Efficient grinding and polishing device for gallium nitride single crystal substrate

Abstract

The invention discloses a gallium nitride single crystal substrate efficient grinding and polishing device, and relates to the technical field of gallium nitride, the gallium nitride single crystal substrate efficient grinding and polishing device comprises a base, a processing table is arranged at the upper end of the base, four sets of fixing columns are arranged at the upper end of the processing table, and a set of lifting rods is arranged between the side walls of every two front and back sets of fixing columns; first sliding blocks are arranged between the two ends of the two lifting rods and the inner walls of the fixing columns correspondingly, a connecting frame is arranged at the upper ends of the two lifting rods, a fixing frame is arranged at the upper ends of the four fixing columns, an air cylinder is arranged in the middle of the fixing frame, and the lower end of the air cylinder is connected with the upper end of the connecting frame. Two sets of sliding rods and a set of first lead screws are arranged between the side walls of the two sets of lifting rods. According to the efficient grinding and polishing device for the gallium nitride single crystal substrate, people do not need to manually switch grinding discs or polishing discs with different mesh numbers in the grinding process, and the grinding and polishing process is more efficient.

Description

Technical Field

[0001] The present invention relates to the technical field of gallium nitride, and in particular to a high-efficiency grinding and polishing device for a gallium nitride single crystal substrate. Background Art

[0002] As a third-generation semiconductor, gallium nitride is a wide bandgap semiconductor material with the characteristics of high breakdown electric field, high saturated electron velocity, high thermal conductivity, high electron density, high mobility, and high power tolerance. It is widely used in the manufacture of high-temperature, high-frequency, high-power and radiation-resistant electronic devices, such as semiconductor lighting, 5G communications, satellite communications, optical communications, power electronics, aerospace, etc. It has been considered a new driving force for the development of today's electronics industry and one of the most promising third-generation semiconductor materials.

[0003] In the existing technology, when grinding and polishing a gallium nitride single crystal substrate, in order to achieve a better grinding effect, it is necessary to replace different grinding discs and perform multiple grinding procedures on the gallium nitride single crystal substrate. However, the process of replacing the grinding disc makes the grinding operation more cumbersome, and the operation of replacing the polishing head is also more troublesome. In addition, during the grinding and polishing process, people are required to manually add abrasives or polishing liquids, which consumes a lot of time and reduces the processing efficiency. In order to solve the shortcomings of the existing technology, we propose a high-efficiency grinding and polishing device for gallium nitride single crystal substrates. Summary of the invention

[0004] The main purpose of the present invention is to provide a high-efficiency grinding and polishing device for gallium nitride single crystal substrates, which can effectively solve the problems in the background technology.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] A high-efficiency grinding and polishing device for a gallium nitride single crystal substrate comprises a base, a processing table is arranged at the upper end of the base, four groups of fixed columns are arranged at the upper end of the processing table, a group of lifting rods is arranged between the side walls of each front and rear two groups of fixed columns, a No. 1 sliding block is arranged between the two ends of the two groups of lifting rods and the inner wall of the fixed column, a connecting frame is arranged at the upper end of the two groups of lifting rods, a fixing frame is arranged at the upper end of the four groups of fixed columns, a cylinder is arranged in the middle of the fixing frame, and the lower end of the cylinder is connected to the upper end of the connecting frame Two groups of sliding rods and a group of No. 1 screw rods are arranged between the side walls of the two groups of lifting rods, the No. 1 screw rod is arranged between the two groups of sliding rods, a No. 1 motor is arranged at the rear end of the rear lifting rod, the No. 1 motor is connected to one end of the No. 1 screw rod, a group of moving rods are arranged on the outer wall of the sliding rod and the No. 1 screw rod, a connecting track frame is arranged at the lower end of the moving rod, a No. 1 driving box is arranged on the outer wall of one end of the connecting track frame, a No. 2 sliding block is arranged inside the connecting track frame, and the middle of the No. 2 sliding block is connected to the A No. 2 screw rod is arranged inside the track frame, a No. 2 motor is arranged inside the No. 1 drive box, the No. 2 motor is connected to the No. 2 screw rod, a connecting rod is arranged at the lower end of the No. 2 sliding block, a No. 2 drive box is arranged at the lower end of the connecting rod, a limiting block is arranged at the front end of the No. 2 drive box, a rotating cylinder is arranged in the middle of the limiting block, a No. 3 motor is arranged inside the No. 2 drive box, the No. 3 motor is connected to the rear end of the rotating cylinder, and limiting round heads are arranged on the outer walls around the rotating cylinder. A spring is provided at the lower end of the head inside the rotating cylinder, a connecting disk is provided at the front end of the rotating cylinder in front of the limit block, a mounting block is provided at the front end of the connecting disk, a balancing frame is provided between the front end of the mounting block and the two groups of sliding rods, four groups of No. 4 motors are provided inside the mounting block, and rotating rods are provided at the ends of the four groups of No. 4 motors outside the mounting block, grinding disks are provided at the ends of three groups of rotating rods, and polishing disks are provided at the end of one group of rotating rods, and polishing pads are provided on the outer wall of the polishing disk.

[0007] Preferably, a group of fixing rods is arranged between the lower side walls of the left and right groups of fixing columns, two groups of fixing plates are arranged on the upper ends of the two groups of fixing rods, mounting seats are arranged in the middle of the upper ends of the fixing plates, rotating seats are arranged on the upper ends of the mounting seats, spray guns are arranged in the middle of the rotating seats, transverse bevel gears are arranged on the outer walls of the upper ends of the mounting seats, vertical bevel gears are arranged on the upper ends of one side of the transverse bevel gears, the middle of the vertical bevel gears are connected with the rotating seat, a No. 5 motor is arranged on the outside of the vertical bevel gears, a fixing ring is arranged on the outer wall of the No. 5 motor, a supporting rod is arranged at the lower end of the supporting rod, a sliding seat is arranged at the lower end of the supporting rod, a sliding rail is arranged between the sliding seat and the fixing plate, two groups of abrasive container are arranged on the inner front side of the base, and a Two groups of polishing liquid containers are arranged, and the rear ends of the four groups of spray guns are all provided with delivery hoses. The four groups of delivery hoses pass through the outer wall of the base and are respectively connected with the two groups of abrasive containers and the two groups of polishing liquid containers. A vacuum adsorption table is arranged in the middle of the upper end of the processing table, and a reflux groove is arranged around the upper end of the processing table. A reflux pipe is arranged inside the base at the lower end of the rear side of the reflux groove. A plurality of exhaust holes are arranged in the middle of the upper end of the vacuum adsorption table, and soft rubber pads are arranged around the upper end of the vacuum adsorption table. An exhaust pipe is arranged inside the base at the lower end of the vacuum adsorption table, and a vacuum pump is arranged at the bottom of the base at the lower end of the exhaust pipe. An exhaust pipe is arranged at the front end of the vacuum pump, and a sealing cover is arranged at the front end of the exhaust pipe. An exhaust grille is arranged on the front end outer wall of the base, and the sealing cover is connected to the inner side of the exhaust grille.

[0008] Preferably, the No. 1 sliding block is slidably connected to the inner wall of the fixed column, the lifting rod is slidably connected to the fixed column through the set No. 1 sliding block, the fixed frame is fixedly connected to the fixed column, the connecting frame is fixedly connected to the lifting rod, a connecting port is provided between the lower end of the cylinder and the connecting frame, and the cylinder is detachably connected to the connecting frame through the set connecting port.

[0009] Preferably, a rotating interface is provided between the No. 1 screw rod and the side walls of the two groups of lifting rods, and the No. 1 screw rod is rotatably connected to the side walls of the lifting rods through the rotating interface. A threaded hole is provided between the No. 1 screw rod and the moving rod, and the No. 1 screw rod is threadedly connected to the moving rod through the threaded hole. A sliding hole is provided between the sliding rod and the moving rod, and the moving rod is slidably connected to the sliding rod through the sliding hole.

[0010] Preferably, the No. 2 sliding block is slidably connected to the connecting track frame, a threaded hole is provided between the No. 2 screw rod and the No. 2 sliding block, the No. 2 sliding block is threadedly connected to the No. 2 screw rod through the provided threaded hole, a rotating interface is provided between the end of the No. 2 screw rod and the inner wall of the connecting track frame, the No. 2 screw rod is rotatably connected to the inner wall of the connecting track frame through the provided rotating interface, a rotating interface is provided between the rear end of the rotating cylinder and the front end of the No. 2 drive box, and the rear end of the rotating cylinder is rotatably connected to the front end of the No. 2 drive box through the provided rotating interface.

[0011] Preferably, the limit block is fixedly connected to the No. 2 driving box, a rotating interface is provided between the rotating cylinder and the inner wall of the limit block, the rotating cylinder is rotatably connected to the inner wall of the limit block through the provided rotating interface, a movable hole is provided between the limit round head and the side wall of the rotating cylinder, the limit round head is movably connected to the inner wall of the rotating cylinder through the provided movable hole, the four groups of limit round heads are in the same plane and at equal distances in the side wall of the rotating cylinder, the inner wall of the limit block is provided with grooves around it, and the four groups of grooves provided on the inner wall of the limit block correspond vertically up and down and horizontally left and right The limiting round head is movably connected with the groove set on the inner wall of the limiting block, and a rotating interface is respectively set between the rotating rod and the side wall of the mounting block, and the rotating rod is rotatably connected to the side wall of the mounting block through the set rotating interface. The three groups of grinding discs have different mesh numbers, and a rotating interface is set between the mounting block and the balancing frame. The mounting block is rotatably connected to the balancing frame through the set rotating interface. The mounting block can also be slidably connected to the balancing frame, and a sliding interface is set between the upper end of the balancing frame and the two groups of sliding rods, and the balancing frame is slidably connected to the two groups of sliding rods through the set sliding interface.

[0012] Preferably, a mounting interface is provided between the fixed disk and the fixed rod, and the fixed disk is detachably connected to the upper end of the fixed rod through the provided mounting interface. A rotating interface is provided between the lower end of the rotating seat and the upper end of the mounting seat, and the rotating seat is rotatably connected to the mounting seat through the provided rotating interface. The vacuum adsorption table is slightly raised at the upper end of the processing table, and a small-angle slope is formed between the inner side of the reflux groove and the outer side of the vacuum adsorption table.

[0013] Preferably, a rotating interface is provided between the side wall of the spray gun and the inner wall of the rotating seat, the spray gun is rotatably connected to the inner wall of the rotating seat through the provided rotating interface, the transverse bevel gear is fixedly connected to the mounting seat, the vertical bevel gear is meshed with the transverse bevel gear, a connecting shaft is provided between the vertical bevel gear and the side wall of the spray gun, and the connecting shaft provided between the vertical bevel gear and the spray gun passes through the side wall of the rotating seat and is rotatably connected to the rotating seat.

[0014] Preferably, the No. 5 motor is detachably connected to the fixing ring, the sliding seat is slidably connected to the sliding track, the delivery hose is respectively provided with connecting ports between the side walls of the abrasive container and the polishing liquid container, and the inside of the abrasive container and the polishing liquid container are both provided with delivery pumps, and the delivery hose passes through the connecting ports on the side walls of the abrasive container and the polishing liquid container and is connected to the delivery pumps inside the abrasive container and the polishing liquid container.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. In the present invention, the mounting block, rotating rod, grinding disc and polishing disc provided allow the device to grind and polish the gallium nitride single crystal substrate without the need for people to manually replace the grinding disc. The mesh sizes of the three groups of grinding discs are different from each other. When it is necessary to switch to grinding discs of other mesh sizes, the mounting block can be rotated, and the grinding discs of other mesh sizes can be rotated downward for grinding. When performing the polishing process, the polishing disc can be rotated downward. There is no need to disassemble and replace the grinding disc, which saves labor and time, and has a higher processing efficiency for gallium nitride single crystal substrates.

[0017] 2. In the present invention, the rotating cylinder, limiting round head, spring and limiting block are provided to make the position of the grinding disc or polishing disc after rotation more accurate, and to keep the grinding disc or polishing disc in a horizontal state after rotation. Four groups of grooves are arranged around the inner wall of the limiting block, which correspond to the four groups of limiting round heads respectively. The limiting round heads will be stuck in the middle of each group of corresponding grooves. When the rotating cylinder rotates, the limiting round heads will be retracted into the inner wall of the rotating cylinder by the spring, and will extend again when contacting the grooves, so as to maintain the position of the rotating cylinder and the mounting block, so that the grinding disc and the gallium nitride single crystal substrate can fit closely without tilting, and the grinding and polishing effects can be better.

[0018] 3. In the present invention, the connecting track frame, No. 2 screw rod and No. 2 sliding block can allow the mounting block to move horizontally, the moving rod, sliding rod and No. 1 screw rod can allow the mounting block to move longitudinally, and the fixed frame, cylinder, connecting frame and lifting rod can allow the mounting block to move up and down. The mounting block can then drive the grinding disc and the polishing disc to move up, down, left, right, front and back, making the movement of the grinding disc or the polishing disc more flexible and the grinding and polishing process more convenient.

[0019] 4. In the present invention, the fixed rod, spray gun, abrasive container and polishing liquid container can automatically add abrasive and polishing liquid during the grinding and polishing process, without the need for manual addition, saving labor and time, making the grinding and polishing operation process more convenient and efficient.

[0020] 5. In the present invention, the rotating seat, vertical bevel gear, transverse bevel gear, sliding seat, sliding track and mounting seat are provided so that the spray gun can automatically turn and adjust the angle when adding abrasives and polishing liquid, so that the abrasives and polishing liquid are distributed more widely on the gallium nitride single crystal substrate, the abrasives and polishing liquid are added more evenly, and the grinding and polishing effects are better.

[0021] 6. In the present invention, the reflux groove and reflux pipe are provided to recycle the excess abrasive and polishing liquid, so that the upper end of the processing table can be easily cleaned, making the working environment tidier. The vacuum adsorption table is slightly raised at the upper end of the processing table, which is conducive to the abrasive and polishing liquid flowing to the middle of the reflux groove. The exhaust holes, soft rubber pads and vacuum exhausters are provided to facilitate the adsorption and fixation of the gallium nitride single crystal substrate to prevent displacement during the grinding and polishing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a schematic diagram of the lifting rod connection structure of the present invention;

[0024] Figure 3 It is a schematic diagram of the connection structure of the connection track frame of the present invention;

[0025] Figure 4 It is a schematic diagram of the connection structure of the second drive box of the present invention;

[0026] Figure 5 It is a schematic diagram of the structure of the rotating drum of the present invention;

[0027] Figure 6 It is a schematic diagram of the internal structure of the mounting block of the present invention;

[0028] Figure 7 It is a schematic diagram of the spray gun connection structure of the present invention;

[0029] Figure 8 It is a schematic diagram of the internal structure of the base of the present invention;

[0030] Fig. 9 It is a schematic diagram of the connection structure of the vacuum adsorption table of the present invention.

[0031] In the figure: 1, base; 2, processing table; 3, vacuum adsorption table; 4, reflow tank; 5, fixed column; 6, fixed frame; 7, cylinder; 8, lifting rod; 9, fixed rod; 10, spray gun; 11, delivery hose; 12, connecting frame; 13, No. 1 sliding block; 14, No. 1 screw rod; 15, sliding rod; 16, No. 1 motor; 17, moving rod; 18, mounting block; 19, grinding disc; 20, connecting track frame; 21, No. 1 drive box; 22, polishing disc; 23, polishing pad; 24, No. 2 sliding block; 25, No. 2 screw rod; 26, No. 2 motor; 27, connecting rod; 28, No. 2 drive box; 29, limit block; 30. Connecting plate; 31. Rotating cylinder; 32. Limiting round head; 33. Spring; 34. Motor No. 3; 35. Rotating rod; 36. Motor No. 4; 37. Fixed plate; 38. Rotating seat; 39. Vertical bevel gear; 40. Horizontal bevel gear; 41. Motor No. 5; 42. Fixed ring; 43. Support rod; 44. Sliding seat; 45. Sliding track; 46. Mounting seat; 47. Abrasive container; 48. Polishing liquid container; 49. Reflux pipe; 50. Exhaust grille; 51. Exhaust hole; 52. Soft rubber pad; 53. Exhaust pipe; 54. Vacuum pump; 55. Exhaust pipe; 56. Sealing cover; 57. Balancing frame. DETAILED DESCRIPTION

[0032] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0033] like Figure 1As shown, a high-efficiency grinding and polishing device for gallium nitride single crystal substrates comprises a base 1, which is used to support the device. A processing table 2 is arranged on the upper end of the base 1, and the gallium nitride single crystal substrate is ground and polished on the upper end of the processing table 2. A vacuum adsorption table 3 is arranged in the middle of the upper end of the processing table 2, and the gallium nitride single crystal substrate is adsorbed and fixed on the upper end of the vacuum adsorption table 3. The vacuum adsorption table 3 is slightly raised in the middle of the upper end of the processing table 2. A reflow groove 4 is arranged around the upper end of the processing table 2. A slope with a small angle is formed between the surrounding of the vacuum adsorption table 3 and the reflow groove 4, so that the abrasive and polishing liquid added in the grinding and polishing process can flow to the reflow groove 4 for easy recovery. Fixed columns 5 are arranged around the upper end of the processing table 2, and a lifting rod 8 is arranged between the side walls of each front and rear two groups of fixed columns 5. The lifting rod 8 can move up and down between the side walls of the fixed column 5. A fixing frame 6 is provided at the upper end of the four groups of fixed columns 5. A cylinder 7 is provided in the middle of the fixing frame 6. The fixing frame 6 is used to install and fix the cylinder 7. A group of fixing rods 9 are respectively provided between the lower side walls of the left and right groups of fixed columns 5. Two groups of spray guns 10 are respectively provided at the upper ends of the two groups of fixing rods 9. The two groups of fixing rods 9 are respectively fixed between the side walls of the left and right groups of fixed columns 5 for installing the spray guns 10. The four groups of spray guns 10 are respectively used to add abrasives and polishing liquids to the gallium nitride single crystal substrate. The rear ends of the four groups of spray guns 10 are provided with conveying hoses 11. The conveying hoses 11 are used to convey abrasives or polishing liquids to the inside of the spray guns 10. The rear ends of the conveying hoses 11 pass through the side walls of the base 1 and extend into the inside of the base 1.

[0034] like Figure 1 and Figure 2As shown, a connecting frame 12 is provided at the lower end of the cylinder 7, and the connecting frame 12 is fixed above the side walls of the two groups of lifting rods 8 and connected to the lower end of the cylinder 7. Both ends of the two groups of lifting rods 8 are provided with a No. 1 sliding block 13, and the lifting rod 8 can slide on the side wall of the fixed column 5 through the No. 1 sliding block 13. The telescopic activity of the cylinder 7 can drive the lifting rod 8 to move up and down through the connecting frame 12. Two groups of sliding rods 15 and a group of No. 1 screw rods 14 are provided between the side walls of the two groups of lifting rods 8. The No. 1 screw rod 14 is provided between the two groups of sliding rods 15. A rotating interface is provided between the No. 1 screw rod 14 and the side wall of the lifting rod 8. The No. 1 screw rod 14 can rotate between the side walls of the two groups of lifting rods 8. A No. 1 motor 16 is provided on the outer wall of the rear lifting rod 8. The No. 1 motor 16 is connected to the No. 1 screw rod 14, and the No. 1 motor 16 can drive the No. 1 screw rod 14 to rotate. A moving rod 17 is provided on the outer wall of the sliding rod 15 and the No. 1 screw rod 14, and a rotating interface is provided between the sliding rod 15 and the moving rod 17. A sliding hole is provided, and the moving rod 17 can slide on the outer wall of the sliding rod 15. A threaded hole is provided between the No. 1 screw rod 14 and the moving rod 17, and a threaded hole is provided between the No. 1 screw rod 14 and the moving rod 17. The No. 1 screw rod 14 is threadedly connected with the moving rod 17. When the No. 1 screw rod 14 rotates, the moving rod 17 will move on the outer wall of the No. 1 screw rod 14 and slide on the outer walls of the two sets of sliding rods 15. A mounting block 18 is provided below the moving rod 17. The mounting block 18 is used to install the grinding and polishing device. A balancing frame 57 is provided between the front end of the mounting block 18 and the two sets of sliding rods 15. The balancing frame 57 is used to maintain the balance of the mounting block 18. A rotating interface is provided between the mounting block 18 and the rear end of the balancing frame 57. The mounting block 18 can rotate at the rear end of the balancing frame 57 and can also slide at the rear end of the balancing frame 57. The balancing frame 57 can also slide on the outer wall of the sliding rod 15 to adapt to the front, back, left and right movements and rotation of the mounting block 18.

[0035] like Figure 3 and Figure 4As shown, a connecting track frame 20 is provided at the lower end of the moving rod 17, and a No. 2 sliding block 24 is provided in the middle of the connecting track frame 20. The No. 2 sliding block 24 can slide in the middle of the lower end of the connecting track frame 20. A No. 2 screw rod 25 is provided in the middle of the No. 2 sliding block 24 inside the connecting track frame 20. A threaded hole is provided between the No. 2 screw rod 25 and the No. 2 sliding block 24. The No. 2 screw rod 25 is threadedly connected to the No. 2 sliding block 24 through the provided threaded hole. A rotating interface is provided between the No. 2 screw rod 25 and the inner wall of the connecting track frame 20. The No. 2 screw rod 25 is rotatably connected to the inner wall of the connecting track frame 20 through the provided rotating interface. A No. 1 driving box 21 is also provided on the outer wall of one end of the connecting track frame 20. A No. 2 motor 26 is provided inside the No. 1 driving box 21. The No. 2 motor 26 is connected to one end of the No. 2 screw rod 25 to drive the No. 2 screw rod 25 to rotate. When the No. 2 screw rod 25 rotates, the No. 2 sliding block 24 will move on the outer wall of the No. 2 screw rod 25. At the same time, it slides in the middle of the connecting track frame 20, and a connecting rod 27 is provided at the lower end of the No. 2 sliding block 24, and a No. 2 driving box 28 is provided at the lower end of the connecting rod 27. The connecting rod 27 is used to connect the No. 2 driving box 28 with the No. 2 sliding block 24. A limiting block 29 is provided in front of the No. 2 driving box 28, and the limiting block 29 is fixedly connected to the front end of the No. 2 driving box 28. A connecting plate 30 is provided in front of the limiting block 29, and a mounting block 18 is provided at the front end of the connecting plate 30. The connecting plate 30 is used to connect the mounting block 18. Three groups of grinding discs 19 and a group of polishing discs 22 are respectively provided around the mounting block 18. The mesh numbers of the three groups of grinding discs 19 are all different, and they are used to grind the gallium nitride single crystal substrate. The outer wall of the polishing disc 22 is provided with a polishing pad 23. The polishing disc 22 and the polishing pad 23 are used to polish the gallium nitride single crystal substrate after grinding. The mounting block 18 is used to install the three groups of grinding discs 19 and a group of polishing discs 22.

[0036] like Figure 4 and Figure 5As shown, a rotating cylinder 31 is arranged in the middle of the limit block 29, a rotating interface is arranged between the rear end of the rotating cylinder 31 and the outer wall of the front end of the second driving box 28, the rotating cylinder 31 can rotate at the front end of the second driving box 28, a rotating interface is arranged between the rotating cylinder 31 and the inner wall of the limit block 29, the rotating cylinder 31 can rotate in the middle of the limit block 29, a No. 3 motor 34 is arranged inside the No. 2 driving box 28, the No. 3 motor 34 is connected to the rear end of the rotating cylinder 31, the No. 3 motor 34 is used to drive the rotating cylinder 31 to rotate in the middle of the limit block 29, and the outer walls around the rotating cylinder 31 are all provided with limiting round heads 32, the four groups of limiting round heads 32 are in the same plane and the distances are equal, and the space between the limiting round heads 32 and the side walls of the rotating cylinder 31 A movable hole is provided, and the limiting round head 32 is movably connected to the side wall of the rotating cylinder 31 through the provided movable hole. A spring 33 is provided at the lower end of the limiting round head 32 inside the rotating cylinder 31. When the limiting round head 32 moves in the middle of the side wall of the rotating cylinder 31, the spring 33 will be deformed to generate elastic force. Corresponding grooves are respectively provided between the four groups of limiting round heads 32 and the inner wall of the limiting block 29. The connecting line between the upper and lower lines of the four groups of grooves provided inside the limiting block 29 is vertical, and the connecting line between the left and right lines is horizontal. When the rotating cylinder 31 rotates in the middle of the limiting block 29, the limiting round head 32 will shrink and then correspond to the groove on the inner wall of the limiting block 29 again, so that the four groups of limiting round heads 32 remain horizontal or vertical between each other.

[0037] like Figure 6 As shown, four groups of No. 4 motors 36 are arranged inside the mounting block 18, and rotating rods 35 are arranged on the outsides of the four groups of No. 4 motors 36. The rotating rods 35 pass through the middle of the side wall of the mounting block 18, and a rotating interface is arranged between the rotating rods 35 and the side wall of the mounting block 18. The rotating rods 35 can rotate in the middle of the side wall of the mounting block 18. The four groups of rotating rods 35 are respectively used to install three groups of grinding discs 19 and one group of polishing discs 22 to drive them to rotate.

[0038] like Figure 7As shown, the upper end of the fixing rod 9 is provided with two sets of fixing plates 37, a mounting seat 46 is provided in the middle of the upper end of the fixing plate 37, a rotating seat 38 is provided at the upper end of the mounting seat 46, a rotating interface is provided between the lower end of the rotating seat 38 and the upper end of the mounting seat 46, the rotating seat 38 rotates at the upper end of the mounting seat 46 through the provided rotating interface, a transverse bevel gear 40 is provided on the upper end outer wall of the mounting seat 46, the transverse bevel gear 40 is fixed to the outer wall of the mounting seat 46, a vertical bevel gear 39 is provided on one side of the transverse bevel gear 40, the vertical bevel gear 39 is meshed with the transverse bevel gear 40, the rotating seat 38 is used to install the spray gun 10, a rotating interface is provided between the side wall of the spray gun 10 and the inner wall of the rotating seat 38, the spray gun 10 can The angle can be adjusted by rotating in the middle of the rotating seat 38. A connecting shaft is provided between the vertical bevel gear 39 and the side wall of the spray gun 10. The connecting shaft passes through the side wall of the rotating seat 38 and rotates in the middle of the rotating seat 38. A No. 5 motor 41 is provided at the rear end of the vertical bevel gear 39. The No. 5 motor 41 is used to drive the vertical bevel gear 39 to rotate. A fixing ring 42 is provided on the outer wall of the No. 5 motor 41. The fixing ring 42 is used to fix the No. 5 motor 41. A support rod 43 is provided at the lower end of the fixing ring 42. The support rod 43 is used to support the fixing ring 42. A sliding seat 44 is provided at the lower end of the support rod 43. A sliding track 45 is provided between the sliding seat 44 and the fixed plate 37. The sliding seat 44 can slide on the upper end of the sliding track 45.

[0039] like Figure 1 and Figure 8 As shown, two groups of polishing liquid containers 48 and two groups of abrasive containers 47 are arranged inside the base 1. The polishing liquid containers 48 and the abrasive containers 47 are used to store polishing liquid and abrasive respectively. Delivery pumps are arranged inside the abrasive containers 47 and the polishing liquid containers 48. The rear end of the delivery hose 11 passes through the outer wall of the base 1 and extends into the abrasive container 47 and the polishing liquid container 48, and is connected to the internal delivery pump to deliver abrasive or polishing liquid to the middle of the spray gun 10 respectively. An exhaust grille 50 is arranged in front of the base 1, and the vacuum adsorption table 3 exhausts air to the outside through the exhaust grille 50.

[0040] like Figure 8 and Fig. 9As shown, a plurality of exhaust holes 51 are provided in the middle of the upper end of the vacuum adsorption platform 3, and the exhaust holes 51 can be used for exhausting air. Soft rubber pads 52 are provided around the upper end of the vacuum adsorption platform 3, and the soft rubber pads 52 maintain the sealing state of adsorption between the gallium nitride single crystal chip and the vacuum adsorption platform 3. An exhaust pipe 53 is provided at the lower end of the vacuum adsorption platform 3, and a vacuum pump 54 is provided at the lower end of the exhaust pipe 53. The vacuum pump 54 generates suction in the middle of the exhaust hole 51 through the exhaust pipe 53. An exhaust pipe 55 is provided at the front end of the vacuum pump 54, and a sealing cover 56 is provided at the front end of the exhaust pipe 55. The sealing cover 56 is connected to the inner side of the exhaust grille 50, and the vacuum pump 54 discharges gas from the middle of the exhaust grille 50 through the exhaust pipe 55 and the sealing cover 56.

[0041] It should be noted that the present invention is a highly efficient grinding and polishing device for a gallium nitride single crystal substrate. When in use, the gallium nitride single crystal substrate is placed on the upper end of the vacuum adsorption table 3, and the vacuum exhauster 54 exhausts air, and the gallium nitride single crystal substrate is adsorbed on the upper end of the vacuum adsorption table 3 through the exhaust pipe 53 and the exhaust hole 51. The vacuum exhauster 54 exhausts air to the outside of the exhaust grille 50 through the exhaust pipe 55 and the sealing cover 56, and then the cylinder 7 is telescopically movable, and the lifting rod 8 is driven to move downward through the connecting frame 12, so that a group of grinding discs 19 move downward, and at the same time, the spray gun 10 on the front side sprays abrasives onto the gallium nitride single crystal substrate. While spraying the abrasive, the fifth motor 41 starts, driving the vertical bevel gear 39 to rotate. The vertical bevel gear 39 will move around the horizontal bevel gear 40, driving the rotating seat 38 to rotate. At the same time, the fifth motor 41 will move on the upper end of the sliding track 45 through the sliding seat 44. While the vertical bevel gear 39 rotates, it will also drive the spray gun 10 to rotate in the middle of the rotating seat 38, so that the spray gun 10 can adjust different angles to make the abrasive more evenly distributed. After the grinding disc 19 contacts the gallium nitride single crystal substrate, a group of fourth motors 36 inside the mounting block 18 are started, driving the rotating rod 35 The grinding disc 19 rotates at high speed, and at the same time, the No. 1 motor 16 can drive the No. 1 screw rod 14 to rotate, so that the moving rod 17 can move forward and backward, and the No. 2 motor 26 inside the No. 1 drive box 21 can drive the No. 2 screw rod 25 to rotate, so that the No. 2 sliding block 24 connected to the track frame 20 can move left and right, so that the grinding disc 19 can move forward and backward, left and right, and grind. After a set of grinding discs 19 are ground, the cylinder 7 is retracted to increase the height of the mounting block 18, and the No. 3 motor 34 inside the No. 2 drive box 28 is started, and the mounting block 18 is driven to rotate through the rotating cylinder 31, and the switching mesh is larger. The grinding disc 19 contacts the gallium nitride single crystal substrate for grinding, and the spray gun 10 sprays the abrasive at the same time. After the grinding is completed, the mounting block 18 rotates to rotate the polishing disc 22 downward to allow the polishing pad 23 to contact the gallium nitride single crystal substrate. At the same time, the two groups of spray guns 10 on the rear side spray polishing liquid, and the spray gun 10 also rotates to spray the polishing liquid evenly. The polishing disc 22 moves downward to contact the gallium nitride single crystal substrate for polishing. During the processing, the sprayed abrasive and polishing liquid will flow to the middle of the reflux tank 4, and finally flow into the middle of the reflux pipe 49 for recovery.

[0042] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A highly efficient grinding and polishing device for a gallium nitride single crystal substrate, comprising a base (1), characterized in that: A processing table (2) is arranged at the upper end of the base (1), and four groups of fixed columns (5) are arranged at the upper end of the processing table (2). A group of lifting rods (8) is arranged between the side walls of each front and rear group of fixed columns (5), and a No. 1 sliding block (13) is arranged between the two ends of the two groups of lifting rods (8) and the inner wall of the fixed column (5). A connecting frame (12) is arranged at the upper ends of the two groups of lifting rods (8), and a fixed frame (6) is arranged at the upper ends of the four groups of fixed columns (5). A cylinder (7) is arranged in the middle of the fixed frame (6), and the lower end of the cylinder (7) is connected to the upper end of the connecting frame (12). Two groups of sliding rods (15) and a group of No. 1 screw rods (13) are arranged between the side walls of the two groups of lifting rods (8). 4), the first screw rod (14) is arranged between the two groups of sliding rods (15), the rear end of the rear lifting rod (8) is provided with a first motor (16), the first motor (16) is connected to one end of the first screw rod (14), the outer wall of the sliding rod (15) and the first screw rod (14) is provided with a group of moving rods (17), the lower end of the moving rod (17) is provided with a connecting track frame (20), the outer wall of one end of the connecting track frame (20) is provided with a first drive box (21), the interior of the connecting track frame (20) is provided with a second sliding block (24), the middle of the second sliding block (24) is provided with a second screw rod (25) inside the connecting track frame (20), the first drive box (21) is provided with a second sliding block (24), and the second screw rod (25) is provided inside the connecting track frame (20). 1) is provided with a No. 2 motor (26) inside, the No. 2 motor (26) is connected to the No. 2 screw rod (25), the lower end of the No. 2 sliding block (24) is provided with a connecting rod (27), the lower end of the connecting rod (27) is provided with a No. 2 driving box (28), the front end of the No. 2 driving box (28) is provided with a limiting block (29), the middle of the limiting block (29) is provided with a rotating cylinder (31), the No. 3 motor (34) is provided inside the No. 2 driving box (28), the No. 3 motor (34) is connected to the rear end of the rotating cylinder (31), the outer walls of the rotating cylinder (31) are all provided with limiting round heads (32), the lower ends of the limiting round heads (32) are all inside the rotating cylinder (31) A spring (33) is provided, a connecting plate (30) is provided at the front end of the rotating cylinder (31) in front of the limit block (29), a mounting block (18) is provided at the front end of the connecting plate (30), a balancing frame (57) is provided between the front end of the mounting block (18) and the two groups of sliding rods (15), four groups of No. 4 motors (36) are provided inside the mounting block (18), the ends of the four groups of No. 4 motors (36) are provided with rotating rods (35) outside the mounting block (18), the ends of three groups of the rotating rods (35) are provided with grinding discs (19), the end of one group of the rotating rods (35) is provided with a polishing disc (22), and the outer wall of the polishing disc (22) is provided with a polishing pad (23).

2. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 1, characterized in that: A group of fixing rods (9) are arranged between the lower side walls of the left and right groups of fixing columns (5), two groups of fixing plates (37) are arranged at the upper ends of the two groups of fixing rods (9), a mounting seat (46) is arranged in the middle of the upper end of the fixing plate (37), a rotating seat (38) is arranged at the upper end of the mounting seat (46), a spray gun (10) is arranged in the middle of the rotating seat (38), a transverse bevel gear (40) is arranged on the upper outer wall of the mounting seat (46), a vertical bevel gear (39) is arranged on the upper end of one side of the transverse bevel gear (40), and the vertical bevel gear (39) is arranged on the upper end of the vertical bevel gear (39). The middle of the gear (39) is connected to the rotating seat (38), the outside of the vertical bevel gear (39) is provided with a No. 5 motor (41), the outer wall of the No. 5 motor (41) is provided with a fixing ring (42), the lower end of the fixing ring (42) is provided with a support rod (43), the lower end of the support rod (43) is provided with a sliding seat (44), and a sliding track (45) is provided between the sliding seat (44) and the fixed plate (37), the inner front side of the base (1) is provided with two groups of abrasive containers (47), and the inner rear side of the base (1) is provided with Two groups of polishing liquid containers (48), the rear ends of the four groups of spray guns (10) are all provided with a delivery hose (11), the four groups of delivery hoses (11) pass through the outer wall of the base (1) and are respectively connected to the two groups of abrasive containers (47) and the two groups of polishing liquid containers (48), a vacuum adsorption table (3) is provided in the middle of the upper end of the processing table (2), a reflux groove (4) is provided around the upper end of the processing table (2), a reflux pipe (49) is provided at the lower end of the rear side of the reflux groove (4) inside the base (1), and a plurality of exhaust holes are provided in the middle of the upper end of the vacuum adsorption table (3) (51), soft rubber pads (52) are arranged around the upper end of the vacuum adsorption platform (3), an exhaust pipe (53) is arranged at the lower end of the vacuum adsorption platform (3) inside the base (1), a vacuum exhauster (54) is arranged at the lower end of the exhaust pipe (53) at the bottom of the base (1), an exhaust pipe (55) is arranged at the front end of the vacuum exhauster (54), a sealing cover (56) is arranged at the front end of the exhaust pipe (55), an exhaust grille (50) is arranged on the front end outer wall of the base (1), and the sealing cover (56) is connected to the inner side of the exhaust grille (50).

3. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 1, characterized in that: The No. 1 sliding block (13) is slidably connected to the inner wall of the fixed column (5); the lifting rod (8) is slidably connected to the fixed column (5) through the No. 1 sliding block (13); the fixed frame (6) is fixedly connected to the fixed column (5); the connecting frame (12) is fixedly connected to the lifting rod (8); a connecting port is provided between the lower end of the cylinder (7) and the connecting frame (12); and the cylinder (7) is detachably connected to the connecting frame (12) through the provided connecting port.

4. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 1, characterized in that: A rotation interface is provided between the first screw rod (14) and the side walls of the two groups of lifting rods (8), and the first screw rod (14) is rotationally connected to the side walls of the lifting rods (8) through the provided rotation interface. A threaded hole is provided between the first screw rod (14) and the moving rod (17), and the first screw rod (14) is threadedly connected to the moving rod (17) through the provided threaded hole. A sliding hole is provided between the sliding rod (15) and the moving rod (17), and the moving rod (17) is slidingly connected to the sliding rod (15) through the provided sliding hole.

5. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 1, characterized in that: The second sliding block (24) is slidably connected to the connecting track frame (20), a threaded hole is provided between the second screw rod (25) and the second sliding block (24), the second sliding block (24) is threadedly connected to the second screw rod (25) through the provided threaded hole, a rotation interface is provided between the end of the second screw rod (25) and the inner wall of the connecting track frame (20), the second screw rod (25) is rotationally connected to the inner wall of the connecting track frame (20) through the provided rotation interface, a rotation interface is provided between the rear end of the rotating cylinder (31) and the front end of the second driving box (28), the rear end of the rotating cylinder (31) is rotationally connected to the front end of the second driving box (28) through the provided rotation interface.

6. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 1, characterized in that: The limit block (29) is fixedly connected to the second drive box (28); a rotation interface is provided between the rotating cylinder (31) and the inner wall of the limit block (29); the rotating cylinder (31) is rotatably connected to the inner wall of the limit block (29) through the provided rotation interface; a movable hole is provided between the limit round head (32) and the side wall of the rotating cylinder (31); the limit round head (32) is movably connected to the inner wall of the rotating cylinder (31) through the provided movable hole; four groups of the limit round heads (32) are located in the same plane and at equal distances in the side wall of the rotating cylinder (31); grooves are provided around the inner wall of the limit block (29); the four groups of grooves provided on the inner wall of the limit block (29) correspond vertically up and down and horizontally left and right; the limit round heads (32) are arranged on the inner wall of the limit block (29); ... The head (32) is movably connected to a groove arranged on the inner wall of the limit block (29); a rotating interface is respectively arranged between the rotating rod (35) and the side wall of the mounting block (18); the rotating rod (35) is rotatably connected to the side wall of the mounting block (18) through the arranged rotating interface; the three groups of grinding discs (19) have different mesh sizes; a rotating interface is arranged between the mounting block (18) and the balancing frame (57); the mounting block (18) is rotatably connected to the balancing frame (57) through the arranged rotating interface; the mounting block (18) can also be slidably connected to the balancing frame (57); a sliding interface is arranged between the upper end of the balancing frame (57) and the two groups of sliding rods (15); the balancing frame (57) is slidably connected to the two groups of sliding rods (15) through the arranged sliding interface.

7. The high-efficiency grinding and polishing device for gallium nitride single crystal substrate according to claim 2, characterized in that: A mounting interface is provided between the fixed disk (37) and the fixed rod (9), and the fixed disk (37) is detachably connected to the upper end of the fixed rod (9) via the provided mounting interface. A rotating interface is provided between the lower end of the rotating seat (38) and the upper end of the mounting seat (46), and the rotating seat (38) is rotatably connected to the mounting seat (46) via the provided rotating interface. The vacuum adsorption table (3) is slightly raised above the upper end of the processing table (2), and a small angle slope is formed between the inner periphery of the reflow groove (4) and the outer periphery of the vacuum adsorption table (3).

8. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 2, characterized in that: A rotating interface is provided between the side wall of the spray gun (10) and the inner wall of the rotating seat (38), and the spray gun (10) is rotatably connected to the inner wall of the rotating seat (38) through the rotating interface. The transverse bevel gear (40) is fixedly connected to the mounting seat (46), and the vertical bevel gear (39) is meshed with the transverse bevel gear (40). A connecting shaft is provided between the vertical bevel gear (39) and the side wall of the spray gun (10), and the connecting shaft provided between the vertical bevel gear (39) and the spray gun (10) passes through the side wall of the rotating seat (38) and is rotatably connected to the rotating seat (38).

9. The highly efficient grinding and polishing device for gallium nitride single crystal substrate according to claim 2, characterized in that: The No. 5 motor (41) is detachably connected to the fixing ring (42), the sliding seat (44) is slidably connected to the sliding track (45), the delivery hose (11) is provided with connecting ports between the side walls of the abrasive container (47) and the polishing liquid container (48), and the abrasive container (47) and the polishing liquid container (48) are both provided with delivery pumps. The delivery hose (11) passes through the connecting ports on the side walls of the abrasive container (47) and the polishing liquid container (48) and is connected to the delivery pumps inside the abrasive container (47) and the polishing liquid container (48).

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