence of air or other impurities on the coating process. The vacuum and exhaust system 110 is also equipped with monitoring devices such as vacuum gauges to provide real-time feedback on the vacuum degree inside the chamber to ensure that the process requirements are always met.

[0026] The gas supply system 120 is responsible for delivering the reaction gas and auxiliary gas to the spray chamber 100 in a set ratio. The reaction gas includes silane, ammonia, etc., and the auxiliary gas such as argon and nitrogen helps to improve the reaction efficiency of the coating process. Through the mass flow controller, the system can accurately control the flow and ratio of the gas to ensure the stability and consistency of the coating process. In addition, the gas supply system 120 is also equipped with a gas purification device to remove impurities in the gas to prevent impurities from affecting the quality of the coating layer.

[0027] The atmosphere heating system 130 is used to provide a constant temperature environment for the coating process. Through multi-point temperature control technology, the system can ensure uniform temperature distribution in the spray chamber 100 to avoid uneven coating quality caused by temperature fluctuations. The temperature of the entire heating system is automatically controlled by the control system 140 and can be accurately adjusted according to actual process requirements.

[0028] The control system 140 is the control core of the entire device, through which the operating status of each subsystem can be automatically controlled. Through the integrated industrial control computer and programmable logic controller, the system can adjust the vacuum degree, gas flow, temperature, and the movement state of the crucible and spraying components in real time according to the preset process parameters. The control system is also equipped with multiple sensors for real-time monitoring of changes in various key parameters. Once the parameters deviate from the set values, the system will automatically adjust. In addition, the control system also has an automatic alarm function, which can issue an alarm in time under abnormal circumstances and take corresponding protective measures to ensure the safety of equipment and processes. The control system 140 monitors various parameters in the entire coating process in real time, such as temperature, gas flow, vacuum degree, etc., to ensure that the coating process is always carried out under optimal conditions.

[0029] The working principle and use process of the present invention: Before starting the equipment, the operator first inputs or selects the coating process parameters, including temperature, gas type and flow rate, vacuum degree, etc., through the control system 140. At this time, the control system 140 will automatically transmit these parameters to each subsystem and start adjusting the relevant equipment. The vacuum and exhaust system 110 is first started, and the rough vacuum pump initially extracts the air in the spray chamber 100 to make the interior reach a predetermined vacuum level. Subsequently, the high vacuum pump further reduces the internal pressure to ensure that the internal vacuum degree can meet the high requirements of the coating.

[0030] When the set vacuum degree is reached inside the spray chamber 100, the gas supply system 120 starts to deliver the reaction gas and auxiliary gas according to the preset process requirements. Through the mass flow controller, the system accurately adjusts the flow rate and mixing ratio of the gas to ensure that the reaction gas is mixed with the auxiliary gas in a suitable ratio and enters the spray chamber 100 to achieve the reaction deposition of the coating material. At the same time, the atmosphere heating system 130 is started to provide a constant and uniform temperature field inside the spray chamber 100, ensuring that the coating reaction can be carried out under ideal temperature conditions and avoiding uneven coating layer quality due to temperature fluctuations.

[0031] After the coating conditions are met, the multi-dimensional crucible support 300 starts working. Driven by the first drive motor 311 and the second drive motor 312, the crucible is automatically adjusted to a suitable initial position, and starts to rotate in the horizontal and vertical directions according to the preset process parameters to ensure that each area of ​​the crucible surface evenly receives the spraying material. At the same time, the spraying assembly 200 drives the spray head to swing in multiple dimensions through the transmission mechanism to ensure that the coating material is evenly sprayed onto the crucible surface. During the entire spraying process, the control system 140 monitors the key parameters such as the rotation angle of the crucible, the motion range of the spray head, and the gas supply and temperature in real time through sensors to ensure that every link in the coating process is accurately executed according to the set parameters.

[0032] During the operation of the equipment, the control system 140 collects various parameters of the coating process in real time through sensors, including gas flow, vacuum, temperature, etc. Once any parameter is detected to deviate from the preset range, the system will automatically adjust the relevant equipment to keep the entire coating process running under optimal conditions. If an abnormal situation occurs, the system will issue an alarm signal and take corresponding protective measures to ensure the safety of the equipment and the production process.

[0033] When the coating process reaches the preset time or thickness, the control system 140 will automatically shut down the gas supply system 120 and the heating system atmosphere heating system 130, and start the exhaust device to discharge the residual gas from the spraying cabin 100. Subsequently, the pressure inside the spraying cabin 100 is restored to a normal state by gradually reducing the pressure. At this time, the crucible support multidimensional crucible support 300 stops rotating and the spraying assembly 200 is reset. The operator can check the completion of the coating through the visual window or obtain the production report directly from the system. Finally, the entire equipment enters a shutdown state, waiting for the next round of operation or maintenance. The entire coating process can be completed automatically, and the production parameters will be recorded for subsequent process optimization or quality traceability.

[0034] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A quartz crucible coating device, characterized in that: include: A spraying chamber (100), a spraying assembly (200) and a multi-dimensional crucible support (300), wherein the spraying assembly (200) and the multi-dimensional crucible support (300) are both fixedly arranged inside the spraying chamber (100); The surface of the spraying chamber (100) is provided with: a vacuum and exhaust system (110) for evacuating air from the spraying chamber (100) to reach a predetermined vacuum degree and exhausting waste gas generated during the coating process; A gas supply system (120) is connected to the input end of the spray assembly (200) and is used to provide the reaction gas required in the coating process and accurately control the gas flow rate and ratio; An atmosphere heating system (130) is used to provide a constant and uniform temperature environment for the coating process and ensure the stability of the temperature in the chamber; A control system (140) for monitoring and regulating various parameters during the coating process, including temperature, pressure, gas flow rate, and the movement state of the crucible and the spraying assembly; A visual window (101) is provided on the surface of the spraying chamber (100) and is used to observe the operating status in the chamber during the coating process.

2. A quartz crucible coating device according to claim 1, characterized in that: The spraying assembly (200) comprises: a fixing frame (210), a spray head (220) and a driving motor (230); a shaft (211) is rotatably mounted inside the fixing frame (210); The fixing frame (210) is fixedly mounted on the inner wall of the spraying chamber (100), the two ends of the shaft (211) are rotatably connected to the inner side of the fixing frame (210), the nozzle (220) is fixedly arranged on the surface of the shaft (211), and a connecting rod (212) is provided on the surface of the nozzle (220). The driving motor (230) is connected to the connecting rod (212) via a crank mechanism, thereby driving the shaft (211) to deflect, so that the nozzle (220) can achieve reciprocating swing inside the fixing frame (210).

3. A quartz crucible coating device according to claim 1, characterized in that: The multi-dimensional crucible support (300) comprises a transmission steering platform (310), a turntable gear plate (320), a transmission gear shaft (330), and a first drive motor (311) and a second drive motor (312) fixed to the surface of the transmission steering platform (310); the turntable gear plate (320) is rotatably mounted on the top surface of the transmission steering platform (310); the transmission gear shaft (330) is rotatably sleeved on the surface of the transmission steering platform (310) and is transmission-engaged with the outer periphery of the turntable gear plate (320); the output end of the second drive motor (312) is provided with a worm transmission-engaged with the surface of the transmission gear shaft (330); the surface of the turntable gear plate (320) is fixedly mounted with a shaft frame (321); A transmission key shaft (322) is rotatably mounted on the surface of the table toothed disc (320), the multi-claw chuck (400) is rotatably mounted on the surface of the shaft frame (321) and one side is provided with a toothed disc that is transmission-engaged with the surface of the transmission key shaft (322), the bottom end of the transmission key shaft (322) is transmission-engaged with the output end of the first drive motor (311), the first drive motor (311) drives the multi-claw chuck (400) to rotate in the horizontal axis through the transmission key shaft (322), and the second drive motor (312) drives the shaft frame (321) and the multi-claw chuck (400) to rotate in the vertical axis through the transmission gear shaft (330) and the turntable toothed disc (320).

4. A quartz crucible coating device according to claim 1, characterized in that: The multi-claw chuck (400) comprises: a fixed disc seat (410), a rotating disc (420) and a plurality of clamping claw rods (440); wherein the rotating disc (420) is rotatably mounted on the fixed disc seat (410); a plurality of guide grooves (430) are provided on the surfaces of the fixed disc seat (410) and the rotating disc (420); and the guide grooves (430) on the surfaces of the fixed disc seat (410) and the rotating disc (420) are arranged in opposite directions; the clamping claw rods (440) are slidably sleeved on the inner sides of the guide grooves (430) on the surfaces of the fixed disc seat (410) and the rotating disc (420) for clamping a quartz crucible; and through the deflection movement of the rotating disc (420) on the surface of the fixed disc seat (410), the relative radial movement of the multi-claw chuck (400) on the surface of the rotating disc (420) is realized by two opposite guide grooves (430).

5. A quartz crucible coating device according to claim 4, characterized in that: The guide groove (430) is an arc-shaped sleeve groove structure, and one end of the guide groove (430) is close to the axis of the turntable (420), and the other end is far away from the axis of the guide groove (430). The number of guide grooves (430) on the surface of the fixed disk seat (410) and the turntable (420) corresponds to the number of guide grooves (430), and an abutment plate for increasing the rotation damping of the turntable (420) is fixedly installed on the surface of the fixed disk seat (410).

6. The quartz crucible coating device according to claim 1, characterized in that: The vacuum and exhaust system (110) comprises: a rough vacuum pump, a high vacuum pump, a vacuum valve, a vacuum gauge and an exhaust gas treatment system, and the rough vacuum pump, the high vacuum pump, the vacuum valve, the vacuum gauge and the exhaust gas treatment system are connected in sequence.

7. The quartz crucible coating device according to claim 1, characterized in that: The gas supply system (120) comprises: a high-purity reaction gas source, a high-purity carrier gas source, a gas pipeline, a mass flow controller (MFC) and a gas purification device; Safety device: including a flashback preventer and a gas leak detector to ensure the safety of gas transportation. The high-purity reaction gas source, high-purity carrier gas source, gas pipeline, mass flow controller and gas purification device are connected in sequence, and the safety device is arranged on the gas pipeline.

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