Industrial device capable of being used for cooling, stripping, overturning and transferring large-size fragile sheets

Abstract

An industrial device capable of being used for cooling, stripping, overturning and transferring large-size fragile sheets comprises a base, a first rotating arm, a hydraulic cylinder installed on the first rotating arm, a synchronous belt transmission mechanism, a vacuum suction cup overturning head 1, a bevel gear transmission mechanism, a direct-acting air cylinder, a vacuum suction cup overturning head 2, a second rotating arm, a large U-shaped plate, a motor 1 and a belt motor 2. The hydraulic cylinder is connected with the first rotating arm, the hydraulic rod is connected with the turnover mechanism, the synchronous belt transmission mechanism is installed on the two sides of the large U-shaped plate and connected with the turnover shaft, the vacuum suction cup turnover head 2 is connected with the air cylinder, the bevel gear transmission mechanism is installed at the top end of the hydraulic cylinder and fixed, one end of the rotating rod is connected with the bevel gear structure, and the other end of the rotating rod is connected with the direct-acting air cylinder. A main shaft of the motor 1 is connected with a bevel gear transmission shaft, the motor 2 is connected with a small belt wheel of a synchronous belt transmission structure, the vacuum suction cup overturning head 1 is connected through an overturning shaft, a cooling valve is installed on the vacuum suction cup overturning head 1, and the base can be installed on the ground or a base plate. According to the invention, large-size (more than phi 300mm) fragile material sheets can be turned over and transferred after being cut, cooled and stripped, so that the defects of multi-station work are further reduced, the working efficiency can be remarkably improved, and the number of structures required for completing the operation and the processing cost are reduced.

Description

Technical Field

[0001] The invention relates to the technical field of laser cutting silicon wafers, and in particular to an industrial device that can be used for cooling, peeling, flipping and transporting large-sized fragile wafers. Background Art

[0002] In the process of mechanical processing, various types of thin sheets are often needed. Take laser cutting of silicon wafers as an example. Before the silicon wafers become finished products, they often need to be cooled, peeled, flipped and transported to facilitate the subsequent grinding, inspection and stacking processes.

[0003] In the prior art, post-processing of silicon wafers is mostly done by workers using multiple workpieces or devices. The number of devices is complicated, occupying a large workspace, and the efficiency is low. In addition, each process requires position calibration. There are other ways to flip the silicon wafer, but adding new devices just for flipping will increase the cost and make the integration of the entire machine more difficult. It is far from achieving the expected effect. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide an industrial device that can be used for cooling, peeling, flipping and transporting large-sized fragile thin slices, so as to solve the problems of high cost, complicated equipment and low efficiency of existing silicon wafer post-processing.

[0005] The technical solution adopted by the present invention for its technical problem is: an industrial device that can be used for cooling, peeling, flipping and transporting large-sized fragile thin slices, including a base, a first rotating arm installed on the base, a hydraulic cylinder, a cylinder, a bevel gear mechanism, a first motor, a pulley mechanism, a vacuum suction cup flip head 1 and a vacuum suction cup flip head 2, the hydraulic cylinder is installed on the other end of the first rotating arm, the cylinder can be fixed to the side plate of the second rotating arm with bolts, the other end of the second rotating arm can be connected to the output shaft on the large bevel gear, the large bevel gear is connected to the output shaft and positioned by a shaft shoulder, the large bevel gear and the small bevel gear form a pair of gear pairs, the two shafts form an angle of 90°, the vacuum suction cup flip head 2 can be connected to the pneumatic rod of the cylinder, and the large pulley is connected to the flip shaft.

[0006] Furthermore, the double-ribbed round base is fixed on the top of the hydraulic cylinder, a bearing connected to the input shaft is provided on the double-ribbed round base, an axial sleeve for axial positioning with the small bevel gear is provided on the input shaft, the small bevel gear is connected to the input shaft (the small bevel gear on the left side can be directly connected to the input shaft, the small bevel gear on the right side is provided with a bearing and connected to the input shaft through the bearing, and the gear on the right side forms an empty sleeve), the input shaft is connected to the second motor, the second motor is fixed to the motor support plate and fixed by bolts, and the motor support plate is fixed to the double-ribbed round base by welding or bolts.

[0007] Furthermore, an axial end sleeve is provided on the left end of the double-rib circular base, the input shaft is connected to the small U-shaped plate and a bearing is provided on the small U-shaped plate, the small U-shaped plate is fixed to the double-rib circular base by bolts, the output shaft is connected to the supporting cylinder provided on the small U-shaped plate, and the supporting plate is connected to the hydraulic rod.

[0008] Furthermore, the support plate and the large U-shaped plate are installed back to back, the rotating shaft is connected to the large U-shaped plate and is installed with a pair of bearings, the vacuum suction cup flip head 1 is connected to the flip shaft 1 and the flip shaft 2, the vacuum suction cup flip head 1 is installed with a cooling valve for cooling the thin film, the small pulley is directly connected to the first motor through the motor shaft, and the first motor is installed on the support plate.

[0009] Furthermore, the synchronous belt is installed in meshing with the large pulley and the small pulley.

[0010] Compared with the prior art, the present invention has the following beneficial effects:

[0011] 1. The present invention can reduce the number of devices required for post-processing of thin slices, and is particularly suitable for flipping large-sized fragile thin slices, saving production costs, being more conducive to the integration of cutting equipment, reducing the demand for workspace, and improving production efficiency while reducing processing time while meeting the requirements of processing quality. In addition, the device has a simple structure, low maintenance costs for parts, and has good market prospects.

[0012] 2. The present invention is driven by a servo motor, and the first rotating arm realizes position calibration by rotating. After the position is calibrated, the first motor drives the small pulley to rotate, and the large pulley rotates under the action of the synchronous belt, so that the vacuum suction cup flip head 1 starts to flip. When the vacuum suction cup flip head 1 flips to be parallel to the surface of the silicon wafer, the first motor stops working, and then the hydraulic rod moves downward. When the vacuum suction cup flip head 1 coincides with or is close to coincide with the upper surface of the silicon wafer, the hydraulic rod stops moving, and the cooling valve installed on the vacuum suction cup releases coolant through the pipeline to cool the surface of the silicon wafer. After cooling is completed, the vacuum suction cup flip head 1 adsorbs the silicon wafer and rotates it as a whole by a certain angle to complete the peeling of the silicon wafer. After the peeling is completed, the hydraulic rod moves upward to a certain distance and stops. The vacuum suction cup flip head 1 is reversely flipped under the action of the first motor and the synchronous belt transmission structure, and flips to the horizontal plane and stops (at this time, the upper surface of the silicon wafer is at the bottom and the lower surface is at the top). The second motor drives the small bevel gear on the right side to rotate vertically through the input shaft, and the large bevel gear meshing with the small bevel gear on the right side starts to rotate horizontally, and the output shaft rotates synchronously. The second rotating arm rotates under the action of the output shaft, thereby driving the pneumatic cylinder and the vacuum suction cup flip head 2 to rotate. When the vacuum suction cup flip head 2 and the vacuum suction cup flip head 1 are on the same axial direction, the second motor stops working, and the pneumatic rod starts to move downward and stops when it coincides with or is close to coincide with the lower surface of the silicon wafer. The vacuum suction cup flip head 2 adsorbs the silicon wafer. After the adsorption is completed, the cylinder rod moves back a certain distance, and then the second motor starts working. The silicon wafer rotates to the position of the next process. When it rotates to the specified position, the second motor stops working, and the pneumatic rod continues to move downward to make the silicon wafer reach the position of the next process. The vacuum suction cup flip head 2 cancels the adsorption of the silicon wafer, thereby completing the flipping and transportation of the silicon wafer.

[0013] 3. The right small bevel gear of the present invention is installed with the input shaft through a bearing. When the first motor starts to work, the input shaft will drive the left small bevel gear to rotate, while the left small bevel gear will not rotate synchronously. The large bevel gear will rotate with it in the horizontal plane, and the small bevel gear on the right will rotate in the opposite direction to the left bevel gear. After the small bevel gear on the left is used, the large bevel gear can be worn evenly and rotated smoothly to ensure the smooth operation of the second rotating arm. The bevel gear on the input shaft can be axially positioned by an axial sleeve. Due to the meshing relationship, the right side of the left small bevel gear and the left side of the right small bevel gear do not need to be axially positioned. Only the upper end of the large bevel gear needs to be axially fixed with a shaft shoulder, and the lower end needs to be axially fixed with a shaft end retaining ring with a certain elasticity. The circumferential fixation of the connecting piece on the shaft of the present invention can be achieved by flat key connection.

[0014] 4. The present invention adopts synchronous belt transmission. During transmission, the transmission ratio is accurate, there is no slippage, the force on the shaft is small, the structure is compact, the oil resistance and wear resistance are good, the aging resistance is good, it can work in an environment of -20℃—+80℃, has buffering and shock absorption capabilities, low noise, high transmission efficiency, prevents the belt transmission from slipping, and prolongs the service life of the component. The shoulder of the input shaft and the axial sleeve are used to realize the axial positioning of the small bevel gear to ensure the meshing with the large bevel gear and ensure the smooth operation of the component. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of an embodiment of the present invention;

[0016] Figure 2 It is a structural schematic diagram of a bevel gear structure;

[0017] Figure 3 , 4 It is a schematic diagram of synchronous belt transmission;

[0018] Figure 5 It is a schematic diagram of the structure of the cylinder and the vacuum turning head;

[0019] Figure 6 To install the cooling valve, the vacuum suction cup flips the head ground cooling pipeline and vacuum suction hole.

[0020] In the figure: 1, base; 2, cylinder; 3, first rotating arm; 4, second motor; 5, bevel gear transmission mechanism; 6, hydraulic cylinder; 7, synchronous belt transmission mechanism; 2-1, vacuum suction cup flip head 2; 2-2, cylinder; 2-3, second rotating arm; 5-1, double rib plate round base; 5-2, shaft end sleeve; 5-3, input shaft; 5-4, bearing; 5-5, axial sleeve 1; 5-6, empty sleeve bearing; 5-7, small bevel gear; 5-8, large bevel gear; 5-9, output shaft; 5-10, small U-shaped plate; 7-4, small pulley; 7-5, first motor; 7-1, synchronous belt; 7-2, large pulley; 7-3, flip shaft 1; 7-6, vacuum suction cup flip head 2; 7-8 cooling valve; 7-9, flip shaft 2; 7-10, large U-shaped plate; 7-7, support plate; 7-11, axial sleeve 2; 7-12, flip shaft bearing; 7-13, shaft end sleeve. DETAILED DESCRIPTION

[0021] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0022] See attached Figure 1-5The present embodiment comprises a base 1, a first rotating arm 3 arranged on the base 1, a second motor 4, a pneumatic cylinder 2 and a hydraulic cylinder 6. The first rotating arm 3 can be rotated by a servo motor installed inside the base. The vacuum suction cup flip head (1) 7-6 is connected to the flip shaft (1) 7-3 and the flip shaft (2) 7-9. The flip shaft (1) 7-3 and the flip shaft (2) 7-9 are installed on the bearing 7-12 provided on the large U-shaped plate 7-10. The back side of the large U-shaped plate 7-10 is fixed together with the support plate 7-7. The support plate 7-7 is installed and fixed with the first motor 7-5. The support plate 7-7 is connected to the hydraulic cylinder 6. The first motor 7-5 is connected to the small pulley 7-4. One end of the flip shaft (1) 7-3 is connected to the large pulley 7-2. The large pulley 7-2 can form a synchronous belt structure with the small pulley 7-4 through the synchronous belt 7-1.

[0023] The hydraulic cylinder 6 is fixed to the other end of the first rotating arm 3, and a hydraulic rod is provided on the hydraulic cylinder 6. A double-ribbed round base 5-1 is fixed to the top of the hydraulic cylinder body 6, and a bearing 5-3 is provided on the double-ribbed round base 5-1. A motor support plate is provided on the double-ribbed round base 5-1, and a second motor 4 is installed on the motor support plate. The second motor 4 is directly connected to the input shaft 5-3, and an axial sleeve 5-5 and a small bevel gear 5-7 are installed on the input shaft 5-3. The small bevel gear 5-7 is meshed with a large bevel gear 5-8, and the large bevel gear 5-8 is connected to the output shaft 5-9. The output shaft 5-9 is connected to a small U-shaped plate 5-10, and the small U-shaped plate 5-10 is connected to the input shaft 5-3 and fixed to the double-ribbed round base 5-1 by bolts. The output shaft 5-9 is connected to the second rotating arm 2-3, and the second rotating arm 2-3 is connected and fixed to the pneumatic 2-2 by bolts. A pneumatic rod is provided on the pneumatic cylinder 2-2 and is connected to the vacuum suction cup flip head (2) 2-1.

[0024] Working principle: The base 1 is placed on a designated platform or the ground. The first rotating arm 3 is rotated by the servo motor and drives all parts except the base 1 to rotate. When the rotation reaches the calibration position, the first motor 7-5 starts to work and drives the small pulley 7-4, the synchronous belt 7-1, and the large pulley 7-2 to engage and transmit, so that the flip axis (1) 7-3 and the flip axis (2) 7-9 drive the vacuum suction cup flip head (1) 7-6 to flip downward. When the flip head is parallel to the silicon wafer, the second motor 7-5 stops working, and the hydraulic rod moves downward until the vacuum suction cup flip head (1) 7-6 is close to or coincides with the upper surface of the silicon wafer. The cooling valve 7-8 installed on the vacuum suction cup releases coolant through the pipeline to cool the surface of the silicon wafer. After cooling, the vacuum suction cup flip head (1) 7-6 absorbs the silicon wafer. After absorption, it drives the silicon wafer to rotate a certain angle for peeling. After peeling, the hydraulic rod moves upward to a certain distance, and the first motor 7-5 reverses and moves on the synchronous belt Under the action of 7-1, the flip head is flipped upward. When the lower surface of the silicon wafer is flipped to be parallel to the horizontal plane, the first motor 7-5 stops working, the second motor 4 starts working and rotates the second rotating arm 2-3 through the meshing relationship between the small bevel gear 5-7 and the large bevel gear 5-8, thereby driving the vacuum suction cup flip head (2) 2-1 to rotate. When the vacuum suction cup flip head (2) 2-1 rotates to a point where there is a concentric relationship between the silicon wafer and the vacuum suction cup flip head (2) 2-1, the second motor 4 stops working and the pneumatic rod starts to move downward. When the vacuum suction cup flip head (2) 2-1 coincides with the lower surface of the silicon wafer, it stops moving. The vacuum suction cup flip head (2) 2-1 adsorbs the silicon wafer. After adsorption is completed, the pneumatic rod moves upward to a certain distance, the second motor 4 starts working and drives the silicon wafer to rotate in the direction of the next process. After reaching the specified position, the second motor 4 stops working, the pneumatic rod moves downward to make the silicon wafer reach the specified position of the next process, and the vacuum suction cup flip head (2) 2-1 cancels adsorption, thereby completing the flipping and transportation of the silicon wafer.

Claims

1. An industrial device for cooling, peeling, turning and transporting large-sized fragile flakes, characterized in that: The invention comprises a base (1), a first rotating arm (3) installed on the base (1), a hydraulic cylinder (6), a cylinder part (2), a bevel gear mechanism (5), a second motor (4), and a turning mechanism (7). The hydraulic cylinder (6) is fixedly installed on the other end of the first rotating arm (3). The cylinder (2-2) is fixedly installed on the side plate of the second rotating arm (2-3) by bolts. The other end of the second rotating arm (2-3) can be connected with an output shaft (5-9) on the bevel gear mechanism. The output shaft (5-9) is connected with a large bevel gear (5-8) and positioned by a shaft shoulder and an axial sleeve (5-5). The large bevel gear (5-8) and the small bevel gear (5-7) form a pair of gear pairs. The two shafts form an angle of 90 degrees. The vacuum suction cup turning head 2 (2-1) can be connected and fixed with the pneumatic rod (2-2) of the cylinder. The large pulley (7-2) is connected with the turning shaft 1 (7-3).

2. An industrial device for cooling, peeling, turning and transporting large-sized fragile flakes according to claim 1, characterized in that: The double-ribbed round base (5-1) is fixed on the top of the hydraulic cylinder (6); a bearing (5-4) connected to the input shaft (5-3) is provided on the double-ribbed round base (5-1); an axial sleeve (5-5) for axial positioning with a small bevel gear (5-7) is provided on the input shaft (5-3); the small bevel gear (5-7) is connected to the input shaft (5-3) (the small bevel gear on the left side can be directly connected to the input shaft, and the small bevel gear on the right side is provided with a bearing 95-6) and connected to the input shaft (5-3) through the bearing 95-6, and the small bevel gear (5-7) on the right side forms an idler gear); the input shaft (5-3) is connected to the second motor (4); the second motor (4) is fixed on the motor support plate (5-1) of the double-ribbed round base and fixed by bolts.

3. An industrial device for peeling, turning and transporting large-sized fragile sheets according to claim 2, characterized in that: The right end of the double-ribbed round base (5-1) is provided with an axial end sleeve (5-2); the input shaft (5-3) is connected to the small U-shaped plate (5-10) and is on the small U-shaped plate (5-10); the small U-shaped plate (5-10) is fixed to the double-ribbed round base (5-1) by bolts; the output shaft (5-9) is connected to the small U-shaped plate (5-10); and the support plate (7-7) is connected to the hydraulic cylinder (6).

4. An industrial device for cooling, peeling, turning and transporting large-sized fragile flakes according to claim 3, characterized in that: The support plate (7-7) and the large U-shaped plate (7-10) are installed back to back, and the turning shaft 1 (7-3) and the turning shaft 2 (7-9) are connected to the large U-shaped plate (7-10) and are installed with a pair of bearings (7-12).

5. An industrial device for cooling, peeling, turning and transporting large-sized fragile flakes according to claim 4, characterized in that: The vacuum suction cup flip head 1 (7-6) is connected and fixed to the flip shaft 1 (7-3) and the flip shaft 2 (7-9). A cooling valve (7-8) for cooling the thin sheet is installed on the vacuum suction cup flip head 1 (7-6). The small pulley (7-4) is directly connected to the first motor (7-1) through the motor shaft.

6. An industrial device for cooling, peeling, turning and transporting large-sized fragile flakes according to claim 5, characterized in that The first motor (7-2) is mounted and fixed on a support plate (7-9).

7. An industrial device for cooling, peeling, turning and transporting large-sized fragile slices according to any one of claims 1 to 6, characterized in that: The synchronous belt (7-1) is meshed and installed with the large pulley (7-2) and the small pulley (7-4).

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