Static pressure vibration suppression structure with flow guide strengthening function

Abstract

The static pressure vibration suppression structure comprises a fixed part and a movable part corresponding to the fixed part, a pressure equalizing groove is formed in the end face of the fixed part, a static pressure throttling structure is arranged in the pressure equalizing groove and penetrates through the back face of the fixed part, and a vibration suppression flow guide table is arranged on the end face of the movable part. The vibration suppression flow guide table is of a protruding structure with a large base portion and a tip peak-shaped end portion, the tip end of the vibration suppression flow guide table faces the pressure equalizing groove, the tip end and the two sides of the vibration suppression flow guide table are windward sides, and the windward sides can quickly guide airflow to the outlets in the two sides. The flow guide function is strengthened, gas is guided to the two sides in time, direct impact with the end face is avoided, speed loss is reduced, meanwhile, the flow guide structure guides the gas to the two sides in time, vortex caused by long-time staying of high-speed fluid and low-speed fluid in the pressure equalizing cavity is avoided, and the pressure equalizing effect is improved. Good effects of improving the gas pressure fluctuation characteristic in the pressure equalizing tank and inhibiting the cyclone phenomenon are achieved; the static pressure vibration suppression structure is wide in application.

Description

Technical Field

[0001] The invention belongs to the technical field of static pressure air flotation, and in particular relates to a static pressure vibration suppression structure with enhanced flow guidance function. Background Art

[0002] The main working principle of static gas flotation lubrication is that the gas with a certain pressure is continuously supplied from the external gas supply source. The gas produces a pressure drop after the throttling effect of the hole-shaped throttle, and then forms an air film with a certain bearing capacity and rigidity on the friction end face, thereby playing a supporting and lubricating role. The gas eventually flows into the environment from the edge of the bearing. It can realize non-contact operation of the friction pair end face, and has been increasingly used in the fields of seals, bearings, air flotation guides, etc.

[0003] With the development of research and application in the field of hydrostatic air flotation lubrication, people have put forward higher requirements for its stability and reliability. Processing equalizing grooves on the end face is the most commonly used method to improve sealing performance, but the opening of the equalizing groove makes the flow state of the gas after passing through the throttle extremely complicated. The gas will form unstable vortices in the equalizing groove, which will cause micro-vibration of the film thickness and affect the accuracy of precision machining and transmission. On the other hand, it is easy to induce air hammer self-vibration for the end face structure containing a large throttling air cavity. For small-hole throttling hydrostatic seals, bearings and other components, the air film micro-vibration with a vibration amplitude of only 0.01μm~1μm has little effect on its operating state, but the air hammer self-vibration that may be induced by the gas vortex and pressure fluctuation at the throttle outlet needs to be avoided as much as possible, otherwise it will have a destructive effect on the sealing operation.

[0004] Therefore, it is necessary to take certain measures to improve the throttling structure and improve its air film stability without affecting the sealing performance. This is of great significance for improving the working stability and safety of static and dynamic dry gas seals. Summary of the invention

[0005] In view of the technical problems existing in the above-mentioned existing static pressure flotation technology, such as vortices that are easy to generate after the holes, poor airflow stability and micro-vibration of membrane thickness, the first purpose of the present invention is to provide a static pressure suppression vibration structure with enhanced flow diversion function. This structure can effectively reduce the gas vortex generated after the airflow passes through the throttle, and quickly divert the gas in the pressure equalizing tank to both sides to avoid the gathering of a large amount of low-speed airflow, thereby reducing the micro-vibration caused by unstable airflow, so that the static pressure flotation equipment has a longer service life and better sealing performance.

[0006] A second object of the present invention is to provide a static pressure dry gas sealing ring structure.

[0007] A third object of the present invention is to provide a static pressure air floating support structure.

[0008] A fourth object of the present invention is to provide a static pressure plane thrust bearing structure.

[0009] The first object of the present invention is achieved in this way, comprising a fixed part and a moving part corresponding to the fixed part, the fixed part end face is provided with a pressure equalizing groove, the pressure equalizing groove is provided with a static pressure throttling structure, and the static pressure throttling structure runs through the back side of the fixed part, the moving part end face is provided with a vibration-suppressing guide platform, the vibration-suppressing guide platform is a convex structure with a large base and a pointed peak at the end, the tip of the vibration-suppressing guide platform faces the pressure equalizing groove, the tip and both sides of the vibration-suppressing guide platform are the windward side, and the windward side can quickly guide the airflow to the outlets on both sides.

[0010] Preferably, the bottom width of the vibration suppression guide platform is less than or equal to the width of the pressure equalizing groove, and the height of the vibration suppression guide platform is less than the depth of the pressure equalizing groove.

[0011] Preferably, any longitudinal cross-sectional position of the vibration-suppressing guide platform is an isosceles triangle with two sides being concave curves, and the curve is a Haack curve or a super elliptic curve (n<1); specifically, the structure of the vibration-suppressing guide platform is approximately a peak structure, and its ridge line can be directly opposite to the center line of the annular pressure equalizing groove, that is, the tip of the vibration-suppressing guide platform is facing the pressure equalizing groove; the curve adopts a Haack curve or a super elliptic curve (n<1) to further improve the fluid dynamics performance.

[0012] Preferably, before the seal is started, the fixed part and the moving part are fitted together due to the closing force, and the vibration-suppressing guide platform is completely located in the pressure-equalizing groove; when the seal is running, the static pressure effect introduced by the static pressure introduction hole on the sealing end face jointly generates an opening force that separates the sealing end faces. When the opening force is balanced with the closing force, a layer of air film with a thickness of microns is maintained between the end faces to achieve non-contact operation. At this time, after the end faces of the fixed part and the moving part are separated, the part of the vibration-suppressing guide platform that is higher than the thickness of the air film is located in the pressure-equalizing groove, and the rest of the part is located in the radial flow channel of gas between the fixed part and the moving part.

[0013] The second object of the present invention is achieved in this way, including the static vibration suppression structure with enhanced flow guidance function, the fixed part is a static ring, the dynamic part is a dynamic ring, the pressure equalizing groove is opened in a circle along the circumferential direction of the static ring, the static pressure throttling structure is a fan-shaped slit, the fan-shaped slit can realize line source pressure supply, there are multiple static pressure throttling structures and they are evenly spaced along the circumferential direction, and the vibration suppression guide platform is distributed in a circle along the circumferential direction of the dynamic ring.

[0014] Preferably, the fan-shaped slit has a width of 0.05 mm to 0.2 mm, and the circumferential angle of the fan-shaped slit is 2° to 6°. The pressure equalizing groove is an iso-depth groove, the width of the pressure equalizing groove is 0.5 mm to 2 mm, the depth of the pressure equalizing groove is 0.035100 mm to 0.100 mm, the height of the vibration-suppressing guide platform is 0.030 mm to 0.950 mm, and the bottom width of the vibration-suppressing guide platform is 0.5 mm to 2 mm.

[0015] The third purpose of the present invention is achieved in this way, including the static vibration suppression structure with enhanced flow guidance function, the fixed part is a fixed rail, the moving part is a slider, a pressure equalizing groove is opened along the end face of the fixed rail, the static pressure throttling structure is a through hole, there are multiple static pressure throttling structures and they are evenly spaced along the direction of the pressure equalizing groove, and a vibration suppression guide platform is set along the end face of the slider.

[0016] Preferably, the diameter of the through hole is 0.05mm~0.2mm, the pressure equalizing groove is a rectangular equal-depth groove, the width of the pressure equalizing groove is 0.5 mm~2mm, the depth of the pressure equalizing groove is 0.035100mm~0.100mm, the height of the vibration suppression guide platform is 0.030mm~0.950mm, and the bottom width of the vibration suppression guide platform is 0.5mm~2mm.

[0017] The fourth object of the present invention is achieved in this way, including the static vibration suppression structure with enhanced flow guidance function, the fixed part is the fixed end, the moving part is the rotating end, a pressure equalizing groove is opened at the center of the end face of the fixed part, the pressure equalizing groove is circular, the static pressure throttling structure is a through hole, and is located at the center of the pressure equalizing groove, the vibration suppression guide platform is arranged at the center of the end face of the rotating end, and the vibration suppression guide platform is conical.

[0018] Preferably, the diameter of the through hole is 0.05mm~0.2mm, the pressure equalizing groove is a rectangular equal-depth groove, the width of the pressure equalizing groove is 0.5 mm~2mm, the depth of the pressure equalizing groove is 0.035100mm~0.100mm, the height of the vibration suppression guide platform is 0.030mm~0.950mm, and the bottom width of the vibration suppression guide platform is 0.5mm~2mm.

[0019] Compared with the prior art, the present invention has the following technical effects: 1. The static vibration suppression structure of the present invention utilizes the static pressure throttling structure, the pressure equalizing groove and the vibration suppression guide platform to form a guide structure, strengthen the guide function, and guide the gas to both sides in time, avoiding direct impact with the end surface, reducing the speed loss. At the same time, the guide structure guides the gas to both sides in time, which also avoids the vortex caused by the high and low speed fluids staying in the pressure equalizing cavity for a long time, and has a good effect on improving the gas pressure fluctuation characteristics in the pressure equalizing groove and suppressing the cyclone phenomenon. The static vibration suppression structure of the present invention is widely used; 2. The static pressure suppression vibration structure of the present invention can be applied to the dry gas sealing ring structure. In this case, the vibration suppression guide platform is in the shape of a ring-shaped mountain. After the airflow is ejected from the static pressure throttling structure, it is deflected and diverted to both sides of the end face due to the action of the vibration suppression guide platform, thereby avoiding the airflow from directly impacting the sealing end face vertically, reducing the generation of eddy currents, and further avoiding the pressure fluctuation caused by the eddy currents, thereby reducing the fluctuation of the film thickness during operation, reducing the possibility of end face contact operation, and improving the stability of operation. 3. The static vibration suppression structure of the present invention can also be applied to the static pressure air floating support structure. Its principle is similar to that of the sealed vibration suppression structure. In this case, the vibration suppression guide platform is a straight mountain-like structure. After the airflow is ejected from the static pressure throttling structure, the vibration suppression guide platform deflects the vertically ejected airflow and diverts it to both sides of the end surface, thereby avoiding the airflow directly impacting the support table vertically and avoiding the pressure fluctuation caused by the vortex, thereby reducing the amplitude of the air floating table jumping up and down during operation, and improving the accuracy of the air floating support structure. 4. The static vibration suppression structure of the present invention can also be applied to a static pressure plane thrust bearing structure. The vibration suppression guide platform is in a peak shape. After the airflow is ejected from the static pressure throttling structure, it is deflected and diverted to the surroundings due to the action of the vibration suppression guide platform, thereby avoiding the airflow directly impacting the bearing surface vertically, reducing the generation of eddy currents and fluctuations, reducing the radial runout caused by pressure fluctuations, and improving the operating stability of the bearing. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the static vibration suppression structure with enhanced flow diversion function of the present invention; Figure 2 It is a schematic diagram of the dimensions of the static vibration suppression structure with enhanced flow diversion function of the present invention; Figure 3 It is a structural schematic diagram of a static pressure dry gas sealing ring structure; Figure 4 It is a structural schematic diagram of a static pressure air floating support structure; Figure 5 It is a structural schematic diagram of a static pressure plane thrust bearing structure; In the figure: 1-fixed part, 2-moving part, 3-static pressure throttling structure, 4-pressure equalizing groove, 5-vibration suppression guide platform, 6-section curve of vibration suppression guide platform. DETAILED DESCRIPTION

[0021] The present invention is further described below in conjunction with the embodiments and drawings, but the present invention is not limited in any way. Any changes or substitutions made based on the teachings of the present invention belong to the protection scope of the present invention.

[0022] Example 1 Attached Figure 1~Figure 2 As shown, the static vibration suppression structure with enhanced flow guiding function of this embodiment includes a fixed part 1 and a moving part 2 corresponding to the fixed part 1, the fixed part 1 is provided with a pressure equalizing groove 4 on the end face, a static pressure throttling structure 3 is provided in the pressure equalizing groove 4, and the static pressure throttling structure 3 runs through the back side of the fixed part 1, and the moving part 2 is provided with a vibration suppression guide platform 5 on the end face, the vibration suppression guide platform 5 is a convex structure with a large base and a pointed peak at the end, and the tip of the vibration suppression guide platform 5 faces the pressure equalizing groove 4.

[0023] Example 2 The static vibration suppression structure with enhanced flow guiding function in this embodiment is based on the embodiment 1, the bottom width of the vibration suppression flow guiding platform 5 is less than or equal to the width of the pressure equalizing groove 4, and the height of the vibration suppression flow guiding platform 5 is less than the depth of the pressure equalizing groove 4; Figure 2 middle, h d Indicates the height of the vibration suppression guide platform 5, h j Indicates the depth of the pressure equalizing tank 4, w d Indicates the bottom width of the vibration suppression guide platform 5.

[0024] Example 3 The static vibration suppression structure with enhanced flow guiding function of this embodiment is based on the embodiment 2. When the fixed part 1 and the moving part 2 are in contact, the vibration suppression guide platform 5 is completely located in the pressure equalizing groove 4; when the end faces of the fixed part 1 and the moving part 2 are separated, the part of the vibration suppression guide platform 5 that is higher than the thickness of the air film is located in the pressure equalizing groove 4, and the remaining part is located in the radial flow channel of the gas between the fixed part 1 and the moving part 2.

[0025] Example 4 The static vibration suppression structure with enhanced flow guiding function of this embodiment is based on the third embodiment. Any longitudinal cross-section position of the vibration suppression flow guiding platform 5 is an isosceles triangle with two sides being concave curves, and the curve is a Haack family curve.

[0026] Example 5 The static vibration suppression structure with enhanced flow guiding function of this embodiment is based on the third embodiment. Any longitudinal cross-section position of the vibration suppression flow guiding platform 5 is an isosceles triangle with two sides being concave curves, and the curve is a super elliptical curve (n<1).

[0027] The working principle and working process of the static vibration suppression structure with enhanced flow diversion function: during operation, the externally pressurized or self-pressurized sealing gas reaches the pressure equalizing groove 4 through the static pressure throttling structure 3, generating the initial throttling. After the airflow passes through the static pressure throttling structure 3, it will flow head-on to the corresponding vibration suppression guide platform 5. Thanks to the two sides of the vibration suppression guide platform 5, the airflow can be quickly guided to flow out of the end face gap between the fixed part 1 and the moving part 2 on both sides, reducing the accumulation of cyclones in the pressure equalizing chamber and reducing pressure fluctuations. After the pressure equalizing chamber evenly distributes the pressure and performs the secondary throttling, the static pressure effect is used to generate a static pressure opening force between the end faces to balance the load, thereby forming a micron-thick air film between the end faces to achieve support and lubrication.

[0028] Example 6 Attached Figure 3As shown, the static pressure dry gas sealing ring structure of this embodiment includes the static vibration suppression structure of embodiment 4 with enhanced flow guidance function, the fixed part 1 is a static ring, the dynamic part 2 is a dynamic ring, the pressure equalizing groove 4 is opened in a circle along the circumferential direction of the static ring, the static pressure throttling structure 3 is a fan-shaped slit, and there are multiple static pressure throttling structures 3 and they are evenly spaced along the circumferential direction, and the vibration suppression guide platform 5 is distributed in a circle along the circumferential direction of the dynamic ring; the width of the fan-shaped slit is 0.05mm, and the circumferential angle of the fan-shaped slit is 2°, the pressure equalizing groove 4 is an equal depth groove, the width of the pressure equalizing groove 4 is 2mm, the depth of the pressure equalizing groove 4 is 0.035100mm, the height of the vibration suppression guide platform 5 is 0.030mm, and the bottom width of the vibration suppression guide platform 5 is 0.5mm.

[0029] Example 7 The static pressure dry gas sealing ring structure of the present embodiment includes the static vibration suppression structure with enhanced flow guiding function of the fourth embodiment. The static pressure dry gas sealing ring structure of the present embodiment is the same as the sixth embodiment except that the width of the fan-shaped slit is 0.2 mm, the circular angle of the fan-shaped slit is 6°, the width of the pressure equalizing groove 4 is 0.5 mm, the depth of the pressure equalizing groove 4 is 0.100 mm, the height of the vibration suppression guide platform 5 is 0.950 mm, and the bottom width of the vibration suppression guide platform 5 is 0.5 mm.

[0030] Example 8 The static pressure dry gas sealing ring structure of the present embodiment includes the static vibration suppression structure with enhanced flow guiding function of the present embodiment 5. The static pressure dry gas sealing ring structure of the present embodiment is the same as the present embodiment 6 except that the width of the fan-shaped slit is 0.125 mm, the circular angle of the fan-shaped slit is 4°, the width of the pressure equalizing groove 4 is 1.25 mm, the depth of the pressure equalizing groove 4 is 0.06755 mm, the height of the vibration suppression guide platform 5 is 0.49 mm, and the bottom width of the vibration suppression guide platform 5 is 1.25 mm.

[0031] Example 9 The static pressure dry gas sealing ring structure of this embodiment includes the static vibration suppression structure with enhanced flow guiding function of embodiment 5. The static pressure dry gas sealing ring structure of this embodiment is the same as embodiment 8 except that the width of the pressure equalizing groove 4 is 2 mm and the bottom width of the vibration suppression flow guiding platform 5 is 2 mm.

[0032] Example 10 The static pressure dry gas sealing ring structure of this embodiment includes the static vibration suppression structure with enhanced flow guiding function of embodiment 4. The static pressure dry gas sealing ring structure of this embodiment is the same as embodiment 6 except that the width of the fan-shaped slit is 0.05 mm, the circumferential angle of the fan-shaped slit is 2°, the width of the pressure equalizing groove 4 is 2 mm, the depth of the pressure equalizing groove 4 is 0.0351 mm, the height of the vibration suppression guide platform 5 is 0.03 mm, and the bottom width of the vibration suppression guide platform 5 is 1 mm. The static pressure dry gas sealing ring structure with vibration suppression in this embodiment is compared with the static pressure dry gas sealing ring without guide platform in the prior art through simulation experiment. The working parameters are: external pressure P o =0.3MPa, internal pressure P i =0.1013MPa, slit inlet pressure P s =0.6MPa speed n =1087.08rad / s, and compare the average value of the instantaneous pressure on the end surface deviating from the average pressure at each moment after stable operation To measure the pressure fluctuation during operation; the experimental results are shown in Table 1; Table 1 Comparative experimental results It can be seen from the above results that, under the same working conditions, the static pressure dry gas sealing ring structure with vibration suppression of the present invention has a much smaller pressure fluctuation amplitude and leakage rate than the static pressure dry gas sealing ring without a guide platform, which is only 68.44% and 67.81% of the latter. That is to say, on the basis of the existing static pressure throttling structure, the introduction of the present invention can significantly reduce the end face pressure fluctuation and leakage rate; therefore, the present invention has a positive effect on improving the anti-interference ability and sealing performance of static pressure sealing; The working principle and working process of the static pressure dry gas sealing ring structure: after the gas is throttled through the slit, the pressure drops and the flow rate decreases. The flow rate through the slit is related to the pressure at the throttling slit, but when the pressure drops to a certain level, the flow rate will no longer change and play a role in throttling and limiting the flow; the static pressure effect introduced by the slit works together to produce an opening force that separates the sealing end faces. When the opening force is balanced with the closing force, a layer of air film with a thickness of microns is maintained between the end faces to achieve non-contact operation.

[0033] Embodiment 11 Attached Figure 4 As shown, the static pressure air floating support structure of this embodiment includes the static vibration suppression structure of embodiment 4 with enhanced diversion function, the fixed part 1 is a fixed rail, the moving part 2 is a slider, a pressure equalizing groove 4 is opened along the end face of the fixed rail, the static pressure throttling structure 3 is a through hole, there are multiple static pressure throttling structures 3 and they are evenly spaced along the direction of the pressure equalizing groove 4, and a vibration suppression guide platform 5 is arranged along the end face of the slider; the diameter of the through hole is 0.05mm, the pressure equalizing groove 4 is a rectangular equal-depth groove, the width of the pressure equalizing groove 4 is 2mm, the depth of the pressure equalizing groove 4 is 0.035100mm, the height of the vibration suppression guide platform 5 is 0.030mm, and the bottom width of the vibration suppression guide platform 5 is 0.5mm.

[0034] Example 12 The static pressure air floating support structure of this embodiment includes the static pressure vibration suppression structure with enhanced flow guiding function of embodiment 4. The static pressure dry gas sealing ring structure of this embodiment is the same as embodiment 11 except that the diameter of the through hole is 0.2 mm, the width of the pressure equalizing groove 4 is 0.5 mm, the depth of the pressure equalizing groove 4 is 0.100 mm, the height of the vibration suppression guide platform 5 is 0.950 mm, and the bottom width of the vibration suppression guide platform 5 is 0.5 mm.

[0035] Embodiment 13 The static pressure air floating support structure of this embodiment includes the static pressure vibration suppression structure with enhanced flow guiding function of embodiment 5. The static pressure dry gas sealing ring structure of this embodiment is the same as embodiment 11 except that the diameter of the through hole is 0.125mm, the width of the pressure equalizing groove 4 is 1.25mm, the depth of the pressure equalizing groove 4 is 0.06755mm, the height of the vibration suppression guide platform 5 is 0.49mm, and the bottom width of the vibration suppression guide platform 5 is 1.25mm.

[0036] Embodiment 14 The static pressure air bearing support structure of this embodiment includes the static pressure vibration suppression structure with enhanced flow guiding function of embodiment 5. The static pressure dry gas sealing ring structure of this embodiment is the same as embodiment 11 except that the width of the pressure equalizing groove 4 is 2 mm and the bottom width of the vibration suppression flow guiding platform 5 is 2 mm. The static pressure air floating support structure with vibration suppression effect in this embodiment is compared with the static pressure air floating support structure without guide platform in the prior art through simulation experiment. The working parameters are: external pressure P o =0.3Mpa, internal pressure P i =0.1013Mpa, throttle inlet pressure P s =0.6Mpa, and compare the average value of the instantaneous pressure on the end surface at each moment after stable operation, which deviates from the average pressure To measure the pressure fluctuation during operation; the experimental results are shown in Table 2; Table 2 Comparative experimental results It can be seen from the above results that, under the same working conditions, the static pressure air floating support structure with vibration suppression of the present invention has a much smaller pressure fluctuation amplitude than the static pressure air floating support structure without a guide platform, which is only 17.04% of the latter. That is to say, on the basis of the existing static pressure throttling structure, the introduction of the present invention can significantly reduce the end surface pressure fluctuation; therefore, the present invention has a positive effect on improving the anti-interference ability of the static pressure air floating support structure; The working principle and working process of the static pressure air floating support structure: the external compressed gas is introduced into the gap through the throttle hole (through hole), and it is suspended by its static pressure. The function of the throttle hole is to adjust the pressure in the gap when the gap changes, so that the guide rail has rigidity; the air floating guide rail is a sliding pair composed of a guide rail and a slide, and the guide rail and the slide are lubricated by an air film.

[0037] Embodiment 15 Attached Figure 5 As shown, the static pressure plane thrust bearing structure of this embodiment includes the static vibration suppression structure of embodiment 4 with enhanced flow guiding function, the fixed part 1 is the fixed end, the moving part 2 is the rotating end, a pressure equalizing groove 4 is opened at the center of the end face of the fixed part 1, and the pressure equalizing groove 4 is circular. The static pressure throttling structure 3 is a through hole and is located at the center of the pressure equalizing groove 4. The vibration suppression guide platform 5 is arranged at the center of the end face of the rotating end, and the vibration suppression guide platform 5 is conical; the diameter of the through hole is 0.05mm, the pressure equalizing groove 4 is a circular equal-depth groove, the width of the pressure equalizing groove 4 is 2mm, the depth of the pressure equalizing groove 4 is 0.035100mm, the height of the vibration suppression guide platform 5 is 0.030mm, and the bottom width of the vibration suppression guide platform 5 is 0.5mm.

[0038] Example 16 The static pressure planar thrust bearing structure of the present embodiment includes the static pressure vibration suppression structure with enhanced flow guiding function of the present embodiment 4. The static pressure dry gas sealing ring structure of the present embodiment is the same as the present embodiment 15 except that the diameter of the through hole is 0.2 mm, the width of the pressure equalizing groove 4 is 0.5 mm, the depth of the pressure equalizing groove 4 is 0.100 mm, the height of the vibration suppression guide platform 5 is 0.950 mm, and the bottom width of the vibration suppression guide platform 5 is 0.5 mm.

[0039] Embodiment 17 The static pressure planar thrust bearing structure of the present embodiment includes the static pressure vibration suppression structure of the embodiment 5 with enhanced flow guiding function. The static pressure dry gas sealing ring structure of the present embodiment is the same as the embodiment 15 except that the through hole diameter is 0.125mm, the width of the pressure equalizing groove 4 is 1.25mm, the depth of the pressure equalizing groove 4 is 0.06755mm, the height of the vibration suppression guide platform 5 is 0.49mm, and the bottom width of the vibration suppression guide platform 5 is 1.25mm.

[0040] Embodiment 18 The static pressure plane thrust bearing structure of this embodiment includes the static pressure suppression vibration structure with enhanced flow guiding function of embodiment 5. The static pressure dry gas sealing ring structure of this embodiment is the same as embodiment 17 except that the width of the pressure equalizing groove 4 is 2 mm and the bottom width of the vibration suppression flow guiding platform 5 is 2 mm. The static pressure plane thrust bearing structure with vibration suppression effect in this embodiment is compared with the static pressure plane thrust bearing structure without guide platform in the prior art through simulation experiment. The working parameters are: external pressure P o=0.3Mpa, internal pressure P i =0.1013Mpa, throttle inlet pressure P s =0.6Mpa, and compare the average value of the instantaneous pressure on the end surface at each moment after stable operation, which deviates from the average pressure To measure the pressure fluctuation during operation; the experimental results are shown in Table 3; Table 3 Comparative experimental results It can be seen from the above results that, under the same working conditions, the pressure fluctuation amplitude of the static pressure plane thrust bearing structure with vibration suppression effect of the present invention is much smaller than that of the static pressure plane thrust bearing structure without guide platform, which is only 88.25% of the latter. That is to say, on the basis of the existing static pressure throttling structure, the introduction of the present invention can significantly reduce the end surface pressure fluctuation; therefore, the present invention has a positive effect on improving the anti-interference ability of the static pressure plane thrust bearing structure; The working principle and working process of the hydrostatic plane thrust bearing structure: When the pressure medium is injected and encounters the raised part (vibration suppression guide table), the gas will be compressed and form a pressure area, which will generate static pressure, causing the gasket to move up or down and bear axial load; due to the formation of an air film or oil film between the hydrostatic gasket and the gasket, the friction becomes very small, so the bearing can withstand huge axial loads and maintain a good operating condition.

Claims

1. A static vibration suppression structure with enhanced flow guiding function, comprising a fixed part (1) and a moving part (2) corresponding to the fixed part (1), characterized in that The fixed portion (1) has an end surface provided with a pressure equalizing groove (4), a static pressure throttling structure (3) is provided in the pressure equalizing groove (4), and the static pressure throttling structure (3) passes through the back of the fixed portion (1), and the movable portion (2) has an end surface provided with a vibration suppression guide platform (5), the vibration suppression guide platform (5) being a convex structure with a large base and a peak-shaped tip at the end, and the tip of the vibration suppression guide platform (5) faces the pressure equalizing groove (4).

2. The static vibration suppression structure with enhanced flow guiding function according to claim 1, characterized in that The width of the bottom edge of the vibration suppression guide platform (5) is less than or equal to the width of the pressure equalizing groove (4), and the height of the vibration suppression guide platform (5) is less than the depth of the pressure equalizing groove (4).

3. The static vibration suppression structure with enhanced flow guiding function according to claim 1, characterized in that Any longitudinal cross-section position of the vibration suppression guide platform (5) is in the form of an isosceles triangle with curved sides and two sides being concave curves, and the curves are Haack curves or super elliptical curves.

4. The static vibration suppression structure with enhanced flow guiding function according to claim 1, characterized in that When the fixed part (1) and the moving part (2) are in contact, the entire vibration-suppressing guide platform (5) is located in the pressure-equalizing groove (4); when the end faces of the fixed part (1) and the moving part (2) are separated, the portion of the vibration-suppressing guide platform (5) that is higher than the thickness of the air film is located in the pressure-equalizing groove (4), and the remaining portion is located in the radial gas flow channel between the fixed part (1) and the moving part (2).

5. A static pressure dry gas sealing ring structure, characterized in that It comprises a static vibration suppression structure with enhanced flow guiding function as claimed in any one of claims 1 to 4, wherein the fixed part (1) is a static ring, the dynamic part (2) is a dynamic ring, the pressure equalizing groove (4) is provided in a circle along the circumferential direction of the static ring, the static pressure throttling structure (3) is a fan-shaped slit, there are multiple static pressure throttling structures (3) and they are evenly spaced along the circumferential direction, and the vibration suppression flow guiding platform (5) is distributed in a circle along the circumferential direction of the dynamic ring.

6. The static pressure dry gas sealing ring structure according to claim 5 is characterized in that The fan-shaped slit has a width of 0.05 mm to 0.2 mm, and the subtended circular angle of the fan-shaped slit is 2° to 6°. The pressure equalizing groove (4) is an iso-depth groove, and the width of the pressure equalizing groove (4) is 0.5 mm to 2 mm. The depth of the pressure equalizing groove (4) is 0.035100 mm to 0.100 mm. The vibration suppression guide platform (5) has a height of 0.030 mm to 0.950 mm, and the bottom width of the vibration suppression guide platform (5) is 0.5 mm to 2 mm.

7. A static pressure air floating support structure, characterized in that It comprises a static vibration suppression structure with enhanced flow guiding function as claimed in any one of claims 1 to 4, wherein the fixed part (1) is a fixed rail, the moving part (2) is a slider, a pressure equalizing groove (4) is provided along the end face of the fixed rail, the static pressure throttling structure (3) is a through hole, there are a plurality of static pressure throttling structures (3) which are evenly spaced along the direction of the pressure equalizing groove (4), and a vibration suppression flow guiding platform (5) is provided along the direction of the end face of the slider.

8. The static pressure air floating support structure according to claim 7, characterized in that The diameter of the through hole is 0.05 mm to 0.2 mm, the pressure equalizing groove (4) is a rectangular groove of equal depth, the width of the pressure equalizing groove (4) is 0.5 mm to 2 mm, the depth of the pressure equalizing groove (4) is 0.035100 mm to 0.100 mm, the height of the vibration suppression guide platform (5) is 0.030 mm to 0.950 mm, and the bottom width of the vibration suppression guide platform (5) is 0.5 mm to 2 mm.

9. A static pressure plane thrust bearing structure, characterized in that The invention comprises a static vibration suppression structure with enhanced flow guiding function as claimed in any one of claims 1 to 4, wherein the fixed part (1) is a fixed end, the moving part (2) is a rotating end, a pressure equalizing groove (4) is provided at the center of the end face of the fixed part (1), and the pressure equalizing groove (4) is circular, the static pressure throttling structure (3) is a through hole and is located at the center of the pressure equalizing groove (4), and the vibration suppression flow guiding platform (5) is provided at the center of the end face of the rotating end, and the vibration suppression flow guiding platform (5) is conical.

10. The static pressure plane thrust bearing structure according to claim 1, characterized in that The diameter of the through hole is 0.05 mm to 0.2 mm, the pressure equalizing groove (4) is a circular groove of equal depth, the width of the pressure equalizing groove (4) is 0.5 mm to 2 mm, the depth of the pressure equalizing groove (4) is 0.035100 mm to 0.100 mm, the height of the vibration suppression guide platform (5) is 0.030 mm to 0.950 mm, and the bottom width of the vibration suppression guide platform (5) is 0.5 mm to 2 mm.

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