Polishing cloth trepanning device and method

Abstract

The invention discloses a polishing cloth trepanning device and method, and relates to the technical field of polishing machines, the polishing cloth trepanning device comprises a bracket and an adjusting seat, the bracket is provided with a first cutter body, a cloth pressing body and an expansion body, the bracket is installed from the outlet end of a liquid guide hole of a polishing disc, the first cutter body is used for cutting the polishing cloth at the outlet end of the liquid guide hole, and the cloth pressing body is used for pressing the cloth at the outlet end of the liquid guide hole. The cloth pressing body is used for pressing the cutting edge of the polishing cloth into the liquid guide hole and abutting against the inner wall of the outlet end of the liquid guide hole. The adjusting seat is arranged from the inlet end of the liquid guide hole, and the adjusting seat is matched with the expansion body, so that the expansion body is tightly supported on the inner wall of the liquid guide hole after being matched, and the bracket is fixed in the liquid guide hole. According to the polishing cloth tapping device, accurate finishing and fixing of the polishing cloth at the position of the liquid guide hole are achieved, and the problems that the polishing cloth is degummed and a wafer is scratched due to improper manual finishing are effectively avoided.

Description

Technical Field

[0001] The present application relates to the technical field of polishing machines, and in particular to a polishing cloth hole-making device and method. Background Art

[0002] Cadmium zinc telluride (CZN) materials have become a key substrate material in the manufacture of infrared detectors due to their unique physical properties. During the processing of CdZN materials, polishing cloths are used in double-sided polishing machines to ensure the flatness and smoothness of the material surface.

[0003] In the prior art, there are defects in the installation of polishing cloth. It is difficult to align the holes of the pre-opened polishing cloth. Wrinkles appear during the pasting process and need to be pulled and pasted again, which will cause deformation at the opening and affect subsequent use. After the polishing cloth is pasted, the hole needs to be manually trimmed and chamfered, which has the risk of damaging the surface of the polishing cloth, excessive trimming, and poor adhesion of the back glue, which will cause scratches on the surface of the cadmium zinc telluride wafer. Summary of the invention

[0004] The purpose of the present application is to provide a polishing cloth hole-making device, which realizes the precise trimming and fixing of the polishing cloth at the position of the liquid guide hole, and effectively avoids the problems of polishing cloth degumming and wafer scratching caused by improper manual trimming. Another purpose of the present application is to provide a polishing cloth hole-making method.

[0005] To achieve the above-mentioned purpose, the present application provides a polishing cloth hole opening device, comprising:

[0006] A support seat is provided with a first cutter body, a cloth pressing body and an expansion body, wherein the support seat is installed at the outlet end of the liquid guide hole of the polishing plate, the first cutter body is used to cut the polishing cloth at the outlet end of the liquid guide hole, and the cloth pressing body is used to press the cutting edge of the polishing cloth into the liquid guide hole and abut against the inner wall of the outlet end of the liquid guide hole;

[0007] The adjusting seat is installed at the inlet end of the liquid guiding hole, and the adjusting seat cooperates with the expansion body to realize that the expansion body is tightly supported on the inner wall of the liquid guiding hole after cooperation, so as to realize the fixation of the bracket in the liquid guiding hole.

[0008] In some embodiments, the adjustment seat is in sealing contact with the liquid guide hole to prevent the polishing liquid from flowing toward the cutting edge of the polishing cloth through the gap between the adjustment seat and the liquid guide hole.

[0009] In some embodiments, the polishing cloth opening device further comprises:

[0010] The first positioning rod is provided with a positioning structure. The first positioning rod cooperates with the bracket through the positioning structure, so that the first positioning rod drives the bracket to enter the liquid guide hole.

[0011] In some embodiments, the first positioning rod is further provided with a first positioning tip and a second knife body, and the first positioning tip, the second knife body and the first knife body cut the polishing cloth in sequence.

[0012] In some embodiments, the polishing cloth opening device further comprises:

[0013] A positioning block is arranged at the inlet end of the liquid guiding hole, the positioning block cooperates with the first positioning rod, and the positioning block is used to position the first positioning rod to move along the axial direction of the liquid guiding hole.

[0014] In some embodiments, the polishing cloth opening device further comprises:

[0015] The second positioning rod is provided with a second positioning tip, and the second positioning rod cooperates with the positioning block to enable the second positioning rod to be installed from the inlet end of the liquid guide hole, move along the axial direction of the liquid guide hole, and cut the polishing cloth at the outlet end of the liquid guide hole.

[0016] In some embodiments, the liquid guiding hole comprises a first hole body and a second hole body which are in communication with each other, the second hole body is located at the outlet end of the liquid guiding hole, and the aperture of the second hole body is larger than the aperture of the first hole body;

[0017] The cutting edge of the polishing cloth is pressed against the inner wall of the second hole body;

[0018] The expansion body is tightly supported on the inner wall of the first hole body.

[0019] In some embodiments, the expansion body is provided with deformation grooves, the deformation grooves are distributed in the circumferential direction of the bracket, and the expansion body is provided with threads inside;

[0020] The adjustment seat comprises:

[0021] A fixing member, the outer circumference of which gradually expands in the direction from the outlet end of the liquid guide hole to the inlet end, the outer portion of the fixing member is provided with a thread, the fixing member and the expansion body are threadedly matched, and the expansion body is expanded by rotating the fixing member;

[0022] The elastic member is sleeved on the fixing member, and the outer periphery of the elastic member is interference fit with the inner wall of the liquid guide hole.

[0023] The present application also provides a polishing cloth hole opening method, which is applied to the above-mentioned polishing cloth hole opening device, and the polishing cloth hole opening method comprises:

[0024] Align the bracket with the outlet end of the liquid guide hole of the polishing plate, and prepare to install it into the liquid guide hole;

[0025] Cutting the polishing cloth at the outlet end of the liquid guiding hole by the first knife body of the bracket, and pressing the cut edge of the polishing cloth into the liquid guiding hole and against the inner wall of the outlet end of the liquid guiding hole by the cloth pressing body of the bracket;

[0026] Align the adjustment seat with the entrance end of the liquid guide hole, and prepare to install the adjustment seat;

[0027] The adjustment seat cooperates with the expansion body of the bracket, so that the expansion body is tightly supported on the inner wall of the liquid guide hole after cooperation, so that the bracket is fixed in the liquid guide hole.

[0028] In some embodiments, before the bracket is prepared to be installed in the liquid guide hole, the method further includes:

[0029] Stick the polishing cloth to the polishing disc;

[0030] Installing the positioning block at the inlet end of the liquid guide hole of the polishing plate;

[0031] Inserting the second positioning rod into the positioning block, so that the second positioning rod is installed from the inlet end of the liquid guide hole, inserting the second positioning rod, and cutting the polishing cloth at the outlet end of the liquid guide hole through the second positioning tip of the second positioning rod;

[0032] Taking out the second positioning rod from the inlet end of the liquid guide hole;

[0033] Engage the bracket with the first positioning rod;

[0034] Cutting the polishing cloth by the holder comprises:

[0035] The first positioning tip of the first positioning rod is aligned with the cutting position of the second positioning tip, the first positioning rod is inserted, and the polishing cloth at the outlet end of the liquid guide hole is cut along the cutting position of the second positioning tip by the first positioning tip, the second blade of the first positioning rod, and the first blade of the bracket, the first positioning rod is inserted into the positioning block, and the cutting edge of the polishing cloth is pressed into the liquid guide hole and abutted against the inner wall of the outlet end of the liquid guide hole by the cloth pressing body of the bracket, and the first positioning rod pushes out the positioning block;

[0036] Taking out the first positioning rod from the inlet end of the liquid guide hole;

[0037] The expansion body is supported by the adjustment seat, comprising:

[0038] The fixing part of the adjustment seat is matched with the expansion body of the bracket through threads, and the fixing part is rotated. The expansion body expands under the action of the fixing part, so that the expansion body is tightened on the inner wall of the liquid guide hole, so that the bracket is fixed in the liquid guide hole, the elastic part of the adjustment seat is interference fit with the inner wall of the liquid guide hole, and the cutting edge of the polishing cloth is sealed in the liquid guide hole.

[0039] Compared with the above-mentioned background technology, the polishing cloth hole opening device provided in the present application mainly includes a support and an adjustment seat. The support is provided with a first cutter body, a cloth pressing body and an expansion body. The support is installed by the outlet end of the liquid guide hole of the polishing disc. The first cutter body is used to cut the polishing cloth at the outlet end of the liquid guide hole. The cloth pressing body is used to press the cut edge of the polishing cloth into the liquid guide hole and abut against the inner wall of the outlet end of the liquid guide hole. The adjustment seat is installed by the inlet end of the liquid guide hole, and the adjustment seat cooperates with the expansion body to realize that the expansion body is tightened on the inner wall of the liquid guide hole after cooperation, so as to realize the fixation of the support in the liquid guide hole.

[0040] The polishing cloth hole-opening device provided in the present application effectively solves the problems in the installation and trimming process of the polishing cloth in the prior art through its innovative structural design. The device mainly includes a support and an adjustment seat, wherein the support integrates a first cutter body, a cloth pressing body and an expansion body. The support is installed from the outlet end of the liquid guide hole of the polishing disc, and the first cutter body is responsible for accurately cutting the polishing cloth at the outlet end of the liquid guide hole, avoiding inaccurate cutting and over-trimming that may be caused by manual trimming. This precise mechanical cutting ensures the neatness of the edge of the polishing cloth and reduces the risk of damage to the polishing cloth.

[0041] The cloth pressing body then presses the cut edge of the polishing cloth into the liquid guide hole and holds it against the inner wall of the outlet end of the liquid guide hole. This step ensures a tight fit between the polishing cloth and the liquid guide hole, avoiding surface damage or adhesive peeling of the polishing cloth caused by improper manual operation. This tight fit not only improves the stability of the polishing cloth, but also reduces the possibility of the polishing cloth peeling off during the polishing process.

[0042] The adjustment seat is installed from the inlet end of the liquid guide hole and cooperates with the expansion body, so that the expansion body is tightly supported on the inner wall of the liquid guide hole after cooperation, thereby fixing the support seat. This fixing method provides mechanical locking, ensures the position stability of the support seat in the liquid guide hole, and further avoids the risk of scratching the wafer due to the movement or falling off of the polishing cloth.

[0043] In combination with the above structure and process description, it can be seen that the polishing cloth hole opening device has at least the following beneficial effects: the polishing cloth hole opening device realizes the precise trimming and fixation of the polishing cloth at the liquid guide hole position, and effectively avoids the problems of polishing cloth degumming and chip scratches caused by improper manual trimming. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0045] FIG1 is a schematic diagram of a bracket provided in an embodiment of the present application;

[0046] FIG2 is a schematic diagram of the bottom of the bracket provided in an embodiment of the present application;

[0047] FIG3 is a schematic diagram of an adjustment seat provided in an embodiment of the present application;

[0048] FIG4 is a cross-sectional view of an adjustment seat provided in an embodiment of the present application;

[0049] FIG5 is a schematic diagram of a first positioning rod provided in an embodiment of the present application;

[0050] FIG6 is a schematic diagram of a positioning block provided in an embodiment of the present application;

[0051] FIG7 is a schematic diagram of a second positioning rod provided in an embodiment of the present application;

[0052] FIG8 is a first effect diagram of the polishing cloth hole-making device provided in an embodiment of the present application;

[0053] FIG9 is a second effect diagram of the polishing cloth hole-making device provided in an embodiment of the present application;

[0054] FIG10 is a third effect diagram of the polishing cloth hole-making device provided in an embodiment of the present application;

[0055] FIG11 is a fourth effect diagram of the polishing cloth hole-making device provided in an embodiment of the present application;

[0056] FIG. 12 is a fifth effect diagram of the polishing cloth hole-making device provided in an embodiment of the present application.

[0057] in:

[0058] Polishing disc 01, liquid guide hole 02, first hole body 021, second hole body 022, polishing cloth 03,

[0059] The bracket 1, the first cutter body 11, the cloth pressing body 12, the expansion body 13, the deformation groove 131, the internal thread 132, the limit groove 133,

[0060] Adjusting seat 2, fixing member 21, external thread 211, positioning groove 212, elastic member 22, wing ring 221,

[0061] The first positioning rod 3, the positioning structure 31, the first positioning tip 32, the second blade 33,

[0062] Positioning block 4,

[0063] The second positioning rod 5 and the second positioning tip 51 . DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0065] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0066] Please refer to Figures 1, 3, 11 and 12, wherein Figure 1 is a schematic diagram of the bracket provided in an embodiment of the present application, Figure 3 is a schematic diagram of the adjustment seat provided in an embodiment of the present application, Figure 11 is a fourth rendering of the polishing cloth hole opening device provided in an embodiment of the present application, and Figure 12 is a fifth rendering of the polishing cloth hole opening device provided in an embodiment of the present application.

[0067] In a first specific implementation manner, the polishing cloth hole opening device provided in the implementation manner of the present application mainly includes a bracket 1 and an adjustment seat 2.

[0068] As shown in FIG. 1 , the bracket 1 is provided with a first cutter body 11 , a cloth pressing body 12 and an expansion body 13 .

[0069] As shown in Figure 11, the bracket 1 is installed at the outlet end of the liquid guide hole 02 of the polishing disc 01, the first knife body 11 is used to cut the polishing cloth 03 at the outlet end of the liquid guide hole 02, and the cloth pressing body 12 is used to press the cutting edge of the polishing cloth 03 into the liquid guide hole 02 and hold it against the inner wall of the outlet end of the liquid guide hole 02.

[0070] As shown in FIG. 12 , the adjustment seat 2 is inserted into the inlet end of the liquid guide hole 02 , and the adjustment seat 2 cooperates with the expansion body 13 , so that the expansion body 13 is tightly supported on the inner wall of the liquid guide hole 02 after cooperation, thereby fixing the bracket 1 in the liquid guide hole 02 .

[0071] The polishing cloth hole-opening device provided in the present application effectively solves the problems in the installation and trimming process of the polishing cloth in the prior art through its innovative structural design. The device mainly includes a bracket 1 and an adjustment seat 2, wherein the bracket 1 integrates a first cutter body 11, a cloth pressing body 12 and an expansion body 13. The bracket 1 is installed from the outlet end of the liquid guide hole 02 of the polishing disc 01, and the first cutter body 11 is responsible for accurately cutting the polishing cloth 03 at the outlet end of the liquid guide hole 02, avoiding inaccurate cutting and excessive trimming that may be caused by manual trimming. This precise mechanical cutting ensures the neatness of the edge of the polishing cloth 03 and reduces the risk of damage to the polishing cloth 03.

[0072] The cloth pressing body 12 then presses the edge of the cut polishing cloth 03 into the liquid guide hole 02 and abuts against the inner wall of the outlet end of the liquid guide hole 02. This step ensures a tight fit between the polishing cloth 03 and the liquid guide hole 02, avoiding surface damage or adhesive peeling of the polishing cloth 03 caused by improper manual operation. This tight fit not only improves the stability of the polishing cloth 03, but also reduces the possibility of the polishing cloth 03 peeling off during the polishing process.

[0073] The adjustment seat 2 is installed from the inlet end of the liquid guide hole 02 and cooperates with the expansion body 13, so that the expansion body 13 is tightly supported on the inner wall of the liquid guide hole 02 after cooperation, thereby fixing the bracket 1. This fixing method provides mechanical locking, ensures the position stability of the bracket 1 in the liquid guide hole 02, and further avoids the risk of scratching the wafer due to the movement or falling off of the polishing cloth 03.

[0074] In combination with the above structure and process description, it can be seen that the polishing cloth hole opening device has at least the following beneficial effects: the polishing cloth hole opening device realizes the precise trimming and fixation of the polishing cloth 03 at the position of the liquid guide hole 02, and effectively avoids the problems of degumming of the polishing cloth 03 and scratches on the chip caused by improper manual trimming.

[0075] It should be noted that once the adjustment seat 2 and the bracket 1 are fixed in the liquid guide hole 02, the adjustment seat 2 and the bracket 1 will be a complete structure with the liquid guide hole 02, and participate in the subsequent polishing liquid guidance and polishing work. For example, the polishing liquid will first flow into the interior of the adjustment seat 2 from the inlet end of the liquid guide hole 02, and then flow into the interior of the bracket 1 along the interior of the adjustment seat 2, and finally be output from the outlet end of the liquid guide hole 02 along the interior of the bracket 1. When the polishing work is completed and the polishing cloth 03 needs to be removed, the adjustment seat 2 and the bracket 1 are removed from the liquid guide hole 02. For example, the adjustment seat 2 is first taken out from the bracket 1, the fixing state of the bracket 1 and the liquid guide hole 02 is released, and then the bracket 1 is taken out from the liquid guide hole 02, and the adjustment seat 2 and the bracket 1 are removed from the liquid guide hole 02. The work of removing the adjustment seat 2 and the bracket 1 from the liquid guide hole 02 is completed, and the polishing cloth 03 can be removed at this time.

[0076] In some cases, when the adjustment seat 2 is installed from the inlet end of the liquid guide hole 02 and cooperates with the expansion body 13, the adjustment seat 2 is installed into the interior of the bracket 1, and the bracket 1 is deformed in the form of expansion due to the expansion effect of the adjustment seat 2 from the inside to the outside, so that the expansion body 13, which originally had a clearance fit or a normal fit with the liquid guide hole 02, changes to an interference fit, and then after the adjustment seat 2 and the bracket 1 cooperate, the bracket 1 is tightened on the inner wall of the liquid guide hole 02, and the bracket 1 is in a fixed state in the liquid guide hole 02.

[0077] It should be noted that the present embodiment does not limit the movement form of the bracket 1 and the movement form of its first blade 11, including but not limited to movement and rotation; in particular, the bracket 1 in the present embodiment adopts the movement form of movement, and when the bracket 1 is inserted into the liquid guide hole 02, the first blade 11 cuts the polishing cloth 03 with a blade parallel to the movement direction.

[0078] In some cases, when the bracket 1 is installed from the outlet end of the liquid guide hole 02 of the polishing disc 01, the bracket 1 adopts an insertion movement, thereby realizing the cutting of the polishing cloth 03 at the outlet end of the liquid guide hole 02 by the first knife body 11, and the pressing body 12 of the cloth to press the cutting edge of the polishing cloth 03 into the liquid guide hole 02. It is particularly important to note that after the cutting edge of the polishing cloth 03 is pressed into the liquid guide hole 02, the cutting edge of the polishing cloth 03 is always subjected to the force of the outer edge of the cloth pressing body 12, and is held against the inner wall of the outlet end of the liquid guide hole 02.

[0079] In the above process, especially when the cutting edge of the polishing cloth 03 changes from pressing into to abutting, the cutting edge of the polishing cloth 03 will undergo appropriate stretching deformation, so that the thickness of the cutting edge of the polishing cloth 03 becomes thinner. Such a change is more conducive to the abutment and fixation of the cutting edge of the polishing cloth 03 by the cloth pressing body 12, and at the same time fully avoids the problem of exposed colloid on the back of the polishing cloth 03.

[0080] Please continue to refer to FIG. 12 . In some embodiments, the adjustment seat 2 is in sealed contact with the liquid guide hole 02 to prevent the polishing liquid from flowing to the cutting edge of the polishing cloth 03 through the gap between the adjustment seat 2 and the liquid guide hole 02 .

[0081] In this embodiment, the design of the adjustment seat 2 enables it to achieve sealed contact with the liquid guide hole 02. The main purpose of this design is to ensure that the cutting edge of the polishing cloth 03 is effectively sealed in the liquid guide hole 02. Through the sealing cooperation between the adjustment seat 2 and the liquid guide hole 02, the polishing liquid inside the liquid guide hole 02 can be prevented from leaking to the cutting edge of the polishing cloth 03, thereby ensuring that the polishing liquid inside the liquid guide hole 02 can be output to the outlet end of the liquid guide hole 02 along the flow path inside the bracket 1.

[0082] This sealing design not only improves the efficiency of the polishing process, but also helps to reduce the waste of polishing materials that may be caused by leakage of the polishing liquid. In particular, when there are substances in the polishing liquid that react with the adhesive backing of the polishing cloth 03, it can prevent the polishing liquid from flowing down and gradually penetrating to the bottom and contacting the adhesive backing of the polishing cloth 03, causing the adhesive backing to fail. In addition, the sealed contact also helps to maintain the stability of the polishing cloth 03 in the liquid guide hole 02, reducing the movement or deformation of the polishing cloth 03 caused by the flow of the polishing liquid, thereby improving the polishing quality and the reliability of the processing process. Through this sealing structure, the polishing cloth hole opening device can more accurately control the polishing process and meet the needs of high-precision polishing.

[0083] Please refer to Figures 5 and 10, wherein Figure 5 is a schematic diagram of the first positioning rod provided in an embodiment of the present application, and Figure 10 is a third effect diagram of the polishing cloth hole-opening device provided in an embodiment of the present application.

[0084] In some embodiments, the polishing cloth opening device further comprises:

[0085] The first positioning rod 3 is provided with a positioning structure 31 . The first positioning rod 3 cooperates with the bracket 1 through the positioning structure 31 , so that the first positioning rod 3 drives the bracket 1 to enter the liquid guide hole 02 .

[0086] In this embodiment, the polishing cloth hole opening device adds a first positioning rod 3, and the positioning rod 3 has a positioning structure 31. This design is to ensure that the bracket 1 can be accurately positioned on the first positioning rod 3. When the first positioning rod 3 is inserted into the liquid guide hole 02, the bracket 1 maintains a synchronous insertion action with the first positioning rod 3 on the first positioning rod 3.

[0087] Through the guidance and drive of the first positioning rod 3, the bracket 1 can be smoothly and accurately inserted into the liquid guide hole 02. This process helps to ensure that the installation position of the bracket 1 is accurate, thereby ensuring that the subsequent opening position of the polishing cloth 03 is accurately aligned with the liquid guide hole 02. This precise positioning and installation is crucial to improving the use efficiency and polishing quality of the polishing cloth 03.

[0088] In addition, the use of the first positioning rod 3 also helps to reduce errors that may occur during manual operation, and improve the installation efficiency and reliability of the entire polishing cloth hole opening device. Through this structure, an automated or semi-automated installation process can be achieved, further improving production efficiency and reducing labor intensity.

[0089] Please refer to FIG. 2 , which is a schematic diagram of the bottom of the bracket provided in an embodiment of the present application.

[0090] In some cases, the bracket 1 is provided with a limiting groove 133, and the limiting groove 133 is matched with the positioning structure 31; optionally, the positioning structure 31 adopts a positioning pin, and the positioning pin is engaged in the limiting groove 133 to achieve the matching of the first positioning rod 3 and the bracket 1. In particular, the limiting groove 133 is located at the bottom of the bracket 1.

[0091] In addition, the deformation groove 131 on the bracket 1 can also be used to cooperate with the positioning structure 31, and the above two methods are not the only limitation. Please continue to refer to Figure 5. In some embodiments, the first positioning rod 3 is also provided with a first positioning tip 32 and a second blade 33. The first positioning tip 32, the second blade 33 and the first blade 11 cut the polishing cloth 03 in sequence.

[0092] It should be noted that, since the first positioning rod 3 is positioned with the bracket 1 through the positioning structure 31 , the second blade 33 on the first positioning rod 3 is aligned with the first blade 11 on the bracket 1 , thereby ensuring the cutting quality.

[0093] In this embodiment, the design of the first positioning rod 3 further includes a first positioning tip 32 and a second blade body 33, which work together with the first blade body 11 on the holder 1 to achieve accurate cutting of the polishing cloth 03. The first positioning tip 32 serves as a guide point, which first contacts the polishing cloth 03 to ensure accurate start of the cutting process.

[0094] Then, the second blade 33 continues the cutting process, and the first positioning rod 3 completes the cutting action first. Finally, the bracket 1 takes over and the first blade 11 of the bracket 1 performs the final cutting of the polishing cloth 03. This design allows the polishing cloth 03 to be accurately cut at the outlet end of the liquid guide hole 02, ensuring the neatness and cleanliness of the cutting edge and avoiding the unevenness or damage that may be caused by manual trimming.

[0095] The cooperation of the first positioning tip 32 and the second blade 33 not only improves the cutting accuracy, but also enhances the operational safety and efficiency of the entire polishing cloth opening device. This continuous cutting mechanism ensures the cutting quality of the polishing cloth 03, helps to reduce material waste, and improves the uniformity and effect of the subsequent polishing process.

[0096] Please refer to Figures 6 and 9, wherein Figure 6 is a schematic diagram of the positioning block provided in an embodiment of the present application, and Figure 9 is a second effect diagram of the polishing cloth hole-opening device provided in an embodiment of the present application.

[0097] In some embodiments, the polishing cloth opening device further comprises:

[0098] The positioning block 4 is disposed at the inlet end of the liquid guiding hole 02 . The positioning block 4 cooperates with the first positioning rod 3 . The positioning block 4 is used to position the first positioning rod 3 along the axial movement of the liquid guiding hole 02 .

[0099] In this embodiment, the polishing cloth hole opening device is further provided with a positioning block 4, which is arranged at the inlet end of the liquid guide hole 02 and cooperates with the first positioning rod 3. The main function of the positioning block 4 is to provide precise guidance for the first positioning rod 3 to ensure that it moves stably along the axial direction of the liquid guide hole 02. This guiding effect is crucial to improving the cutting effect of the first positioning tip 32 and the second blade 33 on the first positioning rod 3, because they need to be precisely aligned with and cut the polishing cloth 03.

[0100] The positioning block 4 not only guides the first positioning rod 3, but also indirectly affects the positioning of the bracket 1. Since the first cutter body 11 is mounted on the bracket 1, the positioning block 4 ensures the precise guidance of the first positioning rod 3, which means that the bracket 1 and the first cutter body 11 thereon can more accurately position and cut the polishing cloth 03. This precise guidance and cutting is crucial to ensure the cutting quality of the polishing cloth 03, as well as the uniformity and effect of the subsequent polishing process.

[0101] In addition, the design of the first positioning rod 3 and the positioning block 4 allows them to be disassembled after the installation of the bracket 1 is completed. After the first positioning rod 3 successfully drives the bracket 1 into the liquid guide hole 02, the positioning block 4 and the first positioning rod 3 can be removed. Subsequently, the adjustment seat 2 can be installed from the inlet end of the liquid guide hole 02 to match the bracket 1 to complete the assembly of the polishing cloth hole opening device. This design improves the installation flexibility and operational convenience of the device, making the installation process of the entire polishing cloth hole opening device more efficient and reliable.

[0102] Please refer to FIG. 7 and FIG. 8 , wherein FIG. 7 is a schematic diagram of a second positioning rod provided in an embodiment of the present application, and FIG. 8 is a first effect of a polishing cloth hole-opening device provided in an embodiment of the present application. FIG.

[0103] In some embodiments, the polishing cloth opening device further comprises:

[0104] The second positioning rod 5 is provided with a second positioning tip 51. The second positioning rod 5 cooperates with the positioning block 4 to enable the second positioning rod 5 to be installed from the inlet end of the liquid guide hole 02, move along the axial direction of the liquid guide hole 02, and cut the polishing cloth 03 at the outlet end of the liquid guide hole 02.

[0105] In this embodiment, the design of the polishing cloth hole opening device includes a second positioning rod 5, which is equipped with a second positioning tip 51. The second positioning rod 5 is used before the first positioning rod 3 and the bracket 1, which means that the second positioning tip 51 will first contact the polishing cloth 03 and cut a positioning hole on it. The function of this positioning hole is to provide a precise guide point for subsequent operations.

[0106] When the second positioning rod 5 moves along the axial direction of the liquid guide hole 02, its tip 51 cuts a positioning hole on the polishing cloth 03, and this hole is then used as a guide for the first positioning tip 32 of the first positioning rod 3. This design ensures that when the first positioning rod 3 and the bracket 1 are introduced and pushed through the liquid guide hole 02, the first positioning tip 32 can accurately pass through the cut positioning hole, thereby ensuring the alignment and precise cutting of the entire device.

[0107] The accuracy and efficiency of the entire polishing cloth opening process can be improved by pre-positioning the second positioning rod 5. This staged cutting method reduces unnecessary damage to the polishing cloth 03, while ensuring that the first blade 11 on the bracket 1 can perform the final cutting at the correct position to form the opening of the polishing cloth 03 at the outlet end of the liquid guide hole 02. This precise positioning and cutting mechanism is crucial to ensure the correct installation of the polishing cloth 03 and the uniformity of the polishing process.

[0108] In some embodiments, the liquid guiding hole 02 includes a first hole body 021 and a second hole body 022 that are connected to each other. The second hole body 022 is located at the outlet end of the liquid guiding hole 02. The aperture of the second hole body 022 is larger than the aperture of the first hole body 021.

[0109] The cutting edge of the polishing cloth 03 is pressed against the inner wall of the second hole 022;

[0110] The expansion body 13 is braced against the inner wall of the first hole 021 .

[0111] In this embodiment, the liquid guiding hole 02 is designed to include two connected holes, namely, a first hole 021 and a second hole 022. This structural design enables the liquid guiding hole 02 to have different apertures, wherein the second hole 022 is located at the outlet end of the liquid guiding hole 02, and its aperture is larger than that of the first hole 021. Such a design helps to achieve different functions in different areas.

[0112] The cutting edge of the polishing cloth 03 is designed to abut against the inner wall of the second hole 022. This design allows the polishing cloth 03 to fit closely to the outlet end of the liquid guide hole 02, ensuring that the polishing liquid can be distributed to the polishing cloth 03 outside the liquid guide hole 02 after being output from the outlet end of the liquid guide hole 02. At the same time, this abutment design also helps to maintain the stability of the polishing cloth 03 during the polishing process and reduce the movement of the polishing cloth 03 caused by the flow of polishing liquid or polishing pressure.

[0113] The expansion body 13 is designed to be supported tightly on the inner wall of the first hole body 021. This support helps to fix the position of the bracket 1 in the liquid guide hole 02, ensuring that the bracket 1 will not be displaced or fall off during the polishing process. The tight fit between the expansion body 13 and the inner wall of the first hole body 021 provides a stable support for the bracket 1, thereby ensuring the stability and reliability of the entire polishing cloth hole opening device.

[0114] Through this structural design, the polishing cloth opening device can achieve accurate positioning and fixation of the polishing cloth 03, while ensuring that the polishing liquid in the liquid guide hole 02 can flow smoothly and be evenly distributed, thereby improving the efficiency and quality of the polishing process. This design takes into account both the stability of the polishing cloth 03 and the functional requirements of the liquid guide hole 02, reflecting the innovation and practicality of this technical solution.

[0115] Please refer to FIG. 4 , which is a cross-sectional view of the adjustment seat provided in an embodiment of the present application.

[0116] In some embodiments, the expansion body 13 is provided with deformation grooves 131, and the deformation grooves 131 are distributed in the circumferential direction of the bracket 1, and the expansion body 13 is provided with internal threads 132;

[0117] The adjustment seat 2 comprises:

[0118] The fixing member 21 gradually expands its outer circumference in the direction from the outlet end to the inlet end of the liquid guide hole 02. The outer portion of the fixing member 21 is provided with an external thread 211. The fixing member 21 is threadedly matched with the expansion body 13. The expansion of the expansion body 13 is achieved by rotating the fixing member 21.

[0119] The elastic member 22 is sleeved on the fixing member 21 , and the outer periphery of the elastic member 22 is interference fit with the inner wall of the liquid guide hole 02 .

[0120] In this embodiment, the design of the expansion body 13 includes deformation grooves 131, which are distributed in the circumferential direction of the bracket 1. This design allows the expansion body 13 to undergo a predetermined deformation when subjected to an external force, thereby adapting to different installation conditions and closely fitting the inner wall of the liquid guide hole 02. The presence of the deformation grooves 131 improves the flexibility and adaptability of the expansion body 13, ensuring that a good fixing effect can be achieved in liquid guide holes 02 of different sizes.

[0121] The expansion body 13 is also provided with internal threads 132, which are matched with the external threads 211 on the fixing member 21 in the adjustment seat 2. The expansion body 13 can be expanded by rotating the fixing member 21, so that the expansion body 13 can be tightly supported on the inner wall of the first hole 021. This thread matching method provides a simple and effective mechanism to adjust the tension of the expansion body 13 and ensure the stable position of the bracket 1 in the liquid guide hole 02.

[0122] The adjustment seat 2 includes a fixing member 21 and an elastic member 22. The fixing member 21 is designed to gradually expand at the periphery, especially in the direction from the outlet end to the inlet end of the liquid guide hole 02, and this design helps the fixing member 21 to be stably fixed in the liquid guide hole 02. The fixing member 21 is provided with an external thread 211 on the outside, which cooperates with the internal thread 132 of the expansion body 13, and the expansion degree of the expansion body 13 is controlled by rotating the fixing member 21.

[0123] The elastic member 22 is sleeved on the fixing member 21, and its outer periphery forms an interference fit with the inner wall of the liquid guide hole 02. This fit further improves the stability of the adjustment seat 2 in the liquid guide hole 02 and ensures a good sealing effect. The material and design of the elastic member 22 enable it to provide the necessary elastic support when the fixing member 21 expands, and also helps to buffer the pressure and impact generated during the polishing process.

[0124] In some cases, the outer edge of the elastic member 22 is provided with a wing ring 221, which protrudes outward. Since the radial dimension of the wing ring 221 is larger than the aperture dimension of the first hole body 021 of the liquid guide hole 02 when the elastic member 22 enters the liquid guide hole 02 along with the fixing member 21, the wing ring 221 will be squeezed by the liquid guide hole 02 and deformed, thereby achieving an interference fit between the elastic member 22 and the liquid guide hole 02, forming a sealed space, and preventing the polishing liquid from flowing into the cutting edge of the polishing cloth 03. In particular, the elastic member 22 is made of rubber.

[0125] In some cases, the structural design of the bracket 1 can be further integrated, such as integrating the deformation groove 131 and the limiting groove 133 into the same structure, or using the deformation groove 131 to realize the function of the limiting groove 133, which should also fall within the scope of the description of this embodiment.

[0126] In some cases, the adjusting seat 2 is further provided with a positioning groove 212, and the limiting groove 133 on the bracket 1 and the positioning groove 212 on the adjusting seat 2 are used to control the adjusting seat 2 to achieve cooperation with the bracket 1. Specifically, after the bracket 1 is installed into the liquid guide hole 02 and the first positioning rod 3 and the positioning block 4 are taken out, the adjusting seat 2 is installed, and a tool is used to insert the limiting groove 133 of the bracket 1 (at this time, it is preferred to use the deformation groove 131 on the bracket 1 to achieve cooperation with the positioning structure 31, and the limiting groove 133 is used for tool insertion), the bracket 1 is pressed to fix its position, and then another tool is used to insert the positioning groove 212 of the adjusting seat 2, and the adjusting seat 2 is controlled to rotate relative to the bracket 1, so that the adjusting seat 2 is transferred into the bracket 1, until the bracket 1 is completely expanded and fixed in the liquid guide hole 02.

[0127] In this embodiment, the limit groove 133 and the positioning groove 212 are structures set to facilitate tool manipulation of the bracket 1 and the adjustment seat 2. In addition to this method, there may be other methods of manipulating the bracket 1 and the adjustment seat 2, which should also fall within the scope of the description of this embodiment.

[0128] The present application also provides a polishing cloth hole opening method, which is applied to the above-mentioned polishing cloth hole opening device. The polishing cloth hole opening method comprises:

[0129] Align the bracket 1 with the outlet end of the liquid guide hole 02 of the polishing plate 01, and prepare to install it into the liquid guide hole 02;

[0130] The polishing cloth 03 at the outlet end of the liquid guiding hole 02 is cut by the first cutter body 11 of the bracket 1, and the cut edge of the polishing cloth 03 is pressed into the liquid guiding hole 02 and held against the inner wall of the outlet end of the liquid guiding hole 02 by the cloth pressing body 12 of the bracket 1;

[0131] Align the adjustment seat 2 with the entrance end of the liquid guide hole 02, and prepare to install the adjustment seat 2;

[0132] The expansion body 13 of the adjusting seat 2 is matched with the bracket 1 so that the expansion body 13 is tightly supported on the inner wall of the liquid guide hole 02 after matching, so that the bracket 1 is fixed in the liquid guide hole 02 .

[0133] In this embodiment, the polishing cloth hole opening method provided describes in detail how to use the above-mentioned polishing cloth hole opening device to accurately install and fix the polishing cloth. This method ensures the correct position and fastening of the polishing cloth to achieve the best polishing effect during the polishing process.

[0134] First, the bracket 1 is aligned with the outlet end of the liquid guide hole 02 of the polishing plate 01, and is ready to be installed into the liquid guide hole 02. This step is crucial because it ensures the correct positioning of the bracket 1, laying the foundation for the subsequent cutting and fixing steps.

[0135] Next, the polishing cloth 03 at the outlet of the liquid guide hole 02 is cut by the first cutter body 11 of the holder 1. This cutting action needs to be precise to ensure that the edge of the polishing cloth 03 is neat and burr-free. Subsequently, the cloth pressing body 12 of the holder 1 presses the cut edge of the polishing cloth 03 into the liquid guide hole 02 and holds it against the inner wall of the outlet of the liquid guide hole 02. This step ensures a tight fit between the polishing cloth 03 and the liquid guide hole 02, providing stable support for the polishing cloth 03.

[0136] Then, the adjusting seat 2 is aligned with the entrance end of the liquid guiding hole 02, and is ready to be installed in the adjusting seat 2. The installation of the adjusting seat 2 is to further fix the bracket 1 and ensure that the position of the bracket 1 in the liquid guiding hole 02 is stable.

[0137] Finally, the expansion body 13 of the adjusting seat 2 and the bracket 1 is matched so that the expansion body 13 is tightly supported on the inner wall of the liquid guide hole 02 after matching, so that the bracket 1 is fixed in the liquid guide hole 02. This step ensures that the bracket 1 will not be displaced or fall off during the polishing process by means of mechanical locking, and also ensures the stability of the polishing cloth 03, avoiding the risk of scratching the wafer due to the movement or falling off of the polishing cloth 03.

[0138] This polishing cloth hole opening method realizes the precise installation and fixation of the polishing cloth 03 through the cooperation of precise steps and mechanical structure, improves the efficiency and quality of the polishing process, and reduces the risk of polishing liquid leakage and wafer damage. The implementation of this method enables the polishing cloth hole opening device to perform its function more reliably and meet the needs of high-precision polishing.

[0139] In some embodiments, before the bracket 1 is prepared to be installed into the liquid guide hole 02, the following steps are further included:

[0140] Paste the polishing cloth 03 onto the polishing disc 01;

[0141] Install the positioning block 4 at the inlet end of the liquid guide hole 02 of the polishing plate 01;

[0142] Insert the second positioning rod 5 into the positioning block 4, so that the second positioning rod 5 is installed from the inlet end of the liquid guide hole 02, insert the second positioning rod 5, and cut the polishing cloth 03 at the outlet end of the liquid guide hole 02 through the second positioning tip 51 of the second positioning rod 5;

[0143] Take out the second positioning rod 5 from the inlet end of the liquid guide hole 02;

[0144] The bracket 1 is matched with the first positioning rod 3 .

[0145] In this embodiment, the polishing cloth hole-making method first involves several key preparation steps before the bracket 1 is installed into the liquid guide hole 02. These steps ensure the correct installation and positioning of the polishing cloth 03, laying the foundation for subsequent precise hole-making.

[0146] First, the polishing cloth 03 is pasted on the polishing disc 01 to ensure that the polishing cloth 03 can be stably fixed in position during the polishing process. The fixation of the polishing cloth 03 is very important to ensure the uniformity and consistency of the polishing effect.

[0147] Next, the positioning block 4 is installed at the inlet end of the liquid guide hole 02 of the polishing plate 01. The positioning block 4 provides stable support and guidance for subsequent positioning rods (such as the second positioning rod 5 and the first positioning rod 3), ensuring that the positioning rods can accurately move along the axial direction of the liquid guide hole 02.

[0148] Then, the second positioning rod 5 is inserted into the positioning block 4 and installed through the inlet end of the liquid guide hole 02. The insertion of the second positioning rod 5 enables its second positioning tip 51 to cut the polishing cloth 03 at the outlet end of the liquid guide hole 02. This step forms a precise positioning hole on the polishing cloth 03, creating conditions for the installation and fixation of the bracket 1.

[0149] After the cutting is completed, the second positioning rod 5 is taken out from the inlet end of the liquid guide hole 02, in order to clear obstacles in the subsequent steps and ensure that the bracket 1 can be smoothly installed.

[0150] Finally, the bracket 1 cooperates with the first positioning rod 3. This step is to use the first positioning rod 3 to guide and drive the bracket 1 to be inserted into the liquid guide hole 02. The positioning structure 31 of the first positioning rod 3 cooperates with the limiting groove 133 of the bracket 1 to ensure the accurate positioning and stable movement of the bracket 1 during the loading process.

[0151] Through these steps, the polishing cloth opening method ensures the precise installation and fixation of the polishing cloth 03, providing a solid foundation for achieving efficient and uniform polishing results. The precise execution of these steps is essential to improving the efficiency and quality of the entire polishing process.

[0152] In some embodiments, cutting the polishing cloth 03 by the holder 1 includes:

[0153] The first positioning tip 32 of the first positioning rod 3 is aligned with the cutting position of the second positioning tip 51, and the first positioning rod 3 is inserted. The polishing cloth 03 at the outlet end of the liquid guide hole 02 is cut by the first positioning tip 32, the second blade 33 of the first positioning rod 3, and the first blade 11 of the bracket 1. The first positioning rod 3 is inserted into the positioning block 4, and the cutting edge of the polishing cloth 03 is pressed into the liquid guide hole 02 by the cloth pressing body 12 of the bracket 1 and is held against the inner wall of the outlet end of the liquid guide hole 02, and the first positioning rod 3 is pushed out of the positioning block 4;

[0154] The first positioning rod 3 is taken out from the inlet end of the liquid guide hole 02 .

[0155] In this embodiment, a method for accurately cutting and fixing the polishing cloth 03 is described, which is achieved by using the cooperation of the bracket 1 and the first positioning rod 3. The process begins with the first positioning tip 32 of the first positioning rod 3 being aligned with the cutting position of the second positioning tip 51, that is, the first positioning tip 32 is guided by the positioning hole, ensuring the accuracy and consistency of the cutting.

[0156] Then, the first positioning rod 3 is inserted, and the first positioning tip 32, the second blade 33 of the first positioning rod 3 and the first blade 11 of the holder 1 work together to complete the cutting of the polishing cloth 03. This continuous cutting action ensures that the cutting edge is neat and uniform, and avoids unevenness or damage caused by manual operation.

[0157] The first positioning rod 3 is inserted into the positioning block 4. This step is to ensure that the first positioning rod 3 moves stably in the liquid guide hole 02 and accurately guides the bracket 1. Next, the cut edge of the polishing cloth 03 is pressed into the liquid guide hole 02 through the cloth pressing body 12 of the bracket 1 and abuts against the inner wall of the outlet end of the liquid guide hole 02. This step not only ensures the fixation of the polishing cloth 03, but also helps prevent the leakage of the polishing liquid and the movement of the polishing cloth 03 during the polishing process.

[0158] Finally, the first positioning rod 3 pushes out the positioning block 4, and this action indicates that the polishing cloth 03 has been successfully fixed at the outlet end of the liquid guide hole 02. Once the polishing cloth 03 is fixed, the first positioning rod 3 can be taken out from the inlet end of the liquid guide hole 02, completing its task in the polishing cloth hole opening process.

[0159] Through this series of precise operations, the polishing cloth 03 is effectively fixed at the outlet of the liquid guide hole 02, which ensures the uniform distribution of the polishing liquid and the smooth progress of the polishing process. This method improves the accuracy and reliability of the installation of the polishing cloth 03, reduces the problems that may occur during the polishing process, such as the displacement of the polishing cloth 03 or the leakage of the polishing liquid, and thus improves the efficiency and quality of the entire polishing process.

[0160] In some embodiments, the expansion body 13 is tightened by adjusting the seat 2, including:

[0161] The fixing part 21 of the adjusting seat 2 is threadably matched with the expansion body 13 of the bracket 1, and the fixing part 21 is rotated. The expansion body 13 expands under the action of the fixing part 21, so that the expansion body 13 is tightened on the inner wall of the liquid guide hole 02, so that the bracket 1 is fixed in the liquid guide hole 02, and the elastic part 22 of the adjusting seat 2 is interference fit with the inner wall of the liquid guide hole 02, and the cutting edge of the polishing cloth 03 is sealed in the liquid guide hole 02.

[0162] In this embodiment, a method of tightening the expansion body 13 by adjusting the seat 2 is described to ensure that the bracket 1 is firmly fixed in the liquid guide hole 02 and to achieve sealing of the cutting edge of the polishing cloth 03 in the liquid guide hole 02 .

[0163] First, the fixing member 21 of the adjusting seat 2 is threadedly matched with the expansion body 13 of the bracket 1. This threaded match allows the fixing member 21 to drive the expansion body 13 when rotating, so that it expands and is tightly supported on the inner wall of the liquid guide hole 02. This step is critical because it not only ensures the stability of the bracket 1 in the liquid guide hole 02, but also provides a solid support structure for the polishing cloth 03.

[0164] As the fixing member 21 rotates, the expansion body 13 expands under the action of the fixing member 21, thereby closely fitting the inner wall of the liquid guide hole 02. This close contact not only fixes the bracket 1, but also prevents leakage of the polishing liquid, ensuring the efficiency of the polishing process and the uniform distribution of the polishing liquid.

[0165] In addition, the elastic member 22 of the adjustment seat 2 is in interference fit with the inner wall of the liquid guide hole 02, further enhancing the sealing effect. The material and design of the elastic member 22 enable it to provide the necessary elastic support when the fixing member 21 expands, and also help to buffer the pressure and impact generated during the polishing process. This interference fit forms a sealed space to prevent the polishing liquid from flowing into the cutting edge of the polishing cloth 03, ensuring that the cutting edge of the polishing cloth 03 is well sealed in the liquid guide hole 02.

[0166] Through this structure and method, the cutting edge of the polishing cloth 03 is effectively sealed, preventing the leakage of the polishing liquid and the movement of the polishing cloth 03, thereby improving the quality and reliability of the polishing process. The implementation of this method enables the polishing cloth opening device to more accurately control the polishing process and meet the needs of high-precision polishing.

[0167] The present application provides a polishing cloth hole opening device and method, aiming to solve the problems that occur in the prior art when manually opening holes and trimming polishing cloth.

[0168] In the existing CdZnTe processing technology, the pasting and hole-making process of the polishing cloth needs to be done manually, which is not only inefficient, but also easily leads to problems such as polishing cloth damage and adhesive peeling. Although the pre-perforated polishing cloth can simplify some steps, it is difficult to align the holes during use, and it is easy to wrinkle and deform during the pasting process, affecting the fit between the polishing cloth and the polishing disc, and thus affecting the polishing effect. In addition, when manually trimming the position of the liquid guide hole of the polishing cloth, a variety of problems may occur, such as damage to the surface of the polishing cloth, excessive trimming, poor adhesion of the back glue, and retention of foreign matter such as thread ends, all of which may cause scratches or damage to the chip surface.

[0169] In a specific embodiment, the use process of the polishing cloth hole-making device and method is described as follows.

[0170] As shown in FIG8 , the polishing cloth 03 is pasted on the polishing disc 01, corresponding to the lower side shown in the figure, which is also the side close to the outlet end of the liquid guide hole 02, to ensure that the polishing cloth 03 is accurately positioned for subsequent operations. Next, the positioning block 4 is installed at the inlet end of the liquid guide hole 02 of the polishing disc 01 to ensure that it is stably fixed. Then, the second positioning rod 5 is inserted into the positioning block 4, installed from the inlet end of the liquid guide hole 02, and the second positioning rod 5 is inserted so that the second positioning tip 51 cuts the polishing cloth 03 at the outlet end of the liquid guide hole 02. After the cutting is completed, the second positioning rod 5 is removed from the inlet end of the liquid guide hole 02.

[0171] As shown in FIG9 , the bracket 1 is matched with the first positioning rod 3, and the first positioning tip 32 is aligned with the cutting position of the second positioning tip 51, and the first positioning rod 3 is inserted to achieve continuous cutting. In this step, the polishing cloth 03 is cut in sequence by the first positioning tip 32, the second blade 33 of the first positioning rod 3, and the first blade 11 of the bracket 1, and the first positioning rod 3 is inserted into the positioning block 4 at the same time.

[0172] As shown in FIG10 , the cut edge of the polishing cloth 03 is pressed into the liquid guide hole 02 by the cloth pressing body 12 of the bracket 1 and abutted against the inner wall of the outlet end of the liquid guide hole 02, and the first positioning rod 3 pushes out the positioning block 4 to complete the fixation of the polishing cloth. After the polishing cloth is cut and fixed, the first positioning rod 3 is taken out from the inlet end of the liquid guide hole 02.

[0173] As shown in FIG. 11 , the adjustment seat 2 is aligned with the entrance end of the liquid guide hole 02 , and is ready to be installed into the adjustment seat 2 .

[0174] As shown in FIG12 , the fixing member 21 of the adjustment seat 2 is matched with the expansion body 13 of the bracket 1 through the internal thread 132 and the external thread 211, and the fixing member 21 is rotated to make the expansion body 13 expand under the action of the fixing member 21 and be supported on the inner wall of the liquid guide hole 02, thereby fixing the bracket 1. The elastic member 22 of the adjustment seat 2 is interference fit with the inner wall of the liquid guide hole 02, ensuring that the cutting edge of the polishing cloth 03 is sealed in the liquid guide hole 02, completing the entire polishing cloth hole opening process.

[0175] It should be noted that many of the components mentioned in this application are universal standard parts or components known to those skilled in the art, and their structures and principles can be learned by those skilled in the art through technical manuals or through conventional experimental methods.

[0176] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0177] The above is a detailed introduction to the polishing cloth hole-making device and method provided by the present application. This article uses specific examples to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and its core idea of ​​the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. A polishing cloth hole opening device, characterized in that: include: A support seat is provided with a first cutter body, a cloth pressing body and an expansion body, wherein the support seat is installed at the outlet end of the liquid guide hole of the polishing plate, the first cutter body is used to cut the polishing cloth at the outlet end of the liquid guide hole, and the cloth pressing body is used to press the cutting edge of the polishing cloth into the liquid guide hole and abut against the inner wall of the outlet end of the liquid guide hole; The adjusting seat is installed at the inlet end of the liquid guiding hole, and the adjusting seat cooperates with the expansion body to realize that the expansion body is tightly supported on the inner wall of the liquid guiding hole after cooperation, so as to realize the fixation of the bracket in the liquid guiding hole.

2. The polishing cloth hole opening device according to claim 1, characterized in that: The adjusting seat is in sealing contact with the liquid guiding hole, so as to prevent the polishing liquid from flowing toward the cutting edge of the polishing cloth through the gap between the adjusting seat and the liquid guiding hole.

3. The polishing cloth hole opening device according to claim 1, characterized in that: Also includes: The first positioning rod is provided with a positioning structure. The first positioning rod cooperates with the bracket through the positioning structure, so that the first positioning rod drives the bracket to enter the liquid guide hole.

4. The polishing cloth hole opening device according to claim 3, characterized in that: The first positioning rod is also provided with a first positioning tip and a second knife body, and the first positioning tip, the second knife body and the first knife body cut the polishing cloth in sequence.

5. The polishing cloth hole opening device according to claim 4, characterized in that: Also includes: A positioning block is arranged at the inlet end of the liquid guiding hole, the positioning block cooperates with the first positioning rod, and the positioning block is used to position the first positioning rod to move along the axial direction of the liquid guiding hole.

6. The polishing cloth hole opening device according to claim 5, characterized in that: Also includes: The second positioning rod is provided with a second positioning tip, and the second positioning rod cooperates with the positioning block to enable the second positioning rod to be installed from the inlet end of the liquid guide hole, move along the axial direction of the liquid guide hole, and cut the polishing cloth at the outlet end of the liquid guide hole.

7. The polishing cloth hole opening device according to claim 1, characterized in that: The liquid guiding hole comprises a first hole body and a second hole body which are in communication with each other, the second hole body is located at the outlet end of the liquid guiding hole, and the aperture of the second hole body is larger than the aperture of the first hole body; The cutting edge of the polishing cloth is pressed against the inner wall of the second hole body; The expansion body is tightly supported on the inner wall of the first hole body.

8. The polishing cloth hole opening device according to claim 1, characterized in that: The expansion body is provided with deformation grooves, the deformation grooves are distributed in the circumferential direction of the bracket, and the expansion body is provided with threads inside; The adjustment seat comprises: A fixing member, the outer circumference of which gradually expands in the direction from the outlet end of the liquid guide hole to the inlet end, the outer portion of the fixing member is provided with a thread, the fixing member and the expansion body are threadedly matched, and the expansion body is expanded by rotating the fixing member; The elastic member is sleeved on the fixing member, and the outer periphery of the elastic member is interference fit with the inner wall of the liquid guide hole.

9. A method for making holes in a polishing cloth, applied to the polishing cloth making hole device according to any one of claims 1 to 8, characterized in that: The polishing cloth opening method comprises: Align the bracket with the outlet end of the liquid guide hole of the polishing plate, and prepare to install it into the liquid guide hole; Cutting the polishing cloth at the outlet end of the liquid guiding hole by the first knife body of the bracket, and pressing the cut edge of the polishing cloth into the liquid guiding hole and against the inner wall of the outlet end of the liquid guiding hole by the cloth pressing body of the bracket; Align the adjustment seat with the entrance end of the liquid guide hole, and prepare to install the adjustment seat; The adjustment seat cooperates with the expansion body of the bracket, so that the expansion body is tightly supported on the inner wall of the liquid guide hole after cooperation, so that the bracket is fixed in the liquid guide hole.

10. The method for opening holes in a polishing cloth according to claim 9, characterized in that: Before the bracket is prepared to be installed into the liquid guide hole, the method further comprises: Stick the polishing cloth to the polishing disc; Installing the positioning block at the inlet end of the liquid guide hole of the polishing plate; Inserting the second positioning rod into the positioning block, so that the second positioning rod is installed from the inlet end of the liquid guide hole, inserting the second positioning rod, and cutting the polishing cloth at the outlet end of the liquid guide hole through the second positioning tip of the second positioning rod; Taking out the second positioning rod from the inlet end of the liquid guide hole; Engage the bracket with the first positioning rod; Cutting the polishing cloth by the holder comprises: The first positioning tip of the first positioning rod is aligned with the cutting position of the second positioning tip, the first positioning rod is inserted, and the polishing cloth at the outlet end of the liquid guide hole is cut along the cutting position of the second positioning tip by the first positioning tip, the second blade of the first positioning rod, and the first blade of the bracket, the first positioning rod is inserted into the positioning block, and the cutting edge of the polishing cloth is pressed into the liquid guide hole and abutted against the inner wall of the outlet end of the liquid guide hole by the cloth pressing body of the bracket, and the first positioning rod pushes out the positioning block; Taking out the first positioning rod from the inlet end of the liquid guide hole; The expansion body is supported by the adjustment seat, comprising: The fixing part of the adjustment seat is matched with the expansion body of the bracket through threads, and the fixing part is rotated. The expansion body expands under the action of the fixing part, so that the expansion body is tightened on the inner wall of the liquid guide hole, so that the bracket is fixed in the liquid guide hole, the elastic part of the adjustment seat is interference fit with the inner wall of the liquid guide hole, and the cutting edge of the polishing cloth is sealed in the liquid guide hole.

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